Pirani Capacitance Diaphragm
Gauge
PCG550
PCG552
PCG554
tina56e1-f (2015-09) 1
Operating Manual
Incl. EU Declaration of Conformity
Product Identification
In all communications with INFICON, please specify the information given on the product nameplate. For convenient reference copy that information into the space provided below.
INFICON AG, LI-9496 Balzers
Model:
PN:
SN:
V W ; LPS
2
tina56e1-f (2015-09)
Validity
This document applies to products of the PCG55x series.
Part numbers of standard products are indicated below. OEM
products have other part numbers and different parameter
settings (e.g. factory setting of setpoint) as defined in the
corresponding ordering information.
3PCx-0xx-xxxx
Flange
1 DN 16 ISO-KF
2 DN 16 ISO-KF long tube
4 DN 16 CF-F
5 DN 16 CF-R long tube
6 DN 25 ISO-KF
D 4 VCR female
E 8 VCR female
F 1/8" NPT
Flange 29×29 mm
K
M 4 VCR 90° female
N 7/16-20 UNF male
Unit
0 mbar
1 Torr
2 Pa
3 micron
Filament
Tungsten
1
2 Nickel
Ceramic coated
3
6
Tungsten,
7 Nickel, galvanically isolated
8 Ceramic coated,
galvanically isolated
galvanically isolated
tina56e1-f (2015-09) 3
3PCx-0xx-xxxx
Measuring
signal
Interface
Receptacle
Display
Switching function
*) Solid state relays
**) Mechanical relays
The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this
document correspond to gauges with the DN 16 ISO-KF vacuum
connection and display. They apply to gauges with other vacuum
connections by analogy.
We reserve the right to make technical changes without prior
notice.
0.61 ... 10.23 V
0
1 1.2 ... 8.68 V
2 0.375 ... 5.659
3 1.57 ... 9.05 V
0 None (analoge)
1 DeviceNet
2 Profibus
8 EtherCAT
0 FCC
1 D-Sub, 9-pin
2 D-Sub, 15-pin HD
D-Sub, 15-pin HD, RS485 INF
4
0 None
1 Display
2 2 switching functions
3 ATM sensor &
2 switching functions *)
4 Display & 2 switching functions *)
5 Display & AT M sensor &
2 switching functions *)
6 2 switching functions **)
7 ATM sensor &
2 switching functions **)
*)
4
tina56e1-f (2015-09)
Intended Use
The Pirani Capacitance Diaphragm Gauge PCG55x has been
designed for vacuum measurement of gases in the pressure
range of 5×10
-5
… 1500 mbar.
It must not be used for measuring flammable or combustible
gases which react in air.
The gauge is intended for operation in connection with an
INFICON Vacuum Gauge Controller VCG401, 402, 403 or with
another suitable controller.
Functional Principle
The PCG gauge is a combination gauge consisting of a Pirani
sensor and a diaphragm capacitive sensor. Both sensors are
constantly active.
At low pressures, only the signal of the Pirani sensor is used for
pressure measurement; at high pressures, only the signal of the
diaphragm capacitive sensor. To determine the output signal in
the intermediate range, both signals are used proportionally to
the pressure.
Trademark
VCR® Swagelok Marketing Co.
Patents
EP 0689669 B1, 0689670 B1, 0658755 B1
US Patente 5608168, 4031997, 5583297
Scope of Delivery
1× gauge
1× pin for adjusting settings via buttons
1× Operating Manual English
1× Operating Manual German
tina56e1-f (2015-09) 5
Contents
Product Identification 2
Validity 3
Intended Use 5
Functional Principle 5
Trademark 5
Patents 5
Scope of Delivery 5
1
Safety 8
1.1 Symbols Used 8
1.2 Personnel Qualifications 8
1.3 General Safety Instructions 9
1.4 Liability and Warranty 9
2 Technical Data 10
2.1 Output Signal vs. Pressure 19
2.2 Gas Type Dependence 24
3 Installation 25
3.1 Vacuum Connection 25
3.2 Power Connection 28
3.2.1 FCC 68, 8-pin Connector 29
3.2.2 D-Sub, 9-pin Connector 30
3.2.3 D-Sub HD, 15-pin Connector 31
3.2.4 D-Sub HD, 15-pin, RS485 INF Connector 32
3.2.5 DeviceNet Connector 33
3.2.6 Profibus Connector 34
3.2.7 EtherCAT Connector 35
4 Operation 36
4.1 Status Indication and Displays 36
4.2 Gas Type Dependence 40
4.3 Switching Functions SP1, SP2 40
4.4 ATM Setpoint 47
4.5 Diagnostic Port (RS232C Interface) 49
4.6 DeviceNet Operation 50
4.7 Profibus Operation 53
4.8 EtherCAT Operation 54
6
tina56e1-f (2015-09)
5 Deinstallation 55
6 Maintenance, Repair 57
6.1 Adjusting the Gauge 57
6.2 Adjusting the Atmospheric Pressure Sensor 59
6.3 Troubleshooting 59
6.4 Replacing the Sensor 62
7 Returning the Product 63
8 Disposal 64
9 Accessories 65
10 Spare Parts 66
Further Information 69
ETL Certification 70
EU Declaration of Conformity 71
For cross-references within this document, the symbol (→ XY)
is used, for cross-references to further documents, listed under
"Further Information", the symbol (→ [Z]).
tina56e1-f (2015-09) 7
1 Safety
1.1 Symbols Used
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environmental damage.
Caution
Information on correct handling or use. Disregard can lead to
malfunctions or minor equipment damage.
Notice
<…> Labeling
1.2 Personnel Qualifications
Skilled personnel
All work described in this document may only be carried out by
persons who have suitable technical training and the necessary experience or who have been instructed by the end-user
of the product.
8
tina56e1-f (2015-09)
1.3 General Safety Instructions
• Adhere to the applicable regulations and take the necessary
precautions for the process media used.
Consider possible reactions with the product materials.
Consider possible reactions (e.g. explosion) of the process
media due to the heat generated by the product.
• Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider the
safety instructions in this document.
• Before beginning to work, find out whether any vacuum components are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contaminated parts.
Communicate the safety instructions to all other users.
1.4 Liability and Warranty
INFICON assumes no liability and the warranty becomes null
and void if the end-user or third parties
• disregard the information in this document
• use the product in a non-conforming manner
• make any kind of interventions (modifications, alterations etc.)
on the product
• use the product with accessories not listed in the product
documentation.
The end-user assumes the responsibility in conjunction with the
process media used.
Gauge failures due to contamination or wear and tear, as well as
expendable parts (e.g. filament) are not covered by the warranty.
tina56e1-f (2015-09) 9
2 Technical Data
For further technical data for gauges with DeviceNet and
Profibus interface → [3], [4], [5], [6].
