Inficon Pirani Gauge Enhanced 500, PGE500 Operating Manual

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Pir

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Op

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EU Declaration o

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f Conformity

1

Product Identification

In all communications with INFICON, please specify the information given on the product nameplate. For convenient reference copy that information into the space provided below.

2

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Validity

This document applies to products with part numbers:

1)

→  67

2)

→  48, 53

3)

→  57, 61

4)

→  68. Analog output 0 … 10 V is available on all devices by

default on pin 9.

The part number (PN) can be taken from the product nameplate. If not indicated otherwise in the legends, the illustrations in this

document correspond to the product with vacuum connection DN 25 ISO-KF. They apply to the other products by analogy.

We reserve the right to make technical changes without prior notice.

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Important User Information

There are operational characteristic differences between solid state equipment and electromechanical equipment. Because of these differences, and because there are a variety of uses for solid state equipment, all persons that apply this equipment must take every precaution and satisfy themselves that the intended application of this equipment is safe and used in an acceptable manner.

In no event will INFICON be responsible or liable for indirect or consequential damages that result from the use or application of this equipment.

Any examples or diagrams included in this manual are provided solely for illustrative purposes. Because of the many variables and requirements imposed on any particular installation, INFICON cannot assume responsibility or liability for any actual use based on the examples and diagrams.

No patent liability is assumed by INFICON with respect to use of information circuits, equipment, or software described in this manual.

Throughout this manual we use notes, notices and apply internationally recognized symbols and safety messages to make you aware of safety considerations.

4

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Identifies infor cause electric taken, could r or economic l

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Identifies infor cause electric taken, could r or economic l

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ation about pra

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UTION

ation about pra

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TICE

tices or circumst

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Identifies infor understanding

Labels may b that dangerou

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ation that is criti

of the product.

HOCK H

located on or ins

voltages may b

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ZARD

ide the device to

present.

application and

lert people

5

General Safety Instructions

• Adhere to the applicable regulations and take the necessary precautions for the process media used.

Consider possible reactions with the product materials. Consider possible reactions (e.g. explosion) of the process

media due to the heat generated by the product.

• Adhere to the applicable regulations and take the necessary precautions for all work you are going to do and consider the safety instructions in this document.

• Before beginning to work, find out whether any vacuum components are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.

Communicate the safety instructions to all other users.

Liability and Warranty

INFICON assumes no liability and the warranty becomes null and void if the end-user or third parties

• disregard the information in this document

• use the product in a non-conforming manner

• make any kind of interventions (modifications, alterations etc.)

on the product

• use the product with accessories not listed in the product documentation.

The end-user assumes the responsibility in conjunction with the process media used.

Gauge failures due to contamination or wear and tear, as well as expendable parts (e.g. Pirani filament), are not covered by the warranty.

6

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Contents

Product Identification 2 Validity 3 Important User Information 4 General Safety Instructions 6 Liability and Warranty 6

1 Introduction / General Information 9

1.1 Description 9

1.2 Specifications 9

1.3 Dimensions 12

1.4 Options & Accessories 13

2 Important Safety Information 14

2.1 Safety Precautions - General 14

2.2 Safety Precautions - Service and Operation 15

2.3 Electrical Conditions 16

2.3.1 Proper Equipment Grounding 16

2.3.2 Electrical Interface and Control 17

2.4 Overpressure and use with hazardous gases 17

2.5 Gases other than Nitrogen / air 18

3 Installation 19

3.1 Mechanical Installation 19

3.2 Electrical Installation 21

3.2.1 Grounding 21

3.2.2 Electrical Connections 22

4 Setup and Operation 25

4.1 Initial Setup 25

4.2 User Interface Basics 26

4.3 Programming 27

4.4 Return to Factory Default Settings 33

5 Using the gauge with different gases 34 6 Display 37

6.1 Display - Torr / mTorr 37

6.2 Display - mbar 41

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7 Analog Output 46

7.1 Non-Linear Analog Output - 0.375 to 5.659 V,

Torr / mTorr 48

7.2 Non-Linear Analog Output - 0.375 to 5.659 V, mbar 53

7.3 Log-Linear Analog Output - 1-8 V, Torr 57

7.4 Log-Linear Analog Output - 1-8 V, mbar 61

7.5 Log-Linear Analog Output - 1.15-10.215 V,

mbar / Torr / Pa 67

7.6 Linear Analog Output 0-10 V, Torr 68

8 RS485 / RS232 serial communications 70

8.1 Device Specific Serial Communication Info 70

8.2 RS485 / RS232 Command Protocol Summary 71

9 Service 74

9.1 Calibration 74

9.2 Maintenance 74

9.3 Troubleshooting 75

9.4 Contamination 77

9.5 Module and sensor replacement 79

10 Factory Service and Support 80 11 Returning the Product 80 12 Disposal 81 EU Declaration of Conformity 82

For cross-references within this document, the symbol (→  XY) is used.

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1 Introduction / General Information

1.1 Description

Thermal conductivity gauges measure pressure indirectly by sensing the loss of heat from a sensor to the surrounding gases. The higher the pressure of the surrounding gas, the more heat is conducted away from the sensor. Pirani thermal conductivity gauges maintain a sensor (usually a wire) at some constant temperature, and measure the current or power required to maintain that temperature. A standard Pirani gauge has a useful measuring range of about 10 convection currents that are generated above 1 Torr, convectionenhanced Pirani gauges increase the measuring range to just above atmosphere.

-4

Torr to 10 Torr. By taking advantage of

The INFICON PGE500 Pirani Gauge Enhanced module provides the basic signal conditioning required to turn a convection vacuum gauge into a complete measuring instrument. The module provides linear, non-linear or log-linear analog outputs, two setpoint relays and RS232/485 serial communications. In addition, a built-in display provides a convenient user interface for setup and operation of the vacuum gauge.

1.2 Specifications

Measurement range 1.3×10

Accuracy - N

1.3×10

1.3×10 530 … 1333 mbar

-4

1×10

-3

1×10 400 … 1000 Torr

(typical)

2

-4

… 1.3×10-3 mbar

-3

… 530 mbar

… 1×10-3 Torr … 400 Torr

-4

… 1333 mbar

-4

1×10

1.3×10

… 1000 Torr

-2

Pa … 133 kPa

0.1 ×10

-3

mbar resolution ±10% of reading ±2.5% of reading

0.1 mTorr resolution ±10% of reading ±2.5% of reading

Repeatability - N

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(typical) ±2% of reading

2

Display bright OLED, 4 digits, user-

selectable mbar, Torr or Pa

1100 Torr … 1000 Torr 4 digits 999 Torr… 10.0 mTorr 3 digits

9.9 mTorr … 1.0 mTorr 2 digits

0.9 mTorr… 1.0 mTorr 2 digits

Materials exposed to vacuum gold-plated tungsten, 304 & 316

stainless steel, glass, nickel, Teflon

®

Housing (electronics) aluminum extrusion

Internal volume 26 cm3 (1.589 in3) Internal surface area 59.7 cm

2

(9.25 in2)

Weight 340 g (12 oz.)

Permissible temperature

Operating

0 … +40 °C

Storage –40 … +70 °C Bakeout temperature ≤150 °C (gauge only - electro-

nics removed)

Relative humidity 0 … 95%, non-condensing Use

Operating

altitude up to 2500 m (8200 ft.)

Storage altitude up to 12500 m

(41000 ft.)

Mounting orientation horizontal recommended

(orientation has no effect on measurements below 1.3 mbar (1 Torr))

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Output signal analog (measurement signal)

3PE5-0xx-B7F0 log-linear

1.15 … 10.215 V (dc),

1.286 V/decade

p = 10

0.778(U-c)

(→  67)

-B7F2 non-linear S-curve

0.375 … 5.659 V (dc) Granville-Phillips vectron

®

compatible

®

Mini-Con-

(→  48, 53)

-B7F5 log-linear 1 … 8 V (dc) 1 V/decade

P = 10

(V - 5)

, (→  57, 61)

-B7F– linear 0 … 10 V (dc) (→  68)

RS232C / RS485 interface ASCII protocol

Supply voltage 12 … 28 V (dc), 2 W protected

against power reversal and transient overvoltages

Setpoint relays two, single-pole double-throw

relays (SPDT), 1 A at 30 V (dc) resistive, or V (ac) non-inductive

Electrical connection 9-pin D-sub male and

15-pin HD D-sub male (with RS485)

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1

3

7

6

8

1.3

Dimensio

F

tting

s

Dimension

D

16 ISO-KF

25 ISO-KF

40 ISO-KF

D

16 CF-R

40 CF-R

4

VCR female

8

VCR female

1

8" NPT male

mm (in

25.9 (1.

34 (1.

43.7 (1.

40.9 (1.

21.8 (0.

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4)

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6)

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1.4

Options &

Power supply

Input: 100 … Output: 24 V ( Cable Length:

Accessories

or PGE300/500

40 V (ac)

c) @ 2.5 A (60

2 m (6 ft.)

Ordering No.

352-525

)

This variation plug that is no IEC60320 AC supplied AC m

f the power sup

listed above is r

power entry rece

ains power cord

ly may be used

quired. The conv

tacle allows use

et available worl

hen an AC

ntional

ith any user

wide.

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Importan

INFICON has and reliable s the strict safet

and follow all

To avoid seri tion in this d procedures c death, and or

Failure to com ards of installa disclaims all li these instructi

Safety Inf

esigned and tes

rvice, provided it

guidelines provi

warnings and i

ARNING

us injury or de

cument. Failure

uld result in se

property damag

ly with these wa

tion and intended

bility for the cust

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rmation

ed this product t

is installed and o

ed in this manu

structions.

th, follow the sa to comply with

ious bodily har

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nings violates th

use of this instru mer’s failure to c

provide safe

erated within

l. Please read

ety informa-

hese safety

, including

safety stand-

ent. INFICON

mply with

2.1

Although ever ble installation that arises fro of the module. tion and use o

Safety Pre

The product s moved.

