INFICON MPG40x User Manual

Operating Manual

Inverted Magnetron Pirani Gauge

MPG400 MPG401

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Product Identification

In all communications with INFICON, please specify the information given on the product nameplate. For convenient reference copy that information into the space provided below:

INFICON AG, LI-9496 Balzers

Model: PN: SN: V W

Validity

Intended Use

Functional Principle

This document applies to products with part number:

MPG400 (FPM sealed) MPG401 (all-metal)

351-010 (DN 25 ISO-KF) 351-020 (DN 25 ISO-KF)

351-011 (DN 40 ISO-KF) 351-021 (DN 40 ISO-KF)

351-012 (DN 40 CF-C) 351-022 (DN 40 CF-C)

The part number (PN) can be taken from the product nameplate.

If not indicated otherwise in the legends, the illustrations in this document correspond to the product with part number 351-010. They apply to the other products by analogy.

We reserve the right to make technical changes without prior notice.

All dimensions in mm.

The Inverted Magnetron Pirani Gauges MPG400 und MPG401 has been designed for vacuum measurement in the pressure range of 5×10

-9

… 1000 mbar.

The Inverted Magnetron Pirani Gauges must not be used for measuring flammable or combustible gases which react in air.

The gauges can be used with the Single-Channel Controller VGC401, the Two-Channel Controller VGC402 and the Three-Channel Controller VGC403 or with another evaluation unit.

Over the whole measuring range, the measuring signal is output as a logarithm of the pressure.

The gauge consists of two separate measuring systems (the Pirani and the cold cathode system according to the inverted magnetron principle). They are combined in such a way that for the user, they behave like one measuring system

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Contents

Product Identification 2 Validity 2 Intended Use 2 Functional Principle 2

Safety 4

1.1 Symbols Used 4

1.2 Personnel Qualifications 4

1.3 General Safety Instructions 4

1.4 Liability and Warranty 5

2 Technical Data 6

3 Installation 9

3.1 Vacuum Connection 9

3.1.1 Removing the Magnet Unit (Only for Gauges With CF Flanges) 11

3.2 Electrical Connection 12

3.2.1 Use With an INFICON Controller 12

3.2.2 Use With Another Control Device 12

4 Operation 13

4.1 Measurement Principle, Measuring Behavior 13

5 Deinstallation 15

6 Maintenance 16

6.1 Adjusting the Gauge 16

6.2 Cleaning MPG400, Replacing Parts 18

6.2.1 Disassembling MPG400 18

6.2.2 Cleaning MPG400 19

6.2.3 Reassembling MPG400 20

6.3 Cleaning MPG401, Replacing Parts 21

6.3.1 Disassembling MPG401 22

6.3.2 Cleaning MPG401 23

6.3.3 Reassembling MPG401 24

6.4 Troubleshooting 25

7 Accessories 26

8 Spare Parts 26

9 Returning the Product 28

10 Disposal 28

Appendix 29

A: Measuring Signal vs. Pressure 29 B: Gas Type Dependence 30

Declaration of Contamination 32

For cross-references within this document, the symbol (→  XY) is used.

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1 Safety

1.1 Symbols Used

DANGER

Information on preventing any kind of physical injury.

WARNING

Information on preventing extensive equipment and environmental damage.

1.2 Personnel Qualifications

1.3 General Safety Instructions

Caution

Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage.

Skilled personnel

All work described in this document may only be carried out by persons who have suitable technical training and the necessary experience or who have been instructed by the end-user of the product.

• Adhere to the applicable regulations and take the necessary precautions for the process media used.

Consider possible reactions between the materials (→  7) and the process media.

Consider possible reactions (e.g. explosion) of the process media due to the heat generated by the product.

• Adhere to the applicable regulations and take the necessary precautions for all work you are going to do and consider the safety instructions in this document.

• Before beginning to work, find out whether any vacuum components are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.

DANGER

DANGER: magnetic fields

Strong magnetic fields can disturb electronic devices like heart pacemakers or impair their function.

Maintain a safety distance of ≥10 cm between the magnet and the heart pacemaker or prevent the influence of strong magnetic fields by

Communicate the safety instructions to all other users.

antimagnetic shielding.

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1.4 Liability and Warranty

INFICON assumes no liability and the warranty becomes null and void if the enduser or third parties

• disregard the information in this document

• use the product in a non-conforming manner

• make any kind of interventions (modifications, alterations etc.) on the product

• use the product with accessories not listed in the corresponding product

documentation.

The end-user assumes the responsibility in conjunction with the process media used.

Gauge failures due to contamination, as well as expendable parts (filament), are not covered by the warranty.

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2 Technical Data

Measuring range (air, N2) 5×10-9 … 1000 mbar

Accuracy (N2)

Reproducibility

Gas type dependence

≈±30% in the range 1×10

≈±5% in the range 1×10

→ Appendix B

-8

… 100 mbar

-8

… 100 mbar

Output signal (measuring signal)

Voltage range 0 … +10.5 V

Measuring range 1.82 … 8.6 V

Voltage vs. pressure logarithmic, 0.6 V / decade

(→ Appendix )

Error signal <0.5 V no supply

>9.5 V Pirani measurement element defective (filament rupture)

Output impedance

Minimum loaded impedance

2×10 Ω

10 kΩ, short-circuit proof

Response time (pressure dependent)

-6

p > 10 p = 10

mbar

-8

mbar

<10 ms ≈1000 ms

Gauge identification

85 kΩ referenced to supply common

Status Pin 6

-2

p > 10 Pirani-only mode

p < 10 Cold cathode not ignited

mbar

-2

mbar

Low = 0 V

Pirani-only mode

-2

p < 10 Cold cathode ignited

mbar

High = 15 … 30 VDC

Combined Pirani / cold cathode mode

Lamp High voltage on (LED on)

Supply

DANGER

The gauge may only be connected to power supplies, instruments or control devices that conform to the requirements of a grounded extralow voltage (SELV-E according to EN 61010). The connection to the gauge has to be fused

Supply voltage at the gauge

Power consumption

Fuse1)

The minimum voltage of the power supply must be increased proportionally to the length of the sensor cable.

