INFICON Cygnus Thin Film Deposition Controller User Manual
OPERATING MANUAL
®
Cygnus
Thin Film Deposition Monitor
IPN 074-379-P1K
OPERATING MANUAL
®
Cygnus
Thin Film Deposition Monitor
IPN 074-379-P1K
www.inficon.com reachus@inficon.com
Due to our continuing program of product improvements, specifications are subject to change without notice.
©2004 INFICON
Trademarks
The trademarks of the products mentioned in this Operating Manual are held by the companies that
produce them.
INFICON® and Cygnus® are trademarks of INFICON Inc.
Windows®, Windows 95® and Microsoft® are registered trademarks of Microsoft Corporation.
CAJON® is a registered trademark of Swagelok, Co.
All other brand and product names are trademarks or registered trademarks of their respective companies.
The information contained in this Operating Manual is believed to be accurate and reliable. However, INFICON
assumes no responsibility for its use and shall not be liable for any special, incidental, or consequential
damages related to the use of this product.
Due to our continuing program of product improvements, specifications are subject to change without notice.
©2004 All rights reserved.
Reproduction or adaptation of any part of this document without permission is unlawful.
DECLARATION
OF
CONFORMITY
This is to certify that this equipment, designed and manufactured by:
INFICON Inc.
Two Technology Place
East Syracuse, NY 13057
USA
meets the essential safety requirements of the European Union and is placed on the
market accordingly. It has been constructed in accordance with good engineering
practice in safety matters in force in the Community and does not endanger the safety
of persons, domestic animals or property when properly installed and maintained and
used in applications for which it was made.
Equipment Description: Cygnus Thin Film Deposition Controllers, including
Oscillators and Crystal Sensors as properly installed.
Applicable Directives: 73/23/EEC as amended by 93/68/EEC
89/336/EEC as amended by 93/68/EEC
Applicable Standards: EN 61010-1:2001
EN 61326:1997 (Industrial Use)
EN 61000-3-2:1995/A14:2000
EN 61000-3-3:1995
CE Implementation Date: August 22, 2003
Authorized Representative: Gary W. Lewis
Vice President - Quality Assurance
INFICON Inc.
ANY QUESTIONS RELATIVE TO THIS DECLARATION OR TO THE SAFETY OF LEYBOLD INFICON'S PRODUCTS SHOULD BE
DIRECTED, IN WRITING, TO THE QUALITY ASSURANCE DEPARTMENT AT THE ABOVE ADDRESS.
01-22-04
Warranty
WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products
manufactured by it, or by an affiliated company and sold by it, and described on
the reverse hereof, to be, for the period of warranty coverage specified below, free
from defects of materials or workmanship under normal proper use and service.
The period of warranty coverage is specified for the respective products in the
respective Seller instruction manuals for those products but shall not be less than
two (2) years from the date of shipment thereof by Seller. Seller's liability under
this warranty is limited to such of the above products or parts thereof as are
returned, transportation prepaid, to Seller's plant, not later than thirty (30) days
after the expiration of the period of warranty coverage in respect thereof and are
found by Seller's examination to have failed to function properly because of
defective workmanship or materials and not because of improper installation or
misuse and is limited to, at Seller's election, either (a) repairing and returning the
product or part thereof, or (b) furnishing a replacement product or part thereof,
transportation prepaid by Seller in either case. In the event Buyer discovers or
learns that a product does not conform to warranty, Buyer shall immediately notify
Seller in writing of such non-conformity, specifying in reasonable detail the nature
of such non-conformity. If Seller is not provided with such written notification,
Seller shall not be liable for any further damages which could have been avoided if
Seller had been provided with immediate written notification.
THIS WARRANTY IS MADE AND ACCEPTED IN LIEU OF ALL OTHER
WARRANTIES, EXPRESS OR IMPLIED, WHETHER OF MERCHANTABILITY OR
OF FITNESS FOR A PARTICULAR PURPOSE OR OTHERWISE, AS BUYER'S
EXCLUSIVE REMEDY FOR ANY DEFECTS IN THE PRODUCTS TO BE SOLD
HEREUNDER. All other obligations and liabilities of Seller, whether in contract or
tort (including negligence) or otherwise, are expressly EXCLUDED. In no event
shall Seller be liable for any costs, expenses or damages, whether direct or
indirect, special, incidental, consequential, or other, on any claim of any defective
product, in excess of the price paid by Buyer for the product plus return
transportation charges prepaid.
No warranty is made by Seller of any Seller product which has been installed,
used or operated contrary to Seller's written instruction manual or which has been
subjected to misuse, negligence or accident or has been repaired or altered by
anyone other than Seller or which has been used in a manner or for a purpose for
which the Seller product was not designed nor against any defects due to plans or
instructions supplied to Seller by or for Buyer.
This manual is intended for private use by INFICON® Inc. and its customers.
Contact INFICON before reproducing its contents.
