INFICON CDG020D User Manual

Capacitance Diaphragm Gauge

Porter™ CDG020D

tina80e1 (2012-06) 1

Operating Manual

Incl. EC Declaration of Conformity

Product Identification

In all communications with INFICON, please specify the infor­mation given on the product nameplate. For convenient refer­ence copy that information into the space provided below.

Model:

PN:
SN:
V W

2

tina80e1 (2012-06)

Validity

This document applies to products of the CDG020D series.

Part numbers of standard products are indicated below. OEM
products have other part numbers and different parameter
settings (e.g. customized measurement range) as defined in the
corresponding ordering information.

3CAx-xxx-0x00

Receptacle

Measurement range

(F.S.)

Accuracy

The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this

document correspond to gauges with D-Sub receptacle and the
DN 16 ISO-KF vacuum connection. They apply to other gauges
by analogy.

We reserve the right to make technical changes without prior
notice.

All dimensions in mm.

0  FCC
1  D-Sub, 9-pin

A  Binder M12, 8-pin

Flange

1  DN 16 ISO-KF
C  4VCR male
D  4
E 

Unit

5  Torr
6  mbar

9  10
A  20
B  50
C  100
D  200
E  500
F  1000 (Torr only)
G  1100 (mbar only)

3  1%
4  0.5%

VCR female

8VCR female

(x 133 Pa; x 1.3 mbar)

(x 100 Pa)

tina80e1 (2012-06) 3

Intended Use

The Capacitance Diaphragm Gauges of the CDG020D series
are intended for absolute pressure measurement of gases in
their respective pressure ranges (→  3).

The gauges can be operated in connection with an INFICON
Vacuum Gauge Controller (VGC series) or another appropriate
measuring unit.

Function

The Capacitance Diaphragm Gauge consists of a capacitive
sensor element made of aluminum oxide ceramics and electro­nics which convert the capacitance into a DC voltage output sig­nal.

The output signal is linear to the measured pressure and inde­pendent of the gas type.

Trademarks

Porter™ INFICON GmbH

®

VCR

Swagelok Marketing Co.

Patents

EP 1070239 B1, 1040333 B1
US 6528008 B1, 6591687 B1, 7107855 B2, 7140085 B2,

7536915 B2

4

tina80e1 (2012-06)

Contents

Product Identification 2
Validity 3
Intended Use 4
Function 4
Trademarks 4
Patents 4

Safety 6

1

1.1 Symbols Used 6

1.2 Personnel Qualifications 6

1.3 General Safety Instructions 7

1.4 Liability and Warranty 7

2 Technical Data 8
3 Installation 13

3.1 Vacuum Connection 13

3.2 Power Connection 16

3.2.1 FCC68, 8-pin Connector 17

3.2.2 D-Sub, 9-pin Connector 18

3.2.3 Binder M12, 8-pin 19

4 Operation 20

4.2 Zeroing the Gauge 20

4.2.1 Zero Adjustment 20

5 Deinstallation 22
6 Maintenance, Repair 23
7 Returning the Product 24
8 Disposal 25

Further Information 26

ETL Certification 26
EC Declaration of Conformity 27

For cross-references within this document, the symbol (→  XY)
is used, for cross-references to further documents, listed under
"Further Information", the symbol (→  [Z]).

tina80e1 (2012-06) 5

1 Safety

1.1 Symbols Used

DANGER

Information on preventing any kind of physical injury.

WARNING

Information on preventing extensive equipment and environ­mental damage.

Caution

Information on correct handling or use. Disregard can lead to
malfunctions or minor equipment damage.

Notice

1.2 Personnel Qualifications

Skilled personnel

All work described in this document may only be carried out by
persons who have suitable technical training and the neces­sary experience or who have been instructed by the end-user
of the product.

6

tina80e1 (2012-06)

1.3 General Safety Instructions

• Adhere to the applicable regulations and take the necessary
precautions for the process media used.

Consider possible reactions with the product materials.

• Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider the
safety instructions in this document.

• Before beginning to work, find out whether any vacuum com­ponents are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contamin­ated parts.

Communicate the safety instructions to all other users.

1.4 Liability and Warranty

INFICON assumes no liability and the warranty becomes null
and void if the end-user or third parties

• disregard the information in this document

• use the product in a non-conforming manner

• make any kind of interventions (modifications, alterations etc.)

on the product

• use the product with accessories not listed in the product
documentation.

