Edwards nXDS15iR, nXDS20i, nXDS15iC, nXDS15i, nXDS6i Instruction Manual

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A735-01-880

Issue F

Instruction Manual

nXDS Scroll Pump

Description	Item Number

nXDS6i	A735-01-983
nXDS10i	A736-01-983
nXDS15i	A737-01-983
nXDS20i	A738-01-983
nXDS6iC	A735-02-983
nXDS10iC	A736-02-983
nXDS15iC	A737-02-983
nXDS20iC	A738-02-983
nXDS6iR	A735-03-983
nXDS10iR	A736-03-983
nXDS15iR	A737-03-983
nXDS20iR	A738-03-983

Original Instructions

Declaration of Conformity

Edwards Ltd,

Innovation Drive,

Burgess Hill,

West Sussex, RH15 9TW, UK

The following products:
nXDS6i scroll pump	100-127/200-240V, 50/60Hz	A735-01-983
nXDS10i scroll pump	100-127/200-240V, 50/60Hz	A736-01-983
nXDS15i scroll pump	100-127/200-240V, 50/60Hz	A737-01-983
nXDS20i scroll pump	100-127/200-240V, 50/60Hz	A738-01-983
nXDS6iC scroll pump	100-127/200-240V, 50/60Hz	A735-02-983
nXDS10iC scroll pump	100-127/200-240V, 50/60Hz	A736-02-983
nXDS15iC scroll pump	100-127/200-240V, 50/60Hz	A737-02-983
nXDS20iC scroll pump	100-127/200-240V, 50/60Hz	A738-02-983
nXDS6iR scroll pump	100-127/200-240V, 50/60Hz	A735-03-983
nXDS10iR scroll pump	100-127/200-240V, 50/60Hz	A736-03-983
nXDS15iR scroll pump	100-127/200-240V, 50/60Hz	A737-03-983
nXDS20iR scroll pump	100-127/200-240V, 50/60Hz	A738-03-983

Is in conformity with the relevant requirements of European CE legislation:

2006/42/EC	Machinery directive
2014/35/EU	Low voltage directive
2014/30/EU	Electromagnetic compatibility (EMC) directive
2014/34/EU	ATEX directive on use in potentially explosive atmospheres
	II 3 G Ex h IIB T4 Gc Internal Atmospheres Only, Tech File ref 209
2011/65/EU	Restriction of certain hazardous substances (RoHS) directive

Based on the relevant requirements of harmonised standards:

EN 1012-2:1996	Compressors and vacuum pumps. Safety requirements. Vacuum pumps
+A1:2009
BS EN ISO 80079-	Non-electrical equipment for explosive atmospheres. Basic method and requirement
36:2016
BS EN ISO 80079-	Non-electrical equipment for explosive atmospheres. Non-electrical type of
37:2016	constructional safety ‘c’
EN 61010-1:2010	Safety requirements for electrical equipment for measurement, control and
	laboratory use. General requirements
EN 61326-1:2013	Electrical equipment for measurement, control and laboratory use. EMC
	requirements. General requirements
	Class A Emissions, Industrial Immunity

The product also complies with the following:

CSA-C22.2	Safety requirements for electrical equipment for measurement, control and
No.61010-1-12	laboratory use – Part 1: General requirements
UL61010-1	Safety requirements for electrical equipment for measurement, control and
3rd Edition	laboratory use – Part 1: General requirements

This covers all product serial numbers from the date of this declaration onwards.

		19.10.2018, Burgess Hill

Mr Ian Keech		Date and Place
Vice President Engineering, High Vacuum Division

This product has been manufactured under a quality management system certified to ISO 9001:2015.

This declaration is based on the requirements of EN ISO 17050-1 and the relevant directives.

