Trebor Quantum User Manual
Phone: 800-669-1303 or 801-561-0303
Fax: 801-255-2312
e-mail: treborservice@idexcorp.com
QUANTUM
DI WATER HEATER
Operation / Maintenance
Manual
SERIAL NUMBER:
PATENTS: U.S. 5971402, U.S. 6433319, U.S. 6479094B2, U.S. 6544583B2, 03/11/11 – M3QTM-A
U.S. 6580061B2, U.S. 6663914, U.S 6674053B2;
ADDITIONAL PATENTS PENDING
CONTENTS
1 INTRODUCTION ........................................................................................................................................3
2 SAFETY ......................................................................................................................................................6
2.1 SAFETY MESSAGE CONVENTIONS ............................................................................................6
2.1.a Danger ...........................................................................................................................6
2.1.b Warning ..........................................................................................................................6
2.1.c Caution ...........................................................................................................................7
2.2 EQUIPMENT SAFETY ...................................................................................................................7
2.3 EMERGENCY OFF (EMO) .............................................................................................................7
2.4 PROCESS INTERLOCKS ..............................................................................................................8
2.4.a Low Pressure Switch Interlock ........................................................................................8
2.4.b Liquid Level Sensor Interlock ..........................................................................................9
2.4.c Element Over Temperature Protection ...........................................................................9
2.4.d Leak Sensor ...................................................................................................................9
2.4.e Overpressure Burst Fitting ..............................................................................................9
2.5 LOCKOUT / TAGOUT .................................................................................................................... 9
2.5.a Preliminary .....................................................................................................................9
2.5.b Definitions .................................................................................................................... 10
2.5.c Machine Shutdown with door closed ............................................................................. 11
2.5.d Machine Start-Up with door closed ............................................................................... 11
2.5.e Machine Shutdown with door open ................................ ............................................... 11
2.5.f Machine Start-Up with door open .................................................................................. 12
2.6 SEISMIC PROTECTION .............................................................................................................. 12
3 INSTALLATION ........................................................................................................................................ 13
3.1 UNPACKING ................................................................ ................................................................ 13
3.2 LOCATION ................................................................................................................................... 13
3.3 HOOK-UP .................................................................................................................................... 13
3.3.a Ethernet Communication .............................................................................................. 15
3.3.b Changing Heater IP Address ........................................................................................ 16
4 OPERATION ............................................................................................................................................. 17
4.1 GENERAL .................................................................................................................................... 17
4.2 DIAGNOSTIC DISPLAY ............................................................................................................... 17
4.2.a Main Page .................................................................................................................... 17
4.2.b Alarm Status Page ....................................................................................................... 18
4.2.c Module Status Page ..................................................................................................... 20
4.2.d Process Plot Page ........................................................................................................ 20
4.2.e Configuration Page ....................................................................................................... 21
4.2.f Log Reports .................................................................................................................. 23
4.2.g Security Status Page .................................................................................................... 26
4.3 REMOTE OPERATION OVER A NETWORK .............................................................................. 28
4.3.a Ethernet Interface ......................................................................................................... 28
4.3.b Modbus Protocols ......................................................................................................... 28
4.3.c Modbus/TCP ................................................................................................................ 29
4.3.d Modbus Communication ............................................................................................... 29
5 START-UP ................................................................................................................................................ 31
5.1 PRE-START INSPECTION .......................................................................................................... 31
5.1.a Verify Shipping Condition ............................................................................................. 31
5.1.b Hazardous Power Terminals ......................................................................................... 31
5.1.c Electrical Inspection ..................................................................................................... 31
5.1.d Plumbing Leak Check ................................................................................................... 31
5.2 SYSTEM ON ................................................................................................................................ 32
5.3 HEATER MODULE POWER ................................ ........................................................................ 32
5.4 PROCESS ALARMS .................................................................................................................... 32
6 SHUT DOWN............................................................................................................................................ 33
7 MAINTENANCE ........................................................................................................................................ 34
7.1 REPAIR INSTRUCTIONS ............................................................................................................ 34
7.1.a Heater Element Check ................................................................................................. 34
7.1.b Heater Replacement ..................................................................................................... 34
7.1.c Liquid Level and Leak Sensor Calibration ..................................................................... 36
7.1.d Fuse Replacement ....................................................................................................... 36
7.1.e Draining the System ..................................................................................................... 36
7.1.f Leaks............................................................................................................................ 37
7.1.g Overpressure Relief Replacement ................................................................................ 37
7.2 PREVENTIVE MAINTENANCE SCHEDULE................................................................................ 38
8 TROUBLESHOOTING .............................................................................................................................. 40
9 WARRANTY ............................................................................................................................................. 41
See Appendix for specific system requirements.
