Inficon BPG402-SE, BPG402-SP, BPG402-SL, BPG402-S, BPG402-SD Operating Manual

Operating Manual

Bayard-Alpert Pirani Gauge

Dual Filament Bayard-Alpert Pirani Gauge

BPG402-S
BPG402-SD
BPG402-SE
BPG402-SL
BPG402-SP

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Product Identification

In all communications with INFICON, please specify the information on the product
nameplate. For convenient reference copy that information into the space provided
below.

INFICON AG, LI-9496 Balzers

Model:
PN:
SN:
V W

Validity

Intended Use

This document applies to products with the following part numbers:

BPG402-S (without display, one switching function)

353-570
353-571

(vacuum connection DN 25 ISO-KF)
(vacuum connection DN 40 CF-R)

BPG402-S (with display, one switching function)

353-572
353-573

(vacuum connection DN 25 ISO-KF)
(vacuum connection DN 40 CF-R)

BPG402-SL (without display, one switching function)

353-571

(vacuum connection DN 40 CF-R, long tube)

BPG402-SD (with DeviceNet interface and two switching functions)

353-576
353-577

(vacuum connection DN 25 ISO-KF)
(vacuum connection DN 40 CF-R)

BPG402-SE (with EtherCAT interface and two switching functions)

353-590
353-591

(DN 25 ISO-KF)
(DN 40 CF-R)

BPG402-SP (with Profibus interface and two switching functions)

353-574
353-575

(vacuum connection DN 25 ISO-KF)

(vacuum connection DN 40 CF-R)

The part number (PN) can be taken from the product nameplate.

If not indicated otherwise in the legends, the illustrations in this document
correspond to gauge with part number 353-572. They apply to the other gauges by
analogy.

We reserve the right to make technical changes without prior notice.

All dimensions in mm.

The BPG402-Sx gauges have been designed for vacuum measurement of gases
and gas mixtures in a pressure range of 5×10

-10

… 1000 mbar.

They must not be used for measuring flammable or combustible gases in mixtures
containing oxidants (e.g. atmospheric oxygen) within the explosion range.

The gauges can be operated in connection with the INFICON Vacuum Gauge
Controller VGC40x / VGC50x or with other control devices.

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Functional Principle

Over the whole measuring range, the gauge has a continuous characteristic curve
and its measuring signal is output as logarithm of the pressure.

The gauge functions with a Bayard-Alpert hot cathode ionization measurement
system (for p < 2.0×10
p > 5.5×10

2.0×10

-3

mbar). In the overlapping pressure range of

-2

… 5.5×10-3 mbar, a mixed signal of the two measurement systems is
output. The hot cathode is switched on by the Pirani measurement system only
below the switching threshold of 2.4×10
switched off when the pressure exceeds 3.2×10

-2

mbar) and a Pirani measurement system (for

-2

mbar (to prevent filament burn-out). It is

-2

mbar.

BPG402-Sx sensors are equipped with two hot cathodes. The identical filaments
are monitored by the gauge electronics. In case of a filament failure, the gauge will
switch over to the second (undamaged) filament and continue to operate. The
filament status is displayed on the gauge or can be read via the interfaces
(RS232C, DeviceNet, EtherCAT or Profibus).

