Mitutoyo 516S, 503S, 501S, LSM-500S, 506S User Manual

No. 99MBC094

A

SERIES No. 544

LSM-500S/501S/503S/

506S/512S/516S

Laser Scan

Micrometer

(Measuring Unit)

User’s Manual

Read this User’s Manual thoroughly

before operating the instrument. After reading,

retain it close at hand for future reference.

[MEMO]

CONVENTIONS USED IN USER’S MANUAL

Mitutoyo manuals use various safety signs. The visual cues and the contents of
description appended to each cue are described below.

Safety Precautions

To ensure that instruments are operated correctly and safely, Mitutoyo manuals use safety
signs (Signal Words and Safety Alert Symbols) to identify and warn against hazards and
potential accidents.

The following signs indicate general warnings:

Indicates an imminently hazardous situation which, if not avoided, will result in serious
injury or death.

DANGER

WARNING

CAUTION

Indicates a potentially hazardous situation which, if not avoided, could result in serious
injury or death.

Indicates a potentially hazardous situation which, if not avoided, may result in minor or
moderate injury or property damage.

The following signs indicate specific warnings or prohibited actions, or indicate a
mandatory action:

Alerts the user to a specific hazardous situation. The given example means “Caution, risk
of electric shock”.

Prohibits a specific action. The given example means “Do not disassemble”.

No. 99MBC094A

Specifies a required action. The given example means “Ground”.

i

CONVENTIONS USED IN USER’S MANUAL

Various Types of Notes

The following types of notes are provided to help the operator obtain reliable
measurement data through correct instrument operation.

IMPORTANT

NOTE

TIP

• An important note is a type of note that provides information essential to the completion
of a task. You cannot disregard this note to complete the task.

• An important note is a type of precaution, which if neglected could result in a loss of
data, decreased accuracy or instrument malfunction/failure.

A note emphasizes or supplements important points of the main text. A note supplies
information that may only apply in special cases (e.g., Memory limitations, equipment
configurations, or details that apply to specific versions of a program).

A tip is a type of note that helps the user apply the techniques and procedures described
in the text to his or her specific needs.
It also provides reference information associated with the topic being discussed.

Mitutoyo assumes no liability to any party for any loss or damage, direct or
indirect, caused by use of this instrument not conforming to this manual.
Information in this document is subject to change without notice.

ii

© Copyright Mitutoyo Corporation 2003. All rights reserved.

© Copyright Mitutoyo Corporation 2005. All right reserved.

No. 99MBC094A

NOTES FOR EXPORTING

Before exporting this product confirm the final purpose of use at the export destination to
prevent the product from being used for developing weapons of mass destruction or
military affairs. In the case of export to the U.S., this product requires an application for
prior approval of CDRH (Center for Devices and Radiological Health) in FDA (Food and
Drug Administration). An additional cost generates in application procedure. For detailed
information consult a Mitutoyo sales office. Also, if this product is exported with it
incorporated in equipment, the final product requires an application for FDA approval. If
this is the case, note that the client must file an application for approval.

No. 99MBC094A

iii

INSTALLATION CONDITIONS

The Mitutoyo Laser Scan Micrometer LSM-500H series is an instrument for indoor use.
Also, this series is a precision optical instrument and a precision electronic instrument.
Therefore, it must be carefully installed and the following conditions must be taken into
account to attain the highest possible accuracy. Mitutoyo assumes no liability for any
accident or damage caused by use of this instrument not conforming to these conditions.

1. Vibration
Install the LSM in a place with minimum vibration. If the LSM is subjected to vibrations for

a long period of time, precision components in the system may malfunction, thus affecting
the measuring accuracy.

If the vibrations are significant, minimize them by laying a vibration damping rubber pad,

etc.

2. Dust/Grit
Dust, if present in the installation site, will affect the optical components such as

protection glass (in the measuring unit) and electronic components (in the display unit).
Install the LSM in a place that is as free as possible from dust/grit.

3. Direct sunlight
If this instrument is exposed to direct sunlight, the heat may deform the instrument and

adversely affect the measuring accuracy.

If this instrument must be placed by a window where it will be subject to direct sunlight,

protect the instrument by shading it with curtains, etc.

4. Blow from the air conditioner
If the measuring place is exposed to hot or cool air blow from the air conditioner, the

laser beam may be refracted due to the difference in air density and adversely affect the
measuring accuracy.

If this is the case, block direct air flow with curtains, etc.

5. Ambient temperature and humidity

Avoid installing this instrument in an environment where there is rapid temperature or
humidity change. Otherwise, it may reduce measuring accuracy. This instrument must be
operated in the following ambient conditions.

Temperature: 0°C to 40°C

Humidity: 35%RH to 85%RH

iv

No. 99MBC094A

WARRANTY

This instrument has been manufactured under rigorous Mitutoyo quality control. Should
it malfunction under normal use within one year from the date of original purchase, it will
be repaired or replaced, at our option, free of charge. Contact your dealer or the nearest
Mitutoyo representative for more information.

However, the following damages may be subject to a repair charge even if damage
occurs within the warranty period:

1. Unit malfunction or damage arising from improper handling, or unauthorized retrofit or
repair by the user.

2. Unit malfunction or damage as the result of moving, dropping, or transporting after
purchase.

3. Unit malfunction or damage due to fire, salt, gas, abnormal voltage, or natural
catastrophe.

This warranty is not transferable and is only valid within the country of the original

purchase.

No. 99MBC094A

v

CONTENTS

CONVENTIONS USED IN USER’S MANUAL....................................................................................................i

NOTES FOR EXPORTING................................................................................................................................iii

INSTALLATION CONDITIONS.........................................................................................................................iv

WARRANTY.......................................................................................................................................................v

1. INTRODUCTION...................................................................................................................................... 1-1

1.1 Outline........................................................................................................................................... 1-1

1.2 Introduction...................................................................................................................................1-1

1.3 Inspection and Maintenance....................................................................................................... 1-2

1.3.1 Laser emission display LED............................................................................................. 1-2

1.3.2 Cleaning optical parts.......................................................................................................1-2

1.3.3 Replacement of protection glass..................................................................................... 1-3

2. CALIBRATION ........................................................................................................................................ 2-1

2.1 Calibration Gage........................................................................................................................... 2-2

2.1.1 With-holder type ................................................................................................................2-2

2.1.2 Straight type.......................................................................................................................2-2

