OPERATING MANUAL
CrystalSix
Sensor
IPN 074-155L
®
OPERATING MANUAL
CrystalSix
Sensor
IPN 074-155L
®
www.inficon.com reachus@inficon.com
©2001 INFICON
®
Trademarks
The trademarks of the products mentioned in this Operating Manual are held by the companies that
produce them.
INFICON®, CrystalSix® and Composer® are trademarks of INFICON Inc.
ConFlat® is a registered trademark of Varian Associates.
Teflon® is a registered trademark of Dupont.
Scotch-Brite™ is a trademark of 3M.
SWAGELOK® and CAJON® are registered trademarks of Swagelok, Co.
Inconel® is a registered trademark of International Nickel Co.
Microdot® is a registered trademark of Microdot Corp.
All other brand and product names are trademarks or registered trademarks of their respective companies.
Disclaimer
The information contained in this Operating Manual is believed to be accurate and reliable. However, INFICON
assumes no responsibility for its use and shall not be liable for any special, incidental, or consequential
damages related to the use of this product.
Due to our continuing program of product improvements, specifications are subject to change without notice.
Copyright
©2001 All rights reserved.
Reproduction or adaptation of any part of this document without permission is unlawful.
Warranty
WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products
manufactured by it, or by an affiliated company and sold by it, and described on
the reverse hereof, to be, for the period of warranty coverage specified below, free
from defects of materials or workmanship under normal proper use and service.
The period of warranty coverage is specified for the respective products in the
respective Seller instruction manuals for those products but shall not be less than
one (1) year from the date of shipment thereof by Seller. Seller's liability under this
warranty is limited to such of the above products or parts thereof as are returned,
transportation prepaid, to Seller's plant, not later than thirty (30) days after the
expiration of the period of warranty coverage in respect thereof and are found by
Seller's examination to have failed to function properly because of defective
workmanship or materials and not because of improper installation or misuse and
is limited to, at Seller's election, either (a) repairing and returning the product or
part thereof, or (b) furnishing a replacement product or part thereof, transportation
prepaid by Seller in either case. In the event Buyer discovers or learns that a
product does not conform to warranty, Buyer shall immediately notify Seller in
writing of such non-conformity, specifying in reasonable detail the nature of such
non-conformity. If Seller is not provided with such written notification, Seller shall
not be liable for any further damages which could have been avoided if Seller had
been provided with immediate written notification.
THIS WARRANTY IS MADE AND ACCEPTED IN LIEU OF ALL OTHER
WARRANTIES, EXPRESS OR IMPLIED, WHETHER OF MERCHANTABILITY OR
OF FITNESS FOR A PARTICULAR PURPOSE OR OTHERWISE, AS BUYER'S
EXCLUSIVE REMEDY FOR ANY DEFECTS IN THE PRODUCTS TO BE SOLD
HEREUNDER. All other obligations and liabilities of Seller, whether in contract or
tort (including negligence) or otherwise, are expressly EXCLUDED. In no event
shall Seller be liable for any costs, expenses or damages, whether direct or
indirect, special, incidental, consequential, or other, on any claim of any defective
product, in excess of the price paid by Buyer for the product plus return
transportation charges prepaid.
No warranty is made by Seller of any Seller product which has been installed,
used or operated contrary to Seller's written instruction manual or which has been
subjected to misuse, negligence or accident or has been repaired or altered by
anyone other than Seller or which has been used in a manner or for a purpose for
which the Seller product was not designed nor against any defects due to plans or
instructions supplied to Seller by or for Buyer.
This manual is intended for private use by INFICON® Inc. and its customers.
Contact INFICON before reproducing its contents.
NOTE: These instructions do not provide for every contingency that may arise in
connection with the installation, operation or maintenance of this equipment.
Should you require further assistance, please contact INFICON.
www.inficon.com reachus@inficon.com
CrystalSix Sensor Operating Manual
Table Of Contents
Chapter 1
Sensor Specifications
1.1 Specifications for CrystalSix Sensor 750-446-G1 . . . . . . . . . . . . . . . . . . . .1-1
1.1.1 Installation Requirements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2
1.1.1.1 Feedthrough . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2
1.1.1.2 Other. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2
1.1.1.3 Utilities . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2
1.1.2 Materials. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
1.1.3 Unpacking Instructions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3
1.1.4 Inventory. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3
Chapter 2
Sensor Installation
2.1 Crystals in the CrystalSix Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-1
2.1.1 Handle the Crystal with Care . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
2.1.2 Care of the Ceramic Retainer. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-2
2.2 Pre-installation Sensor Check . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
2.2.1 IC/5 Deposition Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
2.2.2 XTC/2 or XTC/C Deposition Controller. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5
2.2.3 IC/4 or IC/4 PLUS Deposition Controller . . . . . . . . . . . . . . . . . . . . . . . . . . .2-5
2.2.4 IC-6000 or XTC Deposition Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-6
2.3 General Guidelines for CrystalSix Sensor . . . . . . . . . . . . . . . . . . . . . . . . . .2-6
2.3.1 Crystal Sensor Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-10
2.4 CrystalSix Sensor Installation when
used with an IC/5 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-12
2.4.1 Programming the Relay Outputs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-12
IPN 074-155K
2.4.2 Wiring the Relay Outputs with Relay I/O Boards
760-162-G1 or 760-162-G1/G2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-12
2.5 CrystalSix Sensor Installation when used
with an XTC/2 or XTC/C. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-12
2.6 CrystalSix Sensor Installation when used
with an IC/4 or IC/4 PLUS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-13
2.6.1 Programming the Relay Outputs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-13
2.6.2 Wiring the Relay Outputs with Relay I/O Boards
755-122-G1 or 755-122-G1/G2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-13
2.7 CrystalSix Sensor Requirement when Not Installed with an
IC/5, XTC/2, XTC/C, IC/4, or IC/4 PLUS . . . . . . . . . . . . . . . . . . . . . . . . . .2-15
TOC - 1
Chapter 3
3.1 Installation with 1” Bolts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2
3.2 Installation with 2 3/4” Feedthrough . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
3.3 Electrical and Pneumatic Connections. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
3.3.1 Electrical. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
3.3.2 Pneumatic . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
Chapter 4
4.1 General Precautions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.1.1 Maintain the Temperature of the Crystal . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.1.2 Use the Optimum Crystal Type . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.1.3 Crystal Concerns when Opening the Chamber . . . . . . . . . . . . . . . . . . . . . . 4-1
4.2 Crystal Holder Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.3 Retainer Spring Adjustment Instructions . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
4.4 Alignment Instruction for INFICON CrystalSix Sensor
4.4.1 Alignment Instructions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4
4.4.2 Disassembly Instructions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6
4.4.3 Assembly Instructions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7
4.5 Troubleshooting the CrystalSix Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9
4.6 Replacing the Bellows Assembly
4.7 How To Contact Customer Support . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-15
4.8 Returning Your Instrument to INFICON . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-15
CrystalSix Sensor Operating Manual
Installation of the Solenoid Valve Assembly
Maintenance
(IPN 750-446). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3
[lPN 750-286-P2] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-12
Chapter 5
TOC - 2
Feedthrough Outline Drawings
IPN 074-155K
CrystalSix Operating Manual
Sensor Specifications
1.1 Specifications for CrystalSix Sensor 750-446-G1
CAUTION
Incorrect rotation direction with the stops disabled will
cause permanent damage rendering transducer
inoperative. See Figure 1-2 on page 1-5 for proper
direction of rotation.
