Capacitance Diaphragm Gauge
Stripe CDG100Dhs
tina95e1 (2014-07) 1
Operating Manual
Incl. EC Declaration of Conformity
Further languages under www.inficon.com
Product Identification
In all communications with INFICON, please specify the information given on the product nameplate. For convenient reference copy that information into the space provided below.
Model:
PN:
SN:
V W
2
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)
Validity
This document applies to products of the Stripe CDG100Dhs
series.
Part numbers of standard products are indicated below. OEM
products have other part numbers and different parameter
settings (e.g. factory setting of setpoint) as defined in the
corresponding ordering information.
3C D 9- 6 6 1-238 0
Flange
1
DN 16 ISO-KF
3
DN 16 CF-R
9
½˝ tube
E
8VCR female
5
Torr ( × 133 Pa; × 1.33 mbar
Unit
6
mbar (× 100 Pa)
3
0.1
4
0.25
5
Measurement
range (F.S.)
The part number (PN) can be taken from the product nameplate.
0.5
6
1
7
2
8
5
9
10
A
20
B
50
C
100
D
200
E
500
F
1000 (Torr only)
G
1100 (mbar only)
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If not indicated otherwise in the legends, the illustrations in this
document correspond to gauges with DN 16 ISO-KF vacuum
connection. They apply to gauges with other vacuum connections by analogy.
We reserve the right to make technical changes without prior
notice.
Intended Use
The temperature compensated Capacitance Diaphragm Gauges
of the Stripe CDG100Dhs series are intended for absolute
pressure measurement of gases in their respective pressure
ranges (→ 3).
Ideally the measurement values can be read out digitally via
EtherCAT interface or analog. The gauges can also be operated
in connection with an INFICON Vacuum Gauge Controller (VGC
series) or another appropriate controller.
Functional Principle
A ceramic diaphragm is deflected by pressure. The deflection is
measured capacitively and converted into a digital or into an
analog linear output signal by the digital electronics. The digital
output signal can only be read out via the EthreCAT interface.
The output signal is independent of the gas type.
Very accurate pressure measurement is achieved by heating the
sensor to a constant temperature of 100°C which results in a
compensation of changes in the ambient conditions and a reduced deposition of process products and by-products in process applications.
Trademarks
SKY® INFICON GmbH
®
VCR
Swagelok Marketing Co.
4
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Patents
EP 1070239 B1, 1040333 B1
US Patents 6528008, 6591687, 7107855, 7140085
Scope of Delivery
1× gauge Stripe CDG100Dhs
1× pin for adjusting settings via buttons
1× insulation shell
1× Calibration Test Report
1× Operating Manual German
1× Operating Manual English
tina95e1 (2014-07) 5
Contents
Product Identification 2
Validity 3
Intended Use 4
Functional Principle 4
Trademarks 4
Patents 5
Scope of Delivery 5
Safety 8
1
1.1 Symbols Used 8
1.2 Personnel Qualifications 8
1.3 General Safety Instructions 9
1.4 Liability and Warranty 9
2 Technical Data 10
3 Installation 16
3.1 Vacuum Connection 16
3.2 Power Connection 20
3.2.1 D-Sub, 15-pin Connector 21
3.2.2 EtherCAT Connector 22
3.2.3 Mini USB Type B Connector (Diagnostic Port) 23
4 Operation 24
4.1 Status Indication 24
4.2 Zeroing the Gauge 25
4.2.1 <ZERO> Adjustment 25
4.3 Switching Functions SP1, SP2 29
4.4 Error Status 33
4.5 ATM Setpoint 34
4.6 Activating the Factory Setting (Factory Reset) 35
4.7 Diagnostic Port (USB Interface) 36
4.8 EtherCAT Operation 37
5 Deinstallation 38
5.1 Power Connection 38
5.2 Vacuum Connection 38
6 Maintenance, Repair 41
6
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7 Returning the Product 41
8 Disposal 42
Further Information 43
EC Declaration of Conformity 44
For cross-references within this document, the symbol (→ XY)
is used, for cross-references to further documents, listed under
"Further Information", the symbol (→ [Z]).
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1 Safety
1.1 Symbols Used
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environmental damage.
Caution
Information on correct handling or use. Disregard can lead to
malfunctions or minor equipment damage.
