Inficon BPG400, BPG400-SP, BPG400-SD, BPG400-SR Instruction Sheet

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Bayard-Alpert Pirani Gauge
BPG400 BPG400-SD BPG400-SP BPG400-SR
Product Identification
In all communications with INFICON, please specify the in­formation given on the product nameplate. For convenient reference copy that information into the space provided below.
Validity
This document applies to products with the following part numbers (PN):
BPG400 (
without display)
353-500 353-502
BPG400
(with display)
353-501 353-503
BPG400-SD (with DeviceNet interface and switching functions)
353-507 353-508
BPG400-SP
353-505 353-506
BPG400-SR (with RS485 interface and switching functions)
353-509 353-513
The part number (PN) can be taken from the product name plate.
If not indicated otherwise in the legends, the illustrations in this document correspond to the gauge with part number 353-500. They apply to the other gauges by analogy.
We reserve the right to make technical changes without prior notice.
All dimensions in mm.
Intended Use
The BPG400, BPG400-SD, BPG400-SP and BPG400-SR gauges have been designed for vacuum measurement of gases in the pressure range of 5×10
They must not be used for measuring flammable or combusti­ble gases in mixtures containing oxidants (e.g. atmospheric oxygen) within the explosion range.
The gauges can be operated in connection with the VGC103 or VGC40x Vacuum Gauge Controller or with another in­strument or control device.
RS485
Instruction Sheet
Incl. EC Declaration of Conformity
tima03e1-c (2010-04)
INFICON AG, LI-9496 Balzers
Model: PN: SN: V W
(DN 25 ISO-KF) (DN 40 CF-R)
(DN 25 ISO-KF) (DN 40 CF-R)
(DN 25 ISO-KF) (DN 40 CF-R)
(with Profibus interface and switching functions) (DN 25 ISO-KF)
(DN 40 CF-R)
(DN 25 ISO-KF) (DN 40 CF-R)
-10
… 1000 mbar.
Functional Principle
Over the whole measuring range, the gauge has a continuous characteristic curve and its measuring signal is output as logarithm of the pressure.
The gauge functions with a Bayard-Alpert hot cathode ioni­zation measurement system (for p < 2.0×10 Pirani measurement system (for p > 5.5×10 overlapping pressure range of 2.0×10 mixed signal of the two measurement systems is output. The hot cathode is switched on by the Pirani measurement sys­tem only below the switching threshold of 2.4×10 prevent filament burn-out). It is switched off when the pres­sure exceeds 3.2×10
-2
mbar.
-2
mbar) and a
-3
mbar). In the
-2
… 5.5×10-3 mbar, a
-2
Trademark
DeviceNet™ Open DeviceNet Vendor Association, Inc.
Safety
Symbols Used
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and en­vironmental damage.
Caution
Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage.
Personnel Qualifications
Skilled personnel
All work described in this document may only be carried out by persons who have suitable technical training and the necessary experience or who have been instructed by the end-user of the product.
General Safety Instructions
Adhere to the applicable regulations and take the ne­cessary precautions for the process media used.
Consider possible reactions with the product materials. Consider possible reactions (e.g. explosion) of the process
media due to the heat generated by the product.
Adhere to the applicable regulations and take the ne­cessary precautions for all work you are going to do and consider the safety instructions in this document.
Before beginning to work, find out whether any vacuum components are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.
Communicate the safety instructions to all other users.
Liability and Warranty
INFICON assumes no liability and the warranty becomes null and void if the end-user or third parties
disregard the information in this document
use the product in a non-conforming manner
make any kind of changes (modifications, alterations etc.)
to the product
use the product with accessories not listed in the product documentation.
The end-user assumes the responsibility in conjunction with the process media used.
Gauge failures due to contamination or wear and tear, as well as expendable parts (filament), are not covered by the warranty.
mbar (to
Technical Data
In some points, the technical data of BPG400-SD,
BPG400-SP and BPG400-SR differ from those of BPG400, which are given below ( "Technical Data" in [1] and [2]).
