Inficon Pirani Gauge Enhanced 500, PGE500 Operating Manual
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Op
Incl.
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EU Declaration o
al
f Conformity
1
Product Identification
In all communications with INFICON, please specify the information given on the product nameplate. For convenient reference copy that information into the space provided below.
2
tinb21e1 (2016-06)
Validity
This document applies to products with part numbers:
1)
→ 67
2)
→ 48, 53
3)
→ 57, 61
4)
→ 68. Analog output 0 … 10 V is available on all devices by
default on pin 9.
The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this
document correspond to the product with vacuum connection
DN 25 ISO-KF. They apply to the other products by analogy.
We reserve the right to make technical changes without prior
notice.
tinb21e1 (2016-06) 3
Important User Information
There are operational characteristic differences between solid
state equipment and electromechanical equipment. Because of
these differences, and because there are a variety of uses for
solid state equipment, all persons that apply this equipment must
take every precaution and satisfy themselves that the intended
application of this equipment is safe and used in an acceptable
manner.
In no event will INFICON be responsible or liable for indirect or
consequential damages that result from the use or application of
this equipment.
Any examples or diagrams included in this manual are provided
solely for illustrative purposes. Because of the many variables
and requirements imposed on any particular installation,
INFICON cannot assume responsibility or liability for any actual
use based on the examples and diagrams.
No patent liability is assumed by INFICON with respect to use of
information circuits, equipment, or software described in this
manual.
Throughout this manual we use notes, notices and apply internationally recognized symbols and safety messages to make
you aware of safety considerations.
4
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tinb21e1 (2016-06)
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5
General Safety Instructions
• Adhere to the applicable regulations and take the necessary
precautions for the process media used.
Consider possible reactions with the product materials.
Consider possible reactions (e.g. explosion) of the process
media due to the heat generated by the product.
• Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider the
safety instructions in this document.
• Before beginning to work, find out whether any vacuum components are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contaminated parts.
Communicate the safety instructions to all other users.
Liability and Warranty
INFICON assumes no liability and the warranty becomes null
and void if the end-user or third parties
• disregard the information in this document
• use the product in a non-conforming manner
• make any kind of interventions (modifications, alterations etc.)
on the product
• use the product with accessories not listed in the product
documentation.
The end-user assumes the responsibility in conjunction with the
process media used.
Gauge failures due to contamination or wear and tear, as well as
expendable parts (e.g. Pirani filament), are not covered by the
warranty.
6
tinb21e1 (2016-06)
Contents
Product Identification 2
Validity 3
Important User Information 4
General Safety Instructions 6
Liability and Warranty 6
1 Introduction / General Information 9
1.1 Description 9
1.2 Specifications 9
1.3 Dimensions 12
1.4 Options & Accessories 13
2 Important Safety Information 14
2.1 Safety Precautions - General 14
2.2 Safety Precautions - Service and Operation 15
2.3 Electrical Conditions 16
2.3.1 Proper Equipment Grounding 16
2.3.2 Electrical Interface and Control 17
2.4 Overpressure and use with hazardous gases 17
2.5 Gases other than Nitrogen / air 18
3 Installation 19
3.1 Mechanical Installation 19
3.2 Electrical Installation 21
3.2.1 Grounding 21
3.2.2 Electrical Connections 22
4 Setup and Operation 25
4.1 Initial Setup 25
4.2 User Interface Basics 26
4.3 Programming 27
4.4 Return to Factory Default Settings 33
5 Using the gauge with different gases 34
6 Display 37
6.1 Display - Torr / mTorr 37
6.2 Display - mbar 41
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7 Analog Output 46
7.1 Non-Linear Analog Output - 0.375 to 5.659 V,
Torr / mTorr 48
7.2 Non-Linear Analog Output - 0.375 to 5.659 V, mbar 53
7.3 Log-Linear Analog Output - 1-8 V, Torr 57
7.4 Log-Linear Analog Output - 1-8 V, mbar 61
7.5 Log-Linear Analog Output - 1.15-10.215 V,
mbar / Torr / Pa 67
7.6 Linear Analog Output 0-10 V, Torr 68
8 RS485 / RS232 serial communications 70
8.1 Device Specific Serial Communication Info 70
8.2 RS485 / RS232 Command Protocol Summary 71
9 Service 74
9.1 Calibration 74
9.2 Maintenance 74
9.3 Troubleshooting 75
9.4 Contamination 77
9.5 Module and sensor replacement 79
10 Factory Service and Support 80
11 Returning the Product 80
12 Disposal 81
EU Declaration of Conformity 82
For cross-references within this document, the symbol (→ XY)
is used.
8
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1 Introduction / General Information
1.1 Description
Thermal conductivity gauges measure pressure indirectly by
sensing the loss of heat from a sensor to the surrounding gases.
