INFICON IC-5 User Manual

OPERATING MANUAL

IC/5

Thin Film Deposition Controller

IPN 074-237AE

OPERATING MANUAL

IC/5

Thin Film Deposition Controller

IPN 074-237AE

www.inficon.com [e-mail]

Due to our continuing program of product improvements, specifications are subject to change without notice.

©2001 INFICON

Trademarks

The trademarks of the products mentioned in this Operating Manual are held by the companies that
produce them.

INFICON® is a trademark of INFICON Inc.

Windows®, Windows 95® and Microsoft® are registered trademarks of Microsoft Corporation.

CAJON® is a registered trademark of Swagelok, Co.

All other brand and product names are trademarks or registered trademarks of their respective companies.

The information contained in this Operating Manual is believed to be accurate and reliable. However, INFICON
assumes no responsibility for its use and shall not be liable for any special, incidental, or consequential
damages related to the use of this product.

Due to our continuing program of product improvements, specifications are subject to change without notice.

©2001 All rights reserved.
Reproduction or adaptation of any part of this document without permission is unlawful.

DECLARATION

OF

CONFORMITY

This is to certify that this equipment, designed and manufactured by:

INFICON Inc.

2 Technology Place

East Syracuse, NY 13057

USA

meets the essential safety requirements of the European Union and is placed on the
market accordingly. It has been constructed in accordance with good engineering
practice in safety matters in force in the Community and does not endanger the safety
of persons, domestic animals or property when properly installed and maintained and
used in applications for which it was made.

Equipment Description: IC/5 Thin Film Deposition Controllers, including

Oscillators and Crystal Sensors as properly installed.

Applicable Directives: 73/23/EEC as amended by 93/68/EEC

89/336/EEC as amended by 93/68/EEC

Applicable Standards: EN 61010-1 : 1993

EN 55011, Group 1, Class A : 1991

EN 50082-1 : 1992

CE Implementation Date: January 2, 1996

Authorized Representative: Gary W. Lewis

Vice President - Quality Assurance
INFICON Inc.

ANY QUESTIONS RELATIVE TO THIS DECLARATION OR TO THE SAFETY OF INFICON'S PRODUCTS SHOULD BE
DIRECTED, IN WRITING, TO THE QUALITY ASSURANCE DEPARTMENT AT THE ABOVE ADDRESS.

01/16/96

Warranty

WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products
manufactured by it, or by an affiliated company and sold by it, and described on
the reverse hereof, to be, for the period of warranty coverage specified below, free
from defects of materials or workmanship under normal proper use and service.
The period of warranty coverage is specified for the respective products in the
respective Seller instruction manuals for those products but shall not be less than
two (2) years from the date of shipment thereof by Seller. Seller's liability under
this warranty is limited to such of the above products or parts thereof as are
returned, transportation prepaid, to Seller's plant, not later than thirty (30) days
after the expiration of the period of warranty coverage in respect thereof and are
found by Seller's examination to have failed to function properly because of
defective workmanship or materials and not because of improper installation or
misuse and is limited to, at Seller's election, either (a) repairing and returning the
product or part thereof, or (b) furnishing a replacement product or part thereof,
transportation prepaid by Seller in either case. In the event Buyer discovers or
learns that a product does not conform to warranty, Buyer shall immediately notify
Seller in writing of such non-conformity, specifying in reasonable detail the nature
of such non-conformity. If Seller is not provided with such written notification,
Seller shall not be liable for any further damages which could have been avoided if
Seller had been provided with immediate written notification.

THIS WARRANTY IS MADE AND ACCEPTED IN LIEU OF ALL OTHER
WARRANTIES, EXPRESS OR IMPLIED, WHETHER OF MERCHANTABILITY OR
OF FITNESS FOR A PARTICULAR PURPOSE OR OTHERWISE, AS BUYER'S
EXCLUSIVE REMEDY FOR ANY DEFECTS IN THE PRODUCTS TO BE SOLD
HEREUNDER. All other obligations and liabilities of Seller, whether in contract or
tort (including negligence) or otherwise, are expressly EXCLUDED. In no event
shall Seller be liable for any costs, expenses or damages, whether direct or
indirect, special, incidental, consequential, or other, on any claim of any defective
product, in excess of the price paid by Buyer for the product plus return
transportation charges prepaid.

No warranty is made by Seller of any Seller product which has been installed,
used or operated contrary to Seller's written instruction manual or which has been
subjected to misuse, negligence or accident or has been repaired or altered by
anyone other than Seller or which has been used in a manner or for a purpose for
which the Seller product was not designed nor against any defects due to plans or
instructions supplied to Seller by or for Buyer.

This manual is intended for private use by INFICON® Inc. and its customers.
Contact INFICON before reproducing its contents.