Measurement range 5×10-5 … 1500 mbar
Measurement principle
10 mbar … 1500 mbar
1 … 10 mbar crossover range
-5
5×10
… 1 mbar thermal conductance acc. to
Accuracy (N
5×10
1×10
)
2
-4
… 1×10-3 mbar
-3
… 100 mbar ±15% of reading
100 … 950 mbar ±5% of reading
950 … 1050 mbar ±2.5% of reading
Repeatability (N
1×10
)
2
-3
… 1100 mbar
Output signal (measurement signal)
Voltage range
3PCx-0xx-xxx0
3PCx-0xx-xxx1 0 … +8.68 V
3PCx-0xx-xxx2 0 … +5.659 V
3PCx-0xx-xxx3 0 … +9.05 V
Measurement range
3PCx-0xx-xxx0
3PCx-0xx-xxx1 +1.2 … +8.68 V
3PCx-0xx-xxx2 +0.375 … +5.659 V
3PCx-0xx-xxx3 +1.57 … +9.05 V
Error signal 0 V (default)
diaphragm capacitive
sensor
Pirani
±50% of reading
±2% of reading
0 … +10.23 V
+0.61 … +10.23 V
10
tina56e1-f (2015-09)
Voltage vs. pressure
3PCx-0xx-xxx0
1.286 V/decade, logarithmic
3PCx-0xx-xxx1 1 V/decade, logarithmic
3PCx-0xx-xxx3 1 V/decade, logarithmic
3PCx-0xx-xxx2
Output impedance
Load impedance
Response time
Gauge identification
FCC 68 (+0.61 … +10.23 V)
→ 21
2 × 4.7 Ω, short circuit-proof
>10 kΩ
<30 ms
71.5 kΩ
HV adjustment at <10-5 mbar
ATM adjustment at >100 mbar
Solid state relays switching functions SP1,
SP2, ATM
Setting range (N
Hysteresis
Switching characteristics
) 5.0×10-5 … 1500 mbar
2
1)
10% of threshold
1)
Low Trip Point
Contact rating <30 V (ac) / (dc), ≤0.3 A
resistive
closed LED lit solid
open LED off
Switching time <30 ms
1
)
The hysteresis and the switching characteristics can be
programmed via the serial interface or the diagnostic port.
tina56e1-f (2015-09) 11
pp
Mechanical relays switching functions SP1,
SP2, ATM
Setting range (N
Hysteresis
Switching characteristics
) 5.0×10-5 … 1500 mbar
2
1)
10% of threshold
1)
Low Trip Point
Type 1 floating contact (n.o.) per
switching function
Contact rating <30 V (ac) / (dc), ≤1 A
resistive
closed LED lit solid
open LED off
Switching time <30 ms
Diagnostic port Jack connector 2.5 mm,
Supply
3-pin
DANGER
The gauge may only be connected to power supplies, instruments, or control devices that conform
to the requirements of a grounded protective extralow voltage (PELV) and limited power source
(LPS), Class 2. The connection to the gauge has to
be fused.
Supply voltage
at the gauge
Ripple ≤1 V
Power consumption
without fieldbus
DeviceNet
Profibus
Fuse to be connected
2)
INFICON controllers fulfill this requirement.
2)
Class 2 / LPS
+15 … +30 V (dc)
≤2.5 W
≤3 W
2)
1 AT
≤3 W
12
tina56e1-f (2015-09)
Electrical connection
3PCx-0xx-x0xx
FCC 68
3PCx-0xx-x1xx D-Sub 9-pin, male
3PCx-0xx-x2xx D-Sub HD 15-pin, male
3PCx-0xx-x4xx D-Sub HD 15-pin, RS485
INF, male
Sensor cable shielded
Cable length
RS232C operation
Grounding concept
Vacuum connection to
signal common
2
/conductor
0.14 mm
≤100 m
≤30 m
→ "Power Connection"
connected via 10 kΩ
RS232C / RS485 interface
Transmission rate
Data format
57600 baud (default)
binary
8 data bits
one stop bit
no parity bit
no handshake
→ "Power Connection"
For further information on the RS232C / RS485C interface
→ [3].
tina56e1-f (2015-09) 13
DeviceNet interface
Specification, data format,
communication protocol
→ [7]
Interface, physical CAN bus
Data rate (adjustable via
<RATE> switch)
125 kBaud
250 kBaud
500 kBaud (default)
<P> (125 kBaud,
250 kBaud, 500 kBaud
programmable via
DeviceNet, → [4])
Node address (MAC ID)
(Adjustable via <ADDRESS>,
<MSD>, <LSD> switches)
0 … 63dec (63dec default)
<P> (0 … 63 programmable
via DeviceNet, → [4])
DeviceNet connector Micro-Style, 5-pin, male
Cable shielded, special DeviceNet
cable, 5 conductors
→ 33, → [8]
Cable length, system wiring according to DeviceNet
specifications, → [7], [8]
For further information on the DeviceNet interface → [4]
EtherCAT interface
Specification, data format,
communication protocol
→ [11], [12]
Data rate 100 Mbps
Note address explicit device identification
EtherCAT connector 2×RJ45, 8-pin, socket
input and output
Cable 8-pin, shielded, Ethernet
Patch Cable (CAT5e quality
or higher)
Cable length ≤100 m
For further information on the EtherCAT interface → [6]
14
tina56e1-f (2015-09)
Profibus interface
x
Specification, data format,
communication protocol
→ [9]
Interface, physical RS485
Data rate
Node address
Local
(Adjustable via hexadecimal
<ADDRESS>, <MSD>,
<LSD> switches)
Default setting
Via Profibus
(hexadecimal <ADDRESS>
switches set to >7D
)
(>125
dec
hex
≤12 Mbaud (→ [5])
00 … 7D
01
00 … 7D
hex
(0 … 125
hex
(0 … 125
he
Profibus connection D-Sub, 9-pin, female
Cable shielded, special Profibus
cable, → 34, → [10]
Cable length, system wiring according to Profibus speci-
fications, → [9], [10]
For further information on the Profibus interface → [5]
Materials exposed to vacuum
Vacuum connection
Filament
3PC1 / 6-0xx-xxxx
3PC2 / 7-0xx-xxxx
3PC3 / 8-0xx-xxxx
Feedthrough
3)
Orifice
Diaphragm
Further materials
stainless steel 1.4435
W
Ni
ceramic coated
glass
stainless steel
ceramic
Ni, NiFe, stainless steel
1.4301, SnAg
dec)
dec
)
3)
Only versions DN 16 ISO-KF and DN 16 CF-F.
tina56e1-f (2015-09) 15
Internal volume
DN 16 ISO-KF
DN 16 ISO-KF, long tube
DN 16 CF-F
DN 16 CF-R, long tube
DN 25 ISO-KF
®
female
4 VCR
8 VCR® female
1/8" NPT
Flange 29×29 mm
®
4 VCR
90°, female
7/16-20 UNF
Permissible pressure (absolute)
Bursting pressure (absolute) 10 bar
4.7 cm
14.5 cm
3
8 cm
14 cm
5.5 cm
5.5 cm
3
7 cm
5.2 cm
4.9 cm
7.9 cm
5.2 cm3
≤5 bar
3
3
3
3
3
3
3
3
Permissible temperatures
Operation
Vacuum connection
long tube 4)
Filament
Storage
Relative humidity
Year's mean
During 60 days
4)
+10 °C … +50 °C
≤80 °C
≤250 °C
<160 °C
–20 °C … +65 °C
≤65% (no condensation)
≤85% (no condensation)
Mounting orientation any
Use indoors only, altitude up to
2000 m NN
Degree of protection IP 40
Weight
without fieldbus interface
with fieldbus interface
115 g …130 g
230 g … 250 g
4)
For horizontal mounting orientation only. During bakeout,
measurement range, accuracy, and repeatability may deviate from
specifications.
