INFICON PSG500, PSG500-S, PSG502-S, PSG510-S, PSG512-S Operating Manua

Pirani Standard Gauge

PSG500/-S, PSG502-S, PSG510-S, PSG512-S

Operating Manual

Product Identification

In all communications with INFICON, please specify the information on the product nameplate. For convenient reference copy that information into the space provided below.

INFICON AG, LI-9496 Balzers

Model: PN: SN: V W

Validity

This document applies to products with the following part numbers:

PSG500 PSG500-S ( 350-060 350-080

350-062 350-082 350-061 350-081 350-064 350-084 350-065 350-085 350-063 350-083 350-066 350-086

350-067 350-087 350-068 350-088

PSG502-S (Ni filament) 350-140

350-142 350-141 350-144 350-145 350-143 350-146

350-147 350-148

(DN 16 ISO-KF) (DN 16 CF-R) (1/8" NPT) (8 VCR®) (4 VCR®) (½"-Rohr) (7/16-20 UNF)

(DN 16 ISO-KF long tube) (DN 16 CF-R long tube)

PSG510-S (W filament) PSG512-S (Ni filament) 350-200

The part number (PN) can be taken from the product nameplate.

If not indicated otherwise in the legends, the illustrations in this document correspond to the gauge with part number 350 060. They apply to gauges with other part numbers by analogy.

We reserve the right to make technical changes without prior notice.

All dimensions in mm.

(DN 16 ISO-KF) 350-300 (DN 16 ISO-KF)

Intended Use

The Pirani Standard Gauges PSG500/-S, PSG502-S, PSG510-S, PSG512-S have been designed for vacuum measurement of gases in the pressure range of

-4

5×10

… 1000 mbar.

Incl. EU Declaration of Conformity

tina44e1-i (2015-10)

W filament)

(DN 16 ISO-KF) (DN 16 CF-R) (1/8" NPT) (8 VCR®) (4 VCR®) (½"-Rohr) (7/16-20 UNF)

(DN 16 ISO-KF long tube) (DN 16 CF-R long tube)

They must not be used for measuring flammable or combustible gases in mixtures containing oxidants (e.g. atmospheric oxygen) within the explosion range.

They can be operated in connection with an INFICON controller or with another controller.

Trademark

VCR® Swagelok Marketing Co.

Safety

Symbols Used

DANGER

Information on preventing any kind of physical injury.

WARNING

Information on preventing extensive equipment and environmental damage.

Caution

Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage.

Personnel Qualifications

Skilled personnel

All work described in this document may only be carried out by persons who have suitable technical training and the necessary experience or who have been instructed by the end-user of the product.

General Safety Instructions

• Adhere to the applicable regulations and take the necessary precautions for the process media used.

Consider possible reactions between the materials and the process media.

Consider possible reactions (e.g. explosion) of the process media due to the heat generated by the product.

• Adhere to the applicable regulations and take the necessary precautions for all work you are going to do and consider the safety instructions in this document.

• Before beginning to work, find out whether any vacuum components are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.

Communicate the safety instructions to all other users.

Liability and Warranty

INFICON assumes no liability and the warranty becomes null and void if the end-user or third parties

• disregard the information in this document

• use the product in a non-conforming manner

• make any kind of interventions (modifications, alterations

etc.) on the product

• use the product with accessories not listed in the product documentation.

The end-user assumes the responsibility in conjunction with the process media used.

Gauge failures due to contamination or wear and tear, as well as expendable parts (e.g. filament), are not covered by the warranty.