NOTE: These instructions do not provide for every contingency that may arise in
connection with the installation, operation or maintenance of this equipment.
Should you require further assistance, please contact INFICON.

www.inficon.com [e-mail]

IC/5 Operating Manual

Table Of Contents

Chapter 1

Introduction and Specifications

1.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-1

1.1.1 Related Manuals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-1

1.2 Instrument Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2

1.2.1 Definition of Notes, Cautions and Warnings. . . . . . . . . . . . . . . . . . . . . . . . . 1-2

1.2.2 General Safety Information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3

1.2.3 Earth Ground . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-4

1.2.4 Main Power Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-5

1.3 How To Contact Customer Support . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6

1.3.1 Returning Your Instrument . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6

1.4 IC/5 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7

1.4.1 Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-7

1.4.2 Screens and Hierarchy . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-7

1.4.3 Set-Up Parameters. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8

1.4.4 Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10

1.4.5 Source / Recorder Outputs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11

1.4.6 Logic Processing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-12

1.4.7 Relays / Inputs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-12

1.4.8 Remote Communications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-13

1.4.9 Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-13

1.4.10 Power . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-13

1.4.11 Operating Environment. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14

1.4.12 Storage Temperature . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14

1.4.13 Warm Up Period . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-14

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1.4.14 Size. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-14

1.4.15 Connector Clearance Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14

1.4.16 Weight . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14

1.4.17 Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14

1.5 Unpacking and Inspection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-15

1.6 Parts and Options Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-15

1.6.1 Base Configurations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-15

1.6.2 Pre-installed Options or Spares . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-16

1.6.3 Optional Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-16

1.6.4 Oscillator Packages and Sensors. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-17

1.7 Initial Power-On Verification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-18

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IC/5 Operating Manual

Chapter 2

Measurement and Control Theory

2.1 Basics. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1

2.1.1 Monitor Crystals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2

2.1.2 Period Measurement Technique . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4

2.1.3 Z-match Technique . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5

2.1.4 Active Oscillator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6

2.1.5 ModeLock Oscillator. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7

2.1.6 Auto Z-match Theory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9

2.1.7 Control Loop Theory. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11

Chapter 3

Operation

3.1 Front Panel Controls . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1

3.2 Rear Panel Interfaces. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3

3.3 Displays . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5

3.3.1 Display Navigation via the MENU TREE . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8

3.3.2 Operate Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-9

3.3.2.1 Crystal Life and Starting Frequency . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12

3.3.3 Sensors Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-13

3.3.3.1 SENSORS Display Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-13

3.3.3.2 Function Key Selection Choices for

the Sensors Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-16

3.3.4 Maintenance/Diagnostics Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-17

3.3.4.1 Function Key Selection Choices for the

Maintenance/Diagnostics Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-17

3.3.5 Source Maintenance Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18

3.3.5.1 Function Key Selection Choices for the

Source Maintenance Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18

3.3.6 Cross Talk and Calibration Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-19

3.3.7 Program Displays . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-20

3.3.7.1 Function Key Selection Choices for the Program Display . . . . . . . . . . . . . 3-20

3.4 Process Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-22

3.4.1 Defining a Process . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-22

3.4.2 Executing a Process. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-23

3.4.3 Pre-conditioning a Layer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-25

3.4.4 Co-deposition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-26

3.4.5 Automating a Process . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-27

3.5 State Descriptions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-30

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IC/5 Operating Manual

3.6 Special Features. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-32

3.6.1 Crystal Switching . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-32

3.6.1.1 CrystalSix Position Select. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-33

3.6.1.2 Rotary Sensor Crystal Switching . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-33

3.6.2 Source/Crucible Selection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-34

3.6.2.1 Example: Programming Turret Source Crucible Selection . . . . . . . . . . . . . 3-34

3.6.3 Auto Z . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-36

3.6.4 Auto Tune - Optimizing the Control Loop . . . . . . . . . . . . . . . . . . . . . . . . . . 3-37

3.6.5 Rate Watcher . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-37

3.6.6 Hand-Held Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-38

3.6.7 Test Mode. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-39

3.6.8 Floppy Disk (Optional) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-39

3.6.9 Lock and Access Codes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-40

3.6.10 Datalog . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-40

Chapter 4

Material Set Up

4.1 Material Set Up Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-1

4.2 Material Definition. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-1

4.3 Material Definition Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-5

4.4 Error Messages in Material Set-Up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-15

Chapter 5

Process Set-Up

5.1 Process Set-Up Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1

5.2 Process Definition. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-2

5.2.1 Layer Editing. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-3

5.3 Layer Definition Parameters. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4

5.4 Error Messages in Process Set-Up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-8

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5.5 Special Layer Parameter Features. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-9