Voltage at the supply unit with maximum line length

INFICON controllers fulfill these requirements.

15.0 … 30.0 VDC (ripple ≤ 1 Vpp)

≤2 W

≤1 AT

16.0 … 30.0 VDC (ripple ≤ 1 V

)

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Adjustment

-4

<HV> potentiometer at <10

mbar

<ATM> potentiometer at atmospheric pressure

Electrical connection FCC68 female, 8 poles

Sensor cable 8 conductors plus shielding

Line length

≤50 m (8×0.14 mm²)

Operating voltage

Operating current

≤3.3 kV

≤500 µA

Grounding concept

Vacuum connection-signal common

→ ("Electrical Connection")

connected via 10 kΩ (max. voltage differential with respect to safety ±50 V with respect to accuracy ±10 V)

Supply common-signal common conducted separately

Materials exposed to vacuum

Vacuum connection Measuring chamber Feedthrough Internal seals MPG400 MPG401 Anode Ignition aid Pirani measuring tube Pirani filament

stainless steel stainless steel ceramic

FPM 75 Ag, Cu, soft solder (Sn, Ag) Mo stainless steel Ni, Au W

Mounting orientation any

Internal volume

Pressure

≈20 cm³

≤10 bar (absolute)

limited to inert gases

Temperatures

Operation

MPG400 MPG401

+5 … +55 °C +5 … +150 °C (at flange in horizontal mounting orientation, without magnetic shielding)

Bakeout +150 °C

(without magnetic shielding and electronics unit)

Pirani filament +120 °C

Storage –40 °C … +65 °C

Relative humidity

≤80% at temperatures up to +31 °C decreasing to 50% at +40 °C

Use indoors only

altitude up to 2000 m

Protection category IP 40

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Dimensions [mm]

MPG400

DN 25 ISO-KF

Weight

351-010 ≈700 g 351-011 ≈720 g 351-012 ≈980 g

ø 63.5

MPG401

105

15.5

DN 40 CF-F

351-020 ≈730 g 351-021 ≈750 g 351-022 ≈1010 g

ø 63.5

18.5

DN 40 ISO-KF

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3 Installation

3.1 Vacuum Connection

DANGER: overpressure in the vacuum system >1 bar

Injury caused by released parts and harm caused by escaping process gases can result if clamps are opened while the vacuum system is pressurized.

Do not open any clamps while the vacuum system is pressurized. Use the type of clamps which are suited to overpressure.

DANGER: overpressure in the vacuum system >2.5 bar

KF flange connections with elastomer seals (e.g. O-rings) cannot withstand such pressures. Process media can thus leak and possibly damage your health.

Use O-rings provided with an outer centering ring.

DANGER

DANGER: protective ground

Products that are not professionally connected to ground can be extremely hazardous in the event of a fault.

The gauge must be electrically connected to the grounded vacuum chamber. The connection must conform to the requirements of protective connection according to EN 61010:

• CF connections fulfill this requirement.

• For gauges with KF connections, use a conductive metallic clam-

ping ring.

Caution: vacuum component

Dirt and damages impair the function of the vacuum component.

When handling vacuum components, take appropriate measures to ensure cleanliness and prevent damages.

Caution: dirt sensitive area

Touching the product or parts thereof with bare hands increases the desorption rate.

Always wear clean, lint-free gloves and use clean tools when working in this area.

DANGER

Caution

WARNING

WARNING: electric arcing

Helium may cause electric arcing with detrimental effects on the electronics of the product.

Before performing any tightness tests put the product out of operation

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and remove the electronics unit.

Procedure

The gauge may be mounted in any orientation. To keep condensates

and particles from getting into the measuring chamber preferably choose a horizontal to upright position and possibly use a seal with a centering ring and filter.

If adjustment should be possible after the gauge has been installed, be

sure to install it so that the <HV> and <ATM> trimmer potentiometers can be accessed with a screw driver (→  16).

Remove the protective lid and install the product to the vacuum system.

When making a CF flange connection, it may be advantageous to temporarily remove the magnet unit (→  11).

Seal with centering ring

Protective lid

Clamp

Seal with centering ring and filter

Keep the protective lid.

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3.1.1 Removing the Magnet Unit (Only for Gauges With CF Flanges)

Tools required

Procedure

• Allen wrench 1.5 mm

• Open-end wrench 7 mm

a) Unfasten the hexagon socket set screw (1) on the electronics unit (2).

b) Remove the electronics unit without twisting it.

c) Unfasten the hexagon head screw (3) on the magnet unit (4) and remove the

magnet unit.

The magnetic force and the tendency to tilt make it difficult to

separate the magnet unit and the measuring chamber (7).

d) Make the flange connection between the gauge and the vacuum system.

e) Remount the magnet unit and lock it with the hexagon head screw (3).

f) Carefully mount the electronics unit (2). (Make sure the pin of the Pirani ele-

ment is properly plugged into the corresponding hole of the electronics unit.)

g) Push the electronics unit up to the mechanical stop and lock it with the hexagon

socket set screw (1).

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