Emerson 95, ACE95, 63EG-98HM, Y690A Data Sheet

Polysilicon Industry Solution

Polysilicon Plants use Emerson™ Products for Precise Pressure Control

Polysilicon Overview

Polysilicon is widely used in Integrated Circuit (IC) and
Photovoltaic (PV) industries. It is a major material used
in makin g semicondu ctor ch ips and solar cel ls. The
semiconductor chips are used for the production of electrical
and electronic devices like computers while the solar cells
are used to manufacture solar panels that convert solar energy
to electricity.

Polysilicon is categorized into two grades: Solar Grade
Silicon (SG) which has a silicon content of 99.9999% and
Electronic Grade Silicon (EG) which has a silicon content of

99.999999999%.

Market demand for polysilicon has increased due to the use of
alternative and more environment-friendly sources of energy.
The production of polysilicon has increased to meet the
market demand.

Polysilicon Manufacturing Process

The process of manufacturing polysilicon starts with rening
its raw material, silica. Silica, found in sand and quartz,
is reduced to remove impurities and then purified to
produce Metallurgical-Grade Silicon (MGS). The metallic
silicon is processed using either the Siemens reactor or
Fluidized Bed reactor. Both processes use Trichlorosilane
(TCS) undergoing further chemical or physical processes to
produce polysilicon.

Emerson Process Management Solution

Fisher® and Tescom® p roduc ts are widely installed
throughout the world’s polysilicon plants. Our products
are used in many applications, such as feeding gas, gas
recovery and ultra high purity pressure control of the
reactor. Our expertise and technical knowledge assure
you that our products have high reputation for reliability
and durability.

www.emersonprocess.com/regulators

Fisher

®

and Tescom® Polysilicon Plant Products

Products Description

• Direct-Operated for Fast

Pressure Control

• Multi-Purpose - Used in
various applications

• Rugged Construction

• Multiple End Connections Available

• Available in Differential Pressure

Control, High Temperature and

95 S

eries

Pressure Reducing Regulator

Type Y690A
Tank Blanketing Regulator

High Pressure Construction

• Easy Maintenance

• Direct-Operated for Fast

Pressure Control

• Compact Construction for Small
Tanks and Vessels

• Easy Conversion between Constructions

• Sour Gas Service Capability &
Corrosion Resistance

• NPS 1-1/2 and 2 Body Sizes
Available in Type Y696

Products

Type ACE95
Tank Blanketing Regulator

Te sco m® 15 Series Bulk Gas
Regulator for Hydrogen
mixing Panels

Description

• Pilot-Operated for Accurate
Pressure Control

• Low Setpoint for Nitrogen Savings

• Easy Installation & Maintenance

• High Sensitivity Provided by
Oversized Actuator

• Diagnostic Port for In-Line Analysis

• Stainless Steel Construction

• Metal Diaphragm or Bellow sensing

element maintains very accurate
downstream pressure control at ultra
high flow rates

• 316L Stainless Steel bar stock
construction for superior corrosion
resistance, up to 10 Ra microinch
electropolished internal surface finish

• Spring/wrench-adjust or air-actuated
compatible with ER3000 Series

Electronic Controller

• Pilot-Operated for Accurate
Pressure Control

• Versatility in Both Liquid and
Gas Service

• NACE Availability

• Fast Speed of Response

• Low Build-up Capability

Type 63EG-98HM
Backpressure Regulator

Industrial Regulators

Emerson Process Management Regulator Technologies, Inc.

USA - Headquarters
McKinney, Texas 75069-1872 USA
Tel: [phone]
Outside U.S. 1-972-548-3574

Tes co m

Emerson Process Management Tescom Corporation

USA - Headquarters
Elk River, Minnesota 55330-2445 USA
Tel: [phone]

For further information, visit www.emersonprocess.com/regulators

• Tight Shutoff

• Excellent Overpressure Protection

Asia-Pacific
Shanghai, China 201206
Tel: [phone]

Europe

Selmsdorf, Germany 23923
Tel: [phone]

Our Global Product Brands:

Te sco m® ER3000 Series
Electronic Pressure Controller

Europe

Bologna, Italy 40013
Tel: [phone]

• Electropneumatic digital controller

• High precision (0.1% accuracy) device

• Free Software

• Explosion-proof housing available

• Extra analog/digital inputs/

outputs available

• Combine with any air actuated regulator
to control a wide range of pressures
and flows

Middle East and Africa
Dubai, United Arab Emirates
Tel: [phone]

D351799X012 © 2010 Emerson Process Management Regulator Technologies, Inc. All rights reserved. Printed in the U.S.A. and China. 03/10

Fisher, Tescom, Emerson Process Management, and the Emerson Process Management design are marks of one of the Emerson Process

Management group of companies. All other marks are the property of their respective owners.