Keyence VK-X100K, VK-X105, VK-X200K, VK-X110, VK-X210 User Manual
96M11880
3D Laser Scanning Microscope
VK-X100K/X105/X110
VK-X200K/X210
User’s Manual
Read this manual before using the system in order to achieve maximum
performance.
Always keep this manual in a safe place for future reference.
Getting Started
1
Set-Up
2
Before Measuring
3
Mounting Optional Devices
4
5
Appendix
Maintenance
Dimensions/Specifications
Introduction
CAUTION
This manual describes the handling, operating procedures and precautions for the “3D Laser Scanning
Microscope VK-X100K/X200K Series.”
Read this manual thoroughly before using the system to get the maximum performance out of the “3D
Laser Scanning Microscope VK-X100K/X200K Series.”
Keep this manual at hand for reference whenever needed.
Symbols
This manual uses the following symbols to show important information at a glance.
Be sure to read this section.
DANGER
WARNING
NOTICE
Important
Reference
It indicates a hazardous situation which, if not avoided, will result in death
or serious injury.
It indicates a hazardous situation which, if not avoided, could result in
death or serious injury.
It indicates a hazardous situation which, if not avoided, could result in
minor or moderate injury.
It indicates a situation which, if not avoided, could result in product
damage as well as property damage.
It indicates cautions and limitations that must be followed during
operation.
Point
It indicates additional information on proper operation.
It indicates tips for better understanding or useful information.
It indicates reference pages in this manual or other manual.
Precautions
• Reprinting any part or all of this manual without permission is prohibited.
• Please note that the content of this manual is subject to change without notice for the purpose of
improvement.
• Should you find any problem with the content of this manual, such as an unclear point, mistake, or erro-
neous omission, contact your nearest KEYENCE office.
• If there are missing or misplaced pages, we will provide a new copy of this manual.
The company names and product names used in this manual are registered trademarks or trademarks of
their respective companies.
Safety Information for VK-X100K/VK-X200K Series
WARNING
CAUTION
NOTICE
To prevent damage and to correctly use the “3D Laser Scanning Microscope VK-X100K/X200K Series”
(VK-X100K/X200K Series), follow the precautions below.
Precautions for use
• Do not use this product for the purpose to protect a human body or a part of human body.
• This product is not intended for use as explosion-proof product. Do not use this product
in a hazardous location and/or potentially explosive atmosphere.
• Confirm that the components of our product are working normally before use.
• Considering the possibility of our product failing, use the product after implementing
sufficient safety measures to prevent any damage.
• Do not allow any foreign material to enter inside. It may result in fire, electric shock,
malfunction or accident.
• Never remove the case cover of the VK-X100K/X200K Series. Touching the inside may
result in an electric shock.
• Do not touch the lens revolver while it is moving, doing so risks catching hands or fingers
in the mechanism.
• The VK-X100K/X200K Series is grounded to the case. Make sure that the device is properly
insulated if installed in a high-noise environment or a positive ground situation. Failure to
do so may cause damage or electric shock.
• Please note we cannot guarantee the function and performance of products that are
modified or used outside of the ratings shown in the specifications.
• When our product is used in conjunction with equipment from other companies, the
normal function and sufficient performance may not be attained depending on the
condition of use and the environment. Be sure to make sufficient assessment before such
use.
• As the VK-X100K/X200K series uses precision optics, avoid any vibration or impact. Doing
so may cause damage.
• Make sure that the power of the VK-X100K/X200K Series is turned off before removing/
inserting the power cable, controller cable, or camera cable. Doing so may cause failure.
• Make sure that the lens does not come in contact with the sample. Doing so may cause
damage.
• Do not place objects that weigh more than 5 kg on the X-Y stage. Doing so may cause
damage.
not
• Do
• Do not remove/insert the USB cable while the ACCESS lamp on the control unit is lit. Doing
turn the power off during measurement. Otherwise, some or all of the settings may
be lost.
so may cause damage.
96M11880
1
Safety Information for VK-X100K/VK-X200K Series
Important
CAUTION
NOTICE
CAUTION
NOTICE
Important
• Make sure that the ambient temperature is stable during measurements.