WARNI adjustments in inside the pro service trained

attempt has bee

, INFICON cann

various installat

If you have any

this product, ple

autions - G

ould never be op

G! There are n

side the product

uct enclosure is personnel.

n made to consid

t anticipate ever

ions, operation, o

uestions about th

se contact INFI

neral

erated with the e

operator servic nclosure. Howev

eplaceable. Refe

r most possi-

contingency

maintenance

e safe installa-

ON.

closure re-

able parts or

r, the sensor

servicing to

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Do not modify thorization of turn the produ ter to ensure t this product if

WARNI product prior t

After servicing made by a qu required, ensu stitutions of no or other hazar made to this p

To reduce the product to rain and careful att onto these pro been damage of the product

this product or su

ualified INFICON

t to an INFICON at all safety feat

nauthorized mo

G! Source pow

performing any

this product, ens

lified service per re that the parts n-qualified parts

s. Use of unauth

oduct will void th risk of fire or elec

or moisture. The

ntion must be p

ucts. Do not us

. Immediately co

if it is damaged.

bstitute any parts

service trained p

qualified service

res are maintain ifications have b

r must be remov

ervicing.

re that all safety

on. When replac

e specified by I

ay result in fire,

rized parts or m

warranty.

ric shock, do not

e products are n

id to not spill any

these products if

tact INFICON to

without au-

rsonnel. Re-

nd repair cen-

d. Do not use

en made.

d from the

checks are

ment parts are

FICON Sub-

lectric shock

difications

expose this

t waterproof type of liquid they have

arrange return

2.2

Due to the po mental conditi compromised odically inspe ment groundin trical insulatio

Safety Pre

Ensure that th gauge is mou

Use an appro Turn off power

module. Turn off power

product is not manual. Cont service or trou this operating

sibility of corrosi

ns, it is possible

ver time. It is im

ted for sound ele

. Do not use if t

has been compr

autions - S

vacuum port on

ted is electrically riate power sour

to the unit befor

to the unit if a ca

perating normall

ct qualified INFI

leshooting condi

anual.

n when used in c

hat the product’s

ortant that the pr

trical connection

e equipment gro

mised.

rvice and O

which the PGE5

grounded.

e of 12 … 28 V ( attempting to se

ble or plug is da

according to thi

ON service pers

tion that may not

rtain environsafety could be

duct be peri-

and equip-

nding or elec-

eration

0 vacuum

c), 2 W.

vice the

aged or the

operating

nnel for any

be covered by

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2.3

It is important sound electric use if the equi compromised.

Do not use if t been damage instructions fo

Electrical

WARNI system, a life t less all expos ground potenti tact with the g discharge with high voltage di A person coul with an expos age potential. come in conta (vacuum / pre

hat the product b

l connections an

ment grounding

e unit has been

. Contact INFIC

returning the pro

onditions

G! When high

hreatening electri

d electrical cond

l. This applies t

s contained in v

in a gaseous envi

rectly to any ung

be seriously inju d, ungrounded el

his condition ap

t with the gas in

sure containmen

periodically ins

equipment grou

r electrical insul

ropped or the en

N for return auth

duct to INFICON

oltage is present

al shock hazard

ctors are maintai

all products that

cuum chambers. ronment may co ounded conducto red or killed by c

ectrical conducto

lies to all produc

ide the vacuum c

vessel).

ected for

ding. Do not

tion has been

losure has

rization and

or evaluation.

in any vacuum

may exist un-

ed at earth

ome in conAn electrical ple dangerous

r of electricity.

ming in contact

at high volt-

s that may

amber

2.3.1

16

Proper Equi

WARNI

ure or cause Verify that the module is mou Electrician if y Proper ground well as intend dule vacuum g earth ground. connection / fl

pment Groun

G! Hazardous

eath are present

vacuum port on

nted is electricall

u are in doubt a

ing of your equip

d operation of th

auge must be co

se a ground lug

nge if necessary

ing

oltages that coul

in many vacuum

hich the PGE50 grounded. Cons

out your equipm

ent is essential

equipment. The

nected directly t

on the PGE500 g

tin

seriously in-

rocesses.

vacuum gauge

ult a qualified

nt grounding.

r safety as

PGE500 mo-

a good quality

uge vacuum

21e1 (2016-06)

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2.3.2

WARNI shock and bod potential high vacuum syste

Electrical In

It is the user’s from this prod for example, r Always double to automate y sis of your sys safety measur age.

G! In order to p

ily harm, shield a

oltage electrical

.

erface and C

responsibility to

ct and any conn

lays and solenoi

check the syste

ur process. Perf em design and e

s are taken to pr

rotect personnel

l conductors whi

ischarges in or

ntrol

nsure that the el

ctions made to e

s, are used in a

set-up before u

rm a hazardous

sure safeguards

vent injury and

rom electric

h are subject to

round the

ctrical signals

ternal devices,

afe manner.

ing any signals

peration analyand personnel

roperty dam-

2.4

Overpress

WARNI limit the level than what the of withstandin sures exceedi

In cases wher condition, alw ample, use a eration where sures if the pr chamber.

re and use

G! Install suita

f pressure inside

acuum chamber

. INFICON gaug

g 1000 Torr abs

an equipment f

ys implement fail

ressure relief de

malfunction cou

ssure relief devic

ith hazardo

le protective devi your vacuum ch system compone

s should not be

lute pressure.

ilure could cause

safe system ope

ice in an automa

ld result in high i

e was not installe

us gases

es that will mber to less nts are capable

sed at pres-

a hazardous

ation. For ex-

ic backfill op-

ternal pres-

on the

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The PGE500 pressures abo (<2½ bars) pr higher pressur sure relief devi conditions. Wi tions may be l pression fitting vacuum cham rected barome

CAUTI

device is allo metric press tings may rel may cause le tube to relea vironment. T amples of ha vacuum/pres environment, age to equip volume to pr using hazard

acuum gauge m

e 20 psia (1000

ssure inside the

s, you should in ce to protect the h some fittings, a

wer; for example

may forcibly rele

er fitting with onl

tric (atmospheric

N! If the intern

ed to increase

re (atmospheric

ase and possib

ks that would a

e into the atmo

xic, pyrophoric ardous gases t

ure containmen

could cause bo

ent. Never exp

ssure above loc

us gases.

dule is not intend

orr); DO NOT e

ensor. If your ch

tall an isolation v

auge tube from tual safe overpr

, a quick-connect

se the gauge tu

a few psi over l

pressure.

l pressure of a

bove local unc

pressure side), e overpressure low the gas insi

phere of the sur

nd flammable

at if allowed to l

t vessel into the

ily injury and p

se the gauge tu

al atmospheric

ed for use at

ceed 35 psig

mber goes to

lve or pres-

verpressure

ssure condi-

O-ring com-

e from the cal uncor-

acuum gauge

rrected baro-

acuum fit-

onditions

e the gauge

ounding en-

ases are ex-

ak out of the

atmospheric

ssible dam-

e internal

ressure when

2.5

Gases oth

WARNI nitrogen (N2) o tables.

INFICON gau of nitrogen or argon (Ar) or c data for N "Using the gau Output" for a

18

r than Nitro

G! Do not atte

r air without refer

es and modules

ir. Do not attemp

arbon dioxide (C

to

2

ther gas is prope

ge with different

ore complete dis

en / air

pt to use with ga

ing to correction

re calibrated for

t to use with othe

) unless accura

2

rly used. Refer to

ases", "Display"

ussion.

tin

es other than

actor data

irect readout

gases such as

e conversion

sections titled

nd "Analog

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3

3.1

WARNI phere or in the Do not use thi combustible g gauge normall occur, the wir ture of certain cause an expl

Installati

Mechanic

G! Do not use t

presence of flam

device to meas

ses or gas mixtu

operates at 125

temperature cou

ombustible gas

sion which could

n

l Installation

his device in an e

mable gases, va

re the pressure o

es. The sensor °C, but if malfun

ld exceed the igni

s and gas mixtur

result in serious i

plosive atmos-

ors or fumes.

explosive or ire in the tion should

tion tempera-

. This could

njury or death.

Mount the PG want to measu create a press the gauge. Thi changes.

Mounting the cause measur PGE500 near air conditionin

Mount the PG gram below). the unit is not position has lit

For accurate horizontally as

500 as close as

re. Long or restri

re difference bet may cause a d

GE500 too close

ment and contro

source of heati

vents.

500 with its mai

ressure reading

ounted horizont

le to no effect.

easurements ab

shown below:

possible to the pr

ted, small diame

ween your proce

lay in response t

to a gas source i

l instability. Do n

g or cooling, suc

(long) axis horiz

rrors may occur lly. Below 1 Torr

ve 1 Torr, mount

ssure you

er tubing will

s chamber and

pressure

let may also

t mount the

as heaters or

ntal (see dia-

bove 1 Torr if

mounting

the gauge axis

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Incorrect Orie

Vacuum ch

tation:

mbe

Mount the PG the effect of a gauge.

20

500 with port do

y particles or con

Vacuu

n, if possible, to

densation from c

tin

chambe

help minimize

llecting in the

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3.2

3.2.1

Do not mount sive vibration. rement errors the PGE500.

Flanges/ Fittin and note the f

- NPT fittings: apply a thread with one-andas PTFE (Tefl gauge port. D age the gauge

Electrical I

Grounding

he PGE500 whe

ibrations may c

nd possible mec

s - follow the ma

llowing:

When connectin sealant or wrap t

-half to two wrap n®) tape and ha

not use a wrenc

.

nstallation

e it will be subjec

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tinb21e

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21

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3.2.2 Electrical Connections

A good recommended practice is to remove power from any cable prior to connecting or disconnecting it.

