Inficon TPG300, CP300C9, IF300P Operating Manual

Operating

M

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C

o

3

anual

Plug
Cont

CP300
IF300P

In B

oller

9,

ards

TPG

for T

00

otal Pressure Gauge

IG9972BEN (2

017-09)

1

About this Document

Validity

This document describes the plug-in boards for the total pressure gauge control­ler TPG300, intended as a supplement to the documentation of the basic unit
TPG300 (→  [1]).

This document applies to plug-in boards listed below

Type Description Part number

CP300C9 Pirani / cold cathode measurement board IO441000

IF300P Interface and relay Board (Profibus) IO441395

The part number (No) can be taken from the product nameplate.

2 IG9972BEN (2017-09) Plug-In Boards.om

Contents

About this Document 2
Validity 2

1 Safety 4

1.1 General Safety Information 4

1.2 Symbols Used 4

1.3 General Stipulations 4

2 Description 5

2.1 Pirani / Cold Cathode Measurement Board CP300C9 5

2.2 Interface and Relay Board IF300P 5

2.3 Pirani Measurement 5

2.4 Cold Cathode Measurement 5

3 Technical Data 6

3.1 Pirani / Cold Cathode Measurement Board CP300C9 6

3.2 Interface and Relay Board IF300P 7

4 Installation 8

4.1 Installing / Removing the Plug-In Boards 8

4.2 Connecting the Pirani Gauge 8

4.3 Connecting the Cold Cathode Gauge 9

4.4 Connecting the <OUTPUT> Analog Signal 10

4.5 Connecting the Relays of the IF300P 10

4.6 Connecting the Profibus-DP Interface to the IF300P 11

5 Adjustment 12

5.1 Adjusting the Pirani Measurement Circuit 12

6 Troubleshooting 13

6.1 Operating and Adjustment Problems 13

6.2 Defects 13

6.3 Problems with the RS232C Interface 13

6.4 Problems with the Profibus-DP Interface 14

7 Accessories 15

7.1 Gauges 15

7.2 Measurement Cables and Cable Connectors 15

Appendix 17

A: Output Signals of the Measurement Boards 17
B: Gas Type Dependence 19
C: Literature 21

IG9972BEN (2017-09) Plug-In Boards.om 3

1 Safety

1.1 General Safety
Information

1.2 Symbols Used

a) Take the necessary precautions when doing installation work.

It may be necessary implement additional protective measures in the system.

b) Before connecting any external elements, check that they are compatible with

the technical data in this document.

c) Take the necessary precautions when doing maintenance or repair work.

Danger:

Information on preventing any kind of personal injury or extensive
equipment damage.

Caution:

Special information on damage prevention.

Note:

Special information on cost-effective use.

1.3 General Stipulations

Skilled Personnel:

This work may only be carried out by persons with suitable technical
training and the necessary experience.

Waiting time, reaction time, duration of test

<

… > Marking

→  See page …

→  See document …

Since the individual components are delicate, appropriate measures must be taken
to protect them from static electricity. Store modules in antistatic bags or contain­ers.

Damage resulting from incorrect handling may lead to a revocation of the
guarantee.

INFICON accepts no responsibility nor warranty if the user or third parties

• utilize the product not according to the defined use

• make any kind of changes (modifications, alterations, etc.) to the product.

4 IG9972BEN (2017-09) Plug-In Boards.om

2 Description

2.1 Pirani / Cold Cathode
Measurement Board
CP300C9

Pirani measurement circuit

Cold cathode measurement
circuit

2.2 Interface and Relay
Board IF300P

2.3 Pirani Measurement

2.4 Cold Cathode
Measurement

The CP300C9 board is a combined board containing one Pirani and one cold
cathode measurement circuit.

The Pirani measurement circuit has one gauge cable connector, two trimmer po­tentiometers and one analog signal output. When the control unit is on, the Pirani
measurement circuit is in continuous operation. The analog signal is constantly
available, independent of what is shown on the pressure display.

