INFICON MPI-16 User Manual
OPERATION AND SERVICE MANUAL
MPI-16 and MPI-16H
Pocket Indexers
IPN 614800 Rev. B
OPERATION AND SERVICE MANUAL
MPI-16 and MPI-16H
Research Quartz Crystal Microbalance
IPN 614800 Rev. B
®
www.inficon.com reachus@inficon.com
Due to our continuing program of product improvements, specifications are subject to change without notice.
©2007 INFICON
Trademarks
The trademarks of the products mentioned in this manual are held by the companies that
produce them.
INFICON® is a trademark of INFICON Inc.
All other brand and product names are trademarks or registered trademarks of their respective companies.
Disclaimer
The information contained in this manual is believed to be accurate and reliable. However, INFICON assumes
no responsibility for its use and shall not be liable for any special, incidental, or consequential damages related
to the use of this product.
Disclosure
The disclosure of this information is to assist owners of INFICON equipment to properly operate and maintain
their equipment, and does not constitute the release of rights thereof. Reproduction of this information and
equipment described herein is prohibited without prior written consent from INFICON, Two Technology Place,
East Syracuse, NY 13057-9714. Phone 315.434.1100. See www.inficon.com.
Copyright
©2003 All rights reserved.
Reproduction or adaptation of any part of this document without permission is unlawful.
First Edition, September 2003. Revision A.
Second Edition, February 2006. Revision A.
Second Edition, October 2007. Revision B.
WARNING
All standard safety procedures associated with the safe
handling of electrical equipment must be observed. Always
disconnect power when working inside the controller. Only
properly trained personnel should attempt to service the
instrument.
Warranty
INFICON warrants the product to be free of functional defects in material and
workmanship and that it will perform in accordance with its published specification
for a period of (twenty-four) 24 months.
The foregoing warranty is subject to the condition that the product be properly
operated in accordance with instructions provided by INFICON or has not been
subjected to improper installation or abuse, misuse, negligence, accident,
corrosion, or damage during shipment.
Purchaser's sole and exclusive remedy under the above warranty is limited to, at
INFICON's option, repair or replacement of defective equipment or return to
purchaser of the original purchase price. Transportation charges must be prepaid
and upon examination by INFICON the equipment must be found not to comply
with the above warranty. In the event that INFICON elects to refund the purchase
price, the equipment shall be the property of INFICON.
This warranty is in lieu of all other warranties, expressed or implied and
constitutes fulfillment of all of INFICON's liabilities to the purchaser. INFICON
does not warrant that the product can be used for any particular purpose other
than that covered by the applicable specifications. INFICON assumes no liability in
any event, for consequential damages, for anticipated or lost profits, incidental
damage of loss of time or other losses incurred by the purchaser or third party in
connection with products covered by this warranty or otherwise.
www.inficon.com reachus@inficon.com
MPI-16 & MPI-16H POCKET INDEXERS
Table of Contents
1 General Description............................................................................1-1
1.1 Purpose.............................................................................................................1-1
1.2 Features............................................................................................................1-1
1.2.1 Indexing ...................................................................................................1-1
1.2.2 Speed........................................................................................................1-1
1.2.3 Torque......................................................................................................1-1
1.2.4 Safety .......................................................................................................1-2
1.2.5 Deposition Controller Interface ...............................................................1-2
1.2.6 Remote Panel...........................................................................................1-2
1.2.7 Error and Fault Detection.........................................................................1-2
1.2.8 Noise Immunity .......................................................................................1-3
1.2.9 Compact Size...........................................................................................1-3
1.3 Specifications – MPI-16 Pocket Indexer .........................................................1-4
1.3.1 Indexing ...................................................................................................1-4
1.3.2 Speed at Output Shaft ..............................................................................1-4
1.3.3 Torque at Output Shaft.............................................................................1-4
1.3.4 Temperature Protection............................................................................1-4
1.3.5 Safety Interlocks ......................................................................................1-4
1.3.6 Inputs/Outputs Interface...........................................................................1-4
1.3.7 Physical....................................................................................................1-5
1.4 Specifications – Remote Panel.........................................................................1-5
1.4.1 Displays....................................................................................................1-5
1.4.2 Controls....................................................................................................1-5
1.4.3 Physical....................................................................................................1-5
1.5 Accessories ......................................................................................................1-6
1.5.1 Remote Panel...........................................................................................1-6
