INFICON CDG100Dhs User Manual

Capacitance Diaphragm Gauge

Stripe CDG100Dhs

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Operating Manual

Incl. EC Declaration of Conformity
Further languages under www.inficon.com

Product Identification

In all communications with INFICON, please specify the infor­mation given on the product nameplate. For convenient refer­ence copy that information into the space provided below.

Model:

PN:
SN:

V W

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)

Validity

This document applies to products of the Stripe CDG100Dhs
series.

Part numbers of standard products are indicated below. OEM
products have other part numbers and different parameter
settings (e.g. factory setting of setpoint) as defined in the
corresponding ordering information.

3C D 9- 6 6 1-238 0

Flange

1

DN 16 ISO-KF

3

DN 16 CF-R

9

½˝ tube

E

8VCR female

5

Torr ( × 133 Pa; × 1.33 mbar

Unit

6

mbar (× 100 Pa)

3

0.1

4

0.25

5

Measurement

range (F.S.)

The part number (PN) can be taken from the product nameplate.

0.5

6

1

7

2

8

5

9

10

A

20

B

50

C

100

D

200

E

500

F

1000 (Torr only)

G

1100 (mbar only)

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If not indicated otherwise in the legends, the illustrations in this
document correspond to gauges with DN 16 ISO-KF vacuum
connection. They apply to gauges with other vacuum connec­tions by analogy.

We reserve the right to make technical changes without prior
notice.

Intended Use

The temperature compensated Capacitance Diaphragm Gauges
of the Stripe CDG100Dhs series are intended for absolute
pressure measurement of gases in their respective pressure
ranges (→  3).

Ideally the measurement values can be read out digitally via
EtherCAT interface or analog. The gauges can also be operated
in connection with an INFICON Vacuum Gauge Controller (VGC
series) or another appropriate controller.

Functional Principle

A ceramic diaphragm is deflected by pressure. The deflection is
measured capacitively and converted into a digital or into an
analog linear output signal by the digital electronics. The digital
output signal can only be read out via the EthreCAT interface.

The output signal is independent of the gas type.
Very accurate pressure measurement is achieved by heating the

sensor to a constant temperature of 100°C which results in a
compensation of changes in the ambient conditions and a re­duced deposition of process products and by-products in proc­ess applications.

Trademarks

SKY® INFICON GmbH

®

VCR

Swagelok Marketing Co.

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Patents

EP 1070239 B1, 1040333 B1
US Patents 6528008, 6591687, 7107855, 7140085

Scope of Delivery

1× gauge Stripe CDG100Dhs
1× pin for adjusting settings via buttons
1× insulation shell
1× Calibration Test Report
1× Operating Manual German
1× Operating Manual English

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Contents

Product Identification 2
Validity 3
Intended Use 4
Functional Principle 4
Trademarks 4
Patents 5
Scope of Delivery 5

Safety 8

1

1.1 Symbols Used 8

1.2 Personnel Qualifications 8

1.3 General Safety Instructions 9

1.4 Liability and Warranty 9

2 Technical Data 10
3 Installation 16

3.1 Vacuum Connection 16

3.2 Power Connection 20

3.2.1 D-Sub, 15-pin Connector 21

3.2.2 EtherCAT Connector 22

3.2.3 Mini USB Type B Connector (Diagnostic Port) 23

4 Operation 24

4.1 Status Indication 24

4.2 Zeroing the Gauge 25

4.2.1 <ZERO> Adjustment 25

4.3 Switching Functions SP1, SP2 29

4.4 Error Status 33

4.5 ATM Setpoint 34

4.6 Activating the Factory Setting (Factory Reset) 35

4.7 Diagnostic Port (USB Interface) 36

4.8 EtherCAT Operation 37

5 Deinstallation 38

5.1 Power Connection 38

5.2 Vacuum Connection 38

6 Maintenance, Repair 41

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7 Returning the Product 41
8 Disposal 42

Further Information 43

EC Declaration of Conformity 44

For cross-references within this document, the symbol (→  XY)
is used, for cross-references to further documents, listed under
"Further Information", the symbol (→  [Z]).

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1 Safety

1.1 Symbols Used

DANGER

Information on preventing any kind of physical injury.

WARNING

Information on preventing extensive equipment and environ­mental damage.

Caution

Information on correct handling or use. Disregard can lead to
malfunctions or minor equipment damage.

Notice

<…> Labeling

1.2 Personnel Qualifications

Skilled personnel

All work described in this document may only be carried out by
persons who have suitable technical training and the neces­sary experience or who have been instructed by the end-user
of the product.

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1.3 General Safety Instructions

• Adhere to the applicable regulations and take the necessary
precautions for the process media used.

Consider possible reactions with the product materials.

• Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider the
safety instructions in this document.

• Before beginning to work, find out whether any vacuum com­ponents are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contamin­ated parts.

Communicate the safety instructions to all other users.

1.4 Liability and Warranty

INFICON assumes no liability and the warranty becomes null
and void if the end-user or third parties

• disregard the information in this document

• use the product in a non-conforming manner

• make any kind of interventions (modifications, alterations etc.)

on the product

• use the product with accessories not listed in the product
documentation.

The end-user assumes the responsibility in conjunction with the
process media used.

Gauge failures due to contamination or wear and tear are not
covered by the warranty.

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2 Technical Data

Measurement range

1)

Accuracy

0.1 … 0.5 F.S.

0.1 … 1100 F.S.

