INFICON Guardian EIES Controller User Manual
OPERATING MANUAL
Guardian
Co-Deposition Controller
IPN 074-517-P1D
™
OPERATING MANUAL
www.inficon.com reachus@inficon.com
©2012 INFICON
®
Guardian
Co-Deposition Controller
IPN 074-517-P1D
™
Trademarks
The trademarks of the products mentioned in this manual are held by the companies that
produce them.
ConFlat® is a registered trademark of Varian Corporation.
Guardian™ is a trademark of INFICON GmbH.
LabVIEW™ is a trademark of National Instruments
Windows®, Access®, Excel® and AxtiveX® are registered trademarks of Microsoft Corporation.
Wonderware® is a registered trademark of Invensys plc
All other brand and product names are trademarks or registered trademarks of their respective companies.
Disclaimer
The information contained in this manual is believed to be accurate and reliable. However, INFICON assumes
no responsibility for its use and shall not be liable for any special, incidental, or consequential damages related
to the use of this product.
Due to our continuing program of product improvements, specifications are subject to change without notice.
Copyright
©2012 All rights reserved.
Reproduction or adaptation of any part of this document without permission is unlawful.
DECLARATION
OF
CONFORMITY
This is to certify that this equipment, designed and manufactured by:
INFICON Inc.
Two Technology Place
East Syracuse, NY 13057
USA
meets the essential safety requirements of the European Union and is placed on the market accordingly. It has
been constructed in accordance with good engineering practice in safety matters in force in the Community and
does not endanger the safety of persons, domestic animals or property when properly installed and maintained and
used in applications for which it was made.
In addition, this is to certify that this equipment has also been designed and manufactured, having regard to the
state of the art, to ensure complies with the Protection Requirements of EMC directive 2004/108/EC.
A Technical Documentation File is also available for review by competent authorities and will be maintained for a
period of ten years after the date on which the equipment was last manufactured. In additional to this file,
technical, installation, maintenance and application information concerning this equipment can also be found in the
Operating Manual(s) for this product or product family.
Equipment Description: EIES Guardian (including all options).
Applicable Directives: 2006/95/EC (LVD)
2004/108/EC (General EMC)
2002/95/EC (RoHS)
Applicable Standards:
Safety: EN 61010-1:2001
Emissions: EN 61326-1:1997/A1: 1998/A2: 2001 (Radiated & Conducted Emissions)
Class A: Emissions per Table 3
(EMC – Measurement, Control & Laboratory Equipment)
Immunity: EN 61326-1:1997/A1: 1998/A2: 2001 (General EMC)
Class A: Immunity per Table A1
(EMC – Measurement, Control & Laboratory Equipment)
CE Implementation Date: May 2008 (Updated May 2010)
Authorized Representative: Steve Schill
Thin Film Business Manager
INFICON Inc.
ANY QUESTIONS RELATIVE TO THIS DECLARATION OR TO THE SAFETY OF INFICON'S
PRODUCTS SHOULD BE DIRECTED, IN WRITING, TO THE VICE-PRESIDENT OF
OPERATIONS AT THE ABOVE ADDRESS.
Revised 5/2010
Warranty
WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products
manufactured by it, or by an affiliated company and sold by it, and described on
the reverse hereof, to be, for the period of warranty coverage specified below, free
from defects of materials or workmanship under normal proper use and service.
The period of warranty coverage is specified for the respective products in the
respective Seller instruction manuals for those products but shall not be less than
two (2) years from the date of shipment thereof by Seller. Seller's liability under
this warranty is limited to such of the above products or parts thereof as are
returned, transportation prepaid, to Seller's plant, not later than thirty (30) days
after the expiration of the period of warranty coverage in respect thereof and are
found by Seller's examination to have failed to function properly because of
defective workmanship or materials and not because of improper installation or
misuse and is limited to, at Seller's election, either (a) repairing and returning the
product or part thereof, or (b) furnishing a replacement product or part thereof,
transportation prepaid by Seller in either case. In the event Buyer discovers or
learns that a product does not conform to warranty, Buyer shall immediately notify
Seller in writing of such non-conformity, specifying in reasonable detail the nature
of such non-conformity. If Seller is not provided with such written notification,
Seller shall not be liable for any further damages which could have been avoided if
Seller had been provided with immediate written notification.