1.5.2 External Interface Cable ..........................................................................1-6
1.5.3 Mounting Bracket ....................................................................................1-6
1.5.4 Power Supply...........................................................................................1-6
2 Package Contents................................................................................2-1
2.1 Ordering Information.......................................................................................2-1
3 Setup and Installation.........................................................................3-1
3.1 Introduction......................................................................................................3-1
3.2 Setup Instructions.............................................................................................3-1
3.3 Configuration Switches - Setup Guide ............................................................3-2
3.3.1 Number of Positions ................................................................................3-3
3.3.2 Banana Pocket #1 Length ........................................................................3-3
3.3.3 Banana Pocket #2 Start Position..............................................................3-4
3.3.4 Banana Pocket #2 Length ........................................................................3-4
3.3.5 Rotation Mode .........................................................................................3-4
3.4 Configuration Examples ..................................................................................3-5
3.4.1 Configuration Error..................................................................................3-6
3.5 Installation in Your System .............................................................................3-8
MPI-16 & MPI-16H POCKET INDEXERS
3.6 System Connections.......................................................................................3-11
3.6.1 I/O Port Connector.................................................................................3-11
3.6.2 Interlock Output Connector ...................................................................3-12
3.7 Connecting to the Remote Panel....................................................................3-14
4 Operation.............................................................................................4-1
4.1 Controlling the MPI-16 Manually ...................................................................4-1
4.2 Controlling the MPI-16 Automatically............................................................4-1
4.2.1 Pocket Position Selection.........................................................................4-2
4.2.2 Pocket Position Feedback........................................................................4-3
4.2.3 Remote Selection of Rotation Modes......................................................4-4
4.2.4 Speed Select.............................................................................................4-4
4.2.5 Example: Using the MPI Indexer with the MDC-360.............................4-5
4.3 System Faults...................................................................................................4-8
4.4 Abort and Reset..............................................................................................4-11
5 Troubleshooting Aids..........................................................................5-1
5.1 Returning The Indexer To The Factory...........................................................5-2
6 Appendix A..........................................................................................6-1
MPI-16 & MPI-16H POCKET INDEXERS
Table of Figures
FIGURE 3-1 POCKET INDEXER FRONT VIEW......................................................................3-2
FIGURE 3-2 CONFIGURATION EXAMPLE - 4-POSITION CRUCIBLES ....................................3-5
FIGURE 3-3 CONFIGURATION EXAMPLE - 5-POSITION CRUCIBLES ....................................3-5
IGURE 3-4 CONFIGURATION EXAMPLE - 8-POSITION CRUCIBLES ....................................3-6
F
F
IGURE 3-5 MPI-16 OUTLINE DIMENSIONS ......................................................................3-9
FIGURE 3-6 TYPICAL MOUNTING....................................................................................3-10
FIGURE 3-7 SYSTEM CONNECTIONS................................................................................3-13
FIGURE 3-8 REMOTE PANEL – FRONT VIEW....................................................................3-14
IGURE 3-9 REMOTE PANEL - REAR VIEW......................................................................3-15
F
F
IGURE 3-10 POCKET INDEXER REAR VIEW....................................................................3-16
FIGURE 4-1 DSUB-25 FEMALE TO DSUB-37 FEMALE CABLE DIAGRAM.........................4-7
List of Tables
TABLE 3-1 CONFIGURATION ERRORS...............................................................................3-7
TABLE 3-2 I/O PORT SIGNAL ASSIGNMENTS...................................................................3-11
TABLE 4-1 POCKET SELECT INPUTS TRUTH TABLE...........................................................4-3
TABLE 4-2 POCKET POSITION FEEDBACK OUTPUTS TRUTH TABLE ..................................4-4
TABLE 4-3 SPEED SELECT BCD INPUTS TRUTH TABLE ....................................................4-4
TABLE 4-4 SPEED SETTINGS..............................................................................................4-5
TABLE 4-5 SYSTEM FAULTS............................................................................................4-10
TABLE 6-1 QUICK REFERENCE - ERRORS AND FAULTS .....................................................6-1
MPI-16 & MPI-16H POCKET INDEXERS
1 General Description
1.1 Purpose
The MPI-16 Pocket Indexer allows for automatic or manual control of multi-pocket beam
sources that have a 4:1 gear reduction. It utilizes a stepper motor and is capable of
accurately indexing a very wide assortment of crucibles. Automatic control is easily
achieved by connecting the MPI-16 to a Deposition Controller, such as the INFICON
MDC-360. Manual control is also made simple by connecting the MPI-16 to the optional
Remote Panel. A Safety Interlock relay ensures that the e-beam supply is not active
during pocket rotation.
