INFICON Gemini ATM to Ultra-High Vacuum Gauge User Manual

Cold Cathode Gauge

Gemini MAG500, MAG504

Cold Cathode Pirani Gauge

Gemini MPG500, MPG504

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Operating Manual

Incl. EC Declaration of Conformity

Product Identification

In all communications with INFICON, please specify the infor­mation given on the product nameplate. For convenient refer­ence copy that information into the space provided below.

`

INFICON AG, LI-9496 Balzers

Model:
PN:
SN:
V W; LPS

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Validity

This document applies to products of the MAG50x and MPG50x
series:

3Mxx-xxx-0x0x

Measurement

Receptacle

Collector current

Ionization chamber

Measurement system

The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this

document correspond to the product with FCC receptacle and
vacuum connection DN 25 ISO-KF. They apply to the other
products by analogy.

We reserve the right to make technical changes without prior
notice.

N  1.5 ... 8.5 V

range

P  1.398 ... 8.598 V
Q  0.667 ... 10 V

0  FCC, 8-pin

0 D-Sub, 9-pin

Flange

6  DN 25 ISO-KF
7  DN 40 ISO-KF
8  DN 40 CF-R
Q  DN 40 CF-F

0  High current
1  Low current

0  Stainless steel

0  Standard
3  Ceramic coated

Type

A
B



Inverted Magnetron



Inverted Magnetron Pirani

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Intended Use

Gemini MAG500, MAG504

The Cold Cathode Gauges Gemini MAG500 and MAG504 have
been designed for vacuum measurement of gases in the
pressure range of 1×10

-9

… 1×10-2 mbar.

The gauges with PN 3MAx-xxx-0x0Q can be operated in
connection with an INFICON Vacuum Gauge Controller of the
VGC40x series.

Gemini MPG500, MPG504

The Cold Cathode Gauges Gemini MPG500 and MPG504 have
been designed for vacuum measurement of gases in the
pressure range of 1×10

-9

… 1000 mbar.

They must not be used for measuring flammable or combustible
gases in mixtures containing oxidants (e.g. atmospheric oxygen)
within the explosion range.

The gauges can be operated in connection with an INFICON
Vacuum Gauge Controller of the VGC40x series.

Functional Principle

Gemini MAG500, MAG504

The gauge functions with a cold cathode ionization measure­ment circuit (according to the inverted magnetron principle).

Over the whole measurement range, the measuring signal is
output as a logarithm of the pressure.

Gemini MPG500, MPG504

The gauge consists of two separate measuring systems (the
Pirani and the cold cathode system according to the inverted
magnetron principle). They are combined in such a way that for
the user, they behave like one measuring system.

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Over the whole measurement range, the measuring signal is
output as a logarithm of the pressure.

Scope of Delivery

1× gauge
1× pin for adjusting settings via buttons
1× Operating Manual German
1× Operating Manual English

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Contents

Product Identification 2
Validity 3
Intended Use 4
Functional Principle 4
Scope of Delivery 5

1

Safety 8

1.1 Symbols Used 8

1.2 Personnel Qualifications 8

1.3 General Safety Instructions 9

1.4 Liability and Warranty 9

2 Technical Data 10

2.1 Measuring Signal vs. Pressure 15

2.2 Gas Type Dependence MAG50x 18

2.3 Gas Type Dependence MPG50x 20

3 Installation 23

3.1 Vacuum Connection 23

3.2 Power Connection 27

3.2.1 FCC 68, 8-pin Connector 28

3.2.2 D-Sub, 9-pin Connector 29

4 Operation 30

4.1 Status Indication MAG 30

4.2 Status Indication MPG 31

4.3 Put MAG50x Into Operation 32

4.4 Put MPG50x Into Operation 32

4.5 Gas Type Dependence 33

4.6 Ignition Delay 33

4.7 Contamination 34

5 Deinstallation 36
6 Maintenance, Repair 38

6.1 Adjusting the Gauge 38

6.2 Cleaning the Gauge / Replacing Parts 40

6.2.1 Troubleshooting (measuring chamber) 41

6.2.2 Replacing Ionization Chamber and Ignition Aid 43

6.2.3 Replacing Measuring Chamber 45

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6.3 Troubleshooting 48

7 Returning the Product 51
8 Disposal 52
9 Options 53
10 Accessories 53
11 Spare Parts 53

11.1 Ignition aid for MAG50x and MPG50x 53

11.2 Ionization Chamber for MAG50x and MPG50x 54

11.3 Measuring Chamber Cpl. (Spare Sensor) 54

11.3.1 Measuring Chamber Cpl. for MAG500 54

11.3.2 Measuring Chamber Cpl. for MAG504 55

11.3.3 Measuring Chamber Cpl. for MPG500 55

11.3.4 Measuring Chamber Cpl. for MPG504 55

EC Declaration of Conformity 56

For cross-references within this document, the symbol (→  XY)
is used.

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1 Safety

1.1 Symbols Used

DANGER

Information on preventing any kind of physical injury.

WARNING

Information on preventing extensive equipment and environ­mental damage.

Caution

Information on correct handling or use. Disregard can lead to
malfunctions or minor equipment damage.

