INFICON XTM-2 User Manual

OPERATING MANUAL

XTM/2

Deposition Monitor

IPN 074-186

OPERATING MANUAL

XTM/2

Deposition Monitor

IPN 074-186S

TWO TECHNOLOGY PLACE
EAST SYRACUSE, NY 13057-9714 USA

Phone: [phone]
Fax: [phone]
Email: [e-mail]

VISIT US ON THE WEB AT www.inficon.com

©2001 INFICON 092304

ALTE LANDSTRASSE 6
LI-9496 BALZERS, LIECHTENSTEIN

Phone: [phone]
Fax: [phone]
Email: reach.liechtenstein@ inficon.com

BONNER STRASSE 498
D-50968 COLOGNE, GERMANY

Phone: [phone]
Fax: [phone]
Email: reach.germany@i nficon.com

Trademarks

The trademarks of the products mentioned in this manual are held by the companies that
produce them.

INFICON®, CrystalSix® are trademarks of INFICON Inc.

All other brand and product names are trademarks or registered trademarks of their respective companies.

The information contained in this manual is believed to be accurate and reliable. However, INFICON assumes
no responsibility for its use and shall not be liable for any special, incidental, or consequential damages related
to the use of this product.

©2001 All rights reserved.
Reproduction or adaptation of any part of this document without permission is unlawful.

DECLARATION

OF

CONFORMITY

This is to certify that this equipment, designed and manufactured by:

INFICON Inc.

2 Technology Place

East Syracuse, NY 13057

USA

meets the essential safety requirements of the European Union and is placed on the
market accordingly. It has been constructed in accordance with good engineering
practice in safety matters in force in the Community and does not endanger the safety
of persons, domestic animals or property when properly installed and maintained and
used in applications for which it was made.

Equipment Description: XTM/2 Deposition Monitor, including the Oscillator

Package and Crystal Sensor as properly installed.

Applicable Directives: 73/23/EEC as amended by 93/68/EEC

89/336/EEC as amended by 93/68/EEC

Applicable Standards: EN 61010-1 : 1993, Fixed Equipment

EN 55011, Group 1, Class A : 1991

EN 50082-2 : 1995

CE Implementation Date: January 3, 1995

Revised to include EMC Directive: January 2, 1997

Authorized Representative: Gary W. Lewis
Vice President - Quality Assurance
INFICON Inc.

ANY QUESTIONS RELATIVE TO THIS DECLARATION OR TO THE SAFETY OF INFICON'S PRODUCTS SHOULD BE
DIRECTED, IN WRITING, TO THE QUALITY ASSURANCE DEPARTMENT AT THE ABOVE ADDRESS.

11/14/01

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If you have additional comments, please contact INFICON.

TWO TECHNOLOGY PLACE
EAST SYRACUSE, NY 13057-9714 USA

Phone: [phone]
Fax: [phone]
Email: [e-mail]

VISIT US ON THE WEB AT www.inficon.com

ALTE LANDSTRASSE 6
LI-9496 BALZERS, LIECHTEN STEIN

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Fax: [phone]
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BONNER STRASSE 498
D-50968 COLOGNE, GERMANY

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Fax: [phone]
Email: [e-mail]

BUSINESS REPLY MAIL

FIRST CLASS PERMIT NO. 49 EAST SYRACUSE, NEW YORK

POSTAGE WILL BE PAID BY ADDRESSEE

INFICON INC.
Two Tech no logy Plac e
East Syracuse, New York 13057-9714

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WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products
manufactured by it, or by an affiliated company and sold by it, and described on
the reverse hereof, to be, for the period of warranty coverage specified below, free
from defects of materials or workmanship under normal proper use and service.
The period of warranty coverage is specified for the respective products in the
respective Seller instruction manuals for those products but shall in no event
exceed one (1) year from the date of shipment thereof by Seller. Seller's liability
under this warranty is limited to such of the above products or parts thereof as are
returned, transportation prepaid, to Seller's plant, not later than thirty (30) days
after the expiration of the period of warranty coverage in respect thereof and are
found by Seller's examination to have failed to function properly because of
defective workmanship or materials and not because of improper installation or
misuse and is limited to, at Seller's election, either (a) repairing and returning the
product or part thereof, or (b) furnishing a replacement product or part thereof,
transportation prepaid by Seller in either case. In the event Buyer discovers or
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Should you require further assistance, please contact INFICON.