2.1.3 Stepped type...................................................................................................................... 2-2

3. SPECIFICATIONS OF MEASURING UNIT ............................................................................................3-1

3.1 LSM-500S ......................................................................................................................................3-2

3.2 LSM-501S ......................................................................................................................................3-4

3.3 LSM-503S ......................................................................................................................................3-6

3.4 LSM-506S ......................................................................................................................................3-8

3.5 LSM-512S ....................................................................................................................................3-10

3.6 LSM-516S ....................................................................................................................................3-12

4. DESIGNING THE FIXTURES.................................................................................................................. 4-1

4.1 Outline........................................................................................................................................... 4-1

4.2 Consideration to Calibration....................................................................................................... 4-1

4.2.1 Measuring position and resulting accuracy................................................................... 4-1

4.2.2 On measuring gap............................................................................................................. 4-2

4.3 Optical Axis Alignment................................................................................................................ 4-3

4.3.1 Optical axis alignment in horizontal plane ..................................................................... 4-3

4.3.2 Optical axis alignment in vertical plane.......................................................................... 4-3

4.3.3 Permissible error for optical axis alignment .................................................................. 4-3

4.4 Confirming the Optical Axis........................................................................................................ 4-4

4.4.1 Confirming with the laser beam....................................................................................... 4-4

vi

No. 99MBC094A

4.4.2 Confirming the optical axis with an oscilloscope...........................................................4-5

4.5 Measurement with Two Measuring Units ...................................................................................4-6

4.5.1 DXY type..............................................................................................................................4-6

4.5.2 DF type ................................................................................................................................4-8

4.6 Radiuse of Cable Bend...............................................................................................................4-11

5. SAFETY PRECCAUTIONS FOR LASER BEAM....................................................................................5-1

5.1 Caution .........................................................................................................................................5-1

5.2 Safety Precaution labels located on LSM-500S Series.............................................................5-2

SERVICE NETWORK

No. 99MBC094A

vii

MEMO

viii

No. 99MBC094A

1 INTRODUCTION

1

1.1 Outline

The Laser Scan Micrometer is a high-precision laser measuring system that performs

non-contact dimensional measurements with a high-speed scanning laser beam.

With non-contact measurement capability, this system features high-precision
measurement of workpieces that are difficult for conventional measuring systems to
measure, including hot workpieces, brittle or elastic workpieces, workpieces that must be
kept free from contamination, and soft workpieces subject to the measuring force.

1.2 Introduction

This chapter describes the maintenance and inspecton of the Laser

Scan Micrometer (LSM) measuring unit.

This measuring unit is used with the display unit of the LSM-6200. Since this User’s
Manual primarily describes the specifications of the measuring unit, please refer to the
User’s Manual of the LSM-6200 for details about connection with a display unit, functions,
and measurement procedures.

The measuring unit is provided with a shutter or cap on the emission unit and reception
unit. Laser equipment has such safety precautions.

During measurement: Open the shutter by sliding it as shown in the below left diagram
of fig-a), or remove the lens cap as shown in the below left diagram of fig-b).

During no-measurement: Close the shutter by sliding it as shown in the below right
diagram of fig-a), or mount the lens cap as shown in the below right diagram of fig-b).

Laser beam

Open Close

a) LSM-501S/503S/506S/512S/516S

window

Shutter
window

Shutte

Laser beam
window

Open Close

b) LSM-500S

Lens cap

No. 99MBC094A

1-1

1.3 Inspection and Maintenance

This section describes the inspection and maintenance procedures of the measuring unit.

1.3.1 Laser emission display LED

The Laser Emission Display LED that is provided on the rear side lights while the laser

is being emitted to call the operator’s attention for safety. Do not look the laser beam.

Laser emission
display LED

1.3.2 Cleaning optical parts

To clean the optical parts, turn off the power switch and disconnect the signal cable for

safety.

Always keep the protective glass of the emission unit and reception unit clean. Soiled

protective glass will not only result in reduced measurement accuracy, but possibly

produce erroneous measurements due to dust and foreign particles being treated as part

of the workpiece.

For cleaning, use a blower brush or use gauze slightly dampened with ethyl alcohol to

gently wipe clean soiled portions using very light pressure.

z Checking the contamination of the protective glass using an oscilloscope

A monitor connector, “SCAN SIG.-1”, of the reception light signal is provided on the

rear panel of the display unit. Check the reception light signal by connecting the probe of

the oscilloscope with the monitor connector. Oscilloscope setup is as follows:

z Vertical sensitivity: 0.1V/DIV (with a probe of 10:1)

z Horizontal sensitivity: 100 µs/DIV

If the waveform generated by the oscilloscope looks like either of the ones shown in (b)

or (c), clean the protective glass to reduce the disorder of waveform to less than 0.3V.

Approx.

310μＳ

(a) Normal

Approx.

4V

(b) Soiled glass

(c) Soiled glass

NOTE

1-2

・The protective glass of the windows is a precision optical part. Handle with care so as

not to scratch the glass.

No. 99MBC094A

1.3.3 Replacing the protective glass and the condenser lens

Follow the procedures below to remove the protective glass for replacement or cleaning.

To replace the protective glass, first turn off the power switch, then disconnect the signal

cable for safety.

Model LSM-501S/LSM-503S/LSM-506S/LSM-512S/LSM-516S

Removing steps Unscrew the screws that secure the protective glass.

Remove the protective glass and the rubber packing.

Remounting steps Remount the protective glass by reversing the steps above.

NOTE Dust will enter the enclosure if the protective glass is not re-installed. In a

humid environment damp air will enter the enclosure, causing reduced

optical clarity. So, ensure that the work is done in an air-conditioned room

that is free from dust.

Model LSM-500S

Removing steps Remove the protective glass and the condenser lens by rotating them

counterclockwise.

Remove the O-ring.

Remounting steps Attach the O-ring.

Mount the protective glass and the condenser lens in place by rotating them

clockwise, as shown below. If mounted in the wrong order, measurement

cannot be taken.

NOTE Dust will enter the enclosure if the protective glass is not re-installed. In a

humid environment damp air will enter the enclosure, causing reduced

optical clarity. So, ensure that the work is done in an air-conditioned room

that is free from dust.

1. INTRODUCTION

Protective glass

No. 99MCA094A

Condenser lens

1-3

MEMO

1-4

No. 99MBC094A

GAGE

GAGE

2 CALIBRATION

2

The accuracy of the instrument has been verified by two-point calibration using two
reference gages.

