Agilent 4UHV Ion Pump Controller User Manual
A
gilent 4UHV Ion Pump
Controller
Models
929-9010, 929-9011, 929-9020, 929-9021,
929-9022, 929-9101, 929-9200, 929-9201,
929-9210, 929-9211, 929-9212, 929-9213,
929-9400, 929-9401, 929-9402
Manuale di Istruzioni
Bedienungshandbuch
Notice de Mode D’Emploi
User Manual
87-900-137-01 (A)
03/2011
Notices
© Agilent Technologies, Inc. 2011
No part of this manual may be
reproduced in any form or by any
means (including electronic storage
and retrieval or translation into a
foreign language) without prior
agreement and written consent from
Agilent Technologies, Inc. as governed
by United States and international
copyright laws.
Manual Part Number
Publication Number: 87-900-137-01 (A)
Edition
Edition 03/2011
Printed in ITALY
Agilent Technologies Italia S.p.A.
Vacuum Products Division
Via F.lli Varian, 54
10040 Leinì (TO)
ITALY
Warranty
The material contained in this
document is provided “as is,” and is
subject to being changed, without
notice, in future editions. Further, to
the maximum extent permitted by
applicable law, Agilent disclaims all
warranties, either express or implied,
with regard to this manual and any
information contained herein,
including but not limited to the
implied warranties of merchantability
and fitness for a particular purpose.
Agilent shall not be liable for errors
or for incidental or consequential
damages in connection with the
furnishing, use, or performance of
this document or of any information
contained herein. Should Agilent and
the user have a separate written
agreement with warranty terms
covering the material in this
document that conflict with these
terms, the warranty terms in the
separate agreement shall control.
Technology Licenses
The hardware and/or software
described in this document are
furnished under a license and may be
used or copied only in accordance
with the terms of such license.
Restricted Rights Legend
If software is for use in the
performance of a U.S. Government
prime contract or subcontract,
Software is delivered and licensed as
“Commercial computer software” as
defined in DFAR 252.227-7014 (June
1995), or as a “commercial item” as
defined in FAR 2.101(a) or as
“Restricted computer software” as
defined in FAR 52.227-19 (June 1987)
or any equivalent agency regulation or
contract clause. Use, duplication or
disclosure of Software is subject to
Agilent Technologies’ standard
commercial license terms, and nonDOD Departments and Agencies of the
U.S. Government will receive no
greater than Restricted Rights as
defined in FAR 52.227-19(c)(1-2) (June
1987). U.S. Government users will
receive no greater than Limited Rights
as defined in FAR 52.227-14 (June
1987) or DFAR 252.227-7015 (b)(2)
(November 1995), as applicable in any
technical data.
Trademarks
Windows and MS Windows are U.S.
registered trademarks of Microsoft
Corporation.
Safety Notices
CAUTION
A CAUTION notice denotes a hazard.
It calls attention to an operating
procedure, practice, or the like that, if
not correctly performed or adhered to,
could result in damage to the product
or loss of important data. Do not
proceed beyond a CAUTION notice
until the indicated conditions are fully
understood and met.
WARNING
A WARNING notice denotes a
hazard. It calls attention to an
operating procedure, practice, or the
like that, if not correctly performed
or adhered to, could result in
personal injury or death. Do not
proceed beyond a WARNING notice
indicated conditions are
until the
fully understood and met.
Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
4UHV Ion Pump Controller
4UHV Ion Pump Controller
Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A) 3/104
4UHV Ion Pump Controller
4/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
Contents
Contents
1 Istruzioni per l’uso 7
Informazioni Generali 8
Immagazzinamento 9
Preparazione per l’installazione 10
Installazione 11
Uso 13
Manutenzione 18
2 Gebrauchsanleitung 19
Allgemeines 20
Lagerung 21
Vor der Installation 22
Installation 23
Gebrauch 25
Wartung 30
3 Mode d’emploi 31
Indications Generales 32
Emmagasinage 33
Preparation pour l’Installation 34
Installation 35
Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A) 5/104
Contents
Utilisation 37
Entretien 42
4 Instructions for Use 43
General Information 44
Storage 45
Prior to Installation 46
Installation 47
Usage 49
Maintenance 54
5 Technical Information 55
4UHV Controller Description 57
Specifications 59
Operating Mode 65
Start-Up 67
Serial 73
Display and Menus 91
Orderable Parts 98
6/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
Agilent 4UHV Ion Pump Controller User Manual
1 Istruzioni per l’uso
Informazioni Generali 8
Immagazzinamento 9
Preparazione per l’installazione 10
Installazione 11
Uso 13
Accensione del controller dal
pannello frontale (modalità LOCAL) 15
Manutenzione 18
Smaltimento 18
Traduzio
ne delle istruzioni originali
7/104
Istruzioni per l’uso
A
1
Informazioni Generali
Informazioni Generali
Questa apparecchiatura è destinata ad uso professionale. L’utente
deve leggere attentamente il presente Manuale di istruzioni ed ogni
altra informazione addizionale fornita dalla Agilent prima
dell’utilizzo dell’apparecchiatura. La Agilent declina ogni
responsabilità dovuta alla mancata osservanza totale o anche
parziale delle istruzioni fornite in questo documento, all’uso
improprio dell’apparecchiatura da parte di personale non addestrato,
all’esecuzione di interventi non autorizzati o alla mancata osservanza
delle specifiche normative nazionali.
Nei paragrafi seguenti sono riportate tutte le informazioni necessarie
a garantire la sicurezza dell’operatore durante l’utilizzo
dell’apparecchiatura. Nel appendice “Technical Information” vengono
fornite delle informazioni dettagliate.
Questo manuale utilizza le seguenti convenzioni:
ATTENZIONE!
VVERTENZA!
NOTA
8/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
I messaggi di attenzione sono visualizzati prima di procedure che, se non
osservate, potrebbero causare danni all’apparecchiatura.
I messaggi di avvertenza attirano l’attenzione dell’operatore su una
procedura o una pratica specifica che, se non eseguita in modo corretto,
potrebbe provocare gravi lesioni personali.
Le note contengono informazioni importanti estrapolate dal testo.
Immagazzinamento
Per trasportare e immagazzinare il controller occorre osservare le
seguenti condizioni ambientali:
Temperatura: da -20 °C a +70 °C
Umidità relativa: da 0 a 95% (senza condensa)
Istruzioni per l’uso
Immagazzinamento
1
Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A) 9/104
Istruzioni per l’uso
1
Preparazione per l’installazione
Preparazione per l’installazione
Il controller viene fornito in un imballo protettivo speciale; nel caso
in cui si presentassero segni di danni che potrebbero essere stati
causati durante il trasporto, contattare l’ufficio vendite locale.
Durante l’operazione di disimballo, prestare particolare attenzione a
non lasciar cadere il controller e a non sottoporlo ad urti.
Il materiale dell’imballo è completamente riciclabile e risponde alla
direttiva CEE 85/399 per la tutela dell’ambiente.
Figura 1 Imballo del controller
10/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
A
Installazione
Istruzioni per l’uso
Installazione
1
VVERTENZA!
ATTENZIONE!
Per la sicurezza dell’operatore il controller 4UHV deve essere alimentato con
un cavo di alimentazione a 3 fili dotato di una spina approvata a livello
internazionale. Utilizzare questo cavo e spina insieme ad una presa
adeguatamente connessa a terra per evitare scosse elettriche e soddisfare i
requisiti delle norme CE. Le alte tensione che si sviluppano nel controller
possono provocare gravi lesioni o la morte.
Dopo lo spegnimento dell’unità rimane dell’energia residua all’interno del
controller per un po’ di tempo.
Attendere circa 1 minuto per essere sicuri che l’energia residua sia stata
dissipata.
Il controller può essere utilizzato sia come unità da tavolo che come modulo
installato in un rack. In ogni caso deve essere posizionato in modo tale che l’aria
possa circolare liberamente attraverso i fori di areazione presenti sulla copertura.
Nel caso in cui il controller viene utilizzato come modulo rack, DEVE essere
installato in un’adattatore alto quattro unità rack per evitare che cada all’interno
del rack stesso (vedere la tabella delle parti ordinabili). Il pannello frontale del
controller 4UHV non è previsto per reggere il peso dell’unità.
Non installare o utilizzare il controller in ambienti esposti ad agenti atmosferici
(pioggia, neve, ghiaccio), nella presenza di polvere, gas corrosivi o in ambienti
esplosivi o ad alto rischio di infiammabilità.
Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A) 11/104
Istruzioni per l’uso
1
Installazione
ATTENZIONE!
NOTA
ATTENZIONE!
Il controller 4UHV appartiene alla seconda categoria di installazione (o
sovratensione) prevista dalla normativa EN 61010-1. Connettere quindi il
dispositivo ad una linea di alimentazione che soddisfi tale categoria.
Il controller 4UHV ha dei connettori per gli ingressi/uscite e per la comunicazione
seriale che devono essere connessi ai circuiti esterni in modo che nessuna parte
sotto tensione sia accessibile. Assicurarsi che l’isolamento del dispositivo
connesso al controller 4UHV abbia un isolamento adeguato anche in condizione di
guasto singolo come previsto dalla normativa EN 61010-1.
Nel caso in cui il controller viene installato in un rack, rimuovere i quattro piedini in
modo che venga posizionato con almeno 30 mm di spazio sotto e sopra.
In casi rari di guasto il controller potrebbe emettere fumo. Se il cliente usa il
controller in camere pulite è necessario prevedere adeguate protezioni per evitare
di contaminare l’ambiente con l’eventuale fumo.
Durante il funzionamento, occorre che siano rispettate le seguenti
condizioni ambientali:
Temperatura: da 0 °C a +40 °C
Umidità relativa: 0 - 90% (senza condensa)
12/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
A
Uso
Istruzioni per l’uso
Uso
In questo paragrafo vengono riportate le principali procedure
operative. Per ulteriori informazioni e per le procedure riguardanti
collegamenti o particolari opzioni fare riferimento al paragrafi
“UTILIZZO” nell’appendice “Technical Information”.
Prima di utilizzare il controller effettuare tutti i collegamenti elettrici
e fare riferimento al manuale della pompa collegata.