TWO TECHNOLOGY PLACE
EAST SYRACUSE, NY 13057-9714 USA

Phone: [phone]
Fax: [phone]
Email: [e-mail]

VISIT US ON THE WEB AT www.inficon.com

ALTE LANDSTRASSE 6
LI-9496 BALZERS, LIECHTEN STEIN

Phone: [phone]
Fax: [phone]
Email: [e-mail]

BONNER STRASSE 498
D-50968 COLOGNE, GERMANY

Phone: [phone]
Fax: [phone]
Email: [e-mail]

XTM/2 Operating Manual

Table Of Contents

Chapter 1

Introduction and Specifications

1.1 Instrument Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1

1.1.1 Notes, Cautions, Warnings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-1

1.1.2 General Safety Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2

1.1.3 Earth Ground. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3

1.1.4 Main Power Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-4

1.2 Introduction to the Instrument . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-5

1.3 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6

1.3.1 Specifications XTM/2. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6

1.3.1.1 General. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6

1.3.1.2 Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6

1.3.1.3 Recorder Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6

1.3.1.4 Input/Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-7

1.3.1.5 Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-7

1.3.1.6 Process Variable Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7

1.3.1.7 Hardware Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7

1.3.1.8 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-8

1.3.1.9 Mechanical . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8

1.3.2 Transducer Specifications (optional) . . . . . . . . . . . . . . . . . . . . . . . . . . .1-8

1.3.3 XIU (Crystal Interface Unit) Specifications . . . . . . . . . . . . . . . . . . . . . . . 1-9

1.4 Guide to the Use of the Manual. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-9

1.5 How To Contact Customer Support. . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10

1.5.1 Application Support. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-10

1.5.2 Field Service and Repair Support . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-10

IPN 074-186S

1.5.3 Returning Your Instrument . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-10

Chapter 2

Quick Use Guide

2.1 Unpacking, Initial Inspection and Inventory . . . . . . . . . . . . . . . . . . . . . .2-1

2.1.1 Unpacking and Inspection Procedures . . . . . . . . . . . . . . . . . . . . . . . . .2-1

2.1.2 Inventory. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-1

2.1.2.1 XTM/2 System Configuration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-2

2.1.2.2 Ship Kit - XTM/2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-2

2.2 Voltage Selection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3

2.3 Installation Guide and Schematic . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-7

TOC - 1

XTM/2 Operating Manual

2.4 XTM/2 Front Panel Description. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9

2.4.1 XTM/2 Front Control Panel Description . . . . . . . . . . . . . . . . . . . . . . . . 2-9

2.4.2 XTM/2 Display Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11

2.5 XTM/2 Rear Panel Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-13

2.5.1 Power Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-14

2.5.2 Configuration Switches 1 & 2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-15

2.5.3 Grounding Stud . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-17

2.5.4 System I/O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-18

2.5.5 RS232 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-19

2.5.6 Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-20

2.5.7 International Warning Symbol for

Users and Technicians. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-20

2.5.8 Recorder . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-20

2.5.9 Comm. Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-21

2.5.10 Manufacturer’s Identific ation and

Serial Number Plate. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-21

2.6 Operation as a Deposition Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-22

2.6.1 Monitoring - Systems Without a Source Shutter . . . . . . . . . . . . . . . . . 2-22

2.6.2 Monitoring - Systems with a Source Shutter. . . . . . . . . . . . . . . . . . . . 2-23

2.6.3 Rate Sampling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-23

2.7 Nontraditional Applications. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-24

2.7.1 Etching. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-24

2.7.2 Immersion in Liquids . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-24

2.7.3 Biological . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-25

2.7.4 Measurement of Liquids. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-25

2.7.5 Use as a Frequency Counter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-25

2.7.6 Contamination Detection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-26

Chapter 3

TOC - 2

Installation

3.1 Installing the Instrument - Details . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1

3.1.1 Control Unit Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1

3.2 Electrical Grounding and Shielding Requirements . . . . . . . . . . . . . . . . 3-1

3.2.1 Verifying / Establishing Earth Ground. . . . . . . . . . . . . . . . . . . . . . . . . . 3-2

3.2.2 Connections to Earth Ground. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2

3.2.3 Minimizing Noise Pickup from External Cabling . . . . . . . . . . . . . . . . . . 3-3