Notice
<…> Labeling
1.2 Personnel Qualifications
Skilled personnel
All work described in this document may only be carried out by
persons who have suitable technical training and the necessary experience or who have been instructed by the end-user
of the product.
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1.3 General Safety Instructions
• Adhere to the applicable regulations and take the necessary
precautions for the process media used.
Consider possible reactions with the product materials.
• Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider the
safety instructions in this document.
• Before beginning to work, find out whether any vacuum components are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contaminated parts.
Communicate the safety instructions to all other users.
1.4 Liability and Warranty
INFICON assumes no liability and the warranty becomes null
and void if the end-user or third parties
• disregard the information in this document
• use the product in a non-conforming manner
• make any kind of interventions (modifications, alterations etc.)
on the product
• use the product with accessories not listed in the product
documentation.
The end-user assumes the responsibility in conjunction with the
process media used.
Gauge failures due to contamination or wear and tear are not
covered by the warranty.
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2 Technical Data
Measurement range
1)
Accuracy
0.1 … 0.5 F.S.
0.1 … 1100 F.S.
Temperature effect on zero
0.1 … 0.5 F.S.
1 … 1100 F.S.
Temperature effect on span 0.02% of reading / °C
Resolution
Gas type dependence none
Output signal analog
(measurement signal)
Measurement range 0 … +10 V
Voltage range –5 … +10.5 V
Relationship voltage-pressure linear
Output impedance
Loaded impedance
Step response time
2)
Analog output signal
Digital output signal (EtherCAT
interface)
Identification
Resistance R
Voltage
Ident
→ "Validity"
0.4% of reading
0.2% of reading
0.0050% F.S./ °C
0.0025% F.S./ °C
0.003% F.S.
(limited to +10.5 V)
0 Ω (short-circuit proof)
>10 kΩ
≤1 ms
≤2 ms
13.2 kΩ referenced to supply common
≤5 V
1)
Non-linearity, hysteresis, repeatability at 25 °C ambient operating
temperature without temperature effects after operation of 2 h.
2
)
Increase 10 … 90 % F.S.R.
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Remote Zero Adjust
External switching contact
digital input for zero adjustment (→ 25)
30 V (dc) / <5 mA (dc)
Switching functions setpoints SP1/2, ATM, error
status
Setpoint relay
Setting range 1 … 99% F.S. (0.1 … 9.9 V)
Hysteresis
Switching characteristics
3)
1% F.S.
3)
Low Trip Point (default)
Relay contact 30 V (dc) / ≤0.5 A (dc)
floating (NO)
closed p ≤ p
open p ≥ p
(LED lit solid)
SP
(LED off)
SP
Status relay
Relay contact 30 V (dc) / ≤0.5 A (dc)
connected to supply common (pin 5)
closed measurement mode
warning
open no supply voltage
Diagnostic port
Cable
warming up, error
Mini USB type B, 5-pin
USB cable type A/mini B
EtherCAT interface
Specification, data format,
communication protocol
→ [5], [6]
Data rate 100 Mbps
Note address explicit device identification
Physical layer 100Base-Tx (IEEE 802.3)
3
)
The hysteresis and the switching characteristics can be programmed via
the serial interface or the diagnostic port.
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EtherCAT connector 2×RJ45, 8-pin, socket
input and output
Cable 8-pin, shielded, Ethernet
Patch Cable (CAT5e quality
or higher)
Cable length ≤100 m
For further information on the EtherCAT interface → [3]
Supply
DANGER
The gauge may only be connected to power supplies, instruments or control devices that conform
to the requirements of a grounded protective extralow voltage (PELV). The connection to the gauge
has to be fused
Supply voltage
at the gauge
4)
.
+14 … +30 V (dc) or
±15 V (dc)
Power consumption
while being heated
at operating temperature
Fuse to be connected
4)
≤1.25 AT
≤16 W
≤11 W
The gauge is protected against reverse polarity of the supply
voltage and overload.
Electrical connection 15-pin D-Sub, male
Sensor cable 15-pin plus shielding
4)
INFICON controllers fulfill this requirement.
