INFICON BPG402-SP User Manual

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Communication Protocol

Profibus

DP/V1 Interface for Bayard-Alpert Pirani Gauge

BPG402-SP

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About this Document

This document describes the functionality and programming of the Profibus interface of the BPG402-SP gauge.

For safety information on and technical data of the gauges, please refer to the respective operating manuals (→  [1], [3]).

In information referring to the ionization vacuum measuring part of the gauge, the short designation "BA" (Bayard-Alpert measuring principle) is used.

The designation "Pirani" is used in information referring to the Pirani vacuum measuring part of the gauge.

Product Identification

Validity

In all communications with INFICON, please specify the information on the product nameplate. For convenient reference copy that information into the space provided below.

INFICON AG, LI-9496 Balzers

Model: PN: SN: V W

This document applies to products with part numbers BPG402-SP (with Profibus interface and switching functions)

353-574 353-575 (vacuum connection DN 40 CF-R)

The part number (PN) can be taken from the product nameplate.

(vacuum connection DN 25 ISO-KF)

Intended Use

Functional Principle

Trademarks

The BPG402-SP gauge allows vacuum measurement of non flammable gases and gas mixtures (pressure ranges →  [1], [3]).

The gauges can be operated with an INFICON controller or another instrument or control device.

The function of the gauge is described in the operating manual (→  [1], [2], [3]). The integrated Profibus interface allows operating the gauge in connection with

other suitable devices in a Profibus network according to the standard described in  [4], [5].

SEMI Profibus This document contains Profibus-specific information described and

Semiconductor Equipment and Materials International, California

defined in the Profibus Profiles (→  [4], [6], [7]).

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Contents

About this Document 2 Product Identification 2 Validity 2 Intended Use 2 Functional Principle 2 Trademarks 2

1 General Data 5

1.1 Data Rate 5

1.2 Device Address 5

1.3 Ident Number 5

1.4 Configuration Data 5

1.5 User Parameter Data 6

1.6 Types of Communication 6

2 Data Exchange Mode 7

2.1 Acyclic Data Transmission with Profibus DPV1 Functionality 7

2.2 Structure of the Cyclic Data Telegrams in Data Exchange Mode 8

2.2.1 Parameter Channel 8

2.2.1.1 PKE Parameter Signature Value 9

2.2.1.2 PWE Parameter (Process Value) 9

2.2.1.3 Error Code (Error Message) 10

2.3 Cyclic Message Telegrams 11

3 Block Model 12

3.1 Device Block 13

3.1.1 Information on the Individual Indices 14

3.1.1.1 Block Type ID 16 14

3.1.1.2 Device Type ID 17 14

3.1.1.3 Standard Revision Level ID 18 14

3.1.1.4 Device Manufacturer Identifier ID 19 14

3.1.1.5 Manufacturer Model Number ID 20 14

3.1.1.6 Software or Firmware Revision Level ID 21 14

3.1.1.7 Hardware Revision Level ID 22 14

3.1.1.8 Device Configuration ID 24 14

3.1.1.9 Device State ID 25 14

3.1.1.10 Exception Status ID 26 15

3.1.1.11 Exception Detail Alarm ID 27 16

3.1.1.12 Exception Detail Warning ID 28 18

3.1.1.13 Copy Common Exception Detail Alarm 0 ID 204 20

3.1.1.14 Copy Device Exception Detail Alarm 0 … 3 ID 205 20

3.1.1.15 Copy Manufacturer Exception Detail Alarm 0 ID 207 20

3.1.1.16 Copy Common Exception Detail Warning 0 ID 208 20

3.1.1.17 Copy Device Exception Detail Warning 0 … 3 ID 209 20

3.1.1.18 Copy Device Exception Detail Warning 4 ID 210 20

3.1.1.19 Copy Manufacturer Exception Detail Warning 0 ID 211 20

3.1.2 Device Block, Device Behavior 21

3.1.2.1 Device Block State Command 22

3.2 Analog Input Block 23

3.2.1 One Of N Analog Input Function Block / SLOT 1 23

3.2.1.1 AI Block Adjust Command ID 15 23

3.2.1.2 Block Type ID 16 23

3.2.1.3 Channel Instance Selector ID 46 23

3.2.1.3 PV Selector ID 47 23

3.2.2 Analog Sensor Input Function Block SLOT 1 / Instance 1 24

3.2.2.1 Process Value ID 19 24

3.2.2.2 Status ID 20 24

3.2.2.3 Data Type ID 21 24

3.2.2.4 Data Unit ID 22 25

3.2.2.5 Reading Valid ID 23 25

3.2.2.6 Full Scale ID 24 25

3.2.2.7 Safe State ID 39 26

3.2.2.8 Safe Value ID 40 26

3.2.2.9 Overrange ID 44 26

3.2.2.10 Underrange ID 45 26

3.2.2.11 AI Block Adjust Command (Pirani) ID 15 26

3.2.3 Analog Sensor Input Function Block SLOT 1 / Instance 2 27

3.2.3.1 Process Value ID 19 27

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3.2.3.2 Status ID 20 27

3.2.3.3 Data Type ID 21 27

3.2.3.4 Data Unit ID 22 28

3.2.3.5 Reading Valid ID 23 28

3.2.3.6 Full Scale ID 24 28

3.2.3.7 Safe State ID 39 29

3.2.3.8 Safe Value ID 40 29

3.2.3.9 Overrange ID 44 29

3.2.3.10 Underrange ID 45 29

3.2.4 Analog Sensor Input Function Block SLOT 1 / Instance 3, 4 30

3.2.4.1 Process Value ID 19 30

3.2.4.2 Status ID 20 30

3.2.4.3 Data Type ID 21 30

3.2.4.4 Data Unit ID 22 31

3.2.4.5 Reading Valid ID 23 31

3.3 Transducer Block 32

3.3.1 One Of N Vacuum Gauge Transducer Block / SLOT 1 32

3.3.1.1 One Of N Status Extension 32

3.3.2 Heat Transfer Vacuum Gauge Transducer Block / SLOT 1 / Instance 1 32

3.3.2.1 Block Type ID 101 32

3.3.2.2 Status Extension ID 102 32

3.3.2.3 Sensor Alarm ID 103 32

3.3.2.4 Sensor Warning ID 104 33

3.3.3 Hot Cathode Ion Gauge Transducer Block / SLOT 1 / Instance 2 33

3.3.3.1 Block Type ID 101 33

3.3.3.2 Status Extension ID 102 33

3.3.3.3 Sensor Alarm ID 103 34

3.3.3.4 Sensor Warning ID 104 34

3.3.3.5 Emission Status ID 105 34

3.3.3.6 Emission Current ID 106 35

3.3.3.7 Active Filament ID 108 35

3.3.3.8 Degas Status ID 109 35

3.3.3.9 Active Degas Filament ID 116 35

3.3.3.10 Mode Filament Selection ID 119 35

3.3.3.11 Emission User Mode State ID 201 35

3.3.3.12 Hot Cathode Block State Command ID 14 36

Appendix A: Definitions 37 Appendix B: Block Type 40 Appendix C: Electrical Connections 41 Appendix D: Literature 43

For cross-references to other documents, the symbol (→  [XY]) is used.

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1 General Data

1.1 Data Rate

1.2 Device Address

The gauge supports all data rates defined in the EN 50170 standard (→  [5]) up to 12 Mbaud. Automatic data rate setting is supported. Alternatively, a fixed data rate can be selected.

The device address ( node address) must be set via two rotary switches when the gauge is installed.

For unambiguous identification of the gauge in a Profibus environment, a node address is required. The node address setting is made on the gauge.

The node address (0 … 125 (00 … 7D

) (default value 5C

hex

) is set in hexadecimal form

dec

) via the "ADDRESS" switches.

hex

The "MSD" switch is used for setting the high-order address nibble and the "LSD" switch for defining the low-order address nibble.

The node address is polled by the firmware when the gauge is switched on. If the setting deviates from the stored value, the new value is taken over into the NVRAM. If a value >7D

hex

(>125

) is entered, the node address setting currently

dec

stored in the device remains valid. However, the address can be set via the Profibus master with the "Set Slave Address" service. This address setting will be stored in the EEPROM of the gauge.

