INFICON HPG400 ATM User Manual

Operating Maual

High Pressure / Pirani Gauge

HPG400 HPG400-SD HPG400-SP

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Product Identification

In all communications with INFICON, please specify the information on the product nameplate. For convenient reference copy that information into the space provided below.

INFICON AG, LI-949 6 Balzers

Typ: No: F-No: V W

Validity

This document applies to products with the following part numbers: HPG400

HPG400 (with display)

HPG400-SD (with DeviceNet interface and switching functions)

HPG400-SP (with Profibus interface and switching functions)

The part number (PN) can be taken from the product nameplate.

All HPG400 versions are shipped with an instruction sheet (→  [8]). HPG400-SD and HPG400-SP come with a supplementary instruction sheet de-

scribing the fieldbus interfaces and the switching functions (→  [9]).

(without display)

353-520 353-522 (vacuum connection DN 40 CF-R)

353-521 353-523 (vacuum connection DN 40 CF-R)

353-527 353-528 (vacuum connection DN 40 CF-R)

353-525 353-526 (vacuum connection DN 40 CF-R)

(vacuum connection DN 25 ISO-KF)

If not indicated otherwise in the legends, the illustrations in this document correspond to gauge with part number 353-520. They apply to the other gauges by analogy.

We reserve the right to make technical changes without prior notice.

2 tina31e1 (2004-05) HPG400 v1.om

Intended Use

The HPG400 gauges have been designed for vacuum measurement of non-flammable gases and gas mixtures in a pressure range of 2×10 trol range of the gauge allows trend display from <1 mbar to 1000 mbar.

The gauges can be operated in connection with the INFICON Vacuum Gauge Controller VGC4XX or with other control devices.

-6

… 1 mbar. The con-

Functional Principle

Trademarks

The HPG400 functions with a HP (high pressure) hot cathode ionization manometer, which is controlled by the built-in Pirani manometer (control range). The hot cathode is switched on only below the switching threshold of ≈1 mbar (to prevent filament burn-out). For pressures above this threshold, the Pirani signal is output.

Over the whole measuring range, the measuring signal is output as logarithm of the pressure.

DeviceNet™ Open DeviceNet Vendor Association, Inc.

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Contents

Product Identification 2 Validity 2 Intended Use 3 Functional Principle 3 Trademarks 3

1 Safety 6

1.1 Symbols Used 6

1.2 Personnel Qualifications 6

1.3 General Safety Instructions 7

1.4 Liability and Warranty 7

2 Technical Data 8 3 Installation 13

3.1 Vacuum Connection 13

3.1.1 Removing and Installing the Electronics Unit 15

3.2 Electrical Connection 16

3.2.1 Use With INFICON VGC4XX Vacuum Gauge Controller 16

3.2.2 Use With Other Controllers 17

3.2.2.1 Making a Sensor Cable 17

3.2.2.2 Making a DeviceNet Interface Cable (HPG400-SD) 19

3.2.2.3 Making a Profibus Interface Cable (HPG400-SP) 20

3.2.3 Using the Optional Power Supply (With RS232C Line) 21

4 Operation 23

4.1 Measuring Principle, Measuring Behavior 23

4.2 Operational Principle of the Gauge 25

4.3 Putting the Gauge Into Operation 26

4.4 Display (HPG400) 27

4.5 RS232C Interface 28

4.5.1 Description of the Functions 28

4.5.1.1 Output String (Transmit) 28

4.5.1.2 Input String (Receive) 30

4.6 DeviceNet Interface (HPG400-SD) 31

4.6.1 Description of the Functions 31

4.6.2 Operating Parameters 31

4.6.2.1 Operating Software 31

4.6.2.2 Node Address Setting 31

4.6.2.3 Data Rate Setting 32

4.6.3 Status Lights 32

4.7 Profibus Interface (HPG400-SP) 33

4.7.1 Description of the Functions 33

4.7.2 Operating Parameters 33

4.7.2.1 Operating Software 33

4.7.2.2 Node Address Setting 33

4.8 Switching Functions (HPG400-SD, HPG400-SP) 34

4.8.1 Setting the Switching Functions 34

5 Deinstallation 36

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6 Maintenance, Repair 37

6.1 Maintenance 37

6.2 Adjusting the Gauge 37

6.2.1 Pirani Adjustment (HPG400) 37

6.2.2 Pirani Adjustment (HPG400-SD, HPG400-SP) 38

6.3 Adjusting the Calibration Setting of the Hot Cathode 39

6.4 What to Do in Case of Problems 40

6.5 Replacing the Sensor 42

7 Options 43 8 Spare Parts 43 9 Storage 43 10 Returning the Product 44 11 Disposal 44

Appendix 45

A: Relationship Output Signal – Pressure 45 B: Gas Type Dependence 46 C: Literature 48

Declaration of Contamination 49

For cross-references within this document, the symbol (→  XY) is used, for crossreferences to other documents, the symbol (→  [Z]).