THIS WARRANTY IS MADE AND ACCEPTED IN LIEU OF ALL OTHER
WARRANTIES, EXPRESS OR IMPLIED, WHETHER OF MERCHANTABILITY OR
OF FITNESS FOR A PARTICULAR PURPOSE OR OTHERWISE, AS BUYER'S
EXCLUSIVE REMEDY FOR ANY DEFECTS IN THE PRODUCTS TO BE SOLD
HEREUNDER. All other obligations and liabilities of Seller, whether in contract or
tort (including negligence) or otherwise, are expressly EXCLUDED. In no event
shall Seller be liable for any costs, expenses or damages, whether direct or
indirect, special, incidental, consequential, or other, on any claim of any defective
product, in excess of the price paid by Buyer for the product plus return
transportation charges prepaid.
No warranty is made by Seller of any Seller product which has been installed,
used or operated contrary to Seller's written instruction manual or which has been
subjected to misuse, negligence or accident or has been repaired or altered by
anyone other than Seller or which has been used in a manner or for a purpose for
which the Seller product was not designed nor against any defects due to plans or
instructions supplied to Seller by or for Buyer.
This manual is intended for private use by INFICON® Inc. and its customers.
Contact INFICON before reproducing its contents.
NOTE: These instructions do not provide for every contingency that may arise in
connection with the installation, operation or maintenance of this equipment.
Should you require further assistance, please contact INFICON.
www.inficon.com reachus@inficon.com
Chapter 1
1.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
1.2 EIES Controller. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2
1.3 EIES Sensor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2
1.4 EIES Detector. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-5
1.5 EIES Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-5
1.6 Quartz Crystal Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6
1.7 Analog Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6
1.8 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
1.8.1 Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-7
1.8.2 Detector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8
1.8.3 Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8
Guardian Co-Deposition Controller Operating Manual
Table Of Contents
Trademarks
Disclaimer
Copyright
Introduction and Specifications
Chapter 2
Quick Start
2.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
2.2 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
2.2.1 Sensor Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
2.2.1.1 Sensor Covers, High Rate and Standard Rate. . . . . . . . . . . . . . . . . . . . . . .2-2
2.2.2 Detector—Direct Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
IPN 074-517-P1D
2.2.3 Sensor to Fiber Optic Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
2.2.4 Controller Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
2.2.5 QCM Option Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-5
2.3 EIES Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-5
2.3.1 Software Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-5
2.3.2 EIES Main Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-6
2.3.3 Edit Film . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-8
2.3.4 Edit Processes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-8
2.3.5 Edit Layer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11
2.3.6 Views . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-16
2.3.7 Software Summary. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-17
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Guardian Co-Deposition Controller Operating Manual
2.4 Initial Setup. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-18
2.4.1 Power-up Sequence. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-18
2.4.2 Communications. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-18
2.4.3 Detector Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-19
2.4.4 Sensor Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-20
2.4.5 QCM Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-21
2.4.6 Digital I/O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-22
2.5 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-22
2.5.1 Build a Single Layer Process . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-22
2.5.2 Setup Layer Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-23
2.5.3 Start Deposition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-25
2.5.4 Manual Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-27
2.5.5 QCM Calibration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-27
2.5.6 Stop Deposition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-27
Chapter 3
EIES Software
3.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
3.2 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
3.3 Main Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5
3.3.1 Status Panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5
3.3.2 Control Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6
3.3.3 Readings Panel—Process Mode. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7
3.3.4 Readings Panel—Ratio Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8
3.3.5 Readings Panel—Readings Mode. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-9
3.3.5.1 Channel Readings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-9
3.3.5.2 Sensor Readings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10
3.3.5.3 QCM Readings. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10
3.4.4.1 Format of the DataLog file . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-13
TOC - 2
3.3.6 Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11
3.4 File Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11
3.4.1 File >> Open Process. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11
3.4.2 File >> Open and Save Database . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11
3.4.3 File >> Data Log On/Off . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12
3.4.4 File >> Data Log Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12
3.4.5 File >> Print Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-13