3.3 Connection to Rear Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4

3.3.1 The BNC Connectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4

3.3.2 The "D" Shell Connectors. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4

3.4 Sensor Selection Guide . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6

3.5 Guidelines for Transducer Installation . . . . . . . . . . . . . . . . . . . . . . . . . 3-7

IPN 074-186S

XTM/2 Operating Manual

3.5.1 Sensor Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7

3.5.2 CrystalSix . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-10

3.5.3 Check List for Transducer Installation . . . . . . . . . . . . . . . . . . . . . . . . .3-11

3.6 Use of the Test Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-11

3.6.1 Operational Test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12

3.7 Input and Output Details . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-14

3.7.1 Relays. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-14

3.7.2 Inputs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-15

3.7.3 Chart Recorder . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-15

3.8 Computer Communications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-16

3.8.1 Communications Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-16

3.8.1.1 IEEE Settings for a National Instruments IEEE-GPIB Board . . . . . . . .3-17

3.8.2 Basic Command Structure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-18

3.8.3 Service Requests and Message Available. . . . . . . . . . . . . . . . . . . . . .3-20

3.8.4 Datalogging. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-21

3.8.5 Computer Command Details . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-22

3.8.5.1 Echo Command. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-22

3.8.5.2 Hello Command. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-22

3.8.5.3 Query Command. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-22

3.8.5.4 Update Command . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-23

3.8.5.5 Status Command. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-23

3.8.5.6 Remote Command . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-26

3.8.6 Examples of RS232 Programs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-27

3.8.6.1 Example of SEMI II Program. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-29

3.8.7 Example of IEEE488 Program. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-31

Chapter 4

Programming System Operation Details

IPN 074-186S

4.1 State and Measurement System Sequencing . . . . . . . . . . . . . . . . . . . .4-1

4.2 State Descriptions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3

4.3 Parameter Limits. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4

4.4 Crystal Fail . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-4

4.5 Crystal Fail Inhibit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-5

4.6 Crystal Life and Starting Frequency. . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5

Chapter 5

Calibration and Measurement

5.1 Importance of Density, Tooling and Z-ratio . . . . . . . . . . . . . . . . . . . . . .5-1

5.2 Determining Density . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1

5.3 Determining Tooling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-2

TOC - 3

XTM/2 Operating Manual

5.4 Laboratory Determination of Z-ratio . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-3

5.5 Measurement Theory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4

5.5.1 Basics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4

5.5.2 Monitor Crystals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-6

5.5.3 Period Measurement Technique. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-8

5.5.4 Z-Match Technique . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-9

5.5.5 Active Oscillator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-9

5.5.6 ModeLock Oscillator. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-12

Chapter 6

Adjustments and Problems

6.1 LCD Contrast Adjustment. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1

6.2 Error Messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1

6.2.1 Powerup Errors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1

6.2.2 Parameter Update Errors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-2

6.2.3 Other Errors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-2

6.3 Troubleshooting Guide. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-2

6.3.1 Major Instrument Components, Assemblies and Mating Connectors. . . 6-3

6.3.2 Troubleshooting the Instrument . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-4

6.3.3 Troubleshooting Transducers/Sensors . . . . . . . . . . . . . . . . . . . . . . . . . 6-7

6.3.4 Troubleshooting Computer Communications . . . . . . . . . . . . . . . . . . . 6-11

6.3.5 Leaf Spring Concerns. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-14

6.4 Replacing the Crystal. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-15

6.4.1 Standard and Compact. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-16

6.4.2 Shuttered and Dual Sensors. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-17

6.4.3 Bakeable Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-17

6.4.4 Sputtering Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-18

6.4.5 Crystal Snatcher. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-19

6.5 Crystal Sensor Emulator

IPN 760-601-G1 or 760-601-G2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-20

