INFICON PSG512-S User Manual

Pirani Standard Gauge

PSG500/-S, PSG502-S,
PSG510-S, PSG512-S

Operating Manual

Product Identification

In all communications with INFICON, please specify the in­formation on the product nameplate. For convenient refe­rence copy that information into the space provided below.

INFICON AG, LI-9496 Balzers

Model:
PN:
SN:
V W

Validity

This document applies to products with the following part
numbers:

PSG500 PSG500-S (
350-060 350-080

350-062 350-082
350-061 350-081
350-064 350-084
350-065 350-085
350-063 350-083
350-066 350-086

350-067 350-087
350-068 350-088

PSG502-S (Ni filament)
350-140

350-142
350-141
350-144
350-145
350-143
350-146

350-147
350-148

(DN 16 ISO-KF)
(DN 16 CF-R)
(1/8" NPT)
(8 VCR®)
(4 VCR®)
(½"-Rohr)
(7/16-20 UNF)

(DN 16 ISO-KF long tube)
(DN 16 CF-R long tube)

PSG510-S (W filament) PSG512-S (Ni filament)
350-200

The part number (PN) can be taken from the product name­plate.

If not indicated otherwise in the legends, the illustrations in
this document correspond to the gauge with part number
350 060. They apply to gauges with other part numbers by
analogy.

We reserve the right to make technical changes without prior
notice.

All dimensions in mm.

(DN 16 ISO-KF) 350-300 (DN 16 ISO-KF)

Intended Use

The Pirani Standard Gauges PSG500/-S, PSG502-S,
PSG510-S, PSG512-S have been designed for vacuum
measurement of gases in the pressure range of

-4

5×10

… 1000 mbar.

Incl. EC Declaration of Conformity

tina44e1-g (2010-06)

W filament)

(DN 16 ISO-KF)
(DN 16 CF-R)
(1/8" NPT)
(8 VCR®)
(4 VCR®)
(½"-Rohr)
(7/16-20 UNF)

(DN 16 ISO-KF long tube)
(DN 16 CF-R long tube)

They must not be used for measuring flammable or combus­tible gases in mixtures containing oxidants (e.g. atmospheric
oxygen) within the explosion range.

They can be operated in connection with an INFICON con­troller or with another controller.

Trademark

VCR® Swagelok Marketing Co.

Safety

Symbols Used

DANGER

Information on preventing any kind of physical injury.

WARNING

Information on preventing extensive equipment and envi­ronmental damage.

Caution

Information on correct handling or use. Disregard can lead
to malfunctions or minor equipment damage.

Personnel Qualifications

Skilled personnel

All work described in this document may only be carried out
by persons who have suitable technical training and the
necessary experience or who have been instructed by the
end-user of the product.

General Safety Instructions

• Adhere to the applicable regulations and take the nec­essary precautions for the process media used.

Consider possible reactions between the materials and the
process media.

Consider possible reactions (e.g. explosion) of the process
media due to the heat generated by the product.

• Adhere to the applicable regulations and take the neces­sary precautions for all work you are going to do and con­sider the safety instructions in this document.

• Before beginning to work, find out whether any vacuum
components are contaminated. Adhere to the relevant re­gulations and take the necessary precautions when hand­ling contaminated parts.

Communicate the safety instructions to all other users.

Liability and Warranty

INFICON assumes no liability and the warranty becomes null
and void if the end-user or third parties

• disregard the information in this document

• use the product in a non-conforming manner

• make any kind of interventions (modifications, alterations

etc.) on the product

• use the product with accessories not listed in the product
documentation.

The end-user assumes the responsibility in conjunction with
the process media used.

Gauge failures due to contamination or wear and tear, as well
as expendable parts (filament), are not covered by the
warranty.

Technical Data

Measurement principle thermal conductance according

Measurement range
(air, O

, CO, N2)

2

Accuracy (N

)

2

-3

1×10

… 100 mbar ±15% of reading

-4

5×10

… 1×10-3 mbar ±50% of reading

100 … 1000 mbar ±50% of reading
Resolution 1% of reading
Repeatability

-3

1×10

… 100 mbar 2% of reading

Output signal (measure­ment signal)