Technical Data

Measurement principle thermal conductance according

Measurement range (air, O

, CO, N2)

Accuracy (N

)

-3

1×10

… 100 mbar ±15% of reading

-4

5×10

… 1×10-3 mbar ±50% of reading

100 … 1000 mbar ±50% of reading Resolution 1% of reading Repeatability

-3

1×10

… 100 mbar 2% of reading

Output signal (measurement signal)

Voltage range V (dc) 0 … +10.3

Measurement range V (dc) +1.9 … +10.0 Voltage vs. pressure logarithmic

Error signal

Filament rupture V V

Output impedance

Minimum loaded impedance

Response time ms 80

Gauge identification

Adjustment one tactile switch for ATM and

Switching functions SP1, SP2

Threshold value indi-

cation and setting

Setting range 2×10

Hysteresis 10% above lower threshold

Relay contact

closed open

Supply

The gauge may only be connected to power supplies, instruments or control devices that conform to the requirements of a grounded extra-low voltage (PELV). The connection to the gauge has to be fused

Supply voltage

At gauge V (dc) +14 … +30

Ripple V Current consumption mA <500

Power consumption W ≤1 Fuse required

Electrical connection FCC 68 / RJ45 appliance

Sensor cable 8 poles plus shielding Cable length ≤100 m (8×0.14 mm

Grounding concept

Vacuum connection to

signal common

Supply common to

signal common

Materials exposed to vacuum

PSG500/-S, PSG502-S

PSG510-S,

PSG512-S

Filament

PSG500/-S, PSG510-S

PSG502-S, PSG512-S

INFICON controllers fulfill these requirements.

to Pirani

-4

… 1000 mbar

5×10

1.286 V/decade 0 … +0.5

+0.1

2×4.7

10, short-circuit proof

kΩ

27.0 kΩ, referenced to supply common (voltage at pin 4 ≤5 V)

HV adjustment

one tactile switch at measure-

ment value output. Press briefly for threshold indication. Keep pressing or press repeatedly for threshold setting.

-3

… 500 mbar

30 V, 0.5 A (dc), floating

at low pressure (lamp is lit) at high pressure, error, missing supply

DANGER

≤1

(max. starting current)

(slow)

connector, 8 poles, male

→ "Electrical Connection"

connected via 1 MΩ (voltage difference <15 V)

conducted separately, for

differential measurement

DIN 1.4301, DIN 1.4305, DIN 1.4435, glass, Ni, NiFe

(ceramics), Ni,

2O3

DIN 1.4435, DIN 1.4305 DIN 1.3981

W Ni

Internal volume

DN 16 ISO-KF DN 16 CF-R 1/8" NPT

8 VCR

4 VCR ½"-Rohr 7/16-20 UNF

DN 16 ISO-KF long tube DN 16 CF-R long tube

Admissible pressure bar

Admissible temperatures

Operation °C Vacuum connection

DN 16 ISO-KF DN 16 CF-R 1/8" NPT

8 VCR

4 VCR ½"-Rohr 7/16-20 UNF

°C °C °C °C °C °C °C

(abs.)

+5 … +60

80 80 80 80 80 80

≈1.5 ≈1.5 ≈2 ≈2 ≈2 ≈2 ≈1.5

≈10 ≈10

10, limited to inert gases

in horizontal mounting orientation

Filament °C 110 Storage °C –20 … +65

Relative humidity % ≤80 at temperatures up to

Use indoors only, altitude up to

≤+31 °C, decreasing to 50 at +40 °C

2000 m NN Mounting orientation any Protection category IP40

Dimensions mm

20.9

Measurement Signal vs. Pressure

Pressure p

1E+6

1E+5

1E+4

1E+3

1E+2

1E+1

1E+0

1E–1

1E–2

1E–3

1E–4

valid in the range 5×10

U p c

[V] [mbar] 6.143 [V] [µbar] 2.287 [V] [Torr] 6.304 [V] [mTorr] 2.448

where p pressure

[mbar]

Underrange

Sensor error

0.0 0.5 1.0 1.5 2.5 3.5 4.5 5.5 6.5 7.5 8.5 9.5

p = 10

2.0 3.0 4.0 5.0 6.0 7.0 8.0 9.0 10.0

Measurement signal U[V]

