Agilent Technologies 5DX Service Manual

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Agilent 5DX Service Guide

Manual Version A Revision Number June 26, 2000 11:25 am
5DX
6HULHV

Emergency Shut Down Procedure

In the event of a disaster or system emergency, shut down the 5DX by pressing one of the Emergency Stop Buttons, as shown in the figure below.
Emergency Stop Button (Locking Switch)
Emergency Stop Release Keys
X-ray On Indicator
5DX Series 3
5DX
6HULHV
WARNING
Emergency Stop Button locks when pressed
120 Volt AC Power Connections are for Agilent Installed Accessories ONLY. Do not use these connections as utility outlets. Improper handling of these connections can result in electrical shock.
For additional information on Safety and the 5DX System, see the Chapter 2,
Safety Summary.

Warranty and Regulatory Data

Notices

© Copyright Agilent Technologies, Inc. 2000.
All Rights Re s erved.
Printed in U S A
N7200-90041 Printed: May 2000
NOTICE
This manual is provided “as is” and is subject to change with out notice.
AGILENT TECHNOLOGIES MAKES NO WARRANTY OF ANY KIND WITH REGARD TO THIS MATERIAL, INCLUDING, BUT NOT
LIMITED TO, THE IMPLIED WARRANTIES OF NONINFRINGEMENT, MERCHANTABILITY AND FITNESS FOR A PARTICULAR
PURPOSE. Agilent Technologies shall not be liable for errors cont ai ned herein, nor for direct, indire ct , gen era l, special, incidental or consequen-
tial damages in connection with the furnishing, performance, or use of thi s ma te ri al .
Adobe™ is a trademark of Adobe Systems Incorporated which may be registered in certain jurisdictions.
Microsoft
Windows
This page lists this manual’s printing history and the system’s software revisions. If you receive manual updates or system software revisions, a new
Printing History Page will acco m pany the updates and revisions. It is important that you insert the new Pri nting History Page in the manual and
®
Manual Printing History And System Software Revisions:
®
is a U.S. registered trademark of Microsoft Corp.
and MS Windows® are U.S. registered trademarks of Microsoft Corp.
remove the old one.
Software Revision Manual Revision
7.0 Rev. A.1, May 2000
Agilent 5DX Service Guide iii
Notices 5DX Series 3
WARRANTY
AGILENT TECHNOLOGIES WARRANTY STATEMENT
AGILENT PRODUCT DURATION OF WARRANTY Agilent 5DX AXI System and Accessories1 (One) Year
1. Agilent warrants Agilen t h ardwar e, acce ssorie s and supplies a gainst defec ts in ma terial s and work manship f or the p er iod specified above. If Agilent receives notice of such defects during the warrant y period, Agilent will, at its optio n, either repair or replace pro ducts whic h prove to be defective. Repl ac ement products may be either new or like-new.
2. Agilent warrants that Agil ent sof tware will not fail to exe cute its progra mm ing i nstructio ns, for the p eriod speci fied above , due to d efect s in material and wo rkmanship when properly in stalled and used. If Agil ent receives notice of such defects during the warranty period, Agilent will replace software media which does not exec ut e it s programming instructions due to suc h defects.
3. Agilent does not warrant tha t the operation of Agilent product s w il l be un in te rrupted or error free. If Agilent is un able, within a reason a b le time, to repair or repla ce any p rodu ct to a cond itio n as w arranted , cust ome r will b e entit led t o a refu nd of th e p urcha se pric e upon p rompt return of the product.
4. Agilent products may cont ain remanufactured parts equivalent to new in performanc e or ma y have been subject to incidenta l use .
5. The warranty period begins on the date of delivery or on the date of installation if installed by Agilent. If customer schedules or delays Agilent installation more th an 30 days after delivery, warranty begins on the 31st day from de li ve ry.
6. Warranty does not apply to defects resulting from (a) improper or inadequate maintenance or calibration, (b) software, interfacing, parts or supplies not supplied by Agilent, (c) unauthorized modification or misuse, (d) operation outside of the published environmental specifications for the product, or (e) improper site preparation or maintenance.
7. TO THE EXTENT ALLOWED BY LOCAL LAW, THE ABOVE WARRANTIES ARE EXCLUSIVE ANDNO OTHER WARRANTY OR CONDITION, WHETHER WRITTEN OR ORAL, IS EXPRESSED OR IMPLIED A ND AGILENT SPECIFICALLY DISCLAIMS ANY IMPLIED WARRANTIES OR CONDITIONS OF MERCHANTABILITY, SATISFACTORY QUALITY, AND FITNESS FOR A PARTICULAR PURPOSE.
8. Agilent will be l iabl e for d ama ge to tang ible prop erty per in cide nt up to the g reate r of $3 00,00 0 o r th e ac tual amo unt pa id for th e p rod uct that is the subject of th e claim, and for dama ge s for bodily injury or death, to the extent that all such damages are determ ined by a court of competent jurisdiction to ha ve been directly caused by a defective Agilent product.
9. TO THE EXTENT ALLOWED BY LOCAL LAW, THE REMEDIES IN THIS WARRANTY STATEMENT ARE CUSTOMER’S SOLE AND EXCLUSIVE REMEDIES. EXCEPT AS INDICATED ABOVE, IN NO EVENT WILL AGILENT OR ITS SUPPLIERS BE LIABLE FOR LOSS OF DATA OR FOR DIRECT, SPECIAL, INCIDENTAL, CONSEQUENTIAL (INCLUDING LOST PROFIT OR DATA), OR OTHER DAMAGE, WHETHER BASED IN CONTRACT, TORT, OR OTHERWISE.
FOR CONSUMER TRANSACTIONS IN AUSTRALIA AND NEW ZEALAND: THE WARRANTY TERMS CONTAINED IN THIS STATE-
MENT, EXCEPT TO THE EXTENT LAWFULLY PERMITTED, DO NOT EXCLUDE, RESTRICT OR MODIFY AND ARE IN ADDITION
TO THE MANDATORY STATUTORY RIGHTS APPLICABLE TO THE SALE OF THIS PRODUCT TO YOU.
iv Warranty and Regulatory Data
5DX Series 3 Notices
PLACE OF PERFORMANCE
A. Within Agilent service travel areas, warranty and installation services for products installed by Agilent and certain other products
