Agilent Technologies E5250A User Manual

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Agilent E5250A

Low Leakage Switch Mainframe

User’s Guide

Agilent Technologies

Notices

No part of this manual may be reproduced in any form or by any means (including electronic storage and retrieval or translation into a foreign language) without prior agreement and written consent from Agilent Technologies, Inc. as governed by United States and international copyright laws.

Manual Part Number

E5250-90000

Edition

Edition 1, October 1995 Edition 2, January 1997 Edition 3, August 1997 Edition 4, January 2000 Edition 5, May 2000 Edition 6, January 2001 Edition 7, August 2003 Edition 8, July 2005 Edition 9, May 2008

Agilent Technologies, Inc. 5301 Stevens Creek Blvd Santa Clara, CA 95051 USA

Warranty

The material contained in this document is provided “as is,” and is subject to being changed, without notice, in future editions. Further, to the maximum extent permitted by applicable law, Agilent disclaims all warranties, either express or implied, with regard to this manual and any information contained herein, including but not limited to the implied warranties of merchantability and fitness for a particular purpose. Agilent shall not be liable for errors or for incidental or consequential damages in connection with the furnishing, use, or performance of this document or of any information contained herein. Should Agilent and the user have a separate written agreement with warranty terms covering the material in this document that conflict with these terms, the warranty terms in the separate agreement shall control.

Tec hn ol og y L i c e ns es

The hardware and/or software described in this document are furnished under a license and may be used or copied only in accordance with the terms of such license.

defined in FAR 52.227-19(c)(1-2) (June

1987). U.S. Government users will receive no greater than Limited Rights as defined in FAR 52.227-14 (June 1987) or DFAR

252.227-7015 (b)(2) (November 1995), as applicable in any technical data.

Restricted Rights Legend

If software is for use in the performance of a U.S. Government prime contract or subcontract, Software is delivered and licensed as “Commercial computer software” as defined in DFAR 252.227-7014 (June 1995), or as a “commercial item” as defined in FAR

2.101(a) or as “Restricted computer software” as defined in FAR 52.227-19 (June

1987) or any equivalent agency regulation or contract clause. Use, duplication or disclosure of Software is subject to Agilent Technologies’ standard commercial license terms, and non-DOD Departments and Agencies of the U.S. Government will receive no greater than Restricted Rights as

DECLARATION OF CONFORMITY

According to ISO/IEC Guide 22 and CEN/CENELEC EN 45014

Manufacturer’s Name:

Agilent Technologies International sarl

Manufacturer’s Address: Supplier’s Address:

Rue de la Gare 29 CH - 1110 Morges Switzerland

Declares under sole responsibility that the product as originally delivered Product Name:

Low Leakage Switch Mainframe 10x12 Matrix Switch24(8x3)CH Multiplexer 24(8x3)CH Multiplexer

Model Number:

Agilent E5250A Agilent E5252A Agilent E5255A

Product Options:

This declaration covers all options of the above product(s)

complies with the essential requirements of the following applicable European Directives, and carries the CE marking accordingly:

Low Voltage Directive (73/23/EEC, amended by 93/68/EEC) EMC Directive (89/336/EEC, amended by 93/68/EEC)

and conforms with the following product standards EMC Standard

IEC 61326:2002 / EN 61326:1997 +A1:1998 +A2:2001 +A3:2003 CISPR 11:1997 / EN 55011:1998

IEC61000-4-2:1995 / EN61000-4-2:1995 IEC 61000-4-3:1995 / EN61000-4-3:1995 IEC 61000-4-4:1995 / EN61000-4-4:1995 IEC 61000-4-5:1995 / EN61000-4-5:1995 IEC 61000-4-6:1996 / EN61000-4-6:1996 IEC 61000-4-11:1994 / EN61000-4-11:1994

Canada: ICES-001:1998 Australia/New Zealand: AS/NZS 2064.1

Limit

Group 1 Class A 4 kV CD, 8 kV AD 3 V/m, 80-1000 MHz

0.5 kV signal lines, 1 kV power lines

0.5 kV line-line, 1 kV line-ground 3 V, 0.15-80 MHz 1 cycle, 100%

The product was tested in a typical configuration with Agilent Technologies test systems.

Safety

IEC 61010-1:2001 / EN 61010-1:2001 Canada: CSA C22.2 No. 1010.1:1992, NRTL/C

Supplementary Information: This DoC applies to above-listed products placed on the EU market after:

September 26, 2006

Date

Toshiyuki Kawaji

QA Manager Agilent Technologies

For further information, please contact your local Agilent Technologies sales office, agent or distributor,

• Herstellerbescheinigung

GEÄUSCHEMISSION Lpa < 70 dB am Arbeitsplatz normaler Betrieb nach DIN 45635 T. 19

• Manufacturer’s Declaration

ACOUSTIC NOISE EMISSION Lpa < 70 dB operator position normal operation per ISO 7779

NOTE This ISM device complies with Canadian ICES-001.

Cet appareil ISM est conforme ?Hla norme NMB-001 du Canada.

This product complies with the WEEE Directive (2002/96/EC) marking requirements. The affixed label indicates that you must not discard this electrical/ electronic product in domestic household waste.

Product Category: With reference to the equipment types in the WEEE Directive Annex I, this product is classed as a “Monitoring and Control instrumentation” product.

Do not dispose in domestic household waste. To return unwanted products, contact your local Agilent office, or see

www.agilent.com/environment/product/ for more information.

Microsoft, Windows, Win dows NT, Visual C++, and Visual Basic ar e registered trademar ks of Microsoft Corporation. LabVIEW are registered trademarks of National Instruments Corporation.

Borland C++ Builder is registered trademark of International, Inc. LabWindows and

Safety Summary

The following general safety precautions must be observed during all phases of operation, service, and repair of this instrument. Failure to comply with these precautions or with specific warnings elsewhere in this manual may impair the protections provided by the equipment. In addition, it violates safety standards of design, manufacture, and intended us e of the instrument. Agilent Technologies, Inc. assumes no liability for customer’s failure to comply with these requirements.

NOTE Agilent E5250A complies with INSTALLATION CATEGORY II for mains input

and INSTALLATION CATEGORY I for measurement input terminals, and POLLUTION DEGREE 2 defined in IEC 1010-1.

Agilent E5250A is INDOOR USE products.

• GROUND THE INSTRUMENT This is Safety Class I instrument. To minimize shock hazard, the instrument

chassis and cabinet must be connected to an electrical ground. The power terminal and the power cable must meet International Electrotechnical Commission (IEC) safety standards.

• DO NOT OPERATE IN AN EXPLOSIVE ATMOSPHERE Do not operate the instrument in the presence of flammable gases or fumes.

Operation of any electrical instrument in such an environment constitutes a definite safety hazard.

• KEEP AWAY FROM LIVE CIRCUITS Operation personnel must not remove instrument covers. Component

replacement and internal adjustments must be made by qualified maintenance personnel. Do not replace components with power cable connected. Under certain conditions, dangerous voltages may exist even with the power cable removed. To avoid injuries, always disconnect power and discharge circuits before touching them.

• DO NOT SERVICE OR ADJUST ALONE Do not attempt internal service or adjustment unless another person, capable of

rendering first aid and resuscitation, is present.

• DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT Because of the danger of introducing additional hazards, do not install substitute

parts or perform any unauthorized modification to the instrument. Return the instrument to a Agilent Technologies Sales and Service Office for services and repair to ensure that safety features are maintained.

• DANGEROUS PROCEDURE WARNINGS Warnings, such as example below, precede potentially dangerous procedures

throughout this manual. Instructions contained in the warnings must be followed.

WARNING Dangerous Voltage, capable of causing death, are present in this instrument.

Use extreme caution when handling, testing, and adju sti n g.

Safety Symbols

The general definitions of safety symbols used on equipment or in man uals are listed below.

Instruction manual symbol: the product will be marked with this symbol when it is necessary for the user to refer to the instruction manual in order to protect against damage to the instrument.

Indicates dangerous voltage and potential for electrical shock. Do not touch terminals that have this symbol when insrument is on.

Affixed to product containing static sensitive devices--use anti-static handling procedures to prevent electrostatic discharge damage to compone nt.

Protective conductor terminal. For protection against electrical shock in case of a fault. Used with field wiring terminals to indicate the terminal which must be connected to ground before operating equipment.

Frame or chassis terminal. A connection to the frame (chassis) of the equipment which normally includes all exposed metal structures.

Indicates earth (ground) terminal. Alternating current. Direct current. ON (Supply). OFF (Supply). STANDBY (Supply).

CAT 1

WARNING The warning sign denotes a hazard. It calls attention to a procedure, practice,

CAUTION The caution sign denotes a hazard. It calls attention to an operating procedure,

Means INSTALLATION CATEGORY I. Measurement terminals on the rear panel comply with INSTALLATION CATEGORY I.

condition or the like, which, if not correctly performed or adhered to, could result in injury or death to personal.

practice, condition or the like, which, i f not correctly perfor med or adhered to , could result in damage to or destruction of part or all of the product.

In This Manual

This manual is a user’s guide for Agilent E5250A, and consists of the following chapters:

• Introduction Provides an overview of the E5250A Low Leakage Switch Mainframe, E5252A

10×12 Matrix Switch, and E5255A 24 (8×3) Channel Multiplexer.

• Installation Describes requirements to install the E5250A and tasks for installation.

• Executing Self-Test and Leak Test Describes how to execute the three Self-Test items (Controller Test, Front Panel

Interface Test, and Relay Test) and the Leak Test.

• Setting up Measurement Environment Explains how to connect your instruments to the E5250A input, and how to

connect the E5250A output to your wafer prober or test fixture.

• Controlling the E5250A Introduces several methods for controlling the E5250A, gives basic information

for controlling the relay switc hes on the plug-in cards, and describes how to use Virtual Front Panel (VFP) utility furnished with the E5250A.

• Programming the E5250A Describes how to create programs that contain SCPI commands to control the

E5250A.

• Command Reference Describes the SCPI commands available to operate the E5250A via GPIB

interface and the status reporting structure.

• VXIplug&play Driver Introduces the VXIplug&play driver available for the E5250A.

• Executing Sample Programs Explains how to execute a nd modify the sample programs stored in t h e pr ogram

disk that is furnished with the E5250A.

• Specifications Lists specifications, typical data, supplemental data, and reference data for the

E5250A, E5252A, and E5255A.

• Error Messages Lists and describes the error messages for the E5250A.

• SCPI Command Summary This is a quick reference for the SCPI subsystem commands available for the

E5250A.

Text Co nventions

The following text conventions are used in this manual:

Screen Text Represents text that appears on screen of the controller.

Italic Refers to a related document, or is used for emphasis.

Contents

1. Introduction

Agilent E5250A Product Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3

Front Panel Tour . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-4

Rear Panel Tour . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5

Agilent E5252A Product Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7

Agilent E5255A Product Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11

Options and Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-12

2. Installation

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2

To Inspect the E5250A and Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3

Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4

Power Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-4

Power Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4

Operating Environment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6

Storage and Shipping Environment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6

Installing the E5250A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7

To Install Plug-in Card . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8

To Install Blank Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9

To Configure E5255A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-10

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-12

E5255A Configuration Examples. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-13

To Set GPIB Address . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-17

To Connect GPIB Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-17

Agilent E5250A User’s Guide, Edition 9 Contents - 1

Contents

Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-18

Performance Verification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-18

Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-18

3. Executing Self-Test and Leak Test

Executing Self-Test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3

To Execute Self-Test (Standalone) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4

To Execute Self-Test using External Controller . . . . . . . . . . . . . . . . . . . . . . . . 3-6

Using the Self-Test Utility . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10

Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10

To Start the Self-Test Utility . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11

To Execute Self-Test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12

To Execute Leak Test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-15

4. Setting up Measurement Environment

Connector Plates . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3

Connector Plates for the E5252A. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3

Connector Plates for E5255A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3

Blank Plate. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4

Connecting 8-Channel Shielded Coaxial Cable . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5

Mounting Connectors Directly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6

To Make Interlock Circuit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8

To Connect Connectors to DUT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-13

Connecting the E5250A Input . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-15

To Connect Instruments to Input Connectors . . . . . . . . . . . . . . . . . . . . . . . . . 4-15

To Connect Bias Source to the E5255A Bias Input . . . . . . . . . . . . . . . . . . . . 4-18

To Connect GNDU to the E5250A Input . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4 - 18

Connecting the E5250A Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-20

Contents - 2 Agilent E5250A User’s Guide, Edition 9

Contents

To Connect the E5252A Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-20

To Connect the E5255A Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-22

Measurement Cable Length . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-23

5. Controlling the E5250A

Methods for Controlling the E5250A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-3

Creating Your Own Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-3

Modifying a Sample Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4

Using the Virtual Front Panel (VFP) Utility . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4

Switch Control Basics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-5

Channel List and Channel Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-6

Connection Rule . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-9

Connection Sequence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-10

Bias Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-11

Couple Port . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-13

E5252A Channel List . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-15

E5255A Channel List . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-19

Using Virtual Front Panel Utilit y . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-25

Functions of Virtual Front Panel Utility . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-26

Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-27

Starting the Virtual Front Panel Utility . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-27

Confirming the E5250A Card Configurations . . . . . . . . . . . . . . . . . . . . . . . . 5-28

Changing the VFP Setup Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-29

Defining Labels for the E5250A Input Ports . . . . . . . . . . . . . . . . . . . . . . . . . . 5-31

