INFICON PCG55x User Manual

Pirani Capacitance Diaphragm
Gauge

PCG550
PCG552
PCG554

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Operating Manual

Incl. EC Declaration of Conformity

Product Identification

In all communications with INFICON, please specify the infor­mation given on the product nameplate. For convenient refer­ence copy that information into the space provided below.

INFICON AG, LI-9496 Balzers

Model:
PN:
SN:
V W ; LPS

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Validity

This document applies to products of the PCG55x series.

Part numbers of standard products are indicated below. OEM
products have other part numbers and different parameter
settings (e.g. factory setting of setpoint) as defined in the
corresponding ordering information.

3PCx-0xx-xxxx

Flange

1  DN 16 ISO-KF

2  DN 16 ISO-KF long tube

4  DN 16 CF-F

5  DN 16 CF-R long tube
6  DN 25 ISO-KF
D  4 VCR female
E  8 VCR female

F  1/8" NPT

 Flange 29×29 mm

K

M  4 VCR 90° female
N  7/16-20 UNF male

Unit

0  mbar
1  Torr
2  Pa

3  micron

Filament

 Tungsten

1
2  Nickel

 Ceramic coated

3



6

Tungsten,

7  Nickel, galvanically isolated
8  Ceramic coated,
galvanically isolated

galvanically isolated

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3PCx-0xx-xxxx

Measuring

signal

Interface

Receptacle

Display

Switching function

*) Solid state relays
**) Mechanical relays

The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this

document correspond to gauges with the DN 16 ISO-KF vacuum
connection and display. They apply to gauges with other vacuum
connections by analogy.

We reserve the right to make technical changes without prior
notice.

0.61 ... 10.23 V

0 
1  1.2 ... 8.68 V

2  0.375 ... 5.659
3  1.57 ... 9.05 V

0  None (analoge)
1  DeviceNet
2  Profibus

8  EtherCAT

0  FCC
1  D-Sub, 9-pin
2  D-Sub, 15-pin HD

 D-Sub, 15-pin HD, RS485 INF

4

0  None
1  Display
2  2 switching functions

3  ATM sensor &
2 switching functions *)
4  Display & 2 switching functions *)
5  Display & AT M sensor &
2 switching functions *)
6  2 switching functions **)
7  ATM sensor &
2 switching functions **)

*)

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Intended Use

The Pirani Capacitance Diaphragm Gauge PCG55x has been
designed for vacuum measurement of gases in the pressure
range of 5×10

-5

… 1500 mbar.

It must not be used for measuring flammable or combustible
gases which react in air.

The gauge is intended for operation in connection with an
INFICON Vacuum Gauge Controller VCG401, 402, 403 or with
another suitable controller.

Functional Principle

The PCG gauge is a combination gauge consisting of a Pirani
sensor and a diaphragm capacitive sensor. Both sensors are
constantly active.

At low pressures, only the signal of the Pirani sensor is used for
pressure measurement; at high pressures, only the signal of the
diaphragm capacitive sensor. To determine the output signal in
the intermediate range, both signals are used proportionally to
the pressure.

Trademark

VCR® Swagelok Marketing Co.

Patents

EP 0689669 B1, 0689670 B1, 0658755 B1
US Patente 5608168, 4031997, 5583297

Scope of Delivery

1× gauge
1× pin for adjusting settings via buttons
1× Operating Manual English
1× Operating Manual German

tina56e1-d (2014-01) 5

Contents

Product Identification 2
Validity 3
Intended Use 5
Functional Principle 5
Trademark 5
Patents 5
Scope of Delivery 5