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<![endif]>P200-06-720-F

P200-10-019

Issue D

Material Declaration

In accordance with the requirements of the Chinese regulatory requirement on the Management Methods for the Restriction of the Use of Hazardous Substances in Electrical and Electronic Products Order No. 32 (also known as ‘China RoHS2’) and SJ/T 11364 Marking for the Restricted Use of Hazardous Substances in Electronic and Electrical Products:

Product Labels

Product

Product Label

Meaning

This product contains hazardous substances in at least one of the

All pumps in the

homogeneous materials used which are above the limit requirement

list below

in GB/T 26572 as detailed in the declaration table below.

These parts can safely be used for the environmental protection use

period as indicated.

Pump Type

Pump Size

RV Pumps

RV3,5,8,12, E Lab, nRVi

EM Small Pumps

E2M0.7, 1.5, E1M18, E2M18, 28, 30, nE2M40i

nEXT Pumps

nEXT 85, 240, 300, 400, Splitflow

nXDS pumps

nXDS 6, 10, 15, 20

EXT pumps

EXT75DX

XDS pumps

XDS35, 46, 100

Diaphragm

XDD 1, D lab

Turbo Pump Carts

T station, nEXPT, nEXT station

Materials Content Declaration

Hexavalent

Polybrominated

Part name

Lead

Mercury

Cadmium

Polybrominated

Chromium

diphenyl ethers

(Pb)

(Hg)

(Cd)

biphenyls (PBB)

(Cr VI)

(PBDE)

Cast Aluminium

Brass pipe Fittings

Brass Connectors

O GB/T 26572

O: Indicates that the hazardous substance contained in all of the homogeneous materials for this part is below the limit requirement in GB/T 26572.

X GB/T26572

X: Indicates that the hazardous substance contained in at least one of the homogeneous materials used for this part is above the limit requirement of GB/T26572.

NOTES: These products are EU RoHS compliant, the following Exemptions apply: 6(b) Lead as an alloying element in aluminium containing up to 0.4% by weight. 6(c) Copper alloy containing up to 4% lead by weight

Packaging Information

Pallet	Over-shipper	Protection Pieces	Support Braces

NW

Recyclable Natural Wood	Recyclable Cardboard	Recyclable Polypropylene	Recyclable Mild Steel

This page has been intentionally left blank.

			A735-01-880 Issue F

	Contents
	Section		Page
	1	Introduction ........................................................................................	1
	1.1	Scope of this manual ....................................................................................................	1
	1.2	ATEX directive implication .............................................................................................	2
	1.3	General description .....................................................................................................	2
	1.4	Pump controller..........................................................................................................	3
	1.5	Logic interface ...........................................................................................................	4
	1.6	Gas ballast control ......................................................................................................	4
	2	Technical data .....................................................................................	7
	2.1	Operating and storage conditions .....................................................................................	7
	2.2	Performance..............................................................................................................	7
	2.2.1	General...................................................................................................................	. 7
	2.2.2	Pumping media...........................................................................................................	8
	2.2.3	Performance characteristics ...........................................................................................	8
	2.3	Mechanical data ........................................................................................................	11
	2.3.1	General...................................................................................................................	11
	2.3.2	Sound and vibration data..............................................................................................	11
	2.3.3	Construction.............................................................................................................	11
	2.4	Electrical data ..........................................................................................................	11
	2.4.1	Electrical cables ........................................................................................................	12
	2.5	Logic interface data....................................................................................................	12
	2.6	LED indicators ...........................................................................................................	14
	3	Installation .......................................................................................	15
	3.1	Safety.....................................................................................................................	15
	3.2	System design considerations.........................................................................................	15
	3.3	Unpack and inspect ....................................................................................................	17
	3.4	Position the pump ......................................................................................................	17
	3.4.1	Mechanical fixing .......................................................................................................	17
	3.5	Connect to the vacuum system.......................................................................................	17
	3.6	Electrical installation ..................................................................................................	18
	3.6.1	Fuses and circuit breakers ............................................................................................	18
	3.6.2	Electrical supply connection ..........................................................................................	19
	3.6.3	Disconnect the pump from the electrical supply ..................................................................	19
	3.7	Connection for remote control and monitoring....................................................................	19
	3.7.1	Connect the logic interface to the control equipment ...........................................................	19
	4	Operation .........................................................................................	21
	4.1	Operational modes .....................................................................................................	21
	4.2	Manual operation .......................................................................................................	21
	4.2.1	Start and stop ...........................................................................................................	22
	4.2.2	Standby...................................................................................................................	22
	4.3	Parallel control and monitoring ......................................................................................	23
	4.4	Analogue speed control................................................................................................	24
	4.4.1	Hardware configuration ...............................................................................................	25
	4.4.2	Operation ................................................................................................................	25
	4.5	Auto-run..................................................................................................................	26
<![if ! IE]> <![endif]>gp/0281/01/18	4.6	Use of gas ballast control .............................................................................................	26
<![if ! IE]> <![endif]>gp/0281/01/18	4.6.1	Gas ballast control	26
	4.6.1	Gas ballast control	26
	4.7	Start up procedure .....................................................................................................	26
	4.8	To achieve ultimate vacuum..........................................................................................	27
	4.9	To pump condensable vapours .......................................................................................	27

