INFICON Crystal 12 Sensor User Manual

OPERATING MANUAL

Crystal12

Sensor

IPN 074-398-P1

™

OPERATING MANUAL

Crystal12

Sensor

IPN 074-398-P1A

™

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INFICON®, Crystal12™, and Composer® are trademarks of INFICON Inc.

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WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products
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Crystal12 Sensor Operating Manual

T able Of Contents

Chapter 1

Sensor Specifications

1.1 Specifications for Crystal12 Sensor 750-667-G1 . . . . . . . . . . . . . . . . . . . . .1-1

1.1.1 Installation Requirements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2

1.1.1.1 Feedthrough. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2

1.1.1.2 Other. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2

1.1.1.3 Utilities . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2

1.1.2 Materials. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3

1.1.3 Unpacking Instructions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3

1.1.4 Inventory. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-4

1.1.4.1 Standard. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-4

1.1.4.2 Options. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-4

1.2 Using this Manual. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-12

1.2.1 Symbols and their Definitions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-12

1.3 How to Contact Customer Support. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-13

1.3.1 Returning Your Crystal12 Sensor to INFICON. . . . . . . . . . . . . . . . . . . . . .1-13

Chapter 2

Sensor Installation

2.1 Crystals in the Crystal12 Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-1

2.1.1 Handle the Crystal with Care . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-1

2.1.2 Replacing Crystals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-1

2.2 Pre-installation Sensor Check . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-2

2.2.1 Cygnus Deposition Controller. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-3

2.3 General Guidelines for Crystal12 Sensor. . . . . . . . . . . . . . . . . . . . . . . . . . .2-3

IPN 074-398-P1A

2.3.1 Crystal Sensor Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-5

2.4 Crystal12 Sensor Installation when used with Cygnus. . . . . . . . . . . . . . . . .2-7

2.4.1 Changing Crystal Sensor Type and

Programming the Relay Outputs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-7

2.4.2 Wiring the Relay Outputs with Relay I/O Boards

760-162-G1 or 760-162-G1/G2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-9

2.5 Crystal12 Operation when used with a Cygnus . . . . . . . . . . . . . . . . . . . . .2-11

2.5.1 Initialization. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-11

2.5.2 Crystal Switching . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-11

2.6 Crystal12 Sensor Requirement when Not Installed with a Cygnus . . . . . .2-12

TOC - 1

Crystal12 Sensor Operating Manual

Chapter 3

Installation of the Solenoid Valve Assembly

3.1 Installation with 1” Bolts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-1

3.2 Installation with 2 3/4” Feedthrough. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-2

3.3 Electrical and Pneumatic Connections. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3

3.3.1 Electrical. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-3

3.3.2 Pneumatic Solenoid Tube Connections. . . . . . . . . . . . . . . . . . . . . . . . . . . .3-3

Chapter 4

Maintenance

4.1 General Precautions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-1

4.1.1 Maintain the Temperature of the Crystal . . . . . . . . . . . . . . . . . . . . . . . . . . .4-1

4.1.2 Use the Optimum Crystal Type . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-1

4.1.3 Crystal Concerns when Opening the Chamber . . . . . . . . . . . . . . . . . . . . . . 4-1

4.2 Crystal Seat Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-2

4.3 Alignment Instruction for Crystal12 Sensor (IPN 750-667) . . . . . . . . . . . . .4-2

4.3.1 Required Equipment. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-2

4.3.2 Procedure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-3

4.3.3 Replacing the Bellows Assembly (750-286-P2). . . . . . . . . . . . . . . . . . . . . .4-6

4.3.3.1 Equipment required:. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-6

4.3.3.2 Procedure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-6

4.3.4 Replacing the Electrical Connection Assembly . . . . . . . . . . . . . . . . . . . . . . 4-7

4.3.4.1 Equipment Required. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-7

4.3.4.2 Procedure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-7

4.4 Cygnus Status and Error Messages. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-8

4.5 Troubleshooting the Crystal12 Sensor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8

Chapter 5

Feedthrough Outline Drawings

IPN 074-398-P1A

TOC - 2

Crystal12 Sensor Operating Manual

Sensor Specifications

1.1 Specifications for Crystal12 Sensor 750-667-G1

The Crystal12 sensor is a twelve crystal quartz crystal deposition monitor
transducer. When the monitor crystal being used fails, a new crystal is advanced
into position, fully replacing the failed crystal’s function. The mechanism used for
providing this motion is pneumatically powered. The logic for automatic operation
of this transducer is provided with the Cygnus™ Deposition Controller.
See Figure 1-1 and Table 1-1.

Figure 1-1 Crystal12 Sensor

Chapter 1

074-398-P1A

Table 1-1 Sensor Specification

Maximum bakeout temp with no water 130 °C
Maximum operating isothermal

environment temperature with minimum
water flow

Size (maximum envelope) 4.0" (102 mm) dia. x 3.3" (84 mm) high

Water, air and coax length Standard 30" (762 mm)
Crystal exchange Front-loading
Mounting Six #4-40 tapped holes on the back of the

300 °C

4.75" (121 mm) dia. x 3.46" (88 mm) with
optional mounting posts installed

sensor body, six #4-40 tapped holes on
outside circumference. Three #6-32
tapped holes with optional mounting kit.

