INFICON BPG402-SE User Manual

Communication Protocol

®

EtherCAT

for Bayard-Alpert Pirani Gauge

BPG402-SE

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General Information

Intended Use

EtherCAT–Interface

Product Identification

Caution

Caution: data transmission errors

Any attempt to simultaneously operate the gauge via the RS232C
Serial Interface and EtherCAT interface may result in incorrect data
and data transmission errors.

Therefore, it is inadmissible to simultaneously operate the gauge via

This Communication Protocol contains instructions for operating EtherCAT inter­faces (slaves) together with a master.

The following description of the EtherCAT® interface is compliant to the EtherCAT
specification of the EtherCAT Technology Group (ETG) and to the  "EtherCAT®
Semiconductor Device Profile".

This manual describes the functionality of a EtherCAT slave and supports

• ETG.5003 Part 1: Common Device Profile (CDP) V0.9.0 (→  [12]) and

• ETG.5003 Part 2080: Specific Device Profile (SDP) Vacuum Pressure Gauge

V0.4.4 (→  [13]).

We reserve the right to make technical changes without prior notice.

In all communications with INFICON, please specify the information on the product
nameplate. For convenient reference copy that information into the space provided
below.

the RS232C Serial Interface and EtherCAT interface.

For safety information, specifications and operation instructions of the

vacuum gauges refer to the appropriate documents (→  [1], [2], [3]).

INFICON AG, LI-9496 Balzers

Model:
PN:
SN:
V W

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Validity

Trademark

This document applies to BPG402 with EtherCAT interface.

353-590 (DN 25 ISO-KF)
353-591

(DN 40 CF-R)

The part number (PN) can be taken from the product nameplate.

If not indicated otherwise in the legends, the illustrations in this document corres­pond to the gauges with vacuum connection DN 25 ISO-KF. They apply to gauges
with the other vacuum connection by analogy.

We reserve the right to make technical changes without prior notice.

EtherCAT® Beckhoff Automation GmbH, Deutschland

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Contents

General Information 2
Intended Use 2
EtherCAT–Interface 2
Product Identification 2
Validity 3
Trademark 3

Contents 4
1 Technical Data 6
2 Interface Connection 7
3 Operation 8

3.1 Introduction 8

3.2 Front and Side View 8

3.3 Indicators and Switches 9

3.3.1 <RUN> LED 9

3.3.2 <ERR> LED 9

3.3.3 <LA> LED (<IN> Port) 9

3.3.4 <LA> LED (<OUT> Port) 9

3.3.5 Device Address Switch 9

4 Object Structure 10

4.1 Object Dictionary structure 10

4.2 Communication Profile Objects (0x1000…0x1FFF) 11

4.3 Manufacturer-specific Profile Objects (0x2000...0x5FFF) 12

4.3.1 Manufacturer Configuration Module 1 12

4.3.2 Manufacturer Configuration Module 2 12

4.4 Input Area (0x6000…0x6FFF) 12

4.4.1 Input Common 12

4.4.2 Input Heat Transfer 12

4.4.3 Input Common 13

4.4.4 Input Hot Cathod Ion 13

4.4.5 Input Trip Point 1 14

4.5 Configuration Area (0x8000…0x8FFF) 15

4.5.1 Configuration Hot Cathode Ion 15

4.5.2 Configuration Trip Point 1 16

4.5.3 Configuration Trip Point 2 18

4.6 Information Area (0x9000…0x9FFF) 19

4.6.1 Information Heat Transfer 20

4.6.2 Information Common 21

4.6.3 Information Hot Cathode Ion 21

4.6.4 Information Trip Point 1/2 22

4.7 Device Area (0xF000...0xAFFF) 22

4.7.1 Semiconductor Device Profile 22

4.7.2 Module Profile List 22

4.7.3 Exceptions 22

4.7.4 Active Exception Status 22

4.7.5 Active Device Warning Details 23

4.7.6 Active Device Error Details 23

4.7.7 Latched Device Warning Details 24

4.7.8 Latched Device Error Details 24

4.7.9 Device Warning Mask 25

4.7.10 Device Error Mask 25

4.7.11 Comination Gauge 25

4.7.12 Trip Point Output All 26

4.7.13 Input Latch Local Timestamp 26

4.7.14 Configure Device 26

4.7.15 Information Device 27

4.7.16 Command Degas ON / OFF 28

4.7.17 Command Emission ON / OFF 28

4.7.18 Device Reset Command 29

4.7.19 Exception Reset Command 30

4.7.20 Store Parameters Command 30

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Appendix 32

A: Literature 32

For cross-references within this document, the symbol (→  [XY]) is used, for
cross-references to other documents, listed under literature, the symbol (→  [Z]).

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1 Technical Data

EtherCAT interface

Dimensions [mm]

Further technical data →  [1], [2], [3].

Communication protocol protocol specialized for EtherCAT

Communication standards ETG.5003 Part 1: Common Device Profile (CDP)

ETG.5003 Part 2080: Specific Device Profile
(SDP) Vacuum Pressure Gauge

Data rate 100 Mbps

Node address Explicit Device Identification

Physical layer 100BASE-Tx (IEEE 802.3)

Digital functions read pressure, select units (Torr, mbar, Pa)

emission control, degas function
monitor gauge status, filament status
safe state allows definition of behavior in case of
error
detailed alarm and warning information

Analog functions 0 … 10 V analog output pressure indication

two setpoint relays A + B

Setpoint relays

Range
Relay contact
Hysteresis
Contact rating

2

-9

1×10

… 100 mbar
n.o. potential free
10 % of reading
≤30 V / ≤0.5 A (dc)

EtherCAT connector 2 × RJ45, 8-pin (socket)

<IN>: EtherCAT input
<OUT> EtherCAT output

Cable shielded, special Ethernet Patch Cable or

Crossover Cable (CAT5e quality or higher)

Cable length ≤100 m

Process data Fixed PDO mapping and configurable PDO

mapping

Mailbox (CoE) SDO requests, responses and information

ERRRUN

111

FIL

67

42

DN 25 ISO-KF

48

DN 40 CF-R

6

LA LA

OUTIN

PWR

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2 Interface Connection

Making an EtherCAT interface
cable

Cable type

Procedure

For operating the BPG 402 gauge via EtherCAT, two interface cables conforming
to the EtherCAT standard are required.

