INFICON PEG100 User Manual
tina14e1
Penning Gauge
OPERATING MANUAL
PEG100
Part Number
351-000
351-002
General Remarks
We reserve the right to alter the design or any data given
in these Operating Instructions.
The illustrations are not binding.
Contents Page
1 Description . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.1.1 Purpose . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.2 Technical Data . . . . . . . . . . . . . . . . . . . . . . . . 4
1.2.1 General Data . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.2.2 Measurement System . . . . . . . . . . . . . . . . . . . 5
1.2.3 Signal Output . . . . . . . . . . . . . . . . . . . . . . . . . 5
1.2.4 Control Inputs . . . . . . . . . . . . . . . . . . . . . . . . . 5
1.2.5 Status Output . . . . . . . . . . . . . . . . . . . . . . . . . 5
1.2.6 Mechanical Data . . . . . . . . . . . . . . . . . . . . . . . 6
1.2.7 Ambient Conditions . . . . . . . . . . . . . . . . . . . . . 6
1.3 Technical Description . . . . . . . . . . . . . . . . . . . 6
1.4 Equipment . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
1.4.1 Supplied Equipment . . . . . . . . . . . . . . . . . . . . 7
1.4.2 Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . 7
2 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
2.1 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
2.2 Electrical Connection . . . . . . . . . . . . . . . . . . . 9
2.2.1 Power Supply . . . . . . . . . . . . . . . . . . . . . . . . 11
2.2.2 Switching on the High Tension . . . . . . . . . . . . 11
Page
2.2.3 Measurement Signal Output . . . . . . . . . . . . . 11
2.2.4 Status Output . . . . . . . . . . . . . . . . . . . . . . . . 12
2.2.5 Identification . . . . . . . . . . . . . . . . . . . . . . . . . 12
2.3 Start-up . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
2.3.1 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
2.3.2 Measurement System Status Indication . . . . . 14
2.3.3 Degassing . . . . . . . . . . . . . . . . . . . . . . . . . . 14
2.4 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . 15
3 Maintenance . . . . . . . . . . . . . . . . . . . . . . . . 16
3.1 Service at INFICON . . . . . . . . . . . . . . . . . . . 16
3.2 The Electronics Assembly . . . . . . . . . . . . . . . 16
3.3 Cleaning the Sensor . . . . . . . . . . . . . . . . . . . 16
3.3.1 Detaching the Electronics Assembly . . . . . . . 16
3.3.2 Disassembly of the Sensor . . . . . . . . . . . . . . 17
3.3.3 Cleaning the Individual Parts . . . . . . . . . . . . . 17
3.3.4 Assembly of the Sensor . . . . . . . . . . . . . . . . 18
3.3.5 Assembly of the Electronics Assembly . . . . . . 18
4 Spare Parts List . . . . . . . . . . . . . . . . . . . . . 18
5 Disposal . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
Annex 1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
Annex 2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
EEC Declaration of Conformity . . . . . . . . . . . . . . . . 24
Declaration of Contamination . . . . . . . . . . . . . . . . . 25
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tina14e1 (0106) PEG100.ga
1 Description
1.1 General
The PEG100 Penning Gauge is supplied ready for operation. Even so, we recommend to read these Operating
Instructions with care so as to ensure optimum operating
conditions right from the start.
These Operating Instructions contain important information on the functions, installation, start-up, operation and
troubleshooting of the PEG100.
Important remarks concerning operational safety and
protection are emphazised as follows:
Warning Indicates procedures that must be strict-
ly observed to prevent hazards to persons.
Caution Indicates procedures that must strictly
be observed to prevent damage to, or
destruction.
Note
Indicates special technical requirements that the user
must comply with.
The references to diagrams, e.g. (4/1), consist of the Fig.
No. and the item No. in that order.
Unpack the PEG100 immediately after delivery, even if it
is to be installed at a later date.
Examine the packaging for any external damage. Completely remove all packaging materials.
Note
Retain the shipping container and the packaging materials in the event of complaints about damage.
Check that the PEG100 is complete (see Section 1.4).
Carefully examine the PEG100 visually.
If any damage is discovered, report it immediately to the
forwarding agent and insurer. If the damaged part has to
be replaced, please get in touch with the orders department.
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1.1.1 Purpose
The PEG100 Penning Gauge is a compact active pressure converter housing a measurement system as well
as the corresponding operating electronics. It has been
developed specifically for integration into vacuum
systems and offers a measurement range from 1·10-9to
1·10-2mbar.
The PEG100 is connected directly to the vacuum system through its DN 25 KF or DN 40 CF flange.
The electrical connection is provided through a screened
8-way FCC 68 connector.
Moreover, the technical data as published in Section 1.2
must be observed.