Measuring range
(air, O
, CO, N2)
2
Accuracy 15% of reading in the range
Repeatability 5% of reading in the range of
Emission
Switching on threshold Switching off threshold
Emission current
p 7.2×10
7.2×10 < 3.2×10
Emission current switching
25 µA 5 mA 5 mA 25 µA
Degas
Current (p <7.2×10
-6
mbar
-6
mbar < p
-2
mbar
-6
Control input signal 0 V/24 V, high active Duration <3 min, followed by
In degas mode, the BPG400 keeps supplying pressure readings, the tolerances of which can be higher than during normal operation.
Output signal (measuring signal)
Measuring range 0.774 … 10 V
Voltage vs. pressure logarithmic,
Error signal ( [1]) 0.3 V (hot cathode error)
Minimum load impedance
Gauge identification
RS232C interface
Data rate Data format
Connector
Further information on the RS232C interface [1]
Display panel (353-501, 353-503)
Dimensions 16.0 mm × 11.2 mm Pressure units mbar (default),
Supply
DANGER
The gauge must only be connected to power supplies, instruments or control devices that conform to the requirements of a grounded pro­tective extra-low voltage (SELV). The connection to the gauge has to be fused
Voltage at gauge 24 VDC (20 … 28 VDC)
Power consumption
Standard Degas Emissions start (200 ms)
Fuse required
1)
1.25 AT
Power consumption 16 W
1)
INFICON controllers fulfill these requirements.
2)
Consider the voltage drop on the sensor cable.
-10
5×10
… 1000 mbar
continuous
of 1×10 (after 5 min. stabilization)
-8
1×10
… 10-2 mbar
(after 5 min. stabilization)
-2
2.4×10
-2
3.2×10
5 mA
25 µA
-6
7.2×10
-5
3.2×10
mbar)
16 mA (P
automatic stop
0 … +10 V
-10
(5×10
0.75 V/decade
0.5 V (Pirani error)
10 kΩ
42 kΩ between Pin 10 and Pin 5 (gauge cable)
9600 Baud binary 8 data bits one stop bit no parity bit no handshake "Power Connection"
LCD matrix, 32×16 pixels, with background illumination
Torr, Pa (Selecting the pressure unit [1])
(ripple 2 V
0.5 A 0.8 A 1.4 A
-8
… 10-2 mbar
mbar mbar
mbar mbar
4.0 W)
degas
… 1000 mbar)
1)
.
) 2)
pp
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Electrical connection D-Sub, 15-pin, male Sensor cable
For analog values only, without degas function
For analog values, with degas function
All functions, incl. RS232C interface
Cable length (24 VDC) 35 m (4/5/7x0.25 mm²)
For operation with RS232C interface
Materials on the vacuum side
Housing, supports, screens Feedthroughs Insulator Cathode Cathode holder Pirani element
Internal volume
DN 25 ISO-KF DN 40 CF-R
Maximum admissable Pressure
Admissible temperatures
Storage Operation Bakeout
Relative humidity
Year’s mean During 60 days
Use indoors only
4 conductors, shielded
5 conductors, shielded
7 conductors, shielded
50 m (4/5/7x0.34 mm²) 100 m (4/5/7x1.0 mm²)
30 m
stainless steel NiFe nickel plated glass iridium, yttrium oxide (Y molybdenum tungsten, copper
3
24 cm34 cm3
2 bar (absolute)
2O3)
–20 … +70 °C 0 … +50 °C 150 °C (without electronics
unit)
65% (not condensable) 85% (not condensable)
altitude up to 2000 m NN
where p pressure
Gas Type Dependence
For gases other than air, the pressure in the indication range p < 10
Gas type
He Ne
Kr Ar
Installation
Vacuum Connection
Type of protection IP 30
Dimensions [mm]
4-40UNC 2B
Weight
353-500, 353-501 353-502, 353-503 353-505, 353-507 353-509 353-506, 353-508 353-513
Measuring Signal vs. Pressure
Pressure p [mbar]
1E+04
1E+03
1E+02
1E+01
1E+00
1E–01
1E–02
1E–03
1E–04
1E–05
1E–06
1E–07
1E–08
1E–09
1E–10
0.0
DN 25 ISO-KF DN 40 CF-R
285 g 550 g
430 g
695 g
underrange
Sensor error
1.0 2.0 3.0 4.0 5.0 6.0 7.0 8.0 9.0 10.0
Measuring signal U[V]
4-40UNC 2B
overrange
(U-7.75)/0.75+c
p = 10
U p c
[V] [mbar] 0 [V] [Pa] 2 [V] [Torr] -0.125
U measuring signal c constant (pressure unit dependent)
-3
mbar can be determined by a simple conversion:
p
= C × pressure indicated
eff
Calibration
factor C
5.9
4.1
0.5
0.8
Gas type Calibration
factor C
air, O2, CO, N
H2
Xe
2
DANGER
DANGER: overpressure in the vacuum system >1 bar
Injury caused by released parts and harm caused by escaping process gases can result if clamps are opened while the vacuum system is pressurized.
