INFICON CI-100 User Manual

OPERATING MANUAL

CI-100

Crucible Indexer

IPN 074-544-P1B

OPERATING MANUAL

www.inficon.com [e-mail]

©2012 INFICON

®

CI-100

Crucible Indexer

IPN 074-544-P1B

Trademarks

The trademarks of the products mentioned in this manual are held by the companies that
produce them.

Windows® is a registered trademarks of Microsoft Corporation.

All other brand and product names are trademarks or registered trademarks of their respective companies.

Disclaimer

The information contained in this manual is believed to be accurate and reliable. However, INFICON assumes
no responsibility for its use and shall not be liable for any special, incidental, or consequential damages related
to the use of this product.

Due to our continuing program of product improvements, specifications are subject to change without notice.

Copyright

©2012 All rights reserved.
Reproduction or adaptation of any part of this document without permission is unlawful.

Warranty

WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products
manufactured by it, or by an affiliated company and sold by it, and described on
the reverse hereof, to be, for the period of warranty coverage specified below, free
from defects of materials or workmanship under normal proper use and service.
The period of warranty coverage is specified for the respective products in the
respective Seller instruction manuals for those products but shall not be less than
two (2) years from the date of shipment thereof by Seller. Seller's liability under
this warranty is limited to such of the above products or parts thereof as are
returned, transportation prepaid, to Seller's plant, not later than thirty (30) days
after the expiration of the period of warranty coverage in respect thereof and are
found by Seller's examination to have failed to function properly because of
defective workmanship or materials and not because of improper installation or
misuse and is limited to, at Seller's election, either (a) repairing and returning the
product or part thereof, or (b) furnishing a replacement product or part thereof,
transportation prepaid by Seller in either case. In the event Buyer discovers or
learns that a product does not conform to warranty, Buyer shall immediately notify
Seller in writing of such non-conformity, specifying in reasonable detail the nature
of such non-conformity. If Seller is not provided with such written notification,
Seller shall not be liable for any further damages which could have been avoided if
Seller had been provided with immediate written notification.

THIS WARRANTY IS MADE AND ACCEPTED IN LIEU OF ALL OTHER
WARRANTIES, EXPRESS OR IMPLIED, WHETHER OF MERCHANTABILITY OR
OF FITNESS FOR A PARTICULAR PURPOSE OR OTHERWISE, AS BUYER'S
EXCLUSIVE REMEDY FOR ANY DEFECTS IN THE PRODUCTS TO BE SOLD
HEREUNDER. All other obligations and liabilities of Seller, whether in contract or
tort (including negligence) or otherwise, are expressly EXCLUDED. In no event
shall Seller be liable for any costs, expenses or damages, whether direct or
indirect, special, incidental, consequential, or other, on any claim of any defective
product, in excess of the price paid by Buyer for the product plus return
transportation charges prepaid.

No warranty is made by Seller of any Seller product which has been installed,
used or operated contrary to Seller's written instruction manual or which has been
subjected to misuse, negligence or accident or has been repaired or altered by
anyone other than Seller or which has been used in a manner or for a purpose for
which the Seller product was not designed nor against any defects due to plans or
instructions supplied to Seller by or for Buyer.

This manual is intended for private use by INFICON® Inc. and its customers.
Contact INFICON before reproducing its contents.

NOTE: These instructions do not provide for every contingency that may arise in
connection with the installation, operation or maintenance of this equipment.
Should you require further assistance, please contact INFICON.

www.inficon.com [e-mail]

Chapter 1

1.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-1

1.2 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2

1.2.1 Definition of Notes, Cautions and Warnings. . . . . . . . . . . . . . . . . . . . . . . . . 1-2

1.2.2 General Safety Information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3

1.3 How To Contact Customer Support . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3

1.4 Returning Your Instrument to INFICON . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4

1.5 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4

1.5.1 Motor Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4

1.5.2 Controller Specifications. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5

1.6 Unpacking and Inspection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5

1.7 Parts and Options Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6

1.7.1 Base Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6

1.7.2 Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6

CI-100 Crucible Indexer Operating Manual

Table Of Contents

Trademarks

Disclaimer

Copyright

Introduction

Chapter 2

Installation

2.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-1

2.2 Mounting the Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1

2.2.1 Full Rack Extender . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1

IPN 074-544-P1B

2.2.2 Half Rack Adapter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-2

2.3 Mounting the Motor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-2

2.3.1 Drive Mount with Bracket . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-2

2.3.2 Drive Mount without Bracket. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-3

2.4 Electrical Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4

2.5 Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4

2.6 Binary I/O Connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5

2.7 BCD I/O Connector. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-6

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CI-100 Crucible Indexer Operating Manual