Making Connections and Changing the Setup Data . . . . . . . . . . . . . . . . . . . . 5-33

Saving/Loading the Setup Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-42

6. Programming the E5250A

SCPI Programming Basics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-3

SCPI Command Hierarchy . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-4

Agilent E5250A User’s Guide, Edition 9 Contents - 3

Contents

Controlling E5250A by Using HP BASIC . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5

Creating a Control Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-6

Defining Channel Configuration Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-8

Defining Connection Rule . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-8

Defining Connection Sequence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-9

Using Bias Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-10

Using Couple Port (for E5252A only) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-11

Controlling Relay Switching . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-12

Programming Examples . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-13

Channel Creation Example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-14

Bias Mode Example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-16

Couple Port Example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-19

Using the VFP Data Upload Library . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-22

VFP Data Upload Library . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-23

Programming Example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-25

Before Executing Your Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-26

Error Messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-27

Using the Capacitance Compensation Routine . . . . . . . . . . . . . . . . . . . . . . . . . 6-28

Capacitance Compensation Routine . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-29

Required Conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-30

Programming Example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-32

Before Executing Your Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-32

Error Messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-32

7. Command Reference

Common Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-4

:DIAGnostic Subsystem . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-15

:ROUTe Subsystem . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-20

:SYSTem Subsystem . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-42

Contents - 4 Agilent E5250A User’s Guide, Edition 9

Contents

Status Reporting Structure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-48

Status Reporting Structure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-48

Status Byte Register . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-50

Service Request Enable Register . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-52

Standard Event Status Register . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-53

Standard Event Status Enable Register . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-54

Output Queue . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-55

8. VXIplug&play Driver

System Requirements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-3

Installing VXIplug&play Driver . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-4

Driver Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-5

9. Executing Sample Programs

Vth and Capacitance Measurement Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-3

Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-3

Setting up the Measurement Environment . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-7

Executing the Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-9

Modifying the Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-11

HCI Measurement Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-17

Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-17

Adding the Bias Source Control Routine . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-23

Setting up the Measurement Environment . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-24

Executing the Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-27

Modifying the Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-35

10. Specifications

11. Error Messages

Agilent E5250A User’s Guide, Edition 9 Contents - 5

Contents

12. SCPI Command Summary

Contents - 6 Agilent E5250A User’s Guide, Edition 9

1 Introduction

Introduction

This chapter gives an overview of Agilent E5250A, E5252A, and E5255A.

• “Agilent E5250A Product Description”

• “Agilent E5252A Product Description”

• “Agilent E5255A Product Description”

• “Options and Accessories”

1-2 Agilent E5250A User’s Guide, Edition 9

Agilent E5250A Product Description

Agilent E5250A Low Leakage Switch Mainframe is a computer-controlled switching matrix mainframe designed for semiconductor dc characteristics measurement applications. The E5250A has four slots for installing the modules (plug-in cards) listed in Table 1-1.

These cards can be used in various switching matrix configurations in the E5250A. For example, using four E5252As, you can configure a maximum 10-input 48-output switching matrix, or using four E5255As, you can configure a maximum 2-input × 96-output multiplexer.

Table 1-1 Available Plug-in Cards for E5250A

Model No. Description

E5252A 10×12 Matrix Switch E5255A 24 (8×3) Channel Multiplexer

Introduction

Agilent E5250A Product Description

Figure 1-1 E5250A Front Panel

Agilent E5250A User’s Guide, Edition 9 1-3

Introduction Agilent E5250A Product Description

Front Panel Tour

The E5250A has 2 hard keys and 4 LED indicators on the front panel as shown in Figure 1-1.

LINE key Used to turn the E5250A on or off. Line LED Turns on when the E5250A is turned on. Local/Self Test key If "Remote" LED is on, pressing this key releases the

E5250A from remote GPIB control by an external controller. If "Remote" LED is off, pressing this key executes the Relay

Test. Before pressing this key, make sure the Relay Test Adapter is connected. For details of Relay Test, refer to Chapter 3. During Relay Test execution, the LED in this key is ON.

Remote LED Turns on when the E5250A is in the GPIB remote status. System Fail LED Turns on if system error occurs in the E5250A. Contact you r

nearest Agilent Technologies Service Center.

Fail LED Tu rns on if the E525 0A fails Self-test (in cluding Relay Test).

If this LED turns on after executing Relay Test, a plug-in card may be defective. And if this LED turns on after turning the E5250A on again, the E5250A is defective. If so, contact your nearest Agilent Technologies Service Center.

Rear Panel Tour

Rear panel of the E5250A is shown in Figure 1-2. The E5250A has 4 slots for installing plug-in cards, and 10 input connectors for connecting measur ement cables from instruments.

SMU INPUT SMU INPUT connectors are for semiconductor dc

characteristics measurements. The E5250A has six SMU INPUT ports , which are tri axial type

connectors. The connectors can also be used for a maximum three Kelvin connection inputs by coupling two ports as follows:

• SMU INPUT 1 and 2

• SMU INPUT 3 and 4

• SMU INPUT 5 and 6

1-4 Agilent E5250A User’s Guide, Edition 9

Introduction

Agilent E5250A Product Description

AUX INPUT AUX INPUT connector s are for C-V measurements, pulse

input, and so on. The E5250A has 4 AUX INPUT ports: HF1, HF2, CV1, CV2.

These are BNC type connectors. The AUX INPUT connectors are used only with the E5252A

and are not used with the E5255A.

CAUTION The maximum measurement voltage that can be applied to any input terminal is

±200 Vdc. The maximum measurement current is 1 Adc at ±200 Vdc. The maximum voltage that can be applied between input terminals is 300 Vdc. Do not apply an input signal over these limits to the E5250A inputs. If you do, the E5250A will be damaged.

If you use a bias source that has current limit capability, set the bias source current limit to less than 1 Adc.

Figure 1-2 E5250A Rear Panel

Agilent E5250A User’s Guide, Edition 9 1-5

Introduction Agilent E5252A Product Description

Agilent E5252A Product Description

The E5252A 10×12 Matrix Switch is a 10-input to 12-output switching matrix card for the E5250A. The E5252A is designed for semiconductor dc parametric measurement applications that need to switch some instruments connected to Device Under Test (DUT), or need to scan instrument input/output for many DUTs, automatically.

The E5250A can be installed w ith maximum f our E525 2As. And the in put termin als of the E5252As are connected together inside the E5250A. So, the E5250A can configure a 10×24 matrix (two E5252As), 10×36 matrix (three E5252As), and 10×48 matrix (four E5252As). The E5252A block diagram and output connectors are shown in Figure 1-3 and Figure 1-4.

Figure 1-3 E5252A Block Diagram

1-6 Agilent E5250A User’s Guide, Edition 9

Introduction

Agilent E5252A Product Description

Input Ports The E5252A has 10 input ports via the E5250A.

Input paths for SMU1 and SMU2 are designed for low current measurement.

There are actually only six input paths, so two of the input paths are shared by three ports each as follows:

• SMU5, HF1, and CV1 ports share same input path

• SMU6, HF2, and CV2 ports share same input path So, for these two input paths, you can only use one input po rt at

a time. For example, you cannot use HF1 and CV1 input ports at the same time.

Output Ports The E5252A has 12 output ports. Two ports can be coupled for

Kelvin connection out put fo r a maxi mum o f six Kelv in out puts:

• OUTPUT1 and OUTPUT2

• OUTPUT3 and OUTPUT4

• OUTPUT5 and OUTPUT6

• OUTPUT7 and OUTPUT8

• OUTPUT9 and OUTPUT10

• OUTPUT11 and OUTPU T12 The output ports are triaxial connectors.

Figure 1-4 E5252A Output Ports

WARNING Do not touch the force and guard terminals of the output connectors while the

E5250A is turned on. Dangerous voltages up to the maximum input voltage may be present at the output connectors.

Agilent E5250A User’s Guide, Edition 9 1-7

Introduction Agilent E5255A Product Description

Agilent E5255A Product Description

The E5255A 24 (8×3) Channel Multiplexer is a 2-input to 24-output multiplexer card for the E5250A. The E5 255A cons ists of 3 blocks ( three 2×8 m ultiplexers). So, one E5255A can be configured as a 2×8 multiplexer, 2×16 multiplexer, or 2×24 multiplexer. "2-input" means one BIAS input and one IV input.

The E5255A is designed for semiconductor device reliability testing which needs to automatically scan instrument input/output for many DUTs.

A maximum of four E5255As can be installed in the E5250A, which can use the multiplexers in several configurations. For example, the E5250A can configure twelve 8-output multiplexers, six 16-output multiplexers, four 24-output multiplexers, three 32-output multiplexers, two 48-output multiplexers, or one 96-output multiplexer.

The E5255A block diagram is shown in Figure 1-5. BIAS Input The BIAS INPUT ports are used to apply ac or dc bias to DUT.

BIAS INPUT ports are BNC connectors. Each BIAS INPUT port is assigned to a 2×8 multiplexer block as shown in Table 1-2. And you can make internal connections to connect a BIAS INPUT port to multiple blocks. Refer to Chapter 2.

IV Input IV input is used for measuring/forcing dc current/voltage. You

can connect the IV input to desired SMU INPUT connector (SMU1 to SMU6) of the E5250A by making an internal connection. Refer to Chapter 2. The E5250A AUX INPUT connectors are not used with the E5255A.

OUTPUT Connectors The E5255A has three 8-channel coaxial output connectors as

shown in Figure 1-6. Each output con nector is assigned to a 2×8 multiplexer as shown in Table 1-2.

1-8 Agilent E5250A User’s Guide, Edition 9

Agilent E5255A Product Description

Resistors Resistors connected between BIAS path and IV path are for

protecting DUT from electrical damage. When shipped from factory, 0 Ω resistance is used in the E5255A. You can easily replace with desired resistors. Refer to Chapter 2. The following resistors are furnished with the E5255A:

•0 Ω resistors (3 sets with 10 resistors in each set)

• 1.2 kΩ resistors (3 sets with 10 resistors in each set)

•22 kΩ resistors (3 sets with 10 resistors in each set) If you replace initial 0 Ω resistors with other res istor s, you must

cut the initial resistors. Then, if you need 0 Ω resistors again, use the ones listed above.

WARNING Be careful about the following when selecting protective resistors:

• If only one E5255A is installed in the mainframe, total power consumption by resistors must be less than 16W.

• If multiple E5255As are installed in the mainframe, total power consumption by resistors must b e less than 32W.

Introduction

• Consider the current flows to re sistor when DUT shorts, and make sure the power consumption by resistor will be within specif ication of resistor.

Do not use resisto rs th at hav e specifications inadequate for your applications, which will result in resistors heating up, burning, or s moking.

Be careful about the heating of the rear panel of mainframe or plug-in card, which may be heated by resistors, even if you follow this warning.

Agilent E5250A User’s Guide, Edition 9 1-9

BIAS Input 1

Output

Resistor

IV Input 1

BLOCK 1

1 2 34 56 7 8

BIAS Input 3

Output

Resistor

IV Input 3

BLOCK 3

17 18 19 20 21 22 23 24

BIAS Input 2

Output

Resistor

IV Input 2

BLOCK 2

9 10111213141516

Introduction Agilent E5255A Product Description

Figure 1-5 E5255A Block Diagram

1-10 Agilent E5250A User’s Guide, Edition 9

Table 1-2 E5255A Input/Output Connectors

Introduction

Agilent E5255A Product Description

2×8 multiplexer

Block No.

Block1 BIAS1 (51) Output 1 to 8 Left Block2 BIAS2 (52) Output 9 to 16 Center Block3 BIAS3 (53) Output 17 to 24 Right

Figure 1-6 E5255A BIAS INPUT Connectors and OUTPUT Connectors

WARNING Do not touch the force and guard terminals of the OUTPUT connectors while

the E5250A is turned on. Danger ous vol tages up t o the maximum input vol tage may be present at the OUTPUT connectors.

CAUTION The maximum voltage that can be applied to any input terminal is ±200 Vdc. The

maximum current is 1 Adc at ±200 Vdc. The maximum voltage that can be applied between input terminals is 300 Vdc. Do not apply an input signal over these limits to the E5255A inputs. If you do, the E5255A will be damaged.

BIAS INPUT

(Port No.)

Output Port No.

OUTPUT Connector (Location)

If you use a bias source that has current limit capability, set the bias source current limit to less than 1 Adc.

Agilent E5250A User’s Guide, Edition 9 1-11

Introduction Options and Accessories

Options and Accessories

This section lists the options and accessories available for the E5250A. Table 1-3 lists the options available for the E5250A.

Table 1-3 Options

Model

Number

E5250A Low Leakage Switch Mainframe

Option Ite m Description

E5250A-301 Relay Test Adapter E5250A-A6J ANSI Z540 compliant calibration E5250A-UK6 Commercial cal. certificate w/ test data

1-12 Agilent E5250A User’s Guide, Edition 9

Table 1-4 lists accessories furnished with the E5250A, E5252A, and E5255A.

Table 1-4 Furnished Accessories

Introduction

Options and Ac cessories

Model

Number

Part Number Description Qty.