High-precision calibration is possible and simple to perform, as mentioned in the User’s
Manual attached to the display unit. Calibrate the instrument properly. Types and sizes of
the calibration gages are as follows:

Model LSM-500S LSM-501S LSM-503S LSM-506S LSM-512S LSM-516S

Size φ0.1mm φ 1mm φ 20mm LOW CAL
Type With-holder Stepped
Size φ 2mm φ 10mm φ 30mm φ 60mm φ 120mm φ 160mm HIGH CAL
Type With-holder Straight Stepped

With-holder type

No. 99MBC094A

Straight type Stepped type

2-1

2.1 Calibration Gage

2.1.1 With-holder type：

z The center point of the gage, which is indicated by an arrow (Æ), is the calibration point.
z Set up the gage on the stand so that the laser beam is aligned with the vertical line ( | )

marked on the side of the gage holder.

2.1.2 Straight type：

z The center point of the marks ( || ) of the gage, which is indicated by an arrow (Æ), is the

calibration point.

z Set up the gage on the stand so that the mark ( | ) on the end face of the gage comes to

vertical.

2.1.3 Stepped type：

z The center point of the gage, which is indicated by an arrow (Æ), is the calibration point.
z Set up the gage on the stand so that the mark ( | ) on the end face of the gage comes to

vertical.

2-2

Stepped type Straight type With-holder type

No. 99MBC094A

3

3

This chapter gives the specifications of the following models.

Model Measuring range Code No.

LSM-500S
LSM-501S
LSM-503S
LSM-506S
LSM-512S
LSM-516S

SPECIFICATIONS OF
MEASURING UNIT

φ 0.005mm to φ 2mm

φ 0.05mm to φ 10mm

φ 0.3mm to φ 30mm

φ 1mm to φ 60mm
φ 1mm to φ 120mm
φ 1mm to φ 160mm

544-532
544-534
544-536
544-538
544-540
544-542

No. 99MBC094A

3-1

3.1LSM-500S

（1）Specifications

MODEL
Order No.
Applicable display unit

Laser scanning range
Measuring range

Resolution
Repeatability[*2] µm(inch)
Linearity [*2] µm(inch)
Positional error [*2][*5] µm(inch)

Measuring region
Number of scans for averaging scan 16 to 2048[*6]

Laser classification
Number of laser scans /sec 3200

Laser scanning rate m/sec (inch/sec)
Protection level IP64

Temperature 0 °C to 40 °C

Operation environment

Storage environment

[*1]：Measuring range available when set to “No extra-fine wire measurement” or “Edge specification” in the basic setup

mode.
[*2]：Environment for accuracy validation: 20
[*3]：The value of ±2σ with a 2mm-diameter gage has been measured for two minutes with a measurement interval of

0.32 seconds, where σ is the standard deviation.
[*4]：The value of measurements in the center of the measurement region.
[*5]：Error due to the positional shift of the workpiece in the optical axis direction or scanning direction.
[*6]：Averaging scans between 1 and 8 times can be made if “No extra-fine wire measurement” is specified in the basic

setup mode. The measuring range, however, is limited to 0.1 mm to 2 mm in this case.

Temperature -15 °C to 55 °C

（2）Standard accessories

Part No. Item Qt.

―
02AGN770A Signal cable (5m / 16ft) 1
99MBC094A User’s manual 1

[*7]：The ID unit stores data unique to the measuring unit. A replacement ID unit is available at extra cost.

ID unit [*7] 1

（3）Optional accessories

Order No. Item

02AGD110
02AGD200 Guide pulley unit for LSM-500H (also available for LSM-500)
02AGD220 Air-blow unit for LSM-500H (also available for LSM-500)
02AGN780A/B Extension signal cables ( 5m/10m)(16ft/32ft)[*8] [*9]

[*8]：The signal cable can be extended up to 20 m(64ft).
[*9]：The length of the signal cable other than the standard, may affect the accuracy .

Calibration gages set φ 0.1 mm φ 2 mm

LSM-500S
544-532
LSM-6200

mm(inch)
mm(inch)

µm(inch) 0.01 to 10 (.000001” to .0005”) [Selectable]

mm(inch)

Humidity 35 %RH to 85 %RH [without condensation]

Altitude 2000 m or less

Humidity

(Detecting regions is limited to about 10 mm (.4”) approx.)

[Optical axis direction × Scanning direction]

Class 2 (Max. Output:1.3mW with a scanning laser, semiconductor laser:

35 %RH to 85 %RH [without condensation]

Up to 12.5(.49”)

0.005 to 2 (.0002” to .08”)

0.1 to 2 (.004” to .08”)[*1]

±0.03 (±.0000012”) [*3]

±0.3 (±.000012”) [*4]

±0.4 (±.000016”)

1 × 2 (.04” × .08”)

wavelength 650nm)

76(2992”/sec)

°C ± 1°C temperature; 50% ± 10% humidity.

3-2

No. 99MBC094A

（4）External dimensions

3. SPECIFICATIONS OF MEASURING UNIT

【Mass】

z Measuring unit
z Signal cable

No. 99MBC094A

Unit：mm (inch)

： 1.0 kg
： 0.5 kg

3-3

3.2LSM-501S

（1）Specifications

MODEL LSM-501S
Order No. 544-534
Applicable display unit LSM-6200
Laser scanning range mm(inch) Up to 19 (.74”)
Measuring range mm(inch) 0.05 to 10 (.002” to .4”)
Resolution µm(inch) 0.01 to 10 (.000001” to .0005) [Selectable]
Repeatability [*1] µm(inch)

Linearity
[*1]

Positional error [*1][*5] µm(inch)
Measuring region mm(inch)
Number of scans for averaging scan 1 to 2048

Laser classification
Number of laser scans /sec 3200

Laser scanning rate m/sec(inch/sec)
Protection level IP64
Distance between the laser

emission unit and reception unit

Operation environment

Storage environment

[*1]： Environment for accuracy validation: 20°C ± 1°C temperature; 50% ± 10% humidity.
[*2]： A value of ±2σ with a 10mm-diameter gage has been measured for two minutes with a measurement interval of

0.32 seconds, where σ is the standard deviation.
[*3]： The value of measurements in the center of the measurement region.
[*4]： ΔD is the difference in diameter of the workpiece and the master gage.
[*5]： Error due to the positional shift of workpiece in optical axis direction or scanning direction.
[*6]： The distance between the laser emission unit and reception unit other than the standard, may affect the accuracy .