The CrystalSix® sensor is a (six crystal) quartz crystal deposition monitor
transducer. When the monitor crystal being used fails a new crystal is advanced
into position, fully replacing that crystal’s function. The mechanism used for
providing this motion is pneumatically powered. The logic for automatic operation
of this transducer is conveniently provided on most current INFICON Deposition
Controllers. It is manufactured under US Patent #5,025,644, with foreign patents
pending.
Chapter 1
Figure 1-1 CrystalSix Sensor
IPN 074-155L
Table 1-1 Sensor specification
Maximum bakeout temp with no water 130 °C
Maximum operating isothermal
environment temperature with minimum
water flow
Size (maximum envelope) 3.8" (9.7 cm) DIA x 2.0" (5.1 cm) high
400 °C
1 - 1
CrystalSix Operating Manual
Table 1-1 Sensor specification (continued)
Water, air and coax length Standard 30" (76 cm)
Crystal exchange Front-loading, extraction tool required
Mounting Six #4-40 tapped holes on the back of the
1.1.1 Installation Requirements
1.1.1.1 Feedthrough
Qty (1) 2-3/4" ConFlat® with two coaxial feedthroughs, two pass water, one air
IPN 002-080, See Figure 5-2 on page 5-2 or,
Qty (1) 1" bolt with one coaxial feedthrough, two pass water, one air IPN
750-030-G1, see Figure 5-1 on page 5-1.
1.1.1.2 Other
User to provide vacuum-tight braze joints or connectors for the water and air
tubes.
(supplied with unit)
sensor body
1.1.1.3 Utilities
Valve assembly for air, IPN 750-420-G1 (not provided), with a 0.022" restrictor
orifice installed by the user. (Orifice included with CrystalSix accessory kit.) See
Table 1-3 on page 1-3.
XIU or Oscillator designed to interface with the deposition controller.
Deposition controller must have been designed for this specific crystal sensor
(INFICON® XTC/2, XTC/C, IC/4, IC/4 PLUS, IC/5).
Minimum water flow 150-200 cc/min, 30 °C max (Do not allow water to freeze).
Coolant should not contain chlorides as stress corrosion cracking may occur.
Regulated air supply 80-90 PSIG (5.5 bar - 6.2 bar) [550 kPa - 620 kPa]
2 meter maximum length of 1/8" tubing between bellows assembly and the
control valve.
CAUTION
Do not allow water tubes to freeze. This may happen if the
tubes pass through a cryogenic shroud and the fluid’s
flow is interrupted.
IPN 074-155L
1 - 2
1.1.2 Materials
Table 1-2 Materials
CrystalSix Operating Manual
Plate, Holders, Material Shield,
Mechanical Parts
Springs, Electrical Contacts Au plated Be-Cu, Au Plate Inconel®, 303
Water and air tubes S-304, 0.125" (0.32 cm) O.D. x .016" (.04
Connector (Microdot) Stainless steel
Insulators >99% A1
Cable Teflon® insulated copper
Crystal 0.550" Diameter
Body and Carousel 2024 T351 Aluminum
1.1.3 Unpacking Instructions
The CrystalSix sensor and accessories are packaged in a single cardboard carton
with rigid foam inserts.
Carefully remove the packaged accessories before removing the sensor, then
remove the red shipping plug from the sensor carousel.
304 type stainless steel
stainless steel
cm) Wall Thickness 30" Long (76 cm)
Seamless Stainless Steel Tubing
2O3
1.1.4 Inventory
In addition to the basic transducer, the complete shipping package includes an
accessory kit (IPN 750-268-G1) which consists of the following:
Table 1-3 Contents of Accessory Kit
IPN 074-155L
Qty IPN Description
X 750-268-G1 Accessory Kit, CrystalSix Sensor
1 750-254-G1 Assembly, Alignment Tool
1 750-279-P1 Crystal Puller
1 074-5000-G1 Thin Film Manuals CD
1 008-010-G10 Assembly, Sensor Crystal 6MHz
1 059-189 CC-1010-0225 Orifice 0.0225" diameter
2 070-201 #4 Split Lock Washer, Stainless Steel
2 084-032 #4-40x0.375" Long Socket Head Cap Screw, Stainless Steel
1 - 3
CrystalSix Operating Manual
Table 1-3 Contents of Accessory Kit (continued)
Qty IPN Description
2 084-039 #4-40x0.500" Long Socket Head Cap Screw, Stainless Steel
2 084-084 #4-40x0.688" Long Socket Head Cap Screw, Stainless Steel
1 070-828 Hex Wrench 1/16" SC9-3
1 070-829 Hex Wrench 3/32" SC9-5
1 070-1175 Hex Wrench 5/64" SC9-4
1 750-037-G1 Spring Tube Bender Kit
1 008-007 Crystal Snatcher
1 750-191-G1 Molybdenum disulfide in Alcohol
1 - 4
IPN 074-155L
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CrystalSix Operating Manual
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Figure 1-2 Outline Multi Crystal Sensor
IPN 074-155L
1 - 5
CrystalSix Operating Manual
1 - 6
Figure 1-3 Assembly CrystalSix Sensor
IPN 074-155L
CrystalSix Operating Manual
Chapter 2
Sensor Installation
Successful operation of any crystal sensor depends on proper placement,
compatibility of its construction with its operating environment and connection to
proper utilities.
NOTE: The sensor head, water tubes, cable, etc. should be clean and grease free
when installed in the vacuum chamber. These parts should be handled
while wearing clean nylon gloves. If parts do become contaminated, clean
them thoroughly using a suitable solvent to avoid outgassing and
excessive peeling of deposition material from the sensor’s surfaces.
CAUTION
Incorrect rotation direction will cause permanent damage
rendering transducer inoperative. Refer to Figure 1-2 on
page 1-5 for proper direction of rotation.
2.1 Crystals in the CrystalSix Sensor
2.1.1 Handle the Crystal with Care
Always use clean nylon lab gloves and clean plastic tweezers when handling the
crystal. Handle the crystals only by their edges. Anything that comes in contact with
the crystal surfaces may leave contamination, which may lead to poor film
adhesion. Poor film adhesion will result in high rate noise and premature crystal
failure.
CAUTION
IPN 074-155L
Do not use metal tweezers to handle crystals. Metal
tweezers may chip the edge of the crystal.
2 - 1
CrystalSix Operating Manual
2.1.2 Care of the Ceramic Retainer
CAUTION
Do not use excessive force when handling the Ceramic
Retainer Assembly since breakage may occur. Always
use the crystal snatcher.
To prevent scratching the crystal electrode, do not rotate
the ceramic retainer after installation.
Always use clean nylon lab gloves and plastic tweezers
for handling the crystal. This avoids contamination which
may lead to poor adhesion of deposited material to the
electrode.
Follow the procedure below to install or replace the crystals in the CrystalSix
sensor. (Reference Figure 1-3 on page 1-6).
CAUTION
Rotating the unit in the wrong direction with the stops
disabled will cause severe damage! Do not rotate the unit
by hand to install the crystals or to check indexing.
1 Remove the heat shield (item #8) by gently pulling on the outside
circumference of the shield. The shield should snap off.
2 Since the crystal holders are packaged separately, skip the remainder of this
step for first-time installations. Using the crystal puller (IPN 750-279-P1,
provided in ship kit 750-268), remove the crystal holder by pushing the tips of
the crystal puller over the outside circumference of the crystal holder (see
Figure 2-2 on page 2-4). Gently pull the crystal holder from its receptacle. A
slight amount of pressure applied to collapse the tips of the crystal puller may
be required to extract the crystal holder.
3 Insert the tapered end of the crystal snatcher (part number 008-007) into the
ceramic retainer (A) and apply a small amount of pressure. This locks the
retainer to the snatcher and allows the retainer to be pulled straight out (B). See
Figure 2-1.