E5250A E5250-90000 Agilent E5250A User's Guide 1

E5250-17001

E5250A VXI Plug&Play Driver Disk

E5250-17003 Agilent E525 0A Progr am Disk. See next

page. (LIF formatted, 3.5in diskette)

04155-60007 Module Extractor 1

8710-2151 Wrench (for removing plug-in card) 1

− Power Cable 1

E5252A E5252-90000 Agilent E5252A Installat i on Gui de 1

8710-2151 Wrench (for removing plug-in card) 1

E5255A E5255-90000 Agilent E5255A Installat i on Gui de 1

1250-0929 BNC Short Cap 3

E5255-65000 BIAS Input Modification Kit

(BNC Open Cap × 2, wire × 2)

E5255-65001 0 Ω Resistor Set (10 resistors) 3

E5255-65 002 1.2 kΩ Resistor Set (10 re si stors) 3 E5255-65 003 22 kΩ Resistor Set (10 resistors) 3

8710-2151 Wrench (for removing plug-in card) 1

a. The Agilent E5250A VXIplug&play driver supports Windows XP Pro-

fessional, Wi ndows 2000, Windows NT 4.0, Windows 98, and W i ndows

95.

Agilent E5250A User’s Guide, Edition 9 1-13

Introduction Options and Accessories

Contents of the E5250A Program Disk:

Virtual Front Panel Utility Interactive control program for the E5250A. Runs on Agilent

4155/4156's built-in IBASIC controller. Refer to Chapter 5.

VFP Data Upload Library Subprogram library used for upl oading the E5250A con trol data

(made by Vi rtual Front Panel Utility) to your program. Runs on HP BASIC. Refer to Chapter 6.

Capacitance Compensation Routine Subprogram to compensate for capacitance error caused by the

E5250A and E5252A. Ru ns on H P BAS IC . This subprogram is used to compensate the capacitance data measured by Agilent 4284A Precision LCR Meter. Refer to Chapter 6.

Sample Programs Three sample programs: one for Vth and C measurement using

the E5252A, and two for HCI test and analysis using the E5255A. Runs on HP BASIC. Refer to Chapter 9.

Self-test Utility Self-test and relay test program for the E5250A. Runs on the

4155/4156's built-in IBASIC controller. Refer to Chapter 3.

1-14 Agilent E5250A User’s Guide, Edition 9

Table 1-5 lists accessories available for the E5250A.

Table 1-5 Available Accessories

Introduction

Options and Ac cessories

Model

Number

E5252A 10×12 Matrix Sw itch E5255A 24 (8×3) Channel Multiplexer 16494A Triaxial Cable

16494B Kelvin Triaxial Cable (4156 kelvin to E5250 kelvin)

16494C Kelvin Triaxial Cable (4142 kelvin to E5250 kelvin)

16494D 8 Channel Shielded Coaxial Cable

16494E Wide Temperature 8 Channel Shielded Coaxial Cable

16495C Connector plate with 6 connectors for 16494D

16495D Connector plate with 12 connectors for 16494D

16495E Blank plat e 16495F Connector plate with 12×triaxial, intlk, GNDU

16495G Connector plate with 24×triaxial, intlk, GNDU

Option

Item

16494A-001 1.5 m length 16494A-002 3 m length 16494A-003 80 cm length

16494B-001 1.5 m length 16494B-002 3 m length 16494B-003 80 cm length

16494C-001 1.5 m length 16494C-002 3 m length

16494D-001 1.5 m length 16494D-002 3 m length

16494E-001 3m length

16495F-001 Bulkhead feedthrough connectors (female to female) 16495F-002 Connectors to contacts for soldering

16495G-001 Bulkhead feedthrough connectors (female to female) 16495G-002 Connectors to contacts for soldering

Description

Agilent E5250A User’s Guide, Edition 9 1-15

Introduction Options and Accessories

1-16 Agilent E5250A User’s Guide, Edition 9

2 Installation

Installation

This chapter describes requirements to install Agilent E5250A and the tasks for installation, and is organized into the following three sections:

• “To Inspect the E5250A and Accessories” describes how to inspect the E5250A when you receive it.

• “Requirements” explains the information required for operating, storing, and shipping the E5250A.

• “Installing the E5250A” describes how to install the E5250A.

• “Maintenance” describes about performance verification and cleaning.

WARNING The maximum input voltage of the E5250A is ±200 V. And dangerous voltages

may be present at the E5250A output terminals. To prevent electric shock, you must observe the following safety precautions when using the E5250A.

• Use a three-conductor ac power cable to connect cabinet (if used) and the E5250A to an electric ground (safety ground).

• If you need to touch the force and guard terminals of the output connector, turn off the E5250A and discharge any capacitors whenever possible.

• Warn workers around the E5250A about dangerous conditions.

2-2 Agilent E5250A User’s Guide, Edition 9

Installation

To Inspect the E5250A and Accessories

When you receive and open the box that contains the E5250A, check the following:

• Before unpacking any components, inspect all boxes for any signs of damage that might have occurred during shipment such as:

•Dents

• Scratches

•Cuts

• Water marks

• When you open the boxes that contain the E5250A, check the components against the contents lists that are attached to the boxes.

• After installing the E5250A, check the E5250A operation by executing self-test shown in Chapter 3.

If anything is wrong, notify your local Agilent Technologies sales office.

When shipping the E5250A

When you unpack the E5250A, retain all packing materials for future use. If it becomes necessary to reship the E5250A, repack it in the original packing materials and shipping carton.

Agilent E5250A User’s Guide, Edition 9 2-3

Installation Requirements

Requirements

This section describes the following requirements for the E5250A.

• “Power Requirements”

•“Power Cable”

• “Operating Environment”

• “Storage and Shipping Environment”

Power Requirements

CAUTION Before applying ac line power to the E5250A, ensure that the correct power cable is

used.

The E5250A can operate from any single-phase ac power source supplying 100 to 240 V ±10 % in the frequency range from 47 to 63 Hz. The maximum power consumption is 100 VA. For details, refer to Chapter 10, “Specifications.”

Power Cable

In accordance with international safety standards, this instrument is equipped with a three-wire power cable. When connected to an appropriate ac power outlet, this cable grounds the instrument frame. The type of power cable shipped with each instrument depends on the country of destination. Refer to the following table for the part numbers of the power cables available.

If the plug on the cable does not fit the power outlet, or the cable is to be attached to a terminal block, cut the cable at the plug end and re-wire it. This work should be performed by a qualified electrician all local electrical codes being strictly observ ed.

The color coding used in the cable will depend on the cable supplied. If a new plug is to be connected, it must meet local safety requirements and include the following features:

• Adequate load-carrying capacity. (refer to Chapter 10, “Specifications.”)

• Ground connection.

• Cable clamp.

2-4 Agilent E5250A User’s Guide, Edition 9

Installation

Requirements

• Plug: BS 1363/A, 250 V, 10 A

• Cabl e : 8120-4420, 8120-1351

• Plug: NEMA 6-15P, 250 V, 10 A

• Cabl e : 8120-3996, 8120-0698

• Plug: JIS C 8303, 125 V, 12 A

• Cabl e : 8121-0743, 8120-4753

• Plug: AS 3112, 250 V , 10 A

• Cable: 8120-4419, 8120-1369

• Plug: SEV 1011, 250 V, 1 0 A

• Cable: 8120-2104

• Plug: Israel SI 32, 250 V, 1 0 A

• Cable: 8120-5182

• Plug: CEE 7 sheet VII, 250 V, 10 A

• Cable: 8120-4519, 8120-1689

• Plug: SR 107-2-D1, 250 V, 10 A

• Cable: 8120-2956

• Plug: IRAM 207310A, 250 V, 10 A

• Cable: 8120-6870

• Plug: NEMA 5-15P, 125 V, 10 A

• Cable: 8120-6825, 8120-1378, 8120-1395

• Plug: IS 1293 and IS 6538, 250 V, 10 A

• Cable: 8121-1582, 8120-4211

• Plug : CEI 23-16, 250 V, 10 A

• Cable: 8120-6978

• Plug: GB 1002 figure 3 , 250 V, 10 A

• Cabl e : 8120-8376

• Plug : CS 0017:2003, 250 V, 10 A

• Cable: 8120-8871, 8120-0674, 8121-1638

• Plug: SANS 164-1, 250 V, 10 A

• Cable: 8121-0564, 8120-4211

• Plug: CNS 10917-2, 125 V, 10 A

• Cable: 8121-1635, 8120-6825

Agilent E5250A User’s Guide, Edition 9 2-5

Installation Requirements

WARNING For protection from electrical shock, the power cable ground must not be

defeated.

Operating Environment

The E5250A must be operated within the following environmental conditions:

• T emp e rature: 5 °C to 40 °C (41 °F to 104 °F)

• Humidity: 5 % to 80 % RH at 40 °C (104 °F), non-condensing

• Altitude: 0 m to 2000 m

Storage and Shipping Environment

The E5250A should be stored or shipped in environments within the following limits:

• Temperature: −40 °C to 70 °C (−40 °F to 158 °F).

• Humidity: 5 % to 90 % RH at 65 °C (149 °F).

• Altitude: 0 m to 15,240 m Protect the E5250A from temperature extremes to prevent condensation from

forming inside the E5250A.

2-6 Agilent E5250A User’s Guide, Edition 9

Installation

Installing the E5250A

This section describes how to install the E5250A.

• “To Install Plug-in Card”

• “To Install Blank Panel”

• “To Configure E5255A”

• “E5255A Configuration Examples”

• “To Set GPIB Ad dress”

• “To Connect GPIB Cable”

WARNING To prevent electrical shock, turn off the mainframe and remove the power

cable before starting the instruction.

CAUTION Be careful about the module pins used for internal connection to th e mainframe. The

pins can be damaged easily. Use clean handling and anti-static procedures when removing, configuring, and

installing the modules. The modules contain components that can be damaged by static electricity.

NOTE Plug-in module is shipped from the factory after the specifications are confirmed.

Agilent can guarantee that the modules will function and that the module performance is designed to meet its speci ficat ion s. However, if you have any trouble, contact your nearest Agilent Technologies service center.

If you require that the modules be guaranteed to their specifications (for ISO compliance, etc.), then you must perform a calibration on the instrument (modules and mainframe together). For calibration, contact your nearest Agilent Technologies service center.

Agilent E5250A User’s Guide, Edition 9 2-7

Installation Installing the E5250A

To Install Plug-in Card

The E5252As and E5255As are plug-in cards (modules). You install these cards in card slots 1 to 4 of the E5250A. The following procedure explains the card installation and removal:

1. Turn off the E5250A, then wait at least 10 seconds before you remove or install a card.

2. Remove a blank panel or a card attached to the slot you want to install a new card, as follows.

To remove blank panel, do as follows: a. Loosen the screws on both the left and right edges of the blank panel by

using the wrench furnished with the E5250A. b. Remove the blank panel. To remove a card, do as follows:

a. Screw the Module Extractor into the screw hole for the extractor. See Figure

2-1. Module Extractor is furnished with the E5250A. b. Loosen the screws on left and right edges of the card by using the wrench

furnished with the E5250A. c. Gently pull the Module Extractor to extract the card from the card slot.

3. Install the card as follows: a. Align the card with the left and right slot guide rails. The component side

should be fac i ng up.

b. Push the card into the slot until you feel it seat firmly into the connector at

the back of the card slot.

c. Screw in the screws on the left and right edges of the card by using the

wrench furnished with the E5250A.

4. Execute the Relay Test and Leak Test: After installing the cards, perform the Relay Test and Leak Test described in

Chapter 3 to check the operation and leak current of the E5250A with installed cards.

CAUTION If you want to confirm that the E5250A with installed cards meets its specifications,

return the E5250A with installed cards to your nearest Agilent Technologies Service Center to do the Performance Verification.

2-8 Agilent E5250A User’s Guide, Edition 9

Figure 2-1 Module Extractor and Location of the Screw Hole

Module Extractor

Screw Hole for Module Extractor

Agilent E5255A

Agilent E5252A

Installation

Installing the E5250A

To Install Blank Panel

CAUTION To prevent thermal damage to the E5250A cards, be sure that blank panels (Agilent

part number E5250-60003) are installed in all unused slots.

If the blank panel is not installed to cover an unused slot, install the blank panel as follows:

1. Align the blank panel over the unused slot.

2. Screw in the screws on the left and right edges of the blank panel by using the wrench furnished with the E5250A.

Agilent E5250A User’s Guide, Edition 9 2-9

Installation Installing the E5250A

To Configure E5255A

The Agilent E5255A has three 2-input 8-output multiplexers. You can configure several multiplexers by modifying some internal connections. Component locations on the E5255A are shown in Figure 2-2, and the relationship of the multiplexer blocks and the component s is sho wn in Table 2-1. Table 2-2 shows the initial s ettin g of the E5255A internal connections. The setting does not depend on the slot in which the module is installed.

Table 2-1 Mu ltiplexer Blocks and Components

Multiplexer

block

Block 1 holder 1 - BIASout1 IVin1 IVout1 DIP SW1 Block 2 holder 2 BIASin2 BIASout2 IVin2 IVout2 DIP SW2 Block 3 holder 3 BIASin3 - IVin3 IVout3 DIP SW3

Table 2-2 Agilent E5255A Initial Setup

Block number IVin cable connection BIASin/BIASout Protective resistor

Resistor

holder

1 SMU1 BIAS INPUT 51 0 Ω 2 SMU2 BIAS INPUT 52 0 Ω 3 SMU3 BIAS INPUT 53 0 Ω

BIASin BIASout

IVin

cable

IVout

connector

To Modify IV Input

IV input connection is defined by the connection of IVin cable and the setting of DIP switch shown in Figure 2-2. For actual examples of modifications, see “E5255A Configuration Examples”.