	© Edwards Limited 2018. All rights reserved.		Page i

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A735-01-880 Issue F

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4.10

5.1

5.2

5.3

5.4

5.5

5.6

5.7

5.8

5.9

5.10

5.11

5.11.1

5.11.2

5.11.3

5.11.4

5.11.5

5.11.6

Shut down................................................................................................................	27
Maintenance......................................................................................	29
Safety information......................................................................................................	29
Maintenance plan.......................................................................................................	30
Inspect and clean the inlet strainer .................................................................................	30
Clean the external fan cover .........................................................................................	30
Check the pump performance (service indicator) .................................................................	30
Replace the tip-seals...................................................................................................	31
Replace the pump bearings (service indicator) ....................................................................	31
Replace the pump controller (service indicator) ..................................................................	31
Electrical safety check.................................................................................................	31
Service indicator codes ................................................................................................	32
Fault finding.............................................................................................................	32
The pump has failed to start or has stopped.......................................................................	32
The pump has failed to achieve the required performance .....................................................	32
The pump has poor ultimate vacuum................................................................................	33
The pump is noisy ......................................................................................................	33
The pump surface temperature is high .............................................................................	33
Alarm indicator codes..................................................................................................	34

6	Storage and disposal ............................................................................	37
6.1	Storage ...................................................................................................................	37
6.2	Disposal ..................................................................................................................	37
7	Spares and accessories .........................................................................	39
7.1	Introduction .............................................................................................................	39
7.2	Accessories ..............................................................................................................	40
7.2.1	Silencer...................................................................................................................	41
7.2.2	Gas ballast adaptor.....................................................................................................	41
7.2.3	Gas ballast adaptor blank .............................................................................................	41
7.2.4	Vibration isolators ......................................................................................................	41
7.2.5	Inlet/exhaust filter.....................................................................................................	41
7.2.6	Exhaust nozzle ..........................................................................................................	42
7.2.7	Chemical resistance conversion kit ..................................................................................	42
7.2.8	Electrical cables ........................................................................................................	42
7.2.9	Pump-to-controller cable .............................................................................................	42
7.3	Spares ....................................................................................................................	43
7.3.1	Tip-seal kit (Youtube video https://www.youtube.com/watch?v=vKnh9dxOyhE) ...........................	43
7.3.2	Cooling fan...............................................................................................................	43
7.3.3	Gas ballast knob ........................................................................................................	43
7.3.4	Silencer spares kit ......................................................................................................	43
7.3.5	Inlet/exhaust filter spares ............................................................................................	43
7.3.6	Bearing replacement kit (not field serviceable) ...................................................................	44
7.3.7	Exhaust and ballast valve kit .........................................................................................	44
	For return of equipment, complete the HS Forms at the end of this manual.

