Burkert 8741 User Manual
Type 8741
Multi MFC
Mass Flow Meter (MFM) / Mass Flow Controller (MFC)
Massendurchflussmesser (MFM) / Massendurchflussregler (MFC)
Débitmètre massique (MFM) / Régulateur de débit massique (MFC)
Operating Instructions
Bedienungsanleitung
Manuel d‘utilisation
We reserve the right to make technical changes without notice.
Technische Änderungen vorbehalten.
Sous réserve de modifications techniques.
© Bürkert SAS, 2014
Operating Instructions 1403/00_EU-ML_00810383 / Original DE
Type 8741
Table of content
1 USER INSTRUCTIONS ..............................................................................5
1.1 Definition of the word "device" ...............................................5
1.2 Symbols used .............................................................................5
2 INTENDED USE .............................................................................................6
2.1 Restrictions ................................................................................. 6
3 BASIC SAFETY INFORMATION ............................................................7
4 GENERAL INFORMATION ........................................................................8
4.1 Manufacturer's address and international contacts...........8
4.2 Warranty ...................................................................................... 8
4.3 Information on the Internet ......................................................8
5 SYSTEM DESCRIPTION ............................................................................9
5.1 Design of the MFM/MFC ......................................................... 9
5.2 General description ..................................................................9
5.3 Operation of the MFM (Mass Flow Meter) .......................... 9
5.4 Operation of the MFC (Mass Flow Controller) .................10
5.5 Operation of the sensor in the MFM/MFC ........................12
6 TECHNICAL DATA .....................................................................................13
6.1 Conformity .................................................................................13
6.2 Standards ..................................................................................13
6.3 Operating conditions ..............................................................13
6.4 Mechanical data.......................................................................14
6.5 Fluid data ...................................................................................14
6.6 Electrical data ...........................................................................15
6.7 Nameplate, calibration plate .................................................16
7 INSTALLATION ............................................................................................ 17
7.1 Safety instructions ...................................................................17
7.2 Before installation ....................................................................17
7.3 Mechanical installation ...........................................................17
7.4 Fluid system installation .........................................................18
7.5 Setting up the fieldbuses.......................................................20
7.6 Electrical installation ...............................................................20
7.7 Connecting the functional earth...........................................22
8 COMMISSIONING ..................................................................................... 23
8.1 Safety instructions ...................................................................23
9 OPERATION AND FUNCTION .............................................................23
9.1 Safety instructions ...................................................................23
9.2 Normal control mode ..............................................................23
9.3 Device status LED ...................................................................24
9.4 Setting up the fieldbuses.......................................................25
9.5 Removable data memory .......................................................26
9.6 Functions ...................................................................................27
10 MAINTENANCE ........................................................................................... 30
10.1 Maintenance for operation with heavily contaminated
media ..........................................................................................30
10.2 Cleaning and recalibration at the factory ...........................31
11 DEVICE STATUS/TROUBLESHOOTING ....................................... 32
11.1 Display of the device status .................................................32
11.2 Troubleshooting .......................................................................35
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12 ACCESSORIES /SPARE PARTS ....................................................... 37
12.1 Electrical Accessories ............................................................37
12.2 Fluid accessories .....................................................................37
12.3 Bürkert Communicator (PC software) ................................38
12.4 Additional documentation ......................................................38
12.5 Spare parts ...............................................................................38
13 DISMANTLING ............................................................................................39
13.1 Safety instructions ...................................................................39
14 TRANSPORT, STORAGE, DISPOSAL .............................................. 40
15 RETURNING THE DEVICE .................................................................... 40
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Type 8741
User instructions
1 USER INSTRUCTIONS
This manual describes the entire life cycle of the device. Please keep
this manual in a safe place, accessible to all users and any new owners.
Important safety information!
Please read the manual carefully. Pay particular attention to the
sections entitled Basic safety information and Intended use.
