INFICON IQM-233 User Manual
C
over Page
OPERATING MANUAL
TM
IQS-233
Codeposition Software
IPN 074-585-P1A
www.inficon.com reachus@inficon.com
©2014 INFICON
®
Title P
age
OPERATING MANUAL
TM
IQS-233
Codeposition Software
IPN 074-585-P1A
Trademarks
The trademarks of the products mentioned in this manual are held by the companies that
produce them.
LabVIEW™ is a trademark of National Instruments.
WinDriver™ is a trademark of Jungo Connectivity Ltd.
Z-Match®, IQS-233™, IQM-233™, and SQM-242™ are trademarks of INFICON GmbH.
Windows® and Microsoft® are registered trademarks of Microsoft Corporation.
All other brand and product names are trademarks or registered trademarks of their respective companies.
Disclaimer
The information contained in this manual is believed to be accurate and reliable. However, INFICON assumes
no responsibility for its use and shall not be liable for any special, incidental, or consequential damages related
to the use of this product.
Due to our continuing program of product improvements, specifications are subject to change without notice.
Copyright
©2014 All rights reserved.
Reproduction or adaptation of any part of this document without permission is unlawful.
Warranty
WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products
manufactured by it, or by an affiliated company and sold by it, and described on
the reverse hereof, to be, for the period of warranty coverage specified below, free
from defects of materials or workmanship under normal proper use and service.
The period of warranty coverage is specified for the respective products in the
respective Seller instruction manuals for those products but shall not be less than
two (2) years from the date of shipment thereof by Seller. Seller's liability under
this warranty is limited to such of the above products or parts thereof as are
returned, transportation prepaid, to Seller's plant, not later than thirty (30) days
after the expiration of the period of warranty coverage in respect thereof and are
found by Seller's examination to have failed to function properly because of
defective workmanship or materials and not because of improper installation or
misuse and is limited to, at Seller's election, either (a) repairing and returning the
product or part thereof, or (b) furnishing a replacement product or part thereof,
transportation prepaid by Seller in either case. In the event Buyer discovers or
learns that a product does not conform to warranty, Buyer shall immediately notify
Seller in writing of such non-conformity, specifying in reasonable detail the nature
of such non-conformity. If Seller is not provided with such written notification,
Seller shall not be liable for any further damages which could have been avoided if
Seller had been provided with immediate written notification.
THIS WARRANTY IS MADE AND ACCEPTED IN LIEU OF ALL OTHER
WARRANTIES, EXPRESS OR IMPLIED, WHETHER OF MERCHANTABILITY OR
OF FITNESS FOR A PARTICULAR PURPOSE OR OTHERWISE, AS BUYER'S
EXCLUSIVE REMEDY FOR ANY DEFECTS IN THE PRODUCTS TO BE SOLD
HEREUNDER. All other obligations and liabilities of Seller, whether in contract or
tort (including negligence) or otherwise, are expressly EXCLUDED. In no event
shall Seller be liable for any costs, expenses or damages, whether direct or
indirect, special, incidental, consequential, or other, on any claim of any defective
product, in excess of the price paid by Buyer for the product plus return
transportation charges prepaid.
No warranty is made by Seller of any Seller product which has been installed,
used or operated contrary to Seller's written instruction manual or which has been
subjected to misuse, negligence or accident or has been repaired or altered by
anyone other than Seller or which has been used in a manner or for a purpose for
which the Seller product was not designed nor against any defects due to plans or
instructions supplied to Seller by or for Buyer.
This manual is intended for private use by INFICON® Inc. and its customers.
Contact INFICON before reproducing its contents.
NOTE: These instructions do not provide for every contingency that may arise in
connection with the installation, operation or maintenance of this equipment.