2.8 Interfacing to INFICON Deposition Controllers . . . . . . . . . . . . . . . . . . . . . . 2-8

2.8.1 Interfacing to SQC-310 Deposition Controller . . . . . . . . . . . . . . . . . . . . . . . 2-8

2.8.1.1 BCD I/O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8

2.8.1.2 Binary I/O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8

2.8.2 Interfacing to IC6 Deposition Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9

2.9 RS-232/LAN Connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-10

2.10 Motor Connector. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-10

Chapter 3

Operation

3.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1

3.2 Controller Front Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1

3.3 Controller Rear Panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3

3.4 Custom Configuration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5

Chapter 4

Computer Interface

4.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1

4.2 Control Program. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1

4.3 Command Protocol. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3

4.4 Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3

4.4.1 @ . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3

4.4.2 A. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3

4.4.3 B. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4

4.4.4 C. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4

4.4.5 D. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5

4.4.6 F . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5

4.4.7 G. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5

4.4.8 I . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5

4.4.9 M . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6

IPN 074-544-P1B

TOC - 2

1.1 Introduction

The CI-100 Crucible Indexer is used to rotate multi-pocket electron beam sources
through a rotary vacuum feedthrough. The CI-100 consists of a 3.5 in. half-rack
Controller, Motor Drive, Mounting Bracket, and interconnecting cable.

Figure 1-1 CI 100 Crucible Indexer

CI-100 Crucible Indexer Operating Manual

Chapter 1

Introduction

In addition to the capabilities you expect in a crucible indexer, the CI-100 has these
unique features:

 160 oz-in. torque at all operating speeds

 Direct drive—no pulleys to set or adjust

 Electronic calibration of each pocket – no mechanical adjustments

 Eight pre-defined pocket/banana configurations

IPN 074-544-P1B

 Custom user configuration—program any pocket/banana layout

 Universal 1 in. Bolt and 2 ¾ in. CF mounting bracket included

 Small, cool-running motor drive

 Digital I/O compatible with existing indexers

1 - 1

CI-100 Crucible Indexer Operating Manual

CAUTION

WARNING

WARNING - Risk Of Electric Shock

1.2 Safety

1.2.1 Definition of Notes, Cautions and Warnings

When using this manual, please pay attention to the Notes, Cautions, and
Warnings found throughout. For the purposes of this manual they are defined as
follows:

NOTE: Pertinent information that is useful in achieving maximum efficiency when

followed.

Failure to heed these messages could result in damage
to the instrument.

Failure to heed these messages could result in personal
injury.

Dangerous voltages are present which could result in
personal injury.

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1 - 2

1.2.2 General Safety Information

WARNING - Risk Of Electric Shock

CAUTION

Do not open the instrument case! There are no
user-serviceable components within the instrument
case.

Dangerous voltages may be present whenever the power
cord or external input/relay connectors are present.

Refer all maintenance to qualified personnel.

This instrument contains delicate circuitry which is
susceptible to transient power line voltages. Disconnect
the line cord whenever making any interface
connections. Refer all maintenance to qualified
personnel.

CI-100 Crucible Indexer Operating Manual

1.3 How To Contact Customer Support

Worldwide support information regarding:

 Technical Support, to contact an applications engineer with questions

regarding INFICON products and applications, or

 Sales and Customer Service, to contact the INFICON Sales office nearest you,

or

 Repair Service, to contact the INFICON Service Center nearest you,

IPN 074-544-P1B

is available at www.inficon.com.

If you are experiencing a problem with your instrument, please have the following
information readily available:

 the serial number for your instrument,

 a description of your problem,

 an explanation of any corrective action that you may have already attempted,

 and the exact wording of any error messages that you may have received.

To contact Customer Support, see Support at www.inficon.com.

1 - 3

CI-100 Crucible Indexer Operating Manual

1.4 Returning Your Instrument to INFICON

Do not return any component of your instrument to INFICON without first speaking
with a Customer Support Representative. You must obtain a Return Material
Authorization (RMA) number from the Customer Support Representative.

If you deliver a package to INFICON without an RMA number, your package will be
held and you will be contacted. This will result in delays in servicing your
instrument.

Prior to being given an RMA number, you may be required to complete a
Declaration Of Contamination (DOC) form if your instrument has been exposed to
process materials. DOC forms must be approved by INFICON before an RMA
number is issued. INFICON may require that the instrument be sent to a
designated decontamination facility, not to the factory.

1.5 Specifications

1.5.1 Motor Specifications

Motor Type . . . . . . . . . . . . . . . . . . . . two phase, micro-stepper

Motor Drive. . . . . . . . . . . . . . . . . . . . direct drive

Torque . . . . . . . . . . . . . . . . . . . . . . . 160 oz-in

Speeds . . . . . . . . . . . . . . . . . . . . . . . 20 speed options

Display Hi Speed (RPM) Lo Speed (RPM)

1 0.5 0.05

2 0.6 0.06

3 0.8 0.08

4 1.0 0.10

5 1.2 0.12

6 1.5 0.15

7 1.9 0.19

8 2.4 0.24

9 3.0 0.30

0 3.7 0.37

Resolution . . . . . . . . . . . . . . . . . . . . 1.8°

Repeatability. . . . . . . . . . . . . . . . . . . 0.25°

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1 - 4

Size (H x W x D). . . . . . . . . . . . . . . . 3.5 x 3.5 X 4.8 in. (89 x 89 x 122 mm)