1

Safety 8

1.1 Symbols Used 8

1.2 Personnel Qualifications 8

1.3 General Safety Instructions 9

1.4 Liability and Warranty 9

2 Technical Data 10

2.1 Output Signal vs. Pressure 19

2.2 Gas Type Dependence 24

3 Installation 25

3.1 Vacuum Connection 25

3.2 Power Connection 28

3.2.1 FCC 68, 8-pin Connector 29

3.2.2 D-Sub, 9-pin Connector 30

3.2.3 D-Sub HD, 15-pin Connector 31

3.2.4 D-Sub HD, 15-pin, RS485 INF Connector 32

3.2.5 DeviceNet Connector 33

3.2.6 Profibus Connector 34

3.2.7 EtherCAT Connector 35

4 Operation 36

4.1 Status Indication and Displays 36

4.2 Gas Type Dependence 40

4.3 Switching Functions SP1, SP2 40

4.4 ATM Setpoint 47

4.5 Diagnostic Port (RS232C Interface) 49

4.6 DeviceNet Operation 50

4.7 Profibus Operation 53

4.8 EtherCAT Operation 55

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5 Deinstallation 56
6 Maintenance, Repair 58

6.1 Adjusting the Gauge 58

6.2 Adjusting the Atmospheric Pressure Sensor 60

6.3 Replacing the Sensor 61

6.4 Troubleshooting 62

7 Returning the Product 63
8 Disposal 64
9 Accessories 65
10 Spare Parts 66

Further Information 69

ETL Certification 70
EC Declaration of Conformity 71

For cross-references within this document, the symbol (→  XY)
is used, for cross-references to further documents, listed under
"Further Information", the symbol (→  [Z]).

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1 Safety

1.1 Symbols Used

DANGER

Information on preventing any kind of physical injury.

WARNING

Information on preventing extensive equipment and environ­mental damage.

Caution

Information on correct handling or use. Disregard can lead to
malfunctions or minor equipment damage.

Notice

<…> Labeling

1.2 Personnel Qualifications

Skilled personnel

All work described in this document may only be carried out by
persons who have suitable technical training and the neces­sary experience or who have been instructed by the end-user
of the product.

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1.3 General Safety Instructions

• Adhere to the applicable regulations and take the necessary
precautions for the process media used.

Consider possible reactions with the product materials.
Consider possible reactions (e.g. explosion) of the process

media due to the heat generated by the product.

• Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider the
safety instructions in this document.

• Before beginning to work, find out whether any vacuum com­ponents are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contamin­ated parts.

Communicate the safety instructions to all other users.

1.4 Liability and Warranty

INFICON assumes no liability and the warranty becomes null
and void if the end-user or third parties

• disregard the information in this document

• use the product in a non-conforming manner

• make any kind of interventions (modifications, alterations etc.)

on the product

• use the product with accessories not listed in the product
documentation.

The end-user assumes the responsibility in conjunction with the
process media used.

Gauge failures due to contamination or wear and tear, as well as
expendable parts (e.g. filament) are not covered by the warranty.

tina56e1-d (2014-01) 9

2 Technical Data

For further technical data for gauges with DeviceNet and

Profibus interface →  [3], [4], [5], [6].

Measurement range 5×10-5 … 1500 mbar
Measurement principle

10 mbar … 1500 mbar

1 … 10 mbar crossover range

-5

5×10

… 1 mbar thermal conductance acc. to

Accuracy (N

5×10
1×10

)

2

-4

… 1×10-3 mbar

-3

… 100 mbar ±15% of reading
100 … 950 mbar ±5% of reading
950 … 1050 mbar ±2.5% of reading

Repeatability (N

1×10

)

2

-3

… 1100 mbar

Output signal (measurement signal)

Voltage range
3PCx-0xx-xxx0

3PCx-0xx-xxx1 0 … +8.68 V
3PCx-0xx-xxx2 0 … +5.659 V
3PCx-0xx-xxx3 0 … +9.05 V

Measurement range
3PCx-0xx-xxx0

3PCx-0xx-xxx1 +1.2 … +8.68 V
3PCx-0xx-xxx2 +0.375 … +5.659 V
3PCx-0xx-xxx3 +1.57 … +9.05 V

Error signal 0 V (default)

diaphragm capacitive
sensor

Pirani

±50% of reading

±2% of reading

0 … +10.23 V

+0.61 … +10.23 V

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Voltage vs. pressure
3PCx-0xx-xxx0