QUANTUM DI HEATER OPERATION / MAINTENANCE MANUAL CONTENTS
1 INTRODUCTION
QUANTUM DI WATER HEATER
TREBOR’s Quantum deionized water heater will meet your most stringent
application requirements for process cleanliness and temperature control.
Our unique heater design virtually eliminates the potential for metal
contamination due to potentially exposed metal heating elements in
immersion style heaters, while process control and reliability are designed
to outperform and outlast other available quartz heating systems.
Trebor’s DI water heater uses a revolutionary heating technology to
provide exceptional process purity and control. Heat is generated using
resistive heating elements conducted to the fluid through quartz tubes
using convective heat transfer. This conductive / convective heating
method allows the heating element to operate at a much cooler
temperature than IR heating systems and provides the basis for a
responsive heating control system.
The Quantum heater modules have smooth surfaces with minimal cracks
and crevices, reducing particle traps. Furthermore, no pipe threads or
elastomeric O-rings are used. With the exception of the exposed tip of
the titanium temperature sensor (included with the fast response option),
the DI water is exposed only semiconductor grade quartz, PTFE, and
PFA wetted surfaces.
Trebor’s patented heating module technology is constructed to provide
excellent process control by minimizing hold-up volume and thermal heat
capacitance while maximizing the heat transfer. While heating, the
system can ramp to a process temperature in a “no flow” condition. The
ability to withstand these extreme transient conditions allows the heater to
operate without the need of flow monitors or flow switches to protect the
heaters. This also reduces the consumption of DI water by minimizing
temperature transition time and bypass to drain requirements.
Many product safety features have been incorporated into the Quantum
heater. Each system has a liquid level sensor, leak sensor, grounded
heater modules, ground fault protection, and redundant control system
interlocks. An electro-mechanical contactor disengages power to the
heaters when a fault condition occurs.
This equipment is built and certified to semiconductor manufacturing
industry requirements of SEMI S2-0703. Please contact Trebor
regarding any questions.
Conformity of the equipment with the above guidelines is attested by the
TUV certification mark.
This equipment complies with the requirements of the EU guidelines:
QUANTUM DI HEATER OPERATION / MAINTENANCE MANUAL PAGE 3
Figure 1-1: 89/392/EEC “European Machinery Directive”
89/336/EEC “European EMC Directive”
Conformity of the equipment with the above guidelines is attested by the
CE mark.
This equipment also complies with the requirements of the “Management
Methods for Controlling Pollution of Electronics Information Products”,
known as “China RoHS”.
Figure 1-2: China RoHS - Electronic information product pollution
control symbol
Trebor will use an EFUP (Environmental Friendly Use Period) of 25
years, which is consistent with the industry mean. The EFUP label is
located next to the main system nameplate and a declaration table is
included below.
