Omron ZS DATASHEET

ZS FAMILY SERIES

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Advanced Industrial Automation

Enhanced flexibility
through smart scalability

ZS laser displacement sensors comprise a smart,

modular and scalable family that offers a platform

approach to solve the most challenging measurement

tasks. Based on Omron CMOS technology, the ZS-L

measures at sub-micron accuracy in a fraction of a

millisecond – and virtually any texture. The ZS-L series

comes with a sensor controller, a data storage unit and

a multi-controller that coordinates up to 9 units.

It enables accurate measurement of material

thickness, evenness and warpage.

Measuring centre

distance

350

ZS-LD350S
(long range)

Diffuse-reflective
models

Regular-reflective
models

Key features

• Accurate and fast – 0.25 μm at less

than 110 μs sampling time

• One sensor fits all – stable

measurement of virtually any

material structure such as glass,

foil or rubber

• Powerful – can accurately measure

thickness, warpage and evenness

thanks to its multi-unit controller

• Smart – data storage unit for

traceability and data logging

• Easy to use – built-in user interface

and powerful, user-friendly PC

configuration tool

Sensor

Head

200

130

80

50
40

20

240 µm dia.

900 x 100 µm

600 x 70 µm

ZS-LD200

900 x 60 µm

ZS-LD130

900 x 60 µm

ZS-LD80

2000 x 35 µm

ZS-LD50

900 x 25 µm

ZS-LD40T

Laser spot/beam size

ZS-LD20T

CMOS based sensor head

Sensor heads ZS-LD

CMOS technology packed into an

ultra-compact sensor head.

• Wide choice of sensor head

from 20 mm to 350 mm

sensing distance

• Digital technology leads

to high immunity to noise

disturbance, allowing long

cable extension up to 22 m

• Up to IP67 protection class

• Laser class 2

CMOS technology enables unique, surface-independent detection

Measures various types of different targets, offering high accuracy on all surfaces

Type profile inspection Wafer thickness and warping inspection Glass evenness inspection PC board height inspection

Up to 9 sensor controllers

Monitor Record

SmartMonitor tool

Professional tool for

configuration, set up and

monitoring.

• Provides high-speed

simultaneous multi-channel

graphs

• Includes Excel macro for

simple analysis

• Supports documentation and

quality assurance tasks

ZS-DSU data storage unit

Fast data storage allowing easy

debugging and system set up.

• High-speed sampling rate:

150 μs

• Powerful support for logging

data using various trigger

functions

• Supports compact flash card

for extended memory

Control

ZS-MDC multi-sensing
controller unit

Coordinates data transfer between

sensor controllers and performs

high-speed calculation for

complex measurements tasks.

• Coordinates data between

up to nine controllers

• Fast calculation of

measurements such as:

- Thickness

- Evenness

- Warpage

- 4 different tasks

- Free math

High-speed bus

Operate

ZS-LDC sensor controller

Ensures you always have the best

measurement performance.

• Supports a wide range of

sensor heads from short range

(20 mm) to long range

(350 mm)

• High accuracy – 0.4 μm

• Fast response time – 110 μs

• USB and RS-232 port

• Intuitive set up through

built-in keypad and digital

operator

Business Card size

Advanced Industrial Automation

Smart set up for

Direct measurement of PCB surface profile structure

different surfaces

Simply select your surface
type and the ZS smart
sensor concept sets all
specific parameters for
your application

Direct setting with
function keys

Reflection signal quality is traced
during measurement. Reliable and
safe operation is ensured through
easy set up and control

ZS-LD50/LD80
Stable measurements for PCBs, black resin and metal

To achieve stable sensing of PCBs, resins, black rubber, and

other light-penetrating objects, all you need to do is select the

surface type.

Smart setting software for advanced functionality

The SmartMonitor Zero Professional software provides

a function that changes measurement levels (edge thresholds)

to reduce error caused by light penetration, enabling many

types of PCBs to be handled. The measurement level can be

increased to adjust the measurement position for peak light

reception. This function enables stable detection of PCB

surfaces. If there is insufficient light in high-speed mode,

gain settings (0 to 5) can be used to compensate.

A New Glass Mode
Different reflections can be measured on the CMOS

Glass

Glass thickness

Glass gap

ZS-LD20T/ZS-LD40T
The smart way to measure glass and mirror surfaces

Detecting transparent objects

When a light beam hits the surface of an object, a certain

amount of the light is reflected, some is transmitted through

the object and the rest is absorbed. In the case of transparent

materials such as glass, the ZS-L can obtain reflected light from

the top surface, from the middle and from the bottom section

of glass.

• Superior features for semiconductor wafer, glass and other

measurements requiring precision.

• An unprecedented stationary measurement precision

of 0.01 μm; the highest in this product class.

• Enables stable measurement of height and undulations

in transparent, coated glass on worktables. Menus let you

easily set the measurement conditions for a wide range

of glass to achieve stable measurements.

• Outstanding measurement stability and high-speed

response at submicron resolution enables measurement

of flat glass thickness during the production process.

Set sensing directly

FUN (setting mode)

Direct setting with
function keys

Advanced Industrial Automation