1.286 V/decade, logarithmic
3PCx-0xx-xxx1 1 V/decade, logarithmic
3PCx-0xx-xxx3 1 V/decade, logarithmic
3PCx-0xx-xxx2

Output impedance

Load impedance

Response time

Gauge identification

FCC 68 (+0.61 … +10.23 V)

→  21

2 × 4.7 Ω, short circuit-proof

>10 kΩ
<30 ms

71.5 kΩ

HV adjustment at <10-5 mbar
ATM adjustment at >100 mbar

Solid state relays switching functions SP1,

SP2, ATM
Setting range (N
Hysteresis
Switching characteristics

) 5.0×10-5 … 1500 mbar

2

1)

10% of threshold

1)

Low Trip Point

Contact rating <30 V (ac) / (dc), ≤0.3 A

resistive

closed LED lit solid
open LED off

Switching time <30 ms

1

)

The hysteresis and the switching characteristics can be

programmed via the serial interface or the diagnostic port.

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Mechanical relays switching functions SP1,

SP2, ATM
Setting range (N
Hysteresis
Switching characteristics

) 5.0×10-5 … 1500 mbar

2

1)

10% of threshold

1)

Low Trip Point

Type 1 floating contact (n.o.) per

switching function
Contact rating <30 V (ac) / (dc), ≤1 A

resistive

closed LED lit solid
open LED off

Switching time <30 ms

Diagnostic port Jack connector 2.5 mm,

Supply

3-pin

DANGER

The gauge may only be connected to power sup­plies, instruments, or control devices that conform
to the requirements of a grounded protective extra­low voltage (SELV) and limited power source
(LPS), Class 2. The connection to the gauge has to

2)

be fused.

Supply voltage

at the gauge
Ripple ≤1 V

Power consumption

without fieldbus
DeviceNet
Profibus

Fuse to be connected

2)

INFICON controllers fulfill this requirement.

Class 2 / LPS

+15 … +30 V (dc)

≤2.5 W

≤3 W

2)

1 AT

≤3 W

12

pp

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Electrical connection

3PCx-0xx-x0xx

FCC 68
3PCx-0xx-x1xx D-Sub 9-pin, male
3PCx-0xx-x2xx D-Sub HD 15-pin, male
3PCx-0xx-x4xx D-Sub HD 15-pin, RS485

INF, male

Sensor cable shielded

Cable length

RS232C operation

Grounding concept

Vacuum connection to
signal common

2

0.14 mm

/conductor

≤100 m

≤30 m

→ "Power Connection"

connected via 10 kΩ, 10 nF

RS232C / RS485 interface

Transmission rate
Data format

57600 baud (default)

binary

8 data bits

one stop bit

no parity bit

no handshake

→ "Power Connection"

For further information on the RS232C / RS485C interface
→  [3].

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DeviceNet interface

Specification, data format,
communication protocol

→  [7]
Interface, physical CAN bus

Data rate (adjustable via
<RATE> switch)

125 kBaud

250 kBaud

500 kBaud (default)

<P> (125 kBaud,

250 kBaud, 500 kBaud

programmable via

DeviceNet, →  [4])
Node address (MAC ID)

(Adjustable via <ADDRESS>,
<MSD>, <LSD> switches)

0 … 63dec (63dec default)

<P> (0 … 63 programmable

via DeviceNet, →  [4])

DeviceNet connector Micro-Style, 5-pin, male

Cable shielded, special DeviceNet

cable, 5 conductors

→  33, →  [8]

Cable length, system wiring according to DeviceNet

specifications, →  [7], [8]

For further information on the DeviceNet interface →  [4]

EtherCAT interface

Specification, data format,
communication protocol

→  [11], [12]

Data rate 100 Mbps
Note address explicit device identification

EtherCAT connector 2×RJ45, 8-pin, socket

input and output

Cable 8-pin, shielded, Ethernet

Patch Cable or Crossover

Cable (CAT5e quality or

higher)

Cable length ≤100 m

For further information on the EtherCAT interface →  [6]