1
VVERTENZA!
Accendere i canali di alta tensione solo se connessi alle pompe ioniche
tramite gli appositi cavi di alta tensione dotati del cavo di interlock.
L’uso del controller è inteso con cavo di alta tensione provvisto di interlock.
4UHV
Figura 2 Collegamenti delle masse
Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A) 13/104
Istruzioni per l’uso
1
Uso
NOTA
Se si vuole utilizzare un cavo HV senza interlock nel sacchetto accessori è
fornito un apposito kit di cavetti per interlock preassemblati. Con questo utilizzo
si perde la funzionalità di sicurezza offerta dall’utilizzo dell’interlock.
Fare riferimento alla seguente figura per montare correttamente il
cavo di interlock fornito nel sacchetto accessori, qualora si voglia
rinunciare al cavo di alta tensione dotato di interlock.
Figura 3
NOTA
14/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
L’interlock del cavo viene chiuso sulla massa della pompa. Se il collegamento è
interrotto l’alta tensione viene disabilitata.
L’interlock del cavo viene chiuso sulla massa della pompa. Se il
collegamento è interrotto l’alta tensione viene disabilitata. Per
collegare il controller alla pompa, utilizzare un cavo HV dotato di
interlock (vedere nelle parti ordinabili).
Istruzioni per l’uso
Uso
Nella figura “Collegamenti delle masse” sono riportati i corretti
legamenti delle masse, del cavo HV tra il controller e la pompa e
col
del cavo di interlock.
1
ATTENZIONE!
Accensione del controller dal pannello frontale (modalità LOCAL)
NOTA
Se si monta il cavo di interlock fornito nel sacchetto accessori fare molta
attenzione affinchè nessuna parte cada accidentalmente all’interno del
controller.
Per accendere l’alta tensione (HV) occorre che l’interlock del cavo HV (cable
interlock) sia chiuso (connettore inserito).
Procedere come segue per alimentare il controller e abilitare la
tensione sui connettori di alta tensione (H.V.):
Spegnere il controller.
Collegare il cavo HV e l’interlock del cavo H.V. nei relativi
connettori sul pannello posteriore.
Selezionare la modalità LOCAL premendo per breve tempo il
tasto “MODE” fino a quando appare sul display la scritta LOCAL.
Tenere premuto il pulsante HV ON/OFF (2) mentre si preme il
pulsante HV-x (3,4,5,6) dove x è il numero del canale che si vuole
accendere o spegnere.
Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A) 15/104
Istruzioni per l’uso
1
Uso
(2)
(1) (3) (4)
(5) (6)
Figura 4 Front Panel 4UHV Ion Pump Controller
Figura 5 Rear Panel 4UHV Ion Pump Controller
Per spegnere i canali HV:
Tenere premuto il pulsante HV ON/OFF (2) mentre si preme il
pulsante HV-x (3,4,5,6) dove x è il numero del canale che si vuole
accendere o spegnere.
Per ulteriori dettagli sull’uso del controller e sulla descrizione delle
informazioni del display fare riferimento alla sezione “Technical
Information”.
16/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
Istruzioni per l’uso
A
Uso
1
VVERTENZA!
In condizioni di emergenza per spegnere l’unità e tutti i canali alta tensione
disattivare l’interruttore generale (1) posto sul pannello anteriore.
Mettendo in off l’interruttore generale si spegnerà l’unita HV.
Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A) 17/104
Istruzioni per l’uso
1
Manutenzione
Manutenzione
Il controller 4UHV non richiede alcun intervento di manutenzione.
Qualsiasi tipo di intervento sull’unità deve essere eseguito da
personale tecnico autorizzato. In caso di guasto è possibile usufruire
del servizio di riparazione Agilent o del "Agilent advanced exchange
service", che permette di ottenere un controller rigenerato in
sostituzione di quello guasto.
Qualora un controller dovesse essere rottamato, procedere nel
rispetto delle normative nazionali specifiche.
Smaltimento
Significato del logo "WEEE" presente sulle etichette. Il simbolo qui
sotto riportato è applicato in ottemperanza alla direttiva CE
denominata "WEEE". Questo simbolo (valido solo per i paesi della
Comunità Europea) indica che il prodotto sul quale è applicato, NON
deve essere smaltito insieme ai comuni rifiuti domestici o industriali,
ma deve essere avviato ad un sistema di raccolta differenziata. Si
invita pertanto l'utente finale a contattare il fornitore del dispositivo,
sia esso la casa madre o un rivenditore, per avviare il processo di
raccolta e smaltimento, dopo opportuna verifica dei termini e
condizioni contrattuali di vendita.
18/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
Agilent 4UHV Ion Pump Controller User Manual
2 Gebrauchsanleitung
Allgemeines 20
Lagerung 21
Vor der Installation 22
Installation 23
Gebrauch 25
Einschalten des Controllers vo
Schalttafel (LOKAL-Modus) 28
Wartung 30
Entsorgung 30
etzung der Originalanleitungen
Übers
n der vorderen
19/104
Gebrauchsanleitung
2
Allgemeines
Allgemeines
Dieser Apparat ist für Fachbetriebe bestimmt. Vor Gebrauch sollte
der Benutzer dieses Handbuch sowie alle weiteren mitgelieferten
Zusatzdokumentationen genau lesen. Bei Nichtbeachtung - auch
teilweise - der enthaltenen Hinweise, unsachgemäßem Gebrauch
durch ungeschultes Personal, nicht autorisierten Eingriffen und
Missachtung der einheimischen, hier zur Geltung kommenden
Bestimmungen übernimmt die Firma Agilent keinerlei Haftung.
In den folgenden Abschnitten sind alle erforderlichen Informationen
für die Sicherheit des Bedieners bei der Anwendung des Geräts
aufgeführt. Detaillierte technische Informationen sind im Anhang "
Technical Information " enthalten.
In dieser Gebrauchsanleitung werden Sicherheitshinweise
folgendermaßen hervorgehoben:
VORSICHT!
WARNUNG!
HINWEIS
20/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
Die Vorsichtshinweise vor bestimmten Prozeduren machen den Bediener darauf
aufmerksam, dass bei Nichteinhaltung Schäden an der Anlage entstehen
können.
Die Warnhinweise lenken die Aufmerksamkeit des Bedieners auf bestimmte
Vorgänge oder Praktiken, die bei unkorrekter Ausführung schwere
Verletzungen hervorrufen können.
Die HINWEISE enthalten wichtige Informationen, die im Text hervorgehoben
werden.
Lagerung
Gebrauchsanleitung
Lagerung
Bei Transport und Lagerung der Controller müssen folgende
Umgebungsbedingungen eingehalten werden:
Temperatur: -20 °C bis +70 °C
Rel. Luftfeuchtigkeit: 0-95 % (nicht kondensierend)
2
Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A) 21/104
Gebrauchsanleitung
2
Vor der Installation
Vor der Installation
Der Controller wird mit einer speziellen Schutzverpackung geliefert.
Eventuelle Transportschäden müssen sofort der zuständigen
örtlichen Verkaufsstelle gemeldet werden.
Das Verpackungsmaterial muss korrekt entsorgt werden. Es ist
vollständig recyclebar und entspricht der EG-Richtlinie 85/399 für
Umweltschutz.
Abbildung 1 Verpackung des Controllers
22/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
Installation
Gebrauchsanleitung
Installation
2
WARNUNG!
VORSICHT!
Zur Sicherheit des Controller-Bedieners muss der 4UHV an ein 3-DrahtSpeisekabel mit einem international anerkannten Stecker angeschlossen
sein. Dieses Kabel und dieser Stecker müssen an eine angemessen geerdete
Steckdose angeschlossen sein, um Stromschläge zu vermeiden und den
Anforderungen der CE-Normen gerecht zu werden. Die Hochspannungen, die
im Controller entstehen, können schwere Verletzungen oder den Tod
verursachen.
Nach Ausschalten des Geräts bleibt noch einige Zeit lang Reststrom im
Controller.
Warten Sie etwa 1 Minute, um sicher zu sein, dass der restliche Strom
dissipiert ist.
Der Controller kann auf einen Tisch oder ein Gestell montiert werden. In beiden
Fällen muß eine ungehinderte Zirkulation der Kühlluft durch die im Gehäuse
vorne und unten eingelassen Luftöffnungen gewährleistet sein.
Wenn der Controller in einem Gestell montiert wird, MUSS er in einer vier
Rackeinheiten hohen Adapter-Einheit installiert werden, um zu vermeiden, daß
der Controller nicht in das Gestell fällt (siehe dazu Tabelle der bestellbaren
Zubehörteile). Die vordere Schalttafel des 4 HV-Controllers ist nicht geeignet, das
gesamte Gewicht der Einheit zu tragen.
Der Controller darf nicht in Umgebungen installiert u/o benutzt werden, die
Witterungseinflüssen (Regen, Frost, Schnee), Staub und aggressiven Gasen
ausgesetzt sind und in denen Explosions- und erhöhte Brandgefahr besteht.
Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A) 23/104
Gebrauchsanleitung
2
Installation
VORSICHT!
HINWEIS
VORSICHT!
Der Controller 4UHV gehört zu der zweiten Einbaukategorie (oder auch
Überspannung), die von der Norm EN 61010-1 geregelt ist. Schließen Sie daher
das Gerät an eine Stromleitung an, die dieser Kategorie gerecht wird.
Der Controller 4UHV hat Anschlüsse für die Ein-/Ausgänge und die
Serienkommunikation, die an externe Kreisläufe angeschlossen sein müssen, so
dass man zu keinem unter Strom stehenden Teil Zugriff hat. Vergewissern Sie
sich, dass die Isolierung des Gerätes, das an den Controller 4UHV angeschlossen
ist, auch bei Einzelstörungen, wie sie von der Vorschrift EN 61010-1 vorgesehen
sind, angemessen isoliert ist.
Wenn der Controller in einem Gestell installiert werden soll, müssen alle vier
Füße abmontiert und über- und unterhalb wenigstens 30 mm (1,2 Zoll) Platz
gelassen werden.