PAGE 4 QUANTUM DI HEATER OPERATION / MAINTENANCE MANUAL
Part Name
[部件名称]
Table of Hazardous Substances and Elements
[产品中有毒有害物质或元素的名称及含量]
Lead
[铅]
(Pb)
Mercury
[汞]
(Hg)
Cadmium
[镉]
(Cd)
Hexavalent
Chromium
[六价铬]
(Cr (VI))
Polybrominated
biphenyl
[多溴联苯]
(PBB)
Polybrominated
diphenyl ether
[多溴二苯醚]
(PBDE)
QA1V208P12-AA
X
QA1V380P10-AB
X
QA1V415P10-AB
X
QA1V480P10-AD
X
QA1V480P12-AB
X
O = This substance is present at a concentration below the limit in SJ/T 11363-2006 in all of the homogeneous materials
for this part, and it has not been intentionally added to any metallic coating. (See SJ/T 11363-2006 for definition of
homogeneous materials)
X = This substance is present at a concentration above the limit in SJ/T 11363-2006, in at least one of the homogenous
materials for this part, or it has been intentionally added to a metallic coating. (See SJ/T 11363-2006 for definition of
homogeneous materials)
Notes: concentration limits of 1000 ppm (0.1% by weight) for lead, mercury, hexavalent chromium, polybrominated
biphenyls (PBB) and polybrominated diphenyls ether (PBDE), or 100 ppm (0.01% by weight) for cadmium.
Please refer to AeA’s website for an English translation of SJ/T 11363 -2006 (or the latest revision of this document):
http://www.aeanet.org/governmentaffairs/gajl_MCV_SJT11363_2006ENG.asp
Table [表]
QUANTUM DI HEATER OPERATION / MAINTENANCE MANUAL PAGE 5
2 SAFETY
This section describes information that is important for safe equipment
operation. Included is a listing of message conventions used in this
manual, as well as equipment safety interlocks, push buttons, and labels.
The equipment described in this manual uses hazardous voltage
electricity that can be dangerous. Only personnel trained in the
procedures and safety messages outlined in this manual should install (if
applicable), operate, or maintain this equipment. Read and understand
this manual before installation or operation of the system. Follow all
recommended practices and procedures that apply to your actions and
conduct. All safeguard devices must be in place when equipment is in
operation. Operators, set-up operators, helpers or installation personnel
should not alter, remove or disable safety equipment. When using this
equipment, be sure to follow the safety procedures outlined by your
facility. These safety procedures should cover the two primary types of
hazard training: (1) equipment hazards and (2) facility-related hazards.
2.1 SAFETY MESSAGE CONVENTIONS
Safety messages contained in this manual; Dangers, Warnings, and
Cautions, are highlighted for quick identification.
2.1.a Danger
A Danger message indicates an imminently hazardous situation that, if
not avoided, will result in death or serious injury. Messages identified by
the word Danger are used sparingly and only for those situations
presenting the most serious hazards.
2.1.b Warning
A Warning message indicates a potentially hazardous situation that, if not
avoided, could result in serious injury. Following is a typical example of a
Warning message as it could appear:
PAGE 6 QUANTUM DI HEATER OPERATION / MAINTENANCE MANUAL
Caution
Hot Surface
Do not touch. Can cause
skin burns upon contact.
Disconnect and lockout
power and allow surface to
cool before servicing.
2.1.c Caution
A Caution message indicates a potentially hazardous situation, which, if
not avoided, could result in minor or moderate injury. It may also be used
to alert against unsafe practices. Following is a typical example of a
Caution message as it could appear:
2.2 EQUIPMENT SAFETY
The rest of this section describes equipment safety features:
Emergency Off Push button (EMO)
Process Interlocks
Main Power Disconnect Switch
Lockout/Tagout Information
Equipment Safety Labels
2.3 EMERGENCY OFF (EMO)
The EMERGENCY OFF button (EMO) is located on the front of the door.
When the EMO circuit is activated by pushing the button in, the
equipment will be placed into a safe shutdown condition. The EMO will
de-energize the heaters and process interlock devices. Other devices on
the panel remain energized and hazardous voltages will be present on
the power supply and power supply fuses, sub panel circuit breakers and
contactors. Use the Main Power Disconnect Switch to remove power
from the panel.
QUANTUM DI HEATER OPERATION / MAINTENANCE MANUAL PAGE 7
On power up or after the EMO has been pushed, the heater must be
reset by pressing the blue RESET button to reactivate the controls. This
must be done at the machine.
2.4 PROCESS INTERLOCKS
The process fault interlocks are latched into the logic controller (PLC)
memory. When a fault occurs, the user interface will display the alarm
condition and the horn will sound. Pressing the RESET button will
silence the audible horn. The system will retain the fault until it is cleared.