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Cable length
Supply voltage 15 V
≤ 8 m (0.14 mm²/conductor)
≤15 m (0.25 mm²/conductor)
Supply voltage 24 V ≤43 m (0.14 mm²/conductor)
≤75 m (0.25 mm²/conductor)
Supply voltage 30 V ≤88 m (0.14 mm²/conductor)
≤135 m (0.25 mm²/conductor)
For longer cables, larger conductor cross-sections are required
(R
≤1.0 Ω).
cable
Grounding concept
→ "Power Connection"
Materials exposed to vacuum ceramics (Al2O3 ≥99.5%),
stainless steel AISI 316L
3
Internal volume ≤4.2 cm
Admissible pressure (absolute)
1000 / 1100 F.S.
1 … 500 F.S.
0.1 … 0.5 F.S.
Bursting pressure (absolute) 6 bar
3 bar
2.6 bar
1.3 bar
Admissible temperatures
Storage
Operation
Bakeout
–20 °C … +85 °C
+10 °C … +50 °C
≤110 °C at the flange
Relative humidity ≤80% at temperatures
≤+31 °C, decreasing to 50%
at +40°C
Use indoors only, altitude up to
3000 m NN
Degree of protection IP 30
Mounting orientation standing upright to horizon-
tal
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Dimensions [mm]
ø85
ø82
3.8
110.4
31.5
DN 16 ISO-KF
15.7
Weight 837 … 897 g
14
½¨ tube
DN 16 CF-R
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8VCR
female
Analog Measurement Signal vs. Pressure
Pressure p
1.1×F.S.
1.0×F.S.
0.9×F.S.
0.8×F.S.
0.7×F.S.
0.6×F.S.
0.5×F.S.
0.4×F.S.
0.3×F.S.
0.2×F.S.
0.1×F.S.
0.0×F.S.
0
12 345678910
Measurement U
p = (U
/ 10 V) × p (F.S.)
out
Conversion Torr ↔ Pascal
Torr mbar 5) Pa
c 1.00
1013.25 / 760 =
1.3332…
[V]
out
101325 / 760 =
133.3224…
4)
Example: Gauge with 10 Torr F.S.
Measurement signal U
= 6 V
out
p = (6 V / 10 V) × 10 Torr
= 0.6 × 10 Torr = 6 Torr
5)
Source: NPL (National Physical Laboratory)
Guide to the Measurement of Pressure and Vacuum, ISBN 0904457x /
1998
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3 Installation
WARNING
WARNING: fragile components
The ceramic sensor may be damaged by impacts.
Do not drop the product and prevent shocks and
3.1 Vacuum Connection
impacts.
DANGER
DANGER: hot surface
Touching the hot surface (>65 °C) can cause
burns.
Protect hot parts to prevent accidental contact and
mount warning signs.
DANGER
DANGER: overpressure in the vacuum system
>1 bar
Injury caused by released parts and harm caused
by escaping process gases can result if clamps are
opened while the vacuum system is pressurized.
Do not open any clamps while the vacuum system
is pressurized. Use the type clamps which are
suited to overpressure.
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DANGER: overpressure in the vacuum system
>2.5 bar
KF flange connections with elastomer seals (e.g.
O-rings) cannot withstand such pressures. Process
media can thus leak and possibly damage your
health.
Use O-rings provided with an outer centering ring.
DANGER: protective ground
Products that are not correctly connected to ground
can be extremely hazardous in the event of a fault.
Electrically connect the gauge to the grounded
vacuum chamber. This connection must conform to
the requirements of a protective connection according to EN 61010:
• CF and VCR flanges fulfill this requirement.
• For gauges with a KF flange, use a conductive
metallic clamping ring.
• For gauges with a ½" tube, take appropriate
measures to fulfill this requirement.
Caution: vacuum component
Dirt and damages impair the function of the vac-
uum component.
When handling vacuum components, take appro-
priate measures to ensure cleanliness and prevent
damages.
DANGER
DANGER
Caution
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Caution
Caution: dirt sensitive area
Touching the product or parts thereof with bare
hands increases the desorption rate.
Always wear clean, lint-free gloves and use clean
tools when working in this area.
Mount the gauge so that no vibrations occur.
Mounting orientation
standing upright to
horizontal
If adjustment should be possible after the gauge has been installed, be sure to install it so that the buttons can be accessed
with a pin.
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Remove the protective lid and connect the product to the
vacuum system.
Seal with
centering ring
Protective lid
Clamp
Keep the protective lid.
