INFICON Cool Drawer Single Sensor User Manual
C
over Page
OPERATING MANUAL
TM
Cool Drawer
Single and Dual Sensors
PN 074-609-P1A
www.inficon.com reachus@inficon.com
©2014 INFICON
®
OPERATING MANUAL
Title P
Cool Drawer
Single and Dual Sensors
PN 074-609-P1A
age
TM
Trademarks
The trademarks of the products mentioned in this manual are held by the companies that
produce them.
INFICON® is a trademark of INFICON Inc.
ConFlat® is a registered trademark of Varian Corporation.
Swagelok® is a registered trademark of Swagelok Co.
Scotch-Brite® is a registered trademark of 3M.
All other brand and product names are trademarks or registered trademarks of their respective companies.
Disclaimer
The information contained in this manual is believed to be accurate and reliable. However, INFICON assumes
no responsibility for its use and shall not be liable for any special, incidental, or consequential damages related
to the use of this product.
Due to our continuing program of product improvements, specifications are subject to change without notice.
Copyright
©2014 All rights reserved.
Reproduction or adaptation of any part of this document without permission is unlawful.
Warranty
WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products
manufactured by it, or by an affiliated company and sold by it, and described on
the reverse hereof, to be, for the period of warranty coverage specified below, free
from defects of materials or workmanship under normal proper use and service.
The period of warranty coverage is specified for the respective products in the
respective Seller instruction manuals for those products but shall not be less than
one (1) year from the date of shipment thereof by Seller. Seller's liability under this
warranty is limited to such of the above products or parts thereof as are returned,
transportation prepaid, to Seller's plant, not later than thirty (30) days after the
expiration of the period of warranty coverage in respect thereof and are found by
Seller's examination to have failed to function properly because of defective
workmanship or materials and not because of improper installation or misuse and
is limited to, at Seller's election, either (a) repairing and returning the product or
part thereof, or (b) furnishing a replacement product or part thereof, transportation
prepaid by Seller in either case. In the event Buyer discovers or learns that a
product does not conform to warranty, Buyer shall immediately notify Seller in
writing of such non-conformity, specifying in reasonable detail the nature of such
non-conformity. If Seller is not provided with such written notification, Seller shall
not be liable for any further damages which could have been avoided if Seller had
been provided with immediate written notification.
THIS WARRANTY IS MADE AND ACCEPTED IN LIEU OF ALL OTHER
WARRANTIES, EXPRESS OR IMPLIED, WHETHER OF MERCHANTABILITY OR
OF FITNESS FOR A PARTICULAR PURPOSE OR OTHERWISE, AS BUYER'S
EXCLUSIVE REMEDY FOR ANY DEFECTS IN THE PRODUCTS TO BE SOLD
HEREUNDER. All other obligations and liabilities of Seller, whether in contract or
tort (including negligence) or otherwise, are expressly EXCLUDED. In no event
shall Seller be liable for any costs, expenses or damages, whether direct or
indirect, special, incidental, consequential, or other, on any claim of any defective
product, in excess of the price paid by Buyer for the product plus return
transportation charges prepaid.
No warranty is made by Seller of any Seller product which has been installed,
used or operated contrary to Seller's written instruction manual or which has been
subjected to misuse, negligence or accident or has been repaired or altered by
anyone other than Seller or which has been used in a manner or for a purpose for
which the Seller product was not designed nor against any defects due to plans or
instructions supplied to Seller by or for Buyer.
This manual is intended for private use by INFICON® Inc. and its customers.
Contact INFICON before reproducing its contents.
NOTE: These instructions do not provide for every contingency that may arise in
connection with the installation, operation or maintenance of this equipment.
Should you require further assistance, please contact INFICON.