▶ This operating manual must be read and understood.
1.1 Definition of the word "device"
The word "device" as used within this manual, always refers to the
MFM/MFC Type 8741.
1.2 Symbols used
The following symbols are used in these instructions.
Danger!
Warns of immediate danger!
▶ If ignored, death or serious injury will result.
Warning!
Warns of a situation which is possibly dangerous!
▶ If ignored, serious injury or death may result.
Caution!
Warns of possible danger!
▶ Failure to observe this warning can result in substantial or minor
injuries.
note!
Warns of damage to property!
Important advice and recommendations
refers to information in this operating manual, or in other
documents.
→ Indicates a procedure that must be carried out.
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Type 8741
Intended use
2 INTENDED USE
Improper use of the MFC/MFM may be a hazard to people,
nearby equipment and the environment.
MFM type 8741 is used exclusively to measure the mass flow
of clean dry gases.
MFC type 8741 is used exclusively to control the mass flow of
clean dry gases.
▶ Observe the additional data, operating and service conditions
specified in the contract documents, the manual and on the
nameplate and calibration plate.
The device
▶ Use only for the media indicated on the nameplate and in the
calibration protocol.
▶ Do not use in an outdoor area.
▶ Use only in conjunction with external devices and components
recommended by Bürkert.
▶ Operate carefully and ensure regular, professional maintenance.
▶ Operate only in perfect working order and ensure appropriate
storage, transport, installation and control.
▶ Use only for its intended purpose.
2.1 Restrictions
When operating the device, observe any applicable restrictions.
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Type 8741
Basic safety information
3 BASIC SAFETY INFORMATION
These safety instructions do not take the following into account:
• any contingencies or occurrences that may arise during installation,
use and maintenance.
• Location-specific safety regulations, adherence to which, also on the
part of the mounting personnel, is the responsibility of the operator.
Danger due to high pressure in the installation/device.
▶ Before working on the installation or device, cut the pressure
and vent and drain the pipes.
Risk of injury from electric shocks.
▶ Before working on the installation or device, switch off the
power and ensure that it cannot be reactivated.
▶ Observe the applicable accident protection and safety regula-
tions for electrical equipment!
Burns/fire hazard due to hot surface of the device!
▶ Keep the device away from any highly flammable materials or
media and avoid any contact with bare hands.
Danger due to escape of the medium
▶ Observe the applicable accident protection and safety regula-
tions relating to the operating medium used.
Various dangerous situations.
To avoid personal injury, take care:
▶ Not to operate the device without the factory installed input
filters.
▶ Only to operate the device in the installation position given on
the calibration plate.
▶ That the operating pressure of the device is not higher than the
maximum calibration pressure (MFM) specified on the calibration plate or the tightness pressure of the proportional valve
(MFC).
▶ To only use the device for the medium specified as the operat-
ing medium in the calibration protocol.
▶ Only to use agents that are stable with the device materials for
cleaning and decontamination
The compatibility chart can be found on our homepage:
www.burkert.com
in the event of any ambiguity please contact your local sales
office.
▶ Do not make any internal or external modifications to the device
and do not subject it to mechanical loads.
▶ Protect the installation/device from accidental actuation.
▶ Only trained personnel may perform installation and mainte-
nance work.
▶ After an interruption in the electrical and media supply, ensure a
controlled restart of the process.
▶ Observe best industry practice.
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Type 8741
General information
note!
Components / assemblies at risk from electrostatic charges!
The device contains electronic components which are susceptible to
electrostatic discharge (ESD). Contact with electrostatically charged
persons or objects endangers these components. In the worst case,
they will become defective immediately or will fail when energized.
• To minimise or even avoid all damage due to an electrostatic
discharge, take all the precautions described in the EN 613405-1.
• Do not touch any of the live electrical components.