1.3 Ident Number

1.4 Configuration Data

The ident number assigned to the gauge by the PNO (→  [4]) is:

Gauge Ident number (hexadecimal)

BPG402-SP 0x09AA

Depending on the standard telegrams used (→ section "Cyclic Message Telegrams"), the following configuration data have to be transmitted to the gauge during the configuration phase:

Standard telegram

Master ⇒ Slave

Standard telegram

Slave ⇒ Master

Configuration data

- 4 0x44, 0x84, 0x05, 0x05, 0x05, 0x03

- 5 0x44, 0x86, 0x05, 0x05, 0x05, 0x08

1 4 0xC6, 0x81, 0x84, 0x05, 0x05,

0x05, 0x05, 0x05, 0x03

1 5 0xC6, 0x81, 0x86, 0x05, 0x05,

0x05, 0x05, 0x05, 0x08

3 6 0xC6, 0x87, 0x8C, 0x0A, 0x0A,

0x05, 0x05, 0x05, 0x03

3 7 0xC6, 0x87, 0x8E, 0x0A, 0x0A,

0x05, 0x05, 0x05, 0x08

2 6 0xC8, 0x89, 0x8C, 0x0A, 0x05,

0x05, 0x0A, 0x05, 0x05, 0x05, 0x03

2 7 0xC8, 0x89, 0x8E, 0x0A, 0x05,

0x05, 0x0A, 0x05, 0x05, 0x05, 0x08

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1.5 User Parameter Data

Depending on the pressure unit setting ( data unit), the following configuration string has to be transmitted to the gauge (parameter data in hexadecimal format):

1.6 Types of Communication

Pressure unit User parameter data string COUNTS Torr 00 00 00 05 15 Micron 00 00 00 05 16 mbar 00 00 00 05 1C Pascal 00 00 00 05 1D

If COUNTS is selected as pressure unit, a value is output, which can be converted into a corresponding pressure value by means of a formula (→ section "Analog Sensor Input Function Block" for more information).

BPG402-SP works according to the Profibus DPV1 specification and can be addressed in cyclic or acyclic data traffic (→  [4]).

Acyclic data traffic should be used to make device or process specific settings such as definition of the Safe Values, Safe States etc. or for reading or writing of rarely used attributes.

Cyclic data traffic is used for continuous exchange of the required process parameter values, i.e. pressure value and status indications. A number of standard telegrams are available for cyclic data traffic. They can be selected according to requirements (→ section "Cyclic Message Telegrams").

00 00 00 03 E9

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2 Data Exchange Mode

2.1 Acyclic Data Transmission with Profibus DPV1 Functionality

Block, slot and index assignment

The reading and writing operations defined in Profibus are based on a slot index address scheme. In BPG402-SP, all device functions are organized in the following blocks:

• A device block describing all organizational parameters of the gauge (serial number, manufacturer, software version, …)

• An Analog Sensor Function Block describing the function of the pressure presentation

• An Analog Sensor Transducer Block describing the physical interface between the gauge and the process (emission current, ion current, …).

The block model is described in detail in section "Block Model". Each block is assigned to a separate slot. The exact assignment

Block ⇒ Slot ⇒ Index is described in section "Block Model". The Device Block is assigned to Slot 0, the transducer and functional blocks to Slot 1.

Index

254

Device

Block

Block_1 Block_2 Block_3

Assignment of the block elements to the slot indices

0123

There are 254 indices per slot. The indices can have a width of 255 bytes. All values that can be accessed via Profibus have to be mirrored to one of these slots/ indices.

The parameters are generally numbered in ascending order, starting with index 16. Services such as "Degas On" or "Full scale" are numbered in descending order, starting with index 15.

Index

Parameter_n

Block_x

Parameter_2 Parameter_1 Parameter_0

Operation_1 Operation_2 Operation_n

optional

Block_Type_Name

Attributes

Public

Operations Public

optional

Private

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2.2 Structure of the Cyclic Data Telegrams in Data Exchange Mode

In Data Exchange mode, the DP master class 1 cyclically transmits data from and to all slaves that are connected to the bus.

In this document, data transmitted from the slave to the master are called "input data" and data transmitted from the master to the slave are called "output data".

The input and output data of the BPG402-SP has two logic parts:

1) the parameter channel

2) the process data channel There is a number of standard telegrams, consisting of: a) the parameter channel only

b) the process data channel only c) both, the parameter and process data channel

The parameter channels allows masters without Profibus DPV1 to access device specific parameters that are not part of the normal cyclic data telegram. For masters with Profibus DPV1, no parameter channel is required.

Input data

Output data

The input data (transmitted by the BPG402-SP) consists of the 8 bytes of the parameter channel (if there is a parameter channel in the standard telegram) and of up to 15 bytes of process data depending on the selected standard telegram.

Byte Byte

1 2 3 4 5 6 7 8 9 … 23

Parameter Channel Process Data

PKE IND res. PWE

Where: PKE = Parameter Signature Value

IND = Sub Index

res. = reserved PWE = Process Value

The output data (transmitted by the master) consist of 8 bytes of the parameter channel and up to 10 bytes of process data (control bytes).

Byte Byte

1 2 3 4 5 6 7 8 9 … 18

Parameter Channel Process Data

PKE IND res. PWE

Reading or writing command and definition of the slot

Index No. of the index to be read (→ "Block Model")

Value to be read or written

2.2.1 Parameter Channel

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The structure of the parameter channel is described in the table below. The parameter channel (called PKW Interface hereinafter) consists of 8 bytes.

Byte

1 2 3 4 5 6 7 8

PKE IND res. PWE

The PKW Interface allows reading and writing of slave parameters with a maximum data length of 4 bytes. Strings cannot be read.

The slave generates exactly one response per instruction transmitted by the master. The instruction and response cannot be blocked. This means that exactly one instruction per output telegram can be transmitted to the slave and that exactly one response per input telegram can be transmitted to the master. 4 bytes of actual data can thus be transmitted at a time.

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2.2.1.1 PKE Parameter Signature Value

The instruction and response are represented in the first two bytes (PKE) of the parameter channel:

Bit position

15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0

AK res. Slot

Where: Bits Meaning

15 … 12

AK Instruction/response signature

11 … 8 Reserved

7 … 0 Define the slot from which data are read or onto which a

value is to be written

Instruction signature

In Master ⇒ Slave communication, the AK field contains the instruction signature of the master.

In Slave ⇒ Master communication, the AK field contains the instruction signature of the slave.

AK Function

Master ⇒ Slave (Instruction signature)

normal

Function Slave ⇒ Master (Response signature)

error

0 No instruction 0 No response 1 Read parameter value 1

Transmit parameter value

(word)

Transmit parameter value (double word)

Transmit parameter value (byte)

2 Write parameter value

1 Transmit parameter value

(data type: word)

3 Write parameter value

2 Transmit parameter value

(data type: double word)

10 Write parameter value

11 Transmit parameter value

(data type: byte)

Instruction cannot be executed (error code)

(word)

(double word)

(byte)

On the left of the table, the instruction signatures of the master are listed according to their function. On the right of the table, the corresponding normal responses (AK Normal) and error codes (AK Error) transmitted by the slave are listed.

Instruction – response sequence

1) The master transmits an instruction to the slave and repeats that instruction until it receives a response from the slave.

2) The slave keeps transmitting the response to the instruction until the master transmits a new instruction.

3) The master marks the end of the first instruction cycle by setting AK to zero. Only after that, a new instruction/response cycle may be started.

2.2.1.2 PWE Parameter (Process Value)

The PWE represents the data element to be transmitted. If a byte is to be transmitted, that byte has to be in position 8 of the parameter

channel. Integers are transmitted with bytes 7 and 8. Double integer and float values are

transmitted with bytes 5 … 8.

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2.2.1.3 Error Code (Error Message)

In the event of a transmission error (AK response signature = 7), the slave transmits an error code in byte positions 7 and 8 (data type: INT16).

Error code Meaning

0 Undefined slot 1 Parameter not changeable 2 Lower or upper value range limit overflow 3 Index error

5 Data type error 17 Instruction not allowed in this state 18 Other errors

201 Already in requested state 202 Object state conflict

The following diagram shows an example of a data request from a master to a BPG402-SP via parameter channel.

Store

Data

DP-Master

Parameter

Request

(Client)

AK(IS) = 0

AK(RS) = 0

AK(IS) = 0

AK(RS) = 0

AK (IS) = 1

AK(RS) = 0

AK (IS) = 1

AK(RS) = 0

AK (IS) = 1

AK(RS) = 1

AK (IS) = 0

AK(RS) = 0

AK (IS) = 0

AK(RS) = 0

BPG402-SP

Parameter

Request (Server)

Fetch

Data

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2.3 Cyclic Message Telegrams

The message telegrams listed below are implemented in the gauge. They can be selected according to requirements. When selecting a message telegram, ascertain what output format of the measured value (integer/float) is required and whether a parameter channel is needed or not. The gauge can also be operated in such a way that the master does not transmit any output data to the slave.

Standard telegram

3 4

Master

⇔

Slave

M ⇒ S

M ⇒ S S ⇒ M

S ⇒ M

Byte Meaning

0 Transition Command 1 Transition Command Value for Hot Ion Gauges

0 … 7 Parameter Channel

8 Transition Command 9 Transition Command Value for Hot Ion Gauges

0 … 7 Parameter Channel

0 Exception status 1 One Of N status extension 2 One Of N PV selector

3 … 4 Process value UINT16

0 Exception status 1 One Of N status extension

2 One Of N PV selector 3 … 6 Process value float 0 … 7 Parameter channel

8 Exception status

9 One Of N status extension

10 One Of N PV selector

11 … 12 Process value UINT16

0 … 7 Parameter channel

8 Exception status

9 One Of N status extension

10 One Of N PV selector

11 … 14 Process value float

Configuration data

Depending on the standard telegrams used, the respective configuration data have to be transmitted to the gauge during the configuration phase (→ table on  5).

