This Communication protocol contains instructions for operating the vacuum gauges BPG402-SD (featuring DeviceNet interfaces) as slave together with a
DeviceNet master.
This manual describes the functionality of DeviceNet for programming
purposes. For more information refer to the "DeviceNet specifications" of
the Open DeviceNet Vendor Association (ODVA) (→ [2]) and the corresponding European standard (→ [3]).
For specifications and operation instructions of the vacuum gauges refer
to the appropriate documents:
BPG402-SD → [1], [4], [5], [6]
DeviceNet Interface
Abbreviations
The following description of the DeviceNet Interface is compliant to the DeviceNet
specification of the Open DeviceNet Vendor Association.
This manual describes the functionality of a DeviceNet Group 2 Only Slave and
supports Explicit Messaging and the I/O Polling.
We reserve the right to make technical changes without prior notice.
Abbr.Meaning
NVNonvolatile; attribute value is maintained through power cycles
VVolatile
INTInteger value(Range –32767 … 32768)
UINTUnsigned integer value(Range 0 … 65635)
USINTUnsigned short integer 8 bit (Range 0 … 255)
FLOATFloating point value(Range according to IEEE 754)
XX
XX
XX
Hexadecimal number(Radix = 16)
h
Decimal number(Radix = 10)
d
Binary number(Radix = 2)
b
Trademarks
2tira46e1 (2004-11) BPG402-SDv1.cp
DeviceNet™ Open DeviceNet Vendor Association Inc.
Contents
Intended Use of this Document2
DeviceNet Interface2
Abbreviations2
Trademarks2
1 Starting-Up of the Slave4
1.1 Power Supply Requirements4
1.2 Front View of the BPG402-SD4
1.3 Connectors on the Device5
1.4 Side View of the BPG402-SD6
1.5 Indicators and Switches6
1.5.1 Module Status LED6
1.5.2 Network Status LED6
1.5.3 Filament Status LED7
1.5.3 Node Address Switch7
1.5.4 Data Rate Switch7
1.5.5 Setpoint7
2 Object Structure8
2.1 Connection Object8
2.1.1 Vendor-Specific Object Extension on Instance 2 Poll Connection8
2.2 Identity Object9
2.2.1 Class Attributes9
2.2.2 Instance Attributes9
2.3 S-Device Supervisor Object9
2.3.1 Class Attributes9
2.3.2 Instance Attributes10
2.3.2.1 Semantics11
2.3.3 S-Device Supervisor Object States15
2.3.4 S-Device Supervisor Common Services15
2.3.5 S-Device Supervisor Object Specific Services16
2.4 S-Analog Sensor Object16
2.4.1 Class Attributes16
2.4.2 Instance Attributes17
2.4.2.1 Instance Attributes of Instance 1 Pirani Instance17
2.4.2.2 Semantics of S-Analog Sensor Instance 118
2.4.2.3 Instance Attributes of Instance 2 Hot Cathode Ion Gauge20
2.4.2.4 Semantics of S-Analog Sensor Instance 221
2.4.2.5 Instance Attributes of Instance 21 / Setpoint A
(Instance 22 / Setpoint B)22
2.4.3 Common Services24
2.4.4 Object-Specific Services on Instance 1 / Pirani24
2.4.5 Object-Specific Services on Instance 2 / Hot Cathode Ion Gauge25
2.4.5.1 Set Degas State25
2.4.5.2 Set Emission State25
2.4.5.3 Emission User Mode26
2.4.6 Behavior26
3 I/O Assembly Object27
3.1 I/O Assembly Instances27
3.2 I/O Assembly Object Instance Data Attribute Format28
Appendix29
A: Range of Values29
B: Specific Codes29
C: Conversion of a Floating Number According to IEEE 75429
D: Typical Start-Up Procedure30
E: Literature33
tira46e1 (2004-11) BPG402-SDv1.cp3
1Starting-Up of the Slave
1.1 Power Supply
Requirements
1.2 Front View of the
BPG402-SD
The BPG402-SD has to be powered with two voltages:
1.24 VDC, 18 W at the 15 pole Sub-D connector for the gauge itself;
2.24 VDC nominal, <2 W range (+11 … +25 V) at the DeviceNet micro style
connector for the DeviceNet transceiver.
3
2
1
8
PositionFunction
1Address switch × 10, decimal
2Address switch × 1, decimal
3DeviceNet connector
4Data rate switch
5Network status LED
6Module status LED
7"Sensor cable" connector
(Power, analog I/O, RS232C I/O
and Relay contacts)
8Filament status LED
5
4
6
7
4tira46e1 (2004-11) BPG402-SDv1.cp
1.3 Connectors on the
Device
The BPG402-SD uses a "Sealed Micro-Style Connector" for the DeviceNet connection. The DeviceNet part of the gauge is powered via the DeviceNet connector.
Pin Assignment of the Sealed
Micro-Style Connector
Pin Assignment of the 15-pin
D-Sub connector
4
5
1
3
PinFunction
1Drain
2+24 V nominal (range 11 … 25 V)
2
3V–
4CAN_H
5CAN_L
PinFunction
15
8
1Setpoint A, relay common
2Pressure output signal (0 … +10 V)
9
1
3Threshold Setpoint A output (0 … +10 V)
4Setpoint A, relay, n.o. contact
5Supply sensor electronics common
6Threshold Setpoint B output (0 … +10 V)
7Degas input , high active
8Supply sensor electronics +24 Volt
9Setpoint B, relay common
10Gauge identification
11Setpoint B, relay, n.o. contact
12Signal common GND
13RS232, TxD
14RS232, RxD
15do not connect
tira46e1 (2004-11) BPG402-SDv1.cp5
1.4 Side View of the
BPG402-SD
1.5 Indicators and Switches
8
9
10
PositionFunction
8Potentiometer for Setpoint A threshold adjustment
9Potentiometer for Setpoint B threshold adjustment
10Fullscale adjustment push button
1.5.1 Module Status LED
1.5.2 Network Status LED
Device StateLED StateDescription
Power OffdarkNo power applied to device.
