Burkert 8626, 8712, 8711, 8710, 8716 Operating Instructions Manual

Operating Instructions

Bedienungsanleitung

Instructions de Service

Types 8626 / 8710 / 8711 / 8712 / 8713 / 8716

Mass Flow Controller (MFC)

Types 8006 / 8700 / 8701 / 8702 / 8703 / 8706

Mass Flow Meter (MFM)

We reserve the right to make technical changes without notice.
Technische Änderungen vorbehalten.
Sous resérve de modification techniques.

© 2002 Bürkert Werke GmbH & Co. KG

Operating Instructions 0070

2/10_EU-ml_00804577

MassFlowController (MFC)

Types 8626 / 8710 / 8711 / 8712 / 8713 / 8716

MassFlowMeter (MFM)

Types 8006 / 8700 / 8701 / 8702 / 8703 / 8706

GENERAL NOTES ...................................................................................................................................... 5

Symbols......................................................................................................................................................... 5

Safety notes ................................................................................................................................................ 5

Protection from damage by electrostatic charging................................................................ 6

Scope of delivery...................................................................................................................................... 6

Warranty conditions ................................................................................................................................ 6

SYSTEM DESCRIPTION ......................................................................................................................... 7

Type systematics..................................................................................................................................... 7

General function ....................................................................................................................................... 8

Sensors ......................................................................................................................................................... 9

Thermal measurement principle ................................................................................................. 9

Inline sensor (Types 8626 / 8006 / 8716 / 8706) ............................................................10

Bypass sensor in conventional technology "capillary"

(Types 8710 / 8700) ...................................................................................................................... 11

Bypass sensor in CMOSens® technology

(Types 8713 / 8703 / 8712 / 8702 / 8711 / 8701) ............................................................ 12

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Control electronics ................................................................................................................................ 13

Proportional valve .................................................................................................................................. 14

TECHNICAL DATA ................................................................................................................................... 17

Type 8626 / 8006 MASS FLOW INLINE ................................................................................... 18

Type 8710 / 8700 MASS FLOW CMOSens® ........................................................................ 19

Type 8711 / 8701 MASS FLOW CMOSens® ........................................................................ 20

Type 8712 / 8702 MASS FLOW CMOSens® ........................................................................ 21

Type 8713 / 8703 MASS FLOW CMOSens® ........................................................................ 22

Type 8716 / 8706 MASS FLOW INLINE ................................................................................... 23

MFC/MFM - 3

ASSEMBLY, INSTALLATION AND COMMISSIONING ...................................................... 24

Dimensional drawings.......................................................................................................................... 24

General notes on installation and operation ............................................................................ 28

Mechanical and fluidic installation ................................................................................................. 29

Electrical connections.......................................................................................................................... 30

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Inputs / outputs ........................................................................................................................................ 37

Operation with additional isolation valve ............................................................................... 29

Fluidic connections .......................................................................................................................... 29

Assembly of clamping ring screw joints ............................................................................... 30

Connection configuration Type 8626 / 8006 ....................................................................... 31

Connection configuration Type 8710 / 8700 ..................................................................... 32

Connection configuration Type 8711 / 8701 ....................................................................... 33

Connection configuration Type 8712 / 8702 ....................................................................... 34

Connection configuration Type 8713 / 8703 ....................................................................... 35

Connection configuration Type 8716 / 8706 ....................................................................... 36

Setpoint input ....................................................................................................................................... 37

Process value output ...................................................................................................................... 37

Bus connection .................................................................................................................................. 38

LEDs to indicate the operating mode (default configuration) .................................... 38

Binary inputs (default configuration) ....................................................................................... 38

Binary outputs (default configuration) .................................................................................... 39

Applicationspecific settings of binary inputs and outputs ........................................... 39

Operating modes of the MFC .......................................................................................................... 41

Standard control operation .......................................................................................................... 41

Autotune routine ................................................................................................................................. 41

Safety function .................................................................................................................................... 42

Setpoint profile .................................................................................................................................... 42

Control operation ............................................................................................................................... 42

Operating modes of the MFC ....................................................................................................43

MAINTENANCE .......................................................................................................................................... 44

MALFUNCTION / TROUBLESHOOTING .................................................................................. 45

APPENDIX A: ACCESSORIES (ELECTRICAL) ..................................................................... 47

APPENDIX B: ACCESSORIES (FLUIDIC) ................................................................................. 48

APPENDIX C: MassFlowCommunicator (PC SOFTWARE) ........................................ 49

4 - MFC/MFM

GENERAL NOTES

Symbols

The following symbols are used in these operating instructions:

marks a work step that you must carry out.

ATTENTION!

NOTE marks important additional information, tips and

marks notes on whose non-observance your health or the
functioning of the device will be endangered.

recommendations.

Use according to the instruction

ATTENTION!

The device only must be used with the parameters specified in the chapter
"Technical Data" and on the device label.
Read the chapter of the operating instructions very carefully an pay attention to
the requirements in the safety notes.

The use according to the instructions expecially includes the
media quality. Contaminated media and media containing
particles influences the accuracy. Liquid media entering the
sensor area, can affect the sensor and the function of the
MFC / MFM.
In this cases you have to install applicable maintenance units
like filters, liquid precipators etc..