If no such cables are available, make two according to the following indications.

Ethernet Patch Cable or Crossover Cable (CAT5e quality) with FCC68 connector.

 Pin assignment:

FCC68, 8-pin,
male, soldering side

81

Pin Signal Description

1 TD+ Transmission Data +

2 TD- Transmission Data -

3 RD+ Receive Data +

4 nu not used

5 nu not used

6 RD- Receive Data -

7 nu not used

8 nu not used

Pin assignment of the D-Sub 15-pin sensor connector according to the
respective operating manual (→  [1], [2], [3]).

 Plug the EtherCAT (and sensor) cables connector into the gauge: From the

previous device the cable connected to OUT port has to be connected to the
BPG402 <IN> port. And the cable from the BPG402 <OUT> port has to be
connected to the next device's <IN> port.

FCC68 cable
<OUT> port

FCC68 cable

<IN> port

Sensor cable

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3 Operation

3.1 Introduction

3.2 Front and Side View

9

8

7

6

5

4

3
2

1

10

Via the EtherCAT interface, the following and further data are exchanged in the
standardized EtherCAT protocol:

• Pressure reading

• Pressure unit (Torr, mbar, Pa)

• Status and error messages

• Status of the switching functions

• Set Trip Point for switching functions

Caution

Caution: data transmission errors

Any attempt to simultaneously operate the gauge via the RS232C
Serial Interface and EtherCAT interface may result in incorrect data
and data transmission errors.

Therefore, it is inadmissible to simultaneously operate the gauge via

Position Label Function

the RS232C Serial Interface and EtherCAT interface.

1 x1 Address Switch × 1, hexadecimal

2 x10 Address Switch × 10, hexadecimal

3 FIL Fullscale adjustment push button

4 RUN EtherCAT Status LED

5 ERR Error LED

6 IN EtherCAT IN connector

7 LA Link activity EtherCAT IN

8 OUT EtherCAT OUT connector

9 LA Link activity EtherCAT OUT

10 PWR Sensor cable connector

(Power, analog I/O, RS232C I/O and Relay contacts)

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3.3 Indicators and Switches

3.3.1 <RUN> LED

RUN

3.3.2 <ERR> LED

ERR

3.3.3 <LA> LED (<IN> Port)

LA

IN

3.3.4 <LA> LED (<OUT> Port)

LA

OUT

3.3.5 Device Address Switch

x1

4

2

6

0

E

8

A

x10

4

2

6

0

E

8

A

Displays the operating status.

Color LED State Description

off INIT (initialization status) or no power applied to device.

green

blinking

(200 ms on
200 ms off)

single flash

(200 ms on

1000 ms off)

PREOP (pre-operational status).

SAFEOP (safe-operational status).

Communication of cyclic data transfer running. Input values
available, output values written to the device but not up­dated on device output.

on OP (operational status).

Displays the error content.

Color LED State Description

off No error or no power applied to device.

red

blinking

(200 ms on
200 ms off)

single flash

(200 ms on

1000 ms off)

double flash

(200 ms on

200 ms off
200 ms on

1000 ms off)

Error occurred (see error parameter).

Slave device application has changed the EtherCAT state
autonomously, due to local error (see error parameter).

An application watchdog timeout has occurred.
Sync Manager Watchdog timeout or communication
timeout occurred.

on A critical communication or application controller error has

occurred. Application controller is not responding any more
(PDI Watchdog Timeout detected by ESC)

Displays the input status.

Color LED State Description

off Port not connected or no power applied to device.

green

blinking Port connected and communication active.

on Port not connected but no communication.

Displays the output status.

Color LED State Description

off Port not connected or no power applied to device.

green

blinking Port connected and communication active.

on Port not connected but no communication.

During device initialization, the device address switches are read by the device
firmware. This device address is supported to the master as Explicit Device
Identification.

Example: Value of the Explicit Device ID = 0xDD (dec 221):
0x10 * 0xD (dec 208) + 0x1 * 0xD (dec 13)

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4 Object Structure

4.1 Object Dictionary
structure

This chapter describes the CANopen over EtherCAT (CoE) Object Dictionary.

The objects in the CoE Object Dictionary can be accessed with SDO services, and
many of the dictionary objects can be mapped for cyclic communication in PDOs.
Each object is addressed using a 16-bit index and an 8-bit subindex.

The following table presents the overall layout of the standard Object Dictionary.

Index (hex.) Object dictionary area

1000 – 1FFF Communication profile area
2000 – 5FFF Manufacturer-specific profile area

6000 – 6FFF Input area

7000 – 7FFF Output area

8000 – 8FFF Configuration area

9000 – 9FFF Information area

A000 – AFFF Diagnosis area

B000 – BFFF Service Transfer area

C000 – EFFF Reserved area

F000 – FFFF

Profile Specific Area

Device area

Explanations for the abbreviations in the columns of the tables are given below:

Abbr. Description

Access SDO read/write access

• RO: object can only be read by the SDO service

• RW: object can be both read and written by the SDO service

CoE CAN application protocol over EtherCAT

Index Object Index (hex.) (address of an object)

NV Nonvolatile; attribute value is maintained through power cycles

Object Abstract representation of a particular component within a device,

which consists of data, parameters, and methods.

PDO Process Data Object. Structure described by mapping parameters

containing one or several process data entities.

PM PDO mapping

• Rx: object can be mapped into an Rx PDO

• Tx : object can be mapped into a Tx PDO

RxPDO Receive PDO. A Process Data Object received by an EtherCAT slave.

SDO Service Data Objects. CoE asynchronous mailbox communications

where all objects in the Object Dictionary can be read and written.

SI Subindex (hex.) (sub-address of an object)

Type Data Type

• BOOL, BIT = 1 bit. Boolean (0 = false, 1 = true)

• USINT, BYTE = 8 bit. Unsigned Byte

• UINT = 16 bit. Unsigned integer value

• UDINT = 32 bit. Unsigned integer value

• ULINT = 64 bit. Unsigned integer value

• REAL = 32 bit. Floating point

• V_STRING = 8×n bit. Visible string (1 byte for character)

TxPDO Transmit PDO. A Process Data Object sent from an EtherCAT slave.