3.4.6 File >> Page Setup. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-14
3.4.7 File >> Exit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-14
3.5 Edit Process . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-14
3.6 Edit Layer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-16
IPN 074-517-P1D
Guardian Co-Deposition Controller Operating Manual
3.6.1 Layer Grid. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-17
3.6.2 Rate Ramps Grid . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-18
3.6.3 X Chan (Cross Channel) Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-19
3.6.4 Ratio Display Grid. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-20
3.6.5 Edit Layer Film Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-21
3.6.5.1 Deposit Grid . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-22
3.6.5.2 Condition Grid. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-23
3.6.6 Edit Layer Film Cal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-24
3.6.6.1 Calibration Grid. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-24
3.6.6.2 QCM Grid . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-26
3.7 Edit: Film. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-27
3.7.1 Deposit Grid . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-28
3.7.2 Condition Grid. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-28
3.7.3 Film Cal(ibration) Tab. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-28
3.7.3.1 Calibration Grid. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-28
3.7.3.2 QCM Grid . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-28
3.8 Edit >> System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-29
3.8.1 Channel Tab. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-29
3.8.2 Sensor Tab. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-30
3.8.3 QCM Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-31
3.8.4 Digital I/O Tab. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-33
3.8.4.1 Relay Assign. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-33
3.8.4.2 Input Assign:. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-34
3.8.5 Comm Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-35
3.8.5.1 Guardian. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-35
3.8.5.2 External . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-36
3.8.6 Display Tab. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-37
3.9 View Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-38
IPN 074-517-P1D
3.9.1 Process, Ratio, Readings. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-38
3.9.2 Graph Selection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-38
3.9.2.1 Graph Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-39
3.9.2.1.1 Show Channel — Axis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-39
3.9.2.1.2 Y Axis Left/Right. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-40
3.9.2.1.3 X Axis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-40
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Guardian Co-Deposition Controller Operating Manual
Chapter 4
Installation
4.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.2 Sensor / Feedthrough Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
4.2.1 Sensor Position . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3
4.2.2 Sensor Covers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4
4.2.3 Rigid Sensor Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5
4.2.4 Sensor Filament Cables. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6
4.2.4.1 016-600-Gxx Standard Single Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6
4.2.4.2 016-601-Gxx Gas Compensating Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6
4.3 Detector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7
4.3.1 Detector Cable(s) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7
4.3.2 Single-Detector Systems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8
4.3.3 Multiple-Detector Systems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8
4.3.3.1 Fiber Optic Beam Splitting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9
4.3.3.2 Fiber Optic Beam Splitter Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9
4.3.3.3 Optical Beam Splitter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-11
4.4 Optical Filters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-12
4.5 Computer Connections. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-13
4.5.1 RS232 Serial Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-13
4.5.2 TCP/IP Ethernet Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-13
4.5.2.1 Network Connection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-13
4.5.2.2 How to Set Up the Network Protocol on the PC. . . . . . . . . . . . . . . . . . . . . 4-13
4.6 Controller Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-17
4.6.1 Digital I/O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-17
4.6.2 Relay Connector Pinout . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-18
4.6.3 Input Connector Pinout. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-19
4.6.3.1 Emission Interlock Connector. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-19
4.6.4 Sensor(s) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-20
4.6.5 Control Outputs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-21
4.6.6 Computer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-21
4.6.7 Mains Power. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-22
4.7 Quartz Crystal Monitor Option (QCM) . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-23
4.8 Monochromator Option. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-24
4.8.1 Monochromator Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-24
4.8.2 Monochromator Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-26
IPN 074-517-P1D
TOC - 4
Guardian Co-Deposition Controller Operating Manual
Chapter 5
Maintenance & Troubleshooting
5.1 How To Contact Customer Support . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-1
5.2 Returning Your Instrument to INFICON . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-1
5.3 Sensor Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-2