Mount the insulation shell.
Insulation shell
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3.2 Power Connection
Make sure the vacuum connection is properly made
(→ 16).
DANGER
The gauge may only be connected to power supplies, instruments or control devices that conform
to the requirements of a grounded protective extralow voltage (PELV) The connection to the gauge
has to be fused
Ground loops, differences of potential, or EMC problems
may affect the measurement signal. For optimum signal
quality, please do observe the following notes:
• Use an overall metal braided shielded cable. The
connector must have a metal case.
• Connect the cable shield to ground at one side via the
connector case. Make sure the connector case has
direct contact to the cable's shield on its whole circumference. Do not connect the other side of the
shield.
• Connect the supply common with protective ground
directly at the power.
• Use differential measurement input (signal common
and supply common conducted separately).
• Potential difference between supply common and
housing ≤18 V (overvoltage protection).
6)
.
6)
INFICON controllers fulfill this requirement.
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3.2.1 D-Sub, 15-pin Connector
If no sensor cable is available, make one according to the
following diagram (cable length and conductor cross-sections
→ 12).
1M
3
4
1
8
9
10
13
14
2
12
7
11
5
6
15
case
Status
SP1
SP2
Ident
10 Ω
18 V
680 nF
Electrical connection
Pin 1, 4 Relay SP1, closing contact
Pin 2 Signal output (measuring
signal) or thresholds SP1/2
Pin 3 Status
Pin 5 Supply common
Pin 7, 11 Supply (+14…+30 V)
Pin 8, 9 Relay SP2, closing contact
Pin 10 Gauge identification or
Remote Zero Adjust
Pin 12 Signal common
Pin 15 Housing (Chassis Ground)
Case Connector case
Pin 6, 13, 14: NC
Remote
Zero Adjust
14…30 V
9
15
1
8
D-Sub, 15-pin
female
soldering side
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3.2.2 EtherCAT Connector
EtherCAT is a communications interface. It is powered
via the sensor cable.
If no EtherCAT cables are available, make them according to the
following diagram. Connect the EtherCAT cables.
FCC68, 8-pin, soldering side
81
Pin 1 TD+ Transmission data +
Pin 2 TD- Transmission data Pin 3 RD+ Receive data +
Pin 6 RDPin 4, 5, 7 and 8: NC
FCC68 cable
<IN> port
Receive data -
FCC68 cable
<OUT> port
Sensor cable
22
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3.2.3 Mini USB Type B Connector (Diagnostic Port)
A standard USB cable can be used. If no cable is available,
make one according to the following diagram. Connect the cable.
5 1
Pin 1 VBUS (5 V)
Pin 2 DPin 3 D+
Pin 4 ID
Pin 5 GND
Mini USB typ B, soldering side
Mini USB type B
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4 Operation
Put the gauge into operation. If you are using an INFICON controller, define the measurement range (→ [1], [2].
A warm-up time of at least ½ hour should be allowed; for precise
pressure measurements a warm-up time of at least 2 hours is
required.
4.1 Status Indication
LED LED status Meaning
<STATUS> off no supply voltage
lit solid green measurement mode
blinking green
lit solid red error
<SP1> lit green green
blinking green waiting for setpoint 1 input
off p > setpoint 1
<SP2> lit solid green
blinking green waiting for setpoint 2 input
off p > setpoint 2
EtherCAT LEDs → [3]
24
short blinks
long blinks
warning, over/underrange
warming up
p
≤ setpoint 1
p
≤ setpoint 2
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4.2 Zeroing the Gauge
The gauge is factory calibrated while "standing upright"
(→ "Calibration Test Report").
Perform a zero adjustment, when the gauge is operated
for the first time.
Due to long time operation or contamination, a zero drift could
occur and zero adjustment may become necessary.
For adjusting the zero, operate the gauge under the same constant ambient conditions and in the same mounting orientation
as normally.
The output signal (measuring signal) is depending on the mounting orientation. The signal difference between the vertical and
horizontal mounting orientation is:
4.2.1 <ZERO> Adjustm ent
F.S. ΔU / 90°
1000 Torr/mbar ≈2 mV
100 Torr/mbar ≈10 mV
10 Torr/mbar ≈50 mV
1 Torr/mbar ≈300 mV
0.1 Torr/mbar ≈1.8 V
If the gauge is operated via a controller, the zero of the
whole measuring system has to be adjusted on the
controller: first, adjust the zero of the gauge and then,
the zero of the controller.