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4.2 Communication Profile
Objects
(0x1000…0x1FFF)

Index SI DataType NV Access PM Name

1000 UDINT RO Device Type

1008 V_STRING RO Manufacturer Device name: BPG402

1009 V_STRING RO Manufacturer Hardware Version

100A V_STRING RO Manufacturer Software Version

1010 0x01 UDINT RW Store Parameters

1011 0x01 UDINT RW Restore Default Parameters

1018 RO Identity Object

0x01 UDINT RO Vendor ID

0x02 UDINT RO Product Code

0x03 UDINT RO Revision Number

0x04 UDINT RO Serial Number

10F8 ULINT RO Timestamp Object

1A00 PM RW TxPDO Transmit PDO Mapping Module 1

0x01 BIT Reading Valid Module 1

0x02 BIT Overrange Exceeded Module 1

0x03 BIT Underrange Exceeded Module 1

0x04 BIT Padding Bits 1 (5 bit)

0x05 REAL Sensor Value Module 1

0x06 UDINT Trip Point Output All Instance

1A01 PM RW TxPDO Transmit PDO Mapping

1A02 PM RW TxPDO Transmit PDO Mapping Module 2

0x01 BIT Reading Valid Module 2

0x02 BIT Overrange Exceeded Module 2

0x03 BIT Underrange Exceeded Module 2

0x04 BIT Padding Bits 1 (5 bit)

0x05 REAL Sensor Value Module 2

1A03 PM RW TxPDO Transmit PDO Mapping

The objects of the communication profile describe the basic EtherCAT properties of
the BPG402 and are common to all EtherCAT slaves using the CoE
communication protocol. The objects are described in following table:

0x0820138B => 0x820 = dec 2080 ;
0x138B = dec 5003

Read:
Bit 0 = 1: slave saves the backup entries
when writing 0x1010:01 with 0x65766173
Bit 1-31 = 0

Write:
With the value 0x65766173 the backup
entries will be stored to non-volatile
memory of the slave

Read:
Bit 0 = 1: slave supports the restoring of
backup entries with the default values
when writing 0x1011:01 with 0x64616F6C
Bit 1-31 = 0

Write:
With the value 0x64616F6C the backup
entries will be restored with the default
values

Module 1, User Mapping

Module 2, User Mapping

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4.3 Manufacturer-specific
Profile Objects
(0x2000...0x5FFF)

4.3.1 Manufacturer

Configuration Module 1

Subindex 0x02

4.3.2 Manufacturer

Configuration Module 2

Subindex 0x02

4.4 Input Area
(0x6000…0x6FFF)

4.4.1 Input Common

Subindex 0x0E

Subindex 0x11

4.4.2 Input Heat Transfer

Subindex 0x01

The manufacturer-specific profile objects contain the manufacturer's model number
and device configuration data, status and diagnostic data. The objects are
described in the following tables.

Index SI DataType NV Access PM Name

2800 0x02 REAL RW Safe Value Module 1

Safe Value: The value to be used for Safe State = Safe Value.

Index SI DataType NV Access PM Name

2801 0x02 REAL RW Safe Value Module 2

Safe Value: The value to be used for Safe State = Safe Value.

Index SI DataType NV Access PM Name

6000 0x0E BOOL RO tx TxPdoState Module 1

0x11 REAL RO tx Sensor Value Module 1

Is set if the device is not in Safe State (value (I 0x6nn0, SI 0x11) = valid)

TxPdoState Module 1

0 1 Invalid

Valid

The corrected, converted, calibrated final analog input value of the sensor.

Index SI DataType NV Access PM Name

6003 0x01 BOOL RO tx Reading Valid Module 1

0x02 BOOL RO tx Overrange Exceeded

Module 1

0x03 BOOL RO tx Underrange Exceeded

Module 1

Indicates whether the Value parameter contains a valid value within the specified
accuracy or not.

Reading Valid Module 1

0 Invalid

1 Valid

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Subindex 0x02

Subindex 0x03

4.4.3 Input Common

Subindex 0x0E

Subindex 0x11

4.4.4 Input Hot Cathod Ion

Subindex 0x01

Subindex 0x02

Indicates whether the Value parameter contains a value in over range.

Reading Valid Module 1

0 No Overrange Exceeded

1 Overrange Exceeded

Indicates whether the Value parameter contains a value in under range.

Reading Valid Module 1

0 No Underrange Exceeded

1 Underrange Exceeded

Index SI DataType NV Access PM Name

6010 0x0E BOOL RO tx TxPdoState Module 2

0x11 REAL RO tx Sensor Value Module 2

Is set if the device is not in Safe State (value (I 0x6010, SI 0x11) = valid)

TxPdoState Module 2

0 1 Invalid

Valid

The corrected, converted, calibrated final analog input value of the sensor.

Index SI DataType NV Access PM Name

6015 0x01 BOOL RO tx Reading Valid Module 2

0x02 BOOL RO tx Overrange Exceeded

Module 2

0x03 BOOL RO tx Underrange Exceeded

Module 2

0x05 BOOL RO tx Emission Status Off/On

Module 4

0x06 BOOL RO tx Degas Status Off/On

Module 4

Indicates whether the Value parameter contains a valid value within the specified
accuracy or not.

Reading Valid Module 2

0 Invalid

1 Valid

Indicates whether the Value parameter contains a value in over range.

Reading Valid Module 2

0 No Overrange Exceeded

1 Overrange Exceeded

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Subindex 0x03

Subindex 0x05

Subindex 0x06

4.4.5 Input Trip Point 1

Subindex 0x01

Subindex 0x02

Indicates whether the Value parameter contains a value in under range.