NOTE: These instructions do not provide for every contingency that may arise in
connection with the installation, operation or maintenance of this equipment.
Should you require further assistance, please contact INFICON.
www.inficon.com reachus@inficon.com
Cygnus Operating Manual
Table Of Contents
Chapter 1
Introduction and Specifications
1.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
1.1.1 Related Manuals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-1
1.2 Instrument Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2
1.2.1 Definition of Notes, Cautions and Warnings. . . . . . . . . . . . . . . . . . . . . . . . . 1-2
1.2.2 General Safety Information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3
1.2.3 Earth Ground . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-4
1.2.4 Main Power Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
1.3 How To Contact Customer Support . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6
1.3.1 Returning Your Cygnus to INFICON . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
1.4 Cygnus Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-7
1.4.1 Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-7
1.4.2 Screens and Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
1.4.2.1 Instrument Set Up Parameters. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-8
1.4.2.2 Set Up Parameters for Each Source . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-8
1.4.3 User Interface. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-11
1.4.4 Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-12
1.4.5 Source / Recorder Outputs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-13
1.4.6 Logic Processing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-14
1.4.7 Relays / Inputs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14
1.4.8 Remote Communications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-15
1.4.9 Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-15
1.4.10 Power . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-15
1.4.11 Operating Environment. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-16
IPN 074-379-P1K
1.4.12 Storage Temperature . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-16
1.4.13 Warm Up Period . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-16
1.4.14 Size. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-16
1.4.15 Connector Clearance Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-16
1.4.16 Weight . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-16
1.4.17 Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-16
1.5 Unpacking and Inspection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-17
1.6 Parts and Options Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-17
1.6.1 Base Configurations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-17
1.6.2 Pre-Installed Options or Spares . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-18
1.6.3 Oscillator Packages, Optional Accessories, and Sensors . . . . . . . . . . . . . 1-18
1.7 Initial Power-On Verification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-20
TOC - 1
Cygnus Operating Manual
Chapter 2
Operation
2.1 Front Panel Controls . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
2.2 Rear Panel Interfaces. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
2.3 Displays . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
2.3.1 ALL CHANNELS Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5
2.3.1.1 GENERAL PARAMETERS Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8
2.3.1.2 General MAINTENANCE Display. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9
2.3.1.2.1 All Channels Sensor MAINTENANCE Display. . . . . . . . . . . . . . . . . . . . . . 2-11
2.3.1.3 CHANNEL Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-12
2.3.1.3.1 Channel Parameters Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-16
2.3.1.3.1.1 HARDWARE PROCESS Display. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-17
2.3.1.3.2 Channel SENSOR MAINTENANCE Display . . . . . . . . . . . . . . . . . . . . . . . 2-17
2.3.1.3.2.1 Channel SOURCE MAINTENANCE Display . . . . . . . . . . . . . . . . . . . . . . . 2-20
2.4 Crystal Life, Starting Frequency and Activity . . . . . . . . . . . . . . . . . . . . . . . 2-21
2.5 Defining a Process . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-22
2.5.1 Executing a Process. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-22
2.6 State Descriptions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-23
2.7 Special Features . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-24
2.7.1 Crystal Switching . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-24
2.7.2 Rotary Sensor Crystal Switching . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-25
2.7.3 Source/Crucible Selection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-26
2.7.3.1 Example: Programming Turret Source Crucible Selection. . . . . . . . . . . . . 2-26
2.7.4 Hand-Held Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-28
2.7.5 Test Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-29
2.7.6 Floppy Disk (Optional) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-29
2.7.7 Lock Codes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-30
2.7.8 Datalog. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-30
2.7.9 Auto Soak 2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-32
IPN 074-379-P1K
Chapter 3
TOC - 2
Channel Parameters
3.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
3.2 Channel Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2
3.2.1 Channel Parameter Definitions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2
3.3 Channel Hardware Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12
3.3.1 Channel Hardware Parameters Definition . . . . . . . . . . . . . . . . . . . . . . . . . 3-12
Cygnus Operating Manual
Chapter 4
General Parameters
4.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.2 General Parameter Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
4.3 General Parameters Definition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-3
4.4 Logic Directory Set Up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-5
4.4.1 Logic Statement Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-5
4.4.2 Editing Logic Statements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6
4.4.2.1 Logic Statement Directory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-7
4.4.2.2 Logic Statements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-7
4.4.2.3 Logic Statement Event Editing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8
4.4.2.3.1 Event Definitions (IF) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-10
