INFICON CDG045D2 User Manual

Capacitance Diaphragm Gauge

Edge CDG045D2
Edge CDG100D2

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Operating Manual

Incl. EC Declaration of Conformity

Product Identification

In all communications with INFICON, please specify the infor­mation given on the product nameplate. For convenient refer­ence copy that information into the space provided below.

Model:

PN:
SN:
V W; LPS

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Validity

This document applies to products of the Edge CDG045D2 and
Edge CDG100D2 series.

Part numbers of standard products are indicated below. OEM
products have other part numbers and different parameter
settings (e.g. factory setting of setpoint) as defined in the
corresponding ordering information.

Sensor temperature

3Cx5-xxx-23xx

Measurement range

(F.S.)

The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this

document correspond to gauges with DN 16 ISO-KF vacuum
connection. They apply to the other gauges by analogy.

We reserve the right to make technical changes without prior
notice.

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Filter

Interface

Flange

Unit

C  45 °C
D  100 °C

0  Standard
B  P control

0  None (analog)

8  EtherCAT

1  DN 16 ISO-KF
3  DN 16 CF-R
9  1/2" tube
E  8VCR female

(x 133 Pa; x 1.3 mbar)

5  Torr

(x 100 Pa)

6  mbar

6  1

7  2
8

5



10

9 
A

20



B  50
C  100
D  200
E  500
F  1000 (Torr only)
G  1100 (mbar only)

Intended Use

The temperature compensated Capacitance Diaphragm Gauges
of the CDG045D2 and CDG100D2 series are intended for
absolute pressure measurement of gases in their respective
pressure ranges (→  3).

The gauges belong to the SKY

®

Smart Sensors family and can
be operated in connection with an INFICON Vacuum Gauge
Controller (VGC series) or another appropriate controller.

Functional Principle

A ceramic diaphragm is deflected by pressure. The deflection is
measured capacitively and converted into an analog linear out­put signal by the digital electronics.

The output signal is independent of the gas type.
Very accurate pressure measurement is achieved by heating the

sensor to a constant temperature of 45 °C or 100°C which
results in a compensation of changes in the ambient conditions
and a reduced deposition of process products and by-products in
process applications. An integrated baffle protects the sensor
against coating.

Trademarks

SKY® INFICON GmbH

®

VCR

Swagelok Marketing Co.

Patents

EP 1070239 B1, 1040333 B1
US Patents 6528008, 6591687, 7107855, 7140085

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Scope of Delivery

1× gauge in clean room packaging
1× insulation shell (CDG100D2 only)
1× pin for adjusting settings via buttons
1× Calibration Test Report

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Contents

Product Identification 2
Validity 3
Intended Use 4
Functional Principle 4
Trademarks 4
Patents 4
Scope of Delivery 5

Safety 8

1

1.1 Symbols Used 8

1.2 Personnel Qualifications 8

1.3 General Safety Instructions 9

1.4 Liability and Warranty 9

2 Technical Data 10
3 Installation 16

3.1 Vacuum Connection 16

3.2 Power Connection 20

4 Operation 22

4.1 Status Indication 23

4.2 Zeroing the Gauge 24

4.2.1 <ZERO> Adjustment 25

4.3 Switching Functions 29

4.4 Activating the Factory Setting (Factory Reset) 32

4.5 Diagnostic Port (RS232C Interface) 33

5 Deinstallation 34

5.1 Power Connection 34

5.2 Vacuum Connection 34

6 Maintenance, Repair 37
7 Returning the Product 37
8 Disposal 38
9 Accessories 39

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Further Information 39
EC Declaration of Conformity 41

For cross-references within this document, the symbol (→  XY)
is used, for cross-references to further documents, listed under
"Further Information", the symbol (→  [Z]).

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1 Safety

1.1 Symbols Used

DANGER

Information on preventing any kind of physical injury.

WARNING

Information on preventing extensive equipment and environ­mental damage.

Caution

Information on correct handling or use. Disregard can lead to
malfunctions or minor equipment damage.

Notice

<…> Labeling

1.2 Personnel Qualifications

Skilled personnel

All work described in this document may only be carried out by
persons who have suitable technical training and the neces­sary experience or who have been instructed by the end-user
of the product.

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1.3 General Safety Instructions

• Adhere to the applicable regulations and take the necessary

precautions for the process media used.
Consider possible reactions with the product materials.

• Adhere to the applicable regulations and take the necessary

precautions for all work you are going to do and consider the
safety instructions in this document.

• Before beginning to work, find out whether any vacuum com-

ponents are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contamin­ated parts.

Communicate the safety instructions to all other users.

1.4 Liability and Warranty

INFICON assumes no liability and the warranty becomes null
and void if the end-user or third parties

• disregard the information in this document

• use the product in a non-conforming manner

• make any kind of interventions (modifications, alterations etc.)

on the product

• use the product with accessories not listed in the product

documentation.