Reading Valid Module 3

0 No Underrange Exceeded

1 Underrange Exceeded

Emission Status Off/On Module 4

0 OFF

1 ON

Degas Status Off/On Module 4

0 OFF

1 ON

Index SI DataType NV Access PM Name

600E 0x01 BOOL RO tx Status High Trip TP1

0x02 BOOL RO tx Status Low Trip TP1

600F 0x01 BOOL RO tx Status High Trip TP2

0x02 BOOL RO tx Status Low Trip TP2

Status High Trip

0 1 High Trip not assert

High Trip assert

Status Low Trip

0 1 Low Trip not assert

Low Trip assert

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4.5 Configuration Area
(0x8000…0x8FFF)

4.5.1 Configuration Hot

Cathode Ion

Subindex 0x01

Subindex 0x02

Subindex 0x11

Index SI DataType NV Access PM Name

8015 0x01 BOOL x RW Filament User Mode

Module 2

0x02 BOOL x RW Emission User Mode

Module 2

0x11 BYTE x RW Active Filament Module 2

0x13 REAL x RW Emission Current Module 2

Defines whether the filament selection is static as defined by "Active Filament" =
manual mode or the active filament is changed always when the filament is
switched on = automatic mode

Filament User Mode Module 4

0 1 Automatic

Manual

Defines whether the emission is switched on automatically by a different sensor
(automatic) or manually by the user (manual)

Filament User Mode Module 4

0 1 Automatic

Manual

Active Sensor filament

Subindex 0x13

Active Filament Module 4

Bit 0
Bit 1

Bit 1…7

Filament 1
Filament 2

0

Emission current in milliamps

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4.5.2 Configuration Trip
Point 1

If "High Trip Source Index" is 0x800E1100 or 0x800F1100 the High Trip Point is
equal with the value referenced in "High Trip Point Limit".

The value defined in "High Trip Point Limit" is compared with the pressure value
referenced by the "Source Index" parameter.

If "Low Trip Source Index" is 0x800E1400 or 0x800F1400 the Low Trip Point is
equal with the value referenced in "Low Trip Point Limit".

The value defined in "Low Trip Point Limit" is compared with the pressure value
referenced by the "Source Index" parameter.

Measurement signal

(Pressure p)

High Trip

High Trip Point

Hysteresis

Low Trip
Hysteresis

Subindex 0x01

Subindex 0x02

Low Trip Point

Time t

active

activein-

in-

active

active

in-

active

Index SI DataType NV Access PM Name

800E 0x01 BOOL x RW High Trip Enable TP1

0x02 BOOL x RW Low Trip Enable TP1

0x04 BOOL x RW Override Enable TP1

0x05 BOOL x RW Override High Trip TP1

0x06 BOOL x RW Override Low Trip TP1

0x11 REAL x RW High Trip Point Limit TP1

0x12 UDINT x RW High Trip Source Index TP1

0x13 REAL X RW Percentage High Trip Source TP1

0x14 REAL x RW Low Trip Point Limit TP1

0x15 UDINT x RW Low Trip Source Index TP1

0x16 REAL x RW Percentage Low Trip Source TP1

0x17 REAL x RW High Trip Hysteresis TP1

0x18 REAL x RW Low Trip Hysteresis TP1

0x1A UDINT x RW Source Index TP1

High Trip Point

0 1 Disable

Enable

Low Trip Point

0 1 Disable

Enable

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Subindex 0x04

Subindex 0x05

Subindex 0x06

Subindex 0x11

Subindex 0x12

Subindex 0x13

Subindex 0x14

Subindex 0x15

Subindex 0x16

Subindex 0x17

Subindex 0x18

Subindex 0x1A

Override Enable

0 1 Disable

Enable

Override High Trip

0 1 Disable

Enable

Override Low Trip

0 1 Disable

Enable

High Trip Point Limit: High limit to trigger trip point condition if Input Value (I
0x900E, SI 0x01) is above this limit.

Object index of High Trip Point Value source. Index of High Trip Point Limit (I
0x800E, SI 0x11)

Bit 16…31: Index
Bit 08…15: Subindex
Bit 00…07: reserved

It is only possible to reference to "High Trip Point Limit" (I 0x800E, SI 0x11).

Percentage of Value referenced by High Trip Source Index in [%]. If High Trip
Source Index is I 0x800E, SI 0x11 this parameter is not used.

Low Trip Point Limit: Low limit to trigger trip point condition if Input Value (I 0x900E,
SI 0x01) is below this limit.

Object index of Low Trip Point Value source. Index of Low Trip Point Limit (I
0x800E, SI 0x14)

Bit 16…31: Index
Bit 08…15: Subindex
Bit 00…07: reserved

It is only possible to reference to "Low Trip Point Limit" (I 0x800E, SI 0x14).

Percentage of Value referenced by Low Trip Source Index in [%]. If Low Trip
Source Index is I 0x800E, SI 0x14 this parameter is not used.

High Trip Hysteresis: Hysteresis value for High Trip Point.

Low Trip Hysteresis: Hysteresis value for Low Trip Point.

Object index of active source of (I 0x900E SI 0x01) Input Value.

Source Index

Bit 16…31

Bit 08…15

Bit 00…07

Index

Subindex

Reserved

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4.5.3 Configuration Trip
Point 2

Subindex 0x01

Subindex 0x02

Subindex 0x04

Subindex 0x05

Subindex 0x06

Subindex 0x11

Subindex 0x12

Calculating the High Trip Point and Low Trip Point → 4.4.7.

Index SI DataType NV Access PM Name

800F 0x01 BOOL x RW High Trip Enable TP2

0x02 BOOL x RW Low Trip Enable TP2

0x04 BOOL x RW Override Enable TP2

0x05 BOOL x RW Override High Trip TP2

0x06 BOOL x RW Override Low Trip TP2

0x11 REAL x RW High Trip Point Limit TP2

0x12 UDINT x RW High Trip Source Index

TP2

0x13 REAL X RW Percentage High Trip

Source TP2

0x14 REAL x RW Low Trip Point Limit TP2

0x15 UDINT x RW Low Trip Source Index

TP2

0x16 REAL x RW Percentage Low Trip

Source TP2

0x17 REAL x RW High Trip Hysteresis TP2

0x18 REAL x RW Low Trip Hysteresis TP2

0x1A UDINT x RW Source Index TP2

High Trip Point

0 1 Disable

Enable

Low Trip Point

0 1 Disable

Enable

Override Enable

0 1 Disable

Enable

Override High Trip

0 1 Disable

Enable

Override Low Trip

0 1 Disable

Enable

High Trip Point limit: High limit to trigger trip point condition if Input Value (I 0x900F,
SI 0x01) is above this limit.