The zero can be adjusted via
• the <ZERO> button on the gauge,
• the diagnostic port (→ [4]),
• the EtherCAT interface (→ [3]),
tina95e1 (2014-07) 25
• the digital input "Remote Zero" (briefly apply the
supply voltage to pin 10),
• an INFICON Vacuum Gauge Controller (VGC series).
While the gauge is being heated and/or under atmos-
pheric pressure, the zeroing function is locked in order
for operating errors to be prevented.
Evacuate the gauge to a pressure according to the table
below:
Recommended final pressure for
F.S.
1100 mbar
1000 Torr
500 Torr/mbar
200 Torr/mbar
100 Torr/mbar
50 Torr/mbar
20 Torr/mbar
10 Torr/mbar
5 Torr/mbar
2 Torr/mbar
1 Torr/mbar
0.5 Torr/mbar
0.25 Torr/mbar
0.1 Torr/mbar
−
<5×10
<2.5×10-2 Torr
<10-2 Torr
<5×10-3 Torr
<2.5×10-3 Torr
<10-3 Torr
<5×10-4 Torr
<2.5×10-4 Torr
<10-4 Torr
<5×10-5 Torr
<2.5×10-5 Torr
<10-5 Torr
<5×10-6 Torr
-2
Torr
zero adjustment
<6.65×100 Pa
<6.65×100 Pa
<3.33×100 Pa
<1.33×10-0 Pa
<6.65×10-1 Pa
<3.33×10-1 Pa
<1.33×10-1 Pa
<6.65×10-2 Pa
<3.33×10-2 Pa
<1.33×10-2 Pa
<6.65×10-3 Pa
<3.33×10-3 Pa
<1.33×10-3 Pa
<6.65×10-4 Pa
<6.65×10-2 mbar
−
<3.33×10-2 mbar
<1.33×10-2 mbar
<6.65×10-3 mbar
<3.33×10-3 mbar
<1.33×<10-3 mbar
<6.65×10-4 mbar
<3.33×10-4 mbar
<1.33×10-4 mbar
<6.65×10-5 mbar
<3.33×10-5 mbar
<1.33×10-5 mbar
<6.65×10-6 mbar
If the final pressure is too high for zero adjustment (>25%
of the F.S.), the zero cannot be reached and the
<STATUS> LED blinks green. If this is the case, activate
the factory setting and adjust the zero again (→ 35).
Operate the gauge for at least 2 hours (until the signal is
stable).
26
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Briefly press the <ZERO> button with a pin (max.
ø1.1 mm). The zero adjustment runs automatically. The
<STATUS> LED blinks until the adjustment (duration ≤8 s)
is completed.
Press the
button briefly
max. ø1.1 mm
After zero adjustment, the gauge automatically returns
to the measurement mode.
The <STATUS> LED blinks green if
• the signal output is negative (< -20 mV) when the final pressure has been attained
• the zero adjustment has failed.
4.2.2 <ZERO> Adjustment with Ramp Functi on
The ramp function allows to adjust the pressure value at a
known reference pressure within the measurement range of the
gauge.
It also permits to adjust an offset of the characteristic curve in
order to
• compensate for the offset of the measuring system or
• obtain a slightly positive zero for a 0 … 10 V AD converter.
The offset should not exceed 5% of the F.S. (+500 mV). At a
higher positive offset, the upper limit of the measurement range
is exceeded.
tina95e1 (2014-07) 27
Zero adjustment using the ramp function can be
performed via
• the <ZERO> button on the gauge,
• the EtherCAT interface (→ [3]),
• the diagnostic port (→ [4]),
Recommended procedure for adjusting the offset of a
measuring system: → Notice 25.
Operate the gauge for at least 2 hours (until the signal is
stable).
Push the <ZERO> button with a pin (max. ø1.1 mm) and
keep it depressed. The <STATUS> LED starts blinking.
After 5 s, the zero adjustment value, starting at the current
output value, keeps continually changing (ramp) until the
button is released or until the setting limit (max. 25% F.S.)
is reached. The corresponding output signal is delayed by
about 1 s.
