INFICON PSG55x User Manual

Pirani Standard Gauge

PSG550
PSG552
PSG554

tina60e1-a (2011-04) 1

Operating Manual

Incl. EC Declaration of Conformity

Product Identification

In all communications with INFICON, please specify the infor­mation given on the product nameplate. For convenient refer­ence copy that information into the space provided below.

INFICON AG, LI-9496 Balzers

Model:
PN:
SN:
V W ; LPS

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Validity

This document applies to products of the PSG55x series.

Part numbers of standard products are indicated below. OEM
products have other part numbers and different parameter
settings (e.g. factory setting of setpoint) as defined in the
corresponding ordering information.

3PIx-0xx-xxxx

Flange

1 ⇒ DN 16 ISO-KF

2 ⇒ DN 16 ISO-KF long tube

4 ⇒ DN 16 CF-F

5 ⇒ DN 16 CF-R long tube
6 ⇒ DN 25 ISO-KF
D ⇒ 4 VCR female
E ⇒ 8 VCR female

F ⇒ 1/8" NPT

⇒ Flange 29×29 mm

K

M ⇒ 4 VCR 90° female
N ⇒ 7/16-20 UNF male

Unit

0 ⇒ mbar
1 ⇒ Torr
2 ⇒ Pa

3 ⇒ micron

Filament

Tungsten

⇒

1
2 ⇒ Nickel

⇒

coated

Al

3

2O3

⇒

6

7 ⇒ Nickel, galvanically isolated
8 ⇒ Al

galvanically isolated

Tungsten,

coated, galvanically isolated

2O3

tina60e1-a (2011-04) 3

3PIx-0xx-xxxx

Measuring

signal

Interface

Receptacle

Display

Switching function

*) Solid state relays
**) Mechanical relays

The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this

document correspond to gauges with the DN 16 ISO-KF vacuum
connection and display. They apply to gauges with other vacuum
connections by analogy.

We reserve the right to make technical changes without prior
notice.

0.61 ... 10 V

0 ⇒
1 ⇒ 1.2 ... 8.5 V

2 ⇒ 0.375 ... 5.529 V
3 ⇒ 1.57 ... 8.875 V

0 ⇒ None (analoge)
1 ⇒ DeviceNet
2 ⇒ Profibus

0 ⇒ FCC
1 ⇒ D-Sub, 9-pin
2 ⇒ D-Sub, 15-pin HD

⇒ D-Sub, 15-pin HD, RS485 INF

4

0 ⇒ None
1 ⇒ Display
2 ⇒ 2 switching functions

4 ⇒ Display & 2 switching functions *)
6 ⇒ 2 switching functions **)

*)

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Intended Use

The Pirani Standard Gauge PSG55x has been designed for
vacuum measurement of gases in the pressure range of

-5

5×10

… 1000 mbar.

They must not be used for measuring flammable or combustible
gases in mixtures containing oxidants (e.g. atmospheric oxygen)
within the explosion range.

The gauge is intended for operation in connection with an
INFICON Vacuum Gauge Controller VCG401, 402, 403 or with
another suitable controller.

Trademark

VCR® Swagelok Marketing Co.

Patents

EP 0689669 B1, 0689670 B1
US Patent 5608168

Scope of Delivery

1× gauge
1× pin for adjusting settings via buttons
1× Operating Manual English
1× Operating Manual German

tina60e1-a (2011-04) 5

Contents

Product Identification 2
Validity 3
Intended Use 5
Trademark 5
Patents 5
Scope of Delivery 5

1

Safety 8

1.1 Symbols Used 8

1.2 Personnel Qualifications 8

1.3 General Safety Instructions 9

1.4 Liability and Warranty 9

2 Technical Data 10

2.1 Output Signal vs. Pressure 18

2.2 Gas Type Dependence 23

3 Installation 24

3.1 Vacuum Connection 24

3.2 Power Connection 27

3.2.1 FCC 68, 8-pin Connector 28

3.2.2 D-Sub, 9-pin Connector 29

3.2.3 D-Sub, 15-pin HD Connector 30

3.2.4 D-Sub, 15-pin HD, RS485 INF Connector 31

3.2.5 DeviceNet Connector 32

3.2.6 Profibus Connector 33

4 Operation 34

4.1 Status Indication and Displays 34

4.2 Gas Type Dependence 38

4.3 Switching Functions SP1, SP2 38

4.4 Diagnostic Port (RS232C Interface) 44

4.5 DeviceNet Operation 45

4.6 Profibus Operation 48

5 Deinstallation 49

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6 Maintenance, Repair 51

6.1 Adjusting the Gauge 51

6.2 Replacing the Sensor 53

6.3 Troubleshooting 54

7 Returning the Product 55
8 Disposal 56
9 Accessories 57
10 Spare Parts 58

Further Information 61

ETL Certification 62
EC Declaration of Conformity 63

For cross-references within this document, the symbol (→  XY)
is used, for cross-references to further documents, listed under
"Further Information", the symbol (→  [Z]).

tina60e1-a (2011-04) 7

1 Safety

1.1 Symbols Used

DANGER

Information on preventing any kind of physical injury.

