INFICON HPG400 ATM User Manual

Operating Maual
High Pressure / Pirani Gauge
HPG400 HPG400-SD HPG400-SP
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Product Identification
INFICON AG, LI-949 6 Balzers
Typ: No: F-No: V W
Validity
This document applies to products with the following part numbers: HPG400
HPG400 (with display)
HPG400-SD (with DeviceNet interface and switching functions)
HPG400-SP (with Profibus interface and switching functions)
The part number (PN) can be taken from the product nameplate.
All HPG400 versions are shipped with an instruction sheet ( [8]). HPG400-SD and HPG400-SP come with a supplementary instruction sheet de-
scribing the fieldbus interfaces and the switching functions ( [9]).
(without display)
353-520 353-522 (vacuum connection DN 40 CF-R)
353-521 353-523 (vacuum connection DN 40 CF-R)
353-527 353-528 (vacuum connection DN 40 CF-R)
353-525 353-526 (vacuum connection DN 40 CF-R)
(vacuum connection DN 25 ISO-KF)
(vacuum connection DN 25 ISO-KF)
(vacuum connection DN 25 ISO-KF)
(vacuum connection DN 25 ISO-KF)
If not indicated otherwise in the legends, the illustrations in this docu­ment correspond to gauge with part number 353-520. They apply to the other gauges by analogy.
We reserve the right to make technical changes without prior notice.
2 tina31e1 (2004-05) HPG400 v1.om
Intended Use
The HPG400 gauges have been designed for vacuum measurement of non-flam­mable gases and gas mixtures in a pressure range of 2×10 trol range of the gauge allows trend display from <1 mbar to 1000 mbar.
The gauges can be operated in connection with the INFICON Vacuum Gauge Controller VGC4XX or with other control devices.
-6
… 1 mbar. The con-
Functional Principle
Trademarks
The HPG400 functions with a HP (high pressure) hot cathode ionization manome­ter, which is controlled by the built-in Pirani manometer (control range). The hot cathode is switched on only below the switching threshold of ≈1 mbar (to prevent filament burn-out). For pressures above this threshold, the Pirani signal is output.
Over the whole measuring range, the measuring signal is output as logarithm of the pressure.
DeviceNet™ Open DeviceNet Vendor Association, Inc.
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Contents
Product Identification 2 Validity 2 Intended Use 3 Functional Principle 3 Trademarks 3
1 Safety 6
1.1 Symbols Used 6
1.2 Personnel Qualifications 6
1.3 General Safety Instructions 7
1.4 Liability and Warranty 7
2 Technical Data 8 3 Installation 13
3.1 Vacuum Connection 13
3.1.1 Removing and Installing the Electronics Unit 15
3.2 Electrical Connection 16
3.2.1 Use With INFICON VGC4XX Vacuum Gauge Controller 16
3.2.2 Use With Other Controllers 17
3.2.2.1 Making a Sensor Cable 17
3.2.2.2 Making a DeviceNet Interface Cable (HPG400-SD) 19
3.2.2.3 Making a Profibus Interface Cable (HPG400-SP) 20
3.2.3 Using the Optional Power Supply (With RS232C Line) 21
4 Operation 23
4.1 Measuring Principle, Measuring Behavior 23
4.2 Operational Principle of the Gauge 25
4.3 Putting the Gauge Into Operation 26
4.4 Display (HPG400) 27
4.5 RS232C Interface 28
4.5.1 Description of the Functions 28
4.5.1.1 Output String (Transmit) 28
4.5.1.2 Input String (Receive) 30
4.6 DeviceNet Interface (HPG400-SD) 31
4.6.1 Description of the Functions 31
4.6.2 Operating Parameters 31
4.6.2.1 Operating Software 31
4.6.2.2 Node Address Setting 31
4.6.2.3 Data Rate Setting 32
4.6.3 Status Lights 32
4.7 Profibus Interface (HPG400-SP) 33
4.7.1 Description of the Functions 33
4.7.2 Operating Parameters 33
4.7.2.1 Operating Software 33
4.7.2.2 Node Address Setting 33
4.8 Switching Functions (HPG400-SD, HPG400-SP) 34
4.8.1 Setting the Switching Functions 34
5 Deinstallation 36
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6 Maintenance, Repair 37
6.1 Maintenance 37
6.2 Adjusting the Gauge 37
6.2.1 Pirani Adjustment (HPG400) 37
6.2.2 Pirani Adjustment (HPG400-SD, HPG400-SP) 38
6.3 Adjusting the Calibration Setting of the Hot Cathode 39
6.4 What to Do in Case of Problems 40
6.5 Replacing the Sensor 42
7 Options 43 8 Spare Parts 43 9 Storage 43 10 Returning the Product 44 11 Disposal 44
Appendix 45
A: Relationship Output Signal – Pressure 45 B: Gas Type Dependence 46 C: Literature 48
Declaration of Contamination 49
For cross-references within this document, the symbol ( XY) is used, for cross­references to other documents, the symbol ( [Z]).
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1 Safety
1.1 Symbols Used
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environmental damage.
Caution
Information on correct handling or use. Disregard can lead to malfunctions or mi­nor equipment damage.
Notice
1.2 Personnel Qualifications
Hint, recommendation
The result is O.K.
The result is not as expected
Optical inspection
Waiting time, reaction time
Skilled personnel
All work described in this document may only be carried out by persons who have suitable technical training and the necessary experience or who have been instructed by the end-user of the product.
6 tina31e1 (2004-05) HPG400 v1.om
1.3 General Safety Instructions
Adhere to the applicable regulations and take the necessary precautions for the process media used.
Consider possible reactions between the materials ( 11) and the process media.
Consider possible reactions of the process media (e.g. explosion) due to heat generated by the product.
Adhere to the applicable regulations and take the necessary precautions for all work you are going to do and consider the safety instructions in this document.
Before beginning to work, find out whether any vacuum components are con­taminated. Adhere to the relevant regulations and take the necessary precau­tions when handling contaminated parts.
Communicate the safety instructions to all other users.
1.4 Liability and Warranty
INFICON assumes no liability and the warranty becomes null and void if the end­user or third parties
disregard the information in this document
use the product in a non-conforming manner
make any kind of interventions (modifications, alterations etc.) on the product
use the product with accessories not listed in the corresponding product docu-
mentation.
The end-user assumes the responsibility in conjunction with the process media used.
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2 Technical Data
Measurement
Emission
Measuring range (air, N2)
Hot cathode Pirani (control range)
Accuracy
-5
10
… 1 mbar
2×10 1×10
±15% of reading (valid between 10 over threshold setting (<P HP>, 25).
Repeatability
-5
… 10-1 mbar
10
-1
10
… 100 mbar
Gas type dependence
Switching (changeover) threshold (selectable from 5 defined setpoints)
(after 10 min. stabilization) ±2% of reading
±30% of reading
Appendix B
1 mbar 5×10 2×10 1×10 5×10
Emission current
from 1 mbar to 2×10
–6
mbar
continually rising 4 µA 130 µA
Anode voltage 180 V
-6
… 1 mbar
-2
… 1000 mbar
–1
mbar
–1
mbar
–1
mbar
–2
mbar
-5
mbar and change-
Output signal
Identification of the gauge
Voltage range 0 … +10.2 VDC Measuring range
Hot cathode Pirani
Overrange hot cathode Underrange hot cathode
Overrange Pirani Underrange Pirani
Relationship voltage-pressure
Hot cathode Pirani
1.5 … 7.5 V
8.5 … 9.75 V
7.5 V ≤ U ≤ 8.0 V
0.5 V ≤ U ≤ 1.5 V
9.75 V U 10.2 V
8.0 V ≤ U ≤ 8.5 V logarithmic,
Appendix A
1.00 V/decade
0.25 V/decade
Error signals
Hot cathode error Pirani error
Min. load impedance
Resistor
≤+0.3 V, → 40 ≤+0.5 V, → 40
10 k, short cicuit proof
56 k between pin 10 and pin 5 (sensor cable connector)
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Display (HPG400)
For gauges with part numbers
353-521 353-523
Power supply
Display panel
LCD matrix, 32×16 pixels, with background illumination green = normal operation
red = error/warning 27) Dimensions Parameters
16.0 mm × 11.2 mm
Pressure, pressure unit, status,
error messages Pressure units
mbar (factory setting), Torr, Pa
(selecting the pressure unit 28)
DANGER
The gauge must only be connected to power supplies, instruments or control devices that conform to the requirements of a grounded extra­low voltage (SELV-E according to EN 61010). The connection to the gauge has to be fused (INFICON controllers fulfill these requirements).