IPN 074-155L
2 - 2
CrystalSix Operating Manual
Figure 2-1 Using the Crystal Snatcher
4 Invert the crystal holder and the crystal will drop out. (Skip this step for first-time
installations.)
5 Install the new crystal per section 2.1.1 on page 2-1 and section 2.1.2 on page
2-2.
6 Using clean nylon gloves, grasp the edge of the new crystal with a clean pair of
plastic tweezers. Orient the crystal so the patterned electrode is facing up.
Gently insert the edge of the crystal beneath one of the wire segments that
protrude into the crystal cavity. Release the crystal.
7 Replace the ceramic retainer. Initially orient it at an angle to displace the spring
wire segments in the crystal holder.
8 Release the crystal snatcher with a slight side-to-side rocking motion. Using the
backside of the crystal snatcher, push on the ceramic retainer to ensure it is
completely seated.
9 Position the crystal holder between the tips of the crystal puller as illustrated in
Figure 2-2.
IPN 074-155L
10 Push the crystal holder into the receptacle of the CrystalSix sensor until
completely seated. “Snap” the crystal puller to one side to release the crystal
holder from the crystal puller. Using the non-slotted end of the crystal puller,
apply pressure to the crystal holder until it is completely seated. Verify that the
crystal fail signal on the controller display disappears. If the crystal fail signal
does not disappear, consult section 4.5 on page 4-9.
11 Press the crystal switch button on the hand held controller or the controller front
panel. The sensor will advance to the next crystal position. Repeat procedure
from Step 2 until all six new crystals have been installed.
12 Install the heat shield (item #8) by first orienting the slot in the heat shield to
accommodate the water tubes, then secure the heat shield by applying
pressure near the center of the shield. The shield should snap in place.
2 - 3
CrystalSix Operating Manual
Figure 2-2 Using the Crystal Puller
2.2 Pre-installation Sensor Check
Prior to installing the sensor in the vacuum system, you should make certain that it
is in proper working condition by following the procedure outlined below.
2.2.1 IC/5 Deposition Controller
1 Connect the in-vacuum sensor head cable to the feedthrough or a coax adapter
(microdot/BNC).
2 Connect one end of the 6" XIU cable (IPN 755-257-G6) to the BNC connector
of the feedthrough.
3 Connect the other end of the 6" XIU cable to the connector of the XIU/5 (IPN
760-600-G1).
4 Connect one end of the XIU/5 cable (IPN 600-1039-Gxx) to the mating
connector of the XIU/5.
5 Connect the other end of the XIU/5 cable to a sensor channel at the rear of the
controller.
6 Connect power to the controller and set power switch to ON. Set density at 1.00
gm/cc, and zero thickness. The display should indicate 0/ or +/-.001 KÅ. Crystal
life should read from 0 to 5%.
7 Breathe heavily on the crystal. A thickness indication of 1.000 to 2.000 KÅ
should appear on the display. When the moisture evaporates, the thickness
indication should return to approximately zero.
If the above conditions are observed, you can assume the sensor is in proper
working order and may be installed.
IPN 074-155L
2 - 4
2.2.2 XTC/2 or XTC/C Deposition Controller
1 Connect the in-vacuum sensor head cable to the feedthrough or a coax adapter
(microdot/BNC).
2 Connect one end of the 6" XIU cable (IPN 755-257-G6) to the BNC connector
or the feedthrough.
3 Connect the other end of the 6" XIU cable to the connector of the XIU (IPN
757-302-G1).
4 Connect one end of the XX' long XIU cable (IPN 757-303-GXX) to the mating
connector of the XIU.
5 Connect the other end of the XIU cable to a sensor channel at the rear of the
controller.
6 Connect power to the controller and set power switch to ON. Set density at 1.00
gm/cc, and zero thickness. The display should indicate 0/ or +/-.001 KÅ. Crystal
life should read from 0 to 5%.
7 Breathe heavily on the crystal. A thickness indication of 1.000 to 2.000 KÅ
should appear on the display. When the moisture evaporates, the thickness
indication should return to approximately zero.
CrystalSix Operating Manual
If the above conditions are observed, you can assume the sensor is in proper
working order and may be installed.
2.2.3 IC/4 or IC/4 PLUS Deposition Controller
1 Connect the in-vacuum sensor head cable to the feedthrough or a coax adapter
(microdot/BNC).
2 Connect one end of the 6" XIU cable (IPN 755-257-G6) to the BNC connector
or the feedthrough.
3 Connect the other end of the 6" XIU cable to the connector of the XIU (IPN
755-252-G1).
4 Connect one end of the 15' long XIU cable (IPN 755-258-G15) to the mating
IPN 074-155L
connector of the XIU.
5 Connect the other end of the XIU cable to a sensor channel at the rear of the
controller.
6 Connect power to the controller and set power switch to ON. Set density at 1.00
gm/cc, and zero thickness. The display should indicate 0/ or +/-.001 KÅ. Crystal
life should read from 0 to 5%.
7 Breathe heavily on the crystal. A thickness indication of 1.000 to 2.000 KÅ
should appear on the display. When the moisture evaporates, the thickness
indication should return to approximately zero.
If the above conditions are observed, you can assume the sensor is in proper
working order and may be installed.
2 - 5
CrystalSix Operating Manual
2.2.4 IC-6000 or XTC Deposition Controller
NOTE: See section 2.7 on page 2-15.
1 Connect the in-vacuum sensor head cable to the feedthrough or a coax adapter
(Microdot/BNC).
2 Connect one end of the 6" OSC cable (IPN 013-070) to the receptacle on the
feedthrough.
3 Connect the other end of the 6" OSC cable to the receptacle marked XTAL on
the oscillator (IPN 013-001).
4 Connect the end of the oscillator source/sensor cable (IPN 013-067) to the
remaining BNC receptacle on the oscillator.
5 Connect the other end of the OSC source/sensor cable to the receptacle
marked OSC on the rear panel of the controller.
6 Connect power to the controller and set power switch to ON. Set density at 1.00
gm/cc, and zero the thickness. The display should indicate 0/ or +/-0.001 KÅ.
Crystal life should read from 0 to 5%.
7 Breathe heavily on the crystal. A thickness indication of 1.000 to 2.000 KÅ
should appear on the display. When the moisture evaporates, the thickness
indication should return to approximately zero.
If the above conditions are observed, you can assume the sensor is in proper
working order and may be installed.
2.3 General Guidelines for CrystalSix Sensor
Figure 2-3, Figure 2-4, and Figure 2-5 show the typical installation of an INFICON
water-cooled crystal sensor in the vacuum process chamber. Use the illustration
and the following guidelines to install your sensors for optimum performance and
convenience.
IPN 074-155L
2 - 6
Figure 2-3 Typical CrystalSix Installation for IC/5
CrystalSix Operating Manual
G
IPN 750-420-G1
IPN 074-155L
2 - 7
CrystalSix Operating Manual
Figure 2-4 Typical CrystalSix Installation for XTC/2 and XTC/C
G
IPN 750-420-G1
IPN 074-155L
2 - 8
Figure 2-5 Typical CrystalSix Installation for IC/4 PLUS
CrystalSix Operating Manual
G
IPN 750-420-G1
IPN 074-155L
2 - 9
CrystalSix Operating Manual
2.3.1 Crystal Sensor Installation
Generally, install the sensor as far as possible from the evaporation source (a
minimum of 10" or 25.4 cm) while still being in a position to accumulate thickness
at a rate proportional to accumulation on the substrate. Figure 2-6 shows proper
and improper methods of installing sensors.