Do not connect power to both the 9-pin and 15-pin D-Sub connectors. Apply power only to one or the other. The INFICON PGE500 will directly replace Granville-Phillips® Mini-Convectron® modules that have a 9-pin D-sub connector (DE-9P) or 15-pin D-sub connector (DE-15P), and you can use your existing cables and electronics. For new installations, fabricate a cable to connect to the signals/functions you want to use. When using RS232 or RS485 serial communications, you must fabricate your own cable according to the 15-pin D-Sub pinout shown below. A standard off-the-shelf serial communications cable will not work. All signals and pin assignments are described below:

22

tinb21e1 (2016-06)

9-pin D-sub Connector pinout

Pin no. Pin description

1 Relay 1 Normally Open 2 Relay 1 Normally Closed 3 Supply (12…28 V (dc)) 4 Power Ground 5 Analog Output 1 (Log-Linear 1…8 V, Log-Linear

1.15…10.215 V, or Non-linear Granville-Phillips®

Mini-Convectron® compatible) 6 Relay 1 Common 7 Relay Disable (Disables both Relays when

connected to pin 4 - Ground) 8 Analog Ground 9 Analog Output 2 (Programmable Linear 0…10 V)

tinb21e1 (2016-06) 23

15-pin D-sub Connector pinout

Pin no. Pin description

1 RS485 DATA B (+) Input/output 2 RS485 DATA A (-) Input/output 3 Supply (12…28 V (dc)) 4 Power Ground (Also when using serial

communications, this pin is typically connected to

pin # 5 of your PC RS232 serial port 9-pin D-sub

connector, or ground pin of your RS485 converter) 5 Analog Output 1 (Log-Linear 1…8 V, Log-Linear

1.15…10.215 V, or Non-linear Granville-Phillips®

Mini-Convectron ®compatible) 6 Analog Ground 7 RS232 TX (This pin is typically connected to pin

# 2 of your PC serial port 9-pin D-sub connector) 8 RS232 RX (This pin is typically connected to pin

# 3 of your PC serial port 9-pin D-sub connector) 9 Relay Disable (Disables both Relays when

connected to pin 4 - Ground)

10 Relay 1 Normally Open 11 Relay 2 Normally Open 12 Relay 2 Common 13 Relay 2 Normally Closed 14 Relay 1 Normally Closed 15 Relay 1 Common

24

tinb21e1 (2016-06)

4 Setup and Operation

4.1 Initial Setup

Two of the most important steps for the initial setup of the gauge are to set zero (SET VAC) and set atmosphere (SET ATM) as described in the Programming section 4.3 below. This will ensure proper operation of the gauge and accurate pressure measurements. The gauge is calibrated at the factory using nitrogen. Furthermore, the gauge is also installed in a certain orientation when calibrated at the factory. Without setting zero and atmosphere after the gauge is installed in your system, the gauge may not display the expected and correct pressures. This could be caused by the fact that you may be using a different gas than Nitrogen such as air to setup and calibrate the gauge (most commonly the case) and the gauge orientation is different than the orientation used at the factory. As such, it is very important to perform your own initial setup and calibration by setting zero and atmosphere with the gauge installed in your actual system. Please note the following:

Setting zero (SET VAC): Setting zero optimizes performance of the gauge when operating at a low pressure range of

1.00×10 sure is higher than 1.00×10

-4

Torr to 1.00×10-3 Torr. If your minimum operating pres-

-3

Torr, it is not normally necessary to set zero and thus setting atmosphere should be adequate. If you are able to evacuate your system to below 1.00×10

-4

Torr, it is always a good practice to check and set zero if necessary. See "SET VAC" in section 4.3.

Setting Atmosphere (SET ATM): Setting atmosphere is the most important step for a newly installed gauge. If you prefer to use air to set atmosphere, vent your vacuum system chamber to expose the gauge to the local atmospheric pressure (air) and set atmosphere to match your known local uncorrected barometric pressure (air). This is the reading of ambient air pressure you will expect if you were to vent and open your vacuum chamber to the atmosphere surrounding the outside of your chamber. At sea level, this pressure is usually near 760 Torr.

tinb21e1 (2016-06) 25

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26

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21e1 (2016-06)

After setting the various parameters, press the SAVE key to save the new setting and return to the main screen. To continue setting additional parameters, scroll forward with the MORE key until you reach the desired parameter.

4.3 Programming

SET VAC

NOTICE

When operating in units of either mbar or pascals (Pa), you must perform SET ATM before setting the vacuum reading (SET VAC). See SET ATM below. Failure to do so will result in improper operation of the gauge. If you change units of measure or reset to factory defaults, then this same procedure must be followed again if the units of measure are being set to either mbar or Pa.

1) To properly set the vacuum reading ("zero" point), with the PGE500 installed on your vacuum system, the gauge should be evacuated to a pressure below 1.00×10

-4

Torr.

2) Go to the SET VAC screen. When the vacuum system pressure is below 1.00×10

-4

Torr, press the PRESS TO SET VAC key. The zero point (displayed pressure reading with gauge exposed to vacuum) is now set.

UNITS [Factory default = as ordered]

The unit comes factory preset as ordered. If you like to switch to another unit, this should be the first parameter that is set. This will be the units-of-measure (mBAR, TORR, PASCAl) that are used for all other settings. If your PGE500 has been previously configured and relay setpoints and linear analog output pressure settings have been programmed, changing units-of-measure will return the relays setpoints and the linear analog output pressure settings to factory default setting values in TORR. In this case, you must reprogram the relay setpoints and linear analog output pressure settings in the newly programmed units-of-measure.

tinb21e1 (2016-06) 27

SET ATM

1) To set the atmospheric pressure reading (also known as the "span" adjustment), flow nitrogen gas or air into your closed vacuum chamber to allow the pressure to rise to a known value above 400 Torr. Alternatively, if your local uncorrected barometric pressure (air) is known, simply vent your vacuum system chamber to expose the gauge to the local atmospheric pressure.

2) Go to the SET ATM screen. When the desired pressure is stable, adjust the displayed pressure reading on the PGE500 to the known value using the INCR (increase) or DECR (decrease) keys. Press the SAVE key to save the new atmospheric (span) pressure value. For example, if your known local uncorrected barometric pressure is 760 Torr, enter 760 in the SET ATM screen. The main pressure measurement screen will now display 760 Torr while the gauge is at atmosphere.

It is good practice to perform the sequence of checking and adjusting span (ATM) then zero (VAC) and then, finally rechecking the span setting to ensure that the circuitry is properly balanced for use in measuring pressure throughout the intended measurement range.

SP1 ON and SP2 ON [Factory default = 100 mTORR]

These setpoints correspond to the pressures at which the relays will turn on (energize). The relays will turn on when the pressure is below the programmed pressure value. If you are unable to increase the values of SP1 ON or SP2 ON , you must first go to SP1 OFF or SP2 OFF and increase those values to a number higher than the values of SP1 ON or SP2 ON you are trying to set.

28

tinb21e1 (2016-06)

SP1 OFF and SP2 OFF [Factory default = 200 mTORR]

These setpoints correspond to the pressures at which the relays will turn off (de-energize). The relays will turn off when the pressure is above the programmed pressure value. If you are unable to decrease the values of SP1 OFF or SP2 OFF, you must first go to SP1 ON or SP2 ON and decrease those values to a number lower than the values of SP1 OFF or SP2 OFF you are trying to set.

RS485 ADDR [Factory default = 1]

This is the lower nibble of the one byte RS485 device address. Assuming the address offset (RS485 OFFSET) is equal to 0, setting the ADDR to a 5 will make the address be 0x05 in hexadecimal. A 15 will set the ADDR to 0x0F in hexadecimal. Note that the address (ADDR) must be used even when sending RS232 commands.

RS485 OFFSET [Factory default = 0]

This is the upper nibble of the one byte RS485 address. Assuming the address (ADDR) is 0, setting the address offset (RS485 OFFSET) to a 5 will make the address be 0x50 hexadecimal. Setting the address offset to 15 will make the device address be 0xF0 hexadecimal.

┌----------------BINARY ADDRESS-----------┐

ADDRESS

DECIMAL

ADDR OFFSET

1 0 0 0 0 0 0 0 1 01

5 0 0 0 0 0 1 0 1 05

15 0 0 0 0 1 1 1 1 0F

16 0 0 0 1 0 0 0 0 F0

┌-----------------------ONE BYTE-------------------┐ ADDRESS

HEXA-

DECIMAL

┌Upper nibble┐

(BINARY)

ADDR

┌Lower nibble┐

tinb21e1 (2016-06) 29

BAUD [Factory default = 19,200]

This sets the baud rate for the RS485 and the RS232 serial communications. The baud rate can be set to various values through the serial interface or via the front panel soft-keys. The parity can only be changed through the serial interface command set. When this occurs, the current setting will be shown in the list of choices and can be re-selected if changed.

SET LINEAR

[Factory default = 0.01 VOLTS to 10 VOLTS corresponding to 1 mTORR to 1 TORR]

This will take the user to four different screens to setup the linear analog output (see Analog Output section).

a) Set the minimum pressure b) Set the minimum voltage corresponding to the minimum

pressure

c) Set the maximum pressure d) Set the maximum voltage corresponding to the maximum

pressure

Note - The LINEAR analog output provides a linear 0…10 V (dc) output signal. The linear output voltage can be any value between 10 mV and 10 V corresponding to displayed pressure between 1 mTorr and 1000 Torr. However, the useful range of the linear analog output is three decades. If your application requires the analog output to cover a pressure range exceeding three decades then consider using the non-linear or the loglinear analog output. See ANALOG TYPE menu below to select log-linear or non-linear analog output.

INFO

This screen shows the unit software version.

30

tinb21e1 (2016-06)

ANALOG TYPE [Factory default = as ordered]

Select "NONLIN" for non-linear (S-Curve) or "LOG" for log-linear analog output (See Analog Output section).

AOUT CAL [Factory default = Factory Set]

This has been pre-set in the factory and is used to optimize the analog output calibration. It is recommended that the user not make this adjustment unless the displayed pressure on the PGE500 and the resulting pressure calculation from the analog output do not match closely. To perform this adjustment, connect the PGE500 analog output to a high resolution voltmeter, your system, PLC, etc. While in the AOUT CAL screen and with the gauge exposed to atmosphere, use the INC or DECR soft-keys to adjust the analog output to match the corresponding pressure displayed on the screen. Example: The PGE500 ANALOG TYPE menu above is set to LOG. In the AOUT CAL screen, the atmospheric pressure is displayed at 760 Torr. Based on the equation and table given in section 7.3 the expected analog output at 760 Torr is 7.881 V. Use the INC or DECR soft-keys in the AOUT CAL screen to set the analog output to 7.881 V as recorded by your voltmeter, PLC, etc. Alternatively, if the analog output is used to display the pressure in your PLC or system display console, adjust the AOUT CAL while the gauge is exposed to atmosphere so that the atmospheric pressure displayed by your PLC matches the atmospheric pressure displayed by the PGE500. The AOUT CAL can be performed at any pressure between 400… 999 Torr (atmosphere recommended).

SCREEN SAVER [Factory default = ON]

The PGE500 uses an OLED type display which over an extended period of time can start to show divergence between pixels that are on at all times verses pixels that are not. This could result in pixels exhibiting a burned-in effect. To minimize the burned-in effect, a screen saver function can be activated by programming the SCREEN SAVER menu selection to ON. With the screen saver function turned on, the display appearance changes every 12 hours. The display will appear in the normal mode with a dark background color for the first 12 hours and will

tinb21e1 (2016-06) 31

then switch to a back-lit background color for the next 12 hours. If you like to have the 12 hour period for the normal display mode to start at a specific time of the day, simply access the SCREEN SAVER menu and change setting to OFF and then ON again. This initiates the screen saver function immediately.