Voltage range VDC 0 … +10.3

Measurement range VDC +1.9 … +10.0
Voltage vs. pressure logarithmic

Error signal

Filament rupture V V

Output impedance

Minimum loaded imped­ance

Response time ms 80

Gauge identification

Adjustment one tactile switch for ATM and

Switching functions SP1, SP2

Threshold value indi-

cation and setting

Setting range 2×10

Hysteresis 10% above lower threshold

Relay contact

closed
open

Supply

The gauge may only be connected to power sup­plies, instruments or control devices that conform
to the requirements of a grounded extra-low vol­tage (SELV). The connection to the gauge has to
be fused

Supply voltage

At gauge VDC +14 … +30

Ripple V
Current consumption mA <500

Power consumption W ≤1
Fuse required

1)

AT

Electrical connection FCC 68 / RJ45 appliance

Sensor cable 8 poles plus shielding
Cable length ≤100 m (8×0.14 mm

Grounding concept

Vacuum connection to

signal common

Supply common to

signal common

Materials exposed to
vacuum

PSG500/-S, PSG502-S

PSG510-S,

PSG512-S

Filament

PSG500/-S, PSG510-S

PSG502-S, PSG512-S

1)

INFICON controllers fulfill these requirements.

to Pirani

-4

… 1000 mbar

5×10

1.286 V/decade
0 … +0.5

+0.1

2×4.7

Ω

10, short-circuit proof

kΩ

27.0 kΩ, referenced to supply
common (voltage at pin 4 ≤5 V)

HV adjustment

one tactile switch at measure-

ment value output. Press briefly
for threshold indication. Keep
pressing or press repeatedly for
threshold setting.

-3

… 500 mbar

30 V, 0.5 ADC, floating

at low pressure (lamp is lit)
at high pressure, error, missing
supply

DANGER

1)

.

≤1

pp

(max. starting current)

1

(slow)

connector, 8 poles, male

→ "Electrical Connection"

connected via 1 MΩ
(voltage difference <15 V)

conducted separately, for

differential measurement

DIN 1.4301, DIN 1.4305,
DIN 1.4435, glass, Ni,
NiFe

Al

(ceramics), Ni,

2O3

DIN 1.4435, DIN 1.4305
DIN 1.3981

W
Ni

2

)

Internal volume

DN 16 ISO-KF
DN 16 CF-R
1/8" NPT

®

8 VCR

®

4 VCR
½"-Rohr
7/16-20 UNF

DN 16 ISO-KF long tube
DN 16 CF-R long tube

Admissible pressure bar

Admissible temperatures

Operation °C
Vacuum connection

DN 16 ISO-KF
DN 16 CF-R
1/8" NPT

®

8 VCR

®

4 VCR
½"-Rohr
7/16-20 UNF

°C
°C
°C
°C
°C
°C
°C

3

cm

3

cm

3

cm

3

cm

3

cm

3

cm

3

cm

3

cm

3

cm

(abs.)

+5 … +60

2)

80

2)

80
80
80
80
80
80

≈1.5
≈1.5
≈2
≈2
≈2
≈2
≈1.5

≈10
≈10

10, limited to inert
gases

in horizontal
mounting ori­entation

Filament °C 110
Storage °C –20 … +65

Relative humidity % ≤80 at temperatures up to

Use indoors only, altitude up to

≤+31 °C, decreasing to 50
at +40 °C

2000 m NN
Mounting orientation any
Protection category IP40

Dimensions mm

65

50

20.9

Measurement Signal vs. Pressure

Pressure p

1E+6

1E+5

1E+4

1E+3

1E+2

1E+1

1E+0

1E–1

1E–2

1E–3

1E–4

valid in the range 5×10

U p c

[V] [mbar] 6.143
[V] [µbar] 2.287
[V] [Torr] 6.304
[V] [mTorr] 2.448

where p pressure

Gas Type Dependence

Pressure reading (gauge adjusted for air)

p (mbar)

10

8

70.3

32.8

)

15*

DN 16 ISO-KF
*) PSG51x-S: 20 mm

31.5

14

DN 16 CF-R

41.5

29

1/8" NPT

24

19

tube ½"

7/16-20 UNF

8 VCR

4 VCR

116

DN 16 ISO-KF

DN 16 CF-R

Weight

80

DN 16 ISO-KF
DN 16 CF-R
1/8" NPT

®

8 VCR

®

4 VCR
½"-Rohr
7/16-20 UNF

DN 16 ISO-KF long tube
DN 16 CF-R long tube g g

g

100

g

70

g

130

g

100

g

70

g

80

g

130
140

6

4

2

10

8
6

4

2

10

8
6

4

2

10

8
6

4

2

10

8
6

4

2

10

Calibration factors for the pressure range below 1 mbar

115

[mbar]