Object index of High Trip Point Value source. Index of High Trip Point Limit (I
0x800F, SI 0x11)

Bit 16…31: Index
Bit 08…15: Subindex
Bit 00…07: reserved

It is only possible to reference to "High Trip Point Limit" (I 0x800F, SI 0x11).

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Subindex 0x13

Subindex 0x14

Subindex 0x15

Subindex 0x16

Subindex 0x17

Subindex 0x18

Subindex 0x1A

4.6 Information Area
(0x9000…0x9FFF)

Highest / lowest
measurement value

Percentage of Value referenced by High Trip Source Index in [%]. If High Trip
Source Index is I 0x800F, SI 0x11 this parameter is not used.

Low Trip Point Limit: Low limit to trigger trip point condition if Input Value (I 0x900F,
SI 0x01) is below this limit.

Object index of Low Trip Point Value source. Index of Low Trip Point Limit (I
0x800F, SI 0x14)

Bit 16…31: Index
Bit 08…15: Subindex
Bit 00…07: reserved

It is only possible to reference to "Low Trip Point Limit" (I 0x800F, SI 0x14).

Percentage of Value referenced by Low Trip Source Index in [%]. If Low Trip
Source Index is I 0x800F, SI 0x14 this parameter is not used.

High Trip Hysteresis: Hysteresis value for High Trip Point.

Low Trip Hysteresis: Hysteresis value for Low Trip Point.

Object index of active source of (I 0x900F SI 0x01) Input Value.

Source Index

Bit 16…31

Bit 08…15

Bit 00…07

Index

Subindex

Reserved

The Information Data object defines the input process data.

Indicated

pressure

p6'

p5'

p4'

p3'

Error

Overrange

4

3

Measurement

range

p2'

p1'

2

1

Underrange

Display range

Error

Real pressure

p0 p1 p2 p3

The "measurement range" is the range between minimum and maximum pressure,
where the reading of the gauge is within the specified measurement uncertainty
limits.

The "valid measurement information range" (display range) is the complete
pressure range where the gauge gives an indication (measurement signal). The
valid measurement information range (display range) consists of underrange,
measurement range and overrange.

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Subindex 0x02

Subindex 0x03

Subindex 0x04

Subindex 0x05

4.6.1 Information Heat
Transfer

Subindex 0x01

Subindex 0x02

According to these definitions, 4 points are defined:

1 Lowest informational measurement value

2 Lowest precision measurement value

3 Highest precision measurement value

4 Highest informational measurement value

Index SI DataType NV Access PM Name

9000 0x02 REAL x RO Highest Informational

Measurement Value Module 1

0x03 REAL x RO Highest Precision Measurement

Value Module 1

0x04 REAL x RO Lowest Precision Measurement

Value Module 1

0x05 REAL x RO Lowest Informational

Measurement Value Module 1

Highest Informational Measurement Value: Highest value that the gauge can
measure without a specified accuracy.

Highest Precision Measurement Value: Highest valid value at which the gauge is
specified with an accuracy value. Above that value, the parameter Reading Valid is
set to invalid.

Lowest Precision Measurement Value: Lowest valid value at which the gauge is
specified with an accuracy value. Below that value, the parameter Reading Valid is
set to invalid.

Lowest value the gauge can measure without a specified accuracy.

Index SI DataType NV Access PM Name

9003 0x01 UINT RO Sensor Warning Module 1

0x02 UINT RO Sensor Alarm Module 1

Sensor Warnings

Bit 0

Bit 1

Bit 2…15

0

Electronics Warning

0

Sensor Alarms

Bit 0

Bit 1

Bit 2…15

0

Electronics Failure

0

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4.6.2 Information Common

Index SI DataType NV Access PM Name

9010 0x02 REAL x RO Highest Informational

0x03 REAL x RO Highest Precision Measurement

0x04 REAL x RO Lowest Precision Measurement

0x05 REAL x RO Lowest Informational

Subindex 0x02

Subindex 0x03

Subindex 0x04

Subindex 0x05

4.6.3 Information Hot
Cathode Ion

Subindex 0x01

Subindex 0x02

Measurement Value Module 2

Value Module 2

Value Module 2

Measurement Value Module 2

Highest Informational Measurement Value: Highest value that the gauge can
measure without a specified accuracy.

Highest Precision Measurement Value: Highest valid value at which the gauge is
specified with an accuracy value. Above that value, the parameter Reading Valid is
set to invalid.

Lowest Precision Measurement Value: Lowest valid value at which the gauge is
specified with an accuracy value. Below that value, the parameter Reading Valid is
set to invalid.

Lowest value the gauge can measure without a specified accuracy.

Index SI DataType NV Access PM Name

9015 0x01 UINT RO Sensor Warning Module 2

0x02 UINT RO Sensor Alarm Module 2

Sensor Warnings

Bit 0

Bit 1

Bit 2…8

Bit 9

Bit 10

Bit 11

Bit 12…15

Sensor Filament 1 Warning

Sensor Filament 2 Warning

0

Electronics Warning

0

Pressure to high for Degas

0

Sensor Alarms

Bit 0

Bit 1

Bit 2…8

Bit 9

Bit 10

Bit 11

Bit 12…15

Sensor Filament 1 Alarm

Sensor Filament 2 Alarm

0

Electronics Faliure

0

Overpressure Emission OFF

0

tira93e1 (2014-04) BPG402-SE.cp 21

4.6.4 Information Trip
Point 1/2

Subindex 0x01 (900E)

Subindex 0x01 (900F)

4.7 Device Area

(0xF000...0xAFFF)

4.7.1 Semiconductor Device

Profile

Subindex 0x01

Subindex 0x02

4.7.2 Module Profile List

Subindex 0x01

Subindex 0x02

4.7.3 Exceptions

4.7.4 Active Exception Status

Active Exception Status

Index SI DataType NV Access PM Name

900E 0x01 REAL RO Input Value Trip Point 1

900F 0x01 REAL RO Input Value Trip Point 2

Input Value Trip Point 1: Trip Point Input value as referenced by Source Index (I
0x800E, SI 0x0E).

Input Value Trip Point 2: 0 Trip Point Input value as referenced by Source Index (I
0x800F, SI 0x0E).