5.5.1 Skip Deposit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-9

5.5.2 Rate Ramp Trigger of Final Thickness . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-9

Chapter 6

I/O Logic Statement Set-Up

6.1 I/O Logic Statement Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-1

6.2 Editing the Logic Statements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-2

6.2.1 Logic Statement Directory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-3

6.2.2 Logic Statement Editing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-4

6.3 ’IF’ Event Definitions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-6

6.4 ’THEN’ Action Definitions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-12

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IC/5 Operating Manual

6.5 Logic Statement Example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-15

6.6 I/O Map Directory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-16

6.7 Define User Messages. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-17

6.8 Floppy Disk. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-19

6.9 Error Messages in I/O

Logic Statement Set-Up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-21

Chapter 7

Remote Communications

7.1 Remote Communication

Configuration Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-1

7.2 Remote Communication Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-2

7.3 Error Messages in

Remote Communications Configuration. . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-4

7.4 Remote Communications Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-4

7.5 Physical Connections. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-4

7.5.1 RS-232C Serial Port. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-5

7.5.2 IEEE488 Port . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-7

7.5.2.1 IEEE Settings for a National Instruments IEEE-GPIB Board . . . . . . . . . . . . 7-8

7.6 Message Protocols. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-8

7.6.1 INFICON Message Formats. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-9

7.7 INFICON Standard

Communication Commands. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-10

7.7.1 ECHO Command . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-10

7.7.2 HELLO Command . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-10

7.7.3 Query Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-11

7.7.3.1 Query Material Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-11

7.7.3.2 Query Process Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-14

7.7.3.3 Query Utility Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-15

7.7.3.4 Query Sensor Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-16

7.7.3.5 Query Source Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-16

7.7.3.6 Query Output Types . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-17

7.7.3.7 Query Logic Statements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-17

7.7.3.8 Query Output Name . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-17

7.7.3.9 Query Input Name . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-17

7.7.3.10 Query User Messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-17

7.7.4 UPDATE Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-18

7.7.4.1 Update Material Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-18

IPN 074-237AE

7.7.4.2 Update Process Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-21

7.7.4.3 Update Utility Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-22

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IC/5 Operating Manual

7.7.4.4 Update Sensor Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-23

7.7.4.5 Update Source Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-23

7.7.4.6 Update Output Types . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-24

7.7.4.7 Update Logic Statements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-24

7.7.4.8 Update Output Name . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-27

7.7.4.9 Update Input Name . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-27

7.7.4.10 Update User Message . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-27

7.7.5 STATUS Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-28

7.7.6 REMOTE Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-38

7.7.7 Negative Response Error Codes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-41

7.8 Sample INFICON Messages and

Host Programs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-41

7.8.1 Sample INFICON Messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-41

7.8.2 Sample Host Programs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-43

7.8.2.1 Serial Communications - No Checksum. . . . . . . . . . . . . . . . . . . . . . . . . . . 7-43

7.8.2.2 Serial Communication with Checksum . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-44

7.8.2.3 IEEE Sample Host Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-45

Chapter 8

Source/Sensor Set-Up

8.1 Source/Sensor Set-Up Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-1

8.2 Source/Sensor Navigation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-2

8.3 Source Parameters. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-3

8.4 Sensor Parameters. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-6

8.5 DAC Output Selection Rules . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-8

8.6 Error Messages in Source/Sensor Set-Up . . . . . . . . . . . . . . . . . . . . . . . . . . 8-9

Chapter 9

Utility Set-Up

IPN 074-237AE

9.1 Utility Set-Up Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9-1

9.2 Utility Navigation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9-2

9.3 Utility Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9-2

9.4 Error Messages in Utility Set-Up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-7

Chapter 10

Applications

10.1 Multiple Sensor Deposition Control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-1

10.1.1 Instrument Parameters and Corrections for

Multiple Sensor Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-2

10.2 Trend Analysis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10-4

10.2.1 Instrument Parameters Associated with the Trend Analysis Feature. . . . . 10-5

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IC/5 Operating Manual

10.3 Use as a System Controller Example. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-5

10.3.1 System Equipment List. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-8

10.3.1.1 Valves. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-8

10.3.1.2 Switches . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-8

10.3.1.3 Solenoid Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-9

10.3.1.4 Electron Beam Gun Power Supply. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-9

10.3.1.5 Vacuum Gauges and Controllers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-9

10.3.1.6 Temperature Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-10

10.3.1.7 Lamps. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-10

10.3.2 I/O Set-Up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-10

10.3.2.1 Outputs Connected to I/O Board 1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-13