In seltenen Fällen könnte der Controller bei Störungen Rauch ausstoßen. Wenn
der Controller in sauberen Räumlichkeiten verwendet wird, muss er mit
angebrachten Schutzvorrichtungen versehen werden, um zu verhindern, dass die
Räumlichkeiten durch den Rauch verschmutzt werden.
Während des Betriebs müssen folgende Umgebungsbedingungen
eingehalten werden:
Temperatur: 0 °C to +40 °C
Rel. Luftfeuchtigkeit: 0 - 90 % (nicht kondensierend)
24/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
Gebrauch
Gebrauchsanleitung
Gebrauch
In diesem Kapitel sind die wichtigsten Betriebsvorgänge aufgeführt.
Für weitere Hinweise bezüglich Anschluß und Montage des
bestellbaren Zubehörs verweisen wir auf das Kapitel "Gebrauch" im
Anhang zu "Technical Information". Vor Benutzung des Controllers
müssen sämtliche elektrischen Anschlüsse ausgeführt und die
Betriebsanleitung der angeschlossenen Pumpe durchlesen werden.
2
WARNUNG!
Schalten Sie die Hochspannungsleitungen erst ein, wenn diese mit Hilfe der
dafür bestimmten Hochspannungskabel des Interlock-Kabels an die
Ionenpumpen angeschlossen sind.
Der Gebrauch des Controllers muss unter Verwendung eines
Hochspannungskabels mit Interlock erfolgen.
4UHV KABEL PUMPE
LEITUNG
PUMPEN-ERDE
Abbildung 2 Erdung
Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A) 25/104
Gebrauchsanleitung
2
Gebrauch
WARNUNG!
Soll ein HV-Kabel ohne Interlock zum Einsatz kommen, befindet sich in dem
Zubehörbeutel ein dafür bestimmtes Kabelset für vormontierte Interlock-Teile.
Bei diesem Gebrauch geht die Sicherheitsfunktion verloren, die man bei der
Interlock-Verwendung hat.
Sehen Sie sich folgende Abbildung genau an, um das im
Zubehörbeutel mitgelieferte Interlock-Kabel richtig zu montieren,
wenn auf das Hochspannungskabel mit Interlock verzichtet werden
soll.
ZAHNSCHEIBE
UNTERLEGSCHEIBE
FEDERRRING
SCHRAUBE
INTERLOCK-KABEL
1 oder 2 Stk.
RÜCKSEITE
Abbildung 3
HINWEIS
Die Verriegelung des Kabels wird auf der Masse der Pumpe geschlossen. Wenn
die Verbindung unterbrochen wird, wird die Hochspannung deaktiviert.
Die Verriegelung des Kabels wird auf der Masse der Pumpe
geschlossen. Wenn die Verbindung unterbrochen wird, wird die
Hochspannung deaktiviert. Beim Anschluss des Controller an die
Pumpe ist ein HV-Kabel mit Interlock (siehe Bestellteile) zu
verwenden.
26/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
Gebrauchsanleitung
Gebrauch
Auf der Abbildung “Anschlüsse” sind die richtigen Anschlüsse der
Erdungen, des HV-Kabels des Controller an die Pumpe und des
Interlock-Kabels ersichtlich.
2
VORSICHT!
Beim Montieren des im Zubehörbeutel mitgelieferten Interlock-Kabels gehen Sie
sehr vorsichtig vor, damit dabei kein Teil in den Controller fällt.
Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A) 27/104
Gebrauchsanleitung
(2) (1) (3) (4) (5) (6)
2
Gebrauch
Einschalten des Controllers von der vorderen Schalttafel (LOKAL-Modus)
HINWEIS
Um die Hochspannung (HV) einzuschalten, muss der Interlock des HV-Kabels
(Kabel-Iinterlock) geschlossen sein (Verbinder eingesteckt).
Gehen Sie wie folgt vor, um den Controller mit Strom zu versorgen
und die Spannung an den Hochspannungsverbindern (H.V.)
freizugeben:
Schalten Sie den Controller aus.
Schließen Sie das HV-Kabel und den Interlock des H.V-Kabels an
die jeweiligen Verbinder am Rückenteil.
Wählen Sie die Modalität LOCAL, indem Sie kurz die Taste
“MODE” drücken bis auf dem Display die Aufschrift LOCAL
erscheint.
Halten Sie die Taste HV ON/OFF (2) ) gedrückt und drücken Sie
gleichzeitig die Taste HV-x (3,4,5,6) ), wobei x die Nummer der
Leitung ist, die ein- oder ausgeschaltet werden soll.
Abbildung 4
28/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
Vorderteil 4UHV Ionenpumpen-Controller
Gebrauchsanleitung
2
Gebrauch
WARNUNG!
Abbildung 5
Rückenteil 4UHV Ionenpumpen-Controller
Um die HV-Leitungen auszuschalten:
Halten Sie die Taste HV ON/OFF (2) gedrückt und drücken Sie
gleichzeitig die Taste HV-x (3,4,5,6), wobei x die Nummer der
Leitung ist, die ein- oder ausgeschaltet werden soll.
Weitere Einzelheiten zum Gebrauch des Controllers und zur
Beschreibung der Display-Angaben entnehmen Sie bitte dem
Abschnitt “ Technical Information ”.
Bei Not-Aus schalten Sie den Hauptschalter (1) auf dem vorderen Bedienfeld
aus, um das Gerät und sämtliche Hochspannungsleitungen auszuschalten.
Wenn Sie den Hauptschalter auf Off stellen, wird das HV-Gerät ausgeschaltet.
Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A) 29/104
Gebrauchsanleitung
2
Wartung
Wartung
Entsorgung
Die 4UHV-Controller sind wartungsfrei. Eventuell erforderliche
Eingriffe müssen von dazu befugtem Fachpersonal ausgeführt
werden. Bei Störungen kann der Agilent-Reparaturdienst in
Anspruch genommen werden oder schließen Sie einen Vertrag für
“Agilent Advanced Exchange Service” ab, mit dem ein defekter
Controller gegen einen general-überholten ausgetauscht wird.
Eine eventuelle Verschrottung muß unter Einhaltung der
einschlägigen landesüblichen Vorschriften erfolgen.
Bedeutung des "WEEE" Logos auf den Etiketten.
Das folgende Symbol ist in Übereinstimmung mit der EURichtlinie
WEEE (Waste Electrical and Electronic Equipment) angebracht.
Dieses Symbol (nur in den EU-Ländern gültig) zeigt an, dass das
betreffende Produkt nicht zusammen mit Haushaltsmüll entsorgt
werden darf sondern einem speziellen Sammelsystem zugeführt
werden muss.
Der Endabnehmer sollte daher den Lieferanten des Geräts - d.h. die
Muttergesellschaft oder den Wiederverkäufer - kontaktieren, um den
Entsorgungsprozess zu starten, nachdem er die Verkaufsbedingungen
geprüft hat.
30/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
Agilent 4UHV Ion Pump Controller User Manual
3 Mode d’emploi
Indications Generales 32
Emmagasinage 33
Preparation pour l’Installation 34
Installation 35
Utilisation 37
Allumage du Contrôleur du Panneau Frontal
(Modalité LOCAL)
Entretien 42
Mise au Rebut 42
Traduction de la
40
mode d’emploi originale
31/104
Mode d’emploi
A
3
Indications Generales
Indications Generales
Cet appareillage a été conçu en vue d'une utilisation professionnelle.
Il est conseillé à l'utilisateur de lire attentivement cette notice
d'instructions ainsi que toute autre indication supplémentaire
fournie par Agilent, avant l'utilisation de l'appareillage. Agilent
décline par conséquent toute responsabilité en cas d'inobservation
totale ou partielle des instructions données, d'utilisation incorrecte
de la part d'un personnel non formé, d'opérations non autorisées ou
d'un emploi contraire aux réglementations nationales spécifiques.
Les paragraphes suivants donnent toutes les indications nécessaires
à garantir la sécurité de l'opérateur pendant l'utilisation de
l'appareillage. Des renseignements plus détaillés se trouvent dans
l'appendice " Technical Information ".
Cette notice utilise les signes conventionnels suivants:
ATTENTION!
VERTISSEMENT!
NOTE
32/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
Les messages d'attention apparaissent avant certaines procédures qui, si elles
ne sont pas observées, pourraient endommager sérieusement l'appareillage.
Les messages d’avertissement attirent l'attention de l'opérateur sur une
procédure ou une manoeuvre spéciale qui, si elle n'est pas effectuée
correctement, risque de provoquer de graves lésions.
Les notes contiennent des renseignements importants, isolés du texte.
Emmagasinage
Pour transporter et emmagasiner le contrôleur il faut observer les
conditions suivantes d’environnement:
température: de -20°C à +70°C
humidité relative: 0 - 95 % (non condensante).
Mode d’emploi
Emmagasinage
3
Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A) 33/104
Mode d’emploi
3
Preparation pour l’Installation
Preparation pour l’Installation
Le contrôleur est fourni dans un emballage de protection spécial; si
l'on constate des dommages pouvant s'être produits pendant le
transport, contacter tout de suite le bureau de vente local. Pendant
l'opération d'ouverture de l'emballage, veiller tout particulièrement à
ne pas laisser tomber le contrôleur et à ne lui faire subir aucun choc.
Le matériel est entièrement recyclable et il est conforme aux
directives CEE 85/399 en matière de protection de l'environnement.
Figure 1 Emballage du contrôleur
34/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
A
Installation
Mode d’emploi
Installation
3
VERTISSEMENT!
ATTENTION!
Pour la sécurité de l’opérateur, le contrôleur 4UHV doit être alimenté par
un câble d’alimentation à 3 fils doté d’une prise mâle approuvée à un
niveau international. Brancher le câble avec prise mâle à une prise
femelle raccordée à la terre de façon adéquate afin d’éviter tout risque
d’électrocution et de pouvoir remplir les conditions de conformité
prescrites par les normes CE. Les hautes tensions qui se développent à
l’intérieur du contrôleur peuvent être susceptibles de provoquer des
blessures graves voire de causer la mort.
Après l’extinction de l’unité, il reste de l’énergie à l’intérieur du
contrôleur pendant quelques instants.
Attendre environ 1 minute pour être sûr que l’énergie résiduelle s’est
dissipée.