• Wait one hour or more for preheating after turning on the power before taking
measurements.
• When the lens section is dirty, clean it with the lens blower or with a cotton swab
dipped in alcohol.
• Make sure that the device is not subject to vibration during measurement. It is
recommended that an anti-vibration stand be used.
• The measurement unit, the controller cable A/B, and the camera cable are adjusted
together as a set. Make sure that all of them bear the same serial number.
Precautions for abnormalities
Turn off the power immediately in the following cases. Using the unit in abnormal conditions
could cause fire, electric shock, or accident. Contact your nearest KEYENCE office for repair.
• If water or foreign material enters inside the VK-X100K/X200K Series.
• If the unit is dropped or the case is damaged.
• If the unit emits smoke or odor.
Back up all data saved on the control PC before sending it in for repairs. The repair procedure
carries a risk of data loss.
Additionally, regular periodic backups are recommended.
Precautions for installation
Install the VK-X100K/X200K series so that it is level. There is a risk of the falling unit causing
injuries.
• Do not obstruct the ventilation hole or the ventilation fan of the control unit. Internal
temperature increases may result in damage.
Avoid installation in the following locations. Doing so may cause failure.
• Locations where the device will be subject to direct vibrations
• Locations where the ambient temperature drops below 15°C or exceeds 28°C
• Locations where the ambient humidity drops below 35% RH or exceeds 65% RH (no
condensation)
• Locations where the temperature changes rapidly
• Locations where the device will be exposed to a direct breeze from an air conditioner
• Locations where there are corrosive gases or volatile inflammable materials
• Locations with large amounts of airborne dust, salt, iron or greasy fumes
• Locations with a risk of exposure to airborne water, oil or chemical droplets
• Locations where a strong magnetic or electric field is generated
• Locations where the voltage varies greatly
• It is recommended that the device be installed on a commercially available anti-
vibration stand.
2
VK-X100K/X200K User’s Manual
Precautions for the power supply
WARNING
CAUTION
The VK-X100K/VK-X200K Series is Class I equipment. When installing this device, connect
the protective grounding terminal of the power supply cord set to the protective grounding
conductor of the installation place.
Otherwise, it may cause electric shock or product damage.
• Do not bend forcefully or put any heavy objects on the power cable. Doing so may lead to
a cable break, resulting in fire or electric shock. Do not use a damaged cable.
• Make sure to use the VK-X100K/X200K Series under proper power supply voltage;
otherwise, an electric shock, fire or product malfunctions may occur.
• The power supply cord set is not provided with the VK-X100K/X200K Series. Use a power
cable that complies with the regulations and standards in the country or the region in
which the VK-X100K/X200K Series are used.
Safety Information for VK-X100K/VK-X200K Series
VK-X100K/X200K User’s Manual
3
Safety Information for VK-X100K/VK-X200K Series
CAUTION
Fixing metal fittings
Precautions for transportation
• When transporting the device, carry it by holding the indentation in the measurement unit
or the handle of the pedestal. Carrying the device by the measurement portion may
damage it. There is also a chance of injury or damage if the device falls.
• Carry the measurement portion of the device by the recessed portions on the front and
back of the unit.
• Be sure to fix the X-Y stage with a fixture before transportation. Be sure to also lock the Z
stage using the focusing handle.
4
VK-X100K/X200K User’s Manual
• As the VK-X100K/X200K series uses precision optics, avoid any vibration or impact. Doing
NOTICE
Important
NOTICE
NOTICE
so may cause damage.
• Be sure to remove the objective lenses from the revolver when transporting. Doing so may
cause damage.
• Be sure to use packaging materials specified by KEYENCE for transportation. Doing so
may cause damage.
• The VK-X100K/X200K Series is a super precision optical instrument. Sudden changes in
temperature may result in damage, including condensation and misalignment of the
optical axis. Leave the device at room temperature (between 15°C and 28°C) for 24 hours
after unpacking.
• The removed fixing metal fittings and the lens cases are required when the VK-X100K/
X200K Series are transported. Be sure to keep them in a secure location.
