Keyence VHX-5000 User Manual
Digital Microscope
VHX-5000
User’s Manual
96M13026
Read this manual before use.
Keep this manual in a safe place for future reference.
Introduction
This manual explains the handling and operating procedures, as well as warning information for the Digital
Microscope VHX-5000 Series (hereinafter, "VHX-5000"). To take full advantage of the features of this
microscope, read this manual thoroughly before using it. Store this manual where it can easily be
referenced by anyone using this microscope.
Symbols
In this manual, the following symbols alert you to important messages.
Be sure to read the messages.
It indicates a hazardous situation which, if not avoided, will result in death or
serious injury.
It indicates a hazardous situation which, if not avoided, could result in death or
serious injury.
It indicates a hazardous situation which, if not avoided, could result in minor or
moderate injury.
It indicates cautions and limitations that must be followed during operation.
It indicates additional information on proper operation.
It indicates tips for better understanding or useful information.
It indicates the reference pages and items in this manual.
General precautions
•
No part of this manual may be reprinted in part or whole without prior written permission from KEYENCE.
• The contents of this manual are subject to change, due to improvements, without notice.
• Please direct any questions or report any errors or omissions regarding the content of this manual to
your nearest sales office listed at the end of this manual.
• KEYENCE shall replace manuals with missing pages or paging disorders.
The company names and product names used in this manual are registered trademarks or trademarks of
their respective company.
Safety information for VHX-5000 Series
Safety information for VHX-5000 Series
General Precautions
• Do not use this product for the purpose to protect a human body or a part of human body.
• This product is not intended for use as explosion-proof product. Do not use this product
in a hazardous location and/or potentially explosive atmosphere.
• Check the functionality and performance of this instrument before using it.
• Take any and all safety precautions prior to using the VHX-5000 to prevent potential
damages should it fail.
• KEYENCE makes no warranty against functionality or performance issues arising from
usage outside the standards specified for the VHX-5000, or modifications made to the
VHX-5000.
• Note that the VHX-5000 may not function correctly or may fail to fulfill performance
expectations if used with other devices due to unforeseen operating conditions,
environment, etc. Be sure to confirm these conditions beforehand.
• Do not subject the VHX-5000 or any peripheral devices to sudden temperature changes
which could otherwise lead to condensation.
• Unplug the AC power cord set if the VHX-5000 will not be used for prolonged periods.
Caution
• Be sure to turn the main power switch off when connecting cables or servicing this
instrument. Failure to do so may lead to electric shock.
• Do not bend the power cable with excessive force, or place it under heavy objects. Doing
so may damage the cable and cause fires and electric shock. Do not use if cable is
damaged.
• Do not insert foreign objects. Doing so may result in fires, electric shock, product failure,
and other hazards.
• Never remove the case cover. Touching internal parts with your hands may result in
electric shock.
• The power supply cord set is not provided with the VHX-5000 Series. Use the cord set,
which complies with the regulations and standards in the country or the region in which
the VHX-5000 Series are used. (In North America, use the cord set, which type of cable is
SVT or equivalent, 18AWG or better, rated temperature 90°C or better.)
• When installing the VHX-5000, be sure to connect the protective earthing terminal on the
AC power cable to the protective earthing conductor in the building installation.
Otherwise, electric shock or product damage may result.
• Do not disassemble or modify the VHX-5000. Doing so may result in fires, electric shock,
product failure, and other hazards.
Potentially hazardous optical radiation is emitted from the end of the optical fiber. Do not
stare at this radiation to avoid any damage to your eyes.
96M13026
1
Safety information for VHX-5000 Series
Precautions for abnormalities
Shut the power off immediately in these instances. Continued use under these conditions
may result in fires, electric shock, or product failure. Contact your nearest KEYENCE sales
office for repair work.
• When water or foreign objects enter the instrument.
• When you drop the instrument or damage the case.
• If you notice smoke or abnormal odor coming from the instrument.
Precautions for usage
• Do not block the air vents on any of the units.
• Supply the correct power voltage. Otherwise the VHX-5000 may fail.
• Do not stand on the VHX-5000. Doing so may damage it.
• Do not place any objects on the VHX-5000. Otherwise the VHX-5000 may fail.
• Do not wipe the LCD monitor or the VHX-5000 with thinners or other organic solvents.
Doing so may damage the VHX-5000.
• If the VHX-5000 becomes dirty wipe with a dry cloth.
• Always turn the main power switch off before disconnecting or removing the AC power
cord set, camera unit, etc. Otherwise the VHX-5000 may fail.
Precautions for installation
To ensure correct and safe operation, the VHX-5000 must be installed in an appropriate
location. Failure to observe these warnings may result in fires, electric shock, or product
failure. Do not install in areas subject to:
• ultraviolet rays which can cause wear on the LCD monitor, direct sunlight or strong
ultraviolet rays for prolonged periods of time.
• direct vibration or shock.
• ambient temperatures outside the range of 5 to 40°C.
• ambient humidity outside the range of 35 to 80% (no condensation).
• sharp temperature changes.
• air flow from an air-conditioner vent.
• volatile flammable materials and corrosive gases.
• large amounts of dust, salts, irons, greasy fumes.
• water, oil, and chemicals.
• intense magnetic or electric fields.
• large voltage fluctuations.
Precautions for storage
Avoid storing in areas subject to:
• ambient temperatures outside the range of 5 to 40°C.
• ambient humidity outside the range of 35 to 80% (no condensation).
• direct sunlight or wind and rain.
• volatile flammable materials and strong corrosive chemicals.
