INFICON CrystalSix Sensor User Manual

OPERATING MANUAL

CrystalSix

Sensor

IPN 074-155L

®

OPERATING MANUAL

CrystalSix

Sensor

IPN 074-155L

®

www.inficon.com [e-mail]

©2001 INFICON

®

Trademarks

The trademarks of the products mentioned in this Operating Manual are held by the companies that
produce them.

INFICON®, CrystalSix® and Composer® are trademarks of INFICON Inc.

ConFlat® is a registered trademark of Varian Associates.

Teflon® is a registered trademark of Dupont.

Scotch-Brite™ is a trademark of 3M.

SWAGELOK® and CAJON® are registered trademarks of Swagelok, Co.

Inconel® is a registered trademark of International Nickel Co.

Microdot® is a registered trademark of Microdot Corp.

All other brand and product names are trademarks or registered trademarks of their respective companies.

Disclaimer

The information contained in this Operating Manual is believed to be accurate and reliable. However, INFICON
assumes no responsibility for its use and shall not be liable for any special, incidental, or consequential
damages related to the use of this product.

Due to our continuing program of product improvements, specifications are subject to change without notice.

Copyright

©2001 All rights reserved.
Reproduction or adaptation of any part of this document without permission is unlawful.

Warranty

WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products
manufactured by it, or by an affiliated company and sold by it, and described on
the reverse hereof, to be, for the period of warranty coverage specified below, free
from defects of materials or workmanship under normal proper use and service.
The period of warranty coverage is specified for the respective products in the
respective Seller instruction manuals for those products but shall not be less than
one (1) year from the date of shipment thereof by Seller. Seller's liability under this
warranty is limited to such of the above products or parts thereof as are returned,
transportation prepaid, to Seller's plant, not later than thirty (30) days after the
expiration of the period of warranty coverage in respect thereof and are found by
Seller's examination to have failed to function properly because of defective
workmanship or materials and not because of improper installation or misuse and
is limited to, at Seller's election, either (a) repairing and returning the product or
part thereof, or (b) furnishing a replacement product or part thereof, transportation
prepaid by Seller in either case. In the event Buyer discovers or learns that a
product does not conform to warranty, Buyer shall immediately notify Seller in
writing of such non-conformity, specifying in reasonable detail the nature of such
non-conformity. If Seller is not provided with such written notification, Seller shall
not be liable for any further damages which could have been avoided if Seller had
been provided with immediate written notification.

THIS WARRANTY IS MADE AND ACCEPTED IN LIEU OF ALL OTHER
WARRANTIES, EXPRESS OR IMPLIED, WHETHER OF MERCHANTABILITY OR
OF FITNESS FOR A PARTICULAR PURPOSE OR OTHERWISE, AS BUYER'S
EXCLUSIVE REMEDY FOR ANY DEFECTS IN THE PRODUCTS TO BE SOLD
HEREUNDER. All other obligations and liabilities of Seller, whether in contract or
tort (including negligence) or otherwise, are expressly EXCLUDED. In no event
shall Seller be liable for any costs, expenses or damages, whether direct or
indirect, special, incidental, consequential, or other, on any claim of any defective
product, in excess of the price paid by Buyer for the product plus return
transportation charges prepaid.

No warranty is made by Seller of any Seller product which has been installed,
used or operated contrary to Seller's written instruction manual or which has been
subjected to misuse, negligence or accident or has been repaired or altered by
anyone other than Seller or which has been used in a manner or for a purpose for
which the Seller product was not designed nor against any defects due to plans or
instructions supplied to Seller by or for Buyer.

This manual is intended for private use by INFICON® Inc. and its customers.
Contact INFICON before reproducing its contents.

NOTE: These instructions do not provide for every contingency that may arise in
connection with the installation, operation or maintenance of this equipment.
Should you require further assistance, please contact INFICON.

www.inficon.com [e-mail]

