INFICON BPG402-Sx User Manual

Operating Manual

Bayard-Alpert Pirani Gauge

Dual Filament Bayard-Alpert Pirani Gauge

BPG402-S BPG402-SD BPG402-SL BPG402-SP

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Product Identification

In all communications with INFICON, please specify the information on the product nameplate. For convenient reference copy that information into the space provided below.

INFICON AG, LI-9496 Balzers

Model: PN: SN: V W

Validity

Intended Use

This document applies to products with the following part numbers: BPG402-S (without display, one switching function )

353-570 353-571

(vacuum connection DN 25 ISO-KF) (vacuum connection DN 40 CF-R)

BPG402-S (with display, one switching function)

353-572 353-573

(vacuum connection DN 25 ISO-KF) (vacuum connection DN 40 CF-R)

BPG402-SL (without display, one switching function)

353-571

(vacuum connection DN 40 CF-R, long tube)

BPG402-SD (with DeviceNet interface and two switching functions)

353-576 353-577

(vacuum connection DN 25 ISO-KF) (vacuum connection DN 40 CF-R)

BPG402-SP (with Profibus interface and two switching functions)

353-574 353-575

(vacuum connection DN 25 ISO-KF) (vacuum connection DN 40 CF-R)

The part number (PN) can be taken from the product nameplate.

If not indicated otherwise in the legends, the illustrations in this document correspond to gauge with part number 353-572. They apply to the other gauges by analogy.

We reserve the right to make technical changes without prior notice. All dimensions in mm.

The BPG402-Sx gauges have been designed for vacuum measurement of nonflammable gases and gas mixtures in a pressure range of 5×10

-10

… 1000 mbar.

The gauges can be operated in connection with the INFICON Vacuum Gauge Controller VGC40x or with other control devices.

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Functional Principle

Over the whole measuring range, the gauge has a continuous characteristic curve and its measuring signal is output as logarithm of the pressure.

The gauge functions with a Bayard-Alpert hot cathode ionization measurement system (for p < 2.0×10 p > 5.5×10

2.0×10

-3

mbar). In the overlapping pressure range of

-2

… 5.5×10-3 mbar, a mixed signal of the two measurement systems is output. The hot cathode is switched on by the Pirani measurement system only below the switching threshold of 2.4×10 switched off when the pressure exceeds 3.2×10

-2

mbar) and a Pirani measurement system (for

-2

mbar (to prevent filament burn-out). It is

-2

mbar.

BPG402-Sx sensors are equipped with two hot cathodes. The identical filaments are monitored by the gauge electronics. In case of a filament failure, the gauge will switch over to the second (undamaged) filament and continue to operate. The filament status is displayed on the gauge or can be read via the interfaces (RS232C, DeviceNet or Profibus).