The higher the pressure of the surrounding gas, the more heat is
conducted away from the sensor. Pirani thermal conductivity
gauges maintain a sensor (usually a wire) at some constant temperature, and measure the current or power required to maintain
that temperature. A standard Pirani gauge has a useful measuring range of about 10
convection currents that are generated above 1 Torr, convectionenhanced Pirani gauges increase the measuring range to just
above atmosphere.
-4
Torr to 10 Torr. By taking advantage of
The INFICON PGE500 Pirani Gauge Enhanced module provides
the basic signal conditioning required to turn a convection
vacuum gauge into a complete measuring instrument. The module provides linear, non-linear or log-linear analog outputs, two
setpoint relays and RS232/485 serial communications. In addition, a built-in display provides a convenient user interface for
setup and operation of the vacuum gauge.
1.2 Specifications
Measurement range 1.3×10
Accuracy - N
1.3×10
1.3×10
530 … 1333 mbar
-4
1×10
-3
1×10
400 … 1000 Torr
(typical)
2
-4
… 1.3×10-3 mbar
-3
… 530 mbar
… 1×10-3 Torr
… 400 Torr
-4
… 1333 mbar
-4
1×10
1.3×10
… 1000 Torr
-2
Pa … 133 kPa
0.1 ×10
-3
mbar resolution
±10% of reading
±2.5% of reading
0.1 mTorr resolution
±10% of reading
±2.5% of reading
Repeatability - N
tinb21e1 (2016-06) 9
(typical) ±2% of reading
2
Display bright OLED, 4 digits, user-
selectable mbar, Torr or Pa
1100 Torr … 1000 Torr 4 digits
999 Torr… 10.0 mTorr 3 digits
9.9 mTorr … 1.0 mTorr 2 digits
0.9 mTorr… 1.0 mTorr 2 digits
Materials exposed to vacuum gold-plated tungsten, 304 & 316
stainless steel, glass, nickel,
Teflon
®
Housing (electronics) aluminum extrusion
Internal volume 26 cm3 (1.589 in3)
Internal surface area 59.7 cm
2
(9.25 in2)
Weight 340 g (12 oz.)
Permissible temperature
Operating
0 … +40 °C
Storage –40 … +70 °C
Bakeout temperature ≤150 °C (gauge only - electro-
nics removed)
Relative humidity 0 … 95%, non-condensing
Use
Operating
altitude up to 2500 m (8200 ft.)
Storage altitude up to 12500 m
(41000 ft.)
Mounting orientation horizontal recommended
(orientation has no effect on
measurements below 1.3 mbar
(1 Torr))
10
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Output signal analog (measurement signal)
3PE5-0xx-B7F0 log-linear
1.15 … 10.215 V (dc),
1.286 V/decade
p = 10
0.778(U-c)
(→ 67)
-B7F2 non-linear S-curve
0.375 … 5.659 V (dc)
Granville-Phillips
vectron
®
compatible
®
Mini-Con-
(→ 48, 53)
-B7F5 log-linear
1 … 8 V (dc)
1 V/decade
P = 10
(V - 5)
, (→ 57, 61)
-B7F– linear
0 … 10 V (dc)
(→ 68)
RS232C / RS485 interface ASCII protocol
Supply voltage 12 … 28 V (dc), 2 W protected
against power reversal and
transient overvoltages
Setpoint relays two, single-pole double-throw
relays (SPDT), 1 A at 30 V (dc)
resistive, or V (ac) non-inductive
Electrical connection 9-pin D-sub male and
15-pin HD D-sub male (with
RS485)
tinb21e1 (2016-06) 11
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1.3
Dimensio
F
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s
Dimension
D
16 ISO-KF
25 ISO-KF
40 ISO-KF
D
16 CF-R
40 CF-R
4
VCR female
8
VCR female
1
8" NPT male
mm (in
25.9 (1.
25.9 (1.
25.9 (1.
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1.4
Options &
Power supply
Input: 100 …
Output: 24 V (
Cable Length:
Accessories
or PGE300/500
40 V (ac)
c) @ 2.5 A (60
2 m (6 ft.)
Ordering No.
352-525
)
This variation
plug that is no
IEC60320 AC
supplied AC m
f the power sup
listed above is r
power entry rece
ains power cord
ly may be used
quired. The conv
tacle allows use
et available worl
hen an AC
ntional
ith any user
wide.
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2.2
Due to the po
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trical insulatio
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Ensure that th
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Use an appro
Turn off power
module.
