Alcatel ACT 250 User Manual

ACT 250
TURBOMOLECULAR PUMP CONTROLLER
FOR ATP 150 AND ATP 400
ATP Series User’s Manual addendum

Contents

ACT 250 addendum
Alcatel Vacuum Technology France - ACT 250 addendum
January 2001
Commissioning
Presentation
The ACT 250 controller . . . . . . . . . . . . . . p. 3
Main characteristics . . . . . . . . . . . . . . . . p. 3
Accessories. . . . . . . . . . . . . . . . . . . . . . p. 4
Pump supply cable
“End-user” kit
Control modes for ACT 250 “box”
controller
. . . . . . . . . . . . . . . . . . . . . . . p. 5
Local control mode
Remote control
Control modes for ACT 250 OEM
controller
. . . . . . . . . . . . . . . . . . . . . . . p. 6
Local control mode
Remote control
ACT 250 controller technical characteristics . . p. 7
Dimensions
Safety instructions . . . . . . . . . . . . . . . . . p. 9
ACT 250 electrical connections. . . . . . . . . . p. 10
Characteristics of the ACT 250
Remote connector
. . . . . . . . . . . . . . . . p. 11
Voltage control mode
Principle of voltage-controlled
opto-isolated inputs
Signalling on output contacts
Wiring the ACT 250 Remote connector . . . p. 13
Use in local mode
Use in remote control mode
Contents
ACT 250 addendum
Alcatel Vacuum Technology France - ACT 250 addendum
January 2001
Use
Commissioning
(continued)
Controlling the pump from the
ACT 250 controller
. . . . . . . . . . . . . . . . . p. 24
Controller functions. . . . . . . . . . . . . . . . . p. 26
Precautions
Operation in local mode
Fault management
RS 232/485 serial link . . . . . . . . . . . . . . p. 14
Wiring the RS 232 or RS 485 serial link
Conguring the RS 232 or RS 485
serial link
Use
Detailed description of RS commands. . . . . . p. 15
Syntax conventions applicable to
all commands

Presentation

Alcatel Vacuum Technology France - ACT 250 addendum
January 2001

The ACT 250 controller

Dear Customer, You have just bought an ACT 250 controller. In order to ensure the best possible performance of the equipment and your complete satisfaction in using it, we advise you to read this addendum carefully before attempting to service or use your controller.
Insertable box version
Part No. 108320
Integrable OEM version
Part No. 108151

ACT 250 controller

Main characteristics

This controller drives ATP 150 or ATP 400 pumps, providing their power supply and enabling remote control.
The ACT 250 controller is available as:
an insertable box version with case,
an integrable OEM version without case.
This version can replace the “box” version when integrating the pump in a complex installation or device.
Dry contact signal outputs
Opto-isolated control inputs
RS 232 / 485 serial links
Operate at all voltages from 85 to 265 V, 50/60 Hz
The ACT 250 controller is a new product, not described in Edition 09 of the ATP Series
Pump User Manual.
This addendum provides the additional information needed to use the controller.
Presentation
Alcatel Vacuum Technology France - ACT 250 addendum
January 2001

Accessories

Pump power supply
cable
The controller is connected to the pump using a corresponding power supply cable, ordered separately.
Cable length (m) Part No.
1 105086
1.5 A458885
3.5 101812 5 101810 10 101811 15 105303 20 A458478
Kit Part No.
USA 108935 Europe 108936 UK 108948

“End-user” kit

This kit, ordered separately, is needed to use the ACT in local mode. It includes:
1 mains cable,
1 connector plug,
4 legs.
Presentation
Alcatel Vacuum Technology France - ACT 250 addendum
January 2001

ACT 250 box controller control modes

Local control mode

1
2
Pump start-up switch
Pump stop switch
Pump status indicatorsController power and fault
indicators

Remote control

The remote control
Established by the
REMOTE
connector which:
- provides remote control of the START, STOP, STANDBY, EXTERNAL SAFETY and MODE SELECT functions;
- replicate the available monitoring parameters (At speed / Starting / Fault) on dry contacts.
The RS232 serial link is used to control and monitor the pump using a computer.
The RS485 serial link is used to connect several pumps in a network.
The wiring characteristics are given on page 13
RS 232 serial link
RS 485 serial link
1
2
2
There are three possible remote control modes:
There are two possible control modes: local control and remote control.
POWER FAULT SPEED
START STOP
A C T 2 5 0A C T 2 5 0
Presentation
Alcatel Vacuum Technology France - ACT 250 addendum
January 2001