The cold cathode measurement circuit for the measurement of high and ultra high
vacuum has one gauge cable connector and one analog signal output. When the
gauge is turned on, the analog signals are constantly available, independent of
what is shown on the pressure display.

This measurement board contains special electronics to limit the measurement
current to 100 µA, a feature that considerably extends the lifetime of the gauge.

The IF300P board contains a RS232C interface and a Profibus-DP interface. The
board has five relays with one floating changeover contact each.

Within certain limits the thermal conductivity of gases is a function of the pressure.
Pirani thermal conductivity vacuum gauges exploit this phenomenon for pressure
measurements.

The measurement element consists of a thin filament with a high temperature co­efficient. The resistance of the wire and consequently its temperature are main­tained at a constant value by means of a suitable control circuit. The electrical
power supplied to the filament is, therefore, a measure of the thermal conductivity
and consequently the gas pressure.

The current flowing in a self-sustained gas discharge with a cold cathode (inverted
magnetron) depends on the applied voltage, the gas composition, and the pres­sure. A magnetic field that penetrates the measurement chamber has the effect
that the electrons move along a spiral trajectory from the cathode to the anode and
thereby cause even at low gas densities a sufficient number of ionizing impacts for
maintaining the discharge. If (with a known gas type) the anode voltage and mag­netic field are kept constant, the discharge current is a measure of the pressure.

IG9972BEN (2017-09) Plug-In Boards.om 5

3 Technical Data

3.1 Pirani / Cold Cathode
Measurement Board
CP300C9

Number of measurement circuits 1 each

Gauges TPR018, IKR085 (both ITER)

Display range (signal output) 1)

Pirani
Cold cathode

mbar
mbar

5×10-4 … 1000

-9

… 1×10-2

5×10

Measurement range 1)

Pirani
Cold cathode

mbar
mbar

1×10-2 … 100

-8

… 5×10-3

1×10

Cable length

Pirani, max.
Cold cathode, max.

m
m

100
60

2)

… 100

Power supply cold cathode gauges

Operating voltage
Measurement current

kV
µA

3.3
≤600

Signal output

Measured value, analog
Error message
Current, max.
Output resistance

Reaction time (10  90%) for sudden

V
V
mA
Ω

0 … +10
>11.5
2
400

pressure step

Pirani

-3

<10

 103 mbar

Cold cathode

-9

⇔ 10-6 mbar

10

ms

ms

<50

<100

Connection, equipment side

Pirani gauge
Cold cathode gauge
Signal output

Weight kg

female
female
female

Amphenol C91E, 6-pin
SHV coaxial
ø2 mm

≈0.21

1)

N2-equivalent

2)

when using the lower measurement range limit (→  9)

6 IG9972BEN (2017-09) Plug-In Boards.om

3.2 Interface and Relay
Board IF300P

Relay

Number 5

Contact type 1 change over contact each

floating
max. 50 V (ac) relative to other
contacts and ground

Characteristic data (ac)

Switching voltage, max.
Switching current, max.
Switching power, max.

30 V (dc), 50 V (ac)

1.5 A
45 W, 75 VA

Characteristic data (dc)

Switching current, max. switching voltages >50 V (dc) are

inadmissible for safety reasons

0.6 A at 50 V (dc)

0.8 A at 40 V (dc)

1.5 A at 30 V (dc)

Connection, equipment side

Type D-sub connector, 15-pin, male

Transition resistance with socket

125 mΩ

Interface

Type Profibus-DP

Baud rates <12Mbaud

Data format

Profibus-DP interface →  [2]

Connection, equipment side D-sub connector, 9 pin, male

Cable length, max.

Weight

→  [2]

≈0.16 kg

Before connecting any external elements, check that they conform to the

above technical data and the controller is switched off for at least
15 seconds.