16
tina56e1-f (2015-09)
Dimensions [mm]
45
79.5 ≈65
46.3
21.531.5
DN 25 ISO-KF
28
36
1/8" NPT
4 VCR
8 VCR
29.2×29.2 mm
14.5
30.9 42.7
36.5 34
7/16-20 UNF
DN 16 ISO-KF
130.8
DN 16 ISO-KF long
130.2
DN 16 CF-F
DN 16 CF-R long
24.4
4-VCR 90°
tina56e1-f (2015-09) 17
DeviceNet
67
BUS RATE STATUS
ADDRESS
LSDMSD
I/O
DIA
EtherCAT
67
4
4
2
2
ERR RUN
068
068
A
E
E
x100 x10
LA LA
IN OUT
I/O
DIA
Profibus
10.8
NET MOD
56
ST
SP1SP2
ADJ
4
2
068
A
A
E
x1
56
ST
SP1SP2
ADJ
67
ADDRESS
4
4
26
26
08
08
EA
EA
C
C
LSDMSD
I/O
DIA
RS485
67
ADDRESS
LSDMSD
SP1 SP2 ST
62
AE
DIA
BUS
BUS
56
ST
SP1SP2
ADJ
RATE
62
AE62AE
56
ADJ
321ON
18
tina56e1-f (2015-09)
2.1 Output Signal vs. Pressure
Measurement range 0.61 … 10.23 V
Pressure p
1E+06
1E+05
1E+04
1E+03
1E+02
1E+01
Error
1E+00
1E–01
1E–02
1E–03
1E–04
1E–05
0.5
0.0
0.61
p = 10
0.778(U-c)
3.02.52.01.51.0
4.03.5 5.04.5 6.05.5 7.06.5 8.07.5 9.08.5 10.09.5 10.5
Output signal U [V]
⇔
U = c +1.286log10 p
valid in the range 5×10-5 mbar <p< 1500 mbar
U p c U p c
[V] [mbar] 6.143 [V] [micron] 2.448
[V] [µbar] 2.287 [V] [Pa] 3.572
[V] [Torr] 6.304 [V] [kPa] 7.429
[V] [mTorr] 2.448
where p pressure
U output signal
c constant (pressure unit dependent)
Pa
mbar
Torr
O
tina56e1-f (2015-09) 19
Measurement range 1.2 … 8.68 V
Pressure p
1E+05
1E+04
1E+03
1E+02
1E+01
1E+00
Error
1E–01
1E–02
1E–03
1E–04
1E–05
0.0 0.5 1.0 1.5 2.5 3.5 4.5 5.5 6.5 7.5 8.5
2.0 3.0 4.0 5.0 6.0 7.0 8.0 9.0
1.2
p = 10
Output signal U [V]
(U-c)
⇔
U = c + log10 p
Pa
mbar
Torr
8.68
valid in the range 5×10-5 mbar <p< 1500 mbar
U p c U p c
[V] [mbar] 5.5 [V] [micron] 2.625
[V] [µbar] 2.5 [V] [Pa] 3.5
[V] [Torr] 5.625 [V] [kPa] 6.5
[V] [mTorr] 2.625
where p pressure
U output signal
c constant (pressure unit dependent)
20
tina56e1-f (2015-09)
Measurement range 0.375 … 5.659 V
Signal U Pressure p
[V] [mbar] [Pa] [Torr]
0.375 <5×10-5 <6.65×10-3 <5×10-5
0.376 0.000133322 0.013332237 0.0001
0.377 0.000266645 0.026664474 0.0002
0.379 0.000666612 0.066661184 0.0005
0.384 0.001333224 0.133322368 0.0010
0.392 0.002666447 0.266644736 0.0020
0.417 0.006666118 0.66661184 0.0050
0.455 0.013332237 1.33322368 0.0100
0.523 0.026664474 2.66644736 0.0200
0.682 0.066661184 6.6661184 0.0500
0.876 0.133322368 13.3322368 0.1000
1.155 0.266644736 26.6644736 0.2000
1.683 0.66661184 66.661184 0.5000
2.217 1.33322368 133.322368 1.0000
2.842 2.66644736 266.644736 2.0000
3.675 6.6661184 666.61184 5.0000
4.206 13.3322368 1333.22368 10.0000
4.577 26.6644736 2666.44736 20.0000
4.846 66.661184 6666.1184 50.0000
4.945 133.322368 13332.2368 100.0000
5.019 266.644736 26664.4736 200.0000
5.111 399.967104 39996.7104 300.0000
5.224 533.289472 53328.9472 400.0000
5.329 666.61184 66661.184 500.0000
5.419 799.934208 79993.4208 600.0000
5.495 933.256576 93325.6576 700.0000
5.534 1013.249997 101324.9997 760.0000
5.558 1066.578944 106657.8944 800.0000
5.614 1199.901312 119990.1312 900.0000
5.659 1333.22368 133322.368 1000.0000
tina56e1-f (2015-09) 21
Valid in the range 0.375 … 2.842 V
p = a + bU + cU2 + dU3 + eU4 + fU5
a –0.02585 c 0.04563 e –0.04158
b 0.03767 d 0.1151 f 0.008737
where p pressure in Torr a, b, c, d, e, f constant
U output signal
Valid in the range 2.842 … 4.945 V
p =
a + cU + eU
2
1 + bU + dU2 + fU3
a 0.1031 c –0.02322 e 0.07229
b –0.3986 d 0.07438 f –0.006866
where p pressure in Torr a, b, c, d, e, f constant
U output signal
Valid in the range 4.945… 5.659 V
p =
a + cU
1 + bU + dU2
a 100.624 c –20.5623
b –0.37679 d 0.0348656
where p pressure in Torr a, b, c, d constant
U output signal
22
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Measurement range 1.57 … 9.05 V
Pressure p
1E+05
1E+04
1E+03
1E+02
1E+01
1E+00
Error
1E–01
1E–02
1E–03
1E–04
1E–05
0.0 0.5 1.0 1.5 2.5 3.5 4.5 5.5 6.5 7.5 8.52.0 3.0 4.0 5.0 6.0 7.0 8.0 9.0
1.57
p = 10
Output signal U [V]
(U-c)
⇔
U = c + log10 p
Pa
mbar
Torr
9.5
9.05
valid in the range 5×10-5 mbar <p< 1500 mbar
U p c U p c
[V] [mbar] 5.8751 [V] [micron] 3
[V] [µbar] 2.8751 [V] [Pa] 3.8751
[V] [Torr] 6 [V] [kPa] 6.8751
[V] [mTorr] 3
where p pressure
U output signal
c constant (pressure unit dependent)
tina56e1-f (2015-09) 23
2.2 Gas Type Dependence
Indicated pressure (gauge calibrated for air)
p [mbar]
4
2
3
10
8
6
4
2
2
10
8
6
4
2
1
10
8
6
4
2
0
10
8
6
4
2
–1
10
8
6
4
2
–2
10
8
6
4
2
–3
10
8
6
4
2
–4
10
–4
–3
246
10
246
10
Calibration factors
valid for Pirani pressure range below 1 mbar
p
= C × indicated pressure
Gas type Calibration
He
Ne
Ar
Kr
Xe
eff
factor C
0.8
1.4
1.7
2.4
3.0
24
Pirani
sensor
–2
–1
246246
10
10
Gas type Calibration
H
Crossover
range
0
246
10
, CO, N2
air, O
2
CO
water vapor
Freon 12
Capacitive
diaphragm
sensor
Air, O2, CO, N
He
Ar
1
246
10
10
2
2
tina56e1-f (2015-09)
2
246
factor C
2
p
0.5
1.0
0.9
0.5
0.7
10
[mbar]
eff
3
2
3 Installation
WARNING
WARNING: fragile components
The ceramic sensor may be damaged by impacts.
Do not drop the product and prevent shocks and
3.1 Vacuum Connection
impacts.