Note - To increase longevity of the OLED display, INFICON recommends that the screen saver function remains ON as shipped from the factory.

AOUT OFFSET

It is recommended that the user not make this adjustment unless it is critical for your application that when the display of PGE500 reads zero (0.00 mTorr), your data acquisition system (using the analog output from the PGE500) also registers a pressure reading of exactly zero. Please note that adjusting the AOUT OFFSET will affect the analog output calibration at atmosphere (see AOUT CAL menu above). As such, avoid changing the AOUT OFFSET unless it is critical for display and analog output to exactly match when the displayed pressure is zero. To perform this adjustment, pump your system down to below

0.1 mTorr and SET VAC (zero) so that the PGE500 displayed

pressure shows 0.0 mTorr. Connect the PGE500 analog output to a high resolution voltmeter, your system, PLC, etc. While in the AOUT OFFSET screen, use the INC or DECR soft-keys to adjust the analog output to match the corresponding zero pressure displayed on the screen.

Example 1: The PGE500 ANALOG TYPE menu above is set to LOG. In the AOUT OFFSET screen, the pressure is displayed at

0.00 mTorr. The expected analog output at 0.00 mTorr is

0.954 V. Use the INC or DECR soft-keys in the AOUT CAL

screen to set the analog output to 0.954 V as recorded by your voltmeter, PLC, etc. Alternatively, if the analog output is used to display the pressure in your PLC or system display console, adjust the AOUT OFFSET so that your PLC also reads

0.0 mTorr.

Example 2: The PGE500 ANALOG TYPE menu above is set to NONLIN (Non-Linear). In the AOUT OFFSET screen, the pressure is displayed at 0.00 mTorr. Based on the equation and table given in section 7.1 the expected analog output at 0.00 mTorr is

0.375 V. Use the INC or DECR soft-keys in the AOUT CAL

32

tinb21e1 (2016-06)

screen to set the analog output to 0.375 V as recorded by your voltmeter, PLC, etc. Alternatively, if the analog output is used to display the pressure in your PLC or system display console, adjust the AOUT OFFSET so that your PLC also reads

0.0 mTorr.

4.4 Return to Factory Default Settings

You can reset all values to the original factory default settings by simultaneously pressing the upper left and upper right soft-keys. The user will then be prompted "Set Factory Defaults?" Choose Yes or No.

If you reset all values to original factory default settings, you would need to repeat the initial setup procedure as described in section 4.1 and reprogram other parameters as required.

tinb21e1 (2016-06) 33

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36

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21e1 (2016-06)

attempting to increase the reading up to 760 Torr, you will over pressurize your chamber which may present a hazard.

Example C: If the gas is helium (He), the gauge will over pressure (OP) when pressure reaches about 10 Torr true pressure and opening the chamber to atmosphere prematurely may present other hazards for both people and product.

CAUTION! What these examples illustrate is that using gases other than nitrogen (N

) without using accurate gas conversion

2

data and other proper precautions could result in injury to personnel and/or damage to equipment.

Suggested precautions when using gases other than nitrogen (N

):

2

Install a pressure relief valve or burst disk on your chamber, to protect it from overpressure. Post a warning label on your gauge readout that states "Do Not Exceed ____ Torr Indicated Pressure" (fill in the blank for maximum indicated pressure for the gas you use) so that an operator using the gauge will not exceed a safe pressure.

6 Display

6.1 Display - Torr / mTorr

Displayed pressure readings vs. true pressure for selected gases - engineering units in Torr / mTorr (see following table):

Pressure shown in bold italic font in the shaded areas are in mTorr.

Pressure shown in normal font in non shaded areas are in Torr.

tinb21e1 (2016-06) 37

4

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0.1

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38

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tinb21e1 (2016-06)

40.5

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1.28

3.34

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3.39

2.96

1.78

4.97

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3.32

2.29

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4.91

4.68

2.74

9.25

209

OP

6.42

5.99

3.32

12.3

(continued)

295

He

Ar

2

N

165

126

200

Table "Displayed pressure readings vs. true pressure - units in Torr / mTorr" (continued)

Pressure

True Total

[Torr / mTorr]

tinb21e1 (2016-06) 39

200 mTorr

435

312

500

500 mTorr

940

600

1.00

1 Torr

2.22

1.14

2.00

2 Torr

13.5

2.45

5.00

5 Torr

OP

4.0

10.0

10 Torr

OP

5.80

20.0

20 Torr

OP

7.85

50.0

50 Torr

OP

8.83

100

100 Torr

OP

9.79

200

200 Torr

4

CH

OP

Ne

2

D

22

Freon

12

Freon

KR

2

CO

2

O

OP

7.52

6.89

3.59

16.9

380

OP

8.42

7.63

3.94

22.4

485

OP

9.21

8.28

4.21

28.7

604

OP

9.95

8.86

4.44

36.4

730

OP

10.7

9.42

4.65

46.1

859

OP

11.1

9.76

4.75

53.9

941

OP

11.4

9.95

4.84

59.4

997

OP

12.0

10.5

4.99

79.5

OP

12.7

11.1

5.08

111

OP

He

Ar

2

N

Table "Displayed pressure readings vs. true pressure - units in Torr / mTorr" (concluded)

Pressure

True Total

[Torr / mTorr]

40

OP

11.3

300

300 Torr

OP

13.5

400

400 Torr

OP

16.1

500

500 Torr

OP

18.8

600

600 Torr

OP

21.8

700

700 Torr

OP

23.7

760

760 Torr

OP

25.1

800

800 Torr

tinb21e1 (2016-06)

OP

28.5

900

900 Torr

OP

32.5

1000

1000 Torr

Notes:

1) OP = overpressure indication: display will read over pressure

2) Display auto-ranges between Torr and mTorr at 1 Torr

Examples:

1) Gas used is nitrogen (N surement of 10 Torr. True pressure of nitrogen is 10 Torr.

2) Gas used is argon (Ar). Display shows pressure measurement of 600 mTorr. True pressure of argon is 1 Torr.

3) Gas used is oxygen (O ment of 486 mTorr. True pressure of oxygen is 500 mTorr.

6.2 Display - mbar

The table below shows the displayed readings at various pressures for selected gases when engineering units selected is in mbar.

Displayed pressure readings vs. true pressure for selected gases - engineering units in mbar (see following table):

). Display shows pressure mea-

2

). Display shows pressure measure-

2

tinb21e1 (2016-06) 41

4

CH

0.0 .0001

.0003

.0006

.0023

.0044

.0102

.0203

.0405

.0100

0.210

Ne

2

D

22

Freon

12

Freon

KR

2

CO

2

O

0.0

.0001

.0003

.0006

.0004

.0006

.0009

.0017

.0020

.0005

.0015

.0020

.0032

.0041

.0013

.0031

.0047

.0080

.0093

.0101

.0031

.0059

.0095

.0161

.0179

.0195

.0064

.0146

.0187

.0323

.0362

.0398

.0126

.0295

.0463

.0799

.0919

.0966

.0313

.0731

0.100

0.160

0.180

0.190

0.0623

0.140

(continued)

0.0 .0001

.0003

.0006

.0013

.0027

.0067

.0129

.0263

.0655

0.120

He

Ar

2

N

0.0

.0001

0

[mbar]

.0001

True Pressure

42

.0003

.0006

.0011

.0009

.0013

.0021

.0019

.0027

.0053

.0044

.0067

.0107

.0088

.0133

.0214

.0174

.0206

tinb21e1 (2016-06)

.0539

.0431

.0666

0.110

.0857

0.130

4

CH

0.410

1.04

2.13

4.43

10.0

37.1

473

1012

OP

Ne

2

D

22

Freon

12

Freon

KR

2

CO

2

O

0.180

0.330

0.340

0.360

0.120

0.270

0.470

0.910

0.790

0.810

0.280

0.650

0.990

2.06

1.38

1.39

0.530

1.26

2.11

5.50

2.21

2.15

0.930

2.27

6.98

327

3.49

3.26

1.70

4.45

28.6

OP

4.51

3.94

2.37

6.62

778

OP

4.95

4.42

3.05

8.78

OP

5.51

5.05

3.42

10.9

OP

6.54

6.23

3.65

12.3

OP

8.55

7.98

4.42

16.3

(continued)

0.250

0.640

1.29

2.58

6.63

13.7

29.7

103

278

393

He

0.210

Ar

0.160

2

N

0.260

Table "Displayed pressure readings vs. true pressure - units in mbar" (continued)

[mbar]

0.260

True Pressure

tinb21e1 (2016-06) 43

0.570

0.410

0.666

1.25

0.790

1.33

2.95

1.51

2.66

17.9

3.26

6.66

OP

5.33

13.3

OP

7.73

26.6

OP

10.4

66.6

OP

11.7

133

OP

13.0

266

4

CH

OP

Ne

2

D

22

Freon

12

Freon

KR

2

CO

2

O

OP

10.0

9.18

4.78

22.5

506

OP

11.2

10.1

5.25

29.8

646

OP

12.2

11.0

5.61

38.2

805

OP

13.2

11.8

5.91

48.5

973

OP

14.2

12.5

6.19

61.4

1140

OP

14.7

13.0

6.33

71.8

1250

OP

15.1

13.2

6.45

79.1

1320

OP

16.0

13.9

6.65

105

OP

16.9

14.7

6.77

147

OP

He

Ar

2

N

Table "Displayed pressure readings vs. true pressure - units in mbar" (concluded)

[mbar]

True Pressure

44

OP

15.0

400

OP

17.9

533

OP

21.4

666

OP

25.0

800

OP

29.0

933

OP

31.5

1011

OP

33.4

1060

tinb21e1 (2016-06)

OP

37.9

1190

OP

Values listed under each gas type are in mbar.

43.3

1330

Notes:

1) OP = Overpressure indication; display will read "overpressure".

Examples:

1) Gas used is nitrogen. Display shows pressure measurement of 13.3 mbar. True pressure of nitrogen is 13.3 mbar.

2) Gas used is argon. Display shows pressure measurement of

11.7 mbar. True pressure of argon is 133 mbar.

3) Gas used is CO

. Display shows pressure measurement of

2

.0731 mbar. True pressure of CO

is .0666 mbar.