Pressing the RESET button may restart the heater. If the indicator LED’s
remain illuminated then one or more faults are still active. Refer to
Section 8, Troubleshooting.
Figure 2-1
CAUTION: The interlock circuit does not remove hazardous
voltage from the circuit breakers, contactor, and the control transformer.
Only authorized, qualified, trained personnel should service this
equipment.
2.4.a Low Pressure Switch Interlock
The pressure switch will disengage power if system inlet water pressure
drops below 15 psig (103 kPa). The heater will come back online if the
pressure recovers within a 30 second time period. This prevents
nuisance trips due to transient conditions in the DI water supply while still
protecting the heater. However, erratic process temperature control may
result if heater power is disengaged during the pressure transient.
PAGE 8 QUANTUM DI HEATER OPERATION / MAINTENANCE MANUAL
2.4.b Liquid Level Sensor Interlock
The Liquid Level Sensors will disengage power to the system if the
heater modules are not full of water or if boiling in the heating module
occurs. The heater will reengage if fluid is present within a 30 second
time period. This prevents nuisance trips due to transient conditions in
the DI water supply while still protecting the heater during startup. It is
critical that these sensors operate properly. Do not tamper with the
sensors. Damage to the system can result if the sensors are altered or
overridden.
NOTE: On the dual output option, this interlock will protect the heaters it
monitors (i.e. sensor 1 will protect the modules supplying output 1).
2.4.c Element Ove r Temperature Protection
The temperature limit controller monitors a thermocouple attached to the
heater element. In the event that the element temperature exceeds the
normal operating temperature, the system will immediately disengage
power and alarm. If this occurs, check element continuity before
continuing normal operation. See Section 7.1.a.
2.4.d Leak Sensor
The Leak Sensor will disable heater power immediately when water is
detected in the leak tray. Fix any leaks and dry the leak sensor and leak
tray prior to turning power on to the system.
2.4.e Overpressure Burst Fitting
The overpressure burst fitting (“Relief Drain”) is connected in-line with the
cold DI inlet port to provide a mechanical safeguard against possible
overpressure damage. Do not operate the heater above 414 kPa (60
psig).
If the overpressure relief device opens, the low-pressure sensor will
alarm. A periodic visual inspection of the fitting is recommended. Refer
to Section 7.1.g on replacing burst fitting.
2.5 LOCKOUT / TAGOUT
2.5.a Preliminary
Before installation or servicing the DI water heater, the facility’s power
source to the heater must be de-energized to prevent serious injury to
personnel and equipment. An authorized employee representing the
facility installing the DI water heater must follow approved company
guidelines and lockout or use suitable means to prevent re-energizing the
electrical system during installation or servicing.
QUANTUM DI HEATER OPERATION / MAINTENANCE MANUAL PAGE 9
Energy Type
Electrical
Hazard:
Electrocution, electrical burns, and shock
Magnitude:
480 VAC or 415 VAC or 380 VAC or 208 VAC
See system label for exact voltage.
Control Method:
Main Power
Shutdown Procedure
Switch off circuit breaker on front of system.
2.5.b Definitions
Lockout: the placement of a lockout device on an energy isolating
device, in accordance with established company procedures, ensures
that the energy isolating device and the equipment being controlled
cannot be operated until the lockout device is removed.
Tagout: a prominent warning device such as a tag and a means of
attachment, which can be securely fastened to an energy isolating device
in accordance with established company procedure, ensures that the
energy isolated device and the equipment being controlled may not be reenergized or operated until the tagout device is removed.
This table lists the Lockout/Tagout information for the system.
PAGE 10 QUANTUM DI HEATER OPERATION / MAINTENANCE MANUAL
Figure 2-2: Lockout/Tagout
2.5.c Machine Shutdown with door closed
Perform the following sequence of events in the order listed for electrical
energy isolation of the tool:
1. Notify personnel in the area that you are going to shut down the
equipment.
2. Shutdown the system in an orderly fashion.
3. Locate the main incoming power disconnect switch-actuating handle.
4. Move the actuating handle to the "OFF" (down) position.
5. Apply the locking energy isolation device (lock) through the hole in the
actuating handle and secure the lock.