ACT 250 OEM controller control modes

Pump start-up switch
Pump stop switch
Pump status indicators
Controller power and fault
indicators

Local control mode

2
1

Remote control

The remote control
Established by the
REMOTE
connector which:
- provides remote control of the START, STOP, STANDBY, EXTERNAL SAFETY and MODE SELECT functions;
- replicate the available monitoring parameters (At speed / Starting / Fault) on dry contacts.
The RS232 serial link is used to control and monitor the pump using a computer.
The RS485 serial link is used to connect several pumps in a network.
The wiring characteristics are given on page 13
RS 232 serial link
RS 485 serial link
1
2
2
There are two possible control modes: local control and remote control.
There are three possible remote control modes:
Presentation
Alcatel Vacuum Technology France - ACT 250 addendum
January 2001

ACT 250 controller technical characteristics

Characteristic Unit ACT 250 “box” ACT 250 OEM
Weight kg 1.8 1.3 Dimensions H xWxD mm 128.4 × 106.3 × 220 95 × 100 × 212
3U × 1/4 Rack
Nominal voltage V 85 - 265 Frequency Hz 50/60 Maximum power W 300 Maximum ambient
° CT ≤ 50
temperature Storage temperature ° C 15/+70 Customer mains
A T10A
circuit breaker rating
ACT 250 box
dimensions
(in mm)
0
MP
z
50
50
R
T
S
D
,
,3
,4
,
0
22
106
91
1
PU
2
0H
4 22
POWE
FAUL
ACT 2
PEE
4 28
Presentation
Alcatel Vacuum Technology France - ACT 250 addendum
January 2001
ACT 250 controller technical characteristics
5
MP
E
Y
Ø
,2
W
U
S
S
O
,1
. ,
7
a
.
ACT 250 OEM
dimensions
(in mm)
Attached using four M3 screws or mounted in an Alcatel cabinet
RS232/48
REMOT
POWER SUPPL
xi m
PU
LT A
ER SUPPLY O
PEED
PEED T
TART
3
P T
153
15 0
mini
,75
18,6

Commissioning

Alcatel Vacuum Technology France - ACT 250 addendum
January 2001

Safety instructions

Before switching on the controller, the user should study the manual and follow the safety
instructions listed in the compliance certicate booklet supplied with the pump. See sheet B10 in the ATP pump User Manual.
Commissioning
Alcatel Vacuum Technology France - ACT 250 addendum
10
January 2001

ACT 250 controller electrical connections

Connect the RS232/485 serial link cable to the connector (cable and PC supplied by customer)
If the controller is remote controlled, make the various
connections on the REMOTE connector (see page 13 for wiring details).
If the controller is used in local mode, the
pump can only operate if the connector plug (ordered separately) is connected to the REMOTE
connector (see page 13 for wiring details).
Connect the controller to
the pump using the cable
(ordered separately)
Connect the fan (air-cooled ATP)
Remote cable
or
Connector plug
(standard wiring) to use the unit in local mode.
ATP 150 or ATP 400 pump
PC
Connect the controller to the mains
(cable ordered separately).
An earth connection must be provided.
RS configuration
Commissioning
Alcatel Vacuum Technology France - ACT 250 addendum
11
January 2001

ACT 250 remote connector characteristics

When units containing the control circuits are equipped with dry contact outputs, it is the customer's responsibility to use the outputs in
compliance with safety regulations.

Voltage control mode

Principle of voltage-
controlled optocoupled
inputs
Cable supplied by customer
The inputs are activated when an AC or DC voltage is applied. The voltage should be between 15 and 24 Volts. (15-pin Sub-D female connector).
Ext. safety
11
Select Mode
12
Standby Mode
13
Start/Stop
14
15
Inactive = the external safety device is activated (e.g. an emergency stop) Active = pump operation authorised
Select status or pulse command mode. This affects the START/STOP and STANDBY commands.
12 -
inactive
=
status
mode
12 -
active
=
pulse
mode
Inactive = operation at nominal speed Active = operation at reduced speed
Inactive = Stop Active = Start
Common for inputs
Example : Ext. safety activated
External contact supplied by customer
6
11
1
12
13
14
10
15
5
6
1
10
5
+
15 V 0 V
11
12
13
14
15
+ + + + –
Stop
nominal
speed
Start
Stop
standby standby
StartStop
nominal
speed
Start
StartStop
Ex. pin 14
Ex. pin 13
Ex. pin 14
O V
+15 V
nominal
speed
standby standby
nominal
speed
Ex. pin 13
Commissioning
Alcatel Vacuum Technology France - ACT 250 addendum
12
January 2001
ACT 250 remote connector characteristics
Signalling on output
contacts
These are dry contacts (48 V AC - 1 A) which replicate pump status information.
When the output contact is closed:
1 - 6 The pump has reached the selected speed 2 - 7 The pump is accelerating 3 - 8 No fault signal 4 - 9 Not used
6
1
7
2
8
3
9
4
Commissioning
Alcatel Vacuum Technology France - ACT 250 addendum
13
January 2001