Do not open any clamps while the vacuum sys­tem is pressurized. Use the type clamps which are suited to overpressure.
DANGER
DANGER: protective ground Incorrectly grounded products can be extremely
hazardous in the event of a fault. The gauge must be electrically connected to the
grounded vacuum chamber. This connection must conform to the requirements of a protective connection according to EN 61010:
CF connection fulfill this requirement
For gauges with a KF flange, use a conduc-
tive metallic clamping ring
Caution
Caution: vacuum component Dirt and damages impair the function of the
vacuum component. When handling vacuum components, take ap-
propriate measures to ensure cleanliness and prevent damages.
Caution
Caution: dirt sensitive area Touching the product or parts thereof with bare
hands increases the desorption rate. Always wear clean, lint-free gloves and use
clean tools when working in this area.
1.0
2.4
0.4
The gauge may be mounted in any orientation. To
keep condensates and particles from getting into the measuring chamber, preferably choose a horizontal to upright position.
The gauge is supplied with a built-in grid. For poten­tially contaminating applications and to protect the electrodes against light and fast particles, installation of the optional baffle is recommended (
Remove the protective lid and install the product to the vacuum system, preferably without applying vacuum grease.
Seal with centering ring
or
Protective lid
Seal with centering
Power Connection (BPG400)
Clamp
Keep the protective lid.
The following information on the electrical con-
nection as well as the wiring diagram applies to BPG400 only ( electrical connection and additional functions of BPG400-SD, -SP and -SR).
Make sure the vacuum connection is properly made
( "Vacuum Connection").
ring and filter
[1] and [2] for details on the
If no connection cable is available, make one according
to the following diagram.
BPG400
TxD
RxD
Measuring
signal
13
14
2
12
Degas
+U
7
1.25AT
8
b
5
42kΩ
10
Identification
15
Electrical connection Pin 2 Signal output (measuring signal) 0 … +10 V
Pin 5 Supply common, GND Pin 7 Degas on, active high +24 VDC Pin 8 Supply +24 VDC Pin 10 Gauge identification Pin 12 Signal common, GND Pin 13 RS232C, TxD Pin 14 RS232C, RxD Pin 15 Shielding, housing, GND
Pins 1, 3, 4, 6, 9 and 11 are not connected internally.
[1]).
RS232C
+
+
24 V
9
15
D-Sub, 15-pin
female,
soldering side
1
8
Original: German tima03d1-c (2010-04)
tima03e1-c
Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com
(2010-04)
Connect the sensor cable to the gauge.
Secure the cable connector with the lock screws. Connect the sensor cable to the controller.
Operation
When the voltage is supplied, the measuring signal is avail­able between pins 2 (+) and 12 (–) (Relationship Measuring Signal – Pressure
BPG400-SD, -SP and -SR can also be operated via the corresponding fieldbus interface (DeviceNet, Profibus or
[1] and [2] for further details and functions).
RS485
Allow for a stabilizing time of has been switched on, permanently leave it on irrespective of the pressure.
Gas Type Dependence (BPG400)
The measurement value is gas dependent. The displayed reading applies to dry air, O has to be converted ( "Technical Data" and [1]).