Whole range µm(inch)

Narrow measuring

range

mm(inch)

Temperature

Humidity 35 %RH to 85 %RH [without condensation]

Altitude 2000 m or less

Temperature

Humidity 35 %RH to 85 %RH [without condensation]

µm

inch

±( 0.3 + 0.1 ΔD )

±( .000012” + .000004” ΔD )

2 × 10(.08” × .4”) (Measuring region: 0.05 to 0.1(.002” to .004”))

4 × 10 (.16” × .4”) (Measuring region: 0.1 to 10(.004” to .4”))

[Optical axis direction × Scanning direction]

Class 2 (Max. Output:1.3mW with a scanning laser, semiconductor

（2）Standard accessories

±0.04 (±.0000016”)[*2]

±0.5 (±.00002”)[*3]

[*3][*4]

±0.5 (±.00002”)

laser: wavelength 650nm)

113(4449”/sec)

Standard 68(2.68”)

Max. 100 (3.93”) [*6]

0 °C to 40 °C

-15 °C to 55 °C

Part No. Item Qt.

―
02AGN770A Signal cable (5m / 16ft) 1
99MBC094A User’s manual 1

[*7]： The ID unit stores data unique to the measuring unit. A replacement ID unit is available at extra cost.

ID unit [*7] 1

（3）Optional accessories

Order No. Item

02AGD120
02AGD210 Guide pulley unit for LSM-501H (also available for LSM-501)
02AGD230 Air-blow unit for LSM-501H (also available for LSM-501)
02AGD270 Workstage for LSM-501 / 503 / 902 (also available for LSM-501)
02AGD400 Adjustable Workstage for L SM-501(also available for LSM-501)
02AGN780A/B Extension signal cables ( 5m/10m)(16ft/32ft)[*8][*10]
02AGD150 A Extension connecting cables(1m)(3.2ft)[*9][*10]

[*8] ： The signal cable can be extended up to 20 m(64ft).
[*9] ： The connecting cable can be extended up to 2 m(6.4ft).
[*10]： The length of the

3-4

Calibration gages set φ 0.1 mm φ 10 mm

signal cable and the connecting cable other than the standard, may affect the accuracy .

No. 99MBC094A

（4）External dimensions

3. SPECIFICATIONS OF MEASURING UNIT

【Mass】

z Emission unit ： 0.7 kg
z Reception unit ： 0.4 kg
z Base ： 0.3 kg
z Signal cable ： 0.5 kg

No. 99MBC094A

Unit：mm (inch)

3-5

3.3LSM-503S

（1）Specifications

MODEL LSM-503S
Order No. 544-536
Applicable display unit LSM-6200
Laser scanning range mm(inch)
Measuring range mm(inch)
Resolution µm(inch)
Repeatability [*1] µm(inch)

Linearity
[*1]

Positional error[*1][*5] µm(inch)
Measuring region mm(inch)
Number of scans for averaging scan 1to2048
Laser classification
Number of laser scans /sec 3200

Laser scanning rate m/sec(inch/sec)
Protection level IP64
Distance between the laser

emission unit and reception unit

Operation environment

Storage environment

[*1]： Environment for accuracy validation: 20°C ± 1°C temperature; 50% ± 10% humidity.
[*2]： A value of ±2σ with a 30mm-diameter gage has been measured for two minutes with a measurement interval of

0.32 seconds, where σ is the standard deviation.
[*3]： The value of measurements in the center of the measurement region.
[*4]： ΔD is the difference in diameter of the workpiece and the master gage.
[*5]： Error due to the positional shift of workpiece in optical axis direction or scanning direction.
[*6]： The distance between the laser emission unit and reception unit other than the standard, may affect the accuracy .

Whole range µm(inch)

Narrow

measuring range

Temperature

Temperature

µm

inch

mm(inch)

Humidity 35 %RH to 85 %RH [without condensation]

Altitude 2000 m or less

Humidity 35 %RH to 85 %RH [without condensation]

Class 2 (Max. Output:1.3mW with a scanning laser, semiconductor

0.02 to 100 (.000001” to .005”) [Selectable]

±( 0.6 + 0.1 ΔD )

±( .000024” + .000004” ΔD )

[Optical axis direction × Scanning direction]

（2）Standard accessories

Part No. Item Qt.

―
02AGN770A Signal cable (5m / 16ft) 1
99MBC094A User’s manual 1

[*7]： The ID unit stores data unique to the measuring unit. A replacement ID unit is available at extra cost.

ID unit [*7] 1

（3）Optional accessories

Order No. Item

02AGD130
02AGD240 Air-blow unit for LSM-503 (also available for LSM-503)
02AGD270 Workstage for LSM-501 / 503 / 902 (also available for LSM-503)
02AGD490 Adjustable Workstage for L SM-503 (also available for LSM-503)
02AGN780A/B/D Extension signal cables ( 5m/10m/20m)(16ft/32ft/64ft)[*8][*10][*11]
02AGD150A/B Extension connecting cables(1m/3m)(3.2ft/9.6ft)[*9][*10][*11]

[*8] ： The signal cable can be extended up to 30 m(96ft).
[*9] ： The connecting cable can be extended up to 5 m(16ft).
[*10]： The total length of the signal cable and the intermediate cable can be extended up to 32 m.
[*11]： The length of the

Calibration gages set φ 1 mm φ 30 mm

signal cable and the connecting cable other than the standard, may affect the accuracy .