Precautions for storage
Safety Information for VK-X100K/VK-X200K Series
• Store the device in its packaging if it will not be used for a long period of time. Doing so
may cause failure.
Avoid storing in the following locations. Doing so may cause failure.
• Locations where the device will be subject to direct vibrations
• Locations where the ambient temperature drops below 0°C or exceeds +40°C
• Locations where the ambient humidity drops below 35% RH or exceeds 65% RH (no
condensation)
• Locations where the temperature changes rapidly
• Locations where there are corrosive gases or volatile inflammable materials
• Locations with large amounts of airborne dust, salt, iron or greasy fumes
• Locations with a risk of exposure to airborne water, oil or chemical droplets
• Locations where a strong magnetic or electric field is generated
• Locations where the device may be exposed to direct sunlight, wind, or rain
• Locations that are unstable or where the device may fall
Other precautions
When VK-X100K/X105/X110/X200K/X210 gets dirty, clean with a dry cloth.
VK-X100K/X200K User’s Manual
5
Safety Precautions on Laser Products
WARNING
WARNING
Use of controls, adjustments or procedures other than those specified herein may result in
hazardous laser radiation exposure.
The VK-X100K/X200K Series employ a semiconductor laser as the light source.
Model VK-X100K/X105/X110 VK-X200K/X210
Wavelength 658 nm (Red laser) 408 nm (Violet laser)
Output 0.95 mW 0.95 mW
Pulse width 1 ns —
Follow the instructions mentioned in this manual. Otherwise, injury to the human body (eyes
and skin) may result.
Precautions on Class 2 Laser Products
• Do not disassemble this product. Laser emission from this product is not automatically
stopped when it is disassembled.
• Do not stare into the direct or specularly reflected beam.
• Do not direct the beam at people or into areas where people might be present.
• Be careful of the path of the laser beam. If there is a possibility that the operator may be
exposed to the specular or diffuse reflections, block the beam by installing a protective
enclosure.
• Install this product so that the path of the laser beam is not as the same height as that of
human eye.
A Warning label is attached to the microscope unit as shown below.
VK-X105/X110
6
VK-X100K/X200K User’s Manual
VK-X210
Laser Aperture
Warning label
Label Location
Safety Precautions on Laser Products
VK-X100K/X200K User’s Manual
7
Precautions on Regulations and Standards
Wind so that 3 cables are going through
the clamp.
Install so that 1 cable is going through
the clamp.
CE Marking
Keyence Corporation has confirmed that this product complies with the essential requirements of the
applicable EC Directives, based on the following specifications. Be sure to consider the following specifi-
cations when using this product in a Member State of the European Union.
EMC directive (2004/108/EC)
• Applicable Standard EMI: EN61326-1, Class A
EMS: EN61326-1
1 Install the sleeve ferrite clamp ZCAT3035-1330 (TDK) at both ends of the USB cable.
2 Install the sleeve ferrite clamp ZCAT2035-0930A-BK(TDK) at the end of the camera cable (at the
side of the measurement unit).
8
VK-X100K/X200K User’s Manual
Precautions on Regulations and Standards
Remarks:
These specifications do not give any guarantee that the end-product with this product incorporated com-
plies with this essential requirements of EMC Directive. The manufacturer of the end-product is solely
responsible for the compliance on the end-product itself according to EMC Directive.
Low-Voltage directive (2006/95/EC)
• Applicable Standard EN61010-1
EN60825-1 Class 2 laser product
• Overvoltage Category II
• Use this product under pollution degree 2.
• Install this product at an altitude of 2000 m or less.
• Indoor use only.
• This product is designed as a Class I equipment. Be sure to connect the protective earthing terminal on
the AC power cable to the protective earthing conductor in the building installation.
• The AC power inlet falls under a disconnecting device. Install this product to be able to remove the AC
cord set from the AC power inlet in abnormal situations immediately.
CSA Certification
This product complies with the following CSA and UL standards and has been certified by CSA.
• Applicable standard: CAN/CSA C22.2 No. 61010-1
UL61010-1
Be sure to consider the following specifications when using this product as a product certified by CSA.
• Overvoltage category II
• Use this product under pollution degree 2.
• Install this product at an altitude of 2000 m or less.
