KEYENCE FU-V User Manual

Note

Fixing nut

FU-V84 FU-V84L

Fixing nut

+0.1 –0

Atmosphere side Vacuum side

2 to 12 mm (when the lock nut and spring washer are used)

ø5.1

+0.1 –0

Rz1.6

2 to 16mm (when the lock nut and spring washer are not used)

Lock nut

Fixing nut

96M00696

Vacuum Fiber Unit

FU-V Series

Installation Manual

• The vacuum side fibers and the optical integrators are packed after being cleaned with alcohol. Make sure that there is no oil or dust attached when unpacking.

• After mounting on the vacuum chamber, bake before using. Make sure that the baking temperature does not exceed the ambient temperature.

• Remove the atmosphere side fiber while baking.

• This unit uses glass components. Be careful not to drop the unit or subject it to shock or heat resulting from rapid temperature change. When fastening a nut, make sure the torque is within the prescribed values.

• When fastening a nut to the optical integrator, make sure the stress in the bending direction is not applied to the optical integrator. When fastening the fixing nut on the atmosphere side fiber, make sure not to fasten with the fixing nut on the vacuum side fiber fixed.

CAUTION

• When mounting the lens attachment (F-V Series), make sure to use the internal washer supplied with the lens attachment to prevent it from becoming loose.

Mounting method

1 Make a 5.1 hole in the chamber (flange).

The degree of roughness for the atmosphere side must be 1.6Rz or more (ISO4287-1997).

2 Attach the O-ring on the optical integrator and insert

it into the mounting hole from the atmosphere side.

O-ring

3 Insert the flat washer and spring washer from the

vacuum side and fix with the M5 nut.

Checking the Package Contents

 Vacuum side fiber FU-V84/FU-V84L

350°C heat-resistant fiber unit - 2

M4 nut, spring washer, flat washer - 4 each

M5 nut, spring washer - 2 each

 Optical integrator FU-VJ1

Optical integrator - 2

M5 nut, spring washer, flat washer, O-ring - 2 each

Tightening torque 0.5N·m or less

4 Attach the M5 nut and spring washer in this order on

the optical integrator to prevent the vacuum side fiber unit from loosening.

7 mm or more of the threaded part of the optical integrator must remain.

Fixing nut

Lock nut

Spring washer

7 mm or more

5 Mount the vacuum side fiber unit and fix it using the

fixing nut supplied with the fiber.

 Atmosphere side fiber FU-V7FN

70°C heat-resistant fiber unit - 2

Fiber cutter

Tightening torque 0.5N·m or less

6 Tighten the M5 nut attached in step 4 onto the fixing

nut to prevent the fiber unit from becoming loose.

Tightening torque 0.5N·m or less

7 Attach the tip of the vacuum side fiber unit using the

M4 nut, spring washer, and flat washer.

Tightening torque 0.8N·m or less

8 Attach the atmosphere side fiber unit to the optical

integrator using the fixing nut supplied with the fiber.

Fasten the fixing nut while fixing the portion A in the drawing below with a wrench.

Tightening torque 0.5N·m or less

9 Attach the atmosphere side fiber to the amplifier.

Cut the atmosphere side fiber to the required length with the supplied fiber cutter.

Warranties and Disclaimers

(1) KEYENCE warrants the Products to be free of defects in materials and workmanship for

a period of one (1) year from the date of shipment. If any models or samples were shown to Buyer, such models or samples were used merely to illustrate the general type and quality of the Products and not to represent that the Products would necessarily conform to said models or samples. Any Products found to be defective must be shipped to KEYENCE with all shipping costs paid by Buyer or offered to KEYENCE for inspection and examination. Upon examination by KEYENCE, KEYENCE, at its sole option, will refund the purchase price of, or repair or replace at no charge any Products found to be defective. This warranty does not apply to any defects resulting from any action of Buyer, including but not limited to improper installation, improper interfacing, improper repair, unauthorized modification, misapplication and mishandling, such as exposure to excessive current, heat, coldness, moisture, vibration or outdoors air. Components which wear are not warranted.

(2) KEYENCE is pleased to offer suggestions on the use of its various Products. They are

only suggestions, and it is Buyer's responsibility to ascertain the fitness of the Products for Buyer’s intended use. KEYENCE will not be responsible for any damages that may result from the use of the Products.

(3) The Products and any samples ("Products/Samples") supplied to Buyer are not to be

used internally in humans, for human transportation, as safety devices or fail-safe systems, unless their written specifications state otherwise. Should any Products/ Samples be used in such a manner or misused in any way, KEYENCE assumes no responsibility, and additionally Buyer will indemnify KEYENCE and hold KEYENCE harmless from any liability or damage whatsoever arising out of any misuse of the Products/Samples.

(4) OTHER THAN AS STATED HEREIN, THE PRODUCTS/SAMPLES ARE PROVIDED

WITH NO OTHER WARRANTIES WHATSOEVER. ALL EXPRESS, IMPLIED, AND STATUTORY WARRANTIES, INCLUDING, WITHOUT LIMITATION, THE WARRANTIES OF MERCHANTABILITY, FITNESS FOR A PARTICULAR PURPOSE, AND NON-INFRINGEMENT OF PROPRIETARY RIGHTS, ARE EXPRESSLY DISCLAIMED. IN NO EVENT SHALL KEYENCE AND ITS A FFILIATED ENTITIES BE LIABLE TO ANY PERSON OR ENTITY FOR ANY DIRECT, INDIRECT, INCIDENTAL, PUNITIVE, SPECIAL OR CONSEQUENTIAL DAMAGES (INCLUDING, WITHOUT LIMITATION, ANY DAMAGES RESULTING FROM LOSS OF USE, BUSINESS INTERRUPTION, LOSS OF INFORMATION, LOSS OR INACCURACY OF DATA, LOSS OF PROFITS, LOSS OF SAVINGS, THE COST OF PROCUREMENT OF SUBSTITUTED GOODS, SERVICES OR TECHNOLOGIES, OR FOR ANY MATTER ARISING OUT OF OR IN CONNECTION WITH THE USE OR INABILITY TO USE THE PRODUCTS, EVEN IF KEYENCE OR ONE OF ITS AFFILIATED ENTITIES WAS ADVISED OF A POSSIBLE THIRD PARTY’S CLAIM FOR DAMAGES OR ANY OTHER CLAIM AGAINST BUYER.

In some jurisdictions, some of the foregoing warranty disclaimers or damage limitations may not apply.

BUYER'S TRANSFER OBLIGATIONS:

If the Products/Samples purchased by Buyer are to be resold or delivered to a third party, Buyer must provide such third party with a copy of this document, all specifications, manuals, catalogs, leaflets and written information provided to Buyer pertaining to the Products/Samples.

E 1110-2

00696E 1031-2 96M00696 Printed in Japan