((U-c)/1.286)

U measurement signal c constant (depending on pressure unit)

⇔

3.75×10 5×10

U = c + 1.286 × log10 p

-4

mbar <p< 1000 mbar

-4

Torr <p< 750 Torr

-2

Pa <p< 1×105 Pa

U p c

[V] [micron] 2.448 [V] [Pa] 3.572 [V] [kPa] 7.429

mbar

Torr

Gas Type Dependence

Pressure reading (gauge adjusted for air)

p (mbar)

8 6

–1

8 6

Water vapor

–2

8 6

–3

–2

–1

Calibration factors for the pressure range below 1 mbar

115

= C × pressure reading

eff

)

15*

DN 16 ISO-KF *) PSG51x-S: 20 mm

31.5

8 VCR

32.8

DN 16 CF-R

41.5

4 VCR

1/8" NPT

7/16-20 UNF

70.3

tube ½"

116

Gas

)

Weight

DN 16 ISO-KF DN 16 CF-R 1/8" NPT

8 VCR

4 VCR ½"-Rohr 7/16-20 UNF

DN 16 ISO-KF long tube DN 16 CF-R long tube g g

250 °C with long tube.

DN 16 ISO-KF

100

130

100

80 130

140

DN 16 CF-R

type

He Ne

Ar Kr

Calibration

factor C

0.8

1.4

1.7

2.4

3.0

Gas type Calibration

, CO, N2

air, O

water vapor

freon 12

H2He Ne

(mbar)

eff

Air O

CO N

Freon 12

factor C

0.5

1.0

0.9

0.5

0.7

Installation

Vacuum Connection

DANGER

DANGER: overpressure in the vacuum system >1 bar

Overrange

10.3

Remove the protective lid and install the product to the vacuum system.

Original: German tina44d1-i (2015-10)

Injury caused by released parts and harm caused by escaping process gases can result if clamps are opened while the vacuum system is pressurized.

Do not open any clamps while the vacuum system is pressurized. Use the type of clamps which are suited to overpressure.

DANGER

DANGER: overpressure in the vacuum system >2.5 bar

KF connections with elastomer seals (e.g. O-rings) cannot withstand such pressures. Process media can thus leak and possibly damage your health.

Use O-rings provided with an outer centering ring.

DANGER

DANGER: protective ground Incorrectly grounded products can be extremely

hazardous in the event of a fault. The gauge must be electrically connected to the

grounded vacuum chamber. This connection must conform to the requirements of a protective connection according to EN 61010:

• CF, NPT, VCR

this requirement.

• For gauges with a KF connection, use a con-

ductive metallic clamping ring.

• If a ½" tube is used, take appropriate meas-

ures for this requirement to be fulfilled.

and UNF connections fulfill

Caution

Caution: vacuum component Dirt and damages impair the function of the vac-

uum component. When handling vacuum components, take ap-

propriate measures to ensure cleanliness and prevent damages.

Caution

Caution: dirt sensitive area Touching the product or parts thereof with bare

hands increases the desorption rate. Always wear clean, lint-free gloves and use

clean tools when working in this area.

The gauge may be mounted in any orientation. To

keep condensates and particles from getting into the measuring chamber preferably choose a horizontal to upright position and possibly use a seal with a centering ring and filter. If adjustment should be possible after the gauge has been installed, be sure to install it so that the button can be accessed with a

→ "Adjusting the Gauge").

pin (

Keep the protective lid.

t i na44e1- i

(2015-10)

Electrical Connection

Make sure the vacuum connection is properly made

→ "Vacuum Connection").

(

 If no sensor cable is available, make one according to

the following diagram.

