Burkert 8700, 8701, 8711, 8710, 8713 Operating Instructions Manual
...
Type 8700 / 8701 / 8703 / 8705
MFM, Mass Flow Meter IP40
Type 8710 / 8711 / 8713 / 8715
MFC, Mass Flow Controller IP40
Operating Instructions
Bedienungsanleitung
Manuel d‘utilisation
We reserve the right to make technical changes without notice.
Technische Änderungen vorbehalten.
Sous réserve de modifications techniques.
© 2013 Bürkert SAS
Operating Instructions 1307/0_EU-ML 00563582
3
Type 8700, 8701, 8703, 8705 /
8710, 8711, 8713, 8715
1. ABOUT THIS MANUAL .................................................................................4
1.1. Symbols used ..........................................................................................4
1.2. Definition of the word "device" .......................................................4
2. INTENDED USE ................................................................................................5
3. BASIC SAFETY INFORMATION ...............................................................5
4. GENERAL INFORMATION ...........................................................................7
4.1. Manufacturer's address and international contacts ............7
4.2. Warranty conditions ..............................................................................7
4.3. Information on the Internet ...............................................................7
5. DESCRIPTION OF THE SYSTEM ............................................................7
5.1. General description ..............................................................................7
5.2. Operation of an MFM or MFC sensor ..........................................8
5.3. Detailed operation of an MFC .........................................................8
6. TECHNICAL DATA ........................................................................................11
6.1. Markings on the device.................................................................... 11
6.2. Conditions of use ................................................................................ 12
6.3. Conformity to standards and directives ..................................13
6.4. Mechanical data ................................................................................... 13
6.5. Dimensions ............................................................................................13
6.6. Fluidic data .............................................................................................18
6.7. Electrical data .......................................................................................20
7. INSTALLATION AND COMMISSIONING ...........................................22
7.1. Safety instructions ..............................................................................22
7.2. Prior to installation .............................................................................22
7.3. Description of the MFM / MFC ....................................................23
7.4. Sequence of the steps to be performed ................................ 23
7.5. Setting the parameters .................................................................... 23
7.6. Mechanical installation .....................................................................27
7.7. Fluid installation ...................................................................................27
7.8. Electrical installation .........................................................................28
8. OPERATION AND FUNCTION ................................................................30
8.1. Safety instructions .............................................................................. 30
8.2. Operation of the MFM / MFC ........................................................30
8.3. MFC operating modes ...................................................................... 35
9. MAINTENANCE, TROUBLESHOOTING ............................................ 39
9.1. Safety instructions .............................................................................. 39
9.2. Maintenance ...........................................................................................39
9.3. Troubleshooting ................................................................................... 41
10. ACCESSORIES / SPARE PARTS ......................................................44
10.1. Accessoiries ........................................................................................ 44
10.2. Spare part .............................................................................................46
11. SHUTDOWN .................................................................................................. 47
11.1. Safety instructions ........................................................................... 47
11.2. Dismounting of the MFM / MFC ............................................... 47
12. PACKAGING, STORAGE, TRANSPORT ..........................................48
12.1. Packaging, Transport ...................................................................... 48
12.2. Storage ................................................................................................... 48
13. RETURNING THE DEVICE .....................................................................48
14. DISPOSAL OF THE PRODUCT ........................................................... 49
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About this manual
Type 8700, 8701, 8703, 8705
1. ABOUT THIS MANUAL
This manual describes the entire life cycle of the device. Please keep
this manual in a safe place, accessible to all users and any new owners.
This manual contains important safety information.
Failure to comply with these instructions can lead to hazardous
situations.
• This manual must be read and understood.
1.1. Symbols used
danger
Warns against an imminent danger.
• Failure to observe this warning can result in death or in serious
injury.
Warning
Warns against a potentially dangerous situation.
• Failure to observe this warning can result in serious injury or
even death.
attention
Warns against a possible risk.
• Failure to observe this warning can result in substantial or minor
injuries.
note
Warns against material damage.
• Failure to observe this warning may result in damage to the
device or system.
Indicates additional information, advice or important
recommendations.
Refers to information contained in this manual or in other
documents.
→ Indicates a procedure to be carried out.