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Follow the instructions in the single chapters and observe the safety notes. Not
following the instructions and the safety notes, causes a lapse of liability claim.

Safety notes

• Keep to standard engineering rules in planning the use of and operating the
device!

• Installation and maintenance is only allowed by specialist personnel using
suitable tools!

• Observe the current regulations on accident prevention and safety for
electrical devices during operation and maintenance of the device!

• Before interfering with the system, always switch off the voltage!

• Take suitable precautions to prevent unintended operation or damage by
unauthorized action!

• On non-observance of this note and unauthorized interference with the
device, we will refuse all liability and the guarantee on device and
accessories will become void!

MFC/MFM - 5

Protection from damage by electrostatic charging

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SENSITIVE COMPONENTS/

Scope of delivery

Immediately after receipt of the delivery, make sure the contents agree with the
stated scope of delivery. The latter comprises:

• MFC or MFM Type 8626, 8006 or 87xx

• Operating Instructions (possibly on data carrier)

• in the case of bus devices, supplements to the Operating Instructions

• Report of final testing / calibration

ATTENTION

EXERCISE CAUTION ON

HANDLING!

ELECTROSTATICALLY

MODULES

(possibly on data carrier)

This device contains electronic components that are
sensitive to electrostatic discharge (ESD). Contact
to electrostatically charged persons or objects will
endanger these components. In the worst case,
they will be immediately destroyed or will fail after
commissioning.

Observe the requirements of EN 100 015 - 1 in
order to minimize the possibility of, or avoid, damage
from instantaneous electrostatic discharge. Also
take care not to touch components that are under
supply voltage.

The plug connectors matching the electrical interfaces of the MFC may be
obtained as accessories.

In case of irregularities, please contact at once our Customer Center:

Bürkert Fluid Control Systems
Customer Center
Chr.-Bürkert-Str. 13-17
D-76453 Ingelfingen
Tel. : [phone]
Fax: [phone]
E-mail: [e-mail]

or your Bürkert Distributor.

Warranty conditions

Bürkert grants a warranty on the proper functioning of the MFC or MFM for one
year, provided that the device is used as intended and that the specified conditions
fo use are complied with.

If the device does not function perfectly, it will be repaired or exchanged within the
warranty term free of charge.

ATTENTION!

The warranty extends only th the MFC or MFM and its
components, not however to consequential damage of any kind
caused by failure or malfunction of the device.

6 - MFC/MFM

SYSTEM DESCRIPTION

Type systematics

These Operating Instructions contain information for the following Mass Flow
Controllers (MFC) and Mass Flow Meters (MFM) from the Bürkert product range:

Typ e

no.

Type End value range

nom (lN

/min)

/ N

Q

referred to air

Sensor Remarks

2

8626 MFC 25 ... 1500 Inline for devices from

Jan. 2003

1)

8006 MFM 25 ... 1500 Inline for devices from

Jan. 2003

1)

8716 MFC 25 ... 500 Inline

8706 MFM 25 ... 1500 Inline
8713 MFC 0.02 ... 50 Bypass / CMOSens
8703 MFM 0.02 ... 50 Bypass / CMOSens
8712 MFC 0.02 ... 50 Bypass / CMOSens
8702 MFM 0.02 ... 50 Bypass / CMOSens

8711 MFC 0.02 ... 50 Bypass / CMOSens
8701 MFM 0.02 ... 50 Bypass / CMOSens

®2)

®

®

®

®

®

8710 MFC 0.005 ... 1 Bypass / Capillary
8700 MFM 0.005 ... 1 Bypass / Capillary

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1)

Please observe in this connection the note on the device types 8626 / 8006 in the section

Configuration Type 8626/8006.

2)

CMOSens® is a registered trademark of Sensirion AG (Switzerland)

Connection

MFC/MFM - 7

General function

The MFCs of Types 8626 / 8716 / 8713 / 8712 / 8711 / 8710 are compact devices
with which the mass flow of gases is controlled. They control to a preset setpoint
value, independent of disturbances such as pressure variations or flow
resistances that vary with time, e.g. as a result of filter contamination.

The MFCs contain the components flow rate sensor (Q sensor), electronics (with
the functions signal processing, control and valve drive), and a proportional
solenoid valve as the servo component.

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w

p

Fig.: Components of a Mass Flow Controller

The setpoint value (w) is set electrically via a standard signal or a field bus. The
process value (x) measured by the sensor is compared in the controller with the
setpoint value. The correcting variable is sent as a plus-width modulated voltage
signal to the servo component. The pulse-duty factor of the voltage signal is varied
according to the control deviation determined.

The process value, in addition, is sent out via an analog electrical interface or a
field bus and is available to the user for monitoring purposes or further evaluation
(e.g. calculation of consumption by integration).

xd=w-x

x

Q sensor

controller

x

out

y

servo
component

The thermal measurement principle guarantees that the MFCs control to the
required mass flow to a large extent independently of pressure and temperature
variations in the respective application.