Operating voltage at the gauge +24 VDC (20 … 28 VDC)
ripple max. 2 V
Power consumption
Standard Emission start (<200 ms)
0.5 A1.4 A
Power consumption
HPG400, HPG400-SD HPG400-SP
16 W18 W
Fuse necessary 1.25 AT
pp
1)
HPG400-SD requires an additional, separate power supply for the DeviceNet interface ( 19).
Supply voltage at the DeviceNet connector (Pin 2 and Pin 3) +24 VDC (+11 … 25 VDC)
Power consumption <2 W The gauge is protected against reversed polarity of the supply voltage.
1)
Measured at sensor cable connector (consider the voltage drop as function of the sensor cable length).
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Sensor cable connection
For reasons of compatibility, the expression "sensor cable" is used for all HPG400 versions in this document, although the pressure reading of the gauges with fieldbus interface (HPG400-SD and HPG400-SP) is nor­mally transmitted via the corresponding bus.
Electrical connector
HPG400 HPG400-SD, HPG400-SP
Cable for HPG400
Analog values only Incl. RS232C interface and
identification
Cable for HPG400-SD, HPG400-SP
Max. cable length (supply voltage 24 V)
Analog and fieldbus operation
RS232C- and VGC4XX operation
Switching functions
HPG400 HPG400-SD, HPG400-SP
Adjustment range
Relay contact rating
Voltage Current
D-Sub,15 pins, male
17 → 18
4 conductors plus shielding
7 conductors plus shielding depending on the functions used,
max. 14 conductors plus shielding
35 m, conductor cross-section 0.25 mm²50 m, conductor cross-section 0.34 mm100 m, conductor cross-section 1.0 mm²
30 m
none 2 (Setpoint A and B)
-6
2×10
mbar … 100 mbar
Setpoints adjustable via potentiometers (setpoints A and B), one floating, nor­mally open relay contact per setpoint ( 18, 34).
60 V0.5 ADC
RS232C interface
DeviceNet interface (HPG400-SD)
Data rate Data format
9600 Baud binary
8 data bits one stop bit no parity bit no handshake
Connections (sensor cable connector)
TxD (Transmit Data) RxD (Receive Data) GND
Pin 13 Pin 14 Pin 5
Function and communication protocol of the RS232C interface 28
For HPG400-SD gauges with part numbers:
353-527 353-528
Fieldbus name DeviceNet Standard applied Communication protocol, data format
[6] → [1], [4]
Interface, physical CAN bus Data rate
(adjustable via "RATE" switch)
125, 250 and 500 kBaud "P" (125, 250 and 500 kBaud, program­mable via DeviceNet ( [1]))
Node address (MAC ID) (Adjustable via "ADDRESS", "MSD", "LSD" switches)
0 … 63
dec
"P" (programmable 0 … 63 via DeviceNet, [1])
10 tina31e1 (2004-05) HPG400 v1.om
DeviceNet connector Micro-Style, 5 pins, male
Cable Shielded, special DeviceNet cable,
5 conductors ( 19 and [4])
Cable length, system wiring According to DeviceNet specifications
( [4], [6])
Profibus interface (HPG400-SP)
For HPG400-SP gauges with part numbers:
353-525 353-526
Fieldbus name Profibus Standard applied Communication protocol, data format
[7] → [2], [7]
Interface, physical RS485 Data rate
12 MBaud ( [2])
Node address
Local: (Adjustable via hexadecimal "ADDRESS", "MSD", "LSD" switches)
00 … 7D
(0 … 125
hex
dec
)
Via Profibus: (hexadecimal "ADDRESS" switches set to >7d
hex
(>125
dec
))
00 … 7D
(0 … 125
hex
dec
)
Profibus connection D-Sub, 9 pins, female
Cable Shielded, special Profibus cable
( 20 and [5])
Cable length, system wiring According to Profibus specifications
( [5], [7])
Vacuum
Environment
Materials exposed to vacuum
Housing, supports, screens Feedthroughs Insulator Cathode Cathode holder Pirani element
Internal volume
353-520, 353-521 353-525, 353-527
353-522, 353-523 353-526, 353-528
stainless steel
NiFe, nickel plated
glass
iridium, yttrium oxide (Y
molybdenum
tungsten, copper
3
20 cm
3
20 cm
3
30 cm
3
30 cm Pressure max. 5 bar (absolut)
(only for Inert gases and
temperatures <100 °C).
Admissible temperatures
Storage Operation Bakeout
-20 … 70 °C 0 … 50 °C
+150 °C (without electronics unit)
Relative humidity (year's mean / during 60 days)
65 / 85% (no condensation)
Use indoors only
altitude up to 2000 m NN
Type of protection IP 30
2O3
)
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Dimensions [mm]
Part numbers Part numbers 353-520 353-522 353-521 353-523 353-525 353-526 353-527
1)
353-528
1)
4-40UNC 2B
DN 25 ISO-KF
1)
Gauges with DeviceNet connector are 14 mm longer. The other dimensions of housing and vacuum connection are identical.
Part numbers
353-527 353-528
4-40UNC 2B
DN 40 CF-R
Weight
353-520, 353-521 353-522, 353-523 353-525, 353-527 353-526, 353-528
12 tina31e1 (2004-05) HPG400 v1.om
285 g 550 g 430 g 695 g
3 Installation
3.1 Vacuum Connection
DANGER
Caution: overpressure in the vacuum system >1 bar Injury caused by released parts and harm caused by escaping process
gases can result if clamps are opened while the vacuum system is pressurized.
Do not open any clamps while the vacuum system is pressurized. Use the type of clamps which are suited to overpressure.
DANGER
Caution: overpressure in the vacuum system >2 bar KF flange connections with elastomer seals (e.g. O-rings) cannot
withstand such pressures. Process media can thus leak and possibly damage your health.
Use O-rings provided with an outer centering ring.
DANGER
The gauge must be electrically connected to the grounded vacuum chamber. This connection must conform to the requirements of a pro­tective connection according to EN 61010:
CF connections fulfill this requirement
For gauges with a KF vacuum connection, use a conductive me-
tallic clamping ring.
Caution
Caution: vacuum component Dirt and damages impair the function of the vacuum component. When handling vacuum components, take appropriate measures to
ensure cleanliness and prevent damages.
The gauge may be mounted in any orientation. To keep condensates and particles from getting into the measuring chamber, preferably choose a horizontal to upright position. See dimensional drawing for space requirements( 12).
The gauge is supplied with a built-in baffle.
The sensor can be baked at up to 150 °C. At temperatures exceeding 50 °C,
the electronics unit has to be removed ( 15).
tina31e1 (2004-05) HPG400 v1.om 13
Procedure
Remove the protective lid.
The protective lid will be needed for mainte­nance.
Make the flange connection to the vacuum system, preferably without ap-
plying vacuum grease.