• Indoor use only.
• This product is designed as a Class I equipment. Be sure to connect the protective earthing terminal on
the AC power cable to the protective earthing conductor in the building installation.
• The AC power inlet falls under a disconnecting device.
Install this product to be able to remove the AC cord set from the AC power inlet in abnormal situations
immediately.
VK-X100K/X200K User’s Manual
9
Precautions on Regulations and Standards
MEMO
10
VK-X100K/X200K User’s Manual
Organization of This Manual
1
2
3
4
5
A
Chapter
1
Getting Started
Chapter
2
Set-Up
Chapter
3
Before Measuring
Chapter
4
Mounting Optional Devices
Chapter
5
Maintenance
Appendix
Dimensions/Specifications
This chapter describes the principles of the VK-X100K/X200K, the contents of the
packaging and the names of each part.
This chapter describes how to assemble the microscope unit and how to connect
each device.
This chapter describes the preparation and basic adjustments to be made before
taking measurements.
This chapter describes the optional devices and how to install them.
This chapter describes the procedure for replacing the lamp and the fuse in the
control unit.
This chapter describes the specifications and dimensions of the device.
VK-X100K/X200K User’s Manual
11
Table of Contents
Safety Information for VK-X100K/VK-X200K Series .............................................................. 1
Safety Precautions on Laser Products ................................................................................. 6
Label Location .................................................................................................................7
Precautions on Regulations and Standards ......................................................................... 8
CE Marking ...................................................................................................................... 8
CSA Certification ............................................................................................................. 9
Organization of This Manual ............................................................................................... 11
Table of Contents ............................................................................................................... 12
Chapter 1 Getting Started
Summary of the VK-X100K/X200K Series ......................................................................... 1-2
Principles of the VK-X100K/X200K Series .................................................................... 1-2
System Configuration ................................................................................................... 1-5
Operating Environment ................................................................................................ 1-6
Unpacking ......................................................................................................................... 1-8
Unpacking the Control Unit and Control PC ................................................................ 1-8
Unpacking the Microscope Unit .................................................................................. 1-8
Checking the Package Contents ....................................................................................... 1-9
Checking the Installation Environment ............................................................................ 1-11
Part Names and Functions .............................................................................................. 1-12
Microscope Unit (Left/Front View) .............................................................................. 1-12
Microscope Unit (Right/Front View) ........................................................................... 1-13
Control Unit (Front View) ............................................................................................ 1-14
Control Unit (Rear View) ............................................................................................. 1-14
Chapter 2 Set-Up
Assembling the Microscope Unit ...................................................................................... 2-2
Unlocking the X-Y Stage Lock ..................................................................................... 2-2
Mounting the Rotating Stage ........................................................................................ 2-2
Mounting Optional Devices .......................................................................................... 2-2
Mounting the Objective Lenses ................................................................................... 2-3
Connections ...................................................................................................................... 2-4
Connection Diagram .................................................................................................... 2-4
Connection Procedure ................................................................................................. 2-6
12
VK-X100K/X200K User’s Manual
Table of Contents
Chapter 3 Before Measuring
Sequence of Preparation before Measuring ..................................................................... 3-2
Startup and Shutdown ....................................................................................................... 3-3
Starting Up the System ................................................................................................ 3-3
Shutting Down the System ........................................................................................... 3-4
Measurement Basics (For Proper Measurement) ............................................................. 3-5
A Variety of the Standard Objective Lens and How to Select One .............................. 3-5
Correction in the Film Thickness Measurement ........................................................... 3-6
Adjusting the Positions of the Laser and the Camera .................................................. 3-7
Adjusting the Measurement Unit ....................................................................................... 3-8
Initializing Lens Position ............................................................................................... 3-8
Adjustment of the Observation Position/Magnification ................................................ 3-9
Adjusting Focus/Brightness ....................................................................................... 3-10