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Profibus interface

Specification, data format,
communication protocol

→  [9]
Interface, physical RS485

Data rate

Node address

Local
(Adjustable via hexadecimal
<ADDRESS>, <MSD>,
<LSD> switches)

Default setting
Via Profibus

(hexadecimal <ADDRESS>
switches set to >7D

)

(>125

dec

hex

≤12 Mbaud (→  [5])

00 … 7D

01

00 … 7D

hex

(0 … 125

hex

(0 … 125

hex

Profibus connection D-Sub, 9-pin, female

Cable shielded, special Profibus

cable, →  34, →  [10]

Cable length, system wiring according to Profibus speci-

fications, →  [9], [10]

For further information on the Profibus interface →  [5]

Materials exposed to vacuum

Vacuum connection
Filament
3PC1 / 6-0xx-xxxx
3PC2 / 7-0xx-xxxx
3PC3 / 8-0xx-xxxx
Feedthrough

3)

Orifice
Diaphragm
Further materials

stainless steel 1.4435

W

Ni

ceramic coated

glass

stainless steel

ceramic

Ni, NiFe, stainless steel

1.4301, SnAg

dec)

dec

)

3)

Only versions DN 16 ISO-KF and DN 16 CF-F.

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Internal volume

DN 16 ISO-KF
DN 16 ISO-KF, long tube
DN 16 CF-F
DN 16 CF-R, long tube
DN 25 ISO-KF

®

female

4 VCR
8 VCR® female
1/8" NPT
Flange 29×29 mm

®

4 VCR

90°, female

7/16-20 UNF

Permissible pressure (absolute)

Bursting pressure (absolute) 10 bar

4.7 cm

14.5 cm

3

8 cm

14 cm

5.5 cm

5.5 cm

3

7 cm

5.2 cm

4.9 cm

7.9 cm

5.2 cm3

≤5 bar

3

3

3

3

3

3

3

3

Permissible temperatures

Operation
Vacuum connection
long tube 4)
Filament
Storage

Relative humidity

Year's mean
During 60 days

4)

+10 °C … +50 °C

≤80 °C

≤250 °C

<160 °C

–20 °C … +65 °C

≤65% (no condensation)

≤85% (no condensation)

Mounting orientation any
Use indoors only, altitude up to

2000 m NN

Degree of protection IP 40

Weight

without fieldbus interface
with fieldbus interface

115 g …130 g

230 g … 250 g

4)

For horizontal mounting orientation only. During bakeout,

measurement range, accuracy, and repeatability may deviate from
specifications.

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Dimensions [mm]

45

79.5 ≈65

46.3

21.531.5
DN 25 ISO-KF

28

36

1/8" NPT

4 VCR

8 VCR

29.2×29.2 mm

14.5

30.9 42.7

36.5 34

7/16-20 UNF

DN 16 ISO-KF

130.8

DN 16 ISO-KF long

130.2

DN 16 CF-F

DN 16 CF-R long

24.4

4-VCR 90°

tina56e1-d (2014-01) 17

DeviceNet

67

BUS RATE STATUS

ADDRESS

LSDMSD

I/O

DIA

EtherCAT

67

4

4

2

2

ERR RUN

068

068

A

E

E

x100 x10

LA LA

IN OUT

I/O

DIA

Profibus

10.8

NET MOD

56

ST

SP1SP2

ADJ

4

2

068

A

A

E

x1

56

ST

SP1SP2

ADJ

67

ADDRESS

4

4

26

26

08

08

EA

EA

C

C

LSDMSD

I/O

DIA

RS485

67

ADDRESS

SP1 SP2 ST

62

AE

DIA

BUS

56

ST

SP1SP2

ADJ

LSDMSD

RATE

62

AE62AE

BUS

56

ADJ

321ON

18

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2.1 Output Signal vs. Pressure

Measurement range 0.61 … 10.23 V

Pressure p

1E+06

1E+05

1E+04

1E+03

1E+02

1E+01

Error

1E+00

1E–01

1E–02

1E–03

1E–04

1E–05

0.5

0.0

0.61

p = 10

0.778(U-c)

