INFICON PSG512-S User Manual

Pirani Standard Gauge

PSG500/-S, PSG502-S, PSG510-S, PSG512-S

Operating Manual

Product Identification

In all communications with INFICON, please specify the information on the product nameplate. For convenient reference copy that information into the space provided below.

INFICON AG, LI-9496 Balzers

Model: PN: SN: V W

Validity

This document applies to products with the following part numbers:

PSG500 PSG500-S ( 350-060 350-080

350-062 350-082 350-061 350-081 350-064 350-084 350-065 350-085 350-063 350-083 350-066 350-086

350-067 350-087 350-068 350-088

PSG502-S (Ni filament) 350-140

350-142 350-141 350-144 350-145 350-143 350-146

350-147 350-148

(DN 16 ISO-KF) (DN 16 CF-R) (1/8" NPT) (8 VCR®) (4 VCR®) (½"-Rohr) (7/16-20 UNF)

(DN 16 ISO-KF long tube) (DN 16 CF-R long tube)

PSG510-S (W filament) PSG512-S (Ni filament) 350-200

The part number (PN) can be taken from the product nameplate.

If not indicated otherwise in the legends, the illustrations in this document correspond to the gauge with part number 350 060. They apply to gauges with other part numbers by analogy.

We reserve the right to make technical changes without prior notice.

All dimensions in mm.

(DN 16 ISO-KF) 350-300 (DN 16 ISO-KF)

Intended Use

The Pirani Standard Gauges PSG500/-S, PSG502-S, PSG510-S, PSG512-S have been designed for vacuum measurement of gases in the pressure range of

-4

5×10

… 1000 mbar.

Incl. EC Declaration of Conformity

tina44e1-g (2010-06)

W filament)

(DN 16 ISO-KF) (DN 16 CF-R) (1/8" NPT) (8 VCR®) (4 VCR®) (½"-Rohr) (7/16-20 UNF)

(DN 16 ISO-KF long tube) (DN 16 CF-R long tube)

They must not be used for measuring flammable or combustible gases in mixtures containing oxidants (e.g. atmospheric oxygen) within the explosion range.

They can be operated in connection with an INFICON controller or with another controller.

Trademark

VCR® Swagelok Marketing Co.

Safety

Symbols Used

DANGER

Information on preventing any kind of physical injury.

WARNING

Information on preventing extensive equipment and environmental damage.

Caution

Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage.

Personnel Qualifications

Skilled personnel

All work described in this document may only be carried out by persons who have suitable technical training and the necessary experience or who have been instructed by the end-user of the product.

General Safety Instructions

• Adhere to the applicable regulations and take the necessary precautions for the process media used.

Consider possible reactions between the materials and the process media.

Consider possible reactions (e.g. explosion) of the process media due to the heat generated by the product.

• Adhere to the applicable regulations and take the necessary precautions for all work you are going to do and consider the safety instructions in this document.

• Before beginning to work, find out whether any vacuum components are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.

Communicate the safety instructions to all other users.

Liability and Warranty

INFICON assumes no liability and the warranty becomes null and void if the end-user or third parties

• disregard the information in this document

• use the product in a non-conforming manner

• make any kind of interventions (modifications, alterations

etc.) on the product

• use the product with accessories not listed in the product documentation.

The end-user assumes the responsibility in conjunction with the process media used.

Gauge failures due to contamination or wear and tear, as well as expendable parts (filament), are not covered by the warranty.

Technical Data

Measurement principle thermal conductance according

Measurement range (air, O

, CO, N2)

Accuracy (N

)

-3

1×10

… 100 mbar ±15% of reading

-4

5×10

… 1×10-3 mbar ±50% of reading

100 … 1000 mbar ±50% of reading Resolution 1% of reading Repeatability

-3

1×10

… 100 mbar 2% of reading

Output signal (measurement signal)

Voltage range VDC 0 … +10.3

Measurement range VDC +1.9 … +10.0 Voltage vs. pressure logarithmic

Error signal

Filament rupture V V

Output impedance

Minimum loaded impedance

Response time ms 80

Gauge identification

Adjustment one tactile switch for ATM and

Switching functions SP1, SP2

Threshold value indi-

cation and setting

Setting range 2×10

Hysteresis 10% above lower threshold

Relay contact

closed open

Supply

The gauge may only be connected to power supplies, instruments or control devices that conform to the requirements of a grounded extra-low voltage (SELV). The connection to the gauge has to be fused

Supply voltage

At gauge VDC +14 … +30

Ripple V Current consumption mA <500

Power consumption W ≤1 Fuse required

Electrical connection FCC 68 / RJ45 appliance

Sensor cable 8 poles plus shielding Cable length ≤100 m (8×0.14 mm

Grounding concept

Vacuum connection to

signal common

Supply common to

signal common

Materials exposed to vacuum

PSG500/-S, PSG502-S

PSG510-S,

PSG512-S

Filament

PSG500/-S, PSG510-S

PSG502-S, PSG512-S

INFICON controllers fulfill these requirements.

to Pirani

-4

… 1000 mbar

5×10

1.286 V/decade 0 … +0.5

+0.1

2×4.7

10, short-circuit proof

kΩ

27.0 kΩ, referenced to supply common (voltage at pin 4 ≤5 V)

HV adjustment

one tactile switch at measure-

ment value output. Press briefly for threshold indication. Keep pressing or press repeatedly for threshold setting.