Up to 34 (1.3”)

0.3 to 30 (.012” to 1.18”)

±0.11 (±.0000044”)[*2]

±1.0 (±.00004”)[*3]

[*3][*4]

±1.5(±.00006”)

10 × 30 (.4” × 1.18”)

laser: wavelength 650nm)

226 (8898”/sec)

Standard 130(5.12”)

Max. 350 (13”) [*6]

0 °C to 40 °C

-15 °C to 55 °C

3-6

No. 99MBC094A

（4）External dimensions

3. SPECIFICATIONS OF MEASURING UNIT

【Mass】

z Emission unit ： 1.1 kg
z Reception unit ： 0.6 kg
z Base ： 0.5 kg
z Signal cable ： 0.5 kg

No. 99MBC094A

Unit：mm (inch)

3-7

3.4LSM-506S

（1）Specifications

MODEL LSM-506S
Order No. 544-538
Applicable display unit LSM-6200
Laser scanning range mm(inch)
Measuring range mm(inch)
Resolution µm(inch)
Repeatability [*1] µm(inch)

Linearity
[*1]

Positional error [*1][*5] µm(inch) ±4.0 (±.00016)
Measuring region mm(inch)
Number of scans for averaging scan 1to2048
Laser classification
Number of laser scans /sec 3200

Laser scanning rate m/sec(inch/sec)
Protection level IP64
Distance between the laser

emission unit and reception unit

Operation environment

Storage environment

[*1]： Environment for accuracy validation: 20°C ± 1°C temperature; 50% ± 10% humidity.
[*2]： A value of ±2σ with a 60mm-diameter gage has been measured for two minutes with a measurement interval of

0.32 seconds, where σ is the standard deviation.
[*3]： The value of measurements in the center of the measurement region.
[*4]： ΔD is the difference in diameter of the workpiece and the master gage.
[*5]： Error due to the positional shift of workpiece in optical axis direction or scanning direction.
[*6]： The distance between the laser emission unit and reception unit other than the standard, may affect the accuracy .

Whole range µm(inch) ±3.0 (±.00012)[*3]

Narrow measuring

range

Temperature

Temperature

µm

inch

Class 2 (Max. Output:1.3mW with a scanning laser, semiconductor

mm(inch)

Humidity 35 %RH to 85 %RH [without condensation]

Altitude 2000 m or less

Humidity 35 %RH to 85 %RH [without condensation]

0.05 to 100 (.000002” to .005”) [Selectable]

±( 1.5 + 0.5 ΔD )

±( .00006” + .00002” ΔD )

[Optical axis direction × Scanning direction]

（2）Standard accessories

Part No. Item Qt.

―
02AGN770A Signal cable (5m / 16ft) 1
99MBC094A User’s manual 1

[*7]： The ID unit stores data unique to the measuring unit. A replacement ID unit is available at extra cost.

ID unit [*7] 1

（3）Optional accessories

Order No. Item

02AGD140
02AGD250 Air-blow unit for LSM-506 (also available for LSM-506)
02AGD520 Adjustable Workstage for L SM-506 (also available for LSM-506)
02AGN780A/B/D Extension signal cables ( 5m/10m/20m)(16ft/32ft/64ft)[*8][*10][*11]
02AGD150A/B Extension connecting cables(1m/3m)(3.2ft/9.6ft)[*9][*10][*11]

[*8] ： The signal cable can be extended up to 30 m(96ft).
[*9] ： The connecting cable can be extended up to 5 m(16ft).
[*10]： The total length of the signal cable and the intermediate cable can be extended up to 32 m.
[*11]： The length of the

Calibration gages set φ 1 mm φ 60 mm

signal cable and the connecting cable other than the standard, may affect the accuracy .

Up to 66 (2.6”)

1 to 60 (.04” to 2.36”)

±0.36 (±.000014”)[*2]

[*3][*4]

20 × 60(.8” × 2.36”)

laser: wavelength 650nm)

452(17795”/sec)

Standard 273(10.75”)

Max. 700 (27”) [*6]

0 °C to 40 °C

-15 °C to 55 °C

3-8

No. 99MBC094A

（4）External dimensions

3. SPECIFICATIONS OF MEASURING UNIT

【Mass】

z Emission unit ： 1.4 kg
z Reception unit ： 0.8 kg
z Base ： 0.8 kg
z Signal cable ： 0.5 kg

No. 99MBC094A

Unit：mm (inch)

3-9

3.5LSM-512S

（1）Specifications

MODEL LSM-512S
Order No. 544-540
Applicable display unit LSM-6200
Laser scanning range mm(inch)
Measuring range mm(inch)
Resolution µm(inch)
Repeatability [*1] µm(inch) ±0.85 (±.000033)[*2]

Linearity
[*1]

Positional error [*1][*5] µm(inch) ±8.0 (±.0003)
Measuring region mm(inch)
Number of scans for averaging scan 1 to 2048
Laser classification
Number of laser scans /sec 3200

Laser scanning rate m/sec(inch/sec)
Protection level IP64
Distance between the laser

emission unit and reception unit

Operation environment

Storage environment

[*1]： Environment for accuracy validation: 20°C ± 1°C temperature; 50% ± 10% humidity.
[*2]： A value of ±2σ with a 120mm-diameter gage has been measured for two minutes with a measurement interval of

0.32 seconds, where σ is the standard deviation.
[*3]： The value of measurements in the center of the measurement region.
[*4]： ΔD is the difference in diameter of the workpiece and the master gage.
[*5]： Error due to the positional shift of workpiece in optical axis direction or scanning direction.
[*6]： The distance between the laser emission unit and reception unit other than the standard, may affect the accuracy .

Whole range µm(inch) ±6.0 (±.00024)[*3]

Narrow measuring

range

Temperature

Temperature

µm

inch

Class 2 (Max. Output:1.3mW with a scanning laser, semiconductor

mm(inch)

Humidity 35 %RH to 85 %RH [without condensation]

Altitude 2000 m or less

Humidity 35 %RH to 85 %RH [without condensation]

0.1 to 100 (.000005” to .005”) [Selectable]

±( 4.0 + 0.5 ΔD )

±( .00016” + .00002” ΔD )

[Optical axis direction × Scanning direction]

（2）Standard accessories

Part No. Item Qt.

―
02AGN770A Signal cable (5m / 16ft) 1
99MBC094A User’s manual 1

[*7]： The ID unit stores data unique to the measuring unit. A replacement ID unit is available at extra cost.

ID uni[*7] 1

（3）Optional accessories

Order No. Item

02AGD150
02AGD260 Air-blow unit for LSM-512 (also available for LSM-512)
02AGN780A/B/D Extension signal cables ( 5m/10m/20m)(16ft/32ft/64ft)[*8][*10][*11]
02AGD150A/B Extension connecting cables(1m/3m)(3.2ft/9.6ft)[*9][*10][*11]

[*8] ： The signal cable can be extended up to 30 m(96ft).
[*9] ： The connecting cable can be extended up to 5 m(16ft).
[*10]： The total length of the signal cable and the intermediate cable can be extended up to 32 m.
[*11]： The length of the

Calibration gages set φ 1 mm φ 120 mm

signal cable and the connecting cable other than the standard, may affect the accuracy .