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3 Block Model

Data to the BPG402-SP can be transmitted by means of a number of communication protocols and corresponding masters. Profibus defines a master class 1 as normal control unit of the slave (typically a PLC) and a master class 2 as configuration and service unit. The following communication protocols are defined according to the Profibus DPV1 standard.

MS0 Cyclic data traffic between master class 1 and slave MS1 Acyclic data traffic between master class 1 and slave MS2 Acyclic data traffic between master class 2 and slave

In the BPG402-SP, all functions that are made available by the gauge via Profibus are organized in blocks. Access to the individual parameters of the blocks is possible via acyclic services or, for byte, integer and float values, also in cyclic data traffic via the parameter channel.

Block types

The following block types are defined in the gauge. Device Block The Device Block contains all data that are required for de-

scribing the device and handling its state (status of Device State Machine).

Transducer Block The physical, process specific functions or interfaces between

the BPG402-SP and the process such as current and voltage values are represented in transducer blocks.

The following transducer blocks are implemented:

• One of N Vacuum Gauge Transducer Block

• Heat Transfer Vacuum Gauge Transducer Block (Pirani)

• Hot Cathode Ion Gauge Transducer Block (BA)

Function Block Application specific values such as pressure values that result

from or can be calculated from the values of the transducer block are represented in the function blocks.

• One of N Analog Input Function Block

• Analog Input Function Block, Instance 1, Instance 2,

Instance 3, Instance 4.

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3.1 Device Block

The following table lists the services and parameters integrated in the Device Block (→ Appendix A for abbreviations).

ID Name Structure Data type Bytes Access Value Store 15 Device Block State Simple UINT8 1 1/2_R/W 16 Block Type Simple Octet string 4 1/2_R 1 N

17 Device Type Simple Visible string 8 1/2_R CG N

18 Standard Revision

Simple Visible string 9 1/2_R E54-0997 N

Level

19 Device Manufacturer

Simple Visible string 20 1/2_R INFICON AG N

Identifier

20 Manufacturer

Model Number

21 Software or Firmware

Revision Level

22 Hardware Revision

Simple Visible string 20 1/2_R e.g.

353-574

Simple Visible string 8 1/2_R e.g.

020_1.01

Simple Visible string 8 1/2_R e.g. 1.0 N

Level

23 Serial Number Simple Visible string 30 1/2_R e.g. 100 N

24 Device Configuration Simple Visible string 50 1/2_R e.g.

BPG402-SP

25 Device State Simple UINT8 1 1/2_R V

26 Exception Status Simple UINT8 1 0_XI

1/2_R

27 Exception Detail Alarm Record

28 Exception Detail

Record

→ below

- 1/2_R V

Warning

204 Common Exception

Simple UINT8 1 1/2_R V

Detail Alarm 0

205 Device Exception Detail

Alarm 0 … 3

207 Manufacturer Exception

Struct Array of

4 1/2_R V

4 bytes

Simple UINT8 1 1/2_R V

Detail Alarm 0

208 Common Exception

Simple UINT8 1 1/2_R V

Detail Warning 0

209 Device Exception Detail

Warning 0 … 3

210 Device Exception Detail

Struct Array of

4 1/2_R V

4 bytes

Simple UINT8 1 1/2_R V

Warning 4

211 Manufacturer Exception

Simple UINT8 1 1/2_R V

Detail Warning 0

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3.1.1 Information on the Individual Indices

3.1.1.1 Block Type ID 16

3.1.1.2 Device Type ID 17

3.1.1.3 Standard Revision Level

ID 18

3.1.1.4 Device Manufacturer

Identifier ID 19

3.1.1.5 Manufacturer Model

Number ID 20

3.1.1.6 Software or Firmware

Revision Level ID 21

3.1.1.7 Hardware Revision Level

ID 22

3.1.1.8 Device Configuration ID 24

3.1.1.9 Device State ID 25

The Block Type Parameter contains an ID which describes the block type. The block type ID of the Device Block 1. The other defined block types are listed in Appendix B.

The Device Type identifies the device type which is connected to the field bus via Profibus.

The Device Type of the BPG402-SP gauge is "CG", the abbreviation of Combination Gauge.

This parameter describes the version of the "Sensor/Actuator Network Specific Device Model" published by the SEMI

(Semiconductor Equipment and Materials International, California), according to which the profile of this device has been developed.

The fixed setting of this parameter is "E54-0997".

This parameter describes the manufacturer of the device, "INFICON AG".

This parameter represents the part number of the gauge (→ section "Validity"). BPG402-SP is available with different vacuum connection types:

Gauge Vacuum connection Part number

BPG402-SP 25 KF

40 CF

353-574 353-575

This parameter indicates the software version of the Profibus option in the following format: xxx_y.yy (where xxx is the version of the BPG402 firmware and y.yy is the version of the Profibus board).

This parameter indicates the hardware version of the gauge in the format "1.0".

This parameter indicates the device name.

This parameter indicates the status of the gauge. Due to the structure of the Device State Machine, the following statuses are possible:

Parameter value Status

0 Undefined 1 Self testing 2 Idle 3 Self test exception 4 Executing 5 Abort 6 Critical fault

The device statuses are described in detail in section "Device Block, Device Behavior".

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3.1.1.10 Exception Status ID 26

The Exception Status describes the alarm and warning states of the gauge in an "Expanded error output format".

A difference is made between warnings and errors. Alarms and errors are divided into three groups (→ sections "Exception Detail

Alarm" and "Exception Detail Warning" for details):

• ALARM / Warning Device Common

For errors that occur independently of the type of device used, e.g. supply error, RAM, ROM, or EEPROM error.

• ALARM / Warning Device Specific

For device specific errors (e.g. filament rupture (Pirani) or cathode rupture (BA)).

• ALARM / Warning Manufacturer Specific

For errors defined by the manufacturer that are not mentioned in the standard.

In each of the above groups, there are several error or warning conditions. The individual fields are presented in the "Exception Detail Alarm" and "Exception Detail Warning". If an error message occurs in "Exception Detail Alarm" or "Exception Detail Warning”, the corresponding bit is set in the Exception Status. Therefore, if bits 0 … 6 of the Exception Status are on "0" there is no warning message pending.

If a bit is set, the actual error can be read in the corresponding group. The Exception Status is output in cyclic data and informs on the current error status

using only one byte. If an error occurs, the current error status can be read via acyclic services or in cyclic data exchange via the parameter channel. This ensures that while the current error status is always available in the cyclic data, no unnecessary data overhead is transmitted.

Bit Function Meaning

0 ALARM, device common The bit is set if an error of the Alarm

Device Common group is detected.

1 ALARM, device specific The bit is set if an error of the Alarm

Device Specific group is detected.

2 ALARM, manufacturer specific The bit is set if an error of the Alarm

Manufacturer Specific group is detected.

- -

4 WARNING, device common The bit is set if an error of the Warning

Device Common group is detected.

5 WARNING, device specific The bit is set if an error of the Warning

Device Specific group is detected.

6 WARNING, manufacturer

specific

The bit is set if an error of the Warning Manufacturer Common group is detected.

7 Expanded Format Is constantly on "1" and marks the use of

the expanded error output format.

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3.1.1.11 Exception Detail Alarm ID 27

If, in the Exception Status, one of the bits 0 … 2 is set, the current error can be read in the "Exception Detail Alarm" parameter. The "Exception Detail Alarm" parameter consists of a total of 10 bytes that inform on the error status of the gauge.

Due to the use of the expanded error output format, these bytes have the following structure:

ByteNo Name Description Value

Common Exception Detail Alarm

Common Exception Detail Size

Indicates the number of subsequent bytes that contain the Common Exception Detail Alarm.

1 Common Exception

Detail 0

Contains current error messages from the Common Exception

Depending on

error status

Detail Alarm group.

2 Common Exception

not supported 0

Detail 1

Device Exception Detail Size

Indicates the number of subsequent bytes that contain the Device Exception Detail Alarm.

4 Device Exception

Detail 0 (Pirani error data)

5 Device Exception

Detail 1 (Pirani error data)

6 Device Exception

Detail 2 (BA error data)

7 Device Exception

Detail 3 (BA error data)

Manufacturer

Exception Detail

Size

This error information from the Device Exception Detail Alarm group refers to Pirani.

This error information from the Device Exception Detail Alarm group refers to BA.

Indicates the number of subsequent bytes that contain the Manufacturer Exception Detail

Depending on

error status

Depending on

error status

Depending on

error status

Depending on

error status

Alarm.