When installing the gauge, make sure that the area around the con­nector is accessible for the tools required for adjustment while the gauge is mounted
When installing the gauge, allow for installing/deinstalling the connectors and accommodation of cable loops.
If you are using a gauge with display, make sure easy reading of the display is possible.
The gauge is now installed.
14 tina31e1 (2004-05) HPG400 v1.om
3.1.1 Removing and Installing the Electronics Unit
Required tools / material
Removing the electronics unit
Allen key, size 2.5 mm
Unscrew the hexagon socket set screw (1) on the side of the electronics
unit (2).
2
1
Remove the electronics unit without twisting it.
Installing the electronics unit
Removal of the electronics unit is completed.
Place the electronics unit on the sensor (3) (be careful to correctly align the
pins and notch (4)).
4
3
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3.2 Electrical Connection
Slide the electronics unit in to the mechanical stop and lock it with the hexa-
gon socket set screw (1).
The electronics unit is now installed.
3.2.1 Use With INFICON VGC4XX Vacuum Gauge Controller
Required material
Procedure
If the gauge is used with an INFICON VGC4XX controller, a corresponding sensor cable is required ( 43). The sensor cable permits supplying the gauge with power, transmitting measurement values and gauge statuses, and making pa­rameter settings.
Caution
Caution: data transmission errors If the gauge is operated with the INFICON VGC4XX Vacuum Gauge
Controller (RS232C) and a fieldbus interface at the same time, data transmission errors may occur.
The gauge must not be operated with an INFICON VGC4XX controller and DeviceNet or Profibus at the same time.
Sensor cable ( [10] INFICON sales literature)
Plug the sensor connector into the gauge and secure it with the locking
screws.
Connect the other end of the sensor cable to the INFICON controller and
secure it.
The gauge can now be operated with the VGC4XX controller.
16 tina31e1 (2004-05) HPG400 v1.om
3.2.2 Use With Other Controllers
The gauge can also be operated with other controllers. Especially the fieldbus versions HPG400-SD (DeviceNet) and HPG400-SP
(Profibus) are usually operated as part of a network, controlled by a master or bus controller. In such cases, the control system has to be operated with the appropri­ate software and communication protocol ( [1] and [2]).
3.2.2.1 Making a Sensor Cable
Cable type
Procedure
Sensor cable connection HPG400
For reasons of compatibility, the expression "sensor cable" is used for all HPG400 versions in this document, although the pressure reading of the gauges with fieldbus interface (HPG400-SD or HPG400-SP) is normally transmitted via DeviceNet or Profibus.
The sensor cable is required for supplying all HPG400 types with power. In connection with the gauges with fieldbus interface (HPG400-SD and HPG400-SP), it also permits access to the relay contacts of the switch­ing functions ( 18, 34).
The application and length of the sensor cable have to be considered when deter­mining the number and cross sections of the conductors ( 10).
Open the cable connector (D-Sub, 15 pins, female).
Prepare the cable and solder/crimp it to the connector as indicated in the
diagram of the gauge used:
HPG400
Measuring signal
TxD
RxD
+U
56k
b
13 14
2
12
8
5 10 15
1.25AT
Identification
RS232C
+
+
24 V
Electrical connection Pin 2 Signal output (measuring signal)
Pin 5 Supply voltage common, GND Pin 8 Supply voltage Pin 10 Gauge identifcation Pin 12 Signal common, GND Pin 13 RS232C, TxD Pin 14 RS232C, RxD Pin 15 Shielding, housing, GND
Pins 1, 3, 4, 6, 7, 9 and 11 are not connected internally.
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+24 VDC
0 … +10 V
9
15
D-Sub, 15 pins
soldering side
1
8
female
Sensor cable connection HPG400-SD, HPG400-SP
HPG400-SD, HPG400-SP
Threshold value, SP A Threshold value, SP B
SP A
3 6 1 4
SP B
TxD
RxD
+U
Measuring
signal
b
56 k
11
13 14
12
10 15
9
7 8 2
5
RS232
1.25 AT 24V
Identification
Electrical connection Pin 1 Relay Switching function A, COM contact
Pin 2 Signal output (measuring signal) 0 … +10 V Pin 3 Threshold value (Setpoint) A 0 … +10 V Pin 4 Relay Switching function A, N.O. contact Pin 5 Supply common, GND Pin 6 Threshold value (Setpoint) B 0 … +10 V Pin 7 not connected Pin 8 Supply voltag e +24 V Pin 9 Relay Switching function B,
COM contact
Pin 10 Gauge identification Pin 11 Relay Switching function B,
N.O. contact
Pin 12 Signal common, GND Pin 13 RS232, TxD Pin 14 RS232, RxD Pin 15 Shielding, housing, GND
9
15
1
8
D-Sub, 15 pins
female
soldering side
WARNING
The supply common (Pin 5) and the shielding (Pin 15) must be connected at the supply unit with protective ground.
Incorrect connection, incorrect polarity or inadmissible supply voltages can damage the gauge.
For cable lengths up to 5 m (0.34 mm2 conductor cross-section) the out­put signal can be measured directly between the positive signal output (Pin 2) and supply common GND (Pin 5) without loss of accuracy. At greater cable lengths, differential measurement between signal output (Pin 2) and signal common (Pin 12) is recommended.
Reassemble the cable connector.
On the other cable end, terminate the cable according to the requirements
of the gauge controller you are using.
18 tina31e1 (2004-05) HPG400 v1.om
Plug the sensor connector into
the gauge and secure it with the locking screws.
Connect the other end of the sensor cable to the connector of the instru-
ment or gauge controller you are using.
The gauge can now be operated via analog and RS232C interface.
3.2.2.2 Making a DeviceNet Interface Cable
(HPG400-SD)
Cable type
Procedure
For operating HPG400-SD via DeviceNet, an interface cable conforming to the DeviceNet standard is required.
If no such cable is available, make one according to the following indications.
A shielded special 5 conductor cable conforming to the DeviceNet standard has to be used ( [4], [6]).
Make the DeviceNet cable according to the following indications.
1
Micro-Style, 5 pins, (DeviceNet)
42
female, soldering side
5
Pin 1 Drain Pin 2 Supply +24 VDC (DeviceNet interface only) Pin 3 Supply common GND (DeviceNet interface only) Pin 4 CAN_H Pin 5 CAN_L
3
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Plug the DeviceNet (and sensor) cable connector into the gauge.
3.2.2.3 Making a Profibus Interface Cable
(HPG400-SP)
Sensor cable
DeviceNet cable
Lock the DeviceNet (and sensor) cable connector.
The gauge can now be operated via DeviceNet interface ( 31).
For operating HPG400-SP via Profibus, an interface cable conforming to the Profibus standard is required.
If no such cable is available, make one according to the following indications.
Cable type
Procedure
Only a cable that is suited to Profibus operation may be used ( [5], [7]).
Make the Profibus interface cable according to the following indications.
1 5
D-Sub, 9 pins male, soldering side
6 9
Pin 1 Do not connect Pin 2 Do not connect Pin 3 RxD/TxD-P Pin 4 CNTR-P Pin 5 DGND Pin 6 VP Pin 7 Do not connect Pin 8 RxD/TxD-N Pin 9 Do not connect
1)
Only to be connected if an optical link module is used.
2)
Only required as line termination for devices at both ends of bus cable ( [5]).
1)
2)
2)
20 tina31e1 (2004-05) HPG400 v1.om
Plug the Profibus (and sensor) cable connector into the gauge.
Sensor cable
Profibus cable
Lock the Profibus (and sensor) cable connector.
The gauge can now be operated via Profibus interface ( 33).
3.2.3 Using the Optional Power Supply (With RS232C Line)
Technical data
The optional 24 V power supply ( 43) allows RS232C operation of the HPG400 gauge with any suitable instrument or control device (e.g. PC).