www.inficon.com reachus@inficon.com
Cool Drawer Single and Dual Sensors Operating Manual
Table Of Contents
Cover Page
Title Page
Trademarks
Disclaimer
Copyright
Warranty
Chapter 1
Introduction
1.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
1.2 Definition of Notes, Cautions and Warnings. . . . . . . . . . . . . . . . . . . . . . . . .1-2
1.3 How to Contact INFICON . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3
1.3.1 Returning Cool Drawer Sensor to INFICON. . . . . . . . . . . . . . . . . . . . . . . . .1-3
1.4 Unpacking and Inspection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-4
1.5 Cool Drawer Single Sensor (PN CDS-XXXXX) . . . . . . . . . . . . . . . . . . . . . .1-4
1.5.1 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
1.5.1.1 Size. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-5
1.5.2 Installation Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
1.5.3 Materials . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
1.5.4 Specifications for the Single Shutter. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
1.5.5 Parts and Options Overview (Single Sensor) . . . . . . . . . . . . . . . . . . . . . . . .1-8
1.5.6 Single Sensor Drawings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-8
1.6 Cool Drawer Dual Sensor (PN CDD-XXXX). . . . . . . . . . . . . . . . . . . . . . . . 1-11
1.6.1 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11
1.6.1.1 Size. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-12
PN 074-609-P1A
1.6.2 Installation Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-13
1.6.3 Materials . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-13
1.6.4 Parts and Options Overview (Dual Sensor) . . . . . . . . . . . . . . . . . . . . . . . . 1-14
1.6.5 Dual Sensor Drawings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-15
1.7 Replacement Parts and Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-15
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Cool Drawer Single and Dual Sensors Operating Manual
Chapter 2
Sensor Installation
2.1 Pre-installation Sensor Check . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
2.1.1 Sensor Installation with a XTC/3™, IC6™ or
Cygnus 2™ Deposition Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
2.1.2 Sensor Installation with a SQM-160™, SQC-310™, SQM-242™,
IQM-233™, STM-2XM™, or STM-3™ Deposition Controller/Monitor . . . . . 2-2
2.1.3 Sensor Installation with a Q-pod™ or STM-2™ Deposition Monitor . . . . . . 2-3
2.2 General Guidelines. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
2.2.1 Sensor Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5
2.2.1.1 Sensor Installation Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6
2.3 Bending Tubes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7
2.4 Installing the Standard and Right Angle Sensors. . . . . . . . . . . . . . . . . . . . . 2-8
2.5 Sensor Shutter Function Check . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8
2.6 Shutter Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9
2.6.1 Dual Sensor Head Shutter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9
2.6.2 Single Sensor Head Shutter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9
Chapter 3
Installation of the Solenoid Valve
3.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
3.2 Installation with 2.54 cm (1 in.) Bolts Feedthrough . . . . . . . . . . . . . . . . . . . 3-1
3.3 Installation with 7 cm (2-3/4 in.) Feedthrough . . . . . . . . . . . . . . . . . . . . . . . 3-2
3.4 Electrical and Pneumatic Connections. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
3.4.1 Electrical. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
3.5 Solenoid Valve Drawing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
Chapter 4
Troubleshooting and Maintenance
4.1 Troubleshooting Guide. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.1.1 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.1.2 Diagnostic Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
4.1.2.1 Measurement System Diagnostic Procedure. . . . . . . . . . . . . . . . . . . . . . . . 4-2
4.1.2.2 Feedthrough Diagnostic Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3
4.1.2.3 System Diagnostics Pass But Crystal Fail Message Remains. . . . . . . . . . . 4-4
4.2 Symptom, Cause, Remedy . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5
4.3 General Precautions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7
4.3.1 Handle the Crystal with Care . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7
4.3.2 Maintain the Temperature of the Crystal . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8
4.3.3 Use the Optimum Crystal Type . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8
4.3.4 Crystal Concerns when Opening the Chamber . . . . . . . . . . . . . . . . . . . . . . 4-8
PN 074-609-P1A
TOC - 2
Cool Drawer Single and Dual Sensors Operating Manual
4.3.5 Sputtering System Concerns . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-9
4.3.6 Leaf Spring Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-9
4.4 Crystal Replacement Instructions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10
4.5 Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-12
4.5.1 Crystal Drawer Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-12
PN 074-609-P1A
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Cool Drawer Single and Dual Sensors Operating Manual
This page is intentionally blank.
TOC - 4
PN 074-609-P1A
1.1 Introduction
INFICON Cool Drawer
durability combined with excellent thermal stability. The Cool Drawer design allows
crystal installation into the sensor from the side, convenient for systems with
insufficient room for front load crystal installation. Sensors can be ordered in a
sensor and feedthrough combination that can be either welded or assembled with
O-ring compression fittings.
Figure 1-1 Cool Drawer sensors
Cool Drawer Single and Dual Sensors Operating Manual
Introduction
TM
sensors, see Figure 1-1, offer proven reliability and
Chapter 1
PN 074-609-P1A
The Cool Drawer sensor comes in two styles: Single or Dual. Each style is available
in both Standard and Right Angle orientation.
Standard orientation: Cooling tubes are aligned parallel to the crystal face.
Typically installed from the side or bottom of the chamber.
Right Angle orientation: Cooling tubes are aligned perpendicular to the crystal
face. Typically installed from the top of the chamber.
Sensors can be ordered with a pneumatically driven crystal shutter to protect the
crystal during source warm up, or when the sensor is not used during deposition of
an alternate material, or to extend crystal life when used with sampling.
NOTE: A crystal shutter is standard on dual sensors.
1 - 1
Cool Drawer Single and Dual Sensors Operating Manual
CAUTION
WARNING
1.2 Definition of Notes, Cautions and Warnings
Before using this manual, please take a moment to understand the Cautions and
Warnings used throughout. They provide pertinent information that is useful in
achieving maximum instrument efficiency while ensuring personal safety.
NOTE: Notes provide additional information about the current topic.
Failure to heed these messages could result in damage
to the sensor.
Failure to heed these messages could result in personal
injury.