DIP SW

Each DIP switch has four bit switches. Bits 1 to 3 are used to specify which SMU input connector is connected to the IV input. Bit 4 of DIP switch is used to specify whether the protective resistors are 0 Ω or not. The DIP switche s m ust be set properly after you complete the internal connection. Make sure you set the DIP switches correctly. If not, dangerous voltages may be applied to unexpected output connectors.

2-10 Agilent E5250A User’s Guide, Edition 9

Figure 2-2 Agilent E5255A Component Locations

SMU6

SMU5

SMU4

SMU3

SMU2

SMU1

IVout3 connector

IVout2 connector

IVout1 connector

IVin1 cable

IVin3 cable

IVin2 cable

DIP SW2

DIP SW3

DIP SW1

Resistors (Total 24)

Resistor holder 1

Screws (Total 48)

Block 1

Block 3

Block 2

Resistor holder 3

Resistor holder 2

BIASin2 terminal

BIASin3 terminal

BIASout1 terminal

BIASout2 terminal

SMU input connectors

BIT1 (1)

BIT3 (4)

BIT4 (R)

BIT2 (2)

Resistors BIT4

0ohm 0

other 1

To BIAS INPUT 51 To BIAS INPUT 5 2

To BI AS I N P UT 5 3

IVin cable DIP SW setting connection BIT1 BIT2 BIT3

SMU1 10 0 SMU2 01 0 SMU3 11 0 SMU4 00 1 SMU5 10 1 SMU6 01 1

1: ON

0: OFF

Module pins

Installation

Installing the E5250A

To Modify BIAS Input

Each multiplexer block has an independent BIAS input. You can change the BIAS input internally using the BIASin/BIASout terminals shown in Figure 2-2, or externally using the BIAS INPUT connectors. For actual examples of modifications, see “E5255A Configuration Examples”.

To Use Multiplexer Blocks on another E5255A

When a module is installed in a mainframe slot, six module pins are connected to the mainframe internal bus. So, if multiplexers on different E5255As use the same module pin, the IV inputs are connected together via the internal bus.

Agilent E5250A User’s Guide, Edition 9 2-11

Installation Installing the E5250A

For example, if a mainframe installs four E5255As which the IVin1 cable is connected to the SMU1 input connector and the IVin2 and IVin3 cables are not connected, the E5250A configures a 32-output multiplexer that uses the SMU INPUT 1 connector as the IV input.

To Mount Protective Resistors

To protect the device (DUT) from electrical damage, you can mount resistors between the IV input and BIAS input of multiplexer. The following procedure shows how to mount the resistors. See Figure 2-2 for the component locations.

When shipped from the factory, 0 Ω resistors are mounted, and bit 4 of all DIP switches is set to OFF (0).

1. Cut the original resistors (0 Ω) off.

2. Loosen the screws from both sides of the resistor holder.

3. Put resistors in holder, and tig hten screws. And confirm that the resistors are held properly. Resistors should be mounted on each multiplexer block that you will use (8 resistors/block).

4. Set bit 4 to ON (1) for the DIP switch of the related block. For example, if you mount resistors for Block 1 and 2 m ultip lexers, s et bi t 4 to ON for DIP SW1 and SW2.

To Select Protective Resistors

Be careful about the following when selecting protective resistors. Also, be careful about the heating of the rear panel of mainframe or plug-in module, which may be heated by resistors, even if you follow this warning.

• If only one E5255A is installed in the mainframe: Total power consumption by resistors must be less than 16W.

• If multiple E5255As are installed in the mainframe: Total power consumption by resistors must be less than 32W.

• Consider the current flows to resistor when DUT shorts, and make sure the power consumption by resistor will be within specification of resistor. Do not use resistors that have specifications inadequ ate for your applications , which will result in resistors heating up, burning, or smoking.

2-12 Agilent E5250A User’s Guide, Edition 9

Installing the E5250A

E5255A Configuration Examples

The following example configurations are described:

• “24-output multiplexer (3-BIAS inputs, 1-IV input, 1 module)”

• “24-output multiplexer (1-BIAS input, 1-IV input, 1 module)”

• “96-output multiplexer (1-BIAS input, 1-IV input, 4 modules)”

24-output multiplexer (3-BIAS inputs, 1-IV input, 1 module)

To make this multiplexer, you need a E5255A. See Figure 2-3 for example setup. The example uses the SMU INPUT 1 connector as the IV input, and uses 0 Ω resistors.

Figure 2-3 24- output multiplexer (3-BIAS inputs, 1-IV input, 1 module)

Installation

1. Connect the IVin1 cable to the SMU1 input connector on the E5255A.

2. Connect the IVin2 cable to the IVout1 connector.

3. Connect the IVin3 cable to the IVout2 connector.

Agilent E5250A User’s Guide, Edition 9 2-13

Installation Installing the E5250A

4. Set bit 1 to ON (1) and bit 2 thru 4 to OFF (0) for DIP SW1 to SW3.

5. Install the module into the slot 1 of the mainframe. For installing module, see “To Install Plug-in Card” on page 2-8.

24-output multiplexer (1-BIAS input, 1-IV input, 1 module)

T o make this multiplexer, you need a E5255A, two wires (furnished), and two BNC open caps (furnished). See Figure 2-4 for example setup. The example uses the SMU INPUT 1 connector as the IV input, and uses 0 Ω resistors.

Figure 2-4 24- output multiplexer (1-BIAS input, 1-IV input, 1 module)

1. Connect the IVin1 cable to the SMU1 input connector on the E5255A.

2. Connect the IVin2 cable to the IVout1 connector.

3. Connect the IVin3 cable to the IVout2 connector.

4. Set bit 1 to ON (1) and bit 2 thru 4 to OFF (0) for DIP SW1 to SW3.

2-14 Agilent E5250A User’s Guide, Edition 9

Installation

To Bias Source

BNC T-adapter

BNC cable

Agilent E5255A

Installing the E5250A

5. Connect wires between BIASout1 and BIASin2, also between BIASout 2 and BIASin3.

6. Install the module into the slot 1 of the mainframe. For installing module, see “To Install Plug-in Card” on page 2-8.

7. Connect BNC open caps to BIAS INPUT 52 and 53 connectors. So, the BIAS INPUT 51 connector will be the BIAS input.

This example internally connects all BIAS INPUT connectors together. So, when bias is applied to a BIAS INPUT connector, the bias will also be applied to all the other BIAS INPUT connectors.

Do not forget to connect the BNC open caps to the unused BIAS INPUT conn ectors. Otherwise, you will be shocked if you touch the connectors while bias is applied. DO NOT connect the BNC short cap to the connectors. If you do, the E5255A and the Bias Source will be destroyed when the bias is applied.

To connect BIAS inputs externally.

You can use the BIAS INPUT connectors instead of the BIASin/out internal connections shown above. See Figure 2-5. This example uses three BNC cables and two BNC-T type (f-m-f) adapters. Recommended p arts fo r the BNC-T type adap ters are listed below.

• Agilent part number 1250-0781: female(side)-male(center)-female(side)

• Agilent part number 1250-2405: male(side)-female(center)-female(side)

Figure 2-5 Interconnection of BIAS INPUT Connectors

Agilent E5250A User’s Guide, Edition 9 2-15

Installation Installing the E5250A

96-output multiplexer (1-BIAS input, 1-IV input, 4 modules)

To make this multiplexer, you need four E5255As, eight wires (furnished), five BNC open caps (furnished), and three BNC cables. The example uses the SMU INPUT 1 connector as the IV input, and uses 0 Ω resisto rs.

1. See “24-output multiplexer (1-BIAS input, 1-IV input, 1 module)” and make four 24-output multiplexers. Then the IVin1 cable on all modules must be connected to the SMU1 input connector.

2. Install the modules into the mainframe. For installing module, see “To Install Plug-in Card” on page 2-8.

3. Connect BNC open caps to the BIAS INPUT 51 connector of the module in the slot 1 and all BIAS INPUT 52 connectors.

4. Connect BNC cables between the following connectors:

• BIAS INPUT 51 (slot 4) and BIAS INPUT 53 (slot 3)

• BIAS INPUT 51 (slot 3) and BIAS INPUT 53 (slot 2)

• BIAS INPUT 51 (slot 2) and BIAS INPUT 53 (slot 1) So, the BIAS INPUT 53 connector of the module in the slot 4 will be the BIAS

input.

Figure 2-6 96- output multiplexer (1-BIAS input, 1-IV input, 4 modules)

2-16 Agilent E5250A User’s Guide, Edition 9

Installation

Installing the E5250A

To Set GPIB Address

Every device on the GPIB bus must have a unique address. If you need to change the GPIB address of the E5250A, make sure the E5250A is

turned off. With a small flatblade screwdriver, set the GPIB ADDRESS switch on the rear panel to the new address (0 to 30).

The new GPIB address is recognized only at power on. The E5250A leaves the factory with the GPIB address set to 22.

To Connect GPIB Cable

To connect the E5250A with a computer or peripheral device via GPIB (IEEE Std.

488), connect an GPIB cable between the GPIB connector on the E5250A rear panel and the GPIB connector on the peripheral device.

Including the controller , a total of 15 GPIB interfaces can be connected on the same GPIB bus. The following are rules for connecting GPIB interfaces:

• If total number of interfaces ≤ 10: Max. total cable length = number of interfaces × 2 m.

• If total number of interfaces > 10: Max. total cable length = 20 m.

• Maximum cable length between interfaces is 4 m.

• Star connection and cascade connection are allowed. Loop connection is not allowed.

Agilent E5250A User’s Guide, Edition 9 2-17

Installation Maintenance

Maintenance

Maintenance should be performed periodically to keep the E5250A in good condition.

Performance Verification

Performance verification must be performed periodically so that the instruments satisfy the specifications, and keep a good condition. It is recommended to perform the performance verification once a year at least. For the performance verification, contact your nearest Agilent Technologies Service Center . T rained service personnel will perform the performance verification.

Cleaning

Before performing cleaning, turn off the instrument, and disconnect power cable from the rear panel. Use a dry cloth to clean the external case parts.

To prevent electrical shock, do not perform cleaning when the instrument is turned on, and do not use a wet cloth.

2-18 Agilent E5250A User’s Guide, Edition 9

3 Executing Self-Test and Leak Test

Executing Self-Test and Leak Test

This chapter describes how to execute the Self-Test and the Leak Test. The Self-Test consists of three tests that check the operation of Agilent E5250A

firmware, LEDs, and key that are on the E5250A front panel, and the relays on the cards installed in the E5250A.

Self-Test should be executed every day as an operation check before using the E5250A.

The Leak Test checks leakage current of cards installed in the E5250A. Leak Test can be executed by using Agilent 4155/4156 Semiconductor Parameter

Analyzer with the Self-Test Utility progr am that is o n the E5250A Program Disk furnished with the E5250A.

NOTE Performance Verification

The Self-Test and the Leak Test cannot be used to verify the specifications of the E5250A, E5252A, and E5255A.

To verify the specifications, return the E5250A with the cards installed to your nearest Agilent Technologies Service Center. The performance verification should be done by service personnel who are trained to service the E5250A, and should be performed once a year.

• “Executing Self-Test” introduces the test items of the Self-Test and describes how to execute the Self-Test.

• “Using the Self-Test Utility” describes how to execute the Self-Test and the Leak Test interactively from Agilent 4155/4156 semiconductor parameter analyzer.

3-2 Agilent E5250A User’s Guide, Edition 9

Executing Self-Test

The Self-Test of the E5250A consists of the following three tests:

Table 3-1 E5250A Self-Test Items

Test Item Description Executed by Refer to

Executing Self-Test and Leak Test

Executing Self-Test

Controller Test

Front Panel Interface Test

Relay Test Checks the operation of

Checks the operation of the E5250 A firmware.

Checks the operation of the LEDs and key that are on the E5250A front panel.

the relays on the cards installed in the E5250A.

Turning on the E5250A. page 3-4 Entering SCPI Command. pa ge 3-6 Using Self-Test Utility. page 3-10 Entering SCPI Command page 3-6 Using Self-Test Utility. page 3-10

Pressing the Local/ Self Test key.

Entering SCPI Command. pa ge 3-6 Using Self-Test Utility. page 3-10

page 3-4

Agilent E5250A User’s Guide, Edition 9 3-3

Executing Self-Test and Leak Test Executing Self-Test

To Execute Self-Test (Standalone)

Controller Test is executed automatically when you turn on the E5250A. You execute the Relay Test by pressing the panel.

Executing the Controller Test

1. Turn on the E5250A.

Local/Self Test key on the E5250A front

2. Wait until the LED in the

Local/Self Test key t urns off.

If System Fail LED or Fail LED stays on after executing the Controller Test, contact your nearest Agilent Technologies Service Center.

Executing the Relay Test

Requirements:

• Relay Test Adapter (E5250A-301)

• BNC Short Caps (3 caps are furnished with each E5255A)

Procedure:

1. Disconnect all cables from the E5250A input connectors.

2. Open all outputs of the plug-in cards as follows: If cable is connected to output connector of plug-in card, open output at DUT end of cable. If end of cable is Kelvin connection, disconnect the cable or make non-Kelvin connection at end of cable.

3. Attach the Relay Test Adapter to the E5250A input connectors as shown in Figure 3-1.

4. Set switch on the Relay Test Adapter to Relay Test position.

5. For each E5255A card installed in the E5250A: a. Disconnect any cables from the BIAS INPUT connectors of the E5255A.

b. Connect a BNC Short Cap to each E5255A BIAS INPUT connector.