• unstable surfaces where the microscope could fall from.
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- Digital Microscope VHX-5000 User’s Manual -
Precautions for transportation
• Be sure to turn the main power switch off before disconnecting or removing cables for
transporting.
• Be sure to use packing material specified by KEYENCE for transporting. Otherwise the
VHX-5000 may become damaged.
Other precautions
• The VHX-5000 uses a hard disk drive (HDD) to store image data and measurement data.
Data stored on the HDD may become lost if the VHX-5000 fails. Make a backup of the data
stored on the HDD regularly. We recommend making backups immediately after acquiring
important data.
• KEYENCE provides no warranty for data stored on the HDD when performing repairs.
Make a backup of the data before repairing the VHX-5000.
Safety information for VHX-5000 Series
- Digital Microscope VHX-5000 User’s Manual -
3
Precautions on Regulations and Standards
Precautions on Regulations and Standards
1 CE Marking
Keyence Corporation has confirmed that this product complies with the essential requirements of the applicable EC
Directive(s), based on the following specifications. Be sure to consider the following specifications when using this
product in the Member States of European Union.
1.1 EMC Directive (2004/108/EC)
• Applicable Standard EMI: EN61326-1, Class A
EMS:EN61326-1
These specifications do not give any guarantee that the end-product with this product incorporated complies with
the essential requirements of EMC Directive. The manufacturer of the end-product is solely responsible for the
compliance on the end-product itself according to EMC Directive.
1.2 Low-Voltage Directive (2006/95/EC)
• Applicable standard EN61010-1
• Overvoltage category II
• Use this product under pollution degree 2.
• Indoor use only.
• Be sure to connect the protective earthing terminal on the AC power cable to the protective earthing conductor
in the building installation.
• The Appliance inlet is designed as a disconnecting device. Install this product so that the AC power cable can
be removed immediately from the appliance inlet when an abnormality occurs.
2 CSA Certificate
This product complies with the following CSA and UL standards and has been certified by CSA.
• Applicable st
Be sure to consider the following specifications when using this product as a product certified by CSA.
• Overvoltage category II
• Use this product under pollution degree 2.
• Indoor use only.
• Be sure to connect the protective earthing terminal on the AC power cable to the protective earthing conductor
in the building installation.
• The Appliance inlet is designed as a disconnecting device. Install this product so that the AC power cable can
be removed immediately from the appliance inlet when an abnormality occurs.
3 Best Management Practice for Perchlorate Materials
This product uses components containing perchlorate material. When you ship this product or your end-product
installing this product to California, you must label or mark the following statement on the exterior of all outer shipping
packages and on consumer packages or you must include the following statement in an instruction manual or MSDS
accompanied with the product.
“Perchlorate Material - special handling may apply, See
www.dtsc.ca.gov/hazardouswaste/perchlorate.”
andard CAN/CSA C22.2 No.61010-1
UL61010-1
-
California only
4
- Digital Microscope VHX-5000 User’s Manual -
Additional Features for Improved Observation
Precautions on Regulations and Standards
Clear observation of fine surface features
The High Resolution HDR function allows users to see
surface details that otherwise could not be seen.
IC (1500x)
For details, refer to "Enhancing Resolution and Increasing
Gradation" (Page 7-2).
Low contrast parts can be seen accurately
The HDR function gathers additional color information to
render a detailed image on samples with low color
gradation.
Inkjet paper (300x)
Observe parts completely in focus even if
the parts have significant height variation
The Depth Composition function overcomes depth-of-field
limitations at hight magnification.
Wire bonding (300x)
For details, refer to "Types and Features of Depth Composition"
(Page 10-2).
The true shape of an object can be
understood fully
The 3D Display function allows a user to view an object in
3D to truly understand the topography of the part.
HDD head connection (1000x)
For details, refer to "Enhancing Resolution and Increasing
Gradation" (Page 7-2).
Glare of the highly reflective surfaces can
be removed
The Remove Glare function minimizes the glare on
reflective components.
Solder (50x)
For details, refer to "Removing Glare" (Page 7-6).
- Digital Microscope VHX-5000 User’s Manual -
For details, refer to "3D View" (Page 10-14).
Surface features can be accentuated for
inspection
The Light Shift function enhances height variation on a
surface by altering the angle of the lighting.
Grain of resin (250x)
For details, refer to "Changing Lighting Method (Switching
Lighting)" (Page 7-8).
5
Precautions on Regulations and Standards
Advanced Analysis Functions
Capture high resolution images of features
The HD Image function allows the user to capture high
resolution images employing up to 54 million pixels of data.
Feathers of a Paradise bird (150x)
For details, refer to "Wide-view" (Page 5-9).
Expanded viewing area image capture
The Stitch Image function allows the user to capture wide
area images without sacrificing resolution.
Wire bonding (1000x)
Measure critical features quickly
The Measurement function allows the user to measure
observed features instantly.
Crystal grains (20x)
For details, refer to "Overview and Type of Measurements" (Page
9-2).
Eliminate vibration
The S.C.F. function allows for clear real time (video)
observation by eliminating vibration.
IC pattern (3000x)
For details, refer to "Manual Image Stitching" (Page 11-8).
Comparative analysis directly on the
system
The Split Screen function allows the user to visually
compare two objects side by side directly on the system.
Switch (20x)
For details, refer to "Split Screen" (Page 8-2).
6
- Digital Microscope VHX-5000 User’s Manual -
For details, refer to "Reducing the Effects of Vibration (Shake
Correction Mode)" (Page 7-7).