Should you require further assistance, please contact INFICON.
www.inficon.com reachus@inficon.com
IQS-233 Operating Manual
Table Of Contents
Cover Page
Title Page
Trademarks
Disclaimer
right
Copy
Warranty
Chapter 1
Introduction
1.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
1.1.1 IQS-233 Codeposition Software Features . . . . . . . . . . . . . . . . . . . . . . . . . .1-2
1.1.2 Hardware Supported by IQS-233 Codeposition Software . . . . . . . . . . . . . . 1-2
1.1.2.1 Digital I/O Capability. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
1.1.3 Computer Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-4
1.1.4 Related Operating Manuals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-4
1.2 How To Contact INFICON . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
1.3 Software Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-5
1.3.1 Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-5
1.3.2 Process Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-5
1.3.3 Film Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
1.3.4 Material Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
1.3.5 System Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-8
1.3.6 Security. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-9
IPN 074-585-P1A
Chapter 2
IQS-233 Codeposition Software
2.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
2.2 Installing IQS-233 Codeposition Software . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
2.2.1 Installing the DLL, Device Driver, and WinDriver . . . . . . . . . . . . . . . . . . . . .2-2
2.2.1.1 Troubleshooting the DLL Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
2.2.2 Installing IQS-233 Codeposition Software . . . . . . . . . . . . . . . . . . . . . . . . . .2-6
2.2.3 Updating IQS-233 Codeposition Software . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6
TOC - 1
IQS-233 Operating Manual
2.3 Using IQS-233 Codeposition Software. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7
2.3.1 Starting IQS-233 Codeposition Software . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7
2.3.1.1 Starting the Software in Windows XP or Windows 7 . . . . . . . . . . . . . . . . . . 2-7
2.3.1.2 Starting the Software in Windows 8 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7
2.3.2 Logging On to the Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7
2.3.3 IQS-233 Codeposition Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8
2.3.3.1 File . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9
2.3.3.1.1 Process . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-10
2.3.3.1.2 Open. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11
2.3.3.1.3 Save . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-12
2.3.3.1.4 Save As . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-12
2.3.3.1.5 Log Data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-14
2.3.3.2 Print Process . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-16
2.3.3.3 User Login . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-16
2.3.3.4 Exit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-17
2.3.3.5 Edit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-17
2.3.3.5.1 Process . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-18
2.3.3.5.2 Process Name and Edit Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-19
2.3.3.5.3 Layer Information and Edit Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-21
2.3.3.5.4 Layer Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-23
2.3.3.5.5 Rate Ramps Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-26
2.3.3.5.6 Films. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-28
2.3.3.5.7 Edit Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-29
2.3.3.5.8 Deposit Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-31
2.3.3.5.9 Condition Tab. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-34
2.3.3.5.10 Source/Sensor Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-36
2.3.3.5.11 Errors Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-37
2.3.3.5.12 Materials. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-42
2.3.3.6 System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-44
2.3.3.6.1 Outputs Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-45
2.3.3.6.2 Sensors Tab. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-47
2.3.3.6.3 Indexers Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-50
2.3.3.6.4 I/O Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-52
2.3.3.6.5 Card Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-56
2.3.3.6.6 Comm Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-58
2.3.3.6.7 Display Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-60
IPN 074-585-P1A
TOC - 2
IQS-233 Operating Manual
2.3.3.7 Security. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-61
2.3.3.7.1 User Tab. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-62
2.3.3.7.2 Access Tab. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-63
2.3.3.7.3 Supervisor Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-65
2.3.4 View . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-66
2.3.4.1 Film Settings. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-66
2.3.4.2 Sensor Readings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-69
2.3.4.3 Rate Graph. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-71
2.3.4.4 Deviation Graph . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-71
2.3.4.5 Power Graph . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-71
2.3.4.6 Sensors Graph . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-71
2.3.4.7 Automatic . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-71
2.3.4.8 High Resolution . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-72
2.3.5 Help . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-73
2.3.5.1 Help . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-73
2.3.5.2 About . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-73
2.3.6 Command Buttons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-74
2.3.7 Graph Buttons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-76
2.3.7.1 Deviation Graph . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-77
2.3.7.2 Power Graph . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-78
2.3.7.3 Sensor Graph . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-79
2.3.7.4 Rate Graph. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-80
2.3.8 Process Readouts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-81
2.4 Configuring a Process . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-85
2.4.1 Process Example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-85
2.4.2 Selecting a Material . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-86
2.4.3 Configuring a Film . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-86
IPN 074-585-P1A
2.4.4 Creating a Process . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-87
2.4.5 Configuring the System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-87
2.4.6 Starting a Process . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-89
Chapter 3
Digital I/O
3.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
3.2 PLC Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
3.2.1 Crucible Indexer I/O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-1
3.2.2 Other Digital I/O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-2
3.3 PLC Setup and Test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-2
3.4 PLC Programming . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
TOC - 3
Chapter 4
4.1 Importance of Density, Tooling and Z-Ratio. . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.2 Determining Density. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.3 Determining Tooling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
4.4 Determining Z-Ratio . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3
4.5 Tuning the Control Loop. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5
4.5.1 Identifying a Fast or Slow Source. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6
4.5.2 Loop Tuning Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7
Appendix A
A.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .A-1
IQS-233 Operating Manual
Calibration Procedures
Material Table
TOC - 4
IPN 074-585-P1A
1.1 Introduction
IQS-233 Codeposition software works with INFICON IQM-233 or SQM-242 cards
to provide a powerful, Windows computer-based, thin film deposition controller.