Device Self-Testflashing
green-Red
Device Operational greenDevice is operating normally.
Unrecoverable
Fault
Minor Faultflashing redDevice has detected a recoverable fault
The network status LED indicates the status of the DeviceNet communication link.
For this stateLED state To indicate
Not Powered/Not OnlinedarkDevice is not online.
On–line, Not Connected flashing
Link OK Online, Connected green The device is online and has connec-
Connection Time Out flashing
Critical Link Failure red Failed communication device. The
redDevice has detected an unrecoverable fault.
Device is in self-test.
As stated previously, all module level faults
are considered as unrecoverable faults.
(e.g. DeviceNet power supply not
connected).
• The device has not completed the
Duplicate MAC_ID test yet.
• The device may not be powered,
look at Module Status LED.
Device is online but has no connections
green
red
in the established state.
• The device has passed the
Dup_MAC_ID test, is online, but
has no established connections to
other nodes.
• The device is not allocated to a
master.
tions in the established state.
• The device is allocated to a Master.
One or more I/O Connections are in the
timed out state.
device has detected an error that has
rendered it incapable of communicating
on the network (Duplicate MAC ID, or
Bus–off).
6tira46e1 (2004-11) BPG402-SDv1.cp
1.5.3 Filament Status LED
The status of the dual filament hot cathode is indicated by a LED on top of the
gauge.
Filament statusEmissionStatus LED
–offdark
Both filaments okongreen
One filament brokenongreen, flashing
Both filaments brokenonred
1.5.4 Node Address Switch
1.5.5 Data Rate Switch
1.5.6 Setpoint
During device initialization, the node address switches are read by the device firmware. If the switches specify a valid DeviceNet MAC ID, i.e. a value from 0 … 63,
this value is used as the device MAC ID. If the specified MAC ID differs from the
value stored in the device’s non-volatile RAM (NVRAM), the new MAC ID will be
saved in NVRAM. If the switches specify an invalid DeviceNet MAC ID, i.e. a value
greater than 63, the current value stored in the device’s NVRAM is used as the
device MAC ID.
A single, rotary switch is provided for configuring the data rate of the device. The
switch has three valid positions for the DeviceNet data rates, 125, 250, and
500 kbaud, where the position 1 is equal to 125 kbaud, 2 equal 250 kbaud and 5
equal 500 kbaud. All remaining switch positions specify software selection of the
data rate.
The device has two setpoint relays (Setpoint A and Setpoint B). The setpoints of
these relays are adjustable only by two potentiometers (marked SETPOINT A and
SETPOINT B).
The relay contacts are available at the 15-pin D-Sub connector.
tira46e1 (2004-11) BPG402-SDv1.cp7
2Object Structure
2.1 Connection Object
Class Code 05h = 05
The connection class allocates and manages the internal resources associated
with both I/O and explicit messaging connections. The specific instance generated
by the connection class is referred to as a connection instance or a connection
object.
The following instances of the connection object are supported:
• Instance 1: Explicit Messaging
• Instance 2: I/O-Polling
Please refer to the DeviceNet specification for further information.
2.1.1 Vendor-Specific Object
Extension on Instance 2
Poll Connection
For the selection of the active input assembly the following vendor specific attribute
can be used.
Vendor specific extension:
AttributeIDRequirement in
Implementation
100OptionalGet/Set NV Poll Produce
Access
Rule
NV/V Name DeviceNet
Assembly
Instance
d
Description of AttributeSemantics
Data Type
USINTContains the Instance num-
ber of the assembly used by
this connection to send data
1, 2, 4, 5, 8, 9, 10, 12, 13
This vendor-specific attribute facilitates the configuration of the data assembly, sent
by the BPG402-SD to the DeviceNet Master as Poll response. It offers the possibility to select a (predefined) data assembly via a configuration tool and the EDS file
→ [1]. Attribute 100 allows the user to configure the Poll I/O Data Assembly via
EDS even when the Poll Connection of the BPG402-SD is in the established state.
The Assembly Number is stored non volatile. Modifications of the Poll Produce
Assembly Instance will take effect only after a reset of the BPG402-SD.
Thus, definition of the BPG402-SD data assembly can be done in two ways:
1. Standard methode (without using attribute 100):
The DeviceNet Master configures the "Produced Connection Path” Attribute of
the Poll connection (Connection Instance 2) when establishing communication
to the BPG402-SD . This requires a Master to support expanded explicit messaging capabilities.
2. Directly setting Attribute 100 e.g. by a configuration tool
(e.g. RS Networks) + Device Reset.
8tira46e1 (2004-11) BPG402-SDv1.cp
2.2 Identity Object
Class Code 01h = 01
d
2.2.1 Class Attributes
Attribute IDAccess RuleNameDeviceNet
1GetRevisionUINTRevision of this object.
2GetMax InstanceUINTMaximum instance number of
This object provides identification of and general information about the device.
Description of AttributeSemantics of Values
Data Type
The current value assigned to this
Note: All class definitions are
required to include this class
attribute.
an object currently created in
this class level of the device.
attribute is one (01). If updates that
require an increase in this value are
made, then the value of this attribute
increases by one.
The largest Instance number of a
created object at this class hierarchy
level.
2.2.2 Instance Attributes
Attribute IDAccess RuleNV/VNameDeviceNet Data Type Description of Attribute
In case of a Self-Test Exception restart the device with a reset out of the box
(Identity Object Class 1, Instance 1, Service 5, Service target value: 1).
A single byte attribute whose value indicates the status of the alarms and warnings
for the device. The device supports the Expanded Mode.
For the Expanded Mode, bit seven of Exception Status attribute is set to one;
exceptions are reported through the communication of this Exception Status attribute, formatted as specified in the table below. In addition, the Exception Detail
attributes are supported. The Exception Status bits are determined by a logical
”OR” of the related Exception Detail bits, as indicated.
tira46e1 (2004-11) BPG402-SDv1.cp11
Exception Status Bit Map
BitFunction
0ALARM/device-common
(The alarm or warning is not specific to the device type or device type
manufacturer.)