Turn off power
product is not
manual. Cont
service or trou
this operating
sibility of corrosi
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ver time. It is im
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autions - S
vacuum port on
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be covered by
tinb21e
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instructions fo
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WARNI
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2.3.1
16
Proper Equi
WARNI
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Verify that the
module is mou
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well as intend
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connection / fl
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G! Hazardous
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vacuum gauge
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WARNI
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2.4
Overpress
WARNI
limit the level
than what the
of withstandin
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In cases wher
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chamber.
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acuum chamber
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g 1000 Torr abs
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CAUTI
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pressure.
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ed for use at
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ssible dam-
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2.5
Gases oth
WARNI
nitrogen (N2) o
tables.
INFICON gau
of nitrogen or
argon (Ar) or c
data for N
"Using the gau
Output" for a
18
r than Nitro
G! Do not atte
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to
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ore complete dis
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Installati
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G! Do not use t
presence of flam
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ses or gas mixtu
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temperature cou
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°C, but if malfun
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result in serious i
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explosive or
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tion should
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want to measu
create a press
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changes.
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cause measur
PGE500 near
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Mount the PG
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the unit is not
position has lit
For accurate
horizontally as
500 as close as
re. Long or restri
re difference bet
may cause a d
GE500 too close
ment and contro
source of heati
vents.
500 with its mai
ressure reading
ounted horizont
le to no effect.
easurements ab
shown below:
possible to the pr
ted, small diame
ween your proce
lay in response t
to a gas source i
l instability. Do n
g or cooling, suc
(long) axis horiz
rrors may occur
lly. Below 1 Torr
ve 1 Torr, mount
ssure you
er tubing will
s chamber and
pressure
let may also
t mount the
as heaters or
ntal (see dia-
bove 1 Torr if
mounting
the gauge axis
tinb21e
1 (2016-06)
19
n
E
n
w
a
b
o
r
m
r
Incorrect Orie
Vacuum ch
tation:
mbe
Mount the PG
the effect of a
gauge.
20
500 with port do
y particles or con
Vacuu
n, if possible, to
densation from c
tin
chambe
help minimize
llecting in the
21e1 (2016-06)
t
V
a
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a
o
o
o
e
a
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a
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m
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u
i
a
e
n
a
a
y
3.2
3.2.1
Do not mount
sive vibration.
rement errors
the PGE500.
Flanges/ Fittin
and note the f
- NPT fittings:
apply a thread
with one-andas PTFE (Tefl
gauge port. D
age the gauge
Electrical I
Grounding
he PGE500 whe
ibrations may c
nd possible mec
s - follow the ma
llowing:
When connectin
sealant or wrap t
-half to two wrap
n®) tape and ha
not use a wrenc
.
nstallation
e it will be subjec
use unstable rea
hanical stress to
nufacturer's reco
the device using
e threaded porti
of pipe thread s
d tighten the ga
or other tool wh
ed to exces-
ings, measu-
omponents in
mendations
a NPT fitting,
n of the tubing
al tape such
ge into the
ch may dam-
Be sure
system are pr
operation of th
clamps must b
some vacuum
Teflon tape m
vacuum gaug
use a 12 gaug
gauge to a gro
low.
the vacuum gau
perly grounded f
equipment. Wh
e used to ensure
fittings such as N
y not allow for m
and the vacuum
or larger coppe
und lug on your v
e and the rest of
r safety as well
n using KF flang
proper grounding
PT connections i
tal-to-metal cont
chamber. If such
wire to connect t
acuum chamber
our vacuum
s intended
s, metal
. Be aware that
stalled using
ct between the
is the case,
he vacuum
s shown be-
tinb21e
1 (2016-06)
21
V
Gauge tube
Metal clamp or
metal hose clamp
Use 12 gauge or
larger ground wire
Ground lug
acuum
chamber
Vacuum gauge fitting
3.2.2 Electrical Connections
A good recommended practice is to remove power from any
cable prior to connecting or disconnecting it.
Do not connect power to both the 9-pin and 15-pin D-Sub connectors. Apply power only to one or the other. The INFICON
PGE500 will directly replace Granville-Phillips® Mini-Convectron® modules that have a 9-pin D-sub connector (DE-9P) or
15-pin D-sub connector (DE-15P), and you can use your existing
cables and electronics. For new installations, fabricate a cable to
connect to the signals/functions you want to use. When using
RS232 or RS485 serial communications, you must fabricate your
own cable according to the 15-pin D-Sub pinout shown below. A
standard off-the-shelf serial communications cable will not work.