4.4.2.4 Logic Statement Action Editing. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-13
4.4.2.4.1 Action Definitions (THEN). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-14
4.5 Counters Timers. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-16
4.6 I/O Map. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-17
4.7 Floppy Disk. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-19
Chapter 5
Remote Communications
5.1 Remote Communications Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
5.2 Physical Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-1
5.2.1 RS232C Serial Port . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-1
5.2.2 IEEE488 Port . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-3
5.3 Message Protocols. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4
5.3.1 INFICON Cygnus Message Formats . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-4
5.3.2 Basic Protocol. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-4
5.3.2.1 Command Packet (Host to Instrument Message). . . . . . . . . . . . . . . . . . . . .5-4
IPN 074-379-P1K
5.3.2.2 Response Packet (Instrument to Host Message). . . . . . . . . . . . . . . . . . . . . 5-6
5.4 Cygnus Communication Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-7
5.4.1 ECHO Command . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-7
5.4.2 HELLO Command . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-8
5.4.3 Parameter Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-9
5.4.3.1 All Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-9
5.4.3.1.1 Query All Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-9
5.4.3.1.2 Update All Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-10
5.4.3.2 Channel Parameters. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-10
5.4.3.2.1 Query Channel Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-10
5.4.3.2.2 Update Channel Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-11
TOC - 3
Cygnus Operating Manual
5.4.3.3 General Parameters. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-16
5.4.3.3.1 Query General Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-16
5.4.3.3.2 Update General Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-16
5.4.3.4 Input Name Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-18
5.4.3.4.1 Query Input Name . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-18
5.4.3.4.2 Update Input Names . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-18
5.4.3.5 Logic Statements Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-19
5.4.3.5.1 Query Logic Statements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-19
5.4.3.5.2 Update Logic Statements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-19
5.4.3.6 Output Name Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-23
5.4.3.6.1 Query Output Names . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-23
5.4.3.6.2 Update Output Names . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-23
5.4.3.7 Type of Output Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-24
5.4.3.7.1 Query Output Type. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-24
5.4.3.7.2 Update Output Type. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-24
5.4.4 STATUS Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-24
5.4.4.1 Status Channel Command . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-25
5.4.4.2 Status General Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-30
5.4.5 REMOTE Commands. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-32
5.4.5.1 Remote Channel Action Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-33
5.4.5.2 Remote General Action Commands. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-35
5.4.6 Negative Response Error Codes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-37
5.5 Sample Cygnus Commands. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-37
5.5.1 Remote Communications Example — Updating a
Channel’s Rate Parameter. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-37
Chapter 6
Installation and Interfaces
6.1 Location Guidelines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1
6.1.1 Sensor Types . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1
6.1.2 Sensor Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-3
6.1.3 Control Unit Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5
6.2 Avoiding Electrical Interference . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5
6.2.1 Verifying/Establishing Earth Ground . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5
6.2.2 Connections to Earth Ground. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-6
6.2.3 Minimizing Noise Pickup From External Cabling . . . . . . . . . . . . . . . . . . . . . 6-7
6.3 Connecting the Controller. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-8
6.3.1 Verifying the Correct Input Voltage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-8
6.3.2 Voltage Selection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-9
IPN 074-379-P1K
TOC - 4
Cygnus Operating Manual
6.3.3 Routing XIU Cables . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-10
6.3.4 Interface Cable Fabrication and Pin-Out . . . . . . . . . . . . . . . . . . . . . . . . . .6-10
6.3.4.1 Source Control Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-10
6.3.4.2 Input/Relay Module Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-11
6.3.4.3 RS-232C Communications. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-13
6.3.4.4 Isolated +24 V(dc) Supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-14
6.3.4.5 Optional DAC Card. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-15
Chapter 7
Calibration Procedures
7.1 Importance of Density, Tooling and Z-Ratio. . . . . . . . . . . . . . . . . . . . . . . . . 7-1
7.2 Determining Density . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-1
7.3 Determining Tooling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-2
7.4 Laboratory Determination of Z-Ratio . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-3
7.5 Determining Cross Sensitivity Correction For Co-Deposition. . . . . . . . . . . .7-4
7.5.1 Procedure Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-5
7.5.2 Procedure Assumptions and Requirements. . . . . . . . . . . . . . . . . . . . . . . . . 7-5
7.5.3 Detailed Procedure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-6
Chapter 8
Troubleshooting, Status and Error Messages
8.1 Status and Error Messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-1
8.2 Troubleshooting Guide . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-8
8.2.1 Major Instrument Components and Assemblies. . . . . . . . . . . . . . . . . . . . . . 8-9
8.2.2 Troubleshooting the Instrument . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-10