2

tinb21e1 (2016-06) 45

7 Analog Output

The PGE500 provides either a non-linear or two different loglinear analog outputs. Additionally a linear 0-10 V (dc) analog output is provided.

Non-Linear Output

The first Convectron® gauge controllers produced a non-linear output signal of 0.375 to 5.659 V (dc) for 0 to 1000 Torr of N roughly in the shape of an "S" curve, as shown as follows.

Non-Linear Analog Output

6

Non-Linear Analog Output

,

2

Output - Volts

5

4

3

2

1

-3

10

Granville-Phillips their Mini-Convectron

10

-2

®

-1

10

adopted the same output curve for most of

®

modules and controllers with non-linear

output (although in recent years, some Granville-Phillips

Pressure - Torr

10010

+1

10

+2

10

+3

®

con-

trollers may output variations of the original S-curve). The non-linear output from INFICON convection gauges, mod-

ules and controllers duplicates the original S-curve of 0.375 to

5.659 V (dc) for 0 to 1000 Torr.

The tables shown in section 7.1 and 7.2 contain the lookup data for converting the non-linear output voltage into pressure values for nitrogen and various other gases.

46

tinb21e1 (2016-06)

Log-Linear Output

Many INFICON modules and controllers also provide a log-linear output signal, as an alternative to the non-linear signal described below. This output, shown above, is a 1 Volt per decade signal that may be easier to use for data logging or control.

Log-Linear Analog Output

8

7

6

5

4

Log-Linear Analog Output

Output - Volts

3

2

1

10

-3

10

-2

Pressure - Torr

-1

10

10010

+1

10

+2

10

+3

The table shown in section 7.3, 7.4 and 7.5 contain the lookup data and provides the formulas for converting the log-linear output voltage into pressure values for nitrogen and various other gases.

Linear 0-10 V (dc) Analog Output

The PGE500 also provides a linear 0-10 V (dc) analog output. The linear output voltage can be any value between 10 mV and 10 V corresponding to displayed pressure between 1 mTorr and 1000 Torr. However, the useful range of the linear analog output is three decades. For example if the minimum pressure selected is 1 mTorr (1.00×10 age output of 0.01 volts, then maximum pressure selected to correspond to a maximum voltage output of 10 volts should not exceed 1.0 Torr. If your application requires the analog output to cover a pressure range exceeding three decades then consider

-3

Torr) with a corresponding minimum volt-

tinb21e1 (2016-06) 47

using the non-linear or the log-linear analog output. An analog output of less than 0.01 volts to near 0 volt indicates a damaged or faulty sensor.

7.1 Non-Linear Analog Output

0.375 to 5.659 V, Torr / mTorr

You may calculate the N2/air pressure represented by the 0.375 to 5.659 V non-linear analog output voltage for the "S-curve"

using a multi-segment, n The coefficients for the n various pressure measurement ranges are given in the following table:

For Non-Linear Analog Output voltage range of 0.375 to

2.842 volts, use this table.

th

order polynomial function calculation.

th

order polynomial equation defined for

Coefficients for y(x) = a + bx + cx2 + dx3 + ex4 +fx5

a -0.02585

b 0.03767

c 0.04563

d 0.1151

e -0.04158

f 0.008738

For Non-Linear Analog Output voltage range of 2.842 to

4.945 volts, use this table.





Coefficients for 󰇛󰇜=





a 0.1031

b -0.3986

c -0.02322

48

d 0.07438

e 0.07229

f -0.006866

tinb21e1 (2016-06)

For Non-Linear Analog Output voltage range of 4.94 to

5.659 volts, use this table.

Coefficients for 󰇛󰇜=







a 100.624

b -0.37679

c -20.5623

d 0.0348656

Where y(x) = pressure in Torr, x= measured analog output in volts

Example: Measured analog output voltage is 0.3840 V. From first table shown above use equation: y(x) = a + bx + cx

2

+ dx3 + ex4 +fx5

x = 0.3840 volts a = -0.02585, b=0.03767, c=0.04563, d=0.1151, e=-0.04158, f=0.008738

y(x) = Pressure = 1.0E-03 Torr

The equations listed above are used to calculate the non-linear voltage outputs for N

/air shown in the table below. Non-linear

2

voltage outputs for various other gases are also shown in the same table.

Non-Linear analog output for selected gases - Engineering units in Torr / mTorr (see following table):

tinb21e1 (2016-06) 49

4

CH

Ne

2

D

22

Freon

12

Freon

KR

2

CO

2

O

0.3750

0.3766

0.3757

0.3760

0.3755

0.3760

0.3780

0.3763

0.3770

0.3780

0.3768

0.3770

0.3825

0.3782

0.3810

0.3820

0.3772

0.3810

0.3896

0.3810

0.3860

0.3880

0.3790

0.3850

0.4030

0.3880

0.3960

0.4000

0.4010

0.3840

0.3950

0.4380

0.4050

0.4250

0.4320

0.4370

0.3950

0.4120

0.4920

0.4330

0.4700

0.4800

0.4880

0.4150

0.4620

0.5840

0.4840

0.5490

0.5660

0.5810

0.4510

0.5360

0.7960

0.6080

0.7270

0.7640

0.7780

0.5440

0.7050

1.0530

0.7680

0.9440

0.9900

1.0090

0.6680

0.9000

(continued)

0.3750

0.3760

0.3770

0.3800

0.3840

0.3920

0.4170

0.4530

0.5210

0.6790

0.8680

He

0.3750

0.3755

Ar

0.3750

2

0.3757

N

0.3751

Pressure

True Total

0.3759

[Torr / mTorr]

0 mTorr

0.1 mTorr

50

0.3765

0.3760

0.3768

0.2 mTorr

0.3790

0.3780

0.3795

0.5 mTorr

0.3820

0.3810

0.3840

1 mTorr

0.3890

0.3870

0.3927

2 mTorr

0.4090

0.4030

0.4174

5 mTorr

0.4410

0.4290

0.4555

10 mTorr

tinb21e1 (2016-06)

0.4970

0.4770

0.5226

20 mTorr

0.6370

0.5950

0.6819

50 mTorr

0.8140

0.7450

0.8780

100 mTorr

4

CH

Ne

2

D

22

Freon

12

Freon

1.3920

1.0020

1.2650

1.2910

1.3150

2.0140

1.4690

1.9140

1.8050

1.8260

2.6320

1.9760

2.6030

2.2470

2.2570

3.3130

2.6310

3.5080

2.6660

2.6470

3.7150

5.0590

3.0900

3.0290

4.6990

4.6050

5.1720

5.4060

5.5830

6.1590

5.7200

6.4830

5.8600

6.6610

6.3610

3.3300

3.2040

3.4140

3.3080

3.5090

3.4300

3.6600

3.6180

3.8830

3.8270

KR

2

CO

2

0.8470

1.1790

1.1940

1.6680

1.5360

2.1720

1.9210

2.6950

2.4290

3.3160

2.7340

3.6700

2.9660

3.9030

3.0750

4.0710

3.1340

4.1540

3.2690

4.3360 (continued)

O

1.1410

1.6640

2.1950

2.8140

3.6720

4.2250

4.6200

4.9160

5.0260

5.1060

He

1.0680

1.5890

2.1640

2.9390

4.3870

5.7740

7.3140

Ar

0.9620

2

1.3860

1.8180

2.3330

3.0280

3.4800

3.8010

4.0370

4.1220

4.1920

N

Table "Non-Linear analog output - units in Torr / mTorr" (continued)

1.1552

1.6833

2.2168

2.8418

3.6753

4.2056

4.5766

4.8464

4.9449

5.0190

Pressure

True Total

[Torr / mTorr]

tinb21e1 (2016-06) 51

200 mTorr

500 mTorr

1 Torr

2 Torr

5 Torr

10 Torr

20 Torr

50 Torr

100 Torr

200 Torr

4

CH

6.1030

6.3420

6.5190

6.6420

Ne

2

D

6.7260

6.7670

6.8030

6.8430

6.8900

6.9200

6.9420

7.0000

7.0560

22

Freon

4.0050

4.0880

4.1510

4.2030

4.2470

4.2710

4.2860

4.3210

4.3540

12

Freon

3.9380

4.0160

4.0760

4.1240

4.1660

4.1900

4.2030

4.2370

4.2700

KR

2

CO

2

3.3840

4.5020

3.4660

4.6210

3.5260

4.7080

3.5730

4.7750

3.6130

4.8300

3.6320

4.8600

3.6450

4.8770

3.6740

4.9190

3.6900

4.9550

O

5.2000

5.3150

5.4220

5.5150

5.5920

5.6330

5.6580

5.7130

5.7620

He

Values listed under each gas type are in volts.

Ar

4.2830

2

4.3860

4.4770

4.5500

4.6110

4.6430

4.6630

4.7060

4.7450

N

Table "Non-Linear analog output - units in Torr / mTorr" (concluded)

5.1111

5.2236

5.3294

5.4194

5.4949

5.5340

5.5581

5.6141

5.6593

Pressure

True Total

[Torr / mTorr]

52

300 Torr

400 Torr

500 Torr

600 Torr

700 Torr

760 Torr

800 Torr

tinb21e1 (2016-06)

900 Torr

1000 Torr

Note: By design, these values are identical to the outputs from MKS Instruments / Granville-Phillips® Convectron® gauges, Mini-Convectron® modules and controllers so that equivalent units can be interchanged without affecting your process system or software.

An analog output of less than 0.01 volts to near 0 volt indicates a damaged or faulty sensor.