6. (If Remote LED is on, press the

Local/Self Test key to return to Local control.

The Remote LED should turn off.)

7. Press the

8. Wait until the LED in

Local/Self Test key. The Relay Test executes.

Local/Self Test key turns off.

3-4 Agilent E5250A User’s Guide, Edition 9

NOTE If Fail LED is ON after Relay Test

Relay Test Adapter

After executing the relay test, if the Fail LED turns on, the cause is one of the following:

• The Relay Test Adapter is not connected or a cable is still connected to input connector.

• Output is not open. See step 2 of previous procedure.

• You did not properly install the E5255A. See “To Configure E5255A” on page 2-10.

• A plug-in card may be defective. Contact your nearest Agilent Technologies Service Center.

Figure 3-1 Relay Test Adapter Connection

Executing Self-Test and Leak Test

Executing Self-Test

NOTE Settings after Relay Test

After Relay Test, the E5250A settings are change d to same as after :SYST:CPON command execution.

Agilent E5250A User’s Guide, Edition 9 3-5

Executing Self-Test and Leak Test Executing Self-Test

To Execute Self-Test using External Controller

You can execute Self-T est fr om an external controller by using SCPI commands in a program.

This section describes the requirements, SCPI commands, and a s ample program for Self-Test execution from an external controller. For details about the SCPI commands, refer to Chapter 7.

Requirements

• Controller

• GPIB Cable

• Relay Test Adapter

• BNC Short Caps (3 caps are furnished with each E5255A)

SCPI Commands for Self-Test

Table 3-2 shows the SCPI commands used to execute Self-Test. Keyword of the SCPI command first level is :DIAG.

The :DIAG commands ignore the E5250A channel configuration mode (NORMAL or AUTO).

For :DIAG commands that require a card number, you specify 1, 2, 3, 4, or ALL. If the Fail LED turns on after executing the Self-Test, the E5250A or modules may

be defective. Contact your nearest Agilent Technologies Service Center.

NOTE Before executing Relay Test, be careful about following:

• Attach the Relay Test Adapter to the E5250A input connectors. Refer to Figure 3-1. Then set the switch on the adapter to the Relay Test position.

• Open all outputs of the plug-in cards as follows: If cable is connected to output connector of plug-in card, open output at DUT end of cable. If end of cable is Kelvin connection, disconnect the cable or make non-Kelvin connection at end of cable.

• For each E5255A installed in the E5250A, connect a BNC short cap to each E5255A BIAS INPUT connector.

3-6 Agilent E5250A User’s Guide, Edition 9

Table 3-2 SCPI Commands for Self-Test

Test Item Description SCPI Command

Executing Self-Test and Leak Test

Executing Self-Test

Controller Test

Executes Controller Test, then returns test result.

Returns test result. :DIAG:TEST:FRAM:STAT? CONT Clears test result. :DIAG:TEST:FRAM:CLE CONT

Front Panel Interface

Executes I/F Test, then returns test result.

(I/F) Test

Returns test result. :DIAG:TEST:FRAM:STAT? FPAN Clears test result. :DIAG:TEST:FRAM:CLE FPAN

Relay Test Executes Relay T est, then

returns test result. Returns test result. :DIAG:TEST:CARD:STAT? ALL

Clears test result. :DIAG:TEST:CARD:CLE ALL or

NOTE Front Panel Interface Test

After the :DIAG:TEST:FRAM:EXEC? FPAN command is executed, the Remote, System Fail, Fail, and Local/Self Test LEDs on the E5250A front panel blink for about 10 seconds. If an LED does not blink, the LED is defective.

:DIAG:TEST:FRAM:EXEC? CONT

:DIAG:TEST:FRAM:EXEC? FPAN

:DIAG:TEST:CARD:EXEC? ALL

or Card No. (1, 2, 3, or 4)

Card No. (1, 2, 3, or 4)

Confirm that the four LEDs are blinking, then press the

Local/Self Test key on the

E5250A front panel within 10 seconds. The LEDs should stop blinking. If you do not press the

Local/Self Test key within 10 seconds, the E5250A returns a

fail result for the Front Panel Interface Test, which turns on the Fail LED. If you pressed

it means the

Local/Self Test key within 10 seconds, and the Fail LED still turns on,

Local/Self Test key is defective.

If you find any problem, contact your nearest Agilent Technologies Service Center.

Agilent E5250A User’s Guide, Edition 9 3-7

Executing Self-Test and Leak Test Executing Self-Test

Self-Test Programming Example

This sample program is effective for an E5250A that has four card s installed. If your E5250A does not have four cards installed, delete the Relay Test program lines for the empty card slots. The program runs on HP BASIC.

10 ! Self-Test by Ext er na l Co nt ro ll er 20 ! 30 REAL A 40 ASSIGN @Hp5250 TO 722 50 OUTPUT @Hp5250;":DIAG:TEST:FRAM:CLE CONT" 60 OUTPUT @Hp5250;":DIAG:TEST:FRAM:CLE FPAN" 70 OUTPUT @Hp5250;":DIAG:TEST:CARD:CLE ALL" 80 DISP "Press Continue to go to Controller Test." 90 PAUSE 100 ! Controller Tes t 110 OUTPUT @Hp5250;":DIAG:TEST:FRAM:EXEC? CONT" 120 ENTER @Hp525 0; A 130 IF A=0 THEN GOTO 160 140 DISP "Failed . Pr es s Co nt in ue to go to I/ F Te st ." 150 GOTO 170 160 DI SP "Pass ed . Pr es s Co nt in ue to go to I/ F Te st ." 170 PAUSE 180 ! Front Panel I/ F Te st 190 OUTPUT @Hp5250;":DIAG:TEST:FRAM:EXEC? FPAN" 200 DISP "Press Lo ca l/ Se lf Tes t Ke y wi th in 10 se c. " 210 ENTER @Hp5250;A 220 IF A=0 THEN GOTO 250 230 DISP "Failed . Pr es s Co nt in ue to go to Re la y Te st ." 240 GOTO 260 250 DISP "Passed . Pr es s Co nt in ue to go to Re la y Te st ." 260 PAUSE 270 ! Relay Test 280 OUTPUT @Hp5250;":DIAG:TEST:CARD:EXEC? 1" 290 ENTER @Hp5250;A 300 IF A=0 THEN GOTO 330 310 DISP "Card 1 failed. Press Continue to test Card 2" 320 GOTO 340 330 DISP "Card 1 passed. Press Continue to test Card 2" 340 PAUSE 350 OUTPUT @Hp5250;":DIAG:TEST:CARD:EXEC? 2" 360 ENTER @Hp5250;A 370 IF A=0 THEN GOTO 400 380 DISP "Card 2 failed. Press Continue to test Card 3" 390 GOTO 410 400 DISP "Card 2 passed. Press Continue to test Card 3" 410 PAUSE 420 OUTPUT @Hp5250;":DIAG:TEST:CARD:EXEC? 3"

3-8 Agilent E5250A User’s Guide, Edition 9

Executing Self-Test and Leak Test

Executing Self-Test

430 ENTER @Hp5250;A 440 IF A=0 THEN GOTO 470 450 DISP "Card 3 failed. Press Continue to test Card 4" 460 GOTO 480 470 DISP "Card 3 passed. Press Continue to test Card 4" 480 PAUSE 490 OUTPUT @Hp5250;":DIAG:TEST:CARD:EXEC? 4" 500 ENTER @Hp5250;A 510 IF A=0 THEN GOTO 540 520 DISP "Card 4 failed." 530 GOTO 550 540 DISP "Card 4 passed." 550 END

Line Number Description

30 to 90 Clears all previous test results. 100 to 170 Executes the Controller Test, then returns test result. 180 to 260 Executes the Front Panel Interface Test, then returns the test

result.

270 to 340 Executes the Relay Test for the card installed in slot 1 of the

E5250A, then returns test result.

350 to 410 Executes the Relay Test for the card installed in slot 2 of the

E5250A, then returns test result.

420 to 480 Executes the Relay Test for the card installed in slot 3 of the

E5250A, then returns test result.

490 to 550 Executes the Relay Test for the card installed in slot 4 of the

E5250A, then returns test result.

Agilent E5250A User’s Guide, Edition 9 3-9

Executing Self-Test and Leak Test Using the Self-Test Utility

Using the Self-Test Utility

The Self-T est Utility is a Self-Test program for the E5250A, and runs on the Agilent 4155/4156's built-in IBASIC controller.

Self-Test Utility can execute all Se lf-Test items listed in Table 3-1 and can also execute the Leak Test, which checks leakage current of the E5250A with installed cards. You execute the Self-Test items and Leak Test interactively (using softkeys) from the 4155/4156.

This section explains the operation of the Self-Test Utility.

• “Requirements”

• “To Start the Self-Test Utility”

• “To Execute Self-Test”

• “To Execute Leak Test”

Requirements

The following equipment is required to execute the Self-Test Utility:

Table 3-3 Required Equipment

Agilent

Model/Part No.

4155 or 4156 Semiconductor

Parameter Analyzer 10833A/B/C GPIB Cable 1 E5250-17003 E5250A Program

Disk (furnished) E5250A-301

(E5250-60002) 1250-0929 BNC Short Cap 3 for each E5255A

3-10 Agilent E5250A User’s Guide, Edition 9

Relay Test Adapter 1 Relay Test

Description Qty. Usage

1 Executing

Self-Test Utility

(furnished with the E5255A)

Executing Self-Test and Leak Test

Using the Self-Test Utility

To Start the Self-Test Utility

1. Before turning on the 4155/4156 and E5250 A , conn ect the GPIB cabl e bet ween the E5250A and the 4155/4156.

2. Turn on the 4155/4156 and E5250A.

3. Set the 4155/4156 to "SYSTEM CONTROLLER" mode on SYSTEM: MISCELLANEOUS page.

4. Insert the E5250A Program Disk into the 4155/4156 disk drive.

5. Press the

Display key twice to display the "All IBASIC" screen. This key is

located in the IBASIC area on the 4155/4156 front panel.

6. Select GET softkey on the 4155/4156 screen. The following is displayed:

GET "_"

7. Type SELFTEST between the double quotations of GET statement. Then press

Enter key. Wait until the 4155/4156 finishes getting the file.

8. Press

Run key, which is in the IBASIC area on the 4155/4156 front panel. The

following message is displayed:

Input Agilent E5 25 0A GPI B Ad dr es s (d ef au lt 722 ): ?

9. To use default GPIB address 722, just press the Enter key. If not, type the GPIB address of your E5250A, then press

Enter key. MAIN MENU of the E5250A

Self-Test Utility and followin g softkeys are displayed on the 4155/4156:

Softkey Description

SELF TEST Displays the SELF TEST MENU. LEAK TEST Displays the LEAK TEST MENU. QUIT Quits the Self-Test Utility.

Agilent E5250A User’s Guide, Edition 9 3-11

Executing Self-Test and Leak Test Using the Self-Test Utility

To Execute Self-Test

On the MAIN MENU of the E5250A Self-Test Utility, select the SELF TEST softkey to display the E5250A SELF TEST MENU and following softkeys:

Softkey Description

CARD1 RELAY For executing Relay Test for Card1. CARD2 RELAY For executing Relay Test for Card2. CARD3 RELAY For executing Relay Test for Card3. CARD4 RELAY For executing Relay Test for Card4. CONTROLLER Executes Controller Test immediately. FRONT PANEL Executes Front Panel I/F Test imm ediately. MAIN MENU Returns to MAIN MENU of Self-Test Utility

immediately.

Also, the most recent Self-Test result (P/F/N) is displayed on the 4155/4156 screen.

Figure 3-2 Example of SELF TEST MENU

Agilent E5250A Tes t Ut il it y ** SELF TEST MENU ** CARD1 RELAY ... St ar t Sl ot 1 E5 25 5A Rel ay Tes t [N]

CARD2 RELAY ... St ar t Sl ot 2 E5 25 5A Rel ay Tes t [N] CARD3 RELAY ... St ar t Sl ot 3 E5 25 5A Rel ay Tes t [N] CARD4 RELAY ... St ar t Sl ot 4 E5 25 5A Rel ay Tes t [N] CONTROLLER .. . St ar t E5 25 0A Con tr ol le r Te st [P] FRONT PANEL ... St ar t E5 25 0A Fro nt Pan el UIF Tes t [N ] MAIN MENU ... Return to MAIN MENU

[P] indicates te st was pas se d. [F] indicates te st was fai le d. [N] indicates test was not executed.

Prepare the rela y te st ada pt er s before you select "CARDn RELAY" key.

Select desired softkey. _

3-12 Agilent E5250A User’s Guide, Edition 9

Executing Self-Test and Leak Test

Using the Self-Test Utility

Executing the Controller Test

To execute the controller test, press the CONTROLLER softkey. If [F] result is displayed after the test, the E5250A is defective. Contact your

nearest Agilent Technologies Service Center.

Executing the Front Panel Interface Test

To execute the front panel interface test, do the following:

1. Press the FRONT PANEL softkey.

2. Confirm that the following four LEDs on the E5250A front panel are blinking. And press the

• Remote LED

• System Fail LED

• Fail LED

• Local/Self Test LED

Local/Self Test key on the E5250A front panel within 10 seconds.

