Agilent Technologies E5250A User Manual
Agilent E5250A
Low Leakage Switch
Mainframe
User’s Guide
Agilent Technologies
Notices
© Agilent Technologies 1995 - 2008
No part of this manual may be reproduced in
any form or by any means (including electronic storage and retrieval or translation
into a foreign language) without prior agreement and written consent from Agilent
Technologies, Inc. as governed by United
States and international copyright laws.
Manual Part Number
E5250-90000
Edition
Edition 1, October 1995
Edition 2, January 1997
Edition 3, August 1997
Edition 4, January 2000
Edition 5, May 2000
Edition 6, January 2001
Edition 7, August 2003
Edition 8, July 2005
Edition 9, May 2008
Agilent Technologies, Inc.
5301 Stevens Creek Blvd
Santa Clara, CA 95051 USA
Warranty
The material contained in this document is provided “as is,” and is subject to being changed, without notice,
in future editions. Further, to the maximum extent permitted by applicable
law, Agilent disclaims all warranties,
either express or implied, with regard
to this manual and any information
contained herein, including but not
limited to the implied warranties of
merchantability and fitness for a particular purpose. Agilent shall not be
liable for errors or for incidental or
consequential damages in connection with the furnishing, use, or performance of this document or of any
information contained herein. Should
Agilent and the user have a separate
written agreement with warranty
terms covering the material in this
document that conflict with these
terms, the warranty terms in the separate agreement shall control.
Tec hn ol og y L i c e ns es
The hardware and/or software described in
this document are furnished under a license
and may be used or copied only in accordance with the terms of such license.
defined in FAR 52.227-19(c)(1-2) (June
1987). U.S. Government users will receive
no greater than Limited Rights as defined in
FAR 52.227-14 (June 1987) or DFAR
252.227-7015 (b)(2) (November 1995), as
applicable in any technical data.
Restricted Rights Legend
If software is for use in the performance of a
U.S. Government prime contract or subcontract, Software is delivered and licensed as
“Commercial computer software” as
defined in DFAR 252.227-7014 (June 1995),
or as a “commercial item” as defined in FAR
2.101(a) or as “Restricted computer software” as defined in FAR 52.227-19 (June
1987) or any equivalent agency regulation or
contract clause. Use, duplication or disclosure of Software is subject to Agilent Technologies’ standard commercial license
terms, and non-DOD Departments and
Agencies of the U.S. Government will
receive no greater than Restricted Rights as
DECLARATION OF CONFORMITY
According to ISO/IEC Guide 22 and CEN/CENELEC EN 45014
Manufacturer’s Name:
Agilent Technologies International sarl
Manufacturer’s Address:
Supplier’s Address:
Rue de la Gare 29
CH - 1110 Morges
Switzerland
Declares under sole responsibility that the product as originally delivered
Product Name:
Low Leakage Switch Mainframe 10x12 Matrix
Switch24(8x3)CH Multiplexer
24(8x3)CH Multiplexer
Model Number:
Agilent E5250A
Agilent E5252A
Agilent E5255A
Product Options:
This declaration covers all options of the above product(s)
complies with the essential requirements of the following applicable European Directives, and carries
the CE marking accordingly:
Low Voltage Directive (73/23/EEC, amended by 93/68/EEC)
EMC Directive (89/336/EEC, amended by 93/68/EEC)
and conforms with the following product standards
EMC Standard
IEC 61326:2002 / EN 61326:1997 +A1:1998 +A2:2001 +A3:2003
CISPR 11:1997 / EN 55011:1998
IEC61000-4-2:1995 / EN61000-4-2:1995
IEC 61000-4-3:1995 / EN61000-4-3:1995
IEC 61000-4-4:1995 / EN61000-4-4:1995
IEC 61000-4-5:1995 / EN61000-4-5:1995
IEC 61000-4-6:1996 / EN61000-4-6:1996
IEC 61000-4-11:1994 / EN61000-4-11:1994
Canada: ICES-001:1998
Australia/New Zealand: AS/NZS 2064.1
Limit
Group 1 Class A
4 kV CD, 8 kV AD
3 V/m, 80-1000 MHz
0.5 kV signal lines, 1 kV power lines
0.5 kV line-line, 1 kV line-ground
3 V, 0.15-80 MHz
1 cycle, 100%
The product was tested in a typical configuration with Agilent Technologies test systems.