Weight . . . . . . . . . . . . . . . . . . . . . . . 3.2 lbs. (1.5 kg)

Power . . . . . . . . . . . . . . . . . . . . . . . . 12 W (supplied by Controller)

1.5.2 Controller Specifications

Pockets. . . . . . . . . . . . . . . . . . . . . . . Up to 8

Inputs/Outpus . . . . . . . . . . . . . . . . . . Binary or BCD Encoded

Communication . . . . . . . . . . . . . . . . RS-232 only

Size (H x W x D). . . . . . . . . . . . . . . . 3.5 x 8.4 x 7.8 in. (88 x 213 x 197 mm)

Weight . . . . . . . . . . . . . . . . . . . . . . . 6 lbs. (2.7 kg)

Power . . . . . . . . . . . . . . . . . . . . . . . . 20 W

NOTE: The CI-100 uses a four rotation full cycle. This means that after four full

turns of the motor, it is considered to be back at the home position. Crucible
gearing can be adjusted to match this requirement. For example, if you
have a four discrete pocket crucible, the gearing should be designed so
that one full turn of the CI-100 motor moves one pocket position. For eight
pockets, a half turn should move one pocket position.

CI-100 Crucible Indexer Operating Manual

Low 0 to 2 V (dc), High 4 to 24 V (dc),
non-isolated

1.6 Unpacking and Inspection

1 If the CI-100 has not been removed from its packaging, do so now.

2 Carefully examine the contents for damage that may have occurred during

shipping. This is especially important if you notice obvious rough handling on
the outside of the container. Immediately report any damage to the carrier and

to INFICON.

3 Do not discard the packing materials until you have taken inventory and have

at least performed successful installation.

4 Take an inventory of your order by referring to your order invoice and the

information contained in section 1.7.

IPN 074-544-P1B

5 To set the controller, see Chapter 2, Installation.

6 For additional information or technical assistance, contact INFICON, refer to

section 1.3 on page 1-3.

1 - 5

CI-100 Crucible Indexer Operating Manual

1.7 Parts and Options Overview

1.7.1 Base Configuration

Thin Film Manual CD . . . . . . . . . . . . . . . .074-5000-G1

CI-100 Indexer . . . . . . . . . . . . . . . . . . . . .782-CI-100

Includes:

CI-100 Controller . . . . . . . . . . . . . . . . . . .782-900-024-G1

Drive Motor. . . . . . . . . . . . . . . . . . . . . . . .782-900-025-G1

Power Cord . . . . . . . . . . . . . . . . . . . . . . .068-0433

Ethernet Cable . . . . . . . . . . . . . . . . . . . . .068-0478

DB-25 cable (10 ft.) . . . . . . . . . . . . . . . . .068-0483

Adapter (ethernet to RS-232). . . . . . . . . .782-505-078

Spider Coupling . . . . . . . . . . . . . . . . . . . .070-1607

Shaft Body Coupling. . . . . . . . . . . . . . . . .070-1606

Motor Bracket. . . . . . . . . . . . . . . . . . . . . .782-010-101

1.7.2 Accessories

3.5 in. Full Rack Adapter . . . . . . . . . . . . .782-900-008

3.5 in. Half Rack Adapter . . . . . . . . . . . . .782-900-014

IPN 074-544-P1B

1 - 6

2.1 Introduction

The CI-100 controller requires AC mains power, and should be located within 10 ft.
of the Motor drive unit. The Motor drive typically can be mounted to the E-Beam
indexer feedthrough shaft using the mounting bracket and flexible coupling
supplied.

NOTE: The CI-100 uses a four rotation full cycle. This means that after four full

turns of the motor, it is considered to be back at the home position. Crucible
gearing can be adjusted to match this requirement. For example, if you
have a four discrete pocket crucible, the gearing should be designed so
that one full turn of the CI-100 motor moves one pocket position. For eight
pockets, a half turn should move one pocket position.

2.2 Mounting the Controller

CI-100 Crucible Indexer Operating Manual

Chapter 2

Installation

The CI-100 Controller is a 2U (3.5 in. high) half-rack wide instrument. It can be
mounted with a blank space on either side, using the optional Full Rack Extender.
Alternatively it can be mounted next to another 2U half-rack instrument, using the
optional Half Rack Adapter

2.2.1 Full Rack Extender

Assemble the two extender side panels and the extender front and rear panels into
a box configuration using the eight 6-32 flat-head screws.

Figure 2-1 Full Rack Extender

IPN 074-544-P1B

2 - 1

CI-100 Crucible Indexer Operating Manual

Thread the two 10-32 shoulder screws from the inside of one of the box sides until
the threads extend fully to the outside.

Attach the Extender Kit to the CI-100 controller by threading the shoulder screws
into the matching holes in the instrument covers.

Attach the rack mounting ears with the 10-32 flat-head screws provided.