Le contrôleur peut être utilisé soit comme unité de table que comme module
installé dans une armoire. De toute façon, il doit être placé de manière à ce
que l’air puisse circuler librement à travers les trous d’aération présents dans
la couverture.
Lorsque le contrôleur est utilisé comme module armoire il DOIT être installé
dans un adaptateur d’une hauteur de quatre unités armoire afin d’éviter qu’il
ne tombe à l’intérieur de l’armoire même (voir tableau des pièces détachées).
Le panneau frontal du contrôleur n’est pas prévu pour supporter le poids de
l’unité. Ne pas installer ou utiliser le contrôleur 4UHV dans des milieux
exposés aux agents atmosphériques (pluie, neige, glace). En présence de
poussière, de gaz corrosifs ou dans des milieux explosifs ou à fort risque
d’inflammabilité.
Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A) 35/104
Mode d’emploi
3
Installation
ATTENTION!
NOTE
ATTENTION!
Le contrôleur 4UHV appartient à la seconde catégorie d’installation (ou
surtension) prévue par la norme EN 61010-1. Il est donc nécessaire de brancher
le dispositif à une ligne d’alimentation qui soit adaptée à cette catégorie
d’appareils.
Le contrôleur 4UHV dispose de connecteurs pour entrées/sorties et pour la
communication en série qui doivent être branchés à des circuits externes de
façon à ce qu’aucune des parties sous tension ne soitaccessible. Veiller à ce que
le système d’isolation du dispositif branché au contrôleur 4UHV soit adapté,
même en cas de pannes individuelles, et ce, tel que prévu par la norme EN
61010-1.
Si le contrôleur est installé dans une armoire, enlever les quatre pieds de
manière à ce qu’il soit placé avec au moins 30 mm d’espace en haut et en bas.
Dans quelques rares cas de panne, il est possible que le contrôleur dégage de la
fumée. Si l’unité est utilisée dans des environnements propres, il est nécessaire
de prévoir la mise en place de protections adéquates afin d’éviter que la fumée
ne puisse contaminer la pièce.
Pendant le fonctionnement, il est nécessaire de respecter les
conditions d’environnement suivantes:
température: de 0°C à +40°C
humidité relative: 0 - 90% (non condensante).
36/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
A
Utilisation
Mode d’emploi
3
Utilisation
Dans ce paragraphe, on indique les principales procédures
opérationnelles. Pour tous autres détails et pour les procédures
concernant des connexions ou des éléments en option, se reporter au
paragraphe "Usage" de l'appendice "Technical Information". Avant
d'utiliser le contrôleur, effectuer toutes les connexions électriques et
se reporter à la notice de la pompe connectée.
VERTISSEMENT!
N’allumer les canaux haute tension que s’ils ont été branchés aux
pompes ioniques par l’intermédiaire des câbles haute tension prévus à
cet effet et dotés de câble Interlock.
L’usage du contrôleur est subordonné à l’usage d’un câble haute tension
doté d’Interlock.
4UHV
LIGNE
BRANCHEMENT
DE TERRE DE
LA POMPE
Figure 2 Connexions des masses
POMPE
Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A) 37/104
Mode d’emploi
3
Utilisation
NOTE
Si l’opérateur veut utiliser un câble HV sans interlock, le sachet d’accessoires
contient un kit spécial de câbles pour interlocks préassemblés. L’utilisation de
ces accessoires provoque la perte des fonctions de sécurité offertes par
l’utilisation de l’interlock.
Consulter la figure ci-dessous pour monter correctement le câble
d’interlock contenu dans le sachet d’accessoires en cas de non
utilisation du câble de haute tension équipé d’un interlock.
Figure 3
NOTE
38/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
L’interlock du câble est serré sur la masse de la pompe. Si le branchement est
coupé, la haute tension est interrompue.
L’interlock du câble est serré sur la masse de la pompe. Si le
branchement est coupé, la haute tension est interrompue.
Pour relier le contrôleur à la pompe, utiliser un câble HV équipé d’un
interlock (voir le bordereau de commande des pièces).
Mode d’emploi
Utilisation
Les branchements corrects des masses, du câble HV entre le
contrôleur et la pompe, ainsi que du câble d’interlock sont reportés
sur la figure “Connexions des masses”.
3
ATTENTION!
En cas d’utilisation du câble d’interlock contenu dans le sachet d’accessoires, il
faut veiller en particulier à ce qu’aucune pièce ne tombe à l’intérieur du
contrôleur.
Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A) 39/104
Mode d’emploi
3
Utilisation
Allumage du Contrôleur du Panneau Frontal (Modalité LOCAL)
NOTE
Pour allumer la haute tension (HV), il faut que l’interlock du câble HV (câble
interlock) soit fermé (connecteur branché).
Procéder comme suit pour alimenter le contrôleur et habiliter la
tension au niveau des connecteurs de haute tension (H.V.) :
Eteindre le contrôleur.
Brancher le câble HV et l’interlock du câble H.V. sur les
connecteurs correspondants situés sur le panneau arrière.
Appuyer brièvement sur la touche "MODE" pour sélectionner la
modalité LOCAL jusqu’à ce que l’inscription LOCAL s’affiche sur
l’écran.
Maintenir le bouton HV ON/OFF (2) enfoncé tout en appuyant sur
le bouton HV-x (3,4,5,6) ; x correspond au numéro du canal à
allumer ou à éteindre.
(2)
(1) (3) (4)
Figure 4 Panneau avant 4UHV sur le contrôleur de pompe
40/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
(5) (6)
Mode d’emploi
3
Utilisation
Figure 5 Panneau arrière 4UHV sur le contrôleur de pompe
Pour éteindre les canaux HV :
Maintenir le bouton HV ON/OFF (2) enfoncé tout en appuyant sur
le bouton HV-x (3,4,5,6)) ; x correspond au numéro du canal à
allumer ou à éteindre.
Pour plus de renseignements sur l’usage du contrôleur et sur la
description des informations de l’écran, consulter la section “
Technical Information ”.
AVERTISSEMENT!
En cas de situation d’urgence nécessitant un arrêt immédiat de l’unité et
de tous les canaux haute tension, désactiver l’interrupteur général (1)
situé sur le panneau avant.
En plaçant l’interrupteur général sur OFF, l’unité H.T. s’arrête.
Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A) 41/104
Mode d’emploi
3
Entretien
Entretien
Mise au Rebut
Le contrôleur 4UHV n’a besoin d’aucun entretien. N’importe quel
entretien sur l’unité doit être effectué par un personnel technique
autorisé. En cas de panne contacter le Support technique Agilent ou
bien s’abonner au Agilent Advanced Exchange Service” où le
contrôleur endommagé est remplacé par un contrôleur
reconditionné.
En cas de mise au rebut du contrôleur, procéder à son élimination
conformément aux réglementations nationales en la matière.
Signification du logo "WEEE" figurant sur les étiquettes.
Le symbole ci-dessous est appliqué conformément à la directive CE
nommée "WEEE".
Ce symbole (uniquement valide pour les pays de la Communauté
européenne) indique que le produit sur lequel il est appliqué NE doit
PAS être mis au rebut avec les ordures ménagères ou les déchets
industriels ordinaires, mais passer par un système de collecte
sélective. Après avoir vérifié les termes et conditions du contrat de
vente, l’utilisateur final est donc prié de contacter le fournisseur du
dispositif, maison mère ou revendeur, pour mettre en oeuvre le
processus de collecte et mise au rebut.
42/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
Agilent 4UHV Ion Pump Controller User Manual
4 Instructions for Use
General Information 44
Storage 33
Prior to Installation 46
Installation 47
Usage 49
Powering On the Controller from the Front Panel
(LOCAL Mo
Maintenance 54
Disposal 54
al Instructions
Origin
de) 52
43/104
Instructions for Use
4
General Information
General Information
This equipment is intended for professional use. Prior to using this
equipment the user must carefully read this Instruction Manual in its
entirety and any additional information provided by Agilent. Agilent
declines all responsibility for damage caused by the total or partial
misuse of the instructions provided herein, by the improper use of
the equipment by untrained personnel, by unauthorized
interventions or by negligence in complying with any specific
national rule or regulation.
The following sections provide you with all the information needed to
guarantee the operator’s safety when using the equipment. Detailed
information is provided in the appendix entitled “Technical
Information”.
The following conventions are used in this manual:
CAUTION!
WARNING!
NOTE
44/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
Caution messages are provided before procedures that could cause damage to
the equipment if not complied with.
Warning
operation that could cause serious injury if not performed correctly.
Notes provide you with important information extracted from the text.
messages call the operator’s attention to a specific procedure or
Storage
Instructions for Use
Storage
The following environmental conditions must be met when
transporting and storing the controller:
Temperature: -20 °C to +70 °C
Relative humidity: 0 - 95% (non-condensing)
4
Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A) 45/104
Instructions for Use
4
Prior to Installation
Prior to Installation
The controller comes in a special protective packaging; if there is any
sign of damage that could have been caused during transportation,
contact your local sales office immediately.
When unpacking the controller, be particularly careful to avoid
dropping it or knocking it against anything.
The packaging material is totally recyclable and complies with EEC
directives 85/399 for the safeguard of the environment.
Figure 1 Controller Packaging
46/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
Installation
Instructions for Use
Installation
4
WARNING!
CAUTION!
For the safety of the operator, the 4UHV controller must be powered with a 3wire power cable connected to a plug approved at international level. Use
this cable and plug together with an adequately earthed socket so as to
prevent electrical shocks and satisfy the requirements of EC norms. The high
voltages that develop in the controller can provoke serious injuries or death.
After switching off the unit, residual energy is present inside the controller for
some time.
Wait approx. 1 minute to be sure that the residual energy has been
dissipated.
The controller can be used either as a desktop unit or as a rack module. In any
case it must be positioned in a way that the air can circulate freely through the
ventilation slots on the cover.
If the controller is used as a rack module, it MUST be inserted into a four-rack
high adapter to prevent it from falling inside the rack itself (see the table of
orderable parts). The 4UHV controller front panel is not designed to support the
weight of the unit.
Do not install or use the controller in an environment exposed to atmospheric
agents (rain, snow, ice), in the presence of dust, corrosive gases or in a highly
flammable or explosive environment.
Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A) 47/104
Instructions for Use
4
Installation
CAUTION!
NOTE
CAUTION!
The 4UHV controller belongs to the second installation category (or overvoltage)
as provided for in normative EN 61010-1. Therefore the device must be
connected to a power supply line satisfying the requirements for this category.
The 4UHV controller has connectors for inputs/outputs and for serial
communications that must be connected to the external circuits in such a way
that no powered part is accessible. Make sure that the insulation of the device
connected to the 4UHV controller provides an adequate insulation even in the
case of a single fault condition as stipulated in the EN 61010-1 normative.
If the controller is installed in a rack, remove its four feet and place it so as to
leave at least 30 mm (1.2 inches) of free space above and below.
In rare circumstances, a controller fault could result in the emission of smoke. If
the customer is using the controller in clean environments, they should take
adequate measures to avoid the environment being contaminated by any
eventual smoke.
The controller must be used in the following environmental
conditions:
Temperature: 0 °C to +40 °C
Relative humidity: 0 - 90% (non-condensing).
48/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
Usage
Instructions for Use
Usage
This section provides you with the major operating procedures. For
more information and for the procedures that concern connections
or specific options, refer to the section “USAGE” in the “Technical
Information” appendix. Before using the controller, perform all
electrical connections and refer to the manual of the connected
pump.
4
WARNING!
Switch on the high voltage channels only if they are connected to the ionic
pumps by means of the special purpose high voltage cables equipped with
interlock cable.
It is assumed that the controller will be used together with the high voltage
cable having a safety interlock.
4UHV
Figure 2 Ground Connections
Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A) 49/104
Instructions for Use
4
Usage
WARNING!
If an HV cable without interlock is to be used, the accessories bag contains a
specific kit of preassembled interlock leads. However, with this type of use,
the safety capability furnished using the interlock is lost.
Refer to the figure below for correct assembly of the interlock cable
furnished in the accessories bag in the case in which an HV cable
with interlock is not used.
Figure 3
NOTE
50/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
The cable interlock closes on pump ground. The high voltage is disabled if the
connection is interrupted.
The cable interlock closes on pump ground. The high voltage is
disabled if the connection is interrupted. To connect the controller to
the pump, use a HV cable with interlock (see parts that can be
ordered).
Correct connection of masses, of the HV cable between the controller
and pump and of the interlock cable is illustrated in the
“Connections” figure.
Instructions for Use
Usage
4
CAUTION!
When using the interlock cable furnished in the accessories bag, make sure that
no parts drop accidentally inside the controller.
Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A) 51/104
Instructions for Use
4
Usage
Powering On the Controller from the Front Panel (LOCAL Mode)
NOTE
To switch on the High Voltage (HV), the interlock of the HV cable (cable
interlock) must be closed (connector inserted).
Proceed as follows to power the controller and apply voltage to the
high voltage (HV) connectors:
Switch off the controller.
Connect the HV cable and the interlock of the HV cable in the
related connectors on the rear panel.
Select LOCAL mode, briefly pressing the “MODE” key until
LOCAL is shown on the display.
Hold down the HV ON/OFF button (2) while pressing the HV-x
(3,4,5,6) button where x is the number of the channel to be
switched on/off.
(2)
(1) (3) (4)
Figure 4 Front Panel 4UHV Ion Pump Controller
52/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
(5)
(6)
Instructions for Use
4
Usage
Figure 5 Rear Panel 4UHV Ion Pump Controller
To switch off the HV channels:
Hold down the HV ON/OFF (2) button while pressing the HV-x
(3,4,5,6) button where x is the number of the channel to be
switched on/off.
For further details on using the controller and for a description of the
information appearing on the display, refer to the section “Technical
Information”.
WARNING!
In situations of emergency, to switch off the unit and all the high voltage
channels, turn off the main power switch (1) situated on the front panel.
When the main switch is turned off, the HV unit is switched off.
Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A) 53/104
Instructions for Use
4
Maintenance
Maintenance
The 4UHV controller does not require any maintenance. Any form of
servicing on the unit must be performed by authorized personnel.
If servicing is needed, contact Agilent Technical Support or subscribe
to the “Agilent Advanced Exchange Service” where the faulty
controller is replaced by a refurbished one.
If the controller needs to be scraped, proceed to do so in compliance
with the specific national norms.
Disposal
Meaning of the "WEEE" logo found in labels
The following symbol is applied in accordance with the EC WEEE
(Waste Electrical and Electronic Equipment) Directive.
This symbol (valid only in countries of the European Community)
indicates that the product it applies to must NOT be disposed of
together with ordinary domestic or industrial waste but must be sent
to a differentiated waste collection system.
The end user is therefore invited to contact the supplier of the device,
whether the Parent Company or a retailer, to initiate the collection
and disposal process after checking the contractual terms and
conditions of sale.
54/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
Agilent 4UHV Ion Pump Controller User Manual
5 Technical Information
4UHV Controller Description 57
Specifications 59
Controller Outline 60
Front Panel Description 61
Keys 61
Rear Panel Description 63
Operating Mode 65
Selecting “Operating Mode” from Front Panel 65
Selecting “Operating Mode” via Serial 66
Start-Up 67
Connection of Input remote 72
Serial 73
Connector Examples 74
Window Protocol 74
Error Description 84
Error Code 84
Old Serial Protocol (“Binary Pr
Original Instructions
otocol”) 87
55/104
Technical Information
5
Display and Menus 91
Displaying Channel-Related Inf
Commands 93
Menu 94
Orderable Parts 98
ormation 74
56/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
4UHV Controller Description
The 4UHV controller is a power supply for ion pumps. It supplies a
high voltage on output, selectable as 3kV, 5kV or 7kV, and measures
the output current.
The controller has the following features:
Front panel with keypad and a 4-row display (4x20, 146 x 62
mm) for displaying the operating values (voltage, current,
pressure)
Remote I/O card with DB37 connector
RS232 and RS485 serial communications.
Technical Information
4UHV Controller Description
5
Figure 6 4 UHV Controllers
The controller contains one or two high voltage modules.
Each high voltage module can have one 200 W channel or one 120 W
channel or two 80 W channels.
Some examples of how HV channels can be configured are given
below (for details see the Orderable Parts table):
Four independent channels with a maximum of 80 W power per
channel
Two independent channels with a maximum of 200 W power per
channel
Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A) 57/104
Technical Information
5
4UHV Controller Description
One 200 W channel and two 80W channels.
One 120 W channel
The 4UHV controller can be operated in the modes: LOCAL, SERIAL
or REMOTE.
58/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
Specifications
Table 1 Specifications
Component Description
Input Voltage 100 - 240 Vac (+/-10%)
Input Frequency 50/60 Hz
Input Power 600 VA
Output HV Voltage +/- 7000 Vdc +/- 5%
Output HV Short
circuit current
Output HV Power
max
Operating
temperature
Storage
temperature
Fuse 5x20 T6.3A 250V
Voltage
measurement
Current
measurement
Weight 6.5 kg
Compliance with: EN 61010-1 2001: Safety requirements for electrical
Technical Information
Specifications
40 mA (for 80W channels) 100 mA (for 200 W channels)
200 W or 80 W each channel
0 °C to 40 °C
-20 °C to +70 °C
Resolution 100 V
Accuracy: +/- 5%
Measurement range: 10 nA to 100 mA, logarithmic scale
Resolution : 2 digit of the mantissa (maximum 10 nA)
Accuracy: +/- 6%
equipment for measurement control and laboratory use.
EN 61326-1 2006: Electrical equipment for measurement
control and laboratory use EMC requirements
5
Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A) 59/104
Technical Information
5
Specifications
Controller Outline
8000
7000
6000
5000
4000
Voltage (V)
3000
2000
1000
0
020406080100120
Output curve (200W) Output curve (80W)
Current (mA)
Figure 7 Output voltage vs Output current
The outline dimensions for the 4UHV controller are shown in the
following figures:
Figure 8 Controller Model Dimensions
Front View
211.40
141.20
177.00
164.30
Rear View
60/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
Technical Information
5
Specifications
Front Panel Description
Figure 9 Front Panel
Keys
Table 2 Keys
Main Power This is the main switch for switching on and off the controller.
HV-ON/OFF To switch a high voltage channel on or off, keep the HV-ON/OFF key
pressed while you press the HV-x key, where x is the number of the
channel you want to switch on or off.
Fixed/Step To change the output voltage choosing between: 7kV, 5kV, 3kV, Step-Mode
and Fixed-Mode, keep the Fixed/Step key pressed while you press the HV-x
key, where x is the number of the channel for which you want to change
the output voltage.
The output voltage will change cyclically between “STEP, 7kV, 5kV, 3kV”.
Protect To activate or disactivate Protect mode, keep the Protect key pressed while
you press the HV-x key, where x is the number of channel for which you
want to activate or disactivate the “Protect” functionality.
Mode By pressing this key briefly (< 2 sec), the ”operating mode” changes
cyclically between: Serial, Front, Remote. You exit from this display
automatically after 5 seconds. By keeping this key pressed for a long time
(> 2 sec), you enter the menu. To exit from the menu, press the Mode key
again for a long time.
Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A) 61/104
Technical Information
5
Specifications
Graphic Signals
Four black squares are present for each channel indicating,
respectively, the 4 states of the channel. The meaning of the 4
indicators is the following:
1. HV-x Square lit (black)= HV on
Square not lit = HV off
Square flashing = Error
2. Protect-x Square lit (black)= Protect on
Square not lit = Protect off
Square flashing = Protect error
3. SP-x Square lit (black)= Set-point activate
Square not lit = Set-point not active
4. Step-x Square lit (black)= Step
Square not lit = Fixed
62/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
Technical Information
5
Specifications
Rear Panel Description
HV Connectors
Interlock
connector
Fuses
Serial
Port
Remote I/O
Figure 10 Rear Panel
The following are present on the rear panel:
The HV connectors ( 1, 2, 3 or 4 according to model)
The interlock connectors associated to each channel
The fuses
The DB9 connector for RS232 and RS485 serial communication
The DB37 connector for Remote I/O signals.
Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A) 63/104
Technical Information
5
Specifications
Fuse Holder
The following figure shows the location of this assembly.