5.3.1 Sensor Cleaning. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2
5.3.2 EIES Filament or Emitter Assembly Replacement . . . . . . . . . . . . . . . . . . . . 5-3
5.4 Chassis Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-5
5.5 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-5
Chapter 6
Theory & Calibration
6.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1
6.2 Theory of EIES Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1
6.2.1 Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-1
6.2.2 Optical Discrimination. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-3
6.2.3 Detector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-4
6.3 Theory of QCM Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-5
6.3.1 Density . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-5
6.3.2 Z-Ratio or Z-Factor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5
6.3.3 Tooling Factor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-7
6.4 EIES Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-8
6.4.1 Detector Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-8
6.4.2 PMT Voltage Selection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-8
6.4.3 Zero Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-9
6.4.4 Gain Calibration - Test Run . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-9
6.4.5 Gain Calibration - QCM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-10
6.4.6 Cross Channel Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-11
6.5 Loop Tuning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-11
IPN 074-517-P1D
Chapter 7
Communications
7.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-1
7.2 ActiveX (COM) Interface. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-1
7.2.1 Setup for ActiveX Control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-1
7.2.2 EIES ActiveX Comm Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-1
7.2.3 EIES ActiveX Comm Program Protocol . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-2
7.2.3.1 Query Command Format . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-2
7.2.3.2 Update Command Format . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-2
7.2.3.3 EIES ActiveX Program Command Summary . . . . . . . . . . . . . . . . . . . . . . . . 7-3
TOC - 5
Guardian Co-Deposition Controller Operating Manual
7.3 Guardian Controller Direct Communications . . . . . . . . . . . . . . . . . . . . . . . . 7-8
7.3.1 Serial Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-8
7.3.2 Ethernet Interface. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-8
7.3.3 Guardian Controller Firmware Versions. . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-8
7.3.3.1 V3.XX Controller Command/Response Format . . . . . . . . . . . . . . . . . . . . . . 7-9
7.3.3.2 V4.XX Controller Command/Response Format . . . . . . . . . . . . . . . . . . . . . . 7-9
7.3.4 Command Summary for V3.XX and V4.XX Guardian Controller . . . . . . . . 7-12
7.3.4.1 @ . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-12
7.3.4.2 A. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-12
7.3.4.3 B. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-12
7.3.4.4 C. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-13
7.3.4.5 D. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-13
7.3.4.6 F . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-13
7.3.4.7 G. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-14
7.3.4.8 H. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-14
7.3.4.9 K. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-15
7.3.4.10 M . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-15
7.3.4.11 N. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-15
7.3.4.12 S . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-15
7.3.4.13 T . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-16
7.3.4.14 V . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-16
7.3.4.15 W . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-16
Appendix A
Material Optical Parameters
Appendix B
Material QCM Parameters
Index
IPN 074-517-P1D
TOC - 6
1.1 Introduction
CH
4
CH
3
CH
2
CH
1
SOURCE 1
POWER SUPPLY
SOURCE 2
POWER SUPPLY
SOURCE 3
POWER SUPPLY
SOURCE 4
POWER SUPPLY
TO QUARTZ
CRYSTAL MONITOR
OPTIONAL QCM SENSOR
FOR CALIBRATION
EIES SENSOR 2
D3
D4
S2
D3
D4
S2
EIES SENSOR 1
GUARDIAN
CONTROLLER
PC
FIBER OPTIC
BEAM SPLITTER
DETECTORS
& FILTERS
The EIES-IV Guardian uses Electron Impact Emission Spectroscopy (EIES) to
control vacuum deposition of thin films.
In EIES, the material being deposited is energized by a thermionic emitter, which
creates optical emission spectra. An optical filter passes a characteristic
wavelength of the spectra to a detector, which measures the intensity of the
emission. The measured intensity is fed to a PID control loop, which generates a
control signal for the material's evaporation power supply. By proper filter selection,
multiple detectors can control deposition of multiple materials simultaneously.
The EIES-IV Guardian consists of five basic elements: controller, sensor(s),
detector(s), software, and an optional quartz crystal monitor. A four channel, two
sensor system is shown in Figure 1-1. Actual installation must consider source to
sensor alignment requirements, see section 4.2.1, Sensor Position, on page 4-3.
Guardian Co-Deposition Controller Operating Manual
Chapter 1
Introduction and Specifications
Figure 1-1 Four Channel Two Sensor System
IPN 074-517-P1D
1 - 1
Guardian Co-Deposition Controller Operating Manual
1.2 EIES Controller
The EIES-IV Guardian Controller serves as the interface between the EIES
sensor(s) and detector(s), the evaporation power supply, and the computer running
the EIES software. See Figure 1-2.
Figure 1-2 Guardian Controller with Detector
The controller supplies power to both the filament of the sensor assembly and to
the detector modules. It communicates with each detector, passing the detector
measurements to the computer running the EIES program. Control voltages for
evaporation power supplies are also generated in the controller. Finally, relays and
digital inputs to operate shutters, etc., are included in the controller.