6.5.1 Diagnostic Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-21

6.5.1.1 Measurement System Diagnostic Procedure . . . . . . . . . . . . . . . . . . . 6-21

6.5.1.2 Feed-Through Or In-Vacuum Cable

Diagnostic Procedure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-22

6.5.1.3 Sensor Head Or Monitor Crystal

Diagnostic Procedure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-23

IPN 074-186S

6.5.1.4 System Diagnostics Pass But

6.5.3.1 Compatible Sensor Heads . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-25

TOC - 4

Crystal Fail Message Remains. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-24

6.5.2 % XTAL Life. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-24

6.5.3 Sensor Cover Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-25

6.5.3.2 Incompatible Sensor Heads. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-25

6.5.4 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-26

Appendix A

Index

XTM/2 Operating Manual

Table of Densities and Z-ratios

IPN 074-186S

TOC - 5

XTM/2 Operating Manual

TOC - 6

IPN 074-186S

Introduction and Specifications

1.1 Instrument Safety

1.1.1 Notes, Cautions, Warnings

When using this manual, please pay attention to the NOTES, CAUTIONS and
WARNINGS found throughout. For the purposes of this manual they are
defined as follows:

NOTE: Pertinent information that is useful in achieving maximum instrument

efficiency when followed.

CAUTION

Failure to heed these messages could result in damage
to the instrument or the loss o f data.

XTM/2 Operating Manual

Chapter 1

WARNING

Failure to heed these messages coul d result in
personal injury.

WARNING

Dangerous voltages are present. Failure to heed these
messages could result in personal injury.

IPN 074-186S

1 - 1

XTM/2 Operating Manual

1.1.2 General Safety Information

WARNING

There are no user serviceabl e compon ents within the
instrument case.

Potentially lethal voltages are present when the line
cord or system I/O are connected.

Refer all maintenance to qualified personnel.

CAUTION

This instrument contains delicate circuitry which is
susceptible to transient power line voltages.
Disconnect the line cord whenever making any
interface connections. Refer all mainte nance to
qualified personnel.

1 - 2

IPN 074-186S

1.1.3 Earth Ground

This instrument is connected to earth via a sealed three-core (three-conductor)
power cable, which must be plugged into a socket outlet with a protective earth
terminal. Extension cables must always have three condu ctors, inclu ding a
protective earth conductor.

WARNING

XTM/2 Operating Manual

Never interrupt the protective earth circuit.

Any interruption of the protective earth connection
inside or outside the instrument, or disconnection of
the protective earth terminal is likely to make the
instrument dangerous.

This symbol indicates where the protective earth
ground is connected inside the instrume nt. Never
unscrew or loosen this connection .

IPN 074-186S

1 - 3

XTM/2 Operating Manual

1.1.4 Main Power Connection

WARNING

This instrument has a line voltage present on the
primary circuits whenever it is plugged into a main
power source.

Never remove the covers from the instrument during
normal operation.

There is no operator serviceable items within this
instrument.

Removal of the top or bottom covers must be done
only by a technically qualified person.

In order to comply with accepted safety standards, this
instrument must be installed into a rack system which
contains a mains switch. This switch must break both
sides of the line when it is open and it must not
disconnect the safety ground.