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Contents

Product Identification 2 Validity 2 Intended Use 2 Functional Principle 3

Safety 6

1.1 Symbols Used 6

1.2 Personnel Qualifications 6

1.3 General Safety Instructions 7

1.4 Liability and Warranty 7

2 Technical Data 8 3 Installation 13

3.1 Vacuum Connection 13

3.1.1 Removing and Installing the Electronics Unit 14

3.1.2 Using the Optional Baffle 15

3.2 Electrical Connection 17

3.2.1 Use With INFICON VGC40x Vacuum Gauge Controller 17

3.2.2 Use With Other Controllers 17

3.2.2.1 Making an Individual Sensor Cable 18

3.2.2.2 Making a DeviceNet Interface Cable (BPG402-SD) 21

3.2.2.3 Making a Profibus Interface Cable (BPG402-SP) 22

3.2.3 Using the Optional Power Supply (With RS232C Line) 23

4 Operation 25

4.1 Measuring Principle, Measuring Behavior 25

4.2 Operational Principle of the Gauge 27

4.3 Putting the Gauge Into Operation 27

4.4 Degas 27

4.5 Filament Status 28

4.5.1 Filament Status Indicator 28

4.5.2 Filament Status Relay (Only BPG402-S) 28

4.5.3 Filament Status via Interface 28

4.6 Filament Control Mode 28

4.7 Emission Control Mode 29

4.8 Display (BPG402-S) 29

4.9 RS232C Interface 30

4.9.1 Description of the Functions 30

4.9.1.1 Output String (Transmit) 31

4.9.1.2 Input String (Receive) 33

4.10 DeviceNet Interface (BPG402-SD) 34

4.10.1 Description of the Functions 34

4.10.2 Operating Parameters 34

4.10.2.1 Operating Software 34

4.10.2.2 Node Address Setting 34

4.10.2.3 Data Rate Setting 35

4.10.3 Status Indicators 35

4.11 Profibus Interface (BPG402-SP) 36

4.11.1 Description of the Functions 36

4.11.2 Operating Parameters 36

4.11.2.1 Operating Software 36

4.11.2.2 Node Address Setting 36

4.12 Switching Functions 37

4.12.1 Setting the Switching Functions 38

5 Deinstallation 39 6 Maintenance, Repair 41

6.1 Cleaning the Gauge 41

6.2 Adjusting the Gauge 41

6.2.1 Adjustment at Atmospheric Pressure 41

6.2.2 Zero Point Adjustment 42

6.3 What to Do in Case of Problems 42

6.4 Replacing the Sensor 44

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7 Options 45 8 Spare Parts 45 9 Storage 45 10 Returning the Product 46 11 Disposal 46

Appendix 47

A: Relationship Output Signal – Pressure 47 B: Gas Type Dependence 48 C: Literature 50

Declaration of Contamination 51

For cross-references within this document, the symbol (→  XY) is used, for cross- references to further documents and data sources, the symbol (→  [Z]).

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1 Safety

1.1 Symbols Used

DANGER

Information on preventing any kind of physical injury.

WARNING

Information on preventing extensive equipment and environmental damage.

Caution

Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage.

Notice

1.2 Personnel Qualifications

Hint, recommendation

The result is O.K.

The result is not as expected

Optical inspection

Waiting time, reaction time

Skilled personnel

All work described in this document may only be carried out by persons who have suitable technical training and the necessary experience or who have been instructed by the end-user of the product.

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1.3 General Safety Instructions

1.4 Liability and Warranty

• Adhere to the applicable regulations and take the necessary precautions for the process media used.

Consider possible reactions between the materials (→  11) and the process media.

Consider possible reactions of the process media (e.g. explosion) due to the heat generated by the product.

• Adhere to the applicable regulations and take the necessary precautions for all work you are going to do and consider the safety instructions in this document.

• Before beginning to work, find out whether any vacuum components are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.

Communicate the safety instructions to all other users.

INFICON assumes no liability and the warranty becomes null and void if the enduser or third parties

• disregard the information in this document

• use the product in a non-conforming manner

• make any kind of interventions (modifications, alterations etc.) on the product

• use the product with accessories not listed in the corresponding product docu-

mentation.

The end-user assumes the responsibility in conjunction with the process media used.

Gauge failures due to contamination, as well as expendable parts (filament), are not covered by the warranty.

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2 Technical Data

Measurement

Emission

Degas

Output signal

Gauge identification

Measurement range (air, O2, CO, N2) 5×10 Accuracy

(after 10 min. stabilization) Repeatability

(after 10 min. stabilization)

-10

… 1000 mbar, continuous

15% of reading in the range of 1×10-8 … 10-2 mbar

5% of reading in the range of 1×10-8 … 10-2 mbar

Gas type dependence → Appendix B

Switching on threshold Switching off threshold

Emission current

p ≤7.2×10

7.2×10

-6

mbar

-6

mbar < p < 3.2×10-2 mbar

Emission current switching

25 µA ⇒ 5 mA 5 mA ⇒ 25 µA

Filaments

Number Means of selection

2.4×10-2 mbar

-2

3.2×10

mbar

5 mA 25 µA

7.2×10-6 mbar

-5

3.0×10

mbar

2 Controlled by gauge (default) or via

interfaces (→  33,  [1] and  [9])

Settling time of measurement signal after filament change

Filament status

Emission control mode

Automatic Manual

<4 s LED, relay contact (→  28)

Emission ON/OFF automatically Emission ON/OFF by user via interfaces (→  29)

Current (p <7.2×10-6 mbar) ≈20 mA Control input signal 0 V/+24 VDC, active high

(→  19, 20)

(control via RS232C →  30) Duration <3 min., followed by automatic stop In degas mode, the BPG402-Sx gauges keep supplying pressure readings, the

tolerances of which can be higher than during normal operation. Degas acts only upon the active filament.