1ALARM/device-specific
2ALARM/manufacturer-specific
3reserved, set to 0
4WARNING/device-common
5WARNING/device-specific
6WARNING/manufacturer-specific
7
1 Expanded Method
Exception Detail Alarm and
Exception Detail Warning
Common Exception Detail
The formats of these two attributes are identical. Therefore, they are described
together:
Attributes that relate the detailed status of the alarms or warnings associated with
the device. Each attribute is a structure containing three members; these three
members, respectively relate the detailed status of exceptions that are common
(i.e., not device-specific), device-specific and manufacturer-specific. The common
and device-specific detail definitions are defined below. A manufacturer-specific
detail has a length of 1 byte. A SIZE value of one indicates that one byte detail is
defined for the associated exception detail structure.
Each of the three structure members is defined as a structure containing an ordered list (i.e., array) of bytes of length SIZE, and an unsigned integer whose value
is SIZE. Each of the bytes in each array has a specific mapping. This mapping is
formatted as 8 bits representing 8 independent conditions, whereas a value of 1
indicates that the condition is set (or present), and a value of 0 indicates that the
condition is cleared (or not present). Note that if a device does not support an
exception detail, the corresponding bit is never set. The bitmaps for alarms and
warnings in the corresponding attributes are structured in parallel so that a condition may have either alarm or warning set depending on severity. If a condition
inherently cannot be both alarm and warning, then the parallel bit position corresponding to the other state will remain "0".
This structure relates exception conditions (i.e., alarms or warnings) which are
common to all devices within the Hierarchy of Semiconductor Equipment Devices.
The Detail element of the structure is an ordered list (i.e., array) of bytes of length
[SIZE=2] which is the value of the structure element Size.
Two bytes Common Exception Detail are provided: Common Exception Detail[0]
and Common Exception Detail[1]. The specific exception associated with each of
the bitmaps is given in the table below. The SIZE for this revision is two (2).
Data ComponentBit 7Bit 6Bit 5Bit 4Bit 3Bit 2Bit 1Bit 0
Common Exception Detail
Size
Common Exception Detail 0
Common Exception Detail 1
00000010
0
0000
0
0
Data
Memory
Nonvolatile
Memory
PS Input
Voltage
Code
Memory
000
00
Device Exception Detail
Manufacturer Exception
Detail
This structure, similar in form to Common Exception Detail, relates exception conditions which are specific to individual devices on the network and are defined in
the following. The Detail element of the structure is an ordered list (i.e. array) of
bytes of length [SIZE = 4 for Alarms and SIZE = 5 for Warning] which is the value
of the structure element size.
This structure, similar in form to Common Exception Detail, relates exception conditions which are specific to the manufacturers of individual devices on the network.
There is one byte manufacturer exception details defined. The Detail element of the
structure is an ordered list (i.e., array) of bytes of length [SIZE = 1] which is the
value of the structure element Size.
tira46e1 (2004-11) BPG402-SDv1.cp13
Device Exception Detail
Alarms and Manufacturer
Exception Detail Alarms
Format
These Boolean attributes are used to enable (1) or disable (0) the S-Device Supervisor object’s process of setting Exception bits. When disabled, corresponding bits
are never set; and, if they were set, disabling clears them. Also, alarm and warning
states are not retained; when enabled, bits will be set only if the corresponding
condition is true.
The default state for these Enable attributes is enabled (1).
14tira46e1 (2004-11) BPG402-SDv1.cp
2.3.3 S-Device Supervisor
Object States
Power Applied, or
Reset Request from any state except CRITICAL FAULT, or
Perform Diagnostics Request from any state except CRITICAL FAULT or ABORT
Self-Test Failed
SELF-TEST
EXCEPTION
Self-Test
Passed
SELF-TESTING
Recover Request or
Exception Condition
Cleared
Abort Request
Abort Request
2.3.4 S-Device Supervisor
Common Services
ABORT
CRITICAL FAULT
Critical Fault
from any state
Stop
Request
IDLE
EXECUTING
Recover Request
Start
Request
Abort Request
Abort - Used to transition the device application objects to the aborted state. This
service request may be (and generally will) originated internally, from application
objects.
Recover - Used to transition the device application objects, out of the abort state,
to the idle state. This service request may be originated internally, from application
objects.
Perform_Diagnostics - Used to instruct the S-Device Supervisor object to perform
a diagnostic test.
Service
Service NameDescription of Service
Code
0E
h
Get_Attributes_SingleReturns the contents of the specified attri-
bute.
10
05
06
07
h
h
h
h
Set_Attributes_SingleModifies an attribute value.
Reset
Resets the device to the Self-Testing state.
StartStarts the device execution.
Stop
Moves the device to the Idle state.
The device transitions from the IDLE state to the EXECUTING state by a
START Request (Service Code 06
) or by the receipt of the first valid I/O
h
data!
You will not get any valid measurement values from the device until this
service has been requested or the I/O-poll message has been received.
tira46e1 (2004-11) BPG402-SDv1.cp15
2.3.5 S-Device Supervisor
Object Specific Services
Service
Code
4B
h
4C
h
4D
h
Service NameDescription of Service
Abort
Recover
Moves the device to the Abort state
Moves the device out of the Abort state
Perform_DiagnosticsCauses the device to perform a set of diag-
nostic routines
Explanation to Service code
4D
h
• DS Object Service Parameter dictionary
Parameter Form Description
TestID USINT Type and possibly detail of diagnostic test to be
performed
• TestID parameter
The following values are defined for the TestID parameter for the
Perform_Diagnostics Service Request:
Attribute Value State
0 Standard
Type "Standard" is specified if there is only one type of diagnostic defined or if
there are more than one including a type standard.
2.4 S-Analog Sensor Object
Class Code 31h = 49
d
2.4.1 Class Attributes
Attribute ID Access
Rule
Name DeviceNet
Data Type
Description of Attribute Semantics of Values
1 Get Revision UINT Revision of this object Note: All class definitions
are required to include this class attribute.