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1 Safety

1.1 Symbols Used

DANGER

Information on preventing any kind of physical injury.

WARNING

Information on preventing extensive equipment and environmental damage.

Caution

Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage.

Notice

1.2 Personnel Qualifications

Hint, recommendation

The result is O.K.

The result is not as expected

Optical inspection

Waiting time, reaction time

Skilled personnel

All work described in this document may only be carried out by persons who have suitable technical training and the necessary experience or who have been instructed by the end-user of the product.

6 tina31e1 (2004-05) HPG400 v1.om

1.3 General Safety Instructions

• Adhere to the applicable regulations and take the necessary precautions for the process media used.

Consider possible reactions between the materials (→  11) and the process media.

Consider possible reactions of the process media (e.g. explosion) due to heat generated by the product.

• Adhere to the applicable regulations and take the necessary precautions for all work you are going to do and consider the safety instructions in this document.

• Before beginning to work, find out whether any vacuum components are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.

Communicate the safety instructions to all other users.

1.4 Liability and Warranty

INFICON assumes no liability and the warranty becomes null and void if the enduser or third parties

• disregard the information in this document

• use the product in a non-conforming manner

• make any kind of interventions (modifications, alterations etc.) on the product

• use the product with accessories not listed in the corresponding product docu-

mentation.

The end-user assumes the responsibility in conjunction with the process media used.

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2 Technical Data

Measurement

Emission

Measuring range (air, N2)

Hot cathode Pirani (control range)

Accuracy

-5

… 1 mbar

2×10 1×10

±15% of reading (valid between 10 over threshold setting (<P ↔ HP>, →  25).

Repeatability

-5

… 10-1 mbar

-1

… 100 mbar

Gas type dependence

Switching (changeover) threshold (selectable from 5 defined setpoints)

(after 10 min. stabilization) ±2% of reading

±30% of reading

→ Appendix B

1 mbar 5×10 2×10 1×10 5×10

Emission current

from 1 mbar to 2×10

–6

mbar

continually rising 4 µA 130 µA

Anode voltage 180 V

-6

… 1 mbar

-2

… 1000 mbar

–1

mbar

–1

mbar

–1

mbar

–2

mbar

-5

mbar and change-

Output signal

Identification of the gauge

Voltage range 0 … +10.2 VDC Measuring range

Hot cathode Pirani

Overrange hot cathode Underrange hot cathode

Overrange Pirani Underrange Pirani

Relationship voltage-pressure

Hot cathode Pirani

1.5 … 7.5 V

8.5 … 9.75 V

7.5 V ≤ U ≤ 8.0 V

0.5 V ≤ U ≤ 1.5 V

9.75 V ≤ U ≤ 10.2 V

8.0 V ≤ U ≤ 8.5 V logarithmic,

→ Appendix A

1.00 V/decade

0.25 V/decade

Error signals

Hot cathode error Pirani error

Min. load impedance

Resistor

≤+0.3 V, →  40 ≤+0.5 V, →  40

10 kΩ, short cicuit proof

56 kΩ between pin 10 and pin 5 (sensor cable connector)

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Display (HPG400)

For gauges with part numbers

353-521 353-523

Power supply

Display panel

LCD matrix, 32×16 pixels, with background illumination green = normal operation

red = error/warning →  27) Dimensions Parameters

16.0 mm × 11.2 mm

Pressure, pressure unit, status,

error messages Pressure units

mbar (factory setting), Torr, Pa

(selecting the pressure unit →  28)

DANGER

The gauge must only be connected to power supplies, instruments or control devices that conform to the requirements of a grounded extralow voltage (SELV-E according to EN 61010). The connection to the gauge has to be fused (INFICON controllers fulfill these requirements).