See Figure 1-1.
Figure 1-1 IQS-233 Codeposition software display
IQS-233 Operating Manual
Chapter 1
Introduction
IPN 074-585-P1A
1 - 1
IQS-233 Operating Manual
1.1.1 IQS-233 Codeposition Software Features
Supports up to two IQM-233 cards
Measures up to six quartz crystal sensors simultaneously
Controls up to six deposition source power supplies simultaneously for
codeposition.
Supports up to two SQM-242 cards (SAM-242 card not supported)
Measures up to eight quartz crystal sensors simultaneously
Controls up to four deposition source power supplies simultaneously for
codeposition
Allows multi-layer processes
Provides preconditioning, multiple rate ramps, and feed/idle phases
Provides graphs of deposition rate, rate deviation, or power output
Stores process, film and material parameters.
Can be controlled remotely from another computer using the RS-232 or
Ethernet command protocol
Provides flexible and reliable digital I/O using an external Programmable Logic
Controller (PLC)
Easy PLC integration for event selectable relay commands and shutter
control
NOTE: PLC is not provided by INFICON.
1.1.2 Hardware Supported by IQS-233 Codeposition Software
IQS-233 Codeposition software supports IQM-233 or SQM-242 cards (see
Figure 1-2 and Figure 1-3). Up to two IQM-233 or up to two SQM-242 cards can be
installed in the same computer with IQS-233 Codeposition software.
NOTE: If IQM-233 and SQM-242 cards are installed in the same computer,
IQS-233 Codeposition software will automatically select IQM-233 card(s)
and ignore SQM-242 card(s).
Refer to the IQM-233 or SQM-242 operating manuals for detailed information on
installing and using IQM-233 and SQM-242 cards.
IPN 074-585-P1A
1 - 2
Figure 1-2 IQM-233 card
IQS-233 Operating Manual
Figure 1-3 SQM-242 card
IPN 074-585-P1A
1 - 3
IQS-233 Operating Manual
1.1.2.1 Digital I/O Capability
IQM-233 and SQM-242 cards do not provide the digital inputs and outputs needed
to automatically control source and sensor shutters, rotate source pockets, etc.
However, digital I/O capability can be added by interfacing an external,
Programmable Logic Controller (PLC) with IQS-233 Codeposition software. The
PLC is not provided by INFICON. See Chapter 3, Digital I/O.