IG9972BEN (2017-09) Plug-In Boards.om 7

4 Installation

General

4.1 Installing / Removing
the Plug-In Boards

Use screened cables only (connect screen to barrel of connector). If both

ends of the screen are connected to ground, compensating currents must
be prevented (e.g. by connecting all involved units to a common power
distributor).

In a Profibus-DP installation (IF300P board), use the recommended special
cable only (→  [2]).

For safety reasons, vacant slots should always be covered with blank

panels.

Disconnect all cables from the unit before installing / removing any plug­in modules.

Procedure

4.2 Connecting the Pirani
Gauge

Modules should only be handled on an ESD protected bench.

• Switch off the unit and wait one minute

• Remove all cables (power cable last)

• Unscrew the blind plate / plug-in module

• Insert / remove plug-in module

• Screw on the plug-in module / blind plate

• Connect the cables (mains cable first)

• Switch on the unit again

To ensure correct operation, check that the screws of the plug-in

modules are tightened.

Additional protective measures must be taken if certain processes in the

vacuum system (e.g. flashovers) can cause hazardous voltages on the
gauge terminals.

Although the gauge cables are screened, they should not be routed in

parallel to lines producing strong electrical noise.

Connect the gauge to the <TPR> connector on the rear panel. The connectors are
locked so that they cannot be separated accidentally.

8 IG9972BEN (2017-09) Plug-In Boards.om

4.3 Connecting the Cold
Cathode Gauge

Additional protective measures must be taken if certain processes in the

vacuum system (e.g. flashovers) can cause hazardous voltages on the
gauge terminals.

Although the gauge cables are screened, they should not be routed in

parallel to lines producing strong electrical noise.

Connect the gauge to the <IKR> connector. Coaxial cables normally suffice. The
following diagram indicates the conditions under which a triaxial cable is required.

The maximum length of 100 m for coaxial cables is specified by

EN 61010. Greater lengths are not admissible without additional protec­tive measures.

If the gauge is not grounded via the vacuum chamber, it must be
grounded separately.

If the cable length is >100 m (only admissible with triaxial cable), the

connectors must be protected against unintentional separation and
contact of the center conductor. The cable must only be plugged in or
detached while the unit is switched off for at least 15 seconds.

IG9972BEN (2017-09) Plug-In Boards.om 9

4.4 Connecting the
<OUTPUT>
Analog Signal

4.5 Connecting the Relays
of the IF300P

Pin Assignment

Protection against unintentional separation of the triaxial connector.

Each measurement circuit is equipped with an analog
signal output. Matching connectors are included with
each measurement board.

The relay connector on the rear of the IF300P has the following pin assignment:

15

Relay 1

8

(Switching function 1)

7

14

Relay 2

6

(Switching function 2)

13

5

Relay 3

12

(Switching function 3)

4

11

Relay 4

3

(Switching function 4)

10

2

Relay 5

1

(Error status)

9

15

9

IF 300P

1

8

Screen

Contacts shown de-energized

Pin location

10 IG9972BEN (2017-09) Plug-In Boards.om

4.6 Connecting the
Profibus-DP Interface to
the IF300P

Pin Assignment

In a Profibus-DP installation, use the recommended special cable only

(→  [2]).

The interface connector on the rear of the IF300P has the following pin assign­ment:

Pin

1

Screen

2

3

4

5

6

Do not connect

RxD/TxD-P (B wire)

CNTR-P (optional)
DGND

VP (Only necessary

IF 300P

a bus end devices)

7

8

9

Do not connect

RxD/TxD-N (A wire)

Do not connect

9
6

5

1

IG9972BEN (2017-09) Plug-In Boards.om 11

5 Adjustment

5.1 Adjusting the Pirani
Measurement Circuit

Pirani measurement circuits are factory-adjusted to the standard gauge. Due to
manufacturing tolerances, contamination of the gauges, and different cable
lengths, deviations are inevitable.

Cold cathode measurement circuits are factory-adjusted and require no readjust­ment.