The end-user assumes the responsibility in conjunction with the
process media used.

Gauge failures due to contamination or wear and tear are not
covered by the warranty.

tina80e1 (2012-06) 7

2 Technical Data

Measurement range

1)

Accuracy

3CA3-xxx-xxxx
3CA4-xxx-xxxx

Temperature effect on zero
Temperature effect on span 0.02% of reading/ °C
Resolution
Gas type dependence none

Output signal analog
(measuring signal)

Voltage range –0.2 … +10.24 V
Measuring range 0 … +10 V
Relationship voltage-pressure linear

Output impedance

Loaded impedance

Response time

Gauge identification Resistance 13.2 kΩ refer-

→ "Validity"

≤1% of reading
≤0.5% of reading

0.02% F.S./ °C

0.05% F.S.

10 Ω (short-circuit proof)

>10 kΩ
100 ms

enced to supply common

1)

Non-linearity, hysteresis, repeatability in the calibrated range at 25 °C

ambient operating temperature without temperature effects after
operation of 2 h.

8

tina80e1 (2012-06)

Supply

DANGER

The gauge may only be connected to power sup­plies, instruments or control devices that conform
to the requirements of a grounded protective extra­low voltage (SELV) and limited power source
(LPS), Class 2. The connection to the gauge has to

2)

be fused

Supply voltage

at the gauge

ripple

.

+13 … +32 VDC
Class 2 / LPS
≤50 mV

pp

Current consumption <20 mA
Power consumption ≤0.3 W
Fuse required

2)

1 AT (slow), automatic reset

(Polyfuse)

The gauge is protected against reverse polarity of the supply
voltage.

Electrical connection

3CAx-xxx-0xxx
3CAx-xxx-1xxx
3CAx-xxx-Axxx

Sensor cable

3CAx-xxx-0xxx
3CAx-xxx-1xxx
3CAx-xxx-Axxx

FCC68/RJ45, 8-pin, socket
D-Sub, 9-pin, male
Binder M12, 8-pin, male

8-pin plus shielding
9-pin plus shielding

8-pin plus shielding
Cable length ≤100 m (0.14 mm² conductor)
For longer cables, larger conductor cross-sections are required.

Grounding concept

Vacuum flange - signal common

→ "Power Connection"

Supply common - signal common conducted separately; for dif-

ferential measurement (10 Ω)

2)

INFICON controllers fulfill this requirement.

tina80e1 (2012-06) 9

Materials exposed to vacuum

Flange, tube
Sensor, feedthrough

Internal volume

DN 16 ISO-KF
4 VCR male
4 VCR female
8 VCR female

Admissible pressure (absolute)

≥500 Torr/mbar (F.S.)
50 … 200 Torr/mbar (F.S.)
10 … 30 Torr/mbar (F.S.)

Bursting pressure (absolute) 6 bar

stainless steel AISI 316L

ceramics (Al

≤3.7 cm

≤6.1 cm

≤5.6 cm

≤5.1 cm

≥99.5%)

2O3

3

3

3

3

4 bar

3 bar

2 bar

Temperature compensated range +10 °C … +50 °C
Admissible temperatures

Storage
Operation
Bakeout (not in operation)

Relative humidity

–20 °C … +85 °C

0 °C … +70 °C

≤110 °C at the flange

≤80% at temperatures

≤+31 °C decreasing to 50%

at +40°C
Use indoors only, altitude up to

4000 m NN
Degree of protection IP 40

10

tina80e1 (2012-06)

Dimensions [mm]

28.3

84 3.8

39.15

23.8

23.8

6

15

DN 16 ISO-KF

49.2

64.2

30.7

8 VCR female

4 VCR female

4 VCR male

Weight ≤159 g

tina80e1 (2012-06) 11

Analog Measuring Signal vs. Pressure

Pressure p

1.1×F.S.

1.0×F.S.

0.9×F.S.

0.8×F.S.

0.7×F.S.

0.6×F.S.

0.5×F.S.

0.4×F.S.

0.3×F.S.

0.2×F.S.

0.1×F.S.

0.0×F.S.

0

12 345678910

Measuring signal U

p = (U

Conversion Torr ↔ Pascal

Torr mbar 3) Pa

c 1.00

1013.25 / 760 =

1.3332…

Example: Gauge with 10 Torr F.S.