Capture sharp images
The Vivid & Sharp Image function brightens and sharpens
for the image for improved observation.
Solar battery cell (500x)
For details, refer to "Enhance Contours in Vivid Color (Sharpening
Image Mode)" (Page 7-7).
Easy mode
This allows you to easily call useful functions.
Press the [EASY MODE] button or click the [Easy mode] tab.
[Easy mode] menu displays.
Precautions on Regulations and Standards
Improve image
Functions used to improve the image quality are described
below.
Click the [Improve image] button from the [Easy mode]
menu.
Remove glare
By using this function can reduce glare in the image.
Intensity effect of this function can be selected to [Weak],
[Normal] and [Strong].
Increase resolution
By using High Resolution HDR can observe a high
resolution image. Intensity effect of this function can be
selected to [Weak], [Normal] and [Strong].
For details of the fine adjustment, refer to "Enhancing
Resolution and Increasing Gradation" (Page 7-2).
Increase contrast
By using HDR observation can observe an optimized
image. Intensity effect of this function can be selected to
[Weak], [Normal] and [Strong].
For details of the fine adjustment, refer to "Removing
Glare" (Page 7-6).
- Digital Microscope VHX-5000 User’s Manual -
For details of the fine adjustment, refer to "Enhancing
Resolution and Increasing Gradation" (Page 7-2).
[Select best image from preview] button
The setting (processing) best suited to the application can
be selected under 9 different settings in a 9-way split
screen.
For details, refer to "Selecting an Image from 9 Different
Settings (Optimize)" (Page 7-10).
7
Precautions on Regulations and Standards
Focus
Functions used to adjust the focus are described below.
Click the [Focus] button from the [Easy mode] menu.
See entire viewing area in focus and obtain a 3D
Create a depth composition image in which the entire
screen is in focus. After that, the 3D image displays.
Measure
Plane measurement and 3D measurement functions are
described below.
Click the [Measure] button from the [Easy mode] menu.
Plane measurement
Measure the length and area of the sample.
For details, refer to "Live Depth Composition" (Page 10-
3).
AUTO FOCUS
Execute the AUTO FOCUS to find the focus on the part.
For details of the fine adjustment, refer to "Using auto
focus" (Page 10-39).
For details, refer to "Measuring Dimensions and Area"
(Page 9-1).
3D measurement
Display the 3D image of the depth composition image
sample, and measure the profile and volume.
For details, refer to "3D Profile Measurements
(Optional)" (Page 10-24).
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- Digital Microscope VHX-5000 User’s Manual -
Open a saved image
Open the album window to confirm the saved images on
this device.
Click the [Open a saved image] button from the [Easy
mode] menu.
Precautions on Regulations and Standards
For details, refer to "Album" (Page 6-2).
Reproduce rec settings
Display the side album, and read the camera setting from
the saved images to set the same setting.
Click the [Reproduce rec settings] button from the [Easy
mode] menu.
For details, refer to "Side Album" (Page 6-21).
- Digital Microscope VHX-5000 User’s Manual -
9
Contents
Contents
Introduction
Safety information for VHX-5000 Series
General Precautions
Caution
Precautions on Regulations and Standards
Additional Features for Improved
Advanced Analysis Functions
Easy mode
Contents
Chapter 1
.................................................2
................................1
..................................................1
Observation
........................................5
....................6
..............................................7
...................................................10
Before Using the
VHX-5000
Checking the Package Contents
Contents
Camera Units
Options
Part Names and Functions
Main Unit (VHX-5000)
Camera Unit (VHX-5100/5020)
Console
Viewing the Screen
Observation Window
VHX MENU
Operation Area
Information View
Direct Buttons
Chapter 2
Installation/Connection
System Configuration and Connection
Installing the VHX-5000
Connecting the Camera Unit
Connecting the Console, Mouse, etc.
Connecting Power
Installing the VHX-S550
Mounting and Removing the Lens
Connecting the Lens/Stage Cable
..............................................1-2
.......................................1-3
...............................................1-3
...........................1-6
...............................................1-8
..................................1-11
...........................1-11
........................................1-12
...................................1-14
.................................1-14
....................................1-14
Installation/Connection
...............................2-2
Flow
...............................................2-2
................................2-5
Free-angle Observation Base Unit
.................1-2
.........................1-6
...............1-8
.........................2-3
..................2-3
..........1
.....4
......2-5
......2-6
...........2-7
...........2-8
Chapter 3 Basic Operation
Basic Operation
Turning the Microscope Power On
Initializing XY Motorized Stage
Adjusting the Color Balance (White
Balance)
Adjusting the Brightness and Focus
Moving XY Stage Automatically
Observing Tilted Z-Axis
Capturing (Saving) Images
Shutting Down the Microscope
Advanced Operations
Chapter 4
Adjusting Image Brightness
Adjusting with the Brightness Dial on the
Console
Changing Between Gain and Supercharge
Shutter
Adjusting the Shutter Speed using [Lighting]
from the VHX MENU
Adjusting the Gain using [Lighting] on the
VHX MENU
Adjusting the Lighting
Using the LIGHT Button on the Console
Adjusting the [Lighting] from the VHX MENU
Adjusting the White Balance
Adjusting the White Balance on the
Console
Adjusting the White Balance using the
Camera Settings from the VHX MENU
........................................3-2
...............3-3
.........................................3-4
..............3-5
.........................3-6
....................3-7
...............3-8
............................ 3-9
Advanced Camera
Settings
........................4-2
..........................................4-2
...........................................4-2