Safety
IEC 61010-1:2001 / EN 61010-1:2001
Canada: CSA C22.2 No. 1010.1:1992, NRTL/C
Supplementary Information:
This DoC applies to above-listed products placed on the EU market after:
September 26, 2006
Date
Toshiyuki Kawaji
QA Manager
Agilent Technologies
For further information, please contact your local Agilent Technologies sales office, agent or distributor,
• Herstellerbescheinigung
GEÄUSCHEMISSION
Lpa < 70 dB
am Arbeitsplatz
normaler Betrieb
nach DIN 45635 T. 19
• Manufacturer’s Declaration
ACOUSTIC NOISE EMISSION
Lpa < 70 dB
operator position
normal operation
per ISO 7779
NOTE This ISM device complies with Canadian ICES-001.
Cet appareil ISM est conforme ?Hla norme NMB-001 du Canada.
This product complies with the WEEE Directive (2002/96/EC) marking
requirements. The affixed label indicates that you must not discard this electrical/
electronic product in domestic household waste.
Product Category: With reference to the equipment types in the WEEE Directive
Annex I, this product is classed as a “Monitoring and Control instrumentation”
product.
Do not dispose in domestic household waste.
To return unwanted products, contact your local Agilent office, or see
www.agilent.com/environment/product/ for more information.
Microsoft, Windows, Win dows NT, Visual C++, and Visual Basic ar e registered trademar ks of Microsoft
Corporation.
LabVIEW are registered trademarks of National Instruments Corporation.
Borland C++ Builder is registered trademark of International, Inc. LabWindows and
Safety Summary
The following general safety precautions must be observed during all phases of
operation, service, and repair of this instrument. Failure to comply with these
precautions or with specific warnings elsewhere in this manual may impair the
protections provided by the equipment. In addition, it violates safety standards of
design, manufacture, and intended us e of the instrument. Agilent Technologies, Inc.
assumes no liability for customer’s failure to comply with these requirements.
NOTE Agilent E5250A complies with INSTALLATION CATEGORY II for mains input
and INSTALLATION CATEGORY I for measurement input terminals, and
POLLUTION DEGREE 2 defined in IEC 1010-1.
Agilent E5250A is INDOOR USE products.
• GROUND THE INSTRUMENT
This is Safety Class I instrument. To minimize shock hazard, the instrument
chassis and cabinet must be connected to an electrical ground. The power
terminal and the power cable must meet International Electrotechnical
Commission (IEC) safety standards.
• DO NOT OPERATE IN AN EXPLOSIVE ATMOSPHERE
Do not operate the instrument in the presence of flammable gases or fumes.
Operation of any electrical instrument in such an environment constitutes a
definite safety hazard.
• KEEP AWAY FROM LIVE CIRCUITS
Operation personnel must not remove instrument covers. Component
replacement and internal adjustments must be made by qualified maintenance
personnel. Do not replace components with power cable connected. Under
certain conditions, dangerous voltages may exist even with the power cable
removed. To avoid injuries, always disconnect power and discharge circuits
before touching them.
• DO NOT SERVICE OR ADJUST ALONE
Do not attempt internal service or adjustment unless another person, capable of
rendering first aid and resuscitation, is present.
• DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT
Because of the danger of introducing additional hazards, do not install substitute
parts or perform any unauthorized modification to the instrument. Return the
instrument to a Agilent Technologies Sales and Service Office for services and
repair to ensure that safety features are maintained.
• DANGEROUS PROCEDURE WARNINGS
Warnings, such as example below, precede potentially dangerous procedures
throughout this manual. Instructions contained in the warnings must be
followed.
WARNING Dangerous Voltage, capable of causing death, are present in this instrument.
Use extreme caution when handling, testing, and adju sti n g.
Safety Symbols
The general definitions of safety symbols used on equipment or in man uals are
listed below.
Instruction manual symbol: the product will be marked with this symbol when it is
necessary for the user to refer to the instruction manual in order to protect against
damage to the instrument.
Indicates dangerous voltage and potential for electrical shock. Do not touch
terminals that have this symbol when insrument is on.
Affixed to product containing static sensitive devices--use anti-static handling
procedures to prevent electrostatic discharge damage to compone nt.
