Inficon PSG550, PSG552, PSG554 Operating Manual

Pirani Standard Gauge

PSG550
PSG552
PSG554

tina60e1-a (2011-04) 1

Operating Manual

Incl. EC Declaration of Conformity

Product Identification

In all communications with INFICON, please specify the infor­mation given on the product nameplate. For convenient refer­ence copy that information into the space provided below.

INFICON AG, LI-9496 Balzers

Model:
PN:
SN:
V W ; LPS

2

tina60e1-a (2011-04)

Validity

This document applies to products of the PSG55x series.

Part numbers of standard products are indicated below. OEM
products have other part numbers and different parameter
settings (e.g. factory setting of setpoint) as defined in the
corresponding ordering information.

3PIx-0xx-xxxx

Flange

1 ⇒ DN 16 ISO-KF

2 ⇒ DN 16 ISO-KF long tube

4 ⇒ DN 16 CF-F

5 ⇒ DN 16 CF-R long tube
6 ⇒ DN 25 ISO-KF
D ⇒ 4 VCR female
E ⇒ 8 VCR female

F ⇒ 1/8" NPT

⇒ Flange 29×29 mm

K

M ⇒ 4 VCR 90° female
N ⇒ 7/16-20 UNF male

Unit

0 ⇒ mbar
1 ⇒ Torr
2 ⇒ Pa

3 ⇒ micron

Filament

Tungsten

⇒

1
2 ⇒ Nickel

⇒

coated

Al

3

2O3

⇒

6

7 ⇒ Nickel, galvanically isolated
8 ⇒ Al

galvanically isolated

Tungsten,

coated, galvanically isolated

2O3

tina60e1-a (2011-04) 3

3PIx-0xx-xxxx

Measuring

signal

Interface

Receptacle

Display

Switching function

*) Solid state relays
**) Mechanical relays

The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this

document correspond to gauges with the DN 16 ISO-KF vacuum
connection and display. They apply to gauges with other vacuum
connections by analogy.

We reserve the right to make technical changes without prior
notice.

0.61 ... 10 V

0 ⇒
1 ⇒ 1.2 ... 8.5 V

2 ⇒ 0.375 ... 5.529 V
3 ⇒ 1.57 ... 8.875 V

0 ⇒ None (analoge)
1 ⇒ DeviceNet
2 ⇒ Profibus

0 ⇒ FCC
1 ⇒ D-Sub, 9-pin
2 ⇒ D-Sub, 15-pin HD

⇒ D-Sub, 15-pin HD, RS485 INF

4

0 ⇒ None
1 ⇒ Display
2 ⇒ 2 switching functions

4 ⇒ Display & 2 switching functions *)
6 ⇒ 2 switching functions **)

*)

4

tina60e1-a (2011-04)

Intended Use

The Pirani Standard Gauge PSG55x has been designed for
vacuum measurement of gases in the pressure range of

-5

5×10

… 1000 mbar.

They must not be used for measuring flammable or combustible
gases in mixtures containing oxidants (e.g. atmospheric oxygen)
within the explosion range.

The gauge is intended for operation in connection with an
INFICON Vacuum Gauge Controller VCG401, 402, 403 or with
another suitable controller.

Trademark

VCR® Swagelok Marketing Co.

Patents

EP 0689669 B1, 0689670 B1
US Patent 5608168

Scope of Delivery

1× gauge
1× pin for adjusting settings via buttons
1× Operating Manual English
1× Operating Manual German

tina60e1-a (2011-04) 5

Contents

Product Identification 2
Validity 3
Intended Use 5
Trademark 5
Patents 5
Scope of Delivery 5

1

Safety 8

1.1 Symbols Used 8

1.2 Personnel Qualifications 8

1.3 General Safety Instructions 9

1.4 Liability and Warranty 9

2 Technical Data 10

2.1 Output Signal vs. Pressure 18

2.2 Gas Type Dependence 23

3 Installation 24

3.1 Vacuum Connection 24

3.2 Power Connection 27

3.2.1 FCC 68, 8-pin Connector 28

3.2.2 D-Sub, 9-pin Connector 29

3.2.3 D-Sub, 15-pin HD Connector 30

3.2.4 D-Sub, 15-pin HD, RS485 INF Connector 31

3.2.5 DeviceNet Connector 32

3.2.6 Profibus Connector 33

4 Operation 34

4.1 Status Indication and Displays 34

4.2 Gas Type Dependence 38

4.3 Switching Functions SP1, SP2 38

4.4 Diagnostic Port (RS232C Interface) 44

4.5 DeviceNet Operation 45

4.6 Profibus Operation 48

5 Deinstallation 49

6

tina60e1-a (2011-04)

6 Maintenance, Repair 51

6.1 Adjusting the Gauge 51

6.2 Replacing the Sensor 53

6.3 Troubleshooting 54

7 Returning the Product 55
8 Disposal 56
9 Accessories 57
10 Spare Parts 58

Further Information 61

ETL Certification 62
EC Declaration of Conformity 63

For cross-references within this document, the symbol (→  XY)
is used, for cross-references to further documents, listed under
"Further Information", the symbol (→  [Z]).

tina60e1-a (2011-04) 7

1 Safety

1.1 Symbols Used

DANGER

Information on preventing any kind of physical injury.

WARNING

Information on preventing extensive equipment and environ­mental damage.

Caution

Information on correct handling or use. Disregard can lead to
malfunctions or minor equipment damage.

Notice

<…> Labeling

1.2 Personnel Qualifications

Skilled personnel

All work described in this document may only be carried out by
persons who have suitable technical training and the neces­sary experience or who have been instructed by the end-user
of the product.

8

tina60e1-a (2011-04)

1.3 General Safety Instructions

• Adhere to the applicable regulations and take the necessary
precautions for the process media used.

Consider possible reactions with the product materials.
Consider possible reactions (e.g. explosion) of the process

media due to the heat generated by the product.

• Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider the
safety instructions in this document.

• Before beginning to work, find out whether any vacuum com­ponents are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contamin­ated parts.

Communicate the safety instructions to all other users.

1.4 Liability and Warranty

INFICON assumes no liability and the warranty becomes null
and void if the end-user or third parties

• disregard the information in this document

• use the product in a non-conforming manner

• make any kind of interventions (modifications, alterations etc.)

on the product

• use the product with accessories not listed in the product
documentation.

The end-user assumes the responsibility in conjunction with the
process media used.