DANGER
DANGER: overpressure in the vacuum system
>1 bar
Injury caused by released parts and harm caused
by escaping process gases can result if clamps are
opened while the vacuum system is pressurized.
Do not open any clamps while the vacuum system
is pressurized. Use the type clamps which are
suited to overpressure.
DANGER
DANGER: overpressure in the vacuum system
>2.5 bar
KF flange connections with elastomer seals (e.g.
O-rings) cannot withstand such pressures. Process
media can thus leak and possibly damage your
health.
Use O-rings provided with an outer centering ring.
tina56e1-f (2015-09) 25
DANGER: protective ground
Products that are not correctly connected to ground
can be extremely hazardous in the event of a fault.
Electrically connect the gauge to the grounded
vacuum chamber. This connection must conform to
the requirements of a protective connection according to EN 61010:
• CF, NPT, UNF and VCR flanges fulfill this requirement.
• For gauges with a KF flange, use a conductive
metallic clamping ring.
• For gauges with a ½" tube and a 29×29 mm
flange, take appropriate measures to fulfill this
requirement.
Caution: vacuum component
Dirt and damages impair the function of the vac-
uum component.
When handling vacuum components, take appro-
priate measures to ensure cleanliness and prevent
damages.
Caution: dirt sensitive area
Touching the product or parts thereof with bare
hands increases the desorption rate.
Always wear clean, lint-free gloves and use clean
tools when working in this area.
DANGER
Caution
Caution
26
tina56e1-f (2015-09)
Mount the gauge so that no vibrations occur. The gauge
may be mounted in any orientation. To keep condensates and particles from getting into the measuring
chamber preferably choose a horizontal to upright position and consider using a seal with centering ring and
filter. If adjustment should be possible after the gauge
has been installed, be sure to install it so that the buttons can be accessed with a pin.
Remove the protective lid and connect the product to the
vacuum system.
Seal with centering ring
Clamp
or
Protective lid
Seal with centering
ring and filter
Keep the protective lid.
tina56e1-f (2015-09) 27
3.2 Power Connection
Make sure the vacuum connection is properly made
(→ 25).
DANGER
The gauge may only be connected to power supplies, instruments or control devices that conform
to the requirements of a grounded protective extralow voltage (PELV) and limited power source
(LPS), Class 2. The connection to the gauge has to
be fused.
5)
Ground loops, differences of potential, or EMC problems
may affect the measurement signal. For optimum signal
quality, please do observe the following notes:
• Connect the cable shield to ground on one side via
the connector housing. Do not connect the other side
of the shield.
• Connect the supply common with protective ground
directly at the power supply.
• Use differential measurement input (signal common
and supply common conducted separately).
• Potential difference between supply common and
housing ≤18 V (overvoltage protection).
5)
INFICON controllers fulfill these requirements.
28
tina56e1-f (2015-09)
3.2.1 FCC 68, 8-pin Connector
If no sensor cable is available, make one according to the
following diagram. Connect the sensor cable.
SP2
Measurement
signal
Supply
SP1
4.7Ω
4.7Ω
4
Ident
6
8
7
3
5
+
–
+24V
1
2
18V
10k
+
–
Electrical connection
Pin 1 Supply
Pin 2 Supply common, GND
Pin 3 Measurement signal or
1
8
thresholds SP1, SP2
Pin 4 Gauge identification
Pin 5 Signal common
Pin 6, 8 Relay SP2
Common closing contact (com)
Pin 7, 8 Relay SP1
Common closing contact (com)
FCC 68
8-pin
connector
tina56e1-f (2015-09) 29
3.2.2 D-Sub, 9-pin Connector
If no sensor cable is available, make one according to the
following diagram. Connect the sensor cable.
SP1
SP2
Measurement
signal
4.7
4.7Ω
Ω
1
6
7
9
5
8
+
–
+24V
10k
Electrical connection
Pin 1 Relay SP1, closing contact
Pin 2 n.c.
Pin 3 Supply
Pin 4 Supply common, GND
Pin 5 Measurement signal or
thresholds SP1, SP2
Pin 6 Relay SP1
Common contact (com)
Pin 7 Relay SP2
Common contact (com)
Pin 8 Signal common
Pin 9 Relay SP2, closing contact
30
18V
3
4
5
1
D-Sub
9-pin
female
soldering side
tina56e1-f (2015-09)
+
–
9
6
3.2.3 D-Sub HD, 15-pin Connector
If no sensor cable is available, make one according to the
following diagram. Connect the sensor cable.
TxD
RxD
SP2
SP1
Measurement
signal
4.7Ω
4.7Ω
13
14
12
11
15
10
5
6
+
–
+24V
3
4
18V
10k
+
–
Electrical connection
Pin 1, 2 n.c.
Pin 3 Supply
Pin 4 Supply common, GND
Pin 5 Measurement signal
Pin 6 Signal common
Pin 7, 8, 9 n.c.
5
1
10
15
11
6
Pin 10 Relay SP1 (NO)
Pin 11 Relay SP2 (NO)
Pin 12 Relay SP2
Common contact (com)
Pin 13 RS232, TxD
Pin 14 RS232, RxD
D-Sub HD
15-pin
female
soldering side
Pin 15 Relay SP1
Common contact (com)
tina56e1-f (2015-09) 31
3.2.4 D-Sub HD, 15-pin, RS485 INF Connector
If no sensor cable is available, make one according to the
following diagram. Connect the sensor cable.
+5V
Ω
470
1 Fail safe bias
120Ω
RS-485
Ω
470
Fail safe
3
bias
2 Termination
Measurement
signal
4.7
4.7Ω
10Ω
SP2
SP1
Ω
1
2
8
13
14
12
11
15
10
5
6
+
–
+24V
Electrical connection
Pin 1 RS485 B+
Pin 2 RS485 A–
Pin 3 Supply
Pin 4 Supply common, GND
Pin 5 Measurement signal
Pin 6 Signal common
Pin 7 Reserved
Pin 8 RS485. GND
Pin 9 Reserved
Pin 10 Relay SP1 (NO)
Pin 11 Relay SP2 (NO)
Pin 12 Relay SP2, common contact (com)
Pin 13 Relay SP2 (NC)
Pin 14 Relay SP1 (NC)
Pin 15 Relay SP1, common contact (com)
32
3
4
18V
10k
+
–
10
5
1
15
11
6
D-Sub HD
15-pin
female
soldering side
tina56e1-f (2015-09)
3.2.5 DeviceNet Connector
If no DeviceNet cable is available, make one according to the
following diagram. Connect the DeviceNet cable.
1
Micro-Style, 5-pin, (DeviceNet), female,
42
soldering side
5
3
Pin 1 Drain
Pin 2 Supply +15 … +30 V (dc)
Pin 3 Supply common GND
Pin 4 CAN_H
Pin 5 CAN_L
DeviceNet cable
tina56e1-f (2015-09) 33
3.2.6 Profibus Connector
If no Profibus cable is available, make one according to the
following diagram. Connect the Profibus cable.
1 5
D-Sub, 9-pin, male, soldering side
6 9
Pin 1, 2 Do not connect Pin 6 VP
Pin 3 RxD/TxD-P Pin 7, 9 Not connected
Pin 4
Pin 5
1)
Only to be connected if an optical link module is used.
2)
Only required as line termination for devices at both ends of bus cable
→ [10]).
(
Profibus cable Sensor cable
CNTR-P
DGND
1)
2)
Pin 8
2)
RxD/TxD-N
34
tina56e1-f (2015-09)
3.2.7 EtherCAT Connector
If no EtherCAT cables are available, make them according to the
following diagram. Connect the EtherCAT cables.