Protective conductor terminal. For protection against electrical shock in case of a
fault. Used with field wiring terminals to indicate the terminal which must be
connected to ground before operating equipment.
Frame or chassis terminal. A connection to the frame (chassis) of the equipment
which normally includes all exposed metal structures.
Indicates earth (ground) terminal.
Alternating current.
Direct current.
ON (Supply).
OFF (Supply).
STANDBY (Supply).
CAT 1
WARNING The warning sign denotes a hazard. It calls attention to a procedure, practice,
CAUTION The caution sign denotes a hazard. It calls attention to an operating procedure,
Means INSTALLATION CATEGORY I. Measurement terminals on the rear panel
comply with INSTALLATION CATEGORY I.
condition or the like, which, if not correctly performed or adhered to, could result in
injury or death to personal.
practice, condition or the like, which, i f not correctly perfor med or adhered to , could
result in damage to or destruction of part or all of the product.
In This Manual
This manual is a user’s guide for Agilent E5250A, and consists of the following
chapters:
• Introduction
Provides an overview of the E5250A Low Leakage Switch Mainframe, E5252A
10×12 Matrix Switch, and E5255A 24 (8×3) Channel Multiplexer.
• Installation
Describes requirements to install the E5250A and tasks for installation.
• Executing Self-Test and Leak Test
Describes how to execute the three Self-Test items (Controller Test, Front Panel
Interface Test, and Relay Test) and the Leak Test.
• Setting up Measurement Environment
Explains how to connect your instruments to the E5250A input, and how to
connect the E5250A output to your wafer prober or test fixture.
• Controlling the E5250A
Introduces several methods for controlling the E5250A, gives basic information
for controlling the relay switc hes on the plug-in cards, and describes how to use
Virtual Front Panel (VFP) utility furnished with the E5250A.
• Programming the E5250A
Describes how to create programs that contain SCPI commands to control the
E5250A.
• Command Reference
Describes the SCPI commands available to operate the E5250A via GPIB
interface and the status reporting structure.
• VXIplug&play Driver
Introduces the VXIplug&play driver available for the E5250A.
• Executing Sample Programs
Explains how to execute a nd modify the sample programs stored in t h e pr ogram
disk that is furnished with the E5250A.
• Specifications
Lists specifications, typical data, supplemental data, and reference data for the
E5250A, E5252A, and E5255A.
• Error Messages
Lists and describes the error messages for the E5250A.
• SCPI Command Summary
This is a quick reference for the SCPI subsystem commands available for the
E5250A.
Text Co nventions
The following text conventions are used in this manual:
Screen Text Represents text that appears on screen of the controller.
Italic Refers to a related document, or is used for emphasis.
Contents
1. Introduction
Agilent E5250A Product Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
Front Panel Tour . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-4
Rear Panel Tour . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
Agilent E5252A Product Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
Agilent E5255A Product Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11
Options and Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-12
2. Installation
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
To Inspect the E5250A and Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
Power Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-4
Power Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
Operating Environment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6
Storage and Shipping Environment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6
Installing the E5250A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7
To Install Plug-in Card . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8
To Install Blank Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9
To Configure E5255A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-10
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-12
E5255A Configuration Examples. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-13
To Set GPIB Address . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-17
To Connect GPIB Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-17
Agilent E5250A User’s Guide, Edition 9 Contents - 1
Contents
Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-18
Performance Verification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-18
Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-18
3. Executing Self-Test and Leak Test
Executing Self-Test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
To Execute Self-Test (Standalone) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
To Execute Self-Test using External Controller . . . . . . . . . . . . . . . . . . . . . . . . 3-6
Using the Self-Test Utility . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10
Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10
To Start the Self-Test Utility . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11
To Execute Self-Test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12
To Execute Leak Test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-15
4. Setting up Measurement Environment
Connector Plates . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3
Connector Plates for the E5252A. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3
Connector Plates for E5255A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3
Blank Plate. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4
Connecting 8-Channel Shielded Coaxial Cable . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5
Mounting Connectors Directly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6
To Make Interlock Circuit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8
To Connect Connectors to DUT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-13
Connecting the E5250A Input . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-15
To Connect Instruments to Input Connectors . . . . . . . . . . . . . . . . . . . . . . . . . 4-15
To Connect Bias Source to the E5255A Bias Input . . . . . . . . . . . . . . . . . . . . 4-18
To Connect GNDU to the E5250A Input . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4 - 18
Connecting the E5250A Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-20
Contents - 2 Agilent E5250A User’s Guide, Edition 9
Contents
To Connect the E5252A Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-20
To Connect the E5255A Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-22
Measurement Cable Length . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-23
5. Controlling the E5250A
