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HPG400-SP
User Manual
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User Manual
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INFICON HPG400-SP User Manual

Communication Protocol
Profibus
DP/V1 Interface for Bayard-Alpert / Pirani Gauge and High Pressure / Pirani Gauge
BPG400-SP HPG400-SP
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About this Document
This document describes the functionality and programming of the Profibus inter­face of the BPG400-SP and HPG400-SP gauges. The interface hardware, the firmware, and the communication protocol are practically the same for both gauges. Information that applies to only one of the above gauge types is correspondingly identified in this document.
For safety information on and technical data of the gauges, please refer to their respective operating manuals (→ [1], [3] for BPG400-SP and [4], [6] for HPG400-SP).
In information referring to the ionization vacuum measuring part of the gauge, the short designations
"BA" (BPG400-SP, Bayard-Alpert measuring principle)
"HP" (HPG400-SP High Pressure Gauge)
are used. The short designation "BA/HP" means that the corresponding information applies to both gauge types.
The designation "Pirani" is used in information referring to the Pirani vacuum measuring part of the gauge.
Product Identification
In all communications with INFICON, please specify the information on the product nameplate. For convenient reference copy that information into the space provided below.
INFICON AG, LI-9496 Balzers
Model: PN: SN: V W
Validity
This document applies to products with part numbers
BPG400-SP (with Profibus interface and switching functions)
353-505 353-506 (vacuum connection DN 40 CF-R)
HPG400-SP (with Profibus interface and switching functions)
353-525 353-526 (vacuum connection DN 40 CF-R)
The part number (PN) can be taken from the product nameplate.
(vacuum connection DN 25 ISO-KF)
(vacuum connection DN 25 ISO-KF)
Intended Use
The BPG400-SP and HPG400-SP gauges allow vacuum measurement of non flammable gases and gas mixtures (pressure ranges → [1], [3] for BPG400-SP and [4], [6] for HPG400-SP).
The gauges can be operated with an INFICON controller or another instrument or control device.
Functional Principle
Trademarks
The functions of the gauges are described in their respective operating manuals (→ [1], [2], [3] for BPG400-SP and [4], [5], [6] for HPG400-SP).
The integrated Profibus interface allows operating the gauge in connection with other suitable devices in a Profibus network according to the standard described in [6], [7].
®
Semiconductor Equipment and Materials International, California
SEMI
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Contents
About this Document 2 Product Identification 2 Validity 2 Intended Use 3 Functional Principle 3 Trademarks 3
1 General Data 6
1.1 Data Rate 6
1.2 Device Address 6
1.3 Ident Number 6
1.4 Configuration Data 6
1.5 User Parameter Data 7
1.6 Types of Communication 7
2 Data Exchange Mode 8
2.1 Acyclic Data Transmission with Profibus DPV1 Functionality 8
2.2 Structure of the Cyclic Data Telegrams in Data Exchange Mode 9
2.2.1 Parameter Channel 10
2.2.1.1 PKE Parameter Signature Value 10
2.2.1.2 PWE Parameter Process Value 11
2.2.1.3 Error Code (Error Message) 11
2.3 Cyclic Message Telegrams 12
3 Block Model 13
3.1 Device Block 14
3.1.1 Information on the Individual Indices 15
3.1.1.1 Block Type ID 16 15
3.1.1.2 Device Type ID 17 15
3.1.1.3 Standard Revision Level ID 18 15
3.1.1.4 Device Manufacturer Identifier ID 19 15
3.1.1.5 Manufacturer Model Number ID 20 15
3.1.1.6 Software or Firmware Revision Level ID 21 15