The MFMs, in contrast to the corresponding MFCs, do not have a proportional
valve, so that these devices can only be used to measure the mass flow and not
to control it. The characteristics of the other components, described in the
following, in particular the sensors, are identical with those of the MFCs.

8 - MFC/MFM

Sensors

Thermal measurement principle

The flow sensors employed work on a thermal (anemometer) measurement
principle.

They measure in each case the product of density an flow velocity and thus deli­ver a signal related to the quantity of material flowing. For most applications the
relevant quantity
measurement of secondary quantities, such as density, and the signal can be
further processed in the controller as the process value1).

Depending on the flow rate range and the intended market for the devices, the
individual types contain sensors with three different variants of flow rate
measurement. In the following, the functioning and associated characteristics of
these sensors are briefly described.

mass flow

is directly determined thereby, without additional

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NOTE

Please take into account that the relative sensitivity for different
gases differs for the three measurement principles and any
correction factors existing for one operating gas to another are in no
case transferable between sensor variants.

1)

It is true that the units generallly used for characterizing the measurement range, „lN/min“ or „m
dimensions "volume/time", but because of the reference to a standard state (here p=1013 mbar and
T=273 K), we are actually dealing with mass flow rates specific to gas types. These are obtained (e.g. in „kg/h“)
by multiplication of the standard volumetric flow rate by the density of the operating gas in the standard state ρN .

3

/h“ , have the

N

MFC/MFM - 9

Inline sensor (Types 8626 / 8006 / 8716 / 8706)

This sensor works as a hot-film anemometer in the so-called CTA

Temperature Anemometer)

coefficients in the medium flow form a resistance bridge with three resistors
situated outside the flow.

The first resistor in the medium flow (RT) measures the fluid temperature; the
second, lower resistance resistor (RS) is always heated to maintain its
temperature a certain amount above that of the medium. The heating current
required is a measure of the heat dissipation by the flowing gas and represents
the primary measurement value.

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Suitable flow conditioning inside the MFC or MFM and calibration with high-quality
flow standards guarantee that the quantity of gas flowing per unit time can be
derived with high precision from the primary signal.

(Constant

mode. Two resistors with exactly defined temperature

sensor with
electronics

R2R

R

K

1

PID

I

s

gas flow

prefilter

Fig.: Functional diagramm of the Inline sensor

flow conditioning

R

T

R

s

Direct medium contact by the resistors RT and RS in the main flow assure
excellent dynamics for the devices with response times of a few hundred
miliseconds on sudden changes in the setpoint or process value. Owing to the
arrangement of the resistors on a glass support lying tangential to the flow, the
sensor is only slightly prone to contamination. The measurement range of the
Inline sensor is limited at the bottom end by instrinsic convection in the flow
channel, which also occurs when the control valve is closed. It is hece unsuitable
for devices whose working range must extend to flow rates below ca. 1 lN/min.
The signal from intrinsic convection in the flow channel depends on the installation
position of the device. In order that high precision can be obtained at low flow
rates, the actual installation position should be identical to that specified on
ordering1). For the same reason, the operating pressure should not differ too much
from the calibration pressure.

1)

The device is calibrated in the installation position stated in the questionnaire to be found in the Annex to the Data

Sheet.

10 - MFC/MFM

Bypass sensor in conventional technology "capillary"
(Types 8710 / 8700)

Measurement is also on the bypass principle. A laminar flow element in the main
channel generates a small pressure drop. This drives a small flow proportional to
the main flow through the actual sensor tube.

On this narrow tube are wound two heater resistors which are connected in
measuring bridge. In the zero-flow state, the bridge is balanced, but with finite flow,
heat is transported in the flow direction and the bridge becomes unbalanced.

sensor tube

gas flow

prefilter

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Fig.: Schematic diagram of bypass measurement

The dynamics of the measurement are determined by the tube walls, which act as
a thermal barrier. They are hence significantly poorer, on principle, than with
sensors having resistor placed directly in the medium flow. Through use of suitable
software in the controller, correction times are obtained that are adequate for a
large part of the applications (in the range of a few seconds).

With contaminated media, we recommend installing filter elements upstream. This
avoids changes in the division ratio between main flow and sensor tube, as well as
changes in the head transmission chaused by deposits on the walls.

With these sensors, even aggressive gases can be controlled, since all essential
parts in contact with the medium are fabricated in stainless steel. With this sensor
prinziple it is also possible to convert between different gases. A choice of some
gases are listed in the table below, others on request. Q(gas) = f x Q (N2).

Gas Factor f

N

2

1.00
Air 1.00
O
H

2

2

0.99

1.01

By using the gas factors it is possible
that the accuracy is not within the
datasheet specification. For applications
which need high accuracy it is
recommended to calibrate under
application conditions.

Ar 1.4
He 1.41
CO

2

0.76

MFC/MFM - 11

Bypass sensor in CMOSens® technology
(Types 8713 / 8703 / 8712 / 8702 / 8711 / 8701)

In this technology, the mass flow is measured in a specially shaped flow channel
whose wall contains at one point a Si chip with a membrane that has been formed
by etching. To this membrane are applied, in CMOSens® technology, a heating
resistor and two temperature sensors, arranged symmetrically upstream and
downstream of the heater.