Index SI DataType NV Access PM Name

F000 0x01 UINT RO Index Distance

0x02 UINT RO Maximum Number of

Modules

Index Distance: Index offset between PDO entries of two consecutive modules (for
ETG.5003 = 0x10), e.g. 0x6000, 0x6010.

Maximum Number of Modules: For the BPG402 this value always is 2.

Index SI DataType NV Access PM Name

F010 0x01 UDINT RO Profile Number Module 1

0x02 UDINT RO Profile Number Module 2

Each sub-index lists the profile-number of the corresponding module.

Each sub-index lists the profile-number of the corresponding module.

Index SI DataType NV Access PM Name

F380 USINT RO tx ActiveException Status

Active Exception Status

Bit 0 Device Warning

Bit 1 Manufacturer Warning

Bit 2 Device Error

Bit 3 Manufacturer Error

Bit 4…7 0

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tira93e1 (2014-04) BPG402-SE.cp

4.7.5 Active Device Warning
Details

Subindex 0x01

Subindex 0x02

Subindex 0x03

Subindex 0x01

4.7.6 Active Device Error
Details

Index SI DataType NV Access PM Name

F383 0x01 UDINT RO tx Active Device Error Details Device

0x02 UDINT RO tx Active Device Error Details Module 1

0x03 UDINT RO tx Active Device Error Details Module 2

F384 0x01 UDINT RO tx Active Manufacturer Error Details

Subindex 0x01

Subindex 0x02

The "active device warning details" parameter describes the warning state of the
complete device.

Index SI DataType NV Access PM Name

F381 0x01 UDINT RO tx Active Device Warning

Details Device

0x02 UDINT RO tx Active Device Warning

Details Module 1

0x03 UDINT RO tx Active Device Warning

Details Module 2

F382 0x01 UDINT RO tx Active Manufacturer

Warning Details

Active Device Warning Details Device(Index F381)

Bit 0…2 0

Bit 3 EEPROM exception

Bit 4…31 0

Active Device Warning Details Module 1 (Index F381)

Bit 0 0

Bit 1 Electronics warning

Bit 2…31 0

Active Device Warning Details Module 2 (Index F381)

Bit 0 0

Bit 1 Electronics warning

Bit 2…31 0

Active Manufacturer Warning Details (Index F382)

Bit 0 Internal Communication Exception (between

EtherCAT-Protocol and Device-Application)

Bit 1…31 0

The "active device error details" parameter describes the error state of the
complete device.

Active Device Error Details Device (Index F383)

Bit 0 0

Bit 1 uP exception

Bit 2…31 0

Active Device Error Details Module 1 (Index F383)

Bit 0 0

Bit 1 Electronics failure

Bit 2…31 0

tira93e1 (2014-04) BPG402-SE.cp 23

Subindex 0x03

Subindex 0x01

4.7.7 Latched Device Warning
Details

Latched Exceptions Status

Subindex 0x01

Subindex 0x02

Subindex 0x03

Subindex 0x01 (F392)

4.7.8 Latched Device Error
Details

Subindex 0x01

Subindex 0x02

Subindex 0x03

Subindex 0x01 (F394)

Active Device Error Details Module 2 (Index F383)

Bit 0 0

Bit 1 Electronics failure

Bit 2…31 0

Active Manufacturer Error Details (Index F384)

Bit 0 Internal Communication Exception (between

EtherCAT-Protocol and Device-Application)

Bit 1 Wrong software version used in base device

Bit 2 Wrong sensor type detected

Bit 3…31 0

Index SI DataType NV Access PM Name

F390 USINT RO tx Latched Exceptions Status

F391 0x01 UDINT RO tx Latched Device Warning

Details Device

0x02 UDINT RO tx Latched Device Warning

Details Module 1

0x03 UDINT RO tx Latched Device Warning

Details Module 2

F392 0x01 UDINT RO tx Latched Manufacturer

Warning Details

Latched version of 0xF380.

Latched Device Warning Details Device: Latched version of 0xF381:01.

Latched Device Warning Details Module 1: Latched version of 0xF381:02.

Latched Device Warning Details Module 2: Latched version of 0xF381:03.

Latched Manufacturer Warning Details: Latched version of 0xF382:01.

Index SI DataType NV Access PM Name

F393 0x01 UDINT RO tx Latched Device Error

Details Device

0x02 UDINT RO tx Latched Device Error

Details Module 1

0x03 UDINT RO tx Latched Device Error

Details Module 2

F394 0x01 UDINT RO tx Latched Manufacturer

Error Details

Latched Device Error Details Device: Latched version of 0xF383:01.

Latched Device Error Details Module 1: Latched version of 0xF383:02.

Latched Device Error Details Module 2: Latched version of 0xF383:03.

Latched Manufacturer Error Details: Latched version of 0xF384:01.

24

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4.7.9 Device Warning Mask

Subindex 0x01

Subindex 0x02

Subindex 0x03

Subindex 0x01 (F3A2)

4.7.10 Device Error Mask

Subindex 0x01

Subindex 0x02

Subindex 0x03

Subindex 0x01 (F3A4)

4.7.11 Comination Gauge

Subindex 0x01

Subindex 0x02

Index SI DataType NV Access PM Name

F3A1 0x01 UDINT x RW Device Warning Mask

Device

0x02 UDINT x RW Device Warning Mask

Module 1

0x03 UDINT x RW Device Warning Mask

Module 2

F3A2 0x01 UDINT x RW Manufacturer Warning

Mask

Device Warning Mask Device: Mask bits for 0xF381:01 and 0xF391:01.

Device Warning Mask Module 1: Mask bits for 0xF381:02 and 0xF391:02.

Device Warning Mask Module 2: Mask bits for 0xF381:03 and 0xF391:03.

Manufacturer Warning Mask: Mask bits for 0xF382:01 and 0xF392:01.

Index SI DataType NV Access PM Name

F3A3 0x01 UDINT x RW Device Error Mask Device

0x02 UDINT x RW Device Error Mask

Module 1

0x03 UDINT x RW Device Error Mask

Module 2

F3A4 0x01 UDINT x RW Manufacturer Error Mask

Device Error Mask Device: Mask bits for 0xF383:01 and 0xF393:01.

Device Error Mask Module 1: Mask bits for 0xF383:02 and 0xF393:02.

Device Error Mask Module 2: Mask bits for 0xF383:03 and 0xF393:03.