The instrument or control device needs to be equipped with a software that sup­ports the RS232C protocol of the gauge ( 28).
Mains connection
Mains voltage 90 … 250 VAC 50 … 60 Hz Mains cable 1.8 meter
(Schuko DIN and U.S. connectors)
Output (operating voltage of gauge)
Voltage 21 … 27 VDC, set to 24 VDC Current max. 1.5 A
Gauge connection
Connector D-Sub, 15 pins, female 24 V cable 5 m, black
Connection of the instrument or control device
RS232C connection D-Sub, 9 pins, female Cable 5 m, black, 3 conductors, shielded
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Wiring diagram
Connecting the power supply
8 7 6
RS232C
4
D-Sub, 9 pins
5 2 3
L
Mains
N
90 ... 250 VAC
PE
50 ... 60 Hz
HPG400
D-Sub, 15 pins
5 13 14
8 15
PE
+24 V
GND
DC
AC
Connect the gauge to the power supply and lock the connector with the
screws.
Connect the RS232C line to the instrument or control device and lock the
connector with the screws.
RS232C
Power supply
HPG400
Connect the power supply to the mains.
Turn the power supply on.
The gauge can now be operated via RS232C interface ( 28).
PC
Mains
22 tina31e1 (2004-05) HPG400 v1.om
4 Operation
4.1 Measuring Principle, Measuring Behavior
High pressure (HP) hot cathode
The HPG400 consists of two separate measuring systems (high pressure (HP) hot cathode and Pirani).
The HP hot cathode measuring system is based on the electrode arrangement shown in the figure below, which grants sensitivity, linearity, and stability even at high pressures.
The measuring principle of this system is based on gas ionization. Electrons emit­ted by the hot cathode (F) ionize a number of molecules proportional to the pres­sure in the measuring chamber. The ion collector (IC) collects the thus generated ion current I The ion current is dependent on the emission current I
+
and feeds it to the electrometer amplifier of the measuring instrument.
, the gas type, and the gas
e
pressure p according to the following relationship:
+
I
= Ie × p × C
Factor C represents the sensitivity of the gauge. It is generally specified for N
-6
The lower measurement limit is 2×10 In order for the entire range of 2×10
current is continually increased from 4 µA at 1 mbar to 130 µA at 2×10
mbar.
-6
mbar … 1 mbar to be covered, the emission
-6
.
2
mbar (no
transients due to switching of the emission current).
IC ECF
Diagram of the HP measuring system
F hot cathode (filament) IC ion collector EC electron collector (anode)
ECIC
F
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Pirani (control range)
Within certain limits, the thermal conductance of gases is pressure dependent. This physical phenomenon is used for pressure measurement in the thermal conduc­tance vacuum meter according to Pirani. A self-adjusting bridge is used as meas­uring circuit. A thin tungsten wire is used as sensor element. Wire resistance and thus temperature are kept constant through a suitable control circuit. The electric power supplied to the wire is a measure for the thermal conductance and thus the gas pressure. The basic principle of the self adjusting bridge circuit is shown below.
U
m
+
Pirani sensor
The bridge voltage Um is a measure for the gas pressure and is further processed electronically (linearization, conversion).
Measuring range, changeover threshold
The HPG400 covers the measuring range 2×10
-6
... 1000 mbar.
Hot cathode HP Pirani
1000 mbar2 × 10-6 mbar
5×10-2 mbar ... 1 mbar user-
definable changeover threshold
The Pirani permanently monitors the pressure.
The hot cathode (controlled by the Pirani) is activated only at pressures
<1 ... 5×10
If the measured pressure is higher than the set changeover threshold (which can be selected with a switch within the range of 1 ... 5×10
-2
mbar (threshold can be set with a switch).
-2
mbar), the hot cathode
remains off and the Pirani value is output as signal ( Appendix A). When the pressure measured by the Pirani drops below the threshold, the hot
cathode is activated. This is indicated by a green lamp. After warming up of the measuring system, the hot cathode value is output. When the pressure rises above the set threshold, the hot cathode is deactivated, and the Pirani value is output again.
24 tina31e1 (2004-05) HPG400 v1.om
4.2 Operational Principle of the Gauge
The measuring currents of the HP hot cathode and Pirani sensors are converted into a frequency. A micro controller converts this frequency into a digital value rep­resenting the measured total pressure. After further processing this value is avail­able as analog measurement signal (0 … +10.2 V) at the output (sensor cable connector Pin 2 and Pin 12) with the usable ranges 1.5 … 7.5 V (hot cathode) and
8.5 … 9.75 V (Pirani). The maximum output signal is internally limited to +10.2 V (atmosphere). The measured value can be read as digital value through the RS232C interface (Pins 13, 14, 15) ( 28). Gauges with a display show the value as pressure. The default setting of the displayed pressure unit is mbar. It can be modified via the RS232C interface ( 28).
In addition to converting the output signal, the micro controller's functions include monitoring of the emission, calculation of the total pressure based on the meas­urements of the two sensors, and communication via RS232C interface.
Selecting the changeover threshold
The HPG400 has five definable changeover thresholds (setpoint "emission on"). It is thus possible to prevent the switching range from being situated within the proc­ess pressure range. The factory setting of the threshold is 1 mbar. Other setpoints can be selected via the <P HP> switch. Since the contamination of the hot cathode system is reduced at low pressures, the lowest possible setpoint should be selected.
Since the switch position is only polled upon activation of the gauge, the setpoint should be selected before the gauge is turned on.
EMI ON
Hot cathode mode
Pirani mode
Switch position
Corresponding setpoint
<P ↔ HP>
1 mbar (factory setting)
5×10 2×10 1×10 5×10
–1
mbar
–1
mbar
–1
mbar
–2
mbar
Accuracy
0 or 1 2 or 3 4 or 5 6 or 7 8 or 9
The gauge is factory-calibrated. Adjustment may become necessary due to use in different climatic conditions, extreme temperatures, contamination or aging ( 37).
-1
mbar and below
Gas type dependence
The accuracy is reduced in the pressure range above 1×10
-5
1×10
mbar.
The output signal is gas type dependent. The characteristic curves ( Appendix A) are accurate for dry air, N
and O2. They can be mathematically converted for other
2
gases ( Appendix B). If you are using a INFICON vacuum gauge controller, you can enter a calibration
factor to correct the displayed measured value ( of the corresponding meas­urement unit).
tina31e1 (2004-05) HPG400 v1.om 25
Contamination
Gauge failures due to contamination are not covered by the warranty.
The HPG400 is designed in such a way that contamination by process products is minimal. The baffle and the closed internal design of the measuring system as well as the heat generated by the measuring system contribute to this.
The HPG400 is factory-adjusted in such a way that the hot cathode is switched on at 1 mbar. A lower threshold can be set in order for the contamination of the sys­tem to be reduced ( 25). The gauge can also be switched externally by the supply voltage, control by the Pirani still being insured.
In case of severe contamination, the measuring system should be replaced ( 42).
4.3 Putting the Gauge Into Operation
When the operating voltage is supplied ( "Technical Data", 8 and "Electrical Connection", 16), the output signal is available between Pin 2 (+) and Pin 12 (–) of the sensor cable connector (Relationship Output Signal – Pressure Appendix A).
Allow for a stabilizing time of approx. 10 min. Once the gauge has been switched on, permanently leave it on irrespective of the pressure.
Communication via the digital interfaces is described in separate sections.
26 tina31e1 (2004-05) HPG400 v1.om
4.4 Display (HPG400)
The gauges with part numbers
353-501 and 353-503
have a built-in two-line display with an LCD matrix of 32×16 pixels. The first line shows the pressure in normal operation, the second line the pressure unit, the function and operational status and possible error messages.