ACT 250 remote connector wiring

Use in local mode

Standard connector plug (factory wired)
Use in remote control
mode
Without galvanic isolation (not recommended)
Wiring seen from solder side.
With galvanic isolation (recommended)
Wiring seen from solder side.
compulsory screen
customer
device
ACT unit ground
device ground
compulsory screen
customer
device
15 V –> 24 V
ACT unit ground
device ground
Wiring seen from solder side
Ext. safetySelect. ModeStandby ModeStart/StopCommon for
inputs
Ext. safetySelect. ModeStandby ModeStart/Stop
The voltage used to power the contacts is supplied by the ACT 250 (terminal 5). The disadvantage of this method is the risk of exposing this voltage to external interference (see also diagrams on page 11 ).
6
11
1
12
10
15
5
6
11
1
12
13
14
10
15
5
1
5
6
11
12
13
14
10
15
Commissioning
Alcatel Vacuum Technology France - ACT 250 addendum
14
January 2001

RS 232 / 485 serial link

Wiring the RS 232 or
RS 485 serial link
See sheet B 110 in the ATP Series Pump User Manual.
Conguring the RS 232
or RS 485 serial link
The link is congured using switches on the rear panel of the controller.
Switch description 0 1
1 parity type odd even 2 parity no yes 3 baud rate 9600 4800 4 RS type RS 485 RS 232
Factory conguration: 9600 baud, NO parity, RS 232
Use
See the detailed list of commands on page 15
01
Commissioning
Alcatel Vacuum Technology France - ACT 250 addendum
15
January 2001