Page ii

		A735-01-880 Issue F
Illustrations
Figure		Page
1	nXDS scroll pump .........................................................................................................	3
2	Quick start guide (manual control mode).............................................................................	5
3	nXDS6i Performance characteristics ...................................................................................	9
4	nXDS10i Performance characteristics .................................................................................	9
5	nXDS15i Performance characteristics ................................................................................	10
6	nXDS20i Performance characteristics ................................................................................	10
7	LED indicators ............................................................................................................	14
8	Installation drawing .....................................................................................................	16
9	User interface panel ....................................................................................................	22
10	Logic interface connections - parallel control ......................................................................	23
11	Logic interface connections - analogue speed control.............................................................	24
12	Analogue speed control.................................................................................................	25
13	Poor ultimate vacuum flow chart .....................................................................................	33
14	Noisy pump flow chart ..................................................................................................	34
15	nXDS accessories.........................................................................................................	40
Tables
Table		Page
1	nXDS Control modes ......................................................................................................	6
2	Operating and storage conditions ......................................................................................	7
3	Environmental conditions ...............................................................................................	7
4	General characteristics ..................................................................................................	7
5	Performance characteristics ............................................................................................	8
6	General mechanical data...............................................................................................	11
7	Sound and vibration data...............................................................................................	11
8	Electrical ratings for continuous operation..........................................................................	11
9	Recommended regional supply protection...........................................................................	11
10	Recommended cord sets................................................................................................	12
11	Logic interface technical data.........................................................................................	12
12	Logic interface connector pins ........................................................................................	13
13	LED indicators ............................................................................................................	14
14	Maintenance plan........................................................................................................	30
15	Flashing service codes ..................................................................................................	32
16	Flashing error codes.....................................................................................................	35
17	Silencer....................................................................................................................	41
18	Gas ballast adaptor......................................................................................................	41
19	Gas ballast blank adaptor ..............................................................................................	41
20	Vibration isolators .......................................................................................................	41
21	Inlet/exhaust filter......................................................................................................	41
22	Exhaust nozzle ...........................................................................................................	42
23	Chemical resistance conversion kit ...................................................................................	42
24	Electrical cables .........................................................................................................	42
25	Pump-to-controller cables .............................................................................................	42
26	Tip-seal kit................................................................................................................	43
27	Cooling fan................................................................................................................	43
28	Gas ballast knob .........................................................................................................	43

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A735-01-880 Issue F

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29	Silencer spares kit .......................................................................................................	43
30	Inlet/exhaust filter spares .............................................................................................	43
31	Bearing replacement kit................................................................................................	44
32	Exhaust and ballast valve kit ..........................................................................................	44

Associated publications

Publication title	Publication number
Vacuum Pump and Vacuum System Safety	P400-40-100
nXDS Serial Comms Interface Instruction Manual	A735-01-860

Trademark credits

Edwards and the Edwards logo are trademarks of Edwards Limited, Innovation Drive, Burgess Hill, West Sussex, RH15 9TW, UK.

Page iv

A735-01-880 Issue F

1 Introduction

1.1Scope of this manual

This manual provides installation, operation and maintenance instructions for the Edwards nXDS series of scroll pump. The pump must be used as specified in this manual or the protection provided by the equipment may be impaired. Read this manual before installing and operating the pump.

Important safety information is highlighted as WARNING and CAUTION instructions; these instructions must be obeyed. The use of WARNINGS and CAUTIONS is defined below.

WARNING

Warnings are given where failure to observe the instruction could result in injury or death to people. The actual symbol shown varies according to the hazard.

CAUTION

Cautions are given where failure to observe the instruction could result in damage to the equipment, associated equipment and process.

Pressures are stated as absolute pressures unless otherwise stated.

The units used throughout this manual conform to the SI international system of units of measurement. The following warning labels may be present on the pump and used throughout the product documentation.

Warning – an appropriate safety instruction should be followed or a caution to a potential hazard exists.

Warning – dangerous voltage. Indicates hazards arising from dangerous voltages.