1 - 4

IPN 074-186S

1.2 Introduction to the Instrument

The XTM/2 is an economical quartz crystal transducer type depo sition/etch
process monitor that incorporates the patented (US#5,117,192 — May
27,1992) ModeLock measurement system. This inn ovative sy stem provide s
process security, measurement speed and precision at a level that no active
oscillator based instrument can provide.Th e Liquid Crystal Display of the
XTM/2 is easily read and keeps the operator continuously informed with
pertinent deposition data including rate, thickne ss and elapsed time. Special
messages such as Crystal Fail, achievement of setp oints, measuremen t units
or etch mode are clearly presented to reduce operator uncertainty and eliminate
the possibility of costly mistakes. Basic instrument operat ion is easily verified
with a built-in test mode and preprogrammed parameters.The se t up and
storage of nine different process variable sets is provided.The RATE and
THICKNESS displays as well as the limit parameters may be read and
programmed in the traditional kÅ units or directly in mass (mg, µgm,ngm).

All units come with RS232 (and support Data Rates to 9,600 Baud).The SECSII
protocol is supported.The optional computer interface is IEEE-488. Four relays
are used to manipulate various external devices such as source and sensor
shutters, heaters or valves.There are five input line s to provide the ab ility to
sense and react to discrete external signals.The se instruments are fully
compatible with the complete family of INFICON transducers, excluding Dual
and CrystalSix®.

XTM/2 Operating Manual

IPN 074-186S

1 - 5

XTM/2 Operating Manual

1.3 Specifications

At the time of this manual’s writing, the specifications for perform ance are as
published below. INFICON continuously improves its products, affecting the
instrument’s performance.

1.3.1 Specifications XTM/2

1.3.1.1 General

Usage . . . . . . . . . . . . . . . . . . . . . .Indoor use only.

Altitude Range. . . . . . . . . . . . . . . .Up to 2000 m (6,561 ft)

Pollution Degree . . . . . . . . . . . . . .1—No pollution occ urs

Overvoltage Category . . . . . . . . . .2—Local level, appliances, etc.

Cleaning . . . . . . . . . . . . . . . . . . . .The unit enclosure can be safely cleaned

with a mild detergent or spray cleaner
designed for that purpose. Care should be
taken to prevent any cleaner from entering
the unit.

1.3.1.2 Measurement

Crystal Range & Precision. . . . . . .6.0 to 5.0 MHz +/- 0.1 Hz

Thickness & Rate Resolution* . . . .0. 123Å (per 250 msec samp le)

Thickness accuracy . . . . . . . . . . . .0.5%

Measurements/second . . . . . . . . . .4 max., user selectable multiple

1.3.1.3 Recorder Output

Voltage . . . . . . . . . . . . . . . . . . . . .0 to ±10 v

Resolution . . . . . . . . . . . . . . . . . . .13 bits over full range

Update Rate . . . . . . . . . . . . . . . . .4 Hz

Function. . . . . . . . . . . . . . . . . . . . .Rat e / Thickness / Ma ss

(per 250 msec sample)

* Material density = 1.0; Z-ratio = 1.0;

crystal frequency = 6 MHz.
Å/S/M = Angstroms/second/measurement.

measurement averaging to 16 seconds in
four ranges.

IPN 074-186S

(one reserved for sign)

1 - 6

Maximum Load . . . . . . . . . . . . . . .2.0 KOhm (100 Ohm internal impedance)

1.3.1.4 Input/Output

Inputs . . . . . . . . . . . . . . . . . . . . . . 5 TTL inputs

Outputs . . . . . . . . . . . . . . . . . . . . . 4 SPST 2.5 amp relays rated

Scan/Change Rate . . . . . . . . . . . . 4 Hz

1.3.1.5 Display

Type . . . . . . . . . . . . . . . . . . . . . . . 2x multiplexed custom LCD

Thickness Resolution* . . . . . . . . . 1 Å

Rate Resolution* . . . . . . . . . . . . . .1 Å for 1 to 99.9 Å/sec

Update Rate . . . . . . . . . . . . . . . . . 1 Hz

XTM/2 Operating Manual

@ 30 V(dc) / 30 V(ac) / 42 V(peak) max.