3.1.1.7 Hardware Revision Level ID 22 15
3.1.1.8 Device Configuration ID 24 15
3.1.1.9 Device State ID 25 15
3.1.1.10 Exception Status ID 26 16
3.1.1.11 Exception Detail Alarm ID 27 17
3.1.1.12 Exception Detail Warning ID 28 19
3.1.1.13 Emission On Switch ID 202 (HPG400-SP Only) 20
3.1.1.14 Sensor Calibration Switch ID 203 (HPG400-SP Only) 21
3.1.1.15 Copy Common Exception Detail Alarm 0 ID 204 21
3.1.1.16 Copy Device Exception Detail Alarm 0 … 3 ID 205 21
3.1.1.17 Copy Manufacturer Exception Detail Alarm 0 ID 206 21
3.1.1.18 Copy Common Exception Detail Warning 0 ID 207 21
3.1.1.19 Copy Device Exception Detail Warning 1 … 4 ID 208 21
3.1.1.20 Copy Manufacturer Exception Detail Warning 0 ID 209 21
3.1.2 Device Block, Device Behavior 22
3.1.2.1 Device Block State Command 23
3.2 Analog Input Block 23
3.2.1 One Of N Analog Input Function Block / SLOT 1 24
3.2.1.1 AI Block Adjust Command (Adjustment at Atmospheric Pressure) 24
3.2.1.2 Block Type 24
3.2.1.3 Channel Instance Selector 24
3.2.1.4 PV Selector 24
3.2.2 Analog Sensor Input Function Block Instance 1 / SLOT 1 25
3.2.2.1 Process Value 25
3.2.2.2 Status 25
3.2.2.3 Data Type 26
3.2.2.4 Data Unit 26
3.2.2.5 Reading Valid 26
3.2.2.6 Full Scale 26
3.2.2.7 Safe State 27
3.2.2.8 Safe Value 27
3.2.2.9 Overrange 27
3.2.2.10 Underrange 27
3.2.3 Analog Sensor Input Function Block Instance 2 / SLOT 1 28
3.2.3.1 Process Value 28
3.2.3.2 Status 29
3.2.3.3 Data Type 29
3.2.3.4 Data Unit 29
3.2.3.5 Reading Valid 30
3.2.3.6 Full Scale 30
3.2.3.7 Safe State 30
3.2.3.8 Safe Value 30
3.2.3.9 Overrange 31
3.2.3.10 Underrange 31
3.2.4 Analog Sensor Input Function Block Instances 3 and 4 / SLOT 1 32
3.2.4.1 Process Value 32
3.2.4.2 Status 33
3.2.4.3 Data Type 33
3.2.4.4 Data Unit 33
3.2.4.5 Reading Valid 33
3.3 Transducer Block 33
3.3.1 One Of N Vacuum Gauge Transducer Block / SLOT 1 33
3.3.1.1 One Of N Status Extension 33
3.3.2 Heat Transfer Vacuum Gauge Transducer Block / SLOT 1 33
3.3.2.1 Block Type 33
3.3.2.2 Status Extension 34
3.3.2.3 Sensor Alarm 34
3.3.2.4 Sensor Warning 34
3.3.2.5 Full Scale State 34
3.3.3 Hot Cathode Ion Gauge Transducer Block / SLOT 1 35
3.3.3.1 Block Type 35
3.3.3.2 Status Extension 35
3.3.3.3 Sensor Alarm 35
3.3.3.4 Sensor Warning 35
3.3.3.5 Emission Status 36
3.3.3.6 Emission Current (BPG400-SP Only) 36
3.3.3.7 Degas Status (BPG400-SP Only) 36
3.3.3.8 Hot Cathode Block State Command (BPG400-SP Only) 36
Appendix A: Definitions 37
Appendix B: Block Type 40
Appendix C: Electrical Connections 41
Appendix D: Literature 43
For cross-references to other documents, the symbol (→ [XY]) is used.
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1 General Data
1.1 Data Rate
1.2 Device Address
1.3 Ident Number
The gauge supports all data rates defined in the EN 50170 standard (→ [8]) up to 12 Mbaud. Automatic data rate setting is supported. Alternatively, a fixed data rate can be selected.
The device address ( node address) must be set via two rotary switches when the gauge is installed.
For unambiguous identification of the gauge in a Profibus environment, a node address is required. The node address setting is made on the gauge.
The node address (0 … 125 (00 … 7D used for setting the high-order address nibble and the "LSD" switch for defining the low-order address nibble.
The node address is polled by the firmware when the gauge is switched on. If the setting deviates from the stored value, the new value is taken over into the NVRAM. If a value >7D stored in the device remains valid. However, the address can be set via the Profibus master with the "Set Slave Address" service. This address setting will be stored in the EEPROM of the gauge.