The background illumination is usually green, in the event of an error, it changes to red.
Pressure reading
Pressure display
Function display (status)
Pressure unit
Pressure reading in mbar (factory setting), Torr or Pa. The pressure unit can be changed via RS232C interface
( 28).
E
A
ok
==Emission of HP hot cathode on
Adjustment at atmospheric pressure in progress
= Normal operation, no error
(green background illumination)
Status
Error display
=
FAIL lonG 5 FAIL lonG 8 FAIL lonG 9
Internal data connection failure (red background illumination)
tina31e1 (2004-05) HPG400 v1.om 27
Pirani sensor warning
=
Hot cathode sensor warning
=
Pirani sensor error (red background illumination)
4.5 RS232C Interface
The built-in RS232C interface allows transmission of digital measurement data and instrument conditions as well as the setting of instrument parameters.
Caution
Caution: data transmission errors If the gauge is operated with the RS232C interface and a fieldbus in-
terface at the same time, data transmission errors may occur. The gauge must not be operated with the RS232C interface and
DeviceNet or Profibus at the same time.
4.5.1 Description of the
Functions
Operational parameters
Electrical connections
4.5.1.1 Output String (Transmit
Format of the output string
The interface works in duplex mode. A nine byte string is sent continuously without a request approx. every 20 ms.
Commands are transmitted to the gauge in a five byte input (receive) string.
Data rate
Byte
TxD
RxD
GND
)
The complete output string (frame) is nine bytes (byte 0 … 8). The data string is seven bytes (byte 1 … 7).
Byte No. Function Value
0 Length of data string 7 (Set value) 1 Page number 5 (Set value) 2 Status 3 Error 4 Measurement high byte 0 … 255 5 Measurement low byte 0 … 255 6 Software version 0 … 255 7 Sensor type 11 (For HPG400 gauges) 8 Check sum 0 … 255
9600 Baud set value, no handshake 8 data bits
1 stop bit
Pin 13 Pin 14 Pin 5 (Sensor cable connector)
Status byte Error byte Calculation of pressure value Calculation of pressure value Software version
Synchronization
Synchronization
28 tina31e1 (2004-05) HPG400 v1.om
Synchronization of the master is achieved by testing three bytes:
Byte No. Function Value Comment
0 Length of data string 7 (Set value) 1 Page number 5 (Set value) 8 Check sum of bytes No. 1 … 7 0 … 255 Low byte of
check sum
1)
High order bytes are ignored in the check sum.
1)
Status byte
Bit 1 Bit 0 Definition
0 0 Emission off 0 1 Emission on
Bit 2 Definition
0 1000 mbar adjustment off 1 1000 mbar adjustment on
Bit 3 Definition
0 ⇔ 1
Toggle bit, changes with every string received correctly
Bit 5 Bit 4 Definition
0 0 Current pressure unit mbar 0 1 Current pressure unit Torr 1 0 Current pressure unit Pa
Bit 7 Bit 6 Definition
x x Not used
Error byte
Software version
Calculation of the pressure value
Bit 3 Bit 2 Bit 1 Bit 0 Definition
x x x x Not used
Bit 7 Bit 6 Bit 5 Bit 4 Definition
0 1 0 1 Pirani adjusted poorly 1 0 0 0 Hot cathode error 1 0 0 1 Pirani error
The software version of the gauge can be calculated from the value of byte 6 of the transmitted string according to the following rule:
Version No. = Value
(Example: According to the above formula, Value
Byte 6
/ 20
of 32 means software ver-
Byte 6
sion 1.6)
The pressure can be calculated from bytes 4 and 5 of the transmitted string. De­pending on the measuring range (hot cathode or Pirani) and the currently selected pressure unit ( byte 2, bits 4 and 5), the appropriate rule must be applied.
As result, the pressure value results in the usual decimal format. Measuring range hot cathode
(Range of values for byte 4 and 5 = 16666
p=10
(high Byte × 256 + low Byte) / 5333.3) - k1
… 48666
dec
dec
)
Where Pressure unit k1
mbar 9.125 Torr 9.249903 Pa 7.125
Measuring range Pirani (Range of values for byte 4 and 5 = 54000
p=10
(high Byte × 256 + low Byte) / 1333.3) - k2
… 60666
dec
dec
)
Where Pressure unit k2
mbar 42.5 Torr 42.624903 Pa 40.5
tina31e1 (2004-05) HPG400 v1.om 29
Example
The example is based on the following output string: Byte No. 0 1 2 3 4 5 6 7 8
Value 7 5 0 0 242 48 20 11 63 The instrument or controller (receiver) interprets this string as follows:
Byte No. Function Value Comment
0 Length of data
7 (Set value)
string 1 Page number 5 (Set value) 2 Status 0
Emission = off Pressure unit = mbar
3 Error 0
No error
Measurement 4 5
High byte Low byte
6 Software version 20
Calculation of the pressure:
235
48
(235 × 256 + 48) / 1333.3 - 42.5
p = 10 Software version = 20 / 20 = 1.0
= 454 mbar
7 Sensor type 11 (HPG400 gauges) 8 Check sum 63
5 + 0 + 0 + 235 + 48 + 20 + 11 =
01 3F
319
dec
hex
High order byte is ignored Check sum = 3F
hex
63
dec
4.5.1.2 Input String (Receive)
Format of the input string
Admissible input strings
For transmission of the commands to the gauge, a string (frame) of five bytes is sent (without <CR>). Byte No. 1 … 3 form the data string.
Byte No. Function Value
0 Length of data string 3 (Set value) 1 Data 2 Data 3 Data 4 Check sum
(from bytes No. 1 … 3) 0 … 255
1)
High order bytes are ignored in the check sum.
admissible input strings admissible input strings admissible input strings
(low byte of sum)
1)
For commands to the gauge, the following defined strings are used:
Byte No. Command 0 1 2 3 4 Set the unit mbar in the display 3 16 62 0 78 Set the unit Torr in the display 3 16 62 1 79 Set the unit Pa in the display 3 16 62 2 80 Power-failure-safe storage of current unit 3 32 62 62 156
2)
Only low order byte of sum (high order byte is ignored).
2)
30 tina31e1 (2004-05) HPG400 v1.om
4.6 DeviceNet Interface
(HPG400-SD)
This interface allows operation of HPG400-SD with part numbers
353-527 and 353-528
in connection with other devices that are suited for DeviceNet operation. The physical interface and communication firmware of HPG400-SD comply with the DeviceNet standard ( [4], [6]).
Two adjustable switching functions are integrated in HPG400-SD. The corre­sponding relay contacts are available at the sensor cable connector ( 8, 18, 34).
The basic sensor and sensor electronics of all HPG400 gauges are identical.
Caution
Caution: data transmission errors If the gauge is operated via RS232C interface and DeviceNet interface
at the same time, data transmission errors may occur. The gauge must not be operated via RS232C interface and DeviceNet
interface at the same time.
4.6.1 Description of the Functions
4.6.2 Operating Parameters
4.6.2.1 Operating Software
4.6.2.2 Node Address Setting
Via this interface, the following and further data are exchanged in the standardized DeviceNet protocol ( [1]):
Pressure reading
Pressure unit (Torr, mbar, Pa)
Gauge adjustment
Status and error messages
Status of the switching functions
As the DeviceNet protocol is highly complex, the parameters and programming of HPG400-SD are described in detail in the separate Communication Protocol ( [1]).
Before the gauge is put into operation, it has to be configured for DeviceNet op­eration. A configuration tool and the device specific EDS file (Electronic Data Sheet) are required for this purpose. The EDS file can be downloaded via internet ( [3]).