Up to 126 (5.0”)

1 to 120 (.04” to 4.72”)

[*3][*4]

30 × 120 (1.2” × 4.72”)

laser: wavelength 650nm)

904 (35590”/sec)

Standard 321(12.64”)

Max. 700 (27”) [*6]

0 °C to 40 °C

-15 °C to 55 °C

3-10

No. 99MBC094A

（4）External dimensions

3. SPECIFICATIONS OF MEASURING UNIT

【Mass】

z Emission unit ： 3.0 kg
z Reception unit ： 1.2 kg
z Base ： 1.8 kg
z Signal cable ： 0.5 kg

No. 99MBC094A

Unit：mm (inch)

3-11

3.6LSM-516S

（1）Specifications

MODEL LSM-516S
Order No. 544-542
Applicable display unit LSM-6200
Laser scanning range mm(inch)
Measuring range mm(inch)
Resolution µm(inch)
Repeatability [*1] µm(inch) ±1.4 (±.000055)[*2]

Linearity
[*1]

Positional error [*1][*5] µm(inch) ±8.0 (±.0003)
Measuring region mm(inch)
Number of scans for averaging scan 1 to 2048
Laser classification
Number of laser scans /sec 3200

Laser scanning rate m/sec(inch/sec)
Protection level IP64
Distance between the laser

emission unit and reception unit

Operation environment

Storage environment

[*1]： Environment for accuracy validation: 20°C ± 1°C temperature; 50% ± 10% humidity.
[*2]： A value of ±2σ with a 160mm-diameter gage has been measured for two minutes with a measurement interval of

0.32 seconds, where σ is the standard deviation.
[*3]： The value of measurements in the center of the measurement region.
[*4]： ΔD is the difference in diameter of the workpiece and the master gage.
[*5]： Error due to the positional shift of workpiece in optical axis direction or scanning direction.
[*6]： The distance between the laser emission unit and reception unit other than the standard, may affect the accuracy .

Whole range µm(inch) ±7.0 (±.00028)[*3]

Narrow measuring

range

Temperature

Temperature

µm

inch

Class 2 (Max. Output:1.3mW with a scanning laser, semiconductor

mm(inch)

Humidity 35 %RH to 85 %RH [without condensation]

Altitude 2000 m or less

Humidity 35 %RH to 85 %RH [without condensation]

0.1 to 100 (.000005” to .005”) [Selectable]

±( 4.0 +2.0 ΔD )

±( .00016” + .000079” ΔD )

[Optical axis direction × Scanning direction]

（2）Standard accessories

Part No. Item Qt.

―
02AGN770A Signal cable (5m / 16ft) 1
99MBC094A User’s manual 1

[*7]： The ID unit stores data unique to the measuring unit. A replacement ID unit is available at extra cost.

ID uni[*7] 1

（3）Optional accessories

Order No. Item

02AGM300 Calibration gages set for LSM-516H
02AGN780A/B/D Extension signal cables ( 5m/10m/20m)(16ft/32ft/64ft)[*8][*10][*11]
02AGC150A/B Extension connecting cables(1m/3m)(3.2ft/9.6ft)[*9][*10][*11]

[*8] ： The signal cable can be extended up to 30 m(96ft).
[*9] ： The connecting cable can be extended up to 5 m(16ft).
[*10]： The total length of the signal cable and the intermediate cable can be extended up to 32 m(102ft).
[*11]： The length of the

signal cable and the connecting cable other than the standard, may affect the accuracy .

Up to 170 (6.7”)

1 to 160 (.04” to 6.3”)

[*3][*4]

40 × 160 (1.57” × 6.3”)

laser: wavelength 650nm)

1206 (47480”/sec)

Standard 400(15.74”)

Max. 800 (32.72”) [*6]

0 °C to 40 °C

-15 °C to 55 °C

3-12

No. 99MBC094A

（4）External dimensions

3. SPECIFICATIONS OF MEASURING UNIT

【Mass】

z Emission unit ： 7.6 kg
z Reception unit ： 3.7 kg
z Base ： 2.8 kg
z Signal cable ： 0.5 kg

No. 99MBC094A

Unit：mm (inch)

3-13

MEMO

3-14

No. 99MBC094A

4 DESIGNING THE FIXTURES

4

4.1 Outline

In application, the emission unit and the reception unit may have to be detached from the
support base of the measuring unit and attached to a dedicated fixture. If this is the case,
the measuring accuracy cannot be ensured unless the emission unit and the reception unit
are properly aligned on the dedicated fixture. Design a proper fixture according to this
section.

4.2 Consideration to Calibration

This chapter describes precautions to be observed when attaching
the emission unit and the reception unit, which have been detached
from the support base of the measuring unit, to a specially arranged
dedicated fixture.

To ensure accurate measurements, design the fixture so that the workpiece to be
measured can be positioned at the point of measurement that is the focal point of the
emission unit. Also, make allowances for calibration and for a calibration gage to be
mounted on the fixture.

4.2.1 Measuring position and resulting accuracy

As shown in the figure below, the scanning beam of the measuring unit is produced by
reducing the thick beam to a beam of the minimum diameter at the measuring position that
is the focal point.

However, since the inclination of the reception signal is defined as “beam
diameter/scanning speed”, the inclination will be the steepest at measuring point (b) and will
be less steep at points (a) and (c), off from the measuring point.

The less steep the inclination of the reception signal, the more susceptible the signal is to
noise and light disturbance, resulting in degraded repeatability. Thus, due attention should
be paid to ensure that the workpiece is located at the measuring position.

Emission unit side

Inclination of the reception

Measuring region

Measuring position that is focal point.

Reception unit side

No. 99MBC094A

（ａ） （ｂ） （ｃ）

4-1

4.2.2 On measuring gap

For measuring segment 1, as in the case of measuring
the runout, be sure to arrange a reference pin or
knife-edge at the focal point, as shown on the right. The
inclination of the reception signal becomes large, resulting
in degraded repeatability, unless the reference pin is
provided.

Reference pin or knife-edge

Segment 1

Workpiece

4-2

No. 99MBC094A

4.3 Optical Axis Alignment

The optical axis of each measuring unit should be aligned to within the limits shown

below.

4.3.1 Optical axis alignment in horizontal plane

a. Parallel deviation in reference lines C and D

by X in width direction.