9 Manufacturer

Exception Detail 0

Contains current error messages from the Manufacturer Exception

Depending on

error status

Detail Alarm group.

Bit Common Exception Detail 0 Bit Common Exception Detail 1

0 0 0 0 1 0 1 0 2 EPROM exception 2 0 3 EEPROM exception 3 0 4 RAM exception 4 0 5 0 5 0 6 0 6 0 7 0 7 0

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Device Exception Detail Alarm

Manufacturer Exception Detail Alarm 0

Bit Device Exception Detail 0

Referring to Pirani

Bit Device Exception Detail 1

Referring to Pirani 0 0 0 0 1 0 1 Electronics / sensor error 2 0 2 0 3 0 3 0 4 0 4 0 5 0 5 0 6 0 6 0 7 0 7 0

This byte is a copy of Sensor Alarm

byte 0 of Pirani Transducer Block.

This byte is a copy of Sensor Alarm

byte 1 of Pirani Transducer Block.

Bit Device Exception Detail 2

Referring to BA

Bit Device Exception Detail 3

Referring to BA 0 Sensor filament 1 Alarm 0 0 1 Sensor filament 2 Alarm 1 Electronics / sensor error 2 0 2 0 3 0 3 0 4 0 4 0 5 0 5 0 6 0 6 0 7 0 7 0

This byte is a copy of Sensor Alarm

byte 0 of BA Transducer Block.

This byte is a copy of Sensor Alarm

byte 1 of BA Transducer Block.

Manufacturer Exception Detail 0 is set to "1", if there is an internal communication error in the gauge.

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3.1.1.12 Exception Detail Warning ID 28

If, in the Exception Status, one of bits 4 … 6 is set, the current warning can be read in the parameter "Exception Detail Warning". The Exception Detail Warning parameter consists of a total of 11 bytes that inform on the error status of the gauge.

Due to the use of the expanded error output format, these bytes have the following structure:

ByteNo Name Description Value

Common Exception Detail Size

1 Common Exception

Detail 0

2 Common Exception

Detail 1

Device Exception Detail Size

4 Device Exception

Detail 0

5 Device Exception

Detail 1 (Pirani)

6 Device Exception

Detail 2 (Pirani)

7 Device Exception

Detail 3 (BA)

8 Device Exception

Detail 4 (BA)

Manufacturer

Exception Detail

Size

10 Manufacturer

Exception Detail

Indicates the number of subsequent bytes that contain the

2 Common Exception Detail Warning.

Contains current error messages from the Common Exception

Depending on

warning status

Detail Warning group. Contains current error messages

from the Common Exception

Depending on

warning status

Detail Warning group.

Indicates the number of subsequent bytes that contain the

5 Device Exception Detail Warning.

One of N Status Extension. Depending on

warning status

This error information from the Device Exception Detail Warning

Depending on

warning status

group refers to Pirani. This error information from the

Device Exception Detail Warning

Depending on

warning status

group refers to Pirani. This error information from the

Device Exception Detail Warning

Depending on

warning status

group refers to BA. This error information from the

Device Exception Detail Warning

Depending on

warning status

group refers to BA.

Indicates the number of subsequent bytes that contain the

1 Manufacturer Exception Detail Warning.

Contains current error messages from the Manufacturer Exception

Depending on

warning status

Detail Warning group.

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Common Exception Detail Warning

Bit Common Exception Detail 0 Bit Common Exception Detail 1

0 0 0 0 1 0 1 0 2 EPROM exception 2 0 3 EEPROM exception 3 0 4 RAM exception 4 0 5 0 5 0 6 0 6 0 7 0 7 0

The warning bits are set in the same way as the error bits because here, warnings have the same meaning as errors.

Device Exception Detail Warning

Bit Device Exception Detail 0

0 Bit set if

Reading Invalid

1 Bit set if

Device Overrange

2 Bit set if

Device Underrange 3 0 4 0 5 0 6 0 7 0

This byte is a copy of the One Of N

Vacuum Gauge Transducer Block.

Bit Device Exception Detail 1

Referring to Pirani

Bit Device Exception Detail 2

Referring to Pirani 0 0 0 0 1 0 1 Electronics / sensor warning 2 0 2 0 3 0 3 0 4 0 4 0 5 0 5 0 6 0 6 0 7 0 7 0

This byte is a copy of Sensor

Warning byte 0 of the Pirani

Transducer Block.

This byte is a copy of Sensor

Warning byte 1 of the Pirani

Transducer Block.

Device Exception Detail 3

Bit

Referring to BA

Device Exception Detail 4

Bit

Referring to BA 0 Sensor filament 1 Warning 0 0 1 Sensor filament 2 Warning 1 Electronics / sensor warning 2 0 2 0 3 0 3 Pressure too high for degas 4 0 4 0 5 0 5 0 6 0 6 0 7 0 7 0

This byte is a copy of Sensor

Warning byte 0 of the BA Transducer

Block.

This byte is a copy of Sensor

Warning byte 0 of the BA Transducer

Block.

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Manufacturer Exception Detail Warning 0

3.1.1.13 Copy Common Exception Detail Alarm 0 ID 204

Manufacturer Exception Detail 0 is set to "1", if there is an internal communication error in the gauge.

The following parameters are copies of the ID 27 and ID 28. They are used only if you want to access these parameters by the parameter channel.

This parameter corresponds to the Common Exception Detail Alarm of the Exception Detail Alarm (ID 27).

3.1.1.14 Copy Device Exception Detail Alarm 0 … 3 ID 205

3.1.1.15 Copy Manufacturer Exception Detail Alarm 0 ID 207

3.1.1.16 Copy Common Exception Detail Warning 0 ID 208

3.1.1.17 Copy Device Exception Detail Warning 0 … 3 ID 209

3.1.1.18 Copy Device Exception Detail Warning 4 ID 210

3.1.1.19 Copy Manufacturer Exception Detail Warning 0 ID 211

This parameter corresponds to the Device Exception Detail Alarm Byte 0 … 3 of the Exception Detail Alarm (ID 27).

This parameter corresponds to the Manufacturer Exception Detail Alarm Byte 0 of the Exception Detail Alarm (ID 27).

This parameter corresponds to the Common Exception Detail Warning Byte 0 of the Exception Detail Warning (ID 28).

This parameter corresponds to the Device Exception Detail Warning Byte 0 … 3 of the Exception Detail Warning (ID 28).

This parameter corresponds to the Device Exception Detail Warning Byte 4 of the Exception Detail Warning (ID 28).

This parameter corresponds to the Manufacturer Exception Detail Warning Byte 0 of the Exception Detail Warning (ID 28).

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3.1.2 Device Block, Device Behavior

The BPG402-SP behaves as described in the status diagram below.

Cyclic data traffic

Acyclic data traffic

NORMAL

(0)

INIT

(

(13)

(14)

)

RUNNING

SELFTESTING

)

(

SELFTEST

EXCEPTION

)

(

)

IDLE

(10)

EXECUTING

(4)

(5)

(8)

ABORT

(9)

CRITICAL

FAULT

After the start, the gauge independently runs through the INIT and SELFTESTING status and eventually changes to the IDLE status (if there is no error) or to the SELFTEST_EXCEPTION status (if there is a gauge error).

When data traffic is taken up, a difference has to be made between cyclic and acyclic data traffic.

As soon as cyclic data interchange is taken up, the gauge automatically changes to the EXECUTING status.

In acyclic data traffic, a START service has to be transmitted to bring the gauge to the EXECUTING status.

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Device statuses

3.1.2.1 Device Block State Command

Status name Description NORMAL The communication interface can respond to com-

mands. All defined blocks of the gauge exist.

RUNNING All block instances are initialized and the individual

parameters have their initial or default values. SELFTESTING In this status, the gauge performs a selftest. IDLE All blocks defined in the gauge are initialized and the

complete hardware has been tested and found free

of errors. The value defined in the Safe State is out-

put as measured value. SELFTEST EXCEPTION During the self test, an error has been detected. The

gauge has changed to the SELFTEST EXCEPTION

status. The cause of the error can be found in the

attributes Device Exception Detail Alarm/Warning of

the Device Block. The value defined in the Safe State

is output as measured value. EXECUTING The gauge functions normally and outputs the meas-

ured value. ABORT The Device Block is in the ABORT status. The gauge

specific measurement functions are not carried out. CRITICAL FAULT A device error has occurred. The gauge specific

measurement functions are not carried out. The

value defined in the Safe State is output as meas-

ured value.

There are a number of special commands for bringing the gauge into a status it does not automatically go to.

ID Name Structure Data type Bytes Access Store Range

15 Device Block

Simple UINT8 1 1/2_R/W N

→ below State Command

Name Description

value

0 Inactive No action. 1 Reset Used for reinitializing the device. 2 Abort Brings the device to the ABORT status. 3 Recover Used for bringing the device from the ABORT

status into the Recovered State IDLE.