1.2. Definition of the word "device"
The word "device" used within this manual refers to a Mass Flow
Meter (MFM) type 8700, 8701, 8703 or 8705, or a Mass Flow
Controller (MFC) type 8710, 8711, 8713 or 8715.
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Intended use
Type 8710, 8711, 8713, 8715
2. INTENDED USE
Nonconforming use of the MFM / MFC types 8700, 8701,
8703, 8705 / 8710, 8711, 8713, 8715 may be a hazard to
people, nearby equipment and the environment.
• Mass flow meter types 8700, 8701, 8703 and 8705 are
designed exclusively for measuring the mass flow-rate of clean,
dry gases.
• Mass flow controller types 8710, 8711, 8713 and 8715 are
used for controlling the mass flow-rate of clean, dry gases.
• Only use the fluids stated on the name plate and the calibration
protocol.
• Protect this device against electromagnetic interference,
ultraviolet rays and, when installed outdoors, the effects of the
climatic conditions.
• This device must be used in compliance with the characteristics
and commissioning and use conditions specified in the
contractual documents and in the user manual.
• Requirements for the safe and proper operation of the device
are proper transport, storage and installation, as well as careful
operation and maintenance.
• Only use the device as intended.
• Observe any existing restraints when the device is exported.
3. BASIC SAFETY INFORMATION
This safety information does not take into account:
• any contingencies or occurences that may arise during installation,
use and maintenance of the devices.
• the local safety regulations for which the operating company
is responsible including the staff in charge of installation and
maintenance.
Danger from the heated surfaces when used for prolonged
periods.
• The device must be kept away from any highly flammable
materials or fluids.
• Wear protective gloves to handle the device.
Danger due to high pressure in the installation.
• Stop the circulation of fluid, cut off the pressure and drain the
pipe before loosening the process connections.
Danger due to electrical voltage.
• Shut down and isolate the electrical power source before
carrying out work on the system.
• Observe all applicable accident protection and safety
regulations for electrical equipment.
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Basic safety information
Type 8700, 8701, 8703, 8705
Danger from the outflow of operating fluid
Observe all applicable accident protection and safety regulations
for electrical equipment.
Various dangerous situations
To avoid injury take care:
• to prevent any unintentional power supply switch-on.
• to ensure that installation and maintenance work are
carried out by qualified, authorised personnel in possession of
the appropriate tools.
• to keep the device away from any highly flammable materials or
fluids and avoid any contact with bare hands,
• to guarantee a defined or controlled restarting of the process,
after a power supply or a medium supply interruption,
• to use the device only if in perfect working order and in
compliance with the instructions provided in the instruction
manual,
• to observe best industry practice for the installation and use of
these devices,
• not to use the MFM / MFC types 8700, 8701, 8703, 8705 /
8710, 8711, 8713, 8715 for controlling and/or measuring the
flow-rate of contaminated (particle size > 25 µm) or humid or
contaminated fluids,
• not to operate the device without the stainless steel mesh filter
disc installed at the factory,
• not to operate the device in a mounting position which deviates
from the calibration conditions,
• not to operate the device with higher pressures than the specified
tightness pressure (MFC) respectively calibration pressure
(MFM),
• not to subject the device to mechanical loads (e.g. by placing
objects on top of it or by using it as a step).
• not to make any external modifications to the device. Do not
paint or varnish any part of the device. Do not feed any other
fluids into the system other than the designated operating
fluid indicated on the device name plate. Exception: Agent for
cleaning and decontaminating the device (see also chap. 9.2.1).
In doing so, observe the compatibility of the materials used for
the device. A chemical compatibility chart can be found on the
Internet at:
www.burkert.com
Documentation
Brochures
Chemical
Resistance Chart
If in doubt, contact the manufacturer.
note
Elements / Components sensitive to electrostatic discharges
• This device contains electronic components sensitive to
electrostatic discharges. They may be damaged if they are
touched by an electrostatically charged person or object.
During electrostatic discharge, they will become defective
immediately or will fail when energized.
• To minimise or even avoid all damage due to an electrostatic
discharge, take all the precautions described in the EN 613405-1 and 5-2 norms.
• Also ensure that you do not touch any of the live electrical
components.