For unambiguous identification of the gauge in a DeviceNet environment, a node address is required. The node address setting is made on the gauge or pro­grammed via DeviceNet.
Set the node address (0 … 63 and "LSD" switches. The node address is polled by the firmware when the gauge is switched on. If the setting deviates from the stored value, the new value is taken over into the NVRAM. If a setting higher than 63 is made, the previous node address set­ting remains valid.
If the „MSD“ switch is in the "P" position, the node address is programmable via DeviceNet ( [1]).
) via the "ADDRESS" "MSD"
dec
tina31e1 (2004-05) HPG400 v1.om 31
4.6.2.3 Data Rate Setting
The admissible data rate depends on a number of factors such as system pa­rameters and cable length ( [4], [6]) ]). It can be set on the gauge or pro­grammed via DeviceNet.
By means of the "RATE" switch, the data rate can be set to 125 ("1"), 250 ("2") or 500 kBaud ("5").
If the switch is in any of the "P" positions, the data rate is pro­grammable via DeviceNet ( [1]).
4.6.3 Status Lights
"STATUS MOD" (gauge status)
"STATUS NET" (network status)
Two lights (LEDs) on the gauge inform on the gauge status and the current DeviceNet status.
Light status Description
Dark No supply
Flashing
red/green
Green Normal operation
Red Non recoverable error
Light status Description
Dark Gauge not online:
Flashing
green
Green Gauge online; necessary connections established
Flashing red One or several input/output connections in "timed out" status
Red Communication error. The gauge has detected an error that im-
Selftest
Selftest not yet concluded
No supply, → "STATUS MOD" light
Gauge online but no communication:
Selftest concluded but no communication to other nodes established
Gauge not assigned to any master
pedes communication via the network (e.g. two identical node ad­dresses (MAC IC) or "Bus-off")
Electrical connections
32 tina31e1 (2004-05) HPG400 v1.om
The gauge is connected to the DeviceNet system via the 5-pin DeviceNet con­nector( 19).
4.7 Profibus Interface
(HPG400-SP)
This interface allows operation of HPG400-SP with part numbers
353-525 and 353-526
in connection with other devices that are suited for Profibus operation. The physical interface and communication firmware of HPG400-SP comply with the Profibus standard ( [5], [7]).
Two adjustable switching functions are integrated in the HPG400-SP. The corre­sponding relay contacts are available at the sensor cable connector ( 8, 18, 34).
The basic sensor and sensor electronics of all HPG400 gauges are identical.
Caution
Caution: data transmission errors If the gauge is operated via RS232C interface and Profibus interface at
the same time, data transmission errors may occur. The gauge must not be operated via RS232C interface and Profibus
interface at the same time.
4.7.1 Description of the Functions
4.7.2 Operating Parameters
4.7.2.1 Operating Software
4.7.2.2 Node Address Setting
Via this interface, the following and further data are exchanged in the standardized Profibus protocol ( [2]):
Pressure reading
Pressure unit (Torr, mbar, Pa)
Gauge adjustment
Status and error messages
Status of the switching functions
As the DeviceNet protocol is highly complex, the parameters and programming of HPG400-SP are described in detail in the separate Communication Protocol ( [2]).
For operating the gauge via Profibus, prior installation of the HPG400 specific GSD file is required on the bus master side. This file can be downloaded via internet ( [3]).
For unambiguous identification of the gauge in a Profibus environment, a node address is required. The node address setting is made on the gauge.
The node address (0 … 125 (00 … 7D
) via the "ADDRESS", "MSD", and "LSD" switches.
hex
) is set in hexadecimal form
dec
The node address is polled by the firmware when the gauge is switched on. If the setting deviates from the stored value, the new value is taken over into the NVRAM. If a value >7D (>125
) is entered, the node address setting currently stored in
dec
hex
the device remains valid but it can now be defined via Profibus ("Set slave Address", [2]).
Electrical connections
tina31e1 (2004-05) HPG400 v1.om 33
The gauge is connected to the Profibus via the 9-pin Profibus connector ( 20).
4.8 Switching Functions
(HPG400-SD, HPG400-SP)
The gauges HPG400-SD and HPG400-SP have two independent, manually adjust­able switching functions. Each switching function has a floating normally open relay contact. The relay contacts are accessible at the sensor cable connector ( 18).
The threshold values of switching functions A and B can be set within the pressure range 1×10
-9
mbar … 100 mbar via potentiometers "SETPOINT A" and "SETPOINT B" (voltage settings representing pressures >100 mbar can be set, but the relay trigger point will remain at 100 mbar).
U
= 10 / 9 × (log p
Thresholdt
Setpoint
– c) + 6
Where U p c
[V] [mbar] 0 [V] [Pa] 2 [V] [Torr] -0.125
( Appendix A).
Measuring signal
(Pressure p)
e
M
Hysteresis 10% U
U
Threshold
(Setpoint A, B)
Switching function
Off
On
u
s
a
Off
a
v
d
e
r
Threshold
Time t
e
u
l
4.8.1 Setting the Switching Functions
Required tools
The hysteresis of the switching functions is 10% of the threshold setting.
The threshold values of the two switching functions "SETPOINT A" and "SETPOINT B" are set locally on the potentiometers of the gauge that are acces­sible via the openings on one side of the gauge housing.
Voltmeter
Ohmmeter or continuity checker
Screwdriver, max. ø2.5 mm
34 tina31e1 (2004-05) HPG400 v1.om
Procedure
The procedure for setting thresholds is identical for both switching functions.
Put the gauge into operation.
Connect the + lead of a voltmeter to the threshold measurement point of the
selected switching function ("Setpoint A" Pin 3, "Setpoint B" Pin 6) and its – lead to Pin 5.
max. ø2.5
Setpoint A Pin 3 Setpoint
Pin 6
B
Pin 5
Using a screwdriver (max. ø2.5 mm), set the voltage of the selected
switching function (Setpoint A, B) to the desired value U
Setting of the switching functions is now concluded.
Threshold
.
There is no local visual indication of the statuses of the switching func­tions. However, a functional check of the switching functions (On/Off) can be made with one of the following methods:
• Reading the status via fieldbus interface (→ [1] for HPG400-SD, → [2] for HPG400-SP).
Measurement of the relay contacts at the sensor cable connector
with a ohmmeter/continuity checker ( 18).
tina31e1 (2004-05) HPG400 v1.om 35
5 Deinstallation
Procedure
DANGER
Caution: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated.
Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.
Caution
Caution: vacuum component Dirt and damages impair the function of the vacuum component. When handling vacuum components, take appropriate measures to
ensure cleanliness and prevent damages.
Vent the vacuum system.
Before taking the gauge out of operation, make sure that this has no adverse effect on the vacuum system.
Depending on the programming of the superset controller, faults may occur or error messages may be triggered.
Follow the appropriate shut-down and starting procedures.
Take gauge out of operation.
Disconnect all cables from the gauge.
Remove gauge from the vacuum system and replace the protective lid.
The gauge is now deinstalled.
36 tina31e1 (2004-05) HPG400 v1.om
6 Maintenance, Repair
6.1 Maintenance
6.2 Adjusting the Gauge
DANGER
Caution: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated.
Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.
The gauge is factory-calibrated. Through the use in different climatic conditions, fitting positions, aging or contamination and after exchanging the sensor ( 42) a shifting of the characteristic curve can occur and readjustment can become nec­essary. Only the Pirani part can be adjusted.