designated by Agilent will be perfo rmed at Customers facility at no charge. Outside Ag ilent service travel areas, warr anty and installat ion services will be performed at Customers facility only up on Agilents prior agreement and Customer shall pay Agilents round-trip travel expenses and applicable add it io nal expenses for such services.
B. On-site warranty services are provided only at the initial installation point. If products eligible for on-site warranty and installation services
are removed from the initial installation point, the warranty will remain in effect only if Customer purchases additional inspection or installation services at the new site.
C. For product warranties re quiring return to Agilent, prod ucts must be returned to a service facility designated by Ag ilent. The Customer
shall prepay shipping ch arges (and shall pay al l dut y and t axes) f or pr oduct s retur ned to Agi lent for w arra nty se rvice. Exce pt for prod uct s returned to Customer from anot he r country, Agilent shall pay for return of products to Customer.
D. Install ation and wa rranty servic es outside the country of in itial purchas e are includ ed in Agilents product price only if Customer pays
Agilent international prices (defined as destination local currency price, or U.S., or Geneva Export price). Service outside the country of initial purchase is subject to the conditions regarding Agil ent service travel areas and init ial in sta ll ation point described above.
LIMITATION OF REMEDIES AND LIABILITY
A. Agilent will not be liabl e for performance delays or for non-performance, due to cause s beyond its reasonable control. B. Pro ducts not specifically designed, man ufactured or intended for sale as part s, components or assemblies for plann ing, construction,
maintenance, or direct operat ion of a nuc lear f acility. Customer is solely liable if Produ cts or Suppo rt purch ased by Cu stome r are used for these applications. Cu stom e r w i ll in de mnify and hold Agilent ha rm le ss from all loss, damage, ex pense or liability in co nnection with such use.
C. Agilent will be liable for damage to tangible property per incident up to the greater of $300,000 or the actual charges paid to Agilent for the
product that is the subject of the claim, a nd for damages for bodi ly injury or death, t o the extent that al l su ch damages are de termine d by a court of competent juri sd ic ti on to have been directly caused by a defective Product sold here under.
D. For any material breach of Support services by Agilent, Customers remedy and Agilents liability will be limited to a refund of the related
Support charges paid during the perio d of breach, up to a maximum of 12 mon ths.
E. THE REMEDIES IN THIS AGREEMENT ARE CUSTOMERS SOLE AND EXCLUSIVE REMEDIES. EXCEPT AS INDICATED
ABOVE, IN NO EVENT WILL AGILENT OR ITS SUBCONTRACTORS BE LIABLE FOR LOSS OF DATA OR FOR DIRECT, SPECIAL, INCIDENTAL, CONSEQUENTIAL (INCLUDING LOST PROFIT), OR OTHER DAMAGE WHETHER BASED IN CONTRACT, TORT, OR OTHERWISE.
U.S. Government Restricted Rights
The Software and Documentation have bee n developed entirely at pr iva te expense. They are d el iv ered and licensed as commercial computer software as defined in DFARS 252.227-7013 (Oct 1988), DFARS 252.211- 7015 (May 1991) or DFARS 252.22 7-7014 (Jun 1995), as a commercial item as defined in F A R 2. 101(a), or as Restricted comput er soft wa re” as defined in FAR 52.227-19 (Jun 1987) (or any equivalent agency regulation or contract clause), whichever is applicable. You hav e onl y those rights provided for such Software and Docum entation by the applicable FAR or DFARS claus e o r th e Agilent standard software agreement for the product involved .
Agilent 5DX Service Guid e v
Notices 5DX Series 3
Regulatory Information
Agilent Technologies i s registered with federal and state agencies to sell and service its own X-ray equipment manufactured in Loveland, Colorado, USA. The equipment was designed, and is used, to inspect printed circuit boards only. The X-ray equipment is classified in the United States and internationally as an Industrial Cabinet X-ray System. It is not large enough for human entry. The equipme nt has be en de sig ned and constructed to be safely us ed in any area.
The Agilent 5DX System utilizes an X-ray Tube opera ting at 160 kilovolts, 100 microa mps shielded within the lead cabinet. The tube is rated for continuous duty operation with beam filtration of 0.07 inches Beryllium and 0.010 inches stainless steel.
The lead cabinet is fully int erlocked such that the main pow er to the X-ray Tube is removed when any access panel is opened. When the 5DX System is installed at the customers site, the equipment is surveyed by trained service people. A full radia ti on safety survey is
performed and a report gener a ted. The survey is made using a Geiger Mu eller and a health ph ysics ion chamber according to procedures on record with the CDRH.
The end user is responsible for regi ster i ng th e equipment with their local and state authorities. Agilent Technologies warrants that the 5DX automated process test systems meets X-ray safety reg ulations in the following countries:
Canada Reference Statutes of Canada Chapter R-1, Chapter 1370, Schedule 1, Section 15, Schedule II and Part XV. England Reference BS5724, (ISO 9000 601-1). Germany Reference BGBII, S.114 & Din 54113 and the Law on the Protection Against Injury or Damage Due to X-Rays a.k.a. X-Ray
Decree”.
Japan Reference Ministry of Labor, Industrial Safety and Health, Law #57 a nd Ca binet ordinance #38. Korea Reference Presidential Decree, Article 65, Chapter VII, of the Atomic Energy Act.
The Nordic Regions of Denmark, Finland, Iceland, Norway and Sweden,
Reference the Radiat io n Protection Institutes and the Radiation Protection Act.
United States
Regulation 21CFR 1010.2 , 10 10. 3, and 1020.40 administered by th e D e partment of Health and Human Servi c es, Food and Drug Administration, Center for D evices and Radiological Health (CDRH).
vi Warranty and Regulatory Data
5DX Series 3 Safety Information