2 Get Max
1)
32
Get Class
Instance
Level
Status
UINT Maximum instance number of an object currently
created in this class level of the device.
USINT Indicates whether all instances measure above or
below its maximum or minimum measurement
range
Extension
94 Get Active
Value
95 Get Active
Instance
Number
Specified
by Data
Type
UINT Identifies the object instance that is providing the
Is used by assemblies to produce this class-level
attribute, instead of the Value (Attribute ID 6) of the
S-Analog Sensor Instances.
Value which is copied into the Active Value for all
input Assemblies and the Alarm/Warning Exception
Details for the S-Device Supervisor object.
→ Behavior section.
96 Get Number of
Gauges
USINT Identifies the number of gauge instances present in
the device.
99 Get Subclass UINT Identifies a subset of additional class attributes,
services and behaviors.
The current value
assigned to this attribute is one (01).
The largest Instance
number of a created
object at this class
hierarchy level.
Bit 0: Reading Invalid
Bit 1: Overrange
Exceeded
Bit 2: Underrange
Default = 1
2
1 Instance Selector
1)
This attribute is not part of the actual S-Analog Sensor Specificiation, but is at
this time in preparation to be implemented as shown. Changes may be possible
until the new specification is published.
16tira46e1 (2004-11) BPG402-SDv1.cp
Active Value
Active Instance Number
Number of Gauges
Assemblies or connections may produce this class-level attribute, instead of the
Value (Attribute ID 6) of the active S-Analog Sensor instance. The S-Analog Sensor class-level attribute Active Instance Number identifies the object instance that is
currently active and providing the Value to the Active Value class-level attribute
which is, in turn, produced by the input assemblies that have Active Value as a
member.
The device internally modifies this attribute, as required, to identify the S-Analog
Sensor object instance providing the Value member which is copied into the Active
Value for all Input Assemblies and the Alarm/Warning Exception Details for the
S-Device Supervisor object.
The Active Instance Number will be modified based upon the Active Value in order
that the best gauge, corresponding to a given S-Analog Sensor instance, will be
active for the given measurement range.
This attribute is used to determine the size of all Input Assemblies within a node.
2.4.2 Instance Attributes
Four S-Analog Sensor Instances (Instance 1, Instance 2, Instance 21 and Instance 22) are available. Instance 1 represents the physical sensor reading of the
heat transfer vacuum gauge (pressure), Instance 2 represents the physical sensor
reading of the hot cathode ion gauge (pressure).
Instance 21 and Instance 22 represent the value of the Setpoint A and Setpoint B.
2.4.2.1 Instance Attributes of
Instance 1
Pirani Instance
Following is the Instance 1 with the subclass extension of the heat transfer
vacuum gauge (pirani gauge) part of the BPG402-SD. This instance is used to
provide control and status information for the Pirani gauge part of the BPG402-SD.
AttributeID Access Rule NV/V Name DeviceNet Data
Type
3 Set /Cond.
NV Data Type USINT Determines the
→ below
Description of
Attribute
Data Type of Value
and all related
attributes as specified in this table.
4 Set
→ below
NV Data Units UINT Determines the
Units context of
Value and all related attributes.
5 Get V Reading Valid BOOL Indicates that the
Value attribute
contains a valid
value.
6 Get V Value INT or specified
Analog input value The corrected, converted, cali-
by Data Type
7 Get V Status BYTE Alarm and Warning
State of this object
instance
10 Get NV Full Scale INT or specified
by Data Type
The Value of Full
Scale for the sensor.
25 Set NV Safe State USINT Specifies the be-
havior for the Value
for states other
than Execute
0 = invalid
1 = valid
(invalid: e.g., not warmed up
yet)
brated final value of the sensor.
→ "Semantics" section below.
Always zero, because Alarm
and Warning Trip Points are not
implemented
The value of attribute Value
corresponding to the Full Scale
calibrated measurement of the
sensor.
[default] = maximum allowable
value for the Data Type
→ "Semantics" section below.
[default] = 0
tira46e1 (2004-11) BPG402-SDv1.cp17
AttributeID Access Rule NV/V Name DeviceNet Data
Type
26 Set NV Safe Value INT or specified
by Data Type
Description of
Attribute
The Value to be
used for Safe State
= Safe Value
32 Get NV Overrange INT or specified
by Data Type
33 Get NV Underrange INT or specified
by Data Type
Specifies the
highest valid Value
Specifies the
lowest valid Value
94 Get V Sensor Warning Struct of Byte Bit definitions of
Sensor Warnings
95 Get V Sensor Alarm Struct of Byte Bit definitions of
Sensor Alarms
96 Get V Status Extension BYTE Bit-mapped byte
providing additional
status bits
99 Get NV Subclass UINT Defines a subset of
additional attributes, services and
behaviors.
Semantics of Values
→ "Semantics" section below.
[default] = 0
The value above which attribute
Reading Valid is set to invalid.
[default] = maximum allowable
value for the Data Type
The value below which attribute
Reading Valid is set to invalid.
[default] = minimum allowable
value for the Data Type
All Data Type attributes use the enumerated values integer or float.
→ Appendix A
The Data Type value will be set automatically based upon the first valid I/O connection established by the device.
If no established I/O connections exist, which include an attribute from this object,
then the Data Type attribute is settable provided that the object is in the Idle State.
Note: Using data type integer in combination with a pressure unit (mbar, Torr or Pa)
will obviously not produce reasonable values below 1.
The Data Unit is only settable in the IDLE state.
An S-Analog Sensor object instance derives a reading from a physical analog sensor. The reading is converted to the data type and units specified for the Value
attribute.