3.02.52.01.51.0

4.03.5 5.04.5 6.05.5 7.06.5 8.07.5 9.08.5 10.09.5 10.5

Output signal U [V]

⇔

U = c +1.286log10 p

valid in the range 5×10-5 mbar <p< 1500 mbar

U p c U p c

[V] [mbar] 6.143 [V] [micron] 2.448

[V] [µbar] 2.287 [V] [Pa] 3.572

[V] [Torr] 6.304 [V] [kPa] 7.429

[V] [mTorr] 2.448

where p pressure

U output signal
c constant (pressure unit dependent)

Pa

mbar

Torr

O

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Measurement range 1.2 … 8.68 V

Pressure p

1E+05

1E+04

1E+03

1E+02

1E+01

1E+00

Error

1E–01

1E–02

1E–03

1E–04

1E–05

0.0 0.5 1.0 1.5 2.5 3.5 4.5 5.5 6.5 7.5 8.5

2.0 3.0 4.0 5.0 6.0 7.0 8.0 9.0

1.2

p = 10

Output signal U [V]

(U-c)

⇔

U = c + log10 p

Pa

mbar

Torr

8.68

valid in the range 5×10-5 mbar <p< 1500 mbar

U p c U p c

[V] [mbar] 5.5 [V] [micron] 2.625

[V] [µbar] 2.5 [V] [Pa] 3.5

[V] [Torr] 5.625 [V] [kPa] 6.5

[V] [mTorr] 2.625

where p pressure

U output signal
c constant (pressure unit dependent)

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Measurement range 0.375 … 5.659 V

Signal U Pressure p

[V] [mbar] [Pa] [Torr]

0.375 <5×10-5 <6.65×10-3 <5×10-5

0.376 0.000133322 0.013332237 0.0001

0.377 0.000266645 0.026664474 0.0002

0.379 0.000666612 0.066661184 0.0005

0.384 0.001333224 0.133322368 0.0010

0.392 0.002666447 0.266644736 0.0020

0.417 0.006666118 0.66661184 0.0050

0.455 0.013332237 1.33322368 0.0100

0.523 0.026664474 2.66644736 0.0200

0.682 0.066661184 6.6661184 0.0500

0.876 0.133322368 13.3322368 0.1000

1.155 0.266644736 26.6644736 0.2000

1.683 0.66661184 66.661184 0.5000

2.217 1.33322368 133.322368 1.0000

2.842 2.66644736 266.644736 2.0000

3.675 6.6661184 666.61184 5.0000

4.206 13.3322368 1333.22368 10.0000

4.577 26.6644736 2666.44736 20.0000

4.846 66.661184 6666.1184 50.0000

4.945 133.322368 13332.2368 100.0000

5.019 266.644736 26664.4736 200.0000

5.111 399.967104 39996.7104 300.0000

5.224 533.289472 53328.9472 400.0000

5.329 666.61184 66661.184 500.0000

5.419 799.934208 79993.4208 600.0000

5.495 933.256576 93325.6576 700.0000

5.534 1013.249997 101324.9997 760.0000

5.558 1066.578944 106657.8944 800.0000

5.614 1199.901312 119990.1312 900.0000

5.659 1333.22368 133322.368 1000.0000

tina56e1-d (2014-01) 21

Valid in the range 0.375 … 2.842 V

p = a + bU + cU2 + dU3 + eU4 + fU5

a –0.02585 c 0.04563 e –0.04158

b 0.03767 d 0.1151 f 0.008737

where p pressure in Torr a, b, c, d, e, f constant

U output signal

Valid in the range 2.842 … 4.945 V

p =

a 0.1031 c –0.02322 e 0.07229

b –0.3986 d 0.07438 f –0.006866

where p pressure in Torr a, b, c, d, e, f constant

Valid in the range 4.945… 5.659 V

p =

a 100.624 c –20.5623

b –0.37679 d 0.0348656

where p pressure in Torr a, b, c, d constant

a + cU + eU2

1 + bU + dU

U output signal

a + cU

1 + bU + dU

U output signal

2

+ fU3

2

22

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