All signals and pin assignments are described below:
22
tinb21e1 (2016-06)
9-pin D-sub Connector pinout
Pin no. Pin description
1 Relay 1 Normally Open
2 Relay 1 Normally Closed
3 Supply (12…28 V (dc))
4 Power Ground
5 Analog Output 1 (Log-Linear 1…8 V, Log-Linear
1.15…10.215 V, or Non-linear Granville-Phillips®
Mini-Convectron® compatible)
6 Relay 1 Common
7 Relay Disable (Disables both Relays when
connected to pin 4 - Ground)
8 Analog Ground
9 Analog Output 2 (Programmable Linear 0…10 V)
tinb21e1 (2016-06) 23
15-pin D-sub Connector pinout
Pin no. Pin description
1 RS485 DATA B (+) Input/output
2 RS485 DATA A (-) Input/output
3 Supply (12…28 V (dc))
4 Power Ground (Also when using serial
communications, this pin is typically connected to
pin # 5 of your PC RS232 serial port 9-pin D-sub
connector, or ground pin of your RS485 converter)
5 Analog Output 1 (Log-Linear 1…8 V, Log-Linear
1.15…10.215 V, or Non-linear Granville-Phillips®
Mini-Convectron ®compatible)
6 Analog Ground
7 RS232 TX (This pin is typically connected to pin
# 2 of your PC serial port 9-pin D-sub connector)
8 RS232 RX (This pin is typically connected to pin
# 3 of your PC serial port 9-pin D-sub connector)
9 Relay Disable (Disables both Relays when
connected to pin 4 - Ground)
10 Relay 1 Normally Open
11 Relay 2 Normally Open
12 Relay 2 Common
13 Relay 2 Normally Closed
14 Relay 1 Normally Closed
15 Relay 1 Common
24
tinb21e1 (2016-06)
4 Setup and Operation
4.1 Initial Setup
Two of the most important steps for the initial setup of the gauge
are to set zero (SET VAC) and set atmosphere (SET ATM) as
described in the Programming section 4.3 below. This will ensure proper operation of the gauge and accurate pressure measurements. The gauge is calibrated at the factory using nitrogen.
Furthermore, the gauge is also installed in a certain orientation
when calibrated at the factory. Without setting zero and atmosphere after the gauge is installed in your system, the gauge may
not display the expected and correct pressures. This could be
caused by the fact that you may be using a different gas than
Nitrogen such as air to setup and calibrate the gauge (most commonly the case) and the gauge orientation is different than the
orientation used at the factory. As such, it is very important to
perform your own initial setup and calibration by setting zero and
atmosphere with the gauge installed in your actual system.
Please note the following:
Setting zero (SET VAC): Setting zero optimizes performance of
the gauge when operating at a low pressure range of
1.00×10
sure is higher than 1.00×10
-4
Torr to 1.00×10-3 Torr. If your minimum operating pres-
-3
Torr, it is not normally necessary to
set zero and thus setting atmosphere should be adequate. If you
are able to evacuate your system to below 1.00×10
-4
Torr, it is
always a good practice to check and set zero if necessary. See
"SET VAC" in section 4.3.
Setting Atmosphere (SET ATM): Setting atmosphere is the
most important step for a newly installed gauge. If you prefer to
use air to set atmosphere, vent your vacuum system chamber to
expose the gauge to the local atmospheric pressure (air) and set
atmosphere to match your known local uncorrected barometric
pressure (air). This is the reading of ambient air pressure you will
expect if you were to vent and open your vacuum chamber to the
atmosphere surrounding the outside of your chamber. At sea
level, this pressure is usually near 760 Torr.
tinb21e1 (2016-06) 25
a
t
c
s
e
f
p
o
f
f
p
n
d
r
t
h
t
o
h
e
e
n
o
s
e
a
D
y
n
c
b
e
r
o
o
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b
g
t
v
e
t
i
k
e
4.2
At elevations
your local avia
local weather
ed barometric
"SET ATM" in
Note - Setting
once during th
periodically. A
the initial setu
(warm-up) bef
User Inter
bove sea level, t
ion authority or a
onditions online
pressure if you d
ection 4.3.
zero and atmosp
initial setup and
ter power has be
, allow five minut
re setting zero a
ace Basics
e pressure decr
irport web sites o
o help find your l
not have this inf
ere is normally r
maybe checked
n applied to the
s for the gauge
d atmosphere.
ases. Check
your current
cal uncorrect-
rmation. See
quired only
y the user
auge during
o stabilize
The user inter
progression of
explanation of
There are four
side of the dis
the various fu
PGE500, the
sents.
To begin prog
play will indica
by the function
of the paramet
Programmi
ace is designed f
setup parameter
operation for add
soft-keys located
lay. These keys
ctions available.
isplay will identif
amming, press a
e a choice of fun
on the display to
er desired.
ng soft-keys
r easy operation
. This section gi
d clarity.
on the front pan
re used to selec
uring programm
what function ea
y one of the four
tions. Press the
continue with th
and a natural
es a brief
l, two on each
and program
ng of the
h key repre-
keys. The dis-
ey indicated
programming
26
tin
21e1 (2016-06)
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