Manufacturer Error Mask: Mask bits for 0xF384:01 and 0xF394:01.

Index SI DataType NV Access PM Name

F640 0x01 BOOL RO tx Combination Gauge

Reading Valid

0x02 BOOL RO tx Combination Gauge

Overrange Exceeded

0x03 BOOL RO tx Combination Gauge

Underrange Exceeded

0x11 REAL RO tx Combination Gauge Active

Value

0x12 UINT RO tx Combination Gauge Active

Sensor Number

Identifies whether the complete vacuum pressure gauge (with several measuring
principles) is out of its absolute overrange or absolute underrange, or in any other
failure condition.

If the bit "Overrange" is set, all modules of the gauge are in an overrange condition.

tira93e1 (2014-04) BPG402-SE.cp 25

Subindex 0x03

If the bit "Underrange” is set, all modules of the gauge are in an underrange
condition.

Subindex 0x11

The value copied from the measurement value of the active measuring module
used for the Input PDO.

Subindex 0x12

Identifies the module that is providing the measurement value, the latter of which is
copied into the Active Value parameter for all Input PDO’s.

0 No module has a valid value

1 Heat Transfer sensor is providing the Active Value

2 Hot Cathode sensor is providing the Active Value

4.7.12 Trip Point Output All

Index SI DataType NV Access PM Name

F641 0x01 UDINT RO tx Trip Point Output All

Subindex 0x01

Status of Trip Point instances.

Trip Point Output All Instance

Bit 0

Bit 1

Bit 2

Bit 3

Bit 4…31

Status High Trip (I 0x600E, SI 0x01)

Status Low Trip (I 0x600E S,I 0x02)

Status High Trip (I 0x600F, SI 0x01)

Status Low Trip (I 0x600F, SI 0x02)

0

4.7.13 Input Latch Local

Timestamp

Index SI DataType NV Access PM Name

F6F0 0x01 UDINT RO tx Input Latch Local

0x02 UDINT RO tx Input Latch Local

Subindex 0x01

Local controller time corresponding to the input latch time in microseconds. It starts
at zero on device power-up. Mandatory if device has inputs. If device has no inputs
defined, this corresponds the time immediately prior to writing to input SM.

Subindex 0x02

Local controller time corresponding to the input latch time in microseconds. It starts
at zero on device power-up. Mandatory if device has inputs. If device has no inputs
defined, this corresponds the time immediately prior to writing to input SM.

4.7.14 Configure Device

Index SI DataType NV Access PM Name

F840 0x01 UDINT x RW Data Units

0x02 V_STRING RW Password

Subindex 0x01

Unit of the Value of the Analog Input Sensor Instance and all related parameters.

Trip Point Output All Instance

0x00220000

0xFD4E0000

0x00A10000

0x00E00000

Pascal

mbar

Torr

Counts (INFICON)

26

Instance

Timestamp module 1

Timestamp module 2

tira93e1 (2014-04) BPG402-SE.cp

Subindex 0x02

4.7.15 Information Device

Subindex 0x01 (F940)

Subindex 0x02 (F940)

Writing the corresponding password (vendor specified value) enables Access
Rights (Index F940 Subindex 03)

Index SI DataType NV Access PM Name

F940 0x01 UDINT RO Measurement Principle

0x02 BYTE RO Number of Sensors

0x03 USINT RO Access Rights

0x04 V_STRING x RO SW Version VPG PCB

F9F0 V_STRING RO Manufacturer Serial

Number

F9F1 0x01 UDINT RO CDP Functional

Generation Number
Module 1

0x02 RO CDP Functional

Generation Number
Module 2

F9F2 0x01 UDINT RO SDP Functional

Generation Number
Module 1

0x02 UDINT RO SDP Functional

Generation Number
Module 2

F9F3 V_STRING RO Vendor Name

F9F4 0x01 V_STRING RO Semiconductor SDP

Device Name Module 1

0x02 V_STRING RO Semiconductor SDP

Device Name Module 2

F9F5 0x01 USINT RW Output Identifier Module 1

0x02 USINT RW Output Identifier Module 2

F9F6 UDINT RO Time Since Power On

F9F7 UDINT x RO Time Total Powered

F9F8 UDINT RO Firmware Update

Functional Generation
Number

Measurement principle assigned to the object instance.

The most significant nibble of the parameter represents the sensor type of the first
Module, the second most significant nibble of the parameter represents the sensor
type of the second Module, and so forth.

Measurement Principle (Index F940)

1

Capacitance Manometer

2

Piezo

3

Heat Transfer

4

Cold Cathode

5

Hot Cathode

Number of Sensors (Index F940): In this device are 2 sensors implemented.

tira93e1 (2014-04) BPG402-SE.cp 27

Subindex 0x03 (F940)

Subindex 0x04 (F940)

4.7.16 Command Degas ON /

OFF

Subindex 0x01

Subindex 0x02

Subindex 0x03

4.7.17 Command Emission

ON / OFF

Access Rights (Index F940)

0

User

access to measurement and limited diagnostic features

1

Service

access to additional diagnostic features (vendor specific)

2

Superuser

access to vendor-specific parameters and features, e.g.
calibration parameters, model number, serial numbers

Software version of the basic device.

Execution of this command will initiate or cancel a degas operation.

Index SI DataType NV Access PM Name

FB43 0x01 V_STRING(2) RW Command

0x02 BYTE RO Status

0x03 V_STRING(3) RO Response

A degas command is initiated when the following byte sequence is sent.

Command

Byte 0 0: Degas OFF

1: Degas ON

Byte 1 Index of the Sub Sensor module has to be 2

2: Hot Cathode

Status (supported values)

0

Last command completed, no errors, no reply available

1

Last command completed, no errors, reply available

2

Last command completed, errors present, no reply
available

3

Last command completed, errors present, reply available

255

Command is executing

Response

Byte 0 See Subindex 0x02

Byte 1 Unused

Byte 2 0: Degas ON / OFF successful

1: Degas ON / OFF failed (unspecified reason)

2: Degas On failed because pressure to high
254: No previous Degas ON / OFF command issued

Execution of this command will turn on or off the gauge’s emission state.