Measuring signal U

p = (6 V / 10 V) × 10 Torr

= 0.6 × 10 Torr = 6 Torr

3)

Source: NPL (National Physical Laboratory)

Guide to the Measurement of Pressure and Vacuum, ISBN 0904457x /
1998

12

/ 10 V) × p (F.S.)

out

= 6 V

out

[V]

out

3)

101325 / 760 =

133.3224…

tina80e1 (2012-06)

3 Installation

WARNING

WARNING: fragile components
The ceramic sensor may be damaged by impacts.
Do not drop the product and prevent shocks and

3.1 Vacuum Connection

impacts.

DANGER

DANGER: overpressure in the vacuum system
>1 bar

Injury caused by released parts and harm caused
by escaping process gases can result if clamps are
opened while the vacuum system is pressurized.

Do not open any clamps while the vacuum system
is pressurized. Use the type clamps which are
suited to overpressure.

DANGER

DANGER: overpressure in the vacuum system
>2.5 bar

KF flange connections with elastomer seals (e.g.
O-rings) cannot withstand such pressures. Process
media can thus leak and possibly damage your
health.

Use O-rings provided with an outer centering ring.

tina80e1 (2012-06) 13

DANGER: protective ground
Products that are not correctly connected to ground

can be extremely hazardous in the event of a fault.
Electrically connect the gauge to the grounded

vacuum chamber. This connection must conform to
the requirements of a protective connection ac­cording to EN 61010:

• VCR flanges fulfill this requirement.

• For gauges with a KF flange, use a conductive

metallic clamping ring.

Caution: vacuum component
Dirt and damages impair the function of the vac-

uum component.
When handling vacuum components, take appro-

priate measures to ensure cleanliness and prevent
damages.

Caution: dirt sensitive area
Touching the product or parts thereof with bare

hands increases the desorption rate.
Always wear clean, lint-free gloves and use clean

tools when working in this area.

DANGER

Caution

Caution

14

tina80e1 (2012-06)

Mount the gauge so that no vibrations occur. The gauge

may be mounted in any orientation. To keep conden­sates and particles from getting into the measuring
chamber preferably choose a horizontal to upright posi­tion and possibly use a seal with a centering ring and
filter. If adjustment should be possible after the gauge
has been installed, be sure to install it so that the button
can be accessed with a pin (→  20).

Remove the protective lid and connect the product to the vac­uum system.

Seal with centering ring

or

Protective lid

Seal with centering ring
and filter

Clamp

Keep the protective lid.

tina80e1 (2012-06) 15

3.2 Power Connection

Make sure the vacuum connection is properly made

(→  13).

DANGER

The gauge may only be connected to power sup­plies, instruments or control devices that conform
to the requirements of a grounded protective extra­low voltage (SELV) and limited power source
(LPS), Class 2. The connection to the gauge has to

4)

be fused

.

Ground loops, differences of potential, or EMC problems

may affect the measurement signal. For optimum signal
quality, please do observe the following notes:

• Use an overall metal braided shielded cable. The
connector must have a metal case.

• Connect the cable shield to ground at one side via the
connector case. Make sure the connector case has
direct contact to the cable's shield on its whole cir­cumference. Do not connect the other side of the
shield.

• Connect the supply common with protective ground
directly at the power supply.

• Use differential measurement input (signal common
and supply common conducted separately).

• Potential difference between supply common and
housing ≤16 V (overvoltage protection).

4)

INFICON controllers fulfill this requirement.

16

tina80e1 (2012-06)

3.2.1 FCC68, 8-pin Connector

If no sensor cable is available, make one according to the
following diagram. Connect the sensor cable (cable →  9).

Ident

Measurement

signal

10Ω

16 V

680nF

4

3

5

1

2

100K

case

Electrical connection

Pin 1 Supply
Pin 2 Supply common GND
Pin 3 Signal output (measurement signal)
Pin 4 Gauge identification
or Remote Zero Adjust
Pin 5 Signal common
Pin 6 N.C.
Pin 7 N.C.
Pin 8 N.C.
case Connector case

Remote
Zero
Adjust

1

8

8-pin

FCC68

connector

tina80e1 (2012-06) 17

3.2.2 D-Sub, 9-pin Connector

If no sensor cable is available, make one according to the
following diagram. Connect the sensor cable (cable →  9).