Reference line C

Reference line D

b. Angular deviation in reference lines C and D

4. DESIGNING THE FIXTURES

by θx in angle.

Reference line C

Reference line D

X

4.3.2 Optical axis alignment in vertical plane

c. Parallel deviation in reference planes A and

B by Y in height.

Reference line C Reference line D

Y

d. Angular deviation in reference planes A and

B by θy in angle.

Reference line C

4.3.3 Permissible error for optical axis alignment

Model

LSM-501S

LSM-503S

Distance between Emission unit and

Reception unit

68mm or less 0.5 mm within 0.4° (7mrad) within
100mm or less 0.5 mm within 0.3° (5.2mrad) within
130mm or less
350mm or less

For both X and Y For both θx and θy

１ mm within
１ mm within

θx

Reference line D

θy

0.4° ( 7mrad) within

0.16°(2.8mrad) within

LSM-506S

273mm or less
700mm or less
321mm or less

LSM-512S

700mm or less

LSM-516S 800mm or less

No. 99MCA094A

１ mm within
１ mm within
１ mm within
１ mm within
１ mm within

0.2° (3.5mrad) within

0.08°(1.4mrad) within

0.18°( 3.6mrad) within

0.08°(1.4mrad) within

0.05°(0.9mrad) within

4-3

4.4 Confirming the Optical Axis

The optical axis of a measuring unit can be confirmed by the following methods.

4.4.1 Confirming with the laser beam

As shown on the right, the red laser beam is visible on a
piece of white paper placed on the reception window.
Adjust it so that the incidence of the laser beam is in the
center of the reception window.

The incidence should be in the center horizontally and at
the position where “a” is equal to “b” vertically. Make
adjustments to reduce such deviations, as shown in the
figures below, where (a) is the vertical deviation, (b) is the
horizontal deviation,(c) is the inclination of the laser beam.

(a): Vertical orientation (b): Horizontal orientation (c): Laser beam inclination

Reception window

ａ

Red laser

beam

ｂ

Vertical adjustment

: a = b

NOTE

The laser scanning range is defined by the distance between the emission unit and the
reception unit mounted on the standard support base. If the distance between the
emission unit and the reception unit is greater than standard, a slight machining error will
be amplified to the extent it disables the proper reception of the scanning beam. This
should be considered when designing a dedicated fixture.

4-4

No. 99MBC094A

4. DESIGNING THE FIXTURES

4.4.2 Confirming the optical axis with an oscilloscope

To monitor with an oscilloscope, use the two monitor connectors provided on the rear
panel of the display unit, “SCAN SIG.-1” and “SCAN SIG.-2”, for measuring unit 1 and
measuring unit 2, respectively.

Oscilloscope setting:

 Vertical sensitivity : 0.1V/DIV for a probe of 1/10
 Horizontal sensitivity : 50μs/DIV

Among the waveforms shown below, (a) represents the waveform of normal light
reception.
mounting position between the emission unit and the reception unit to ensure that the light
comes to the center of the light reception element.

If the protective glass is soiled, a waveform such as that shown in (b) or (c) will result. If
this is the case, clean the protective glass according to 1.3.2 Cleaning optical parts to
reduce the disorder of the waveform to less than 0.3V.

Approx.

310μＳ

(a) Normal

If the light incidence is not normal to the light reception element, adjust the

Approx.

4V

(b) Glass contaminated

(c) Glass contaminated

No. 99MCA094A

4-5

4.5 Measurement with Two Measuring Units

To perform dual measurement with a combination of two measuring units, each

measuring unit must have been optically aligned.

Refer to “4.3 Optical Axis Alignment” for more information.
Also note that the appropriate considerations must be taken into account according

to the type of dual measurement, DXY type or DF type.

4.5.1 DXY type

If a workpiece with a high-reflection coefficient is
measured with two measuring units being
completely crossed (in a DXY-type setup), the
scanning beam from one measuring unit will be
reflected into the reception window of the other
measuring unit, reducing the measuring accuracy.
An arrangement is required in such a case so that
the light from one measuring unit will not be
reflected from the workpiece into the reception
window of the counterpart measuring unit.

Light from the Y-axis
reflected to the X-axis.

isX-ax

Y-axis

(1) Arrangement to provide a step

As shown on the right, arrange a step of L
between the X axis and the Y axis.

The step L should not be smaller than 10 mm.

(2) Arrangement to provide an angle

As shown on the right, arrange an angle θ

between the X axis and the Y axis.

The angle θ should not be smaller than 15 degrees

or 0.25 radians.

is

X-ax

Y-axis

L

Y-axi

X-axis

θ

4-6

No. 99MBC094A

4. DESIGNING THE FIXTURES

(3) Confirming the presence of reflecting light

 With the segment set to 1, close the shutter of the emission unit on the X axis,

then check that the reflection light from the Y axis will not be directed into the
reception window of the X axis. Allow 5 to 10 minutes for this check of the
reflecting light as scanning beams from the X axis and the Y axis are
asynchronous.
Under the normal state, the Err-0 message will be displayed.
Perform the same check with the Y axis.

 With the oscilloscope connected to the monitor connector on the rear panel of the

display unit, it is also possible to check for the presence of the reception signal
due to the reflection light. For a model with a visible laser beam, the reflection light
can be checked by placing a piece of paper on the reception window.

No. 99MCA094A

4-7

4.5.2 DF type

measuring the gap between two measuring units 1 and 2 and referring to the
predetermined offset value of the reference gage.

(1) Improvement of the measurement accuracy

・ To ensure better measuring accuracy of gap measurement, use reference pins or

・ The reference pin will help reduce the effect of possible fluctuation of the emission

In a DF-type setup shown below, a workpiece of a larger diameter can be measured by

knife-edges as located at the focal point.

(a) Example of setup for stack of two

units Segment (1 + 5)

unit being subject to a force.

In a setup without reference pins, the fluctuation of the emission unit due to some

external force will produce a significant difference between the measurements B

and B’ as shown in (c) and (d) below.

Reference pins

Measuring

unit 2

Measuring

unit 1

Measuring

unit 2

Measuring

unit 1

(b) Example of setup for facing of two

units Segment (1 + 5)

(a) Initial state incorporated with

reference pins

(c) Initial state without

reference pins

B

A’

(b) Effect of fluctuation of the

emission unit in a setup
incorporating reference

B’

(d) Effect of fluctuation of the

emission unit in a setup
without reference pins.