When the heating resistor is fed with a constant voltage, the voltage difference
between the temperature sensors is a measure of the mass flow of the gas

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flowing in the channel over the chip.

gas flow

sensor element heater T sensors

Fig.: Schematic diagram of the bypass sensor in CMOSens® technology

The cross-section of the flow channel is small enough that an adequate
measurement signal is generated already at flow rates of less than 1 cm

3

N

/min.
The upper measurement limit is reached when the originally laminar flow in the
channel becomes turbulent. Higher flow ranges can be obtained by placing a
bypass element in a larger channel which is connected in parallel. When the
division ratio remains constant, measurement of the partial flow, after suitable
calibration, allows the total flow to be calculated.

The low thermal mass of the temperature sensors and their direct contact with the
flow (apart from a protective layer) result in a very fast reaction of the sensor
signal to spontaneous changes in the flow. In this way, the MFC can compensate
changes in the setpoint or process value within a few 100 ms. Moreover, the
sensor has a high sensitivity down to the smallest flow rates as well as additional
correction and diagnostic possibilities via the signal from a further temperature
sensor on the chip.

12 - MFC/MFM

Control electronics

Processing of the setpoint and actual flow signals, and drive of the actuator are
carried out by a microprocessor.

The sensor signal is filtered by the control electronics and with the aid of the
calibration curve stored in the device, converted to a value corresponding to
actual flow rate.

In order that critical process, in which a too great flow change is not permitted, can
also be controlled, a ramp function can be activated via the software
"MassFlowCommunicator" (see Appendix C). Here the parameters for rising and
sinking setpoinds can be set separately. Further details on the ramp function can
be taken from the software documentation.

Actuating signal:

actuating signal = setpoint - process value

xd = w - x

The actuating signal is processed according to a PI algorithm.

The control parameters are set in the factory according to type. In order to take
into account the characteristics of the controlled member, the controller works with
member-dependent amplification factors. During the running of the Autotune
routine, these are determined automatically.

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In the device a parameter is stored with which the control dynamics can be altered
with the software "MassFlowCommunicator". Its extreme values correspond on
the one hand to very rapid correction, whereby overswing is possibly accepted,
and on the other hand to a slow asymptotic correction to the desired flow rate. The
first can lead to immediate reaction of the controller to very small actuating signals,
whereby the control can become very unsteady. With less dynamic processes,
the controller behaviour can be damped, so that small variations in the process
value or setpoint are corrected only slowly.

As the correcting variable, a pulse-width modulated (PWM) signal is sent to the
proportional valve. The frequency of this signal is adapted to the respective valve.

To assure the tight-closing function of the valve, zero-point switch-off is built in.
This becomes active if the following conditions simultaneously occur:

setpoint < 2 % of nominal flow

and process value < 2 % of nominal flow

1)

With the zero-point switch-off activated, the PWM signal is set to 0 %, so that the
valve closes completely.

1)

With types 8711 / 8712 / 8713 higher control ranges on request.

MFC/MFM - 13

Depending on the version of the device, the setpoint is set either via the standard
signal input as an analog signal, or digitally via the field bus interface. Independent
of the control status, the flow rate measured by the sensor is sent as an analog
signal via the standard signal input or digitally via the field bus interface.

In order to obtain a dynamic or a more sluggish process value output signal, the
degree of filtering of the output signal can be adjusted with the software
"MassFlowCommunicator".

Proportional valve

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In all MFC series, the servo elements used are linear-armature proportional
valves from the Bürkert valve range. Design measures, especially with the valves
in the MFC for low flow rate (Types 8710 / 8711 / 8712 / 8713), assure low-friction
guidance of the moving armature. In combination with the PWM drive, this assures
a continuous, largely linear characteristic curve as well as high response
sensitivity. Both are important for optimal functioning in the closed control loop of
the MFC.

The nominal diameters of the valves are determined from the required nominal
flow rate Q
operating gas.

, the pressure conditions in the application and the density of the

nom

The manufacturer selects a proportional valve on the basis of these data whose
flow coefficient k

enables a maximum flow rate of at least the required nominal

Vs

flow rate under the specified pressure conditions, according to flow equations:

a) for subcritical flow (p2 > p1/2) :

Q

max

= 514 *

∆

ρ

N

**T

2

pp

1

* kVs > Q

nom

(1)

or

b) for supercritical flow (p2 < p1/2) :

1

Q

= 257 *

max

ρ

Where the pressures p1 and p2 in equations (Gl.) (1) and (2) refer to
measurement points directly before and after the MFC.

The pressures before and after the MFC are often unknown, only the inlet and
outlet pressures p

*

p

occurs over other flow resistances (isolation valves, nozzles, piping, filters,

2

*

and p

1

etc.) whose flow coefficient may be collected together in a variable kVa.