Detailed description of RS commands

Syntax conventions
applicable to all
commands
Status values
Error messages
ADR
Syntax
Result
adr = address, from 000 to 255 <CR> Carriage Return (ascii 13) <LF> Line Feed (ascii 10); shown in brackets as it is not
compulsory.
ok : command executed correctly
Err0 : adjustment error (out of bounds) Err1 : command error (syntax) Err2 : parameter error (e.g. non-hexadecimal character) Err3 : context error Err4 : checksum error
Species the address of the device for networking
#adrADRaaa<CR>[<LF>]
adr = address of device before this command aaa = new address of device condition : 000 aaa ≤ 255
#aaa,ok or Err2
This command is used to allocate a specic number to each device on the network (loop for RS232 or parallel for RS485).
Note: it is important to note the number allocated to
each device.
Commissioning
Alcatel Vacuum Technology France - ACT 250 addendum
16
January 2001
Detailed description of RS commands
CKS
Syntax
Result
CYC
Syntax
Result
Enables or disables checksums on reply strings
#adrCKSON<CR>[<LF>]
Enables the ASCII checksum character at the end of a reply string
or #adrCKSOFF<CR>[<LF>]
Disables the ASCII checksum character at the end of a reply string
#adr,ok,S for CKSON #adr,ok for CKSOFF
This feature enables the user to test whether a transmission error has occurred for the reply string. S is a character whose ASCII value is the 7-bit checksum of all ASCII character values from the start of the reply string to the character preceding the S. The 8th bit of S (most signicant bit) is always 1.
Starts the specied running-in cycle
#adrCYC1<CR>[<LF>] to start running-in program 1, or #adrCYC2<CR>[<LF>] to start running-in program 2
#adr,ok
Running-in program 1 should be executed after a pump maintenance operation (change of bearings). At the end of the program, the pump maintenance parameters are updated and the maintenance requested alert can be cleared. Program 2 is used after regreasing (ATP series only), or after prolonged storage (ATH 20/40 only).
Commissioning
Alcatel Vacuum Technology France - ACT 250 addendum
17
January 2001
Detailed description of RS commands
DLI
Syntax
Result
See also: DLR
DLR
Syntax
Result
See also: DLI, LNG, SEP, SHT
Enables DataLogger operation (RS232 only)
#adrDLR<CR>[<LF>]
#adr,sssss,nnnnn,iiii,ttttt,uuuu.o,www,ppp,vvv
Returns current values :
sssss : current speed (rpm) nnnnn : speed set point (rpm) iiii : current value (mA) ttttt :
pump operating time (hours)
uuuu.o:
(reserved)
www : pwm
(reserved)
ppp : pump temperature (°C) vvv : variator temperature (°C)
The main characteristics of the pump and its controller are sent over the RS link, at the rate dened by the DLI command.
Note: any new characters arriving on the serial port (RS 232) will cancel the automatic DataLogger transmission.
Denes the DataLogger transmission interval
#adrDLIxxx<CR>[<LF>]
xxx: DataLogger transmission interval in seconds condition: 001 ≤ xxx ≤ 255
#adr,ok or Err2
Note: if ok, the interval sent is stored in user memory.
Commissioning
Alcatel Vacuum Technology France - ACT 250 addendum
18
January 2001
Detailed description of RS commands
HDR
Syntax
Result
IDN
Syntax
Result
Identies the device which is communicating, and its software version
#adrIDN<CR>[<LF>]
#adr, VS.... - Vx.zz
or
#adr, VS.... - Vx.zz for Alcatel pump type
Returns the type of Variator Supervisor, the software version (x), the software edition (zz), and the type of pump for which this variator is set up.
Denes the start character for a command reply string
#adrHDRnnn<CR>[<LF>]
nnn: 3-digit decimal value of the ascii code of the corresponding character (with leading zeros). condition : 020 nnn 255
?adr,ok ? is the desired character. #adr,ErrX if error
Allows the user to distinguish between the rst character in a command string (for which # cannot be changed) and the rst character of a reply string. Affects the rst character of all replies. Default value: the hash sign, # (ascii code = 035) If ok, the selected value is automatically stored in user memory.
ECH
Syntax
Result
Enables or disables command echoing
#adrECHON<CR>[<LF>]
enables all characters received to be echoed over the serial port
or #adrECHOFF<CR>[<LF>]
disables characters received from being echoed over the serial port.
#adr,ok
Comments:
- This command is disabled in RS 485 operation, the value OFF is required.
- Using a loop-type RS 232 network requires ECHON”.
Commissioning
Alcatel Vacuum Technology France - ACT 250 addendum
19
January 2001
Detailed description of RS commands
LEV
Syntax
Result
LNG
Syntax
Result
See also: SHT
Returns the state of the parameters dened by SET
#adrLEV<CR>[<LF>]
#adr,nnnnn,sssss,aaaa,hhhhh or #adr,nnnnn rpm,sssss rpm,aaaa mA,hhhhh hours
Returns the current values:
nnnnn : speed set point sssss : stand-by speed aaaa : max. current set point hhhhh : alert level for pump bearing maintenance
Returns the strings sent with the identication sub-strings
#adrLNG<CR>[<LF>]
#adr,ok AVT>
Allows the parameters returned by the DLR, LEV and SPD commands to be identied with sub-strings. DLR, LEV, SPD. Also generates the AVT> prompt each time a <CR> character is received.
NSP
Syntax
Result
See also: RPM, SBY
Switches the speed set point to the nominal speed value
#adrNSP<CR>[<LF>]
#adr,ok
The speed set point for the pump is set to its nominal value. This conguration is automatically saved in user memory. This mode of operation prevents the use of the RPM command.
Commissioning
Alcatel Vacuum Technology France - ACT 250 addendum
20
January 2001
Detailed description of RS commands
OPT
Syntax
Result
See also: SEL
Used to select possible user choices
#adrOPT2 n<CR>[<LF>]
choice of temperature unit:
n = 0 : degrees Centigrade n = 1 : degrees Fahrenheit
#adr,ok
Comment: The choice of the temperature unit affects the results of the DLR and STA strings.
RPM
Syntax
Result
See also: NSP, SBY
Denes the speed set point in stand-by mode
#adrRPM nnnnn<CR>[<LF>] or #adrRPMnnnnn<CR>[<LF>]
#adr,ok or #adr,ErrX
X = 1, out of range; 2, parameters ; 3, context (not in Stand-by mode)
Comment: if ok, the new speed is automatically stored in user memory.
Saves the internal parameters in user memory
#adrSAV<CR>[<LF>]
#adr,ok
Saves the current context (except for running-in cycles). If this command is sent when the pump is powered up, it can for example allow automatic re-start in the event of a power cut.
SAV
Syntax
Result
Commissioning
Alcatel Vacuum Technology France - ACT 250 addendum
21
January 2001
Detailed description of RS commands
SBY
Syntax
Result
See also: NSP, RPM
Switches the speed set point to the stand-by value
#adrSBY<CR>[<LF>]
#adr,ok
Resets the stand-by speed to its last stored value, and allows it to be modied if an RPM command is sent. This conguration is automatically stored in user memory.
SEL
Syntax
Result
Returns the state of the parameters dened by OPT
#adrSEL<CR>[<LF>]
#adr,a,u
a: Reserved u: Returns the choice of temperature unit::
u = 0: degrees Centigrade u = 1: degrees Fahrenheit
Denes the character which separates the parameters in a reply
#adrSEPnnn<CR>[<LF>]
3-digit decimal value of the ASCII code of the desired char­acter (with leading zeros if necessary). condition: 000 ≤ nnn ≤ 255
#adr,ok or #adr,ErrX if error
Allows the user to select the character which separates the parameters returned by the DLR, STA and LEV commands. Default value: comma “,” ASCII code = 044 If ok, the selected value is automatically stored in user memory.
SEP
Syntax
Result
Commissioning
Alcatel Vacuum Technology France - ACT 250 addendum
22
January 2001
Detailed description of RS commands
SET
Syntax
Result
See also: LEV
SHT
Syntax
Result
See also: LNG
SPD
Syntax
Result
See also: LNG, SHT
Denes the internal operating parameters
#adrSET1 hhhhh<CR>[<LF>] : maintenance time limit
000<hhhhh<65535
#adr,ok or #adr,ErrX
Return the DataLogger string without the identication sub-string
#adrSHT<CR>[<LF>]
#adr,ok
The strings sent following DLR, LEV and SPD commands are sent without parameter identication sub-strings (e.g. without units).
Returns the current speed
#adrSPD<CR>[<LF>]
#adr,nnnnn #adr,nnnnn rpm
Commissioning
Alcatel Vacuum Technology France - ACT 250 addendum
23
January 2001
Detailed description of RS commands
STA
Syntax
Result
TMP
Syntax
Result
Returns the status of the internal dynamic parameters
#adrSTA<CR>[<LF>]
#adr,xxxxxx,yyyyyy,zzzzzz,sssss,iiii,www,ppp,vvv,ttttt<CR><LF>
adr: address
543210
xxxxxx status bits: yyyyyy fault bits: 5 - RS echo (1->off) 5 - variator temperature 4 - String long (0) / short (1) 4 - motor temperature 3 - On (1) / Off (0) 3 - excess current 2 - reduced or nominal 2 - sensors or start-up speed reached(1) 1 - external 1 - standby (1) 0 - pump not connected 0 - running-in (1)
zzzzzz alert bits: sssss current speed value in rpm 5 - reserved (future use) iiii current value in mA 4 - reserved (future use) www reserved (pwm value) 3 - variator temperature ppp pump temperature value 2 - motor temperature vvv variator temperature 1 - start-up time exceeded (future) ttttt pump operating time value 0 - operating time exceeded
Reminder: The # character at the start of the reply string can be set with the HDR command. The “,” character which separates the parameters in the reply string can be modied with the SEP command.
Denes the turbomolecular pump operating state
#adrTMPON<CR>[<LF>] : start pump rotation #adrTMPOFF<CR>[<LF>]: stop pump
#adr,ok or #adr,Err3 if the pump is already in the state
requested (context error)
Use
Alcatel Vacuum Technology France - ACT 250 addendum
24
January 2001