Safety Information

WARNING
WARNING
!
This product produces X-rays. Do not attempt to open any part of the product. Exposure to X-rays can cause serious bodily injury. Refer all servicing to service-trained personnel.
This product produces X-rays. Do not oper ate t his produc t or turn on the X-r ays source unless all shielding is in place. Operation without shielding in place can result in seriou s bod ily in ju ry.
SAFETY SYMBOLS
Instruction symbol affixed to product. Indicates that the user must refer to the manual for spe ci fi c WARNING or CAUTION information to avoid personal injury or damage to the product.
Calls attention to pinch hazards. Keep hands away to avoid injur y.
Indicates hazardous voltage.
Indicates thi s equipment produces laser radiation when energized.
WARNING
Indicates this equipment pro duc e s X­rays when energized.
Calls attention to a procedure, practice, or condition that coul d result in bodily injury or death.
Frame or chassis ground terminal typically connects to the equipment’s metal frame.
Indicates the field wiring termina l that must be connecte d to earth ground before operating the equipment prote c ts against electrical shock in case of fa ult .
Caution
Calls attention to a proced ure, practice, or condition that could cause damage to equipment or permanent loss of data.
Alternating current (ac).
Direct current (dc).
Agilent 5DX Service Guide vii
Safety Informa tion 5 D X S e ries 3
WARNINGS
The following general safe ty precautions must be observ ed during all phases of operati on, service, and repair of this prod uct. Failure to comply with these precautions or with specific warnings elsewhere in this manual violates safety standards of design, manufacture, and intended use of the product. Agilent Technologi es, Inc. assumes no liability for the Customer s failure to comply with these requirements.
Ground the Equipment For Safety Class 1 equipment (equipment having a protective earth terminal), an uninterruptible safety earth ground must be provided from the mains pow er source to the product input wiring terminals or supplied pow er cab le .
DO NOT operate the product in an explosive atmosphere or in the presence of flammable gases or fumes. For continued protection aga in s t fir e, replace the line fuses(s) only with the fuse(s) of the same voltage and current rating and type. DO NOT use
repaired fuses or short-circuited fuse holders. Keep away from live circuits: Operating personnel must not remove equipment covers or shields. Procedures involving the removal of covers or
shields are for use by service-train ed personnel only. Under certain conditions, dangerous voltages ma y exi s t even with the equipment switched off. To avoid dangerous electrical shock, DO NOT perform procedures involv ing cov er or shield removal unless you are qu alified to do so.
DO NOT operate damaged equipment: Whenever it is possible that the safety protection features built into this product have been impaired, either through physical damage, excessive moisture, or by any other reason, REMOVE POWER and do not use the product until safe operation can be verified by service-trained personnel. If necessary, return the product to a Agilent Technologies Sales and Service Office for service and repair to ensure that safety features are maintained.
Do not service or adjust alone: Do not attempt internal service or adjust m en t unl ess a nother person, capable of ren de ring first aid and resuscitation, is present.
Do not substitute parts or modify equipment: Because of the danger of introducing additional hazards, do not install substitute parts or perform any unauthorized mod ifi ca tion to the product. Return th e product to a Agilent Tech nologies Sales and Service Offi ce for se rvice and repair to ensure that safe ty fea tures are maintained.
viii Warranty and Regulatory Data
5DX Series 3 Safety Information
DECLARATION OF CONFORMITY
according to ISO/IEC Guide 22 and EN 45014
Manufacturer’s Name: Agilent Technolo gies, Inc.
Manufacturin g Te st Division
Manufacturer’s Address: 815 14th Street S .W.
Loveland, Colorado 80537
declares, that the products: Agilent Model 5DX Systems
and to which this declaration relates, are in conformity with the protection requirements of: The EMC Directive 89/336/EEC (inclusive 93/68/EEC) and carries the “CE” marking accordingly. Attestation is provided according to article 10 (2) of the Directive by a Technical Construction File.
Technical File Number: 95-0900-003-TCF Rev: A Dated: 31 March, 1995
The following standards are referenced in the file:
EMC: CISPR 11:1990/EN55011 (1991)
IEC 801-2:1991/EN50082-1 (1992) IEC 801-3:1984/EN50082-1 (1992) IEC 801-4:1988/EN50082-1 (1992)
A Technical Report/Certificate has been issued in accordance with P art V (Reg 50) of the UK Regulations (SI 1992 No. 2372) by a UK appointed Competent Body, namely,
Interference Technology International Limited 41-42 Shrivenham Hundred Business Park Shrivenham, Swindon, Wilts. SN6 8TZ England, UK
Certificate Number: C134FPI1.JES Dated: 1 April, 1996
Supplementary Information:
This product also herewith complie s with th e require m ents of th e Low Voltage Directive 73/23/EEC (inclusive 93/68/EEC).
Safety: IEC 1010-1 (1990) I ncl. Amend 1 (1992)/EN6 1010-1 (1993)
CSA C22.2 #1010.1 (1992) UL 3111
April 1, 1996 Loveland Quality Manager
European Contact: Your local Agilent Technolo gi es Sal es a nd Se rvice Office or Agilent Techno logies GmbH,
Department HQ-TRE, Herrenberger Straße 130, D-71034 Böbli ngen (FAX: +49-7031-143 143).
Agilent 5DX Service Guid e ix
Electromagnetic Compatibility Requirements 5DX Series 3