1.2 Features
The MPI-16 is rich in features and was designed to be the most flexible, powerful, and
intuitive crucible indexer of its kind. There are two versions of the indexers, the MPI-16
(Standard) and MPI-16H (High Torque). Except for the torque and speed, the two
versions have the same functions. The following list summarizes their main
characteristics.
1.2.1 Indexing
Both MPI-16 and MPI-16H can be configured to index up to 16 individual pockets.
Specifically, it can be set for use with 4, 5, 6, 8, 10, 12 or 16 pocket positions, as well as
circular (continuous trough) pockets. Up to two banana (partial trough) pockets of any
length may be specified. UHV (Ultra-High Vacuum) crucibles are also supported. The
MPI-16 can be set to Fast rotation mode, which uses a “smart” algorithm to select the
shortest path to the target pocket (this setting can be overridden, however, by explicitly
specifying clockwise or counter-clockwise rotation).
1.2.2 Speed
1.2.2.1 MPI-16 Speed
While searching for a target pocket, the MPI-16 output shaft rotates at a fixed speed of 16
RPM. While on a Circular or Banana pocket, the output shaft sweeps through the
specified region at a speed that is set by via the remote inputs, the remote panel or on the
indexer. The speed may be set to any one of eight settings, which fall between 0.125
RPM and 16 RPM.
1.2.2.2 MPI-16H Speed
Unlike the standard version, the MPI-16H output shaft rotates at the speed that is set by
the remote inputs, the remote panel or on the indexer, whether it was searching for a
target pocket, or sweeping on a Circular or Banana pocket. The speed may be set to any
one of eight settings, which fall between 0.125 RPM and 16 RPM.
1.2.3 Torque
As mentioned earlier, there are two versions the indexer, the standard torque MPI-16 and
the high torque MPI-16H. In both versions, the indexers normally run in Low Current
mode to save power and reduce heat. They will only switch into higher torque mode, as
General Description 1-1
MPI-16 & MPI-16H POCKET INDEXERS
required, to turn the crucible. The maximum torque generated by each version is listed
below.
1.2.3.1 MPI-16 Standard Torque
The Standard indexer, Model MPI-16, is capable of providing up to 187 in-oz. of torque
at output shaft. The output shaft size is ¼ inch in diameter.
1.2.3.2 MPI-16H High Torque
The High Torque Indexer, Model MPI-16H, is capable of providing up to 310 in-oz. of
torque at output shaft. The output shaft size is 5/16 inch in diameter.
1.2.4 Safety
An Abort/Reset button is provided to allow emergency pausing without program
interruption. If this button is held for two seconds, the system resets itself. When
connected to a Deposition Controller, an external Abort signal will also cause a pause in
the program that can be resumed when the Abort signal is removed. The MPI-16
provides an Interlock relay that acts to ensure that the e-beam is never active during
pocket rotation. The MPI-16 will halt operation if it’s maximum torque is exceeded or if
the motor overheats.
1.2.5 Deposition Controller Interface
The MPI-16 supports two modes for interfacing with an external Deposition Controller,
such at the INFICON MDC-360. The simplest method is for the MPI-16 to accept BCD
(Binary Coded Decimal) inputs to select the desired pocket number and provide BCD
outputs to transmit the current pocket number back to the Controller. An alternate
method accepts two separate inputs (Clockwise and Counter-Clockwise), which rotate the
MPI-16 by one pocket in the indicated direction whenever either signal is asserted.
1.2.6 Remote Panel
The Remote Panel is a rack-mount control unit that provides pocket selection, speed
selection, an easy-to-read LED display of the current pocket position and an Abort/Reset
button. The Remote Panel is required if you do not plan to use the MPI-16 with an
external controller, since it will be the only way to select pockets. Even when using
external control, the Remote Panel may be useful since it allows easy manual pocket
selection. For example, the remote panel allows the operator to check the material levels
in the individual pockets in between deposition runs.