4 GENERAL INFORMATION
4.1 Manufacturer's address and international contacts
The manufacturer of the device can be contacted at the following
address:
Bürkert SAS
Rue du Giessen
F-67220 TRIEMBACH-AU VAL
The addresses of our international sales offices are available on the internet at:
www.burkert.com
4.2 Warranty
The warranty is conditional on compliant use of the MFM/MFC type
8741 in observance of the operating conditions specified
in this manual.
4.3 Information on the Internet
Operating manuals and data sheets regarding type 8741 can be found
online under: www.burkert.com
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Type 8741
System description
5 SYSTEM DESCRIPTION
5.1 Design of the MFM/MFC
Connector*
for electrical connection
(4-pin screw terminals)
Micro
SIM card
Setting
fieldbus
Functional earth connection:
M3 screw**
M4 screw**
Fluid connection
Flow direction
* The removable connector is part of the device
** For cable shielding and earthing of the device
Fig. 1 : Design of MFM/MFC Type 8741
LED to display the
device status (in
accordance with
Namur 107)
5.2 General description
Device Type 8741 is available in two basic versions.
• As a Mass Flow Meter (MFM) the device measures the mass flow
of the gases for which it has been calibrated.
• As a Mass Flow Controller (MFC) the device measures and con-
trols the mass flow of the gases for which it has been calibrated.
In contrast to the MFM, the MFC also contains a regulation valve.
The gas must be in a dry and clean state.
Digital communication with the device (for example for transfer of the
setpoint or measured value) is achieved via CANopen*- or büS**.
* CANopen - A fieldbus based on CAN (Controller Area
Network) that is used in automation technology for networking of devices.
** büS - A CANopen-based fieldbus with additional
functionalities.
5.3 Operation of the MFM (Mass Flow Meter)
A sensor is integrated into the MFM to measure the mass flow. The
measured value is transmitted to an external device via a digital output
(fieldbus).
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Type 8741
System description
5.4 Operation of the MFC (Mass Flow Controller)
Design:
• The mass flow is measured by a sensor.
• The MFC is fitted with electronics and a low-friction proportional
valve with a high response sensitivity to control the mass flow.
note!
Malfunction due to contamination.
For problem-free functioning of the MFC, a filter must be installed
in front of the device for contaminated operating media.
See section "6.3.1 Quality of the operating medium"
Operation:
The sensor measures the mass flow and relays the measured value to
the integrated electronics. The electronics compares the measured
current value (x) with the desired setpoint value (w) and calculates the
control value to be transmitted to the proportional valve (Y) in order
to control its opening.
The mass flow is either kept stable at a constant value or altered
according to a predefined profile.
The regulation is performed independent of pressure fluctuations or
increased flow resistance, such as might be caused by dirty filters.
The short response time of the proportional valve and the dynamics of
the sensor determine the setting time.
The measured mass flow value is transmitted to an external device via
a digital output (fieldbus).
In order to obtain a dynamic or quiet measured-value
output signal, the damping of this signal can be adjusted by
the "Bürkert Communicator" software. See section "12.3
Bürkert Communicator (PC software)"
Function diagram:
w
= w-x
x
d
Electronic
x
Medium inlet
Fig. 2 : Function diagram of the MFC (Mass Flow Controller)
Sensor
y
Proportional valve
x
out
Medium outlet
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Type 8741
System description
5.4.1 The MFC electronics
The electronics
• compare the measured value of the mass flow with the specified
setpoint
• and controls the opening of the proportional valve.
Setpoint
The setpoint (w) is transmitted digitally via the fieldbus interface.
For control of a system where rapid flow-rate changes are not permitted,
a ramp function can be activated. This enables the parameters for an
ascending or descending setpoint to be set separately.
More detailed information on the ramp function and on all
other functions can be found in the supplementary manual
"Digital Communication Type 8741".
Control settings
The control settings are preset at the factory.