Output signal (measuring signal) 0 … +10 VDC Measuring range +0.774 … +10 V

(5×10

-10

… 1000 mbar)

Relationship voltage-pressure logarithmic, 0.75 V/decade

(

→ Appendix A)

Error signal (→  42)

EEPROM error Hot cathode error Pirani error

Minimum load impedance

BPG402-Sx

≈+0.1 VDC

≈+0.3 VDC

≈+0.5 VDC

10 kΩ

42 kΩ resistor between Pin 10 and Pin 5

(sensor cable)

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Switching functions

RS232C interface

DeviceNet interface (BPG402-SD)

BPG402-S, -SL BPG402-SD, -SP Adjustment range

1 ("SETPOINT") 2 ("SETPOINT A, B")

-9

mbar … 100 mbar

1×10 Setpoints adjustable via potentiometers,

one floating, normally open relay contact per setpoint (→  19, 20, 37).

(Adjusting the setpoints via field bus

→ corresponding bus section) Hysteresis 10% of the threshold value Relaiskontaktbelastung

Data rate Data format

Connections (sensor cable connector)

TxD (Transmit Data) RxD (Receive Data) GND

≤30 VDC, ≤0.5 ADC

9600 Baud binary

8 data bits one stop bit no parity bit no handshake

Pin 13 Pin 14 Pin 5

Function and communication protocol of the RS232C interface →  30

Fieldbus name DeviceNet Standard applied Communication protocol, data format Interface, physical CAN bus

Data rate (adjustable via "RATE" switch)

→  [6]

→  [1], [4]

125 kBaud

250 kBaud

500 kBaud (default)

"P" (125 kBaud, 250 kBaud, 500 kBaud

programmable via DeviceNet)

(→  [1]) Node address (MAC ID)

(Adjustable via "ADDRESS", "MSD", "LSD" switches)

0 … 63

(default = 63

dec

) "P" (0 … 63 programmable via DeviceNet, →  [1])

DeviceNet connector Micro-Style, 5 pins, male

Cable shielded, special DeviceNet cable,

5 conductors (→  21 and  [4])

Cable length, system wiring according to DeviceNet specifications

(→  [6], [4])

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Profibus interface (BPG402-SP)

Display (BPG402-S only)

Power supply

Fieldbus name Profibus Standard applied Communication protocol, data format Interface, physical RS485

Data rate Node address

Local (Adjustable via hexadecimal "ADDRESS", "MSD", "LSD" switches)

Default setting Via Profibus

("ADDRESS" switches set to >7D (>125

dec

))

→  [7] →  [2], [7]

≤12 MBaud (→  [2])

00 … 7D 5C

hex

00 … 7D

hex

(0 … 125

dec

)

Profibus connection D-Sub, 9 pins, female

Cable shielded, special Profibus cable

(→  22 and  [5])

Cable length, system wiring according to Profibus specifications

(→  [7], [5])

Display panel

Dimensions Pressure units

Selecting the pressure unit

LCD matrix, 32×16 pixels, with background illumination

17.0 mm × 12 mm mbar (default), Torr, Pa

via RS232C (→  30)

DANGER

The gauge must only be connected to power supplies, instruments or control devices that conform to the requirements of a grounded extralow voltage (SELV). The connection to the gauge has to be fused (INFICON-controllers fulfill these requirements).

Supply voltage at the gauge +24 VDC (+20 … +28 VDC) 1)

Power consumption

Standard Degas Emission start (<200 ms)

ripple max. 2 V

≤0.5 A ≤0.8 A ≤1.4 A

Fuse necessary 1.25 AT

((INFICON controllers fulfill these requirements)

Power consumption

BPG402-S, -SL BPG402-SD BPG402-SP

≤18 W ≤18 W ≤20 W

The BPG402-SD requires an additional, separate power supply for the

Supply voltage at the DeviceNet

Power consumption

DeviceNet interface (→  21).

connector (Pin 2 and Pin 3)

+24 VDC (+11 … +25 VDC) ≤2 W

The gauge is protected against reversed polarity of the supply voltage.

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Electrical connection

Materials used

Ambiance

For reasons of compatibility, the expression "sensor cable" is used for all

BPG402 versions in this document, although the pressure reading of the gauges with fieldbus interface (BPG402-SD and BPG402-SP) is

Electrical connection

normally transmitted via the corresponding bus.