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Contents

Product Identification 2
Validity 2
Intended Use 2
Functional Principle 3

1 Safety 6

1.1 Symbols Used 6

1.2 Personnel Qualifications 6

1.3 General Safety Instructions 7

1.4 Liability and Warranty 7

2 Technical Data 8
3 Installation 13

3.1 Vacuum Connection 13

3.1.1 Removing and Installing the Electronics Unit 14

3.1.2 Using the Optional Baffle 15

3.2 Electrical Connection 17

3.2.1 Use With INFICON VGC40x / VGC50x Vacuum Gauge Controller 17

3.2.2 Use With Other Controllers 17

3.2.2.1 Making an Individual Sensor Cable 18

3.2.2.2 Making a DeviceNet Interface Cable (BPG402-SD) 21

3.2.2.3 Making two EtherCAT Interface Cables (BPG402-SE) 22

3.2.2.4 Making a Profibus Interface Cable (BPG402-SP) 23

3.2.3 Using the Optional Power Supply (With RS232C Line) 24

4 Operation 26

4.1 Measuring Principle, Measuring Behavior 26

4.2 Operational Principle of the Gauge 28

4.3 Putting the Gauge Into Operation 28

4.4 Degas 28

4.5 Filament Status 29

4.5.1 Filament Status Indicator 29

4.5.2 Filament Status Relay (Only BPG402-S, SL) 29

4.5.3 Filament Status via Interface 29

4.6 Filament Control Mode 29

4.7 Emission Control Mode 30

4.8 Display (BPG402-S) 30

4.9 RS232C Interface 31

4.9.1 Description of the Functions 31

4.9.1.1 Output String (Transmit) 32

4.9.1.2 Input String (Receive) 34

4.10 DeviceNet Interface (BPG402-SD) 35

4.10.1 Description of the Functions 35

4.10.2 Operating Parameters 35

4.10.2.1 Operating Software 35

4.10.2.2 Node Address Setting 35

4.10.2.3 Data Rate Setting 36

4.10.3 Status Indicators 36

4.11 EtherCAT Interface (BPG402-SE) 37

4.11.1 Description of the Functions 37

4.11.2 Operating Parameters 37

4.11.2.1 Operating Software 37

4.11.2.2 Explicit Device Address Setting 37

4.11.3 Status Indicators 37

4.12 Profibus Interface (BPG402-SP) 38

4.12.1 Description of the Functions 38

4.12.2 Operating Parameters 38

4.12.2.1 Operating Software 38

4.12.2.2 Node Address Setting 38

4.13 Switching Functions 39

4.13.1 Setting the Switching Functions 40

5 Deinstallation 41

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6 Maintenance, Repair 43

6.1 Cleaning the Gauge 43

6.2 Adjusting the Gauge 43

6.2.1 Adjustment at Atmospheric Pressure 43

6.2.2 Zero Point Adjustment 44

6.3 What to Do in Case of Problems 44

6.4 Replacing the Sensor 46

7 Options 47
8 Spare Parts 47
9 Storage 47
10 Returning the Product 48
11 Disposal 48
Appendix 49

A: Relationship Output Signal – Pressure 49
B: Gas Type Dependence 50
C: Literature 52

For cross-references within this document, the symbol (→  XY) is used, for cross-
references to further documents and data sources, the symbol (→  [Z]).

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1 Safety

1.1 Symbols Used

DANGER

Information on preventing any kind of physical injury.

WARNING

Information on preventing extensive equipment and environmental damage.

Caution

Information on correct handling or use. Disregard can lead to malfunctions or
minor equipment damage.

Notice

1.2 Personnel Qualifications

Hint, recommendation

The result is O.K.

The result is not as expected

Optical inspection

Waiting time, reaction time

Skilled personnel

All work described in this document may only be carried out by persons who
have suitable technical training and the necessary experience or who have been
instructed by the end-user of the product.

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1.3 General Safety
Instructions

1.4 Liability and Warranty

• Adhere to the applicable regulations and take the necessary precautions for the
process media used.

Consider possible reactions between the materials (→  11) and the process
media.

Consider possible reactions of the process media (e.g. explosion) due to the
heat generated by the product.

• Adhere to the applicable regulations and take the necessary precautions for all
work you are going to do and consider the safety instructions in this document.

• Before beginning to work, find out whether any vacuum components are con­taminated. Adhere to the relevant regulations and take the necessary precau­tions when handling contaminated parts.

Communicate the safety instructions to all other users.

INFICON assumes no liability and the warranty becomes null and void if the end­user or third parties

• disregard the information in this document

• use the product in a non-conforming manner

• make any kind of interventions (modifications, alterations etc.) on the product

• use the product with accessories not listed in the corresponding product docu-

mentation.

The end-user assumes the responsibility in conjunction with the process media
used.

Gauge failures due to contamination, as well as expendable parts (e.g. filament),
are not covered by the warranty.

