Mitutoyo 516S, 503S, 501S, LSM-500S, 506S User Manual

...

No. 99MBC094

SERIES No. 544

LSM-500S/501S/503S/

506S/512S/516S

Laser Scan

Micrometer

(Measuring Unit)

User’s Manual

Read this User’s Manual thoroughly

before operating the instrument. After reading,

retain it close at hand for future reference.

[MEMO]

CONVENTIONS USED IN USER’S MANUAL

Mitutoyo manuals use various safety signs. The visual cues and the contents of description appended to each cue are described below.

Safety Precautions

To ensure that instruments are operated correctly and safely, Mitutoyo manuals use safety signs (Signal Words and Safety Alert Symbols) to identify and warn against hazards and potential accidents.

The following signs indicate general warnings:

Indicates an imminently hazardous situation which, if not avoided, will result in serious injury or death.

DANGER

WARNING

CAUTION

Indicates a potentially hazardous situation which, if not avoided, could result in serious injury or death.

Indicates a potentially hazardous situation which, if not avoided, may result in minor or moderate injury or property damage.

The following signs indicate specific warnings or prohibited actions, or indicate a mandatory action:

Alerts the user to a specific hazardous situation. The given example means “Caution, risk of electric shock”.

Prohibits a specific action. The given example means “Do not disassemble”.

No. 99MBC094A

Specifies a required action. The given example means “Ground”.

CONVENTIONS USED IN USER’S MANUAL

Various Types of Notes

The following types of notes are provided to help the operator obtain reliable measurement data through correct instrument operation.

IMPORTANT

NOTE

TIP

• An important note is a type of note that provides information essential to the completion of a task. You cannot disregard this note to complete the task.

• An important note is a type of precaution, which if neglected could result in a loss of data, decreased accuracy or instrument malfunction/failure.

A note emphasizes or supplements important points of the main text. A note supplies information that may only apply in special cases (e.g., Memory limitations, equipment configurations, or details that apply to specific versions of a program).

A tip is a type of note that helps the user apply the techniques and procedures described in the text to his or her specific needs. It also provides reference information associated with the topic being discussed.

Mitutoyo assumes no liability to any party for any loss or damage, direct or indirect, caused by use of this instrument not conforming to this manual. Information in this document is subject to change without notice.

No. 99MBC094A

NOTES FOR EXPORTING

Before exporting this product confirm the final purpose of use at the export destination to prevent the product from being used for developing weapons of mass destruction or military affairs. In the case of export to the U.S., this product requires an application for prior approval of CDRH (Center for Devices and Radiological Health) in FDA (Food and Drug Administration). An additional cost generates in application procedure. For detailed information consult a Mitutoyo sales office. Also, if this product is exported with it incorporated in equipment, the final product requires an application for FDA approval. If this is the case, note that the client must file an application for approval.

No. 99MBC094A

iii

INSTALLATION CONDITIONS

The Mitutoyo Laser Scan Micrometer LSM-500H series is an instrument for indoor use. Also, this series is a precision optical instrument and a precision electronic instrument. Therefore, it must be carefully installed and the following conditions must be taken into account to attain the highest possible accuracy. Mitutoyo assumes no liability for any accident or damage caused by use of this instrument not conforming to these conditions.

1. Vibration Install the LSM in a place with minimum vibration. If the LSM is subjected to vibrations for

a long period of time, precision components in the system may malfunction, thus affecting the measuring accuracy.

If the vibrations are significant, minimize them by laying a vibration damping rubber pad,

etc.

2. Dust/Grit Dust, if present in the installation site, will affect the optical components such as

protection glass (in the measuring unit) and electronic components (in the display unit). Install the LSM in a place that is as free as possible from dust/grit.

3. Direct sunlight If this instrument is exposed to direct sunlight, the heat may deform the instrument and

adversely affect the measuring accuracy.

If this instrument must be placed by a window where it will be subject to direct sunlight,

protect the instrument by shading it with curtains, etc.

4. Blow from the air conditioner If the measuring place is exposed to hot or cool air blow from the air conditioner, the

laser beam may be refracted due to the difference in air density and adversely affect the measuring accuracy.

If this is the case, block direct air flow with curtains, etc.

5. Ambient temperature and humidity

Avoid installing this instrument in an environment where there is rapid temperature or humidity change. Otherwise, it may reduce measuring accuracy. This instrument must be operated in the following ambient conditions.