Difference of A and A’ : Small



Difference of B and B’ : Large



4-8

No. 99MBC094A

4. DESIGNING THE FIXTURES

・ Size of reference pins

The diameter of the reference pin should be such
that it can block the laser beam by more than 2
mm and the beam will not cross the pin. A pin of
about 10 mm diameter would meet such a
requirement.
The setup must also be fairly robust so that the
gap between the reference pins will not change
while in service.

(2) Parallelism adjustment

Set up two measuring units integrating the emission unit and the reception unit so

that the parallelism of the two measuring units can be adjusted.

First align the optical axis of each measuring unit, then adjust the parallelism

between the two measuring units.

If the parallelism adjustment is inadequate, errors will generate when the

workpiece is shifted in the optical axis direction.

The degree of accuracy to which the adjustment should be made depends on user

requirements. For reference, three example accuracy ranges are given below:

a. Should be ±20 to ±50 μm with the gage shifted within ±50 mm from the

measuring point.

b. Should be ±5 to ±10 μm with the gage shifted within ±10 mm from the

measuring point.

c. Should be ±5 to ±10 μm with the gage shifted within ±5 mm from the

measuring point.

Generally, the larger the amount of shift of the gage, the easier will be the

adjustment.

The most appropriate size of the gage would be the median value of the

measuring range.

Emission unit

Emission unit

Measuring position

Gage shift

direction

Gage shift

direction

Reception unit

Reception unit

L

φD

No. 99MCA094A

4-9

(3) Precautions for transparent object measurement

Set the measuring units
with the support bases
facing one another.

To measure a larger diameter transparent glass rod, the external diameter of a
plastic object, or the width of a transparent sheet, arrange the measuring units with
the support bases fitted so the scanning laser beams are opposing one another, and
set the segment to (1 + 5). If the laser scanning direction of each unit is reversed to
the direction shown below, measurement will be disabled.

If two measuring units are set up with the support bases
facing one another, a step L will be produced between the
two units through inconformity of the optical axis of the two
units, as shown at the right. The step values according to
model are listed below.

Emission unit

Measuring

unit 2

Measuring

unit 1

Model Step L
LSM-501S 10mm
LSM-503S 10mm
LSM-506S 10mm
LSM-512S 22mm
LSM-516S 33mm

Scanning

direction

Scanning

direction

５

１

Reception unit

Side view

Measuring unit
2 side

Optical axis

Measuring unit
1 side

L

4-10

No. 99MBC094A

4.6 Radius of Cable Bend

)

The signal cables and the connecting cable will break if bent to an excessively small

radius. Allow sufficient space for bending cables according to the figures below.

Cable space

: more than 70 (2.8”)

Signal cable

R20 (.79”)

4. DESIGNING THE FIXTURES

Cable space

: more than 80 (3.2”

or more

Signal cable

R10 (.4”)
or more

Measuring unit Display unit

Connecting cable

R20 (.79”) or more

Unit: mm(inch)

NOTE

Supplied cables are not robot cables, which have superior flexibility in bending. Special
cables with a high flexibility will be available at extra cost. Contact a Mitutoyo sales office.

No. 99MCA094A

4-11

MEMO

4-12

No. 99MBC094A

5

5.1 Caution

The LSM-500S series uses a low powered, visible laser beam which has been designed

CAUTION

for safe operation. However, observe the following points when setting up and operating.

1) This measuring unit conforms to IEC 60825-1, the safety code for lasers. This code

2) This unit is a “Class 2 laser product”, as defined by IEC code.(Maximum output

3) IEC (International Electrotechnical Commission) defines IEC 60825-1 as an

4) Safety precaution labels are described on page 5-2.

5) Do not remove the safety precaution labels on the unit.

6) Do not look directly into the laser beam.
(Never look into the emission window, even when the laser seems to be inactive.)

7) Do not observe the laser beam directly through an optical instrument, such as a

8) When measuring flat objects with a mirror finish, do not look at the reflection on the

9) If measuring a workpiece with reflective parts, avoid fixing your eyes on the

10) Close the beam shutter when the measuring unit is not in use.

11) The laser beam doesn’t harm human skin when irradiating.

12) “CAUTION － Use of controls or adjustments or performance of procedures other

Never open the cover on this measuring unit.

5

SAFETY PRECAUTIONS

FOR LASER BEAM

was established in January, 2001.

power: 1.3 mW, semiconductor laser with a wavelength of 650 nm)

international standard. This unit satisfies EN-60825-1 (Europe), FDA / CDRH /
Laser Notice No.50 (America), and JIS C 6802 (Japan) corresponding to this
standard.

magnifying lens.

surface.

measured surface.

than those specified herein may result in hazardous radiation exposure.”

No. 99MBC094A

5-1

5.2 Safety Precaution Labels Located on LSM-500S Series

Laser Emission LED

Shutter

5-2

No. 99MBC094A

SERVICE NETWORK

Mitutoyo America Corporation

Illinois Repair Service

958 Corporate Blvd., Aurora, IL. 60504, U.S.A.
TEL: [phone] FAX: [phone]
Michigan Repair Service
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TEL: [phone] FAX: [phone]
Los Angeles Repair Service
16925 East Gale Ave., City of Industry, CA 91745, U.S.A.
TEL: [phone] FAX: [phone]

for Advanced Technical Support Service

3

M

Solution Center Indiana:

TEL: [phone] FAX: [phone]

3

M

Solution Center Massachusetts:

TEL: [phone] FAX: [phone]

3

M

Solution Center North Carolina:

TEL: [phone] FAX: [phone]

Mitutoyo Canada Inc.

2121 Meadowvale Blvd., Mississauga, Ont. L5N 5N1, CANADA
TEL: [phone] to 3 FAX: [phone]

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TEL: [phone] FAX: [phone]

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TEL: [phone] FAX: [phone]

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TEL: [phone] FAX: [phone]

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TEL: [phone] FAX: [phone]

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TEL: [phone] FAX: [phone]

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TEL: [phone] FAX: [phone]

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TEL: [phone] FAX: [phone]

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TEL: [phone] FAX: [phone]

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TEL:[phone] FAX: [phone]

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TEL: [phone] FAX: [phone]

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TEL: [phone] FAX: [phone]

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Regional Headquarters

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Mitutoyo Measuring Instruments Co., Ltd.

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