8.2.3 Troubleshooting Transducers/Sensors. . . . . . . . . . . . . . . . . . . . . . . . . . . .8-13
8.2.4 Troubleshooting Computer Communications . . . . . . . . . . . . . . . . . . . . . . .8-18
8.3 Replacing the Crystal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-20
8.3.1 Standard and Compact. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-20
8.3.2 Shuttered and Dual Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-21
IPN 074-379-P1K
8.3.3 Bakeable Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-22
8.3.4 Sputtering Sensor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-23
8.3.5 Crystal Snatcher. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-24
8.3.6 CrystalSix . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-24
8.3.7 Crystal12 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-24
8.4 Crystal Sensor Emulator IPN 760-601-G1 or 760-601-G2. . . . . . . . . . . . . 8-25
8.4.1 Diagnostic Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-26
8.4.1.1 Measurement System Diagnostic Procedure . . . . . . . . . . . . . . . . . . . . . . .8-26
8.4.1.2 Feed-Through Or In-Vacuum Cable Diagnostic Procedure . . . . . . . . . . . .8-27
8.4.1.3 Sensor Head Or Monitor Crystal Diagnostic Procedure. . . . . . . . . . . . . . . 8-28
8.4.1.4 System Diagnostics Pass But Crystal Fail Message Remains. . . . . . . . . . 8-29
TOC - 5
Cygnus Operating Manual
8.4.2 % XTAL Life . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-29
8.4.3 Sensor Cover Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-30
8.4.3.1 Compatible Sensor Heads . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-30
8.4.3.2 Incompatible Sensor Heads . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-30
8.4.4 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-31
Chapter 9
Measurement and Control Theory
9.1 Basics. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-1
9.1.1 Monitor Crystals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-2
9.1.2 Period Measurement Technique . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-4
9.1.3 Z-Match Technique . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-5
9.1.4 Active Oscillator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-6
9.1.5 ModeLock Oscillator. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-7
9.1.6 Auto Z-Match Theory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-9
9.1.7 Control Loop Theory. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-11
Appendix A
Index
Material Table
IPN 074-379-P1K
TOC - 6
1.1 Introduction
Cygnus is a closed loop process controller designed for use primarily in physical
vapor deposition. The unit monitors and/or controls the rate and thickness of the
deposition of thin films. Deposition rate and thickness are inferred from the
frequency change induced by mass added to a quartz crystal. This technique
positions sensors in the path between or to the side of the source of the vaporized
material and the target substrate. The sensor incorporates an exposed oscillating
quartz crystal whose frequency decreases as material accumulates. The change
in frequency provides information to determine rate and thickness and to
continually control the evaporation power source. With user supplied time,
thickness and power limits and with desired rates and material characteristics, the
unit is capable of automatically controlling the process in a precise and repeatable
manner. User interaction is accomplished via the unit's front panel and consists of
selection or entry of parameters to define the process.
Cygnus Operating Manual
Chapter 1
Introduction and Specifications
The complete system consists of a main electronics unit, the Cygnus, sensor
heads and a crystal interface unit (XIU) for each attached sensor. These items are
generally bundled at the factory and are also sold separately.
The Cygnus Manual provides user information for installing, programming,
calibrating and operating the main electronics unit.
When reading the Cygnus Manual, please pay particular attention to the NOTES,
CAUTIONS, and WARNINGS found throughout the text. The Notes, Cautions, and
Warnings are defined in section 1.2.1 on page 1-2.
You are invited to comment on the usefulness and accuracy of this manual by filling
out the registration card and returning it.
IPN 074-379-P1K
1.1.1 Related Manuals
Sensors are covered in separate manuals.
074-154 - Bakeable
074-155 - CrystalSix
074-156 - Single/Dual
074-157 - Sputtering
074-398 - Crystal12
1 - 1
Cygnus Operating Manual
CAUTION
WARNING
WARNING - Risk Of Electric Shock
1.2 Instrument Safety
1.2.1 Definition of Notes, Cautions and Warnings
When using this manual, please pay attention to the NOTES, CAUTIONS and
WARNINGS found throughout. For the purposes of this manual they are defined as
follows:
NOTE: Pertinent information that is useful in achieving maximum instrument
efficiency when followed.
Failure to heed these messages could result in damage
to the instrument.
Failure to heed these messages could result in personal
injury.
Dangerous voltages are present which could result in
personal injury.
IPN 074-379-P1K
1 - 2
1.2.2 General Safety Information
WARNING - Risk Of Electric Shock
CAUTION
Do not open the instrument case! There are no
user-serviceable components within the instrument
case.
Dangerous voltages may be present whenever the power
cord or external input/relay connectors are present.
Refer all maintenance to qualified personnel.
This instrument contains delicate circuitry which is
susceptible to transient power line voltages. Disconnect
the line cord whenever making any interface
connections. Refer all maintenance to qualified
personnel.
Cygnus Operating Manual
IPN 074-379-P1K
1 - 3
Cygnus Operating Manual
WARNING - Risk Of Electric Shock
1.2.3 Earth Ground
Cygnus is connected to earth ground through a sealed three-core
(three-conductor) power cable, which must be plugged into a socket outlet with a
protective earth terminal. Extension cables must always have three conductors
including a protective earth terminal.
Never interrupt the protective earth circuit.
Any interruption of the protective earth circuit inside or
outside the instrument, or disconnection of the
protective earth terminal is likely to make the instrument
dangerous.
This symbol indicates where the protective earth ground
is connected inside the instrument. Never unscrew or
loosen this connection.
IPN 074-379-P1K
1 - 4
1.2.4 Main Power Connection
WARNING - Risk Of Electric Shock
This instrument has line voltage present on the primary
circuits whenever it is plugged into a main power source.
Never remove the covers from the instrument during
normal operation.
There are no operator-serviceable items within this
instrument.