* p1* kVs > Q

1*

TN

*

for the overall system. A part of the pressure drop p

2

nom

(2)

*

-

1

14 - MFC/MFM

In this case, in analogy to equations (1) and (2), one first determines from the

ψ

desired nominal flow rate Q
coefficient of the overall system k

and the pressures p

nom

. Via the relationship

Vges

*

and p

1

*

, the minimum flow

2

2

⎛

(3)

⎜
⎜
⎝

which describes series connection of the resistances of the MFC (kVs) and the
system (kVa), one can determine, with known kVa, the required kVs value of the
MFC or the nominal diameter of the servo element. This will be greater than if the
other flow resistances were not present.

The so-called valve authority

is important for the control characteristics of the MFC in the system. It should not
be less than 0.3 ... 0.5.

Meaning of the symbols in the equations:

k

Vges

k

Va

⎞
⎟

=

⎟
⎠

()

p

∆

=

0

()

p

∆

0

flow coefficient of the system with MFC installed

flow coefficient of the system with MFC not installed (to be determined by
"short-circuiting" the piping at the point of installation)

⎞

⎛
⎜

⎜
⎝

=

[]

⎛

⎟

⎜

+

⎟

⎜

⎠

⎝

2

k

VsV

kk

+

22

⎞

111

⎟
⎟

kkk

VaVsVges

⎠

22

VsVa

(4)

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k

flow coefficient of the MFC with fully opened servo element in [m³/h]

Vs

ρ

density of the medium in [kg/m3] under standard conditions (1013 mbar,

N

273 K)

T

temperature of the gas in K

1

p1, p2absolute pressures in [bar] before and after the MFC

∆p = p1 - p

Q

max

Q

nenn

(∆p)0pressure drop over the entire system

(∆p)V0fraction of the pressure drop occurring over the MFC with the valve fully

2

maximum flow rate of the valve in [lN/min]

maximum flow rate of the MFC in [lN/min] when correction to 100 % of
the setpoint has been made

open

MFC/MFM - 15

NOTE

english

When the device is operated within the specified pressure range, the proportional
valve assumes the functions of both control and tight closure.

The system must not be dimensioned so closely with regard to the
flow coefficient (kVa) that at the desired flow rate, the major part of
the available pressure drop is used up there, and then the nominal
valve diameter of the MFC is chosen so great (kVs >> kVa) that only
the small remaining part of the pressure is dropped over the MFC. In
this case, the valve authority would be too small and only a small
part of the working range of the valve utilized. That could be greatly
detrimental in general to the resolution and control performance.
If the system has been dimensioned „to closely“, increasing the
nominal diameter of the MFC valve does not help. In this case an
increase either in the admission pressure or the kVa value should be
made, e.g. by increasing the pipe diameter, to keep the valve
authority within the permitted range.

16 - MFC/MFM

TECHNICAL DATA

Environmental tests

• Temperature cycles to EN 60068-2-14, Nb and EN 60068-2-33

• Head and humidity to EN 60068-2-38, Z/AD

• Shocks to EN 60068-2-27

• Vibration to EN 60068-2-6

• IP protection type to EN 60529

• Free fall to EN 60068-2-32

• UPS fall test to DIN ISO 2248 and DIN ISO 2206

Electromagnetic compatibility (EMC)

All devices are CE conforming for industrial use and have passed the associated
EMC tests to

EN 50081-2:03/94 „Basic engineering standard for interference emission;

Part 2: Industrial domain“

EN 50082-2:02/96 „Basic engineering standard for interference resistance;

Part 2: Industrial domain“.

Communications interface

RS232: direct connection to PC via RS232 adapter, communication with special

software (MassFlowCommunicator – siehe Appendix C).

With 8711 / 8701, 8713 /8703 and 8710 / 8700, an external inferface
driver is necessary (integrated in adapter for these types - see
Appendix A).

RS485: connection via RS485 adapter (excerpt types 8713 / 8703)

BUS: Profibus DP or DeviceNet connection (bus devices only)

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Seal material

FKM (other materials on request)

The compatibility of the seal material with the usual operating media can be taken
from the Bürkert stability tables.

ATTENTION!

The data given in this table are provided for information and
cannot replace own tests under the actual operating
conditions. In particular, no guarantee for medium compatibility
can be derived thereform.

MFC/MFM - 17

Type 8626 / 8006 MASS FLOW INLINE

Full scale range (Q
Operating media neutral, not-contaminated gases, others on request
max. operating pressure 10 bar, depending on nom. valve diameter
Calibration medium operating gas or air
Medium temperature -10 to + 70 °C

Measurement accuracy
(after 15 min. warm-up)

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Linearity ± 0.25 % of F.S.
Reproducibility ± 0.1 % of F.S.
Control range / Span 1 : 50

Settling time (T
Operating voltage 24 V DC ± 10 %; residual ripple < 5 %

Connection cross-section min. 0.5 mm² (0.75 mm² for valve Type 2836)
Power consumption 20 W - max. 50 W (Type 8626,dep. on Valve)

Electrical isolation yes
Setpoint setting

3 binary inputs low-activated, connect to GND to activate
Process value output

(to be chosen)

Connections 8-pole socket

Housing material aluminium (anodized) or stainless steel 1.4305
Cover material aluminium diecasting, painted
Installation position horizontal or vertical

) 25 to 1500 IN/min (N2 equivalent)

nom

Ambient temperature -10 to + 45 °C

± 1.5 % of Rdg. ± 0.3 % of F.S.