Keep the button
depressed
max. ø1.1 mm
28
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Push the <ZERO> button again:
Fine adjustment
within 0...3 s:
the zero adjustment value changes
by one unit (push <ZERO> button in
intervals of 1 s)
Change of direction
within 3...5 s:
the zero adjustment changes its
direction (the blinking frequency of
the <STATUS> LED changes
briefly)
If the <ZERO> button is released for more than 5 s, the
gauge returns to the measurement mode.
The <STATUS> LED blinks green if the signal output is negative
(< -20 mV).
4.3 Switching Functions SP1, SP2
The two switching functions can be set to any pressure within
the measurement range of the gauge. A solid state relay is
provided for each switching function.
The current threshold setting
• is output at the measurement signal output instead of the
pressure signal and can be measured with a voltmeter after
the <SP1> or <SP2> button is pressed
• can be read / written via the diagnostic port (→ [4]) and the
EtherCAT interface (→ [3]).
Switching characteristics and hysteresis
The switching characteristics and the hysteresis of each
set point can only be programmed via the diagnostic
port (→ [4]) and the EtherCAT interface (→ [3]).
tina95e1 (2014-07) 29
Low Trip Point (default)
If the pressure in the vacuum system is lower than the setpoint,
the corresponding LED (<SP1> or <SP2>) is lit solid and the
corresponding relay is closed.
Measurement signal
(pressure p)
Reset value
Setpoint
Hysteresis
(1% F.S.)
Threshold value
Off
OffOn
High Trip Point
If the pressure in the vacuum system is higher than the setpoint,
the corresponding LED (<SP1> or <SP2>) is lit solid and the
corresponding relay is closed.
Measurement signal
(pressure p)
Threshold value
Setpoint
Hysteresis
(1% F.S.)
Reset value
Off
OffOn
30
Time t
Time t
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4.3.1 Adjusting the Setpoints SP1, SP2
The thresholds of the setpoints can be adjusted via
• the buttons on the gauge
• the diagnostic port (→ [4])
• the EtherCAT interface (→ [3]).
DANGER
DANGER: malfunction
If processes are controlled via the signal output,
keep in mind that by pushing an <SP> button the
measurement signal is suppressed and the corresponding threshold value is output instead. This
can cause malfunctions.
Push the <SP> button only if you are sure that no
malfunction will cause.
The setpoints can be adjusted via
• the buttons on the gauge,
• the diagnostic port (→ [4])
• the EtherCAT interface (→ [3]).
Adjusting Setpoint <1>
Push the <SP> button with a pin (max. ø1.1 mm). The
gauge changes to the switching function mode and outputs
the current threshold value at the measurement value
output for about 10 s (LED <1> blinks).
tina95e1 (2014-07) 31
Press the button
max. ø1.1 mm
For changing the threshold value, push the <ZERO> button
and keep it depressed. The threshold keeps changing from
the current value (ramp) until the button is released or until
the limit of the setting range is reached.
Keep the button
depressed
max. ø1.1 mm
Push the <ZERO> button again:
Fine adjustment
within 0...3 s:
Change of direction
within 3...5 s:
the zero adjustment value changes
by one unit
the zero adjustment changes its
direction (the blinking frequency of
the <STATUS> LED changes
briefly)
32
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If the <ZERO> button is released for more than 5 s, the
gauge returns the measurement mode.
The factory setting of the reset value is 1% F.S. above
the Low Trip Point and 1% F.S. below the High Trip
Point (hysteresis).
If after programming of the hysteresis the button <SP> is
pushed, the factory setting of the hysteresis (1%) is
reactivated.
Programming setpoint SP1
Programmable parameters:
(→ [3], [4])
Low Trip Point
Low Trip Enable
Low Trip Point Hysteresis
High Trip Point
High Trip Enable
High Trip Point Hysteresis
Setpoint Mode
Adjusting setpoint SP2
The adjustment procedure is the same as for setpoint SP1.
4.4 Error Status
The setpoints SP1 and SP2 can be programmed to error status
via the diagnostic port or the EtherCAT interface.
tina95e1 (2014-07) 33
M
4.5 ATM Setpoint
The setpoints SP1 and SP2 of gauges with separate atmospheric pressure sensor
pressure setpoint (ATM setpoint) via the diagnostic port or the
EtherCAT interface.