Figure 11 Rear Panel
Proceed as follows to replace one or both fuses:
1 Disconnect the mains cable
2 Waiting for 15 second
3 Remove the fuse with a small screwdriver
4 Replace the fuse
5 Use only 5x20 T6.3A 250V fuses
64/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
Operating Mode
The controller 4UHV for ion pumps can be operated in three different
modes:
Local
Serial
Remote.
The commands sent to the controller (for example, HVON/OFF,
Target voltage etc) can only be given in the mode chosen, while the
data (for example, current, pressure, voltage etc…) can be read in all
the modes.
E.g.: If you select Local mode, the HV channels can only be switched
on via the keys on the Front Panel, but the current supplied can be
read via the Front Panel, Serial and Remote.
Change from one mode to the next can be done either via the Front
Panel or a serial command.
Technical Information
Operating Mode
5
NOTE
Change from one mode to another can be done with the high voltage switched
on. However, the channels switch off if Remote mode is selected but no
commands for switching on are present on the remote connector.
Selecting “Operating Mode” from Front Panel
To display the current mode, press the Mode key briefly (less than 2
seconds).
To change mode, press the Mode key again. The three modes will be
displayed in a cyclic fashion: Local, Serial, Remote.
After selecting the required mode, wait approximately 5 seconds to
return to the previous screen.
Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A) 65/104
Technical Information
5
Operating Mode
Selecting “Operating Mode” via Serial
Using serial communications via the protocol “WIN protocol” (see
chapter: SERIAL – Window Protocol), write the chosen value in
window 8:
Table 3 Keys
Value Description
0 Serial
1 Remote
2 Local
66/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
Start-Up
Technical Information
Start-Up
This chapter explains how to switch on and off the unit and the high
voltage channels. In the following chapters, all the functions of the
controller are explained in detail.
1 Put the main power switch situated on the front panel to OFF
2 Insert the power cable into the correct connector on the rear
panel
3 Connect the HV cables to the controller and to the ion pumps
4 Make sure that “Interlock” of HV cable is connected
5 To switch on the unit, put the main power switch to ON
6 Select Local for the Operating mode
7 Press the keys HV-ON/OFF keys and HV-x, where x is the number
of the channel you want to switch on.
Key HV-ON/OFF
5
Figure 12 Front Panel
Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A) 67/104
Main power switch
Keys HV-x
Technical Information
5
Start-Up
Table 4
Component Description
Remote I/O Signal Listing
Pin 4 +24V +/- 10%, max. current 60mA
Pin 5 Reserved
Fault A unique fault relay for all channels and for all
Pin 12 NC Fault Relay
Pin 13 NO Fault Relay
Pin 31 Common Fault Relay
Channel 1
Input
Pin 6 CH1 on/off
Pin 7 CH1 protect
Pin 8 CH1 step
Pin 22 Digital Gnd
Analog Output
Pin 1 Analog 1
Pin 3 Analog Gnd
Digital Output
Pin 17 CH1 NC Set-point Relay
Pin 18 CH1 (Common) Relay
Pin 19 CH1 NO Set-point Relay
Channel 2
Input
Pin 9 CH2 on/off
Pin 10 CH2 protect
Pin 11 CH2 step
Pin 22 Digital Gnd
Analog Output
Pin 2 Analog 2
Pin 3 Analog Gnd
errors.
68/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
Technical Information
5
Start-Up
Digital Output
Pin 14 CH2 NC Set-point Relay
Pin 15 CH2 (Common) Relay
Pin 16 CH2 NO Set-point Relay
Channel 3
Input
Pin 23 CH3 on/off
Pin 24 CH3 protect
Pin 25 CH3 step
Pin 22 Digital Gnd
Analog Output
Pin 20 Analog 3
Pin 3 Analog Gnd
Digital Output
Pin 35 CH3 NC Set-point Relay
Pin 36 CH3 (Common) Relay
Pin 37 CH3 NO Set-point Relay
Channel 4
Input
Pin 26 CH4 on/off
Pin 27 CH4 protect
Pin 28 CH4 step
Pin 22 Digital Gnd
Analog Output
Pin 21 Analog 4
Pin 3 Analog Gnd
Digital Output
Pin 32 CH4 NC Set-point Relay
Pin 33 CH4 (Common) Relay
Pin 34 CH4 NO Set-point Relay
Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A) 69/104
Technical Information
A
5
Start-Up
Figure 13 Recorder Output Pressure
nalog remote vs Pressure
5.0
4.0
Analog remote (Volt)
3.0
2.0
1.3E-12 kPa
1.0
0.0
1.0E-12 1.0E-11
1.0E-10 1.0E-09 1.0E-08 1.0E-07 1.0E-06 1.0E-05
Pressure (kPa)
1.3E-6 kPa
Figure 14 Analog remote vs Pressure (kPa)
70/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
Technical Information
4
5
Start-Up
Analog remote vs Pressure
5.0
4.0
3.0
2.0
Ana log remote (V olt)
1.0
1.3E-11 mbar
0.0
1.0E-11 1.0E-10 1.0E-09 1.0E-08 1.0E-07 1.0E-06 1.0E-05 1.0E-0
Pressure (mbar)
Figure 15 Analog remote vs Pressure (mbar)
1.3E-5 mbar
Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A) 71/104
Technical Information
5
Start-Up
Connection of Input remote
In order to activate the inputs remote (CH on/off, Ch protect, CH
Step) connect the pins as following:
+24V
A
Controller
Figure 16 Input
72/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
Customer
device’s
Serial
Technical Information
Serial
The following figure shows the 4UHV interconnections.
Figure 17 4UHV interconnections
This is a 9-pin D-type serial input/output connector that allows the
4UHV to be controlled via an RS232 or RS485 connection.
Table 5
PIN No. Signal Name
1 +5 V (OUT)
2 TX (RS232)
3 RX (RS232)
4 Reserved
5 GND
6 A + (RS485)
7 Reserved
8 B - (RS485)
9 Reserved
5
Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A) 73/104
Technical Information
5
Serial
Connector Examples
5
2
PC
3
Figure 18 RS–232 Connection
Ion controller 1
Ion controller 2
Figure 19 RS–485 Connection
5
2
3
Cont ro ll er
4UHV
Window Protocol
Both RS232 and the RS485 interfaces are available on the 9-pin Dtype serial input/output connector. The communications protocol is
the same (see the structure below), but only the RS485 handles the
address field. Therefore, to enable the RS485, you need to select both
the type of communication and the device address using the front
panel menu or the Navigator software.
74/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
Technical Information
5
Serial
The Window Protocol is the same of the Turbo Pump, but the
meaning of the Window is different (see the below chapter: Windows
Description).
Communications Format
8 data bit
No parity
1 stop bit
Baud rate: 9600
Communications Protocol
The communications protocol is of MASTER/ SLAVE type, where:
Host = MASTER
Controller = SLAVE
The communication takes place as follows:
1 The host (MASTER) sends a MESSAGE + CRC to the controller
(SLAVE)
2 The controller answers with an ANSWER + CRC to the host.
3 The MESSAGE is a string in the following format:
4 <STX>+<ADDR>+<WIN>+<COM>+<DATA>+<ETX>+<CRC>
NOTE
When data is indicated between two quotes (‘...’), it implies that the data
indicated is the corresponding ASCII character.
Where:
<STX> (Start of transmission) = 0x02
<ADDR> (Unit address) = 0x80 (for RS232)
<ADDR> (Unit address) = 0x80 + device number (0 to 31) (for
RS485)
<WIN> (Window) = a string of 3 numerics indicating the window
number (from ‘000’ to ‘999’); for the meaning of each window, see
the relevant paragraph.
Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A) 75/104
Technical Information
5
Serial
<COM> (Command) = 0x30 to read the window, 0x31 to write in
the window
<DATA> = an alphanumeric ASCII string with the data to be
written in the window. In the case of a read command, this field
is not present. The field length varies according to the data type,
as shown in the following table:
76/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
Technical Information
5
Serial
Table 6
Data Type Field Length Valid Characters
Logic (L) 1 ‘0’ = OFF
‘1’ = ON
Numeric (N) 6 ‘-‘, ‘.’, ‘0’ . . . ‘9’ right justified with ‘0’
Alphanumeric (A) 10 From blank to ‘_’ (ASCII)
<ETX> (End of transmission) = 0x03
<CRC> = XOR of all characters following <STX> and including the
<ETX> terminator. The value is hexadecimal coded and
represented by two ASCII characters.
The SLAVE addressed responds with an ANSWER whose structure
depends on the MESSAGE type.
When the MESSAGE is a read command, the SLAVE responds
transmitting a string with the same structure as the MESSAGE.
NOTE
Using the RS485 interface, the message structure is identical to that used for
the RS232 interface, the only difference being the value assigned to the
ADDRESS <ADDR>.
Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A) 77/104
Technical Information
5
Serial
The controller can reply with the following types of response:
Table 7
Type Length Value Description
Logic - After a read instruction of a logic window.
Numeric 6 bytes - After a read instruction of a numeric window.
Alphanumeric 10 bytes - After a read instruction of a alphanumeric window.
ACK 1 byte (0x6) Execution of the command has been successful.
NACK 1 byte (0x15) Execution of the command has failed.
Unknown Window 1 byte (0x32) The window specified in the command is not a valid window.
Data Type Error 1 byte (0x33) The data type specified in the command (Logic, Numeric or
Alphanumeric) is not in agreement with the Window
specified.
Out of Range The value expressed during a write command is not within
the range value for the specified window.
Win Disabled 1 byte (0x35) The window specified is Read Only or is temporarily disabled.