WARNING

Information on preventing extensive equipment and environ­mental damage.

Caution

Information on correct handling or use. Disregard can lead to
malfunctions or minor equipment damage.

Notice

<…> Labeling

1.2 Personnel Qualifications

Skilled personnel

All work described in this document may only be carried out by
persons who have suitable technical training and the neces­sary experience or who have been instructed by the end-user
of the product.

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1.3 General Safety Instructions

• Adhere to the applicable regulations and take the necessary
precautions for the process media used.

Consider possible reactions with the product materials.
Consider possible reactions (e.g. explosion) of the process

media due to the heat generated by the product.

• Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider the
safety instructions in this document.

• Before beginning to work, find out whether any vacuum com­ponents are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contamin­ated parts.

Communicate the safety instructions to all other users.

1.4 Liability and Warranty

INFICON assumes no liability and the warranty becomes null
and void if the end-user or third parties

• disregard the information in this document

• use the product in a non-conforming manner

• make any kind of interventions (modifications, alterations etc.)

on the product

• use the product with accessories not listed in the product
documentation.

The end-user assumes the responsibility in conjunction with the
process media used.

Gauge failures due to contamination or wear and tear, as well as
expendable parts (e.g. filament) are not covered by the warranty.

tina60e1-a (2011-04) 9

2 Technical Data

For further technical data for gauges with serial inter-

faces →  [3], [4], [5].

Measurement principle thermal conductance acc. to

Measurement range 5×10
Accuracy (N

5×10

1×10

)

2

-4

… 1×10-3 mbar

-3

… 100 mbar

100 … 1000 mbar

Resolution (at 1000 mbar)

Repeatability (N

1×10

)

2

-3

… 100 mbar

Output signal (measurement signal)

Voltage range
3PIx-0xx-xxx0

3PIx-0xx-xxx1 0 … +8.5 V
3PIx-0xx-xxx2 0 … +5.529 V
3PIx-0xx-xxx3 0 … +8.875 V

Measurement range
3PIx-0xx-xxx0

3PIx-0xx-xxx1 +1.2 … +8.5 V
3PIx-0xx-xxx2 +0.375 … +5.529 V
3PIx-0xx-xxx3 +1.57 … +8.875 V

Error signal 0 … 0.05 V

Voltage vs. pressure
3PIx-0xx-xxx0

3PIx-0xx-xxx1 1 V/decade, logarithmic
3PIx-0xx-xxx3 1 V/decade, logarithmic
3PIx-0xx-xxx2

Pirani

-5

… 1000 mbar

±50% of reading

±15% of reading

±50% of reading

±0.15% of reading

±2% of reading

0 … +10 V

+0.61 … +10 V

1.286 V/decade, logarithmic

→  20

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Output impedance

Load impedance

Response time

Gauge identification

FCC 68 (+0.61 … +10 V)

HV adjustment at <10-5 mbar

2 × 4.7 Ω, short circuit-proof

≥10 kΩ
<10 ms

27 kΩ

Solid state relays switching functions SP1,

SP2, ATM
Setting range (N
Hysteresis
Switching characteristics

) 5.0×10-5 … 1000 mbar

2

1)

10% of threshold

1)

Low Trip Point

Contact rating <30 VAC/DC, ≤0.3 A

resistive

closed LED lit solid
open LED off

Switching time <30 ms

Mechanical relays switching functions SP1,

SP2, ATM
Setting range (N
Hysteresis
Switching characteristics

) 5.0×10-5 … 1000 mbar

2

1)

10% of threshold

1)

Low Trip Point

Type 1 floating contact (n.o.) per

switching function
Contact rating <30 VAC/DC, ≤1 A

resistive

closed LED lit solid
open LED off

Switching time <30 ms

Diagnostic port Jack connector 2.5 mm,

3-pin

1

)

The hysteresis and the switching characteristics can be

programmed via the serial interface or the diagnostic port.

tina60e1-a (2011-04) 11

Supply

DANGER

The gauge may only be connected to power sup­plies, instruments, or control devices that conform
to the requirements of a grounded protective extra­low voltage (SELV) and limited power source
(LPS), Class 2. The connection to the gauge has to
be fused.