Electromagnetic Compatibility Requirements

This product complies with EN 55011 (CISPR 11) Group 1, Class A for conduc ti ng emissions. The product excee ds the EN 55011 (CISPR 11) Group 1, Class A limit for radiated emissi ons by less than 10 dB when measured on a test site at a distance of 30 meters. Therefore, some site preparations may have to be don e in order to comply with the Class A lim it in th e frequency range of 30 MHz to 1 GHz for ra diated emissions at 30 meters from the exterior wall of a buil di ng i n w hi ch t he equi pm ent is installed. See the figure bel ow for an illustration of the site calculations.
To obtain the necessary at te nua ti on at the Customers site, perfor m t he se ca lc ul at ions (if the calculated site attenuation (A) is less than 10 dB, contact the Technical Regulatory Support Engine er (T RSE) in your country):
1. The attenuation of a concrete wall (W) (without any openings) = 10 dB
2. The distance (D) (the distance from the equipment to the exterior wall plus 30 meters) increases the attenuation by X and can be calculated as follows:
X = 20 * log (D/30) Where: X = attenuation in dB
D = distance in meters
3. The total attenuation (A) is calculated as follows:
A = n * W + X Where: A = total attenuation in dB
n = number of concrete wa ll s w ith in dist ance D W = 10 (dB)
Building in which the Equipment is installed
W
Measuring Po i nt
30 m
D
Equipme nt
QBEMC.WPG
Figure 1: Electromagnetic Emission Measurement
x Warranty and Regulatory Data
5DX Series 3 Emergency Stop

Emergency Stop

The Emergency Stop Subsystem is used to quickly shutdown the power to the Agilent 5DX Main Cabinet. The Emergency Stop Subsystem is intended for crisis situations only and should not be used as the normal means to stop the Agilent 5DX.
Caution
The Emergency Stop Buttons are intended for use in emergency situations
and should not be used for normal system shutdown. Repeated misuse of
only
the Emergency Stop Buttons will eventually cause damage to certain components or the loss of dat a or both.
The 5DX System is equipped with two Emergency Stop Buttons. Refer to Figure 2 for their locations.
Push down the Emergency Stop Button, or switch the AC “Mains” to the “0” or off posit ion in an emergency situation.
The Emergency Stop Butt on locks OFF when pushed.
View from the front of the 5DX System.
5DX
6HULHV
Figure 2: Emergency Stop Locations
The Emergency Stop Buttons are located on either side of the 5DX System Main Cabinet just above the input or output barriers. When either Emergency Stop Button is pressed it will immediately interrupt the switched system power. The Emergency Stop Button will lock in the power off position and remain in the locked position until released with the Emergency Stop release key. See the
Agilent 5DX Power Subsystem chapter of the Agilent 5DX Series 3 Service Guide for a step-by-step procedure for restoring system power after an Emergency
Stop procedure has been performed.
Agilent 5DX Service Guid e xi
Emergency Stop 5DX Series 3
xii Warranty and Regulatory Data