Using Counts and INT the following conversion has to be used:
Counts = [ log10 (pressure) + k ] × 2000
where: k
k
k
mbar
Torr
Pa
= 12.5
= 12.624903
= 10.5
18tira46e1 (2004-11) BPG402-SDv1.cp
Safe State
This attribute specifies what value will be held in Value for states other than Exe-
cuting. The purpose of this mechanism is to allow other devices, who may be using
this Value to transition to (or remain in) a safe state in the event of this device
transitioning to a FAULT, IDLE, or ABORT state. The following values are defined:
Attribute Value State
0 Zero
1 Full Scale
2 Hold Last Value
3 Use Safe Value
Safe Value
For Safe State set to Use Safe Value, this attribute holds the value to which the
Value attribute will be set for object instance states other than Executing.
Sensor Alarm
16 Bits are used as Sensor Faults. Bits 8 … 16 are mapped to the Exception Detail
Alarm 1, Bits 0 … 7 are mapped to the Device Exception Detail Alarm 0.
Data Component Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0
Sensor Alarm Byte 0
Sensor Alarm Byte 1
0 0 0 0 0 0 0 0
0 0 0 0 0 0
Electronics
Failure
0
Sensor Warning
16 Bits are used as Sensor Warnings. Bits 8 … 16 are mapped to the Exception
Detail Warning 2, Bits 0 … 7 are mapped to the Device Exception Detail Warning 1.
Data Component Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0
Sensor Alarm Byte 0
Sensor Alarm Byte 1
0 0 0 0 0 0 0 0
0 0 0 0 0 0
Electronics
Warning
0
tira46e1 (2004-11) BPG402-SDv1.cp19
2.4.2.3 Instance Attributes of
Instance 2 Hot Cathode
Ion Gauge
AttributeID Access
Rule
3 Set/Cond.
→ below
4
5 Get V Reading
6 Get V Value INT or speci-
7 Get V Status BYTE Alarm and Warning State
10 Get NV Full Scale INT or speci-
25 Set NV Safe State USINT Specifies the behavior for
26 Set NV Safe
32 Get NV Overrange INT or speci-
33 Get NV Under-
88 Get V Degas
89 Set V Active
91 Get V Emission
92 Set NV Filament
93 Get V Emission
94 Get V Sensor
95 Get V Sensor
→
"Semantics"
NV/V Name DeviceNet
NV Data Type USINT Determines the Data Type
NV Data Units ENGUNITS Determines the Units con-
Valid
Value
range
Status
Filament
Current
Control
Status
Warning
Alarm
Following is the Instance 2 with the subclass extension of the hot cathode ion
gauge part of the BPG402-SD. This instance is used to provide control and status
information for the hot cathode ion gauge part of the BPG402-SD.
Description of Attribute Semantics of Values
Data Type
of Value and all related
attributes as specified in
this table.
text of Value and all related
attributes.
BOOL Indicates that the Value
attribute contains a valid
value.
Analog input value The corrected, converted, calibrated
fied by DataType if supported
of this object instance
The Value of Full Scale for
fied by DataType if supported
INT or specified by DataType if supported
fied by DataType if supported
INT or specified by DataType if supported
BOOL Indicates current degas
BYTE Indicates selected filament
REAL Indicates setting level of
USINT Defines the mode in which
BOOL Indicates whether the
Structure of
Byte
Structure of
Byte
the sensor.
the Value for states other
than Execute
The Value to be used for
Safe State = Safe Value
Specifies the highest valid
Value
Specifies the lowest valid
Value
state
emission current in amps
the filament is used.
emission is turned ON or
OFF
→ "Semantics" section
[default] = INT
→ "Semantics" section
[default] = Counts
0 = invalid
1 = valid
(invalid: e.g., not warmed up yet)
final value of the sensor.
→ "Semantics" section
→ "Semantics" section
The value of attribute Value corresponding to the Full Scale calibrated
measurement of the sensor.
[default] = maximum allowable value
for the Data Type
→ "Semantics" section
[default] = 0
→ "Semantics" section
[default] = 0
The value above which attribute
Reading Valid is set to invalid.
[default] = maximum allowable value
for the Data Type
The value below which attribute
Reading Valid is set to invalid.
[default] = minimum allowable value
for the Data Type
0 OFF
1 ON
Bit 0 =1 filament 1 selected
Bit 1 =1 filament 2 selected
0 Auto Î The device switches the
filament from Fil1 to Fil2 and
from Fil 2 to Fil1 every time the
emission is switched on.
1 Manual Î The device uses the
filament which is selected by
the attribute ActiveFilament
0 OFF
1 ON
default 0 → "Semantics"
default 0 → "Semantics"
20tira46e1 (2004-11) BPG402-SDv1.cp
AttributeID Access
Rule
96 Get V Status
NV/V Name DeviceNet
Data Type
BYTE Bit mapped byte providing
Extension
Description of Attribute Semantics of Values
additional status bits
99 Get NV Subclass UINT Identifies the subset of
additional attributes, services and behaviors for hot
cathode ion gauges
100 Get V State
Emission
User
USINT Represents the state ac-
cording to the service Set
Emission User Mode
Mode
Bit description:
0 Reading Invalid
(Logical Inversion of
Reading Valid)
1 Overrange Exceeded
2 Underrange Exceeded
5 Hot Cathode Ion Gauge
0 Auto
1 Manual
2.4.2.4 Semantics of S-Analog
Sensor Instance 2
Data Type
Value
→ Instance 1
An S-Analog Sensor object instance derives a reading from a physical analog sensor. The reading is converted to the data type and units specified for the Value
attribute.
Using Counts and INT the following conversion has to be used:
Counts = [ log10 (pressure) + k ] × 2000
where: k
k
k
mbar
Pa
Torr
= 12.5
= 10.5
= 12.624903
Safe State
Safe Value
Sensor Alarm
→ Instance 1
→ Instance 1
16 Bits are used as sensor faults . Bit 8 … Bit 16 are mapped to the Exception
Detail Alarm 3, Bit 0 … Bit 7 are mapped to the Exception Detail Alarm 2.
Data Component Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0
Sensor Alarm Byte 0
Sensor Alarm Byte 1
0 0 0 0 0 0 Sensor
0 0 0 0 0 0
Filament 2
Failure
Electronics
Failure
Sensor
Filament 1
Failure
0
tira46e1 (2004-11) BPG402-SDv1.cp21
Sensor Warning
16 Bits are used as sensor warnings. Bit 8 … Bit 16 are mapped to the Exception
Detail Warning 5, Bit 0 … Bit 7 are mapped to the Exception Detail Warning 4.