Chapter 4 Mounting Optional Devices
List of Optional Devices .................................................................................................... 4-2
Removing/Mounting the Measurement Unit ...................................................................... 4-4
Removing the Measurement Unit ................................................................................. 4-4
Conditions for Mounting the Measurement Unit ........................................................... 4-5
Mounting the Measurement Unit .................................................................................. 4-6
Mounting the Spacer for the VK-X210 ............................................................................... 4-7
Package List ................................................................................................................. 4-7
How to Use the Spacer ................................................................................................ 4-7
Mounting Spacers ...................................................................................................... 4-10
Mounting the Spacer for the VK-X105/X110 .................................................................... 4-12
Package List ............................................................................................................... 4-12
How to Use the Spacer .............................................................................................. 4-12
Mounting Spacers ...................................................................................................... 4-15
Mounting a 300 mm Wafer X-Y Stage ............................................................................. 4-17
Package List ............................................................................................................... 4-17
Mounting a 300 mm Wafer X-Y Stage ........................................................................ 4-17
Names and Functions of the Components of the 300 mm Wafer X-Y Stage ............. 4-19
Mounting the Stand for VK .............................................................................................. 4-20
Package List ............................................................................................................... 4-20
Mounting the Stand for VK ......................................................................................... 4-21
How to Use the Stand for VK ...................................................................................... 4-22
VK-X100K/X200K User’s Manual
13
Table of Contents
Chapter 5 Maintenance
Replacing the Lamp in the Control Unit ............................................................................ 5-2
Replacing the Fuse ........................................................................................................... 5-4
Appendix
Specifications ....................................................................................................................A-2
Dimensions ........................................................................................................................A-4
VK-X105/X110 .............................................................................................................. A-4
VK-X210 ....................................................................................................................... A-4
VK-X100K/X200K (Control Unit) ...................................................................................A-5
Index ..................................................................................................................................A-6
14
VK-X100K/X200K User’s Manual
1
Chapter
1
Getting Started
This chapter describes the principles of the VK-
X100K/X200K, the contents of the packaging and
the names of each part.
Getting Started
Summary of the VK-X100K/X200K Series ............ Page 1-2
Unpacking ............................................................. Page 1-8
Checking the Package Contents ........................... Page 1-9
Checking the Installation Environment .................Page 1-11
Part Names and Functions .................................. Page 1-12
VK-X100K/X200K User’s Manual
1-1
1
Summary of the VK-X100K/X200K Series
Conventional optics
Laser
Half
Mirror
Photoreceptor
Sample
Confocal laser optics
Laser
Half
Mirror
Photoreceptor
Sample
Pinhole
Laser
Half
Mirror
Photoreceptor
Sample
Laser
Half
Mirror
Photoreceptor
Sample
Pinhole
Conventional optics
Confocal laser optics
This manual gives a summary of the VK-X100K/X200K
Series, which offers both magnified observation and height
measurements.
Getting Started
Principles of the VK-X100K/X200K Series
Confocal laser optics
The VK-X100K/X200K Series is equipped with laser confo-
cal technology that obtains images with a large depth of
field that are in focus across the entire screen and that
detect the finest details in the sample shape data.
In the laser confocal optics, a pinhole in front of the position
where the reflected light from the sample forms an image
(photoreceptor) ensures that no light other than that which
passes through the focal point of the objective lens reaches
the photoreceptor. Use of this type of optics as a sensor
allows for the maximum possible amount of light to reach
the photoreceptor and allows changes in the focal point to
be measured and used as height information. Additionally,
use of this technology in a microscope creates a device
with almost no flare and significantly better contrast than a
standard optical microscope.
The VK-X100K/X200K Series combines this laser confocal
optics with a high-speed X-Y scanner to create a high res-
olution focal image and gather height information (shape
and roughness) from the sample.
When out of focus
While conventional optics allow all of the reflected light into
the photoreceptor, confocal laser optics allow only a frac-
tion.
When in focus
Both conventional optics and confocal laser optics allow all
of the reflected light to enter the photoreceptor.
1-2
VK-X100K/X200K User’s Manual
1
Principles of operation of the VK-X100K/X200K Series
Laser light source
Focusing lens
Pinhole
Photoreceptor
Polarizing
beam splitter
Objective lens
Sample
Half
mirror
Color CCD camera
X-Y Scan
Optics
White light source
Summary of the VK-X100K/X200K Series
Getting Started
The VK-X100K/X200K Series uses a two-way light source
comprised of a laser light source and a white light source.