Gauge failures due to contamination or wear and tear, as well as
expendable parts (e.g. filament) are not covered by the warranty.

tina60e1-a (2011-04) 9

2 Technical Data

For further technical data for gauges with serial inter-

faces →  [3], [4], [5].

Measurement principle thermal conductance acc. to

Measurement range 5×10
Accuracy (N

5×10

1×10

)

2

-4

… 1×10-3 mbar

-3

… 100 mbar

100 … 1000 mbar

Resolution (at 1000 mbar)

Repeatability (N

1×10

)

2

-3

… 100 mbar

Output signal (measurement signal)

Voltage range
3PIx-0xx-xxx0

3PIx-0xx-xxx1 0 … +8.5 V
3PIx-0xx-xxx2 0 … +5.529 V
3PIx-0xx-xxx3 0 … +8.875 V

Measurement range
3PIx-0xx-xxx0

3PIx-0xx-xxx1 +1.2 … +8.5 V
3PIx-0xx-xxx2 +0.375 … +5.529 V
3PIx-0xx-xxx3 +1.57 … +8.875 V

Error signal 0 … 0.05 V

Voltage vs. pressure
3PIx-0xx-xxx0

3PIx-0xx-xxx1 1 V/decade, logarithmic
3PIx-0xx-xxx3 1 V/decade, logarithmic
3PIx-0xx-xxx2

Pirani

-5

… 1000 mbar

±50% of reading

±15% of reading

±50% of reading

±0.15% of reading

±2% of reading

0 … +10 V

+0.61 … +10 V

1.286 V/decade, logarithmic

→  20

10

tina60e1-a (2011-04)

Output impedance

Load impedance

Response time

Gauge identification

FCC 68 (+0.61 … +10 V)

HV adjustment at <10-5 mbar

2 × 4.7 Ω, short circuit-proof

≥10 kΩ
<10 ms

27 kΩ

Solid state relays switching functions SP1,

SP2, ATM
Setting range (N
Hysteresis
Switching characteristics

) 5.0×10-5 … 1000 mbar

2

1)

10% of threshold

1)

Low Trip Point

Contact rating <30 VAC/DC, ≤0.3 A

resistive

closed LED lit solid
open LED off

Switching time <30 ms

Mechanical relays switching functions SP1,

SP2, ATM
Setting range (N
Hysteresis
Switching characteristics

) 5.0×10-5 … 1000 mbar

2

1)

10% of threshold

1)

Low Trip Point

Type 1 floating contact (n.o.) per

switching function
Contact rating <30 VAC/DC, ≤1 A

resistive

closed LED lit solid
open LED off

Switching time <30 ms

Diagnostic port Jack connector 2.5 mm,

3-pin

1

)

The hysteresis and the switching characteristics can be

programmed via the serial interface or the diagnostic port.

tina60e1-a (2011-04) 11

Supply

DANGER

The gauge may only be connected to power sup­plies, instruments, or control devices that conform
to the requirements of a grounded protective extra­low voltage (SELV) and limited power source
(LPS), Class 2. The connection to the gauge has to
be fused.

Supply voltage

at the gauge
Ripple ≤1 V

Power consumption

without fieldbus
DeviceNet
Profibus

Fuse to be connected

Electrical connection

3PIx-0xx-x0xx

2)

Class 2 / LPS

+15 … +30 VDC

pp

≤2.5 W

≤3 W

2)

1 AT

≤3 W

FCC 68
3PIx-0xx-x1xx D-Sub 9-pin, male
3PIx-0xx-x2xx D-Sub 15-pin HD, male
3PIx-0xx-x4xx D-Sub 15-pin HD, RS485

INF, male

Sensor cable shielded

Cable length

RS232C operation

Grounding concept

Vacuum connection to
signal common

2

0.14 mm

/conductor

≤100 m

≤30 m

→ "Power Connection"

connected via 10 kΩ, 10 nF

2)

INFICON controllers fulfill this requirement.

12

tina60e1-a (2011-04)

RS232C / RS485 interface

Transmission rate
Data format

57600 baud (default)

binary

8 data bits

one stop bit

no parity bit

no handshake

→ "Power Connection"

For further information on the RS232C / RS485C interface
→  [3].

DeviceNet interface

Specification, data format,
communication protocol

→  [6]

Interface, physical CAN bus

Data rate (adjustable via <RATE>
switch)

125 kBaud

250 kBaud

500 kBaud (default)

<P> (125 kBaud,

250 kBaud, 500 kBaud

programmable via

DeviceNet, →  [4])

Node address (MAC ID)
(Adjustable via <ADDRESS>,
<MSD>, <LSD> switches)

0 … 63dec (63dec default)

<P> (0 … 63 programmable

via DeviceNet, →  [4])

DeviceNet connector Micro-Style, 5-pin, male

Cable shielded, special DeviceNet

cable, 5 conductors

→  32, →  [7]
Cable length, system wiring according to DeviceNet

specifications, →  [6], [7]

For further information on the DeviceNet interface →  [4]

tina60e1-a (2011-04) 13

Profibus interface

Specification, data format,
communication protocol

→  [8]
Interface, physical RS485

Data rate

Node address

Local
(Adjustable via hexadecimal
<ADDRESS>, <MSD>,
<LSD> switches)

Default setting
Via Profibus

(hexadecimal <ADDRESS>
switches set to >7D

)

(>125

dec

hex

≤12 Mbaud (→  [5])

00 … 7D

01C

00 … 7D

hex

(0 … 125

hex

(0 … 125

hex

Profibus connection D-Sub, 9-pin, female

Cable shielded, special Profibus

cable, →  33, →  [9]

Cable length, system wiring according to Profibus speci-

fications, →  [8], [9]

For further information on the Profibus interface →  [5]

Materials exposed to vacuum

Vacuum connection
Filament
3PI1 / 6-0xx-xxxx
3PI2 / 7-0xx-xxxx
3PI3 / 8-0xx-xxxx
Feedthrough

3)

Orifice
Further materials

stainless steel 1.4435

W

Ni

ceramic coated

glass

stainless steel

Ni, NiFe, stainless steel

1.4301

dec)

dec

)

3)

Only versions DN 16 ISO-KF and DN 16 CF-F.