10.3.2.2 Outputs Connected to I/O Board 2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-14

10.3.2.3 Logic Statement Directory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-15

Chapter 11

Installation and Interfaces

11.1 Location Guidelines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-1

11.1.1 Sensor Types . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-1

11.1.2 Sensor Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-3

11.1.3 Control Unit Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-5

11.2 Avoiding Electrical Interference . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-5

11.2.1 Verifying/Establishing Earth Ground . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-5

11.2.2 Connections to Earth Ground. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-6

11.2.3 Minimizing Noise Pickup From External Cabling . . . . . . . . . . . . . . . . . . . . 11-7

11.3 Connecting the Controller. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-8

11.3.1 Verifying the Correct Input Voltage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-8

11.3.2 Voltage Selection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-9

11.3.3 Routing XIU Cables . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-10

11.3.4 Interface Cable Fabrication and Pin-Out . . . . . . . . . . . . . . . . . . . . . . . . . 11-10

11.3.4.1 Source Control Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-10

IPN 074-237AE

11.3.4.2 Input/Relay Module Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-11

11.3.4.3 RS-232C Communications. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-13

11.3.4.4 Isolated +24 V(dc) Supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-14

Chapter 12

Calibration Procedures

12.1 Importance of Density, Tooling and Z-ratio . . . . . . . . . . . . . . . . . . . . . . . . 12-1

12.2 Determining Density . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-1

12.3 Determining Tooling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-2

12.4 Laboratory Determination of Z-ratio . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-3

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IC/5 Operating Manual

12.5 Determining Cross Talk Calibration

For Co-Deposition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-4

12.5.1 Procedure Set-Up. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-6

12.5.1.1 Cross Talk Calibrate Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-7

12.5.1.1.1 Function Key Selection Choices for

Cross Talk Calibration Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-8

12.5.2 Cross Talk Calibration MANUAL display . . . . . . . . . . . . . . . . . . . . . . . . . .12-8

12.5.2.1 Function Key Selection Choices for

Cross Talk Calibration Manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-8

12.5.3 Cross Talk Calibration CALIBRATE display . . . . . . . . . . . . . . . . . . . . . . . .12-9

12.5.3.1 Function Key Selection Choices for

Cross Talk Calibration Calibrate. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-9

12.5.4 Cross Talk Calibration SELECT display . . . . . . . . . . . . . . . . . . . . . . . . . . .12-9

12.5.4.1 Function Key Selection Choices for

Cross Talk Calibration Select . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-10

12.5.5 Cross Talk Calibration Procedural Notes . . . . . . . . . . . . . . . . . . . . . . . . .12-10

12.6 AutoTuning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-11

12.6.1 AutoTune Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-12

12.6.2 AutoTune Manual Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-13

12.6.3 AutoTune Tuning Display and

AutoTune Description. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-14

12.6.4 Definition of AutoTune Messages. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-15

12.6.5 AutoTune Preparation Instructions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-17

Chapter 13

Troubleshooting, Status and Error Messages

13.1 Status and Error Messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .13-1

13.2 Troubleshooting Guide . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-11

13.2.1 Major Instrument Components and Assemblies. . . . . . . . . . . . . . . . . . . .13-12

IPN 074-237AE

13.2.2 Troubleshooting the Instrument . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .13-13

13.2.3 Troubleshooting Transducers/Sensors. . . . . . . . . . . . . . . . . . . . . . . . . . . 13-15

13.2.4 Troubleshooting Computer Communications . . . . . . . . . . . . . . . . . . . . . . 13-20

13.3 Replacing the Crystal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-23

13.3.1 Standard and Compact. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .13-23

13.3.2 Shuttered and Dual Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-24

13.3.3 Bakeable Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .13-25

13.3.4 Sputtering Sensor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .13-26

13.3.5 Crystal Snatcher . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .13-27

13.3.6 CrystalSix . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-27

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IC/5 Operating Manual

13.4 Crystal Sensor Emulator

IPN 760-601-G1 or 760-601-G2. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-28

13.4.1 Diagnostic Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-29

13.4.1.1 Measurement System Diagnostic Procedure . . . . . . . . . . . . . . . . . . . . . . 13-29

13.4.1.2 Feed-Through Or In-Vacuum Cable

Diagnostic Procedure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-30

13.4.1.3 Sensor Head Or Monitor Crystal

Diagnostic Procedure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-31

13.4.1.4 System Diagnostics Pass But

Crystal Fail Message Remains. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-32

13.4.2 % XTAL Life . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-32

13.4.3 Sensor Cover Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-33

13.4.3.1 Compatible Sensor Heads . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-33

13.4.3.2 Incompatible Sensor Heads . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-33

13.4.4 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-34

Appendix A

Material Table

A.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .A-1

Index

IPN 074-237AE

TOC - 8

1.1 Introduction

The IC/5 is a closed loop process controller designed for use primarily in physical
vapor deposition. The unit monitors and/or controls the rate and thickness of the
deposition of thin films. Deposition rate and thickness are inferred from the
frequency change induced by mass added to a quartz crystal. This technique
positions sensors in the path between or to the side of the source of the vaporized
material and the target substrate. The sensor incorporates an exposed oscillating
quartz crystal whose frequency decreases as material accumulates. The change
in frequency provides information to determine rate and thickness and to
continually control the evaporation power source. With user supplied time,
thickness and power limits and with desired rates and material characteristics, the
unit is capable of automatically controlling the process in a precise and repeatable
manner. User interaction is accomplished via the unit's front panel and consists of
selection or entry of parameters to define the process.