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General information
Type 8710, 8711, 8713, 8715
4. GENERAL INFORMATION
4.1. Manufacturer's address and
international contacts
To contact the manufacturer of the device, use following address:
Bürkert SAS
Rue du Giessen
F-67220 TRIEMBACH-AU VAL
The addresses of our international sales offices are available on the
internet at: www.burkert.com
4.2. Warranty conditions
The condition governing the legal warranty is the conforming use of
the MFM / MFC in observance of the operating conditions specified
in this manual.
4.3. Information on the Internet
You can find the user manuals and technical data sheets regarding the
type MFM / MFC at: www.burkert.com
5. DESCRIPTION OF THE
SYSTEM
5.1. General description
• Mass flow meter types MFM 8700, 8701, 8703 and 8705 are
devices designed for measuring the mass flow-rate of clean, dry
gases.
• Mass flow controller types MFC 8710, 8711, 8713 and 8715 are
devices designed for controlling the mass flow-rate of clean, dry
gases.
Type of the device Type of sensor
MFM 8700 Capillary/Bypass channel
8701 MEMS
8703 MEMS
8705 Capillary/Bypass channel
MFC 8710 Capillary/Bypass channel
8711 MEMS
8713 MEMS
8715 Capillary/Bypass channel
5.1.1. General operation of the Mass Flow
Meter (MFM)
The MFM integrates a sensor for measuring the flow-rate. The measured
value for the mass flow-rate is transmitted to a remote device via an
analogue or a digital output (field bus).
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Description of the system
Type 8700, 8701, 8703, 8705
5.1.2. General operation of the Mass Flow
Controller (MFC)
The MFC comprises:
• a sensor for measuring the mass flow-rate,
• control electronics,
• an actuating element: low-friction solenoid control valve with a
high response sensitivity.
5.2. Operation of an MFM or MFC
sensor
• The integrated flow-rate sensors use the thermal measurement
process (anemometric and calorimetric) to measure the mass
flow-rate. The main components are a heating resistor and a
temperature probe. The gas which passes through the device
modifies the temperature difference measured between both
resistors.
• The thermal measurement principle allows the MFC to control the
required mass flow-rate completely independently of the pressure
and temperature fluctuations in the application concerned.
The damping of the output signal can be changed with the
"Mass Flow Communicator" (see chap. 10.1.3).
On the MFC types 8710, 8711, 8713, 8715, the
technology for the integrated sensor requires filters to be
fitted upstream of the product when highly soiled fluids are
present.
5.3. Detailed operation of an MFC
w
x
out
y
x
x
d
= w-x
Control
electronics
Sensor
Actuating element
(solenoid valve)
Gas
inlet
Gas
outlet
Fig. 1: Operating principle for the Mass Flow Controller
The control electronics compare the mass flow-rate (x) measured by
the integrated flow sensor with the mass flow-rate set-point value
(w) supplied to the MFC. The control electronics then calculate the
actuating variable (y) to be supplied to the solenoid valve to control
its opening. The flow-rate is either maintained at a constant value, or
modified to a predefined profile.
The control operates independently of fluctuations in pressure or
increases in the flow resistance which may be caused by soiling of the
filter. The rapidly responding solenoid valve and the sensor dynamics
define the overall responding time.
The measured value for the mass flow-rate is also transmitted (xout) to
a remote device via an analogue output or a digital output (field bus).
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Description of the system
Type 8710, 8711, 8713, 8715
5.3.1. Control electronics
The control electronics:
• process the mass flow-rate set-point values and measured values,
• control the solenoid valve.
Set-point value
The set-point value (w) is either transmitted either by an analogue,
normalized input signal, or digitally via the serial interface or the field bus
interface. If the set-point value is supplied by analogue transmission,
the following assignments are applied:
Signal
range
Set-point associated
with the range min.
Set-point associated
with the range max.
4...20 mA 4 mA, w = 0 % 20 mA, w = 100 %
0...20 mA 0 mA, w = 0 % 20 mA, w = 100 %
0...5 V 0 V, w = 0 % 5 V, w = 100 %
0...10 V 0 V, w = 0 % 10 V, w = 100 %
For the control of a system where quick flow-rate changes are not
permitted, a ramp function can be activated. The settings for an
ascending and a descending set-point value can be set separately.