14

tina60e1-a (2011-04)

Internal volume

DN 16 ISO-KF
DN 16 ISO-KF, long tube
DN 16 CF-F
DN 16 CF-R, long tube
DN 25 ISO-KF

®

female

4 VCR
8 VCR® female
1/8" NPT
Flange 29×29 mm

®

4 VCR

90°, female

7/16-20 UNF

4.7 cm

14.5 cm

3

8 cm

14 cm

5.5 cm

5.5 cm

3

7 cm

5.2 cm

4.9 cm

7.9 cm

5.2 cm3

3

3

3

3

3

3

3

3

Permissible pressure (absolute) ≤5 bar
Bursting pressure (absolute) 10 bar

Permissible temperatures

Operation
Vacuum connection
long tube 4)
Filament
Storage

Relative humidity

Year's mean
During 60 days

4)

+10 °C … +50 °C

≤80 °C

≤250 °C

<160 °C

–20 °C … +65 °C

≤65% (no condensation)

≤85% (no condensation)

Mounting orientation any
Use indoors only, altitude up to

2000 m NN

Degree of protection IP 40

Weight

without fieldbus interface
with fieldbus interface

115 g …130 g

230 g … 250 g

4)

For horizontal mounting orientation only. During bakeout,

measurement range, accuracy, and repeatability may deviate from
specifications.

tina60e1-a (2011-04) 15

Dimensions [mm]

45

16

21.531.5
DN 25 ISO-KF

29.2×29.2 mm

36.5 34

7/16-20 UNF

4-VCR 90°

24.4

36

14.5

28

1/8" NPT

DN 16 ISO-KF

4 VCR

30.9 42.7

130.8

DN 16 ISO-KF long

tina60e1-a (2011-04)

79.5 ≈65

DN 16 CF-F

46.3

8 VCR

130.2

DN 16 CF-R long

DeviceNet

67

BUS RATE STATUS

ADDRESS

LSDMSD

I/O

DIA

RS485

67

ADDRESS

LSDMSD

SP1 SP2 ST

62

AE

DIA

BUS

Profibus

10.8

NET MOD

56

ST

SP1SP2

ADJ

RATE

62

AE62AE

56

ADJ

321ON

ADDRESS

26

08

EA

67

BUS

4

4

26
08
EA

C

C

LSDMSD

I/O

DIA

SP1SP2

56

ST

ADJ

tina60e1-a (2011-04) 17

2.1 Output Signal vs. Pressure

Measurement range 0.61 … 10 V

Pressure p

1E+06

1E+05

1E+04

1E+03

1E+02

1E+01

Error

1E+00

1E–01

1E–02

1E–03

1E–04

1E–05

0.0

0.61

p = 10

3.02.52.01.51.00.5 4.03.5 5.04.5 6.05.5 7.06.5 8.07.5 9.08.5 10.09.5 10.5

Output signal U [V]

0.778(U-c)

⇔

U = c +1.286log10 p

valid in the range 5×10-5 mbar <p< 1000 mbar

U p c U p c

[V] [mbar] 6.143 [V] [micron] 2.448

[V] [µbar] 2.287 [V] [Pa] 3.572

[V] [Torr] 6.304 [V] [kPa] 7.429

[V] [mTorr] 2.448

where p pressure

U output signal
c constant (pressure unit dependent)

Pa

mbar

Torr

O

18

tina60e1-a (2011-04)

Measurement range 1.2 … 8.5 V

Pressure p

1E+05

1E+04

1E+03

1E+02

1E+01

1E+00

Error

1E–01

1E–02

1E–03

1E–04

1E–05

0.0 0.5 1.0 1.5 2.5 3.5 4.5 5.5 6.5 7.5 8.52.0 3.0 4.0 5.0 6.0 7.0 8.0 9.0

1.2

p = 10

Output signal U [V]

(U-c)

⇔

U = c + log10 p

Pa

mbar

Torr

valid in the range 5×10-5 mbar <p< 1000 mbar

U p c U p c

[V] [mbar] 5.5 [V] [micron] 2.625

[V] [µbar] 2.5 [V] [Pa] 3.5

[V] [Torr] 5.625 [V] [kPa] 6.5

[V] [mTorr] 2.625

where p pressure

U output signal
c constant (pressure unit dependent)

tina60e1-a (2011-04) 19

Measurement range 0.375 … 5.529 V

Signal U Pressure p

[V] [mbar] [Pa] [Torr]

0.375 <5×10-5 <6.65×10-3 <5×10-5

0.376 0.000133322 0.013332237 0.0001

0.377 0.000266645 0.026664474 0.0002

0.379 0.000666612 0.066661184 0.0005

0.384 0.001333224 0.133322368 0.0010

0.392 0.002666447 0.266644736 0.0020

0.417 0.006666118 0.66661184 0.0050

0.455 0.013332237 1.33322368 0.0100

0.523 0.026664474 2.66644736 0.0200

0.682 0.066661184 6.6661184 0.0500

0.876 0.133322368 13.3322368 0.1000

1.155 0.266644736 26.6644736 0.2000

1.683 0.66661184 66.661184 0.5000

2.217 1.33322368 133.322368 1.0000

2.842 2.66644736 266.644736 2.0000

3.675 6.6661184 666.61184 5.0000

4.206 13.3322368 1333.22368 10.0000

4.577 26.6644736 2666.44736 20.0000

4.846 66.661184 6666.1184 50.0000

4.945 133.322368 13332.2368 100.0000

5.019 266.644736 26664.4736 200.0000

5.111 399.967104 39996.7104 300.0000

5.224 533.289472 53328.9472 400.0000

5.329 666.61184 66661.184 500.0000

5.419 799.934208 79993.4208 600.0000

5.495 933.256576 93325.6576 700.0000

5.529 1000 100000 750.0637

20

tina60e1-a (2011-04)

Valid in the range 0.375 … 2.842 V

p = a + bU + cU2 + dU3 + eU4 + fU5

a –0.02585 c 0.04563 e –0.04158

b 0.03767 d 0.1151 f 0.008737

where p pressure in Torr a, b, c, d, e, f constant

U output signal

Valid in the range 2.842 … 4.945 V

p =

a 0.1031 c –0.02322 e 0.07229

b –0.3986 d 0.07438 f –0.006866

where p pressure in Torr a, b, c, d, e, f constant

Valid in the range 4.945… 5.529 V

p =

a 100.624 c –20.5623

b –0.37679 d 0.0348656

where p pressure in Torr a, b, c, d constant

a + cU + eU2

1 + bU + dU

U output signal

a + cU

1 + bU + dU

U output signal

2

+ fU3

2

tina60e1-a (2011-04) 21

Measurement range 1.57 … 8.875 V

Pressure p

1E+05

1E+04

1E+03

1E+02

1E+01

1E+00

Error

1E–01

1E–02

1E–03

1E–04

1E–05

0.0 0.5 1.0 1.5 2.5 3.5 4.5 5.5 6.5 7.5 8.52.0 3.0 4.0 5.0 6.0 7.0 8.0 9.0

1.57

p = 10

Output signal U [V]

