KEYENCE FU-V User Manual
Note
Fixing nut
FU-V84 FU-V84L
Fixing nut
+0.1
–0
Atmosphere side Vacuum side
2 to 12 mm (when the lock nut and spring washer are used)
ø5.1
+0.1
–0
Rz1.6
2 to 16mm (when the lock nut and spring washer are not used)
Lock nut
Fixing nut
96M00696
Vacuum Fiber Unit
FU-V Series
Installation Manual
• The vacuum side fibers and the optical integrators are packed after being
cleaned with alcohol. Make sure that there is no oil or dust attached when
unpacking.
• After mounting on the vacuum chamber, bake before using. Make sure that
the baking temperature does not exceed the ambient temperature.
• Remove the atmosphere side fiber while baking.
• This unit uses glass components. Be careful not to drop the unit or subject it
to shock or heat resulting from rapid temperature change. When fastening a
nut, make sure the torque is within the prescribed values.
• When fastening a nut to the optical integrator, make sure the stress in the
bending direction is not applied to the optical integrator. When fastening the
fixing nut on the atmosphere side fiber, make sure not to fasten with the
fixing nut on the vacuum side fiber fixed.
CAUTION
• When mounting the lens attachment (F-V Series), make sure to use the
internal washer supplied with the lens attachment to prevent it from
becoming loose.
Mounting method
1 Make a 5.1 hole in the chamber (flange).
The degree of roughness for the atmosphere side must be 1.6Rz or more
(ISO4287-1997).
2 Attach the O-ring on the optical integrator and insert
it into the mounting hole from the atmosphere side.
O-ring
3 Insert the flat washer and spring washer from the
vacuum side and fix with the M5 nut.
Checking the Package Contents
Vacuum side fiber FU-V84/FU-V84L
350°C heat-resistant fiber unit - 2
M4 nut, spring washer, flat washer - 4 each
M5 nut, spring washer - 2 each
Optical integrator FU-VJ1
Optical integrator - 2
M5 nut, spring washer, flat washer, O-ring - 2 each
Tightening torque 0.5N·m or less
4 Attach the M5 nut and spring washer in this order on
the optical integrator to prevent the vacuum side fiber
unit from loosening.
7 mm or more of the threaded part of the optical integrator must remain.
Fixing nut
Lock nut
Spring washer
7 mm or more
5 Mount the vacuum side fiber unit and fix it using the
fixing nut supplied with the fiber.
Atmosphere side fiber FU-V7FN
70°C heat-resistant fiber unit - 2
Fiber cutter
Tightening torque 0.5N·m or less
6 Tighten the M5 nut attached in step 4 onto the fixing
A
nut to prevent the fiber unit from becoming loose.
Tightening torque 0.5N·m or less
7 Attach the tip of the vacuum side fiber unit using the
M4 nut, spring washer, and flat washer.
Tightening torque 0.8N·m or less
8 Attach the atmosphere side fiber unit to the optical
integrator using the fixing nut supplied with the fiber.
Fasten the fixing nut while fixing the portion A in the drawing below with a
wrench.
Tightening torque 0.5N·m or less
9 Attach the atmosphere side fiber to the amplifier.
Cut the atmosphere side fiber to the required length with the supplied fiber
cutter.
Warranties and Disclaimers
(1) KEYENCE warrants the Products to be free of defects in materials and workmanship for
a period of one (1) year from the date of shipment. If any models or samples were
shown to Buyer, such models or samples were used merely to illustrate the general type
and quality of the Products and not to represent that the Products would necessarily
conform to said models or samples. Any Products found to be defective must be shipped
to KEYENCE with all shipping costs paid by Buyer or offered to KEYENCE for inspection
and examination. Upon examination by KEYENCE, KEYENCE, at its sole option, will
refund the purchase price of, or repair or replace at no charge any Products found to be
defective. This warranty does not apply to any defects resulting from any action of Buyer,
including but not limited to improper installation, improper interfacing, improper repair,
unauthorized modification, misapplication and mishandling, such as exposure to
excessive current, heat, coldness, moisture, vibration or outdoors air. Components
which wear are not warranted.
(2) KEYENCE is pleased to offer suggestions on the use of its various Products. They are
only suggestions, and it is Buyer's responsibility to ascertain the fitness of the Products
for Buyer’s intended use. KEYENCE will not be responsible for any damages that may
result from the use of the Products.
(3) The Products and any samples ("Products/Samples") supplied to Buyer are not to be
used internally in humans, for human transportation, as safety devices or fail-safe
systems, unless their written specifications state otherwise. Should any Products/
Samples be used in such a manner or misused in any way, KEYENCE assumes no
responsibility, and additionally Buyer will indemnify KEYENCE and hold KEYENCE
harmless from any liability or damage whatsoever arising out of any misuse of the
Products/Samples.
(4) OTHER THAN AS STATED HEREIN, THE PRODUCTS/SAMPLES ARE PROVIDED
WITH NO OTHER WARRANTIES WHATSOEVER. ALL EXPRESS, IMPLIED, AND
STATUTORY WARRANTIES, INCLUDING, WITHOUT LIMITATION, THE
WARRANTIES OF MERCHANTABILITY, FITNESS FOR A PARTICULAR PURPOSE,
AND NON-INFRINGEMENT OF PROPRIETARY RIGHTS, ARE EXPRESSLY
DISCLAIMED.
IN NO EVENT SHALL KEYENCE AND ITS A FFILIATED ENTITIES BE LIABLE TO
ANY PERSON OR ENTITY FOR ANY DIRECT, INDIRECT, INCIDENTAL, PUNITIVE,
SPECIAL OR CONSEQUENTIAL DAMAGES (INCLUDING, WITHOUT LIMITATION,
ANY DAMAGES RESULTING FROM LOSS OF USE, BUSINESS INTERRUPTION,
LOSS OF INFORMATION, LOSS OR INACCURACY OF DATA, LOSS OF PROFITS,
LOSS OF SAVINGS, THE COST OF PROCUREMENT OF SUBSTITUTED GOODS,
SERVICES OR TECHNOLOGIES, OR FOR ANY MATTER ARISING OUT OF OR IN
CONNECTION WITH THE USE OR INABILITY TO USE THE PRODUCTS, EVEN IF
KEYENCE OR ONE OF ITS AFFILIATED ENTITIES WAS ADVISED OF A POSSIBLE
THIRD PARTY’S CLAIM FOR DAMAGES OR ANY OTHER CLAIM AGAINST BUYER.
In some jurisdictions, some of the foregoing warranty disclaimers or damage limitations
may not apply.
BUYER'S TRANSFER OBLIGATIONS:
If the Products/Samples purchased by Buyer are to be resold or delivered to a third
party, Buyer must provide such third party with a copy of this document, all
specifications, manuals, catalogs, leaflets and written information provided to Buyer
pertaining to the Products/Samples.
E 1110-2
Copyright (c) 2009 KEYENCE CORPORATION. All rights reserved.
00696E 1031-2 96M00696 Printed in Japan
Loading...