IC/5 Operating Manual

Chapter 1

Introduction and Specifications

The complete system consists of a main electronics unit, the IC/5, sensor heads
and a crystal interface unit (XIU) for each attached sensor. These items are
generally bundled at the factory and are also sold separately.

The IC/5 Manual provides user information for installing, programming, calibrating
and operating the main electronics unit.

When reading the IC/5 Manual, please pay particular attention to the NOTES,
CAUTIONS, and WARNINGS found throughout the text. The Notes, Cautions, and
Warnings are defined in section 1.2.1 on page 1-2.

You are invited to comment on the usefulness and accuracy of this manual by filling
out the registration card and returning it.

IPN 074-237AE

1.1.1 Related Manuals

Sensors are covered in separate manuals.

 074-154 - Bakeable

 074-155 - CrystalSix

 074-156 - Single/Dual

 074-157 - Sputtering

1 - 1

IC/5 Operating Manual

CAUTION

WARNING

WARNING - Risk Of Electric Shock

1.2 Instrument Safety

1.2.1 Definition of Notes, Cautions and Warnings

When using this manual, please pay attention to the NOTES, CAUTIONS and
WARNINGS found throughout. For the purposes of this manual they are defined as
follows:

NOTE: Pertinent information that is useful in achieving maximum instrument

efficiency when followed.

Failure to heed these messages could result in damage
to the instrument.

Failure to heed these messages could result in personal
injury.

Dangerous voltages are present which could result in
personal injury.

IPN 074-237AE

1 - 2

1.2.2 General Safety Information

WARNING - Risk Of Electric Shock

CAUTION

Do not open the instrument case! There are no
user-serviceable components within the instrument
case.

Dangerous voltages may be present whenever the power
cord or external input/relay connectors are present.

Refer all maintenance to qualified personnel.

This instrument contains delicate circuitry which is
susceptible to transient power line voltages. Disconnect
the line cord whenever making any interface
connections. Refer all maintenance to qualified
personnel.

IC/5 Operating Manual

IPN 074-237AE

1 - 3

IC/5 Operating Manual

WARNING - Risk Of Electric Shock

1.2.3 Earth Ground

The IC/5 is connected to earth ground through a sealed three-core
(three-conductor) power cable, which must be plugged into a socket outlet with a
protective earth terminal. Extension cables must always have three conductors
including a protective earth terminal.

Never interrupt the protective earth circuit.

Any interruption of the protective earth circuit inside or
outside the instrument, or disconnection of the
protective earth terminal is likely to make the instrument
dangerous.

This symbol indicates where the protective earth ground
is connected inside the instrument. Never unscrew or
loosen this connection.

IPN 074-237AE

1 - 4

1.2.4 Main Power Connection

WARNING - Risk Of Electric Shock

This instrument has line voltage present on the primary
circuits whenever it is plugged into a main power source.

Never remove the covers from the instrument during
normal operation.

There are no operator-serviceable items within this
instrument.

Removal of the top or bottom covers must be done only
by a technically qualified person.

In order to comply with accepted safety standards, this
instrument must be installed into a rack system which
contains a mains switch. This switch must break both
sides of the line when it is open and it must not
disconnect the safety ground.

IC/5 Operating Manual

IPN 074-237AE

1 - 5

IC/5 Operating Manual

1.3 How To Contact Customer Support

Worldwide support information regarding:
 Technical Support, to contact an applications engineer with questions

regarding INFICON products and applications, or

 Sales and Customer Service, to contact the INFICON Sales office nearest you,

or

 Repair Service, to contact the INFICON Service Center nearest you,
is available at www.inficon.com.

If you are experiencing a problem with your instrument, please have the following
information readily available:

 the serial number for your instrument,
 a description of your problem,
 an explanation of any corrective action that you may have already attempted,
 and the exact wording of any error messages that you may have received.

To contact Customer Support, see Support at www.inficon.com.

1.3.1 Returning Your Instrument

Do not return any component of your instrument to INFICON without first speaking
with a Customer Support Representative. You must obtain a Return Material
Authorization (RMA) number from the Customer Support Representative.

If you deliver a package to INFICON without an RMA number, your package will be
held and you will be contacted. This will result in delays in servicing your
instrument.

Prior to being given an RMA number, you may be required to complete a
Declaration Of Contamination (DOC) form if your instrument has been exposed to
process materials. DOC forms must be approved by INFICON before an RMA
number is issued. INFICON may require that the instrument be sent to a
designated decontamination facility, not to the factory. Failure to follow these
procedures will delay the repair of your instrument.