Underrange

Sensor error

0.0 0.5 1.0 1.5 2.5 3.5 4.5 5.5 6.5 7.5 8.5 9.5

p = 10

2

1

0

–1

–2

–3

10

Gas
type

He
Ne
Ar
Kr
Xe

2.0 3.0 4.0 5.0 6.0 7.0 8.0 9.0 10. 0

Measurement signal U[V]

((U-c)/1.286)

U measurement signal
c constant (depending on pressure unit)

Water vapor

–3

24

–2

10

6

Calibration

factor C

⇔

3.75×10
5×10

24

p

= C × pressure reading

eff

U = c + 1.286 × log10 p

-4

mbar <p< 1000 mbar

-4

Torr <p< 750 Torr

-2

Pa <p< 1×105 Pa

U p c

[V] [micron] 2.448
[V] [Pa] 3.572
[V] [kPa] 7.429

–1

24

0

10

6

10

6

24

Gas type Calibration

0.8

1.4

1.7

2.4

3.0

H

, CO, N

air, O

2

CO2

water vapor

freon 12

H2He Ne

6

2

10

2

1

24

(mbar)

p

eff

Pa

mbar

Torr

Air
O

2

CO
N

2

CO

2

Ar

Freon 12

Kr

Xe

10

6

factor C

0.5

1.0

0.9

0.5

0.7

Installation

Vacuum Connection

DANGER

DANGER: overpressure in the vacuum system
>1 bar

Overrange

10.3

2

Remove the protective lid and install the product to the vac­uum system.

Injury caused by released parts and harm
caused by escaping process gases can result if
clamps are opened while the vacuum system is
pressurized.

Do not open any clamps while the vacuum sys­tem is pressurized. Use the type of clamps which
are suited to overpressure.

DANGER

DANGER: overpressure in the vacuum system
>2.5 bar

KF connections with elastomer seals (e.g.
O-rings) cannot withstand such pressures. Pro­cess media can thus leak and possibly damage
your health.

Use O-rings provided with an outer centering
ring.

DANGER

DANGER: protective ground
Incorrectly grounded products can be extremely

hazardous in the event of a fault.
The gauge must be electrically connected to the

grounded vacuum chamber. This connection
must conform to the requirements of a protective
connection according to EN 61010:

• CF, NPT, VCR

this requirement.

• For gauges with a KF connection, use a con-

ductive metallic clamping ring.

• If a ½" tube is used, take appropriate meas-

ures for this requirement to be fulfilled.

®

and UNF connections fulfill

Caution

Caution: vacuum component
Dirt and damages impair the function of the vac-

uum component.
When handling vacuum components, take ap-

propriate measures to ensure cleanliness and
prevent damages.

Caution

Caution: dirt sensitive area
Touching the product or parts thereof with bare

hands increases the desorption rate.
Always wear clean, lint-free gloves and use

clean tools when working in this area.

The gauge may be mounted in any orientation. To

keep condensates and particles from getting into the
measuring chamber preferably choose a horizontal
to upright position and possibly use a seal with a
centering ring and filter. If adjustment should be pos­sible after the gauge has been installed, be sure to
install it so that the button can be accessed with a

→ "Adjusting the Gauge").

pin (

Keep the protective lid.

2)

250 °C with long tube.

Original: German tina44d1-g (2010-06)

t i na44e1- g

(2010-06)

Electrical Connection

Make sure the vacuum connection is properly made

→ "Vacuum Connection").

(

 If no sensor cable is available, make one according to

the following diagram.

Gauge with sw itching functi ons

<SP1> <SP2>

SP2

SP1

Measurement

signal

1M

Electrical connection
Pin 1 Supply
Pin 2 Supply common, GND
Pin 3 Measurement signal
or thresholds SP1/2
Pin 4 Gauge identification
Pin 5 Signal common
Pin 6, 8 Relay SP2, closing contact
Pin 7, 8 Relay SP1, closing contact

SP2

SP1

27k

Ω

4.7

Ω

4.7

Ω

Ω

+

6
8
7
3
5
4
1
2

1

8

8-pole

FCC-68

connector

+
–

Ident

+
–

 Connect the sensor cable to the gauge and the control-

ler.

Operation

When the supply voltage is applied, the measurement signal
is available between pins 3 and 5 (relationship between
measurement signal and pressure

Allow a stabilization period of at least 10 minutes. It is advis­able to operate the gauge continuously, irrespective of the
pressure.