4 Execute Brings the unit to the EXECUTING status, in which

the gauge functions normally. As soon as cyclic data traffic is initialized, this status command is

executed automatically. 5 Stop Brings the gauge to the IDLE status. 6 Perform

Stops the running activity and starts SELFTEST.

Diagnostic

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3.2 Analog Input Block

3.2.1 One Of N Analog Input Function Block / SLOT 1

All gauge functions of the BPG402-SP are described in the Analog Input Block. Since the gauge includes two measuring systems, there are also two Analog Input

Block Instances representing the Pirani and the ionization measuring part (BA) respectively.

ID Name 15 AI Block Adjust

Structure Data type Bytes Access Store

Simple UINT8 1 1/2_W -

Command 16 Block Type Simple Octet string 4 2_R N 46 Channel Instance

Simple UINT8 1 1/2_R/W N

Selector 47 PV Selector Simple UINT8 1 0_XI

1/2_R

The above parameters are described below.

3.2.1.1 AI Block Adjust Command ID 15

3.2.1.2 Block Type ID 16

3.2.1.3 Channel Instance Selector ID 46

3.2.1.3 PV Selector ID 47

To start "Full Scale Adjust" of the gauge, the value "1" has to be entered.

The value of the Block Type ID is "3" (→ table in Appendix A).

The gauge has two instances of the Analog Input Function Block and two instances of the Vacuum Gauge Transducer Block, or one instance of each block per measuring system (Pirani and BA). There are two additional instances for describing the thresholds of the switching functions (→ section "Analog Sensor Input Function Block", Instances 3 and 4).

However, there is only one address range for both, querying and setting the corresponding parameters. The Parameter Channel Instance Selector is used for defining the parameters that are written into the address range.

If the Parameter Channel Instance Selector is set to "1", the attributes of Instance 1 are mapped into that address range and can be written or read by addressing Slot ⇒ Instance ⇒ Parameter-ID.

The PV Selector is determined by the gauge and defines the Analog Input Function Block Instance from which the measured value is copied into the cyclic output data telegrams. Therefore, the value output in the cyclic data is always the measured value of the active instance, i.e. the one that is currently measuring. While the gauge is measuring in the BA range, the measured value of the ionization vacuum meter is output in the cyclic data and while the gauge is measuring in the Pirani range, the measured value of the Pirani is output.

The measured values of Instances 3 and 4 (thresholds of the switching functions) are not output in the cyclic data.

The pressure ranges, in which measurement is performed either by the Pirani or by the BA measuring part, and are thus called "active", are indicated below:

Measuring range

Pressure [mbar] PV Selector

5.5×10-3 < p ≤ 1000

-10

5×10

< p < 2×10

-2

Pirani

In the pressure range 5.5×10-3 … 2×10-2 mbar an averaging of the two corresponding measurement principles is done. The active instance in this pressure range is Pirani.

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3.2.2 Analog Sensor Input Function Block SLOT 1 / Instance 1

Instance 1 of the Analog Sensor Input Function Blocks describes the functionality of the Pirani measuring part of the gauge.

The following attributes are supported:

ID Name Structure Data type Bytes Access Store 15 AI Block Adjust

Record - 2_W

Command

19 Process Value

(PV)

Simple According to

Data Type value

- 0_XI 1/2_R

(Parameter 21)

20 Status Simple UINT8 1 0_XI

1/2_R

21 Data Type Simple UINT8 1 2_R/W N 22 Data Units Simple UINT16 2 2_R/W N 23 Reading Valid Simple Boolean 1 1/2_R V 24 Full Scale Simple According to

- 1/2_R N

Data Type value

(Parameter 21) 39 Safe State Simple Unsigned8 1 1/2_R/W N 40 Safe Value Simple According to

- 1/2_R/W N Data Type value (Parameter 21)

44 Overrange Simple According to

- 1/2_R N Data Type value (Parameter 21)

45 Underrange Simple According to

- 1/2_R N Data Type value (Parameter 21)

3.2.2.1 Process Value ID 19

The Process Value contains the measured value of the Pirani Device Instance in the currently selected data unit (ID 22) and in the selected data type (ID 21).

If the device is not in the EXECUTING State (ID 25, Device Block), the value defined in the Safe State is output.

Values output in the data unit COUNTS can be converted into a pressure value by means of the following formulas:

Calculation of the pressure (PV is the abbreviation used for Process Value):

mbar

Torr

Micron

(COUNTS / 2000) - 12.5

= 10

= 0.75006168 × PV

= 10-3 × PV

= 100 × PV

Torr

mbar

3.2.2.2 Status ID 20

3.2.2.3 Data Type ID 21

This parameter remains on "0".

Two data types are supported: Float and Integer16. In cyclic data exchange, the data type cannot be modified. After the gauge is

switched on, the value stored in the EEPROM is loaded. The data type setting can only be modified when the gauge is in the IDLE status. By defining the configuration data for cyclic data exchange (selection of standard telegrams), the data type used in the selected standard telegram is taken over. All settings previously made in acyclic data traffic are thus overwritten.

If the data type is set in one instance, that data type setting applies to all instances. Likewise, when a standard telegram is selected, the data type used by that standard telegram will be valid for all instances:

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3.2.2.4 Data Unit ID 22

3.2.2.5 Reading Valid ID 23

Coding Data type

3 Integer16 8 Float (default)

The gauge supports the following pressure units:

Coding (dec) Data type

1001 COUNTS 1301 Torr 1302 mTorr (Micron) 1308 mbar 1309 Pascal

For safety reasons, it is not possible to change the pressure unit while the gauge is cyclically interchanging data with a DP/V0 master.

The data unit setting can only be modified when the gauge is in the IDLE status.

In cyclic data traffic, the data unit must be set in the User Parameter Data. All settings previously made in acyclic data traffic are overwritten (→ section "User Parameter Data").

If the data unit is set in one instance, that data unit setting applies to all instances. Likewise, the data unit setting made in the User Parameter Data is valid for all instances.

This parameter indicates that the pressure reading is within a valid range. It is set to "1" if:

3.2.2.6 Full Scale ID 24

• The gauge is in the EXECUTING status.

• There is no error

• The measured value is lower than the overrange value and higher than the

underrange value.

If this value is set to zero, the pressure reading is not valid. In such a case, either check Exception Status (ID 26, Device Block) to find out whether there is an error or check One Of N Status Extension (ID 120, One Of N Vacuum Gauge Transducer Block) to find out whether the measured value is out of the specified measuring range (overrange or underrange mode).

This parameter contains the valid maximum value of the pressure reading in the currently selected data unit and data type.

Pressure unit Full scale COUNTS 31000 Torr 750.06168 mTorr (Micron) 750061.68 mbar 1000 Pascal 100000

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3.2.2.7 Safe State ID 39

3.2.2.8 Safe Value ID 40

3.2.2.9 Overrange ID 44

3.2.2.10 Underrange ID 45

When the gauge is not in the EXECUTING status (ID 25, Device Block) or if there is a device error, a value defined by Safe State is output as pressure value:

Safe State Coding PV behavior Zero 0 The Process Value (measured value ID 19) is set

to 0.

Full Scale 1 The Process Value (measured value ID 19) is set

to the full scale value (ID 24).

Hold Last Value 2 The Process Value is set to the last valid value

obtained in the EXECUTING status.

Use Safe Value 3 The Process Value (measured value ID 19) is set

to the Safe Value (ID 40).

The Safe Value is the value output with the Process Value parameter (ID 19) when an error occurs or the gauge goes to the NOT EXECUTING status. If this value is set to zero, it will remain on zero when the data unit is changed.

Overrange is the highest valid measured value at which Reading Valid is still on "1".

Pressure unit Overrange COUNTS 31000 Torr 750.06168 mTorr (Micron) 750061.68 mbar 1000 Pascal 100000

Underrange is the lowest valid measured value at which Reading Valid is still on "1".

Pressure unit Underrange COUNTS 20480 Torr 4.12534×10

-3

mTorr (Micron) 4.12534 mbar 5.5×10

-3

Pascal 0.55

3.2.2.11 AI Block Adjust

The parameter controls zero point and fullscale adjustments of the Pirani.

Command (Pirani) ID 15

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Byte Name Structure Data type Bytes Access

0 State Command Simple UINT8 1 1/2_W

State Command Name Meaning

0 Zero Adjust Pirani zero point adjustment 1 Gain Adjust Pirani fullscale adjustment

Page 27

3.2.3 Analog Sensor Input Function Block SLOT 1 / Instance 2

3.2.3.1 Process Value ID 19

3.2.3.2 Status ID 20

3.2.3.3 Data Type ID 21

Instance 2 of the Analog Sensor Input Function Block describes the functionality of the BA measuring part of the gauge.