(U-c)

⇔

U = c + log10 p

8.875

Pa

mbar

Torr

9.5

valid in the range 5×10-5 mbar <p< 1000 mbar

U p c U p c

[V] [mbar] 5.8751 [V] [micron] 3

[V] [µbar] 2.8751 [V] [Pa] 3.8751

[V] [Torr] 6 [V] [kPa] 6.8751

[V] [mTorr] 3

where p pressure

U output signal
c constant (pressure unit dependent)

22

tina60e1-a (2011-04)

2.2 Gas Type Dependence

Indicated pressure (gauge calibrated for air)

p (mbar)

2

10

8
6

4

2

1

10

8
6

4

2

0

10

8
6

4

2

–1

10

8
6

4

2

Water vapor

–2

10

8
6

4

2

–3

10

–3

10

Calibration factors

valid for Pirani pressure range below 1 mbar

Gas type Calibration

He
Ne

Ar
Kr

Xe

24

10

6

p

–2

eff

factor C

–1

10

6

24

24

= C × indicated pressure

Gas type Calibration

0.8

1.4

1.7

2.4

3.0

H

0

10

6

24

air, O

, CO, N2

2

CO

water vapor

Freon 12

H2He Ne

6

2

2

10

1

Air
O
CO
N

24

p

(mbar)

eff

factor C

2

2

6

0.5

1.0

0.9

0.5

0.7

CO

2

Ar

Freon 12
Kr

Xe

2

10

tina60e1-a (2011-04) 23

3 Installation

3.1 Vacuum Connection

DANGER

DANGER: overpressure in the vacuum system
>1 bar

Injury caused by released parts and harm caused
by escaping process gases can result if clamps are
opened while the vacuum system is pressurized.

Do not open any clamps while the vacuum system
is pressurized. Use the type clamps which are
suited to overpressure.

DANGER

DANGER: overpressure in the vacuum system
>2.5 bar

KF flange connections with elastomer seals (e.g.
O-rings) cannot withstand such pressures. Process
media can thus leak and possibly damage your
health.

Use O-rings provided with an outer centering ring.

24

tina60e1-a (2011-04)

DANGER: protective ground
Products that are not correctly connected to ground

can be extremely hazardous in the event of a fault.
Electrically connect the gauge to the grounded

vacuum chamber. This connection must conform to
the requirements of a protective connection ac­cording to EN 61010:

• CF, NPT, UNF and VCR flanges fulfill this re­quirement.

• For gauges with a KF flange, use a conductive
metallic clamping ring.

• For gauges with a ½" tube and a 29×29 mm
flange, take appropriate measures to fulfill this
requirement.

Caution: vacuum component
Dirt and damages impair the function of the vac-

uum component.
When handling vacuum components, take appro-

priate measures to ensure cleanliness and prevent
damages.

Caution: dirt sensitive area
Touching the product or parts thereof with bare

hands increases the desorption rate.
Always wear clean, lint-free gloves and use clean

tools when working in this area.

DANGER

Caution

Caution

tina60e1-a (2011-04) 25

Mount the gauge so that no vibrations occur. The gauge

may be mounted in any orientation. To keep conden­sates and particles from getting into the measuring
chamber preferably choose a horizontal to upright posi­tion and consider using a seal with centering ring and
filter. If adjustment should be possible after the gauge
has been installed, be sure to install it so that the but­tons can be accessed with a pin.

Remove the protective lid and connect the product to the
vacuum system.

Seal with centering ring

26

Clamp

Keep the protective lid.

or

Protective lid

Seal with centering
ring and filter

tina60e1-a (2011-04)

3.2 Power Connection

Make sure the vacuum connection is properly made

(→  24).

DANGER

The gauge may only be connected to power sup­plies, instruments or control devices that conform
to the requirements of a grounded protective extra­low voltage (SELV) and limited power source
(LPS), Class 2. The connection to the gauge has to
be fused.

5)

Ground loops, differences of potential, or EMC problems

may affect the measurement signal. For optimum signal
quality, please do observe the following notes:

• Connect the cable shield to ground on one side via
the connector housing. Do not connect the other side
of the shield.

• Connect the supply common with protective ground
directly at the power supply.

• Use differential measurement input (signal common
and supply common conducted separately).

• Potential difference between supply common and
housing ≤18 V (overvoltage protection).

5)

INFICON controllers fulfill these requirements.

tina60e1-a (2011-04) 27

3.2.1 FCC 68, 8-pin Connector

If no sensor cable is available, make one according to the
following diagram. Connect the sensor cable.

SP2

Measurement

signal

Supply

SP1

4.7Ω

4.7Ω

4

Ident

6
8
7
3
5

+
–

+24V

18V

10k

10nF

Electrical connection
Pin 1 Supply

Pin 2 Supply common, GND
Pin 3 Measurement signal
or threshold SP1, SP2
Pin 4 Gauge identification
Pin 5 Signal common
Pin 6, 8 Relay SP2
Common closing contact (com)
Pin 7, 8 Relay SP1
Common closing contact (com)

28

1
2

+
–

1

8

8-pin

FCC-68

connector

tina60e1-a (2011-04)

3.2.2 D-Sub, 9-pin Connector

If no sensor cable is available, make one according to the
following diagram. Connect the sensor cable.

SP1

Measurement

signal

Supply

SP2

4.7Ω

4.7Ω

2

Ident

1
6
7
9
5
8

+
–

+24V

18V

10k

10nF

Electrical connection

Pin 1 Relay SP1, closing contact
Pin 2 Gauge identification
Pin 3 Supply
Pin 4 Supply common, GND
Pin 5 Measurement signal
or thresholds SP1, SP2
Pin 6 Relay SP1
Common contact (com)
Pin 7 Relay SP2
Common contact (com)
Pin 8 Signal common
Pin 9 Relay SP2, closing contact

3
4

+
–

5
9

6
1

D-Sub, 9-pin

female

soldering

side

tina60e1-a (2011-04) 29

3.2.3 D-Sub, 15-pin HD Connector

If no sensor cable is available, make one according to the
following diagram. Connect the sensor cable.