Mount the assembly in a 19 in. rack with 10-32 screws (not provided).

2.2.2 Half Rack Adapter

Attach one rack mount ear to the CI-100 with the 10-32 flat-head screws provided.
Attach the adapter plate with 10-32 flat-head screws to the other side of the CI-100.

Mount the second instrument’s rack mount ear to the CI-100 adapter plate with
10-32 rack screws (not provided).

Mount the assembly in a 19 in. rack with 10-32 rack screws (not provided).

2.3 Mounting the Motor

A bracket and coupling is included to assist in mounting the motor drive to most
1 in. Bolt or 2 ¾ in. Conflat rotary feedthroughs with a 0.25 in. drive shaft.

2.3.1 Drive Mount with Bracket

Attach the mounting bracket to the feedthrough, rotating the bracket into the proper
orientation for your vacuum system. Loosen the flexible coupling set screws and
slide the coupling onto the feedthrough shaft.

Figure 2-2 Motor Drive Mounting

IPN 074-544-P1B

2 - 2

Slide the motor into the mounting bracket until the flexible coupling mates with the
motor shaft.

Attach the motor to the mounting bracket with 4 each 10-32 screws so that the set
screws on the flexible coupling can secure both the motor and feedthrough shafts.
Tighten the coupling set screws.

2.3.2 Drive Mount without Bracket

The motor drive can be mounted in several locations using 10-32 screws. Select
screws that protrude no more ¼ in. into the motor housing.

Figure 2-3 Motor Mount Without Bracket

CI-100 Crucible Indexer Operating Manual

IPN 074-544-P1B

2 - 3

CI-100 Crucible Indexer Operating Manual

WARNING

WARNING

CAUTION

2.4 Electrical Connections

Be sure the power switch on the CI-100 controller front
panel is OFF.

Plug the power cord into the CI-100 power entry module, then into a 100-120 or
200-240 V (ac), 50/60 Hz mains outlet.

Attach the DB-25 control cable from motor drive to the connector marked Motor on
the CI-100 controller.

The I/O and RS-232/LAN connections are covered later in this chapter. They are
not needed for initial setup.

2.5 Calibration

NOTE: The display flashes E at power-up until this calibration step is completed.

Be sure the power switch on the CI-100 controller front
panel is OFF.

Verify that the front panel Manual/Auto switch is set to
Manual, and the Pocket/Jog switch is set to Jog.

1 On the rear panel of the CI-100 controller set the Pocket Type and Select dip

switches to match your indexer. See the Rear Panel section of the next chapter
for a detailed description of the rear panel switches.

2 Push the CI-100 front panel Power switch to the ON position.

3 Press the CW/CCW switch to jog your indexer to Pocket 1. Press and hold the

CW/CCW switch for faster movement.

4 Using the CW/CCW switch, jog the indexer to the exact position you want to

calibrate as “home” for pocket 1.

5 Press and hold the Calibrate switch until the displays stop blinking (about three

seconds). This calibrates pocket one home.

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2 - 4

6 Move the Pocket/Jog switch to Pocket. Press CW/CCW to move to the next

pocket.

NOTE: The indexer should stop at a position that is nearly correct. If not, check

the rear panel dip switches carefully.

7 If the pocket is not at the desired home position for that pocket, move the

Pocket/Jog switch to Jog. Push CW/CCW to jog to home for that pocket.

8 Press and hold the Calibrate switch until the displays stop blinking (about three

seconds).

9 Repeat steps 6 through 8 until all pockets are calibrated.

NOTE: When calibrating a continuous (i.e., banana) pocket, calibrate the start

position using next pocket number, then the end position as the next
pocket number. For example, on a two pocket plus one banana indexer,
Pocket 3 is the banana sweep start position, Pocket 4 is the end position.

2.6 Binary I/O Connector

The binary I/O connector controls pocket selection using a single input per pocket.
The pinout and functions match those of the Telemark 376/379 indexers.

CI-100 Crucible Indexer Operating Manual

NOTE: Select Switch #5 must be off (down) to use this connector.

Table 2-1 Binary I/O Connector

Pin Signal

1 Ground

2 Output: Interlock Contact A

3 Output: Interlock Contact B

4 Input: Pocket 1 Select

5 Output: Pocket 1 Ready

6 Input: Pocket 2 Select

IPN 074-544-P1B

7 Output: Pocket 2 Ready

8 Input: Pocket 3 Select

9 Output: Pocket 3 Ready

10 Input: Pocket 4 Select

11 Output: Pocket 4 Ready

12 Input: Pocket 5 Select

13 Output: Pocket 5 Ready

14 Input: Pocket 6 Select

15 Output: Pocket 6 Ready

16 Ground

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CI-100 Crucible Indexer Operating Manual

Table 2-1 Binary I/O Connector (continued)

Pin Signal

17 Unused

18 Unused

19 Unused

20 Unused

21 Unused

22 Unused

23 Unused

24 Unused

25 Unused

2.7 BCD I/O Connector

The BCD I/O connector controls pocket selection by decoding the pocket select
information on three inputs.