Warning – hot surfaces. To indicate that the marked item can be hot and should not be touched without taking precautions.

Warning – risk of explosion. Indicates the potential risk of explosion.

Warning – heavy object. Indicates the potential risk of physical injury and requires suitable lifting equipment to move.

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Page 1

A735-01-880 Issue F

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1.2

ATEX directive implication

This equipment is designed to meet the requirements of Group II Category 3G in respects to ignition sources internal to the pump. This classification is in accordance with Directive 2014/34/EU.

The pumping mechanism and its mechanical components exposed to the “INTERNAL ATMOSPHERES” within the nXDS pump system is defined as: equipment group II; equipment category 3 – in accordance with the ATEX directive. This designation ONLY applies to the mechanical pumping mechanism, which is hermetically sealed from the external pump system and its operating environment. An ATEX category has not been assigned in respect of potential ignition sources on the outside of the equipment as the equipment has not been designed for use where there is an external potentially explosive atmosphere.

There is no potential source of ignition within the pump during normal operation but there may be potential sources of ignition under conditions of rare or unexpected malfunction as defined in the Directive. As a result of this, it is necessary to consider the potential consequences of ignition sources occurring under rare or expected malfunction. (Ref ATEX137 1992/92/EC).

When flammable materials are present within the equipment you must:

Not allow air to enter the equipment.

Ensure the system is leak tight.

Use an inert gas purge (for example, nitrogen) to dilute any flammable gasses or vapours entering the pump inlet, and/or use an inert gas purge to reduce the concentration of flammable gases or vapours in the pump and in the exhaust pipeline, to less than one quarter of the gases published Lower Explosion Limits (LEL).

Do not pump pyrophoric materials, process debris could produce an ignition source on the scroll surface.

Do not locate the pump in an ATEX zoned area, the ATEX specification is not applicable for external atmospheres.

When planning to pump hazardous substances with this pump, read the related chapters in the Safety Booklet and in these Operating Instructions first.

Further details can be obtained by contacting Edwards.

1.3General description

The nXDS pump is shown in Figure 1.

The nXDS pump is a truly dry vacuum pump as all the bearings, with their hydrocarbon lubricant, are isolated from the vacuum space. The nXDS pump is suitable for use on vapour handling processes, and may be used for some pumping applications involving corrosive substances. For information on pumping flammable gases, contact Edwards.

The body of the pump includes a fixed scroll and an orbiting scroll. The orbiting scroll is controlled by an electric motor through an eccentric cam on the motor drive shaft. The movement of the orbiting scroll, meshed with the fixed scroll, forms successive crescent shaped volumes in the pump. Gas that enters the pump through the inlet is compressed by the movement of the orbiting scroll and swept towards the centre of the fixed scroll. The compressed gas enters the exhaust port near the centre of the fixed scroll and is exhausted from the pump through the outlet.

Refer to Section 2.1 for details of operating conditions.

Page 2

Edwards nXDS15iR, nXDS20i, nXDS15iC, nXDS15i, nXDS6i Instruction Manual

A735-01-880 Issue F

1.4Pump controller

The integral pump controller manages the supply of current to a three-phase electric motor in accordance with operating conditions. The controller monitors power and temperature, and will protect the pump in the event of operation under sustained high load or under fault conditions.

The controller provides the user interface (refer to Figure 1). The pump may be operated in these modes:

Manually, using the buttons on the interface panel. Refer to Figures 2 and 9.

Remotely via serial communications or digital and analogue process control (parallel), via the 15-way D-type logic interface connector. Refer to Section 1.5.

Figure 1 - nXDS scroll pump

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1.	Lifting eye	7.	15-way D-type connector
2.	NW25 inlet port	8.	USB port (service mode only)
3.	Gas ballast control	9.	User interface panel
4.	Cooling fan	10. Mains power connector
5.	NW25 exhaust port	11. Secondary earth bond point
6.	Rubber feet

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A735-01-880 Issue F

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1.5Logic interface

The pump controller can be operated via the 15-way D-type logic interface connector. The signals on the logic interface are of the following types:

Control inputs: these are switch-type and analogue signals that are used to control the pump

Status outputs: these outputs identify the status of the system Tab

The logic interface has been designed to support both serial control, parallel control and monitoring, operating though one connector. For serial control either RS232 or RS485 can be selected.