TxD

RxD

SP1

SP2

4.7

Ω

4.7

Ω

Measurement

signal

Supply

1

Ident

13
14
12
11
15
10

5
6

+
–

30

+24V

18V

10k

10nF

Electrical connection
Pin 1,2 Gauge identification

Pin 2 N.C.
Pin 3 Supply
Pin 4 Supply common
Pin 5 Measurement signal
Pin 6 Signal common
Pin 7,8,9 N.C
Pin 10 Relay SP1, N.O.
Pin 11 Relay SP2, N.O.
Pin 12 Relay SP2
Common contact (com)
Pin 13 RS232, TxD
Pin 14 RS232, RxD
Pin 15 Relay SP1
Common contact (com)

3
4

+
–

10

1
6

D-Sub

15-pin HD

female

soldering

side

tina60e1-a (2011-04)

155

11

3.2.4 D-Sub, 15-pin HD, RS485 INF Connector

If no sensor cable is available, make one according to the
following diagram. Connect the sensor cable.

+5V

Ω

470

1 Fail safe bias

120Ω

RS-485

Ω

470

Fail safe

3

bias

2 Termination

Measurement
signal

4.7

4.7Ω

10Ω

SP2

SP1

Ω

1
2

8
13
14
12
11
15
10

5

6

+
–

+24V

3

4

18V

10k

10nF

Electrical connection
Pin 1 RS485 B+

Pin 2 RS485 A–
Pin 3 Supply
Pin 4 Supply common
Pin 5 Measurement signal
Pin 6 Signal common
Pin 7 Reserved
Pin 8 RS485 GND
Pin 9 Reserved
Pin 10 Relay SP1, N.O.
Pin 11 Relay SP2, N.O.
Pin 12 Relay SP2, common contact (com)
Pin 13 Relay SP2, N.C.
Pin 14 Relay SP1, N.C.
Pin 15 Relay SP1, common contact (com)

tina60e1-a (2011-04) 31

10

5

1
6

D-Sub

15-pin HD

female

soldering

side

15

11

+
–

3.2.5 DeviceNet Connector

If no DeviceNet cable is available, make one according to the
following diagram. Connect the DeviceNet cable.

1

Micro-Style, 5-pin, (DeviceNet), female,

42

soldering side

5

3

Pin 1 Drain
Pin 2 Supply +15 … +30 VDC
Pin 3 Supply common GND
Pin 4 CAN_H
Pin 5 CAN_L

DeviceNet cable

32

tina60e1-a (2011-04)

3.2.6 Profibus Connector

If no Profibus cable is available, make one according to the
following diagram. Connect the Profibus cable.

1 5

D-Sub, 9-pin, male, soldering side

6 9

Pin 1, 2 Do not connect Pin 6 VP
Pin 3 RxD/TxD-P Pin 7, 9 Not connected
Pin 4
Pin 5

1)

Only to be connected if an optical link module is used.

2)

Only required as line termination for devices at both ends of bus cable

→  [9]).

(

Profibus cable Sensor cable

CNTR-P
DGND

1)

2)

Pin 8

2)

RxD/TxD-N

tina60e1-a (2011-04) 33

4 Operation

When the supply voltage is applied, the measurement signal is
available at the connector (→ "Power Connection").

Allow a stabilization period of at least 10 minutes. It is advisable
to operate the gauge continuously, irrespective of the pressure.

The gauge is factory calibrated. Due to long time operation or
contamination, a zero drift could occur. Periodically check the
zero and adjust it if necessary (adjusting the gauge →  51).

4.1 Status Indication and Displays

Light-emitting diodes (LEDs)

ST

DIA

SP1SP2

LED State Meaning

<ST> off no supply voltage

lit green measurement mode

lit red error
<SP1> lit green Relay SP 1 closed
off Relay SP 1 open
<SP2> lit green Relay SP 2 closed

off Relay SP 2 open

Status

ADJ

34

tina60e1-a (2011-04)

Liquid crystal display (LCD)

LCD Meaning

off no supply voltage
lit green measurement / parameter mode
lit red error

The display can be rotated by 180 ° via the diagnostic

port.

Put the gauge into operation

When the supply voltage is applied
the software version is briefly dis­played.

tina60e1-a (2011-04) 35

Measurement mode

Relay 1

Status of Relay 1

Relay 2

Status of Relay 2

Measurement

principle

Output signal

Setpoint

open
closed

Setpoint

open
closed

Pirani

36

Unit

Underrange

Overrange

(no display) Within range

Millibar

Torr

Pascal

Micron

Counts(no display)

tina60e1-a (2011-04)

Parameter mode

Switching functions <S>

When the <SP1> or <SP2> button is
pushed, the corresponding
threshold is displayed and the
corresponding relay flashes.

Threshold

Error display (trouble shooting →  54)

Pirani sensor error

EEPROM error

Sensor error

tina60e1-a (2011-04) 37

4.2 Gas Type Dependence

The measurement value is gas dependent. The pressure reading
applies to dry air, O
corrected (→ "Technical Data").

If the gauge is operated with an INFICON controller, a calibration
factor for correction of the actual reading can be applied (→
the corresponding controller).

2

, CO and N2. For other gases, it has to be

4.3 Switching Functions SP1, SP2

The two switching functions can be set to any pressure within
the measurement range of the gauge. A solid state relay is
provided for each switching function.

The current threshold setting

• can be read / written via the diagnostic port

• is output at the measurement signal output instead of the

pressure signal, can be measured with a voltmeter, and is
displayed on the LCD display after the <SP1> or <SP2>
button is pressed

• can be read / written via the DeviceNet, Profibus and RS485

interface.

Switching characteristics and hysteresis

The switching characteristics and the hysteresis of each set
point can be programmed (→  41).

Low Trip Point (default)

If the pressure in the vacuum system is lower than the setpoint,
the corresponding LED (<SP1> or <SP2>) is lit solid and the
corresponding relay is closed.

 of

38

tina60e1-a (2011-04)

Measurement signal

(Pressure p)

Setpoint

e

r

u

s

a

e

M

Hysteresis
(10% of threshold)

Threshold value

e

u

l

a

v

t

n

e

m

Time t

Off

OffOn

The setpoints SP1 and SP2 are factory set to the lower
measurement range limit and therefore do not switch.

High Trip Point

If the pressure in the vacuum system is higher than the setpoint,
the corresponding LED (<SP1> or <SP2>) is lit solid and the
corresponding relay is closed.