Gas Type Dependence

The measurement value is gas dependent. The pressure
reading applies to dry air, O
has to be corrected (

If the gauge is operated with an INFICON controller, a cali­bration factor for correction of the actual reading can be ap­plied (

→  of the corresponding controller).

→ "Technical Data").

Adjusting the Gauge

The gauge is factory calibrated. Due to long time operation or
contamination, a zero drift could occur. Periodically check the
zero and adjust it if necessary.

For adjusting the zero, operate the gauge under the same
ambient conditions and in the same mounting orientation as
normally.

The gauge is adjusted to default values. However, it can also
be adjusted to other pressure values, if the exact pressure
value is known (reference measurement).

→ "Technical Data").

, CO and N2. For other gases, it

2

 If you are using a seal with centering ring and filter,

check that they are clean or replace them if necessary
(

→ "Deinstallation").

 Activate the gauge and operate it at atmospheric pres-

sure for at least 10 minutes.

 Press the button with a pin (max. ø1.1 mm) and the

ATM adjustment is carried out: The gauge is adjusted
to 1000 mbar (10 VDC) by default. By pressing the
button >5 s the pressure value is increased towards
1200 mbar (or, by pressing it again, decreased towards
500 mbar) until the button is released or the limit is
reached.

ATM

HV

max. ø1.1 mm

 Evacuate to p << 10

pressure in the range of 10
least 2 minutes.

-4

mbar (recommended) or to a

-4

… 10-2 mbar and wait at

 Press the button with a pin and the HV adjustment is

carried out: The gauge is adjusted to 1.2×10
(1.1 VDC) by default. By pressing the button >5 s the
pressure value is increased toward 1×10
the button is released or the limit is reached.

Switching Functions

(PSG500-S and PSG502-S only)

The setpoints are adjustable within a pressure range of

-3

2×10

… 500 mbar (voltage range of 2.67 … 9.61 VDC).
Each switching function provides a floating relay contact
(

→ "Electrical Connection").

Lamps

Measurement signal (Pressure p)

Off

Adjusting the Setpoints

Setpoint

On

DANGER

DANGER: malfunction
If processes are controlled via the signal output,

keep in mind that by pressing a button <SP> the
measururement signal is suppressed and that
the corresponding threshold value is output
instead. This can cause malfunctions.

Press a button <SP> only if you are sure that no
damages can arise from a malfunction.

The status of the relay and lamp is not affected by

pressing the button.

The status of the switching func­tion is indicated by a lamp.

Status Lamp Relay

off dark deenergized

n

e

m

e

r

u

s

a

e

M

Hysteresis (10%
of threshold value)

Threshold value

Off

 Press the button <SP1> with a pin (max. ø1.1 mm):

The gauge changes to the switching function mode and
outputs the current lower threshold value at the
measurement value output for about 5 s. When the
button is kept depressed for more than 5 s, the
threshold setting is modified until the button is released
or until the limit of the setting range is reached.

Keep the button

max. ø1.1 mm

depressed

The upper thresh­old is 10% above
the lower one
(hysteresis).

 W hen the button is pressed again within 5 s the thresh-

old setting is adjusted in the reverse direction.

-4

mbar

-2

mbar until

e

u

l

a

v

t

Time t

 Release the button. The gauge resumes operation after

5 s and the connected controller displays the current
measurement value.

The adjustment procedure for <SP2> is the same as de­scribed for <SP1>.

Deinstallation

DANGER

DANGER: contaminated parts
Contaminated parts can be detrimental to health

and environment.
Before beginning to work, find out whether any

parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.

Caution

Caution: vacuum component
Dirt and damages impair the function of the vac-

uum component.
When handling vacuum components, take ap-

propriate measures to ensure cleanliness and
prevent damages.

Caution

Caution: dirt sensitive area
Touching the product or parts thereof with bare

hands increases the desorption rate.
Always wear clean, lint-free gloves and use

clean tools when working in this area.

 Vent the vacuum system.

 Turn the gauge off.

 Unplug the sensor cable.

 Remove the gauge from the vacuum system and install

the protective lid.

Maintenance, Repair

In case of severe contamination or a malfunction, the sensor
can be replaced.

Gauge failures due to contamination or wear and

tear, as well as expendable parts (filament), are not
covered by the warranty.

INFICON assumes no liability and the warranty becomes null
and void if any repair work is carried out by the end-user or
third parties.