Table of Contents

Warranty and Regulatory Data
Notices . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .iii
Safety Information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . vii
Electromagnetic Compatibility Requirements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . x
Emergency Stop . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .xi
1. Introduction and Overview
Whats in the Agilent 5DX Service Guide?. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2
Whats New With the Series 3? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3
What is the 5DX Automated X-ray Inspection System? . . . . . . . . . . . . . . . . . . . . . .1-4
How It Works. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-4
The 5DX System Process . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6
5DX Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-7
Electronics Bay . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-8
Subsystems of the Agilent 5DX System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-10
Safety Interlock Subsystem. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-11
X-ray High Voltage Power Supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-11
Panel Handling Subsystem . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-12
Surface Map Subsystem . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-12
Imaging Subsystem. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-12
Pneumatics Subsystem . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-12
System Controller and Expansion Chassis . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-12
User Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-13
Agilent 5DX Service Gui d e xiii
2. Safety Summary
Safety Summary. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-2
Warnings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-3
Emergency Stop . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-4
Emergency Procedures. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-6
X-ray Safety. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-8
Effects of Radiation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-8
X-ray Dose Limits. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-8
Definition of a Cabinet X-ray System. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-9
Built-In Safety Features. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-9
Registration Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-9
X-ray Safety. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-10
X-ray Safety Precautions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-10
Safety Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-11
High Voltage Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-11
High Voltage Subsystem . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-11
Power Distribution Unit (PDU). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-12
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-12
Mechanical Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-12
Laser Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-14
Additional Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-14
Agilent 5DX System Training. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-15
5DX Series 3
3. Safety Interlock Subsystem
Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-2
Safety Interlock Controller. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-3
Normal Operation LEDs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-4
Diagnostic LEDs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-4
Watchdog Timer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-6
Safety Interlocks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-6
Safety Interlock Locations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-7
Safety Interlock Switches. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-8
Safety Interlock Chains . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-10
Operator Control Console . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-14
Adjusting the Safety Interlocks on the Inner Barrier. . . . . . . . . . . . . . . . . . . . .3-15
Adjusting the Outer Barriers Primary Safety Interlock . . . . . . . . . . . . . . . . . .3-18
Adjusting the Outer Barriers Secondary Safety Interlock . . . . . . . . . . . . . . . .3-23
xiv Table of Contents
5DX Series 3
4. Power Subsystem
Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-2
Power Distribution Unit. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-4
Input Specifications. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-5
Switched Output Terminals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-5
Unswitched Output Terminals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-6
Controls and Indicators . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-6
High/Low Line Monitoring/Protection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-7
Emergency Shutdown . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-7
PDU Circuit Breakers and Fuses . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-8
Wiring Diagrams . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-9
Low Voltage Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-15
Focus Coil Power Supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-15
VacIon Pump Power Supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-17
Camera Power Supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-17
X-ray High Voltage Power Supply. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-18
Emergency Stop Buttons and X-Ray Indicators . . . . . . . . . . . . . . . . . . . . . . . . . . .4-20
Long Term Shutdown For the Agilent 5DX System . . . . . . . . . . . . . . . . . . . . . . . .4-22
Startup Procedure For the Agilent 5DX System . . . . . . . . . . . . . . . . . . . . . . . . . . .4-24
Recover From an Emergency Stop . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-28
System Status Beacon . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-30
5. Panel Handling Subsystem
Panel Handling Subsystem Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-2
Agilent 5DX Panel Handling Configurations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-4
Panel Handling Modes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-4
Configuring a System for Right to Left Flow Through. . . . . . . . . . . . . . . . . . . .5-6
Dual Panel Test Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-6
SMEMA Interface Standards. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-6
Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-6
Communication Signals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-8
SMEAMA Connections through the Digital I/O Assembly . . . . . . . . . . . . . . .5-11
Panel Handling Subsystem Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-13
X-ray Cabinet and Barriers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-14
Outer Cabinet and Outer Barriers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-14
Inner Cabinet and Inner Barrier. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-15
XYZ Stage Assembly. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-16
X-Axis and Y-Axis Servomotors. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-17
Z-Axis Stepper Motors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-19
Agilent 5DX Service Guid e xv
5DX Series 3
XYZ Stage Panel Conveyor Assemblies. . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-20
XYZ Stage Panel Conveyor Belts. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-22
Motion Control Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-28
Motion Control Diagnostic Access Module . . . . . . . . . . . . . . . . . . . . . . . . . . .5-29
Servo Modules. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-32
Backplane . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-33
Automatic Wi dth Adj ust ( AWA) an d Z- Axis Stepper Drivers . . . . . . . . . . . . .5-33
Motion Enable Control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-34
Motor Relay Control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-35
Motion Controller PCI Cards. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-38
Motion Controller PCI 1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-38
Motion Controller PCI 2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-41
Digital I/O Assembly. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-42
Panel Handling Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-51
6. Pneumatic Subsystem
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6 -2
Pneumatic Subsystem Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-3
Pneumatic Gauge, Regulator, and Filter Assembly. . . . . . . . . . . . . . . . . . . . . . .6-4
Main Safety Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-6
Internal Manifold. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-7
Inner Barrier . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-8
Barrier Operation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-11
Adjusting the Air Cylinder . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-14
Other Inner Barrier Components. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-15
Adjustment/Replacement of the Inner Barrier Encoder . . . . . . . . . . . . . . . . . .6-16
Setting the Positions for the Encoder . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-20
xvi Table of Contents
5DX Series 3
7. Surface Map Subsyste m
Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-2
XYZ Panel Orientation (Loaded). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-2
Panel Alignment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-3
Alignment Accuracy . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-3
Surface Map. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-5
OFFSET (X&Y) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-5
Laser Adjustment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-5
Surface Map Subsystem Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-6
Surface Map Laser. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-6
Laser Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-8
Laser View Camera . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-9
Panel View Camera. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-10
8. Imaging Subsystem
Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-2
Image Generation Process . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-3
Image Acquisition Process. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-6
Image Acquisition Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-6
Image Analysis. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-8
Imaging Subsystem Components. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-9
Image Generation Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-9
Image Acquisition Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-9
Image Analysis Components. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-9
System Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-9
X-ray Scan Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-10
Rotary Scintillator Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-20
Interface Card . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-24
Frame Grabbers. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-25
X-ray Image Camera. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-25
9. System Controller
Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9-2
System Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9-2
Expansion Chassis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9-3
Agilent 5DX Service Guide xvii
10. Maintenance
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-2
Preventative Maintenance (PM) Checklist . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10-4
General Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10-7
Electronics Bay Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10-15
Main Cabinet Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10-22
Software Diagnostics. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10-42
5DX Series 3
Maintenance Activity Conventions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10-3
Check the Operation of the System Status Beacon . . . . . . . . . . . . . . . . . . . . . .10-7
Check X-ray High Voltage Power Supply Status . . . . . . . . . . . . . . . . . . . . . . .10-9
Check X-ray Tube Dielectric Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10-11
Check the Panel View Camera Light. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10-13
Check the Focus Coil Power Supply Setting. . . . . . . . . . . . . . . . . . . . . . . . . .10-15
Clean All Filters and Fans. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10-18
Check the Vac-Ion Power Supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10-22
Check the System Air Pressure/Low Pressure Regulator . . . . . . . . . . . . . . . .10-26
Inspect the Laser Camera Lights. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10-27
Inspect Main Cabinet Cables. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10-29
Inspect the XYZ Stage Conveyor Belts. . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10-30
Inspect Left and Right PIP Sensor Flags. . . . . . . . . . . . . . . . . . . . . . . . . . . . .10-31
Lubricate the XYZ Stage Lead Screws and Rails . . . . . . . . . . . . . . . . . . . . . .10-33
Clean and Inspect the Rotary Scintillator Shield. . . . . . . . . . . . . . . . . . . . . . .10-36
Check the Auto Width Adjust . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10-37
Clean and Inspect the Main Cabinet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10-39
Lubricate XYZ Stage Rail Cars. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10-40
Replace the XYZ Stage Conveyor Belts. . . . . . . . . . . . . . . . . . . . . . . . . . . . .10-41
Replace the Conveyor Belt Motor Control Relays . . . . . . . . . . . . . . . . . . . . .10-41
Check the Inner Barrier Encoders . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10-42
Run Position Repeatability Test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10-43
Run Resolution Test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10-44
Run X-ray Safety Test. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10-45
Run the Confirmation and Adjustment Procedures. . . . . . . . . . . . . . . . . . . . .10-45
Backup the Hard Drive . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10-45
xviii Table of Contents

