INFICON CDG020D User Manual

Capacitance Diaphragm Gauge

Porter™ CDG020D

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Operating Manual

Incl. EC Declaration of Conformity

Product Identification

In all communications with INFICON, please specify the infor­mation given on the product nameplate. For convenient refer­ence copy that information into the space provided below.

Model:

PN:
SN:
V W

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Validity

This document applies to products of the CDG020D series.

Part numbers of standard products are indicated below. OEM
products have other part numbers and different parameter
settings (e.g. customized measurement range) as defined in the
corresponding ordering information.

3CAx-xxx-0x00

Receptacle

Measurement range

(F.S.)

Accuracy

The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this

document correspond to gauges with D-Sub receptacle and the
DN 16 ISO-KF vacuum connection. They apply to other gauges
by analogy.

We reserve the right to make technical changes without prior
notice.

All dimensions in mm.

0  FCC
1  D-Sub, 9-pin

A  Binder M12, 8-pin

Flange

1  DN 16 ISO-KF
C  4VCR male
D  4
E 

Unit

5  Torr
6  mbar

9  10
A  20
B  50
C  100
D  200
E  500
F  1000 (Torr only)
G  1100 (mbar only)

3  1%
4  0.5%

VCR female

8VCR female

(x 133 Pa; x 1.3 mbar)

(x 100 Pa)

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Intended Use

The Capacitance Diaphragm Gauges of the CDG020D series
are intended for absolute pressure measurement of gases in
their respective pressure ranges (→  3).

The gauges can be operated in connection with an INFICON
Vacuum Gauge Controller (VGC series) or another appropriate
measuring unit.

Function

The Capacitance Diaphragm Gauge consists of a capacitive
sensor element made of aluminum oxide ceramics and electro­nics which convert the capacitance into a DC voltage output sig­nal.

The output signal is linear to the measured pressure and inde­pendent of the gas type.

Trademarks

Porter™ INFICON GmbH

®

VCR

Swagelok Marketing Co.

Patents

EP 1070239 B1, 1040333 B1
US 6528008 B1, 6591687 B1, 7107855 B2, 7140085 B2,

7536915 B2

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Contents

Product Identification 2
Validity 3
Intended Use 4
Function 4
Trademarks 4
Patents 4

Safety 6

1

1.1 Symbols Used 6

1.2 Personnel Qualifications 6

1.3 General Safety Instructions 7

1.4 Liability and Warranty 7

2 Technical Data 8
3 Installation 13

3.1 Vacuum Connection 13

3.2 Power Connection 16

3.2.1 FCC68, 8-pin Connector 17

3.2.2 D-Sub, 9-pin Connector 18

3.2.3 Binder M12, 8-pin 19

4 Operation 20

4.2 Zeroing the Gauge 20

4.2.1 Zero Adjustment 20

5 Deinstallation 22
6 Maintenance, Repair 23
7 Returning the Product 24
8 Disposal 25

Further Information 26

ETL Certification 26
EC Declaration of Conformity 27

For cross-references within this document, the symbol (→  XY)
is used, for cross-references to further documents, listed under
"Further Information", the symbol (→  [Z]).

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1 Safety

1.1 Symbols Used

DANGER

Information on preventing any kind of physical injury.

WARNING

Information on preventing extensive equipment and environ­mental damage.

Caution

Information on correct handling or use. Disregard can lead to
malfunctions or minor equipment damage.

Notice

1.2 Personnel Qualifications

Skilled personnel

All work described in this document may only be carried out by
persons who have suitable technical training and the neces­sary experience or who have been instructed by the end-user
of the product.

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1.3 General Safety Instructions

• Adhere to the applicable regulations and take the necessary
precautions for the process media used.

Consider possible reactions with the product materials.

• Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider the
safety instructions in this document.

• Before beginning to work, find out whether any vacuum com­ponents are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contamin­ated parts.

Communicate the safety instructions to all other users.

1.4 Liability and Warranty

INFICON assumes no liability and the warranty becomes null
and void if the end-user or third parties

• disregard the information in this document

• use the product in a non-conforming manner

• make any kind of interventions (modifications, alterations etc.)

on the product

• use the product with accessories not listed in the product
documentation.

The end-user assumes the responsibility in conjunction with the
process media used.

Gauge failures due to contamination or wear and tear are not
covered by the warranty.

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2 Technical Data

Measurement range

1)

Accuracy

3CA3-xxx-xxxx
3CA4-xxx-xxxx

Temperature effect on zero
Temperature effect on span 0.02% of reading/ °C
Resolution
Gas type dependence none

Output signal analog
(measuring signal)

Voltage range –0.2 … +10.24 V
Measuring range 0 … +10 V
Relationship voltage-pressure linear

Output impedance

Loaded impedance

Response time

Gauge identification Resistance 13.2 kΩ refer-

→ "Validity"

≤1% of reading
≤0.5% of reading

0.02% F.S./ °C

0.05% F.S.

10 Ω (short-circuit proof)

>10 kΩ
100 ms

enced to supply common

1)

Non-linearity, hysteresis, repeatability in the calibrated range at 25 °C

ambient operating temperature without temperature effects after
operation of 2 h.

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Supply

DANGER

The gauge may only be connected to power sup­plies, instruments or control devices that conform
to the requirements of a grounded protective extra­low voltage (SELV) and limited power source
(LPS), Class 2. The connection to the gauge has to

2)

be fused

Supply voltage

at the gauge

ripple

.

+13 … +32 VDC
Class 2 / LPS
≤50 mV

pp

Current consumption <20 mA
Power consumption ≤0.3 W
Fuse required

2)

1 AT (slow), automatic reset

(Polyfuse)

The gauge is protected against reverse polarity of the supply
voltage.

Electrical connection

3CAx-xxx-0xxx
3CAx-xxx-1xxx
3CAx-xxx-Axxx

Sensor cable

3CAx-xxx-0xxx
3CAx-xxx-1xxx
3CAx-xxx-Axxx

FCC68/RJ45, 8-pin, socket
D-Sub, 9-pin, male
Binder M12, 8-pin, male

8-pin plus shielding
9-pin plus shielding

8-pin plus shielding
Cable length ≤100 m (0.14 mm² conductor)
For longer cables, larger conductor cross-sections are required.

Grounding concept

Vacuum flange - signal common

→ "Power Connection"

Supply common - signal common conducted separately; for dif-

ferential measurement (10 Ω)

2)

INFICON controllers fulfill this requirement.

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