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Bayard-Alpert Pirani Gauge
BPG400
BPG400-SD
BPG400-SP
BPG400-SR
Product Identification
In all communications with INFICON, please specify the information given on the product nameplate. For convenient
reference copy that information into the space provided
below.
Validity
This document applies to products with the following part
numbers (PN):
BPG400 (
without display)
353-500
353-502
BPG400
(with display)
353-501
353-503
BPG400-SD (with DeviceNet interface and switching functions)
353-507
353-508
BPG400-SP
353-505
353-506
BPG400-SR (with RS485 interface and switching functions)
353-509
353-513
The part number (PN) can be taken from the product name
plate.
If not indicated otherwise in the legends, the illustrations in
this document correspond to the gauge with part number
353-500. They apply to the other gauges by analogy.
We reserve the right to make technical changes without prior
notice.
All dimensions in mm.
Intended Use
The BPG400, BPG400-SD, BPG400-SP and BPG400-SR
gauges have been designed for vacuum measurement of
gases in the pressure range of 5×10
They must not be used for measuring flammable or combustible gases in mixtures containing oxidants (e.g. atmospheric
oxygen) within the explosion range.
The gauges can be operated in connection with the VGC103
or VGC40x Vacuum Gauge Controller or with another instrument or control device.
RS485
Instruction Sheet
Incl. EC Declaration of Conformity
tima03e1-c (2010-04)
INFICON AG, LI-9496 Balzers
Model:
PN:
SN:
V W
(DN 25 ISO-KF)
(DN 40 CF-R)
(DN 25 ISO-KF)
(DN 40 CF-R)
(DN 25 ISO-KF)
(DN 40 CF-R)
(with Profibus interface and switching functions)
(DN 25 ISO-KF)
(DN 40 CF-R)
(DN 25 ISO-KF)
(DN 40 CF-R)
-10
… 1000 mbar.
Functional Principle
Over the whole measuring range, the gauge has a
continuous characteristic curve and its measuring signal is
output as logarithm of the pressure.
The gauge functions with a Bayard-Alpert hot cathode ionization measurement system (for p < 2.0×10
Pirani measurement system (for p > 5.5×10
overlapping pressure range of 2.0×10
mixed signal of the two measurement systems is output. The
hot cathode is switched on by the Pirani measurement system only below the switching threshold of 2.4×10
prevent filament burn-out). It is switched off when the pressure exceeds 3.2×10
-2
mbar.
-2
mbar) and a
-3
mbar). In the
-2
… 5.5×10-3 mbar, a
-2
Trademark
DeviceNet™ Open DeviceNet Vendor Association, Inc.
Safety
Symbols Used
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environmental damage.
Caution
Information on correct handling or use. Disregard can lead
to malfunctions or minor equipment damage.
Personnel Qualifications
Skilled personnel
All work described in this document may only be carried
out by persons who have suitable technical training and
the necessary experience or who have been instructed by
the end-user of the product.
General Safety Instructions
• Adhere to the applicable regulations and take the necessary precautions for the process media used.
Consider possible reactions with the product materials.
Consider possible reactions (e.g. explosion) of the process
media due to the heat generated by the product.
• Adhere to the applicable regulations and take the necessary precautions for all work you are going to do and
consider the safety instructions in this document.
• Before beginning to work, find out whether any vacuum
components are contaminated. Adhere to the relevant
regulations and take the necessary precautions when
handling contaminated parts.
Communicate the safety instructions to all other users.
Liability and Warranty
INFICON assumes no liability and the warranty becomes null
and void if the end-user or third parties
• disregard the information in this document
• use the product in a non-conforming manner
• make any kind of changes (modifications, alterations etc.)
to the product
• use the product with accessories not listed in the product
documentation.
The end-user assumes the responsibility in conjunction with
the process media used.
Gauge failures due to contamination or wear and tear, as well
as expendable parts (filament), are not covered by the
warranty.
mbar (to
Technical Data
In some points, the technical data of BPG400-SD,
BPG400-SP and BPG400-SR differ from those of
BPG400, which are given below (→ "Technical
Data" in [1] and [2]).
Measuring range
(air, O
, CO, N2)
2
Accuracy 15% of reading in the range
Repeatability 5% of reading in the range of
Emission
Switching on threshold
Switching off threshold
Emission current
p ≤ 7.2×10
7.2×10
< 3.2×10
Emission current switching
25 µA ⇒ 5 mA
5 mA ⇒ 25 µA
Degas
Current (p <7.2×10
-6
mbar
-6
mbar < p
-2
mbar
-6
Control input signal 0 V/24 V, high active
Duration <3 min, followed by
In degas mode, the BPG400 keeps supplying pressure
readings, the tolerances of which can be higher than
during normal operation.