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2 Technical Data

,

Measurement

Emission

Degas

Output signal

Gauge identification

Measurement range (air, O

Accuracy
(after 10 min. stabilization)

Repeatability
(after 10 min. stabilization)

CO, N2) 5×10

2

-10

… 1000 mbar, continuous

15% of reading in the range of
1×10-8 … 10-2 mbar

5% of reading in the range of
1×10-8 … 10-2 mbar

Gas type dependence → Appendix B

Switching on threshold
Switching off threshold

Emission current

p ≤7.2×10-6 mbar

-6

7.2×10

mbar < p < 3.2×10-2 mbar

Emission current switching

25 µA  5 mA
5 mA  25 µA

Filaments

Number

Means of selection

2.4×10-2 mbar

-2

3.2×10

mbar

5 mA
25 µA

7.2×10-6 mbar

-5

3.0×10

mbar

2

Controlled by gauge (default) or via
interfaces (→  34,  [1] and  [10])

Settling time of measurement signal
after filament change

Filament status

Emission control mode

Automatic
Manual

<4 s

LED, relay contact (→  29)

Emission ON/OFF automatically
Emission ON/OFF by user via interfaces
(→  30)

Current (p <7.2×10-6 mbar) ≈20 mA

Control input signal 0 V/+24 V (dc), active high

(→  19, 20)
(control via RS232C →  31)

Duration <3 min., followed by automatic stop

In degas mode, the BPG402-Sx gauges keep supplying pressure readings, the
tolerances of which can be higher than during normal operation.

Degas acts only upon the active filament.

Output signal (measuring signal) 0 … +10 V (dc)

Measuring range +0.774 … +10 V

(5×10

-10

… 1000 mbar)

Relationship voltage-pressure logarithmic, 0.75 V/decade

→ Appendix A)

(

Error signal (→  44)

EEPROM error
Hot cathode error
Pirani error

Minimum load impedance

BPG402-Sx

≈+0.1 V (dc)
≈+0.3 V (dc)
≈+0.5 V (dc)

10 kΩ

42 kΩ resistor between Pin 10 and Pin 5
(sensor cable)

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Switching functions

RS232C interface

DeviceNet interface
(BPG402-SD)

EtherCAT interface
(BPG402-SE)

BPG402-S, -SL

BPG402-SD, -SE, -SP

Adjustment range

1 ("SETPOINT")

2 ("SETPOINT A, B")

-9

mbar … 100 mbar

1×10

Setpoints adjustable via potentiometers,
one floating, normally open relay contact
per setpoint (→  19, 20, 39).

(Adjusting the setpoints via field bus
→ corresponding bus section)

Hysteresis 10% of the threshold value

Relay contact rating ≤30 V (dc), ≤0.5 A (dc)

Data rate

Data format

Connections (sensor cable connector)

TxD (Transmit Data)
RxD (Receive Data)
GND

9600 Baud

binary
8 data bits
one stop bit
no parity bit
no handshake

Pin 13
Pin 14
Pin 5

Function and communication protocol of the RS232C interface →  31

Fieldbus name DeviceNet

Standard applied

Communication protocol, data format

Interface, physical CAN bus

Data rate
(adjustable via "RATE" switch)

→  [7]

→  [1], [5]

125 kBaud
250 kBaud
500 kBaud (default)
"P" (125 kBaud, 250 kBaud, 500 kBaud
programmable via DeviceNet)
(→  [1])

Node address (MAC ID)
(Adjustable via "ADDRESS", "MSD",
"LSD" switches)

0 … 63

(default = 63

dec

dec

)

"P" (0 … 63 programmable via
DeviceNet, →  [1])

DeviceNet connector Micro-Style, 5-pin, male

Cable shielded, special DeviceNet cable,

5 conductors (→  21 and  [5])

Cable length, system wiring according to DeviceNet specifications

(→  [7], [5])

Fieldbus name EtherCAT

Standard applied, data format,

→  [11], [12]

communication protocol

Data rate 100 Mbps

Node address explicit device identification

Physical layer 100Base-Tx (IEEE 802.3)

EtherNET connector 2×RJ45, 8-pin, socket

<IN>: EtherCAT input
<OUT>: EtherCAT output

Cable shielded, 8-pin special Ethernet Patch

cable (quality CAT5e or higher)

Cable length ≤100 m

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pp

Profibus interface
(BPG402-SP)

Display (BPG402-S only)