Temperature: 0°C to 40°C

Humidity: 35%RH to 85%RH

No. 99MBC094A

WARRANTY

This instrument has been manufactured under rigorous Mitutoyo quality control. Should it malfunction under normal use within one year from the date of original purchase, it will be repaired or replaced, at our option, free of charge. Contact your dealer or the nearest Mitutoyo representative for more information.

However, the following damages may be subject to a repair charge even if damage occurs within the warranty period:

1. Unit malfunction or damage arising from improper handling, or unauthorized retrofit or repair by the user.

2. Unit malfunction or damage as the result of moving, dropping, or transporting after purchase.

3. Unit malfunction or damage due to fire, salt, gas, abnormal voltage, or natural catastrophe.

This warranty is not transferable and is only valid within the country of the original

purchase.

No. 99MBC094A

CONTENTS

CONVENTIONS USED IN USER’S MANUAL....................................................................................................i

NOTES FOR EXPORTING................................................................................................................................iii

INSTALLATION CONDITIONS.........................................................................................................................iv

WARRANTY.......................................................................................................................................................v

1. INTRODUCTION...................................................................................................................................... 1-1

1.1 Outline........................................................................................................................................... 1-1

1.2 Introduction...................................................................................................................................1-1

1.3 Inspection and Maintenance....................................................................................................... 1-2

1.3.1 Laser emission display LED............................................................................................. 1-2

1.3.2 Cleaning optical parts.......................................................................................................1-2

1.3.3 Replacement of protection glass..................................................................................... 1-3

2. CALIBRATION ........................................................................................................................................ 2-1

2.1 Calibration Gage........................................................................................................................... 2-2

2.1.1 With-holder type ................................................................................................................2-2

2.1.2 Straight type.......................................................................................................................2-2

2.1.3 Stepped type...................................................................................................................... 2-2

3. SPECIFICATIONS OF MEASURING UNIT ............................................................................................3-1

3.1 LSM-500S ......................................................................................................................................3-2

3.2 LSM-501S ......................................................................................................................................3-4

3.3 LSM-503S ......................................................................................................................................3-6

3.4 LSM-506S ......................................................................................................................................3-8

3.5 LSM-512S ....................................................................................................................................3-10

3.6 LSM-516S ....................................................................................................................................3-12

4. DESIGNING THE FIXTURES.................................................................................................................. 4-1

4.1 Outline........................................................................................................................................... 4-1

4.2 Consideration to Calibration....................................................................................................... 4-1

4.2.1 Measuring position and resulting accuracy................................................................... 4-1

4.2.2 On measuring gap............................................................................................................. 4-2

4.3 Optical Axis Alignment................................................................................................................ 4-3

4.3.1 Optical axis alignment in horizontal plane ..................................................................... 4-3

4.3.2 Optical axis alignment in vertical plane.......................................................................... 4-3

4.3.3 Permissible error for optical axis alignment .................................................................. 4-3

4.4 Confirming the Optical Axis........................................................................................................ 4-4

4.4.1 Confirming with the laser beam....................................................................................... 4-4

No. 99MBC094A

4.4.2 Confirming the optical axis with an oscilloscope...........................................................4-5

4.5 Measurement with Two Measuring Units ...................................................................................4-6

4.5.1 DXY type..............................................................................................................................4-6

4.5.2 DF type ................................................................................................................................4-8

4.6 Radiuse of Cable Bend...............................................................................................................4-11

5. SAFETY PRECCAUTIONS FOR LASER BEAM....................................................................................5-1

5.1 Caution .........................................................................................................................................5-1

5.2 Safety Precaution labels located on LSM-500S Series.............................................................5-2

SERVICE NETWORK

No. 99MBC094A

vii

MEMO

viii

No. 99MBC094A

1 INTRODUCTION

1.1 Outline

The Laser Scan Micrometer is a high-precision laser measuring system that performs

non-contact dimensional measurements with a high-speed scanning laser beam.

With non-contact measurement capability, this system features high-precision measurement of workpieces that are difficult for conventional measuring systems to measure, including hot workpieces, brittle or elastic workpieces, workpieces that must be kept free from contamination, and soft workpieces subject to the measuring force.

1.2 Introduction

This chapter describes the maintenance and inspecton of the Laser

Scan Micrometer (LSM) measuring unit.