IPN 074-237AE

1 - 6

1.4 IC/5 Specifications

1.4.1 Measurement

Crystal Frequency . . . . . . . . . . . . . . 6.0 MHz (new crystal) to 4.5 MHz

Internal Precision . . . . . . . . . . . . . . . ± 0.004657 Hz over 100 ms sample for

Thickness & Rate Resolution . . . . . . 0.00577 Å (new crystal);

Thickness Accuracy . . . . . . . . . . . . . 0.5% typical, (dependent on process

Frequency Accuracy. . . . . . . . . . . . . ± 2 ppm 0-50 °C

Measurement Frequency . . . . . . . . . 10 Hz

IC/5 Operating Manual

fundamental and anharmonic frequencies

0.01016 Å (crystal @ 4.5 MHz) over
100 ms sample for material density = 1.0,
Z-ratio = 1.0

conditions, especially sensor location,
material stress, temperature and density)

Measurement Technique . . . . . . . . . ModeLock with Auto-Z

User Interface. . . . . . . . . . . . . . . . . . CRT and limited membrane keypad. All

parameters accessible through computer
communications. Multiple message areas for
indication of states and detailed indication of
abnormal and stop conditions.

1.4.2 Screens and Hierarchy

Navigation

1) Traditional. . . . . . . . . . . . . . . . Six soft keys

2) "Windows" influence. . . . . . . . X-tree like function with 4 levels of hide/show.

IPN 074-237AE

Structure. . . . . . . . . . . . . . . . . . . . . . Separate screens dedicated to

1) Materials, 2) Layers, 3) Logic,

4) Sensors, 5) Sources, 6) Utility,

7) Maintenance, 8) Communications,

9) Operation

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IC/5 Operating Manual

1.4.3 Set-Up Parameters

# of Processes . . . . . . . . . . . . . . . . . 50

# of Layers . . . . . . . . . . . . . . . . . . . . 250 (total)

# of Materials . . . . . . . . . . . . . . . . . . 24

Density . . . . . . . . . . . . . . . . . . . . . . . 0.100 to 99.99 gm/cc

Z-ratio. . . . . . . . . . . . . . . . . . . . . . . . 0.100 to 15.000 or Automatic

# of Sources . . . . . . . . . . . . . . . . . . . Any of 6 channels

Co-deposition . . . . . . . . . . . . . . . 2 sources may operate concurrently

Control Loop types . . . . . . . . . . . . . . (0,1,2) Non-PID, PI, PID

PID Control Mode. . . . . . . . . . . . . . . Fast or Slow Source

Process Gain . . . . . . . . . . . . . . . 0.01 to 100 Å/sec/%Power

Primary Time Constant. . . . . . . . 0.010 to 200.0 seconds

System Dead Time. . . . . . . . . . . 0.010 to 50.000 seconds

Master Tooling Factor. . . . . . . . . . . . 10.0 to 400.0%

Sensor Tooling Factor . . . . . . . . . . . 10.0 to 400.0%

Sensor Weight . . . . . . . . . . . . . . . . . 1.0 to 400.0%

Sensors . . . . . . . . . . . . . . . . . . . . . . 2 standard, 6 additional w/optional hardware

CrystalSix Position Select . . . . . Material designation of position(s)

Sensor Option . . . . . . . . . . . . . . . . . Enter 0 for "not used"

Enter 1 for "stop if last to fail"
Enter 2 for "time power if last to fail"
Enter 3 for "stop if failed"
Enter 4 for "time power if failed"

Maximum Source Power . . . . . . . . . 0.0 to 99.9%

Power Ramps. . . . . . . . . . . . . . . . . . 2 per material

Power Level . . . . . . . . . . . . . . . . 0.0 to 99.9%

Rise Time . . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:sec

Soak Time . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:sec

Auto Soak 2 Power . . . . . . . . . . . . . Yes/No

IPN 074-237AE

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Delay Option . . . . . . . . . . . . . . . . . . (0,1,2,3) None, Shutter Delay,