Spare Parts

When ordering spare parts, always indicate:

• all information on the product nameplate

• description and ordering number according to the spare

parts list

Sensor for gauge Ordering number

350-060, 350-080
350-062, 350-082
350-061, 350-081
350-064, 350-084
350-065, 350-085
350-063, 350-083
350-066, 350-086

350-067, 350-087
350-068, 350-088

350-200

350-140
350-142
350-141
350-144
350-145
350-143
350-146

350-147
350-148

350-300

350-920
350-922
350-921
350-924
350-926
350-923
350-925

350-927
350-928

350 930

350-900
350-902
350-901
350-904
350-906
350-903
350-905

350-907
350-908

350-940

Returning the Product

WARNING

WARNING: forwarding contaminated products
Contaminated products (e.g. radioactive, toxic,

caustic or microbiological hazard) can be detri­mental to health and environment.

Products returned to INFICON should preferably
be free of harmful substances. Adhere to the
forwarding regulations of all involved countries
and forwarding companies and enclose a duly
completed declaration of contamination.

Products that are not clearly declared as "free of harmful sub­stances" are decontaminated at the expense of the customer.

Products not accompanied by a duly completed declaration of
contamination are returned to the sender at his own expense.

Disposal

DANGER

DANGER: contaminated parts
Contaminated parts can be detrimental to health

and environment.
Before beginning to work, find out whether any

parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.

WARNING

N

WARNING: substances detrimental to the en­vironment

Products or parts thereof (mechanical and elec­tric components, operating fluids etc.) can be
detrimental to the environment.

Dispose of such substances in accordance with
the relevant local regulations.

Separating the components

After disassembling the product, separate its components
according to the following criteria:

• Contaminated components

Contaminated components (radioactive, toxic, caustic, or
biological hazard etc.) must be decontaminated in accor­dance with the relevant national regulations, separated
according to their materials, and disposed of.

• Other components

Such components must be separated according to their
materials and recycled.

Declaration of Contamination

The service, repair, and/or disposal of vacuum equipment and com­ponents will only be carried out if a correctly completed declaration
has been submitted. Non-completion will result in delay.
This declaration may only be completed (in block letters) and signed
by authorized and qualified staff.

Description of product

Type
Part number
Serial number

Reason for return

Operating fluid(s) used

(Must be drained before shipping.)

Used in copper process

no  yes 

Process related contamination of product:

toxic no  1) yes
corrosive no  1) yes 
biological hazard no  yes  2)
explosive no  yes  2)
radi oactive no  yes  2)
other harmful substances no  1) yes

1) or not containing any
amount of hazardous
residues that exceed the
permissible exposure limits

The product is free
of any substances
which are damaging
to health.

Harmful substances, gases and/or

by-products

Please list all substances, gases, and by-products
which the product may have come into contact with:

Trade/product name
manufacturer

Precauti ons associat ed with
substance

Legally bi nding declaration:

We hereby declare that the information on this form is
complete and accurate and that we will assume any further
costs that may arise. The contaminated product will be dis­patched in accordance with the applicable regulations.

Organization/company

Address

Post code, place

Phone Fax

Email

Name

Company stamp

Date and legally binding signature

This form can be download ed from our website.
Copies: Original for addr essee

1 copy for accompanying documents

1 copy for file of sender

yes

Seal product in plastic
bag and mark it with a
corresponding label.





2) Products thus
contaminated
will not be
accepted with­ out written
evidence of
decontami -

Chemical nam e
(or symbol)

Action if human
contact

nation.



EC Declaration of Conformity

Products

We, INFICON, hereby declare that the equip­ment mentioned below complies with the pro­visions of the Directive relating to electro­magnetic compatibility 2004/108/EC.

Pirani Standard Gauge

PSG500/-S, PSG502-S,
PSG510-S, PSG512-S

Standards

Harmonized and international/national standards and specifi­cations:

• EN 61000-6-2:2005 (EMC: generic emission standard)

• EN 61000-6-3:2007 (EMC: generic immunity standard)

• EN 61010-1:2001 (Safety requirements for electrical equip-

ment for measurement, control and laboratory use)

• EN 61326-1:2006 (EMC requirements for electrical equip-

ment for measurement, control and laboratory use)

Manufacturer / Signatures

INFICON AG, Alte Landstrasse 6, LI-9496 Balzers

22 June 2010 22 June 2010

Dr. Urs Wälchli
Managing Director

Claudio Christoffel
Product Manager

LI–9496 Balzers
Liechtenstein
Tel +423 / 388 3111
Fax +423 / 388 3700
[e-mail]

www.inficon.com