NOTE: Select Switch #5 must be on (up) to use this connector.

Table 2-2 BCD I/O Connector

Pin Signal

1 Input: Pocket Select Bit 0

2 Input: Pocket Select Bit 1

3 Input: Interlock (ground to allow movement between pockets)

4 Output: Pocket Ready Contact A

5 Output: Pocket Ready Contact B

6Ground

7 Input: Pocket Select Bit 2

8Ground

9Ground

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CI-100 Crucible Indexer Operating Manual

There are two possible Pocket Select Bit decodings as shown below:

Switch #7 Off (down)

Switch #7 On (up)

Pocket Bit0 Bit1 Bit2 Bit0 Bit1 Bit2

1 HiHiHi LoHiHi

2 LoHiHi HiLoHi

3 HiLoHi LoLoHi

4 Lo Lo Hi Hi Hi Lo

5 HiHiLo LoHiLo

6 LoHiLo HiLoLo

7 HiLoLo LoLoLo

8 LoLoLo Hi Hi Hi

When the BCD I/O is used to select/operate custom banana configurations,
operation of the Bit 0 to Bit 2 inputs and interlock are as follows.

1 Short the Interlock pin to ground to stop movement.

2 Select the desired pocket on BCD bits 0 to 2 to move to a new pocket.

3 Release Interlock to start sweeping at the selected pocket.

4 Short interlock to stop sweeping. Release interlock to start sweeping.

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CI-100 Crucible Indexer Operating Manual

2.8 Interfacing to INFICON Deposition Controllers

2.8.1 Interfacing to SQC-310 Deposition Controller

2.8.1.1 BCD I/O

BCD wiring between the CI-100 and SQC-310 is preferred over Binary I/O wiring
because it uses fewer SQC-310 relays. The cable wiring below interfaces the
SQC-310 I/O connector to the CI-100 BCD I/O connector:

SQC-310

Pin 14------------->-------------- Pin 1 OutX Pocket Bit1

Pin 1 -------------->-------------- Pin 2 OutX Pocket Bit2

Pin 3 -------------->-------------- Pin 7 OutX Pocket Bit3

Pin 16 ------------<-------------- Pin 5 OutX Pocket Ready

Pin 15,2,4------------------------ Pin 6 Common

On the CI-100 rear panel, set Select On/Off Switch #5 UP and #7 DOWN. On the

SQC-310 System Menu / Sensors & Sources, set up the Source with:

 Number of Positions: 8

 Control Type: BCD

 Feedback Type: In Position

 Indexer Delay: 5 seconds

MDC 991270 and Sycon SRT-400 Indexer compatibility: The pocket select and
interlock pins (1, 2, 3, 7) are identical to the MDC and Sycon indexers. For a
compatible pocket ready signal (pin 5), ground pin 4 (jumper pin 4 to pin 6, 8, or 9).
The pocket position outputs of the MDC/Sycon indexer (pins 4, 8, or 9) are seldom
used. Set Select Switch #7 UP.

CI-100 BCD I/O

Short Pin 3 to Pin 9 Interlock

Short Pin 4 to Pin 8 Pocket Ready A

2.8.1.2 Binary I/O

To use the CI-100 binary I/O for a four pocket crucible:

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SQC-3XX

Pin 1,3,5,14,24 ---------------- Pin 1,2 Common

Pin 16 ------------<-------------- Pin 3 OutX Pocket Ready

Pin 15 ------------>-------------- Pin 4 OutX Pocket 1

Pin 2 -------------->-------------- Pin 6 OutX Pocket 2

Pin 4 -------------->-------------- Pin 8 OutX Pocket 3

Pin 6 -------------->-------------- Pin 10 OutX Pocket 4

CI-100 Binary I/O

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CI-100 Crucible Indexer Operating Manual

On the CI-100 rear panel, set Select Switch #5 Down. On the SQC-310 System
Menu / Sensors & Sources, set up the Source with:

 Number of Positions: 4

 Control Type: Individual

 Feedback Type: In Position

 Indexer Delay: 5 seconds

2.8.2 Interfacing to IC6 Deposition Controller

The INFICON IC6 does not support binary indexer wiring. BCD wiring between the
CI-100 and the IC6 is required.

The cable wiring below interfaces the IC6 I/O Board connectors to the CI-100 BCD
I/O connector:

IC6 Relay

CI-100 BCD I/O

Pin 6 (Relay 1, NO)----->----Pin 1 Pocket Bit1 Select

Pin 8 (Relay 2, NO)----->----Pin 2 Pocket Bit2 Select

Pin 10 (Relay 3, NO)---->----Pin 7 Pocket Bit3 Select

Pin 7,9,11(Relay Common)-Pin 6 Common

IC6 Input

CI-100 BCD I/O

Pin 15 (Input 1)------<--------Pin 5 Pocket Ready B

Pin 1---------------------------- Pin 6 Common

Short Pin 3 to 9 Interlock

Short Pin 4 to 8 Pocket Ready A

On the CI-100 rear panel, set Select On/Off Switch #5 UP and #7 DOWN. Turn the
CI-100 Off, then On, to read the switch change.