FCC68, 8-pin, soldering side
81
Pin 1 TD+ Transmission data +
Pin 2 TD- Transmission data Pin 3 RD+ Receive data +
Pin 6 RDPin 4, 5, 7 and 8: Not connected
FCC68 cable
<IN> port
Receive data -
FCC68 cable
<OUT> port
Sensor cable
tina56e1-f (2015-09) 35
4 Operation
When the supply voltage is applied, the measurement signal is
available at the connector (→ "Power Connection").
Allow a stabilization period of at least 10 minutes. It is advisable
to operate the gauge continuously, irrespective of the pressure.
The gauge is factory calibrated. Due to long time operation or
contamination, a zero drift could occur. Periodically check the
zero and adjust it if necessary (adjusting the gauge → 57).
4.1 Status Indication and Displays
Light-emitting diodes (LEDs)
ST
DIA
SP1SP2
LED State Meaning
<ST> off no supply voltage
lit green measurement mode
lit solid or is
blinking red
error (→ 59)
<SP1> lit green Relay SP 1 closed
off Relay SP 1 open
<SP2> lit green Relay SP 2 closed
off Relay SP 2 open
Status
ADJ
36
tina56e1-f (2015-09)
Liquid crystal display (LCD)
LCD Meaning
off no supply voltage
lit green measurement / parameter mode
lit red error
The display can be rotated by 180 ° via the diagnostic
port.
Put the gauge into operation
When the supply voltage is applied
the software version is briefly displayed.
tina56e1-f (2015-09) 37
Measurement mode
Relay 2
Status of Relay 2
Relay 1
Status of Relay 1
Measurement
principle
Output signal
Setpoint
ATM setpoint
open
closed
ATM setpoint
Setpoint
open
closed
Pirani
Capacitive
Crossover range
38
Unit
Underrange
Overrange
(no display) Within range
Millibar
Torr
Pascal
Micron
Counts(no display)
tina56e1-f (2015-09)
Parameter mode
Switching functions <S>
When the <SP1> or <SP2> button is
pushed, the corresponding
threshold is displayed and the
corresponding relay flashes.
Threshold
Error display (trouble shooting → 59)
Pirani sensor error
Diaphragm sensor error
Atmosphere pressure sensor error
tina56e1-f (2015-09) 39
EEPROM error
Sensor error
4.2 Gas Type Dependence
Pressure range Measurement
principle
10 … 1500 mbar
1 … 10 mbar
diaphragm
capacitive sensor
diaphragm
capacitive sensor
and Pirani sensor
5×10-5 … 1 mbar Pirani sensor proportional to
4.3 Switching Functions SP1, SP2
The two switching functions can be set to any pressure within
the measurement range of the gauge. A solid state relay is
provided for each switching function.
Gas type dependence
independent of gas
type, no correction
required
crossover range
)
6
pressure
6)
The pressure reading applies to dry air, O2, CO and N2. For other
gases, it has to be converted (calibration factors (→ 24).
40
tina56e1-f (2015-09)
The current threshold setting
• can be read / written via the diagnostic port
• is output at the measurement signal output instead of the
pressure signal, can be measured with a voltmeter, and is
displayed on the LCD display after the <SP1> or <SP2>
button is pressed
• can be read / written via the DeviceNet, Profibus, EtherCAT
and RS485 interface.
Switching characteristics and hysteresis
The switching characteristics and the hysteresis of each set
point can be programmed (→ 44).
Low Trip Point (default)
If the pressure in the vacuum system is lower than the setpoint,
the corresponding LED (<SP1> or <SP2>) is lit solid and the
corresponding relay is closed.
Measurement signal
(Pressure p)
Setpoint
e
r
u
s
a
e
M
Hysteresis
(10% of threshold)
Threshold value
e
u
l
a
v
t
n
e
m
Time t
Off
OffOn
The setpoints SP1 and SP2 are factory set to the lower
measurement range limit and therefore do not switch.
tina56e1-f (2015-09) 41
High Trip Point
If the pressure in the vacuum system is higher than the setpoint,
the corresponding LED (<SP1> or <SP2>) is lit solid and the
corresponding relay is closed.
Measurement signal
(Pressure p)
Threshold value
42
Setpoint
Threshold value
M
e
a
s
u
Hysteresis
(10% of threshold)
r
e
m
e
n
t
v
a
l
u
e
Time t
OffOnOff
tina56e1-f (2015-09)
High & Low Trip Point
Both a High Trip Point and a Low Trip Point are assigned to
each setpoint. If the pressure in the vacuum system is higher
than the defined High Trip Point threshold, the corresponding
LED (<SP1> or <SP2>) is lit and the corresponding relay is
closed. If the pressure in the vacuum system is lower than the
defined Low Trip Point threshold, the correspoinding LED
(<SP1> or <SP2>) is lit and the corresponding relay is closed.
Measurement signal
(Pressure p)
Threshold value
Hysteresis
Setpoint
High T rip Po int
(10% of threshold)
Hysteresis
(10% of threshold)
Setpoint
Low Trip Point
Threshold value
Time t
OffOnOff OffOn
The setpoints can only be programmed via
• the diagnostic port (→ [3])
• the DeviceNet, Profibus, EtherCAT and RS485
interface (→ [3], [4], [5], [6]).
tina56e1-f (2015-09) 43
4.3.1 Adjusting the Setpoints SP1, SP2
The switching characteristics and the hysteresis can
only be programmed via
• the diagnostic port (→ [3])
• the DeviceNet, Profibus, EtherCAT and RS485
interface (→ [3], [4], [5], [6]).
The thresholds of the setpoints can be adjusted via
• the buttons on the gauge
• the diagnostic port (→ [3])
• the DeviceNet, Profibus, EtherCAT and RS485
interface (→ [3], [4], [5], [6]).
If both a High Trip Point and a Low Trip Point are
assigned to a setpoint, Low Trip Point only can be
adjusted via the corresponding button on the gauge.
DANGER
DANGER: malfunction
If processes are controlled via the signal output,
keep in mind that by pushing an <SP> button the
measurement signal is suppressed and the corresponding threshold value is output instead. This
can cause malfunctions.
Push the <SP> button only if you are sure that no
malfunction will cause.
44
tina56e1-f (2015-09)
Adjusting setpoint SP1 with button on the gauge
Push the <SP1> button with a pin (max. ø1.1 mm) and
keep it depressed. The gauge changes to the switching
function mode and outputs the current threshold value at
the measurement value output or on the LCD for about 5 s
and the corresponding <S> on the display blinks.
The threshold setting is increased towards the upper limit
until the button is released or the limit is reached.
Keep the button
depressed
Push the <SP1> button again:
Fine adjustment
within 0...1 s:
Change of direction
within 2...3 s:
the threshold value changes by one
unit
the threshold adjustment changes
its direction
The <SP1> button is released for more than 5 s: the
threshold value is saved and the gauge returns to the
measurement mode.
The factory setting of the upper threshold is 10% above
the Low Trip Point and 10% below the High Trip Point
(hysteresis).
tina56e1-f (2015-09) 45
If after programming of the hysteresis the corresponding
button <SP1> or <SP2> is pushed, the factory setting of
the corresponding hysteresis (10%) is reactivated.
Programming setpoint SP1
Programmable parameters:
(→ [3], [4], [5], [6])
Low Trip Point
Low Trip Enable
Low Trip Point Hysteresis
High Trip Point
High Trip Enable
High Trip Point Hysteresis
Setpoint Mode
Adjusting setpoint SP2
The adjustment procedure is the same as for setpoint SP1.