Notice

<…> Labeling

1.2 Personnel Qualifications

Skilled personnel

All work described in this document may only be carried out by
persons who have suitable technical training and the neces­sary experience or who have been instructed by the end-user
of the product.

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1.3 General Safety Instructions

• Adhere to the applicable regulations and take the necessary
precautions for the process media used.

Consider possible reactions with the product materials.
Consider possible reactions (e.g. explosion) of the process

media due to the heat generated by the product (MPG50x
only).

• Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider the
safety instructions in this document.

• Before beginning to work, find out whether any vacuum com­ponents are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contamin­ated parts.

Communicate the safety instructions to all other users.

1.4 Liability and Warranty

INFICON assumes no liability and the warranty becomes null
and void if the end-user or third parties

• disregard the information in this document

• use the product in a non-conforming manner

• make any kind of interventions (modifications, alterations etc.)

on the product

• use the product with accessories not listed in the product
documentation.

The end-user assumes the responsibility in conjunction with the
process media used.

Gauge failures due to contamination or wear and tear, as well as
expendable parts (e.g. ionization chamber, ignition aid, Pirani
filament (MPG50x)), are not covered by the warranty.

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2 Technical Data

Measurement range (air, N2)

MAG
MPG

Accuracy MAG (N

-8

… 1×10-2 mbar 30% of reading

1×10

Accuracy MPG (N

-8

… 100 mbar

1×10

)

2

)

2

100 … 1000 mbar

Repeatability (N

MAG, 1×10
MPG, 1×10

)

2

-8

… 1×10-2 mbar

-8

… 100 mbar

Gas type dependence

MAG
MPG

Voltage range (analog output) 0 … +10.5 V
Measurement range

3MAx-xxx-0x0N
3MAx-xxx-0x0Q
3MBx-xxx-0x0P

Voltage vs. pressure

3MAx-xxx-0x0N
3MAx-xxx-0x0Q
3MBx-xxx-0x0P

Status signal 14.5 … 30 V (ignited)
Error signal

3MAx-xxx-0x0N
3MAx-xxx-0x0Q
3MBx-xxx-0x0P

Output impedance

Load impedance

Step response time

-6

p > 10

mbar

-8

mbar

p = 10

1×10
1×10

30% of reading
50% of reading

5% of reading
5% of reading

→  18
→  20

+1.5 … +8.5 V (dc)
+0.667 … +10 V (dc)
+1.398 … +8.6 V (dc)

1 V/decade, logarithmic

1.33 V/decade, logarithmic

0.6 V/decade, logarithmic

<+0.5 V
≤+0.3 V
+9.5 … +10.5 V

2 × 4.7 Ω, short-circuit proof

≥10 kΩ, short-circuit proof
pressure dependent

<100 ms

≈1 s

-9

… 1×10-2 mbar

-9

… 1000 mbar

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Gauge identification

3MAx-xxx-0x0N
3MAx-xxx-0x0Q

3MBx-xxx-0x0P

–
100 kΩ referenced to supply
common
85 kΩ referenced to supply
common

Status signal (digital output)

Current rating 100 mA
High voltage is ON +14.5 … +30 V (dc)

(depending on supply voltage)

High voltage is OFF 0 V (dc)

High voltage cut-in, low active, Pin 7 (digital input)

High voltage ON
High voltage OFF

<2.5 V (dc)
>4.0 V (dc)

High voltage cut-in, high active, Pin 8 (digital input)

High voltage ON
High voltage OFF

Supply

>11.0 V (dc)
< 5.0 V (dc)

DANGER

The gauge may only be connected to power sup­plies, instruments, or control devices that conform
to the requirements of a grounded protective extra­low voltage (SELV) and limited power source
(LPS), Class 2. The connection to the gauge has to
be fused.

Supply voltage

at the gauge
Ripple ≤1 V

1)

2)

+14.5 … +30 V (dc)

pp

Power consumption ≤2 W

1)

INFICON controllers fulfill this requirement.

2)

The minimum voltage of the power supply unit must be increased

proportionally to the length of the sensor cable.

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Fuse to be connected 1) ≤1 AT

High voltage in the measuring chamber

Ignition voltage
Operating voltage

≤4.5 kV
≤3.3 kV

Current in the measuring chamber

High current
Low current

Electrical connection

3Mxx-xxx-000x
3Mxx-xxx-010x

Sensor cable

FCC connector
D-Sub connector

Cable length (FCC only) ≤50 m

Grounding concept

Vacuum connection – signal
common

Supply common – signal
common

≤500 µA
≤100 µA

FCC 68, 8-pin
D-Sub, 9-pin

8-pin, shielded
9-pin, shielded

→ "Power Connection"

connected via 10 kΩ
(potential difference ≤16 V)

conducted separately;
differential measurement is
recommended

(0.14 mm2/conductor)

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Materials exposed to vacuum

Vacuum connection
Measuring chamber

Pirani filament (
Feedthrough,

MPG50x) W

MAG/MPG500

Isolation
Ring
Anode, Pin

Feedthrough,

MAG/MPG504 ceramic coated

Ionization chamber

3MAx-0xx-0x0x

stainless steel (1.4435)
stainless steel (1.4435)

glass, ceramic (Al
stainless steel (1.4435)