The two light sources together provide the colors, laser
intensity and height information necessary to create deep
field color images, laser intensity images or height images.
Detection of intensity and height with laser
light
The light emitted from the laser light source of the laser
microscope is focused onto the surface of the sample via X-
Y scan optics and objective lens. The focused spot light
scans the image area within the field of view using the X-Y
scan optics. By dividing the field of view into 1024×768 pix-
els*1 to scan the image, the reflected light at each pixel is
detected by the photoreceptor.
By driving the objective lens in the Z axis to repeat the scan
of the image, the intensity of each pixel at every position on
the Z axis is obtained. With the Z axis position of the highest
intensity being the focal point, the height information and
the laser intensity are detected. This allows for in focus
laser intensity and height images to be obtained.
*1 When the measurement quality is “Fine”, 2048×1536 pixels
are used, and when “Super fine”, 3072×2403 pixels are used.
Height
information
Z axis position
[Z position]
Color
information
Received light intensity
[Intensity]
The device reads the intensity of each Z position for each of
the pixels on the 1024×768 pixel screen and determines
the Z axis position (= focal point) of the maximum intensity,
and records the intensity and color information for that posi-
tion. Based on this information, three types of image data
are constructed, a deep field color image, a laser intensity
image and a height image.
Creating a color image with a CCD camera
On the other hand, the light reflected from the white light
source is detected by the CCD camera. Color observation
in the natural colors as seen by the naked eye is achieved
by obtaining the color information for each pixel at the focal
point detected by the laser.
Focal point
Intensity
information
VK-X100K/X200K User’s Manual
Introduction to the digital microscope
functions
The VK-X100K/X200K Series have the same optics design
as a metal microscope with lens barrel, coaxial incident
light illumination optics and CCD camera built-in in the
measurement unit.
1-3
Summary of the VK-X100K/X200K Series
1
1024 x 768 pixels
Laser light
1
2
3
4
Scan with the
laser in the
XY direction
Move the
objective lens
along the Z
axis and scan
with the laser
again
Repeat as
many times
as the Z
measurement
distance
End of
measurement
Z measurement
distance
The CCD image sensor is equipped with a pixel shift
method CCD camera with a maximum of 21.6 million
recording pixels, allowing for the capture of clear and high
resolution magnified observation images. Combined with
Getting Started
the digital zoom function, this offers high magnification
observation of up to 18000x*2.
*2 The VK-X200K Series allows observation at up to 24000x
magnification.
Data acquisition flow
Optics (area image sensing)
Electric signal processing
7. Each time the lens moves, the laser intensity, the RGB
data from the CCD camera and the linear scale value
at the time of storing the data are recorded in the focal
point memory (1024 × 768 pixels) of the control unit
(VK-X100K/X200K Series).
8. During the data acquisition, the laser intensity at each
pixel is monitored. This means that laser intensities
higher than those stored in the memory of the control
unit (VK-X100K/X200K Series) (i.e. light that is not
attenuated when it reaches the photoreceptor after
passing through the pinhole) will replace the previous
CCD camera RGB data, laser intensity and linear scale
values.
* When RPD mode is active, the peak value (focal point
position) of the laser intensity is calculated based on changes
in the laser intensity values gathered according to the pitch
set by the numerical aperture of the objective lens and the
result is stored in memory.
Output data creation
1. Laser light from a semiconductor laser scans first by a
resonant (horizontal) scanner in the horizontal direc-
tion.
2. The light then scans by a galvano (vertical) scanner in
the vertical direction producing an area scanning
beam.
3. The laser light that reflects off of the sample passes
through a polarized beam splitter in front of the laser
light source and then reaches the focusing lens, the
pinhole and the photoreceptor (photomultiplier).
4. Light that has passed through the focusing lens and is
focused at the pinhole only passes through the pinhole
reaching the photoreceptor (laser light that is out of
focus does not reach the photoreceptor).
5. The electrical signal sent by the photoreceptor upon
receiving the laser light is transformed into an image
(area information) based on sampling coupled with the
vertical and horizontal movements of the scanner.