1.Introduction and Overview

In this chapter...
This chapter describes the following topics:
n Whats in the Agilent 5DX Service Guide?, 1-2 n Whats New With the Series 3?, 1-3 n What is the 5DX Automated X-ray Inspection System?, 1-4 n 5DX Overview, 1-7
Figure 1-1: 5DX Series 3 Syste m
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Agilent 5DX Service Guid e 1-1
Whats in the Agilent 5DX Service Guide? 5DX Series 3

What’s in the Agilent 5DX Service Guide?

The Agilent 5DX Series 3 Service Guide provides information about servicing the Agilent 5DX System. This chapter gives an overview of the service guide, an introduction to the Agilent 5DX Series 3 System and an overview of the 5DX components.
The warranty and regulatory pages provide information about the Agilent 5DX Systems compliance with various government regulations. The 5DX System is designed, manufactured and registered in accordance with strict criteria established by the Center for Devices and Radiological Health (CDRH), Department of Health and Human Services, X-ray Products Branch. Agilent Technologies certifies that the 5DX System meets or exceeds U.S Federal Requirements, 21 CFR 1020.40, subchapter J, for cabinet X-ray systems used in an industrial environment.
The section or chapter titled Safety Summary describes necessary precautions that should be taken by personnel that work in close proximity to the 5DX System as well as the safety features of the 5DX.
Detailed descriptions and diagrams for each subsystem are provided in the following sections of this manual, including:
Safety Interlock Subsystem
Power Subsystem
Panel Handling Subsystem
Pneumatic Subsystems
Surface Map Subsystem
Imaging Subsystem
System Controller
Imaging Diagnostics
To keep the 5DX System in optimum working condition, Agilent recommends following the Preventive Maintenance schedules and procedures given in the chapter titled Maintenance.
1-2 Introduction and Overview
5DX Series 3 Whats New With the Series 3?