Supply voltage

at the gauge
Ripple ≤1 V

Power consumption

without fieldbus
DeviceNet
Profibus

Fuse to be connected

Electrical connection

3PIx-0xx-x0xx

2)

Class 2 / LPS

+15 … +30 VDC

pp

≤2.5 W

≤3 W

2)

1 AT

≤3 W

FCC 68
3PIx-0xx-x1xx D-Sub 9-pin, male
3PIx-0xx-x2xx D-Sub 15-pin HD, male
3PIx-0xx-x4xx D-Sub 15-pin HD, RS485

INF, male

Sensor cable shielded

Cable length

RS232C operation

Grounding concept

Vacuum connection to
signal common

2

0.14 mm

/conductor

≤100 m

≤30 m

→ "Power Connection"

connected via 10 kΩ, 10 nF

2)

INFICON controllers fulfill this requirement.

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RS232C / RS485 interface

Transmission rate
Data format

57600 baud (default)

binary

8 data bits

one stop bit

no parity bit

no handshake

→ "Power Connection"

For further information on the RS232C / RS485C interface
→  [3].

DeviceNet interface

Specification, data format,
communication protocol

→  [6]

Interface, physical CAN bus

Data rate (adjustable via <RATE>
switch)

125 kBaud

250 kBaud

500 kBaud (default)

<P> (125 kBaud,

250 kBaud, 500 kBaud

programmable via

DeviceNet, →  [4])

Node address (MAC ID)
(Adjustable via <ADDRESS>,
<MSD>, <LSD> switches)

0 … 63dec (63dec default)

<P> (0 … 63 programmable

via DeviceNet, →  [4])

DeviceNet connector Micro-Style, 5-pin, male

Cable shielded, special DeviceNet

cable, 5 conductors

→  32, →  [7]
Cable length, system wiring according to DeviceNet

specifications, →  [6], [7]

For further information on the DeviceNet interface →  [4]

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Profibus interface

Specification, data format,
communication protocol

→  [8]
Interface, physical RS485

Data rate

Node address

Local
(Adjustable via hexadecimal
<ADDRESS>, <MSD>,
<LSD> switches)

Default setting
Via Profibus

(hexadecimal <ADDRESS>
switches set to >7D

)

(>125

dec

hex

≤12 Mbaud (→  [5])

00 … 7D

01C

00 … 7D

hex

(0 … 125

hex

(0 … 125

hex

Profibus connection D-Sub, 9-pin, female

Cable shielded, special Profibus

cable, →  33, →  [9]

Cable length, system wiring according to Profibus speci-

fications, →  [8], [9]

For further information on the Profibus interface →  [5]

Materials exposed to vacuum

Vacuum connection
Filament
3PI1 / 6-0xx-xxxx
3PI2 / 7-0xx-xxxx
3PI3 / 8-0xx-xxxx
Feedthrough

3)

Orifice
Further materials

stainless steel 1.4435

W

Ni

ceramic coated

glass

stainless steel

Ni, NiFe, stainless steel

1.4301

dec)

dec

)

3)

Only versions DN 16 ISO-KF and DN 16 CF-F.

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Internal volume

DN 16 ISO-KF
DN 16 ISO-KF, long tube
DN 16 CF-F
DN 16 CF-R, long tube
DN 25 ISO-KF

®

female

4 VCR
8 VCR® female
1/8" NPT
Flange 29×29 mm

®

4 VCR

90°, female

7/16-20 UNF

4.7 cm

14.5 cm

3

8 cm

14 cm

5.5 cm

5.5 cm

3

7 cm

5.2 cm

4.9 cm

7.9 cm

5.2 cm3

3

3

3

3

3

3

3

3

Permissible pressure (absolute) ≤5 bar
Bursting pressure (absolute) 10 bar

Permissible temperatures

Operation
Vacuum connection
long tube 4)
Filament
Storage

Relative humidity

Year's mean
During 60 days

4)

+10 °C … +50 °C

≤80 °C

≤250 °C

<160 °C

–20 °C … +65 °C

≤65% (no condensation)

≤85% (no condensation)

Mounting orientation any
Use indoors only, altitude up to

2000 m NN

Degree of protection IP 40

Weight

without fieldbus interface
with fieldbus interface

115 g …130 g

230 g … 250 g

4)

For horizontal mounting orientation only. During bakeout,

measurement range, accuracy, and repeatability may deviate from
specifications.