1.1.3 Computer Requirements
Processor . . . . . . . . . . . . . . . . . . . . . 1.5 GHz CPU minimum
RAM . . . . . . . . . . . . . . . . . . . . . . . . . 2 GB RAM minimum
Memory . . . . . . . . . . . . . . . . . . . . . . 200 MB hard disk space minimum
Operating System . . . . . . . . . . . . . . Windows XP SP3, Windows 7 32/64-bit,
Screen Resolution . . . . . . . . . . . . . . 800 x 600 minimum
Case (IQM-233 Card). . . . . . . . . . . . Standard or Small Form Factor
Windows 8 32/64-bit
Case (SQM-242 Card) . . . . . . . . . . . Standard
Bus Interface (IQM-233 Card) . . . . . PCI Express x1, x4, x8, x16
Bus Interface (SQM-242 Card) . . . . PCI
Communication Interface . . . . . . . . . RS-232C when interfacing an external PLC
RS-232C Baud Rate . . . . . . . . . . . . 4800, 9600, 19200, 38400, 57600, 115200
1.1.4 Related Operating Manuals
Operating manuals can be downloaded from www.inficon.com
074-584 . . . . . . . . . . . . . . . . . . . . . . IQM-233 Operating Manual
074-549 . . . . . . . . . . . . . . . . . . . . . . SQM-242 Operating Manual
IPN 074-585-P1A
1 - 4
1.2 How To Contact INFICON
Worldwide customer support information is available under Contact >> Support
Worldwide at www.inficon.com:
Sales and Customer Service
Technical Support
Repair Service
If you are experiencing a problem with your IQS-233 Codeposition software,
please have the following information readily available:
The Sales Order or PO number of the software purchase.
The version of IQS-233 Codeposition software. See Figure 2-54 on page 2-72.
The version of Windows operating system.
A description of the problem.
An explanation of any corrective action that you may have already attempted.
The exact wording of any error messages that you may have received.
IQS-233 Operating Manual
1.3 Software Specifications
1.3.1 Display
Graphs . . . . . . . . . . . . . . . . . Rate, Deviation (Rate %), Power (%), Sensors
(Rate)
Readouts . . . . . . . . . . . . . . . Rate Å/s, Dev (%), Thickness kÅ, Power (%),
Frequency (MHz), Life (%), Process name, Film
name, Layer number, Phase, Process Time,
Layer Time, Phase Time
1.3.2 Process Parameters
IPN 074-585-P1A
Processes. . . . . . . . . . . . . . . Unlimited number of processes
Process Name . . . . . . . . . . . 15 characters maximum
Sensors . . . . . . . . . . . . . . . . IQM-233: 1 to 6 (1 to 3 Dual)
SQM-242: 1 to 8 (1 to 4 Dual)
Outputs. . . . . . . . . . . . . . . . . IQM-233: 1 to 6
SQM-242: 1 to 4
Layers. . . . . . . . . . . . . . . . . . Unlimited number of layers
Film. . . . . . . . . . . . . . . . . . . . Any defined film
Outputs. . . . . . . . . . . . . . . . . IQM-233: 1 to 6
SQM-242: 1 to 4
1 - 5
IQS-233 Operating Manual
Input . . . . . . . . . . . . . . . . . . . Sensor(s), Timed Power
Setpoint Å/s . . . . . . . . . . . . . -999.90 to 999.90 Å/s
Setpoint % Pwr. . . . . . . . . . . 0.00 to 100.00% Power
Final Thickness . . . . . . . . . . 0.000 to 999.900 kÅ
Thickness Endpoint . . . . . . . 0.000 to 999.900 kÅ
Time Endpoint . . . . . . . . . . . 0.00 to 30000.00 s
Start Mode . . . . . . . . . . . . . . Manual Start, Auto Start, Skip Pre Cond
Source Indexers . . . . . . . . . . IQM-233: 6
SQM-242: 4
Index Pockets. . . . . . . . . . . . 0 to 15
Timeout . . . . . . . . . . . . . . . . 0 to 3000 s
Substrate Indexer. . . . . . . . . 1
Index Pockets. . . . . . . . . . . . 0 to 4
Timeout . . . . . . . . . . . . . . . . 0 to 3000 s