On the IC6 Source menu select Number of Crucibles=8, Crucible Output = 1, and

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Crucible Output Type =NO. Set Turret Feedback = Yes and Turret Input = 1.

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CI-100 Crucible Indexer Operating Manual

2.9 RS-232/LAN Connector

A DB-9 to RJ-45 adapter and standard Ethernet cable are supplied for connecting
the CI-100 to the PC for RS-232 communications.

NOTE: CI-100 does not support Ethernet communications.

Table 2-3 RS-232/LAN Connector

RJ-45 Pin Signal DB-9F Pin

1 (Wht/Org) Unused

2 (Org) Unused

3 (Wht/Grn) Unused

4 (Blu) RS-232 Tx 2 (Red)

5 (Wht/Blu) RS-232 Rx 3 (Grn)

6 (Grn) Unused

7 (Wht/Brn) RS-232 Ground 5 (Brn)

8 (Brn) Unused

2.10 Motor Connector

The controller cable supplied is a DB-25 male to female straight-through 26 AWG,
shielded. The standard length is 10 ft. (3 m). For longer lengths, use larger gauge
wire to avoid power loss to the motor drive.

Table 2-4 Motor Connector

Pin Signal

1DAC CSp

2 DAC CLKp

3DAC DATAp

4 STEPp

5DIRp

6 Encoder CLKp

7 Encoder CSp

8 Encoder DATAp

9Ground

10 Ground

11 Ground

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12 24 V (dc)

13 24 V (dc)

14 DAC CSn

Table 2-4 Motor Connector (continued)

Pin Signal

15 DAC CLKn

16 DAC DATAn

17 STEPn

18 DIRn

19 Encoder CLKn

20 Encoder CSn

21 Encoder DATAn

22 Ground

23 Ground

24 24 V (dc)

25 24 V (dc)

CI-100 Crucible Indexer Operating Manual

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CI-100 Crucible Indexer Operating Manual

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3.1 Introduction

The CI-100 Indexer can be operated using the front panel switches to move to a
discrete pocket, or to sweep within a continuous (i.e., banana) pocket. Pocket
home for each pocket can also be set from the front panel.

The CI-100 can also be operated remotely (Auto mode) using the rear panel digital
I/O or RS-232 communications. The rear panel also provides switches for setting
pocket configuration and other movement options.

In addition to pre-defined configurations, the CI-100 can store a custom
configuration. This custom configuration allows the user to place discrete and
continuous pockets at any point along the 360° rotational arc.

CI-100 Crucible Indexer Operating Manual

Chapter 3

Operation

3.2 Controller Front Panel

Figure 3-1 Controller Front Panel

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Power Switch

Controls power to the Controller and Motor.

Manual/Auto Switch

Select Manual to control indexer operation from the front panel. Select Auto to
control the indexer from the Communications ports or digital I/O interface.
When Auto is selected, the remaining front panel switches are disabled.

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CI-100 Crucible Indexer Operating Manual

Select/Speed Display

Normally shows the desired pocket in Manual mode. Normally blank in Auto
mode.

If the indexer is sweeping in a continuous (i.e. banana) pocket, then the decimal
point flashes and the sweep speed is displayed.

CW/CCW Switch

This spring-loaded switch moves the indexer clockwise or counterclockwise.
Push and hold for continuous rotation. If Uni-Direction is selected on the rear
panel, only moves the indexer in one direction.

The Pocket/Jog switch controls the degree of movement that occurs when
CW/CCW is pushed.

Pocket/Jog Switch

Select Pocket to cause moves between pockets. Select Jog to cause moves in

1.8° increments. Use the CW/CCW switch to initiate the move.

Calibrate/Speed Switch

Press and hold to the Calibrate position for 3 seconds to electronically store the
selected pocket’s home position.

Press to the Speed position to start sweeping a continuous pocket. Press
Speed again to stop the sweep. Use the CW/CCW switch to adjust the sweep
speed. While sweeping, the Select/Speed display shows the selected speed:

Display Hi Speed (RPM) Lo Speed (RPM)

1 0.5 0.05

2 0.6 0.06

3 0.8 0.08

4 1.0 0.10

5 1.2 0.12

6 1.5 0.15

7 1.9 0.19

8 2.4 0.24

9 3.0 0.30

0 3.7 0.37

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On discrete pockets, the Speed position has no effect.

Pocket Display

Shows the pocket that the indexer is on.

Ready LED

On when the indexer is positioned at a valid pocket, otherwise off.

Moving LED

On when the indexer is moving between pockets, or within a continuous pocket.

3.3 Controller Rear Panel

Figure 3-2 Controller Rear Panel

CI-100 Crucible Indexer Operating Manual

NOTE: The rear panel switches are only read at power up. Be sure to power off,

then on, after changing the rear panel dip switches.