In Instance 2, the same attributes as in Instance 1 are supported:

ID Name Structure Data type Bytes Access Store 19 Process Value

(PV)

Simple According to

Data Type value

- 0_XI 1/2_R

(parameter 21)

20 Status Simple UINT8 1 0_XI

1/2_R

21 Data Type Simple UINT8 1 2_R/W N 22 Data Units Simple UINT16 2 2_R/W N 23 Reading Valid Simple Boolean 1 1/2_R V 24 Full Scale Simple According to

- 1/2_R N

Data Type value

(parameter 21) 39 Safe State Simple UINT8 1 1/2_R/W N 40 Safe Value Simple According to

- 1/2_R/W N Data Type value (parameter 21)

44 Overrange Simple According to

- 1/2_R N Data Type value (parameter 21)

45 Underrange Simple According to

- 1/2_R N Data Type value (parameter 21)

The Process Value contains the measured value of the BA Device Instance in the currently selected data unit (ID 22) and in the selected data type (ID 21).

If the device is not in the EXECUTING status (ID 25, Device Block), the value defined in the Safe State is output.

Values output in the data unit COUNTS can be converted into a pressure value by means of the following formulas:

Calculation of the pressure (PV is the abbreviation used for Process Value):

mbar

Torr

Micron

(COUNTS / 2000) - 12.5

= 10

= 0.75006168 × PV

= 10-3 × PV

= 100 × PV

Torr

mbar

This parameter is remains on "0".

Two data types are supported: Float and Integer16. In cyclic data traffic, the data type cannot be modified. After the gauge is switched

on, the value stored in the EEPROM is loaded. The data type setting can only be modified when the gauge is in the IDLE status. By defining the configuration data for cyclic data traffic (selection of standard telegram), the data type used in the selected standard telegram is taken over. All settings previously made in acyclic data traffic are thus overwritten.

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3.2.3.4 Data Unit ID 22

3.2.3.5 Reading Valid ID 23

Coding Data type

3 Integer16 8 Float (default)

The gauge supports the following pressure units:

Coding (dec) Pressure unit

1001 COUNTS 1301 Torr 1302 mTorr (Micron) 1308 mbar 1309 Pascal

For safety reasons, it is not possible to change the pressure unit while the gauge is cyclically interchanging data with a DP/V0 master.

The data unit setting can only be modified when the gauge is in the IDLE status.

In cyclic data traffic, the data unit must be set in the User Parameter Data. All settings previously made in acyclic data traffic are overwritten (→ section "User Parameter Data").

If the data unit is set in one instance, that data unit setting applies to all instances. Likewise, the data unit setting made in the User Parameter Data is valid for all instances.

This parameter indicates that the pressure reading is within a valid range. It is set to "1" if:

3.2.3.6 Full Scale ID 24

• The gauge is in the EXECUTING status.

• There is no error

• The measured value is lower than the overrange value and higher than the

underrange value.

This parameter contains the valid maximum value of the pressure reading in the currently selected data unit and data type.

Pressure unit Full scale COUNTS 21602 Torr 1.5×10

-2

mTorr (Micron) 15 mbar 2×10

-2

Pascal 2

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3.2.3.7 Safe State ID 39

3.2.3.8 Safe Value ID 40

3.2.3.9 Overrange ID 44

When the gauge is not in the EXECUTING state (ID 25, Device Block) or if there is a device error, a value defined by Safe State is output as pressure value:

Safe State Coding PV behavior Zero 0 The Process Value (measured value ID 19) is set

to 0.

Full Scale 1 The Process Value (measured value ID 19) is set

to the full scale value (ID 24).

Hold Last Value 2 The Process Value is set to the last valid value

obtained in the EXECUTING status.

Use Safe Value 3 The Process Value (measured value ID 19) is set

to the Safe Value (ID 40).

The Safe Value is the value output with the Process Value Parameter (ID 19) when an error occurs or the gauge goes to the NOT EXECUTING status. If this value is set to zero, it will remain on zero when the data unit is changed.

Overrange is the highest valid measured value at which Reading Valid is still on "1".

Pressure unit Overrange COUNTS 21602 Torr 1.5×10

-2

mTorr (Micron) 15 mbar 2×10

-2

Pascal 2

3.2.3.10 Underrange ID 45

Underrange is the lowest valid measured value at which Reading Valid is still on "1".

Pressure unit Underrange COUNTS 6398 Torr 3.7503×10 mTorr (Micron) 3.7503×10 mbar 5.0×10 Pascal 5.0×10

-10

-7

-10

-8

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3.2.4 Analog Sensor Input Function Block SLOT 1 / Instance 3, 4

Instance 3 and 4 of the Analog Sensor Input Function Block describe the functionality of the threshold potentiometers used to set the gauges switching functions ("Setpoint A and B, →  [3]).

Instance Switching Function

("Setpoint") 3A 4B

ID Name Structure Data type Bytes Access Store 19 Process Value

(PV)

Simple According to

Parameter Data

- 1/2_R V

Type 20 Status Simple UINT8 1 1/2_R V 21 Data Type Simple UINT8 1 2_R/W N 22 Data Units Simple UINT16 2 2_R/W N 23 Reading Valid Simple Boolean 1 1/2_R V

3.2.4.1 Process Value ID 19

3.2.4.2 Status ID 20

3.2.4.3 Data Type ID 21

The Process Value contains the current setting of the threshold potentiometers for "Setpoint A" and "Setpoint B" in the currently selected data unit (ID 22) and data type (ID 21).

If the pressure drops below the set threshold, the relay is closed. If after that, the pressure rises above that threshold with a hysteresis of 10%, the relay is opened again (→  [3]).

Values output in the pressure unit COUNTS can be converted into a pressure value by means of the following formulas:

mbar

(COUNTS / 2000) - 12.5

= 10

The threshold voltages of the Setpoint potentiometer can be converted into a pressure value by means of the following formulas:

mbar

= 10

(U - 7.75) / 0.75

Where: U is the threshold voltage (0 … +10 V) of the corresponding Setpoint (A,

B), measured at the D-Sub connector (sensor cable connector) of the gauge (→  [3]).

This parameter is remains on "0".

Two data types are supported: Float and Integer16. In cyclic data traffic, the data type cannot be modified. After the gauge is switched

Coding Data type

3 Integer16 8 Float (default)

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3.2.4.4 Data Unit ID 22

3.2.4.5 Reading Valid ID 23

The gauge supports the following pressure units:

Coding (dec) Pressure unit

1001 COUNTS 1301 Torr 1302 mTorr (Micron) 1308 mbar 1309 Pascal

For safety reasons, it is not possible to change the pressure unit while the gauge is cyclically interchanging data with a DP/V0 master.

The data unit setting can only be modified when the gauge is in the IDLE status.

In cyclic data traffic, the data unit must be set in the User Parameter Data. All settings previously made in acyclic data traffic are overwritten (→ section "User Parameter Data").

If the data unit is set in one instance, that data unit setting applies to all instances. Likewise, the data unit setting made in the User Parameter Data is valid for all instances.

This parameter is set to "1".

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3.3 Transducer Block

3.3.1 One Of N Vacuum Gauge Transducer Block / SLOT 1

ID Name Structure Data type Bytes Access Store

120 One Of N Status

Simple UINT8 1 1/2_R V

Extension

3.3.1.1 One Of N Status Extension

3.3.2 Heat Transfer Vacuum Gauge Transducer Block / SLOT 1 / Instance 1

3.3.2.1 Block Type ID 101

3.3.2.2 Status Extension ID 102

3.3.2.3 Sensor Alarm ID 103

This parameter indicates whether the overrange or underrange of the gauge is exceeded.

Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0

0 0 0 0 0 Underrange

Exceeded

If the gauge is operated in its overrange or underrange (p < 5×10

Overrange

Exceeded

-10

mbar or

Reading

Invalid

p >1000 mbar), the corresponding bit and additionally the bit "Reading Invalid" is set.

If an error occurs, the bit "Reading Invalid" as well as the corresponding error bits in Device Block (ID 26, 27, 28 Device Block) are set.

ID Name Structure Data type Bytes Access Store 101 Block Type Simple Octet string 4 2_R N 102 Status Extension Simple UINT8 1 1/2_R V 103 Sensor Alarm Struct Array of 2 bytes 2 1/2_R V 104 Sensor Warning Struct Array of 2 bytes 2 1/2_R V

According to the table in Appendix A, the Block Type ID has the value "13".

This parameter indicates whether the overrange or underrange of the Heat Transfer Vacuum Gauge device instance (Pirani) is exceeded.

Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0

Reserved Underrange

Exceeded

Underrange: The parameter is set to "1", if the pressure value is below the

Exceeded

Overrange

Reading Invalid

value defined in ID 45 (Analog Input Function Block Instance 1).

Overrange: The parameter is set to "1", if the pressure value is above the value defined in ID 44 (Analog Input Function Block Instance 1).

Reading Invalid: The parameter is set to "1", if "Reading Valid" ID 23 (Analog Input Function Block Instance 1) is set to"0".