7.2 Non-Linear Analog Output

0.375 to 5.659 V, mbar

Non-Linear analog output for selected gases - Engineering units in mbar (see following table):

tinb21e1 (2016-06) 53

4

CH

Ne

2

D

22

Freon

12

Freon

KR

2

CO

0.375

0.376

0.378

0.3763

0.377

0.378

0.377

0.3825

0.3782

0.381

0.382

0.381

0.3896

0.381

0.386

0.388

0.379

0.385

0.403

0.388

0.396

0.4

0.401

0.384

0.395

0.438

0.405

0.425

0.432

0.437

0.395

0.412

0.492

0.433

0.47

0.48

0.488

0.415

0.462

0.584

0.484

0.549

0.566

0.581

0.451

0.536

0.796

0.608

0.727

0.764

0.778

0.544

0.705

1.053

0.768

0.944

0.99

1.009

0.668

0.9

2

O

He

Ar

2

N

[mbar]

True Pressure

0.375

0.3751

0

(continued)

0.376

0.3757

0.3759

.0001

0.377

0.376

0.3768

.0003

0.38

0.379

0.378

0.3795

.0006

0.384

0.382

0.381

0.384

.0013

0.392

0.389

0.387

0.3927

.0027

0.417

0.409

0.403

0.4174

.0067

0.453

0.441

0.429

0.4555

.0133

0.521

0.497

0.477

0.5226

.0266

0.679

0.637

0.595

0.6819

.0660

0.868

0.814

0.745

0.878

0.13

54

tinb21e1 (2016-06)

4

CH

1.392

2.014

2.632

3.313

4.699

5.172

5.583

5.72

5.86

Ne

2

D

22

Freon

12

Freon

KR

2

CO

2

O

1.002

1.265

1.291

1.315

0.847

1.179

1.4689

1.914

1.805

1.826

1.194

1.668

1.976

2.603

2.247

2.257

1.536

2.172

2.631

3.508

2.666

2.647

1.921

2.695

3.715

5.059

3.09

3.029

2.429

3.316

4.605

5.406

6.159

6.483

6.661

6.361

3.33

3.204

2.735

3.67

3.414

3.308

2.966

3.903

3.509

3.43

3.075

4.071

3.66

3.618

3.134

4.154

3.883

3.827

3.269

4.336

(continued)

1.141

1.664

2.195

2.814

3.672

4.225

4.62

4.916

5.026

5.106

He

1.068

Ar

0.962

Table "Non-Linear analog output - units in mbar" (continued)

2

N

1.1552

[mbar]

0.26

1.589

1.386

1.6833

0.66

2.164

1.818

2.2168

1.33

2.939

2.333

2.8418

2.66

4.387

3.028

3.6753

6.66

5.774

3.48

4.2056

13.3

7.314

3.801

4.5766

26.6

4.037

4.8464

66.6

4.122

4.9449

133

4.192

5.019

266

True Pressure

tinb21e1 (2016-06) 55

4

CH

6.103

6.342

6.519

6.642

Ne

2

D

22

Freon

12

Freon

KR

2

CO

2

O

6.726

4.005

3.938

3.384

4.502

5.2

6.767

4.088

4.016

3.466

4.621

5.315

6.803

4.151

4.076

3.526

4.708

5.422

6.843

4.203

4.124

3.573

4.775

5.515

6.89

4.247

4.166

3.613

4.83

5.592

6.92

4.271

4.19

3.632

4.86

5.633

6.942

4.286

4.203

3.645

4.877

5.658

4.321

4.237

3.674

4.919

5.713

7.056

4.354

4.270

3.69

4.955

5.762

7

56

He

Values listed under each gas type are in volts.

Ar

4.283

Table "Non-Linear analog output - units in mbar" (concluded)

2

N

5.1111

[mbar]

400

4.386

5.2236

533

4.477

5.3294

666

4.55

5.4194

800

4.611

5.4949

933

4.643

5.534

1010

4.663

5.5581

1060

4.706

5.6141

1190

4.745

5.6593

1330

True Pressure

tinb21e1 (2016-06)

Note: By design, these values are identical to the outputs from MKS Instruments / Granville-Phillips® Convectron® gauges, Mini-Convectron® modules and controllers so that equivalent units can be interchanged without affecting your process system or software.

An analog output of less than 0.01 volts to near 0 volt indicates a damaged or faulty sensor.

7.3 Log-Linear Analog Output 1-8 V, Torr

Log-Linear analog output for selected gases - Engineering units in Torr (see following table):

tinb21e1 (2016-06) 57

4

CH

Ne

2

D

22

Freon

12

Freon

KR

2

CO

1.000

1.301

1.699

1.477

1.699

2.230

1.845

2.114

2.176

1.602

2.041

2.519

2.176

2.380

2.491

2.000

2.362

2.886

2.544

2.778

2.845

2.881

2.362

2.643

3.185

2.851

3.083

3.130

3.167

2.681

3.041

3.483

3.149

3.386

3.435

3.476

2.978

3.346

3.888

3.542

3.778

3.839

3.860

3.371

3.740

4.201

3.845

4.083

4.134

4.155

3.670

4.029

4.498

4.149

4.398

4.418

4.439

3.960

4.322

True Pressure

2

O

He

Ar

2

N

[Torr]

(continued)

1.000

0.0001

1.301

1.3011

0.0002

1.699

0.0005

2.000

1.903

1.845

2.000

0.0010

2.301

2.204

2.146

2.301

0.0020

2.699

2.602

2.519

2.699

0.0050

2.987

2.908

2.820

3.000

0.0100

3.297

3.207

3.117

3.301

0.0200

3.692

3.607

3.511

3.699

0.0500

3.988

3.914

3.808

4.000

0.1000

4.288

4.217

4.100

4.301

0.2000

58

tinb21e1 (2016-06)

4

CH

Ne

2

D

22

Freon

12

Freon

KR

2

CO

4.893

4.555

4.837

4.774

4.786

4.336

4.689

5.204

4.872

5.190

5.017

5.021

4.602

4.978

5.522

5.201

5.616

5.220

5.210

4.845

5.233

5.877

5.719

7.391

5.418

5.389

5.107

5.524

6.446

6.332

8.041

5.530

5.471

5.250

5.696

7.550

7.766

8.041

5.571

5.521

5.360

5.819

7.925

8.041

5.617

5.579

5.410

5.915

8.041

5.691

5.670

5.438

5.966

8.041

5.808

5.777

5.521

6.090

8.041

5.876

5.838

5.555

6.228

2

(continued)

O

4.687

4.987

5.288

5.697

6.013

6.348

6.890

7.320

7.470

7.580

He

4.638

4.973

5.346

6.130

8.041

Ar

4.494

2

4.778

5.057

5.389

5.602

5.763

5.895

5.946

5.991

6.053

N

Table "Log-Linear 1 to 8 V analog output - units in Torr" (continued)

[Torr]

4.699

0.5000

5.000

1.0000

5.301

2.0000

5.699

5.0000

6.000

10.0000

6.301

20.0000

6.699

50.0000

7.000

100.0000

7.301

200.0000

7.477

300.0000

True Pressure

tinb21e1 (2016-06) 59

4

CH

Ne

2

D

22

Freon

12

Freon

KR

2

CO

8.041

5.925

5.883

5.595

6.350

8.041

5.964

5.918

5.624

6.458

8.041

5.998

5.947

5.647

6.561

8.041

6.029

5.974

5.667

6.664

8.041

6.045

5.989

5.677

6.732

8.041

6.057

5.998

5.685

6.774

8.041

6.079

6.021

5.698

6.900

8.041

6.104

6.045

5.706

7.045

2

O

7.686

7.781

7.863

7.934

7.974

7.999

8.041

He

8.041

Values listed under each gas type are in volts.

Ar

6.130

2

6.207

6.274

6.338

6.375

6.400

6.455

6.512

V = log10(P) + 5

N

Table "Log-Linear 1 to 8 V analog output - units in Torr" (concluded)

7.602

7.699

7.778

7.845

7.881

7.903

7.954

8.000

(V - 5)

[Torr]

400.0000

500.0000

600.0000

700.0000

760.0000

800.0000

900.0000

1000.0000

True Pressure

The log-linear output signal and pressure in the table above are related by the following formulas:

P = 10

where P is the pressure in Torr, and V is the output signal in volts.

60

tinb21e1 (2016-06)

p

h

o

s

e

g

t

n

a

r

a

o

0

o

Y

-

a

V

p

e

n

p

r

a

P

g

c

An analog out damaged or fa

The chart on t the table and f

True pressure output signal i

Note - when u P = 10 log output ran

10.12 V (dc) a

(V - 5)

list

Log-Li

ut of less than 0.

ulty sensor.

e following page

rmulas given ab

(N2) is plotted on

plotted on the

ing the units of p d above applies.

e of about 3.00

133 kPa

ear Analog Out

1 volts to near 0

shows the graphi

ve for nitrogen.

the X-axis with a

axis on a linear s

scals, the same

This results in a l

(dc) at .01 pasc

ut Voltage vs.

volt indicates a

al results of

log scale. The

ale.

equation of og-linear ana-

ls (Pa) and

ressure

Chart of the c

the log-linear

7.4

Log-Linea 1-8 V, mba

Log-Linear an in mbar (see f

tinb21e

1 (2016-06)

lculated pressur

output signal for

Analog Out

s using the formu

itrogen from the

ut

las and data for

revious page.

log output for sel

llowing table):

ected gases - En

ineering units

61

4

CH

Ne

2

D

22

Freon

12

Freon

KR

2

CO

1.000

1.301

1.699

1.523

2.167

1.903

2.080

2.125

1.668

2.028

2.523

2.166

2.392

2.487

1.970

2.355

2.893

2.551

2.778

2.855

2.883

2.370

2.672

3.186

2.849

3.082

3.136

3.172

2.675

3.012

3.484

3.150

3.385

3.434

3.473

2.979

3.345

3.886

3.543

3.779

3.837

3.863

3.372

3.741

4.197

3.844

4.082

4.136

4.157

3.671

4.033

4.500

4.148

4.393

4.424

4.445

3.963

4.325

2

O

He

Ar

2

N

[mbar]

True Pressure

(continued)

1.000

0.0001

1.301

0.0002

1.699

0.0005

2.000

1.938

1.903

2.000

0.0010

2.301

2.204

2.146

2.301

0.0020

2.699

2.602

2.524

2.699

0.0050

2.991

2.908

2.820

3.000

0.0100

3.294

3.208

3.188

3.301

0.0200

3.693

3.607

3.512

3.699

0.0500

3.989

3.928

3.809

4.000

0.1000

4.288

4.217

4.103

4.301

0.2000

62

tinb21e1 (2016-06)

4

CH

Ne

2

D

22

Freon

12

Freon

KR

2

CO

4.893

4.553

4.825

4.783

4.798

4.341

4.696

5.201

4.867

5.174

5.037

5.044

4.614

4.982

5.517

5.192

5.579

5.255

5.250

4.865

5.249

5.877

5.696

7.288

5.471

5.447

5.141

5.550

6.374

6.252

8.125

5.602

5.556

5.309

5.743

7.409

7.608

8.125

5.675

5.621

5.433

5.886

8.125

5.722

5.680

5.514

6.002

8.125

5.780

5.751

5.548

6.065

8.125

5.877

5.851

5.606

6.157

8.125

5.950

5.918

5.654

6.253

2

(continued)