The controller is operated from a computer running the EIES software via RS-232
or Ethernet. Other than a power switch and a few status LEDs, there are no
operator controls on the EIES-IV Guardian Controller.
1.3 EIES Sensor
In the sensor assembly, see Figure 1-4, high-energy electrons from a hot filament
excite the valence electrons of the deposited material. These excited electrons
emit light at wavelengths that are characteristic of each material. A light tube
conducts the light to a feedthrough with a viewport, where it is measured by the
Photomultiplier Tube (PMT) of the detector module(s). A single sensor, see Figure
1-3, can be used to create emissions from multiple materials.
Figure 1-3 EIES Single Sensor 016-400-G1
IPN 074-517-P1D
1 - 2
Guardian Co-Deposition Controller Operating Manual
Figure 1-4 EIES Single Sensor and Feedthrough 016-600-Gxx
The sensor assembly consists of a 1.33 in. sapphire viewport attached to a 2.75 in.
Conflat
®
flange. On the vacuum side of the flange, a telescoping light tube and two
electrical connections are attached to the thermionic emitter. The telescoping tube
can be adjusted to locate the thermionic emitter in the vapor flux.
In the Gas Compensating Sensor, Figure 1-5, two sensors are stacked on the same
optical tube with the gas compensating sensor rotated 90 degrees out of the vapor
stream.
NOTE: The sensor will not pass through the 2.75 in.CF (NW35CF) port. If the
chamber is too small to allow installation from the inside, a 4.5 in. CF
(NW63CF) or larger flange adapted to the 2.75 in. CF flange is required to
IPN 074-517-P1D
allow the entire sensor to pass through.
1 - 3
Guardian Co-Deposition Controller Operating Manual
Figure 1-5 Gas Compensating Sensor and Feedthrough 016-601-Gxx
1 - 4
IPN 074-517-P1D
1.4 EIES Detector
Filter
Detector
Sensor
Viewport
The EIES detector module's photomultiplier tube (PMT) measures the emission
intensity of a characteristic wavelength of the deposited material.
For detecting a single material, an optical filter and detector module can be
attached directly to the viewport. See Figure 1-6.
Figure 1-6 EIES Detector
Guardian Co-Deposition Controller Operating Manual
For multiple materials, a fiber optic beam splitter is attached to the viewport. The
split signal is then fed to multiple detectors. Splitting the signal reduces its intensity.
Each detector is fitted with a filter specific to the material it measures.
1.5 EIES Software
The EIES software provides the user interface, see Figure 1-7, for operating the
EIES-IV Guardian system. The program provides all of the functions required for
an eight sensor, eight output, multi-layer co-deposition controller. Process settings,
numeric data, and graphs can be displayed during all phases of deposition.
®
The EIES software stores process recipes in a Microsoft
database. Process data is logged to disk in comma-delimited format for easy import
IPN 074-517-P1D
into spreadsheet and graphing programs, such as Microsoft Excel
Chapter 3 details EIES software functions.
Access® compatible
®
.
1 - 5
Guardian Co-Deposition Controller Operating Manual
Figure 1-7 EIES Software
1.6 Quartz Crystal Monitor
In the EIES system, rate is proportional to light intensity, measured as detector
current. To calibrate the detector current to actual rate, an optional quartz crystal
monitor (QCM) is available.
The EIES system uses the INFICON SQM-242
for QCM calibration of the EIES detector(s). QCM calibration can be initiated by the
user, or automatically at regular intervals during deposition. Control of a source is
also possible with a QCM input.
A separate Operating Manual covers installation of the SQM-242 or Q-pod, and
hook up of the quartz sensors.
1.7 Analog Measurements
The INFICON SAM-242™ analog input card measures four 0 to +/-10 V (dc)
signals. The SAM-242 card can be used to measure process parameters, such as
temperature and pressure, to control those process variables. The SAM-242 card
is an add-on for the SQM card and is not a stand-alone card.
The SAM-242 card is also installed in the computer running the EIES software.
Installation is covered in the SQM-242 Operating Manual.