1.2 Technical Data
1.2.1 General Data
Measurement range 1·10-9to 1·10-2mbar/Torr
Measurement uncertainty in the range
from 1·10-8to 1·10-4mbar:
Deviation from the characteristic
± 30 % of the displayed value
Average temperature coefficient of the output span
< 0.5 % / K of the displayed value
Reproducibility < 4 % of the displayed value
Measurement principle
Cold cathode ionization according to Penning
Supply voltage 14.5 to 36 V DC, typ. 24 V DC
Ripple ≤ 2 V
pp
Power consumption < 2 W
Protection IP 40
Electromagnetic compatibility (EMI) CE mark
interference tolerance to EN 50082-2, Tab. 1, 2, 3
interference emission levels to EN 50081-1 and
FCC Rules Part 15, Class B
Flammability UL 94 - V2
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Status displays
Operation (POWER) orange LED
Ready to measure (ignited) READY green LED
1.2.2 Measurement System
Measurement system detachable Vacuum connection DN 25 KF or DN 40 CF Degassing temperature see Section 2.3.3
Dead volume 21 cm3approx.
Materials in contact with the medium
stainless steel, CrNi,
Al2O3ceramics, NiFe, Ni, Ti
Overpressure tolerance ≤ 10 bar abs.
(The limits for the flange connections must be observed)
Operating voltage 1.6 kV (current limited to < 0.5 mA)
Ignition voltage 2.8 kV (current limited to < 0.5 mA)
1.2.3 Signal Output
Signal output 0 to 10.6 V Permissible load resistance Ra≥ 10 kΩ
Measurement signal 0.66 V to 10 V;
logarithmic, 1.333 V per decade
Status signal (not ignited) 0.4 V
1.2.4 Control Inputs
Input resistance RE: 10 kΩ approx.
High voltage cut-in with negative logic at Pin 7:
High voltage ON at U < 2.5 V
High voltage OFF at U > 4 V
or
High voltage cut-in with positive
logic at Pin 8:
High voltage ON at U > 12 V
High voltage OFF at U < 7 V
(for this also refer to Fig. 3 and Section 2.2.2).
1.2.5 Status Output
Ready to measure High level (13.5-35 V, max. 50 mA)
Error (not ignited, HV off) 0V
For this refer also to Section 2.2.4.
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1.2.6 Mechanical Data
Dimensions (WxHxD) 80 x 126 x 73 mm
Weight 500 g approx.
1.2.7 Ambient Conditions
Storage temperature range -20 °C to +70 °C
Climatic rating KWF to DIN 400 40
Operating temperature range 10 °C to 50 °C
Max. rel. humidity of the ambient air (on 30
days per year, non-condensing) 70 %1)or 95 %
1)
usable measurement range 10-2to 10-7mbar
2)
usable measurement range 10-2to 10-9mbar
1.3 Technical Description
Based on a supply voltage of 24 V the PEG100 Penning
Gauge generates the internal supply voltages required
for operation of the integrated measurement system.
The PEG100 supplies a logarithmic representation of the
vacuum pressure by way of a voltage signal which ranges from 0.66 V to 10 V. Moreover, the high tension
generated in the PEG100 can be switched on and off by
applying an external control voltage or by connecting an
external switch.
When the gas discharge in the measurement system is
ignited, the operating voltage is raised to 2.8 kV. After
2)
successful ignition, this voltage then drops to 1.6 kV thereby increasing the useful service life of the measurement system.
Astatus output indicates the two possible conditions of
the measurement system:
1.not ignited (including high tension OFF) and
2.ignited (and pressure > 3·10-9mbar).
Amuch improved ignition characteristic in the high vacu-
um range has been obtained through the special design
for the electrodes in the measurement system.
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1.4 Equipment
1.4.1 Supplied Equipment
PEG100, DN 25 KF Part No. 351-000
PEG100, DN 40 CF Part No. 351-002
Replacement cathode plate of titanium --
Replacement ceramics disc --
3.5 mm jack plug -Operating Instructions tina14e1
1.4.2 Accessories
Part No.
Replacement kit 351-490
consisting of:
Cathode plate of titanium (5 pcs.)
Ceramics disc (5 pcs)
Gauge
2 Operation
2.1 Installation
The PEG100 Penning Gauges should preferably be
mounted flange down. Inclined installation is possible but
the horizontal orientation must not be exceeded.
Flange up installation is not permissible because under
such circumstances condensate may collect in the
PEG100. This will either adversely affect the measurements, or the sensor itself may possibly be damaged.
The PEG100 is equipped with a DN 25 KF or a DN 40
CF connection flange which is used to connect the
PEG100 to the mating connection flange on a vacuum
system with the aid of a centering ring and a clamping
ring.
The cathode plate (5/5) also acts as a baffle.
For the dimensional drawing, see Fig. 1.
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tina14e1 (0106) PEG100.ga
DN 25 KF
143,5
114
73
POWER READY
25
80
DN 40 CF
130,5
12
DN 40 CF
DN 25 KF
Fig. 1 Dimensional drawing for PEG100
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