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Dimensions [mm]

45

16

21.531.5
DN 25 ISO-KF

29.2×29.2 mm

36.5 34

7/16-20 UNF

4-VCR 90°

24.4

36

14.5

28

1/8" NPT

DN 16 ISO-KF

4 VCR

30.9 42.7

130.8

DN 16 ISO-KF long

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79.5 ≈65

DN 16 CF-F

46.3

8 VCR

130.2

DN 16 CF-R long

DeviceNet

67

BUS RATE STATUS

ADDRESS

LSDMSD

I/O

DIA

RS485

67

ADDRESS

LSDMSD

SP1 SP2 ST

62

AE

DIA

BUS

Profibus

10.8

NET MOD

56

ST

SP1SP2

ADJ

RATE

62

AE62AE

56

ADJ

321ON

ADDRESS

26

08

EA

67

BUS

4

4

26
08
EA

C

C

LSDMSD

I/O

DIA

SP1SP2

56

ST

ADJ

tina60e1-a (2011-04) 17

2.1 Output Signal vs. Pressure

Measurement range 0.61 … 10 V

Pressure p

1E+06

1E+05

1E+04

1E+03

1E+02

1E+01

Error

1E+00

1E–01

1E–02

1E–03

1E–04

1E–05

0.0

0.61

p = 10

3.02.52.01.51.00.5 4.03.5 5.04.5 6.05.5 7.06.5 8.07.5 9.08.5 10.09.5 10.5

Output signal U [V]

0.778(U-c)

⇔

U = c +1.286log10 p

valid in the range 5×10-5 mbar <p< 1000 mbar

U p c U p c

[V] [mbar] 6.143 [V] [micron] 2.448

[V] [µbar] 2.287 [V] [Pa] 3.572

[V] [Torr] 6.304 [V] [kPa] 7.429

[V] [mTorr] 2.448

where p pressure

U output signal
c constant (pressure unit dependent)

Pa

mbar

Torr

O

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Measurement range 1.2 … 8.5 V

Pressure p

1E+05

1E+04

1E+03

1E+02

1E+01

1E+00

Error

1E–01

1E–02

1E–03

1E–04

1E–05

0.0 0.5 1.0 1.5 2.5 3.5 4.5 5.5 6.5 7.5 8.52.0 3.0 4.0 5.0 6.0 7.0 8.0 9.0

1.2

p = 10

Output signal U [V]

(U-c)

⇔

U = c + log10 p

Pa

mbar

Torr

valid in the range 5×10-5 mbar <p< 1000 mbar

U p c U p c

[V] [mbar] 5.5 [V] [micron] 2.625

[V] [µbar] 2.5 [V] [Pa] 3.5

[V] [Torr] 5.625 [V] [kPa] 6.5

[V] [mTorr] 2.625

where p pressure

U output signal
c constant (pressure unit dependent)

tina60e1-a (2011-04) 19

Measurement range 0.375 … 5.529 V

Signal U Pressure p

[V] [mbar] [Pa] [Torr]

0.375 <5×10-5 <6.65×10-3 <5×10-5

0.376 0.000133322 0.013332237 0.0001

0.377 0.000266645 0.026664474 0.0002

0.379 0.000666612 0.066661184 0.0005

0.384 0.001333224 0.133322368 0.0010

0.392 0.002666447 0.266644736 0.0020

0.417 0.006666118 0.66661184 0.0050

0.455 0.013332237 1.33322368 0.0100

0.523 0.026664474 2.66644736 0.0200

0.682 0.066661184 6.6661184 0.0500

0.876 0.133322368 13.3322368 0.1000

1.155 0.266644736 26.6644736 0.2000

1.683 0.66661184 66.661184 0.5000

2.217 1.33322368 133.322368 1.0000

2.842 2.66644736 266.644736 2.0000

3.675 6.6661184 666.61184 5.0000

4.206 13.3322368 1333.22368 10.0000

4.577 26.6644736 2666.44736 20.0000

4.846 66.661184 6666.1184 50.0000

4.945 133.322368 13332.2368 100.0000

5.019 266.644736 26664.4736 200.0000

5.111 399.967104 39996.7104 300.0000

5.224 533.289472 53328.9472 400.0000

5.329 666.61184 66661.184 500.0000

5.419 799.934208 79993.4208 600.0000

5.495 933.256576 93325.6576 700.0000

5.529 1000 100000 750.0637

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