This measuring unit is used with the display unit of the LSM-6200. Since this User’s Manual primarily describes the specifications of the measuring unit, please refer to the User’s Manual of the LSM-6200 for details about connection with a display unit, functions, and measurement procedures.

The measuring unit is provided with a shutter or cap on the emission unit and reception unit. Laser equipment has such safety precautions.

During measurement: Open the shutter by sliding it as shown in the below left diagram of fig-a), or remove the lens cap as shown in the below left diagram of fig-b).

During no-measurement: Close the shutter by sliding it as shown in the below right diagram of fig-a), or mount the lens cap as shown in the below right diagram of fig-b).

Laser beam

Open Close

a) LSM-501S/503S/506S/512S/516S

window

Shutter window

Shutte

Laser beam window

Open Close

b) LSM-500S

Lens cap

No. 99MBC094A

1-1

1.3 Inspection and Maintenance

This section describes the inspection and maintenance procedures of the measuring unit.

1.3.1 Laser emission display LED

The Laser Emission Display LED that is provided on the rear side lights while the laser

is being emitted to call the operator’s attention for safety. Do not look the laser beam.

Laser emission display LED

1.3.2 Cleaning optical parts

To clean the optical parts, turn off the power switch and disconnect the signal cable for

safety.

Always keep the protective glass of the emission unit and reception unit clean. Soiled

protective glass will not only result in reduced measurement accuracy, but possibly

produce erroneous measurements due to dust and foreign particles being treated as part

of the workpiece.

For cleaning, use a blower brush or use gauze slightly dampened with ethyl alcohol to

gently wipe clean soiled portions using very light pressure.

z Checking the contamination of the protective glass using an oscilloscope

A monitor connector, “SCAN SIG.-1”, of the reception light signal is provided on the

rear panel of the display unit. Check the reception light signal by connecting the probe of

the oscilloscope with the monitor connector. Oscilloscope setup is as follows:

z Vertical sensitivity: 0.1V/DIV (with a probe of 10:1)

z Horizontal sensitivity: 100 µs/DIV

If the waveform generated by the oscilloscope looks like either of the ones shown in (b)

or (c), clean the protective glass to reduce the disorder of waveform to less than 0.3V.

Approx.

310μＳ

(a) Normal

Approx.

(b) Soiled glass

NOTE

1-2

・The protective glass of the windows is a precision optical part. Handle with care so as

not to scratch the glass.

No. 99MBC094A

1.3.3 Replacing the protective glass and the condenser lens

Follow the procedures below to remove the protective glass for replacement or cleaning.

To replace the protective glass, first turn off the power switch, then disconnect the signal

cable for safety.

Model LSM-501S/LSM-503S/LSM-506S/LSM-512S/LSM-516S

Removing steps Unscrew the screws that secure the protective glass.

Remove the protective glass and the rubber packing.

Remounting steps Remount the protective glass by reversing the steps above.

NOTE Dust will enter the enclosure if the protective glass is not re-installed. In a

humid environment damp air will enter the enclosure, causing reduced

optical clarity. So, ensure that the work is done in an air-conditioned room

that is free from dust.

Model LSM-500S

Removing steps Remove the protective glass and the condenser lens by rotating them

counterclockwise.

Remove the O-ring.

Remounting steps Attach the O-ring.

Mount the protective glass and the condenser lens in place by rotating them

clockwise, as shown below. If mounted in the wrong order, measurement

cannot be taken.

NOTE Dust will enter the enclosure if the protective glass is not re-installed. In a

humid environment damp air will enter the enclosure, causing reduced

optical clarity. So, ensure that the work is done in an air-conditioned room

that is free from dust.

1. INTRODUCTION

Protective glass

No. 99MCA094A

Condenser lens

1-3

MEMO

1-4

No. 99MBC094A

GAGE

2 CALIBRATION

The accuracy of the instrument has been verified by two-point calibration using two reference gages.

High-precision calibration is possible and simple to perform, as mentioned in the User’s Manual attached to the display unit. Calibrate the instrument properly. Types and sizes of the calibration gages are as follows:

Model LSM-500S LSM-501S LSM-503S LSM-506S LSM-512S LSM-516S

Size φ0.1mm φ 1mm φ 20mm LOW CAL Type With-holder Stepped Size φ 2mm φ 10mm φ 30mm φ 60mm φ 120mm φ 160mm HIGH CAL Type With-holder Straight Stepped

With-holder type

No. 99MBC094A

Straight type Stepped type

2-1

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