More detailed information on the ramp function and on all
other functions can be found in the software documentation
for the MFM / MFC.
Control settings
The initial control settings are set at the factory.
• Amplification factors:
After start-up, the controller operates with amplification factors
dependent on the loop properties. When the autotune function runs,
these are determined automatically. This function enables the control
settings to be optimized for the system's actual conditions.
• Control dynamics setting:
The device has a setting which can change the control dynamics
with the aid of the "Mass Flow Communicator" software
(see chap. 10.1.3). Its extreme effects are:
1. a very quick adjustment in which overshoots are possible. This
enables the controller to respond immediately to very low control
deviations, causing the control to be very turbulent,
2. a slower adjustment to the required flow-rate. If the system is less
dynamic, the behavior of the controller may be damped so that
minor fluctuations of the measured value or set-point value are
adjusted slowly.
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Description of the system
Type 8700, 8701, 8703, 8705
Zero point shut-off
A zero point shut-off is integrated to ensure the sealing function of the
valve. This is activated if the following conditions occur at the same time:
Set-point value < 2 % of
nominal flow-rate Q
nom
(with control range 1:50)
and
Measured value < 2 % of
nominal flow-rate Q
nom
(with
control range 1:50)
If the zero point shut-off is active, the PWM signal is set to
0 % so that the valve is completely closed.
5.3.2. MFC solenoid valve
The solenoid valve used for an MFC is a direct-acting, normally closed
solenoid control valve.
The ND (nominal diameter) of the solenoid control valve is determined
by the required nominal flow-rate Q
nom
, the pressure conditions in the
process and the density of the operating fluid.
If the device is operated within the specified pressure range,
the solenoid valve also takes over the sealing function
together with the control function. Limitation: in the case
of special, hard seal materials, the seal function cannot be
ensured. In this case an additional shut-off valve may be
required.
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Technical data
Type 8710, 8711, 8713, 8715
6. TECHNICAL DATA
attention
Risk of injury from pressure and discharge of fluid.
Important device-specific technical data is indicated on the name plate and the calibration plate (see chap. 6.1).
• Observe the permitted fluid according to the name plate (depending on seal material).
• Observe the permitted pressure range on the calibration plate of the device.
6.1. Markings on the device
Examples:
8701 20.0 Nl/min
Made in France
00210166
W49MM
24V DC 5W DP
CH4
S/N 1004
FKM
Name plate
Calibration data 00182381
QC passed: 25/11/2011
P1 : 10,00 barg
Medium 1
P1 : 10,00 barg
Medium 2
Mounting: horizontal upright
Calibration plate
Fig. 2: Name plate, calibration plate
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Technical data
Type 8700, 8701, 8703, 8705
8701 20.0 Nl/min
Made in France
00210166
W49MM
24V DC 5W DP
CH4
S/N 1004
FKM
Type of
device
Operating fluid
Materail of the seal
Supply voltage
Max. power
required
Output signal
Manufacturing
code
Bar codeOrder code
of the device
Fig. 3: Detail of a name plat
Calibration date
Calibration
pressure
Mounting
position
Order code of the device
Calibration fluid
Calibration data 00182381
QC passed: 25/11/2011
P1 : 10,00 barg
Medium 1
P1 : 10,00 barg
Medium 2
Mounting: horizontal upright
Fig. 4: Details of a calibration plate
6.2. Conditions of use
Warning
Risk of injury from malfunction due to effects of weather!
The MFM / MFC is not designed for unrestricted use outdoors.
• Protect the device from direct sunlight.
• Observe the ambient temperature permitted for the device.
• Protect the device from humidity.
Setting Value
Ambient temperature -10 °C to +55 °C
For UL devices: 0 °C to 40 °C
Fluid temperature for oxygen: -10 °C to +60 °C
for the other fluids: -10 °C to +70 °C
Air humidity < 95%, without condensation
Relative humidity for UL
devices
80% up to a temperature of 31°C, with
a linear decrease to a relative humidity of
50% at 40°C
Protection rating
acc. to EN 60529
Only if devices are cabled and the
connectors are plugged in and
tightened: IP40
Absolute height above
sea level for UL devices
2000 m max.