Whats New With the Series 3?

The Agilent 5DX Series 3 includes the following upgrades and changes from the Series II/2L:
Panel Handling and motion control have been redesigned.
The motion control driver assembly is integrated into the Motion Control
Assembly. There is no motion control power supply
XYZ Stage initialization has been improved.
Brushless motors are now used, eliminating the need to change motor
brushes.
A mechanical middle rail option is available so two boards or panels can
be tested simultaneously for increased through put.
The Power Subsystem has changed
There are only nine power options available, reducing confusion of which
one to use.
The isolation transformer and Brute power supply have been eliminated.
The PDU now controls servo module power.
External power outlets have been eliminated to reduce confusion about
what is or is not 5DX power.
A new controller and expansion chassis are used.
The new controller provides faster handling of information.
The new expansion chassis uses primarily PCI bus components instead of
the older ISA components.
Agilent 5DX Service Guid e 1-3
What is the 5DX Automated X-ray Inspection System? 5DX Series 3

What is the 5DX Automated X-ray Inspection System?

The 5DX System uses X-ray Laminography to examine solder joints on plated through-hole, single and double-sided surface mount technologies (all common package types), solder paste and grid arrays (solder bump, Ball Grid Array, connectors), as well as, fine pitch Chip-On-Board assemblies.
The 5DX System can operate inline with the Printed Circuit Assembly manufacturing process equipment and is designed to be used on PCA’s only.
X-ray Laminography is used to separate solder joints into individual layers, the resulting detailed slice images are easily analyzed through gray level (256 gray scale) processing.
The 5DX System is capable of a testing a single or double-sided board or a panel of boards with an area of up to 455 x 455mm (17.5 x 17.5 inches).

How It Works

X-ray Laminography produces high-resolution cross-sectional slice images of solder joints of a printed circuit assembly (panel). An electron beam generated by the X-ray Tube is magnetically steered in a circular synchronous motion. The electron beam is 180° out-of-phase from a rotating capture device called the Rotary Scintillator. The Plane of Focus is produced in the area between the source and the scintillator, thereby, ima ging a sli ce ima ge on the scint illator of the Rotary Scintillator Assembly.
When a PCA is positioned within the Plane of Focus, the X-ray beam acts as a penetrating source of illumination t hat forms a negative shadow on the scinti llator. The phosphor molecules coating the scintillator become excited and radiate light. The light is then viewed by the X-ray Image Camera and information is passed to the imaging subsystem. The process of image averaging blurs out objects that occupy areas above and below the Plane of Focus, while the area within the Plane of Focus is clear. By this means various layers of the solder joints can be imaged by moving the panel up and down through the Plane of Focus.
1-4 Introduction and Overview
5DX Series 3 What is the 5DX Automated X-ray Inspection System?
Figure 1-2 illustrates the X-ray geometry for Transmissive X-ray Imaging and X-
ray Laminography in a 3-dimensional imaging plane.
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Figure 1-2: X-ray Laminogr aphy versus Transmissive X-ray Imaging
Agilent 5DX Service Guid e 1-5
2
What is the 5DX Automated X-ray Inspection System? 5DX Series 3

The 5DX System Process

Figure 1-3 is a flow chart illustrating the process that a panel goes through within
the 5DX System.
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Figure 1-3: Test Process Flow Chart
The PCA is loaded into the 5DX. For the 5DX to correctly test the solder joints, the PCA has to be aligned. A surface map is made to compensate for variations in the manufacturing process. The solder joints are measured and these measurements are analyzed by the a lgorithms to determin e if they pass or fa il. The algorithm thresholds, set up by the user will determine the pass or fail criteria. The PCA is then unloaded from the 5DX.
1-6 Introduction and Overview
5DX Series 3 5DX Overview

5DX Overview

The Main Cabinet (cutaway diagram shown in Figure 1-4), provides a shielded housing and vibration resistant structure for the imaging and mechanical assemblies of the 5DX System.
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Figure 1-4: Agilent 5DX System Main Cabinet (I nternal Assembli es)
Agilent 5DX Service Guid e 1-7
5DX Overview 5DX Series 3

Electronics Bay

The electronics bay, shown in the following figures, contains the 5DX System control, communications and processing equipment.
Front View
The front view, shown in Figure 1-5 identifies the units housed within the electronics bay. Note that in the figure below, the electronics bay is shown without the front door.
System Status
(contains motion control board #1 and #2)
Motor Enable Control
(inside front panel)
X, Y1, Y2, R Servo Modules
(inside front panel)
X-ray Scan Controller
Low Vol tage Power Supplies
System Controller
PCI Expansion Chassis
Digital I/O Assembly
Motion Control Assembly
Diagnostic Access Panel
(inside front panel)
Figure 1-5: 5DX Series 3 Elect ronics Bay (F ront V iew)
1-8 Introduction and Overview
5DX Series 3 5DX Overview
Rear View
The rear view (Figure 1-6) identifies units housed within the electronics bay
.
System Status Beacon
X-ray Scan Controller
Low Vol tage Power Supply Tray
System Controller
Expansion Chassis
Digital I/O
Laser Displacement Unit
Motion Control Assembly
1
0
!
Power Distribution Unit
Wire Egress
Figure 1-6: 5DX Series 3 Elect ronics Bay (Rea r V i ew)
.
Caution The ac accessory outlets are for Agilent Technologies installed accessories
ONLY. Plugging any other equipment into these accessory outlets may cause damage to either the device or the 5DX.
Agilent 5DX Service Guid e 1-9
5DX Overview 5DX Series 3