If the instance is operated in its overrange or underrange, the corresponding bit and additionally the bit "Reading Invalid" is set.

If an error occurs, the bit "Reading Invalid" as well as the corresponding error bits in Device Block (ID 26, 27, 28 Device Block) are set.

This parameter indicates the detectable errors occurring in connection with the Pirani measuring part.

Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0 Byte 0 0 0 0 0 0 0 0 0 Byte 1 0 0 0 0 0 0 Electronics Failure

Electronics Failure includes a sensor error.

The Sensor Alarm bits defined here are copied into the Device Block ID 27 in the "Device Exception Detail Alarm" range of the Pirani measuring part.

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3.3.2.4 Sensor Warning ID 104

3.3.3 Hot Cathode Ion Gauge Transducer Block / SLOT 1 / Instance 2

3.3.3.1 Block Type ID 101

3.3.3.2 Status Extension ID 102

This parameter indicates the detectable warnings occurring in connection with the Pirani measuring part.

Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0 Byte 0 0 0 0 0 0 0 0 0 Byte 1 0 0 0 0 0 0 Electronics Warning 0

The Sensor Warning bits defined here are copied into the Device Block ID 28 in the "Device Exception Detail Warning" range of the Pirani measuring part.

ID Name Structure Data type Bytes Access Store 14 Hot Cathode Block State

Rec 1 1/2_W

Command

101 Block Type Simple Octet

4 2_R N

string 102 Status Extension Simple UINT8 1 1/2_R V 103 Sensor Alarm Struct Array of

2 1/2_R V

2 bytes 104 Sensor Warning Struct Array of

2 1/2_R V

2 bytes 105 Emission Status Simple Boolean 1 1/2_R/W V 106 Emission Current Simple FLOAT 4 1/2_R/W N 108 Active Filament Simple Boolean 1 1/2_R/W N 109 Degas Status Simple Boolean 1 1/2_R V 116 Active Degas Filament Simple UINT8 1 1/2_R V 119 Mode Filament Selection

Simple Boolean 1 2_R/W N

(Filament User Mode)

201 Emission User Mode

Simple Boolean 1 1/2_R V

State

According to the table in Appendix A, the Block Type ID has the value "16".

This parameter indicates that the overrange or underrange of the Hot Cathode Ion Gauge instance is exceeded.

Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0

Reseved Underrange

Exceeded

Underrange: The parameter is set to "1", if the pressure value is below the

Overrange

Exceeded

Reading

Invalid

value defined in ID 45 (Analog Input Function Block Instance 2).

Overrange: The parameter is set to "1", if the pressure value is above the value defined in ID 44 (Analog Input Function Block Instance 2).

Reading Invalid: The parameter is set to "1", if "Reading Valid" ID 23 (Analog Input Function Block Instance 2) is set to"0".

If the instance is operated in its overrange or underrange, the corresponding bit and additionally the bit "Reading Invalid" is set.

If an error occurs, the bit "Reading Invalid" as well as the corresponding error bits in Device Block (ID 26, 27, 28 Device Block) are set.

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3.3.3.3 Sensor Alarm ID 103

3.3.3.4 Sensor Warning ID 104

This parameter indicates the detectable errors occurring in connection with the BA measuring part.

Bit7 Bit6 Bit5 Bit4 Bit3 Bit2 Bit 1 Bit 0

Byte 0 0 0 0 0 0 0 Sensor Filament 2

Byte 1 0 0 0 0 0 0 Electronics

Meaning → below, table Filament status.

Electronics Failure includes a sensor error.

Alarm

Failure

Sensor Filament 1

Alarm

The Sensor Alarm bits defined here are copied into the Device Block ID 27 in the "Device Exception Detail Alarm" range of the BA measuring part.

This parameter indicates the detectable warnings occurring in connection with the BA measuring part.

Bit 7 … 4 Bit 3 Bit 2 Bit 1 Bit 0

Byte 0 0 0 0 Sensor Filament 2

Warning

Byte 1 0 Pressure

too high for

Meaning → below, table Filament status.

Pressure too high for degas: the bit is set if the pressure value is

>7.2×10

-6

mbar during a degas command. The bit is reset if the pressure value

drops below 7.2×10

degas

-6

mbar.

0 Electronics

Warning

Sensor Filament 1

Warning

The Sensor Warning bits defined here are copied into the Device Block ID 28 in the "Device Exception Detail Warning" range of the BA measuring part.

Filament status

3.3.3.5 Emission Status ID 105

Byte 0 of Sensor Alarm and Sensor Warning represents the filament status of the gauge.

Bit 1 Bit 0 Filament status Sensor

Filament 1

Warning

Sensor

Filament 2

Warning

Sensor

Filament 1

Alarm

Sensor

Filament 2

Alarm 0 0 both filaments OK 0 0 0 0 0 1 filament 1

1000

interrupted,

filament 2 OK

1 0 filament 1 OK,

0100

Filament 2

interrupted

1 1 Filament 1

1111

interrupted,

Filament 2

interrupted

This parameter indicates the emission status of the gauge.

Emission status Meaning

FALSE Emission Off

TRUE Emission On

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3.3.3.6 Emission Current ID 106

This parameter indicates the value of the emission current in mA.

Emission currents [mA]

0.025 5

3.3.3.7 Active Filament ID 108

3.3.3.8 Degas Status ID 109

3.3.3.9 Active Degas Filament ID 116

3.3.3.10 Mode Filament Selection

ID 119

The Parameter defines / indicates the active filament (→ Mode Filament Selection).

Active Filament Byte value Meaning

1 1 filament 1 active 2 2 filament 2 active

This parameter indicates whether the gauge is in Degas mode.

Degas Status Meaning

FALSE Degas Off

TRUE Degas On

For the BPG402-SP, the value of the parameter is the same as the parameter value of Active Filament (ID 108).

The parameter defines the operation mode of the filaments:

Mode Filament

Selection

Byte

value

Meaning

(Filament User

Mode)

Auto 0 Automatic Mode (default):

The gauge alternates between filaments every time the emission is switched on.

Manual 1 Manual Mode:

The gauge uses the filament selected by the attribute Active Filament (ID 108).

3.3.3.11 Emission User Mode

State ID 201

This parameter indicates whether the gauge is in Automatic or Manual Emission Mode. The mode is set by Transition command 18 (ID 14). Automatic Mode is selected by default.

Emission User

Mode State

Byte

value

Meaning

FALSE 0 Manual Mode

TRUE 1 Automatic Mode

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3.3.3.12 Hot Cathode Block State Command ID 14

This service is used for activating degas and emission modes via Profibus.

ID Name Structure Data type Bytes Access Range 14 Hot Cathode

Rec

→ below

2 1/2_W Block State Command

Byte 0 Transition

Simple UINT8 1

Command

Byte 1 Value Simple UINT8 1

Transition

Name Description

Command

0 Inactive No action 1 Set Degas

Activates/deactivates the Degas mode

State

This service is used for activating/deactivating the Degas mode (p <7.2×10

-6

mbar). If the Degas mode has not been deactivated with Degas Off before, it is automatically turned off after 3 minutes.

The Degas State can only be changed if p <7.2×10

-6

mbar, otherwise the command returns the

error "Object State Conflict". The Transition Command Data Field Value can have

the following values: 0 ⇒ Degas Off 1 ⇒ Degas On

3 Set

Emission State

Turns the emission On or Off according to the target value

0 ⇒ Switch emission Off 1 ⇒ Switch emission On

128 Emission

User Mode

The device supports two modes:

Automatic Mode: Emission is switched on or off by the integrated Pirani

automatically. If the emission is switched on and is then switched off

manually, the emission will be switched on again only if the pressure rises above the 3.2×10 drops below 2.4×10

-2

mbar.

Manual Mode: Emission is switched on or off by the command

"Set Emission State"

• If during run time the pressure exceeds 3.2×10

mbar, the emission is switched off automatically. The measurement value equals the Pirani value.

• If the emission is switched off by the user while the

pressure is still in BA range, the measurement value equals the Pirani value. There is no automatic change to the BA range by the BPG402.