Measurement signal

(Pressure p)

Threshold value

Setpoint

Threshold value

M

e

a

s

u

Hysteresis
(10% of threshold)

r

e

m

e

n

t

v

a

l

u

e

Time t

OffOnOff

tina60e1-a (2011-04) 39

High & Low Trip Point

Both a High Trip Point and a Low Trip Point are assigned to
each setpoint. If the pressure in the vacuum system is higher
than the defined High Trip Point threshold, the corresponding
LED (<SP1> or <SP2>) is lit and the corresponding relay is
closed. If the pressure in the vacuum system is lower than the
defined Low Trip Point threshold, the correspoinding LED
(<SP1> or <SP2>) is lit and the corresponding relay is closed.

Measurement signal

(Pressure p)

Threshold value

Hysteresis

Setpoint

High T rip Po int

(10% of threshold)

Hysteresis
(10% of threshold)

40

Setpoint
Low Trip Point

OffOnOff OffOn

The setpoints can only be programmed via

• the diagnostic port (→  [3])

• the DeviceNet, Profibus and RS485 interface

(→  [3], [4], [5]).

Threshold value

Time t

tina60e1-a (2011-04)

4.3.1 Adjusting the Setpoints SP1, SP2

The switching characteristics and the hysteresis can

only be programmed via

• the diagnostic port (→  [3])

• the DeviceNet, Profibus and RS485 interface

(→  [3], [4], [5]).

The thresholds of the setpoints can be adjusted via

• the buttons on the gauge

• the diagnostic port (→  [3])

• the DeviceNet, Profibus and RS485 interface

(→  [3], [4], [5]).

If both a High Trip Point and a Low Trip Point are

assigned to a setpoint, Low Trip Point only can be
adjusted via the corresponding button on the gauge.

DANGER

DANGER: malfunction
If processes are controlled via the signal output,

keep in mind that by pushing an <SP> button the
measurement signal is suppressed and the cor­responding threshold value is output instead. This
can cause malfunctions.

Push the <SP> button only if you are sure that no
damages can arise from a malfunction.

tina60e1-a (2011-04) 41

Adjusting setpoint SP1 with button on the gauge

n Push the <SP1> button with a pin (max. ø1.1 mm) and

keep it depressed. The gauge changes to the switching
function mode and outputs the current threshold value at
the measurement value output or on the LCD for about 5 s
and the corresponding <S> on the display blinks.

The threshold setting is increased towards the upper limit
until the button is released or the limit is reached.

Keep the button
depressed

o Push the <SP1> button again:

Fine adjustment
within 0...1 s:

Change of direction
within 2...3 s:

the threshold value changes by one
unit

the threshold adjustment changes
its direction

p The <SP1> button is released for more than 5 s: the

threshold value is saved and the gauge returns to the
measurement mode.

The factory setting of the upper threshold is 10% above

the Low Trip Point and 10% below the High Trip Point
(hysteresis).

42

tina60e1-a (2011-04)

If after programming of the hysteresis the corresponding

button <SP1> or <SP2> is pushed, the factory setting of
the corresponding hysteresis (10%) is reactivated.

Programming setpoint SP1

Programmable parameters:
(→  [3], [4], [5])

Low Trip Point
Low Trip Enable
Low Trip Point Hysteresis

High Trip Point

High Trip Enable
High Trip Point Hysteresis

Setpoint Mode

Adjusting setpoint SP2

The adjustment procedure is the same as for setpoint SP1.

tina60e1-a (2011-04) 43

4.4 Diagnostic Port (RS232C Interface)

The diagnostic port <DIA> permits to output the pressure read­ing and all status information and to enter all settings at the
same time (→  [3]).

"Accessories"

→

44

tina60e1-a (2011-04)

4.5 DeviceNet Operation

Caution

Caution: data transmission errors
The attempt to operate the DeviceNet gauge with

the RS232C interface causes data transmission
errors.

This DeviceNet gauge must not be operated with
the RS232C interface.

Before the gauge is put into operation, it has to be configured for
the DeviceNet. A configuration tool and the device specific EDS
(Electronic Data Sheet) file are required for this purpose. This
software can be downloaded from our website.

Node Address Setting

Set the node address (0 … 63
<ADDRESS>, <MSD>, and <LSD> switches
(default 63
the firmware when the gauge is switched on.
If the setting deviates from the stored value,

). The node address is polled by

dec

) via the

dec

the new value is taken over into the NVRAM.
If a setting higher than 63 is made, the pre­vious node address setting remains valid.

If the <MSD> switch is in the <P> position,
the node address is programmable via the
DeviceNet (→  [4]).

tina60e1-a (2011-04) 45

Data Rate Setting

By means of the <RATE> switch, the data rate can

be set to 125 (<1>), 250 (<2>) or 500 kBaud (<5>)

(default 500 kBaud).

If the switch is in the <P> position, the data rate is

programmable via the DeviceNet (→  [4]).

Status LED

Two LEDs on the gauge inform on the gauge status and the
current DeviceNet status.

<STATUS MOD> (gauge status):

LED Meaning

off No supply
blinking green-red Selftest
lit solid green Normal operation
lit solid red Non recoverable error
blinking red Recoverable error (e.g. missing

DeviceNet power supply)

46

tina60e1-a (2011-04)

<STATUS NET> (network status):

LED Meaning

off Gauge not online:

• Selftest not yet concluded

• No supply, → "STATUS MOD"

blinking green Gauge online but no communication:

• Selftest concluded but no communica­tion to other nodes established

• Gauge not assigned to any master

lit solid green Gauge online; necessary connections

established

blinking red One or several input / output connections in

"time out" status

lit solid red Communication error. The gauge has de-

tected an error that impedes communica­tion via the network (e.g. two identical node
addresses (MAC IC) or "Bus-off")

tina60e1-a (2011-04) 47

4.6 Profibus Operation

Caution

Caution: data transmission errors
The attempt to operate the gauge with the RS232C

interface causes data transmission errors.
This gauge must not be operated with the RS232C

interface.

For operating the gauge via Profibus, prior installation of the
device specific GSD file is required on the bus master side. This
file can be downloaded from our website.

Node Address Setting

For unambiguous identification of the gauge in a Profibus en­vironment, a node address is required.

ADDRESS

4

26

08

08

EA

C

Node address >7D

The gauge starts with the node address 126
now be set via Profibus ("Set slave address", →  [5]). Addi-

Node address 0 … 125

4

26

The node address is set in hexadecimal form
(00 … 7D

EA

C

switches. It can not be defined via Profibus.