Data Component Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0
Sensor Warning Byte 0
Sensor Warning Byte 1
0 0 0 0 0 0 Filament 2
-6
mbar.
Pressure
too high for
degas
0 0 0
0 0 0 0
The bit "Pressure too high for degas" will be set if the pressure is above
-6
7.2×10
mbar when a degas service is requested. The bit will be reset when the
pressure is below 7.2×10
Warning
Filament 2
Warning
Filament status warnings
and alarms
The following table shows the relation between filament status and the corresponding Warning and Alarms.
FilamentstatusSensor
Both filaments O.K.0000
Filament 1 broken
and
Filament 2 O.K.
Filament 1 O.K.
and
Filament 2 broken
Filament 1 broken
and
Filament 2 broken
2.4.2.5 Instance Attributes of
Instance 21 / Setpoint A
(Instance 22 / Setpoint B)
AttributeID Access
Rule
3 Set / Con-
ditional:
→
Instance 1
4 Get NV Data
NV/V Name DeviceNet
NV Data
Type
Units
Description of Attribute Semantics of Values
Data Type
USINT Determines the Data Type
of Value and all related
attributes as specified in
this table.
UINT Determines the Units con-
text of Value and all related attributes.
5 Get V Reading
Valid
BOOL Indicates that the Value
attribute contains a valid
value.
6 Get V Value INT or speci-
fied by Data
Type
The value of the
Setpoint A (Setpoint B)
relay.
7 Get V Status BYTE Alarm and Warning State
of this object instance
Filament 1
Warning
Sensor
Filament 2
Warning
Sensor
Filament 1
Alarm
Sensor
Filament 2
Alarm
1000
0100
1111
→ "Semantics" section below.
int C3 hex [default]
float CA hex
→ "Semantics" section below.
Behavior as Trip Point LOW
22tira46e1 (2004-11) BPG402-SDv1.cp
Status
Set Points
A bit mapped byte which indicates the Alarm and Warning Exception status of the
object instance. The following definition applies:
Bit Definition
0 High Alarm Exception:0 = cleared1 = set
1 Low Alarm Exception:0 = cleared1 = set
2 High Warning Exception: 0 = cleared1 = set
3 Low Warning Exception: 0 = cleared1 = set
4 Reserved
5 Reserved
6 Reserved
7 Reserved
If the pressure (attribute 6, instance 1 and 2) decreases below the Set Point value
(attribute 6, instance 21 and 22) an alarm or warning exception condition will be
generated. The hysteresis is set to 10%.
For example: A SET Point value of 100 will result in an exception condition being
set when the Value is below 100 and cleared when the Value increases above 110.
The setpoints can only be read by DeviceNet. It is not possible to set the
values or to influence the state of the relays by DeviceNet. Even if the
device is not allocated, the relay status is set corresponding to the
voltage adjusted by the two setpoint potentiometers.
Only in case of a microcontroller RESET (for example reset on Identity
Object), the relays will be reset too.
The setpoint is available in the actual pressure unit and data type. If the pressure
unit "Counts" is set, use the following formula for the conversion from Counts to
pressure:
p
mbar
where: k
k
k
= 10
mbar
Pa
Torr
Counts / 2000 - k
= 12.5
= 10.5
= 12.624903
The relation between setpoint and voltage is:
p
mbar
where: c
c
c
= 10
mbar
Pa
Torr
(U - 7.75) / 0.75 + c
= 0
= 2
= -0.125
The setpoints are only activated, if the pressure is below 100 mbar,
therefore a setpoint above 100 mbar can not be realised.
tira46e1 (2004-11) BPG402-SDv1.cp23
2.4.3 Common Services
The S-Analog Sensor Object provides the following Common Services:
Service
Service Name Description of Service
Code
Get_Attribute_Single Returns the contents of the specified attribute.
0E
h
Set_Attribute_Single Modifies an attribute value.
10
h
2.4.4 Object-Specific Services
on Instance 1 / Pirani
Full Scale adjust algorithm
Full Scale Adjust Request
Service Data Field Parameters
Service
Service Name Description of Service
Code
Full Scale Adjust Performs a Full Scale Adjust for the Pirani
4C
h
There are no state transitions associated with the invocation of this service. It is,
therefore, incumbent upon the user to establish the device into the desired configuration prior to, and during the execution of this service. This will generally involve exposing the sensor to a known environment and treating the values read
during execution of the services accordingly.
A success service response indicates that the service was accepted and the application process started.
To perform the Full Scale Adjust Request vent the gauge to atmosphere and then
start the Full Scale Adjust Service with a target value as defined below .
Parameter
Data
Data
The target value for the full scale calibration
Type
Counts mbar *) Pascal *) Torr *)
Unit
Target
INT 0x7918 0x03E8 0x7FFF 0x02ED
Value
REAL 0x46F23000 0x447A0000 0x47C35000 0x443B83F3
*) INFICON recommends to use mbar, Torr or Pascal only with the data
type REAL.
Special limitations apply for INT:
The full scale value of the gauge is 1000 mbar 10000 Pascal. But the
max. pressure of the gauge can not be described using INT and Pascal.
The target value 0x7FFF (the maximum INT value) allows to perform a
Full Scale Adjust Service for the unit Pascal.
For the data type INT and pressure values below 1 (in the actual pressure unit) you always get a pressure of zero.
24tira46e1 (2004-11) BPG402-SDv1.cp
2.4.5 Object-Specific Services
on Instance 2 / Hot
Cathode Ion Gauge
2.4.5.1 Set Degas State
Set Degas State Request
Service Data Field
parameters
Service
Service Name Description of Service
Code
61
Set Degas State Activates/deactivates degas mode according to
h
the parameter Degas State. Degas mode may
be terminated either automatically by device
timeout (3 min) or remotely by this service.