Table 8 Windows Description
WIN R/W Type Description Range
11 R/W L HV ON/OFF
CH1
12 R/W L HV ON/OFF
CH2
13 R/W L HV ON/OFF
CH3
14 R/W L HV ON/OFF CH4 0 = OFF(def) ; 1=ON
108 R/W N Baud rate (1-4) [1200-2400-4200-9600]
205 R N Status
206 R N Error code
319 R/W Controller Model
323 R/W Controller Serial number
503 R/W N RS485 Serial Address [0-31]; 1=def
504 R/W L Serial Type Select 0= RS232(def) ;
0 = OFF(def) ; 1=ON
0 = OFF(def) ; 1=ON
0 = OFF(def) ; 1=ON
78/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
Technical Information
Serial
WIN R/W Type Description Range
1= RS485
505 R/W N Channel Selection (see below)
600 R/W N Unità di misura
Pressione
601 R/W A Operating Mode (see below)
602 R/W A Protect (see below)
603 R/W A Fixed/Step (see below)
610 R/W N Device Number CH1 (see below)
612 R/W N Power max CH1 20 W – 80 W
613 R/W N V target CH1 [3000,7000] V
614 R/W N I protect CH1 [1,100] step 1 mA
615 R/W A Set Point CH1 [X.XE-XX]
620 R/W N Device Number CH1 (see below)
622 R/W N Power max CH2 20 W – 80 W
623 R/W N V target CH2 [3000,7000] V
624 R/W N I protect CH2 [1,100] step 1 mA
625 R/W A Set Point CH2 [X.XE-XX]
630 R/W N Device Number CH3 (see below)
632 R/W N Power max CH3 20 W – 80 W
633 R/W N V target CH3 [3000,7000] V
634 R/W N I protect CH3 [1,100] step 1 mA
635 R/W A Set Point CH3 [X.XE-XX]
640 R/W N Device Number CH4 (see below)
642 R/W N Power max CH4 20 W – 80 W
643 R/W N V target CH4 [3000,7000] V
0 = Torr ;
1=mBar (def) ;
2=Pa
step 1000;
def=7000
step 1000;
def=7000
step 1000;
def=7000
5
Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A) 79/104
Technical Information
5
Serial
WIN R/W Type Description Range
step 1000;
def=7000
644 R/W N I protect CH4 [1,100] step 1 mA
645 R/W A Set Point CH4 [X.XE-XX]
800 R N Temperature
FAN
801 R N Temperature
HV1
802 R N Temperature
HV2
803 R A Interlock Status (see below)
804 R A Status Set Point (see below)
808 R N Temperature
HV3
809 R N Temperature
HV4
810 R N V measured CH1 [0, 7000] V ;
811 R A I measured CH1 [1E-10, 9E-1] A
812 R N Pressure CH1 [X.XE-XX]
820 R N V measured CH2 [0, 10000] V ;
821 R A I measured CH2 [1E-10, 9E-1] A
822 R N Pressure CH2 [X.XE-XX]
830 R N V measured CH3 [0, 10000] V ;
831 R A I measured CH3 [1E-10, 9E-1] A
832 R N Pressure CH3 [X.XE-XX]
840 R N V measured CH4 [0, 10000] V ;
841 R A I measured CH4 [1E-10, 9E-1] A
842 R N Pressure CH4 [X.XE-XX]
[0, 200] °C
[0, 200] °C
[0, 200] °C
[0, 200] °C
[0, 200] °C
step 100 V
step 100 V
step 100 V
step 100 V
80/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
Technical Information
5
Serial
Example:
Turn ON Channel 1
PC
´ Controller
02 80 30 31 31 31 31 03 42 33
STX ADDR WINDOW WR DATA ETX CRC
Controller ´ PC
02 80 06 03 38 33
STX ADDR ACK ETX CRC
Turn OFF Channel 1
PC
´ Controller
02 80 30 31 31 31 30 03 42 32
STX ADDR WINDOW WR DATA ETX CRC
Controller ´ PC
02 80 06 03 38 35
STX ADDR ACK ETX CRC
Read Pressure (win 812) Channel 1
PC
´ Controller
02 80 38 31 32 30 03 38 38
STX ADDR WINDOW RD ETX CRC
Controller ´ PC
02 80 38 31 32 30 20 20 20 31 2E 35 45 2D 30 38 03 45 32
STX ADDR WINDOW WR DATA ETX CRC
Data=1.5E-8
Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A) 81/104
Technical Information
5
Serial
Read Voltage (win 810) Channel 1
´Controller
PC
02 80 38 31 30 30 03 38 41
STX ADDR WINDOW RD ETX CRC
Controller ´ PC
02 80 38 31 32 30 30 30 33 30 30 30 03 38 39
STX ADDR WINDOW WR DATA ETX CRC
Data=3000
Read Current (win 811) Channel 1
PC
´ Controller
02 80 38 31 31 30 03 38 42
STX ADDR WINDOW RD ETX CRC
Controller ´ PC
02 80 38 31 31 30 20 20 20 32 2E 39 45 2D 30 35 03 45 33
STX ADDR WINDOW WR DATA ETX CRC
Data=2.9E-5
Operating mode (Win 601)
Autostart ON
PC
´Controller
02 80 36 30 31 30 30 30 30 30 30 30 30 30 30 31 03 38 34
STX ADDR WINDOW WR DATA ETX CRC
Controller ´ PC
02 80 06 03 38 35
STX ADDR ACK ETX CRC
Autostart OFF
PC
´ Controller
02 80 36 30 31 31 30 30 30 30 30 30 30 30 30 30 03 38 35
STX ADDR WINDOW WR DATA ETX CRC
82/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
Technical Information
5
Serial
Controller
02 80 06 03 38 35
STX ADDR ACK ETX CRC
´ PC
Protect (Win 602)
PC
´ Controller
02 80 36 30 32 30 03 38 37
STX ADDR WINDOW RD ETX CRC
Controller ´ PC
02 80 36 30 32 30 30 30 30 30 30 30 30 31 30 30 03 38 36
STX ADDR WINDOW WR DATA ETX CRC
Fixed/Step (603)
PC
´ Controller
02 80 36 30 33 30 03 38 36
STX ADDR WINDOW RD ETX CRC
Controller ´ PC
02 80 36 30 33 30 30 30 30 30 30 30 30 30 30 31 03 38 37
STX ADDR WINDOW WR DATA ETX CRC
Status Set Point (804)
PC
´ Controller
02 80 38 30 34 30 03 38 46
STX ADDR WINDOW RD ETX CRC
Controller ´ PC
02 80 38 30 34 30 30 30 30 30 30 30 30 30 30 31 03 38 45
STX ADDR WINDOW WR DATA ETX CRC
Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A) 83/104
Technical Information
5
Serial
Error Description
Controller errors can be displayed in two windows:
WIN 505 where the user writes the channel whose error is to be
viewed
WIN 206 where the controller shows the error code of the
channel written in window 505.
If the value 0 is written in window 505, the errors of all the channels
remain displayed in window 206.
Table 9
WIN 505 value Channel
0 All channels
1
2
3
4
Channel 1
Channel 2
Channel 3
Channel 4
Error Code
The error code is displayed in decimal format. Binary representation
of this number provides indications regarding the type of error that
has occurred.
The error table is shown below:
Table 10
Error code in decimal
format
0 0000000000000 No error
1 0000000000001 FAN error
2 0000000000010 Power input error from HV
4 0000000000100 Power input error from PFC
8 0000000001000 Overtemp PFC
16 0000000010000 Error communication CPU-HV
84/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
Binary Description
Technical Information
5
Serial
Error code in decimal
format
32 0000000100000 Interlock cable
64 0000001000000 Overtemp HV
128 0000010000000 Protect
256 0000100000000 Measurement error
512 0001000000000 HV out error
1024 0010000000000 Short circuit
2048 0100000000000 HV disabled
Binary Description
Example:
Interlock cable
Error code: 32 (decimal)
´ 0000000010000 ( binary) ´Interlock
cable error
Interlock cable + Overtemp HV
Error code: 96 (decimal)
´ 0000000110000 ( binary) ´Interlock
cable error + Overtemp HV
Error code (Win 206)
Error interlock
02 80 32 30 36 30 03 38 37
STX ADDR WINDOW RD ETX CRC
02 80 32 30 36 30 30 30 30 30 33 32 03 38 36
STX ADDR WINDOW WR DATA ETX CRC
Channel selection (Win 505)
Read
02 80 35 30 35 30 03 38 33
STX ADDR WINDOW RD ETX CRC
02 80 35 30 35 30 30 30 30 30 30 30 03 38 33
STX ADDR WINDOW WR DATA ETX CRC
Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A) 85/104
Technical Information
5
Serial
Write 1
02 80 35 30 35 31 30 30 30 30 30 31 03 38 33
STX ADDR WINDOW WR DATA ETX CRC
02 80 06 03 38 35
STX ADDR ACK ETX CRC
Error code (Win 206)
Interlock error:
02 80 32 30 36 30 03 38 37
STX ADDR WINDOW RD ETX CRC
02 80 32 30 36 30 30 30 30 30 33 32 03 38 36
STX ADDR WINDOW WR DATA ETX CRC
Channel selection (Win 505)
Write 2
02 80 35 30 35 31 30 30 30 30 30 32 03 38 30
STX ADDR WINDOW WR DATA ETX CRC
02 80 06 03 38 35
STX ADDR ACK ETX CRC
Error code (Win 206)
Interlock not present error because channel 2 has been selected:
02 80 32 30 36 30 03 38 37
STX ADDR WINDOW RD ETX CRC
02 80 32 30 36 30 30 30 30 30 30 30 03 38 37
STX ADDR WINDOW WR DATA ETX CRC
86/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
Technical Information
5
Serial
Old Serial Protocol (“Binary Protocol”)
The “Binary Protocol” serial protocol used by some old controllers is
no longer supported.
For new projects, Agilent advises that the new protocol “Window
protocol” be used. Nevertheless, for compatibility with the old
systems, some commands of the “Binary Dual” have been
implemented.
The 4UHV controller cannot implement all the commands of the Dual
but only a subset.
Communications Format
These protocols have the following formats:
Table 11
Type No. of
Bytes
Read 1 “?” (3Fh3) performs reads on the Splitter Box
Status 1 “0” (30h) = false = off,
Integer 5 “xxxxx” represented in BCD4 with 5 digits (always positive)
BitField 8 Like integer type, but meanings are associated with the single
Exponential 7 “x.xEsxx” where x is BCD digits, E is the 45h character and s is
String n Sequence of n characters included within the 20h and 7Fh range
3
The “h” notation following a number indicates that the number is
Description
“1” (31h) = true = on
bits of the number.
the (“+” or “-“ sign).
5
expressed in hexadecimal format.