........................4-3
.....................................4-4
................................ 4-5
.......................4-6
..........................................4-6
..........3-2
........3-4
..4-5
... 4-5
... 4-6
10
- Digital Microscope VHX-5000 User’s Manual -
Contents
Chapter 5
Recording/Saving Still Images
Recording (Saving) from the Console
Recording (Saving) using the Direct
Buttons
Names and Functions on the Rec Dialog
Box
Rec Settings
Setting the Recording Size
Setting Auto Rec
Loading Recording Settings
Setting up Timer Recording
Wide-view
Observing in Wide-view
Recording and Saving Videos
Names and Functions on the [Record video]
Dialog Box
Chapter 6
Album
Side Album
......................................................6-2
Names and Functions
Playing Files
Displaying and Entering Properties
Depth Up
Creating Color Composition Images
Searching Files
Changing the View of the Files Window
Options
Explorer
Report Output
Measurement Result Summary
Launching the Side Album
Names and Functions
Playing Images
Recording (Saving) Images
....................5-2
...........................................5-2
................................................5-3
.............................................5-5
.....................5-5
..................................5-6
...................5-7
....................5-8
................................................5-9
.........................5-9
...................5-10
....................................5-11
Playing and Editing Images
...........................6-2
........................................6-6
...........................................6-11
..................................6-15
.............................................6-16
............................................6-18
....................................6-19
.............................................6-21
...................6-21
.........................6-21
...................................6-22
......5-2
.......6-11
......6-12
.6-16
............6-20
Chapter 7
Enhancing Resolution and Increasing
Gradation
About high resolution HDR
About high resolution Observation
About HDR
High resolution HDR Observation Settings
High resolution Observation Settings
HDR Settings
Removing Glare
Glare Removal Settings
Reducing the Effects of Vibration (Shake
Correction Mode)
Shake Correction Mode Settings
Enhance Contours in Vivid Color (Sharpening
Image Mode)
Sharpening Image Mode Settings
Changing Lighting Method (Switching
Lighting)
Changing the Lighting Method
Selecting an Image from 9 Different Settings
(Optimize)
Selecting the Best Image
Image Settings
Image Setting Procedures
Chapter 8
Split Screen
Types of Split Screens
Using the Split Screen
Comparing Two Images
Full Screen Image/Vision Correction Mode
Full Screen Image
Vision correction mode
Enlarging the Image (Video Digital Zoom)
Navigation
Creating Navigation
Specifying Observation Position on
Navigation Image
Registering a Stage Position
Moving the Stage to a Registered
Position
Improving Images
............................................7-2
.................... 7-2
..........................................7-2
.......................................7-4
........................................7-6
........................ 7-6
................................. 7-7
............ 7-7
.......................................7-7
........... 7-7
..............................................7-8
................ 7-8
.........................................7-10
..................... 7-10
.......................................7-12
................... 7-12
Setting Image Views
.............................................8-2
.......................... 8-2
........................... 8-3
........................ 8-3
................................ 8-4
.......................... 8-4
................................................ 8-6
.............................. 8-6
............................. 8-7
.................. 8-8
..........................................8-9
.......... 7-2
.. 7-3
......7-4
...8-4
....8-5
- Digital Microscope VHX-5000 User’s Manual -
11
Contents
Chapter 9
Measuring Dimensions and
Area
Overview and Type of Measurements
Measurement Types
Preparing to Measure
Lens Setting
Calibration
Main Measurements
Measuring Procedures
Measurement Items
Measuring High Definition Images
Moving and Editing the Measurement
Point
Auxiliary Functions
XY Measurement and Display
Assist Tools
Reference Lines
Display Settings
Area Measurements
Measuring Procedures
Measurement Items
Displaying Text and Markers
List of Comments
Entering and Specifying Comment Text
and Markers
Normal Comments
Entering and Setting Residual
Comments
Hiding Comments
Delete All
Displaying a Scale
One-Click Automatic Measurement
Creating a New Template
Template Recalling
One-Click Automatic Measurement
Automatic Area Measurements
Measurement Mode Selection
Measurement Area Extraction
Extraction Area Shape Formatting
Display Measurement Results
Measurement Recreation
Display Settings
Maximum Area Measurement
Measurement Area Specification
.........................................9-5
...........................................9-6
.............................................9-18
.......................................9-20
.....................................9-37
...........................................9-38
.............................9-2
................................9-5
................................9-11
........................9-11
............................9-11
..............................9-18
.................................9-21
..................................9-22
................................9-25
........................9-25
............................9-26
.....................9-33
................................9-33
..................................9-34
..............................9-35
...............................9-38
...................................9-39
.............................9-42
.....................9-60
..................................9-61
..........9-2
.........9-17
..............9-19
............9-40
....................9-40
.......9-43
.................9-44
..............9-44
..............9-45
........9-50
..............9-55