Two trimmer potentiometers are available for compen­sating the gauge tolerances, gauge contamination, or
different cable lengths, within certain limits.

Adjustment at High Vacuum

Adjustment at Atmospheric
Pressure

The adjustment should only be performed

after the equipment has attained operating
temperature (≈10 minutes).

• With gauge connected, lower the vacuum chamber pressure to <1×10-4 hPa

• Select the measurement circuit to be adjusted (»sensor« mode)

-4

• With the <HIGH VAC> potentiometer adjust the display to 8.0×10

hPa

• Turn the potentiometer clockwise by 90°

• «ur 10-4» should now be displayed (→  [1]).

• Expose the gauge to atmospheric pressure (vent the vacuum chamber)

• Turn the <ATM> potentiometer to obtain a reading of 1.0×103 hPa

• Decrease the pressure to <1×10-4 hPa

• Check the high vacuum reading and readjust, if necessary.

12 IG9972BEN (2017-09) Plug-In Boards.om

6 Troubleshooting

6.1 Operating and
Adjustment Problems

6.2 Defects

6.3 Problems with the
RS232C Interface

In addition to the guidelines below, take the documentation of the other system
components into account (→ Literature  21).

Problem Possible cause Correction

Pirani reading too high Pirani gauge contami-

nated

Adjust Pirani measure­ment circuit (→  12)

Clean gauge (→  [3])

Replace gauge

Cold cathode reading
too high

Air humidity

Connector insulation
contaminated or moist

Clean insulation or re­place connector

Keep the air humidity low

( leakage current)

Keep the equipment in

constant operation

Cold cathode reading
too low

Cold cathode gauge
contaminated

Clean gauge
(→  [4])

Replace ionization
chamber

Pirani can not be
adjusted

Incorrect combination
measurement board –

Select correct
combination (→  8)

gauge – cable

Gauge severely contami-

nated

Clean or replace gauge
(→  [3])

Problem Possible cause Correction

Cold cathode constantly
indicates « »

Short circuit in the cold
cathode cable / gauge

Replace or repair the

cable / gauge
(overrange), (even
though
the pressure is within the
measuring range)

Cold cathode measure­ment board defective

Replace the cold cathode

measurement

board(→  8)

Cold cathode indicates

No IKR gauge connected Connect the gauge
« » (underrange),
even though the pressure

is within the measuring
range

Cold cathode gauge

Cold cathode measure-

Interruption in cold

cathode cable

defective

ment board defective

Replace or repair the
cable

Replace the gauge
(→  [4])

Replace the cold cathode
measurement board
(→  8)

Problem Possible cause Correction

No communication Pin 2 and 3 of the inter-

Use the correct cable

face cable not crossed

Incorrect Baud rate Match Baud rate

Incorrect data format Adhere to the format

specified for the TPG300
(→  [1])

IG9972BEN (2017-09) Plug-In Boards.om 13

6.4 Problems with the
Profibus-DP Interface

Problem Possible cause Correction

No communication Incorrect Baud rate 1) Set Baud rate to

19200 Baud

Incorrect data format Adhere to the standardized

Profibus-DP data format
(→  [2])

Cycle time >100 ms Incorrect firmware Firmware TPG300:

302-654
Firmware Profibus: V1.5

Incorrect Baud rate

1)

Set Baud rate to

19200 Baud

1)

At the controller TPG300, firmware 302-654 or higher

14 IG9972BEN (2017-09) Plug-In Boards.om

7 Accessories

A

7.1 Gauges

7.2 Measurement Cables
and Cable Connectors

Pirani Measurement cables

Pirani cable connectors
controller side

Pirani cable connectors
gauge head side

Gauge Compatible to

Vacuum connection Ordering number

measurement board:

TPR018
→  [3]

IKR085
→  [4]

CP300C9 DN 16 ISO-KF

DN 40 CF-F

CP300C9 DN 40 ISO-KF

DN 40 CF-F

IO G15 020
IO G15 024

PT R18 772
PT R18 773

With Amphenol C91 and Lemo (standard plugs on each side).