The ATM setpoint is defined as a factor of the current atmospheric pressure. The relay switches when the pressure in the
vacuum system has reached the defined value (differential
pressure in relation to the atmospheric pressure).
Example: ATM setpoint: 110% of the atmospheric pressure
(= factor 1.1)
Switching characteristic: High Trip Point
Hysteresis: 10 mbar
easurement signal
(pressure p)
ATM setpoint 110%
(= factor 1.1)
1078 mbar
7)
can be programmed to atmospheric
Threshold value
Hysteresis (1% F.S.)
980 mbar
Atmospheric pres/
sure (ambience)
7
)
The atmospheric pressure sensor measures the atmospheric pressure
(pressure outside the vacuum system).
34
Reset value
OffOnOff
tina95e1 (2014-07)
The current ATM threshold setting
• can be read / written via the diagnostic port
• is output at the measurement signal output instead of the
pressure signal, can be measured with a voltmeter, and is
displayed on the LCD display after the <SP1> or <SP2>
button is pressed
• can be read / written via the EtherCAT interface.
DANGER
DANGER: malfunction
If processes are controlled via the signal output,
keep in mind that by pushing the <SP> button the
measurement signal is suppressed and the corresponding threshold value is output instead. This
can cause malfunctions.
Push the <SP> button only if you are sure that no
Programming ATM setpoint
Programmable parameters:
(→ [3], [4])
malfunction will cause.
Factor of ATM
Low Trip Enable
Low Trip Point Hysteresis
High Trip Enable
High Trip Point Hysteresis
Setpoint Mode
Switching characteristics of the setpoints → 29.
Diagnostic port → [4].
4.6 Activating the Factory Setting (Factory Reset)
All user defined parameters (e.g. zero, filter) are restored to their
default values.
tina95e1 (2014-07) 35
Loading of the default parameters is irreversible.
Loading the default parameters:
Put the gauge out of operation.
Keep the <ZERO> button depressed for at least 5 s while
the gauge is being put into operation (Power ON).
4.7 Diagnostic Port (USB Interface)
The diagnostic port <DIAG> permits to output the pressure
reading and all status information and to enter all settings at the
same time (→ [4]). A standard USB cable type A/mini B can
be used.
Required software: T-Gauge. Please contact your local INFICON
service center.
Mini USB type B
36
tina95e1 (2014-07)
4.8 EtherCAT Operation
Caution
Caution: data transmission errors
Any attempt to simultaneously operate the gauge
via the EtherCAT interface and the diagnostic port
causes data transmission errors.
Therefore the gauge must not be operated simultaneously via the EtherCAT interface and the diagnostic port.
For operating the gauge via EtherCAT, prior installation of the
device specific ESI file is required on the bus master side. This
file can be downloaded from our website.
Explicit Device Address Setting (default 00
)
hex
During device initialization, the device address switches are read
by the device firmware. This device address is supported to the
master as Explicit Device Identification.
4
2
068
E
A
4
2
068
E
A
The explicit device address is set in hexa-
4
2
decimal form (00 … FFF
068
A
E
<x100>, <x10> and <x1> switches.
) via the
hex
Example: Device address = 0xDDD (dec 3549):
0x100 * 0xD (dec 3328) + 0x10 * 0xD (dec 208) + 0x1 * 0xD
(dec 13)
Status LED
LEDs on the gauge inform on the gauge status and the current
EtherCAT status (→ [3]).
tina95e1 (2014-07) 37
5 Deinstallation
Preconditions:
• Vacuum system vented
• Vacuum system cooled to <50 °C
5.1 Power Connection
Put the gauge out of operation.
Unfasten the lock screws and disconnect the sensor cable.
5.2 Vacuum Connection
DANGER
DANGER: hot surface
Touching the hot surface (>65 °C) can cause
burns.
Put the product out of operation and allow it to cool
down.
WARNING
WARNING: fragile components
The ceramic sensor may be damaged by impacts.
Do not drop the product and prevent shocks and
impacts.
38
tina95e1 (2014-07)
DANGER: contaminated parts
Contaminated parts can be detrimental to health
and environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.
Caution: vacuum component
Dirt and damages impair the function of the vac-
uum component.