The ident numbers assigned to the gauges by the PNO (→ [7]) are:
) via the "ADDRESS" switches. The "MSD" switch is
hex
hex
(>125
) is entered, the node address setting currently
dec
) is set in hexadecimal form
dec
1.4 Configuration Data
Gauge Ident number (hexadecimal)
BPG400-SP 06A9
HPG400-SP 06A8
Depending on the standard telegrams used (→ section "Cyclic Message Tele­grams"), the following configuration data have to be transmitted to the gauge during the configuration phase:
Standard telegram
Master ⇒ Slave
- 2 0x44, 0x84, 0x05, 0x05, 0x05,
- 3 0x44, 0x86, 0x05, 0x05, 0x05,
1 4 0xC6, 0x87, 0x8c, 0x0A, 0x0A,
1 5 0xC6, 0x87, 0x8E, 0x0A, 0x0A,
Standard telegram
Slave ⇒ Master
Configuration data
0x03
0x08
0x05, 0x05, 0x05, 0x03
0x05, 0x05, 0x05, x08
1.5 User Parameter Data
Depending on the pressure unit setting ( data unit), the following configuration string has to be transmitted to the gauge (parameter data in hexadecimal format):
1.6 Types of Communication
Pressure unit User parameter data string
COUNTS
1)
00 00 00 03 E9
Torr 00 00 00 05 15
Micron 00 00 00 05 16
mbar 00 00 00 05 1C
Pascal 00 00 00 05 1D
1)
If COUNTS is selected as pressure unit, a value is output, which can be con­verted into a corresponding pressure value by means of a formula (→ section "Analog Sensor Input Function Block" for more information).
BPG400-SP and HPG400-SP work according to the Profibus DPV1 specification and can be addressed in cyclic or acyclic data traffic (→ [7]).
Acyclic data traffic should be used to make device or process specific settings such as definition of the Safe Values, Safe States etc. or for reading or writing of rarely used attributes.
Cyclic data traffic is used for continuous exchange of the required process para­meter values, i.e. pressure value and status indications. A number of standard telegrams are available for cyclic data traffic. They can be selected according to requirements (→ section "Cyclic Message Telegrams").
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2 Data Exchange Mode
2.1 Acyclic Data Trans­mission with Profibus DPV1 Functionality
Block, slot and index assignment
The reading and writing operations defined in the Profibus are based on a slot index address scheme. In BPG400-SP / HPG400-SP, all device functions are organized in the following blocks:
• A device block describing all organizational parameters of the gauge (serial number, manufacturer, software version, …)
• An Analog Sensor Function Block describing the function of the pressure pres­entation
• An Analog Sensor Transducer Block describing the physical interface between the gauge and the process (emission current, ion current, …).
The block model is described in detail in section "Block Model".
Each block is assigned to a separate slot. The exact assignment Block ⇒ Slot ⇒ Index is described in section "Block Model". The Device Block is assigned to Slot 0, the transducer and functional blocks to Slot 1.
Index
254
Device
Block
Block_1 Block_2 Block_3
0
There are 254 indices per slot. The indices can have a width of 255 bytes. All val­ues that can be accessed via Profibus have to be mirrored to one of these slots/ indices.
The parameters are generally numbered in ascending order, starting with index 16. Services such as "Degas On" or "Full scale" are numbered in descending order, starting with index 15.
0123
Assignment of the block ele­ments to the slot indices
Index
2.2 Structure of the Cyclic Data Telegrams in Data Exchange Mode
Parameter_n
Block_x
Parameter_2 Parameter_1
16
0
In Data Exchange mode, the DP master class 1 cyclically transmits data from and to all slaves that are connected to the bus.
In this document, data transmitted from the slave to the master are called "input data" and data transmitted from the master to the slave are called "output data".
The input and output data of the BPG400-SP / HPG400-SP have two logic parts:
1) the parameter channel
2) the process data channel
There is a number of standard telegrams, consisting of:
a) the parameter channel only
b) the process data channel only
c) both, the parameter and process data channel
The parameter channels allows masters without Profibus DPV1 to access device specific parameters that are not part of the normal cyclic data telegram. For mas­ters with Profibus DPV1, no parameter channel is required.
Parameter_0
Operation_1 Operation_2 Operation_n
optional
Block_Type_Name
Attributes
Public
Operations Public
optional
Private
Input data
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The input data (transmitted by the BPG400-SP / HPG400-SP) consist of the 8 bytes of the parameter channel (if there is a parameter channel in the standard telegram) and of 5 … 7 bytes of process data depending on the selected standard telegram.
Byte Byte
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
Parameter channel Process data
PKE IND res. PWE
Where: PKE = Parameter Signature Value
IND = Sub Index
res. = reserved
PWE = Process Value
Reading or writing com­mand and definition of the slot
Index No. of the index to be read (→ "Block Model")
Value to be read or written
Output data
The output data (transmitted by the master) consist of 8 bytes of the parameter channel or, if there is no parameter channel in the standard telegram, of 0 bytes.