User Indexers. . . . . . . . . . . . 2
Index Pockets. . . . . . . . . . . . 0 to 15
Timeout . . . . . . . . . . . . . . . . 0 to 3000 s
Rate Ramps . . . . . . . . . . . . . Unlimited number of Rate Ramps
Start Thickness. . . . . . . . . . . 0.000 to 999.900 kÅ
Ramp Time. . . . . . . . . . . . . . 0.00 to 30000 s
Setpoint Å/s . . . . . . . . . . . . . -999.90 to 999.90 Å/s
Setpoint % Pwr. . . . . . . . . . . 0.00 to 100.00% Power
1.3.3 Film Parameters
Films. . . . . . . . . . . . . . . . . . . Unlimited number of films
Film Name . . . . . . . . . . . . . . 15 characters maximum
P Term . . . . . . . . . . . . . . . . . 0 to 9999
I Term . . . . . . . . . . . . . . . . . . 0.0 to 999.9 s
D Term . . . . . . . . . . . . . . . . . 0.00 to 99.90 s
IPN 074-585-P1A
1 - 6
Shutter Delay Accuracy . . . . 0.0 to 30.0%
Shutter Delay Wait . . . . . . . . 0.00 to 30000 s
Shutter Delay Hold . . . . . . . . 0.00 to 30000 s
IQS-233 Operating Manual
Rate Sampling . . . . . . . . . . . Continuous, Accuracy Based, Time Based
Accuracy Based . . . . . . . . . . 0.00 to 100.00%
Time Based Sample . . . . . . . 0.00 to 100.00 s
Time Based Hold . . . . . . . . . 0.00 to 100.00 s
Ramp (1, 2) Power . . . . . . . . 0.00 to 100.00%
Ramp (1, 2) Time . . . . . . . . . 0.00 to 30000 s
Soak (1, 2) Time. . . . . . . . . . 0.00 to 30000 s
Feed Power . . . . . . . . . . . . . 0.00 to 100.0%
Feed Ramp Time . . . . . . . . . 0.00 to 100 s
Feed Time . . . . . . . . . . . . . . 0.00 to 100 s
Idle Power . . . . . . . . . . . . . . 0.00 to 100.0%
Idle Ramp Time . . . . . . . . . . 0.00 to 100 s
Material. . . . . . . . . . . . . . . . . Any defined material
Max Power . . . . . . . . . . . . . . 0.00 to 100.00%
Slew Rate . . . . . . . . . . . . . . . 0.0 to 100.0%
Sensor Tooling . . . . . . . . . . . IQM-233: 1 to 6, 0.0 to 999.0%
SQM-242: 1 to 8, 0.0 to 999.0%
On Error . . . . . . . . . . . . . . . . Ignore, Stop Layer, Timer Power
Control Error %. . . . . . . . . . . 0 to 30%
Control Error sec . . . . . . . . . 0 to 99 s
Crystal Fail Counts . . . . . . . . 0 to 99
Crystal Quality % . . . . . . . . . 0 to 50%
Crystal Quality Counts . . . . . 0 to 99
IPN 074-585-P1A
Crystal Stability Single . . . . . 25 to 9999 Hz
Crystal Stability Total . . . . . . 25 to 9999 Hz
1.3.4 Material Parameters
Name . . . . . . . . . . . . . . . . . . 24 characters maximum
Density . . . . . . . . . . . . . . . . . 0.40 to 99.99 g/cm
3
Z-Factor . . . . . . . . . . . . . . . . 0.100 to 9.999
1 - 7
IQS-233 Operating Manual
1.3.5 System Parameters
Outputs. . . . . . . . . . . . . . . . . IQM-233: 1 to 6
Full Scale Out. . . . . . . . . . . . -10.0 to 10.0 V (dc)
Sensors . . . . . . . . . . . . . . . . IQM-233: 1 to 6 (1 to 3 Dual)
Control . . . . . . . . . . . . . . . . . Rate, Thickness
Relays (PLC required) . . . . . 16
Relay Events . . . . . . . . . . . . Source Shutter (1 to 6), Source Active (1 to 6),
Inputs (PLC required). . . . . . 12
SQM-242: 1 to 4
SQM-242: 1 to 8 (1 to 4 Dual)
Sensor Shutter (1 to 8), Process Stopped, Process
Running, Layer Stopped, Layer Running, Deposit
Phase, Pre-Cond Phase, Soak Hold Phase, Process
Active, Manual Mode, Max Power, Time Setpoint,
Thickness Setpoint, Final Thickness, All Crystals
Good, All Crystals Fail
Input Events . . . . . . . . . . . . . Start Process, Abort Process, Start Layer, Stop
Layer, Next Layer, Force Final Thickness, Zero
Thickness, Zero Time (NA), Soak 2 Hold, Soak 2