1 Å for 100 to 999 Å/sec

* Other units appropriately scaled.

Enhanced resolution is achieved when
multiple measurement averaging is
employed.

1.3.1.6 Process Variable Storage

Quantity . . . . . . . . . . . . . . . . . . . . 9 sets

Variables per set. . . . . . . . . . . . . . 6

1.3.1.7 Hardware Interface

Sensors . . . . . . . . . . . . . . . . . . . . 1, 15 pin D-Sub type

I/O

Standard (inputs/outputs) . . . . 5/4

Optional . . . . . . . . . . . . . . . . . None

Communications

Standard . . . . . . . . . . . . . . . . . RS232C, 9 Pin D-Sub type

Optional . . . . . . . . . . . . . . . . . IEEE-488

IPN 074-186S

Chart Recorder. . . . . . . . . . . . . . . BNC

1 - 7

XTM/2 Operating Manual

1.3.1.8 Operation

Power Requirements

"115 V" input range. . . . . . . . . .90 to 132 V(ac), 49 to 61 Hz, 45 VA max.

fused at 3/8 Amp Type T fuse

"230 V" input range . . . . . . . . .180 to 264 V(ac), 49 to 61 Hz, 45 VA max.

fused at 3/16 Amp Type T fuse

Operating Temperature . . . . . . . . .0 to 50 °C (32 to 122 °F)

1.3.1.9 Mechanical

Size . . . . . . . . . . . . . . . . . . . . . . . .3.5" H x 8" W x 12" D

(89 mm H x 203 mm W x 305 D mm)

Weight. . . . . . . . . . . . . . . . . . . . . .6 lb. (2.7 kg)

1.3.2 Transducer Specifications (optional)

Max. Bakeout
Temperature*

Standard Sensor 130 °C 1.063" x 1.33" x .69" high

Standard Sensor
with Shutter

Sputtering Sensor 105 °C 1.36" dia. x .47" high

Compact Sensor 130 °C 1.11" x 1.06" x 1.06" high

Compact Sensor
with Shutter

UHV Bakeable
Sensor

UHV Bakeable
Sensor with Shutter

Shutter Assembly 400 °C two models available N/A 300-series SS 750-210-G1

*For Bake only; waterflow is required for actual deposition monitoring. These temperatures are conservative maximum
device temperatures, limited by the properties of Teflon (PTFE) at higher temperatures. In usage, the water cooling allows
operation in environments that are significantly elevated, without deleterious affects.

130 °C 1.06" x 2.24" x .69" high

130 °C 2.08" x 1.62" x 1.83" high

450 °C 1.35" x 1.38" x .94" high

400 °C 1.46" x 1.37" x 1.21" high

Size (Max. Envelope) Water Tube &

Coax Length

(27 mm dia. x 34 mm x 17.5 mm high)

(27 mm dia. x 57 mm x 17.5 mm high)

(34.5 mm dia. x 11.8 mm high)

(28 mm x 27 mm x 27 mm high)

(53 mm x 41 mm x 46 mm high)

(34 mm x 35 mm x 24 mm high)

(37 mm x 35 mm x 3.1 mm high)

30" (762 mm) 304 SS 750-211-G1

30" (762 mm) 304 SS 750-211-G2

30" (762 mm) Au-plated BeCu 007-031

30" (762 mm) 304 SS 750-213-G1

30" (762 mm) 304 SS 750-213-G2

12" (305 mm)
20" (508 mm)
30" (762 mm)

12" (305 mm)
20" (508 mm)
30" (762 mm)

Body & Holder IPN

304 SS 007-219

007-220
007-221

304 SS 750-012-G1

750-012-G2
750-012-G3

750-005-G1
(Sputtering)

IPN 074-186S

1 - 8

XTM/2 Operating Manual

1.3.3 XIU (Crystal Interface Unit) Specifications

The XTM/2 Series instruments use a new type of "passive intelligent" oscillator.
It is available with cable lengths of 15’ (4.572 m), 30’ (9.144 m), 50’ (15.24 m),
and 100’ (30.28 m) as IPN 757-305-G15, G30, G50, or G100, respectively.
Conventional, active style oscillators do not work with these instrum ents.
In-vacuum cable lengths to a maximum of 2 m (6.6’) are supported with this new
technology.