™
PCI card or Q-pod™ Transducer
IPN 074-517-P1D
1 - 6
1.8 Specifications
1.8.1 Sensor
Type . . . . . . . . . . . . . . . . . . . . . . . . . Single filament hot cathode or Dual filament
Sensor Materials . . . . . . . . . . . . . . . 304 SS, Inconel x-750,Tantalum, Ceramic
Filament Life (typical) . . . . . . . . . . . . ~1000 hours @ 1 x 10
Filament Material . . . . . . . . . . . . . . . Thoria coated Iridium,
Filament Current. . . . . . . . . . . . . . . . 2 to 4 amps
Emission Current . . . . . . . . . . . . . . . Yttria: 2 mA max, Thoria 4 mA max
Bias Voltage . . . . . . . . . . . . . . . . . . . 180 Volts
Operating Pressure . . . . . . . . . . . . . 5 x 10
Operating/Bakeout Temperature
for in-vacuum components . . . . . . . . 450ºC maximum
Guardian Co-Deposition Controller Operating Manual
Gas Compensating
-5
Tor r
Optional Yttria coated
-4
Torr maximum
Size . . . . . . . . . . . . . . . . . . . . . . . . . 1.94 L x 1.03 W x 0.81 H in.
(49 x 26 x 21 mm)
Mounting. . . . . . . . . . . . . . . . . . . . . . 2 ¾ in. CF (NW35CF) with sapphire viewport
Rigid SS tube from 7 in. to 16 in. (175 mm to
405 mm)
Optical Path . . . . . . . . . . . . . . . . . . . 1/2 in. (12.25 mm) dia. 304 SS rigid tube,
centerless ground (
InVac Cable . . . . . . . . . . . . . . . . . . . 16 AWG Mica insulated nickel clad Copper
Cable 016-509-Gxx
Optional ceramic bead insulated 0.050 in.
(1.3 mm) dia. Molybdenum wire Refractory
Cable 016-513-Gxx
IPN 074-517-P1D
External Wiring . . . . . . . . . . . . . . . . . 16 AWG except 18 AWG ground conductor,
40' (12 m) maximum
1 - 7
Guardian Co-Deposition Controller Operating Manual
1.8.2 Detector
Photomultiplier Tube (PMT) . . . . . . . Hamamatsu R7518 or equivalent
Spectral Response. . . . . . . . . . . . . . 185 to 730 nm
Detection Limit . . . . . . . . . . . . . . . . . >5 fW of optical input power
PMT Gain . . . . . . . . . . . . . . . . . . . . . 10
Resolution . . . . . . . . . . . . . . . . . . . . 20 bits
Mounting . . . . . . . . . . . . . . . . . . . . . 1.035 in. x 40 threads per Compatible with
Filter Holder . . . . . . . . . . . . . . . . . . . 1 in. (25 mm) diameter x .2 in. (5 mm) thick
Size . . . . . . . . . . . . . . . . . . . . . . . . . 2 x 5½ x 2¾ in. (50 x 140 x 70 mm)
Weight . . . . . . . . . . . . . . . . . . . . . . . 1.7 lb. (0.8 kg)
Wiring . . . . . . . . . . . . . . . . . . . . . . . . DB9 Male/Female, 40 ft. (12 m) maximum
Warm Up . . . . . . . . . . . . . . . . . . . . . Allow the detector to warm up for one hour
3
to 107, programmable
Omega SM1 series
filters
for maximum stability.
1.8.3 Controller
Sensors . . . . . . . . . . . . . . . . . . . . . . 1, 2 optional
Detectors . . . . . . . . . . . . . . . . . . . . . 8
Source Control Outputs . . . . . . . . . . 8 outputs, 0 to ±10 V (dc) programmable
Digital I/O . . . . . . . . . . . . . . . . . . . . . 12 relays 30 V (dc), 3 A,
Communications . . . . . . . . . . . . . . . RS-232 or Ethernet static IP address
Power . . . . . . . . . . . . . . . . . . . . . . . . 100-240 V~ ±10% nominal, 50/60 Hz, 110 W
Fuse . . . . . . . . . . . . . . . . . . . . . . . . . 250 V 1.6 A T
Size . . . . . . . . . . . . . . . . . . . . . . . . . 19 x 3 ½ x 12 in. (483 x 89 x 305 mm)
Weight . . . . . . . . . . . . . . . . . . . . . . . 8.5 lb. (3.9 kg)
Computer . . . . . . . . . . . . . . . . . . . . . Windows 2000/XP/Vista/7, user supplied
12 inputs 5-12 V (dc)
IPN 074-517-P1D
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Guardian Co-Deposition Controller Operating Manual
Operating Environment . . . . . . . . . . 0°C to 40°C
0 to 80% RH non-condensing
0 to 2,000 meters
Indoor Use Only
Class 1 Equipment (Grounded Type)
Suitable for Continuous Operation
Ordinary Protection (not protected against
harmful ingress of moisture)
Pollution Degree 2
Installation (Overvoltage) Category II for
transient overvoltages
Storage Environment . . . . . . . . . . . . -40°C to 40°C
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This page is intentionally blank.