Output signal
(measuring signal)
Measuring range 0.774 … 10 V
Voltage vs. pressure logarithmic,
Error signal (→ [1]) ≈0.3 V (hot cathode error)
Minimum load impedance
Gauge identification
RS232C interface
Data rate
Data format
Connector
Further information on the RS232C interface → [1]
Display panel (353-501,
353-503)
Dimensions 16.0 mm × 11.2 mm
Pressure units mbar (default),
Supply
DANGER
The gauge must only be connected to power
supplies, instruments or control devices that
conform to the requirements of a grounded protective extra-low voltage (SELV). The connection
to the gauge has to be fused
Voltage at gauge 24 VDC (20 … 28 VDC)
Power consumption
Standard
Degas
Emissions start (200 ms)
Fuse required
1)
≤1.25 AT
Power consumption ≤16 W
1)
INFICON controllers fulfill these requirements.
2)
Consider the voltage drop on the sensor cable.
-10
5×10
… 1000 mbar
continuous
of 1×10
(after 5 min. stabilization)
-8
1×10
… 10-2 mbar
(after 5 min. stabilization)
-2
2.4×10
-2
3.2×10
5 mA
25 µA
-6
7.2×10
-5
3.2×10
mbar)
≈16 mA (P
automatic stop
0 … +10 V
-10
(5×10
0.75 V/decade
≈0.5 V (Pirani error)
10 kΩ
42 kΩ between Pin 10 and
Pin 5 (gauge cable)
9600 Baud
binary
8 data bits
one stop bit
no parity bit
no handshake
→ "Power Connection"
LCD matrix, 32×16 pixels,
with background illumination
U measuring signal
c constant (pressure unit dependent)
-3
mbar can be determined by a simple conversion:
p
= C × pressure indicated
eff
Calibration
factor C
5.9
4.1
0.5
0.8
Gas type Calibration
factor C
air, O2, CO, N
H2
Xe
2
DANGER
DANGER: overpressure in the vacuum system
>1 bar
Injury caused by released parts and harm
caused by escaping process gases can result if
clamps are opened while the vacuum system is
pressurized.
Do not open any clamps while the vacuum system is pressurized. Use the type clamps which
are suited to overpressure.
DANGER
DANGER: protective ground
Incorrectly grounded products can be extremely
hazardous in the event of a fault.
The gauge must be electrically connected to the
grounded vacuum chamber. This connection
must conform to the requirements of a protective
connection according to EN 61010:
• CF connection fulfill this requirement
• For gauges with a KF flange, use a conduc-
tive metallic clamping ring
Caution
Caution: vacuum component
Dirt and damages impair the function of the
vacuum component.
When handling vacuum components, take ap-
propriate measures to ensure cleanliness and
prevent damages.
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with bare
hands increases the desorption rate.
Always wear clean, lint-free gloves and use
clean tools when working in this area.
1.0
2.4
0.4
The gauge may be mounted in any orientation. To
keep condensates and particles from getting into the
measuring chamber, preferably choose a horizontal
to upright position.
The gauge is supplied with a built-in grid. For potentially contaminating applications and to protect the
electrodes against light and fast particles, installation
of the optional baffle is recommended (
Remove the protective lid and install the product to the
vacuum system, preferably without applying vacuum grease.
Seal with centering ring
or
Protective lid
Seal with centering
Power Connection (BPG400)
Clamp
Keep the protective lid.
The following information on the electrical con-
nection as well as the wiring diagram applies to
BPG400 only (
electrical connection and additional functions of
BPG400-SD, -SP and -SR).
Make sure the vacuum connection is properly made
(→ "Vacuum Connection").
ring and filter
→ [1] and [2] for details on the
If no connection cable is available, make one according
to the following diagram.
BPG400
TxD
RxD
Measuring
signal
13
14
2
12
Degas
+U
7
1.25AT
8
b
5
42kΩ
10
Identification
15
Electrical connection
Pin 2 Signal output (measuring signal) 0 … +10 V
Pin 5 Supply common, GND
Pin 7 Degas on, active high +24 VDC
Pin 8 Supply +24 VDC
Pin 10 Gauge identification
Pin 12 Signal common, GND
Pin 13 RS232C, TxD
Pin 14 RS232C, RxD
Pin 15 Shielding, housing, GND
Pins 1, 3, 4, 6, 9 and 11 are
not connected internally.
Secure the cable connector with the lock screws.
Connect the sensor cable to the controller.
Operation
When the voltage is supplied, the measuring signal is available between pins 2 (+) and 12 (–) (Relationship Measuring
Signal – Pressure
BPG400-SD, -SP and -SR can also be operated via the
corresponding fieldbus interface (DeviceNet, Profibus or
→ [1] and [2] for further details and functions).
RS485
Allow for a stabilizing time of
has been switched on, permanently leave it on irrespective of
the pressure.
Gas Type Dependence (BPG400)
The measurement value is gas dependent. The displayed
reading applies to dry air, O
has to be converted (→ "Technical Data" and [1]).
Adjusting the Gauge
The adjustment of BPG400-SD, -SP and -SR
The gauge is factory calibrated. If used under different
climatic conditions, at extreme temperatures, through aging
or contamination and after exchanging the sensor, the characteristic curve can be offset and readjustment can become
necessary. Only the Pirani element can be adjusted and only
at atmosphere.