6. Verify that the tool has been isolated and de-energized by attempting
to turn the main power disconnect back to the “ON” position and/or by
pressing the machine start button. The machine power must not be
reapplied and/or the machine must not start.
2.5.d Machine Start-Up with door closed
Perform the following sequence of events in the order listed for electrical
re-energization of the tool:
1. Ensure that all hand tools are removed from the equipment and that it
is ready for start-up.
2. Notify personnel in the area that you are going to start-up the
equipment.
3. Open the lock and remove the locking energy isolation device (lock)
from the hole in the actuating handle of the Main Disconnect Switch.
4. Move the actuating handle to the "ON" (up) position.
5. Press the machine start button. The machine should start.
2.5.e Machine Shutdown with door open
Perform the following sequence of events in the order listed for electrical
energy isolation of the tool:
1. Notify personnel in the area that you are going to shut down the
equipment.
2. Shutdown the system in an orderly fashion.
3. Locate the main incoming power disconnect switch-actuating handle.
4. Rotate the rotary disconnect shaft to the "OFF" of “0” (down) position.
5. Insert and rotate the key in the rotary disconnect lock (top left of
rotary disconnect device). Remove the key.
6. Verify that the Tool has been isolated and de-energized by attempting
to turn the rotary disconnect shaft back to the “ON” or “1” position
and/or by pressing the machine start button. The machine power
must not be reapplied and/or the Machine must not start.
QUANTUM DI HEATER OPERATION / MAINTENANCE MANUAL PAGE 11
2.5.f Machine Start-Up with door open
Perform the following sequence of events in the order listed for electrical
re-energization of the tool:
1. Ensure that all hand tools are removed from the equipment and that it
is ready for start-up.
2. Notify personnel in the area that you are going to start-up the
equipment.
3. Insert and rotate the key in the rotary disconnect lock (top left of
rotary disconnect device). Remove the key.
4. Move the rotary disconnect shaft to the "ON" of “1” (up) position.
5. Press the machine start button. The machine should start.
2.6 SEISMIC PROTECTION
It is the user’s responsibility to adequately secure and anchor the
equipment to comply with local regulatory agency seismic requirements.
Mechanical anchors are provided using seismic brackets attached to the
bottom of the cabinet enclosure. See Facility Layout in Appendix for
bracket location.
PAGE 12 QUANTUM DI HEATER OPERATION / MAINTENANCE MANUAL
3 INSTALLATION
3.1 UNPACKING
Remove heater system from crate and inspect heater cabinet for any
signs of damage (dented panels, paint scratches, etc.). Shock indicators
on the heater cabinet should be checked for rough handling during
shipment. Any damage to the system should be reported to the carrier
immediately.
Front door keys are not shipped with the system. Keys are available
upon request. (Key, Handle, 'L' LOC, [PROLINE] #98003360/B).
CAUTION: Heavy Object. When lifting or moving the system,
follow safe heavy object handling methods to prevent injury.
Be careful to not damage the drain fitting located under the heater
cabinet when using a dolly or forklift.
3.2 LOCATION
Locate the heater near the point-of-use to reduce plumbing heat loss.
Access to the front and rear of the system will be necessary for
maintenance and hook-up.
3.3 HOOK-UP
All utility hook-ups associated with the DI water heater are easily
accessible and are referenced in the Appendix.
After positioning heater at operating location, adjust the four leveling feet
until the heater is level and stable.
Connect the cold DI supply line to the “Cold DI Inlet” connection.
Connect the hot DI process lines to the “Hot DI Outlet” connection.
Use only hot DI compatible plumbing components. They must be
rated at a minimum of 110°C (230°F) and 414kPa (60 psig).
NOTE: It is recommended that the hot water supply line have a bleed, or
purge, at the point-of-use to reduce the possibility of the DI water
becoming stagnated in the heaters when not in use. The amount of this
bleed is best evaluated on a case-by-case basis, taking into account
each user’s criteria and production standards.
QUANTUM DI HEATER OPERATION / MAINTENANCE MANUAL PAGE 13
Loading...