Length [m] 80 °C

Pirani Measurement

cables for TPR018

Measurement cables, high

temperature version for TPR0181)

250 °C

3 ITC548308 ITC548414

5 – ITC548465

10 ITC548456 ITC448047

15 ITC548457 ITC448043

20 ITC548458 ITC448044

25 ITC548459 ITC120025

30 ITC548460 ITC120030

35 ITC548461 ITC120035

40 ITC548462 ITC120040

45 ITC548463 ITC120045

50 ITC548464 ITC120050

1)

Pirani measurement cable for TPR018:

4
2
1
5

LEMO
female

mphenol C91E

male

4
2
1
5
3

Connectors controller side Ordering Number

Amphenol C91 IT4722125

Crimp contact C91 plug connector IT4722841

Connectors gauge head side Ordering Number

Lemo 4.3 – 5.2 mm IT4722062

Lemo 5.3 – 6.2 mm IT4722063

IG9972BEN (2017-09) Plug-In Boards.om 15

Cold Cathode Measurment
Cables

Cold cathode cable
connectors controller side

Cold cathode cable
connectors gauge head side

With SHV and Triax Lemo (standard plugs on each side).

(Test voltage: 6 kV (dc))

Length

[m]

80 °C

Pirani Measurement

cables for IKR085

250 °C

Measurement cables, high

temperature version for IKR0851)

3 ITC220003 ITC230003

5 ITC220005 ITC230005

10 ITC220010 ITC230010

15 ITC220015 ITC230015

20 ITC220020 ITC230020

25 ITC220025 ITC230025

30 ITC220030 ITC230030

35 ITC220035 ITC230035

40 ITC220040 ITC230040

45 ITC220045 ITC230045

50 ITC220050 ITC230050

Connectors controller side Ordering Number

SHV-50-Peek IT4726605

SHV-50-Capton IT4728606

Connectors gauge head side Ordering Number

Triax IT1001030

Coax IT100103116

16 IG9972BEN (2017-09) Plug-In Boards.om

Appendix

A: Output Signals of the

Measurement Boards

Pirani Gauge
TPR018 with CP300C9

IG9972BEN (2017-09) Plug-In Boards.om 17

Cold Cathode Gauge
IKR085 with CP300C9

18 IG9972BEN (2017-09) Plug-In Boards.om

B: Gas Type Dependence

Pirani Gauge TPR018

Indicated pressure (instrument calibrated for air)

IG9972BEN (2017-09) Plug-In Boards.om 19

Cold Cathode Gauge IKR085

Indicated pressure (Instrument calibrated for air)

(Mean values, deviations possible depending on degree of contamination).
Reference gauge: Hot cathode ionization gauge

20 IG9972BEN (2017-09) Plug-In Boards.om

C: Literature

 [1] www.inficon.com

Operating Manual
Total Pressure Gauge Controller TPG300
IG9970BEN
INFICON AG, LI–9496 Balzers, Liechtenstein

 [2] www.inficon.com

Communication Protocol
Profibus-DP Interface Board IF300P
IG9973BEN
INFICON AG, LI–9496 Balzers, Liechtenstein

 [3] www.inficon.com

Operating Manual
Pirani Gauge TPR018
BG9976BEN
INFICON AG, LI–9496 Balzers, Liechtenstein

 [4] www.inficon.com

Operating Manual
Cold Cathode Gauge IKR085
IG9048BEN
INFICON AG, LI–9496 Balzers, Liechtenstein

IG9972BEN (2017-09) Plug-In Boards.om 21

LI–9496 Balzers
Liechtenstein
Tel +423 / 388 3111
Fax +423 / 388 3700

Original: English [e-mail]

i g9972ben

www.inficon.com