Adjustment is necessary if
at atmospheric pressure, the output signal is <9.75 V or the display reads < atmospheric pressure.
when the vacuum system is vented, the output voltage reaches 9.75 V the measured pressure has reached atmospheric pressure (gauges with display will show the error "5" at atmospheric pressure (Pirani sensor warning 27).
at atmospheric pressure, the digital value of the RS232C interface is < atmospheric pressure.
at atmospheric pressure, the digital value received by the bus controller of the fieldbus gauges (DeviceNet or Profibus) is < atmospheric pressure.
when the vacuum system is vented, the digital value of the RS232C interface reaches its maximum before the measured pressure has reached atmospheric pressure.
when the vacuum system is vented, the digital value received by the bus con­troller of the fieldbus (DeviceNet or Profibus) reaches its maximum before the measured pressure has reached atmospheric pressure.
1)
The output signal is internally limited to +10.2 V.
1)
before
Adjustment procedures for HPG400-SD/-SP and HPG400 gauges differ and will be described separately.
6.2.1 Pirani Adjustment (HPG400)
Required tools
HV adjustment Pirani
tina31e1 (2004-05) HPG400 v1.om 37
The following procedures are described:
HV adjustment Pirani
ATM adjustment Pirani
Pin approx. ø1.3 × 50 mm (e.g. a bent open paper clip)
The Pirani part is automatically adjusted by the hot cathode part when the gauge is activated and a pressure value of 1 … 3×10
-3
mbar is reached for the first time.
Pirani adjustment at atmospheric pressure
Put the gauge into operation.
Operate the gauge for 10 minutes at atmospheric pressure. If the gauge was operated within the hot cathode range, a cooling­down time of 30 minutes is to be expected (gauge tempera­ture = environmental temperature).
Adjust the gauge:
HPG400 without display
353-520, 353-522
Insert a pin (ø1.3×50mm) through the opening <FULL SCALE> and
push the button inside for at least 5 seconds.
_
HPG400 with display
353-521, 353-523
6.2.2 Pirani Adjustment (HPG400-SD, HPG400-SP)
Required tools
HV adjustment Pirani
Automatic adjustment in progress (10 s).
_
Adjustment completed.
The following procedures are described:
HV adjustment Pirani
ATM adjustment Pirani
Pin, approx. ø1.3 × 50 mm (e.g. abent open paper clip)
The Pirani part is automatically adjusted by the hot cathode part when the gauge is activated and a pressure value of 1 … 3×10
-3
mbar is reached for the first time.
38 tina31e1 (2004-05) HPG400 v1.om
Pirani adjustment at atmospheric pressure
Put the gauge into operation.
Operate the gauge for 10 minutes at atmospheric pressure. If the gauge was operated within the hot cathode range, a cooling­down time of 30 minutes is to be expected (gauge tempera­ture = environmental temperature).
Insert the pin through the opening marked <FULL SCALE> and push the
button inside for at least 5 seconds.
max. ø1.3
6.3 Adjusting the Calibration Setting of the Hot Cathode
The gauge is automatically adjusted (10 s).
The gauge is now adjusted at atmospheric pressure.
The sensor is factory calibrated. The calibration setting of the hot cathode range 0 … F is printed on the label. Correct this value with the <Cal adj> switch to adjust the electronics to the sensor. Before operating the gauge for the first time or after replacing the sensor, check the calibration value setting and adjust it if necessary.
tina31e1 (2004-05) HPG400 v1.om 39
6.4 What to Do in Case of Problems
Required tools / material
In the event of a fault or a complete failure of the output signal, the gauge can eas­ily be checked.
Voltmeter / ohmmeter
Allen key, size 2.5 mm
Spare sensor (if the sensor is faulty)
Troubleshooting
The output signal is available at the sensor cable connector (Pin 2 and Pin 12).
In case of an error, it may be helpful to just turn off the supply voltage and turn it on again after 5 seconds.
Problem Possible cause Correction Output signal
permanently 0V
Output signal 0.3 V (Display: error = 8)
Output signal 0.5 V (Display: error = 9)
Display: Internal data connection
Sensor cable defective or not correctly connected
No supply voltage Turn on the power supply Gauge in an undefined
status Hot cathode error
(sensor faulty) Pirani error
(sensor defective) Electronics unit not
mounted correctly on sensor
not working
Check the sensor cable
Turn the gauge off and on again (reset)
Replace the sensor ( 42)
Replace the sensor ( 42)
Check the connection
Turn the gauge off and on again after 5 s
Replace the electronics unit
40 tina31e1 (2004-05) HPG400 v1.om
Troubleshooting (sensor)
If the cause of a fault is suspected to be in the sensor, the following checks can be made with an ohmmeter (the vacuum system need not be vented for this purpose).
Separate the sensor from the electronics unit ( 15). Using an ohmmeter, make the following measurements on the contact pins..
Ohmmeter measure-
ment between pins
4 + 5 5 + 8
1 + 2/6 2 + sensor housing 3 + sensor housing 5 + sensor housing 9 + sensor housing
2 + 3 2 + 9 3 + 9 2 + 5 3 + 5 5 + 9
View on sensor pins
9
1
8
2
7
6
4
5
37 >>37 Ω37 >>37 Ω
0.2 >>0.2 Ω
<< ∞ ∞ << << << << << << << << <<
1 2 6 3
3
7 9 4 5 8
Possible cause
Pirani element 1 broken Pirani element 2 broken Filament of hot cathode broken Short circuit electrode to ground Short circuit electrode to ground
Short circuit electrode to ground
Short circuit electrode to ground
Short circuit between electrodes
Short circuit between electrodes
Short circuit between electrodes
Short circuit between electrodes
Short circuit between electrodes
Short circuit between electrodes
Hot cathode (approx. 0.2
)
Anode (EC)
Ion collector (IC) Pirani sensor 1 (approx. 37 Ω)
Pirani sensor 2 (approx. 37
)
Correction
Troubleshooting on fieldbus gauges (HPG400-SD, HPG400-SP)
All of the above faults can only be remedied by replacing the sensor ( 42).
Error diagnosis of fieldbus gauges can only be performed as described above for the basic sensor and sensor electronics. Diagnosis of the fieldbus interface can only be done via the superset bus controller ( [1] and [2]).
For diagnosis of the HPG400-SD (DeviceNet) gauges, the status lights might pro­duce some useful information ( 32).
tina31e1 (2004-05) HPG400 v1.om 41
6.5 Replacing the Sensor
Replacement is necessary, when
the sensor is severely contaminated.
the sensor is mechanically deformed.
the sensor is faulty, e.g. filament of hot cathode broken ( 40).
the sensor is faulty, e.g. Pirani element broken ( 40).
Required tools / material
Procedure
Allen key, size 2.5 mm
Spare sensor ( 43)
Deinstall the gauge (  36).
Deinstall the electronics unit from the faulty sensor and mount it to the new
sensor ( 15).
Adjust the calibration setting of the hot cathode (  39).
Adjust the gauge (  37).
The new sensor is now installed.
42 tina31e1 (2004-05) HPG400 v1.om
7 Options
8 Spare Parts
Part number
24 VDC power supply / RS232C line ( 21)
Controllers, power supplies, sensor cables in various lengths and a large range of vacuum installation material can be found in the INFICON sales literature ( [10]).
When ordering spare parts, always indicate:
All information on the product nameplate
Description and part number
Sensor HPG400, vacuum connection DN 25 ISO-KF (including Allen key) 354-487
Sensor HPG400, vacuum connection DN 40 CF-R (including Allen key) 354-488
353-511
Part number
9 Storage
Caution
Caution: vacuum component Inappropriate storage leads to an increase of the desorption rate
and/or may result in mechanical damage of the product. Cover the vacuum ports of the product with protective lids or grease
free aluminum foil. Do not exceed the admissible storage temperature range ( 11).
tina31e1 (2004-05) HPG400 v1.om 43
10 Returning the Product
11 Disposal
WARNING
Caution: forwarding contaminated products Contaminated products (e.g. radioactive, toxic, caustic or biological
hazard) can be detrimental to health and environment. Products returned to INFICON should preferably be free of harmful
substances. Adhere to the forwarding regulations of all involved coun­tries and forwarding companies and enclose a duly completed decla­ration of contamination ( 49).