Figure 2-6 Sensor Installation Guidelines
Correct
Incorrect
Obstruction
Incorrect
Incorrect
Source
Correct
To guard against spattering, use a source shutter to shield the sensor during the
initial soak periods. If the crystal is hit with even a minute particle of molten
material, it may be damaged and stop oscillating. Even in cases when it does not
completely stop oscillating, it may immediately become unstable, or shortly after
deposition begins instability may occur.
Plan the installation to insure that there are no obstructions blocking a direct path
between the sensor and the source.
Install sensors in such a manner that the center axis of the crystal is aimed directly
at the source to be monitored. Verify that the angle of the sensor location (with
reference to the source) is well within the evaporant stream.
IPN 074-155L
2 - 10
Attach the sensor with a mounting bracket anchored to the deposition chamber.
With the bracket in place, temporarily position and attach the sensor head as
outlined in the general guidelines above. Next, temporarily install the feedthrough.
You may now form, measure, and mark the sensor tubes (use the bending tool (IPN
750-036) to form tubes in the system).
CrystalSix Operating Manual
Build the Sensor/Feedthrough Assembly. Remove the sensor and the feedthrough,
cut the water cooling tubes and air tubes to the proper length and connect them
directly to the feedthrough or use vacuum rated couplings.
CAUTION
To prevent damage to the feedthrough or sensor during
welding or brazing, insure that at least one inch of water
tube is left between the sensor and the feedthrough.
After cutting the water and air tubes, verify that they are clear of metal particles by
forcing compressed air through the tubing. Heliarc welding is recommended (torch
brazing may also be acceptable) for connecting the sensor to the feedthrough
water tube.
Vacuum rated connectors such as CAJON® are recommended for use between
the sensor and the feedthrough to speed maintenance. If brazing adapters are to
be used, attach them to the sensor water-cooling tubes prior to connection to the
feedthrough. Make connections as follows:
1 Clean the water tube and adapter surfaces with solvent if necessary.
2 Apply brazing flux to surfaces being joined.
3 Braze the connections using a flame temperature appropriate for the brazing
material being used.
CAUTION
Excessive application of brazing material, or excessive
heat due to brazing, may result in blockage of the water
tube.
IPN 074-155L
4 Verify that each joint is not blocked by blowing compressed air through the
cooling tubes.
5 Thoroughly clean the braze joint and helium leak test before installing the
sensor and feedthrough into the process chamber.
Once all water and air tube connections are fabricated, install the sensor and
feedthrough assembly into the process system and secure all retaining hardware.
Shield the coax cable from heat radiating from the evaporant source or the
substrate heater. You can do this very simply, if your process allows, by wrapping
aluminum foil around the cable and water tubes. Connect the external water tubes
from the feedthrough to your water supply system and flow controller. We
recommend using detachable couples (Swagelok® or equivalent) for external
water tube connections. Apply water pressure to verify flow and tightness.
2 - 11
CrystalSix Operating Manual
Because of geometric factors, variations in surface temperature, and differences in
electrical potential, the crystal and substrates often do not receive the same
amount of material. If you want the thickness indication on the unit to represent the
thickness on the substrates, calibration is required to determine the tooling.
Consult your controller’s manual for the proper procedure for obtaining the tooling
factor.
CAUTION
Use of more than 80" (2 meters) of 1/8" tubing between
the valve and the bellows may cause a switcher failure
because of the time required to bleed out sufficient air
during de-pressurization. If tubing greater than 1/8" is
used, the maximum length must be reduced proportional
to the additional volume.
2.4 CrystalSix Sensor Installation when used with an IC/5
2.4.1 Programming the Relay Outputs
1 From the program menu select Source/Sensor Directory (F4).
2 Select Sensor board 1, 2, 3 or 4 (depending upon unit configuration).
3 Enter the edit mode. (F5)
4 Select Sensor type six (6) for the CrystalSix Sensor. This will enable the Crystal
Switch output (Switch Out (0, 1-38).
5 Select a CrystalSwitch output depending upon which I/O board is used.
2.4.2 Wiring the Relay Outputs with Relay I/O Boards
760-162-G1 or 760-162-G1/G2
On the relay connector, connect the leads of the solenoid valve across the one side
of a 24 volt supply (see Table 11.5 of IC/5 Operating Manual) and one side of a
relay (1-8, 1-16, or 1-24 whichever was programmed). Refer to Table 11.3 of the
IC/5 Operating Manual. Connect a jumper between the second side of the 24 volt
supply and the second side of the selected relay.
IPN 074-155L
2.5 CrystalSix Sensor Installation when used with an XTC/2 or XTC/C
Follow the instructions of Section 3.5.2 of the XTC/2 - XTC/C Operating Manual
(074-183).
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CrystalSix Operating Manual
2.6 CrystalSix Sensor Installation when used
with an IC/4 or IC/4 PLUS
2.6.1 Programming the Relay Outputs
1 From the program menu select Source/Sensor (F4).
2 Select Sensor board 1 or Sensor board 2.
3 Enter the edit mode. (F5)
4 Select Sensor type six (6) for the CrystalSix Sensor. This will enable the
CrystalSwitch output.
5 Select a CrystalSwitch output (Relay 1-8 or 1-16) depending upon which I/O
board is used.
6 Turn the instrument’s power “OFF”, then “ON”, to ensure that the change takes
place permanently.
2.6.2 Wiring the Relay Outputs with Relay I/O Boards
755-122-G1 or 755-122-G1/G2
1 On the relay connector, see Figure 2-7 on page 2-14, connect the leads of the
solenoid valve across the one side of a 24 volt supply (see listing) and one side
of a relay (1-16 whichever was programmed). Connect a jumper between the
second side of the 24 volt supply and the second side of the selected relay.
Refer to Figure 2-5 on page 2-9 for a typical installation utilizing relay 1 to
perform the crystal advance function for the relay I/O board.
Table 2-1 Wiring Connectors
(P4)
Top Relay Connector
Relay Pins Input Pins
1 24, 28 1 1, 20
IPN 074-155L
2 23, 27 2 2, 21
3 22, 26 3 3, 22
4 13, 19 4 4, 23
5 12, 18 5 5, 24
6 11, 17 6 6, 25
7 10, 16 7 7, 26
8 3, 7 8 8, 27
(P5)
Input Lines
2 - 13
CrystalSix Operating Manual
Table 2-1 Wiring Connectors (continued)
(P3)
(available on G2 only)
Bottom Relay Connector
Relay Pins
9 47, 50 9 13, 32
10 14, 17 10 14, 33
11 59, 63 11 15, 34
12 53, 60 12 16, 35
13 34, 36 13 12, 31
14 28, 30 14 11, 30
15 4, 11 15 10, 29
16 1, 5 16 9, 28
Isolated 24 V(dc) source is available with a maximum of 0.4 amps total on
connector P4 at Pins 4, 9, 15 and 21 with Pins 8, 14, 20 and 25 used as returns.
2 In similar fashion, connect the Pneumatic Actuator for the source shutter if
required.
3 Connect the oscillator cable to the appropriate channel of the sensor board
programmed.
4 Connect the source one or source two cable (whichever has been
programmed) to the source controller.
Figure 2-7 Relay outputs: typical connector configuration utilizing relay #1
IPN 074-155L
2 - 14
NOTE: Contact arrangements shown are of pin mating face (plug or receptacle).
The socket mating face is a mirror image of Figure 2-7.