CrystalSix Sensor Operating Manual

Table Of Contents

Chapter 1

Sensor Specifications

1.1 Specifications for CrystalSix Sensor 750-446-G1 . . . . . . . . . . . . . . . . . . . .1-1

1.1.1 Installation Requirements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2

1.1.1.1 Feedthrough . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2

1.1.1.2 Other. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2

1.1.1.3 Utilities . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2

1.1.2 Materials. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3

1.1.3 Unpacking Instructions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3

1.1.4 Inventory. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3

Chapter 2

Sensor Installation

2.1 Crystals in the CrystalSix Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-1

2.1.1 Handle the Crystal with Care . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1

2.1.2 Care of the Ceramic Retainer. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-2

2.2 Pre-installation Sensor Check . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4

2.2.1 IC/5 Deposition Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4

2.2.2 XTC/2 or XTC/C Deposition Controller. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5

2.2.3 IC/4 or IC/4 PLUS Deposition Controller . . . . . . . . . . . . . . . . . . . . . . . . . . .2-5

2.2.4 IC-6000 or XTC Deposition Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-6

2.3 General Guidelines for CrystalSix Sensor . . . . . . . . . . . . . . . . . . . . . . . . . .2-6

2.3.1 Crystal Sensor Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-10

2.4 CrystalSix Sensor Installation when

used with an IC/5 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-12

2.4.1 Programming the Relay Outputs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-12

IPN 074-155K

2.4.2 Wiring the Relay Outputs with Relay I/O Boards

760-162-G1 or 760-162-G1/G2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-12

2.5 CrystalSix Sensor Installation when used

with an XTC/2 or XTC/C. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-12

2.6 CrystalSix Sensor Installation when used

with an IC/4 or IC/4 PLUS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-13

2.6.1 Programming the Relay Outputs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-13

2.6.2 Wiring the Relay Outputs with Relay I/O Boards

755-122-G1 or 755-122-G1/G2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-13

2.7 CrystalSix Sensor Requirement when Not Installed with an

IC/5, XTC/2, XTC/C, IC/4, or IC/4 PLUS . . . . . . . . . . . . . . . . . . . . . . . . . .2-15

TOC - 1

Chapter 3

3.1 Installation with 1” Bolts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2

3.2 Installation with 2 3/4” Feedthrough . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3

3.3 Electrical and Pneumatic Connections. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3

3.3.1 Electrical. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3

3.3.2 Pneumatic . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4

Chapter 4

4.1 General Precautions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1

4.1.1 Maintain the Temperature of the Crystal . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1

4.1.2 Use the Optimum Crystal Type . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1

4.1.3 Crystal Concerns when Opening the Chamber . . . . . . . . . . . . . . . . . . . . . . 4-1

4.2 Crystal Holder Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1

4.3 Retainer Spring Adjustment Instructions . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2

4.4 Alignment Instruction for INFICON CrystalSix Sensor

4.4.1 Alignment Instructions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4

4.4.2 Disassembly Instructions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6

4.4.3 Assembly Instructions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7

4.5 Troubleshooting the CrystalSix Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9

4.6 Replacing the Bellows Assembly

4.7 How To Contact Customer Support . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-15

4.8 Returning Your Instrument to INFICON . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-15

CrystalSix Sensor Operating Manual

Installation of the Solenoid Valve Assembly

Maintenance

(IPN 750-446). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3

[lPN 750-286-P2] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-12

Chapter 5

TOC - 2

Feedthrough Outline Drawings

IPN 074-155K

CrystalSix Operating Manual

Sensor Specifications

1.1 Specifications for CrystalSix Sensor 750-446-G1

CAUTION

Incorrect rotation direction with the stops disabled will
cause permanent damage rendering transducer
inoperative. See Figure 1-2 on page 1-5 for proper
direction of rotation.

The CrystalSix® sensor is a (six crystal) quartz crystal deposition monitor
transducer. When the monitor crystal being used fails a new crystal is advanced
into position, fully replacing that crystal’s function. The mechanism used for
providing this motion is pneumatically powered. The logic for automatic operation
of this transducer is conveniently provided on most current INFICON Deposition
Controllers. It is manufactured under US Patent #5,025,644, with foreign patents
pending.

Chapter 1

Figure 1-1 CrystalSix Sensor

IPN 074-155L

Table 1-1 Sensor specification

Maximum bakeout temp with no water 130 °C

Maximum operating isothermal
environment temperature with minimum
water flow

Size (maximum envelope) 3.8" (9.7 cm) DIA x 2.0" (5.1 cm) high

400 °C

1 - 1

CrystalSix Operating Manual

Table 1-1 Sensor specification (continued)

Water, air and coax length Standard 30" (76 cm)

Crystal exchange Front-loading, extraction tool required

Mounting Six #4-40 tapped holes on the back of the

1.1.1 Installation Requirements

1.1.1.1 Feedthrough

 Qty (1) 2-3/4" ConFlat® with two coaxial feedthroughs, two pass water, one air

IPN 002-080, See Figure 5-2 on page 5-2 or,

 Qty (1) 1" bolt with one coaxial feedthrough, two pass water, one air IPN

750-030-G1, see Figure 5-1 on page 5-1.