Methods for Controlling the E5250A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-3
Creating Your Own Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-3
Modifying a Sample Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4
Using the Virtual Front Panel (VFP) Utility . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4
Switch Control Basics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-5
Channel List and Channel Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-6
Connection Rule . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-9
Connection Sequence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-10
Bias Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-11
Couple Port . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-13
E5252A Channel List . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-15
E5255A Channel List . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-19
Using Virtual Front Panel Utilit y . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-25
Functions of Virtual Front Panel Utility . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-26
Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-27
Starting the Virtual Front Panel Utility . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-27
Confirming the E5250A Card Configurations . . . . . . . . . . . . . . . . . . . . . . . . 5-28
Changing the VFP Setup Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-29
Defining Labels for the E5250A Input Ports . . . . . . . . . . . . . . . . . . . . . . . . . . 5-31
Making Connections and Changing the Setup Data . . . . . . . . . . . . . . . . . . . . 5-33
Saving/Loading the Setup Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-42
6. Programming the E5250A
SCPI Programming Basics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-3
SCPI Command Hierarchy . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-4
Agilent E5250A User’s Guide, Edition 9 Contents - 3
Contents
Controlling E5250A by Using HP BASIC . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5
Creating a Control Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-6
Defining Channel Configuration Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-8
Defining Connection Rule . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-8
Defining Connection Sequence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-9
Using Bias Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-10
Using Couple Port (for E5252A only) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-11
Controlling Relay Switching . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-12
Programming Examples . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-13
Channel Creation Example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-14
Bias Mode Example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-16
Couple Port Example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-19
Using the VFP Data Upload Library . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-22
VFP Data Upload Library . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-23
Programming Example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-25
Before Executing Your Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-26
Error Messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-27
Using the Capacitance Compensation Routine . . . . . . . . . . . . . . . . . . . . . . . . . 6-28
Capacitance Compensation Routine . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-29
Required Conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-30
Programming Example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-32
Before Executing Your Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-32
Error Messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-32
7. Command Reference
Common Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-4
:DIAGnostic Subsystem . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-15
:ROUTe Subsystem . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-20
:SYSTem Subsystem . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-42
Contents - 4 Agilent E5250A User’s Guide, Edition 9
Contents
Status Reporting Structure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-48
Status Reporting Structure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-48
Status Byte Register . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-50
Service Request Enable Register . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-52
Standard Event Status Register . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-53
Standard Event Status Enable Register . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-54
Output Queue . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-55
8. VXIplug&play Driver
System Requirements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-3
Installing VXIplug&play Driver . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-4
Driver Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-5
9. Executing Sample Programs
Vth and Capacitance Measurement Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-3
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-3
Setting up the Measurement Environment . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-7
Executing the Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-9
Modifying the Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-11
HCI Measurement Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-17
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-17
Adding the Bias Source Control Routine . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-23
Setting up the Measurement Environment . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-24
Executing the Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-27
Modifying the Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-35
10. Specifications
11. Error Messages
Agilent E5250A User’s Guide, Edition 9 Contents - 5
Contents
12. SCPI Command Summary
Contents - 6 Agilent E5250A User’s Guide, Edition 9
1 Introduction
Introduction
This chapter gives an overview of Agilent E5250A, E5252A, and E5255A.
• “Agilent E5250A Product Description”
• “Agilent E5252A Product Description”
• “Agilent E5255A Product Description”
• “Options and Accessories”
1-2 Agilent E5250A User’s Guide, Edition 9
Agilent E5250A Product Description
Agilent E5250A Low Leakage Switch Mainframe is a computer-controlled
switching matrix mainframe designed for semiconductor dc characteristics
measurement applications. The E5250A has four slots for installing the modules
(plug-in cards) listed in Table 1-1.
These cards can be used in various switching matrix configurations in the E5250A.
For example, using four E5252As, you can configure a maximum 10-input
48-output switching matrix, or using four E5255As, you can configure a maximum
2-input × 96-output multiplexer.