6. Once image area scanning has completed, the lens
moves one step in the Z direction, where one step is
equal to the pitch, and repeats the scan.
1-4
VK-X100K/X200K User’s Manual
9. By repeating the optics and electrical signal process-
ing operations (steps 1 through 8), at the end of gath-
ering data, each pixel contains the RGB values to be
stored from the CCD camera, the laser intensity, and
the linear scale value of the location where the laser
intensity is highest.
By combining the data, a color image that is completely
in focus, a black and white image based on the laser
intensity, and a height (contrast) image based on the
linear scale value can be created.
1
System Configuration
Stand (OP-82693)
Measurement unit (VK-X105/X110/X210)
Spacer (OP-38162/51246)
Large sample stage
Control unit (VK-X100K/X200K)
Display
Control
PC
Anti-vibration stand
300 mm wafer X-Y stage
(OP-51498)
Electric X-Y stage
(VK-S100K/S105/S110)
Observation Application
(VK-H1XVE)
Analysis Application
(VK-H1XAE)
Basic system Option
Particle Analysis Module
(VK-H1XG)
Image Assembling Application
(VK-H1XJ)
Measurement Analysis Module
(VK-H1XP)
ISO-25178 Surface Texture
Measurement Module (VK-H1XR)
The VK-X100K/X200K Series offers basic system along with optional devices and applications.
Summary of the VK-X100K/X200K Series
Getting Started
VK-X100K/X200K User’s Manual
1-5
Summary of the VK-X100K/X200K Series
1
Important
•Measurement unit (VK-X105/X110/X210)
Measurement unit with semiconductor laser, color CCD
camera and scan optics built-in. This is used as a micro-
scope mounted on the pedestal provided.
Getting Started
• Control unit (VK-X100K/X200K)
The laser, CCD camera controller, scanner control board,
100 W halogen lamp that serves as the light source, and
so on are all built-in the control unit.
•Observation Application (VK-H1XVE)
This software controls the VK-X100K/X200K Series to cre-
ate laser intensity and height images. It adjusts the cam-
era shutter, the gain on the photoreceptor and the
scanning format.
The Observation Application is not
functional unless a control unit (VK-X100K/
X200K) is connected.
• Analysis Application (VK-H1XAE)
This software obtains data for color observation with high
contrast, image processing for 3D displays, and opera-
tion/analysis processing of shape measurement and sur-
face roughness from the laser intensity data and height
data obtained by the Observation Application.
Operating Environment
To activate the VK-X100K/X200K Series, an environment
that meets the following conditions is required.
Control PC main specifications
Item Specifications
Control
PC
OS Windows 7 Professional 32-bit
CPU Intel Core™2 Duo E6300 or higher
Memory 2048 MB or more
USB port USB 2.0
HDD 160 GB or more
Video card KEYENCE-specified product (NVIDIA
The control PC that can be used with the VK-
X100K/X200K Series is KEYENCE-specified one.
Windows 7 Professional 64-bit
Windows Vista Business 32-bit (SP1 or later)
Windows XP Professional Edition 32-bit
(SP3 or later)
must be pre-installed.
(DirectX 9 or later)
®
Quadro®
FX600 1024 MB)
• Control PC
This is the control PC for the VK-X100K/X200K Series
(KEYENCE-specified product).
•Display
Use a display recommended by KEYENCE or a commer-
cially available one.
• Optional devices
For the optional devices and installation, refer to
“Chapter 4 Mounting Optional Devices” (Page 4-1).
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VK-X100K/X200K User’s Manual
1
•Log on to the control PC with administrator
Important
privileges.
• Set all of the power settings to “None” on
the Power Options Properties dialog box for
the control PC.
• Do not use other software while the
Observation Application and the Analysis
Application are running. Doing so may
interfere with the device control.
•During measurement, the sleep feature of
the energy saving function is disabled. (It is
not necessary to disable the screen saver,
etc.)
• When you perform the sleep operation from
the Start Menu, the PC goes to sleep mode
even if measurement is in progress. In this
case, measurement is interrupted and the
measurement result will not be saved.
