GE
Sensing
HygroTrace
g
Ultra-Low Moisture
Transmitter
Features
• Rapid speed of response to both wet up and dry
down conditions comparable to high-end analyzers
• Accurate moisture measurement from 0 to
100 ppb
v
• Innovative measurement technique using newly
patented aluminum oxide sensor technology
• Simplified, compact “flow-through” tee sample
cell design
• Stainless steel VCR fittings
• CE certification and UL 508
• Easy-to-read large display
• Analog and digital outputs for full integration
• Compatible with PanaView™ interface software
• Installs out of the box in minutes
Applications
HygroTrace uses a newly patented technique to provide
accurate and reliable measurement at trace moisture
levels. Combining over 70 years of experience in
aluminum oxide sensor technologies by Panametrics and
General Eastern, this robust sensor provides the
sensitivity and speed of response in the ppbvrange
matched only by traditionally expensive analyzers.
• Ultra high purity (UHP) nitrogen and argon
• Cylinder, tank and truck filling applications
• Gas distribution systems in semiconductor
fabrication facilities
• Tool and machine manufacturers
HygroTrace is a new addition to
the extensive Panametrics and
General Eastern product lines
for ultra-low PPB moisture
applications.
GE
Sensing
HygroTrace is a compact moisture transmitter designed
to meet the technical requirements of the semiconductor
industry. HygroTrace offers accuracy not commonly
found in a transmitter and the speed of response of a
full-featured analyzer at a fraction of the cost. Now you
can monitor multiple points of measurements for less
than the cost of one analyzer and without installation
constrictions. HygroTrace’s unique and innovative sensor
measurement technique responds to wet up and dry
down conditions in minutes, minimizing moisture
intrusion in your process.
HygroTrace is designed for installation where space is at
a premium. The sensor is mounted on a “flow-through”
tee sample cell that can be installed directly into the
process stream or on a bypass leg of a gas distribution
network. No custom machining is required. The sample
cell uses a small volume sample and is composed of
components that minimize moisture adsorption that
adversely effects measurements.
HygroTrace features an integral backlit display to
provide easy viewing and a keypad to configure the
display, outputs, and other user functions and
diagnostics. The RS485 interface enables the transmitter
to be fully integrated into existing systems for OEM
applications and networks.
Patented Sensor Measurement
Technique
Traditionally, aluminum oxide sensors have not been
widely used for measuring trace levels of moisture
(<100 ppbv) due to sensor response time and calibration
stability at these levels. However, aluminum oxide
sensors offer many benefits to users, including a wide
measurement range, simple installation and minimal
temperature, pressure or gas composition effects.
By further investigating aluminum oxide moisture sensor
technology, GE Sensing has developed a new sensor,
manufactured with semiconductor techniques, that
applies a temperature pulse to ‘dry’ the sensor. Then the
re-adsorption rate is measured while holding a constant
sensor temperature. This measurement is proportional to
the moisture concentration in the sample gas.
The short measurement window length effectively filters
the long time constant variations in hardware and sensor
response. Only short time constant, oxide surface
adsorption contributes to the measurement. The end
product is a robust thin film sensor design that provides
the sensitivity and response time needed to effectively
measure parts per billion levels of moisture.
Wet Up Response
Dry Down Response
0
02
04
06
08
001
021
041
061
081
002
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GE
Sensing
HygroTrace
Specifications
Measurement Range
0 to 100 ppbvwith trend indication beyond the
calibrated range
Compatible Gases
Nitrogen and argon
Process Gas Temperature Range
14ºF to 95ºF (-10ºC to 35ºC)
Storage Temperature
-40ºF to 158ºF (-40ºC to 70ºC)
Warm-Up Time
Meets specified accuracy within 24 hours, after sensor
exposure <72 hours @ 25ºC and 60% RH
Calibrated Accuracy @ 77ºF (25ºC)
±20% of reading or ±5 ppbv, whichever is greater
Response Time
Less than 20 minutes for 95% of 25 ppbvstep change
Electrical
Power
20 to 28 VDC, 20 watts
Output: 4 to 20 mA analog, RS485 digital
Output Resolution: 14 bits
Display
128 X 64 LED backlit LCD
Display one measurement parameter and diagnostics
Mechanical
Sample Connection
In-line flow, ¼ inch (6.35mm) VCR process connection
Sample Flow Rate
1 to 4.3 SCFH (0.5 to 2 SLM)
Operating Pressure
0 to 10 psig (0 to 0.69 bar)
Proof Pressure
3000 psig (207 bar)
Enclosure
Aluminum construction; black color; powder coated finish
Dimensions: (h x w x d)
Overall: 7.3 in x 4.6 in x 2.5 in
(185 mm x 117 mm x 63.5 mm)
Weight: 2.5 lbs (1.13 g)
Certifications
Complies with EMC Directive 89/336/EEC and
PED 97/23/EC for DN < 25
UL 508
3.99 2.56
4.77
7.29
1/4”
VCR )ဎ*
g
©2007 GE. All rights reserved.
920-382D
All specifications are subject to change for product improvement without notice.
GE
®
is a registered trademark of General Electric Co. Other company or product
names mentioned in this document may be trademarks or registered trademarks
of their respective companies, which are not affiliated with GE.
www.gesensing.com
GE
Sensing
Moisture Sensor
Sensor Type
Thin-film aluminum oxide moisture sensor
Calibration
Each sensor is individually computer-calibrated against
known moisture concentrations
Calibration Interval
Sensor recalibration by GE is recommended every
6 to 12 months depending on application
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