Parameter Data Type Semantics of Values
Degas
State
BOOL 0 switches Degas OFF
1 switches Degas ON
Degas is switched on only if the pressure is below 7.2E-6 mbar.
2.4.5.2 Set Emission State
Set Emission State Request
Service Data Field
parameters
Service
Service Name Description of Service
Code
62
hex
Set Emission
State
Turns the filament on and off according to the
parameter Emission State
Parameter Data Type Description Semantics of Values
Emission
State
BOOL
→ below
0 turns emission OFF
1 turns emission ON
If the gauge is in the Emission User Mode “Manual”, please keep attention at the
following points:
The service SET EMISSION STATE Î ON may be executed only, if the pressure
is below 2.4E-2 mbar. If the pressure is higher, an Object State Conflict error message will be returned.
If the pressure rises above 3.2E-2 mbar, the gauge will switch off the emission
automatically. The gauge will then show the pirani value.
If the gauge is measuring in the ion gauge measuring range and the service Set
Emission State Î OFF ist executed, the emission will be switched off and the minimum Pirani value 1E-3 will be displayed.
tira46e1 (2004-11) BPG402-SDv1.cp25
2.4.5.3 Emission User Mode
Service
Code
32
hex
Service Name Description of Service
Set Emission
User Mode
Automatic
The Emission is switched on and off by the
Pirani automatically.
Manual
The emission has to be switched on and off
by the user (within defined pressure limits)
Set Degas State Service
Data Field
2.4.6 Behavior
Data Type
ParameterData TypeDescriptionSemantics of Values
Emission
User Mode
State
1)
Emission User Mode Automatic:
BOOLSee below0 sets mode to Automatic
(default)
1 sets mode to Manual
2)
The emission is automatically switched ON and OFF.
The user can switch the emission OFF by using the Set Emission State service.
If the emission is switched off manually, the emission will be automatically switched on again, after the pressure rose above 3.2E-2mbar and falls below 2.4E2mbar again.
2)
Emission User Mode Manual:
The emission has to be switched ON and OFF by the user, using the Set
Emission State service. The Set Emission State service may only be executed,
if the pressure is below 2.4E-2 mbar. If the pressure is higher, an Object State
Conflict error will be returned.
If the emission is on and the pressure rises above 3.2E-2mbar, the gauge will
switch off the emission automatically in both modes.
The following behavior with respect to Data Type applies:
The Data Type value will be set automatically based upon the first valid I/O con-
nection established by the device.
If no established I/O connections exist, which include an attribute from this object,
then the Data Type attribute is settable provided that the object is in the Idle State.
The following example demonstrates this behavior:
A device specifies an instance of the S-Analog Sensor object as well as two static
Assembly object instances, both with data attribute components mapped to this
object instance. Assembly object instance ID 1 specifies INT data types and Assembly object instance ID 2 specifies REAL data types.
After the device is online, it is configured with an I/O connection to Assembly instance ID 2. When the connection transitions to the Established State, this object
instance attribute Data Type is automatically set with the value for REAL before
any data is communicated to, or from the object instance. Any subsequent attempt
to connect to Assembly instance ID 1 would then be rejected and result in an
INVALID ATTRIBUTE VALUE error with the additional error code indicating the ID
of the offending attribute, which in this case would be the connection path.
1)
26tira46e1 (2004-11) BPG402-SDv1.cp
3I/O Assembly Object
3.1 I/O Assembly Instances
Class Code 04
A collection of assembly objects allows the sending of attributes from different
application objects in one message (i.e. Polling I/O).
The following table identifies the I/O assembly instances supported by the gauge
device.
NumberTypeName
1InputPressure Value (Active Instance)
2InputException Status and INT Pressure Value (Active In-
4InputREAL Pressure Value (Active Instance)
5InputException Status and REAL Pressure Value (Active
8InputException Status
9InputActive Instance, Active Pressure Value
10InputException Status and Active Instance and INT Active
12InputActive Instance
13InputException Status
h
stance)
Instance)
Pressure Value
REAL Active Pressure Value
Active Instance
REAL Active Pressure Value
tira46e1 (2004-11) BPG402-SDv1.cp27
3.2 I/O Assembly Object
Instance Data Attribute
Format
In order to maintain consistency, this device type will only allow connections to
either INT or REAL based Assembly instances (→ Data Type definition 18).
Once a valid connection is established, attempts to configure connections to a
different type of Assembly instance will return an error.