O

4.686

4.987

5.288

5.695

6.008

6.337

6.862

7.282

7.526

7.625

He

4.634

4.962

5.324

6.070

8.125

Ar

4.495

Table "Log-Linear analog output - units in mbar" (continued)

2

4.784

5.064

5.404

5.633

5.815

5.969

6.045

6.903

6.131

N

[mbar]

4.699

0.5000

5.000

1.0000

5.301

2.0000

5.699

5.0000

6.000

10.0000

6.301

20.0000

6.699

50.0000

7.000

100.0000

7.301

200.0000

7.477

300.0000

True Pressure

tinb21e1 (2016-06) 63

4

CH

Ne

2

D

22

Freon

12

Freon

KR

2

CO

8.125

6.000

5.962

5.679

6.353

8.125

6.038

5.996

5.710

6.448

8.125

6.070

6.025

5.734

6.532

8.125

6.097

6.050

5.754

6.611

8.125

6.112

6.063

5.765

6.658

8.125

6.122

6.072

5.772

6.687

8.125

6.146

6.092

5.787

6.766

8.125

6.167

6.111

5.799

6.847

8.125

6.187

6.128

5.812

6.936

8.125

6.204

6.146

5.822

7.028

2

(continued)

O

7.705

7.786

7.861

7.928

7.965

7.988

8.042

8.092

8.125

He

8.125

Ar

6.178

Table "Log-Linear analog output - units in mbar" (continued)

2

6.237

6.295

6.349

6.380

6.399

6.488

6.494

6.539

6.580

N

7.602

7.699

7.778

7.845

7.881

7.903

7.954

8.000

8.041

8.079

[mbar]

400.0000

500.0000

600.0000

700.0000

760.0000

800.0000

900.0000

1000.0000

1100.0000

1200.0000

True Pressure

64

tinb21e1 (2016-06)

A

4

CH

Ne

2

D

22

Freon

12

Freon

KR

2

CO

8.125

6.222

6.164

5.828

7.140

8.125

6.228

6.169

5.830

7.169

2

O

8.125

He

8.125

Values listed under each gas type are in volts.

Ar

6.624

Table "Log-Linear analog output - units in mbar" (concluded)

2

N

8.114

6.636

V = log10(P) + 5

8.125

(V - 5)

) is plotted on the X-axis with a log scale. The output signal is plotted on the Y-

2

[mbar]

1300.0000

True Pressure

1333.0000 n analog output of less than 0.01 volts to near 0 volt indicates a damaged or faulty sensor.

The log-linear output signal and pressure in the table above are related by the following formulas:

P = 10

where P is the pressure in mbar, and V is the output signal in volts.

The chart on the following page shows the graphical results of the table and formulas given above for

nitrogen. True pressure (N

axis on a linear scale.

tinb21e1 (2016-06) 65

s

e

r

t

a

0

e

n

b

a

Note - when u P = 10

(V - 5)

list

analog output

10.12 V (dc) a

ing the units of p d above applies.

ange of about 3.

133 kPa.

scals, the same

This results in a l

0 V (dc) at .01 p

equation of og-linear

scals (Pa) and

Chart of the c

the log-linear

lculated pressur

output signal for

s using the formu

itrogen from the

las and data for

revious page.

66

tin

21e1 (2016-06)

7.5 Log-Linear Analog Output

1.15-10.215 V, mbar / Torr / Pa

Measurement range 1.15 … 10.16 V

p = 10

0.778(U-c)

⇔

U = c +1.286log10 p

valid in the range 1.3×10-4 mbar <p< 1333 mbar

U p c U p c

[V] [mbar] 6.143 [V] [micron] 2.448

[V] [µbar] 2.287 [V] [Pa] 3.572

[V] [Torr] 6.304 [V] [kPa] 7.429

[V] [mTorr] 2.448

where p pressure

U output signal c constant (pressure unit dependent)

tinb21e1 (2016-06) 67

7.6 Linear Analog Output 0-10 V, Torr

The PGE500 analog output may be setup to provide a 0-10 V (dc) output signal that has a direct linear relationship to the displayed pressure. When preparing to setup and process the linear analog output signal, first define the following parameters that you will program into the PGE500.

• Minimum measured pressure (for the defined analog output

range)

• Minimum output voltage desired (proportional to the minimum

pressure)

• Maximum measured pressure (for the analog output signal

range)

• Maximum output voltage desired (proportional to maximum

pressure)

Constructing a table of these parameters may be useful in documenting the relationship of displayed pressure to the analog output voltage. For example, the following table is representative of a typical setup where;

Min P = 1.00E-03 Torr Min Voltage = 0.01 Volts Max P = 1.00 Torr Max Voltage = 10 V

Linear Analog Output

Voltage - volts

Measured (Displayed)

Pressure - torr

0.01 1.00E-03

0.10 1.00E-02

1.00 1.00E-01

10.00 1.00E+00

It is recommended that the Linear output signal be setup such that the range covers, at most, 3 decades of pressure change. For example, if the minimum pressure selected is 1 mtorr (1.00E-03 torr) with a corresponding minimum voltage output of

0.01 volts, then the maximum pressure selected to correspond to a maximum voltage of 10.0 volts should not exceed 1.00 torr.

68

tinb21e1 (2016-06)

Doing this is considered best practice when using this type of analog output signal with the PGE500.

If your application requires the analog output voltage to cover a pressure range exceeding three decades, then consider using the log-linear or non-linear analog output.

tinb21e1 (2016-06) 69

8 RS485 / RS232 serial communications

8.1 Device Specific Serial Communication Info

The standard PGE500 model provides RS232 / RS485 serial communications. The following information and the RS485 / RS232 command protocol summary listed on the next page should be used to set serial communications with the device.

1) Default settings are 19200 baud rate, 8 data bits, No Parity,

1 stop bit [Factory default; 19200, 8, N, 1].

2) The baud rate can be set to different values through the

serial interface command set or the front panel push buttons.

3) The parity can be changed only through the serial interface

command set and the number of data bits will change according to the parity selected.

4) The stop bit is always 1.

5) All Responses are 13 characters long.

6) xx is the address of the device (00 thru FF).

7) <CR> is a carriage return.

8) _ is a space.

9) The 'z' in the set or read trip point commands is a + or -.

The plus is the 'turns on below' point and the minus is the ‘turns off above’ point.

10) All commands sent to the module start with a '#' character,

and all responses from the module start with a '*' character.

11) This protocol was designed to be 100% compatible with the

Granville-Phillips® Mini-Convectron®.

12) A valid address must be used even in RS232 commands

[Factory default = 1].

70

tinb21e1 (2016-06)

r

t

r

A

8.2 RS485 / RS232 Command Protocol Summary

RESPONSE

*xx_y.yyEzyy<CR>

(eg: *01_7.60E+02<CR>)

*xx_PROGM_OK<CR>

*xx_`PROGM_OK<CR>

*xx_PROGM_OK<CR>

*xx_y.yyEzyy<CR>

(eg: *01_7.60E+02<CR>)

COMMAND SYNTAX

#xxRD<CR>

(eg: #01RD<CR>)

#xxSAxx<CR>

(eg: #01SA20<CR>)

In example #01SA20 above ;

2=ADDR OFFSET, 0= ADDRESS

#xxTSy.yyEzyy<CR>

(eg: #01TS7.60E+02)

#xxTZy.yyEzyy<CR>

(eg: #01TZ0.00E-04<CR>)

#xxSLzy.yyEzyy<CR>

(eg: #01SL+4.00E+02<CR>)

(eg: #01SL-5.00E+02<CR>)

#xxSHzy.yyEzyy<CR>

(eg: #01SH+4.00E+02<CR>)

(eg: #01SH-5.00E+02<CR>)

#xxRLz<CR>

(eg: #01RL+<CR>)

(eg: #01RL-<CR>)

(continued)

pressure point for relay #1 and

relay #1. (2)

set the ‘turns off above’

pressure point fo

Set the ‘turns on below’

pressure point for relay #2 and

set the ‘turns off above’

pressure point for relay #2. (2)

Read the ‘turns on below’

pressure point for relay #1 and

read the ‘turns off above’

pressure point for relay #1.

SET TRIP POINT #2

READ TRIP POINT #1

BRIEF DESCRIPTION

Read the current pressure in

Tor

Set the communications

(RS485) address offset (upper

nibble) and Address (1)

COMMAND

READ

SET ADDR OFFSET &

DDRESS

Set the span or atmosphere

SET SPAN

Set the zero or vacuum

calibration poin

SET ZERO

Set the ‘turns on below’

SET TRIP POINT #1

tinb21e1 (2016-06) 71

RESPONSE

*xx_y.yyEzyy<CR>

(eg: *01_7.60E+02<CR>)

*xx_mmnnv-vv

(eg: *0105041-00)

*xx_PROGM_OK<CR>

COMMAND SYNTAX

#xxRHz<CR>

(eg: #01RH+<CR>)

(eg: #01RH-<CR>)

#xxVER<CR>

(eg: #01VER<CR>)

#xxFAC<CR>

(eg: #01FAC<CR>)

#xxSByyyyy<CR>

(eg: #01SB19200<CR>)

#xxSPN<CR>

(eg: #01SPN<CR>)

#xxSPO<CR>

(eg: #01SPO<CR>)

(continued)

BRIEF DESCRIPTION

Read the ‘turns on below’ pressure

point for relay #2 and read the ‘turns

off above’ pressure point for relay

#2.

Read the revision number of the

firmware.

Force unit to return ALL settings

back to the way the factory

programmed them before shipment.

(1)

Set the communications baud rate

for RS485 and RS232. (1)

Set the communications to NO

parity, 8 bits for the RS485 and

RS232. (1)

Set the communications to ODD

parity, 7 bits for the RS485 and

Table "RS485 / RS232 command protocol summary" (continued)

RS232. (1)

COMMAND

READ TRIP POINT #2

72

READ SW VERSION

SET FACTORY

DEFAULTS

SET BAUD RATE

SET NO PARITY

SET ODD PARITY

tinb21e1 (2016-06)

RESPONSE

*xx_PROGM_OK<CR>

No response

COMMAND SYNTAX

#xxSPE<CR>

(eg: #01SPE<CR>)

BRIEF DESCRIPTION

Set the communications to EVEN

parity, 7 bits for the RS485/ RS232.