Ident

Measurement

signal

10Ω

16 V

680nF

7

1

8

4

9

100K

case

Electrical connection

Pin 1 Signal output (measurement signal)
Pin 2 N.C.
Pin 3 N.C.
Pin 4 Supply
Pin 5 N.C.
Pin 6 N.C.
Pin 7 Gauge identification
or Remote Zero Adjust
Pin 8 Signal common
Pin 9 Supply common GND
case Connector case

Remote
Zero
Adjust

6

9

9-pin
D-Sub
female

soldering

1

5

side

18

tina80e1 (2012-06)

3.2.3 Binder M12, 8-pin

If no sensor cable is available, make one according to the
following diagram. Connect the sensor cable (cable →  9).

Ident

Measurement

signal

10Ω

16 V

680nF

4

3

5

1

2

100K

case

Electrical connection

Pin 1 Supply
Pin 2 Supply common GND
Pin 3 Signal output (measurement signal)
Pin 4 Gauge identification
or Remote Zero Adjust
Pin 5 Signal common
Pin 6 N.C.
Pin 7 N.C.
Pin 8 N.C.
case Connector case

Remote
Zero
Adjust

2

8

1

3 7

4

6

5

8-pin

Binder M12

female

soldering

side

tina80e1 (2012-06) 19

4 Operation

Put the gauge into operation. If you are using an INFICON con­troller, define the measurement range (→  [2], [3], [4]).

Warm-up time: approx. 1 minute.

4.1 Zeroing the Gauge

The gauge is factory calibrated while "standing upright". It re­quires no maintenance.

Due to mounting orientation, long time operation or contamina­tion, a zero drift could occur and zero adjustment may become
necessary.

For adjusting the zero, operate the gauge under the same con­stant ambient conditions and in the same mounting orientation
as normally.

If the gauge is operated via a controller, the zero of the

whole measuring system has to be adjusted on the
controller: first, adjust the zero of the gauge and then,
the zero of the controller.

4.1.1 Zero Adjustment

The zero can be adjusted via

• the button on the gauge, or

• the digital input "Remote Zero Adjust " (briefly apply the

supply voltage to pin 7 (D-Sub connector) or to pin 4 (FCC68
and Binder M12 connector)), or

• an INFICON Vacuum Gauge Controller (VGC series).

20

tina80e1 (2012-06)

 Evacuate the gauge to a pressure according to the table

below:

Recommended final pressure for

F.S.

1100 mbar
1000 Torr/mbar
200 Torr/mbar
100 Torr/mbar
50 Torr/mbar
20 Torr/mbar
10 Torr/mbar

−
<5×10
<10
<5×10
<2.5×10
<10
<5×10

-2

-2

-3

-3

-3

-4

Torr

Torr
Torr
Torr
Torr
Torr

zero adjustment

0

<6.65×10

Pa

0

Pa

<6.65×10

-0

Pa

<1.33×10

-1

Pa

<6.65×10

-1

Pa

<3.33×10

-1

Pa

<1.33×10

-2

Pa

<6.65×10

<5×10
<5×10
<10
<5×10
<2.5×10
<10
<5×10

-2

mbar

-2

mbar

-2

mbar

-3

mbar

-3

mbar

-3

mbar

-4

mbar

If the final pressure in the gauge is too high for zero ad­justment (>25% of the F.S.), the zero cannot be reached.

 Briefly press the button with a pin (max. ø1.1 mm). The

zero adjustment runs automatically (duration ≤8 s).

Press the button briefly

max. ø1.1 mm

After zero adjustment the gauge automatically returns to

measurement mode.

tina80e1 (2012-06) 21

5 Deinstallation

WARNING

WARNING: fragile components
The ceramic sensor may be damaged by impacts.
Do not drop the product and prevent shocks and

impacts.

22

DANGER: contaminated parts
Contaminated parts can be detrimental to health

and environment.
Before beginning to work, find out whether any

parts are contaminated. Adhere to the relevant re­gulations and take the necessary precautions when
handling contaminated parts.

Caution: vacuum component
Dirt and damages impair the function of the vac-

uum component.
When handling vacuum components, take appro-

priate measures to ensure cleanliness and prevent
damages.