Temperature effect on zero

0.1 … 0.5 F.S.
1 … 1100 F.S.

Temperature effect on span 0.02% of reading / °C
Resolution
Gas type dependence none

Output signal analog
(measurement signal)

Measurement range 0 … +10 V
Voltage range –5 … +10.5 V

Relationship voltage-pressure linear

Output impedance

Loaded impedance

Step response time

2)

Analog output signal
Digital output signal (EtherCAT
interface)

Identification

Resistance R

Voltage

Ident

→ "Validity"

0.4% of reading

0.2% of reading

0.0050% F.S./ °C

0.0025% F.S./ °C

0.003% F.S.

(limited to +10.5 V)

0 Ω (short-circuit proof)

>10 kΩ

≤1 ms

≤2 ms

13.2 kΩ referenced to sup­ply common
≤5 V

1)

Non-linearity, hysteresis, repeatability at 25 °C ambient operating

temperature without temperature effects after operation of 2 h.

2

)

Increase 10 … 90 % F.S.R.

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Remote Zero Adjust

External switching contact

digital input for zero adjust­ment (→  25)
30 V (dc) / <5 mA (dc)

Switching functions setpoints SP1/2, ATM, error

status

Setpoint relay

Setting range 1 … 99% F.S. (0.1 … 9.9 V)
Hysteresis
Switching characteristics

3)

1% F.S.

3)

Low Trip Point (default)

Relay contact 30 V (dc) / ≤0.5 A (dc)

floating (NO)

closed p ≤ p
open p ≥ p

(LED lit solid)

SP

(LED off)

SP

Status relay

Relay contact 30 V (dc) / ≤0.5 A (dc)

connected to supply com­mon (pin 5)

closed measurement mode

warning

open no supply voltage

Diagnostic port

Cable

warming up, error

Mini USB type B, 5-pin
USB cable type A/mini B

EtherCAT interface

Specification, data format,
communication protocol

→  [5], [6]

Data rate 100 Mbps
Note address explicit device identification
Physical layer 100Base-Tx (IEEE 802.3)

3

)

The hysteresis and the switching characteristics can be programmed via

the serial interface or the diagnostic port.

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EtherCAT connector 2×RJ45, 8-pin, socket

input and output

Cable 8-pin, shielded, Ethernet

Patch Cable (CAT5e quality
or higher)

Cable length ≤100 m

For further information on the EtherCAT interface →  [3]

Supply

DANGER

The gauge may only be connected to power sup­plies, instruments or control devices that conform
to the requirements of a grounded protective extra­low voltage (PELV). The connection to the gauge
has to be fused

Supply voltage

at the gauge

4)

.

+14 … +30 V (dc) or
±15 V (dc)

Power consumption
while being heated
at operating temperature

Fuse to be connected

4)

≤1.25 AT

≤16 W
≤11 W

The gauge is protected against reverse polarity of the supply
voltage and overload.

Electrical connection 15-pin D-Sub, male
Sensor cable 15-pin plus shielding

4)

INFICON controllers fulfill this requirement.

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Cable length

Supply voltage 15 V

≤ 8 m (0.14 mm²/conductor)
≤15 m (0.25 mm²/conductor)

Supply voltage 24 V ≤43 m (0.14 mm²/conductor)

≤75 m (0.25 mm²/conductor)

Supply voltage 30 V ≤88 m (0.14 mm²/conductor)

≤135 m (0.25 mm²/conductor)

For longer cables, larger conductor cross-sections are required
(R

≤1.0 Ω).

cable

Grounding concept

→ "Power Connection"

Materials exposed to vacuum ceramics (Al2O3 ≥99.5%),

stainless steel AISI 316L

3

Internal volume ≤4.2 cm
Admissible pressure (absolute)

1000 / 1100 F.S.
1 … 500 F.S.

0.1 … 0.5 F.S.

Bursting pressure (absolute) 6 bar

3 bar

2.6 bar

1.3 bar

Admissible temperatures

Storage
Operation
Bakeout

–20 °C … +85 °C
+10 °C … +50 °C
≤110 °C at the flange

Relative humidity ≤80% at temperatures

≤+31 °C, decreasing to 50%
at +40°C

Use indoors only, altitude up to

3000 m NN
Degree of protection IP 30
Mounting orientation standing upright to horizon-

tal

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Dimensions [mm]

ø85

ø82

3.8

110.4

31.5

DN 16 ISO-KF

15.7

Weight 837 … 897 g

14

½¨ tube

DN 16 CF-R

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8VCR

female

Analog Measurement Signal vs. Pressure

Pressure p

1.1×F.S.

1.0×F.S.

0.9×F.S.

0.8×F.S.

0.7×F.S.

0.6×F.S.

0.5×F.S.

0.4×F.S.

0.3×F.S.

0.2×F.S.

0.1×F.S.

0.0×F.S.

0

12 345678910

Measurement U

p = (U

/ 10 V) × p (F.S.)

out

Conversion Torr ↔ Pascal

Torr mbar 5) Pa

c 1.00

1013.25 / 760 =

1.3332…

[V]

out

101325 / 760 =

133.3224…

4)

Example: Gauge with 10 Torr F.S.

Measurement signal U

= 6 V

out

p = (6 V / 10 V) × 10 Torr

= 0.6 × 10 Torr = 6 Torr

5)

Source: NPL (National Physical Laboratory)

Guide to the Measurement of Pressure and Vacuum, ISBN 0904457x /
1998

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