) < 500 ms

95%

22.5 W - max. 52.5 W (Type 8626 bus, dep. on
valve)

10 W (Type 8006)

12.5 W (Type 8006 bus)

0 - 10 V

(to be chosen)

0 - 5 V
0 - 20 mA

4 - 20 mA
Resolution 2.5 mV or 5 µA
Input impedance

> 20 kOhm

(voltage input)
Input impedance

< 300 Ohm

(current input)

0 - 10 V

0 - 5 V

0 - 20 mA

4 - 20 mA
Resolution 10 mV or 20 µA

max. current (volt. outp.)

10 mA

max. burden (curr. outp.) 600 Ohm
2 relay outputs potential-free changeover 60 V, 1 A, 60 VA

15-pole SUB-HD socket
9-pole SUB-D socket (bus version only)

Type of protection IP 65 (with the specified plug connectors)

18 - MFC/MFM

Type 8710 / 8700 MASS FLOW CMOSens

®

Full scale range (Q

) 0.005 to 1.0 IN/min (N2 equivalent)

nom

Operating media neutral, not-contaminated gases, others on request
max. operating pressure

(inlet)

10 bar (145 psi), depends on valve orifice

Calibration medium operating gas or air with conversion factor
Medium temperature -10 to + 70 °C

Ambient temperature -10 to + 50 °C

Measurement accuracy
(after 30 min. warm-up)

± 1.5 % of Rdg. ± 0.3 % of F.S.

Linearity ± 0.25 % F.S.
Reproducibility ± 0.1 % F.S.
Control range / Span 1 : 50

Settling time (T

)< 3 sec.

95%

Power supply 24 V DC ± 10 %; residual ripple < 5 %
Connection cross-section min. 0.25 mm² (better 0.5 mm²)
Power consumption max. 6.5 W (dep. on value) /

max. 9 W (fieldbus version)
Electrical isolation no
Setpoint setting

(to be chosen)

0 - 10 V

0 - 5 V

0 - 20 mA or 4 - 20 mA

Resolution 2.5 mV or 5 µA
Input impedance

> 20 kOhm

(voltage input)
Input impedance

< 300 Ohm

(current input)
2 binary inputs low-activated, connected to GND to activate

Process value output
(to be chosen)

0 - 10 V

0 - 5 V

0 - 20 mA or 4 - 20 mA

Resolution 10 mV or 20 µA
max. voltage

10 mA

(voltage output)
max. burden

600 Ohm

(current output)
2 Relay output potential-free changeover 25 V, 1 A, 25 VA

Connection 15-pole Sub-D-plug

5-pole M12 plug (only with DeviceNet)

5-pole M12 socket (only with Profibus DP)

Type of protection IP 50

Housing material / Cover
material

Aluminium or stainless steel / PBT

Installation position horizontal or vertical

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MFC/MFM - 19

Type 8711 / 8701 MASS FLOW CMOSens

®

Full scale range (Q

max. operating pressure
(inlet)

Medium temperature -10 to + 70 °C

Measurement accuracy

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(after 1 min. warm-up)
Linearity ± 0.1 % F.S.
Reproducibility ± 0.1 % F.S.

Power Supply 24 V DC, ± 10 %; residual ripple < 5%

Power consumption max. 13 W (dep. on valve)
Electrical isolation no

(to be chosen)

) 0.02 to 50 lN / min (N2 equivalent)

nom

Operating media neutral, non-contaminated gases, others on request

10 bar (145 psi), depends on valve orifice

Calibration medium operating gas or air with conversion factor

Ambient temperature -10 to + 50 °C

± 0.8 % of Rdg. ± 0.3 % F.S.

Control range / Span 1:50, higher span on request
Settling time (T

Connection cross-section min. 0.25 mm

Setpoint setting

) < 300 ms

95%

0 - 10V

2

(better 0.5 mm2)

0 - 5 V
0 - 20 mA or 4 - 20 mA

Resolution

Input impedance

2.5 mV or 5 µA

> 20 kOhm
(voltage input)
Input impedance

< 300 Ohm
(current input)

2 binary inputs Low-activated, connected to GND to activate

Process value output
(to be chosen)

0 - 10V

0 - 5 V

0 - 20 mA or 4 - 20 mA

Resolution

Max. voltage

10 mV or 20 µA

10 mA
(voltage output)
max. Burden

600 Ohm

(current output)

1 Relay output Potential-free changeover 25 V, 1 A, 25 VA

Connection 15-pole Sub-D-Socket

5-pole M12 plug (only with DeviceNet)
5-pole M12 socket (only with Profibus DP)

Type of protection IP 50

Housing material /

Cover material

Aluminium or stainless steel / sheet steel, chrome

plated or PBT

Installation position horizontal or vertical

20 - MFC/MFM

Type 8712 / 8702 MASS FLOW CMOSens

®

Full scale range (Q

Operating media

) 0.02 to 50 lN/min (N

nom

neutral, non-contaminated gases,
others on request

equivalent)

2

max. operating pressure 10 bar, depending on nom. valve diameter
Calibration medium operating gas or air
Medium temperature -10 to + 70 °C

Ambient temperature -10 to + 50 °C

Measurement accuracy

± 0.8 % of Rdg. ± 0.3 % of F.S.