Adjusting the Gauge
The adjustment of BPG400-SD, -SP and -SR
The gauge is factory calibrated. If used under different climatic conditions, at extreme temperatures, through aging or contamination and after exchanging the sensor, the char­acteristic curve can be offset and readjustment can become necessary. Only the Pirani element can be adjusted and only at atmosphere.
Readjustment becomes necessary if
at atmosphere the output voltage is <10 V or the display
reading is <atmosphere
when venting the vacuum system, the output voltage
reaches 10 V before the measured pressure has reached atmosphere (Gauges with display will show the error "5" at atmosphere (Pirani sensor warning)).
"Technical Data" and [1]).
10 minutes. Once the gauge
, CO, and N2. For other gases, it
2
( [1] and [2]) is slightly different from the procedure for BPG400, which is described below.
Adjusting the gauge
BPG400 without display
353-500 353-502
Insert a pin (ø1.3×50mm) through the opening marked
<FULL SCALE> and push the button inside for at least
10 s
Adjustment completed
BPG400 with display
353-501 353-503
5 seconds.
Automatic adjustment
Display
(BPG400 with part numbers 353-501 and 353-503)
Pressure reading
(none) Pirani operation
Emission 25 Emission 5 mA Degas 1000 mbar adjustment (Pirani)
μ
Pressure unit
Function display
A
Internal data connection failure (red background illumination)
Deinstallation
DANGER
DANGER: contaminated parts Contaminated parts can be detrimental to health
and environment. Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.
Caution
Caution: vacuum component Dirt and damages impair the function of the vac-
uum component. When handling vacuum components, take ap-
Vent the vacuum system.
Put the gauge out off operation.
propriate measures to ensure cleanliness and prevent damages.
Caution
Caution: dirt sensitive area Touching the product or parts thereof with bare
hands increases the desorption rate. Always wear clean, lint-free gloves and use
clean tools when working in this area.
Unfasten the lock screws and unplug the sensor cable.
(If you are using BPG400-SD, -SP or -SR, unfasten and unplug the interface cable too (
[1] and [2]).
Activate the gauge.
Operate the gauge for 10 minutes at atmos-
pheric pressure. If the gauge was operated within the BA range, a cooling-down time of
30 minutes is to be expected (gauge tem-
perature = environmental temperature).
no error
(green background illumination)
Pirani sensor warning
(red background illumination)
Pirani sensor error
(red background illumination)
BA sensor error
(red background illumination)
Error display
Remove the gauge from the vacuum system.
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Protective lid
Maintenance, Troubleshooting
In case of severe contamination or a malfunction, the sensor can be replaced (
Gauge failures due to contamination or wear and
[1]).
tear, as well as expendable parts (filament), are not covered by the warranty.
Returning the Product
WARNING
WARNING: forwarding contaminated products Contaminated products (e.g. radioactive, toxic,
caustic or microbiological hazard) can be detri­mental to health and environment.
Products returned to INFICON should preferably be free of harmful substances. Adhere to the for­warding regulations of all involved countries and forwarding companies and enclose a duly com­pleted declaration of contamination
Products that are not clearly declared as "free of harmful substances" are decontaminated at the expense of the customer.
Products not accompanied by a duly completed declaration of contamination are returned to the sender at his own expense.
Disposal
DANGER
DANGER: contaminated parts Contaminated parts can be detrimental to health
and environment. Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.
WARNING
N
WARNING: substances detrimental to the en­vironment
Products or parts thereof (mechanical and elec­tric components, operating fluids etc.) can be de­trimental to the environment.
Dispose of such substances in accordance with the relevant local regulations.
Separating the components
After disassembling the product, separate its components according to the following criteria:
Contaminated components
Contaminated components (radioactive, toxic, caustic, or biological hazard etc.) must be decontaminated in accord­ance with the relevant national regulations, separated according to their materials, and recycled.
Other components
Such components must be separated according to their materials and recycled.