→ below

-2

mbar and then

-2

0 ⇒ sets Manual Mode 1 ⇒ sets Automatic Mode

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Appendix A: Definitions

Data types

Definitions

Store characteristics

Abbreviation Range Data type INT8 -27 … (27 - 1) Integer 1 byte INT16 -215 … (2

- 1) Integer 2 byte INT32 -231 … (231 - 1) Integer 4 byte UINT8 0 … (28 - 1) Unsigned integer 1 byte UINT16 0 … (216 - 1) Unsigned integer 2 byte UINT32 0 … (232 - 1) Unsigned integer 4 byte FLOAT

±3.402×10

Floating Point, IEEE 754 Short Real Number,

4 byte VSTRING(n) ISO 646 and ISO 2375 OSTRING(n) Octet string

Term Meaning Store This parameter defines whether the values are stored in non-

volatile memory (→ store characteristics)

Default Manufacturer-defined value

Abbreviation Meaning

V "Volatile": Value is not saved to the RAM or EEPROM and is lost

in the event of a power failure

N "Nonvolatile": Value is saved to the RAM or EEPROM and is not

lost in the event of a power failure

Data access

Abbreviation Meaning 1_R/W Acyclically readable and writeable by a Master Class 1 2_R/W Acyclically readable and writeable by a Master Class 2 1/2_R/W Acyclically readable and writeable by a Master Class 1 and 2 1_R Acyclically readable by a master Class 1 2_R Acyclically readable by a master Class 2 1/2_R Acyclically readable by a master Class 1 and 2 1_W Acyclically writeable by a master Class 1 2_W Acyclically writeable by a master Class 2 1/2_W Acyclically writeable by a master Class 1 and 2 0_XI Cyclic output data with master Class 1

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Excerpts from: "PROFIBUS Profile for SEMI" (→   [4], [6], [7])

The following table explains terms used in connection with the Profibus.

Term Meaning Alert Elements Alert Elements are used to communicate notification mes-

sages from slave to master when warnings, alarms or events are detected.

Application A software functional unit consisting of an interconnected

aggregation of function blocks, events and objects, which may be distributed and which may have interfaces with other applications.

Characteristic An characteristic is a property or characteristic of an entity.

(Au) In block applications a block interface is defined by input/output parameters. These parameters have characteristics called parameter characteristics. Examples are access rights and identification names.

(IT) The UML defines characteristics as a feature within a classifier that describes a range of values that instances of the classifier may hold. It is a property of a class instance (object).

Block (Block Instance)

Class (IT) A class represents a template for several objects and

Configuration (of a system/device)

Data Structure An aggregate whose elements need not be of the same

Data Type A data item with certain characteristics and permissible

Device A physical entity capable of performing one or more speci-

Direction of Data Input data are transmitted from the device to the bus. Out-

Direction of Flow A positive set point causes a flow from P to A. Entity A particular thing, such as a person, place, process, object,

Function (1) A specific purpose of an entity.

Function Block A named block consisting of one or more input, output and

A logical processing unit of software comprising an individual, named copy of the block and associated parameters specified by a block type, which persists from one invocation of the block to the next. Concept similar to the class/ object approach, but well suited to the automation requirements.

describes how these objects are structured internally. Objects of the same class have the same definition both for their operations and for their information structures.

A step in system design: selecting functional units, assigning their locations and identifiers and defining their interconnections.

data type, and each of them is uniquely referenced by an offset identifier.

operations on that data, e.g. INT8.

fied functions in a particular context and delimited by its interfaces.

put data are transmitted from the bus to the device.

concept, association or event.

(2) One of a group of actions performed by an entity.

contained parameters. Function blocks represent the basic automation functions performed by an application which is as independent as possible from the specifics of I/O devices and the network. Each function block processes input parameters according to a specified algorithm and an internal set of contained parameters. They produce output parameters that are available for use within the same function block application or by other function block applications.

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Excerpts from: "PROFIBUS Profile for SEMI" (cont.)

Term Meaning Function Block

Application

Application of an automation system performed by a Device Block, Function Block, Transducer Block and accompanied elements.

Instance A set of data related to an invocation of a function block or a

class.

Internal Resolution (ir)

The internal resolution is 16383 (3FFF

-16384 (C000

) for -100% of the range.

hex

) for 100% and

hex

Mode Determines the block operating mode and available modes

for a block instance.

Object (IT) A software entity having identity, attributes and behav-

ior.

Parameter A variable that is given a constant value for a specified

application and that may denote the application.

Device Block A Device Block is a named block. Hardware specific pa-

rameters of a field device, which are associated with a resource, are made visible through the Device Block. Similar to transducer blocks, they insulate function blocks from the physical hardware by a set of implementation independent

hardware parameters. Record A set of data items of different data types treated as a unit. Resource A resource is considered to be a logical subdivision within

the software (and possibly hardware) structure of a device.

Resources have independent control of their operation. The

definition of a resource may be modified without affecting

other resources within a device. A resource accepts and

processes data and/or events from the process and/or

communication interfaces and returns data and/or events to

the process and/or communication interfaces, as specified

by the applications utilizing the resource. An interoperable

network view of applications is provided through device re-

sources. Each resource specifies the network visible as-

pects of one or more local applications (or parts of distri-

buted applications). Simple Variable A single variable which is characterized by a defined Data

Type. Substitute Value In case an optional parameter has not been implemented,

the device behaves according to the substitute value for this

parameter. Transducer Block Transducer Block is a named block. Transducer blocks

insulate function blocks from the specifics of I/O devices,

such as sensors, actuators, and switches. Transducer

blocks control access to I/O devices through a device in-

dependent interface defined for use by function blocks.

Transducer blocks also perform functions, such as cali-

bration and linearization, on I/O data to convert it to a de-

vice independent representation. Their interface to function

blocks is defined as one or more implementation independ-

ent I/O channels. Variable A software entity that may assume any one of a set of val-

ues. The values of a variable are usually restricted to a

certain data type.

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Appendix B: Block Type

Currently defined Block Type IDs

Block Name Block Type ID Device Block 1 Sensor Analog Input Function Block 2 One of N Channel Sensor Analog Input Function Block 3 Multi Channel Sensor Analog Input Function Block 4 Discrete Input Function Block 5 Actuation Analog Output Function Block 6 Discrete Output Function Block 7 Analog Output Function Block 8 Single Stage Controller Function Block 9 Gas Calibration Transducer Block 10 Flow Transducer Block 11 Sensor Analog Input Ambient Temperature Transducer Block 12 Heat Transfer Vacuum Gauge...

13 Diaphragm Gauge 14 Cold Cathode Ion Gauge 15 Hot Cathode Ion Gauge

16 Trip Point Function Block 17 Reserved 18 … 28 - 1 Manufacturer-specific 28 … 216 - 1

Pirani measuring system

BA measuring system

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Appendix C: Electrical Connections

Technical data of BPG402 gauges →  [1], [2], [3].

Sensor cable connection

( )

SP A

SP B

SP A SP B

42 kΩ

Thresholdvalues

Degas

Measuring

signal

Common (power GND 24 V supply) Ground (housing, vacuum connection

3 6

4 1

Degas

1.25 AT

Ident.

D-Sub,15 pins,

soldering side

female,

24V

Electrical connection

Pin 1 Relay switching function A, com contact Pin 2 Measuring signal output 0 … +10 V Pin 3 Threshold (setpoint) A

0 … +10 V Pin 4 Relay switching function A, n.o. contact Pin 5 Supply common 0 V Pin 6 Threshold (setpoint) B

0 … +10 V Pin 7 Degas on, active high 0 V/+24 V Pin 8 Supply +24 V Pin 9 Relay switching function B, com contact Pin 10 Gauge identification Pin 11 Relay switching function B, n.o. contact Pin 12 Measuring signal common Pin 13 Do not connect Pin 14 Do not connect Pin 15 Do not connect

Do not connect pin 3 and pin 6 for normal operation of the gauge. These pins are reserved for adjustment of the setpoint potentiometers.

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Profibus connection

1 5

6 9

Pin 1 not connected Pin 2 not connected Pin 3 RxD/TxD-P Pin 4 CNTR-P Pin 5 DGND Pin 6 VP Pin 7 not connected Pin 8 RxD/TxD-N Pin 9 not connected

Only to be connected if an optical link module is used.

Only required as line termination for devices at both ends of bus cable

→  [4]).

(

D-Sub, 9 pins, male soldering side

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Appendix D: Literature

 [1] www.inficon.com

Instruction Sheet Bayard-Alpert Pirani Gauge BPG402, BPG402-SD, BPG402-SP tima46e1 INFICON AG, LI–9496 Balzers, Liechtenstein

 [2] www.inficon.com

Instruction Sheet Bayard-Alpert Pirani Gauge BPG402-SD, BPG402-SP tima47e1 INFICON AG, LI–9496 Balzers, Liechtenstein

 [3] www.inficon.com

Operating Manual Bayard-Alpert Pirani Gauge BPG402, BPG402-SD, BPG402-SP tina46e1 INFICON AG, LI–9496 Balzers, Liechtenstein

 [4] www.profibus.com

(Profibus user organization)

 [5] European Standard for Profibus EN 50170  [6] Profile for Semi-Conductor Devices; Part 1

Common Definitions v1.0; 8/2002

 [7] Profile for Semi-Conductor Devices; Part 3

Vacuum Pressure Gauges v1.0; 8/2002

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LI–9496 Balzers Liechtenstein Tel +423 / 388 3111 Fax +423 / 388 3700

Original: German tira47d1 (2005-08) reachus@inficon.com

t i ra47e1

www.inficon.com

INFICON BPG402-SP User Manual

Specifications and Main Features

Frequently Asked Questions

User Manual