Index SI DataType NV Access PM Name

FB44 0x01 V_STRING(2) RW Command

0x02 BYTE RO Status

0x03 V_STRING(3) RO Response

28

tira93e1 (2014-04) BPG402-SE.cp

Subindex 0x01

Subindex 0x02

Subindex 0x03

4.7.18 Device Reset Command

An emission command is initiated when the following byte sequence is sent.

Command

Byte 0 0: Emission OFF

1: Emission ON

Byte 1 Index of the Sub Sensor module has to be 2

2: Hot Cathode

Status (supported values)

0

Last command completed, no errors, no reply available

1

Last command completed, no errors, reply available

2

Last command completed, errors present, no reply
available

3

Last command completed, errors present, reply available

255

Command is executing

Response

Byte 0 See Subindex 0x02

Byte 1 Unused

Byte 2 0: Emission ON / OFF successful

1: Emission ON / OFF failed (unspecified reason)

2: Emission On failed because pressure to high
254: No previous Emission ON / OFF command
issued

Execution of this command causes the device to emulate a complete power cycle.
This includes an ESC reset. An SDP may limit some behavior of the power cycle
emulation, but shall not exclude the EtherCAT interface.

Subindex 0x01

As consequence of an ESC reset all following devices are disconnected

from the network.

There are two versions of this command:

• Standard reset (as described above)

• Factory reset (as described above, but additionally, all parameters are restored

to as-shipped defaults).

Index SI DataType NV Access PM Name

FBF0 0x01 V_STRING(6) RW Command

0x02 BYTE RO Status

0x03 V_STRING(2) RO Response

A device reset is initiated when the following byte sequence is sent.

Command

Byte 0

Byte 1

Byte 2

Byte 3

Byte 4

Byte 5

0x74

0x65

0x73

0x65

0x72

0x00 = Standard reset, 0x66 = Factory Reset

tira93e1 (2014-04) BPG402-SE.cp 29

Subindex 0x02

Subindex 0x03

4.7.19 Exception Reset

Command

Subindex 0x01

Subindex 0x02

Subindex 0x03

4.7.20 Store Parameters

Command

Status (supported values)

0

Reserved

1

Reserved

2

Last command completed, error, no response

3

Reserved

255

Command is executing

Response

Byte 0 See Subindex 0x02

Byte 1 Unused

Execution of this command clears the latched exceptions.

Index SI DataType NV Access PM Name

FBF1 0x01 V_STRING(5) RW Command

0x02 BYTE RO Status

0x03 V_STRING(2) RO Response

A exception reset is initiated when the following byte sequence is sent.

Command

Byte 0

Byte 1

Byte 2

Byte 3

Byte 4

0x74

0x65

0x73

0x65

0x72

Status (supported values)

0

Last command completed, no error, no response

1

Reserved

2

Last command completed, error, no response

3

Reserved

255

Command is executing

Response

Byte 0 See Subindex 0x02

Byte 1 Unused

Execution of this command will store all parameters to non-volatile memory. If a
device automatically saves all non-volatile parameters at the time they are set, this
command will not take any action.

Index SI DataType NV Access PM Name

FBF2 0x01 V_STRING(4) RW Command

0x02 BYTE RO Status

0x03 V_STRING(2) RO Response

30

tira93e1 (2014-04) BPG402-SE.cp

Subindex 0x01

Subindex 0x02

Subindex 0x03

A device reset is initiated when the following byte sequence is sent.

Command

Byte 0

Byte 1

Byte 2

Byte 3

0x65

0x76

0x61

0x73

Status (supported values)

0

Last command completed, no error, no response

1

Reserved

2

Last command completed, error, no response

3

Reserved

255

Command is executing

Response

Byte 0 See Subindex 0x02

Byte 1 Unused

tira93e1 (2014-04) BPG402-SE.cp 31

Appendix

A: Literature

 [1] www.inficon.com

Instruction Sheet
BPG402-S, BPG402-SD, BPG402-SE, BPG402-SL, BPG402-SP
tima46d1 (German)
tima46e1 (English)
INFICON AG, LI–9496 Balzers, Liechtenstein

 [2] www.inficon.com

Instruction Sheet
BPG402-SD, BPG402-SE, BPG402-SP
tima47d1 (German)
tima47e1 (English)
INFICON AG, LI–9496 Balzers, Liechtenstein

 [3] www.inficon.com

Operating Manual
BPG402-S, BPG402-SD, BPG402-SE, BPG402-SL, BPG402-SP
tina46d1 (German)
tina46e1 (English)
INFICON AG, LI–9496 Balzers, Liechtenstein

 [4] ETG.1000.2: Physical Layer service definition and protocol specification

 [5] ETG.1000.3: Data Link Layer service definition

 [6] ETG.1000.4: Data Link Layer protocol specification

 [7] ETG.1000.5: Application Layer service definition

 [8] ETG.1000.6: Application Layer protocol specification

 [9] ETG.1020: EtherCAT Protocol Enhancements

 [10] ETG.2000: EtherCAT Slave Information

 [11] ETG.5001.1: Modular Device Profile – Part 1: General MDP Device

Model

 [12] ETG.5003.1: Semiconductor Device profile – Part 1: Common Device

Profile (CDP)

 [13] ETG.5003.2080: Semiconductor Device profile – Part 2080: Specific

Device Profile (SDP): Vacuum Pressure Gauge

 [14] IEC 61158-x-12 (all parts for type 12): Industrial communication

networks – Fieldbus specifications

 [15] IEC 61784-2: Industrial communication networks – Profiles – Part 2:

Additional fieldbus profiles for real-time networks based on ISO/IEC
8802-3

 [16] SEMI E54 / Draft 5102A: SPECIFICATION FOR SENSOR/ACTUATOR

NETWORK SPECIFIC DEVICE MODEL FOR VACUUM PRESSURE
GAUGES

 [17] SEMI E52: Practice for referencing gases, gas mixtures and vaporizable

materials used in digital mass flow controllers

32

tira93e1 (2014-04) BPG402-SE.cp

Notes

tira93e1 (2014-04) BPG402-SE.cp 33

LI–9496 Balzers
Liechtenstein
Tel +423 / 388 3111
Fax +423 / 388 3700

Original: English tira93e1 (2014-04) [e-mail]

tira93e1

www.inficon.com