For Control Modes refer to Table 1.

For Logic interface data refer to Section 2.5.

1.6Gas ballast control

To pump high vapour loads, gas ballast can be delivered into the pump to prevent condensation of the vapour carried by the pumped gases.

Air can be introduced to the low vacuum stages through the gas ballast control (Figure 1, item 3). Alternatively, an inert gas such as nitrogen can be supplied through a suitable external valve and by using the appropriate adaptor, available as an accessory. Refer to Section 7.

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Figure 2 - Quick start guide (manual control mode)

A735-01-880 Issue F

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OPERATION	SELECT	STATUS	SECTION

Apply power	MAINS	The pump will remain off (factory default).	3.6.2
Apply power	POWER	The POWER INDICATOR will illuminate.	3.6.2
	POWER	The POWER INDICATOR will illuminate.

		The pump will accelerate up to full running speed.*
Start the pump	START	The RUN INDICATOR will flash while accelerating.	4.2.1
Start the pump	BUTTON	The RUN INDICATOR will remain on when the pump reaches	4.2.1
	BUTTON	The RUN INDICATOR will remain on when the pump reaches
		full speed.

		The pump will decelerate and stop running.
Stop the pump	STOP BUTTON	The RUN INDICATOR will flash while decelerating.	4.2.1
		The RUN INDICATOR will go off when the pump has stopped.

Select and deselect	STANDBY MODE	When engaged, the STANDBY INDICATOR will illuminate and	4.2.2
the standby speed	SELECT BUTTON	the pump will run at the standby speed setting. Factory	4.2.2
the standby speed	SELECT BUTTON	default is 70% of full speed.

	STANDBY SPEED	The pump speed will increase.
Increase or	INCREASE	The INCREASE STANDBY INDICATOR will remain illuminated	4.2.2
decrease the pump	BUTTON	when the pump reaches a maximum of 100% of full speed.
speed when in	STANDBY SPEED	The pump speed will decrease.
standby mode	DECREASE	The DECREASE STANDBY INDICATOR will remain illuminated	4.2.2
	BUTTON	when the pump reaches a minimum of 67% of full speed.

Select and deselect	START or STOP	When engaged, the AUTO-RUN INDICATOR will illuminate.
the Auto-run	START or STOP	The pump will re-start automatically after the power has	4.5
the Auto-run	BUTTON (>8 sec)	The pump will re-start automatically after the power has	4.5
function	BUTTON (>8 sec)	been restored.

*The pump is set to 30 Hz rotational full speed (factory default)

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A735-01-880 Issue F

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Table 1 - nXDS Control modes

Configuration	Control mode	Manual/Section

	Manual control	Section 1
	via	Figure 2
	nXDS user interface	in this manual

	Serial control
	via (TIC)	Manual
	*Turbo Instrument	Manual
	*Turbo Instrument	D397-22-880
	Controller or	D397-22-880
	Controller or
	Turbo Controller

	Parallel control
	via (TAG)	Manual
	Turbo & Active Gauge	D395-92-880
	Controller

	Parallel control	Section 1.4
	via Digital I/O	Section 1.4
	via Digital I/O	in this manual
	e.g. PLC control	in this manual
	e.g. PLC control

	Parallel control
	via Digital I/O and	Section 4.4
	Analogue speed	Figure 11
	control source

	Serial control
	via RS232 or	Manual
	RS485 Comms	A735-01-860
	Interface

Note: Table 1 shows additional Edwards products, such as DX / nEXT Turbo pumps and active gauges that can be controlled at the same time using the various control methods displayed above.