NOTE Fail Condition for Front Panel Interface Test

If an LED does not blink after selecting the FRONT PANEL softkey, the LED is defective.

If you do not press the If you pressed

it means the

Local/Self Test key within 10 seconds, and the Fail LED still turns on,

Local/Self Test key is defective.

Local/Self Test key within 10 seconds, the Fail LED turns on.

Contact your nearest Agilent Technologies Service Center.

Agilent E5250A User’s Guide, Edition 9 3-13

Executing Self-Test and Leak Test Using the Self-Test Utility

Executing the Relay Test

To execute the Relay Test, do the following:

1. Press the CARDn RELAY softkey (n=1 to 4). The following message is displayed on the 4155/4156 screen depending on card:

• Message for the E5252A:

Attach the relay test adapter on input terminal and open all output of slot n.

• Message for the E5255A:

Attach the relay tes t ad ap te r an d th e BN C sh or t ca p to E5250A/E5255 A in pu t. And ope n al l ou tp ut of sl ot n.

Where, n=1 to 4. And the following softkeys are displayed.

Softkey Description

CONTINUE Executes the Relay Test for the card immediately. CANCEL Cancels the Relay Test execution.

2. Disconnect all cables from the E5250A input terminals. And attach the Relay Test Adapter to the E5250A input terminals. For each E5255A card, connect a BNC short cap to each E5255A BIAS INPUT port.

3. Open all outputs of the plug-in cards as follows: If cable is connected to output connector of plug-in card, open output at DUT

end of cable. If end of cable is Kelvin connection, disconnect the cable or make non-Kelvin connection at end of cable.

4. Press the CONTINUE softkey to execute the Relay Test. Or press the CANCEL softkey to cancel test execution.

5. Repeat steps 1 to 4 for the each card you want to test.

If [F] result is displayed after executing the Relay Test, the card is defective. Contact your nearest Agilent Technologies Service Center.

3-14 Agilent E5250A User’s Guide, Edition 9

Executing Self-Test and Leak Test

Using the Self-Test Utility

To Execute Leak Test

NOTE Leak Test is for checking leakage current of the E5250A with plug-in cards

installed. If leak test result is too large for your application, contact nearest Agilent T echnologies Service Center. Leak test does not verify specifications of the E5250A and installed cards.

The Leak Test applies 10 Vdc to the specified input port of the E5250A, and measures the leakage current. The test limits are shown in Table 3-4.

You specify an input port of the E5250A, and specify the 4155/4156 SMU to use. The Leak Test automatically connects the specified input port to each output port consecutively , and uses the 4155/415 6 SMU to measure the leakage current for each channel.

You need to execute this test for each input port.

Table 3-4 Test Limits of Leak Test

Card Instrument Connection Input Port Test Limit

E5252A 4155 non-Kelvin IV 1, IV2 ±4.12 pA

IV3, IV4, IV5, IV6 ±1.01 nA

4156 non-Kelvin IV1, IV2 ±1.14 pA

IV3, IV4, IV5, IV6 ±1.01 nA

Kelvin IV1, IV2 ±2.24 pA

IV3, IV4, IV5, IV6 ±2.02 nA

E5255A 4155 non-Kelvin IV1 to IV6 ±4.12 pA

4156 non-Kelvi n IV1 to IV6 ±1.14 pA

Agilent E5250A User’s Guide, Edition 9 3-15

Executing Self-Test and Leak Test Using the Self-Test Utility

To execute the Leak Test, do the following:

1. On MAIN MENU of the E5250A Self-Test Utility, select LEAK TEST softkey. The following message is displayed:

Input Agilent 41 55 /4 15 6 GP IB add re ss (de fa ul t 81 7) :?

2. To use default GPIB address 817 for the 4155/4156, just press Enter key. If not, type GPIB address of the 4155/4156, then press

Enter key.

The LEAK TEST MENU with the following softkeys are displayed:

Softkey Description

START TEST For defining the Leak Test connection. Need to define the

E5250A input port and 4155/4156 SMU port .

MAIN MENU Returns to MAIN MENU of the Self-Test Utility.

3. Select START TEST softkey. Following message/softkeys are displayed:

Select IV Port of Leak Test by softkey.

Softkey Description

IVn (n=1 to 6) For specifying the E5250A SMU INPUTn port for which

you want to perform the leak measurement. If only the E5255As are installed, only IVn softkeys displayed are for SMU INPUTn internally connected to the E5255A IV input.

CANCEL Cancels the Leak Test execution.

3-16 Agilent E5250A User’s Guide, Edition 9

Executing Self-Test and Leak Test

Using the Self-Test Utility

4. Select desired IVn softkey (n=1 to 6) for input port you want to test. If the E5252A is installed in your E5250A, and the 4156 is used for the Relay

Test, then when you press IV1, IV3, or IV5 softkey, the follo wing message and softkeys are displayed:

Is IVn Port a Kelvin connection?

Where n=1, 3, or 5.

Softkey Description

YES Declares that the port specified by the IVn softkey is used

for the Kelvin connection.

NO Declares that the port specified by the IVn softkey is used

for the non-Kelvin connection.

CANCEL Cancels the Leak Test execution.

Select the YES or NO softkey. The following message and the softkeys are displayed:

Select SMU channel for IVn leak measurement by softkey.

Where n=1 to 6.

Softkey Description

SMUm (m= 1 to 6)

Declares that you will connect the 4155/4156 SMUm to th e E5250A port specified by the IVn softkey. SMU5 and SMU6 are displayed only if 5th and 6th SMU are installed in the 41501 expander of the 4155/4156.

CANCEL Cancels the Leak Test execution.

Agilent E5250A User’s Guide, Edition 9 3-17

Executing Self-Test and Leak Test Using the Self-Test Utility

5. Select the desired SMUm softkey (m=1 to 6). Following messag e is displayed depending on the connection type:

• Message for Kelvin connection:

Disconnect Kelvin cable from IVn terminal. And disconnect all cables from output terminals.

• Message for non-Kelvin connection:

Disconnect cable from IVn terminal. And disconnect all cables from output terminals.

Where n=1 to 6. And the following softkeys are displayed.

Softkey Description

CONTINUE To continue setting up the Leak Test. CANCEL Cancels the Leak Test execution.

6. Disconnect all cables from the E5250A input/output terminals. Then connect triaxial cable or Kelvin triaxial cable to the 4155/4156 SMU terminal you specified in step 5 because the next step executes the zero offset cancel.

7. Select the CONTINUE softkey. The following message is displayed depending on the connection type:

• Message for Kelvin connection:

Connect SMUm to IV n by Kel vi n ca bl e.

• Message for non-Kelvin connection:

Connect SMUm to IV n by cab le .

Where m=1 to 6 (specified by SMUm softkey) and n=1 to 6 (specified by IVn softkey).

And the following softkeys are displayed.

Softkey Description

CONTINUE Executes the Leak Test. Consecutively connects input port

specified by IVn softkey to each output port and makes leak measurement.

CANCEL Cancels the Leak Test execution.

3-18 Agilent E5250A User’s Guide, Edition 9

Executing Self-Test and Leak Test

Using the Self-Test Utility

8. Connect the cable from the 4155/4156 SMU port specified by the SMUm softkey (m=1 to 6) in step 5 to the E5250A input port specified by the IVn softkey (n=1 to 6) in step 4.

• Use Kelvin triaxial cable for Kelvin connection

• Use triaxial cable for non-Kelvin connection

9. Press the CONTINUE softkey to execute the Leak Test. After the Leak Test is completed for the input port specified by the IVn softkey,

the test result (PASS or FAIL) is displayed on the 4155/4156 screen. And the following softkeys are displayed:

Softkey Description

REPORT CRT Displays the Leak Test results on the 4155/4156 screen. LEAK TEST Returns to the LEAK TEST MENU.

T o display the leak current measurement d ata on the 4155/4 156 sc reen, pr ess the REPORT CRT so ftkey.

10. To return to the LEAK TEST MENU, select the LEAK TEST softkey. And to perform the Leak Test for another input port, repeat steps 3 to 9.

Agilent E5250A User’s Guide, Edition 9 3-19

Executing Self-Test and Leak Test Using the Self-Test Utility

3-20 Agilent E5250A User’s Guide, Edition 9

4 Setting up Measurement Environment

Setting up Measurement Environment

This chapter explains how to connect your instruments to Agilent E5250A input, and how to connect the E5250A output to your wafer prober or test fixture.

You can connect the E5250A output (E5252A or E5255A) to your prober or fixture in the following three ways:

• Via the available connector plates.

• (For E5255A only) Directly using Agilent 16494E coaxial cable.

• Via connectors that you mount directly on your own connector plate or test fixture.

This chapter explains how to do this in the following sections:

• “Connector Plates” introduces connector plates available for the plug-in card. For installing the connector plates on your shielding box for prober or fixture, refer to Agilent 16495 Installation Guide.

• “Connecting 8-Channel Shielded Coaxial Cable” explains how to use the 16494E coaxial cable, which is used to directly connect the E5255A output to the DUT, DUT socket, or any fixture you want without using a connector plate.

• “Mounting Connectors Directly” describes connector hole dimensions for mounting connectors directly on your own connector plate or test fixture, and describes the information to connecting the connectors to prober, sock et or DUT.

• “Connecting the E5250A Input” explains how to connect instruments to the E5250A input.

• “Connecting the E5250A Output” describes the information to connect the plug-in card output to a connector plate, connectors on your own shielding box and so on.

• “Measurement Cable Length” is a reference for deciding total cable length at your site by calculating the total guard capacitance according to the cable length from instrument to Device Under Test (DUT).

4-2 Agilent E5250A User’s Guide, Edition 9

Setting up Measurement Environment

Connector Plates

A connector plate is the interface to connect the E5250A to your prober or test fixture. The following connector plates are available for the E5250A. To install the connector plate, refer to Agilent 16495 Installation Guide.

Connector Plates for the E5252A

16495F Half size connector plate for E5252A

16495F-001 has 12 triaxial through connectors (female to female), an Intlk connector, and a GNDU connector (triaxial through, female to female). The back of the Intlk connector is designed for soldering.

16495F-002 has 12 triaxial connectors, an Intlk connector, and a GNDU connector. The back of each co nnector is designed for soldering.

16495G Full size connector plate for E5252A

16495G-001 has 24 triaxial through connectors (female to female), an Intlk connector, and a GNDU connector (triaxial through, female to female). The back of the Intlk connector is designed for soldering.

16495G-002 has 24 triaxial connectors, an Intlk connector, and a GNDU connector. The back of each co nnector is designed for soldering.

Connector Plates for E5255A

16495C Half size connector plate for E5255A

The 16495C has six 8-channel shielded coaxial connectors, an Intlk connector, and a GNDU connector. The back of each connector is designed for soldering.

16495D Full size connector plate for E5255A

The 16495D has twelve 8-channel shielded coaxial connectors, an Intlk connector, and a GNDU connector. The back of each connector is designed for soldering.

Agilent E5250A User’s Guide, Edition 9 4-3

Setting up Measurement Environment Connector Plates

Blank Plate

16495E Half size blank plate.

This plate is used to cover openings when you made too big openings for mounting the connector plate. You will use this plate to cover openings if you mount the half size connector plate in openings made for the full size connector plate.

4-4 Agilent E5250A User’s Guide, Edition 9

Setting up Measurement Environment

Total 8 ea.

DUT

Shielding (Ground)

SMU

Input

BIAS

Force

Bias line

Guard

Bias line

Ground

Connecting 8-Channel Shielded Coaxial Cable

This section introduces Agilent 16494E wide temperature 8-channel shielded coaxial cable, and explains how to connect the 16494E to the Device Under Test (DUT).

WARNING Do not connect the 16494E cable to the E5255A or any instrument until

connecting to the DUT as described below. If you ignore this warning, you maybe exposed to dangerous voltage.

The 16494E coaxial cable is used to connect the E5255A output directly to the DUT, DUT socket, or any fixture yo u want without using the con nector plate. One 16 494E is used for one 8-channel output connector of the E5255A. To use 24 output channels (three 8-channel output connectors), you need three 16494Es.

Instrument Side The instrument side of the 16494E cable can be connected directly to the E5255A

output.

DUT Side Solder the open side of th e 16494E directl y to DUT, DUT socket, or your t est fixtu re

as shown in Figure 4-1.

Figure 4-1 Example of DUT Connection

NOTE For highly accurate current forcing and measurements with minimized leakage,

extend the guard to surround the signal lines as close as possible to the DUT.

Agilent E5250A User’s Guide, Edition 9 4-5

Setting up Measurement Environment Mounting Connectors Directly

Mounting Connectors Directly

Previous sections described the information to use the available accessories , also the 16495 Installation Guide provides the information how to install connector plates on the shielding box. However, you may need to directly mount connectors on your own connector plate or test fixture.

In this case, you need to make connector holes and directly mount the connectors yourself. This section has dimension information about the hole s y ou n eed t o m ake. Do the following:

1. Select the appropriate parts for your situation. Refer to Table 4-1.

2. Make holes and mount the connectors. Refer to Table 4-2. For kelvin connection, use the 16494B Kelvin cable. Kelvin cable requires the

kelvin triaxial connector which has two connector holes and three screw holes.

3. Make interlock circuit as shown in “To Make Interlock Circuit” on page 4-8.

4. Make cable connection between connector and DUT (device under test). Refer to “To Connect Connectors to DUT” on page 4-13.