LSDMSD

hex

) via the <MSD> and <LSD>

hex

(>125

)

dec

dec

. The address can

dec

tionally, via the attribute "NO_ADD_CHG" can be defined, if fur­ther changes of the node address are permissible.

The values of the nude address and the attribute are stored non­volatile. To change these stored values, start the gauge with a
node address <126
and the attribute are deleted.

. The stored values of the nude address

dec

48

tina60e1-a (2011-04)

5 Deinstallation

DANGER

DANGER: contaminated parts
Contaminated parts can be detrimental to health

and environment.
Before beginning to work, find out whether any

parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.

Caution

Caution: vacuum component
Dirt and damages impair the function of the vac-

uum component.
When handling vacuum components, take appro-

priate measures to ensure cleanliness and prevent
damages.

Caution

Caution: dirt sensitive area
Touching the product or parts thereof with bare

hands increases the desorption rate.
Always wear clean, lint-free gloves and use clean

tools when working in this area.

n Vent the vacuum system.
o Put the gauge out of operation.

tina60e1-a (2011-04) 49

p Untighten the fastening screw(s) and disconnect the sensor

cable.

q Remove gauge from the vacuum system and install the

protective lid.

Protective lid

50

tina60e1-a (2011-04)

6 Maintenance, Repair

Gauge failures due to contamination and wear and tear,

as well as expendable parts (e.g. filament), are not
covered by the warranty.

INFICON assumes no liability and the warranty becomes null
and void if any repair work is carried out by the end-user or third
parties.

6.1 Adjusting the Gauge

The gauge is factory calibrated. Due to long time operation or
contamination, a zero drift could occur. Periodically check the
zero and adjust it if necessary.

For adjusting the zero, operate the gauge under the same con­stant ambient conditions and in the same mounting orientation
as normally.

The gauge is adjusted to default values. However, it can also be
adjusted to other pressure values, if the exact pressure value is
known (reference measurement).

n If you are using a seal with centering ring and filter, check

that they are clean or replace them if necessary
(→ "Deinstallation").

o Put the gauge into operation and operate it at atmospheric

pressure for at least 10 minutes.

tina60e1-a (2011-04) 51

p Press the <ADJ> button with a pin (max. ø1.1 mm) and the

ATM adjustment is carried out: The Pirani sensor is ad­justed to 1000 mbar by default.

ATM

HV

q Evacuate the vacuum system to p << 10

least 2 minutes.

-5

mbar and wait at

r Press the <ADJ> button with a pin and the HV adjustment

is carried out: The gauge is adjusted to 5×10
(default).

52

HV adjustment to another pressure →  [3].

If the pressure value 4.99×10-5 mbar is output at the

measurement value output or on the LCD display, the
adjustment has been successful. Otherwise, repeat the
adjustment procedure.

-5

mbar

tina60e1-a (2011-04)

6.2 Replacing the Sensor

In case of severe contamination or a malfunction, the sensor can
be replaced.

Precondition

Gauge deinstalled (→  49).

n Unscrew the hexagon socket screws and remove the

sensor without twisting it.

2 mm

o Place the new sensor without twisting it and lock it with the

screws.

tina60e1-a (2011-04) 53

6.3 Troubleshooting

In case of an error, it may be helpful to just turn off the

mains supply and turn it on again after 5 s.

Problem Possible cause Correction

Output signal per-

≈0V

manently

No supply voltage Turn on the power supply

Error Remedy the error

Gauge in an undefined status Turn the gauge off and on

FAIL PIR1 Pirani sensor defective Replace the sensor

Electronics unit not correctly

FAIL EEPROM EEPROM error Turn the gauge off and on

Replace the gauge

FAIL SENSOR Electronics unit not compatible

Replace the gauge

Sensor cable defective or not
correctly connected

mounted on sensor

with the sensor

Check the sensor cable

again after 5 s (reset)

→  53)

(

Check the connections
(electronics – sensor)

again after 5 s (reset)

Replace the sensor

→  53)

(

54

tina60e1-a (2011-04)

7 Returning the Product

WARNING

WARNING: forwarding contaminated products
Contaminated products (e.g. radioactive, toxic,

caustic or microbiological hazard) can be detrimen­tal to health and environment.

Products returned to INFICON should preferably be
free of harmful substances. Adhere to the forward­ing regulations of all involved countries and for­warding companies and enclose a duly completed

*)

Form under www.inficon.com

declaration of contamination

Products that are not clearly declared as "free of harmful sub­stances" are decontaminated at the expense of the customer.

Products not accompanied by a duly completed declaration of
contamination are returned to the sender at his own expense.

*)

.

tina60e1-a (2011-04) 55

8 Disposal

DANGER

DANGER: contaminated parts
Contaminated parts can be detrimental to health

and environment.
Before beginning to work, find out whether any

parts are contaminated. Adhere to the relevant re­gulations and take the necessary precautions when

N

Separating the components

After disassembling the product, separate its components ac­cording to the following criteria:

• Contaminated components

• Other components

56

handling contaminated parts.

WARNING

WARNING: substances detrimental to the environ­ment

Products or parts thereof (mechanical and electric
components, operating fluids etc.) can be detrimen­tal to the environment.

Dispose of such substances in accordance with the
relevant local regulations.

Contaminated components (radioactive, toxic, caustic or bio­logical hazard etc.) must be decontaminated in accordance
with the relevant national regulations, separated according to
their materials, and disposed of.

Such components must be separated according to their ma­terials and recycled.

tina60e1-a (2011-04)

9 Accessories

Centering ring with fine filter DN 16 ISO-KF 211-097

Communication adapter (2 m) 6) 303-333

Ordering No.

6)

The diagnostic software (Windows NT, XP) can be downloaded

from our website.

tina60e1-a (2011-04) 57

10 Spare Parts

When ordering spare parts, always indicate:

• all information on the product nameplate

• description and ordering number

Sensor for gauge with tungsten (W) filament Ordering

3PI1-0x1-xxxx

3PI6-0x1-xxxx

3PI1-0x2-xxxx

3PI6-0x2-xxxx

3PI1-0x4-xxxx

3PI6-0x4-xxxx

3PI1-0x5-xxxx

3PI6-0x5-xxxx

3PI1-0x6-xxxx

3PI6-0x6-xxxx

3PI1-0xD-xxxx

3PI6-0xD-xxxx

PCG550

3PI1-0xE-xxxx

3PI6-0xE-xxxx

3PI1-0xF-xxxx

3PI6-0xF-xxxx

3PI1-0xK-xxxx

3PI6-0xK-xxxx

3PI1-0xM-xxxx

3PI6-0xM-xxxx

3PI1-0xN-xxxx

3PI6-0xN-xxxx

DN 16 ISO-KF

DN 16 ISO-KF, long tube

DN 16 CF-F

DN 16 CF-R, long tube

DN 25 ISO-KF

4 VCR female

8 VCR female

1/8" NPT

29×29 mm

4 VCR 90° female

7/16-20 UNF male

No.