1.1.1.2 Other

 User to provide vacuum-tight braze joints or connectors for the water and air

tubes.

(supplied with unit)

sensor body

1.1.1.3 Utilities

 Valve assembly for air, IPN 750-420-G1 (not provided), with a 0.022" restrictor

orifice installed by the user. (Orifice included with CrystalSix accessory kit.) See

Table 1-3 on page 1-3.

 XIU or Oscillator designed to interface with the deposition controller.

 Deposition controller must have been designed for this specific crystal sensor

(INFICON® XTC/2, XTC/C, IC/4, IC/4 PLUS, IC/5).

 Minimum water flow 150-200 cc/min, 30 °C max (Do not allow water to freeze).

Coolant should not contain chlorides as stress corrosion cracking may occur.

 Regulated air supply 80-90 PSIG (5.5 bar - 6.2 bar) [550 kPa - 620 kPa]

 2 meter maximum length of 1/8" tubing between bellows assembly and the

control valve.

CAUTION

Do not allow water tubes to freeze. This may happen if the
tubes pass through a cryogenic shroud and the fluid’s
flow is interrupted.

IPN 074-155L

1 - 2

1.1.2 Materials

Table 1-2 Materials

CrystalSix Operating Manual

Plate, Holders, Material Shield,
Mechanical Parts

Springs, Electrical Contacts Au plated Be-Cu, Au Plate Inconel®, 303

Water and air tubes S-304, 0.125" (0.32 cm) O.D. x .016" (.04

Connector (Microdot) Stainless steel

Insulators >99% A1

Cable Teflon® insulated copper

Crystal 0.550" Diameter

Body and Carousel 2024 T351 Aluminum

1.1.3 Unpacking Instructions

The CrystalSix sensor and accessories are packaged in a single cardboard carton
with rigid foam inserts.

Carefully remove the packaged accessories before removing the sensor, then
remove the red shipping plug from the sensor carousel.

304 type stainless steel

stainless steel

cm) Wall Thickness 30" Long (76 cm)
Seamless Stainless Steel Tubing

2O3

1.1.4 Inventory

In addition to the basic transducer, the complete shipping package includes an
accessory kit (IPN 750-268-G1) which consists of the following:

Table 1-3 Contents of Accessory Kit

IPN 074-155L

Qty IPN Description

X 750-268-G1 Accessory Kit, CrystalSix Sensor

1 750-254-G1 Assembly, Alignment Tool

1 750-279-P1 Crystal Puller

1 074-5000-G1 Thin Film Manuals CD

1 008-010-G10 Assembly, Sensor Crystal 6MHz

1 059-189 CC-1010-0225 Orifice 0.0225" diameter

2 070-201 #4 Split Lock Washer, Stainless Steel

2 084-032 #4-40x0.375" Long Socket Head Cap Screw, Stainless Steel

1 - 3

CrystalSix Operating Manual

Table 1-3 Contents of Accessory Kit (continued)

Qty IPN Description

2 084-039 #4-40x0.500" Long Socket Head Cap Screw, Stainless Steel

2 084-084 #4-40x0.688" Long Socket Head Cap Screw, Stainless Steel

1 070-828 Hex Wrench 1/16" SC9-3

1 070-829 Hex Wrench 3/32" SC9-5

1 070-1175 Hex Wrench 5/64" SC9-4

1 750-037-G1 Spring Tube Bender Kit

1 008-007 Crystal Snatcher

1 750-191-G1 Molybdenum disulfide in Alcohol

1 - 4

IPN 074-155L

5RWDWLRQ

CrystalSix Operating Manual

'LUHFWLRQ

Figure 1-2 Outline Multi Crystal Sensor

IPN 074-155L

1 - 5

CrystalSix Operating Manual

1 - 6

Figure 1-3 Assembly CrystalSix Sensor

IPN 074-155L

CrystalSix Operating Manual

Chapter 2

Sensor Installation

Successful operation of any crystal sensor depends on proper placement,
compatibility of its construction with its operating environment and connection to
proper utilities.