Table 4-1 lists the parts required to mount connectors on your shielding box. From this table, select the parts that you need to mount. Quantity of parts depends on your site.

4-6 Agilent E5250A User’s Guide, Edition 9

Table 4-1 Recommended Parts

2 − ∅11.3 ∅3.2 2 − M3 x 0.5

14 11 11 14

2.8

10.3

∅11.3

10.3

63.5 59

−

R1.5

− ∅

1.8

8.2

Setting up Measurement Environment

Mounting Connectors Directly

Usage

Making interlock circuit

Agilent Part

No.

1252-1419C Interlock Connector (6 pin, female) 3101-0302 or

Switch

3101-3241 1450-0641 LED (V

8150-5680 Wire

Connecting E5252A output

Connecting E5255A output

1250-2457 Triaxial Connector (female) 8121-119 1 Low Noise Coaxial Cable 1251-2367 Connector Frame (female) 1251-0179 Coaxial Connector (female) (8ea. required for one frame.) 0380-3070 Screw (2ea. required for one frame.) 2260-0002 Nut (2ea. required for one frame.) 2190-0913 Washer (2ea. required for one frame.) 8121-119 1 Low Noise Coaxial Cable

Table 4-2 Dimen sions of Connector Holes

Kelvin Triaxial Connector (in mm) Triaxial Connector (in mm)

Description

≅ 2.1 V @ IF = 10 mA)

8 Channel Shielded Coaxial Connector (in mm) Interlock Connector (in mm)

Agilent E5250A User’s Guide, Edition 9 4-7

Setting up Measurement Environment Mounting Connectors Directly

To Make Interlock Circuit

The interlock circuit is to prevent electric shock when touching measurement terminals.

You must install an interlock circui t on sh iel d i ng bo x t o prev ent dangerous voltages when door of the shielding box is open.

Figure 4-2 shows the pin assignments of the interlock connector mounted on your own connector plate or test fixture.

Figure 4-2 Interlock Connector Pin Assignments

WARNING Dangerous voltages of up to the maximum voltage of SMUs may be present at

force, guard, and sense terminals when the interlock terminals are shorted.

To Install Interlock Circuit

Install the interlock circuit as follows.

1. Mount two mechanical switches on your shielding box, so that the switches close when the door of the shielding box is closed, and open when the door is opened. For the dimensions of the switch, refer to Figure 4-3 and Figure 4-4.

2. Use wire to connect the two switches in series between pin number 1 and 2 (or

3) of the interlock co nnector. See Figure 4-2.

For example, Agilent 4155/4156 is connected to the interlock circuit, it cannot force more than ±40 V when the doo r is open. When door is closed, it can force more than ±40 V.

4-8 Agilent E5250A User’s Guide, Edition 9

Setting up Measurement Environment

Mounting Connectors Directly

Figure 4-3 Dimensions of Interlock Switch (Agilent part number 3101-0302)

Figure 4-4 Dimensions of Interlock Switch (Agilent part number 3101-3241)

Agilent E5250A User’s Guide, Edition 9 4-9

Setting up Measurement Environment Mounting Connectors Directly

To Install LED Circuit

The 4155/4156 semiconductor parameter analyzer's Intlk connector provides the interlock signal and a LED drive signal.

If a LED is connected between pin 4 and pin 5 (or 6) of the interlock connector, the LED lights to indicate high voltage output when more than ±40 V is forced from an SMU in the 4155/4156.

To install LED circuit on your shield in g box, do followin g:

1. Mount LED on your shielding box. For the dimensions of the LED, refer to Figure 4-5.

2. Use wire to connect the LED between pin 4 and pin 5 (or 6) of the interlock connector. Refer to Figure 4-2.

Figure 4-5 Dimensions of LED (Agilent part number 1450-0641)

4-10 Agilent E5250A User’s Guide, Edition 9

Setting up Measurement Environment

Mounting Connectors Directly

To Connect Interlock Circuit to Instrument

Before beginning the measurement, connect the interlock circuit to the interlock connector of the instrument as follows.

• For Agilent 4155/4156 semiconductor parameter analyzer: Connect Intlk connector of the 4155/4156 to the interlock connector by using

Agilent 16493J Interlock cable that is furnished with the 4155/4156. You can connect it directly without using any adapter.

• For the instruments which has a BNC-Type interlock connector: If you use an instrument that has a BNC-type interlock connector (such as

Agilent 4142B), connect interlock connectors of instrument and the interlock circuit as follows:

Required Parts:

Agilent

Model No.

16435A 1 Interlock Cable Adapter

16493J 1 Interlock Cable

Procedure:

1. Connect interlock connector of instrument to the BNC connector of the

16435A (interlock cable adapter) by using the BNC cable that is furnished with the adapter.

2. Connect the 16435A adapter to the interlock connector by using the 16493J

Interlock cable.

Quantity Description

Agilent E5250A User’s Guide, Edition 9 4-11

Setting up Measurement Environment Mounting Connectors Directly

NOTE To Check Interlock Circuit

If you use the 4155/4156, you can easily check the interlock circuit as follows:

1. Connect the Intlk connector of the 4155/4156 to your interlock circuit.

2. Press

System front-panel key, then select CALIB/DIAG primary softkey to

display the SYSTEM: SELF-CALIBRATION/DIAGNOSTICS page.

3. In the CALIB/DIAG field, select DIAG secondary softkey.

4. In the CATEGORY field, select I/O PERIPH secondary softkey.

5. Move pointer to the 403 (INT.) Interlock LED field.

6. Select EXECUTE secondary softkey.

7. Confirm the following:

• LED turns on within 1 sec from when interlock circuit is shorted.

• LED turns off within 1 sec from when interlock circuit is open.

To stop the interlock test, select STOP secondary softkey.

4-12 Agilent E5250A User’s Guide, Edition 9

Setting up Measurement Environment

to DUT

Coaxial cable

Triaxial connector

Insulator

Plate

Guard

Sense

Common

Guard

Force

Common

to DUT

Coaxial cable

Triaxial connector

Insulator

Plate

Guard

Sense

Common

Wi re

Guard

Force

Common

Mounting Connectors Directly

To Connect Connectors to DUT

Following figure shows a connection example from the connector to DUT. Use low-noise coaxial cable (Agilent part number: 8121-1191).

Kelvin connections non-Kelvin connections This connection is available only for the

Kelvin connectors. This connection can cancel effects of cable resistance by connect sense line and force line as close as possible to DUT terminal.

Following connection is for the Kelvin connectors. For the triaxial connectors or the 8 ch shielded connectors, ignore SENSE terminal, and make connection only for FORCE terminal. Measurement results include residual resistance from the connection cable.

CAUTION Never connect the guard terminal to any output, including circuit common, chassis

ground, or the guard terminal of any other unit. Doing so may result in an emergency condition.

Agilent E5250A User’s Guide, Edition 9 4-13

Setting up Measurement Environment

Insulator (black)

Outer conductor (for Guard signal)

Insulator (clear)

Conductive layer (black)

Center conductor (for Force/Sense signal)

approx. 10 to 15 mm

min 2 mm

Cover here using sleeve

Mounting Connectors Directly

For highly accurate current forcing and measurements while minimizing leakage, surround all force and sense lines from SMU by a guard as far as possi ble, and make cables stable by taping.

For reducing capacitance measurement error, tape the cables to any grounded materials such as sh ielding box . If you use probe card, ground ing the p robe card al so reduces capacitance measurement error.

NOTE Low-Noise Coaxial Cable

When you make a SMU output connection by using low-noise coaxial cable (Agilent part number: 8121-1191), shave the Conductive layer and the Insulator (clear) by knife so that the Center Conductor is insulated from the Conductive layer. Refer to following figure.

4-14 Agilent E5250A User’s Guide, Edition 9

Setting up Measurement Environment

Connecting the E5250A Input

This section explains how to connect instruments to the E5250A.

• “To Connect Instruments to Input Connectors”

• “To Connect Bias Source to the E5255A Bias Input”

• “To Connect GNDU to the E5250A Input”

WARNING Turn off all instruments that will be connected to the E5250A. And do not turn

them on until the connection described in this section is completed. If you ignore this warning, you may be exposed to dan gerous voltage.

To Connect Instruments to Input Connectors

The E5250A input connector has six SMU input connectors and four AUX input connectors.

Table 4-3 shows cables required to connect the instrument for typical applications using the E5250A.

You can make Kelvin connections when using the 4156 HRSMU, 41501 HPSMU, 4142B SMU, E5270 SMU. Use cables as follows:

• 4156/41501: Agilent 16494B-003 Kelvin triaxial cable

• 4142B: Agilent 16494C-001 Kelvin triaxial cable

• E5270: Agilent 16494B-001 Kelvin triaxial cable

To connect Kelvin triaxial cable to the E5250A input, use pairs (couple ports) of SMU INPUT connectors (1&2, 3&4, or 5&6) of the E5250A.

The input signal for each Kelvin input is as follows:

• Odd input port number: FORCE

• Even input port number: SENSE

Agilent E5250A User’s Guide, Edition 9 4-15

Setting up Measurement Environment Connecting the E5250A Input

Table 4-3 E5250A Input Connections

Application

DC Measurement

Instrument

Agilent

Model No.

4155 MPSMU SMU1 to 6 16494A-003 Triaxial cable

4156 HRSMU SMU1 to 6 16494B-003 Kelvin Triaxial cable or

41501 HPSMU SMU1 to 6 16494B-003 Kelvin Triaxial cable or

4142B SMU SMU1 to 6 16494C-001 Kelvin Triaxial cable or

Output

Connector

VSU AUX1 to 4 BNC cable

VMU AUX1 to 4 BNC cable

Intlk − 16493J Interlock cable

VSU AUX1 to 4 BNC cable

VMU AUX1 to 4 BNC cable

Intlk − 16493J Interlock cable

MPSMU SMU1 to 6 16494A-003 Triaxial cable

PGU HF1 or 2 BNC cable

GNDU SMU1 to 6 16493H GNDU cable

VSU AUX1 to 4 BNC cable

VMU AUX1 to 4 BNC cable

GNDU SMU1 to 6 16493H GNDU cable

Intlk − 16435A Interlock cable adapter

E5250A

Input

Connector

(for direct connection to Connector Plate)

16494A-003 Triaxial cable

(for direct connection to Connector Plate)

16494A-003 Triaxial cable

and E5250-60004 Adapter

− 16493H GNDU cable (for direct connection to Connector Plate)

16494A-001 Triaxial cable

and E5250-60044 Adapter

− 16493H GNDU cable (for direct connection to Connector Plate)

and 16493J Interlock cable (for direct connection to Connector Plate)

Cable Required

4-16 Agilent E5250A User’s Guide, Edition 9

Setting up Measurement Environment

Agilent 4156

SMU

AUX

Connector Plate

Agilent E525 0 A

INTLK

GNDU

Kelvin Triaxial Cable

BNC Cable

Triaxial Cable

INTLK Cable

Connecting the E5250A Input

Application

Instrument

Agilent

Model No.

Output

Connector

C Meter High, Low CV1 and 2 BNC cable

E5250A

Input

Connector

Measurement Pulse Input Pulse

OUTPUT HF 1 or 2 BNC cable

Generator

Bias Input Power

OUTPUT AUX1 to 4 BNC cable

Supply

In the table above,

• AUX means CV1, CV2, HF1, or HF2 connector.

• The E5250A does not have input connectors for the interlock. Connect directly from instrument to the connector plate which has an interlock connector.

• Can't use Agilent 41422A/41423A (HCU/HVU) of the 4142B with the E5250A.

• T o connect instrument output that uses banana plug to AUX connector , use Dual Banana plug to BNC Adapter (Agilent part number 1251-2277).

Figure 4-6 shows an example of connecting the E5250A to the 4156.

Figure 4-6 Connection Example with Agilent 4156

Cable Required

Agilent E5250A User’s Guide, Edition 9 4-17

Setting up Measurement Environment Connecting the E5250A Input

To Connect Bias Source to the E5255A Bias Input

The E5255A BIAS INPUT connector is a BNC-type connector. Use BNC cable to connect the bias source to the BIAS INPUT of the E5255A. If output terminal of the bias source is a banana plug, use a Dual Banana Plug to

BNC Adapter (Agilent part number 1251-2277).

To Connect GNDU to the E5250A Input

Ground Unit (GNDU) of Agilent 4142B Modular DC Source/Monitor or Agilent 41501 Expander (for Agilent 4155/4156) is usually connected to GNDU connector on the connector plate by using Agilent 16493H GNDU cable. This connection allows current over 1A.

If you want to connect the GNDU through the E5250A to connector plate, test fixture or DUT, connect the GNDU to the E5250A input as shown below.

CAUTION Make sure current to GNDU is less than 1 A if you connect GNDU to the E5250A.

The maximum input current of the E5250A is 1A.

Required Parts:

Agilent

Model/Part No.

16493H 1 GNDU Cable

E5250-60044 1 Triaxial to Dual Triaxial Adapter

Procedure:

1. Connect the adapter to the E5250A SMU INPUT connector (1&2, 3&4 or 5& 6) as shown in Figure 4-7.

2. Connect the GNDU cable between the instrument GNDU connector and the triaxial connector on the adapter.

4-18 Agilent E5250A User’s Guide, Edition 9

Quantity Description

Figure 4-7 Connection of Triax-Dual Triax Adapter

SMU INPUT AUX

To SMU

23456

Agilent E5250A

From GND

TRIAX-DUAL TRIAX Adapter

Agilent 16493H Cable

To SMU INPUT

To GNDU

By this connection, input signal for SMU INPUT connectors is as follows:

SMU INPUT Port Number Input Signal

Setting up Measurement Environment

Connecting the E5250A Input

If you make non-Kelvin connection for the E5250A outputs, use the odd input port only. Because non-Kelvin connection uses only Force signal for measurement.