Pocket Type Switch

1: Selects a four discrete pocket indexer.

2: Selects a six discrete pocket indexer.

3: Two discrete pockets, plus one 180° continuous.

4: Three discrete pockets, plus one 90° continuous.

5: Three discrete pockets, plus one 120° continuous.

6: Three discrete pockets, plus one 135° continuous.

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7: Three discrete pockets, plus one 145° continuous.

8: One 360° continuous pocket.

1-8 OFF: Selects the custom configuration.

Option Select Switch

1: Selects Bi-Direction (on) or Uni-Direction (off) rotation.

2: Selects CCW (on) or CW (off) rotation in Uni-Direction mode.

3: UHV (on) stays within a single 360° arc.

4: High (on) allows speeds >.5 rpm.

5: BCD (on) uses BCD I/O, (off) selects Binary I/O.

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CI-100 Crucible Indexer Operating Manual

WARNING

WARNING

6: RS-232 communications (off)

NOTE: CI-100 does not support Ethernet communications.

7: Bit decode selection for BCD I/O Mode – see section 2.7 on page 2-6.

8: Unused.

BCD I/O Connector

The pocket is selected using BCD encoded inputs. Same function and pinout
as MDC/Sycon indexers. See Chapter 2 for pinout and compatibility
instructions.

NOTE: Option switch 5 must be on (up) to use this connector.

Binary I/O Connector

The pocket is selected by individual inputs. Same function and pinout as
Telemark indexers. See Chapter 2 for pinout and compatibility instructions.

NOTE: Option switch 5 must be off (down) to use this connector.

RS-232/LAN Connector

Connector for RS-232 communications. See Chapter 2 for pinout.

NOTE: CI-100 does not support Ethernet communications.

Motor Connector

Provides power and control signals to the indexer motor. See Chapter 2 for
pinout.

Power Input

Connects to mains power. The CI-100 automatically detects mains voltages of
100-120 and 200-240 V (ac), 50/60 Hz.

For continued protection, replace fuses with the proper
type and rating.

Use removable power cords only of the specified type
and rating, attached to a properly grounded receptacle.

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3.4 Custom Configuration

The CI-100 custom configuration allows up to eight pocket positions in a 360° arc.
Each position can be designated as discrete, or continuous (i.e., banana). The
eight positions can be defined at any point along the 360° arc.

This capability is best illustrated by an example. Assume you have a discrete
pocket, then a 120° banana, then another discrete pocket, and finally another 120°
banana. The custom configuration might be programmed like this:

CI-100 Crucible Indexer Operating Manual

Position

Location Mode Comments

1 0° Discrete First pocket

2 45° Start Continuous Start first banana

3 135° End Continuous End first banana

4 180° Discrete Second pocket

5 225° Start Continuous Start second banana

6 315° End Continuous End second banana

7 Unused

8 Unused

TM

A Windows

program for creating custom configurations (see Figure 3-3) and

downloading them to the CI-100, is included on the CD-ROM.

Figure 3-3 Indexer Pocket Combination Examples

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See Chapter 4, Computer Interface for more information on programming the
custom configuration.

NOTE: The CI-100 uses a four rotation full cycle. This means that after four full

turns of the motor, it is considered to be back at the home position. Crucible
gearing can be adjusted to match this requirement. For example, if you
have a four discrete pocket crucible, the gearing should be designed so
that one full turn of the CI-100 motor moves one pocket position. For eight
pockets, a half turn should move one pocket position.

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CI-100 Crucible Indexer Operating Manual

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4.1 Introduction

The CI-100 Controller’s front panel controls and rear panel dip switches will provide
adequate operation and setup capabilities for most users. The rear panel digital I/O
also allows basic operation for system controllers.

For programming the custom pocket configuration, and computer-controlled
operation, use the RS-232 communication interface.

4.2 Control Program

A simple Windows
CI-100.

NOTE: The Manual/Auto DIP switch must be in Auto position to communicate

using this program. If it is desired to have complete control of the CI-100
through the software, set the Control grid to Comm and hit send.

CI-100 Crucible Indexer Operating Manual

Chapter 4

Computer Interface

®

program is supplied to configure, operate and program the

Figure 4-1 Program Main Screen

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CI-100 Crucible Indexer Operating Manual

Main Screen

The CI-100 Crucible Indexer V1.XX software can be used to control the CI-100,
send or receive a configuration file, send commands and receive responses, or
simply used to monitor the position of the CI-100.

Pocket: The uppermost left grid of the main screen shows the current position and
status of the CI-100. A "?" indicates that software is not communicating with the
CI-100 at the present time. When "Moving" the position will display a "?" until the
desired position is reached at which time the pocket number will be displayed and
the CI-100 enters the "Ready" state.

Move: The next grid down is the move grid. From here the desired pocket (1-8) can
be chose by clicking on the up and down arrows while the "pocket" option is
selected. When the "speed" option is selected you can define the speed (1-20) of
the motor.