CrystalSix Operating Manual
2.7 CrystalSix Sensor Requirement when Not Installed with an
IC/5, XTC/2, XTC/C, IC/4, or IC/4 PLUS
The CrystalSix can be manually operated with other Deposition Controllers. The
user must, however, be aware of the functional requirements for operation. These
include, but are not limited to:
1 The solenoid assembly must be energized and de-energized twice per crystal
position. Twelve pulses complete one revolution.
2 The electrical pulse applied to the solenoid valve must be at least one second
in duration during both the pressurization and de-pressurization phase.
3 A 24 volt AC or DC supply is required to energize the solenoid assembly.
Consult Figure 3-1 on page 3-4 for wiring assignments.
4 The user should provide some means of determining the quantity of “good”
crystals when initially loaded, and quantity of good crystals remaining at any
time.
5 Follow the guidelines shown in section 2.3 on page 2-6 for installation.
6 You will need to keep track of the total thickness as a manually generated sum
of the deposit accumulated on each crystal.
IPN 074-155L
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CrystalSix Operating Manual
This page is intentionally blank.
2 - 16
IPN 074-155L
CrystalSix Operating Manual
Chapter 3
Installation of the Solenoid Valve Assembly
The solenoid valve assembly (IPN 750-420-G1) and the feedthrough should be
installed at the same time. The same valve assembly is used for both the 1" and
the (recommended) 2 3/4" feedthroughs. However, if the assembly is to be used
with the 2 3/4" feedthrough, you will need to modify the valve bracket as follows.
For the following steps, see Figure 3-2 on page 3-5. (DWG. 750-420-G1)
1 Align the score line on the valve assembly bracket (item #5) over the edge of a
table or other square edge.
2 Using pliers, grasp the part of the bracket extending over the edge and push
down. The bracket will break along the score line. Use a file to smooth any
rough edges which occur along the break.
NOTE: In order for the CrystalSix sensor to operate properly, a .022" diameter
orifice (IPN 059-189 provided in Kit 750-268) must be installed in line
between the air supply and the solenoid valve assembly. This is
accomplished by the following procedure. See Figure 3-1 on page 3-4.
1 Unthread the tube fitting attached to the normally closed (N.C.) P Supply port
of the 3-way solenoid valve (item #7).
2 Install the orifice by threading it into the normally closed (N.C.) port of the 3-way
solenoid valve.
3 Thread the tube fitting previously removed into the orifice.
NOTE: Do not install the orifice into the normally open output port. This will require
a longer time interval for depressurization of the bellows assembly and
may lead to an apparent sensor failure.
IPN 074-155L
3 - 1
CrystalSix Operating Manual
3.1 Installation with 1” Bolts
Installation of the solenoid valve assembly for the CrystalSix sensor requires one
1" bolt feedthrough (IPN 750-030-G1, see Figure 5-1 on page 5-1).
Follow these steps:
1 Ensure that the o-ring is in placed on the bolt. Insert the 1" bolt such that the
hexagonal shaped end of the bolt is on the vacuum side of the chamber.
2 Add the Bracket.
3 Add the Washer.
4 Add the Nut.
5 Tighten the feedthrough nut.
6 Add the air fitting to the tube which has the female thread adapter installed.
7 Connect 1/8" diameter tubing from the valve output (A) to the feedthrough
fitting.
CAUTION
Use of more than 80" (2 meters) of 1/8" tubing between
the valve and the bellows may cause switcher failure
because of the time required to bleed out sufficient air
during de-pressurization. If tubing greater than 1/8" is
used, the maximum length must be reduced proportional
to the additional volume.
8 Attach the valve’s supply (normally closed (NC) port) to the 80-90 PSIG
(5.5 bar - 6.2 bar) [550 kPa - 620 kPa] source of air. Verify that the orifice (IPN
059-189) has been installed into this NC valve port. (See Figure 3-1b of Figure
3-1 on page 3-4.)
IPN 074-155L
3 - 2
3.2 Installation with 2 3/4” Feedthrough
Installation of the solenoid valve requires a 2 3/4" feedthrough inclusive of two
coaxial feedthroughs (IPN 002-080, see Figure 5-2 on page 5-2). The second
coaxial feedthrough is not used, and should be protected from damage as a result
of process material. Follow the steps below:
1 Install the Feedthrough.
2 Add the valve bracket (modified) to the desired location as illustrated in Figure
3-3 on page 3-6.
3 Tighten the feedthrough bolts.
4 Install the air fitting to the female thread adapter.
5 Connect 1/8" diameter tubing from the valve output (A) to the feedthrough
fitting. See the CAUTION in section 3.1 above.
6 Attach the valve’s supply (P) (normally closed (NC) port) to the 80-90 PSIG
(5.5 bar - 6.2 bar) [550 kPa - 620 kPa] source of air. Verify that the orifice
(IPN 059-189) has been installed into this NC valve port. (See Figure 3-1b of
Figure 3-1 on page 3-4.)
CrystalSix Operating Manual
NOTE: Maximum temperature for the solenoid valve assembly is 105 °C for
bakeout and operation.
3.3 Electrical and Pneumatic Connections
3.3.1 Electrical
To complete installation of the assembly, make electrical connections where
indicated in Figure 3-3 on page 3-6 to either 24 V(ac) or V(dc). Current required is
approximately 70 mA.
CAUTION
IPN 074-155L
Maximum applied voltage must not exceed 26 V(ac).
3 - 3
CrystalSix Operating Manual
3.3.2 Pneumatic
Figure 3-1 Pneumatic Solenoid Tube Connections
Figure 3-1a
Solenoid Valve
Without Orifice
(As Supplied)
P SUPPLY
(Normally Closed)
80-90 PSIG
AIR SUPPLY
TUBE FITTING
(Provided with Valve)
Figure 3-1b
Solenoid Valve
With Orifice
(Installed by User)
Figure 3-1b shows the proper installation for
all CrystalSix applications.
EXHAUST
(Normally Open)
A OUTPUT
PORT
TO AIR
FITTING OF
FEEDTHROUGH
EXHAUST
(Normally Open)
80-90 PSIG
AIR SUPPLY
3 - 4
P SUPPLY
(Normally Closed)
TUBE FITTING
(Provided with Valve)
A OUTPUT
PORT
ORIFICE (059-189)
(Provided with Accessory Kit 750-268-G1)
TO AIR
FITTING OF
FEEDTHROUGH
IPN 074-155L
CrystalSix Operating Manual
Figure 3-2 Solenoid Valve Assembly
IPN 074-155L
3 - 5
CrystalSix Operating Manual
3 - 6
Figure 3-3 2 3/4” Dual Coaxial Feedthrough & Valve Assembly
IPN 074-155L
4.1 General Precautions
4.1.1 Maintain the Temperature of the Crystal
Periodically measure the water flow rate through the crystal sensor to verify that it
meets or exceeds the value specified in chapter one. Depending upon the
condition of the cooling water used, the addition of an in-line water filtering
cartridge system may be necessary to prevent flow obstructions. Many system
coaters use parallel water supply taps that provide high total flows. An obstruction
or closed valve in the pipe that supplies water to the sensor head would not result
in a noticeable reduction of total flow. The best test is to directly monitor the flow
leaving the sensor.
The crystal requires sufficient water cooling to sustain proper operational and
temperature stability. Ideally, a constant heat load is balanced by a constant flow of
water at a constant temperature. INFICON quartz crystals are designed to provide
the best possible stability under normal operating conditions. No crystal can
completely eliminate the effects of varying heat loads. Sources of heat variation
include radiated energy emanating from the evaporant source and from substrate
heaters.
CrystalSix Operating Manual
Chapter 4
Maintenance
4.1.2 Use the Optimum Crystal Type
Certain materials, especially dielectrics, may not adhere strongly to the crystal
surface and may cause erratic readings. For many dielectrics, adhesion is
improved by using crystals with silver coated electrodes. Gold is preferred for other
applications.