Table "RS485 / RS232 command protocol summary" (concluded)

(1)

#xxRST<CR>

(eg: #01RST<CR>)

Reset the device. (required to

complete some of the commands.)

RESET command is sent or power is cycled. This protocol was designed to be 100% compatible with

the Granville-Phillips® Mini-Convectron®.

ADDR OFFSET & ADDRESS command is resent followed by the RESET command.

tinb21e1 (2016-06) 73

COMMAND

SET EVEN PARITY

RESET

(1) Commands marked with a (1) under the "BRIEF DESCRIPTION" column will not take effect until after

(2) Commands marked with a (2) under the "BRIEF DESCRIPTION" column will not take effect until after

9 Service

9.1 Calibration

Every INFICON module is calibrated prior to shipment using nitrogen (N ing zero (vacuum) and span (atmosphere) using the procedure described previously in section 4.3 titled "Programming". Zero and span (atmosphere) calibration affect the displayed value and the output signal. Zero calibration optimizes performance of the gauge when operating at a low pressure range of 1.00×10 to 1.00×10 than 1.00×10 bration at zero and thus span calibration should be adequate. If you are able to evacuate your system to below 1.00×10 is always a good practice to check and set zero if necessary. This will also improve performance in cases where gauge contamination is causing higher readings than 1.00×10 though the system has been evacuated to below 1.00×10 Care should be exercised when using gases other than nitrogen (N

).

2

). However, you can calibrate the instrument by adjust-

2

-3

Torr. If your minimum operating pressure is higher

-3

Torr, it is not normally necessary to perform cali-

-4

Torr

-4

Torr, it

-4

Torr even

-4

Torr.

9.2 Maintenance

In general, maintenance is not required for your INFICON module. Periodic performance checks may be done by comparing the gauge to a known reference standard.

74

tinb21e1 (2016-06)

r

k

9.3 Troubleshooting

Possible Solution

Check power supply & power cable Correct readings for different gas the

-

mal conductivity. See section 5 on

using the gauge with different gases

Check that zero and span are

adjusted correctly Check and tighten connections

Inspect gauge for signs of

contamination such as particles,

deposits, discoloration on gauge inlet.

Return to factory for possible cleaning Ensure gauge is not mounted where

excessive vibration is present Return to factory for possible cleaning

Replace sensor inside PGE500

module

(continued)

Possible Cause

No powe

The process gas is different from

the gas used to calibrate the

PGE500

Module has not been calibrated or

has been calibrated incorrectly Loose cables or connections

Contamination

Vibration

Contamination

Sensor failure for other cause

Indication

Display is off / blan

Readings appear very

tinb21e1 (2016-06) 75

different from expected

pressure Readings are noisy or

erratic

Gauge cannot be

calibrated - zero and span

can’t be adjusted

r

A

Possible Solution

Check setpoint setup

Replace sensor inside PGE500

module Reduce pressure

Repair or replace PGE500 electronics

Return to factory for possible cleaning

Replace sensor inside PGE500

module Replace sensor inside PGE500

module Return to factory for possible cleaning

Table "Troubleshooting" (concluded)

Possible Cause

Incorrect setup

Sensor wire damaged

System pressure over 1000 Tor

Faulty electronics

Contamination

Sensor wire damaged

Contamination

Indication

76

Display shows “Sensor Bad”

Display shows

“overpressure”

too high and can’t be set to

correct value

Setpoint does not actuate

tmospheric pressure reads

too low and can’t be set to

correct value

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9.4 Contamination

The most common cause of all vacuum gauge failures is contamination of the sensor. Noisy or erratic readings, the inability to set zero or atmosphere and total gauge failure, are all possible indications of gauge contamination.

Contamination can be generally characterized as either: A) a reaction of process gases with sensor elements, or B) an accumulation of material on the sensor elements. Sen-

sors that fail due to chemical reaction are generally not salvageable. Sensors that fail due to condensation, coatings, or particles may possibly be restored by cleaning.

A) Reactive Gases

If process gases react with the materials of construction of the sensor, the result is corrosion and disintegration of the sensor over time. The chemistry of the gases used for plasma etching and other reactive semiconductor processes are examples where this failure mode is possible. In this case, cleaning can’t solve the problem because the sensor has been destroyed. The sensor or module must be replaced.

If you experience this failure mode quickly or frequently, you should consider a different vacuum gauge for your application. Thermal vacuum gauges may be available with different sensor materials that are not as reactive with your particular process gases. The standard gold plated tungsten sensor used in the INFICON convection gauge is offered for use with air and inert gases such as N

, argon, etc. INFICON also offers platinum sen-

2

sors for applications not compatible with gold plated tungsten.

There is no material that is universally chemical resistant; your choice of vacuum gauge (as well as all other vacuum components) should take into consideration the potential reactions between your process gases and the materials of construction. Consider what effect water vapor will have when combined with your process gases because a finite amount of water will enter the chamber during venting to atmosphere with air.

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B) Oil, Condensation, Coatings, and Particles

If the failure is due to an accumulation of material in the gauge, we may be able to restore your gauge or module by cleaning. Contamination may be as simple as condensed water, or as difficult as solid particles.

Oils and hydrocarbons: Exposure of the gauge internal surfaces to oils and hydrocarbons can result in sensor contamination. Some of these types of contamination may be removed by cleaning the gauge. If there is the possibility of oil back streaming from wet vacuum pumps, it is recommended that a filter or trap be installed to prevent contamination of components of your vacuum system.

Condensation: Some gases (such as water vapor) can condense on sensor surfaces, forming a liquid coating that changes the rate at which heat is removed from the sensor (which changes the calibration). The sensor can often be restored simply by pumping on the gauge between process cycles. A dry N will help speed up drying, or the gauge may be gently heated provided temperature doesn't exceed the specified limit of 40 °C, operating.

purge

2

Coatings: Some gases can condense on sensor surfaces, forming a solid coating, which changes the rate at which heat is removed from the sensor. Some of these coatings may be removed by cleaning the gauge.

Particles: Particles generated by the process may enter the gauge during the process cycle or during the venting cycle. The result is interference with heat removal from the sensor. In this case, cleaning may be able to remove particles from the gauge. However, particulate contamination is the most difficult to remove as particles can become stubbornly trapped inside the gauge. In some processes, solid particles are created during the process throughout the chamber including inside the gauge. Particles tend to form on cooler surfaces such as in a gauge at room temperature. You may slow down the build-up of particles in the gauge by keeping the gauge warm (within specified limits) during the process cycle.

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Particles in the process chamber may be swept into the gauge during the vent cycle. The PGE500 has a screen built into the gauge port to help keep the largest particles out of the gauge. In very dirty applications, or where particles are small enough to get through the screen, an additional filter installed on the inlet may help prolong the gauge life.

In some vacuum processes, desorbed and sputtered materials from the process may enter vacuum components connected to the process vacuum chamber by line-of-sight transport, especially under high vacuum conditions, i.e., in the molecular flow regime. To prevent materials that may be transported via line-ofsight momentum from entering your vacuum gauge or other components, it is advisable to install some form of apparatus that will block the line-of-sight. In many cases a simple 90° elbow may help prevent or reduce the transport of particles from entering your vacuum gauge.

In the event of gauge contamination please contact the factory to return the gauge for possible cleaning if the gauge has not been exposed to hazardous materials.

9.5 Module and sensor replacement

The PGE500 module is factory calibrated for the specific sensor (gauge tube) installed in it. If the sensor inside the module fails for any reason, the PGE500 module should be replaced or returned to the factory for replacement of the sensor and recalibration of the complete PGE500 module. If you prefer to have your sensor replaced and the module recalibrated, contact the factory for return authorization, as described below.

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10 Factory Service and Support

If you need help setting up, operating, troubleshooting, or obtaining a return materials authorization number (RMA number) to return the module for diagnosis, please contact us during normal business hours Monday through Friday, at +423 / 388

3111. Or e-mail us at reachus@inficon.com.

11 Returning the Product

WARNING

WARNING: forwarding contaminated products Contaminated products (e.g. radioactive, toxic,

caustic or microbiological hazard) can be detrimental to health and environment.

Products returned to INFICON should preferably be free of harmful substances. Adhere to the forwarding regulations of all involved countries and forwarding companies and enclose a duly completed declaration of contamination

*)

Form under www.inficon.com

*)

.

Products that are not clearly declared as "free of harmful substances" are decontaminated at the expense of the customer.

Products not accompanied by a duly completed declaration of contamination are returned to the sender at his own expense.

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12 Disposal

DANGER: contaminated parts Contaminated parts can be detrimental to health

and environment. Before beginning to work, find out whether any

parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.

WARNING: substances detrimental to the environment

DANGER

WARNING

Products or parts thereof (mechanical and electric components, operating fluids etc.) can be detrimental to the environment.

Dispose of such substances in accordance with the relevant local regulations.

Separating the components

After disassembling the product, separate its components according to the following criteria:

• Non-electronic components

Such components must be separated according to their materials and recycled.

• Electronic components

Such components must be separated according to their materials and recycled.

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EU Declaration of Conformity

We, INFICON, hereby declare that the equipment mentioned below complies with the provisions of the Directive relating to electromagnetic compatibility 2014/30/EU and the Directive on the restriction of the use of certain hazardous substances in electrical and electronic equipment 2011/65/EU.

Pirani Gauge Enhanced

PGE500

Standards

Harmonized and international / national standards and specifications:

• EN 61000-6-2:2005

• EN 61000-6-4:2007 + A1:2011

• EN 61010-1:2010

measurement, control and laboratory use)

• EN 61326-1:2013; Group 1, Class A

electrical equipment for measurement, control and laboratory use)

(EMC: generic immunity standard)

(EMC: generic emission standard)

(Safety requirements for electrical equipment for

(EMC requirements for

Manufacturer / Signatures

INFICON AG, Alte Landstraße 6, LI-9496 Balzers

19 July 2016 19 July 2016

Dr. Bernhard Andreaus Director Product Evolution

Marco Kern Product Manager

82

tinb21e1 (2016-06)

Notes

tinb21e1 (2016-06) 83

Original: English reachus@inficon.com

t i nb21e1

LI–9496 Balzers Liechtenstein Tel +423 / 388 3111 Fax +423 / 388 3700

www.inficon.com

Inficon Pirani Gauge Enhanced 500, PGE500 Operating Manual

Specifications and Main Features

Frequently Asked Questions

User Manual