Control Delay, Both

Control Delay Time. . . . . . . . . . . . . . 00:00 to 99:59

IC/5 Operating Manual

Feed Ramps. . . . . . . . . . . . . . . . . . . 1 per material

Feed Power . . . . . . . . . . . . . . . . 0.0 to 99.9%

Feed Ramp Time . . . . . . . . . . . . 00:00 to 99:59 min:sec

Feed Time. . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:sec

Idle Ramps . . . . . . . . . . . . . . . . . . . . 1 per material

Idle Power. . . . . . . . . . . . . . . . . . 0.0 to 99.9%

Idle Ramp Time . . . . . . . . . . . . . 00:00 to 99:59 min:sec

Aggregate Rate . . . . . . . . . . . . . . . . 0.0 to 999.9 Å/sec

Aggregate Multiplier . . . . . . . . . . . . . Yes/No

Final Thickness . . . . . . . . . . . . . . . . 0.0 to 999.9 kÅ

Thickness Limit. . . . . . . . . . . . . . . . . 0.0 to 999.9 kÅ

Time Limit. . . . . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:sec

Co-deposition

Cal Thick. . . . . . . . . . . . . . . . . . . uncal, 0.000 to 99.99kÅ

Ratio Control. . . . . . . . . . . . . . . . 0 to 99%

RateWatcher® . . . . . . . . . . . . . . . . . Sample and Hold Feature

RateWatch Time . . . . . . . . . . . . . 00:00 to 99:59 min:sec

RateWatch . . . . . . . . . . . . . . . . . Accuracy 1 to 99%

Rate Ramps . . . . . . . . . . . . . . . . . . . 2 per layer

New Rate . . . . . . . . . . . . . . . . . . 0 to 999 Å/sec

Start Ramp . . . . . . . . . . . . . . . . . 0 to 999.9 kÅ

Ramp Time. . . . . . . . . . . . . . . . . 00:00 to 99:59 min:sec

IPN 074-237AE

Crucible Selection . . . . . . . . . . . . . . 1 to 64, each source

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1.4.4 Display

Type/Color/Size . . . . . . . . . . . . . . . . CRT/ Amber/ 5" H x 9" W

Format . . . . . . . . . . . . . . . . . . . . . . . 23 kHz Horizontal Scan Rate

Resolution . . . . . . . . . . . . . . . . . . . . 750 W x 350 H Monochrome

Vertical Scan Rate . . . . . . . . . . . . . . 50/60 Hz automatically detected

Thickness Display Range. . . . . . . . . 0.000 to 999.9 kÅ

Thickness Display Resolution . . . . . 1 Å

Rate Display Range . . . . . . . . . . . . . 0.0 to 99.9 Å/sec; 100 to 999 Å/sec

Rate Display Resolution. . . . . . . . . . 0.1 Å for 0 to 99.9 Å/sec

Power Display Range. . . . . . . . . . . . 0.0 to 99.9%

Graphic Display Functions . . . . . . . . Rate Deviation at ± 10 or ± 20 Å/sec or Power

Display Data Update Rate . . . . . . . . 1 Hz

IC/5 Operating Manual

1 Å for 100 to 999 Å/sec

at 0 to 100%

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IPN 074-237AE

1.4.5 Source / Recorder Outputs

Quantity . . . . . . . . . . . . . . . . . . . . . . 6 BNC

Configuration . . . . . . . . . . . . . . . . . . User programmable for recorder

Function Ranges

Source Control . . . . . . . . . . . . . . 0 to 10 V, 0 to -10 V, 0 to 5 V,

Recorder Output. . . . . . . . . . . . . 0 to 10 V

Current rating . . . . . . . . . . . . . . . . . . 20 mA per channel

Resolution . . . . . . . . . . . . . . . . . . . . 15 bits over full range (10 V)

Update Rate . . . . . . . . . . . . . . . . . . . 10 Hz, maximum, (dependent on source

Recorder Output Functions . . . . . . . Aggregate Rate or Thickness or Rate

IC/5 Operating Manual

or source control.

0 to -5 V, 0 to 2.5 V, 0 to -2.5 V

characteristics).

Deviation; Individual Sensor Rate, Thickness
or Rate Deviation; or Source Power.

Recorder Output Ranges

Rate . . . . . . . . . . . . . . . . . . . . . . 0 to 100 Å/sec, 0 to 1000 Å/sec

Thickness . . . . . . . . . . . . . . . . . . 0 to 100 Å, 0 to 1000 Å

Rate Deviation . . . . . . . . . . . . . . Desired rate ± 50 Å/sec

Accuracy. . . . . . . . . . . . . . . . . . . . . . ± 3% full scale

Zero Adjust . . . . . . . . . . . . . . . . . . . . Individual potentiometer

IPN 074-237AE

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IC/5 Operating Manual

1.4.6 Logic Processing

Type . . . . . . . . . . . . . . . . . . . . . . . . . If/Then statements

Logical Functions . . . . . . . . . . . . . . . And; Or; Not; Parentheses; ON

Depth . . . . . . . . . . . . . . . . . . . . . . . . 5 "If" conditions and 5 "Then" results/actions

# of Statements . . . . . . . . . . . . . . . . 100 If/Then

Selectable events. . . . . . . . . . . . . . . Deposition monitor events, states, external

Hierarchy . . . . . . . . . . . . . . . . . . . . . Statements evaluated in numerical order at

Partitioning . . . . . . . . . . . . . . . . . . . . None

Initialization . . . . . . . . . . . . . . . . . . . All outputs transition to their normal states as

per statement

inputs, relays, timers, and counters.