Readjustment becomes necessary if
• at atmosphere the output voltage is <10 V or the display
reading is <atmosphere
• when venting the vacuum system, the output voltage
reaches 10 V before the measured pressure has reached
atmosphere (Gauges with display will show the error "5" at
atmosphere (Pirani sensor warning)).
→ "Technical Data" and [1]).
≈10 minutes. Once the gauge
, CO, and N2. For other gases, it
2
(→ [1] and [2]) is slightly different from the
procedure for BPG400, which is described below.
Adjusting the gauge
BPG400 without display
353-500 353-502
Insert a pin (≈ø1.3×50mm) through the opening marked
<FULL SCALE> and push the button inside for at least
≈10 s
Adjustment completed
BPG400 with display
353-501 353-503
5 seconds.
Automatic adjustment
Display
(BPG400 with part numbers 353-501 and 353-503)
Pressure reading
(none) Pirani operation
Emission 25
Emission 5 mA
Degas
1000 mbar adjustment (Pirani)
μ
Pressure unit
Function display
A
Internal data connection failure
(red background illumination)
Deinstallation
DANGER
DANGER: contaminated parts
Contaminated parts can be detrimental to health
and environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.
Caution
Caution: vacuum component
Dirt and damages impair the function of the vac-
uum component.
When handling vacuum components, take ap-
Vent the vacuum system.
Put the gauge out off operation.
propriate measures to ensure cleanliness and
prevent damages.
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with bare
hands increases the desorption rate.
Always wear clean, lint-free gloves and use
clean tools when working in this area.
Unfasten the lock screws and unplug the sensor cable.
(If you are using BPG400-SD, -SP or -SR, unfasten
and unplug the interface cable too (
→ [1] and [2]).
Activate the gauge.
Operate the gauge for ≈10 minutes at atmos-
pheric pressure. If the gauge was operated
within the BA range, a cooling-down time of
caustic or microbiological hazard) can be detrimental to health and environment.
Products returned to INFICON should preferably
be free of harmful substances. Adhere to the forwarding regulations of all involved countries and
forwarding companies and enclose a duly completed declaration of contamination
Products that are not clearly declared as "free of harmful
substances" are decontaminated at the expense of the
customer.
Products not accompanied by a duly completed declaration of
contamination are returned to the sender at his own expense.
Disposal
DANGER
DANGER: contaminated parts
Contaminated parts can be detrimental to health
and environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.
WARNING
N
WARNING: substances detrimental to the environment
Products or parts thereof (mechanical and electric components, operating fluids etc.) can be detrimental to the environment.
Dispose of such substances in accordance with
the relevant local regulations.
Separating the components
After disassembling the product, separate its components
according to the following criteria:
• Contaminated components
Contaminated components (radioactive, toxic, caustic, or
biological hazard etc.) must be decontaminated in accordance with the relevant national regulations, separated
according to their materials, and recycled.
• Other components
Such components must be separated according to their
materials and recycled.
The service, repair, and/or disposal of vacuum equipment and components will only be carried out if a correctly completed declaration
has b een submitted. N on-completion will result in delay.
This declaration may only be completed (in block letters) and signed
by authorized and qualified staff.
Description of product
Type
Part number
Serial number
Reason for return
Operating fluid(s) u sed
(Must be drained before shipping.)
Used in copper process
no yes
Process related contamination of product:
toxic no 1) ye s
corrosive no 1) yes
biolog ical ha zard no ye s 2)
explosive no ye s 2)
radioactive no yes 2)
other harmful substances no 1) yes
1) or not containing any
amount of hazardous
residues that exceed the
permissible exposure limits
The product is free
of any substances
which are damaging
to health.
Harmful substances, gases and/or
by-products
Please list all substances, gases, and by-products
which the product may have come into contact with:
Trade/product name
manufacturer
Precautions associated with
substance
Legally binding declaration:
We he reby declare tha t the information o n this form is
comp lete and a ccurate and tha t we will assume any further
costs that may arise. Th e contaminated product will be dispatched in accordance with the applicable regulations.
Organization/company
Address
Post code, place
Phone Fax
Email
Name
Company stamp
This form can be downloaded from our website.
Copies: Original for addressee
1 copy for accompanying documents
1 copy for file of sender
yes
Seal product in plastic
bag and mark it with a
corresponding label.
2) Products thus
contaminate d
will not be
accepted with out written
evidence of
decontami n ation.
Chemical name
(or sy mbol)
Action if human
contact
EC Declaration of Conformity
We, INFICON, hereby declare that the equipment mentioned below complies with the provisions of the Directive relating to electromagnetic compatibility 2004/108/EC.
Products
Bayard-Alpert Pirani Gauge
BPG400
BPG400-SD
BPG400-SP
BPG400-SR
Standards
Harmonized and international/national standards and specifications:
• EN 61000-6-2:2005 (EMC: generic emission standard)
• EN 61000-6-3:2007 (EMC: generic imm unity standard)
• EN 61010-1:2001 (Safety requirements for electrical equip-
ment for measurement, control and laboratory use)
• EN 61326-1:2006 (EMC requirements for electrical equip-