Products that are not clearly declared as "free of harmful substances" are decon­taminated at the expense of the customer.
Products not accompanied by a duly completed declaration of contamination are returned to the sender at his own expense.
Separating the components
Contaminated components
Other components
DANGER
Caution: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated.
Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.
WARNING
N
After disassembling the product, separate its components according to the follow­ing criteria:
Contaminated components (radioactive, toxic, caustic or biological hazard etc.) must be decontaminated in accordance with the relevant national regulations, separated according to their materials, and disposed of.
Such components must be separated according to their materials and recycled.
Caution: substances detrimental to the environment Products or parts thereof (mechanical and electric components, oper-
ating fluids etc.) can be detrimental to the environment. Dispose of such substances in accordance with the relevant local
regulations.
44 tina31e1 (2004-05) HPG400 v1.om
Appendix
A: Relationship Output
Signal – Pressure
Conversion curve
Conversion formula hot cathode range
Pressure p [mbar]
1E+03 1E+02 1E+01 1E+00 1E–01 1E–02 1E–03 1E–04 1E–05 1E–06
0.0 0.5 1.0 1.5 2.5 3.5 4.5 5.5 6.5 7.5 8.5 9.52.0 3.0 4.0 5.0 6.0 7.0 9.0
Measuring signal U[V]
overrange
8.0
Hot cathode range and Pirani range require different conversion formulae:
p = 10
U - c1
U = c1 + log p
10.0
10.2
Conversion formula Pirani range
Changeover threshold hot cathode ↔ Pirani
p = 10
(4 × (U - c2))
U = c2 + 0.25 log p
Where U p c1 c2
[V] [mbar] 7.5 9 [V] [Torr] 7.625 9.031 [V] [Micron] 4.625 8.281 [V] [Pa] 5.5 8.5
Switch position
<P ↔ HP>
0 or 1 2 or 3 4 or 5 6 or 7 8 or 9
Threshold
1 mbar (factory setting)
5×10 2×10 1×10 5×10
–1 –1 –1 –2
mbar mbar mbar mbar
tina31e1 (2004-05) HPG400 v1.om 45
Conversion table
r
output signal - pressure
Output signal U
[V] [mbar]
Pressure p
[Torr] [Pa]
0 … 0.5 Sensor error
0.5 … 1.5 Underrange
1.5
2.5
3.5
4.5
5.5
6.5
7.5
1.0×10
1.0×10
1.0×10
1.0×10
1.0×10
1.0×10 1
-6
-5
-4
-3
-2
-1
7.5×10
7.5×10
7.5×10
7.5×10
7.5×10
7.5×10
7.5×10
7.5 … 8.0 Overrange
-7
-6
-5
-4
-3
-2
-1
1.0×10
1.0×10
1.0×10
1.0×10 1
10
100
-4
-3
-2
-1
B: Gas Type Dependence
Hot cathode range
-6
(1×10
mbar < p < p
Changeove
8.0 … 8.5 Underrange
8.5
8.75
9.0
9.25
9.5
9.75
-2
1.0×10
-1
1.0×10 1
10
100
1000
7.5×10
7.5×10
7.5×10
7.5 75
750
-3
-2
-1
1
10
100
1000
10000
100000
9.75 … 10.2 Overrange
For gases other than air, the pressure can be determined by a simple conversion:
= K × pressure indicated
p
)
eff
Where Gas type K (mean values)
Air (N2, O2) 1.0 Xe 0.4 Kr 0.5 Ar 0.8 H
2
2.4 Ne 4.1 He 5.9
46 tina31e1 (2004-05) HPG400 v1.om
Pirani range
r
(p
Changeove
< p < 1000 mbar)
p (mbar)
2
10
8
6 4
2
1
10
8 6
4
2
0
10
8 6
4
2
–1
10
8 6
4
2
Water vapor
–2
10
–3
10
He Ne
H
Indication range above 10
-2
mbar
2
Air
N O
CO
2 2
CO
Ar
Freon 12
Kr
Xe
–2
2
10
6
82468 2
4
–1
10
68 2
4
0
10
1
10
68 2468
4
p
eff
10
(mbar)
A mixture of gases and vapors is often involved. In this case, accurate determination is only possible with a partial-pressure measuring instru­ment.
2
2
tina31e1 (2004-05) HPG400 v1.om 47
C: Literature
[1] www.inficon.com
Communication Protocol DeviceNet™ HPG400-SD (BPG400-SD) tira03e1 INFICON AG, LI–9496 Balzers, Liechtenstein
[2] www.inficon.com
Communication Protocol Profibus HPG400-SP (BPG400-SP) tira36e1 INFICON AG, LI–9496 Balzers, Liechtenstein
[3] www.inficon.com
Product descriptions and downloads INFICON AG, LI–9496 Balzers, Liechtenstein
[4] www.odva.org
Open DeviceNet Vendor Association, Inc. DeviceNet™ Specifications
[5] www.profibus.com
Profibus user organization
[6] European Standard for DeviceNet EN 50325 [7] European Standard for Profibus EN 50170 [8] www.inficon.com
Instruction Sheet HPG400 (all versions) tima31e1 INFICON AG, LI–9496 Balzers, Liechtenstein
[9] www.inficon.com
Instruction Sheet HPG400-SD, HPG400-SP tima32e1 INFICON AG, LI–9496 Balzers, Liechtenstein
[10] www.inficon.com
INFICON AG, LI–9496 Balzers, Liechtenstein
48 tina31e1 (2004-05) HPG400 v1.om
Declaration of Contamination
The service, repair, and/or dispo s al of vacuum equipment and components will only be carr ie d out i f a correctly com ple ted declaration has been submitted. Non-com ple tion wi ll res ult in delay.
This declaration may only be complete d (in bloc k let ters) and signed by aut hor i z ed and qualifi ed st af f.
Description of product
Type Part number Serial number
The product is free of any sub­stances which are damaging to health. yes
Reason for return
Operating fluid(s) used
Used in copper process
no  yes
Process re lated contamination of product:
toxic no  1) yes caustic no  1) yes  biological hazard no  yes  2) explosive no  yes  2) radioactive no  yes  2) other harmful substances no  1) yes
1) or not cont aini ng any amo unt of hazardous residues that exceed the permissible ex­ posure limits
(Must be drained before shipping.)
Seal product in pla st ic bag and mark it with a correspondi ng la bel.
2) Products thus contami­ nated will not be ac­ cepted without written evidence of decontami­ nation.
Harmful substances, gases and/or by-products
Please list all substa nce s, ga ses, and by-products which t he pro duc t may have come into contac t with:
Trade/product name
Chemic al nam e (or symbol)
Precautions as so ciated with substance
Action if hu man contact
Legal ly binding declarat ion:
We hereby declare that the information on this form is complete and accurate and that we will assume any furthe r costs tha t may arise. The contaminated product will be dispatched in accordance with the applicable regulations.
Organization/company Address Post code, place Phone Fax Email Name
Date and legally binding signature Company stamp
This form can be downloaded from our website.
Copies: Original for addresee - 1 copy for accompanying documents - 1 copy for file of sender
tina31e1 (2004-05) HPG400 v1.om 49
Notes
50 tina31e1 (2004-05) HPG400 v1.om
Notes
tina31e1 (2004-05) HPG400 v1.om 51
LI–9496 Balzers Liechtenstein Tel +423 / 388 3111 Fax +423 / 388 3700
Original: German tina31d1 (2004-05) reachus@inficon.com
t i na31e1
www.inficon.com
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