Operating environment Indoors, with pollution degree 2
Serial
number
Nominal flow-rate (Q
nom
)
and unit flow-rate
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Technical data
Type 8710, 8711, 8713, 8715
6.3. Conformity to standards and
directives
The device conforms to the EC directives through the following standards:
• EMC: EN 61000-6-2, EN 61000-6-3
The MFM / MFC UL devices conform to the following standards:
• UL 61010-1
• CAN/CSA-C22.2 n° 61010-1.
6.4. Mechanical data
The device may be mounted in a horizontal or vertical position: see the
calibration plate and/or the calibration protocol.
Type Base block material Material of the
housing
Port
connections
8700,
8710
Stainless steel
1.4305
Polycarbonate (PC)
or sheet stainless
steel 1.4301
G 1/4, NPT
1/4, flange
8701,
8711
Stainless steel
1.4305 or aluminium
Polycarbonate (PC)
or sheet stainless
steel 1.4301
G 1/4, NPT
1/4, flange
8703,
8713
Stainless steel
1.4305 or aluminium
Sheet stainless
steel 1.4301
G 1/4, NPT
1/4, flange
8705,
8715
Stainless steel
1.4305
Sheet stainless
steel 1.4301
G 1/4, NPT
1/4, flange
Sealing material FKM, FFKM, EPDM (see name plate)
Other parts in contact with fluids, proportional valve: 1.4310, 1.4113
and 1.4305.
6.5. Dimensions
4,5
0
10
97
107
28
2x M4
20
0
12,5
30
43,5
84
115,5
A
Fieldbus versions:
CANopen, DeviceNet = 18
PROFIBUS DP = 16,5
Fig. 5: Dimensions of MFM types 8700 and 8701 and MFC
types 8710 and 8711
Weight aluminium (kg) Weight stainless steel (kg)
ca. 0.8 ca. 1.1
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Technical data
Type 8700, 8701, 8703, 8705
4,5
2x
Ø6
0
14
17,75
14
17,75
0
10
26
58,5
819297
107
58,5
35,5
4x
Ø 4,5
35,5
2x
Ø 8,8
43
0
5
30
43,5
84
115,5
M4
Fieldbus versions:
CANopen, DeviceNet = 18
PROFIBUS DP = 16,5
Fig. 7: Dimensions of MFM with flanges, types 8700 and 8701,
and MFC with flanges, types 8710 and 8711
Weight aluminium (kg) Weight stainless steel (kg)
ca. 0.8 ca. 1.1
3,5
0
12,5
30
85
114
Fig. 6: Dimensions of MFM with metal housing, types 8700 and
8701, and MFC with metal housing, types 8710 and 8711
Weight aluminium (kg) Weight stainless steel (kg)
ca. 0.8 ca. 1.1
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Technical data
Type 8710, 8711, 8713, 8715
3,5
0
85
114
Fig. 8: Dimensions of MFM with flanges and metal housing,
types 8700 and 8701, and MFC with flanges and metal
housing, types 8710 and 8711
Weight aluminium (kg) Weight stainless steel (kg)
ca. 0.8 ca. 1.1
4,5
24
16,5
0
12,5
30
43,5
84
115,5
A
0
10
160
170
37
29
M4
Fieldbus versions:
CANopen, DeviceNet = 18
PROFIBUS DP = 16,5
Fig. 9: Dimensions of MFC with external solenoid valve, type
8711
Weight aluminium (kg) Weight stainless steel (kg)
ca. 1.2 ca. 1.5
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Technical data
Type 8700, 8701, 8703, 8705
3,5
0
85
114
Fig. 10: Dimensions of MFC with metal housing and external
solenoid valve, type 8711
Weight aluminium (kg) Weight stainless steel (kg)
ca. 1.2 ca. 1.5
3,5
0
10
97
107
28
20
2x M4
1,7
0
12,5
30
62,5
81,5
A
Fig. 11: Dimensions of MFM types 8703 and 8705 and MFC
types 8713 and 8715
Weight aluminium (kg) Weight stainless steel (kg)
ca. 0.8 ca. 1.1
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