Byte
1 2 3 4 5 6 7 8
Parameter channel
PKE IND res. PWE
2.2.1 Parameter Channel
2.2.1.1 PKE Parameter Signature Value
The structure of the parameter channel is described in the table below.
The parameter channel (called PKW Interface hereinafter) consists of 8 bytes.
Octets
1 2 3 4 5 6 7 8
PKE IND res. PWE
The PKW Interface allows reading and writing of slave parameters with a maximum data length of 4 bytes. Strings cannot be read.
The slave generates exactly one response per instruction transmitted by the master. The instruction and response cannot be blocked. This means that exactly one instruction per output telegram can be transmitted to the slave and that exactly one response per input telegram can be transmitted to the master. 4 bytes of actual data can thus be transmitted at a time.
The instruction and response are represented in the first two bytes (PKE) of the parameter channel:
Bit position
15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0
AK res. Slot
Where: Bits Meaning
15 … 12
AK Instruction/response signature
11 … 8 Reserved
7 … 0 Define the slot from which data are read or onto which a
value is to be written
Instruction signature
In Master ⇒ Slave communication, the AK field contains the instruction signature of the master.
In Slave ⇒ Master communication, the AK field contains the instruction signature of the slave.
AK Function
Master ⇒ Slave (Instruction signature)
AK
normal
Function Slave ⇒ Master (Response signature)
AK
error
0 No instruction 0 No response
1 Read parameter value 1
Transmit parameter value
7
1)
(word)
2
Transmit parameter value (double word)
11
Transmit parameter value (byte)
2 Write parameter value
1 Transmit parameter value
(data type: word)
3 Write parameter value
2 Transmit parameter value
(data type: double word)
10 Write parameter value
11 Transmit parameter value
(data type: byte)
1)
Instruction cannot be executed (error code)
(word)
(double word)
(byte)
7
7
7
1)
1)
1)
On the left of the table, the instruction signatures of the master are listed according to their function. On the right of the table, the corresponding normal responses (AK Normal) and error codes (AK Error) transmitted by the slave are listed.
Instruction – response sequence
2.2.1.2 PWE Parameter Process Value
2.2.1.3 Error Code (Error Message)
1) The master transmits an instruction to the slave and repeats that instruction until it receives a response from the slave.
2) The slave keeps transmitting the response to the instruction until the master transmits a new instruction.
3) The master marks the end of the first instruction cycle by setting AK to zero. Only after that, a new instruction/response cycle may be started.
The PWE represents the data element to be transmitted.
If a byte is to be transmitted, that byte has to be in position 8 of the parameter channel.
Integers are transmitted with bytes 7 and 8. Double integer and float values are transmitted with bytes 5 … 8.
In the event of a transmission error (AK response signature = 7), the slave trans­mits an error code in byte positions 7 and 8 (data type: INT16).
Error code Meaning
0 Undefined slot
1 Parameter not changeable
2 Lower or upper value range limit overflow
3 Index error
5 Data type error
17 Instruction not allowed in this state
18 Other errors
201 Already in requested state
202 Object state conflict
The following diagram shows an example of a data request from a master to a BPG400-SP / HPG400-SP via parameter channel.
BPG400-SP HPG400-SP
Parameter
Request
(Server)
Fetch
Data
Store
Data
DP-Master
Parameter
Request
(Client)
AK(IS) = 0
AK(RS) = 0
AK(IS) = 0
AK(RS) = 0
AK (IS) = 1
AK(RS) = 0
AK (IS) = 1
AK(RS) = 0
AK (IS) = 1
AK(RS) = 1
AK (IS) = 0
AK(RS) = 0
AK (IS) = 0
AK(RS) = 0
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2.3 Cyclic Message Telegrams
The message telegrams listed below are implemented in the gauge. They can be selected according to requirements. When selecting a message telegram, ascertain what output format of the measured value (integer/float) is required and whether a parameter channel is needed or not. The gauge can also be operated in such a way that the master does not transmit any output data to the slave.
Standard telegram
1
2
3
4
5
Master
⇔
Slave
M ⇒ S
S ⇒ M
S ⇒ M
S ⇒ M
S ⇒ M
Byte Meaning
1 … 8 Parameter channel
1 Exception status
2 One Of N status extension
3 One Of N PV selector
4 … 5 Process value UINT16
1 Exception status
2 One Of N status extension
3 One Of N PV selector
4 … 7 Process value float
1 … 8 Parameter channel
9 Exception status
10 One Of N status extension
11 One Of N PV selector
12 … 13 Process value UINT16
1 … 8 Parameter channel
9 Exception status
10 One Of N status extension
11 One Of N PV selector
12 … 15 Process value float
Configuration data
In the following table, the possible reasonable combinations are listed with the corresponding configuration data.