Power supply

Fieldbus name Profibus

Standard applied

Communication protocol, data format

Interface, physical RS485

Data rate

Node address

Local
(Adjustable via hexadecimal
"ADDRESS", "MSD", "LSD"
switches)

Default setting

Via Profibus
("ADDRESS" switches set to >7D
(>125

dec

))

→  [12]

→  [2], [12]

≤12 MBaud (→  [2])

00 … 7D

5C

hex

hex

hex

00 … 7D

hex

(0 … 125

(0 … 125

dec

dec

)

)

Profibus connection D-Sub, 9-pin, female

Cable shielded, special Profibus cable

(→  23 and  [6])

Cable length, system wiring according to Profibus specifications

(→  [12], [6])

Display panel

Dimensions

Pressure units
Selecting the pressure unit

LCD matrix, 32×16 pixels,
with background illumination

17.0 mm × 12 mm

mbar (default), Torr, Pa
via RS232C (→  31)

DANGER

The gauge must only be connected to power supplies, instruments or
control devices that conform to the requirements of a grounded extra­low voltage (PELV). The connection to the gauge has to be fused
(INFICON controllers fulfill these requirements).

Supply voltage at the gauge +24 V (dc) (+20 … +28 V (dc)) 1)

Power consumption

Standard
Degas
Emission start (<200 ms)

ripple max. 2 V

≤0.5 A
≤0.8 A
≤1.4 A

Fuse necessary 1.25 AT

(INFICON controllers fulfill these re­quirements)

Power consumption

BPG402-S, -SL
BPG402-SD
BPG402-SE
BPG402-SP

≤18 W
≤18 W
≤21 W
≤20 W

The BPG402-SD requires an additional, separate power supply for the

Supply voltage at the DeviceNet

DeviceNet interface (→  21).

connector (pin 2 and pin 3)

+24 V (dc)
(+11 … +25 V (dc))

Power consumption ≤2 W

The power supply for the DeviceNet interface is protected against

reversed polarity.

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Electrical connection

Materials used

Ambiance

For reasons of compatibility, the expression "sensor cable" is used for all

BPG402 versions in this document, although the pressure reading of the
gauges with fieldbus interface (BPG402-SD, BPG402-SE and

Electrical connection

BPG402-SP) is normally transmitted via the corresponding bus.

D-Sub, 15-pin, male
BPG402-S, -SL
BPG402-SD, -SE, -SP

→  19

→  20

Sensor cable shielded, number of conductors de-

pending on the functions used,

max. 15 conductors plus shielding

1)

Cable length (supply voltage 24 V (dc)

Analog and fieldbus operation

For operation with RS232C interface

Materials exposed to vacuum

Housing, supports, screens
Feedthroughs
Insulator
Cathode
Cathode holder
Pirani element

Internal volume

DN 25 ISO-KF
DN 40 CF-R

)

≤35 m, 0.25 mm²/conductor

≤50 m, 0.34 mm²/conductor

≤100 m, 1.0 mm²/conductor

≤30 m

stainless steel
NiFe, nickel plated
glass
iridium, yttrium oxide (Y
molybdenum, platinum
tungsten, copper

3

≈24 cm

3

≈34 cm

2O3

)

Pressure max. 2 bar (absolute)

Admissible temperatures

Storage

Operation

Bakeout
Long tube

Relative humidity

Year's mean
During 60 days

-20 … 70 °C

0 … 50 °C

2)

+ 80 °C
+150 °C

2)

≤65 (no condensation)
85% (no condensation)

Use indoors only

altitude up to 2000 m NN

Mounting orientation any

Type of protection IP 30

1)

Measured at gauge connector (consider the voltage drop as function of the sensor cable

length).

2)

Flange temperature, electronics unit removed, horizontally mounted.

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Dimensions [mm]

4-40UNC 2B

4-40UNC 2B

DN 25 ISO-KF

DN 40 CF-R

4-40UNC 2B

Gauges with DeviceNet connector

are 14 mm longer.

DN 40 CF-R

Weight

353-570, 353-572
353-571, 353-573
353-578

≈450 g
≈710 g
≈917 g

353-574, 353-576, 353-590

353-575, 353-577, 353-591

12

≈490 g
≈750 g

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3 Installation

3.1 Vacuum Connection

DANGER: overpressure in the vacuum system >1 bar

Injury caused by released parts and harm caused by escaping process
gases can result if clamps are opened while the vacuum system is
pressurized.