Table 1-1 Available Plug-in Cards for E5250A
Model No. Description
E5252A 10×12 Matrix Switch
E5255A 24 (8×3) Channel Multiplexer
Introduction
Agilent E5250A Product Description
Figure 1-1 E5250A Front Panel
Agilent E5250A User’s Guide, Edition 9 1-3
Introduction
Agilent E5250A Product Description
Front Panel Tour
The E5250A has 2 hard keys and 4 LED indicators on the front panel as shown in
Figure 1-1.
LINE key Used to turn the E5250A on or off.
Line LED Turns on when the E5250A is turned on.
Local/Self Test key If "Remote" LED is on, pressing this key releases the
E5250A from remote GPIB control by an external controller.
If "Remote" LED is off, pressing this key executes the Relay
Test. Before pressing this key, make sure the Relay Test
Adapter is connected. For details of Relay Test, refer to
Chapter 3. During Relay Test execution, the LED in this key
is ON.
Remote LED Turns on when the E5250A is in the GPIB remote status.
System Fail LED Turns on if system error occurs in the E5250A. Contact you r
nearest Agilent Technologies Service Center.
Fail LED Tu rns on if the E525 0A fails Self-test (in cluding Relay Test).
If this LED turns on after executing Relay Test, a plug-in
card may be defective. And if this LED turns on after turning
the E5250A on again, the E5250A is defective. If so, contact
your nearest Agilent Technologies Service Center.
Rear Panel Tour
Rear panel of the E5250A is shown in Figure 1-2. The E5250A has 4 slots for
installing plug-in cards, and 10 input connectors for connecting measur ement cables
from instruments.
SMU INPUT SMU INPUT connectors are for semiconductor dc
characteristics measurements.
The E5250A has six SMU INPUT ports , which are tri axial type
connectors. The connectors can also be used for a maximum
three Kelvin connection inputs by coupling two ports as
follows:
• SMU INPUT 1 and 2
• SMU INPUT 3 and 4
• SMU INPUT 5 and 6
1-4 Agilent E5250A User’s Guide, Edition 9
Introduction
Agilent E5250A Product Description
AUX INPUT AUX INPUT connector s are for C-V measurements, pulse
input, and so on.
The E5250A has 4 AUX INPUT ports: HF1, HF2, CV1, CV2.
These are BNC type connectors.
The AUX INPUT connectors are used only with the E5252A
and are not used with the E5255A.
CAUTION The maximum measurement voltage that can be applied to any input terminal is
±200 Vdc. The maximum measurement current is 1 Adc at ±200 Vdc. The
maximum voltage that can be applied between input terminals is 300 Vdc. Do not
apply an input signal over these limits to the E5250A inputs. If you do, the E5250A
will be damaged.
If you use a bias source that has current limit capability, set the bias source current
limit to less than 1 Adc.
Figure 1-2 E5250A Rear Panel
Agilent E5250A User’s Guide, Edition 9 1-5
Introduction
Agilent E5252A Product Description
Agilent E5252A Product Description
The E5252A 10×12 Matrix Switch is a 10-input to 12-output switching matrix card
for the E5250A. The E5252A is designed for semiconductor dc parametric
measurement applications that need to switch some instruments connected to
Device Under Test (DUT), or need to scan instrument input/output for many DUTs,
automatically.
The E5250A can be installed w ith maximum f our E525 2As. And the in put termin als
of the E5252As are connected together inside the E5250A. So, the E5250A can
configure a 10×24 matrix (two E5252As), 10×36 matrix (three E5252As), and
10×48 matrix (four E5252As). The E5252A block diagram and output connectors
are shown in Figure 1-3 and Figure 1-4.
Figure 1-3 E5252A Block Diagram
1-6 Agilent E5250A User’s Guide, Edition 9
Introduction
Agilent E5252A Product Description
Input Ports The E5252A has 10 input ports via the E5250A.
Input paths for SMU1 and SMU2 are designed for low current
measurement.
There are actually only six input paths, so two of the input paths
are shared by three ports each as follows:
• SMU5, HF1, and CV1 ports share same input path
• SMU6, HF2, and CV2 ports share same input path
So, for these two input paths, you can only use one input po rt at
a time. For example, you cannot use HF1 and CV1 input ports
at the same time.