Release
Card Type. . . . . . . . . . . . . . . IQM-233, SQM-242
Period. . . . . . . . . . . . . . . . . . 0.10, 0.25, 0.50, 1.00, 2.00 s
Maximum Frequency . . . . . . 4.002000 to 6.100000 MHz
Initial Frequency. . . . . . . . . . 4.001000 to 6.099000 MHz
Minimum Frequency. . . . . . . 4.000000 to 6.098000 MHz
Computer Interface . . . . . . . RS-232, Ethernet, Windows Communication
Foundation
RS-232 Baud . . . . . . . . . . . . 4800, 9600, 19200, 38400, 57600, 115200
Filter Readings . . . . . . . . . . . 1, 2, 3, 4, 5, 6, 7, 8, 9, 10
Last Output Displayed . . . . . 1 to 6
Units . . . . . . . . . . . . . . . . . . . Thickness, Mass
Graph X Axis Width . . . . . . . 0 to 100
IPN 074-585-P1A
1 - 8
Graph Y Axis Height. . . . . . . 0 to 10000
1.3.6 Security
User Name . . . . . . . . . . . . . . 10 characters maximum
Password . . . . . . . . . . . . . . . 10 characters maximum
Access Levels . . . . . . . . . . . 3
IQS-233 Operating Manual
IPN 074-585-P1A
1 - 9
IQS-233 Operating Manual
This page is intentionally blank.
1 - 10
IPN 074-585-P1A
IQS-233 Operating Manual
CAUTION
CAUTION
IQS-233 Codeposition Software
2.1 Introduction
This chapter covers the installation and operation of IQS-233 Codeposition
software. Refer to the IQM-233 or SQM-242 operating manual for installation
instructions of an IQM-233 card or SQM-242 card.
2.2 Installing IQS-233 Codeposition Software
IQS-233 Codeposition software supports up to two IQM-233 cards or up to two
SQM-242 cards.
If IQM-233 and SQM-242 cards are installed together in
the same computer, IQS-233 Codeposition software will
communicate with up to two IQM-233 cards and ignore
the SQM-242 card(s).
Chapter 2
IQM-233 card(s) must be removed to use
IQS-233 Codeposition software with SQM-242 card(s).
The required Dynamic Link Library (DLL), device driver, and WinDriver are installed
by the IQM233 DLL or the SQM242 with IQM DLL setup file. To install the DLL,
device driver, and WinDriver, see section 2.2.1.
IPN 074-585-P1A
NOTE: IQS-233 Codeposition software and the IQM233 DLL or SQM242 with
IQM233 DLL and SQM242 with IQM DLL cannot be
installed together on the same computer.
IQM DLL may be installed before or after the installation of the IQM-233 or
SQM-242 card(s). Refer to the IQM-233 or SQM-242 operating manual for
card installation instructions.
2 - 1
IQS-233 Operating Manual
2.2.1 Installing the DLL, Device Driver, and WinDriver
1 If the operating system is Windows 7 or 8, click Start >> Control Panel >>
System. Note the operating system size (32-bit or 64-bit) displayed under
System type.
If the operating system is Windows XP, click Start >> Settings >> Control
Panel >> System >> System Properties >> General tab. Determine the
operating system size from the operating system name displayed under
System:
Windows XP Home, Windows XP Media Center Edition, and Windows XP
Professional are 32-bit operating systems.
Windows XP Professional x64 Edition is a 64-bit operating system.
NOTE: The operating system size will generally match the performance
capabilities of the computer processor. However, it is possible to have
a 64-bit processor and a 32-bit operating system. In this case, the
64-bit installation is required.
2 Insert the IQS-233 Codeposition Operating Manual CD into the computer’s
CD drive.
3 Click Windows Explorer or File Explorer >> Computer >> (CD drive letter:)
IQS-233 >> IQM-233 Drivers.