46
tina56e1-f (2015-09)
4.4 ATM Setpoint
The setpoints SP1 and SP2 of gauges with separate atmospheric pressure sensor
pressure setpoint (ATM setpoint) via the diagnostic port or serial
interface.
The ATM setpoint is defined as a factor of the current atmospheric pressure and can be set to any pressure within the measurement range of the gauge. The relay switches when the pressure in the vacuum system has reached the defined value.
Example: ATM setpoint: 110% of the atmospheric pressure
(= factor 1.1)
Switching characteristic: High Trip Point
Hysteresis: 10 mbar
Measurement signal
(Pressure p)
ATM setpoint 110%
(= factor 1.1)
1078 mbar
7)
can be programmed to atmospheric
Threshold value
Hysteresis (10 mbar)
980 mbar
7
)
The atmospheric pressure sensor measures the atmospheric pres-
sure (pressure outside the vacuum system and can be calibrated
against the diaphragm capacitive sensor in the gauge (→ 59).
tina56e1-f (2015-09) 47
Atmospheric pres-
sure (ambience)
M
e
a
s
u
r
e
m
e
n
t
v
a
l
u
e
OffOnOff
The current ATM threshold setting
• can be read / written via the diagnostic port
• is output at the measurement signal output instead of the
pressure signal, can be measured with a voltmeter, and is
displayed on the LCD display after the <SP1> or <SP2>
button is pressed
• can be read / written via the DeviceNet, Profibus and RS485
interface.
DANGER
DANGER: malfunction
If processes are controlled via the signal output,
keep in mind that by pushing the <SP> button the
measurement signal is suppressed and the corresponding threshold value is output instead. This
can cause malfunctions.
Push the <SP> button only if you are sure that no
Programming ATM setpoint
Programmable parameters:
(→ [3], [4], [5], [6])
malfunction will cause.
Factor of ATM
Low Trip Enable
Low Trip Point Hysteresis
High Trip Enable
High Trip Point Hysteresis
Setpoint Mode
Switching characteristics of the setpoints → 41.
Diagnostic port → [3].
48
tina56e1-f (2015-09)
4.5 Diagnostic Port (RS232C Interface)
The diagnostic port <DIA> permits to output the pressure reading and all status information and to enter all settings at the
same time (→ [3]).
"Accessories"
→
tina56e1-f (2015-09) 49
4.6 DeviceNet Operation
Caution
Caution: data transmission errors
The attempt to operate the DeviceNet gauge with
the RS232C interface causes data transmission
errors.
This DeviceNet gauge must not be operated with
the RS232C interface.
Before the gauge is put into operation, it has to be configured for
the DeviceNet. A configuration tool and the device specific EDS
(Electronic Data Sheet) file are required for this purpose. This
software can be downloaded from our website.
Node Address Setting (default 63
Set the node address (0 … 63
<ADDRESS>, <MSD>, and <LSD> switches
(default 63
the firmware when the gauge is switched on.
If the setting deviates from the stored value,
dec
)
dec
) via the
dec
). The node address is polled by
the new value is taken over into the NVRAM.
If a setting higher than 63 is made, the previous node address setting remains valid.
If the <MSD> switch is in the <P> position,
the node address is programmable via the
DeviceNet (→ [4]).
2
4
6
Example: Node address = 63:
P
MSD
LSD
50
tina56e1-f (2015-09)
Data Rate Setting
By means of the <RATE> switch, the data rate can
be set to 125 (<1>), 250 (<2>) or 500 kBaud (<5>)
(default 500 kBaud).
If the switch is in the <P> position, the data rate is
programmable via the DeviceNet (→ [4]).
RATE
2
Example: Data rate = 250 kBaud:
Transmitting measurement values
Depending on the Fieldbus standard used, the gauge can only
transmit measurement values when it is authorized by the
master.
When the gauge is put into operation, it is in the IDLE status
(provided there is no error) and the value defined in the Safe
State is transmitted instead of the measurement value.
Measurement values are transmitted in the EXECUTING status.
For the gauge to change from the IDLE to the EXECUTING
status, a start instruction must be executed or the I/O-Poll mode
must be started in the IDLE status.
Status LED
Two LEDs on the gauge inform on the gauge status and the
current DeviceNet status.
tina56e1-f (2015-09) 51
<STATUS MOD> (gauge status):
LED Meaning
off No supply
blinking green-red Selftest
lit solid green Normal operation
lit solid red Non recoverable error
blinking red Recoverable error (e.g. missing
DeviceNet power supply)
<STATUS NET> (network status):
LED Meaning
off Gauge not online:
• Selftest not yet concluded
• No supply, → "STATUS MOD"
blinking green Gauge online but no communication:
• Selftest concluded but no communication to other nodes established
• Gauge not assigned to any master
lit solid green Gauge online; necessary connections
established
blinking red One or several input / output connections in
"time out" status
lit solid red Communication error. The gauge has de-
tected an error that impedes communication via the network (e.g. two identical node
addresses (MAC IC) or "Bus-off")
52
tina56e1-f (2015-09)
4.7 Profibus Operation
Caution
Caution: data transmission errors
The attempt to operate the gauge with the RS232C
interface causes data transmission errors.
This gauge must not be operated with the RS232C
interface.
For operating the gauge via Profibus, prior installation of the
device specific GSD file is required on the bus master side. This
file can be downloaded from our website.
Node Address Setting (default 01
)
hex
For unambiguous identification of the gauge in a Profibus environment, a node address is required.
ADDRESS
4
26
08
08
EA
C
Node address 0 … 125
4
26
The node address is set in hexadecimal form
(00 … 7D
EA
C
switches. It can not be defined via Profibus.
LSDMSD
) via the <MSD> and <LSD>
hex
dec
6
8
E
MSD
Example: Node address = 7D
Node address >7D
hex
(>125
:
hex
)
dec
The gauge starts with the node address 126
now be set via Profibus ("Set slave address", → [5]). Addi-
C
LSD
. The address can
dec
tionally, via the attribute "NO_ADD_CHG" can be defined, if further changes of the node address are permissible.
tina56e1-f (2015-09) 53
The values of the nude address and the attribute are stored nonvolatile. To change these stored values, start the gauge with a
node address <126
and the attribute are deleted.
. The stored values of the nude address
dec
Transmitting measurement values
Depending on the Fieldbus standard used, the gauge can only
transmit measurement values when it is authorized by the
master.
When the gauge is put into operation, it is in the IDLE status
(provided there is no error) and the value defined in the Safe
State is transmitted instead of the measurement value.
Measurement values are transmitted in the EXECUTING status.
For the gauge to change from the IDLE to the EXECUTING
status, a start instruction must be executed or the cyclic data
exchange must be started in the IDLE status.
4.8 EtherCAT Operation
Caution
Caution: data transmission errors
The attempt to operate the EtherCATgauge with
the RS232C interface causes data transmission
errors.
This gauge must not be operated with the RS232C
interface.
For operating the gauge via EtherCAT, prior installation of the
device specific ESI file is required on the bus master side. This
file can be downloaded from our website.
54
tina56e1-f (2015-09)
Explicit Device Address Setting (default 00
)
hex
During device initialization, the device address switches are read
by the device firmware. This device address is supported to the
master as Explicit Device Identification.
4
2
068
E
A
4
2
068
E
A
The explicit device address is set in hexa-
4
2
decimal form (00 … FFF
068
A
E
<x100>, <x10> and <x1> switches.