1 - 2
PN 074-609-P1A
Cool Drawer Single and Dual Sensors Operating Manual
1.3 How to Contact INFICON
Worldwide customer support information is available under Contact >> Support
Worldwide at www.inficon.com
Sales and Customer Service
Technical Support
Repair Service
If experiencing a problem with a Cool Drawer Sensor, please have the following
information readily available:
The Lot Identification Code, located on the side surface of the sensor head.
A description of the problem.
An explanation of any attempts at corrective action.
Exact wording of any error messages received.
1.3.1 Returning Cool Drawer Sensor to INFICON
Do not return any component of the sensor to INFICON without first speaking with
a Customer Support Representative. A Return Material Authorization (RMA)
number must be obtained from the Customer Support Representative.
If a package is delivered to INFICON without an RMA number, the package will be
held and customer contact will be made. This will result in delays in servicing the
sensor.
Prior to being given an RMA number, a Declaration Of Contamination (DOC) form
may need to be completed if the sensor has been exposed to process materials.
DOC forms must be approved by INFICON before an RMA number is issued.
INFICON may require that the sensor be sent to a designated decontamination
facility, not to the factory.
PN 074-609-P1A
1 - 3
Cool Drawer Single and Dual Sensors Operating Manual
1.4 Unpacking and Inspection
1 If the Cool Drawer sensor has not been removed from its packaging, do so now.
The sensor and accessories are packaged in a single cardboard carton with a
rigid foam insert. Carefully remove the packaged accessories before removing
the sensor.
2 Carefully examine the sensor for damage that may have occurred during
shipping. This is especially important if obvious rough handling is noticed on the
outside of the container. Immediately report any damage to the carrier and to
INFICON.
NOTE: Do not discard the packing materials until inventory has been taken
and the sensor has been successfully installed.
3 Take an inventory of the order by referring to the order invoice and the
information contained in section 1.5.5 or section 1.6.4.
4 Install the sensor by following the installation instructions found in Chapter 2,
Sensor Installation.
For additional information or technical assistance, contact INFICON (refer to
section 1.3 on page 1-3).
1.5 Cool Drawer Single Sensor (PN CDS-XXXXX)
Figure 1-2 Standard sensor
Figure 1-3 Right Angle sensor
PN 074-609-P1A
1 - 4
1.5.1 Specifications
Maximum bakeout temperature with no water
O-ring compression fitting terminations . . . . . . . . . . . . . . . .165°C
Welded terminations. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .200°C
Maximum operating isothermal environment
temperature with minimum water flow
O-ring compression fitting terminations . . . . . . . . . . . . . . . .300°C
Welded terminations. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .450°C
1.5.1.1 Size
Maximum envelope
without shutter . . . . . . . . . . . . . . . . . Standard Sensor
Cool Drawer Single and Dual Sensors Operating Manual
3.38 x 3.07 x 1.80 cm
(1.33 x 1.21 x 0.71 in.)
See Figure 1-5 on page 1-9.
Right Angle Sensor
3.24 x 3.63. x 1.80 cm
(1.27 x 1.43 x 0.71 in.)
See Figure 1-5 on page 1-9.
Length of sensor. . . . . . . . . . . . . . . . 10.2 to 66.0 cm (4 to 26 in.)
Water and conduit tubes. . . . . . . . . . 3.175 mm (1/8 in.) OD
seamless stainless steel,
0.406 mm (0.016 in.) wall thickness
Crystal exchange . . . . . . . . . . . . . . . Side loading, self-contained package
Crystal . . . . . . . . . . . . . . . . . . . . . . . 14 mm (0.550 in.) diameter
Mounting. . . . . . . . . . . . . . . . . . . . . . Two #4-40 tapped holes on the back of the
sensor body
PN 074-609-P1A
1 - 5
Cool Drawer Single and Dual Sensors Operating Manual
CAUTION
WARNING
1.5.2 Installation Requirements
Feedthrough. . . . . . . . . . . . . . . . . . . INFICON provided CF40 feedthrough or
Other . . . . . . . . . . . . . . . . . . . . . . . . XIU or oscillator to match specific
Water Flow Rate. . . . . . . . . . . . . . . . Minimum 150 to 200 cm
Water Quality . . . . . . . . . . . . . . . . . . Coolant should not contain chlorides as
2.54 cm (1 in.) bolt feedthrough
controller/monitor
CDS-X1XXX only: Solenoid Valve for air
PN 750-420-G1 (see section 3.1 on page
3-1)
3
/min,
30°C maximum
stress corrosion cracking may occur.
Extremely dirty water may result in loss of
cooling capacity.
Do not allow water tubes to freeze. This may happen if the
tubes pass through a cryogenic shroud and the flow of
fluid is interrupted.
Air (shutttered sensors only) . . . . . . 55 PSIG {70 PSIA} (3.8 bar)
[379 kPa](minimum)
60 PSIG {75 PSIA} (4.1 bar)
[414 kPa](maximum)
Do not exceed 100 PSIG (115 PSIA) (6.9 bar) [689 kPa].
Connection to excessive pressure may result in personal
injury or equipment damage.
PN 074-609-P1A
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