4 If IQS-233 Codeposition software is to be used with an IQM-233 card:
For a 32-bit operating system, double-click
IQM233 DLL x86 v x.x.x.x Setup.exe
For a 64-bit operating system, double-click
IQM233 DLL x64 v x.x.x.x Setup.exe
If IQS-233 Codeposition software is to be used with an SQM-242 card:
For a 32-bit operating system, double-click
SQM242 with IQM DLL x86 v x.x.x.x Setup.exe
For a 64-bit operating system, double-click
SQM242 with IQM DLL x64 v x.x.x.x Setup.exe
IPN 074-585-P1A
2 - 2
IQS-233 Operating Manual
CAUTION
IQM233 DLL and SQM242 DLL can be installed in the
same computer.
However, when IQM-233 and SQM-242 cards are installed
in the same computer, IQS-233 Codeposition software
will interface only with IQM-233 card(s) and ignore the
SQM-242 card(s).
IQM-233 card(s) must be removed for
IQS-233 Codeposition software to communicate with
SQM-242 card(s).
5 The InstallShield Wizard window will display.
6 Click Next.
7 Read the license agreement.
8 If it is acceptable, click I accept the terms in the license agreement.
9 Click Next.
10 Type the requested information into the User Name and Organization boxes.
11 Click Next.
12 Click Install to start the installation of the device driver and the DLL.
13 When Install Wizard Completed is displayed, click Finish to close the
InstallShield Wizard.
2.2.1.1 Troubleshooting the DLL Installation
If the WDREG Error window appears (see Figure 2-1), an existing version of
IPN 074-585-P1A
WinDriver is preventing the installation of the DLL.
Figure 2-1 WDREG Error
2 - 3
IQS-233 Operating Manual
To remove the existing WinDriver and install the required WinDriver:
1 In Windows Device Manager, click the expansion button () next to Jungo to
display WinDriver. See Figure 2-2.
Figure 2-2 Jungo and WinDriver
2 Right-click WinDriver and click Uninstall. See Figure 2-3.
Figure 2-3 Uninstall WinDriver
3 When the Confirm Device Uninstall window appears, click OK to uninstall
WinDriver. See Figure 2-4.
Figure 2-4 Confirm Device Uninstall
4 In the WDREG Error window, click Retry to continue with the DLL installation.
Refer to Figure 2-1.
If the Windows Installer window appears (see Figure 2-5), another DLL
(IQM233 DLL or SQM242 with IQM DLL) is already installed. IQM233 DLL
and SQM242 with IQM DLL cannot be installed together on the same
computer.
IPN 074-585-P1A
2 - 4
IQS-233 Operating Manual
Figure 2-5 Windows Installer window
4a Click OK to keep the previously installed DLL, or
4b To remove the previously installed DLL and install a different DLL:
4b1 Click OK to close the Windows Installer window.
4b2 Click Control Panel >> Programs to display a list of installed
programs.
4b3 Select the IQM233 DLL or the SQM242 with IQM DLL from the list.
4b4 Click Uninstall to remove the selected DLL.
4b5 Install the DLL again. Refer to section 2.2.1 on page 2-2.
IPN 074-585-P1A
2 - 5
IQS-233 Operating Manual
2.2.2 Installing IQS-233 Codeposition Software
NOTE: To update an existing installation of IQS-233 Codeposition software to a
newer version, see section 2.2.3.
1 Click Windows Explorer or
File Explorer >> Computer >> (CD drive letter:) IQS-233.
2 Double-click IQS-233 SETUP.EXE.
3 The InstallShield Wizard will display.
4 Click Next.
5 Read the license agreement.
6 If it is acceptable, click I accept the terms in the license agreement.
7 Click Next.
8 Type the requested information into the User Name and Organization boxes.
9 Click Next.
10 Click Install to start the software installation.
11 When Install Wizard Completed is displayed, click Finish to close the
InstallShield Wizard window.
2.2.3 Updating IQS-233 Codeposition Software
To update an existing installation of IQS-233 Codeposition software to a newer
version:
1 Click Control Panel >> Programs.
2 If the IQS-233 Codeposition software was used with an IQM-233 card, select
IQM233 DLL x86 or IQM233 DLL x64.
If the IQS-233 Codeposition software was used with an SQM-242 card, select
SQM242 with IQM DLL x86 or SQM242 with IQM 233 DLL x64.