Gauge with switching functions

SP1

Measurement

signal

SP2

SP1

4.7

27k

6 8 7 3 5 4 1 2

+ –

Ident

+ –

Electrical connection Pin 1 Supply Pin 2 Supply common, GND Pin 3 Measurement signal or thresholds SP1/2 Pin 4 Gauge identification Pin 5 Signal common Pin 6, 8 Relay SP2, closing contact Pin 7, 8 Relay SP1, closing contact

8-pole

FCC-68

connector

 Connect the sensor cable to the gauge and the control-

ler.

Operation

When the supply voltage is applied, the measurement signal is available between pins 3 and 5 (relationship between measurement signal and pressure

Allow a stabilization period of at least 10 minutes. It is advisable to operate the gauge continuously, irrespective of the pressure.

Gas Type Dependence

The measurement value is gas dependent. The pressure reading applies to dry air, O has to be corrected (

If the gauge is operated with an INFICON controller, a calibration factor for correction of the actual reading can be applied (

→  of the corresponding controller).

→ "Technical Data").

Adjusting the Gauge

The gauge is factory calibrated. Due to long time operation or contamination, a zero drift could occur. Periodically check the zero and adjust it if necessary.

For adjusting the zero, operate the gauge under the same ambient conditions and in the same mounting orientation as normally.

The gauge is adjusted to default values. However, it can also be adjusted to other pressure values, if the exact pressure value is known (reference measurement).

→ "Technical Data").

, CO and N2. For other gases, it

 If you are using a seal with centering ring and filter,

check that they are clean or replace them if necessary (

→ "Deinstallation").

 Activate the gauge and operate it at atmospheric pres-

sure for at least 10 minutes.

 Press the button with a pin (max. ø1.1 mm) and the

ATM adjustment is carried out: The gauge is adjusted to 1000 mbar (10 V (dc)) by default. By pressing the button >5 s the pressure value is increased towards 1200 mbar (or, by pressing it again, decreased towards 500 mbar) until the button is released or the limit is reached.

ATM

max. ø1.1 mm

 Evacuate to p << 10

pressure in the range of 10 least 2 minutes.

-4

mbar (recommended) or to a

-4

… 10-2 mbar and wait at

 Press the button with a pin and the HV adjustment is

carried out: The gauge is adjusted to 1.2×10 (1.1 V (dc)) by default. By pressing the button >5 s the pressure value is increased toward 1×10 the button is released or the limit is reached.

Switching Functions

(PSG500-S and PSG502-S only)

The setpoints are adjustable within a pressure range of

-3

2×10

… 500 mbar (voltage range of 2.67 … 9.61 V (dc)). Each switching function provides a floating relay contact (

→ "Electrical Connection").

Lamps

Measurement signal (Pressure p)

Setpoint

Off

Adjusting the Setpoints

DANGER

DANGER: malfunction If processes are controlled via the signal output,

keep in mind that by pressing a button <SP> the measururement signal is suppressed and that the corresponding threshold value is output instead. This can cause malfunctions.

Press a button <SP> only if you are sure that no damages can arise from a malfunction.

The status of the relay and lamp is not affected by

pressing the button.

The status of the switching function is indicated by a lamp.

Status Lamp Relay

off

dark

lit

Hysteresis (10% of threshold value)

Threshold value

Off

 Press the button <SP1> with a pin (max. ø1.1 mm):

The gauge changes to the switching function mode and outputs the current lower threshold value at the measurement value output for about 5 s. When the button is kept depressed for more than 5 s, the threshold setting is modified until the button is released or until the limit of the setting range is reached.

max. ø1.1 mm

Keep the button

depressed

 W hen the button is pressed again within 5 s the thresh-

old setting is adjusted in the reverse direction.

-4

mbar

-2

mbar until

deenergized

energized

Time t

The upper threshold is 10% above the lower one (hysteresis).

 Release the button. The gauge resumes operation after

5 s and the connected controller displays the current measurement value.

The adjustment procedure for <SP2> is the same as described for <SP1>.

Deinstallation

DANGER

DANGER: contaminated parts Contaminated parts can be detrimental to health

and environment. Before beginning to work, find out whether any

parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.