IPN 074-155L
4.1.3 Crystal Concerns when Opening the Chamber
Thick deposits of some materials, such as SiO, Si and Ni will normally peel off the
crystal when it is exposed to air, due to changes in film stress caused by gas
absorption. When peeling material is observed, replace the crystal.
4.2 Crystal Holder Maintenance
In dielectric coating applications, the surface where the crystal contacts the crystal
holder may require periodic cleaning. Since most dielectrics are insulators, any
buildup due to blow-by will eventually cause erratic or poor electrical contact
4 - 1
CrystalSix Operating Manual
between the crystal and the sensor body. This buildup will also cause a reduction
in thermal transfer from the crystal to the sensor body. Both of these will result in
noisy operation and early crystal failure.
Cleaning may be accomplished by gently buffing the crystal holder to crystal
seating surface with a white Scotch-Brite™ pad followed by an ultrasonic bath in
soap solution followed by thorough rinsing in deionized water and drying or by
ultrasonic cleaning and rinsing only.
NOTE: The crystal holder seating surface is machined to a very fine finish (16
micro inches rms). This high quality finish is essential to provide good
electrical and thermal contact with the crystal. Applying excessive force
during cleaning or using overly abrasive cleaning materials may damage
this finish and reduce sensor performance.
4.3 Retainer Spring Adjustment Instructions
Occasionally you may become dissatisfied with the way the ceramic retainer is
secured in the crystal holder. To alter the magnitude of the retaining force, use the
following procedure.
Tools required:
Scribe or other pointed tool.
Needle nose pliers (two required).
1 Position the crystal holder with the crystal aperture oriented downward.
2 Insert the point of the scribe between the inside edge of the crystal holder cavity
and one of the two wire segments that protrude into the crystal cavity (Figure
4-1-a).
3 Using the scribe, gently remove the spring from its groove in the crystal holder
cavity.
4 Consult Figure 4-1-b to determine the direction in which the 'transition point'
must be relocated, to attain the desired retention forces. Moving this transition
point approximately 1/8" is generally sufficient.
5 Grasp the spring, with the pliers, just below the transition point. Using the
second set of pliers, bend the spring as illustrated by the dashed line in Figure
4-1-c to remove the existing transition point.
IPN 074-155L
4 - 2
Figure 4-1 Location of the Transition Point
CrystalSix Operating Manual
6 Use both pliers to form a new transition point according to Figure 4-1-b, thus
returning the spring to a shape similar to the solid line delineation of Figure
4-1-c.
7 Reinstall the spring into the groove provided in the crystal cavity.
8 Determine if the retention force is acceptable and that the wire does not impede
crystal insertion. Repeat these instructions if unacceptable retention forces
persist.
4.4 Alignment Instruction for INFICON CrystalSix Sensor
(IPN 750-446)
During shipment, units may vibrate slightly out of position. This does not mean
IPN 074-155L
alignment is required. The unit will return to the centered position the first time it is
pneumatically activated.
The unit in the shipped condition has been aligned at the factory, no further
alignment is required.
NOTE: Realignment is only required if the unit has been disassembled for any
reason, such as evaporant material removal, or any electrical problem that
may occur, or if the ratchet (item #22 DWG 750-446 shown on Figure 1-3
on page 1-6) is loosened, or removed. This procedure is critical and must
be carefully undertaken.
4 - 3
CrystalSix Operating Manual
CAUTION
Incorrect rotation direction with the stops disabled will
cause permanent damage rendering transducer
inoperative. Refer to Figure 1-2 on page 1-5 for proper
direction of rotation.
The unit, when properly aligned, will index the crystal to a position that is centered
within the aperture provided in the heat shield. The unit must be aligned if this
condition does not exist.
Reference Figure 1-3 on page 1-6.
Equipment Required:
5/64" allen wrench (Included in 750-268 Kit)
1/16" allen wrench (Included in 750-268 Kit)
3/32" allen wrench (Included in 750-268 Kit)
Alignment tool assembly 750-254-G1 (Included in 750-268 kit)
Regulated air supply 80-90 PSIG (5.5 bar - 6.2 bar) [550 kPa - 620 kPa]
NOTE: 75 PSIG (5.2 bar) [520 kPa] for alignment purposes only)
4.4.1 Alignment Instructions
With the required equipment at hand, proceed as follows:
1 Temporarily connect an air supply to the bellows assembly supply tube.
Regulate the air pressure to 75 PSIG (5.2 bar) [520 kPa].
2 Remove the actuator cover (item 15) and related hardware.
3 Insert the 0.125" diameter alignment pin (of the 750-254-G1 assembly) in the
alignment hole (if not already installed) as shown in Figure 4-2 on page 4-6.
The carousel may need to be rotated to achieve the alignment condition shown
in Figure 4-2.
4 Loosen the set screws (two set screws per item) of the ratchet (item #22) and
the stop ratchet (item #38).
5 Loosen the #2 fastener (item #42) that attaches the detent (item #41) to the
bellows assembly item #19). Do NOT remove detent.
IPN 074-155L
4 - 4
6 Actuate the bellows assembly by applying 24 volts to the leads of the solenoid
valve of the solenoid valve assembly. Consult Figure 3-1 on page 3-4 for wiring
assignments. The air pressure must be sustained.
CrystalSix Operating Manual
7 Rotate the ratchet (item #22) counterclockwise until one tooth contacts the pin
of the pawl and actuator stem assembly (item #24). Secure the ratchet to the
0.25" diameter shaft of the carousel assembly (item #5) utilizing the #6-32 x
.125" long socket set screw (item #33).
8 Rotate the stop ratchet (item #38) CW (clockwise) until it contacts the stem of
the pawl and actuator stem assembly (item #24) as shown in Figure 4-3 on
page 4-14. Secure the stop ratchet to the 0.25” diameter shaft of the carousel
utilizing the #6-32 x .125 long socket set screws (item #33).
9 Rest the detent spacing tool on the top of the alignment pin as shown in Figure
4-4 on page 4-14. Position the detent spacing tool (of the 750-254-G1
assembly) between the detent (item #41) and ratchet (item #22) as shown in
Figure 4-4. Pull the detent against the detent spacing tool and subsequently
against the tooth of the ratchet. Tighten the #2 fastener (item #42) to secure the
detent to the bellow assembly.
10 Remove the detent spacing tool.
11 Release air pressure from the bellows assembly (item #19).
12 Remove the 0.125 diameter alignment pin of the 750-254-G1 alignment tool
assembly from the hole.
13 Prior to installation of the crystal holder assembly, check the continuity between
the center contact of the connector and the electrical contacts associated with
the carousel assembly (item #5). Install the crystal holder assembly when
electrical continuity is verified. If electrical continuity is not verified, the unit
should be disassembled (see section 4.4.2 on page 4-6). The electric contact
associated with the carousel will have to be adjusted to ensure electrical
contact when assembled.
14 Press the crystal switch button on the handheld controller or the instrument
front panel. The sensor will advance to the next crystal position. Each crystal
should be centered in the aperture. Repeat step #10 for each crystal position.
Make certain the detent drops in to engage each tooth of the ratchet (item #22)
IPN 074-155L
on each pulse.
15 Secure the actuator cover (item #15) to the top plate (item #10) using two #4-40
x 0.187" long socket head cap screws (items #16 and #17).
16 Install the heat shield (item #8) by first orienting the slot in the heat shield to
accommodate the water lines, then secure the heat shield by applying pressure
near the center of the shield. The shield should snap in place.