(after 1 min. warm-up)
Linearity ± 0.1 % of full scale
Reproducibility ± 0.1 % of full scale
Control range / Span 1 : 50; higher span on request
Setting time (T

) < 300 ms

95%

Operating voltage 24 V DC ± 10 %; residual ripple < 5 %
Connection cross-section min. 0.25 mm² (better 0.5 mm²)
Power consumption max. 6.5 W (Type 8712)

max. 9 W (Type 8712 bus)

2.5 W (Type 8702)

5 W (Type 8702 bus)
Electrical isolation yes
Setpoint setting

(to be chosen)

0 ... 10 V

0 ... 5 V

0 ... 20 mA

4 ... 20 mA

Resolution 2.5 mV or 5 µA
Input impedance

> 20 kOhm

(voltage input)
Input impedance

< 300 Ohm

(current input)
3 binary inputs low-activated, connect to GND to activate
Process value output

(to be chosen)

0 ... 10 V
0 ... 5 V
0 ... 20 mA

4 ... 20 mA
Resolution 10 mV ou 20 µA
max. current (voltage outp.) 10 mA
max. burden (curr. outp.) 600 Ohm
2 relay outputs potential-free changeover 60 V, 1 A, 60 VA

Connections 8-pole socket

15-pole SUB-HD socket

9-pole SUB-D socket (bus version only)
Type of protection IP 65 (with the specified plug connectors)

Housing material
Cover material

stainless steel 1.4305

PBT

Installation position horizontal or vertical

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MFC/MFM - 21

Type 8713 / 8703 MASS FLOW CMOSens

®

Full scale range (Q
Operating media neutral, non-contaminated gases, others on request

Max. operating pressure
(inlet)

Calibration medium Operating gas or air with conversion factor
Medium temperature -10 to + 70 °C
Ambient temperature -10 to + 50 °C
Measurement accuracy

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(after 1 min. warm-up)
Linearity ± 0.1 % F.S.
Repeatability ± 0.1 % F.S.
Control range/ Span 1 : 50; higher span on request
Settling time (T

Power Supply 24 V DC ± 10 %; residual ripple < 5 %
Connection cross-section min. 0.25 mm² (better: 0.5 mm²)
Power consumption max. 6.5 W
Electrical isolation yes

Setpoint setting Digital communication via RS 485
1 binary input Low-activated, connected to GND to activate
Process value output Digital communication via RS 485
1 relay output Potential-free changeover 25 V, 1 A, 25 VA
Connections 9-pole Sub-D-plug

Type of protection IP 50
Housing material

/ Cover material
Installation position horizontal or vertical

) 0.02 to 50 lN/min (N2 equivalent)

nom

10 bar (145 psi), depends on valve orifice

± 0.8 % of Rdg. ± 0.3 % F.S.

) < 300 ms

95%

Aluminium or stainless steel 1.4305 / sheet steel,
chrome plated

22 - MFC/MFM

Type 8716 / 8706 MASS FLOW INLINE

Full scale range (Q

8706
8716

nom

)

25 to 1500 l
25 to 500 l

/min (N2 equivalent)

N

/min (N2 equivalent)

N

Operating media neutral, non-contaminated gases, others on request
max. operating pressure 10 bar, depending on nom. valve diameter
Calibration medium operating gas or air with conversion factor

Medium temperature -10 to + 70 °C

Ambient temperature -10 to + 45 °C

Measurement accuracy

± 1.5 % of Rdg. ± 0.3 % F.S.

(after 15 min. warm-up)
Linearity ± 0.25 % F.S.
Reproducibility ± 0.1 % F.S.

Control range / Span 1 : 50
Settling time (T

) < 500 ms

95%

Operating voltage 24 V DC ± 10 %; residual ripple < 5 %
Connection cross-section min. 0.5 mm²

20 W - max. 30 W (Type 8716 dep. on valve)

Power consumption

22.5 W - max. 32.5 W (Type 8716 bus,dep. on valve)

10 W (Type 8706)

12.5 W (Type 8706 bus)

Electrical isolation yes

Setpoint setting

(to be chosen)

0 - 10 V, 0 - 5 V, 0 - 20 mA,

4 - 20 mA

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Resolution 2.5 mV or 5 µA
Input impedance

> 20 kOhm

(volt. inp.)
Input impedance

< 300 Ohm

(curr. inp.)
3 binary inputs low-activated, connect to GND to activate

Process value output
(to be chosen)

0 - 10 V
0 - 5 V
0 - 20 mA

4 - 20 mA
Resolution 10 mV or 20 µA
max.current (volt. outp.) 10 mA
max. burden (curr. outp.) 600 Ohm
2 relay outputs potential-free changeover 60 V, 1 A, 60 VA
Connections 8-pole socket

15-pole SUB-HD socket
9-pole SUB-D socket (bus version only)

Type of protection IP 65 (with the specified plug connectors)