Do not open any clamps while the vacuum system is pressurized. Use
the type of clamps which are suited to overpressure.

The gauge must be electrically connected to the grounded vacuum
chamber. This connection must conform to the requirements of a pro­tective connection according to EN 61010:

• CF connections fulfill this requirement

• For gauges with a KF vacuum connection, use a conductive me-

tallic clamping ring.

DANGER

DANGER

Caution: vacuum component

Dirt and damages impair the function of the vacuum component.

When handling vacuum components, take appropriate measures to
ensure cleanliness and prevent damages.

Caution: dirt sensitive area

Touching the product or parts thereof with bare hands increases the
desorption rate.

Always wear clean, lint-free gloves and use clean tools when working
in this area.

The gauge may be mounted in any orientation. To keep condensates

and particles from getting into the measuring chamber, preferably
choose a horizontal to upright position. See dimensional drawing for
space requirements (→  12).

The gauge is supplied with a built-in grid. For potentially contaminating
applications and to protect the electrodes against light and fast charged
particles, installation (→  15) of the optional baffle is recommended
(→  47).

Caution

Caution

When installing the gauge, make sure that the area around the con-

nector is accessible for the tools required for adjustment while the gauge
is mounted (→  40, 43).

When installing the gauge, allow for installing/deinstalling the connectors
and accommodation of cable loops.

If you are using a gauge with display, make sure easy reading of the
display is possible.

Vacuum connection free of grease.

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Procedure

3.1.1 Removing and Installing
the Electronics Unit

Required tools / material

Removing the electronics unit

Remove the protective lid and install the gauge to the vacuum system.

Seal with centering ring

Protective lid

Clamp

• Allen wrench, AF 2.5

(keep it)

 Unscrew the hexagon socket set screw (1) on the side of the electronics

unit (2).

1

2

 Remove the electronics unit without twisting it.

14

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Installing the electronics unit

 Place the electronics unit (2) on the sensor (3) (be careful to correctly align

the pins and notch (4)).

3.1.2 Using the Optional Baffle

Precondition

Required tools / material

Installation

4

3

2

 Slide the electronics unit in to the mechanical stop and lock it with the hexa-

gon socket set screw.

In severely contaminating processes and to protect measurement electrodes opti­cally against light and fast charged particles, replacement of the built-in grid by the
optional baffle (→  47) is recommended.

Gauge deinstalled ("Deinstallation" →  41).

• Baffle (→  47)

• Pointed tweezers

• Pin (e.g. pencil)

• Screwdriver No 1

 Carefully remove the grid with tweezers.

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 Carefully place the baffle onto the sensor opening.

 Using a pin, press the baffle down in the center until it catches.

Deinstallation

Carefully remove the baffle with the screwdriver.

16

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3.2 Electrical Connection

3.2.1 Use With INFICON
VGC40x / VGC50x
Vacuum Gauge
Controller

Required material

Procedure

If the gauge is used with an INFICON VGC40x / VGC50x controller, a correspond­ing sensor cable is required (→ [4]). The sensor cable permits supplying the gauge
with power, transmitting measurement values and gauge statuses, and making pa­rameter settings.

Caution

Caution: data transmission errors

If the gauge is operated with the INFICON VGC40x / VGC50x Vacuum
Gauge Controller (RS232C) and a fieldbus interface at the same time,
data transmission errors may occur.

The gauge must not be operated with an INFICON VGC40x / VGC50x
controller and DeviceNet, EtherCAT or Profibus at the same time.

• Sensor cable (→  [4]), INFICON sales literature)

 Plug the sensor connector into the gauge and secure it with the locking

screws.

3.2.2 Use With Other
Controllers

 Connect the other end of the sensor cable to the INFICON controller and

secure it.

The gauge can also be operated with other controllers.

Especially the fieldbus versions BPG402-SD (DeviceNet), BPG402-SE (EtherCAT)
and BPG402-SP (Profibus) are usually operated as part of a network, controlled by
a master or bus controller. In such cases, the control system has to be operated
with the appropriate software and communication protocol (→  [1], [2], [3]).

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