...................9-63
..........9-63
Perform Measurements
Display Settings
XY Stage Measurement (Optional)
Installation and Connections
Preparing to Measure
XY Stage Measurement Procedures
XY Stage Measurement Menu
Specify Coordinates
Measuring with the XY Stage
Option Settings
Chapter 10
Types and Features of Depth Composition
Live Depth Composition
Quick Composition and 3D
Fine Depth Composition
Using Depth Composition
Live Depth Composition
Quick Composition and 3D
Fine Depth Composition
3D View
3D File Comparison View
Lighting Simulations
3D Profile Measurements (Optional)
Volume Measurement (Option)
Z Stage Control
...............................................10-14
Playing Back and Saving 3D Images
Manipulating the 3D View
Using Height/Fix Z/Rotation Guide in
3D View
Display Settings
Show Crop/Detail
Displaying 2 Files to Compare
Linking the 2nd Image
Differential View
Switching Sub Images
3D Tilt Correction
Names and Functions in the Window
Starting Profile Measurements
Setting Profile Line
Setting Measurement Intervals
2 line comparison
Adjusting Focus from the VHX MENU
Measuring the Height between 2 Points
................................. 9-65
.................................. 9-85
Observing in 3D
...................................... 10-16
............................... 10-16
............................... 10-20
.................................... 10-39
.......................9-64
................9-66
.......................... 9-66
............................ 9-70
...............9-74
......................10-2
..................10-2
......................10-2
......................... 10-3
......................10-3
..................10-4
......................10-9
..................10-15
............................. 10-17
.......................10-19
.......................10-19
.......................10-21
............................. 10-22
.............................. 10-23
........................... 10-26
............................. 10-36
...............10-38
............9-66
.....9-67
..............9-68
... 10-2
...10-14
............10-19
........10-24
..10-24
...........10-26
...........10-31
.... 10-39
.. 10-40
12
- Digital Microscope VHX-5000 User’s Manual -
Contents
Chapter 11
Automatic Image Stitching
Stitching 2D Images Automatically
Stitching 3D Images Automatically
Manual Image Stitching
Stitching 2D Images
Stitching 3D Images
Chapter 12
Stitching Images
........................11-2
............................11-8
............................11-8
............................11-9
Printing and Saving to a
CD/DVD
Printers
Saving to a CD/DVD
Chapter 13
..................................................12-2
Connecting the Printer
Print Settings
Printing
Page Setup
.....................................12-2
..............................................12-3
........................................12-3
.........................12-2
................................12-4
Formatting a CD/DVD
Writing Procedures
.........................12-4
.............................12-5
Configuring the Operating
Environment
Settings
.................................................13-2
Displaying the Settings Menu
Network/Security Settings
Lens Settings
...................................13-14
...............13-2
....................13-2
Calibration Setup ..........................13-14
User Setup
Show Software Keyboard
System Initialization
Initializing Automatic XY Stage
D500 Maintenance
Options
Version Info
......................................13-14
..................13-16
..........................13-16
............................13-17
...........................................13-18
.....................................13-20
........11-2
........11-5
...........13-17
Chapter 14
Connecting to an External
PC
LAN Connection
Overview of LAN Connection
Operating Environment of the PC
Flow of Preparations
PC Connection and Settings
VHX-5000 Communication Software
Overview of Functions
Installing the Communication Software
Uninstalling the Communication
Software
Starting the VHX-5000 Communication
Software
Names and Functions on the Window
Playing Images
Measuring 2D images
Preview
Saving
Edit
................................................. 14-17
View
............................................... 14-17
Option
Extracting CSV data
FTP Server Function
Connecting using Internet Explorer
File Sharing Function
Using Internet Explorer to Connect
.............................................14-18
.....................................14-2
........................... 14-2
......................... 14-4
.......................................14-5
.......................................14-5
.................................. 14-8
....................... 14-14
...........................................14-16
............................................14-16
......................... 14-18
............................. 14-19
............................ 14-21
............... 14-2
.........14-2
................ 14-3
.........14-4
..14-4
...14-6
.....14-19
.....14-21
- Digital Microscope VHX-5000 User’s Manual -
13
Contents
Appendix
List of Necessary Authentication Information
and Default Settings
Replacing the Fuse
REMOTE Connector (Capture/Pause)
Using the REMOTE Connector to Capture
Using the REMOTE Connector to Pause
and Release Images
External Dimensions
VHX-5000 Controller
VHX-5100/5020 Camera Unit
Specifications
Specifications (Basic Performance)
Specifications (Various Functions)
Specifications (Detailed Modules)
Software Usage Agreement
Usage Agreement for Operation Software
Before requesting repair or inspection
Revision History
.......................................... A-6
..................................... A-18
............................. A-2
................................... A-3
........................ A-4
................................. A-5
............................ A-5
................ A-5
..................... A-11
......... A-4
.. A-4
........ A-6
......... A-8
........ A-10
.... A-12
....... A-17
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- Digital Microscope VHX-5000 User’s Manual -
Chapter
1
1
Before Using the VHX-5000
Package Contents and
Product Overview
Before Using the VHX-5000