Housing material aluminium (anodized) or stainless steel 1.4305

Cover material PBT

Installation position horizontal or vertical

MFC/MFM - 23

ASSEMBLY, INSTALLATION AND COMMISSIONING

Dimensional drawings

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Fig.: Type 8626 / 8006 MASS FLOW INLINE (version with proportional valve 6022 and standard sensor body)

2 x M

4

- 6 deep

28

87

115,5

A

Bus version

Fig.: Type 8710 / 8700 MASS FLOW CAPILLARY / Type 8711/8701 MASS FLOW CMOSens

16,5

12

Bus version

107

12

20

84

43,5

A

12,5

Bus version

®

24 - MFC/MFM

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Fig.: Type 8711 / 8701 MASS FLOW CMOSens

29

ca. 3.5

114

Fig.: Type 8711 with external valve

A

12

M4 - 6 deep

150

170

®

(with steel sheet housing)

M4 - 6 deep

A

12

ca. 24

85

12.5

37

MFC/MFM - 25

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Fig.: Type 8712 / 8702 MASS FLOW CMOSens

®

Fig.: Type 8713 / 8703 MASS FLOW CMOSens

26 - MFC/MFM

®

Fig.: Type 8716 / 8706 MASS FLOW INLINE (with standard sensor body)

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MFC/MFM - 27

General notes on installation and operation

Before installation:

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Proceed in the following sequence on commissioning an MFC/MFM:

1. Mechanical and fluidic installation

2. Electrical installation

3. Pressurize with operating medium

4. Regular working operation

NOTE The specified precision will be obtained only when, after switching on,

Install a suitable filter upsteam to assure cleanliness of the operating

medium.
Observe the installation position (see calibration data).
Provide a power supply with adequate power.
Observe the max. residual ripple on the operating voltage.
Remove dirt from the piping before installation of the MFC.

the thermal equilibration processes have been completed and the
device has reached its operating temperature (the time required
depends on the device type, see

Technical Data

).

28 - MFC/MFM

Operation with additional isolation valve

The proportional valve integrated into the MFC assumes the tight-closure function,
so that an additional isolation valve is not required in the medium circuit. If for
safety reasons, however, an additional isolation valve is placed before or after the
MFC, the drive sequence should be as follows:

Start

1. Connect pressure supply

2. Open isolation valve

3. Set MFC setpoint (normal control operation)

Shut-down

1. Set MFC setpoint to 0 %

2. Close isolation valve when process value of 0 % is reached

Any other sequence could result, on renewed opening of the isolation valve, even
with setpoint zero, in a short flow pulse or, on first setting of the setpoint, significant
overswing.

Mechanical and fluidic installation

Select the available fluidic connections to match the maximum flow rate. Intake
sections are not required. If necessary, we can also supply special sizes,
whereby the dimensioning of the fluidic system with regard to flow and pressure
drop must be taken into account.

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Fluidic connections

The device can on request also be supplied with screw-in joints already
assembled. Please select the matching fluidic connection from the table in Appen­dix B.

Connections at MFC/MFM

Types

8626
8006

8716
8706

8713
8703

8712
8702

8711
8701XX

8710
8700

G 1/4" G 3/8" G 1/2" G 3/4" NPT 1/4 NPT 3/8 NPT1/2 NPT3/4

Standard screw-in thread Special screw-in thread

X
X

X
X

X
X

X
X

X
X

X
X

X
X

X
X

X
X

X
X

X
X

X
X

X
X

X
X

X
X

X
X

X
X

X
X

X
X

X
X

X
X

Sub

base

X
X

X
X

X
X

X
X

X
X

X
X

MFC/MFM - 29

Assembly of clamping ring screw joints

ATTENTION!

In order to seal the system properly, proceed as follows:

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Electrical connections

With low flow rates and high pressures, pay attention to the
gastightness of the system to avoid false dosage or gas
leakage.

Mount pipe connections without stress (using compensators if necessary).
Use piping with matching diameter and smooth surface.
Cut off the piping at right angles and deburr.
Slide coupling ring, support ring (if present) and clamping ring onto the

piping in that order.
Insert piping into joint as far as it will go.
Union firmly tighten.

Counter with a wrench on the screw-in side (do not load the device
housing) and tighten by 1 ¼ turns.

ATTENTION!

The MFCs/MFMs are operated with 24 V power supply. Select the connector
cross-section according to the valve used and as large as possible (see

Data

). Suitable connecting cables are to be found in Appendix A.

ATTENTION!

Connect the the functional earth (FE) to the marked screw, e.g. using
round pliers.

To assure electromagnetic compatibility (EMC), connect the
housing via as short a cable as possible (with as large a
cross-section as possible) to the functional earth (FE).

The GND or mass conductors of all signals of the MFC/MFM
must be led in each case individually to the MFC.
(If all GND signals are bridged directly at the MFC and only
one conductor led to the switching cabinet, signal
displacements and disturbances of the analog signals may
occur (pulses, oscillations, etc.)).

Technical

The 8-pole socket (types 8626 / 8006 / 8712 / 8702 / 8716 /

8706) only has to be tightened hand-screwed.

30 - MFC/MFM