17 Regulate the air supply to 80-90 PSIG (5.5 bar - 6.2 bar) [550 kPa - 620 kPa]
for operation.
Unit is now ready for operation.
4 - 5
CrystalSix Operating Manual
Figure 4-2 Alignment Pin Installation
4.4.2 Disassembly Instructions
In the following steps, reference Figure 1-3 on page 1-6 and Figure 4-2 on page
4-6.
1 Remove the two #4 fasteners that secure the actuator cover (item #15) to the
top plate (item #10).
2 Remove the actuator cover. Remove the heat shield (item #8) by gently pulling
on the outside of the shield, the shield should snap off.
3 Remove the extension spring from the pawl and actuator stem assembly (item
#24).
4 Remove the two #4 fasteners (item #20) that secure the bellows assembly
(item #19) to the top plate (item #10).
5 Carefully remove the bellows assembly. The pawl and actuator stem assembly
(item #24) and the detent (item #41) will be removed with the bellows assembly.
6 Using the 1/16" allen wrench, loosen the set screws (item #33) that secures the
ratchet (item #22) and the stop ratchet (item #38) to the carousel assembly
(item #5). Remove the ratchet (item #22) and the stop ratchet (item #38).
7 Remove the three #4 fasteners (item #14) that secure the top plate (item #10)
to the sensor body (item #11).
IPN 074-155L
4 - 6
8 Remove the top plate (item #10).
9 Remove the Teflon washer (item #39).
CAUTION
When removing the top plate make certain the connector
terminal does not become damaged.
10 Remove the compression spring (item #28).
11 Remove the carousel assembly (item #5)
CAUTION
When removing the carousel make certain the 0.126"
diameter ball (item #27) does not become lost.
4.4.3 Assembly Instructions
In the following steps, reference Figure 1-3 on page 1-6 and Figure 4-2 on page
4-6.
CrystalSix Operating Manual
1 Place the 0.126" diameter ball (item #27) in the countersunk hole of the sensor
body (item #11).
2 Attach the corrugated springs (item #31) if not already attached to the sensor
body (item #11), as illustrated in detail "F" of Figure 1-3 on page 1-6, utilizing
the 0-80 pan head screws (item #45).
CAUTION
Be extremely careful when handling the corrugated
springs to avoid distortion. The successful operation of
this apparatus is dependent on this component's
integrity.
IPN 074-155L
3 With the free end of each corrugated spring outside the sensor body, install the
carousel assembly (item #5) so that it rests on the .126" diameter ball. Insert
the corrugated springs into the space between the carousel (item #5) and the
body (item #11). Make certain that the corrugated springs are not damaged
upon installation.
4 Rotate the carousel clockwise until the alignment hole in the carousel lines up
with the alignment hold of the body. Insert the 0.125" diameter alignment pin of
the alignment tool assembly (750-254) provided. Refer to Figure 4-2 on page
4-6.
4 - 7
CrystalSix Operating Manual
5 Place the compression spring (item #28) in the cavity surrounding the 0.25"
diameter shaft of the carousel assembly. Install the Teflon washer (item #39)
onto the.25" diameter shaft.
6 With the connector facing outward, pass the top plate (item #10) over the 0.25"
diameter shaft of the carousel assembly (item #5) and the .125" diameter
alignment pin.
7 Secure the top plate to the sensor body utilizing the three #4-40 screws (items
#14 and 17).
8 Install the pawl and actuator stem assembly (item #24) into the bellows
assembly (item #19) by threading the actuator stem into the mating hole
located in the bore of the bellows assembly. Continue to thread the actuator
stem until the shoulder of the actuator stem is approximately .035" away from
the bellows assembly. This .035" distance specification is for reference only;
the actuator stem position may have to be adjusted to obtain the desired
condition, as illustrated in Figure 1-3 on page 1-6.
9 Fasten the bellows assembly to the top plate utilizing the two #4-40 x 1.125"
long screws (item #20). Do not tighten the screws. Position the bellows
assembly in such a fashion as to allow the actuator stem to come in contact with
the ball bearings (item #25) as illustrated in Figure 1-3 on page 1-6. Tighten the
screws. Loosen the #2 screw (item #42) which secures the detent to the bellow
assembly (item #19).
10 Slide the ratchet (item #22) and the stop ratchet (item #38) onto the 0.25"
diameter shaft of the carousel assembly (item #5) as illustrated. Do not tighten
the #6-32 set screws (item #33).
11 Attach the loop of the extension spring in the hole provided in the pawl of the
pawl and actuator stem assembly (item #24).
12 Position the ratchet (item #22) such that it engages the pin of the pawl and
actuator stem assembly (item #24).
13 Position the detent (item #41) so it engages the ratchet (item #22).
Unit is now ready to be aligned, refer to section 4.4.1 on page 4-4.
IPN 074-155L
4 - 8
CrystalSix Operating Manual
4.5 Troubleshooting the CrystalSix Sensor
Table 4-1 Troubleshooting
Symptom Cause Remedy
1. Crystal fail signal on
front panel of unit will not
disappear even though
crystal can be seen
through heat shield
aperture.
2. Unit will not advance
when crystal switch key is
pressed.
1a. Damaged Crystal. 1a. Replace crystal.
1b. Loss of electrical
signal.
1b. Check for electrical
continuity between
feedthrough and leaf
springs that make contact
with the crystal holder in
the sensor.* If electrical
problem originates in the
sensor, consult Chapter 4
for disassembly
instructions, if necessary.
* Make certain the leaf
springs in the carousel
assembly are bent up far
enough to contact the
crystal holder when
installed.
2a. Loss of pneumatic
supply, or pressure is
insufficient for proper
2a. Establish air supply
and regulate to 80-90
PSIG for operation.
operation.
2b. Operation has been
impaired as a result of
peeling of the material
accumulated on the face
2b. Consult Chapter 4 for
disassembly instructions
to remove material or to
correct mechanical failure.
of the cover.
3. Crystal not centered in
aperture.
IPN 074-155L
3a. Improper alignment. 3a. Realign per alignment
instructions in Chapter 4.
3b. 0.0225” diameter
orifice not installed inline
to the supply side of the
3b. Install orifice where
shown on Figure 2-3 on
page 2-7.
solenoid valve assembly.
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CrystalSix Operating Manual
Table 4-1 Troubleshooting (continued)
Symptom Cause Remedy
4. Large jumps of
thickness reading during
deposition
5. Crystal ceases to
oscillate during deposition
before it reaches its
“normal life.
4a. Mode hopping due to
4a. Replace crystal.
damaged crystal.
4b. Crystal near the end of
4b. Replace crystal.
its life.
4c. Scratches or foreign
particles on the crystal
holder seating surface.
4c. Replace the crystal
holder (IPN 750-262-G1).
Clean, polish the crystal
seating surface of the
crystal holder.
5a. Crystal is being hit by
small droplets of molten
material from the
5a. Move the sensor
further away from the
evaporant source.
evaporation source.
5b. Damaged crystal. 5b. Change crystal.
5c. Deposition material
built-up on edge of the
5c. Clean the crystal
holder.
crystal holder and
touching the crystal.
5d. Material on crystal
5d. Clean crystal holder.
holder partially masking
full crystal area.
6. Crystal does not
oscillate or oscillates
intermittently (both in
vacuum and in air).
7. Crystal oscillates in
vacuum but stops
oscillation after open to air.
6a. Defective or damaged
crystal.
6b. Existence of electrical
short or poor electrical
contacts.
7a. Crystal was near the
end of its life; opening to
air causes film oxidation,
which increases film
stress.
7b. Excessive moisture
accumulation on the
crystal.