Removal of the top or bottom covers must be done only
by a technically qualified person.
In order to comply with accepted safety standards, this
instrument must be installed into a rack system which
contains a mains switch. This switch must break both
sides of the line when it is open and it must not
disconnect the safety ground.
Cygnus Operating Manual
IPN 074-379-P1K
1 - 5
Cygnus Operating Manual
1.3 How To Contact Customer Support
Worldwide support information regarding:
Technical Support, to contact an applications engineer with questions
regarding INFICON products and applications, or
Sales and Customer Service, to contact the INFICON Sales office nearest you,
or
Repair Service, to contact the INFICON Service Center nearest you,
is available at www.inficon.com.
If you are experiencing a problem with your instrument, please have the following
information readily available:
the serial number for your instrument,
a description of your problem,
an explanation of any corrective action that you may have already attempted,
and the exact wording of any error messages that you may have received.
To contact Customer Support, see Support at www.inficon.com.
1.3.1 Returning Your Cygnus to INFICON
Do not return any component of your Cygnus to INFICON without first speaking
with a Customer Support Representative. You must obtain a Return Material
Authorization (RMA) number from the Customer Support Representative.
If you deliver a package to INFICON without an RMA number, your package will be
held and you will be contacted. This will result in delays in servicing your
instrument.
Prior to being given an RMA number, you may be required to complete a
Declaration Of Contamination (DOC) form if your instrument has been exposed to
process materials. DOC forms must be approved by INFICON before an RMA
number is issued. INFICON may require that the instrument be sent to a
designated decontamination facility, not to the factory. Failure to follow these
procedures will delay the repair of your instrument.
IPN 074-379-P1K
1 - 6
1.4 Cygnus Specifications
1.4.1 Measurement
Crystal Frequency . . . . . . . . . . . . . . 6.0 MHz (new crystal) to 4.5 MHz
Internal Precision . . . . . . . . . . . . . . . ± 0.004657 Hz over 100 ms sample for
Thickness & Rate Resolution . . . . . . 0.00577 Å (new crystal);
Thickness Accuracy . . . . . . . . . . . . . 0.5% typical, (dependent on process
Frequency Accuracy. . . . . . . . . . . . . ± 2 ppm 0-50 °C
Measurement Frequency . . . . . . . . . 10 Hz
Measurement Technique . . . . . . . . . ModeLock
Cygnus Operating Manual
fundamental and anharmonic frequencies
0.01016 Å (crystal @ 4.5 MHz) over
100 ms sample for material density = 1.0,
Z-ratio = 1.0
conditions, especially sensor location,
material stress, temperature and density)
User Interface. . . . . . . . . . . . . . . . . . CRT and limited membrane keypad. All
parameters accessible through computer
communications. Multiple message areas for
indication of states and detailed indication of
abnormal and stop conditions.
1.4.2 Screens and Parameters
Navigation . . . . . . . . . . . . . . . . . . . . Six soft keys
Structure. . . . . . . . . . . . . . . . . . . . . . Separate screens dedicated to
1) All Channel Data Display, 2) Individual
Channel Data, 3) Channel Parameters,
4) Channel Hardware Parameters,
IPN 074-379-P1K
# of Source / Sensor Channels . . . . 6, Sources can be started or stopped
5) General Parameters, 6) Logic,
7) Maintenance, 8) Communications.
individually or in any combination.
1 - 7
Cygnus Operating Manual
1.4.2.1 Instrument Set Up Parameters
Test On. . . . . . . . . . . . . . . . . . . . . . . Yes / No
Time Compressed . . . . . . . . . . . . . . Yes / No
Audio Feedback . . . . . . . . . . . . . . . . Yes / No
RS232 Baud Rate . . . . . . . . . . . . . . 2400, 4800, 9600, 19200
IEEE Address. . . . . . . . . . . . . . . . . . 1-30
Data Logging Path . . . . . . . . . . . . . . 0 = No Data Logging
Data Log XTAL History. . . . . . . . . . . Yes / No
Print Screen Path . . . . . . . . . . . . . . . 2 = Floppy Disk
Print Screen Number . . . . . . . . . . . . 0 to 999
DAC Output Option . . . . . . . . . . . . . 0 = Power/Rate for 6 channels
2 = File, Page Format
3 = File, Comma Format
1 = Power/Thickness for 6 channels
2 = Power/Rate/Thickness for 4 channels
3 = Rate/Thickness for 6 channels
Thickness Equation 1. . . . . . . . . . . . Up to 6 channel numbers can be specified,
Thickness Equation 2. . . . . . . . . . . . Up to 6 channel numbers can be specified,
Thickness Equation 3. . . . . . . . . . . . Up to 6 channel numbers can be specified,
1.4.2.2 Set Up Parameters for Each Source
Source States . . . . . . . . . . . . . . . . . . Film template defines state sequence.