Output Ports The E5252A has 12 output ports. Two ports can be coupled for
Kelvin connection out put fo r a maxi mum o f six Kelv in out puts:
• OUTPUT1 and OUTPUT2
• OUTPUT3 and OUTPUT4
• OUTPUT5 and OUTPUT6
• OUTPUT7 and OUTPUT8
• OUTPUT9 and OUTPUT10
• OUTPUT11 and OUTPU T12
The output ports are triaxial connectors.
Figure 1-4 E5252A Output Ports
WARNING Do not touch the force and guard terminals of the output connectors while the
E5250A is turned on. Dangerous voltages up to the maximum input voltage
may be present at the output connectors.
Agilent E5250A User’s Guide, Edition 9 1-7
Introduction
Agilent E5255A Product Description
Agilent E5255A Product Description
The E5255A 24 (8×3) Channel Multiplexer is a 2-input to 24-output multiplexer
card for the E5250A. The E5 255A cons ists of 3 blocks ( three 2×8 m ultiplexers). So,
one E5255A can be configured as a 2×8 multiplexer, 2×16 multiplexer, or 2×24
multiplexer. "2-input" means one BIAS input and one IV input.
The E5255A is designed for semiconductor device reliability testing which needs to
automatically scan instrument input/output for many DUTs.
A maximum of four E5255As can be installed in the E5250A, which can use the
multiplexers in several configurations. For example, the E5250A can configure
twelve 8-output multiplexers, six 16-output multiplexers, four 24-output
multiplexers, three 32-output multiplexers, two 48-output multiplexers, or one
96-output multiplexer.
The E5255A block diagram is shown in Figure 1-5.
BIAS Input The BIAS INPUT ports are used to apply ac or dc bias to DUT.
BIAS INPUT ports are BNC connectors. Each BIAS INPUT
port is assigned to a 2×8 multiplexer block as shown in Table
1-2. And you can make internal connections to connect a BIAS
INPUT port to multiple blocks. Refer to Chapter 2.
IV Input IV input is used for measuring/forcing dc current/voltage. You
can connect the IV input to desired SMU INPUT connector
(SMU1 to SMU6) of the E5250A by making an internal
connection. Refer to Chapter 2. The E5250A AUX INPUT
connectors are not used with the E5255A.
OUTPUT
Connectors The E5255A has three 8-channel coaxial output connectors as
shown in Figure 1-6. Each output con nector is assigned to a 2×8
multiplexer as shown in Table 1-2.
1-8 Agilent E5250A User’s Guide, Edition 9
Agilent E5255A Product Description
Resistors Resistors connected between BIAS path and IV path are for
protecting DUT from electrical damage. When shipped from
factory, 0 Ω resistance is used in the E5255A. You can easily
replace with desired resistors. Refer to Chapter 2. The
following resistors are furnished with the E5255A:
•0 Ω resistors (3 sets with 10 resistors in each set)
• 1.2 kΩ resistors (3 sets with 10 resistors in each set)
•22 kΩ resistors (3 sets with 10 resistors in each set)
If you replace initial 0 Ω resistors with other res istor s, you must
cut the initial resistors. Then, if you need 0 Ω resistors again,
use the ones listed above.
WARNING Be careful about the following when selecting protective resistors:
• If only one E5255A is installed in the mainframe, total power consumption
by resistors must be less than 16W.
• If multiple E5255As are installed in the mainframe, total power
consumption by resistors must b e less than 32W.
Introduction
• Consider the current flows to re sistor when DUT shorts, and make sure the
power consumption by resistor will be within specif ication of resistor.
Do not use resisto rs th at hav e specifications inadequate for your
applications, which will result in resistors heating up, burning, or s moking.
Be careful about the heating of the rear panel of mainframe or plug-in card,
which may be heated by resistors, even if you follow this warning.
Agilent E5250A User’s Guide, Edition 9 1-9
BIAS Input 1
Output
Resistor
IV Input 1
BLOCK 1
1 2 34 56 7 8
BIAS Input 3
Output
Resistor
IV Input 3
BLOCK 3
17 18 19 20 21 22 23 24
BIAS Input 2
Output
Resistor
IV Input 2
BLOCK 2
9 10111213141516
Introduction
Agilent E5255A Product Description
Figure 1-5 E5255A Block Diagram
1-10 Agilent E5250A User’s Guide, Edition 9
Table 1-2 E5255A Input/Output Connectors
Introduction
Agilent E5255A Product Description
2×8 multiplexer
Block No.