Operating voltage at the gauge +24 VDC (20 … 28 VDC)

ripple max. 2 V

Power consumption

Standard Emission start (<200 ms)

≤0.5 A ≤1.4 A

Power consumption

HPG400, HPG400-SD HPG400-SP

≤16 W ≤18 W

Fuse necessary 1.25 AT

HPG400-SD requires an additional, separate power supply for the DeviceNet interface (→  19).

Supply voltage at the DeviceNet connector (Pin 2 and Pin 3) +24 VDC (+11 … 25 VDC)

Power consumption <2 W The gauge is protected against reversed polarity of the supply voltage.

Measured at sensor cable connector (consider the voltage drop as function of the sensor cable length).

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Sensor cable connection

For reasons of compatibility, the expression "sensor cable" is used for all HPG400 versions in this document, although the pressure reading of the gauges with fieldbus interface (HPG400-SD and HPG400-SP) is normally transmitted via the corresponding bus.

Electrical connector

HPG400 HPG400-SD, HPG400-SP

Cable for HPG400

Analog values only Incl. RS232C interface and

identification

Cable for HPG400-SD, HPG400-SP

Max. cable length (supply voltage 24 V)

Analog and fieldbus operation

RS232C- and VGC4XX operation

Switching functions

HPG400 HPG400-SD, HPG400-SP

Adjustment range

Relay contact rating

Voltage Current

D-Sub,15 pins, male

→  17 →  18

4 conductors plus shielding

7 conductors plus shielding depending on the functions used,

max. 14 conductors plus shielding

≤35 m, conductor cross-section 0.25 mm² ≤50 m, conductor cross-section 0.34 mm ≤100 m, conductor cross-section 1.0 mm²

≤30 m

none 2 (Setpoint A and B)

-6

2×10

mbar … 100 mbar

Setpoints adjustable via potentiometers (setpoints A and B), one floating, normally open relay contact per setpoint (→  18, 34).

≤60 V ≤0.5 ADC

RS232C interface

DeviceNet interface (HPG400-SD)

Data rate Data format

9600 Baud binary

8 data bits one stop bit no parity bit no handshake

Connections (sensor cable connector)

TxD (Transmit Data) RxD (Receive Data) GND

Pin 13 Pin 14 Pin 5

Function and communication protocol of the RS232C interface →  28

For HPG400-SD gauges with part numbers:

353-527 353-528

Fieldbus name DeviceNet Standard applied Communication protocol, data format

→  [6] →  [1], [4]

Interface, physical CAN bus Data rate

(adjustable via "RATE" switch)

125, 250 and 500 kBaud "P" (125, 250 and 500 kBaud, programmable via DeviceNet (→  [1]))

Node address (MAC ID) (Adjustable via "ADDRESS", "MSD", "LSD" switches)

0 … 63

dec

"P" (programmable 0 … 63 via DeviceNet, →  [1])

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DeviceNet connector Micro-Style, 5 pins, male

Cable Shielded, special DeviceNet cable,

5 conductors (→  19 and  [4])

Cable length, system wiring According to DeviceNet specifications

(→  [4], [6])

Profibus interface (HPG400-SP)

For HPG400-SP gauges with part numbers:

353-525 353-526

Fieldbus name Profibus Standard applied Communication protocol, data format

→  [7] →  [2], [7]

Interface, physical RS485 Data rate

≤12 MBaud (→  [2])

Node address

Local: (Adjustable via hexadecimal "ADDRESS", "MSD", "LSD" switches)

00 … 7D

(0 … 125

hex

dec

)

Via Profibus: (hexadecimal "ADDRESS" switches set to >7d

hex

(>125

dec

))

00 … 7D

(0 … 125

hex

dec

)

Profibus connection D-Sub, 9 pins, female

Cable Shielded, special Profibus cable

(→  20 and  [5])

Cable length, system wiring According to Profibus specifications

(→  [5], [7])

Vacuum

Environment

Materials exposed to vacuum

Housing, supports, screens Feedthroughs Insulator Cathode Cathode holder Pirani element

Internal volume

353-520, 353-521 353-525, 353-527

353-522, 353-523 353-526, 353-528

stainless steel

NiFe, nickel plated

glass

iridium, yttrium oxide (Y

molybdenum

tungsten, copper

≤20 cm

≤30 cm

≤30 cm Pressure max. 5 bar (absolut)

(only for Inert gases and

temperatures <100 °C).