) via the
hex
Example: Device address = 0xDDD (dec 3549):
0x100 * 0xD (dec 3328) + 0x10 * 0xD (dec 208) + 0x1 * 0xD
(dec 13)
Status LED
LEDs on the gauge inform on the gauge status and the current
EtherCAT status (→ [6]).
5 Deinstallation
WARNING
WARNING: fragile components
The ceramic sensor may be damaged by impacts.
Do not drop the product and prevent shocks and
tina56e1-f (2015-09) 55
impacts.
DANGER
DANGER: contaminated parts
Contaminated parts can be detrimental to health
and environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.
Caution
Caution: vacuum component
Dirt and damages impair the function of the vac-
uum component.
When handling vacuum components, take appro-
priate measures to ensure cleanliness and prevent
damages.
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with bare
hands increases the desorption rate.
Always wear clean, lint-free gloves and use clean
tools when working in this area.
Vent the vacuum system.
Put the gauge out of operation.
Untighten the fastening screw(s) and disconnect the sensor
cable.
56
tina56e1-f (2015-09)
Remove gauge from the vacuum system and install the
protective lid.
Protective lid
6 Maintenance, Repair
Gauge failures due to contamination and wear and tear,
as well as expendable parts (e.g. filament), are not
covered by the warranty.
INFICON assumes no liability and the warranty becomes null
and void if any repair work is carried out by the end-user or third
parties.
6.1 Adjusting the Gauge
The gauge is factory calibrated. Due to long time operation or
contamination, a zero drift could occur. Periodically check the
zero and adjust it if necessary.
tina56e1-f (2015-09) 57
For adjusting the zero, operate the gauge under the same constant ambient conditions and in the same mounting orientation
as normally.
The gauge is adjusted to default values. However, it can also be
adjusted to other pressure values, if the exact pressure value is
known (reference measurement).
If you are using a seal with centering ring and filter, check
that they are clean or replace them if necessary
(→ "Deinstallation").
Put the gauge into operation and operate it at atmospheric
pressure for at least 10 minutes.
Press the <ADJ> button with a pin (max. ø1.1 mm) and the
ATM adjustment is carried out: The Pirani sensor is adjusted to 1000 mbar by default.
ATM
HV
Evacuate the vacuum system to p << 10
least 2 minutes.
-5
mbar and wait at
Press the <ADJ> button with a pin and the HV adjustment
is carried out: The gauge is adjusted to 5×10
(default).
58
HV adjustment to another pressure → [3].
-5
mbar
tina56e1-f (2015-09)
If the pressure value 4.99×10-5 mbar is output at the
measurement value output or on the LCD display, the
adjustment has been successful. Otherwise, repeat the
adjustment procedure.
6.2 Adjusting the Atmospheric Pressure Sensor
The ambient pressure of the gauge is measured by a separate
atmospheric pressure sensor built into the electronics unit of the
gauge.
The atmospheric pressure sensor can be calibrated against the
diaphragm capacitive sensor in the gauge. The gauge
electronics compares the output signals of the two sensors and
carries out the necessary adjustments to the atmospheric
pressure sensor signal.
The adjustment of the atmospheric pressure sensor can
only be carried out via
• the diagnostic port (→ [3])
• the DeviceNet, Profibus, EtherCAT and RS485
interface (→ [3], [4], [5], [6]).
6.3 Troubleshooting
In the event of a fault or a complete failure of the output signal,
the gauge can easily be checked.
Required tools / material
• Voltmeter / ohmmeter
• Allen wrench, AF 2
• Spare sensor (if the sensor is faulty)
tina56e1-f (2015-09) 59
Trouble shooting gauge
The output signal is available at the sensor cable connector.
In case of an error, it may be helpful to just turn off the
mains supply and turn it on again after 5 s.
Problem Possible cause Correction
Output signal per-
≈0V
manently
<ST> lit solid red
Sensor cable defective or not
correctly connected
No supply voltage Turn on the power supply
Error Remedy the error
Gauge in an undefined status Turn the gauge off and on
FAIL PIR1
<ST> lit solid red
Electronics unit not correctly
FAIL CAP1
<ST> lit solid red
Electronics unit not mounted
FAIL ATM1
<ST> lit solid red
FAIL EEPROM
<ST> is blinking red
Pirani sensor defective Replace the sensor
mounted on sensor
Diaphragm sensor defective Replace the sensor
correctly on sensor
Atmospheric pressure sensor
defective
EEPROM error Turn the gauge off and on
Replace the gauge
FAIL SENSOR
<ST> lit solid red
Replace the gauge
Electronics unit not compatible
with the sensor
Check the sensor cable
again after 5 s (reset)
→ 62)
(
Check the connections
(electronics – sensor)
→ 62)
(
Check the connections
(electronics – sensor)
Replace the gauge
again after 5 s (reset)
Replace the sensor
→ 62)
(
60
tina56e1-f (2015-09)
Troubleshooting sensor (Pirani filament)
If the cause of a fault is suspected to be in the sensor, the
following checks can be made with an ohmmeter.
Separate the sensor from the electronics unit (→ 62).
Using an ohmmeter, make the following measurements on the
contact pins.
Ω
>>40 Ω
<<40 Ω
∞
>>35 Ω
<<35 Ω
Possible cause
Contamination
Contamination
Filament broken
Contamination
Contamination
Sensor
PCG550 (W)
40 ± 1 [Ω]
PCG554 (W)
PCG552 (Ni) 35 ± 1 [Ω]
∞ Filament broken
Correction
All of the above faults can only be remedied by replacing the
sensor (→ 62).
tina56e1-f (2015-09) 61
6.4 Replacing the Sensor
In case of severe contamination or a malfunction, the sensor can
be replaced.
Precondition
Gauge deinstalled (→ 55).
Unscrew the hexagon socket screws and remove the
sensor without twisting it.
2 mm
Place the new sensor without twisting it and lock it with the
screws.
62
tina56e1-f (2015-09)
7 Returning the Product
WARNING
WARNING: forwarding contaminated products
Contaminated products (e.g. radioactive, toxic,
caustic or microbiological hazard) can be detrimental to health and environment.
Products returned to INFICON should preferably be
free of harmful substances. Adhere to the forwarding regulations of all involved countries and forwarding companies and enclose a duly completed
*)
Form under www.inficon.com
declaration of contamination
Products that are not clearly declared as "free of harmful substances" are decontaminated at the expense of the customer.
Products not accompanied by a duly completed declaration of
contamination are returned to the sender at his own expense.
*)
.
tina56e1-f (2015-09) 63
8 Disposal
DANGER
DANGER: contaminated parts
Contaminated parts can be detrimental to health
and environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when
Separating the components
After disassembling the product, separate its components according to the following criteria:
• Contaminated components
• Other components
64
handling contaminated parts.
WARNING
WARNING: substances detrimental to the environment
Products or parts thereof (mechanical and electric
components, operating fluids etc.) can be detrimental to the environment.
Dispose of such substances in accordance with the
relevant local regulations.
Contaminated components (radioactive, toxic, caustic or biological hazard etc.) must be decontaminated in accordance
with the relevant national regulations, separated according to
their materials, and disposed of.
Such components must be separated according to their materials and recycled.
tina56e1-f (2015-09)
9 Accessories
Centering ring with fine filter DN 16 ISO-KF 211-097
Communication adapter (2 m) 8) 303-333
Ordering No.