6a. Replace crystal.
6b. Check for electrical
continuity and short in
sensor cable, connector,
contact springs,
feedthroughs.
7a. Replace crystal
IPN 074-155L
7b. Turn off cooling water
to sensor before opening it
to air; flow hot water
through the sensor when
the chamber is open.
4 - 10
CrystalSix Operating Manual
Table 4-1 Troubleshooting (continued)
Symptom Cause Remedy
8. Thermal instability:
large changes in thickness
reading during source
warm-up (usually causes
thickness reading to
decrease) and after the
termination of deposition
(usually causes thickness
reading to increase)
8a. Crystal not properly
seated.
8a. Check and clean
crystal seating surface of
the crystal holder.
8b. Excessive heat input
to the crystal.
8b. If heat is due to
radiation from the
evaporation source, move
sensor further away from
source and use sputtering
crystals for better thermal
stability.
8c. No cooling water. 8c. Check cooling water
flow rate. Flow rate should
be minimum of 150-200
cc/min @ 30 °C max.
8d. Poor thermal transfer
from water tube to body.
8d. Use a new water tube
whenever the clamping
assembly has been
removed from the body. If
a new water tube is not
available, use a single
layer of common
aluminum foil between the
cooling tube and the
sensor body, if your
process allows.
IPN 074-155L
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CrystalSix Operating Manual
Table 4-1 Troubleshooting (continued)
Symptom Cause Remedy
9. Poor thickness
reproducibility
10. Sensor jamming 10a Crystal holders come
9a. Erratic source
emission characteristics.
9b. Material does not
adhere to the crystal.
loose and jam sensor
during rotation. May be
caused by absence of
orifice in airline.
10b. Electrical contacts on
carousel may be damaged
if unit was counter rotated.
9a. Move sensor to a
different location; check
the evaporation source for
proper operating
conditions; insure
relatively constant pool
height and avoid tunneling
into the melt.
9b. Check the cleanliness
of the crystal surface;
evaporate an intermediate
layer of proper material on
the crystal to improve
adhesion.
10a. Check for orifice, see
Chapter 3.
10b. Replace contacts.
4.6 Replacing the Bellows Assembly
[lPN 750-286-P2]
Reference Figure 1-3 on page 1-6.
Equipment required:
1 /16" allen wrench
3/32" allen wrench
Alignment tool assembly 750-254-G1
Regulated air supply 80-90 PSIG (5.5 bar - 6.2 bar) [550 kPa - 620 kPa]
1 Remove the two #4-40 fasteners that secure the actuator cover (item #15) to
the top plate (item #10). Remove the heat shield (item #8) by gently pulling on
the outside circumference of the shield. The shield should snap off.
2 Advance the carousel (item #5) using the crystal switch button on the handheld
controller or on the controller front panel as many times as necessary until the
alignment holes in the sensor body (item #11), carousel assembly (item #5) and
the top plate (item #10) coincide.
IPN 074-155L
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CrystalSix Operating Manual
3 Insert the .125" diameter alignment pin into the alignment hole, as shown in
Figure 4-2 on page 4-6.
The bellows assembly will be removed at this time. Proceed as follows:
4 Remove the extension spring from the pawl and actuator stem assembly (item
#24).
5 Remove the two #4 fasteners (item #20) that secure the bellows assembly
(item #19) to the top plate (item #10).
6 Carefully remove the bellows assembly. The pawl and actuator stem assembly
(item #24) and the detent (item #41) will be removed with the bellows assembly.
7 Using the 1/16" allen wrench, loosen the 6-32 set screws (item #33) that
secures the ratchet (item #22) and the stop ratchet (item #38) to the carousel
assembly (item #5). Remove the stop ratchet (item #38) and the ratchet (item
#22).
8 Thread the pawl and actuator stem assembly (item #24) out of the bore of the
bellows assembly by rotating the pawl and actuator stem assembly in a
counterclockwise direction. Detach the detent (item #41) and related hardware
(items 40, 42-44) from the bellows assembly (item #19) by removing the #2
fastener (item #42).
9 Discard the bellows assembly.
10 Install the pawl and actuator stem assembly (item #24) into the new bellows
assembly by threading the actuator stem into the mating hold located in the
bore of the bellows assembly. Continue to thread the actuator stem until the
shoulder of the actuator stem is approximately .035" away from the bellows
assembly. This.035" distance specification is for reference only; the actuator
stem position may have to be adjusted to obtain the desired condition as
illustrated in Figure 1-3 on page 1-6.
11 Fasten the bellows assembly to the top plate utilizing the two #4-40 x 1.125"
long screws. Do not tighten the screws. Position the bellows assembly in such
IPN 074-155L
a fashion as to allow the actuator stem to come in contact with the ball bearings
(item #25) as illustrated. Tighten the screws.
12 Slide the ratchet (item #22) onto the 0.25" diameter shaft of the carousel
assembly (item #5). Do not tighten the #6-32 set screw (item #33). Slide the
ratchet (item #22) onto the .25" diameter of the carousel assembly. Do not
tighten the #6-32 set screws.
13 Attach the extension spring in the hole provided in the pawl of the pawl and
actuator stem assembly (item #24).
14 Position the ratchet (item #22) such that it engages the pin of the pawl and
actuator stem assembly (item #24).
4 - 13
CrystalSix Operating Manual
15 Attach the detent and related hardware (items 40, 42-44) to the new bellows
assembly. Do not tighten. Position the detent (item #41) so that it engages the
ratchet (item #22).
Unit is now ready to be aligned. Refer to section 4.4.1 on page 4-4 for alignment
instructions.
Figure 4-3 Setting the Stop Ratchet
Figure 4-4 Setting the Detent
IPN 074-155L
4 - 14
4.7 How To Contact Customer Support
Worldwide support information regarding:
Technical Support, to contact an applications engineer with questions
regarding INFICON products and applications, or
Sales and Customer Service, to contact the INFICON Sales office nearest you,
or
Repair Service, to contact the INFICON Service Center nearest you,
is available at www.inficon.com.
If you are experiencing a problem with your instrument, please have the following
information readily available:
the serial number for your instrument,
a description of your problem,
an explanation of any corrective action that you may have already attempted,
and the exact wording of any error messages that you may have received.
To contact Customer Support, see Support at www.inficon.com.
CrystalSix Operating Manual
4.8 Returning Your Instrument to INFICON
Do not return any component of your instrument to INFICON without first speaking
with a Customer Support Representative. You must obtain a Return Material
Authorization (RMA) number from the Customer Support Representative.
If you deliver a package to INFICON without an RMA number, your package will be
held and you will be contacted. This will result in delays in servicing your
instrument.
Prior to being given an RMA number, you may be required to complete a
Declaration Of Contamination (DOC) form if your instrument has been exposed to
process materials. DOC forms must be approved by INFICON before an RMA
IPN 074-155L
number is issued. INFICON may require that the instrument be sent to a
designated decontamination facility, not to the factory. Failure to follow these
procedures will delay the repair of your instrument.
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CrystalSix Operating Manual
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IPN 074-155L
CrystalSix Operating Manual
Chapter 5
Feedthrough Outline Drawings
The following Feedthrough Outline Drawings provide dimensions and other
pertinent data necessary for planning equipment configurations.
Figure 5-1 1" Crystal feedthrough w/airtube (lPN 750-030-GI)
(contains one coaxial, two water tubes and one air tube)
IPN 074-155L
5 - 1
CrystalSix Operating Manual
Figure 5-2 Standard 2 3/4" CONFLAT® flange (002-080)
(contains two coaxials, two water tubes and one air tube)
5 - 2
IPN 074-155L
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