BPG402-S, -SL BPG402-SD, -SP

D-Sub,15 pins, male

→  19 →  20

Sensor cable shielded, number of conductors de-

pending on the functions used, max. 15 conductors plus shielding

Cable length (supply voltage 24 VDC

Analog and fieldbus operation

For operation with RS232C interface

Materials exposed to vacuum

Housing, supports, screens Feedthroughs Insulator Cathode Cathode holder Pirani element

Internal volume

DN 25 ISO-KF DN 40 CF-R

)

≤35 m, 0.25 mm²/conductor ≤50 m, 0.34 mm²/conductor ≤100 m, 1.0 mm²/conductor

≤30 m

stainless steel NiFe, nickel plated glass iridium, yttrium oxide (Y molybdenum, platinum tungsten, copper

≈24 cm

≈34 cm

2O3

)

Pressure max. 2 bar (absolute)

Admissible temperatures

Storage Operation Bakeout

Long tube

Relative humidity

Year's mean During 60 days

-20 … 170 °C 0 … 150 °C

+ 80 °C +150 °C

≤65 (no condensation) 85% (no condensation)

Use indoors only

altitude up to 2000 m NN Mounting orientation any Type of protection IP 30

Measured at gauge connector (consider the voltage drop as function of the sensor cable

length).

Flange temperature, electronics unit removed, horizontally mounted.

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Dimensions [mm]

4-40UNC 2B

DN 25 ISO-KF

DN 40 CF-R

4-40UNC 2B

Gauges with DeviceNet connector

are 14 mm longer.

DN 40 CF-R

Weight

353-570, 353-572 353-571, 353-573 353-578

≈450 g ≈710 g ≈917 g

353-574, 353-576

353-575, 353-577

≈490 g ≈750 g

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3 Installation

3.1 Vacuum Connection

DANGER: overpressure in the vacuum system >1 bar Injury caused by released parts and harm caused by escaping process

gases can result if clamps are opened while the vacuum system is pressurized.

Do not open any clamps while the vacuum system is pressurized. Use the type of clamps which are suited to overpressure.

The gauge must be electrically connected to the grounded vacuum chamber. This connection must conform to the requirements of a protective connection according to EN 61010:

• CF connections fulfill this requirement

• For gauges with a KF vacuum connection, use a conductive me-

tallic clamping ring.

DANGER

Caution: vacuum component Dirt and damages impair the function of the vacuum component. When handling vacuum components, take appropriate measures to

ensure cleanliness and prevent damages.

Caution: dirt sensitive area Touching the product or parts thereof with bare hands increases the

desorption rate. Always wear clean, lint-free gloves and use clean tools when working

in this area.

The gauge may be mounted in any orientation. To keep condensates

and particles from getting into the measuring chamber, preferably choose a horizontal to upright position. See dimensional drawing for space requirements (→  12).

The gauge is supplied with a built-in grid. For potentially contaminating applications and to protect the electrodes against light and fast charged particles, installation (→  15) of the optional baffle is recommended (→  45).

Caution

When installing the gauge, make sure that the area around the con-

nector is accessible for the tools required for adjustment while the gauge is mounted (→  38, 41).

When installing the gauge, allow for installing/deinstalling the connectors and accommodation of cable loops.

If you are using a gauge with display, make sure easy reading of the display is possible.

Vacuum connection free of grease.

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Procedure

3.1.1 Removing and Installing the Electronics Unit

Required tools / material

Removing the electronics unit

Remove the protective lid and install the gauge to the vacuum system.

Seal with centering ring

Protective lid

Clamp

• Allen wrench, AF 2.5

(keep it)

 Unscrew the hexagon socket set screw (1) on the side of the electronics

unit (2).

 Remove the electronics unit without twisting it.

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Installing the electronics unit

 Place the electronics unit (2) on the sensor (3) (be careful to correctly align

the pins and notch (4)).

3.1.2 Using the Optional Baffle

Precondition

Required tools / material

Installation

 Slide the electronics unit in to the mechanical stop and lock it with the hexa-

gon socket set screw.

In severely contaminating processes and to protect measurement electrodes optically against light and fast charged particles, replacement of the built-in grid by the optional baffle (→  45) is recommended.

Gauge deinstalled ("Deinstallation" →  39).

• Baffle (→  45)

• Pointed tweezers

• Pin (e.g. pencil)

• Screwdriver No 1

 Carefully remove the grid with tweezers.

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 Carefully place the baffle onto the sensor opening.

 Using a pin, press the baffle down in the center until it catches.

Deinstallation

Carefully remove the baffle with the screwdriver.

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