Power Ramps. . . . . . . . . . . . . . . . . . 2 per Source
Power Level . . . . . . . . . . . . . . . . 0.00 to 99.99%
Rise Time . . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:sec
Soak Time . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:sec
each channel number can be used only
once.
each channel number can be used only
once.
each channel number can be used only
once.
IPN 074-379-P1K
Flexible sequencing is a done by skipping
states or vectoring to a different state.
1 - 8
Rate Filter Time . . . . . . . . . . . . . . . . 0.1, 0.4, 1.0, 4.0, 10.0, 20.0, or 30.0 sec
Cygnus Operating Manual
Rate & Thickness Control with
Shutter open . . . . . . . . . . . . . . . . . 0.001 to 999.9 Å/sec
Rate Control with Shutter closed . . . 0.001 to 999.9 Å/sec
Idle Ramp . . . . . . . . . . . . . . . . . . . . . 1 per Source
Idle Power. . . . . . . . . . . . . . . . . . 0.00 to 99.99%
Idle Ramp Time . . . . . . . . . . . . . 00:00 to 99:59 min:sec
Deposit After Pre-Deposit. . . . . . . . . Yes / No
Yes = go to Deposit
No = go to Non-Deposit Rate Control
Density . . . . . . . . . . . . . . . . . . . . . . . 0.100 to 99.999 gm/cc
Z-ratio . . . . . . . . . . . . . . . . . . . . . . . . 0.100 to 15.000
Control Loop types . . . . . . . . . . . . . . 0 / 1 / 2
Non-PID, PI, PID
PID Control Mode. . . . . . . . . . . . . . . Fast or Slow Source
Process Gain . . . . . . . . . . . . . . . 0.01 to 999.99 Å/sec/%Power
Primary Time Constant . . . . . . . . 0.010 to 9999.99 seconds
System Dead Time. . . . . . . . . . . 0.010 to 9999.99 seconds
Tooling Factor. . . . . . . . . . . . . . . . . . 1.0 to 999.9%
Secondary Tooling . . . . . . . . . . . . . . 1.0 to 999.9%
Sensors . . . . . . . . . . . . . . . . . . . . . . 2 standard, 4 additional w/optional hardware
Sensor Type . . . . . . . . . . . . . . . . . . . 1 / 2 / 6 / 7 / 12
(Single, CrystalTwo, CrystalSix, Rotary,
Crystal12)
CrystalSix Position Select. . . . . . Indexes to next good crystal
IPN 074-379-P1K
Sensor Switch Output. . . . . . . . . . . . 0 to 38
Sensor Shutter Output . . . . . . . . . . . 0 to 38
Sensor Shutter Output Type. . . . . . . 0 / 1
Normally Open, Normally Closed
Maximum Source Power . . . . . . . . . 0.01 to 99.99%
Minimum Source Power . . . . . . . . . . 0.00 to 99.98%
Maximum Power Option . . . . . . . . . . Stop / Idle Ramp / Continue — can be
selected for each source individually.
Averaging Time . . . . . . . . . . . . . . . . 0 to 30 minutes
Final Thickness . . . . . . . . . . . . . . . . 0.000 to 999.9 kÅ
1 - 9
Cygnus Operating Manual
ON Final Thickness . . . . . . . . . . . . . 0 / 1 / 2
0 = Go to Non-Deposit Control
1 = Go to Idle Ramp
2 = Continue
Cross Talk Percent . . . . . . . . . . . . . . 0.00 to 99.99%, Correction for 2 sensors,
multiple instances of 2 sensor correction is
allowed (maximum of 3 instances of 2 sensor
correction).
Crucible Selection . . . . . . . . . . . . . . Turret is indexed to selected position on a
start. Turret feedback is checked whenever a
source is started. Range is from 1 to number
of crucibles.
Number of Crucibles. . . . . . . . . . 1, 4, 8, 16, 32 or 64
Crucible Output . . . . . . . . . . . . . 0 to 37
Crucible Output Type . . . . . . . . . 0 / 1
0 = Normally Open, 1 = Normally Closed.
Turret Feedback. . . . . . . . . . . . . Yes / No
Turret Input. . . . . . . . . . . . . . . . . 0 to 28
Turret Delay . . . . . . . . . . . . . . . . 1 to 60 secs.