10 Hz any time the unit is on.

early as possible during power-on
initialization sequence.

1.4.7 Relays / Inputs

Relays . . . . . . . . . . . . . . . . . . . . . . . SPST 2.5 A relays rated @ 30 V(dc) or

Relay Ratings. . . . . . . . . . . . . . . . . . 100 VA inductive; 2.5A maximum.

# of TTL Compatible Outputs . . . . . . 14 with optional I/O card. Internally pulled up

Inputs (TTL Compatible). . . . . . . . . . (14 standard, 14 additional optional)

Input Levels

maximum high . . . . . . . . . . . . . . 24 V

minimum high. . . . . . . . . . . . . . . 2.5 V

30 V(ac) RMS or 42 V(peak) maximum;
(8 standard, up to 16 optional with 2
additional I/O cards); D sub connector; relays
are normally open in the power off state, but
may be programmed to normally open or
normally closed during operation.

to 5 V(dc). May be pulled up externally to
24 V(dc) through 2.4k resistor.
minimum high level 0.5mA load @3.75 V
maximum low level 10mA load @1.1 V

IPN 074-237AE

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maximum low . . . . . . . . . . . . . . . 1.1 V

Scan/Update Rate . . . . . . . . . . . . . . 10 Hz

1.4.8 Remote Communications

RS232C Serial Port . . . . . . . . . . . . . Standard; INFICON protocol

Baud Rates. . . . . . . . . . . . . . . . . . . . 19,200; 9,600; 4,800; 2,400

IEEE488 Parallel Port. . . . . . . . . . . . Optional

IEEE Service Requests . . . . . . . . . . Supported with RQS and MAV status bits

1.4.9 Accessories

Manual Power . . . . . . . . . . . . . . . . . Front panel

Control Connection

Function . . . . . . . . . . . . . . . . . . . . . . Handheld, increase/decrease/stop

Floppy (Optional) . . . . . . . . . . . . . . . 3.5', 1.44 MByte for process and

Connector Kit . . . . . . . . . . . . . . . . . . Connectors for inputs and relays

Operating Manual. . . . . . . . . . . . . . . 3-ring binder type

IC/5 Operating Manual

datalog storage

1.4.10 Power

Power . . . . . . . . . . . . . . . . . . . . . . . . 100 +10%, -15% V(ac) 50/60 Hz

120 +10%, -10% V(ac) 50/60 Hz
230 +10%, -10% V(ac) 50/60 Hz
240 +10%, -15% V(ac) 50/60 Hz

Maximum apparent power . . . . . . . . 300 VA

Fuse . . . . . . . . . . . . . . . . . . . . . . . . . 100 V(ac), 120 V(ac) use 4 Amp IEC 127

approved type T
230 V(ac), 240 V(ac) use 2 Amp IEC 127
approved type T

IPN 074-237AE

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IC/5 Operating Manual

1.4.11 Operating Environment

Usage. . . . . . . . . . . . . . . . . . . . . . . . Indoor only

Temperature. . . . . . . . . . . . . . . . . . . 0 to 50 °C (32-122 °F)

Humidity . . . . . . . . . . . . . . . . . . . . . . Up to 85%RH, non-condensing

Altitude . . . . . . . . . . . . . . . . . . . . . . . Up to 2000 meters

Installation (Overvoltage) . . . . . . . . . Category II per IEC 664

Pollution Degree. . . . . . . . . . . . . . . . 1 per IEC 664

1.4.12 Storage Temperature

Storage Temperature . . . . . . . . . . . . -10 to 60 °C (14 to 140 °F)

1.4.13 Warm Up Period

Warm Up Period. . . . . . . . . . . . . . . . None required;

For maximum stability allow 5 minutes.

1.4.14 Size

Not including mounts or user connectors

5.25" H x 17.625" W x 18.5" D
(133.4 mm H x 447.7 mm W x 470 mm D)

Including mounts, but no user connectors

5.25" H x 18.85" W x 18.5" D
(133.4 mm H x 478.8 mm W x 470 mm D)

1.4.15 Connector Clearance Requirements

Front. . . . . . . . . . . . . . . . . . . . . . . . . Less than 1.0" (25.4 mm)

Rear . . . . . . . . . . . . . . . . . . . . . . . . . Less than 4.0" (101.6 mm)

1.4.16 Weight

With all options. . . . . . . . . . . . . . . . . 13.2 kg / 29 lb

1.4.17 Cleaning

IPN 074-237AE

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Use a mild, nonabrasive cleaner or detergent taking care to prevent cleaner from
entering the unit.