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A735-01-880 Issue F

2 Technical data

WARNING

If the nXDS pump is operated outside the specified limits, the pump housing may become hot.

2.1Operating and storage conditions

Table 2 - Operating and storage conditions

Operating and storage conditions		nXDS

Ambient temperature range (storage)		–30 °C to +70 °C
Ambient temperature range (operation)		+5 °C to +40 °C
Maximum humidity (storage in original packaging)		95% RH
Maximum humidity (operation)		90% RH

Table 3 - Environmental conditions

Environmental conditions

Pollution	Pollution degree 2
Installation	Installation category II
Altitude restriction	Max 2000 m*
Area of use	Indoor

*The product can be used up to an altitude of 3000 m. However, the product is only ETL certified for use up to 2000 m.

2.2Performance

2.2.1General

Table 4 - General characteristics

Description	nXDS6i	nXDS10i	nXDS15i	nXDS20i

Peak pumping speed (m3h-1)	6.2	11.4	15.1	22.0
Maximum permitted continuous inlet pressure (mbar)*	200	200	200	50
Maximum permitted exhaust pressure (bar gauge)†	1	1	1	1
Maximum permitted gas ballast inlet pressure (bar gauge)	0.5	0.5	0.5	0.5

Maximum recommended chamber volume to pump down	25	50	75	75
from atmospheric pressure (litres)‡	25	50	75	75
from atmospheric pressure (litres)‡
Maximum pressure rise when stopped, with no inlet or gas	7	7	7	7
ballast flow (mbar)	7	7	7	7
ballast flow (mbar)

Leak tightness (mbar ls-1)	1 x 10-6	1 x 10-6	1 x 10-6	1 x 10-6

*These pumps are designed to pump down from atmospheric pressure, but prolonged operation at inlet

pressures higher than specified may reduce bearing life.

†These pumps are intended to exhaust to atmospheric pressure. High exhaust pressure may reduce tip-seal life.

‡Larger volumes may be pumped, but prolonged operation at inlet pressures higher than specified may reduce bearing life. The nXDS20i is optimised for constant throughput and is not recommended for cyclic duty.

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A735-01-880 Issue F

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Note: If the pump is operated outside the specified limits, then the pump housing may become hot; the controller may reduce the motor speed; and tip seal wear rate will be increased.

2.2.2Pumping media

WARNING

Do not use the nXDS pump to pump pyrophoric materials or dust.

The pump is designed to pump the following gases:

Air

Carbon dioxide

Helium

Carbon monoxide

Nitrogen

Argon

Oxygen (O2)

The pump can be used to pump water vapour. Caution must be taken to ensure that vapour does not condense inside the pump. Refer to Section 4.6.1 on how to prevent condensation of water vapour in the pump.

If pumping a vapour or gas not in the list above, contact Edwards for advice.

2.2.3Performance characteristics

The position of the gas ballast control defines the performance characteristics of the pump. These performance characteristics are listed in Table 5.

Table 5 - Performance characteristics

Description		nXDS6i	nXDS10i	nXDS15i	nXDS20i

Pump ultimate	Gas ballast position 0	2 x10-2	7 x 10-3	7 x 10-3	3 x 10-2
(mbar)	Gas ballast position 1	5 x 10-2	4 x 10-2	4 x 10-2	6 x 10-2
Gas ballast flow	Gas ballast position 1	12	16	31	24
(l min-1)	Gas ballast position 1	12	16	31	24
(l min-1)

Page 8

+ 36 hidden pages

Edwards nXDS15iR, nXDS20i, nXDS15iC, nXDS15i, nXDS6i Instruction Manual

Contents

Illustrations

Tables

Associated publications

1 Introduction

1.1Scope of this manual

ATEX directive implication

1.3General description

1.4Pump controller

1.5Logic interface

1.6Gas ballast control

2 Technical data

Operating and storage conditions

2.2Performance

2.2.1General

2.2.2Pumping media

2.2.3Performance characteristics