4
BCD: The number is represented by digits included within the “0”
and “9” range (ASCII 30h - 39h).
5
Status can also assume values greater than “1”.
Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A) 87/104
Technical Information
5
Serial
The commands have a read and a write mode. By specifying the type
of read operation being performed, the Host queries the Splitter Box
that, in turn, replies in a format that is compliant with the command
sent. As long as a write operation can be carried out, the write and
read formats for the same command coincide.
Host to Dual controller command format:
[header command] [length] [command] [channel] [data] [checksum]
Dual controller to Host reply format:
[header response] [length] [command] [channel] [data] [checksum]
Table 12
Field No.
of
Bytes
Header
command
Header
response
Length 2 Data packet length in BCD (command, channel, data
Command See description of commands (byte 0 command, byte 1
Channel 1 30h
Data N See description of commands
Checksum 1 XOR of all bytes (checksum excluded) in and with 7Fh.
1 81h
01h
Value Description
Header for the RS232 and RS422 serial.
81h÷A0h
01h÷20h
31h
32h
33h
34h
Header and address for the RS485 (129 – 160) serial.
Header for the serial RS232, RS422.
Header and address for the RS485 serial.
fields only).
subcommand).
No channel
High Voltage 1
High Voltage 2
High Voltage 3
High Voltage 4
Command Listing
It is not possible to implement all the “Binary Dual” protocol
commands on the 4UHV controller. The commands that are
implemented on the 4UHV controller are the following:
88/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
Technical Information
5
Serial
Table 13
No. Description ASCII Hex
1 Local/remote Z0 5Ah 30h
3 HV-ON/OFF A0 41h 30h
4 Device number F0 46h 30h
5 Measurement unit D0 44h 30h
7 Protect C0 43h 30h
8 Fixed/Step B0 42h 30h
9 Power supply polarity G0 47h 30h
10 Max. power J0 4Ah 30h
11 Vmax H0 48h 30h
12 Iprotect K0 4Bh 30h
13 Set point P0 50h 30h
14 V meas. S0 53h 30h
15 I meas. T0 54h 30h
16 P meas. U0 55h 30h
17 Set-point status g0 67h 30h
18 Interlock status ]0 5Dh 30h
19 Error status z0 7Ah 30h
Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A) 89/104
Technical Information
5
Serial
Table 14 Interlock Status Coding
Bit Field Interlock Coding (active if 1)
01h HV3 Cable Interlock
02h Reserved
04h Reserved
08h HV1 Cable Interlock
10h HV4 Cable Interlock
20h Reserved
40h Reserved
80h HV2 Cable Interlock
Value Error Status Coding (active if 1)
33h Cable Interlock
36h Excess temperature
37h Power input error
38h FAN Error
39h Protect
31h 30h Short-circuit
31h 31h HV out error
31h 32h Zero Measurement
90/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
Display and Menus
Switching on the unit, the initial screen that appears is as follows:
Figure 20
Afterwards a screen of the following type appears, which displays for
each channel the name of the ion pump selected.
IA
V
UUAC
NOL OTECH
5- 5-40 Dio17 d
5
2
7
4X3XXXlXX
XX
-40S5- 5
XXX
XXX5XX
Technical Information
Display and Menus
NVAR
.M
ES
GI
tarC
lee
5
Figure 21
Displaying Channel-Related Information
The display can be configured easily to display different information,
depending on the needs of the customer.
Information on All Channels
The voltage on all the four channels can be displayed simultaneously,
or the current of all four channels, or the pressure.
To do this, press the “V/I/P” key; the following screens appear
cyclically.
Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A) 91/104
Technical Information
5
Display and Menus
Table 15
5- 5-4
5
XXX
2
7
3
4
XXX5XX
-40S5- 5 l
XXXX
XX
6 Press “V/I/P”
1
2 X . XE - bar
3
4
X.X
.XEX
-XXmb
XXm
X-X YYYY
t
XX
YX
d17 0 Dio
arC
arE
Y
Y-X YX.XE
e
el
5 Display the pump type for each
channel
7 Display the pressure for each channel
8 Press “V/I/P”
e
1-7000
2-7000
3+7000S
0+700 e4
St
V
Fi
tVep
VV St
p
x
p
10 Press “V/I/P”
1
4X.XE-XX
X.X
E
X.X -XX A2
XE- X A
AXE-X
XX.3
A
12 Press “V/I/P”
9 Display the voltage and operation
mode “Step Mode” – “Fixed mode” for
each channel
11 Display the current for each channel
92/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
Technical Information
5
Display and Menus
Information on a Single Channel
You can display all the information (voltage, current, pressure and
pump type) for each single pump. To do this, press the HV-x key,
where x corresponds to the channel to display:
Figure 22
In this case, the pump type, pressure, current and voltage of channel
3 are being displayed.
Commands
You can give the controller three types of commands:
Switch on/off channels
Activate/disactivate Protect mode
Change output voltage
Switching Channels On/Off
To switch a high voltage channel on or off, keep the HV-ON/OFF key
pressed while you press the HV-x key, where x is the number of the
channel you want to switch on or switch off.
-40 arS5-57
5
X.XE
3X.
+70 V
-
XE- X
00 S
elCt
l
X
X
X
a
mB r
A
pet
Activating /Disactivating Protect Mode
To activate or disactivate Protect mode, keep the Protect key pressed
while you press the HV-x key, where x is the number of channel for
which you want to activate or disactivate the “Protect” functionality.
Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A) 93/104
Technical Information
5
Display and Menus
Menu
Changing the Output Voltage
To change the output voltage choosing between 7KV, 5KV, 3KV, StepMode and Fixed-Mode, keep the Fixed Step key pressed while you
press the HV-x key, where x is the number of the channel for which
you want to change the output voltage.
The output voltage changes cyclically between “STEP 7 KV, 5 KV, 3
KV”.
Keeping the “Mode” key pressed for a long time (> 2 sec), you enter
the Menu. In the Menu, you can configure some parameters of the
controller. These configurable parameters can be divided into two
groups:
Controller general parameters
Specific parameters for each channel.
The general parameters of the controller are the following:
Pressure measurement unit: mbar, torr, pascal
Serial baud rate: 1200, 4800, 9600
Serial Type: RS232, RS485
RS485 Address: from 0 to 31
Auto start: Yes, No
Fan: Always on, switches on if the current descends below 1mA
Set Point: The set-point can be associated with the channels and
a value set
Analog output: Analog output is associated with the channels.
The specific parameters for each channel are the following:
Pump: Select the type of pump
I Protect: Set the Protect current
94/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
Technical Information
5
Display and Menus
Power max: Set the maximum power.
Scrolling Through the Menus
The 4UHV controller menu has a three-level structure.
To scroll through the menus, remaining on the same level, press
the keys “ ◄ “ “ ►”.
To go to submenu, press “Enter” in the transition menus.
To escape to go back, press “Esc” at any time.
In multiple-choice menus, the symbol “ ■ “ appears next to the
value currently in use and the value currently used will flash.
To change the value in each menu, press the key + or -. This
causes the symbol “ ■ “to move, but the old value continues to
flash.
To save the new value, you must press “Enter”. As you press
“Enter”, the new value is saved and starts to flash.
If it is not possible for all the choices to be displayed simultaneously,
the values will scroll across (the titles of the menus remain fixed).
Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A) 95/104
Technical Information
5
Display and Menus
First Level Second Level Third Level
OLNFI GURE
GENERCA
HV1
H■V2
Menu Screens
Examples of all the screens that appear in the Menu are provided
below.
Table 16 Menu Screens
G
Pr
ess
ure
mBa r
■ To r r
COSeNF I GEG- NERL
rial Baud Ra
1200
■ 4800
2RS2 3
5■ RS 4 8
CO -NGE
Ser AdFd
la
i
AL
RNF ICO E N EG-
A
te
ENNFIG - GCO
TSer i a l
ERA
eyp
ERN
r
L
LXXAIG
96/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
NERA-GECO N I GF
Aut o
tstar
SYE
O■ N
CO N F I G - G EN ERAL
Fan
T
HRESHOLD
■ ALWAYS ON
L
Technical Information
First Level Second Level Third Level
GE N E R A L - S E T PO INT
Hx
CX.XE-XXA
CO G U RNF EI
► HV3
HV1
HV2
Se t po i
■ SET POI NT A
S
ET P BOINT
GENntERCO G -NF I
AL
A
NERALGEON F I G -C
utog Onal
ALOG■ ANA
BLOGANA
HV
1
Pu
m
p
XXXXX
I Prot
HV1
XX meA
XXXXX
ct
Display and Menus
Se t Po i n t
▲
na Olo
A
gutA
CHx
5
A
TEAL-GE RNE
MORE
Po
w
HV1
XX
er Max
WX
Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A) 97/104
Technical Information
5
Orderable Parts
Orderable Parts
Part Description
Controllers
929-9010
929-9011
929-9020
929-9021
929-9100
929-9101
929-9200
929-9201
929-9400
929-9401
929-9210
929-9211
929-9022
929-9402
929-9212
929-9213
HV Cables
929-0705
929-0707
929-0708
929-0709
4UHV with 1 channel 200W Negative
4UHV with 1 channel 200W Positive
4UHV with 2 channels 200W Negative
4UHV with 2 channels 200W Positive
4UHV with 1 channel 120W Negative
4UHV with 1 channel 120W Positive
4UHV with 2 channels 80W Negative
4UHV with 2 channels 80W Positive
4UHV with 4 channels 80W Negative
4UHV with 4 channels 80W Positive
4UHV with 2 channels 80W Negative +
1 channel 200W Negative
4UHV with 2 channels 80W Positive +
1 channel 200W Positive
4UHV with 1 channel 200W Positive +
1 channel 200W Negative
4UHV with 2 channels 80W Positive +
2 channels 80W Negative
4UHV with 2 channels 80W Positive +
1 channel 200W Negative
4UHV with 2 channels 80W Negative +
1 channel 200W Positive
HV bakeable cable, radiation resistant, 4 meter
HV bakeable cable, radiation resistant, 7 meter
HV bakeable cable, radiation resistant, 10 meter
HV bakeable cable, radiation resistant, 20 meter
98/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
Loading...