Standard telegram
Master ⇒ Slave
- 2 0x44, 0x84, 0x05, 0x05, 0x05, 0x03
- 3 0x44, 0x86, 0x05, 0x05, 0x05, 0x08
1 4 0xC6, 0x87, 0x8c, 0x0A, 0x0A, 0x05,
1 5 0xC6, 0x87, 0x8E, 0x0A, 0x0A, 0x05,
Standard telegram
Slave ⇒ Master
Configuration data
0x05, 0x05, 0x03
0x05, 0x05, x08
3 Block Model
Data to the BPG400-SP / HPG400-SP can be transmitted by means of a number of communication protocols and corresponding masters. Profibus defines a master class 1 as normal control unit of the slave (typically a PLC) and a master class 2 as configuration and service unit. The following communication protocols are defined according to the Profibus DPV1 standard.
MS0 Cyclic data traffic between master class 1 and slave
MS1 Acyclic data traffic between master class 1 and slave
MS2 Acyclic data traffic between master class 2 and slave
In BPG400-SP / HPG400-SP, all functions that are made available by the gauge via Profibus are organized in blocks. Access to the individual parameters of the blocks is possible via acyclic services or, for byte, integer and float values, also in cyclic data traffic via the parameter channel.
Block types
The following block types are defined in the gauge.
Device Block The Device Block contains all data that are required for de-
scribing the device and handling its state (status of Device State Machine).
Transducer Block The physical, process specific functions or interfaces between
the BPG400-SP / HPG400-SP and the process such as current and voltage values are represented in transducer blocks.
The following transducer blocks are implemented:
• One of N Vacuum Gauge Transducer Block
• Heat Transfer Vacuum Gauge Transducer Block (Pirani)
• Hot Cathode Ion Gauge Transducer Block (BA/HP)
Function Block Application specific values such as pressure values that result
from or can be calculated from the values of the transducer block are represented in the function blocks.
• One Of N Analog Input Function Block
• Analog Input Function Block, Instance 1, Instance 2,
Instance 3, Instance 4
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3.1 Device Block
The following table lists the services and parameters integrated in the Device Block (→ Appendix A for abbreviations).
ID Name Structure Data type Bytes Access Value Store
15 Device Block State Simple Unsigned8 1 1_R/W
2_R/W
16 Block Type Simple Octet string 4 1/2_R 1 N
17 Device Type Simple Visible string 8 1/2_R CG N
18 Standard Revision Level Simple Visible string 9 1/2_R E54-0997 N
19 Device Manufacturer
Identifier
20 Manufacturer
Model Number
21 Software or Firmware
Revision Level
22 Hardware Revision Level Simple Visible string 8 1/2_R e.g. 1.0 N
23 Serial Number Simple Visible string 30 1/2_R e.g. 100 N
24 Device Configuration Simple Visible string 50 1/2_R e.g.
25 Device State Simple Unsigned8 1 1/2_R V
26 Exception Status Simple Unsigned8 1 0_XI
27 Exception Detail Alarm Record
28 Exception Detail
Warning
202 Emission On Switch Simple Analogical to
203 Sensor Calibration
Switch
204 Common Exception
Detail Alarm 0
205 Device Exception Detail
Alarm 0 … 3
206 Manufacturer Exception
Detail Alarm 0
207 Common Exception
Detail Warning 0
208 Device Exception Detail
Warning 1 … 4
209 Manufacturer Exception
Detail Warning 0
Simple Visible string 20 1/2_R INFICON AG N
Simple Visible string 20 1/2_R e.g.
353-525
Simple Visible string 8 1/2_R e.g. 1.01 N
HPG400-SP
1/2_R
→ below
Record
Simple UINT8 1 1/2_R V
Simple UINT8 1 1/2_R V
Struct Array of
Simple UINT8 1 1/2 _R V
Simple UINT8 1 1/2 _R V
Struct Array of
Simple UINT8 1 1/2_R V
→ below
data type value (para­meter 21)
4 bytes
4 bytes
- 1/2_R V
- 1/2_R V
1 1/2_R V
4 1/2_R V
4 1/2 _R V
N
N
V
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