RateWatcher® . . . . . . . . . . . . . . . . . Sample and Hold Feature
RateWatcher Option. . . . . . . . . . 0 = None, 1 = Non-deposit,
2 = Non-deposit and Deposit
RateWatcher Time . . . . . . . . . . . 00:01 to 99:59 min:sec
RateWatcher . . . . . . . . . . . . . . . Accuracy 1 to 99%
Source Voltage Range . . . . . . . . . . . 0 to 10 V, 0 to 5 V, 0 to 2.5 V, 0 to -10 V,
0 to -5 V, 0 to -2.5 V
DAC Rate Range . . . . . . . . . . . . . . . 0 = 10 Å/sec, 1 = 50 Å/sec, 2 = 100 Å/sec,
3 = 1000 Å/sec, 4 = 1 Å/sec
DAC Thickness Range. . . . . . . . . . . 0 = 100 Å, 1 = 1000 Å, 2 = 2000 Å,
3 = 3000 Å, 4 = 5000 Å
Substrate Shutter Output . . . . . . . . . 0 to 38
Substrate Shutter Output Type. . . . . 0 / 1
0 = Normally Open, 1 = Normally Closed
IPN 074-379-P1K
1 - 10
Crystal Fail Option . . . . . . . . . . . . . . 0 / 1 / 2
Crystal Quality . . . . . . . . . . . . . . . . . 0 to 9
Crystal Stability . . . . . . . . . . . . . . . . . 0 to 9
Auto-Z. . . . . . . . . . . . . . . . . . . . . . . . Yes / No
1.4.3 User Interface
Front Panel / CRT. . . . . . . . . . . . . . . Parameters can be programmed through
Remote Communications . . . . . . . . . Parameters can be programmed through
Cygnus Operating Manual
0 = Time Power,
1 = Idle Ramp
2 = Stop
Can be selected for each source individually.
Cygnus front panel. There is a display for
each source with graphical and text / number
information. There is also a display showing
text and number information for all sources.
computer communications. Complete control
of source state sequencing available by
remote communications.
I/O. . . . . . . . . . . . . . . . . . . . . . . . . . . Control of state sequencing, starting /
stopping each source, is available using
Inputs and Outputs.
PC Applications Software. . . . . . . . . Optional, Compatible with RS232
communications or National Instruments
PCI-GPIB Controller and NI-488.2 protocol.
Operating System. . . . . . . . . . . . Windows 2000
Function . . . . . . . . . . . . . . . . . . . Complete Cygnus programming, Monitoring
of sources.
IPN 074-379-P1K
1 - 11
1.4.4 Display
Type / Color / Size . . . . . . . . . . . . . . CRT / Amber /
Format . . . . . . . . . . . . . . . . . . . . . . . 23 kHz Horizontal Scan Rate
Resolution . . . . . . . . . . . . . . . . . . . . 750 W x 350 H Monochrome
Vertical Scan Rate . . . . . . . . . . . . . . 50/60 Hz automatically detected
Thickness Display Range. . . . . . . . . 0.000 to 999.9 kÅ
Thickness Display Resolution . . . . . 1 Å
Rate Display Range . . . . . . . . . . . . . 0.000 to 9999 Å/sec
Rate Display Resolution. . . . . . . . . . 0.001 Å/sec for 0 to 9.999 Å/sec
Power Display Range. . . . . . . . . . . . 0.00 to 99.99%
Cygnus Operating Manual
5" H x 9" W (127 mm x 228.6 mm)
0.01 Å/sec for 10.00 to 99.99 Å/sec
0.1 Å/sec for 100.0 to 999.9 Å/sec
1 Å/sec for 1000 to 9999 Å/sec
Graphic Display Functions . . . . . . . . Rate Deviation at ±10 or ±20 Å/sec or Power
at 0 to 100%
Graphic Scan Rate. . . . . . . . . . . . . . 0 = Auto, 1 = Slow, 2 = Med, 3 = Fast
Display Data Update Rate . . . . . . . . 1 Hz
IPN 074-379-P1K
1 - 12
1.4.5 Source / Recorder Outputs
Quantity . . . . . . . . . . . . . . . . . . . . . . 6 standard, an additional 6 are optional with
Type . . . . . . . . . . . . . . . . . . . . . . . . . 6 standard with BNC Connectors for Source
Source control voltage range
(BNC connectors). . . . . . . . . . . . 0 to 10V, 0 to 5V, 0 to 2.5V,
Recorder Voltage Range . . . . . . . . . 0 to 10V
Current rating . . . . . . . . . . . . . . . . . . 20 mA per channel
Resolution . . . . . . . . . . . . . . . . . . . . 15 bits over full range (10 V)
Update Rate . . . . . . . . . . . . . . . . . . . 10 Hz, maximum, (dependent on source
Cygnus Operating Manual
2nd DAC board.
control. 6 optional with 15 pin miniature
D-sub providing analog outputs for Rate and
Thickness.
0 to -10V, 0 to -5V, 0 to -2.5V.
characteristics).
Accuracy. . . . . . . . . . . . . . . . . . . . . . ± 3% full scale
Zero Adjust . . . . . . . . . . . . . . . . . . . . Individual potentiometer
IPN 074-379-P1K
1 - 13
Cygnus Operating Manual
1.4.6 Logic Processing
Type . . . . . . . . . . . . . . . . . . . . . . . . . If/Then statements
Logical Functions . . . . . . . . . . . . . . . And; Or; Not; Parentheses
Depth . . . . . . . . . . . . . . . . . . . . . . . . 5 "If" conditions and 5 "Then" results/actions
# of Statements . . . . . . . . . . . . . . . . 100 If/Then
Selectable events. . . . . . . . . . . . . . . Deposition monitor events, states, external
Hierarchy . . . . . . . . . . . . . . . . . . . . . Statements evaluated in numerical order at
Partitioning . . . . . . . . . . . . . . . . . . . . None
Initialization . . . . . . . . . . . . . . . . . . . All outputs transition to their normal states as
per statement
inputs, relays, timers, and counters.