8)
The diagnostic software (Windows NT, XP) can be downloaded
from our website.
tina56e1-f (2015-09) 65
10 Spare Parts
When ordering spare parts, always indicate:
• all information on the product nameplate
• description and ordering number
Sensor for gauge with tungsten (W) filament Ordering
3PC1-0x1-xxxx
3PC6-0x1-xxxx
3PC1-0x2-xxxx
3PC6-0x2-xxxx
3PC1-0x4-xxxx
3PC6-0x4-xxxx
3PC1-0x5-xxxx
3PC6-0x5-xxxx
3PC1-0x6-xxxx
3PC6-0x6-xxxx
3PC1-0xD-xxxx
3PC6-0xD-xxxx
PCG550
3PC1-0xE-xxxx
3PC6-0xE-xxxx
3PC1-0xF-xxxx
3PC6-0xF-xxxx
3PC1-0xK-xxxx
3PC6-0xK-xxxx
3PC1-0xM-xxxx
3PC6-0xM-xxxx
3PC1-0xN-xxxx
3PC6-0xN-xxxx
DN 16 ISO-KF
DN 16 ISO-KF, long tube
DN 16 CF-F
DN 16 CF-R, long tube
DN 25 ISO-KF
4 VCR female
8 VCR female
1/8" NPT
29×29 mm
4 VCR 90° female
7/16-20 UNF male
No.
357-925
357-926
357-927
357-928
357-929
357-932
357-931
357-930
357-934
357-935
357-933
66
tina56e1-f (2015-09)
Sensor for gauge with nickel (Ni) filament Ordering
No.
3PC2-0x1-xxxx
3PC7-0x1-xxxx
3PC2-0x2-xxxx
3PC7-0x2-xxxx
3PC2-0x4-xxxx
3PC7-0x4-xxxx
3PC2-0x5-xxxx
3PC7-0x5-xxxx
3PC2-0x6-xxxx
3PC7-0x6-xxxx
3PC2-0xD-xxxx
3PC7-0xD-xxxx
PCG552
3PC2-0xE-xxxx
3PC7-0xE-xxxx
3PC2-0xF-xxxx
3PC7-0xF-xxxx
3PC2-0xK-xxxx
3PC7-0xK-xxxx
3PC2-0xM-xxxx
3PC7-0xM-xxxx
3PC2-0xN-xxxx
3PC7-0xN-xxxx
DN 16 ISO-KF
DN 16 ISO-KF, long tube
DN 16 CF-F
DN 16 CF-R, long tube
DN 25 ISO-KF
4 VCR female
8 VCR female
1/8" NPT
29×29 mm
4 VCR 90° female
7/16-20 UNF male
357-936
357-937
357-938
357-939
357-940
357-943
357-942
357-941
357-945
357-946
357-944
tina56e1-f (2015-09) 67
Sensor for gauge with Al2O3 coated filament Ordering
No.
3PC3-0x1-xxxx
3PC8-0x1-xxxx
3PC3-0x2-xxxx
3PC8-0x2-xxxx
3PC3-0x4-xxxx
3PC8-0x4-xxxx
3PC3-0x5-xxxx
3PC8-0x5-xxxx
3PC3-0x6-xxxx
3PC8-0x6-xxxx
3PC3-0xD-xxxx
3PC8-0xD-xxxx
PCG554
3PC3-0xE-xxxx
3PC8-0xE-xxxx
3PC3-0xF-xxxx
3PC8-0xF-xxxx
3PC3-0xK-xxxx
3PC8-0xK-xxxx
3PC3-0xM-xxxx
3PC8-0xM-xxxx
3PC3-0xN-xxxx
3PC8-0xN-xxxx
DN 16 ISO-KF
DN 16 ISO-KF, long tube
DN 16 CF-F
DN 16 CF-R long tube
DN 25 ISO-KF
4 VCR female
8 VCR female
1/8" NPT
29×29 mm
4 VCR 90° female
7/16-20 UNF male
357-947
357-948
357-949
357-950
357-951
357-954
357-953
357-952
357-956
357-957
357-955
68
tina56e1-f (2015-09)
Further Information
[1] www.inficon.com
Operating Manual
Single-Channel Controller VGC401
tinb01d1 German
tinb01e1 English
INFICON AG, LI–9496 Balzers, Liechtenstein
[2] www.inficon.com
Operating Manual
Two and Three Channel Measurement and Control Unit
VGC402, VGC403
tinb07d1 German
tinb07e1 English
INFICON AG, LI–9496 Balzers, Liechtenstein
[3] www.inficon.com
Communication Protocol
Serial Interface RS232C, RS485C
PCG55x, PSG55x
tira59d1 German
tira59e1 English
INFICON AG, LI–9496 Balzers, Liechtenstein
[4] www.inficon.com
Communication Protocol
DeviceNet™ PCG55x, PSG55x
tira58e1 English
INFICON AG, LI–9496 Balzers, Liechtenstein
[5] www.inficon.com
Communication Protocol
Profibus PCG55x, PSG55x
tira56e1 English
INFICON AG, LI–9496 Balzers, Liechtenstein
[6] www.inficon.com
Communication Protocol
EtherCAT
tira85e1 English
INFICON AG, LI–9496 Balzers, Liechtenstein
®
PCG55x, PSG55x
tina56e1-f (2015-09) 69
[7] Common Industrial Protocol (CIP™) Ed. 3.5 and
DeviceNet™ Adaption of CIP Ed. 1.6 (Open DeviceNet
Vendor Association)
[8] www.odva.org
Open DeviceNet Vendor Association, Inc. DeviceNet™
Specifications
[9] IEC 61158 Type 3 elements: Industrial communication
networks – Fieldbus specifications
IEC 61784: Industrial communication networks –
Fieldbus profiles
[10] www.profibus.com
Profibus user organization
[11] ETG.5003.1: Semiconductor Device profile – Part 1:
Common Device Profile (CDP)
[12] ETG.5003.2080: Semiconductor Device profile – Part
2080: Specific Device Profile (SDP): Vacuum Pressure
Gauge
ETL Certification
ETL LISTED
The product PCG55x complies with the
requirements of the following standards:
ANSI/UL 61010-1, Issued: 2004/07/12
Ed: 2 Rev: 2008/10/28
CAN/CSA C22.2#61010-1,
3103457
Issued: 2004/07/12 Ed: 2 (R2009)
70
tina56e1-f (2015-09)
EU Declaration of Conformity
We, INFICON, hereby declare that the equipment mentioned
below complies with the provisions of the Directive relating to
electromagnetic compatibility 2014/30/EU and the Directive on
the restriction of the use of certain hazardous substances in
electrical and electronic equipment 2011/65/EU.
Pirani Capacitance Diaphragm Gauge
PCG550, PCG552, PCG554
Standards
Harmonized and international / national standards and specifications:
• EN 61000-6-2:2005
• EN 61000-6-3:2007 + A1:2011
• EN 61010-1:2010
measurement, control and laboratory use)
• EN 61326-1:2013
measurement, control and laboratory use)
Manufacturer / Signatures
INFICON AG, Alte Landstraße 6, LI-9496 Balzers
11 September 2015 11 September 2015
(EMC: generic immunity standard)
(EMC: generic emission standard)
(Safety requirements for electrical equipment for
(EMC requirements for electrical equipment for
Dr. Urs Wälchli
Managing Director
Marco Kern
Product Manager
tina56e1-f (2015-09) 71
LI–9496 Balzers
Liechtenstein
Tel +423 / 388 3111
Fax +423 / 388 3700
Original: German tina56d1-f (2015-09) reachus@inficon.com
t i na56e1- f
www.inficon.com
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