Block1 BIAS1 (51) Output 1 to 8 Left
Block2 BIAS2 (52) Output 9 to 16 Center
Block3 BIAS3 (53) Output 17 to 24 Right
Figure 1-6 E5255A BIAS INPUT Connectors and OUTPUT Connectors
WARNING Do not touch the force and guard terminals of the OUTPUT connectors while
the E5250A is turned on. Danger ous vol tages up t o the maximum input vol tage
may be present at the OUTPUT connectors.
CAUTION The maximum voltage that can be applied to any input terminal is ±200 Vdc. The
maximum current is 1 Adc at ±200 Vdc. The maximum voltage that can be applied
between input terminals is 300 Vdc. Do not apply an input signal over these limits to
the E5255A inputs. If you do, the E5255A will be damaged.
BIAS INPUT
(Port No.)
Output Port No.
OUTPUT
Connector
(Location)
If you use a bias source that has current limit capability, set the bias source current
limit to less than 1 Adc.
Agilent E5250A User’s Guide, Edition 9 1-11
Introduction
Options and Accessories
Options and Accessories
This section lists the options and accessories available for the E5250A.
Table 1-3 lists the options available for the E5250A.
Table 1-3 Options
Model
Number
E5250A Low Leakage Switch Mainframe
Option Ite m Description
E5250A-301 Relay Test Adapter
E5250A-A6J ANSI Z540 compliant calibration
E5250A-UK6 Commercial cal. certificate w/ test data
1-12 Agilent E5250A User’s Guide, Edition 9
Table 1-4 lists accessories furnished with the E5250A, E5252A, and E5255A.
Table 1-4 Furnished Accessories
Introduction
Options and Ac cessories
Model
Number
Part Number Description Qty.
E5250A E5250-90000 Agilent E5250A User's Guide 1
E5250-17001
E5250A VXI Plug&Play Driver Disk
a
E5250-17003 Agilent E525 0A Progr am Disk. See next
page. (LIF formatted, 3.5in diskette)
04155-60007 Module Extractor 1
8710-2151 Wrench (for removing plug-in card) 1
− Power Cable 1
E5252A E5252-90000 Agilent E5252A Installat i on Gui de 1
8710-2151 Wrench (for removing plug-in card) 1
E5255A E5255-90000 Agilent E5255A Installat i on Gui de 1
1250-0929 BNC Short Cap 3
E5255-65000 BIAS Input Modification Kit
(BNC Open Cap × 2, wire × 2)
E5255-65001 0 Ω Resistor Set (10 resistors) 3
1
1
1
E5255-65 002 1.2 kΩ Resistor Set (10 re si stors) 3
E5255-65 003 22 kΩ Resistor Set (10 resistors) 3
8710-2151 Wrench (for removing plug-in card) 1
a. The Agilent E5250A VXIplug&play driver supports Windows XP Pro-
fessional, Wi ndows 2000, Windows NT 4.0, Windows 98, and W i ndows
95.
Agilent E5250A User’s Guide, Edition 9 1-13
Introduction
Options and Accessories
Contents of the E5250A Program Disk:
Virtual Front
Panel Utility Interactive control program for the E5250A. Runs on Agilent
4155/4156's built-in IBASIC controller. Refer to Chapter 5.
VFP Data Upload
Library Subprogram library used for upl oading the E5250A con trol data
(made by Vi rtual Front Panel Utility) to your program. Runs on
HP BASIC. Refer to Chapter 6.
Capacitance
Compensation
Routine Subprogram to compensate for capacitance error caused by the
E5250A and E5252A. Ru ns on H P BAS IC . This subprogram is
used to compensate the capacitance data measured by Agilent
4284A Precision LCR Meter. Refer to Chapter 6.
Sample Programs Three sample programs: one for Vth and C measurement using
the E5252A, and two for HCI test and analysis using the
E5255A. Runs on HP BASIC. Refer to Chapter 9.
Self-test Utility Self-test and relay test program for the E5250A. Runs on the
4155/4156's built-in IBASIC controller. Refer to Chapter 3.
1-14 Agilent E5250A User’s Guide, Edition 9
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