Controlling the pump from the ACT 250 controller

Once all connections are complete, plug the controller into the mains.
A C T 2 5 0A C T 2 5 0
POWER FAULT SPEED
START STOP

Indicator lights

box version
OEM version
Yellow lit
Controller on
Red lit
Controller fault
Red ashing
Controller alert
Yellow lit
pump rotation speed
accelerating
Green ashing
The pump rotation speed is greater than the selected speed (speed reduction during operation)
Green lit
The pump has attained the selected speed.
Use
Alcatel Vacuum Technology France - ACT 250 addendum
25
January 2001
Controlling the pump from the ACT 250 controller
START
STOP
Starting the pump with
the START switch
Stopping the pump with
the STOP switch
The pump is started up to reach the selected speed. The yellow rising speed indicator light comes on. When the pump reaches its selected speed, the yellow indicator light goes off and the green indicator light comes on.
The rotation speed monitoring indicator lights go off. The pump motor is no longer powered, the pump decelerates.
Use
Alcatel Vacuum Technology France - ACT 250 addendum
26
January 2001

Controller functions

Precautions

Local mode operation

The Start and Stop functions use switches located on the front panel of the box version and on the board for the OEM version.
The OEM version of the ACT 250 has been
designed with electrical safety and
electromagnetic compatibility standards in mind. It is the user’s responsibility to provide external shielding to comply with EMC and electrical safety standards.
POWER FAULT SPEED
START STOP
The pumps operating status is shown by the state of thePOWER indicator (yellow) and the three FAULT” (red) and SPEED (yellow and green) indicators.
Indication of rotation
during operation
(controller on)
Pump
motor on
Pump
rotation
speed
State of indicators
Power
Yellow
Fault
Red
Speed
Yellow Green
Press button
START STOP
1 Before start-up
2 During start-up
3 Pump at nominal speed
5 Overload
7 Pumping stopped
0
1
0
0
0
0
0
0
0
1
NO
YES
YES
YES
NO
0
< selected
speed
= selected
speed
< selected
speed
0
6 Speed set point lowered
0 0 YES
> selected
speed
indicator off indicator on indicator ashing
4 Alert
Fault
Alert or fault
triggered
(see page 27 )
0 0
YES
NO
selected
speed
0
Use
Alcatel Vacuum Technology France - ACT 250 addendum
27
January 2001
Controller functions

Fault monitoring

Alerts are indicated by:
- ashing red indicator. The pump power supply is maintained.
Faults are indicated by:
- lit red indicator. The pump is stopped as soon as a fault is detected.
Alerts and faults shown by the indicator light include:
- controller overheating,
- pump motor overheating,
- cable disconnected (pump / controller)
- external safety device open,
- overcurrent on speed variator.
Alerts and faults can be identied using the serial link (see
page 23, STA command).
France
Alcatel Vacuum Technology - France 98, avenue de Brogny - BP 2069 74009 ANNECY - Cedex Tel : (33) 4 50 65 77 77 Fax : (33) 4 50 65 77 89
Germany
Alcatel Hochvakuum Technik GmbH Am Kreuzeck 10 D – 97877 WERTHEIM Tel: (49) 9342 96100 Fax: (49) 9342 961030
Italy
Alcatel Vacuum Systems S.p.A Via Trento, 30 20059 VIMERCATE (MI) Tel : (39) 039 686 3855 Fax : (39) 039 667 125
Japan
Alcatel Japan LTD 13 fl. Dai Tokyo - Kasai Shinjuku bldg 3 - 25 - 3 - Yoyogi, Shibuya - ku TOKYO 1510053 - JAPAN Tel : (81) 3 5302 4350 Fax : (81) 3 5302 4332
Korea
Alcatel Vacuum Technology Korea 5thFloor, Sunghyun B/D 10-5, Karak-Dong, Songpa-Ku Seoul - SOUTH KOREA Tel : (82) 2 409 6277 Fax : (82) 2 409 6279
United Kingdom
Alcatel Vacuum Technology UK Ltd 8 Bain Square Kirkton Campus Livingstone - WEST LOTHIAN EH - 547 DQ - SCOTLAND United Kingdom Tel. (44) 1 506 418 000 Fax. (44) 1 506 418 002
USA
Alcatel Vacuum Products 67 Sharp Street HINGHAM, MA. 02043 USA Tel :1(781) 331 4200 Fax :1(781) 331 4230
Alcatel Vacuum Technology - France - 98, avenue de Brogny - BP 2069 - 74009 ANNECY Cedex France
Tel. (33) 4 50 65 77 77 - Fax (33) 4 50 65 77 89 - Telex 385 153 F
Web site: www.alcatel.com
Publication: Alcatel - Realization: AXESS (33) 4 75 42 35 90 - Edition 01 - January 2001
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