The end-user assumes the responsibility in conjunction with the
process media used.

Gauge failures due to contamination or wear and tear are not
covered by the warranty.

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2 Technical Data

For further technical data for gauges with EtherCAT

interface →  [5].

Measurement range

1)

Accuracy

0.2% of measured value
Temperature effect on zero 0.0025% F.S./ °C
Temperature effect on span 0.02% of reading / °C
Resolution
Gas type dependence none

Output signal analog
(measurement signal)

Measurement range 0 … +10 V
Voltage range –5 … +10.24 V

Relationship voltage-pressure linear
Output impedance

Loaded impedance

Response time

2)

Identification

Resistance R

Voltage

Ident

Remote Zero Adjust

External switching contact

→ "Validity"

0.003% F.S.

(limited to +10.24 V)

0 Ω (short-circuit proof)

>10 kΩ
30 ms

13.2 kΩ referenced to
supply common
≤5 V

digital input for zero adjust­ment (→  25)
30 V (dc) / <5 mA (dc)

1)

Non-linearity, hysteresis, repeatability in the calibrated range at 25 °C

ambient operating temperature without temperature effects after

operation of 2 h.

2)

Increase 10 … 90 % F.S.R.

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Switching functions SP1, SP2

Setting range 0 … 99% F.S. (0 … 9.9 V)

Hysteresis 1% F.S.

Relay contact 30 V (dc)/ ≤0.5 A (dc)

floating (NO)
closed p ≤ p
open p ≥ p

Switching time ≤50 ms

(LED lit solid)

SP

(LED off)

SP

Status relay

Relay contact 30 V (dc)/ ≤0.5 A (dc)

connected to supply com-

mon (pin 5)
closed measurement mode

warning
open no supply voltage

warming up

RS232C interface

Transmission rate
Data format

error

9600 baud

binary

8 data bits

one stop bit

no parity bit

no handshake

→ "Power Connection"

For further information on the RS232C interface →  [4].

Diagnostic port Jack connector, 2.5 mm,

3-pin

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Supply

DANGER

The gauge may only be connected to power sup­plies, instruments or control devices that conform
to the requirements of a grounded protective extra­low voltage (SELV) and limited power source
(LPS), Class 2. The connection to the gauge has to

3)

be fused

Supply voltage

at the gauge

.

Class 2 / LPS

+14 … +30 V (dc) or

±15 V (±5%)

Ripple ≤1 V

Power consumption

while being heated
CDG045D2
CDG100D2

at operating temperature

CDG045D2
CDG100D2

≤15 W

≤20 W

≤10 W

≤14 W

pp

The gauge is protected against reverse polarity of the supply
voltage and overload.

Electrical connection D-Sub 15-pin, male
Sensor cable 15-pin plus shielding
Cable length

Supply voltage 15 V

≤ 4 m (0.14 mm²/conductor)

≤ 7 m (0.25 mm²/conductor)

Supply voltage 24 V ≤20 m (0.14 mm²/conductor)

≤35 m (0.25 mm²/conductor)

Supply voltage 30 V ≤40 m (0.14 mm²/conductor)

≤70 m (0.25 mm²/conductor)

For longer cables, larger conductor cross-sections are required

≤1.0 Ω).

(R

cable

3)

INFICON controllers fulfill this requirement.

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Grounding concept

→ "Power Connection"

Materials exposed to vacuum ceramics (Al2O3 ≥99.5%),

stainless steel AISI 316L

3 bar

2 bar

3

Internal volume ≤4.2 cm
Admissible pressure (absolute)

200 / 500 / 1000 / 1100 F.S.
1 / 2 / 5 / 10 / 20 / 50 / 100 F.S.

Bursting pressure (absolute) 6 bar

Admissible temperatures

Storage
Operation

4)

Bakeout

Relative humidity

–40 °C … +65 °C

+10 °C … +50 °C

≤110 °C at the flange

≤80% at temperatures

≤+31 °C, decreasing to 50%

at +40°C

Use indoors only, altitude up to

2000 m NN

Degree of protection IP 40

4)

Hot surface danger warning →  16 and 22 (CDG100D2 only and at

operation temperatures >40°C).

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Dimensions [mm]

63

14

31.5

DN 16 ISO-KF

Weight

112.2 4.3

31.5

DN 16 CF-R

EtherCAT

63

x100 x10 x1
4

4

4

2

2

2

6

6

6

ERR RUN

80

80

A

A

A

E

E

E

IN

SP ZERO

SP1

SP2

STATUS

63

DIAG

SP ZERO

SP1

SP2

STATUS

31.5

OD½"

80

LALA

OUT

63

PWR

DIAG

31.5

13

8-VCR

female

<650 g

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