NOTE: The sensor head, water tubes, cable, etc. should be clean and grease free

when installed in the vacuum chamber. These parts should be handled
while wearing clean nylon gloves. If parts do become contaminated, clean
them thoroughly using a suitable solvent to avoid outgassing and
excessive peeling of deposition material from the sensor’s surfaces.

CAUTION

Incorrect rotation direction will cause permanent damage
rendering transducer inoperative. Refer to Figure 1-2 on

page 1-5 for proper direction of rotation.

2.1 Crystals in the CrystalSix Sensor

2.1.1 Handle the Crystal with Care

Always use clean nylon lab gloves and clean plastic tweezers when handling the
crystal. Handle the crystals only by their edges. Anything that comes in contact with
the crystal surfaces may leave contamination, which may lead to poor film
adhesion. Poor film adhesion will result in high rate noise and premature crystal
failure.

CAUTION

IPN 074-155L

Do not use metal tweezers to handle crystals. Metal
tweezers may chip the edge of the crystal.

2 - 1

CrystalSix Operating Manual

2.1.2 Care of the Ceramic Retainer

CAUTION

Do not use excessive force when handling the Ceramic
Retainer Assembly since breakage may occur. Always
use the crystal snatcher.

To prevent scratching the crystal electrode, do not rotate
the ceramic retainer after installation.

Always use clean nylon lab gloves and plastic tweezers
for handling the crystal. This avoids contamination which
may lead to poor adhesion of deposited material to the
electrode.

Follow the procedure below to install or replace the crystals in the CrystalSix
sensor. (Reference Figure 1-3 on page 1-6).

CAUTION

Rotating the unit in the wrong direction with the stops
disabled will cause severe damage! Do not rotate the unit
by hand to install the crystals or to check indexing.

1 Remove the heat shield (item #8) by gently pulling on the outside

circumference of the shield. The shield should snap off.

2 Since the crystal holders are packaged separately, skip the remainder of this

step for first-time installations. Using the crystal puller (IPN 750-279-P1,
provided in ship kit 750-268), remove the crystal holder by pushing the tips of
the crystal puller over the outside circumference of the crystal holder (see

Figure 2-2 on page 2-4). Gently pull the crystal holder from its receptacle. A

slight amount of pressure applied to collapse the tips of the crystal puller may
be required to extract the crystal holder.

3 Insert the tapered end of the crystal snatcher (part number 008-007) into the

ceramic retainer (A) and apply a small amount of pressure. This locks the
retainer to the snatcher and allows the retainer to be pulled straight out (B). See

Figure 2-1.

IPN 074-155L

2 - 2

CrystalSix Operating Manual

Figure 2-1 Using the Crystal Snatcher

4 Invert the crystal holder and the crystal will drop out. (Skip this step for first-time

installations.)

5 Install the new crystal per section 2.1.1 on page 2-1 and section 2.1.2 on page

2-2.

6 Using clean nylon gloves, grasp the edge of the new crystal with a clean pair of

plastic tweezers. Orient the crystal so the patterned electrode is facing up.
Gently insert the edge of the crystal beneath one of the wire segments that
protrude into the crystal cavity. Release the crystal.

7 Replace the ceramic retainer. Initially orient it at an angle to displace the spring

wire segments in the crystal holder.

8 Release the crystal snatcher with a slight side-to-side rocking motion. Using the

backside of the crystal snatcher, push on the ceramic retainer to ensure it is
completely seated.

9 Position the crystal holder between the tips of the crystal puller as illustrated in

Figure 2-2.

IPN 074-155L

10 Push the crystal holder into the receptacle of the CrystalSix sensor until

completely seated. “Snap” the crystal puller to one side to release the crystal
holder from the crystal puller. Using the non-slotted end of the crystal puller,
apply pressure to the crystal holder until it is completely seated. Verify that the
crystal fail signal on the controller display disappears. If the crystal fail signal
does not disappear, consult section 4.5 on page 4-9.

11 Press the crystal switch button on the hand held controller or the controller front

panel. The sensor will advance to the next crystal position. Repeat procedure
from Step 2 until all six new crystals have been installed.

12 Install the heat shield (item #8) by first orienting the slot in the heat shield to

accommodate the water tubes, then secure the heat shield by applying
pressure near the center of the shield. The shield should snap in place.

2 - 3