Control: The next grid down is the control grid. From here the method of controlling
the CI-100 is defined. The CI-100 can be controlled manually through the unit itself,
through another device via I/O or through PC communications. The "Read" button
in this grid reads the current setting on the CI-100 and sets the bullet next to the
current control state accordingly. The "Send" command will send the chosen
control state to the CI-100.

NOTE: To control the CI-100 from the software it must be in a comm control state.

If set to I/O, manual control of the pocket & sending configurations will not
be allowed.

Switches: This feature is currently unavailable.

Custom Configuration: This grid allows for custom configurations to be defined,

read or sent to the CI-100. Set the custom configuration as desired for pockets 1
to 8 (refer to section 3.4, Custom Configuration, on page 3-5). Click CI-100 Send
to send the custom configuration to the CI-100. Click CI-100 Read to download the
current configuration from the CI-100. Click File Save to save the configuration to
disk. Click File Open to open saved configuration files typically from the default
save location.

Exit: choose this option to close the CI-100 software.

Comm: Choose this option to change communication options or for sending

commands and receiving responds. The Find button will send a "@" to the unit
which should response with a version number. this confirms that communications
are established. The port in use can also be defined here.

NOTE: While a ethernet comm option is shown in this screen, ethernet is not

available on the CI-100.

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4.3 Command Protocol

The CI-100 communicates with a host computer via an ASCII based protocol. The
instrument RS-232 configuration is set to 19200 baud, 8 data bits, and no parity.

The basic protocol is:

<$> <1 to n data characters> <CRLF>

Once a valid command has been transmitted to the CI-100, a response is returned.
The structure of the packet is identical in both the command and response. In the
response, the character after the $ is a Response Status, as shown in the table:

Table 4-1 Response Characters

Response Character Meaning

* or # Command understood, normal response

3 or 4 Instrument in wrong mode for this command

5 or 6 Illegal Data

7 or 8 Illegal Syntax

CI-100 Crucible Indexer Operating Manual

4.4 Commands

NOTE: In the examples, the sync, response and <CRLF> characters have been

eliminated for clarity.

4.4.1 @

Command: @

Parameters: None

Description: Returns the model number and software version number.

Example: @ Response: CT-100 Ver

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4.4.2 A

Command: A

Parameters: 0, 1, ?

Description: Read/Set remote control status.

Example: A? Response: 0 (digital I/O control)

A1 Set to RS-232 control

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4.4.3 B

4.4.4 C

CI-100 Crucible Indexer Operating Manual

Command: B

Parameters: 1 to 8, ?

Description: Read/Set the current pocket.

Example: B? Response: 2 (on pocket 2)

B3 Go to pocket 3

Command: C

Parameters: 0 to 8, ?

Description: Read/Set speed.

Example: C? Response: 0 (speed 0 is selected)

C1 Set to speed 1

The speed RPM value is determined by the setting of the rear panel Hi/Lo speed
select switch as shown below:

Speed Hi Speed (RPM) Lo Speed (RPM)

1 0.5 0.05

2 0.6 0.06

3 0.8 0.08

4 1.0 0.10

5 1.2 0.12

6 1.5 0.15

7 1.9 0.19

8 2.4 0.24

9 3.0 0.30

0 3.7 0.37

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4.4.5 D

4.4.6 F

CI-100 Crucible Indexer Operating Manual

Command: D

Parameters: ?

Description: Read motor status.

Example: D? Response: M (motor is moving)

D? Response: R (motor is stopped)

Command: F

Parameters: 1 to 8, ?

Description: Read/Set the number of pockets for the custom configuration.

Example: F? Response: 4 (4 pockets)

F8 Set number of pockets to 8

4.4.7 G

Command: G

Parameters: 1 to 8, ?

Description: Read/Set custom configuration pocket parameters. The first

parameter read/set is the pocket type (0=discrete, 1=continuous
start, 2=continuous end). The next parameter (separated by a
space character) is the position in degrees (0 to 359).

Example: G2? Response: 0 90

(pocket 2 is a discrete pocket at 90°)

G3 1 180 Set pocket 3 to continuous start at 180°

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4.4.8 I

Command: I

Parameters: 0?, 1? (0=Pocket, 1= Select)

Description: Reads the rear panel dip switches. Returns an ASCII character

representing the hex value of the requested dip switch. Position 1

0

of the switch is represent by 2

Example: I0? Response: @ (pocket switch 7 is up, @=H40=2

, position two is 21, etc.

6

)

I1? Response: A

(select switch 1 & 7 are up, A=H41=2

6

+ 20)

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4.4.9 M

CI-100 Crucible Indexer Operating Manual

Command: M

Parameters: 1 to 9, ?

Description: Read/Set custom configuration pocket speed. See the “C”

command for speed values.

Example: M2? Response: 1 indicates speed 1 (0.5/0.05 rpm)

M3 2 Set pocket 3 to speed 2 (0.6/0.06 rpm)

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