1.4 Guide to the Use of the Manual

This manual is configured to be used by both experie nced and inexperie nced
deposition process engineers. For those with significant experience, especially
on INFICON controllers, nearly all pertinent in formation is containe d in Chapter

2, Quick Use Guide. Other sections contain the details that supplement the

information in the quick use section .
Every user should read the complete ma nual. It i s strong ly sugges ted that t he

user or installer follow the following plan to gain the most information in the
shortest period of time.

 Register the instrument to receive updates and important information from

the factory.

 Read section 1. 1.1, Not es, Cautions , Warnings, on page 1-1 to understand

the safety related issues.

 Read Chapter 2, Quick Use Guide, to become familiar with the instrument’s

needs and capabilities. Use the other sections of the manual to supplement
areas where you do not feel you have an adequate unde rstanding of the
material. Throughout Chapter 2 there will be frequent re ferences to the
manual sections that provide more detailed informati on. The final sec tions
of the Chapter 2 build the understanding of the full use of the instrument in
a logical progression, as suggested in section 2.3 on page 2-7.

IPN 074-186S

WARNING

There are no user serviceable components within the
instrument case.

Potentially lethal voltages are present when the line
cord or System I/O are connected.

Refer all maintenance to qualified personnel.

1 - 9

XTM/2 Operating Manual

1.5 How To Contact Customer Support

If you cannot find the answer to your quest ion in this man ual, please contact
one of the following Customer Support groups after deciding whether:

 your difficulty is with how yo u are using the instrument—in this case, contact

Application Support.

or
 your instrument needs repair—in this case, contact Field Service and

Repair Support.

When you contact Customer Support, please have thi s manual at ha nd, alon g
with the following information:

 The serial number for your instrument.
 A description of your problem.
 An explanation of the corrective action that you may have alread y

attempted.

 The exact wording of any error messages that you have received from th e

instrument.

Within the USA, you may reach Customer Support at the following pho ne
numbers. Please contact the location that is closest to you. If you are located
outside of the USA, please contact your sales office. A complete listing of
INFICON Worldwide Service Centers is available at www.inficon.com.

1.5.1 Application Support

Austin, TX . . . . . . ph. 512-448-0488. . . . . . . . . .fax [phone]

San Jose, CA . . . . ph. 408-361-1200 ext. 12 5 . . .fax [phone]

Syracuse, NY . . . . ph. 315-434-1128. . . . . . . . . .fax [phone]

If you are located outside the USA, please contact your sales office. A complete
listing of INFICON Worldwide Service Centers is available at www.in ficon.com.

1.5.2 Field Service and Repair Support

Austin, TX . . . . . . ph. 512-448-0488. . . . . . . . . .fax [phone]

San Jose, CA . . . . ph. 408-361-1200 ext. 12 0 . . .fax [phone]

Syracuse, NY . . . . ph. 315-434-1167. . . . . . . . . .fax [phone]

If you are located outside the USA, please contact your sales office. A complete
listing of INFICON Worldwide Service Centers is available at www.in ficon.com.

1.5.3 Returning Your Instrument

Do not send your instrument without first speaking with a Customer Support
Representative.

You must obtain an RMA (Return Material Authori zation) num ber from the
Customer Support Representative. If the delivery of a package without an RMA
number is attempted, INFICON will refuse the delivery and the package will be
returned to you.

If your instrument has been exposed to process materials, you will be required
to complete a Declaration Of Contamination form.

IPN 074-186S

1 - 10

XTM/2 Operating Manual

Quick Use Guide

2.1 Unpacking, Initial Inspection and Inventory

2.1.1 Unpacking and Inspection Procedures

1 If you haven’t removed the instrument from its shipping co ntainers, do so

now.