Admissible temperatures

Storage Operation Bakeout

-20 … 70 °C 0 … 50 °C

+150 °C (without electronics unit)

Relative humidity (year's mean / during 60 days)

≤65 / 85% (no condensation)

Use indoors only

altitude up to 2000 m NN

Type of protection IP 30

2O3

)

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Dimensions [mm]

Part numbers Part numbers 353-520 353-522 353-521 353-523 353-525 353-526 353-527

353-528

4-40UNC 2B

DN 25 ISO-KF

Gauges with DeviceNet connector are 14 mm longer. The other dimensions of housing and vacuum connection are identical.

Part numbers

353-527 353-528

4-40UNC 2B

DN 40 CF-R

Weight

353-520, 353-521 353-522, 353-523 353-525, 353-527 353-526, 353-528

12 tina31e1 (2004-05) HPG400 v1.om

285 g 550 g 430 g 695 g

3 Installation

3.1 Vacuum Connection

DANGER

Caution: overpressure in the vacuum system >1 bar Injury caused by released parts and harm caused by escaping process

gases can result if clamps are opened while the vacuum system is pressurized.

Do not open any clamps while the vacuum system is pressurized. Use the type of clamps which are suited to overpressure.

DANGER

Caution: overpressure in the vacuum system >2 bar KF flange connections with elastomer seals (e.g. O-rings) cannot

withstand such pressures. Process media can thus leak and possibly damage your health.

Use O-rings provided with an outer centering ring.

DANGER

The gauge must be electrically connected to the grounded vacuum chamber. This connection must conform to the requirements of a protective connection according to EN 61010:

• CF connections fulfill this requirement

• For gauges with a KF vacuum connection, use a conductive me-

tallic clamping ring.

Caution

Caution: vacuum component Dirt and damages impair the function of the vacuum component. When handling vacuum components, take appropriate measures to

ensure cleanliness and prevent damages.

The gauge may be mounted in any orientation. To keep condensates and particles from getting into the measuring chamber, preferably choose a horizontal to upright position. See dimensional drawing for space requirements(→  12).

• The gauge is supplied with a built-in baffle.

• The sensor can be baked at up to 150 °C. At temperatures exceeding 50 °C,

the electronics unit has to be removed (→  15).

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Procedure

Remove the protective lid.



The protective lid will be needed for maintenance.

Make the flange connection to the vacuum system, preferably without ap-



plying vacuum grease.

When installing the gauge, make sure that the area around the connector is accessible for the tools required for adjustment while the gauge is mounted

When installing the gauge, allow for installing/deinstalling the connectors and accommodation of cable loops.

If you are using a gauge with display, make sure easy reading of the display is possible.

The gauge is now installed.

14 tina31e1 (2004-05) HPG400 v1.om

3.1.1 Removing and Installing the Electronics Unit

Required tools / material

Removing the electronics unit

• Allen key, size 2.5 mm

 Unscrew the hexagon socket set screw (1) on the side of the electronics

unit (2).

 Remove the electronics unit without twisting it.

Installing the electronics unit

Removal of the electronics unit is completed.

 Place the electronics unit on the sensor (3) (be careful to correctly align the

pins and notch (4)).

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3.2 Electrical Connection

 Slide the electronics unit in to the mechanical stop and lock it with the hexa-

gon socket set screw (1).

The electronics unit is now installed.

3.2.1 Use With INFICON VGC4XX Vacuum Gauge Controller

Required material

Procedure

If the gauge is used with an INFICON VGC4XX controller, a corresponding sensor cable is required (→  43). The sensor cable permits supplying the gauge with power, transmitting measurement values and gauge statuses, and making parameter settings.

Caution

Caution: data transmission errors If the gauge is operated with the INFICON VGC4XX Vacuum Gauge

Controller (RS232C) and a fieldbus interface at the same time, data transmission errors may occur.

The gauge must not be operated with an INFICON VGC4XX controller and DeviceNet or Profibus at the same time.

• Sensor cable (→  [10] INFICON sales literature)

 Plug the sensor connector into the gauge and secure it with the locking

screws.

 Connect the other end of the sensor cable to the INFICON controller and

secure it.

The gauge can now be operated with the VGC4XX controller.

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