355-925

355-926

355-927

355-928

355-929

355-932

355-931

355-930

355-934

355-935

355-933

58

tina60e1-a (2011-04)

Sensor for gauge with nickel (Ni) filament Ordering

No.

3PI2-0x1-xxxx

3PI7-0x1-xxxx

3PI2-0x2-xxxx

3PI7-0x2-xxxx

3PI2-0x4-xxxx

3PI7-0x4-xxxx

3PI2-0x5-xxxx

3PI7-0x5-xxxx

3PI2-0x6-xxxx

3PI7-0x6-xxxx

3PI2-0xD-xxxx

3PI7-0xD-xxxx

PCG552

3PI2-0xE-xxxx

3PI7-0xE-xxxx

3PI2-0xF-xxxx

3PI7-0xF-xxxx

3PI2-0xK-xxxx

3PI7-0xK-xxxx

3PI2-0xM-xxxx

3PI7-0xM-xxxx

3PI2-0xN-xxxx

3PI7-0xN-xxxx

DN 16 ISO-KF

DN 16 ISO-KF, long tube

DN 16 CF-F

DN 16 CF-R, long tube

DN 25 ISO-KF

4 VCR female

8 VCR female

1/8" NPT

29×29 mm

4 VCR 90° female

7/16-20 UNF male

355-936

355-937

355-938

355-939

355-940

355-943

355-942

355-941

355-945

355-946

355-944

tina60e1-a (2011-04) 59

Sensor for gauge with Al2O3 coated filament Ordering

No.

3PI3-0x1-xxxx

3PI8-0x1-xxxx

3PI3-0x2-xxxx

3PI8-0x2-xxxx

3PI3-0x4-xxxx

3PI8-0x4-xxxx

3PI3-0x5-xxxx

3PI8-0x5-xxxx

3PI3-0x6-xxxx

3PI8-0x6-xxxx

3PI3-0xD-xxxx

3PI8-0xD-xxxx

PCG554

3PI3-0xE-xxxx

3PI8-0xE-xxxx

3PI3-0xF-xxxx

3PI8-0xF-xxxx

3PI3-0xK-xxxx

3PI8-0xK-xxxx

3PI3-0xM-xxxx

3PI8-0xM-xxxx

3PI3-0xN-xxxx

3PI8-0xN-xxxx

DN 16 ISO-KF

DN 16 ISO-KF, long tube

DN 16 CF-F

DN 16 CF-R long tube

DN 25 ISO-KF

4 VCR female

8 VCR female

1/8" NPT

29×29 mm

4 VCR 90° female

7/16-20 UNF male

355-947

355-948

355-949

355-950

355-951

355-954

355-953

355-952

355-956

355-957

355-955

60

tina60e1-a (2011-04)

Further Information

 [1] www.inficon.com

Operating Manual
Single-Channel Controller VGC401
tinb01d1 German
tinb01e1 English
INFICON AG, LI–9496 Balzers, Liechtenstein

 [2] www.inficon.com

Operating Manual
Two and Three Channel Measurement and Control Unit
VGC402, VGC403
tinb07d1 German
tinb07e1 English
INFICON AG, LI–9496 Balzers, Liechtenstein

 [3] www.inficon.com

Communication Protocol
Serial Interface RS232C, RS485C
PCG55x, PSG55x
tira59d1 German
tira59e1 English
INFICON AG, LI–9496 Balzers, Liechtenstein

 [4] www.inficon.com

Communication Protocol
DeviceNet™ PCG55x, PSG55x
tira58e1 English
INFICON AG, LI–9496 Balzers, Liechtenstein

 [5] www.inficon.com

Communication Protocol
Profibus PCG55x, PSG55x
tira56e1 English
INFICON AG, LI–9496 Balzers, Liechtenstein

 [6] Common Industrial Protocol (CIP™) Ed. 3.5 and

DeviceNet™ Adaption of CIP Ed. 1.6 (Open DeviceNet
Vendor Association)

 [7] www.odva.org

Open DeviceNet Vendor Association, Inc. DeviceNet™
Specifications

tina60e1-a (2011-04) 61

 [8] IEC 61158 Type 3 elements: Industrial communication

networks – Fieldbus specifications
IEC 61784: Industrial communication networks –
Fieldbus profiles

 [9] www.profibus.com

Profibus user organization

ETL Certification

ETL LISTED
The product PSG55x complies with the

requirements of the following standards:
ANSI/UL 61010-1, Issued: 2004/07/12
Ed: 2 Rev: 2008/10/28
CAN/CSA C22.2#61010-1,

3103457

Issued: 2004/07/12 Ed: 2 (R2009)

62

tina60e1-a (2011-04)

EC Declaration of Conformity

We, INFICON, hereby declare that the equipment mentioned
below complies with the provisions of the Directive relating to
electromagnetic compatibility 2004/108/EC.

Pirani Standard Gauge

PSG550, PSG552, PSG554

Standards

Harmonized and international / national standards and specifi­cations:

• EN 61000-6-2:2005

• EN 61000-6-3:2007

• EN 61010-1:2001

measurement, control and laboratory use)

• EN 61326-1:2006

measurement, control and laboratory use)

Manufacturer / Signatures

INFICON AG, Alte Landstrasse 6, LI-9496 Balzers

10 December 2010 10 December 2010

(EMC: generic immunity standard)

(EMC: generic emission standard)

(Safety requirements for electrical equipment for

(EMC requirements for electrical equipment for

Dr. Urs Wälchli
Managing Director

Claudio Christoffel
Product Manager

tina60e1-a (2011-04) 63

LI–9496 Balzers
Liechtenstein
Tel +423 / 388 3111
Fax +423 / 388 3700

Original: German tina60d1-a (2011-04) [e-mail]

t i na60e1- a

www.inficon.com