1 - 1

Crystal12 Sensor Operating Manual

1.1.1 Installation Requirements

1.1.1.1 Feedthrough

 Qty (1) 2-3/4" ConFlat® with two coaxial feedthroughs, two p ass water, one air

IPN 002-080, See Figure 5-2 on page 5-2 or,

 Qty (1) 1" bolt with 1 coaxial feedthrough, two pass water, one air IPN

750-030-G1, see Figure 5-1 on page 5-1.

1.1.1.2 Other

 User to provide mounting structure adequate to support weight of Crystal12

and designed to facilitate removal and replacement with minimal change in
exact position. An optional mounting post kit, IPN 750-670-G1, may be
purchased for this purpose.

CAUTION

Do not mount the Crystal12 unsupported.

1.1.1.3 Utilities

 User to provide vacuum-tight braze joints or connectors for the water and air

tubes.

 V alve assembly for air, IPN 750-420-G1 (not provided), with a 0.022" restrictor

orifice installed by the user . (Orifice included with Crystal12 accessory kit.) See

Table 1-3 on page 1-4.

 XIU or Oscillator designed to interface with the Cygnus controller.

 Minimum water flow 150-200 cc/min, 30 °C max (Do not allow water to freeze).

Coolant should not contain chlorides as stress corrosion cracking may occur.

 Regulated air supply 80-90 PSIG (5.5 bar - 6.2 bar) [550 kPa - 620 kPa]

074-398-P1A

 2 meter maximum length of 1/8" tubing between bellows assembly and the

control valve.

CAUTION

Do not allow water tubes to freeze. This may happen if the
tubes pass through a cryogenic shroud and the fluid’s
flow is interrupted.

1 - 2

1.1.2 Materials

Table 1-2 Materials

Crystal12 Sensor Operating Manual

Plate, Material Shield, Mechanical Parts,
Body and Carousel

Springs, Electrical Contacts Au plated Be-Cu, Au Plate 302 stainless

Water and air tubes S-304, 0.125" (3.2 mm) O.D. x .016"

Connector Stain less steel
Insulators Teflon®, Peek®
Cable Teflon insulated copper plated steel
Crystal 0.550" (13.97 mm) Diameter

1.1.3 Unpacking Instructions

The Crystal12 sensor and accessories are p ackaged in a single cardboard carton
with rigid foam inserts.

Carefully remove the packaged accessories before removing the sensor.
The unit in the shipped condition has been aligned at the factory, no further

alignment is required.

304 type stainless steel

steel

(0.4 mm) Wall Thickness x 30" Lo ng (762
mm) Seamless Stainless Steel Tubing

074-398-P1A

During shipment, units may vibrate slightly out of position. This does not mean
alignment is required. The unit will return to the centered position the first time it is
pneumatically activated.

1 - 3

Crystal12 Sensor Operating Manual

1.1.4 Inventory

1.1.4.1 Standard

In addition to the basic transducer, the complete shipping package includes an
accessory kit (IPN 750-268-G3) which consists of the following:

Table 1-3 Contents of Accessory Kit

Qty IPN Description

X 750-268-G3 Accessory Kit, Crystal12 Sensor
1 750-254-G2 Assembly, Alignment Tool
1 074-5000 CD, Thin Film Manuals
2 008-010-G10 Sensor Crystal 6 MHz (10 crystals per package)
1 059-189 CC-1010-0225 Orifice 0.0225" diameter
2 070-201 #4 Split Lock Washer, Stainless Steel
2 084-032 #4-40x0.375" Long Socket Head Cap Screw, Stainless Steel
2 084-039 #4-40x0.500" Long Socket Head Cap Screw, Stainless Steel

1.1.4.2 Options

Table 1-4 Options

2 084-084 #4-40x0.688" Long Socket Head Cap Screw, Stainless Steel
1 070-828 Hex Wrench 1/16" SC9-3
1 070-829 Hex Wrench 3/32" SC9-5
1 070-1175 Hex Wrench 5/64" SC9-4
1 750-037-G1 Spring Tube Bender Kit
1 750-191-G1 Molybdenum Disulfide in Alcohol

Qty IPN Description

074-398-P1A

1 750-670-G1 Mounting Post Kit
1 750-420-G1 3-Way Solenoid Valve Assembly

1 - 4

Crystal12 Sensor Operating Manual

074-398-P1A

Figure 1-2 Outline of Crystal12 Sensor - Page 1 of 2

1 - 5

Crystal12 Sensor Operating Manual

1 - 6

Figure 1-3 Outline of Crystal12 Sensor - Page 2 of 2

074-398-P1A