1 - 10
IPN 074-517-P1D
2.1 Introduction
Electrical Feedthroughs
For Sensor Filament
Sapphire Window
1.33 in. CF Flange
2.75 in. CF Flange
Telescoping Tubing
For Length Adjustment
Vapor
Flux
EIES Sensor
This section covers the minimum system connections and software setup needed
to run the EIES-IV Guardian system. Consult later chapters for more detailed
installation and operating instructions.
2.2 Installation
2.2.1 Sensor Installation
Placement of the EIES sensor is the most significant factor determining EIES
system performance. The sensor must be placed so that the material vapor flux
reaches the sensor without obstruction. The sensor opening must be oriented so
that material can pass through the sensor without accumulating inside the sensor,
with the smaller sensor cutout toward the flux. See Figure 2-1. See Chapter 4 for
detailed installation instructions.
Guardian Co-Deposition Controller Operating Manual
Chapter 2
Quick Start
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NOTE: The sensor will not pass through the 2.75 in.CF (NW35CF) port. If the
chamber is too small to allow installation from the inside, a 4.5 in. CF
(NW63CF) or larger flange adapted to the 2.75 in. CF flange is required to
allow the entire sensor to pass through.
Figure 2-1 Sensor Placement
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Guardian Co-Deposition Controller Operating Manual
016-205-P2
Standard Rate Cover
016-205-P1
High Rate Cover
To install the sensor, loosen the collar that secures the telescoping tube and
separate the 2.75” flange from the sensor assembly. Install the 2.75 in. CF
feedthrough to the vacuum chamber port, with the telescoping tube inside the
chamber.
2.2.1.1 Sensor Covers, High Rate and Standard Rate
The High Rate cover 016-205-P1 is shipped installed on the flux sensor. The
Standard Rate cover 016-205-P2 is shipped separately in a poly bag. For MBE and
other applications where the sensor receives deposition rates below 10 Å/s or the
emission signal is weak, the Standard Rate cover may be preferable as it allows
more evaporant to enter the sensor. When replacing covers, be sure the cover is
securely snapped in place.
Figure 2-2 High Rate and Standard Rate Covers
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In the vacuum chamber, slide the sensor assembly onto the telescoping light tube
and adjust the length so that the vapor flux passes through the sensor. The smaller
opening in the sensor cover points toward the evaporant. If necessary, provide
mechanical support to stabilize the sensor assembly. However, do not block the
flux path. Secure the assembly by tightening the tube collar.
Attach the cables from the feedthrough to the sensor. For a standard sensor, attach
the in-vacuum cable to the pins marked "F" (Flux). For a gas compensating sensor,
attach the cable from the outermost sensor to the pins marked "F". Attach the
in-vacuum cable from the inner sensor to the pins marked "G" (Gas). Assure there
are no potential shorting paths to the chamber. The outermost sensor’s cover must
be aligned to allow evaporant material to pass through it, entering at the smaller
rectangular opening and exiting at the large opening. The gas sensor will be
oriented at a right angle relative to the flux sensor and its cover will have several
small holes to permit residual gas to enter, but no evaporant material.
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Guardian Co-Deposition Controller Operating Manual
CAUTION
2.2.2 Detector—Direct Installation
For single detector applications, the detector may be mounted directly to the
sensor assembly viewport. Please see section 4.3.2, Single-Detector Systems, on
page 4-8 for detailed installation instructions.