Further Information
[1] www.inficon.com
Operating Manual Bayard-Alpert Pirani Gauge BPG400, BPG400-SD, BPG400-SP, BPG400-SR tina03d1 (German) tina03e1 (English) INFICON AG, LI–9496 Balzers, Liechtenstein
[2] www.inficon.com
Instruction Sheet Bayard-Alpert Pirani Gauge BPG400-SD, BPG400-SP, BPG400-SR tima36d1 (German) tima36e1 (English) INFICON AG, LI–9496 Balzers, Liechtenstein
Declaration of Contamination
The service, repair, and/or disposal of vacuum equipment and com­ponents will only be carried out if a correctly completed declaration has b een submitted. N on-completion will result in delay. This declaration may only be completed (in block letters) and signed by authorized and qualified staff.
Description of product
Type Part number Serial number
Reason for return
Operating fluid(s) u sed
(Must be drained before shipping.)
Used in copper process
no yes
Process related contamination of product:
toxic no 1) ye s corrosive no 1) yes biolog ical ha zard no ye s 2) explosive no ye s 2) radioactive no yes 2) other harmful substances no 1) yes
1) or not containing any amount of hazardous residues that exceed the permissible exposure limits
The product is free of any substances which are damaging to health.
Harmful substances, gases and/or
by-products
Please list all substances, gases, and by-products which the product may have come into contact with:
Trade/product name manufacturer
Precautions associated with substance
Legally binding declaration:
We he reby declare tha t the information o n this form is comp lete and a ccurate and tha t we will assume any further costs that may arise. Th e contaminated product will be dis­patched in accordance with the applicable regulations.
Organization/company
Address
Post code, place
Phone Fax
Email
Name
Company stamp
This form can be downloaded from our website. Copies: Original for addressee 1 copy for accompanying documents
1 copy for file of sender
yes
Seal product in plastic bag and mark it with a corresponding label.
2) Products thus contaminate d will not be accepted with­ out written evidence of decontami ­ n ation.
Chemical name (or sy mbol)
Action if human contact
EC Declaration of Conformity
We, INFICON, hereby declare that the equip­ment mentioned below complies with the pro­visions of the Directive relating to electromag­netic compatibility 2004/108/EC.
Products
Bayard-Alpert Pirani Gauge
BPG400 BPG400-SD BPG400-SP BPG400-SR
Standards
Harmonized and international/national standards and specifi­cations:
EN 61000-6-2:2005 (EMC: generic emission standard)
EN 61000-6-3:2007 (EMC: generic imm unity standard)
EN 61010-1:2001 (Safety requirements for electrical equip-
ment for measurement, control and laboratory use)
EN 61326-1:2006 (EMC requirements for electrical equip-
ment for measurement, control and laboratory use)
Manufacturer / Signatures
INFICON AG, Alte Landstrasse 6, LI-9496 Balzers
12 April 2010 12 April 2010
Dr. Urs Wälchli Managing Director
Claudio Christoffel Product Manager
LI–9496 Balzers Liechtenstein Tel +423 / 388 3111 Fax +423 / 388 3700 reachus@inficon.com
www.inficon.com
Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com
Artisan Technology Group is your source for quality
new and certied-used/pre-owned equipment
FAST SHIPPING AND
DELIVERY
TENS OF THOUSANDS OF IN-STOCK ITEMS
• EQUIPMENT DEMOS
HUNDREDS OF MANUFACTURERS
SUPPORTED
• LEASING/MONTHLY RENTALS
• ITAR CERTIFIED SECURE ASSET SOLUTIONS
SERVICE CENTER REPAIRS
Experienced engineers and technicians on staff at our full-service, in-house repair center
Instra
Remotely inspect equipment before purchasing with our interactive website at www.instraview.com
Contact us: (888) 88-SOURCE | sales@artisantg.com | www.artisantg.com
SM
REMOTE INSPECTION
View
WE BUY USED EQUIPMENT
Sell your excess, underutilized, and idle used equipment We also offer credit for buy-backs and trade-ins
www.artisantg.com/WeBuyEquipment
LOOKING FOR MORE INFORMATION?
Visit us on the web at www.artisantg.com for more information on price quotations, drivers, technical
specications, manuals, and documentation
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