10 Hz any time the unit is on.
early as possible during power-on
initialization sequence.
1.4.7 Relays / Inputs
Relays . . . . . . . . . . . . . . . . . . . . . . . SPST 2.5 A relays rated @ 30 V(dc) or
Relay Ratings. . . . . . . . . . . . . . . . . . 100 VA inductive; 2.5A maximum.
# of TTL Compatible Outputs . . . . . . 14 with optional I/O card. Internally pulled up
Inputs (TTL Compatible). . . . . . . . . . (14 standard, 14 additional optional)
Input Levels
maximum high . . . . . . . . . . . . . . 24 V
minimum high. . . . . . . . . . . . . . . 2.5 V
30 V(ac) RMS or 42 V(peak) maximum;
(8 standard, up to 16 optional with 2
additional I/O cards); D sub connector; relays
are normally open in the power off state, but
may be programmed to normally open or
normally closed during operation.
to 5 V(dc). May be pulled up externally to
24 V(dc) through 2.4k resistor.
minimum high level 0.5mA load @3.75 V
maximum low level 10mA load @1.1 V
IPN 074-379-P1K
1 - 14
maximum low . . . . . . . . . . . . . . . 1.1 V
Scan/Update Rate . . . . . . . . . . . . . . 10 Hz
1.4.8 Remote Communications
RS232C Serial Port . . . . . . . . . . . . . Standard
Baud Rates. . . . . . . . . . . . . . . . . . . . 19,200; 9,600; 4,800; 2,400
IEEE488 Parallel Port. . . . . . . . . . . . Optional
IEEE Service Requests . . . . . . . . . . Supported with RQS and MAV status bits
1.4.9 Accessories
Manual Power
Control Connection. . . . . . . . . . . . . . Front panel
Function . . . . . . . . . . . . . . . . . . . . . . Handheld, increase/decrease/stop
Floppy (Optional) . . . . . . . . . . . . . . . 3.5', 1.44 MByte for process and
Connector Kit . . . . . . . . . . . . . . . . . . Connectors for inputs and relays
Operating Manual. . . . . . . . . . . . . . . PDF format on CD
Cygnus Operating Manual
datalog storage
1.4.10 Power
Power . . . . . . . . . . . . . . . . . . . . . . . . 100 +10%, -15% V(ac) 50/60 Hz
120 +10%, -10% V(ac) 50/60 Hz
230 +10%, -10% V(ac) 50/60 Hz
240 +10%, -15% V(ac) 50/60 Hz
Maximum apparent power . . . . . . . . 300 VA
Fuse . . . . . . . . . . . . . . . . . . . . . . . . . 100 V(ac), 120 V(ac) use 4 Amp IEC 127
approved type T
230 V(ac), 240 V(ac) use 2 Amp IEC 127
approved type T
IPN 074-379-P1K
1 - 15
Cygnus Operating Manual
1.4.11 Operating Environment
Usage. . . . . . . . . . . . . . . . . . . . . . . . Indoor only
Temperature. . . . . . . . . . . . . . . . . . . 0 to 50 °C (32-122 °F)
Humidity . . . . . . . . . . . . . . . . . . . . . . Up to 85%RH, non-condensing
Altitude . . . . . . . . . . . . . . . . . . . . . . . Up to 2000 meters
Installation (Overvoltage) . . . . . . . . . Category II per IEC 664
Pollution Degree. . . . . . . . . . . . . . . . 1 per IEC 664
1.4.12 Storage Temperature
Storage Temperature . . . . . . . . . . . . -10 to 60 °C (14 to 140 °F)
1.4.13 Warm Up Period
Warm Up Period. . . . . . . . . . . . . . . . None required;
For maximum stability allow 5 minutes.
1.4.14 Size
Not including mounts or user connectors
5.25" H x 17.625" W x 17.3" D
(133.4 mm H x 447.7 mm W x 435.1 mm D)
Including mounts, but no user connectors
5.25" H x 18.85" W x 17.3" D
(133.4 mm H x 478.8 mm W x 435.1 mm D)
1.4.15 Connector Clearance Requirements
Front. . . . . . . . . . . . . . . . . . . . . . . . . Minimum 1.0" (25.4 mm)
Rear . . . . . . . . . . . . . . . . . . . . . . . . . Minimum 4.0" (101.6 mm)
1.4.16 Weight
With all options. . . . . . . . . . . . . . . . . 13.2 kg / 29 lb
1.4.17 Cleaning
IPN 074-379-P1K
1 - 16
Use a mild, nonabrasive cleaner or detergent taking care to prevent cleaner from
entering the unit.
Loading...