Checking the Package Contents ............................ Page 1-2
Contents............................................................. Page 1-2
Camera Units ..................................................... Page 1-3
Options...............................................................Page 1-3
Part Names and Functions..................................... Page 1-6
Main Unit (VHX-5000)........................................ Page 1-6
Camera Unit (VHX-5100/5020) .......................... Page 1-8
Console..............................................................Page 1-8
Viewing the Screen...............................................Page 1-11
Observation Window.........................................Page 1-11
VHX MENU ...................................................... Page 1-12
Operation Area................................................. Page 1-14
Information View .............................................. Page 1-14
Direct Buttons ................................................... Page 1-14
- Digital Microscope VHX-5000 User’s Manual -
1-1
Checking the Package Contents
1
Checking the Package Contents
Before Using the VHX-5000
Contents
VHX-5000 package contents
Manual binder
VHX-5000 communication software (CD-ROM)
User's manual (this document)
Quick start guide
Controller unit (VHX-5000)
VHX-A50 package contents
Console (OP-87841)
Mouse with wheel
Capture/still photo remote terminal connector
1-2
- Digital Microscope VHX-5000 User’s Manual -
1
Camera Units Options
RZ lens
Camera unit VHX-5100
High-performance low-magnification zoom lens
VH-Z00R/VH-Z00W/VH-Z00T 0x to 50x
Checking the Package Contents
Before Using the VHX-5000
Camera unit VHX-5020
Ultra-small compact high-performance zoom lens
VH-Z20R/VH-Z20W/VH-Z20T 20x to 200x
Universal zoom lens
VH-Z20UR/VH-Z20UW/VH-Z20UT 20x to 200x
Wide-range zoom lens
VH-Z100R/VH-Z100W/VH-Z100T 100x to 1000x
Universal zoom lens
VH-Z100UR/VH-Z100UW/VH-Z100UT 100x to 1000x
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Checking the Package Contents
1
Before Using the VHX-5000
Software
Dual-light high-magnification zoom lens
VH-Z250R/VH-Z250W/VH-Z250T 250x to 2500x
High-resolution zoom lens
VH-Z500R/VH-Z500W/VH-Z500T 500x to 5000x
Long-focal-distance, high-performance zoom lens
VH-Z50L/VH-Z50W/VH-Z50T 50x to 500x
3D profile measurement soft ware
VHX-H4M
XY measurement software
VHX-H2M2
Stands
Swing-head zoom lens
VHX-ZST 20x to 2000x
1-4
VHX-S550 Free-angle observation system (XYZ
motorized)
VH-S5 Vibration-resistant, high-magnification zoom
observation system
- Digital Microscope VHX-5000 User’s Manual -
1
VH-M100E XY measurement system
Requires separately sold XY measurement
software, VHX-H2M2.
Checking the Package Contents
Before Using the VHX-5000
- Digital Microscope VHX-5000 User’s Manual -
1-5
Part Names and Functions
1
(2) (3) (4)
(1)
Part Names and Functions
Before Using the VHX-5000
The names and functions of each part are explained below.
Main Unit (VHX-5000)
Front view
(1) LCD monitor
23" full HD (1920 x 1080 pixels) LCD monitor.
Right view
(1)
(3)
(1) DVD hyper-multi drive
Insert a CD-R, CD-RW, or DVD. Used to save and load
images and video files.
(4) (5)(2)
(2) USB ports
Connect a keyboard, mouse, and USB memory including
other USB devices.
(3) Power indicator
Illuminated when the power is on.
(4) Power switch
Turn the power on or off. (The main power switch on the left
side must be turned on.)
(2) CAMERA connection port
Connect the camera cable for the camera unit.
(3) LIGHT connection port
Connect the fiber optic cable.
(4) STAGE connection port
Connect the controller connection cable for the free angle
observation system b ase unit (VHX-S550/VHX-S500) and
free angle observation system (VHX-S90F/VHX-S50F).
(5) TRIPLE'R connection port
Connect the Z-axis motorized stage/automatic lens/zoom
recognition cable for the camera unit.
1-6
- Digital Microscope VHX-5000 User’s Manual -
Part Names and Functions
1
(1)
(4)
(5) (6)(3)
(2)
(7)
Before Using the VHX-5000
Left view
(1) MONITOR connection port
Connect an external monitor or projector equipped with a
DVI - I input (digital: full HD, 60 Hz/analog: full HD, horizontal
66 kHz, vertical 60 Hz).
Rear view
(1)
(2)
(1) Handle
Used when carrying the microscope.
(2) Tilt stand
Used to support the VHX if it is tilted backward.
An analog monitor (full HD, horizontal 66 kHz,
vertical 60 Hz) can also be connected using a
commercially available DVI-I/analog RGB
converter.
(2) USB ports
Connect a keyboard, mouse, and USB memory including
other USB devices.
(3) REMOTE connection port
A switch (such as a foot-activated switch) can be connected
to the capture/pause REMOTE connection port to capture
and pause images.
(4) AC power supply connection port
Connect the AC power cord set. (100 to 240 VAC, 50/60 Hz)
(5) Main power switch
Turn the power on or off. When the main power switch is
turned off, the power switch on the front panel will not work.
This switch is normally left on. Turn this switch off when
moving the microscope to another location or removing the
camera unit.
(6) Console port
Connect the console.
(7) LAN port
Connect a LAN cable when connecting this microscope to a
LAN. (RJ-45 10BASE-T/100BASE-TX/1000BASE-T)
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Part Names and Functions
1
Before Using the VHX-5000
Camera Unit (VHX-5100/5020)
(2) (3)(1) (4)
Console
Button area
(5) (6) (7)
(1) Fiber optic connector
Connect the fiber optic cable.
(2) Screw hole for stand
Threaded hole (1/4-20 UNC) used to secure the camera to
a stand.
(3) Mount
Used to mount the lens.
(4) Holder
Hook to the stand and fix the cable.
(5) Fiber optic cable
Connect to the fiber optic connector of the camera unit or
lens.
(6) Camera cable
Connect to the CAMERA connector on the controller.
(7) Fiber optic cable
Connect to the LIGHT connector of the controller.
EASY MODE button
Opens [EASY MODE] (Page 7) of the VHX MENU.
SCALE button
Toggles the scale display
S.C.F button
Allows for observation without vibration.
"Shake Correction Mode Settings" (Page 7-7)
WHITE BALANCE button
Adjusts the white balance.
FULL SCREEN button
To g gl e s between full screen display
display.
PAUSE button
Pauses the screen temporarily. Press again to release the
paused state and return to live image mode.