The I/O Assembly DATA attribute has the format shown below:
InstanceTypeByte Bit 0 … 7
1Input0
INT Pressure Value (low byte)
1
2Input0
4Input0
Exception Status; Class 48, Instance 1, Attribute 12
INT Pressure Value (low byte)
1
Class 49, Active Value
2
REAL Pressure Value (low byte)
1
Class 49, Active Instance Value
2
3
5Input0
Exception Status Class 48, Instance 1, Attribute 12
REAL Pressure Value (low byte)
1
Class 49, Active Instance Value
2
3
4
8Input0
90
Exception Status ; Class 48, Instance 1, Attribute 12
Active Instance
1
INT Active Pressure Value
2
3
10Input0
Exception Status
Active Instance
1
2
INT Active Pressure Value
3
4
12Input0
Active Instance
1
REAL Pressure Value
2
3
4
5
13Input0
Exception Status
Active Instance
1
2
REAL Pressure Value
3
4
5
6
28tira46e1 (2004-11) BPG402-SDv1.cp
Appendix
A:Range of Values
B:Specific Codes
C:Conversion of a Floating
Number According to
IEEE 754
General
Number received
1. Reverse the sequence of
the HEX words
Integerint
Unsigned integeruint
–32767 … 32768
0 … 65535
Floatfloataccording IEEE 754
Manufacturer product code 12 = BPG402-SD
AA BB CC DDh (4-Byte, floating format)
DD
h
CC
h
Legend: XX
Hexadecimal number (Radix =
h
16)
Decimal number (Radix = 10)
XX
d
Binary number (Radix = 2)
XX
b
BB
h
AA
h
2. Separate into bytes
3. Calculate
Converted number
SEEE EEEEbEMMM MMMMbMMMM MMMMbMMMM MMMM
Sign8-Bit exponent23-Bit mantissa
SEEEE EEEEbMMM MMMM MMMM MMMM MMMM MMMM
ØØØ
⎛
MMMMMMMMMMM MMMMMMMMMMMM
1+
⎜
⎜
⎝
= 1+
23
2
⎛
NNNNN
⎜
8388608
⎝
⎞
d
⎟
⎠
d
b
Ø
Sign =Exponent =Mantissa =
S
-1
XYZ
d
Sign × 2
(Exponent-127)
RSTUV
× Mantissa
d
b
b
⎞
⎟
⎟
⎠
tira46e1 (2004-11) BPG402-SDv1.cp29
Example
Number received
1. Convert sequence of the
HEX words
2. Separate into bytes
3. Calculate
00 00 CA 42h (4-Byte, floating format)
42
h
0100 0010
Sign8-Bit exponent23-Bit mantissa
b
01000 0101
CA
h
1 1 0 0 1010
b
00
h
0000 0000
b
b
100 1010 0000 0000 0000 0000
ØØØ
0
-1
1+
⎛
⎜
⎜
⎜
⎝
= 1+
23
2
⎛
4849664
⎜
8388608
⎝
00
h
0000 0000
⎞
0000 0000 0000 0000 1010 100
⎟
b
⎟
⎟
⎠
⎞
d
⎟
⎠
d
b
b
Converted number
D:Typical Start-Up
Procedure
Allocation process
ØØ
Sign =Exponent =Mantissa =
11331.578125
(133-127)
1 × 2
The start up of a device is divided into the steps:
• Allocation process
• Setting of the EPR attribute
• Choice of the input and output assemblies
Send an allocation string as defined in the DeviceNet specification to the device
you want to allocate.
Set the bits in the allocation choice byte to 1 for these connections you want to use.
× 1.578125 = 101
30tira46e1 (2004-11) BPG402-SDv1.cp
Example of the principal
allocation process
Master MAC ID....0
Allocation choice:Explicit, Poll, bit strobe, COS
Slave address:2
Allocated instances may not be valid for the BPG402-SD
⇒ Allocation String:41600 4B 03 01 57 00
Within the first allocation message the explicit connection has to be
established.
The I/O connections bit strobe and COS/Cyclic are not supported by the
BPG402-SD. Appendix D describes only the general allocation procedure for all devices (group 2 slave only).
Setting of the EPR Attribute
(expected packet rate)
After the allocation, the device activates an INACTIVITY WATCHDOG TIMER.
This timer has to be set for every single connection (connection object, attribute 9)
which is allocated in the allocation choice byte. This attribute defaults to 2500
(2500 ms) within explicit messaging connections, and to zero within an I/O connection. If the INACTIVITY WATCHDOG TIMER expires, the established connection will be released. With every message the device receives, this timer is reloaded with the value specified in the corresponding connection object, therefore it
normally doesn't expire. The value zero deactivates the INACTIVITY WATCHDOG
TIMER.
In this step the INACTIVITY WATCHDOG TIMER has to be set. In testing mode
you could use the value 0 to deactivate the INACTIVITY WATCHDOG TIMER.
In the following you see the strings for setting the EPR attribute (addresses as
specified above):
IDMessage Body
41400 10 05 01 09 00 00set EPR of the explicit connection to zero
41400 10 05 02 09 00 00set EPR of the poll connection to zero
41400 10 05 03 09 00 00set EPR of the bit strobe connection to zero
41400 10 05 04 09 00 00set EPR of the COS/Cyclic connection to zero
The responses of the slave are:
IDMessage Body
41300 90 00 00set EPR of the explicit connection to zero
Choice of the input and output
assemblies
Reading the configured
Assemblies
tira46e1 (2004-11) BPG402-SDv1.cp31
You can specify which of the several input/output assemblies predefined in a device should be used for
Reading or setting of the input/output assemblies is possible only if the
corresponding connection (polling, change of state, bit strobe) has been
allocated in the Allocation Message.
If you want to read the number of the chosen assembly, you must read the attributes 14 and 16 in the corresponding Instance of the Connection Object (Object
ID 5).
For reading this value, the connection has to be established. The EPR attribute
may be set.
Instance 2: Polling
Instance 3: Bit Strobe
Instance 4: Change of State/Cyclic
every single connection.
Setting of assemblies
If you want to set the number of the chosen assembly, you have to set the attributes 14 and 16 in the corresponding instance of the connection object.
To set this value, the connection has to be allocated, but the EPR attribute has not to be set to any value.
Examples
Read a configured assembly (addresses as specified above)
Get single request:
IDMessage Body
41400 0E 05 02 0Eget produced connection path (Request for
input assembly by master).
Get single response:
IDMessage Body
41300 8E 20 04 24 05 30 03Response from slave
The addressing format of the attribute values differs from the normal mode. A connection path attribute that specifies class 4, Instance 5, and attribute ID 3 is illustrated below:
Class #4Instance #5Attribute #3
200424053003
The instance defines the assembly you want to use. This format has to be used by
the master in the request and is used by the slave in the response.
Set the input assembly 04 for a Poll Connection (addresses as specified
above)
Set single request:
IDMessage Body
41480 00 10 05 02 10 20 04first fragment
41480 81 24 04 30 03second fragment
Because the message body is longer than 8 bytes, the fragmented protocol has to
be used.
Set single response:
IDMessage Body
41380 C0 00response on first fragment
41380 C1 00response on second fragment
32tira46e1 (2004-11) BPG402-SDv1.cp
E:Literature
[1]www.inficon.com
Product descriptions and downloads
INFICON AG, LI–9496 Balzers, Liechtenstein
[2]www.odva.org
Open DeviceNet Vendor Association, Inc.
DeviceNet™ Specifications
[3]European Standard for DeviceNet EN 50325
[4]www.inficon.com