Caution

Caution: vacuum component Dirt and damages impair the function of the vac-

uum component. When handling vacuum components, take ap-

propriate measures to ensure cleanliness and prevent damages.

Caution

Caution: dirt sensitive area Touching the product or parts thereof with bare

hands increases the desorption rate. Always wear clean, lint-free gloves and use

clean tools when working in this area.

 Vent the vacuum system.

 Put the gauge out of operation.

 Unplug the sensor cable.

 Remove the gauge from the vacuum system and install

the protective lid.

Maintenance, Repair

In case of severe contamination or a malfunction, the sensor can be replaced.

Gauge failures due to contamination or wear and

tear, as well as expendable parts (e.g. filament), are not covered by the warranty.

INFICON assumes no liability and the warranty becomes null and void if any repair work is carried out by the end-user or third parties.

Spare Parts

When ordering spare parts, always indicate:

• all information on the product nameplate

• description and ordering number according to the spare

parts list

Sensor for gauge Ordering number

350-060, 350-080 350-062, 350-082 350-061, 350-081 350-064, 350-084 350-065, 350-085 350-063, 350-083 350-066, 350-086

350-067, 350-087 350-068, 350-088

350-200

350-140 350-142 350-141 350-144 350-145 350-143 350-146

350-147 350-148

350-300

350-920 350-922 350-921 350-924 350-926 350-923 350-925

350-927 350-928

350 930

350-900 350-902 350-901 350-904 350-906 350-903 350-905

350-907 350-908

350-940

Returning the Product

WARNING

WARNING: forwarding contaminated products Contaminated products (e.g. radioactive, toxic,

caustic or microbiological hazard) can be detrimental to health and environment.

Products returned to INFICON should preferably be free of harmful substances. Adhere to the forwarding regulations of all involved countries and forwarding companies and enclose a duly completed declaration of contamination

Form under www.inficon.com

Products that are not clearly declared as "free of harmful substances" are decontaminated at the expense of the customer.

Products not accompanied by a duly completed declaration of contamination are returned to the sender at his own expense.

Disposal

DANGER

DANGER: contaminated parts Contaminated parts can be detrimental to health

and environment. Before beginning to work, find out whether any

parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.

WARNING

WARNING: substances detrimental to the environment

Products or parts thereof (mechanical and electric components, operating fluids etc.) can be detrimental to the environment.

Dispose of such substances in accordance with the relevant local regulations.

Separating the components

After disassembling the product, separate its components according to the following criteria:

• Contaminated components

Contaminated components (radioactive, toxic, caustic, or biological hazard etc.) must be decontaminated in accordance with the relevant national regulations, separated according to their materials, and disposed of.

• Other components

Such components must be separated according to their materials and recycled.

EU Declaration of Conformity

Products

We, INFICON, hereby declare that the equipment mentioned below complies with the provisions of the Directive relating to electromagnetic compatibility 2014/30/EU and the Directive on the restriction of the use of certain hazardous substances in electrical and electronic equipment 2011/65/EU.

Pirani Standard Gauge

PSG500/-S, PSG502-S, PSG510-S, PSG512-S

Standards

Harmonized and international/national standards and specifications:

• EN 61000-6-2:2005 (EMC: generic emission standard)

• EN 61000-6-3:2007 + A1:2011 (EMC: generic immunity

standard)

• EN 61010-1:2010 (Safety requirements for electrical equip-

• EN 61326-1:2013 (EMC requirements for electrical equip-

Manufacturer / Signatures

INFICON AG, Alte Landstraße 6, LI-9496 Balzers

19 October 2015 19 October 2015

Dr. Urs Wälchli Managing Director

ment for measurement, control and laboratory use)

Marco Kern Product Manager

LI–9496 Balzers Liechtenstein Tel +423 / 388 3111 Fax +423 / 388 3700 reachus@inficon.com

www.inficon.com