3 Click Uninstall to remove IQM233 DLL or SQM242 with IQM DLL.
4 In Programs, select IQS-233 Codeposition.
5 Click Uninstall to remove the previous version of IQS-233 Codeposition
software.
6 Install the latest version of IQM233 DLL or SQM242 with IQM DLL, as
appropriate. Refer to section 2.2.1 on page 2-2.
IPN 074-585-P1A
2 - 6
7 Install the latest version of IQS-233 Codeposition software. Refer to section
2.2.2.
IQS-233 Operating Manual
2.3 Using IQS-233 Codeposition Software
2.3.1 Starting IQS-233 Codeposition Software
2.3.1.1 Starting the Software in Windows XP or Windows 7
1 Click Start >> All Programs >> INFICON >> IQS-233 Codeposition.
2 The User Login window will display. See Figure 2-6.
2.3.1.2 Starting the Software in Windows 8
1 In the Start window, click the IQS-233 Codeposition icon.
2 If the icon cannot be found:
2a Click Search >> Apps.
2b Type IQS-233 in the Search text box.
2c Click the IQS-233 Codeposition icon.
2.3.2 Logging On to the Software
On the initial login, the User Login window will display Super as the default User
name. See Figure 2-6.
Figure 2-6 User Login window
A Password is not required to log on to a user session with the default User name.
Click OK to close the User Login window and display the IQS-233 Codeposition
window. See Figure 2-7.
IPN 074-585-P1A
NOTE: If security settings are changed from the default values, a different User
name and Password may be required. See section 2.3.3.7 on page 2-61.
2 - 7
IQS-233 Operating Manual
2.3.3 IQS-233 Codeposition Window
The IQS-233 Codeposition window displays readouts for Film, Rate, Deviation,
Thickness and Power simultaneously for each active output. This window also
provides Process, Layer, Phase, Run, and Time for each active output as well as
customizable process parameters, graphical information, and access to File, Edit,
View, and Help menus. See Figure 2-7.
NOTE: The Rate, Deviation, and Thickness readings displayed represent an
average of the sensors assigned to each film.
Figure 2-7 IQS-233 Codeposition window
2 - 8
NOTE: To zoom in the graph pane, click in the graph pane on the IQS-233
Codeposition window and drag to draw a box over the data needing to be
enlarged. To further zoom in, or to zoom out, rotate the wheel button up or
down, respectively, with the pointer in the graph pane.
File, see section 2.3.3.1
Edit, see section 2.3.3.5 on page 2-17
View, see section 2.3.4.1 on page 2-66
Help, see section 2.3.5.1 on page 2-73
IPN 074-585-P1A
2.3.3.1 File
IQS-233 Operating Manual
Click File to display the list of File commands. See Figure 2-8.
NOTE: File commands are not available once a process is started or while a
process is running.
Figure 2-8 File commands
Process, see section 2.3.3.1.1
Open, see section 2.3.3.1.2 on page 2-11
Save, see section 2.3.3.1.3 on page 2-12
Save As, see section 2.3.3.1.4 on page 2-12
Log Data, see section 2.3.3.1.5 on page 2-14
Print Process, see section 2.3.3.2 on page 2-16
User Login, see section 2.3.3.3 on page 2-16
Exit, see section 2.3.3.4 on page 2-17
IPN 074-585-P1A
2 - 9
IQS-233 Operating Manual
2.3.3.1.1 Process
Click File >> Process to display a list of saved process configurations (see Figure
2-9). A check mark next to the current process name indicates that the process
configuration has been loaded for that process name.
NOTE: The current process name is also displayed in the IQS-233 Codeposition
The process configuration consists of all of the parameters in the Process window
(see Figure 2-16 on page 2-18). System and security parameters are not included
in the process configuration. System parameters are contained in the .xml
configuration file. A different set of system parameters can be selected by loading
a previously saved configuration file (see section 2.3.3.1.2).
Figure 2-9 Process list
window (refer to Figure 2-7 on page 2-8).
2 - 10
IPN 074-585-P1A
Loading...