2 Carefully examine the unit for damage that may have occurred during

shipping. This is especially important if you notice signs of obvious rough
handling on the outside of the cartons. Report any damage to the carrier and

to INFICON, immediately.

3 DO NOT discard any packing materials until you have taken inventory and

have verified proper instrument operation to you r satisfactio n. See section

2.2 on page 2-3 for voltage selection and section 3.6 on page 3-11 for test

mode operation.

Chapter 2

2.1.2 Inventory

Make sure you have received all of the necessary equipment by checking the
contents of the shipping containers with the parts list below. INFICON ships
these products on a feature-option basis. Check your order for the part number
before comparing to the lists below.

IPN 074-186S

2 - 1

XTM/2 Operating Manual

2.1.2.1 XTM/2 System Configuration

BASIC CONFIGURATION IPN # CODE#

115V 50/60 Hz 758-500-G1 1
230V 50/60 Hz 758-500-G2 2

Optional Computer Communications Module

None 757-211-G1 1
IEEE-488 Parallel 760-122-G1 2

Rack Mounting

None 0
1 Unit Mounting Kit 757-212-G1 1
2 Unit Mounting Kit 757-212-G2 2

2.1.2.2 Ship Kit - XTM/2

Both instruments are shipped with the following accessories. To find which
accessories were shipped with your unit look for th e "X" which represents the
voltage of your particular instrument and follow t hat column .

XTM/2

Sensor/feedthrough
combinations. Some
instruments are sold as
complete packages.

Qty

G2 G1

Item

(230V)(115V) IPN Number Part # and/or Description

01 - X 758-203-G1 Ship Kit - XTM/2 115V
02 X - 758-203-G2 Ship Kit - XTM/2 230V
03 - 1 068-0385 North America Power Cord, shielded
04 1 - 068-0390 European Power Cord, shielded
05 1 1 051-485 Conn 9 Pin Male D/Sub Sod. Cup
06 1 1 051-620 Cable Clamp 11.3015
07 1 1 051-483 Conn 25 Pin Female D/Sub Sod. Cup
08 1 1 051-619 Cable Clamp
09 - 1 062-011 3/8 Amp Fuse Type T
10 1 - 062-053 3/16 Amp Fuse Type T
11 4 4 070-811 8014 Bumpon Feet

In addition, you have already found a copy of thi s manual, IP N 074-186.

IPN 074-186S

2 - 2

2.2 Voltage Selection

Voltage selection is requ ired only betwee n low (nominal 10 0-120 V) and high
(nominal 200-240 V) ranges. There is no distinctio n between 50 and 60 Hz
supplies. Refer to section 1.3.1 on page 1-6 for specific power req uirements.

CAUTION

Verify that the correct fuse is in place by visually
inspecting the fuse for the proper rating. Use of an
improperly sized fuse may create a safety hazard.

For 100-120 V(ac) operation use a 3/8 Amp Type T fuse.
For 200-240 V(ac) operation use a 3/16 Amp Type T fuse.

NOTE: These instruments are designed to operate between 90 V(ac) and

132 V(ac) on Low Range and betw een 180 V(ac) and 264 V(a c) on High
Range.

XTM/2 Operating Manual

WARNING

This instrument has line voltage present on the
primary circuits whenever it is plugged into a mai n
power source.

Potentially lethal voltages are present when the line
cord, system I/O or aux I/O are connected.

This instrument must be disconnect ed from the m ain
power source before inspecting or replac ing th e fuse.

IPN 074-186S

2 - 3

XTM/2 Operating Manual

To inspect the fuse, proceed as follows.

1 Pry open the power entry module cover. See Figure 2-1.

Figure 2-1 Opening the Power Entry Module Cover

2 Pry the fuse holder ou t of the housing . See Figure 2-2.

Figure 2-2 Removing the Fuse Holder

2 - 4

IPN 074-186S