When handling vacuum components, take appro-
priate measures to ensure cleanliness and prevent
damages.
Caution: dirt sensitive area
Touching the product or parts thereof with bare
hands increases the desorption rate.
Always wear clean, lint-free gloves and use clean
tools when working in this area.
DANGER
Caution
Caution
tina95e1 (2014-07) 39
Remove the insulation shell.
Insulation shell
Open both sides
Remove the gauge from the vacuum system and install the
protective lid.
40
tina95e1 (2014-07)
6 Maintenance, Repair
Under clean operating conditions, the product requires no maintenance.
Gauge failures due to contamination or wear and tear
are not covered by the warranty.
We recommend checking the zero at regular intervals
(→ 25).
INFICON assumes no liability and the warranty becomes null
and void if any repair work is carried out by the end-user or third
parties.
7 Returning the Product
WARNING
WARNING: forwarding contaminated products
Contaminated products (e.g. radioactive, toxic,
caustic or microbiological hazard) can be detrimental to health and environment.
Products returned to INFICON should preferably be
free of harmful substances. Adhere to the forwarding regulations of all involved countries and forwarding companies and enclose a duly completed
*)
Form under www.inficon.com
declaration of contamination
Products that are not clearly declared as "free of harmful substances" are decontaminated at the expense of the customer.
Products not accompanied by a duly completed declaration of
contamination are returned to the sender at his own expense.
tina95e1 (2014-07) 41
*)
.
8 Disposal
DANGER
DANGER: contaminated parts
Contaminated parts can be detrimental to health
and environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
Separating the components
After disassembling the product, separate its components according to the following criteria:
• Contaminated components
• Other components
when handling contaminated parts.
WARNING
WARNING: substances detrimental to the environment
Products or parts thereof (mechanical and electric
components, operating fluids etc.) can be detrimental to the environment.
Dispose of such substances in accordance with the
relevant local regulations.
Contaminated components (radioactive, toxic, caustic or biological hazard etc.) must be decontaminated in accordance
with the relevant national regulations, separated according to
their materials, and disposed of.
Such components must be separated according to their materials and recycled.
42
tina95e1 (2014-07)
Further Information
[1] www.inficon.com
Operating Manual
Single-Channel Controller VGC401
tinb01e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[2] www.inficon.com
Operating Manual
Two- & Three-Channel Measurement and Control Unit
VGC402, VGC403
tinb07e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[3] www.inficon.com
Communication Protocol
EtherCAT CDGxxxDxx
tira68e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[4] www.inficon.com
Kommunikationsanleitung
Diagnostic Port via T-Gauge
tira84e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[5] ETG.5003.1: Semiconductor Device profile – Part 1:
Common Device Profile (CDP)
[6] ETG.5003.2080: Semiconductor Device profile – Part
2080: Specific Device Profile (SDP): Vacuum Pressure
Gauge
tina95e1 (2014-07) 43
EC Declaration of Conformity
We, INFICON, hereby declare that the equipment mentioned
below complies with the provisions of the Directive relating to
electromagnetic compatibility 2014/30/EU and the Directive on
the restriction of the use of certain hazardous substances in
electrical and electronic equipment 2011/65/EU.
Product
Capacitance Diaphragm Gauge
Stripe CDG100Dhs
Standards
Harmonized and international/national standards and specifications:
• EN 61000-6-2:2005
• EN 61000-6-3:2007 + A1:2011
standard)
• EN 61010-1:2010
measurement, control and laboratory use)
• EN 61326:2013
measurement, control and laboratory use)
Manufacturer / Signatures
INFICON AG, Alte Landstraße 6, LI-9496 Balzers
22 July 2014 22 July 2014
(EMC: generic immunity standard)
(EMC: generic emission
(Safety requirements for electrical equipment for
(EMC requirements for electrical equipment for
44
Dr. Urs Wälchli
Managing Director
Hans-Christoph Gehlhar
Product Manager
tina95e1 (2014-07)
Notes
tina95e1 (2014-07) 45
Notes
46
tina95e1 (2014-07)
Notes
tina95e1 (2014-07) 47
LI–9496 Balzers
Liechtenstein
Tel +423 / 388 3111
Fax +423 / 388 3700
Original: German tina95d1 (2014-07) reachus@inficon.com
t i na95e1
www.inficon.com
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