REMOVE GLARE button
Suppresses glare on highly reflective objects.
"Removing Glare" (Page 7-6)
IMAGE STITCH button
Joins multiple adjacent images as they are captured.
Then calls up the [Image Connect] menu. (Page 11-8)
Page 9-39) between on or off.
(
Page 4-6
(
)
Page 8-4) and normal
(
1-8
MEASUREMENT button
Allows the user to complete measurements and input
comments directly on the image.
Brings up the [Measurement/Comment] menu. (Page 9-34)
- Digital Microscope VHX-5000 User’s Manual -
Part Names and Functions
1
(2) (3)
(1)
(4)
(5) (6)
Before Using the VHX-5000
REC button
Stores images on the screen to the hard drive in the
microscope.
"Recording/Saving Still Images" (Page 5-2)
HIGH HDR button
The high resolution blue filter and the HDR function can be
combined so the user can perform [High resolution HDR
observation] which improves the resolution by up to 25%.
Press again to return to live image mode.
OPTIMIZE button
Automatically captures nine images of the object using
different lighting conditions and tiles them on the display.
"Selecting the Best Image" (Page 7-10)
3D DISPLAY button
Performs depth composition and displays a 3D image.
"Quick Composition and 3D" (Page 10-2)
LIGHT SHIFT button
Changes the orientation of the light to emphasize height
differences on the object.
"Changing Lighting Method (Switching Lighting)" (Page
7- 8 )
HDR button
Acquires and displays automatically adjusted image data
for RGB (each color) in 16-bit resolution.
"Enhancing Resolution and Increasing Gradation" (Page 7-
2)
AUTO FOCUS button
Specify the area to observe (the area to focus on) and click
[Start] to automatically adjust the focus.
The Z-axis motorized stage must be connected to use this
function.
age 10-39)
"Using auto foc
LIVE DEPTH UP button
The system will automatically scan through the height of the
sample, building a fully focused image even with the depth-
of-field is limited.
The Z-axis motorized stage must be connected to use this
function.
"Live Depth Composition" (Page 10-3)
us" (P
Dial area
(1) FOCUS dial
Raises or lowers the VHX-S50/S15 Z-axis stage to adjust
focus.
(2) RANGE button
Used to specify upper and lower limit of travel of the VHX-
S50/S15 Z-axis stage.
(3) BRIGHTNESS dial
Adjusts the brightness of the image by adjusting the shutter
speed. When observing dark images, the controller will
automatically increase the gain or use the supercharge
shutter.
"Adjusting the Brightness and Focus" (Page 3-4)
(4) LOCK button
Locks the manual adjustment on the Z-axis motorized
stage. Normally, the lock is engaged at high magnification.
The user should perform focus adjustment by using the
FOCUS dial on the console.
(5) LIGHT button
Turns the lamp on or off.
(6) GAIN/SHUTTER button
This button changes the function of the BRIGHTNESS dial
to adjust the gain or use the supercharge shutter. This is
used when observing dark objects.
"Adjusting the Gain using [Lighting] from the VHX
MENU" (Page 4-4)
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Part Names and Functions
1
Before Using the VHX-5000
XY stage control
(1)
(1) XY STAGE
The LED blinks when the initialization of XYθ stage is not
complete. The LED goes on and stays on when the
initialization is complete.
(2) ORIGIN button
Move the XYθ stage to the origin (center).
(2)
(5)(4)
(3)
(7)(6)
(3) Joystick
Move the position of XYθ stage. Depending on the tilt angle,
the movement speed changes in stages.
(4) CALIBRATION button
Push this to perform calibration. The [Calibration] dialog box
(Page 9-6) appears.
(5) TRANSMITTED LIGHTING
Turns the transmitted lighting on or off.
(6) NAVIGATION
Create a navigation image using the CREATE button.
Use the VIEW button to hide or show the [Navigation View]
dialog box (Page 8-6).
(7) POSITION
Click the REG button to register the stage position when
creating a navigation image.
Use the MOVE button to move the stage to the position that
is registered in the navigation image.
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Viewing the Screen
VHX MENUObservation window Operation area
Direct buttons
Right-click menu
Information view
Refer to the following pages for details on the menus provided in the microscope interface.
Viewing the Screen
Before Using the VHX-5000
Observation Window
Displays the image acquired by the camera in 1600 x 1200
pixels.
Right-click menu
This menu appears when the right mouse button is clicked
over the observation window.
"Switch to the D500 Menu" and "Dual view" are
selectable when VHX-D500 has been installed.
Pause/Resume
Toggles the screen between a paused or frozen image and
a live image.
Sharpening Image mode
Applies vivid color enhancements and profile emphasis to
the image.
"Sharpening Image Mode Settings" (Page 7-7)
To Normal Image
Returns the image to standard condition before applying
emphasis on height difference and Vivid & Sharp mode
enhancements.
Use the wheel to change the zoom of the live image
Allows the user to zoom in or out of a live image using a
mouse wheel.
"Wide-view" (Page 5-9)
- Digital Microscope VHX-5000 User’s Manual -
Switch to the D500 Menu
Switches the VHX MENU to D500 MENU.
Dual view
Displays an optical image and large-depth image next to
each other.
Rec...
Captures the displayed image and stores it on the hard
drive.
"Recording/Saving Still Images" (Page 5-2)
Album...
Allows playback and editing of captured image files.
"Playing Files" (Page 6-6)
Scale...
Displays a scale on the observation screen.
"Displaying Text and Markers" (Page 9-33)
Comment...