• If the control unit is connected while the
Observation Application is in use, using
Windows sleep feature may result in the
control unit being in the disconnected state
when recovering from sleep mode. Turn the
control unit power off and turn it on again or
pull out and re-insert the USB cable to re-
connect the control unit.
•Performing the sleep operation during 3D
display may result in the image on display
disappearing. Switch to another image
temporarily to display the 3D again.
• When using external media like USB device
or HDD (Hard Disk Drive) at the same time,
connect them to ports attached to a
different root hub.
Plugging/Unplugging other USB devices
with the same root hub as this device may
result in malfunction.
Summary of the VK-X100K/X200K Series
Getting Started
Display main specifications
Item Specifications
Resolution 1920 × 1080 pixels or more
VK-X100K/X200K User’s Manual
1-7
1
Unpacking
NOTICE
Corner pad
Inner box
Outer box
Upper lid
Storage box
Cushion
Pad
Cushion pad
• Unpack after leaving it at 15 to 28ºC for 24
hours or more.
Getting Started
Unpacking the Control Unit and
The VK-X100K/X200K Series is a high
precision optical instrument. Sudden
changes in temperature may result in
damage, including condensation and
misalignment of the light beam.
• Save the packaging after installing the
device. Make sure to use this packing
material when shipping.
Control PC
Unpack the box containing the control unit and take out the
accessories and control unit.
Also unpack the boxes for the control PC and the display.
Unpacking the Microscope Unit
The microscope unit is packed in a special box. Unpack
according to the steps below.
1 Remove the corner pads and inner box from the
outer box.
3 Remove the cushion pads, taking the microscope
unit out.
When removing the microscope unit, carry it
by holding the indentation in the
NOTICE
measurement unit and the handle of the
pedestal. Holding the revolver unit (the part
where the lenses attach) may cause damage.
2 Remove the upper lid from the inner box and open
the storage box.
The flaps with round corners will be on the inside of the
storage box.
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VK-X100K/X200K User’s Manual
When stored
Follow these procedures in reverse to transport the device
etc.
The flaps with round corners should be on the inside of the
storage box when closing it.
1
Checking the Package Contents
Control unit: 1
* Between VK-X100K and VK-X200K, the
designs are partially different.
Controller A cable (male) 3 m: 1
Controller B cable (female) 3 m : 1
Standard Chart (OP-51633) : 1
Camera cable 3 m : 1
Fiber optic cable 3 m : 1
SCAN CONTROL cable 3 m : 1
* Packed with 3 cables bundled.
USB cable 3 m : 1
User’s Manual (this manual)
Hexagonal wrench: 1
Sleeve ferrite clamp ZCAT3035-1330 (TDK) : 2
ZCAT2035-0930 (TDK) : 1
When you unpack the VK-X100K/X200K Series, check that the parts and equipment listed below are included in the pack-
age.
We have thoroughly inspected the package contents before shipment. However, in the event of defective or broken items,
please contact the nearest KEYENCE office.
Control unit (VK-X100K/X200K)
Getting Started
VK-X100K/X200K User’s Manual
1-9
Checking the Package Contents
1
Measurement unit: 1
Rotating stage: 1
Pedestal: 1
Standard objective lens 1 each
CF IC EPI Plan 5X (Nikon)
CF IC EPI Plan 10X (Nikon)
CF IC EPI Plan 20X (Nikon)
CF IC EPI Plan 50X (Nikon)
Measurement unit: 1
Rotating stage: 1
Pedestal: 1
Standard objective lens 1 each
CF IC EPI Plan 10X (Nikon)
CF IC EPI Plan 20X (Nikon)
CF IC EPI Plan 50X (Nikon)
CF IC EPI Plan 100X (Nikon)
Measurement unit: 1
Rotating stage: 1
Pedestal: 1
Standard objective lens 1 each
CF IC EPI Plan 10X (Nikon)
CF IC EPI Plan 20X (Nikon)
CF IC EPI Plan Apo 50X (Nikon)
CF IC EPI Plan Apo 150X (Nikon)
Microscope unit (VK-X105)
Getting Started
Microscope unit (VK-X110)
Microscope unit (VK-X210)
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VK-X100K/X200K User’s Manual
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