Amplification factors:
After start-up, the controller operates with amplification factors
dependent on the control-loop properties. The gain factors are calculated automatically when the AUTOTUNE function is conducted. The
AUTOTUNE function optimises the control settings for the installation's
actual conditions.
Dynamic control parameters:
The dynamic for the control loop of the device is influenced by two
settings, the gain (K
) and reset time (Tn). The dynamic control param-
P
eters can be modified using the "Bürkert Communicator" software (see
section "12.3 Bürkert Communicator (PC software)")
The extreme settings are:
1. A very quick regulation with the possibility of overshoots. The
controller reacts to even the smallest deviations. The control may
then cause very strong fluctuations.
2. A slow-acting regulation.
For less dynamic applications, the behaviour of the controller
may be damped. It then reacts slowly to very minor fluctuations
of the measured value or set-point.
Zero point shut-off:
A zero point shut-off is included to ensure the sealing function of the
valve. This is activated if the following conditions occur simultaneously.
1. Setpoint < 2 % of nominal flow rate Q
nominal
(with measuring range 1:50)
2. Measured value < 2 % of nominal flow rate Q
nominal
(with measuring range 1:50)
If the zero point shut-off is active, the PWM signal is set to
0 % so that the valve is completely closed.
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Type 8741
System description
5.4.2 MFC solenoid valve
The solenoid valve used for an MFC is a direct-acting, normally-closed
proportional valve. The nominal diameter of the solenoid valve is
determined by the required nominal flow-rate Q
conditions in the process and the density of the operating medium.
note!
The sealing function of the proportional valve cannot be guaranteed for hard sealing materials.
When used within the specified pressure range, the proportional
valve that is used for the mass flow control also provides the
sealing function.
Exception:
If the seat seal is composed of a special, hard sealing material
(e.g. PCTFE), as for nominal valve diameters of 0.05 and 0.1 mm,
then the leakage rate of the proportional valve may differ from that
of a device with a soft seat seal (e.g. FKM or EPDM).
The maximum leak rate in both cases is 1 Nml/min (air).
A higher tightness may be possible, however it is not standard and
must therefore be requested.
nominal
, the pressure
5.5 Operation of the sensor in the
MFM/MFC
The integrated flow-rate sensors in the MFM/MFC use the thermal
measurement process (anemometric and calorimetric) to measure
the mass flow. This essentially consists of a heating resistor and a
temperature probe. The operating medium which flows through the
device modifies the temperature difference measured between the
two resistors.
The thermal measurement principle allows the MFC to control the
required mass flow almost independently of the pressure and temperature fluctuations in the application concerned.
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Type 8741
Technical data
6 TECHNICAL DATA
6.1 Conformity
The Type 8741 complies with the EC-directives according to the EC
declaration of conformity.
6.2 Standards
The standards used to demonstrate conformity with the Directives
can be consulted in the EC type examination certificate and/or the EC
declaration of conformity.
6.3 Operating conditions
Warning!
Risk of injury from malfunction due to outdoor use.
▶ Do not use type 8741 in outdoor areas.
Permissible ambient temperature: -10 °C to +50 °C
Medium temperature: -10 °C to +70 °C
for oxygen: -10 °C to +60 °C
Permissible humidity: < 95 %, non-condensing
Protection class IP 20, for properly wired
devices with inserted and
tightened push-in connections.
Operating pressure: Max. 10 bar (depending on the nominal
diameter of the proportional valve)
Warning!
Risk of injury caused by pressure, medium escape
Important device-specific data are indicated on the nameplate and
calibration plate.
▶ Only use the device for the specified operating medium.
▶ Do not exceed the specified calibration pressure.
Technical data specified on the nameplate*
• Supply voltage
• Maximum power consumption
• Sealing material
• Nominal flow rate
• Operating medium
• Output signal
Technical data specified on the calibration plate*
• Calibration medium
• Calibration pressure
• Installation position
• Calibration date
*For description see section "6.7 Nameplate, calibration plate"
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