-3

… 500 mbar

30 V, 0.5 ADC, floating

at low pressure (lamp is lit) at high pressure, error, missing supply

DANGER

≤1

(max. starting current)

(slow)

connector, 8 poles, male

→ "Electrical Connection"

connected via 1 MΩ (voltage difference <15 V)

conducted separately, for

differential measurement

DIN 1.4301, DIN 1.4305, DIN 1.4435, glass, Ni, NiFe

(ceramics), Ni,

2O3

DIN 1.4435, DIN 1.4305 DIN 1.3981

W Ni

)

Internal volume

DN 16 ISO-KF DN 16 CF-R 1/8" NPT

8 VCR

4 VCR ½"-Rohr 7/16-20 UNF

DN 16 ISO-KF long tube DN 16 CF-R long tube

Admissible pressure bar

Admissible temperatures

Operation °C Vacuum connection

DN 16 ISO-KF DN 16 CF-R 1/8" NPT

8 VCR

4 VCR ½"-Rohr 7/16-20 UNF

°C °C °C °C °C °C °C

(abs.)

+5 … +60

80 80 80 80 80 80

≈1.5 ≈1.5 ≈2 ≈2 ≈2 ≈2 ≈1.5

≈10 ≈10

10, limited to inert gases

in horizontal mounting orientation

Filament °C 110 Storage °C –20 … +65

Relative humidity % ≤80 at temperatures up to

Use indoors only, altitude up to

≤+31 °C, decreasing to 50 at +40 °C

2000 m NN Mounting orientation any Protection category IP40

Dimensions mm

20.9

Measurement Signal vs. Pressure

Pressure p

1E+6

1E+5

1E+4

1E+3

1E+2

1E+1

1E+0

1E–1

1E–2

1E–3

1E–4

valid in the range 5×10

U p c

[V] [mbar] 6.143 [V] [µbar] 2.287 [V] [Torr] 6.304 [V] [mTorr] 2.448

where p pressure

Gas Type Dependence

Pressure reading (gauge adjusted for air)

p (mbar)

70.3

32.8

)

15*

DN 16 ISO-KF *) PSG51x-S: 20 mm

31.5

DN 16 CF-R

41.5

1/8" NPT

tube ½"

7/16-20 UNF

8 VCR

4 VCR

116

DN 16 ISO-KF

DN 16 CF-R

Weight

DN 16 ISO-KF DN 16 CF-R 1/8" NPT

8 VCR

4 VCR ½"-Rohr 7/16-20 UNF

DN 16 ISO-KF long tube DN 16 CF-R long tube g g

100

130

100

130 140

8 6

Calibration factors for the pressure range below 1 mbar

115

[mbar]

Underrange

Sensor error

0.0 0.5 1.0 1.5 2.5 3.5 4.5 5.5 6.5 7.5 8.5 9.5

p = 10

–1

–2

–3

Gas type

He Ne Ar Kr Xe

2.0 3.0 4.0 5.0 6.0 7.0 8.0 9.0 10. 0

Measurement signal U[V]

((U-c)/1.286)

U measurement signal c constant (depending on pressure unit)

Water vapor

–3

–2

Calibration

factor C

⇔

3.75×10 5×10

= C × pressure reading

eff

U = c + 1.286 × log10 p

-4

mbar <p< 1000 mbar

-4

Torr <p< 750 Torr

-2

Pa <p< 1×105 Pa

U p c

[V] [micron] 2.448 [V] [Pa] 3.572 [V] [kPa] 7.429

–1

Gas type Calibration

0.8

1.4

1.7

2.4

3.0

, CO, N

air, O

CO2

water vapor

freon 12

H2He Ne

(mbar)

eff

mbar

Torr

Air O

CO N

Freon 12

factor C

0.5

1.0

0.9

0.5

0.7

Installation

Vacuum Connection

DANGER

DANGER: overpressure in the vacuum system >1 bar

Overrange

10.3

Remove the protective lid and install the product to the vacuum system.

Injury caused by released parts and harm caused by escaping process gases can result if clamps are opened while the vacuum system is pressurized.

Do not open any clamps while the vacuum system is pressurized. Use the type of clamps which are suited to overpressure.

DANGER

DANGER: overpressure in the vacuum system >2.5 bar

KF connections with elastomer seals (e.g. O-rings) cannot withstand such pressures. Process media can thus leak and possibly damage your health.

Use O-rings provided with an outer centering ring.

DANGER

DANGER: protective ground Incorrectly grounded products can be extremely

hazardous in the event of a fault. The gauge must be electrically connected to the

grounded vacuum chamber. This connection must conform to the requirements of a protective connection according to EN 61010:

• CF, NPT, VCR

this requirement.

• For gauges with a KF connection, use a con-

ductive metallic clamping ring.

• If a ½" tube is used, take appropriate meas-

ures for this requirement to be fulfilled.

and UNF connections fulfill

Caution

Caution: vacuum component Dirt and damages impair the function of the vac-

uum component. When handling vacuum components, take ap-

propriate measures to ensure cleanliness and prevent damages.

Caution

Caution: dirt sensitive area Touching the product or parts thereof with bare

hands increases the desorption rate. Always wear clean, lint-free gloves and use

clean tools when working in this area.

The gauge may be mounted in any orientation. To

keep condensates and particles from getting into the measuring chamber preferably choose a horizontal to upright position and possibly use a seal with a centering ring and filter. If adjustment should be possible after the gauge has been installed, be sure to install it so that the button can be accessed with a

→ "Adjusting the Gauge").

pin (

Keep the protective lid.

250 °C with long tube.

Original: German tina44d1-g (2010-06)

t i na44e1- g

(2010-06)

+ 2 hidden pages