1.2.7 Error and Fault Detection
In the event of any type of error or fault, the MPI-16 makes it very clear what problem
has occurred. If the unit has not been configured correctly, a blinking LED will flash a
code that indicates what configuration changes need to be made. Similarly, if there is a
run-time fault, a different blinking LED will flash a code that indicates what error
occurred. Table 3-1 and Table 4-5 System Faults in this manual defines the meaning of
the blink-codes, and a Quick Reference is provided in Appendix A.
1-2 General Description
MPI-16 & MPI-16H POCKET INDEXERS
1.2.8 Noise Immunity
The MPI-16 employs numerous electronics techniques (including the use of optoisolators, switch debouncing and smoothing filters) to ensure that it operates correctly
even in electrically noisy environments.
1.2.9 Compact Size
The MPI-16 has a very small footprint measuring only 4.0” x 4.2” so it requires minimal
mounting space.
General Description 1-3
MPI-16 & MPI-16H POCKET INDEXERS
1.3 Specifications – MPI-16 Pocket Indexer
1.3.1 Indexing
Number of Positions Supported Circular, 4, 5, 6, 8, 10, 12, 16
“Banana” Pockets Supported Up to 2
Rotation Modes Fast, UHV, CW, CCW, Remote
Position Accuracy and
Repeatability
1.3.2 Speed at Output Shaft
Pocket Search Speed (MPI-16) 16 RPM
Pocket Search Speed (MPI-16H) 16, 8, 4, 2, 1, 1/2, 1/4, 1/8 RPM
Circular, Banana Sweep Speed 16, 8, 4, 2, 1, 1/2, 1/4, 1/8 RPM
1.3.3 Torque at Output Shaft
Max. Torque (MPI-16) 187 in-oz.
Max. Torque (MPI-16H) 310 in-oz.
1.3.4 Temperature Protection
Auto Shut-off Temperature
Resume From Shut-off
1.3.5 Safety Interlocks
Relay output, SPST 120 VA, 2A max.
Disable Ground true.
1.3.6 Inputs/Outputs Interface
Inputs Ground true.
Input Functions Pocket Selection: 4-bit BCD
Outputs Optically isolated transistors. Ground true.
Output Functions Pocket Position: 4-bit BCD
1° at output shaft
100 ± 1°C (212 ± 1.8°F)
85 ± 6°C (185 ± 10.8°F)
4.7 K ohms pull up to 5 VDC internally.
4.7 k ohms pull up to 5 VDC internally.
Speed Selection: 3-bit BCD
Clockwise rotation selection
Counter Clockwise rotation selection
Reset
4.7 K ohms pull-up resistors. 50 mA max.
In Pocket Position
Pocket Fault
1-4 General Description
MPI-16 & MPI-16H POCKET INDEXERS
1.3.7 Physical
Dimensions [w] × [h] × [d]
(including shaft length and
protruded switches and
connectors)
Weight
Power Supply 48 VDC, 1.1 A, Desktop type
Input Power Requirements 100-250 VAC, 1.5 A at 47-63 Hz.
Mounting Bracket (included) Mounts to a 1” rotary motion feed through,
4.00” × 5.29” × 4.19”
(10.2 cm × 13.44 cm × 10.64 cm)
4.2 lbs. (1.9 kg)
accommodates base plate thickness of 1/2” to 1-1/8”.
1/4” diameter for the MPI-16 Output Shaft Size
5/16”diameter for the MPI-16H
1.4 Specifications – Remote Panel
1.4.1 Displays
16 Green LEDs Indicating current pocket position
Red Fault LED Indicating a fault
Green In Position LED Indicating a selected position is reached.
1.4.2 Controls
Auto-Manual Toggle Switch Selecting the operating mode.
Pocket Select Rotary Switch Selecting the desired pocket position (Manual Mode)
Speed Select Rotary Switch Selecting the desired sweep for “banana” pocket
(Manual Mode)
Abort/Reset Button Use to stop the indexer operation or to reset the
indexer.
1.4.3 Physical
Dimensions [w] × [h] × [d]
(Including protruded switches
and connectors)
Pocket Select Rotary Switch Selecting the desired pocket position (Manual Mode)
Speed Select Rotary Switch Selecting the desired sweep for “banana” pocket
Abort/Reset Button Use to stop the indexer operation or to reset the
4.72” × 3.47” × 2.00” (11.99 cm × 8.81 cm × 5.08
cm)
(Mounts in a 3.5” quarter panel)
(Manual Mode)
indexer.
General Description 1-5
Loading...