Displays a toolbar for entering comments on the observed
image, such as text and markings.
"Displaying Text and Markers" (Page 9-33)
User Setup...
Stores various settings on the [Camera/Image Enhancement],
[Options] menu.
"User Setup" (Page 13-14)
Exit...
Turns the microscope power off.
1-11
Viewing the Screen
1
Before Using the VHX-5000
VHX MENU
The following commands are displayed as icons. Clicking
the icon executes the command.
Easy mode
This allows you to quickly access frequently used functions.
"Improve image" (Page 7)
"Focus" (Page 8)
"Measure" (Page 8)
"Open a saved image" (Page 9)
"Reproduce rec settings" (Page 9)
Lighting
Use this to make advanced adjustments for images that are
too bright (or too dark), to correct the color tone, or for fast
moving objects.
"Adjusting Image Brightness" (Page 4-2)
"Adjusting the Lighting" (Page 4-5)
The following settings are available:
• Camera brightness (shutter speed, gain)
• Lighting (Epi-illumination, Transmitted illumination)
Measure
Measures distances, areas, angles, etc., of the
object.
Measurements can also be made while moving the object
horizontally (XY direction) by using the VH-M100E stage.
“Dimensional measurement” (Page 9-11)
"Area Measurements" (Page 9-25)
"Displaying a Scale" (Page 9-39)
"One-Click Automatic Measurement" (Page 9-40)
"Automatic Area Measurements" (Page 9-44)
"Maximum Area Measurement" (Page 9-63)
"XY Stage Measurement (Optional)" (Page 9-66)
Depth Up
This command is used to adjust the focus on the entire
object when it has large height differences.
It combines and displays the focused parts of multiple
images with different focal points. The combined image can
be used to form a 3D image.
"Live Depth Composition" (Page 10-3)
"Quick Composition and 3D" (Page 10-4)
"Fine Depth Composition" (Page 10-9)
"Z Stage Control" (Page 10-39)
Rec Settings
Performs detailed settings and correction of capturing
images and image saving.
The setting details are as follows.
“A d j usting the White Balance” (Page 4-6)
“Setting the Recording Size” (Page 5-5)
“Setting up Timer Recording” (Page 5-8)
“Recording and Saving Videos” (Page 5-10)
“Observing Tilted Z Axis” (Page 3-6)
“Shake Correction Mode Settings” (Page 7-7)
“Vision correction mode” (Page 8-4)
Image Qlty
Accurately reproduces the delicate state of objects difficult
to observe normally.
"High resolution HDR Observation Settings" (Page 7-3)
"High resolution Observation Settings" (Page 7-4)
"HDR Settings" (Page 7-4)
"Glare Removal Settings" (Page 7-6)
Optimize
Selects the settings (processing) suitable for the target
object before observing.
Also performs image settings such as edge enhancement
and gamma correction.
"Selecting an Image from 9 Different Settings
(Optimize)" (Page 7-10)
"Image Setting Procedures" (Page 7-12)
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Viewing the Screen
1
Before Using the VHX-5000
View/Comment
Sets the image display method.
These settings allow you to zoom in on an image or zoom
out or split the screen and tile images for comparison.
"Using the Split Screen" (Page 8-3)
"List of Comments" (Page 9-33)
"Navigation" (Page 8-6)
"Full Screen Image" (Page 8-4)
"Wide-view" (Page 5-9)
Stitching
This allows you to observe an area larger than the normal
field-of-view in its original clarity by connecting several
images.
Place the object on the XY stage and capture an image
while moving the stage.
Images can be connected to form 2D images or 3D images.
A 2D stitch creates a large image by capturing multiple images
of the object while moving the part via the stage in a
serpentine motion.
A 3D stitch creates a large 3D image using the Z-axis
motorized stage to move the lens vertically. The images are
captured and connected using the Depth Up function.
"Automatic Image Stitching" (Page 11-2)
Dual view
"Dual view" is selectable when VHX-D500 has
been installed.
Displays an optical image and large-depth image next to
each other.
Option
Sets option settings.
"Network/Security Settings" (Page 13-2)
"Lens Settings" (Page 13-14)
"
Calibration Setup
"User Setup" (Page 13-14)
"Show Software Keyboard" (Page 13-16)
"System Initialization" (Page 13-16)
"Initializing Automatic XY Stage" (Page 13-17)
"D500 Maintenance" (Page 13-17)
"Options" (Page 13-18)
"Version Info" (Page 13-20)
" (Page 13-14)
Function Guide
Displays a summary of operating procedures.
Exit
Album
Displays thumbnails of captured (saved) images for review
and management.
Double-clicking a thumbnail displays or plays the recorded
image.
Images can be printed, written to a CD/DVD, or edited using
copy and cut functions.
"Album" (Page 6-2)
Side Album
Displays the album in the operation area. This allows you to
display a screen in the observation window while viewing
the thumbnail of another image.
Double click or drag and drop a thumbnail onto the
observation window to display or play it back.
"Side Album" (Page 6-21)
Turns the microscope power off. (Allows you to select
between sleep, shut down, and restart.)
"Shutting Down the Microscope" (Page 3-8)
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Viewing the Screen
1
Before Using the VHX-5000
Operation Area
Displays the settings of functions selected from the VHX
MENU (Page 1-12) or the console buttons.
Information View
Displays the image size (Page 5-5) and capture mode
(Page 5-6).
Direct Buttons
Clicking these icons provides direct access to pause, save
(Page 5-2), and print images (Page 12-2), and specify the
lens magnification (Page 9-5).
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