2.2.3 Sensor to Fiber Optic Installation
In multi-material applications, a fiber optic beam splitter attached to the viewport
can tailor signal transmission and detector mounting to your needs. Contact
INFICON for fiber optic beam splitting requirements and capabilities. Please see
section 4.3.3, Multiple-Detector Systems, on page 4-8 for detailed installation
instructions.
Be sure power to the PMT Detector Module is turned off
whenever the PMT is exposed to room light to avoid
damage to the PMT.
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Guardian Co-Deposition Controller Operating Manual
CAUTION
CAUTION
WARNING
WARNING
2.2.4 Controller Installation
Mount the controller in a location that allows easy wiring access to the EIES sensor
and detector assemblies. The controller may be placed up to 25 ft. from the EIES
computer. See section 4.6, Controller Installation, on page 4-17
Properly ground the system. Connect a heavy braided
cable from the EIES controller to vacuum chamber
ground. If you are using multiple power supplies, be sure
that the outer conductor of each BNC cable is at system
ground potential.
Digital Inputs and Relays: Consult Chapter 4 for information on digital I/O wiring.
A system interlock must be present. Plug the Interlock
connector 782-505-077 (jumpers pin 1 to 10 and pin 3 to
16) supplied in the 782-703-G1 Ship Kit into the Inputs
connector. Emission cannot be turned on unless this
connector or an equivalent system interlock is present.
Power: With the power switch OFF, connect the AC mains to the controller power
input. The controller automatically accepts 100-240 V (ac), 50-60 Hz.
NOTE: Observe the power-up sequence described below to avoid power glitches
appearing at the evaporation power supply outputs during startup.
Power up in this sequence: Press the power switch on
the Guardian controller. Next, start the EIES Software.
Last, turn on the evaporation power supplies.
Verify that the power cable provided is connected to a
properly grounded mains receptacle.
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WARNING
Maintain adequate insulation and physical separation of
WARNING
sensor, detector, and I/O wiring from hazardous voltages.
Relay contacts are rated for 30 V (dc) maximum duty. Any
customer supplied relay contact circuit must be fused at
not more than 5A if the circuit is capable of supplying
more than 5A, including the available short circuit
current.
2.2.5 QCM Option Installation
If an SQM-242 or Q-pod will be used for calibration or control, follow its Operating
Manual to install the QCM software and sensor(s).
For accurate rate calibration, locate the QCM sensor(s) in the vacuum chamber so
that the QCM sensor(s) receives a representative sample of the materials being
deposited.
Guardian Co-Deposition Controller Operating Manual
2.3 EIES Software
Leave the Guardian Controller power OFF while you become familiar with the EIES
program. This section will introduce the concepts necessary to operate the EIES-IV
Guardian system.
2.3.1 Software Installation
Insert the INFICON Program Disk into your CD-ROM drive. The Products Menu
should appear after a few seconds, see Figure 3-2 on page 3-3. If not, open
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Windows Explorer and run the UtilityDisk.exe program on the CDROM.
On the Products Menu, click EIES-IV Guardian. When EIES software installation
finishes, you may be prompted to restart your computer.
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Guardian Co-Deposition Controller Operating Manual
Control
Panel
Readings
Panel
Status
Panel
2.3.2 EIES Main Screen
Click the EIES-IV icon on your desktop (or click Start >> Programs >> INFICON
>> EIES-IV). Initially, your display may look slightly different than Figure 2-3.
Figure 2-3 Process Display
The EIES main screen shows operating controls for running your process in the left
Control Panel. Process status information is in the top Status Panel. Below the
Status Panel is the large Readings Panel where individual channel readings are
displayed.
The readings panel has three display modes: Process, Ratio and Readings. Click
View >> Process to see the Process display. The Process display shows process
related information such as films, setpoints, and manual operating controls.
The Ratio display is similar to the Process display except that the deviation
readings are replaced with the ratio of the channel’s reading to another channel.
The other channel number is shown below the ratio reading. Ratios are set up in
the Edit Layer dialog box. See Ratio Display Grid on page 3-20, for more
information on channel ratios.
Click View >> Readings to see the Readings display, Figure 2-4. This display
shows unfiltered readings from all sensors and detectors. The Readings display is
useful for equipment setup and troubleshooting.
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