2O3

)

Ni alloy

stainless steel

(1.4301, 1.4016)

Ignition aid stainless steel (1.4310)

Internal volume

DN 25 ISO-KF
DN 40 ISO-KF
DN 40 CF-F
DN 40 CF-R

Permissible pressure
(absolute)

Bursting pressure (absolute) >13 bar

3

≈19.9 cm
≈20.9 cm
≈25.2 cm
≈25.6 cm

3

3

3

10 bar, limited to inert gases
<55°C

Permissible temperatures

Operation
Pirani filament (MPG)
Bakeout
Storage

Relative humidity for 30 days a
year

-8

1×10

… 1×10-2 mbar

-7

… 1×10-2 mbar

1×10

+5 °C … +55 °C
120 °C

3)

≤150 °C
–40 °C … +70 °C

≤70% (non-condensing)
≤95% (non-condensing)

Mounting orientation any
Use indoors only, altitude up to

6000 m NN

Degree of protection IP 40

3)

Without electronics unit.

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Weight

DN 25 ISO-KF
DN 40 ISO-KF
DN 40 CF-F und CF-R

Dimensions [mm]

15

DN 25 ISO-KF

DN 40 ISO-KF

79 60

FCC 68

8-pin

ST

ADJ

HV-ST

0

2

E

4

C

6

A

DIA

8

CAL

44

DN 40 CF-R

17

<280 g
<320 g
<570 g

D-Sub

9-pin

ADJ

44

0

2

E

4

C

6

A

8

CAL

23

DN 40 CF-F

ST

HV-ST

44

DIA

44

23

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2.1 Measuring Signal vs. Pressure

Measurement range 1.5 … 8.5 V (3MAx-xxx-0x0N)

Pressure p

1E+00

1E–01

1E–02

1E–03

1E–04

1E–05

1E–06

1E–07

1E–08

1E–09

1E–10

valid in the range 1×10

where p pressure

underrange

sensor error

0.0 0.5 1.0 1.5 2.5 3.5 4.5 5.5 6.5 7.5 8.5 9.52.0 3.0 4.0 5.0 6.0 7.0 8.0 9.0 10.0

Measurement signal U [V]

p = 10

(U-c)

⇔

7.5×10
1×10

-9

-7

U = c + log10 p

mbar < p < 1×10-2 mbar

-10

Torr < p < 7.5 ×10-3 Torr

Pa < p < 1 Pa

mbar Pa Torr

c 10.5 8.5 10.625

U measurement signal
c constant (pressure unit dependent)

Pa

mbar

torr

overrange

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Measurement range 0.667 … 10 V (3MAx-xxx-0x0Q)

Pressure p

1E+00

1E–01

1E–02

1E–03

1E–04

underrange

1E–05

1E–06

1E–07

1E–08

sensor error

1E–09

1E–10

0.0 0.5 1.0 1.5 2.5 3.5 4.5 5.5 6.5 7.5 8.5 9.5 10.52.0 3.0 4.0 5.0 6.0 7.0 8.0 9.0 10.0

0.667

p = 10

valid in the range 1×10

Measurement signal U [V]

0.75(U-c)

⇔

-9

mbar < p < 1×10-2 mbar

-10

Torr < p < 7.5 ×10-3 Torr

7.5×10

-7

1×10

Pa < p < 1 Pa

U = c + 1.33 log p

mbar Pa Torr

c 12.66 10 12.826

where p pressure

U measurement signal
c constant (pressure unit dependent)

Pa

mbar

torr

overrange

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Measurement range 1.398 … 8.6 V (3MBx-xxx-0x0P)

Pressure p

1E+04

1E+02

1E+00

Pa

mbar

torr

1E–02

1E–04

1E–06

1E–08

1E–09

underrange

0.0 0.5 2.5 3.5 4.5 5.5

1.217

1.397

Measurement signal U [V]

1.667U-d

p = 10

valid in the range 1×10

7.5×10
1×10

6.5

⇔

-9

mbar < p < 1000 mbar

-10

-7

Pa < p < 1×105 Pa

U = c + 0.6 log p

Torr < p < 750 Torr

overrange

sensor error

7.5 8.5 9.5 10.5

8.6

mbar Pa Torr

c 6.798 5.598 6.873
d 11.33 9.333 11.46

where p pressure

U measurement signal
c, d constant (pressure unit dependent)

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2.2 Gas Type Dependence MAG50x

Indicated pressure (gauge calibrated for air)

p [mbar]

4

2

–3

10

8
6

4

2

–4

10

8
6

4

2

–5

10

8
6

4

2

–6

10

8
6

4

2

–7

10

–7

10

246

10

–6

246

10

p

–5

246

[mbar]

eff

Xe Kr

10

Indication range below 10-5 mbar

In the range below 10-5 the pressure indication is linear. For
gases other than air, the pressure can be determined by means
of a simple conversion formula:

= K × indicated pressure

p

eff

–4

246

CO

Ar

10

Air
O

N2H2Ne He

–3

2

246

–2

10

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