DANGER

Caution

tina80e1 (2012-06)

Caution

Caution: dirt sensitive area
Touching the product or parts thereof with bare

hands increases the desorption rate.
Always wear clean, lint-free gloves and use clean

tools when working in this area.

 Vent the vacuum system.
 Put the gauge out of operation.
 Disconnect the sensor cable.
 Remove the gauge from the vacuum system and install the

protective lid.

6 Maintenance, Repair

The product requires no maintenance.

Gauge failures due to contamination or wear and tear

are not covered by the warranty.
We recommend checking the zero at regular intervals.

INFICON assumes no liability and the warranty becomes null
and void if any repair work is carried out by the end-user or third
parties.

tina80e1 (2012-06) 23

7 Returning the Product

WARNING

WARNING: forwarding contaminated products
Contaminated products (e.g. radioactive, toxic,

caustic or microbiological hazard) can be detrimen­tal to health and environment.

Products returned to INFICON should preferably be
free of harmful substances. Adhere to the forward­ing regulations of all involved countries and for­warding companies and enclose a duly completed

*)

Form under www.inficon.com

declaration of contamination

Products that are not clearly declared as "free of harmful sub­stances" are decontaminated at the expense of the customer.

Products not accompanied by a duly completed declaration of
contamination are returned to the sender at his own expense.

*)

.

24

tina80e1 (2012-06)

8 Disposal

DANGER: contaminated parts
Contaminated parts can be detrimental to health

and environment.
Before beginning to work, find out whether any

parts are contaminated. Adhere to the relevant re­gulations and take the necessary precautions when
handling contaminated parts.

DANGER

WARNING

WARNING: substances detrimental to the environ­ment

Products or parts thereof (mechanical and electric
components, operating fluids etc.) can be detrimen­tal to the environment.

Dispose of such substances in accordance with the
relevant local regulations.

Separating the components

After disassembling the product, separate its components ac­cording to the following criteria:

• Contaminated components
Contaminated components (radioactive, toxic, caustic or bio-

logical hazard etc.) must be decontaminated in accordance
with the relevant national regulations, separated according to
their materials, and disposed of.

• Other components
Such components must be separated according to their ma-

terials and recycled.

tina80e1 (2012-06) 25

Further Information

 [1] www.porter-inficon.com

Product Information
Porter™ CDG020D
INFICON AG, LI–9496 Balzers, Liechtenstein

 [2] www.inficon.com

Operating Manual
Vacuum Gauge Controller VGC032
tinb02e1
INFICON AG, LI–9496 Balzers, Liechtenstein

 [3] www.inficon.com

Operating Manual
Single-Channel Controller VGC401
tinb01e1
INFICON AG, LI–9496 Balzers, Liechtenstein

 [4] www.inficon.com

Operating Manual
Two- & Three-Channel Measurement and Control Unit
VGC402, VGC403
tinb07e1
INFICON AG, LI–9496 Balzers, Liechtenstein

ETL Certification

3103457

ETL LISTED
The product CDG020D complies with

the requirements of the following
Standards:
UL 61010-1, Issued: 2004/07/12 Ed: 2
Rev: 2005/07/22
CAN/CSA C22.2#61010-1,
Issued: 2004/07/12

26

tina80e1 (2012-06)

EC Declaration of Conformity

We, INFICON, hereby declare that the equipment mentioned
below complies with the provisions of the Directive relating to
electromagnetic compatibility 2004/108/EC and the Directive on
the restriction of the use of certain hazardous substances in
electrical and electronic equipment 2011/65/EU.

Capacitance Diaphragm Gauge

Porter™ CDG020D

Standards

Harmonized and international/national standards and specifi­cations:

• EN 61000-6-2:2005

• EN 61000-6-3:2007

• EN 61010-1:2001

measurement, control and laboratory use)

Manufacturer / Signatures

INFICON AG, Alte Landstraße 6, LI-9496 Balzers

27 June 2012 27 June 2012

(EMC: generic immunity standard)
(EMC: generic emission standard)

(Safety requirements for electrical equipment for

Dr. Urs Wälchli
Managing Director

Alex Nef
Product Manager

tina80e1 (2012-06) 27

LI–9496 Balzers
Liechtenstein
Tel +423 / 388 3111
Fax +423 / 388 3700

Original: German tina80d1 (2012-06) [e-mail]

t i na80e1

www.inficon.com