Subsystems of the Agilent 5DX System

The 5DX System consists of several subsystems. These subsystems provide the overall system functions. A heirarchical diagram is shown in Figure 1-7.
X-ray Tube
HV/XRAY
SYSTEM
POWER
SYSTEM
CONTROL
HV Power Supply
PDU
LV Pwr Sply
Auxilliary PS
Electronics
Bay
Operator MWT
Controller Expander Digital I/O
X-ray Scan Cntrlr
Motion Control
Assembly
Servo Modules
PANEL
HANDLING
PNEU­MATIC
INTER­LOCKS
SURFACE
MAP
IMAGING
Stage
Barriers
Digital I/O
Barriers
Panel Clamps
Valves/Controls
Interlocks
Sensors
Lasers
Z motors
Laser Camera
X-ray Scan Cntrlr
Image Camera
Rotary Scintillator
Middle Rail X/Y Motors
R motor
Frame Grabber
Figure 1-7: System Heirar chical Dia gram
1-10 Introduction and Overview
5DX Series 3 5DX Overview

Safety Interlock Subsystem

The Safety Interlock Subsystem prevents the X-ray, Laser and Motion Driver assemblies from operating in the event that any access panel is open. The Safety Interlocks are used to prevent injury to personnel, the 5DX System and printed circuit assemblies under test
127(
The X-ray Tube Dielectric Pressure Sensor is also connected to the Safety Interlock Subsystem, and will automatically shut OFF power to the X-rays if the vessel pressure fal ls below safe operating limits (less than 2.8 kg/cm2 (40 psi)).

X-ray High Voltage Power Supply

The X-ray High Voltage Power Supply provides -160 kilovolts dc of conditioned power required to operate the X-ray Tube. It also supplies +15 volts dc and -15 volts dc for the X-ray Tube Electronics. The X-ray HV Power Supply also provides software controlled monitoring facilities, necessary to maintain a stable X-ray source.
WARNING There are high voltages inside of the X-ray High Voltage Power Supply and
running through the High Voltage Cable. There are no User serviceable parts inside of the X-ray High Voltage Power Supply. Do Not attempt to open or otherwise service this item. Do Not remove the High Voltage Cable.
The X-ray High Voltage Power Supply produces -160 kilovolts dc of conditioned power to drive the X-ray Tube, +15 volts dc and -15 volts dc for the X-ray tube electronics. The X-ray High Voltage Power Supply is discussed in the power subsystem chapter
Agilent 5DX Service Guid e 1-11
5DX Overview 5DX Series 3

Panel Handling Subsystem

The Panel Handling Subsystem provides loading and unloading of printed circuit assemblies (panels) for testing. The Panel Handling subsystem supports Surface Mount Equipment Manufacturers Association (SMEMA) interface standards.
The Panel Handling Subsystem also positions the panel under test. This is done by controlling the three mechanical motion axes (X, Y and Z) and the Autowidth Adjust Motors. The X-Axis and Y-Axis are driven by servomotors, while the Z­Axis is driven by four vertically positioned stepper motors. The rails in the XYZ Stage Assembly are adjusted to the size of the panel by the autowidth adjust motors.

Surface Map Subsystem

The Surface Map Subsystem maps the surface characteristics of each panel. Components of the Surface Map Subsystem include the laser, the laser camera and the surface mapping software. Surface measurement is required to facilitate the accurate positioning of the Z-Axis in relationship to the Plane of Focus.

Imaging Subsystem

The Imaging Subsystem contains image acquisition hardware and software necessary to generate slice image data. The process begins with the Electron Beam and resultant Video images are digitized into 256 gray levels and analyzed.

Pneumatics Subsystem

The 5DX System contains several pneumatic assemblies. Pneumatics operate the inner and outer barriers, the panel clamps on the XYZ Stage Assembly, and the panel in place mechanical actuator.

System Controller and Expansion Chassis

Combined, the System Controller and Expansion Chassis provide the necessary hardware I/O connections to operate the 5DX System. The System Controller controls the 5DX System operations. Interaction is provided by the User Interface. The System Controller contains the Frame Grabber PCA, the Transceiver PCA, the floppy and hard disk drives, the DAT tape unit and the CD-ROM drive. The Expansion Chassis contains a fourteen-slot backplane and is where the Motion Control, Camera Control, Modem, Serial Port and Receiver PCAs reside.
1-12 Introduction and Overview
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