Agilent E5250A User’s Guide, Edition 9 4-19

1, 3, or 5 Force 2, 4, or 6 Sense

Setting up Measurement Environment

SMU

Input

AUX

Force or Sense

Signal line

Guard

Ground

Connecting the E5250A Output

This section describes h ow to conn ect t he E525 2A an d E5255A output to connector plate, your test fixture, and so on.

• “To Connect the E5252A Output”

• “To Connect the E5255A Output”

WARNING Turn off the E5250A and all instruments connected to the E5250A. And do not

turn them on until the connection described in this section is completed. If you ignore this warning, you may be exposed to dan gerous voltage.

To Connect the E5252A Output

The E5252A output connector is shown in Figure 4-8. The E5250A input signal (SMU input or AUX input) appears at the E5252A output connector as shown in Figure 4-8 when input-output switching path is made.

Figure 4-8 E5252A Output Connector and Output Signal

You can easily connect the E5252A output connector to the connector plate or your test fixture by using cables shown in Table 4-4.

Table 4-4 E5252A Output Cable

Agilent Model No. Description

16494A-001 Triaxial cable, 1.5m (for non-Kelvin connection) 16494A-002 Triaxial cable, 3m (for non-Kelvin connection) 16494B-001 Kelvin Triaxial cable, 1.5m (for Kelvin connection) 16494B-002 Kelvin Triaxial cable, 3m (for Kelvin connection)

4-20 Agilent E5250A User’s Guide, Edition 9

Setting up Measurement Environment

Connector Plate Side

E5252A Side

For Kelvin connection, use Kelvin triaxial cable listed in Table 4-4. To make a Kelvin output port (1, 3, 5, 7, 9 and 11), couple two E5252A output po rt s as fo l lo ws:

Kelvin Output Port Output Port Number

1 1 (Force) and 2 (Sense) 3 3 (Force) and 4 (Sense) 5 5 (Force) and 6 (Sense) 7 7 (Force) and 8 (Sense) 9 9 (Force) and 10 (Sense)

11 11 (Force) and 12 (Sense)

Figure 4-9 shows the 16494B Kelvin triaxial cable for the E5252A.

Figure 4-9 16494B Kelvin Triaxial Cable for E5252A

Connecting the E5250A Output

Agilent E5250A User’s Guide, Edition 9 4-21

Setting up Measurement Environment

SMU

Input

BIAS

Force

Bias line

Guard

Bias line

Ground

To E5255A

To Connector Plat e

FEMALE

MALE

Connecting the E5250A Output

To Connect the E5255A Output

The E5255A output connector is shown in Figure 4-10. The E5250A SMU INPUT signal or the E5255A BIAS INPUT signal appears at the E5255A output connector as shown in Figure 4-10 when input-output switching path is made.

Figure 4-10 E5255A Output Connector and Output Signal

You can easily connect the E5255A output to the con nector plate or your tes t fixture by using the cable shown in Table 4-5 and Figure 4-11. The cable can be connected to the E5255A output ports labeled as 1−8, 1−8 (9−16), or 1−8 (17−24).

Table 4-5 E5255A Output Cable

Agilent Model No. Description

16494D-001 8-Ch Shielded Coaxial cable, 1.5m 16494D-002 8-Ch Shielded Coaxial cable, 3m

Figure 4-11 16494D 8-Channel Shielded Coaxial Cable for E5255A

4-22 Agilent E5250A User’s Guide, Edition 9

Setting up Measurement Environment

Measurement Cable Length

This section describes how to calculate the total guard capacitance when using a Source Monitor Unit (SMU), such as in Agilent 4155/4156 Semiconductor Parameter Analyzer, Agilent 4142B Modular DC Source/Monitor, Agilent E5270 Series of Parametric Measurement Solution, and so on.

When using an SMU, the length of measurement cables is limited by the guard capacitance of the cables. Guard capacitance means the capacitance between the signal line (FORCE or SENSE) and the GUARD line.

T ab le 4-6 lists the guard capacitance for each element of the E5250A measurement environment.

When using the 4155/4156/4142B/E5270, the maximum limit of the guard capacitance is approximately 900 pF. So, you add the following and total must be less than 900 pF:

• Guard capacitance of cable from SMU to E5250A SMU INPUT.

• Guard capacitance of E5250A and installed plug-in cards.

• Guard capacitance of cable from plug-in card output to connector plate.

• Guard capacitance of cable from connector plate to DUT.

• Other capacitances, such as for probe card. The following is an example to calculate the guard capacitance of a measurement

environment:

Installed Plug-in card s: Four E5252A cards (145 pF + 8 pF × 3) Input Cable: 16494A-003 (75 pF) Output Cable: 16494A-001 (125 pF) Cable from Connector

Plate to DUT: 8121-1191, 2 m (130 pF × 2) Probe Card: Guard Capacitance approximately 10 pF (example)

In this environment, the total guard capacitance (Cg-total) is as follows.

Cg-total = 145+(8×3)+75+125+(130×2)+10 pF = 639 pF < 900 pF

Even if you use other instruments, you can use the table for reference about the measurement cable length and capacitance.

Agilent E5250A User’s Guide, Edition 9 4-23

Setting up Measurement Environment Measurement Cable Length

Table 4-6 G uard Capaci tances of E5250A Measurement Environment (Typical)

Connection Agilent Model/Part No.

from SMU to E5250A

E5250A and Plug-in Card

from Card Output to Connector Plate

16494A-003 (for non-Kelvin) 80 cm 75 pF 16494B-003 (for Kelvin) 80 cm 90 pF 16494C-001 (for 4142B) 1.5 m 140 pF E5252A (only 1 card is installed) − 145 pF E5252A (more 1 card) − 8 pF/extra card E5255A (only 1 card is installed) − 180 pF E5255A(more 1 card) − 60 pF/extra card 16494A-001 (for non-Kelvin) 1.5 m 125 pF 16494A-002 (for non-Kelvin) 3 m 240 pF 16494B-001 (for Kelvin) 1.5 m 140 pF 16494B-002 (for Kelvin) 3 m 260 pF 16494C-001 (for 4142B) 1.5 m 140 pF 16494C-002 (for 4142B) 3 m 260 pF

Cable

Length

Guard

Capacitance

16494D-001 1.5 m 125 pF 16494D-002 3 m 240 pF 16494E-003 3 m 240 pF

from Connector Plate to DUT

4-24 Agilent E5250A User’s Guide, Edition 9

Agilent Part No. 8121-1191 X m 130 pF per m

5 Controlling the E5250A

Controlling the E5250A

This chapter explains how to control Agilent E5250A.

• “Methods for Controlling the E5250A” introduces several methods for controlling the E5250A.

• “Switch Control Basics” introdu ces bas ic infor mati on for contro l lin g the relay switches on the E5252A and E5255A plug-in cards.

• “Using Virtual Front Panel Utility” describes how to use Virtual Fron t Panel (VFP) utility furnished with the E5250A. The VFP is for Agilent 4155/4156 users.

5-2 Agilent E5250A User’s Guide, Edition 9

Methods for Controlling the E5250A

This section introduces several methods for controlling the E5250A. Table 5-1 lists the E5250A control methods, and the operating systems on which each control method can be used.

Table 5-1 Summary of Control Methods

Operating System (Controller)

Controlling the E5250A

Methods for Controlling the E5250A

Control Method

Creating Your

Program

Modifying

Sample

Program

Using VFP No No No Yes page 5-25

HP BASIC

(workstation)

Yes Yes Yes Yes Chapter 6

Y es No No No Chapter 6,

RMB/UX

(workstation)

BASIC for

Windows

(PC)

IBASIC

(4155/4156)

Refer to

and 7

7, and 8

Creating Your Own Program

You can create a control program using the SCPI Commands describ ed in Chapt er 7 on all the operating systems listed in T able 5-1. Refer to Chapter 6 for how to create the program.

In an control progr am ( which runs on HP BASIC opera ting s ystem), you can us e the Capacitance Compensation Routine and the VFP Data Upload Library furnished with the E5250A.

Capacitance Compensation Routine

This routine is an subprogram runs on HP BASIC, and is used to compensate f or the capacitance measurement error caused by the E5250A when the E5252A is installed. This subprogram is used with Agilent 4284A Precision LCR Meter. You enter the capacitance data measured by the 4284A, and this subprogram returns the compensated value.

To use this subprogram, link it to your program. For details, refer to Chapter 6.

Agilent E5250A User’s Guide, Edition 9 5-3

Controlling the E5250A Methods for Controlling the E5250A

VFP Data Upload Library

This subprogram library is used to convert the control data created by the Virtual Front Panel (VFP) Utility to data that can be used with your program runs on HP BASIC. To use this library, link it to your program. For details, refer to Chapter 6.

CAUTION Open or close the relay without allowing the output voltage to affect the relay by

using the following procedure.

1. Disable t he output voltage of bia s source

2. Connect the relay

3. Enable the output voltage of bias source

4. Make measurements

5. Disable t he output voltage of bia s source

6. Disconnect the relay

If the relay is opened and output voltage reaches the relay, the relay may be damaged or its service life reduced.

Modifying a Sample Program

The sample programs furnished with the E5250A are useful for creating your program on HP BASI C. You can create your desired program easily by modi f ying a sample program. To understand the sample programs and how to modify, refer to Chapter 9.

Also, you can use the Capacitance Compensation Routine and the VFP Data Upload Library introduced in “Creating Your Own Program” on page 5-3.

Using the Virtual Front Panel (VFP) Utility

The Virtual Front Pa nel (VFP ) Utility is used to control the E5250A by using Agilent 4155/4156 Semi conductor Paramet er Analyzer' s bu ilt- in Inst rument BAS IC (IBASIC) controller. You can control the E5250A interactively without the control program.

Refer to “Using Virtual Front Panel Utility” on page 5-25.

5-4 Agilent E5250A User’s Guide, Edition 9

Controlling the E5250A

Switch Control Basics

This section introduces basic information for controlling the relay switches on the E5252A and the E5255A.

• “Channel List and Channel Configuration”

• “Connection Rule”

• “Connection Sequence”

•“Bias Mode”

• “Couple Port”

• “E5252A Channel List”

• “E5255A Channel List”

Agilent E5250A User’s Guide, Edition 9 5-5

Controlling the E5250A

Channel No. (4 digits)

Card No. (1digit)

Channel No. (4 digits)

Card No. (1digit)

(

)

Channel No. (4 digits)

Card No. (1digit)

Channel No. (4 digits)

Card No. (1digit)

(

)

Switch Control Basics

Channel List and Channel Configuration

Some SCPI commands require the channel_list parameter, which determines the relays to close/open in the E5252A or the E5255A to connect/disconnect the d esired channels. The following figure shows the basic syntax of th e channel_list parameter.

Figure 5-1 Syntax of channel_list Parameter

The channel_list depends on Channel Configuration mode as described later. In the channel_list, you can specify one or more channels.

Each specified channel consists of five digits as follows: Card Number: One digit decimal number: 0 to 4.

Specifies the slot number of the card that you want to control. Depends on Channel Configuration mode. Refer to Table 5-2.

Channel Number: Four digit decimal number:

First two digits: specifies input port. Last two digits: specifies output port. Depends on type of card and Channel Configuration mode.

Refer to “E5252A Channel List” on page 5-15 and “E5255A Channel List” on page 5- 19.

5-6 Agilent E5250A User’s Guide, Edition 9

Agilent Technologies E5250A User Manual

Specifications and Main Features

Frequently Asked Questions

User Manual

1 Introduction

Agilent E5250A Product Description

Front Panel Tour

Rear Panel Tour

Agilent E5252A Product Description

Agilent E5255A Product Description

Options and Accessories

2 Installation

To Inspect the E5250A and Accessories

Requirements

Power Requirements

Power Cable

Operating Environment

Storage and Shipping Environment

Installing the E5250A

To Install Plug-in Card

To Install Blank Panel

To Configure E5255A

E5255A Configuration Examples

To Set GPIB Address

To Connect GPIB Cable

Maintenance

Performance Verification

Cleaning

3 Executing Self-Test and Leak Test

Executing Self-Test

To Execute Self-Test (Standalone)

To Execute Self-Test using External Controller

Using the Self-Test Utility

Requirements

To Start the Self-Test Utility

To Execute Self-Test

To Execute Leak Test

4 Setting up Measurement Environment

Connector Plates

Connector Plates for the E5252A

Connector Plates for E5255A

Blank Plate

Connecting 8-Channel Shielded Coaxial Cable

Mounting Connectors Directly

To Make Interlock Circuit

To Connect Connectors to DUT

Connecting the E5250A Input

To Connect Instruments to Input Connectors

To Connect Bias Source to the E5255A Bias Input

To Connect GNDU to the E5250A Input

Connecting the E5250A Output

To Connect the E5252A Output

To Connect the E5255A Output

Measurement Cable Length

5 Controlling the E5250A

Methods for Controlling the E5250A

Creating Your Own Program

Modifying a Sample Program

Using the Virtual Front Panel (VFP) Utility

Switch Control Basics

Channel List and Channel Configuration